U.S. patent application number 10/877001 was filed with the patent office on 2005-03-10 for rule based system and method for automatically generating photomask orders by conditioning information from a customer's computer system.
Invention is credited to Cahalane, Daniel J., Croke, Charles E., Ridgway, Nick, Suttile, Edward J..
Application Number | 20050055659 10/877001 |
Document ID | / |
Family ID | 34703862 |
Filed Date | 2005-03-10 |
United States Patent
Application |
20050055659 |
Kind Code |
A1 |
Croke, Charles E. ; et
al. |
March 10, 2005 |
Rule based system and method for automatically generating photomask
orders by conditioning information from a customer's computer
system
Abstract
A system for generating photomask orders in a specified format
includes at least one template or order for entry and storage of
photomask order data, wherein the at least one template or order is
created based upon requirements of a specified photomask order
format. The system includes at least one set of rules corresponding
to the at least one template or order, wherein the set of rules
includes instructions which insure that a user enter complete
information into the at least one template or order as required by
the specified order format. A graphical user interface is
associated with the at least one template or order, wherein the
user can access the at least one template or order to enter
photomask order data and create an order in a specified format. A
data processing mechanism imports electronic information from
external media into the at least one template or order.
Inventors: |
Croke, Charles E.;
(Oakville, CT) ; Suttile, Edward J.; (Oxford,
CT) ; Cahalane, Daniel J.; (New Milford, CT) ;
Ridgway, Nick; (Heavily, GB) |
Correspondence
Address: |
AMSTER, ROTHSTEIN & EBENSTEIN
90 PARK AVENUE
NEW YORK
NY
10016
|
Family ID: |
34703862 |
Appl. No.: |
10/877001 |
Filed: |
June 25, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10877001 |
Jun 25, 2004 |
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10209254 |
Jul 30, 2002 |
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6842881 |
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Current U.S.
Class: |
716/50 ;
700/121 |
Current CPC
Class: |
G06F 2111/04 20200101;
G06F 30/00 20200101; G06F 19/00 20130101; G03F 1/68 20130101 |
Class at
Publication: |
716/019 ;
700/121 |
International
Class: |
G06F 017/50; G06F
019/00 |
Claims
What is claimed is:
1. A system for generating photomask orders in a specified format
comprising: at least one template or order for entry and storage of
photomask order data, wherein said at least one template or order
is created based upon requirements of a specified photomask order
format; at least one set of rules corresponding to said at least
one template or order, wherein said set of rules includes
instructions which insure that a user enter complete information
into said at least one template or order as required by the
specified order format; a graphical user interface associated with
said at least one template or order, wherein the user can access
said at least one template or order to enter photomask order data
and create an order in a specified format; and a data processing
mechanism for importing electronic information from external media
into said at least one template or order.
2. The system of claim 1, wherein said data-processing mechanism
comprises instructions that map the data contained in said
electronic information to a format usable for said system for
generating photomask orders.
3. The system of claim 1, wherein said external media is located on
a remote computer system.
4. The system of claim 1, wherein said external media is located on
the same computer system as said graphical user interface.
5. The system of claim 1, wherein said electronic information
comprises information regarding one or more of the following:
logistics suppliers, equipment suppliers, parts suppliers,
photomask manufacturer, and transportation services.
6. The system of claim 1, wherein said system further comprises: a
custom module for receiving a command line to instruct said system
to access said electronic information from said external media.
7. The system of claim 1, wherein said system further comprises: a
message generator for alerting users of said system as to the
status of an order being generated.
8. The system of claim 7, wherein a message is generated by said
message generator in the form of one or more of the following: an
e-mail, a text message to be delivered over a communication
network, and a log file.
9. A system for generating photomask orders in a specified format
comprising: at least one template or order for entry and storage of
photomask order data, wherein said at least one templates or order
is created based upon requirements of a specified photomask order
format; at least one set of rules corresponding to at least one
templates or order, wherein said set of rules includes instructions
which insure that a user enter complete information into said
template or order as required by the specified order format; and a
data-processing mechanism for accessing one or more external
sources of electronic information, wherein said one or more sources
of electronic information are accessed through a data service
system.
10. The system of claim 9, wherein said data service system
comprises and enables users to simultaneously access one or more of
the following: Internet web sites, databases, intranets, and other
internal or external resources.
11. The system of claim 9, wherein said data-processing mechanism
comprises instructions that map the data contained in said
electronic information to a format usable for said system for
generating photomask orders.
12. The system of claim 9, wherein said one or more external
sources of electronic information is located on a remote computer
system.
13. The system of claim 9, wherein said at least one template or
order is created through a graphical user interface and said one or
more external sources of electronic information is located on the
same computer system as said graphical user interface.
14. The system of claim 9, wherein said electronic information
comprises information regarding one or more of the following:
logistics suppliers, equipment suppliers, parts suppliers,
photomask manufacturer, and transportation services.
15. The system of claim 9, further comprising: a custom module for
receiving a command line to instruct said system to access said one
or more sources of electronic information.
16. The system of claim 9, further comprising a message generator
for alerting users of said system as to the status of an order
being generated.
17. The system of claim 16, wherein a message is generated by said
message generator in the form of one or more of the following: an
e-mail, a text message to be delivered over a communication
network, and a log file.
18. A method for generating photomask orders in a specified format,
comprising: generating at least one order for the storage of
photomask order data, wherein said at least one order is created by
entering data into one or more templates governed by at least one
set of rules; and accessing electronic information from an external
database by a data processing mechanism to incorporate said
electronic information into said template.
19. The method of claim 17, wherein said data-processing mechanism
comprises instructions that map the data contained in said
electronic information to a format usable for said system for
generating photomask orders.
20. The method of claim 17, wherein said external database is
located on a remote computer system.
21. The method of claim 17, wherein said external database is
located on the same computer system as said graphical user
interface.
22. The method of claim 17, wherein said electronic information
comprises information regarding one or more of the following:
logistics suppliers, equipment suppliers, parts suppliers,
photomask manufacturer, and transportation services.
23. The method of claim 17, further comprising receiving a command
line to access said electronic information from said external
database.
24. The method of claim 17, further comprising generating a message
that alerts users as to the status of an order being generated.
25. The method of claim 17, wherein said message is in the form of
one or more of the following: an e-mail, a text message to be
delivered over a communication network, or a log file.
26. A method for generating photomask orders in a specified format,
comprising: generating at least one order for the storage of
photomask order data, wherein said at least one order is created by
entering data into at least one template governed by at least one
set of rules; accessing electronic information from a data service;
and incorporating said electronic information into said order.
27. The method of claim 26, wherein the step of accessing comprises
simultaneously accessing one or more of the following: Internet web
sites, databases, intranets, and other internal or external
resources.
28. The method of claim 26, wherein the step of incorporating
comprises mapping the data contained in said electronic information
to a format usable for generating photomask orders.
29. The method of claim 26, wherein said electronic information is
located on a remote computer system.
30. The method of claim 26, wherein said at least one order is
created through a graphical user interface and said electronic
information is located on the same computer system as said
graphical user interface.
31. The method of claim 26, wherein said electronic information
comprises information regarding one or more of the following:
logistics suppliers, equipment suppliers, parts suppliers,
photomask manufacturer, and transportation services.
32. The method of claim 26, further comprising receiving a command
line to access said electronic information from said data
service.
33. The method of claim 26, further comprising generating a message
that alerts users as to the status of an order being generated.
34. The method of claim 33, wherein said message is in the form of
one or more of the following: an e-mail, a text message to be
delivered over a communication network, and a log file.
35. A processor readable storage medium containing processor
readable code for programming a processor to perform a method
comprising the steps of: generating at least one order for the
storage of photomask order data, wherein said at least one order is
created by entering data into at least one template governed by at
least one set of rules; accessing electronic information from a
data service; and incorporating said electronic information into
said order.
36. The processor readable storage medium of claim 35, wherein the
step of accessing comprises simultaneously accessing one or more of
the following: Internet web sites, databases, intranets, and other
internal or external resources.
37. The processor readable storage medium of claim 35, wherein the
step of incorporating comprises mapping the data contained in said
electronic information to a format usable for generating photomask
orders.
38. The processor readable medium of claim 35, wherein said
electronic information is located on a remote computer system.
39. The processor readable medium of claim 35, wherein the data is
entered into the at least one template through a graphical user
interface and said electronic information is located on the same
computer system as said graphical user interface.
40. The processor readable medium of claim 35, wherein said
electronic information comprises information regarding one or more
of the following: logistics suppliers, equipment suppliers, parts
suppliers, photomask manufacturer, and transportation services.
41. The processor readable medium of claim 35, wherein the method
further comprises receiving a command line to access said
electronic information from said data service.
42. The processor readable medium of claim 35, wherein the method
further comprises generating a message that alerts users as to the
status of an order being generated.
43. The processor readable medium of claim 42, wherein said message
is in the form of one or more of the following: an e-mail, a text
message to be delivered over a communication network, and a log
file.
Description
RELATED APPLICATION
[0001] This application is a continuation-in-part of U.S. patent
application Ser. No. 10/209,254, filed Jul. 30, 2002, and is
related to U.S. patent application Ser. No. 10/099,622, filed Mar.
14, 2002.
FIELD OF THE INVENTION
[0002] The present invention generally relates to a rule based
system and method for automatically generating photomask orders in
a specified format, and more particularly, relates to a
software-based application which automatically generates photomask
orders in a specified format through the use of templates and rules
which guide a user through the process of generating a photomask
order in a complete and accurate manner. The rules and templates
are established based on the requirements of a particular standard
(e.g., SEMI P10) or propriety photomask order format and are
organized and stored in a manner which can be adapted to meet the
criteria of both modified and new photomask order formats now known
or hereinafter developed. Additionally, the system and method of
the present invention provides for the ability to generate new
photomask orders using existing photomask order data.
BACKGROUND OF THE INVENTION
[0003] Photomasks are high precision plates containing microscopic
images of electronic circuits. Photomasks are typically made from
very flat pieces of quartz or glass with a layer of chrome on one
side. Etched in the chrome is a portion of an electronic circuit
design. This circuit design on the mask is also called
"geometry".
[0004] A typical photomask used in the production of semiconductor
devices is formed from a "blank" or "undeveloped" photomask. As
shown in FIG. 1, a typical blank photomask 10 is comprised of three
or four layers. The first layer 11 is a layer of quartz or other
substantially transparent material, commonly referred to as the
substrate. The next layer is typically a layer of opaque material
12, such as Cr, which often includes a third layer of
antireflective material 13, such as CrO. The antireflective layer
may or may not be included in any given photomask. The top layer is
typically a layer of photosensitive resist material 14. Other types
of photomasks are also known and used including, but not limited
to, phase shift masks, embedded attenuated phase shift masks
("EAPSM") and alternating aperture phase shift masks ("AAPSM").
[0005] The process of manufacturing a photomask involves many steps
and can be time consuming. In this regard, to manufacturer a
photomask, the desired pattern of opaque material 12 to be created
on the photomask 10 is typically defined by an electronic data file
loaded into an exposure system which typically scans an electron
beam (E-beam) or laser beam in a raster or vector fashion across
the blank photomask. One such example of a raster scan exposure
system is described in U.S. Pat. No. 3,900,737 to Collier. Each
unique exposure system has its own software and format for
processing data to instruct the equipment in exposing the blank
photomask. As the E-beam or laser beam is scanned across the blank
photomask 10, the exposure system directs the E-beam or laser beam
at addressable locations on the photomask as defined by the
electronic data file. The areas of the photosensitive resist
material that are exposed to the E-beam or laser beam become
soluble while the unexposed portions remain insoluble. In order to
determine where the E-beam or laser beam should expose the
photoresist 14 on the blank photomask 10, and where it should not,
appropriate instructions to the processing equipment need to be
provided, in the form of a jobdeck.
[0006] After the exposure system has scanned the desired image onto
the photosensitive resist material 14, as shown in FIG. 2, the
soluble photosensitive resist material is removed by means well
known in the art, and the unexposed, insoluble photosensitive
resist material 14' remains adhered to the opaque material 13 and
12. Thus, the pattern to be formed on the photomask 10 is formed by
the remaining photosensitive resist material 14'.
[0007] The pattern is then transferred from the remaining
photoresist material 14' to the photomask 10 via known etch
processes to remove the antireflective material 13 and opaque
materials 12 in regions which are not covered by the remaining
photoresist 14'. There is a wide variety of etching processes known
in the art, including dry etching as well as wet etching, and thus
a wide variety of equipment used to perform such etching. After
etching is complete, the remaining photoresist material 14' is
stripped or removed and the photomask is completed, as shown in
FIG. 3. In the completed photomask, the pattern as previously
reflected by the remaining antireflective material 13' and opaque
materials 12' are located in regions where the remaining
photoresist 14' remain after the soluble materials were removed in
prior steps.
[0008] In order to determine if there are any unacceptable defects
in a particular photomask, it is necessary to inspect the
photomasks. A defect is any flaw affecting the geometry. This
includes chrome where it should not be (chrome spots, chrome
extensions, chrome bridging between geometry) or unwanted clear
areas (pin holes, clear extensions, clear breaks). A defect can
cause the customer's circuit not to function. The customer will
indicate in its defect specification the size of defects that will
affect their process. All defects that size and larger must be
repaired, or if they can not be repaired, the mask must be rejected
and rewritten.
[0009] Typically, automated mask inspection systems, such as those
manufactured by KLA-Tencor or Applied Materials, are used to detect
defects. Such automated systems direct an illumination beam at the
photomask and detect the intensity of the portion of the light beam
transmitted through and reflected back from the photomask. The
detected light intensity is then compared with expected light
intensity, and any deviation is noted as a defect. The details of
one system can be found in U.S. Pat. No. 5,563,702 assigned to
KLA-Tencor.
[0010] After passing inspection, a completed photomask is cleaned
of contaminants. Next, a pellicle may be applied to the completed
photomask to protect its critical pattern region from airborne
contamination. Subsequent through pellicle defect inspection may be
performed. In some instances, the photomask may be cut either
before or after a pellicle is applied.
[0011] To perform each of the manufacturing steps described above,
a semiconductor manufacturer (e.g., customer) must first provide a
photomask manufacturer with different types of data relating to the
photomask to be manufactured. In this regard, a customer typically
provides a photomask order which includes various types of
information and data which are needed to manufacture and process
the photomask, including, for example, data relating to the design
of the photomask, materials to be used, delivery dates, billing
information and other information needed to process the order and
manufacture the photomask.
[0012] A long standing problem in the manufacture of photomasks is
the amount of time it takes to manufacture a photomask from the
time a photomask order is received from a customer. In this regard,
the overall time it takes to process a photomask order and
manufacture a photomask can be lengthy, and thus, the overall
output of photomasks is not maximized. Part of this problem is
attributable to the fact that many customers who order photomasks
often place their orders in a variety of different formats which
are often not compatible with the photomask manufacturer's computer
system and/or manufacturing equipment. Accordingly, the photomask
manufacturer is often required to reformat the order data and
condition it into a different format which is compatible with its
computer system and/or manufacturing equipment, which can take a
great deal of time, and thus, delay the time it takes to
manufacture a photomask.
[0013] In an attempt to address these problems, the photomask
industry has developed various standard photomask order formats in
which photomask orders should be placed. For example, the SEMI P10
standard is one standard format used in the manufacture of
photomasks. Additionally, a few semiconductor manufacturers have
developed their own proprietary photomask order format in which
photomask orders are to be placed, rather than adopting a standard
format. These standard and proprietary photomask order formats were
created so that photomask orders would be received from customers
in a uniform format, thereby reducing the overall time it takes to
manufacture a photomask.
[0014] Although the use of such standard and/or proprietary
photomask order formats are useful in reducing the time it takes to
manufacture photomasks, many semiconductor manufacturers have been
reluctant to place their photomask orders in such standard and/or
proprietary formats for a variety of reasons. For example, the SEMI
P10 standard order format is quite complicated and requires the
customer placing the order to have a sophisticated working
knowledge of the requirements associated with such standard. Since
many semiconductor manufacturers do not manufacture photomask, such
manufacturers may not have the resources, time or ability to learn
the intricacies of such standard format. Thus, semiconductor
manufacturers often provide a photomask manufacturer with photomask
order data in an unorganized and often incomplete manner. As a
result, the photomask manufacturer is required to parse through
this data and organize it in a useful format (e.g., in the SEMI P10
format). Additionally, in those instances where incomplete
photomask order data is provided to a photomask manufacturer, such
manufacturer will be required to request the missing information
from the customer. As a result, a great deal of time is often
wasted in the process of obtaining a complete and accurate
photomask order, and thus, the overall time that it takes to
manufacturer a photomask can be greatly delayed. There has been a
long felt need in the field of photomask manufacture for a customer
side system and method for automatically generating a complete and
accurate photomask order in a standard and/or proprietary
format.
[0015] In the past, AlignRite Corporation (a predecessor
organization to Photronics, Inc.), attempted to expedite the
delivery of the electronic data through the use of an Internet
based delivery system. However, although the AlignRite System was
capable of rapid delivery of the photomask data from a customer to
the computer system of the photomask manufacturer and was capable
of validating the accuracy of this data in real time, this prior
system did not provide for the automated generation of photomask
order data in a single standard and/or proprietary format. In this
regard, once the data was received from the customer, standard
modifications to the data would also have to be entered manually by
operators. Each time a manual change would have to be entered, the
risk of human error increased and the overall length of the job
would be extended.
[0016] Others have disclosed systems in which manufacturing and
billing data are down-loaded over the Internet and verified on-line
automatically. One such system is described in PCT Publication
Number 02/03141, published on Jan. 10, 2002 to DuPont Photomask,
Inc. More particularly, the DuPont Publication discloses a system
in which photomask order data is entered on-line by a customer and
transmitted to a photomask manufacturer for processing. In this
system, a customer is prompted to enter photomask order data. Such
data is transmitted to a photomask manufacturer, who in turn
performs a diagnostic evaluation of the data. If any data is
incomplete or inaccurate, the system sends a message to the
customer notifying him of such error. Thereafter, the user must
correct the error. After the data has been validated by the
manufacturer (and corrected when necessary), the manufacturer
processes this data and puts it into a standard (or proprietary)
format, such as the SEMI P10 standard format.
[0017] Although useful for diagnostic purposes, the system of the
DuPont PCT Publication does not prevent errors from being entered
in a photomask order. In this regard, this system is only able to
identify errors in a photomask order after the order has been
entered by a customer and transmitted to a photomask manufacturer.
Upon receiving the order, the photomask manufacturer validates the
order information, and if it detects an error, sends an error
message to the customer and prompts the customer to correct such
error. Additionally, this system does not place the entered
photomask order data into a standard format until after it has been
validated and received by the photomask manufacturer. In other
words, the manufacturer is required to condition the data entered
by a customer into a standard format for manufacturer. As a result,
a great deal of time is wasted correcting the customer's data entry
mistakes and converting the data into a standard format. Thus,
there is a long felt need for a system and method which generates
photomask orders in a standard and/or proprietary order format and
prevents errors during data entry and prior to transmission to a
photomask manufacturer.
[0018] After the manufacturing steps described above are completed,
the completed photomask is sent to a customer for use to
manufacture semiconductor and other products. In particular,
photomasks are commonly used in the semiconductor industry to
transfer micro-scale images defining a semiconductor circuit onto a
silicon or gallium arsenide substrate or wafer. The process for
transferring an image from a photomask to a silicon substrate or
wafer is commonly referred to as lithography or microlithography.
Typically, as shown in FIG. 4, the semiconductor manufacturing
process comprises the steps of deposition, photolithography, and
etching. During deposition, a layer of either electrically
insulating or electrically conductive material (like a metal,
polysilicon or oxide) is deposited on the surface of a silicon
wafer. This material is then coated with a photosensitive resist.
The photomask is then used much the same way a photographic
negative is used to make a photograph. Photolithography involves
projecting the image on the photomask onto the wafer. If the image
on the photomask is projected several times side by side onto the
wafer, this is known as stepping and the photomask is called a
reticle.
[0019] As shown in FIG. 5, to create an image 21 on a semiconductor
wafer 20, a photomask 10 is interposed between the semiconductor
wafer 20, which includes a layer of photosensitive material, and an
optical system 22. Energy generated by an energy source 23,
commonly referred to as a Stepper, is inhibited from passing
through the areas of the photomask 10 where the opaque material is
present. Energy from the Stepper 23 passes through the transparent
portions of the quartz substrate 11 not covered by the opaque
material 12 and the antireflective material 13. The optical system
22 projects a scaled image 24 of the pattern of the opaque material
12 and 13 onto the semiconductor wafer 20 and causes a reaction in
the photosensitive material on the semiconductor wafer. The
solubility of the photosensitive material is changed in areas
exposed to the energy. In the case of a positive photolithographic
process, the exposed photosensitive material becomes soluble and
can be removed. In the case of a negative photolithographic
process, the exposed photosensitive material becomes insoluble and
unexposed soluble photosensitive material is removed.
[0020] After the soluble photosensitive material is removed, the
image or pattern formed in the insoluble photosensitive material is
transferred to the substrate by a process well known in the art
which is commonly referred to as etching. Once the pattern is
etched onto the substrate material, the remaining resist is removed
resulting in a finished product. A new layer of material and resist
is then deposited on the wafer and the image on the next photomask
is projected onto it. Again the wafer is developed and etched. This
process is repeated until the circuit is complete. Because, in a
typical semiconductor device many layers may be deposited, many
different photomasks may be necessary for the manufacture of even a
single semiconductor device. Indeed, if more than one piece of
equipment is used by a semiconductor manufacturer to manufacturer a
semiconductor device, it is possible more than one photomask may be
needed, even for each layer. Furthermore, because different types
of equipment may also be used to expose the photoresist in the
different production lines, even the multiple identical photomask
patterns may require additional variations in sizing, orientation,
scaling and other attributes to account for differences in the
semiconductor manufacturing equipment. Similar adjustments may also
be necessary to account for differences in the photomask
manufacturer's lithography equipment. These differences need to be
accounted for in the photomask manufacturing process.
[0021] While the prior art is of interest, the known methods and
apparatus of the prior art present several limitations which the
present invention seeks to overcome.
[0022] In particular, it is an object of the present invention to
provide a rule-based system and method for automatically generating
a photomask order into one or more standard and/or proprietary
formats, wherein the rules can be adapted or modified to meet any
number of different standard and/or proprietary formats now known
or hereinafter developed.
[0023] It is another object of the present invention to provide a
rule-based system and method for automatically generating a
photomask order into one or more standard and/or proprietary
formats, wherein the system and method requires a user to follow a
set of rules associated with a standard and/or proprietary format
for photomask orders.
[0024] It is another object of the present invention to provide a
rule-based system and method for automatically generating a
photomask order into one or more standard and/or proprietary
formats, wherein an order is generated by merging existing
photomask order(s) and/or templates containing photomask data into
a single, new order.
[0025] It is another object of the present invention to provide a
rule-based photomask order system and method for reducing photomask
order and data entry times.
[0026] It is another object of the present invention to provide a
rule-based photomask order system and method for reducing
transcription errors associated with the manual entry of photomask
orders.
[0027] It is another object of the present invention to provide a
rule-based photomask order system and method for increasing the
overall output of photomasks being manufactured.
[0028] It is another object of the present invention to solve the
shortcomings of the prior art.
[0029] Other objects will become apparent from the foregoing
description.
SUMMARY OF THE INVENTION
[0030] A system for generating photomask orders in a specified
format according to an exemplary embodiment of the invention
includes at least one template or order for entry and storage of
photomask order data, wherein the at least one template or order is
created based upon requirements of a specified photomask order
format, at least one set of rules corresponding to the at least one
template or order, wherein the set of rules includes instructions
which insure that a user enter complete information into the at
least one template or order as required by the specified order
format, a graphical user interface associated with the at least one
template or order, wherein the user can access the at least one
template or order to enter photomask order data and create an order
in a specified format, and a data processing mechanism for
importing electronic information from external media into the at
least one template or order.
[0031] A system for generating photomask orders in a specified
format according to another exemplary embodiment of the invention
includes at least one template or order for entry and storage of
photomask order data, wherein the at least one template or order is
created based upon requirements of a specified photomask order
format, at least one set of rules corresponding to the at least one
template or order, wherein the set of rules includes instructions
which insure that a user enter complete information into the
template or order as required by the specified order format, and a
data-processing mechanism for accessing one or more external
sources of electronic information, wherein the one or more sources
of electronic information are accessed through a data service
system.
[0032] A method for generating photomask orders in a specified
format according to an exemplary embodiment of the invention
includes generating at least one order for the storage of photomask
order data, wherein the at least one order is created by entering
data into one or more templates governed by at least one set of
rules, and accessing electronic information from an external
database by a data processing mechanism to incorporate the
electronic information into the one or more templates.
[0033] A method for generating photomask orders in a specified
format according to another exemplary embodiment of the invention
includes generating at least one order for the storage of photomask
order data, wherein the at least one order is created by entering
data into at least one template governed by at least one set of
rules, accessing electronic information from a data service, and
incorporating the electronic information into the order.
[0034] A processor readable storage medium according to an
exemplary embodiment of the invention contains processor readable
code for programming a processor to perform a method including the
steps of generating at least one order for the storage of photomask
order data, wherein the at least one order is created by entering
data into at least one template governed by at least one set of
rules, accessing electronic information from a data service, and
incorporating the electronic information into the order.
BRIEF DESCRIPTION OF THE DRAWINGS
[0035] The above and related objects, features and advantages of
the present invention will be more fully understood by reference to
the following, detailed description of the preferred, albeit
illustrative, embodiment of the present invention when taken in
conjunction with the accompanying figures, wherein:
[0036] FIG. 1 represents a blank or undeveloped photomask of the
prior art;
[0037] FIG. 2 represents the photomask of FIG. 1 after it has been
partially processed;
[0038] FIG. 3 represents the photomask of FIGS. 1 and 2 after it
has been fully processed;
[0039] FIG. 4 is a flowchart showing the method of using a
processed photomask to make or process a semiconductor wafer;
[0040] FIG. 5 shows the process of making a semiconductor using a
wafer stepper; and
[0041] FIG. 6 shows a photomask order generating system according
to an exemplary embodiment of the invention.
DETAIL DESCRIPTION OF THE PREFERRED EMBODIMENT(S)
[0042] The present invention relates to a computerized rule-based
system and method for automatically generating photomask orders in
a specified format, wherein a photomask customer desiring to place
an order for a photomask is guided through the process of entering
an order in a complete and accurate manner in accordance with the
requirements of the specified order format. To carry out these
functions, the system and method utilizes the following four
components to generate a photomask order into a desired format: (1)
templates in which data is entered; (2) rules for converting the
data entered in the templates into a specified standard and/or
proprietary format; (3) a method for using templates to create a
photomask order in a specified format; and (4) a separate set of
rule for validating photomask order against a specified standard
format. Software is implemented in this system to associate
specific templates with specific rules to ensure that a customer
enters complete and accurate photomask order information. Likewise,
software is implemented in the system of the present invention to
associate specific photomask orders with specific rules to ensure
that a customer enters complete and accurate photomask order
information.
[0043] Before describing this software, it is first necessary to
describe the manner in which the templates, orders and rules are
stored and organized. More particularly, the system includes a
server and an external data storage media stored on the server.
Rules and templates for facilitating the entry of photomask order
data and for generating an order are stored in the external storage
media. The external data storage media may be a variety of
different types of storage media, including, but not limited to, a
relational database, an object-oriented class, an XML file and
other similar storage media now known or hereinafter developed. By
maintaining the storage media external to the system and by
providing flexibility in the type of storage media that can be used
with the system and method of the present invention, a variety of
different users and automated systems may operate the system
dynamically across a variety of different platforms.
[0044] In a preferred embodiment, a set of templates and orders are
created based on the requirements of a particular standard and/or
proprietary photomask order format. In this regard, the templates
and orders are organized as a hierarchy of components and
subcomponents, wherein each component and subcomponent is defined
by the requirements of a particular standard and/or proprietary
photomask order format. For example, a particular photomask order
format may require that the mask data component include certain
subcomponents, such as a title, barcode and pattern data, to name a
few. Each of these subcomponents may have further detailed
subcomponents ("child component"). For example, the pattern data
component, which is a subcomponent of the mask data component, may
have a set of child components associated therewith. Depending upon
the requirements of the standard and/or proprietary photomask order
format, these child components may have additional subcomponents as
well, which can in turn, have their own subcomponents and so forth
and so on. Each component and subcomponent is defined by a set of
attributes (e.g., binary, string, integer, real number, date,
Boolean, list, etc.). Since templates are used to create photomask
orders, the rules (discussed in more detail below) associated with
a given template can be can be a subset of the rules associated
with the photomask order that is created from the template. This
will allow the user to leave certain information or components out
of a template in the event that such information changes for each
new order created from the given template. Table 1 demonstrates an
example of how the components and subcomponents of the templates
and orders may be organized according to a standard and/or
proprietary photomask order format:
1TABLE 1 Order Supplied Pattern Data Pattern Group Pattern
Placement Mask Data Title Barcade OPC Definition Array Registration
Measure File Registration Die to Data Inspection Die to Die
Inspection Surface Definition Visual Inspection Pattern Critical
Dimension Die to Die Inspection Die to Data Inspection Field Patten
Critical Dimension Die to Die Inspection Die to Data Inspection
[0045] Templates and orders may be created manually using a
graphical user interface. Templates and orders may also be
automatically created or modified using information from other,
external media, including, but not limited to, non-formatted text
files, XML files, or some type of data storage device or mechanism.
For example, a customer's computer may include such files,
databases or other electronic information that would be useful in
creating a new template or order or providing missing information
for an existing template or order. A data-processing mechanism may
be used to import necessary information from these external media
into new or existing templates or orders. For example, a
translation or mapping software could be used to convert the
customer's files or databases into a format which would be needed
for the application. A commercially available example of such
software is Data Junction, a visual design tool for rapidly
integrating and transforming data between hundreds of applications
and structured data formats. However, any appropriate commercial or
proprietary translation or mapping software could be used to
accomplish this task. The external information may be imported into
the templates or orders either locally to the order processing
system, or via an existing network connection, like a wide area
network or local area network or internet, etc. They may also be
accepted by other known techniques such as FTP protocol, e-mail,
http, proprietary protocols, or any other known protocols that may
be available to transfer the information.
[0046] Once generated, either in whole or in part, in one
embodiment of the disclosed system, the orders and/or templates may
be transferred or accessed by different users of the system of the
present invention, or different systems of the present invention.
For example, one user at a customer may e-mail or otherwise
transfer a template or order to a different user at that customer
or a different customer so that the transferred template or order
could be used to make a new or modified template or order. Of
course, such transfer may occur by other methods of transfer such
as FTP protocol, transferring on disk or other storage medium,
etc.
[0047] When making a photomask order, customers may not have access
to, or knowledge of, all required information to complete an order.
In the past, the lack of such information would delay the order
completion process and require that such information be manually
collected from appropriate sources.
[0048] Under one embodiment of the present invention, such
information is automatically retrieved, at least in part, from
other sources which have the required information and require
little, or no input on the part of the customer. For example, in
the event that the information required to be entered into an order
which are governed by a first set of rules is unavailable to the
customer, the data processing mechanism of the present invention
can access a data-service that will provide the capability to
search for this required information. An example of such a
data-service would include ServiceObjects, which enables users to
simultaneously access Internet sites, databases, intranets and
other internal and external resources as if the content existed in
a single location and to package information, such as shipping
information, in a format that can be accessed by other programs. In
this example, the application would send a data query to the
data-service seeking specific shipping options that may be
available for the photomask being ordered. The data-service would
in turn, send the requested information back to the application,
which would then provide such information to the customer using the
application. Other types of data-services could also be used for
such information such as logistics, inventories, supply
characteristics, equipment availability, run times, tool up time,
level loading, capacity information, or any other such information
that a customer would desire in order to prepare a specific
photomask order.
[0049] The data-service may be either locally on the customer's
computer or network or remotely located from the customer's order
processing system, and may itself access data from any number or
type of remote computer systems (e.g., the logistic vendor's
computer system, the parts supplier's computer system, the
equipment supplier's computer system, the photomask manufacturer's
computer system, etc.) who publish in an interface known to both
the application software and the data-service, and can use any
number of acceptable protocols, including, for example, SOAP, XML,
XML-RPC, ebXML, HTML, etc. The data-service may search (e.g., by
query) these remote systems for the information not available to
the customer, and if available, retrieve such data. Optionally, the
data-service can be configured to verify data, if so desired. The
data-service's search mechanism may be configurable based on the
user's desired information (e.g., logistics, supply, processing
time, etc.) based on any number of possible parameters (e.g.,
costs, time, customer name, mask size, stepper equipment to be
used, etc.) provided by the user's system.
[0050] All operations performed by a person via a graphical user
interface may also be performed, at least in part, in an automated
manner; that is to say without human interaction. The invention may
provide access to this functionality via a plain-text instruction
set or command line. A plain text instruction set is a high level
programming language which can be interpreted into the application
programming interface to instruct the application to perform a
series of operations. For example, a command line stating "replace
device name `Device A` with device name `Device B`" could be sent
to the system by a user at the customer's network, or automatically
as detailed above. When the system receives this command line, it
would replace the device name in a specific template or order with
the new device name. Of course, this is merely one example of how
an instruction set could be used, and is not meant to be limiting
within the scope of the present invention. Custom modules may be
created for use on the customer's system to access this instruction
using any programming language capable of producing an ASCII or
binary file and executing an operating system command. Automated
implementation will allow access by authorized users to any
authorized system via an existing network connection. Typical
security measures such as firewalls, log-ins, passwords, etc. can
be used to protect the confidentiality of the database and mask
ordering system.
[0051] FIG. 6 illustrates an example of various potential
embodiments of the automated features of the present invention. As
shown in FIG. 6, the customer 110 has installed on its computer
system or network an order processing system 100 consistent with
the present invention. A user of this system may input a partial or
complete order or template in the manner described above. A file
130 located on the customer's network is used to create or modify
the template or order. To the extent that any information necessary
to complete the order is not inputted directly by the customer,
such information may be automatically retrieved by the order
processing system 100 automatically from: files, databases, or
other electronic information available on the customer system; a
system external to the customer which can be accessed remotely;
from one or more suppliers or vendors of the customer either
directly; and/or through a data-service system. The customer may
either input directly all the information necessary to complete an
order, some of the information necessary to complete an order with
the remainder coming from these other sources, or through an
external program initiate a process which will automatically
generate a complete order without having to access the graphical
user interface of the order processing system. In the embodiment
shown in FIG. 6, the information necessary to complete an order is
retrieved from a data-services system 120. The data-services system
120 queries configured resources, such as data suppliers A and B,
which can be, for example, suppliers or vendors of the customer.
The data-services system 120 may also gather information from the
customer itself. Once all the necessary information is retrieved
and entered into the proper template, an order document 140 is
generated which is sent to the photomask supplier 150.
[0052] The execution of any task in an automated manner, may
include alert notification of any system failure or process
invalidation based on either sets of rules. Notification is
configurable by the end user, and may be in the form of email,
messaging, log files or database entries. In one embodiment, the
notification feature automatically generates a message sent to a
distribution list of the names of people who will be involved in
the ordering of the photomask. This distribution list can be
established by any predetermined criteria. Once the message is
generated, each person on the distribution list may be
automatically notified that an order for a photomask has been
generated. Such notifications may include e-mail, beepers, mobile
telephones, etc. This automatic notification process can be set up
anywhere in the Customer's Network or even the Manufacturer's
Network and be triggered by any step that the Customer desires.
This example should not be treated as limiting to the present
invention and is merely illustrative of the type of notification
system that can be incorporated with the present invention.
[0053] Upon notification of the preparation of a new or modified
photomask order, the present invention can automatically forward
the order to the photomask manufacturer, if no errors are present,
or may wait for authorization from a user of the customer system.
If errors are identified, the customer may then manually edit the
order to fix such errors, and continue to process the order in a
normal manner.
[0054] In another embodiment, an incomplete photomask order may be
generated which includes design information in a format which can
be transferred to the photomask manufacturer's processing system to
allow the photomask manufacturer to verify the validity,
feasibility and/or desirability of the design. For example, a
customer may transfer a partial photomask order including fracture
instructions which could then be transmitted to the photomask
manufacturer to be analyzed for validity, feasibility and/or
desirability of the proposed design. This could be done either
automatically as described above, or manually. If automated, the
system could upon receipt of information regarding a proposed
partial photomask order generate the information necessary to
submit fracture instructions to a photomask supplier for further
analysis and evaluation. Upon submission of the information, the
photomask manufacturer may then also propose alternative designs
which may be more feasible or desirable from the
manufactures'perspective or otherwise. The results of the photomask
manufacturer's analysis may then be transmitted to the customer
computer system for further consideration by the customer on
whether to go forward with the order or modify the proposed
order.
[0055] Preferably, each template and order is stored in a database,
but may also be stored in other locations. A search engine may be
provided on which users can search for a particular template or
order stored in the database. Using the search engine, the user can
locate the appropriate templates that are needed to generate a
photomask in a particular order format. Once such templates are
located, data relating to a photomask order is entered by a user
(typically, a photomask customer desiring to place an order for a
photomask). The user can also use the search engine to locate
existing photomask orders for the purpose of completing the data
entry or modifying their content, as described below.
[0056] As noted above, a customer may not have sufficient knowledge
of the requirements of a particular photomask order format, and
thus, may not enter all necessary information required by such
standards to complete an order. Additionally, customers are prone
to making data entry errors, and thus, may provide inaccurate
information. Accordingly, a first and second set of rules are
established and stored on the system to ensure that the customer
enters complete and accurate data into the templates and orders, as
required by a particular standard and/or proprietary photomask
order format.
[0057] In the preferred embodiment, the first set of rules are
established to ensure that a user inputs all necessary data to
output a complete photomask order, as specified by a particular
standard and/or proprietary photomask order format. Preferably, the
first set of rules are established based on the requirements of a
selected photomask order format. In this regard, the first set of
rules dictate whether data "must" be input, "can" be input and/or
"must not" be input into each component and subcomponent of a
template or order, as dictated by the specified photomask order
format. Additionally, the first set of rules should be configured
such that they will require the user to enter information into any
other components which are required (as set forth in a particular
standard and/or proprietary photomask order format) to complete a
photomask order.
[0058] Thus, for example, referring to Table 1, a particular
standard order format may require, with respect to the "Pattern"
template, that for all EAPSM orders: placement data and critical
dimensions data must be provided; die to die inspection data may be
provided; and die to data cannot be provided. Accordingly, rules
are established and associated with the appropriate templates (and
components and sub-components) which require that: 1) the user
"must" include placement data and critical dimension data; 2) the
user "can" include die to die inspection data; and 3) the user
"must not" include die to data inspection data. Accordingly, in
this example, when a user seeks to create an order for an EAPSM
using the system and method of the present invention, the rules
will: 1) require the user to input placement and critical dimension
data; 2) permit (but not require) a user to enter die to die
inspection data; and 3) preclude a user from entering die to data
inspection. Additionally, the selected order format may require
that in addition to Pattern Data, Array Registration data must also
be entered to complete a photomask order. Accordingly, the first
set of rules would also be configured such that once the user has
completed entering all the pattern data, the user will be guided to
the "Array Registration" template and be prompted to enter all
required data into that template (and any other corresponding
subcomponents of that template) as well. Similarly, if the standard
and/or proprietary photomask order format requires the entry of
data into any other templates to complete a photomask order, the
first set of rules will guide the user to such other templates
after the user has entered all data into the Array Registration
template, and prompt the user to enter all required data into such
template(s). Once the user has entered data in all required
templates, the user will be permitted to finalize the template
(subject to entering data according to the second set of rules as
discussed below).
[0059] Thus, as should be apparent, the first set of rules of the
present invention ensure that the user enters the necessary
information into the appropriate templates as required by a
particular standard and/or proprietary format to generate a
photomask order. Put another way, the rules guide a user through
the process of entering photomask order data to ensure that all
necessary order information is entered into the templates.
[0060] Additionally, the system and method also provide for a
second set of rules which ensure that a user inputs data in an
accurate and proper format, as specified by a particular standard
and/or proprietary photomask order format. As noted above, each
component and subcomponent of a template is defined by a set of
attributes (e.g., binary, string, integer, real number, date,
Boolean, list, etc.). Thus, in a preferred embodiment, a second set
of rules are established for each template and order that indicates
to the user whether the data entered into a particular template or
order "must", "can" and/or "must not" have a particular attribute,
as required by a particular standard and/or proprietary photomask
order format. For example, referring to Table 1, a particular
standard and/or proprietary photomask order format may require
that: 1) the data entered into the placement template "must" be an
integer; 2) the data entered into the title template "can" be a
string; and 3) the data entered into the critical dimension
template "must not" be a string. Accordingly, a rule is established
for the placement template which: 1) requires the user to enter an
integer in the placement template; 2) allows the user to enter a
string into the title template; and 3) prevents the user from
entering a string into the critical dimension template. Thus, as
should be apparent, the rules of the present invention ensure that
the user enters the appropriate type of information into each
template as required by a particular standard and/or proprietary
photomask order format to generate a photomask order. Put another
way, the second set of rules only permit the user to enter a
certain type of data into a template, and thus, reduce the
possibility of there being design errors and/or data entry errors
in the process of placing a photomask order.
[0061] In a preferred embodiment, the first and second set of rules
described herein are created and stored separately. As noted above,
the rules may be stored either internal or external to the system
in any different number of dynamic formats (e.g., as a database, an
object-oriented class, an XML file, etc.) so that the system may be
adapted to run on any number of platforms, depending the
preferences or a user and/or automated system. It should be noted,
however, that a single set of rules can be created and stored,
provided that such single set of rules both ensures that a user
both enters complete photomask order information (as described with
reference to the first set of rules) and enters accurate photomask
order information (as described with reference to the second set of
rules). Further, the first and second set of rules may be combined
as a single set of rules in a similar manner.
[0062] As noted above, the present invention includes a function to
associate specific first and second sets of rules with specific
templates, to ensure that a photomask order is generated in a
complete and accurate manner. In the preferred embodiment, this
functionality is provided in the form of a software-based
application installed on the computer of an entity desiring to
place an order for a photomask, such as a semiconductor
manufacturer. Unlike the prior art, this software is not dependent
on a given photomask manufacturer's manufacturing process. Rather,
the software of the present invention can be deployed as a
stand-alone secure application, a network distributed application
or a web-based "thin-client" application. Preferably, the software
is utilized in a client-server system, wherein a graphical user
interface (e.g., the client) connects to and retrieves data from a
database on the server. In all cases, the customer running the
software of the present invention is not required to access and/or
login to any external local area network of a photomask
manufacturer to place an order.
[0063] The manner in which the software of the present invention
associates specific rules with specific templates is now described.
In particular, since the templates are hierarchical collections of
data, each element of a template is interpreted by an associated
software object. In the preferred embodiment, rules are embedded
within the software objects and are responsible for the assembly of
the data entered in the templates. These rules are constraints or
instructions, such as an algorithm, and typically relate to one or
more attributes of the software object. Accordingly, with this
arrangement, it is possible to enter a complete and accurate
photomask order as the rules and templates are appropriately
associated with each other.
[0064] Additionally, the system is preferably configured to permit
the rules and templates to be separately updated should the need
arise. In this regard, the current standard photomask order format
is known as the SEMI P-10 standard format. However, it is
anticipated that as technological advances are made, a new standard
format may be developed to cover these advances, and thus, replace
the current SEMI P-10 standard format. Additionally, there are
currently many other international standard order formats that are
used by photomask manufacturers overseas. As with the SEMI P-10
format, it is expected that these international formats will also
change or be replaced over time. Thus, the system of the present
invention provides for the ability to update the rules and
templates to meet these changes. More particularly, the first and
second sets of rules are preferably stored as separate files from
each of the templates, which are in turn also each stored as
separate files. By keeping the rules and templates separate, any
modification to one will have no effect on the other. In this
regard, when the rules or templates are modified, there will be no
need for a correlative code change to a corresponding element where
none would be indicated by the proximate feature modification.
Additionally, by storing the rules and templates separately, the
possibility of the occurrence of a system seize-up (e.g., where
unanticipated changes to an embedded or inner-nested element might
cause an unanticipated failure) can be avoided. In this regard, if
rules and templates were not stored separately, independent
modification would be impossible. Each existing template, of which
there could be thousands, would then have to be modified
individually to include the new rules. Thus, as should be readily
apparent, the system and method of the present invention is not
limited to any one particular standard format, but rather can be
easily adapted to conform to the requirements of any current or
newly developed standard photomask order format. Similarly, a
customer may change its proprietary order format to meet any
changes associated with new developments or improved
technologies.
[0065] To modify the rules, software objects are established such
that the rules contained therein may affect one or more of its
attributes, its children or other rules contained within it. In
this regard, the rules are established such that only certain
specified attributes are affected by rules. Thus, since the
software objects, like templates, are hierarchical in nature, they
know both their parent and children. Accordingly, any time a child
object is modified, it notifies its parent of the area, rules or
attributes impacted by the change. As a result, any change made
anywhere within the hierarchy of rules is propagated through the
entire family. Accordingly, the rules have the capability to
enforce the addition of, or the removal of, any child element of
the parent. Thus, within the application, each object is
individually updateable through subsequent releases of the
software. Additionally, object parents maintain a standard
collection for each type of child element, which can be added or
removed while the template is being constructed.
[0066] Templates can also be modified in response to a modification
of a standard and/or proprietary photomask order format which
requires the addition of new attributes and/or subcomponents to be
added to hierarchy of orders and templates. In such instances, the
new relationships are defined for affected components and/or
subcomponents and new rules are dynamically added to the existing
rule schema.
[0067] To illustrate these features of the present invention, the
following example is now described. The current Semi P-10 standard
requires that a photomask order include, among other things: Mask
Order[ ], Mask Set [ ], Mask Definition [ ], and Pattern
Definition[ ]. Thus, according to this requirement, the following
templates would be established: SemiOrder Template, SemiMaskSet
Template, SemiMask Template and SemiPattern Template. Additionally,
a first and second set of rules for each of these templates would
be established which dictate whether data must be entered into each
of the templates and the type of data that can be entered into such
templates. However, at a later point in time, the Semi P-10
standard may be replaced by a new standard that requires a CD
component. Thus, the existing templates (e.g., SemiPattern) could
be modified to include, for example, a CD component to conform to a
modification of the metrology aspect of the SEMI P-10 standard.
Additionally, a new template could be created to conform to any
newly added aspects (e.g., registration) of the new SEMI standard.
Similarly, the already existing first and second set of rules could
be adapted to meet the changes associated with the modified CD
component aspect of the current SEMI P-10 standard. Additionally, a
new set of first and second set of rules could be created to
conform to the new registration feature of the new SEMI
standard.
[0068] Another aspect of the present invention is that it provides
for the ability to generate new photomask orders by: (1) merging
data into a new order from an already existing template having data
contained therein; (2) merging data into a new order from an
already existing order having data contained therein; or (3)
merging data into a new order from already existing templates and
orders. In this regard, whenever a user enters data into either a
template or creates an order, such template and/or order is saved
on the system of the present invention. Thereafter, a user is able
to access the already existing templates and/or orders and use the
data saved therein to generate a new order. By providing a user of
the system of the present invention with the ability to merge data
from already existing orders and/or templates, the process for
entering photomask order data is greatly reduced, thereby reducing
the overall time it takes to manufacture a photomask order. Each of
the three methods for merging data into an order is described
below.
[0069] In one embodiment, to create a new order from an existing
template(s), the user is prompted to create a new, blank order.
Next, the user is provided with the option of selecting templates
and/or orders which were created and saved from a previous
photomask order. Depending upon the type of photomask to be
manufactured from the new order, the user selects and loads the
most relevant template(s) stored in the relational database. The
selected template is displayed to the user with previously entered
data. For each non-null object within the template (e.g., the
object contains data), the user may either select the previously
entered data into the new order or over-write this data with new
data. Additionally, to the extent that a particular object within a
template is null (e.g., it is already empty), the user may enter
appropriate data within that object. Next, the rules established
for this order operate as described above to ensure that data is
accurately and completely entered. Thereafter, the software
processes this information and generates a new order based on this
information.
[0070] The process for creating a new order from an already
existing order is similar to the process of creating a new order
from an already existing template. In this embodiment, to create a
new order from an existing order(s), the user is prompted to create
a new, blank order. Next, the user is provided with the option of
selecting templates and/or orders which were created and saved from
a previous photomask order. Depending upon the type of photomask to
be manufactured from the new order, the user selects and loads the
relevant order(s) stored in a relational database. The selected
order is displayed to the user with previously entered data. For
each non-null object within the order, the user may either select
the previously entered data into the new order or over-write this
data with new data. Additionally, to the extent that a particular
object within an order is null, the user may enter appropriate data
within that object. Next, the rules established for this order
operate as described above to ensure that data is accurately and
completely entered. Thereafter, the software processes this
information and generates a new order based on this
information.
[0071] In yet another embodiment, to create a new order from both
an existing template(s) and order(s), the user is prompted to
create a new, blank order. Next, the user is provided with the
option of selecting templates and/or orders which were created and
saved from a previous photomask order. Depending upon the type of
photomask to be manufactured from the new order, the user selects
and loads the relevant template(s) stored in a relational database.
The selected template is displayed to the user with previously
entered data. For each non-null object within the template, the
user may either select the previously entered data into the new
order or over-write this data with new data. Additionally, to the
extent that a particular object within a template is null, the user
may enter appropriate data within that object. Next, the rules
established for this order operate as described above to ensure
that data is accurately and completely entered. Additionally,
previously saved orders may also be merged into the same order. In
this regard, the user can select and load previously placed
order(s) stored in a relational database. The selected order is
displayed to the user with previously entered data. For each
non-null object within the order (e.g., the object contains data),
the user may either select the previously entered data into the new
order or over-write this data with new data. Additionally, to the
extent that a particular object within a order is already empty,
the user may enter appropriate data within that object. Next, the
rules established for this order operate as described above to
ensure that data is accurately and completely entered. Once all of
the appropriate templates and orders have been merged into the new
order, the software processes this information and generates a new
order based on this information.
[0072] Now that the preferred embodiments of the present invention
have been shown and described in detail, various modifications and
improvements thereon will become readily apparent to those skilled
in the art. Accordingly, the spirit and scope of the present
invention is to be construed broadly and limited only by the
appended claims and not by the foregoing specification.
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