U.S. patent application number 10/882607 was filed with the patent office on 2004-12-02 for power conditioning module.
This patent application is currently assigned to Cooligy, Inc.. Invention is credited to Everett, George Carl JR., Goodson, Kenneth E., Kenny, Thomas William JR., Santiago, Juan G..
Application Number | 20040240245 10/882607 |
Document ID | / |
Family ID | 27659399 |
Filed Date | 2004-12-02 |
United States Patent
Application |
20040240245 |
Kind Code |
A1 |
Kenny, Thomas William JR. ;
et al. |
December 2, 2004 |
Power conditioning module
Abstract
In one aspect, the present invention is a technique of, and a
system for conditioning power for a consuming device. In this
regard, a power conditioning module, affixed to an integrated
circuit device, conditions power to be applied to the integrated
circuit device. The power conditioning module includes a
semiconductor substrate having a first interface and a second
interface wherein the first interface opposes the second interface.
The power conditioning module further includes a plurality of
interface vias, to provide electrical connection between the first
interface and the second interface, and a first set of pads,
disposed on the first interface and a second set of pads disposed
on the second interface. Each of the pads is connected to a
corresponding one of the interface vias on either the first or
second interface. The power conditioning module also includes
electrical circuitry, disposed within semiconductor substrate, to
condition the power to be applied to the integrated circuit device.
The electrical circuitry may be disposed on the first interface,
the second interface, or both interfaces. Moreover, the electrical
circuitry includes at least one voltage regulator and at least one
capacitor.
Inventors: |
Kenny, Thomas William JR.;
(San Carlos, CA) ; Goodson, Kenneth E.; (Belmont,
CA) ; Santiago, Juan G.; (Fremont, CA) ;
Everett, George Carl JR.; (Austin, TX) |
Correspondence
Address: |
HAVERSTOCK & OWENS LLP
ATTN: Thomas B. Haverstock
162 N. Wolfe Road
Sunnyvale
CA
94086
US
|
Assignee: |
Cooligy, Inc.
|
Family ID: |
27659399 |
Appl. No.: |
10/882607 |
Filed: |
June 30, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10882607 |
Jun 30, 2004 |
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10384000 |
Mar 7, 2003 |
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10384000 |
Mar 7, 2003 |
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10072137 |
Feb 7, 2002 |
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6606251 |
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Current U.S.
Class: |
363/144 |
Current CPC
Class: |
H01L 23/49827 20130101;
G06F 1/26 20130101; H01L 2224/05644 20130101; H01L 23/34 20130101;
H01L 2224/0615 20130101; H01L 23/473 20130101; H01L 2224/05647
20130101; H01L 2924/19105 20130101; H01L 2224/05573 20130101; H01L
2224/05624 20130101; H01L 2224/16 20130101; H01L 2224/13025
20130101; H01L 2224/05624 20130101; H01L 2924/00014 20130101; H01L
2224/05644 20130101; H01L 2924/00014 20130101; H01L 2224/05647
20130101; H01L 2924/00014 20130101 |
Class at
Publication: |
363/144 |
International
Class: |
H02M 001/00 |
Claims
1-92. (Canceled)
93. An integrated circuit device configureable to be coupled to a
circuit board, the integrated circuit device comprising a first
module for conditioning power applied to the integrated circuit
device, the first module including a substrate having a circuit
configured therein, the circuit including at least one voltage
regulator and at least one capacitor, wherein the first module
includes a plurality of electrical connectors in the substrate for
providing electrical connection between the circuit board and the
integrated circuit device.
94. The integrated circuit device according to claim 93 further
comprising a second module for capturing thermal energy produced by
the integrated circuit device, the second module coupled to the
first module and having a second plurality of electrical
connectors, wherein each of the second plurality of electrical
connectors is configured to be connected to a corresponding one of
the plurality of electrical connectors in the first module.
95-101. (Canceled)
Description
BACKGROUND OF THE INVENTION
[0001] This invention relates to a method and an apparatus for
electrical power conditioning and thermal capture/rejection
management systems; and more particularly, in one aspect, to
integrating electrical power conditioning techniques and heat
capture and removal techniques into or onto a common substrate,
such as silicon, germanium, gallium arsenic.
[0002] Electronic and electrical devices continue to demand
additional power as the number of transistors on a semiconductor
device, for example a microprocessor, increase dramatically. As a
result of that increasing demand, there is an increasing demand on
the power conditioning and heat rejection capabilities of systems
that support such devices. For example, as microprocessor speed and
transistor count increase, there is an increasing requirement for
electrical power (an increase in average power consumption)
conditioning. Further, as more and more functions are integrated
into the microprocessor, for example, the functions typically
performed by the floating point processors and video or graphics
processors, the power conditioning system must address or respond
to the rapidly varying temporal and spatial levels of power
consumption. Moreover, the increase in microprocessor speed and
transistor count, and the incorporation of more and more functions
into the microprocessor, have also created a rapidly increasing
requirement to capture and remove heat generated by such
microprocessors.
[0003] Power supplies are available to meet the power demands,
however, the power supply is often located some distance from the
consuming device. The finite wire lengths between the supply and
the device include capacitance and inductance that introduce time
delays in the delivery of power in response to changes in demand by
the consuming device. As mentioned above, the temporal change in
power consumption of, for example, a microprocessor, is increasing
as processor speeds increase and as more and more functions are
incorporated into the microprocessor. In response, power
conditioning electrical/electronics systems are being placed closer
and closer to the consuming device. Locating the power conditioning
elements, such as voltage regulators, capacitors, DC-DC converters,
near the consuming device may address the concerns regarding the
power conditioning needs.
[0004] A conventional configuration of the power conditioning
system is illustrated in FIG. 1. That system often includes
discrete capacitors, voltage regulators, and AC-DC or DC-DC
converters. Briefly, discrete capacitors typically are located in
physical proximity with and electrically connected to the
integrated circuit device. As such, sudden demands by the device
during operation may be satisfied by the charge stored on the
capacitor, thereby maintaining a relatively constant input voltage
for the time necessary for the increased demand to be addressed by
the supply. Such capacitors are typically known as bypass
capacitors, and are common elements in analog circuit design,
digital circuit design, and power device circuit design.
[0005] Voltage regulators are employed to take input power at a
high voltage (for example, 7 volts), and provide relatively stable
output power at a lower voltage (for example, 1 to 5 volts).
Voltage regulators tend to provide the lower voltage with greatly
increased immunity to variations in the high voltage level, or to
variations in current drawn by the consuming device. Regulators are
commonly employed in designs of analog and digital electronic power
conditioning systems, and are increasingly likely to be placed in
proximity to devices that have rapidly time-varying power
requirements.
[0006] AC-DC and DC-DC converters are employed to transform a
particular supply voltage from a convenient source into an
appropriate form for consumption by, for example, the integrated
circuit device. In many cases, system power electronics provide for
a single, relatively high voltage (for example, 48 volt DC, or 110
volt AC), whereas the integrated circuit device may require very
different supply voltages (for example, 1 to 5 volts, DC). Under
this circumstance, converters transform the power and provide the
input voltage required by the device. In some systems, converters
are located as close to the consuming device as possible so as to
provide stable voltage during variations in power consumption by
that device. (See, for example, U.S. Pat. Nos. 5,901,040;
6,191,945; and 6,285,550).
[0007] In addition to the power management considerations, the
increase in power consumption of these devices has imposed an
additional burden on the thermal management system (i.e., systems
that capture, remove and/or reject energy in the form of heat). In
response, thermal management systems have employed such
conventional techniques as heat sinks, fans, cold plates systems
that employ cooling water, and/or combinations thereof for
heat-capture, removal and rejection from, for example, an
integrated circuit device. Such conventional heat management
designs locate the thermal capture and rejection elements on or
very near the integrated circuit device packaging. (See, for
example, U.S. Pat. Nos. 6,191,945 and 6,285,550).
[0008] For example, with reference to FIG. 1, heat sinks generally
consist of metal plates with fins that transport heat from the
consuming device to the surrounding air by natural convection. Heat
sinks tend to be located or positioned directly on the integrated
circuit device packaging. Heat sinks serve to increase the area of
contact between the device and the surrounding air, thereby
reducing the temperature rise for a given power.
[0009] One technique to enhance the heat transfer between a heat
sink and the surrounding air is to employ a fan (typically rotating
blades driven by electric motors) in conjunction with a heat sink.
Fans may enhance the heat transfer between a heat sink and the
surrounding air by causing the air to circulate through the heat
sink with greater velocity than by natural convection.
[0010] Another technique used by conventional systems to enhance
the capabilities of the thermal management system is to reduce the
thermal resistance between the consuming device and the heat sink.
This often involves reducing the number and thickness of the layers
between the device, the device package and the heat sink. (See, for
example, U.S. Pat. Nos. 6,191,945 and 6,285,550).
[0011] In sum, conventional systems address power conditioning and
thermal management requirements by placing both the power
conditioning and heat capture and rejection elements as close to
the integrated circuit device as possible. This has led to the
typical, conventional layout that is illustrated in FIG. 1. With
reference to FIG. 1, the consuming device is an integrated circuit
device. The thermal management element is heat sink that is in
contact with the consuming device. In some implementation, the heat
capture, removal and rejection (via the heat sink) may be
relatively high.
[0012] Further, the power conditioning circuitry (capacitors,
voltage regulators, AC-DC and DC-DC converters) is positioned next
to the consuming device to reduce the wiring length between the
supply and the integrated circuit device.
[0013] While such conventional power conditioning and thermal
management techniques may be suitable for power consumption and
heat capture/rejection requirements for some current device,
conventional techniques are unlikely to address the anticipated
increases in both power consumption and heat capture, removal and
rejection requirements of other current devices as well as future
devices. Accordingly, there is a need for new power conditioning
techniques to accommodate anticipated increases in both power
consumption and heat capture, removal and/or rejection
requirements.
[0014] Moreover, there is a need for improved power conditioning
and thermal management techniques to accommodate increases in both
power consumption and heat capture, removal and rejection
requirements of current and future device. Further, there is a need
for improved power conditioning and thermal management techniques
for devices that may be implemented in space-constrained
applications (for example, portable computers). In this regard,
there is a need for incorporating the power conditioning and heat
capture/rejection elements into the same volume in a stacked
configuration as well as address the anticipated increases in both
power consumption and heat capture, removal and rejection
requirements.
[0015] In addition, there is a need for an improved technique(s) of
power conditioning and heat capture/rejection that integrate the
power conditioning and heat capture/rejection elements with the
consuming device (for example, an integrated circuit device)
itself--thereby reducing the deficiencies in the power conditioning
due to delays in signal propagation, reducing the thermal
resistance from the device to the heat sink due to physical
separation and additional interfaces. This results in increasing
the overall efficiency of both power conditioning and thermal
management capabilities of the system.
[0016] Moreover, there is a need for power conditioning and heat
capture/rejection elements that are stacked in a compact
configuration to facilitate a compact packaged device which limits
deficiencies in the power conditioning due to delays in signal
propagation, and enhances the thermal attributes of the packaged
device.
[0017] Further, while such conventional power conditioning
techniques may be suitable for some applications, there is a need
for a power conditioning technique that addresses the anticipated
increases in power consumption in all applications. For example,
there is a need for improved power conditioning technique for
devices that may be implemented in space-constrained applications.
Accordingly, there is a need for improved power conditioning
techniques to accommodate anticipated increases in power
consumption as well as applications having stringent space
requirements.
SUMMARY OF THE INVENTION
[0018] In a first principal aspect, the present invention is a
power conditioning module, affixed to an integrated circuit device,
for conditioning power to be applied to the integrated circuit
device. The power conditioning module includes a semiconductor
substrate having a first interface and a second interface wherein
the first interface opposes the second interface. The power
conditioning module further includes a plurality of interface vias,
to provide electrical connection between the first interface and
the second interface, and a first set of pads disposed on the first
interface, each of these pads is connected to a corresponding one
of the interface vias on the first interface. The power
conditioning module also includes a second set of pads disposed on
the second interface, each of these pads is connected to a
corresponding one of the interface vias on the second
interface.
[0019] In addition, the power conditioning module includes
electrical circuitry, disposed within a semiconductor substrate, to
condition the power to be applied to the integrated circuit device.
The electrical circuitry may be disposed on the first interface,
the second interface, or both interfaces. Moreover, the electrical
circuitry includes at least one voltage regulator and at least one
capacitor.
[0020] In one embodiment of this aspect of the invention, the power
conditioning module also includes at least one power pad disposed
on the second interface and at least one power via disposed in the
semiconductor substrate. The power via is electrically connected to
the power pad to provide electrical connection between the second
interface and at least one of the voltage regulator and capacitor.
The power via may be electrically connected to a power conduit
disposed in the semiconductor substrate. The combination of the
power pad, via and conduit provides electrical connection between
the second interface and at least one of the voltage regulator and
capacitor.
[0021] In another embodiment, the power conditioning module may
include at least one output power conduit, coupled to the
electrical circuitry, to provide conditioned power to the
integrated circuit device. The output power conduit may connect to
an input power pad disposed on the first interface. The input power
pad may correspond to an input of the integrated circuit
device.
[0022] The power conditioning module of this aspect of the
invention may also include current sensor(s), disposed in the
semiconductor substrate, to provide information that is
representative of a current consumption of the integrated circuit
and/or electrical circuit. A controller, coupled to the current
sensor, may receive that information and, in response, may adjust
the cooling of the integrated circuit and/or the power conditioning
module.
[0023] The power conditioning module may also include temperature
sensor(s), disposed in the semiconductor substrate, to provide
information that is representative of a temperature of a region in
proximity to the temperature sensor. A controller may be coupled to
the temperature sensor to receive that information and, in
response, may adjust the cooling of the integrated circuit and/or
the power conditioning module.
[0024] In a second principal aspect, the present invention is a
power conditioning and thermal management module adapted to couple
to an integrated circuit device. The power conditioning and thermal
management module includes a power conditioning element having a
first interface and a second interface, wherein the first interface
opposes the second interface. The power conditioning element
includes a semiconductor substrate, a plurality of interface vias,
disposed in the semiconductor substrate, and electrical circuitry
to condition the power to be applied to the integrated circuit
device. The electrical circuitry includes at least one voltage
regulator and at least one capacitor. The electrical circuitry may
be disposed on the first interface, second interface or both
interfaces of the power conditioning element.
[0025] The power conditioning and thermal management module of this
aspect of the invention further includes a thermal management
element having a first interface and a second interface wherein the
first interface opposes the second interface. The thermal
management element, during operation, uses a fluid having a liquid
phase to capture thermal energy. The thermal management element
includes a substrate, wherein the substrate includes at least a
portion of a micro channel disposed therein and configured to
permit fluid flow therethrough.
[0026] The thermal management element also may include a plurality
of interface vias to provide electrical connection between the
first interface and the second interface of the thermal management
element. The plurality of interface vias of the thermal management
element may connect to a corresponding one of the plurality of
interface vias of the power management element to provide
electrical connection between the first interface of the power
conditioning element and the second interface of the thermal
management element. In this regard, the first interface of the
thermal management element may be physically bonded to the second
interface of the power conditioning element.
[0027] The power conditioning and thermal management module of this
aspect of the invention may also include a pump (for example, an
electro-osmotic pump), adapted to connect to the micro channel, to
produce the flow of the fluid in the micro channel.
[0028] In one embodiment of this aspect of the invention, the power
conditioning and thermal management module includes current
sensor(s), disposed in the semiconductor substrate, to provide
information that is representative of a current consumption of the
integrated circuit and/or the electrical circuitry. The power
conditioning and thermal management module may also include a
controller, coupled to the current sensor, to receive the
information that is representative of the current consumption of
the integrated circuit. In response to that information, the
controller may adjust the flow of the fluid in the micro-channel.
In this regard, the controller may adjust a rate of flow of fluid
output by the pump.
[0029] In another embodiment, the power conditioning and thermal
management module includes temperature sensor(s), disposed in the
power conditioning and thermal management module, to provide
information which is representative of the temperature of a region
of the power conditioning and thermal management module or in a
region of the integrated circuit. A controller, coupled to the
temperature sensor, may receive the temperature indicative
information and, in response thereto, may adjust the flow of the
fluid in the micro channel. For example, the controller may adjust
a rate of flow of fluid output by the pump.
[0030] In yet another embodiment of this aspect of the invention,
the power conditioning and thermal management module includes at
least one power pad disposed on the second interface of the thermal
management element and at least one power via. The power via is
electrically connected to the power pad to provide electrical
connection between the second interface of the thermal management
element and at least one of the voltage regulator and capacitor.
The power via may be electrically connected to a power conduit
disposed in the semiconductor substrate of the power management
element. The power conduit provides electrical connection between
the power via and the electrical circuitry (i.e., at least one of
the voltage regulator and capacitor).
[0031] In another embodiment, the power conditioning and thermal
management module includes at least one power via disposed in the
substrate of the thermal management element, at least one power pad
disposed on the second interface of the thermal management element,
and at least one output power conduit, coupled to the electrical
circuitry, to provide conditioned power to the integrated circuit
device. The power pad of this embodiment is electrically connected
to the power via to provide electrical connection between the
second interface of the thermal management element and the
electrical circuitry. The output power conduit may connect to an
input power pad disposed on the first interface of the power
conditioning element. The input power pad corresponds to the power
input pin/pad of the integrated circuit device.
[0032] In a third principal aspect, the present invention is a
powerconditioning and thermal management module that couples to an
integrated circuit device. The power conditioning and thermal
management module has a first interface and a second interface
wherein the first interface opposes the second interface. The power
conditioning and thermal management module includes a semiconductor
substrate, a plurality of interface vias to provide electrical
connection between the first interface and the second interface,
and a first plurality of pads disposed on the first interface, each
of the first plurality of pads is connected to a corresponding one
of the interface vias on the first interface. The power
conditioning and thermal management module also includes a second
plurality of pads disposed on the second interface, each of the
second plurality of pads is connected to a corresponding one of the
interface vias on the second interface.
[0033] In addition, the power conditioning and thermal management
module includes electrical circuitry and a micro channel structure.
The electrical circuitry is disposed in the semiconductor substrate
and conditions the power to be applied to the integrated circuit
device. The electrical circuitry may be disposed on the first
interface, the second interface or both interfaces. The electrical
circuitry includes at least one voltage regulator and at least one
capacitor. The micro channel structure includes at least one micro
channel disposed in the semiconductor substrate to capture thermal
energy.
[0034] The power conditioning and thermal management module of this
aspect of the invention may also include current sensor(s),
temperature sensor(s), and a controller. The current sensor(s),
temperature sensor(s), and/or controller may be disposed in the
power conditioning and thermal management module. The controller,
may be coupled to the current sensor(s) and/or temperature
sensor(s), to receive the current or temperature indicative
information and, in response thereto, may adjust the rate of
capture of thermal energy by the micro channel structure. In this
regard, the controller may adjust the flow of the fluid in the
micro channel and/or a rate of flow of fluid output by the
pump.
[0035] In one embodiment of this aspect of the invention, the power
conditioning and thermal management module includes at least one
power pad disposed on the second interface and at least one power
via. The power pad is electrically connected to the power via to
provide electrical connection between the second interface and at
least one of the voltage regulator and capacitor. The power via may
be electrically connected to a power conduit disposed in the
semiconductor substrate. The power conduit provides electrical
connection between the power pad and at least one of the voltage
regulator and capacitor.
[0036] In another embodiment, the power conditioning and thermal
management module includes at least one output power conduit,
coupled to the electrical circuitry, to provide conditioned power
to the integrated circuit device. The output power conduit may
connect to an input power pad disposed on the first interface of
the power conditioning element. The input power pad may correspond
to the power input of the integrated circuit device.
BRIEF DESCRIPTION OF THE DRAWINGS
[0037] In the course of the detailed description to follow,
reference will be made to the attached drawings. These drawings
show different aspects of the present invention and, where
appropriate, reference numerals illustrating like structures,
components and/or elements in different figures are labeled
similarly. It is understood that various combinations of the
structures, components and/or elements other than those
specifically shown are contemplated and within the scope of the
present invention.
[0038] FIG. 1 is a block diagram representation of a conventional
approach to power conditioning and heat capture/rejection for
integrated circuit, for example, microprocessors;
[0039] FIG. 2 is a cross-sectional view of a discrete power
conditioning module in accordance with one aspect of the present
invention;
[0040] FIG. 3 is a block diagram representation of an embodiment of
the power conditioning module of FIG. 2 incorporated in an
integrated circuit application;
[0041] FIG. 4 is a block diagram representation of another
embodiment of the power conditioning and heat capture/rejection
module according to the present invention incorporated in an
integrated circuit application;
[0042] FIG. 5 is a cross-sectional view of a discrete power
conditioning module, including power and ground conduits, in
accordance with an aspect of the present invention;
[0043] FIG. 6 is a block diagram representation of a top view of
the interface of the power conditioning module according to one
aspect of the present invention;
[0044] FIG. 7 is a block diagram representation of an embodiment of
a power conditioning and thermal management module according to one
aspect of the present invention incorporated in an integrated
circuit application;
[0045] FIG. 8 is a cross-sectional view of a power conditioning and
thermal management module in accordance with one aspect of the
present invention;,
[0046] FIG. 9 is a block diagram representation of the power
conditioning and thermal management module of FIG. 8 incorporated
in an integrated circuit application;
[0047] FIG. 10A is a top of a micro channel configuration of a
thermal management element in accordance with one aspect of the
present invention;
[0048] FIG. 10B is a cross sectional view, along line AA, of the
micro channel configuration of a thermal management element
illustrated in FIG. 10A;
[0049] FIG. 11 is a block diagram representation of another
embodiment of the power conditioning and thermal management module,
incorporated in a dual-in-line package, face-down integrated
circuit application;
[0050] FIG. 12A is a block diagram representation of another
embodiment of the power conditioning and thermal management module,
incorporated in a dual-in-line package, face-up integrated circuit
application;
[0051] FIG. 12B is a block diagram representation of the embodiment
of the power conditioning and thermal management module,
incorporated in a dual-in-line package, face-up integrated circuit
application of FIG. 12A in conjunction with a package lid;
[0052] FIG. 13 is a cross-sectional view of another embodiment of
the power conditioning and thermal management module, mounted on a
printed circuit board, in accordance with the present
invention;
[0053] FIG. 14 is a cross-sectional view of another embodiment of
the power conditioning and thermal management module of the present
invention;
[0054] FIG. 15 is a block diagram representation of an embodiment
of the power conditioning and thermal management module of FIG. 12
incorporated in an integrated circuit application;
[0055] FIG. 16 is a cross-sectional view of another embodiment of
the power conditioning and thermal management module of the present
invention;
[0056] FIG. 17A is a block diagram representation and
cross-sectional view of an embodiment of the integrated power
conditioning and heat capture/rejection module of FIG. 16, in
conjunction with a discrete heat capture/rejection module,
incorporated in an integrated circuit application;
[0057] FIG. 17B is a block diagram representation and
cross-sectional view of an embodiment of the integrated power
conditioning and heat capture/rejection module of FIG. 16, in
conjunction with a discrete thermal capture element, incorporated
in an integrated circuit application;
[0058] FIG. 18 is a cross-sectional view of a power conditioning
and thermal management module in accordance with another aspect of
the present invention;
[0059] FIGS. 19A, 19B and 19C are block diagram representations of
the power conditioning and thermal management modules incorporated
in an integrated circuit application;
[0060] FIG. 20 is a block diagram representation of one embodiment
of a closed-loop power conditioning and thermal management system
according to the present invention;
[0061] FIG. 21 is a block diagram representation of another
embodiment of the closed-loop power conditioning and thermal
management system according to the present invention;
[0062] FIG. 22 is a block diagram representation of another
embodiment of the closed-loop power conditioning and thermal
management system according to the present invention;
[0063] FIG. 23 is a block diagram representation of another
embodiment of the power conditioning system according to the
present invention; and
[0064] FIG. 24 is a block diagram representation of a closed loop
power conditioning and thermal management system, including power
and thermal buses, according to another aspect of the
invention.
DETAILED DESCRIPTION
[0065] The present invention is directed to a technique of, and
system for conditioning the power applied to a consuming device
(for example, an integrated circuit device). The technique and
system of the present invention optimize or enhance the power
conditioning of the input power for a consuming device by stacking
the power conditioning circuitry on or under the consuming device.
Several embodiments of the present invention are well suited for
use in space-constrained applications, such as portable or handheld
applications, that require a well conditioned input power supply
for the consuming device. As such, these embodiments provide an
efficient, compact (reduced volume), cost effective power
conditioning system.
[0066] The present invention is also directed to a technique of,
and system for conditioning the power applied to a consuming device
as well as managing the heat capture, removal, and/or rejection of
a consuming device and the electrical circuitry for conditioning
the power. The technique and system of the present invention
optimize or enhance the power conditioning and thermal management
capabilities according to constraints dictated by, for example, the
environment of the application and the needs of the consuming
device and system. In this regard, in several of the embodiments,
the technique and system of the present invention are also well
suited for use in space-constrained applications that also require
high heat capture, removal and rejection capabilities. The
techniques and systems is of these embodiments may combine or
integrate the power conditioning circuitry and thermal management
element into the same substrate, substrates that have similar
footprints, and/or the substrate of the consuming device. As such,
the power conditioning and thermal management system of these
embodiments provide an efficient, compact, cost effective power
conditioning and thermal management techniques.
[0067] The present invention also includes embodiments that employ
a thermal management element that includes a controller that
receives feedback signals from parameter sensors (for example,
temperature, pressure and flow) and, responsively modifies the
fluid flow from a pump(s), or modifies the fluid flow in the micro
channel structure of a heat capture, removal and/or rejection
element.
[0068] The present invention may also employ a current sensor(s) to
provide information representative of the current consumption of
the consuming device and/or power conditioning circuitry to a
controller. The controller may, in response to that information,
anticipate a change in the heat generation of the consuming device
and/or power conditioning circuitry and modify the heat capture,
removal and/or rejection capabilities of the thermal management
element(s). For example, where a pump is employed to provide a
working fluid to capture and remove heat, the controller may modify
the fluid flow from a pump(s), or modify the fluid flow in the
micro channels, to address the anticipated thermal management needs
of the consuming device and/or the power conditioning element
caused by the change in power consumption.
[0069] To further reduce the footprint presented by the power
conditioning and thermal management system the thermal management
elements may be integrated with the power management module into a
common substrate or structure. In-this regard, the thermal
management element(s) may employ a micro channel structure to
capture and remove heat from the consuming device and/or the power
conditioning circuitry.
[0070] Moreover, the present invention provides a power and thermal
management module that may be located or arranged in a manner to
efficiently enhance or optimize the power conditioning capabilities
depending on the needs or requirements of the system. In addition,
location or arrangement of the power-and thermal management module
of the invention may enhance or optimize the heat capture, removal
and/or rejection capabilities of the system. In this regard, the
relative location or position of the power conditioning element(s)
and thermal management element(s) to each other, and to the
consuming device, may enhance or optimize the thermal management as
well as power conditioning performance of the system. Under certain
circumstances, more than one thermal management element may be
implemented in order to further enhance the heat capture and
rejection capabilities that may further enhance the reliability of
the system (for example, the power management module and the
consuming device).
[0071] With reference to FIGS. 2, 3 and 4, in one embodiment, the
present invention is power conditioning module 100 that may be
disposed between device 200 (for example, an integrated circuit
device such as a microprocessor) and printed circuit board 400, as
illustrated in FIG. 3, or between device 200 and thermal management
module 300, as illustrated in FIG. 4. The location of power
conditioning module 100, relative to consuming device 200 and
thermal management moddule 300, may be selected according to power,
thermal and space considerations of system 10.
[0072] The power conditioning module 100 of FIG. 2 includes a
semiconductor substrate 102, interface vias 104a-104h, interface
pads 106a-106p, power and ground vias 108a and 108b, power
and-ground pads 110a and 110b, and electrical circuitry 112. The
semiconductor substrate 102 includes a first interface for mating
or interfacing with device 200 and a second interface for mating or
interfacing with a substrate or board 400 (for example, a system
printed circuit board such as a mother or daughter board).
[0073] The semiconductor substrate 102 may be fabricated from a
number of well known materials including, for example, silicon or
germanium. In certain circumstances, it maybe advantageous to use a
material that is the same as, or has similar properties (for
example, thermal expansion) to the material used for the substrate
of device 200. Such a configuration may provide for enhanced
operating reliability since the similar thermal expansion
properties of power conditioning module 100 and device 200 may
minimize the potential for defects in the electrical connections
between power conditioning module 100 and device 200 typically
caused during operation because of differences in thermal expansion
coefficients. Moreover, using the same material or materials
permits the use of the same or similar fabrication techniques and
facilities/equipment thereby potentially reducing manufacturing
costs.
[0074] The interface vias 104a-104h provide electrical connection
for signals used by device 200 but not used by power conditioning
module 100 in conditioning the power for device 200. In this
regard, power conditioning module 100 provides the electrical
interconnects for other signals, such as the data and address
signals, used by device 200. For example, where device 200 is a
microprocessor device, interface vias 104a-104h may provide an
electrical pathway, through power conditioning module 100, between
the microprocessor and, for example DRAM or SRAM memory devices.
Thus, signals from other parts of system 10 (for example, DRAM or
SRAM memory devices) may travel or propagate by way of signal
traces on printed circuit board 400--through power conditioning
module 100--to device 200 by way of interface vias 104-104h.
[0075] The interface vias 104a-104h may be fabricated using
conventional processing techniques. Where the number of signals
that travel to and from device 200 is large, it may be preferable
to employ highly anisotropic etching to form narrow pathways in
substrate 102 and to deposit (for example, using CVD or LPCVD
techniques) a highly conductive material such as gold, copper,
aluminum, or highly doped polysilicon into the pathways to
facilitate a highly conductive interconnection.
[0076] With continued reference-to FIG. 2, power conditioning
module 100 of this embodiment may further include interface pads
106a-106p to facilitate greater conductivity between power
conditioning module 100 and device 200 or board 400. In this
regard, the interface pads 106a-106p allow for greater tolerance in
mating or interfacing power conditioning module 100 to board 400
and/or device 200. The interface pads 106a-106p may be fabricated
using conventional techniques from highly conductive material such
as gold, copper or aluminum. In a preferred embodiment, the same
material is used for both interface vias 104a-104h and interface
pads 106a-106p. Indeed, pads 106a-106p maybe fabricated in the same
or similar manner and materials as used in ball grid array ("BGA")
or chip scale package ("CSP") devices. The term "pad", as used
herein, includes the "ball" connection technology used in BGA
packages, CSP packages, and the like.
[0077] With continued reference to FIG. 2, power conditioning
module 100 may also include power and ground vias 108a and 108b to
provide a supply voltage, supply current, reference voltages,
and/or ground (supply) voltages to electrical circuitry 112. The
power and ground vias 108a and 108b may be designed and fabricated
in the same manner as interface vias 104a-104h.
[0078] It should be noted that, while only two power and ground
vias are illustrated, it will be appreciated by those skilled in
the art that additional power and ground vias may be employed where
necessary or advantageous. Moreover, it should be noted that power
and is ground vias 108a and 108b may provide other voltages or
currents that are necessary for electrical circuitry 112 to perform
the functions described herein or any other desirable
functions.
[0079] The power conditioning module 100 may also include power and
ground pads 110a and 110b to enhance electrical conductivity
between power conditioning module 100 and printed circuit board
400. The power and ground pads 110a and 110b, like interface pads
106a-106p, permit for greater tolerance or mismatch in mating or
interfacing power conditioning module 100 to board 400. The power
and ground pads 110a and 110b may be designed and fabricated in the
same manner as interface pads 106a-106p.
[0080] The power conditioning module 100 also includes electrical
circuitry 112. The electrical circuitry 112 delivers the
conditioned power to device 200. In particular, electrical
circuitry 112 provides appropriate conditioning of the voltage
parameters (for example, supply voltage and ground) and current
parameters (for example, supply, peak and typical operating
currents) required by device 200 so that the voltage and current
available to device 200 during, for example, normal operation,
standby, start-up and/or shutdown, are within the ranges or
tolerances required for proper and reliable operation. The
electrical circuitry 112 may include voltage regulators, bypass
capacitors, DC-DC converters, and/or AC-DC converters arranged,
configured, designed and interconnected using conventional
techniques and designs (for example, conventional CMOS or BJT
design and fabrication techniques). A brief overview of these
elements is provided in the background of the invention and, for
the sake of brevity, will not be repeated here.
[0081] Importantly, by locating electrical circuitry 112, such as
voltage regulators, bypass capacitors, ferrite beads, DC-DC
converters, and/or AC-DC converters near device 200, the
considerations identified above regarding power conditioning are
addressed. In addition, the horizontal and vertical space consumed
by electrical circuitry 112 is considerably reduced in relation to
the conventional techniques and systems illustrated in FIG. 1 and
contemplated in U.S. Pat. No. 6,285,550. Moreover, locating power
conditioning module 100 on or near thermal management module 300
facilitates efficient capture and rejection of heat generated by
electrical circuitry 112 in power conditioning module 100.
[0082] The electrical circuitry 112 illustrated in FIG. 2 is
disposed on the first interface of substrate 102. This embodiment
may facilitate interfacing with the electrical power and ground
inputs of device 200. However, it should be noted that electrical
circuitry 112 may also be disposed on the second interface as
illustrated in FIG. 4. This configuration may, for example, enhance
the thermal capture and rejection capabilities with respect to the
electrical circuitry of power conditioning module 100 and enhance
signal conductivity between device 200 and signal traces on printed
circuit board 400. In addition, the configuration illustrated in
FIG. 4 may also suite the packaging requirements of device 200 and
reduce the thermal exchange between power conditioning module 100
and consuming device 200. The embodiment of FIG. 4 may also
accommodate manufacturing constraints of electrical circuitry 112
of power conditioning module 100.
[0083] The electrical circuitry 112 may also be disposed on both
the first and second interfaces. A layout having electrical
circuitry 112 disposed on the first and second interfaces may
provide many of the advantages of both FIGS. 3 and 4.
[0084] While it is contemplated that the power conditioning
requirements of device 200 are satisfied by power conditioning
module 100, it should be noted that additional discrete electrical
power conditioning elements (for example, by-pass capacitors (not
shown) to provide filtering, in addition to that performed by power
conditioning module 100, also may be employed and disposed in
manners similar to that of conventional systems. Under this
circumstance, power conditioning module 100 does not perform all
power conditioning functions of system 10. Rather, power
conditioning module 100 performs power conditioning in conjunction
with discrete electrical power conditioning elements. These
discrete electrical power conditioning elements may perform initial
and/or supplemental conditioning of the voltage and current. For
example, a system may include a primary power supply (having
discrete components) to provide initial power conditioning of an
externally supplied power. The power conditioning module 100, in
turn, provides localized power conditioning of the power for device
200. In this embodiment, the primary power supply may provide
initial power conditioning for a plurality of devices in the
system, including device 200 (See, for example, FIG. 24). Thus,
many of the advantages of power conditioning module 100 are still
realized, however, the additional discrete electrical power
conditioning elements may increase the footprint of the power
conditioning of the overall system.
[0085] The reference voltages and currents used by electrical
circuitry 112 may be provided or routed to the particular elements
(for example, voltage regulators) of electrical circuitry 112 in
many ways. For example, with reference to FIG. 5, in one
embodiment, the voltage and current may be provided to electrical
circuitry 112 using power and ground conduits 114a and 114b that
are embedded within semiconductor substrate 102. The power and
ground conduits 114a and 114b extend from power and ground vias
108a and 108b and connect to electrical circuitry 112 as dictated
by the specific power conditioning circuit design implemented. In
this embodiment, power and ground vias 108a and 108b need not
extend the entire length of semiconductor substrate 102 (as
illustrated in FIG. 2) since power and ground conduits 114a and
114b connect well within substrate 102. The power and ground
conduits 114a and 114b may be fabricated using conductive materials
(for example, gold, copper, aluminum or a highly doped polysilicon)
and deposited using conventional semiconductor processing or
fabrication techniques (for example, conventional photolithography,
etching and deposition processes).
[0086] With reference to FIG. 6, power and ground conduits 114a and
114b may also be formed more towards the interface of semiconductor
substrate 102 (but still in substrate 102). In this embodiment,
power and ground vias 108 and 108b may extend the entire or nearly
the entire length of semiconductor substrate 102 since power and
ground conduits 114a and 114b connect to electrical circuitry 112
nearer the surface of the interface of substrate 102. The power and
ground conduits 114a and 114b of FIG. 6 extend from power and
ground vias 108a and 108b (not illustrated in FIG. 6) and connect
to electrical circuitry 112 which is also fabricated near the
interface of substrate 102. The power and ground conduits 114a and
114b may be fabricated using conventional processing or fabrication
techniques from conductive materials (for example, gold, copper,
aluminum or a highly doped polysilicon).
[0087] Another alternative for supplying power and ground to
electrical circuitry 112 is illustrated in FIGS. 4 and 7. In these
embodiments, power and ground are provided to electrical circuitry
112 using conventional wire bonding techniques that employ
conventional wires 120 and bond pads 122 as illustrated in FIG. 4.
Those skilled in the art will appreciate that there are many
techniques for providing power and ground connections from board
400 (or a power supply, not shown) to electrical circuitry 112. All
techniques for providing power and ground connections to and from
electrical circuitry 112, whether now known or later developed, are
intended to be within the scope of the present invention.
[0088] As mentioned above, electrical circuitry 112 conditions the
power, in a conventional manner, and delivers the required power to
device 200. The electrical circuitry 112 (for example, voltage
regulators, bypass capacitors, DC-DC converters, and/or AC-DC
converters) may be arranged and interconnected using conventional
techniques and designs (for example, conventional CMOS and/or BJT
circuit designs to accomplish the necessary power conditioning
functions) to provide device 200 with the appropriate voltage and
current during all aspects of operation as well as during start-up,
standby and shutdown.
[0089] The output power and/or ground of power conditioning module
100 may be provided or routed to device 200 using techniques
similar to those used in providing electrical circuit 112 with the
"unconditioned" power and ground from board 400 (or power supply,
not shown). In this regard, with reference to FIG. 5, in one
embodiment, electrical circuitry 112 supplies the conditioned power
and/or ground to device 200 using output power conduit 116a, output
ground conduit 116b, output power via 118a, and output ground via
118b. Signal traces may then provide electrical connection between
output power and ground conduits 116a and 116b to power and ground
inputs of device 200.
[0090] Alternatively, with continued reference to FIG. 5, output
power and output ground conduits 116a and 116b may be directly
routed to the specified pads on the interface of substrate 102 that
match or correspond to the power and ground inputs of device 200.
In this embodiment, vias 118a and 118b may be eliminated because
output power and ground conduits 116a and 116b are routed to the
appropriate power and ground inputs of device 200 without an
intermediate connection. For example, the output power and/or
ground of power conditioning module 100 may be routed to device 200
in the manner illustrated in FIG. 6.
[0091] With reference to FIG. 6, output power and ground conduits
116a, 116b and 116c are formed in substrate 102 using conventional
fabrication techniques and routed to a predetermined pads 106x,
106y and 106z which corresponds to power or ground inputs of device
200. In this embodiment, there may be no need for output power and
ground vias 118a and 118b since output power and ground conduits
116a and 116b are routed directly to specified pads 106x, 106y and
106z on the interface of substrate 102 that match or correspond to
the power and ground inputs of device 200. The power and ground
conduits 116a and 116b may be fabricated from electrically
conductive materials (for example, gold, copper, aluminum or a
highly doped polysilicon).
[0092] Further the output power and ground of power conditioning
module 100 may also be routed to device 200 in the manner
illustrated in FIG. 7. In this embodiment, output power and ground
are provided to device 200 using conventional wire bonding
techniques. In short, conventional wires 120 (and bond pads, not
shown) interconnect the output of power conditioning module 100 to
the appropriate inputs of device 200.
[0093] It should be noted that power conditioning module 100 may be
fabricated using a 2-stage process, in which vias 104 and 108 (and
other elements, for example power and ground conduits 114 and 116)
are formed first and electrical circuitry 112 fabricated using
conventional CMOS or BJT processing is formed second. Indeed, it
should be understood that any techniques for fabricating (as well
as the materials used therein) power conditioning module 100 now
known or later developed are intended to be within the scope of the
present invention.
[0094] Moreover, it should also be noted that with respect to all
of the embodiments described herein, those skilled in the art will
recognize and understand that there are many other suitable
techniques for providing the conditioned or output power and ground
from electrical circuitry 112 to device 200. Indeed, it should be
understood that any techniques for designing and fabricating the
pads, vias, conduits, electrical circuitry and wire bonds now known
or later developed are intended to be within the scope of the
present invention; in addition, it should be understood that any
materials used therein for the substrate, pads, vias, conduits,
electrical circuitry, and wire bonds which are now known or are
later developed are intended to be within the scope of the present
invention.
[0095] The present invention is advantageously suitable for use in
space-constrained environments. In this regard, locating the power
conditioning elements in essentially the same basic footprint as
the integrated circuit device permits the space around the
integrated circuit device to be used for other purposes. For
example, external static or dynamic memory may be located closer to
the microprocessor thereby reducing the flight times of signals
communicating with the memory. This may result in faster system
operation.
[0096] The power conditioning module 100 may be located between
device 200 and board 400 as illustrated in FIG. 3. In this
embodiment, a configuration of power conditioning module 100 as
illustrated in FIG. 2 is more suitable because the vias, among
other things, facilitate electrical connection for those signals
used by device 200 (but not by power conditioning module 100), for
example data and address signals for DRAM or SRAM memory
devices.
[0097] Alternatively, power conditioning module 100 may be located
between device 200 and thermal management module 300 as illustrated
in FIGS. 4 and 7. In light of the active electrical layer (for
example, electrical circuitry 112) of power conditioning module 100
being separated from board 400, it is necessary to form discrete
electrical connections from the active electrical layer to board
400. As mentioned above, this may be accomplished using wire bonds
120 as illustrated in FIGS. 4 and 7, or by using other known or
later developed interconnect technologies, all of which are
intended to be within the scope of the present invention.
[0098] Under certain circumstances, it may be advantageous to
locate thermal management module 300 remotely from the other
elements of system 10. In this regard, thermal management module
300 may be a fan that causes air to travel over the elements of
system 10 and thereby remove the heat generated by module 100 and
device 200. Such a configuration facilitates use of system 10 in a
space-constrained environment yet provides sufficient power
conditioning in a small footprint. In this embodiment, the remotely
located thermal management module 300 may be placed in an area
having sufficient volume for a fan, without interfering with other
system needs for placement of peripherals, such as memory or data
storage, in close proximity to device 200.
[0099] Further, in certain implementations, it may be advantageous
to implement a more compact thermal management module 300 than a
conventional fin-array heat sink as illustrated in FIG. 3. For
example, as will be discussed below, it may be advantageous to
employ a thermal capture element having a micro channel structure
to capture and remove heat generated by device 200 and/or
electrical circuitry 112. The heat energy may then be rejected by a
heat rejection element that is either local or remote relative to
device 200. Indeed, it should be understood that any techniques
known or later developed for heat capture and rejection apparatus
or sub-system, including any of those described herein, are
intended to be within the scope of the present invention.
[0100] Finally, under certain circumstances, thermal management
module 300 may be unnecessary altogether For example, the
introduction of "cool chips" such as the "Crusoe" processor from
Transmeta Inc., feature low thermal profiles. As such, system 10
may be implemented in a space-constrained environment (for example,
portable or handheld devices), due to its small footprint, and be
unconcerned with thermal capabilities and space considerations of
thermal management module 300.
[0101] In another aspect, the present invention is an integrated
power and thermal management module that incorporates the functions
of the power conditioning element (i.e., power conditioning) and
the thermal management element (i.e., heat capture, removal and/or
rejection) into a single structure. In contrast, in the previously
discussed embodiments, the modules for power conditioning and heat
capture, removal and rejection were separate structures that were
stacked, with device 200, in various configurations to form a
3-layer structure. In this aspect of the invention, the power
conditioning element and the thermal management element are
incorporated into a single structure. As such, additional
advantages (beyond those-advantages described above) may be
realized including, for example, a significant reduction in the
total volume occupied and direct physical contact may be achieved
between the consuming device, the power conditioning module and the
thermal management module--thereby facilitating enhanced thermal
capture and rejection for the power conditioning structure and/or
the consuming device.
[0102] This aspect of the invention also provides unique packaging
configurations of the combined power conditioning and thermal
management module--consuming device structure. It should be noted
that since the consuming device and the power conditioning module
capitalize on the thermal management capabilities of the integrated
power conditioning and thermal management module, additional heat
capture and rejection elements may be unnecessary. This may be
important because, in some instances, the operational temperatures
of the power conditioning module may approach that of device
200.
[0103] Moreover, "miniaturizing" the thermal management element
facilitates implementation of the integrated power conditioning and
thermal management module in highly space-constrained environments.
Where the heat capture and heat rejection aspects of the thermal
management element of module 1000 are separated such that the
thermal capture functions are integrated into a single structure
with the power conditioning functions, that single structure (i.e.,
power conditioning and thermal management module 1000 as in FIG. 8)
may be implemented within the packaging of an integrated circuit
device. (See, for example, FIG. 11). The heat rejection functions
may be accomplished using a heat sink disposed on a surface of the
device/package or located distant from the device/package.
[0104] With reference to FIGS. 8 and 9, power conditioning and
thermal management module 1000 includes power conditioning element
1100. The power conditioning element 1100 may be substantially
similar to power conditioning module 100 of FIGS. 2-7 and may
include, for example, vias, pads, and electrical circuitry as
described above. For the sake of brevity, the details and functions
of power conditioning element 1100 will not be repeated here.
[0105] The power conditioning and thermal management module 1000
also includes thermal management element 1200. Thermal management
element 1200 captures and removes the heat generated by device 200
and/or power conditioning element 1100 so that the temperature of
device 200 and/or power conditioning element 100 does not exceed a
given temperature. The thermal management element 1200 may also
reject the heat. Thus, in operation, thermal management element
1200 captures the heat generated by device 200 and power
conditioning element 1100 and removes that heat so that it may be
dispersed in the surrounding environment by convection or a heat
rejection element (for example, a conventional heat sink).
[0106] Power-conditioning and thermal management module 1000 may
include substrate 102a, in which a substantial portion of power
conditioning element 1100 is formed, and substrate 102b, in which a
portion of thermal management element 1200 is formed. The two
substrates may be bonded by, for example, anodic or fusion bonding,
or eutectic bonding, or adhesive bonding for glass and
semiconductor structures. Employing metal structures permits
bonding by welding, soldering, eutectic bonding, or adhesives. The
combined substrates 102a and 102b form power conditioning and
thermal management module 1000.
[0107] In this configuration, interface vias that provide
electrical connection between signal traces on printed circuit
board 400 and inputs/outputs of device 200 may be fabricated in two
steps. A separate set of interface vias are formed in each of the
substrates of power conditioning element 1100 and thermal
management element 1200. Thereafter, when the two substrates are
bonded, a corresponding one of the interface vias in substrate 102a
mates with a corresponding one of the interface vias in substrate
102b to form the interface via for module 1000.
[0108] To enhance the electrical continuity between the interface
vias in substrate 102a and 102b, intermediate interface pads may be
disposed on each of the mating interfaces of substrate 102a and
102b. The pads on each mating interface, after the two substrates
are bonded, contact a corresponding pad on the other mating
interface. This configuration allows for greater tolerance when
mating or interfacing power conditioning element 1100 and thermal
management element 1200 and, as such, may enhance the electrical
continuity between the exposed interfaces of power conditioning and
thermal management module 1000 when the bonded substrates are not
perfectly aligned.
[0109] Moreover, in those instances where external power is
provided to power conditioning element 1100 by way of power and
ground vias, the same fabrication techniques described above may be
employed to fabricate the power and ground vias. However, in those
instances where external power is provided to power conditioning
element 1100 by way of wire bonds, power and ground vias may not be
necessary.
[0110] With continued reference to FIGS. 8 and 9, in one
embodiment, thermal management element 1200 includes a micro
channel heat exchanger 1210 having a plurality of micro channels
1220. The micro channel heat exchanger 1210 also includes pump
1230, fluid inlet 1240, fluid outlet 1250, and tubing 1260 to
provide a fluid to micro channels 1220.
[0111] With reference to FIGS. 10A and 10B, micro heat exchanger
1210 may be, for example, a micro fabricated semiconductor
substrate, machined metal substrate, or machined glass substrate.
FIGS. 10A and 10B illustrate a top and cross sectional view,
respectively, of an exemplary micro channel structure 1220. The
substrate of thermal management element 1200 includes a pattern of
micro channels 1220-1 and 1220-2 etched into an interface. The
micro channels 1220-1 and 1220-2 may be arranged on the interface
of thermal management element 1200 according to the needs for heat
removal from particular regions of power conditioning element 1100.
The density of micro channel structure 1220 may be increased in
regions that correspond to anticipated or measured sources of
excessive heat, or the routing of micro channels 1220-1 and 1220-2
may be designed to reduce and/or minimize temperature gradients
from the inlet to the outlet of micro heat exchanger 1210. The
widths, depths, and shapes of micro channels 1220-1 and 1220-2 may
also be designed and fabricated to improve device temperature
uniformity or address a hot spot on device 200 and/or power
conditioning element 110. Indeed, the shape and arrangement of
micro channel structure 1220 may be designed or determined through
the assistance of thermal modeling tools described in a U.S. patent
application entitled "Electroosmotic Microchannel Cooling System",
filed by Kenny, et al. on Jan. 19, 2002. Many different types of
arrangements, layouts and configurations of micro heat exchanger
1210 and micro channels 1220-1 and 1220-2 are described and
illustrated in the U.S. patent application filed by Kenny et al. on
Jan. 19, 2002.
[0112] The U.S. patent application filed by Kenny et al. on Jan.
19, 2002 (entitled "Electroosmotic Microchannel Cooling System")
has not yet been assigned an Application Serial Number. The Kenny
et al. U.S. patent application will be referred to hereinafter as
"the Kenny et al. Application"). The Kenny et al. Application is
hereby incorporated, in its entirety, by reference herein.
[0113] It should be noted that micro channels 1220 may also extend
into the interface of power conditioning element 1100 as well. In
addition, micro channel structure 1220 may be formed on both the
first and second mating interfaces of thermal management module
1100. In this embodiment, micro heat exchanger 1210 may more
efficiently capture and remove heat from both device 200 and power
conditioning element 1200 due, in part, to more intimate physical
contact between the heat exchanger 1210 and both device 200 and
power conditioning element 1200.
[0114] The micro heat exchanger 1210 may also include more than one
fluid path, as illustrated in FIG. 10A, by micro channels 1220-1
and 1220-2. These independent paths may be connected to different
pumps 1230 and/or different heat rejection elements 1410, according
to the particular needs and/or designs of the application. As
mentioned above, many different types of arrangements, layouts and
configurations of micro heat exchanger 1210 and micro channels
1220-1 and 1220-2, including the multiple independent micro channel
configuration, are described and illustrated in the Kenny et al.
Application, which are again hereby incorporated by reference.
[0115] The pump 1230 may be any type of pumping device that
provides the flow and pressure necessary to capture the heat
generated in device 200 and/or power conditioning element 1100. In
this regard, pump may be an electro-osmotic type pumping device
like that described and illustrated in the Kenny et al.
Application. The electro-osmotic type pumping device is not
discussed in detail here, rather the corresponding discussion in
the Kenny et al. Application is incorporated herein by
reference.
[0116] The power conditioning and thermal management module 1000 of
FIGS. 8 and 9 facilitates efficient packaging of power conditioning
element 1100 in close proximity to device 200, and provides an
additional advantage that the heat generated by power conditioning
element 1100 and/or device 200 is captured within, and removed by
thermal management element 1200. Further, by positioning the power
conditioning and heat capture elements within a single module
beneath device 200, a surface (for example, the top or upper
surface) of device 200 is available for other modes of access, such
as optical or RF telecommunications, and/or for placement of memory
devices. This positioning also permits that surface of device 200
to be used for other functions, including, for example, additional
thermal management elements such as a heat sink as illustrated in
FIG. 3 or a second thermal management element as illustrated in
FIGS. 17A and 17B.
[0117] In addition, power conditioning and thermal management
module 1000 of FIGS. 8 and 9 facilitates efficient packaging as a
discrete device. In this regard, with reference to FIGS. 11 and
12A, module 1000 may be incorporated into a typical electronic
package 1300, having pins 1310, that is modified to accommodate
fluid required for thermal management element 1200.
[0118] The device 200 illustrated in the embodiment of FIG. 11 may
employ a conventional face-down, ball-bond mounting configuration
to an electrical interconnect array. The device 200 may be mounted
to power and thermal management module 1000 in a manner similar to
that described above with respect to the embodiment illustrated in
FIGS. 2-7. Employing a face-down, ball-bond mounting configuration
for device 200 provides several additional advantages, including,
for example, providing intimate contact between device 200 with the
heat capture capabilities of thermal management element 1200 (and
the fluid-filled micro channels 1220); and permitting back-surface
access to device 200 for other purposes, as described above.
[0119] The device 200 illustrated in the embodiment of FIG. 12A may
employ a conventional face-up, wire bond mounting configuration
where wire bonds provide connection from device 200 to package
1300. In this embodiment, the interconnect vias are unnecessary
since conventional wire bonding techniques provide the electrical
connection to device 200. However, this embodiment provides several
significant advantages, including, for example, incorporation of
power conditioning and heat capture elements into package 1300
thereby providing close proximity of power conditioning element
1100 to device 200. In addition, this embodiment provides an
advantage of providing intimate contact between device 200, power
conditioning element 1100 and thermal management element 1200 so
that energy (in the form of heat) generated by device 200 and/or
power conditioning element 1100 may be efficiently captured (by the
fluid in micro channels 1220) are removed from package 1300. A
further advantage of the embodiment in FIG. 12A is that the
operating surface of device 200 is optically accessible, which
would be suitable for use by another device, for example, an
electro-optic device, such as a modulator, a display device, an
optical imaging device, such as a CCD, and/or an optical
switch.
[0120] Under those circumstances where device 200 is to be
implemented in a harsh environment, it may be advantageous to
hermetically-seal package 1300. As illustrated in FIG. 12B, a lid
1320 may be attached to package 1300 thereby providing a
hermetically-sealed environment with integrated power conditioning
and thermal management capabilities of module 1000 in intimate
contact with device 200. The lid 1320 may be opaque, as would be
appropriate for an opto-electronic device, or lid 1320 may be
transparent in the infrared or visible spectrums, as would be
appropriate for a display device, or an imaging device. Integration
of the power and thermal management functions within this package
may allow optimal operation of thermally-sensitive devices, such as
imaging arrays.
[0121] Under those circumstances where device 200 is to be mounted
directly onto a substrate (for example, printed circuit board 400),
it may be advantageous to supply the Working fluid to thermal
management element 1200 by way of channels fabricated in the
substrate to which the module 1000 is affixed. With reference to
FIG. 13, the working fluid is provided to micro heat exchanger 1210
from beneath power conditioning and thermal management module 1000
using channels or tubing 1260 that are embedded or formed in the
substrate. Press fits, solder and/or adhesives may secure the
channels or embedded tubing 126D directly to fluid inlet (not
shown) and fluid outlet (not shown) of micro heat exchanger 1210.
The configuration of FIG. 13 may facilitate implementation of
module 1000 in a chip pick-place assembly process.
[0122] It should be noted that there are many possible techniques
of attaching channel or tubing 1260 to module 1000, including, for
example, formation of openings in module 1000 to permit tubing
segments and/or other couplings to be inserted into module 1000 and
bonded into place. These bonds may be press-fits, or utilize solder
or adhesives. Alternatively, it is possible to form openings in
module 1000 on the top or bottom surfaces, and to bond a fitting to
one or both of these surfaces over the opening(s) with a port for
connecting the tube. Indeed, all techniques, now known or later
developed, for securing embedded channels or tubing 1260 to the
fluid inlet and outlet of micro heat exchanger 1210 are intended to
be within the scope of the present invention.
[0123] The embedded channel configuration of FIG. 13 also may be
employed in those circumstances where the consuming device and
power conditioning and thermal management module 1000 are packaged
and that package is affixed to a substrate. As illustrated in FIG.
13, the working fluid may be provided to the micro heat exchanger
of power conditioning and thermal management module using channels
or tubing that are embedded or formed in the substrate to which the
consuming device is affixed. The fittings may be employed to secure
the channels (or embedded tubing) directly to the fluid inlet and
outlet of the micro heat exchanger or the fluid inlet and outlet of
the package. In those circumstances where the channels (or embedded
tubing) are connected to the fluid inlet and outlet of the package,
tubing or channels embedded or formed in the package may provide
the interconnection between the channels (or tubing) in the
substrate and the fluid inlet and outlet of the micro heat
exchanger.
[0124] The power and thermal management module 1000 may also
include circuits or devices that provide information regarding the
operating parameters of module 1000 for more efficient and
responsive cooling and power conditioning. With reference to FIGS.
14 and 15, power and thermal management module 1000 of this
embodiment additionally includes sensors 1270 (for example,
temperature, pressure and flow sensors) and controller 1280. The
sensors 1270 provide information that is representative of the
operating conditions of device 200 and module 1000 (for example,
operating temperature). The signals from sensors 1270 may be routed
to controller 1280 to provide a closed-loop control of the
functionality of power and thermal management module 1000.
[0125] In particular, where sensors 1270 include a temperature
measuring sensor, controller 1280 may use information provided by
the temperature sensor to modify or adjust the operation of thermal
management element 1200, power conditioning element 1100 and/or
device 200. Under these circumstances, power conditioning and
thermal management module 1000 is being operated in a thermal
control mode, in which the temperature variations measured by one
or more temperature sensors that are distributed throughout module
1000 are provided as feedback signals to controller 1280. The
controller 1280 may use the information provided by sensors 1270 to
determine, for example, the average temperature of module 1000
and/or device 200 and spatial variations in temperature with
respect to module 100 and/or device 200. In response to this
information, controller 1280 may adjust the fluid flow rate through
micro channels 1220 of micro channel heat exchanger 1210. The
controller 1280 may adjust the rate of fluid flow in micro channels
1220 by controlling the operation of pump 1230 or by adjusting the
distribution of the fluid through the different channel manifolds
of micro channel heat exchanger 1210.
[0126] In addition, controller 1280, after determining a
temperature sensitive condition, may alert device 200 that it may
exceed (or has exceeded) its normal operating temperature. In
response device 200 may initiate a low power mode in order to lower
its operating temperature and power consumption. Consuming less
power will result in less heat generation by device 200 as well as
power conditioning element 1100. The device 200, in response to
information regarding its operating temperature,.may enter a system
shut down process as a protective measure. Other actions in
response to changes in temperature are described in the Kenny et
al. Application, which are hereby incorporated by reference
herein.
[0127] The placement or location of sensors 1270 (for example,
temperature, pressure, and/or flow sensors) within substrates 102a
and 102b may be based on many factors. For example, there may be
advantages to place the temperature sensors laterally with respect
to the micro channels 1220 and the anticipated or measured sources
of heat of electrically circuitry 112 and/or device 200. Moreover,
there may be advantages to placement of temperature sensors at
different depths (vertical locations) in substrates 102a and 102b.
FIGS. 10A, 10B, 14 and 15 illustrate sensors 1270 disposed in
various locations in power conditioning element 1100 and thermal
management element 1200. The sensors 1270 provide information
indicative of the operating conditions (for example, temperature)
of a specific region(s) of device 200 and module 1000 to controller
1280.
[0128] A detailed discussion of sensors 1270, their operation, and
considerations regarding their placement or location, is provided
in the Kenny et al. Application, which is hereby incorporated by
reference herein.
[0129] It should be noted that although the embodiments of FIGS. 9
and 15 illustrate one pump, namely, pump 1230, power and thermal
management module 1000 may include more than one pumping mechanism.
Additional pumping mechanisms may be implemented to provide more
immediate and direct control of fluid flow in particular regions of
module 1000. This may be important in those situations where there
are expected hotspots in device 200 and/or power conditioning
elements 1100. For example, more than one pump may be implement in
configuration where micro heat exchanger 1210 includes separate and
independent micro channels 1220 paths, as illustrated in FIG. 10A.
Additional embodiments employing more than one pumping mechanism
are described in detail in the Kenny et al. Application, which is
hereby incorporated by reference herein.
[0130] Thus, to briefly summarize, power and thermal management
module 1000 of FIG. 15, provides, among other things, power
conditioning functions for device 200, and cooling functions for
maintaining device 200 and/or power conditioning elements 1100
within acceptable temperature ranges. The controller 1280, in
conjunction with sensors 1270, permits analysis and detection of
changes in the operating parameters of device 200 and power and
thermal management module 1000. Such changes may result from
changes in the power usage by device 200. In response, thermal
management element 1200 may adjust the cooling capability (by, for
example, control signals to the fluid pump(s) to increase the rate
of fluid flow) in order to maintain the temperature of device 200
within acceptable temperature ranges.
[0131] The power and thermal management module 1000 may also
include current sensors to detect the current consumption of device
200. With reference to FIG. 16, current sensor 1290 may be embedded
in semiconductor substrate 102a to provide information which is
representative of the current consumption of device 200 and/or
electrical circuitry 112 to controller 1280. The controller 1280
may use the detected current consumption to modify the operation of
thermal management element 1200. For example, in response to a
change in demand of current detected by current sensor 1290,
controller 1280 may adjust the fluid cooling capability of thermal
management element 1200 by increasing or decreasing the fluid flow
of pump 1230. In this embodiment, by detecting and analyzing
changes in current demand by device 200, controller 1280 may
anticipate a change in temperature of device 200 and/or power
conditioning element 1100.
[0132] With continued reference to FIG. 16, current sensor(s) 1290
may also detect the current passing through electrical circuitry
112 of power conditioning element 1100 (for example, the voltage
regulation devices). The current passing through electrical
circuitry 112 may be representative of the current and/or power
consumption or demand of device 200. The controller 1280 may use
the information from sensor(s) 1290 to determine appropriate
actions to be taken in anticipation of an increase or decrease in
temperature as a result of a change in the current consumption of
device 200 and/or power conditioning element 1100. The controller
may also use that information to determine anticipated heat capture
and rejection requirements as a result of a change in the current
consumption.
[0133] Based on a measurement of the current through the voltage
regulation circuits, it may be possible to determine the power
consumption in the voltage regulators and/or the power dissipation
in device 200, thereby enabling controller 1280 to determine the
total power dissipation and adjust the heat capture and removal
capabilities of micro channel heat exchanger 1210 accordingly. The
heat capture and removal capabilities of micro channel heat
exchanger 1210 may be modified by altering the rate of flow of the
working fluid in micro channels 1220 (for example, by adjusting the
output flow rate of pump 1230). Further, controller 1280 may also
adjust the heat rejection capabilities after the heat is captured
and removed from device 200 and module 1000. Other techniques for
changing the heat capture and removal capabilities of micro channel
heat exchanger 1210 are described in the Kenny et al. Application,
which are hereby incorporated by reference.
[0134] In the embodiment of FIG. 16, sensor(s) 1290 are integrated
with the voltage regulators in power conditioning element 1100. It
should be noted that controller 1280 may also determine the power
requirements and/or consumption of device 200 indirectly from the
power consumed during operation of device 200. The controller 1280
may then use that information to determine or implement an
appropriate course of action, for example, by adjusting the heat
capture and removal capabilities of micro channel heat exchanger
1210 or heat rejection capabilities of the system, as discussed
above.
[0135] Moreover, it should be noted that the functions/operations
performed by controller 1280 may be implemented within device 200.
Under this circumstance, device 200 determines its power
consumption using, for example, information from sensors 1270 (for
example, temperature, pressure, flow) and/or current sensor 1290,
or information regarding clock rate, electrical activity in
subsystems such as floating-point processors, image processing
circuits, and analog current output circuits. In response, device
200 may adjust the power delivery capabilities of power
conditioning element 110. The device 200 may also adjust the heat
capture, removal and/or rejection capabilities of thermal
management element 1200. Employing device 200 to perform some or
all of the functions/operations previously performed by controller
1280 facilitates use of information typically available to devices
(for example, clock rate), as well as use of computational
resources that may already exist in device 200.
[0136] In addition, for devices that execute repetitive or
predictable functions, it may be possible to predict variations in
the power consumption of devices, and to use thermal dynamic models
of the entire system to produce an optimal or enhanced strategy for
heat capture and rejection management that minimizes temporal or
spatial variations in the temperature within device 200. The device
200 and/or controller 1280 may implement sophisticated control
algorithms that allow device 200 and/or controller 1280 to
determine an appropriate action or response of thermal management
element 1200 so that the temperature of device 200 and/or power
conditioning element 1100 is maintained within a narrow range. That
information may be used to develop a heat capture/rejection
operational procedure that achieves an optimal balance between
temperature variations of device 200 and operational costs of power
and thermal management module 1000. Such operational costs may be
power consumption by device 200, computational complexity, and/or
operation within preferred flow and thermal ranges.
[0137] Moreover, device 200 and/or controller 1280 may use
information indicative of the operation of device 200 to predict
variations in the spatial distribution of the power dissipation
within device 200. For example, if device 200 is a microprocessor,
the power consumption of the floating point processor, which takes
up a small fraction of the processor's surface, may temporarily
exceed the power consumption of the remainder of the
microprocessor. In such a case, the temperature of this subsystem
of the microprocessor may rise rapidly to temperatures that exceed
the recommended operational temperatures. Thus, it may be
advantageous for device 200 and/or controller 1280 to predict the
concentrated power dissipation in device 200 and, in response,
provide the necessary heat capture capabilities dynamically to
those concentrated power dissipation regions of device 200.
[0138] In another, aspect, the present invention is a closed-loop
power conditioning and thermal management system. With reference to
FIG. 17A, in one embodiment, closed-loop power conditioning and
thermal management system 2000 includes power conditioning and
thermal management module 1000, as discussed above, in conjunction
with thermal capture and rejection module 1400. In this embodiment,
power conditioning and thermal management module 1000 is disposed
on printed circuit board 400, device 200 is disposed on power
conditioning and thermal management module 1000, and thermal
capture and rejection module 1400 is disposed on device 200. In
this configuration, power conditioning element 1100 of power
conditioning and thermal management module, 1000 is disposed in
close proximity to device 200 thereby providing the power
conditioning advantages described above. Moreover, micro channel
heat exchanger 1210 is disposed in close proximity to power
conditioning element 1100 thereby facilitating enhanced heat
capture, removal and rejection in order to maintain the temperature
of power conditioning element 1100 within an acceptable range. The
heat captured by thermal management element 1200 is provided (via
fluid flow) to heat rejection element 1410 of thermal capture and
rejection module 1400.
[0139] The thermal capture and rejection module 1400 rejects the
heat provided by thermal management element 1200 using heat
rejection element 1410, which is illustrated as a heat sink having
fins, and thermal capture element 1420. The heat rejection element
1410 may employ many different types of heat rejection techniques,
including a design having a fluid flow path or paths throughout the
high-surface-area structures (such as fluid channels in the fins)
as described and illustrated in the Kenny et al. Application. All
of the thermal capture, removal and rejection techniques described
and illustrated the Kenny et al. Application are hereby
incorporated by reference.
[0140] Thermal capture element 1420 includes a micro channel heat
exchanger 1430 which facilitates localized heat capture, removal
and, in conjunction with heat rejection element 1410, rejection of
heat generated primarily by device 200. The micro channel heat
exchanger 1430 includes a plurality of micro channels 1440 (which,
in operation contain a fluid) for efficient heat capture from
device 200. The micro channel heat exchanger 1430, including micro
channels 1440, may be fabricated in the same manner and using the
same materials as micro heat exchanger 1210 and micro channels
1220.
[0141] The micro channel heat exchanger 1430 may be, for example
arranged at the interface of thermal capture element 1420 in
accordance with the needs for heat removal from particular regions
of device 200. The density of micro channels 1440 may be increased
in regions that correspond to anticipated or measured sources of
excessive heat. In addition, the routing of micro channels 1440 may
be designed to reduce and/or minimize temperature gradients from
the inlet to the outlet of micro heat exchanger 1420. The widths,
depths, and shapes of micro channels 1440 may also be designed and
fabricated to improve device temperature uniformity across device
200. Indeed, the shape and layout of micro channels 1440 may be
designed through the assistance of thermal modeling tools described
in the Kenny et al. Application. Many different types of
arrangement, layouts, configurations and design techniques of micro
heat exchanger 1420 and micro channels 1440 are described and
illustrated in the Kenny et al. Application, which are hereby
incorporated, in total, by reference.
[0142] Similar to description above relative to thermal management
module 1200, the micro channels of micro heat exchanger 1420 may be
disposed on both interfaces of thermal capture element 1420 to
enhance the thermal capture, removal and/or rejection from the heat
generating device(s). Moreover, it should be noted that micro
channel heat exchanger 1430 may be configured as an array of micro
channel pillars. In this regard, an array of vertical channels are
interconnected laterally on an interface (or on both interfaces) of
thermal capture element 1420. This configuration may further
enhance the thermal capture, removal and/or rejection of heat
energy generated by device 200 and/or power conditioning and
thermal management module 1000.
[0143] With continued reference to FIG. 17A, in this embodiment,
pump 1230 is disposed between thermal capture and rejection module
1400 and heat rejection element 1410. The pump 1230 may be an
electro-osmotic pumping device as described in detail in the Kenny
et al. Application. Many different types of-configurations and
designs of pump 1230 are acceptable including those described and
illustrated in the Kenny et al. Application, which are hereby
incorporated by reference.
[0144] It should be noted that system 2000 may employ multiple
pumps and/or independent fluid cooling loops to allow for
independent control of the heat capture capabilities at different
locations within module 1000. This feature is also discussed in
detail in the Kenny et al. Application, and is also hereby
incorporated by reference.
[0145] With reference to FIG. 17B, under certain circumstances, it
may be advantageous to locate heat rejection element 1410 remotely
from the other elements of system 2000. Such a configuration
facilitates use of system 2000 in a space-constrained environment
yet provides sufficient power conditioning and thermal management
in a small footprint. Where heat rejection element 1410 is located
remotely, tubing 1260 provides a fluid path for fluid heated by
device 200 and power conditioning element 1210 to heat rejection
element 1410. In this embodiment, the remotely located heat
rejection element 1410 may be placed in an area having sufficient
volume for a fin array (and possibly with a fan), without
interfering with other system needs for placement of peripheral
system elements such as memory or data storage in proximity to
device 200. Indeed, as mentioned above, under certain
circumstances, heat rejection functionality may be unnecessary
altogether.
[0146] The power conditioning and thermal management module 1000 of
FIGS. 8-17B illustrate the power conditioning element disposed on
the thermal management element. In the embodiment of FIG. 18,
however, thermal management element 1100 is disposed on power
conditioning element 1200. In this embodiment, thermal management
element 1200 may more efficiently capture and remove heat generated
by device 200 because of the proximity of the micro channels to
device 200. Moreover, the capture and removal of heat from
electrical circuitry 112 of power conditioning element 1100 may
remain relatively unchanged. Thus, thermal management element 1200
may more efficiently capture and remove heat generated by both
device 200 and power conditioning element 1100. Accordingly, in
this embodiment, there may be no need to incorporate a heat
rejection element (for example, a heat sink, not shown) because of
the heat capture and removal functions performed by thermal
management element 1100.
[0147] It should be noted that, like in the embodiment illustrated
in FIG. 8, micro channels 1220 (illustrated in FIG. 18) may also
extend into the interface of power conditioning element 1100. In
addition, micro channel structure 1220 may be formed on both the
first and second mating interfaces of thermal management module
1100. Under this circumstance, micro heat exchanger 1210 may even
more efficiently capture and remove heat from both device 200 and
power conditioning element 1200 due, in part, to more intimate
physical contact of the heat exchanger 1210 with both device 200
and power conditioning element 1200.
[0148] In addition to the thermal consideration, the electrical
circuitry of the power conditioning element remains in close
proximity with the device thereby providing all of the power
conditioning advantages described above.
[0149] The power conditioning and thermal management module 1000 of
FIG. 18 may be fabricated and implemented in the same manner as the
power conditioning and thermal management module 1000 illustrated
in FIG. 8. In addition, power conditioning and thermal management
module 1000 of FIG. 18 may include all of the features, additions,
attributes, and embodiments of power conditioning and thermal
management module 1000 of FIGS. 8-17B. In this regard, power
conditioning and thermal management module 1000 of FIG. 18 may
include, for example, a controller, parameter sensor(s) (for
example, temperature, pressure and flow) to measure or detect the
operating conditions of device 200 and/or power conditioning
element 1200, and current sensor(s) to monitor the current consumed
by device 200 and/or power conditioning element 1200. The power
conditioning and thermal management module 1000 of FIG. 18 may also
include pump(s) to provide working fluid to the micro channels,
including for example, electro-osmotic pump(s) having a small
footprint to facilitate incorporation of the module in a
space-constrained environment. The power conditioning and thermal
management module 1000 of FIG. 18 may also include multiple
independent micro channels to allow independent thermal capture and
removal of designated areas of device 200 and/or power conditioning
element 1200.
[0150] Moreover, power conditioning and thermal management module
1000 of FIG. 18 may be implemented in the packaging configurations
of FIGS. 11, 12A and 12B in essentially the same manner as the
embodiment of FIG. 8. Indeed, all of the features and attributes of
power conditioning and thermal management module 1000 illustrated
in FIGS. 8-17B, and described above, are equally applicable to the
power conditioning and thermal management module of FIG. 18. For
the sake of conciseness, the details of the features and attributes
of the embodiments will not be repeated here.
[0151] With continued reference to FIG. 18, power conditioning and
thermal management module 1000 may route the signals to and from
device 200 using all of the same techniques as described above with
respect to FIGS. 2-17B. Moreover, power and ground may be routed to
and from electrical circuitry 112 and device 200 using those same
techniques. For example, the embodiment of FIG. 18 may employ the
routing technique describe in the embodiment of FIG. 6 wherein the
output power and ground conduits are formed in substrate using
conventional fabrication techniques and are routed to
predetermined, pads which corresponds to power or ground inputs of
device 200. Under this circumstance, output power and ground
conduits are routed directly to the power and ground inputs of
device 200.
[0152] In yet another embodiment, the power conditioning element
and the micro channel structure of the thermal management element
are fabricated in the same substrate--rather than two substrates
102a and 102b, as described above and illustrated in FIGS. 8 and
18. With reference to FIG. 19A, micro channel structure 1210 and
power conditioning element 1100 are fabricated in the same
substrate. In this embodiment, the assembly costs may be reduced
because the thermal management element and the power conditioning
element need not be assembled from two separate substrates before
interfacing with the consuming device and another substrate (for
example, a printed circuit board). In addition, the capture and
removal of heat from the consuming device may be enhanced, relative
to the embodiment of FIG. 9, because of the proximity of the micro
channels to the heat generating circuitry disposed on the consuming
device. Moreover, the capture and removal of heat from electrical
circuitry 112 of power conditioning element 1100 may be sufficient
and, as such, this embodiment may not require additional heat
removal, capture and rejection capabilities from, for example a
heat sink and/or fan.
[0153] With continued reference to FIG. 19A, in this embodiment,
micro channel structure 1210 of thermal management element 1200 may
be fabricated using conventional micro channel fabrication
techniques and/or those techniques described and illustrated in the
Kenny et al. Application, which are hereby incorporated by
reference. Thereafter, electrical circuitry 112 of power
conditioning element 1100 may be fabricated using conventional CMOS
or BJT design and fabrication techniques. In this embodiment, the
interface, power and ground vias may be fabricated before or after
the formation of the micro channel structure. The pads (if any)
that connect to the vias may be fabricated after fabrication of
electrical circuitry 112 and micro channels 1220.
[0154] It should be noted that all of the features, attributes,
alternatives and embodiments of power conditioning and thermal
management module 1000 that include multiple substrates (i.e., 102a
and 102b) are fully applicable to the embodiment of FIG. 19A. In
this regard, power conditioning and thermal management module 1000
of FIG. 19A may include, for example, a controller, parameter
sensor(s) (for example, temperature, pressure and flow), and
current sensor(s). The power conditioning and thermal management
module 1000 of FIG. 19A may also include pump(s) and multiple
independent micro channels to allow independent thermal capture and
removal of designated areas of device 200 and/or power conditioning
element 1200.
[0155] Moreover, power conditioning and thermal management module
1000 of FIG. 18A may be implemented in the packaging configurations
of FIG. 11, 12A and 12B. Indeed, all of the features and attributes
of the power conditioning and thermal management module 1000
illustrated in FIGS. 8-18, and described above, are equally
applicable to the power conditioning and thermal management module
of FIG. 19A.
[0156] With continued reference to FIG. 19A, power conditioning and
thermal management module 1000 may route the signals to and from
device 200 using any of the signal routing techniques described
above. Power and ground may be routed to and from electrical
circuitry 112 and device 200 using those same techniques, including
the techniques illustrated in FIG. 6 and described above.
[0157] It should be noted that under those circumstances where
electrical circuitry 112 of power conditioning element 1100 may be
subjected to micro channel processing without damage, electrical
circuitry 112 may be fabricated before fabrication of the micro
channel structure. As such, the interface, power and ground vias
may be fabricated before or after the formation of the micro
channel structure. The pads (if any) that connect to the vias may
be fabricated after the other elements of power conditioning and
thermal management module 1000.
[0158] In the embodiment of FIG. 19A, the power conditioning
element and micro channel structure of thermal management element
1200 are fabricated in one substrate. In still yet other
embodiments, the entire micro channel structure, or a portion of
that structure, may be fabricated on the backside of device 200.
With reference to FIGS. 19B and 19C, micro channels 1220 of micro
channel structure 1210 may be fabricated entirely in device 200
(FIG. 19B) or partially in device 200 and power conditioning
element 1100 (FIG. 19C). The discussion above with respect to FIG.
19A is fully and equally applicable to power conditioning and
thermal management modules illustrated in FIGS. 19B and 19C. For
the sake of brevity, that discussion will not be repeated.
[0159] Another aspect of the present invention is the use of the
module and/or elements described herein (for example, power
conditioning module 100, power conditioning and thermal management
module 1000, thermal capture and rejection module 1400, heat
rejection element 1410 and thermal capture element 1420) as
building blocks in designing a system having local power
conditioning functionality as well as heat capture, removal and/or
rejection capabilities. For example, with reference to FIGS. 20, in
one embodiment, device 200 is disposed on printed circuit board
400, and thermal capture element 1420 is disposed on device 200 to
facilitate capture of localized heat generated by device 200. The
power conditioning and thermal management module 1000 is disposed
on thermal capture element 1420. In this embodiment, it may be
advantageous to locate power conditioning element 1100 between
thermal capture element 1420 and thermal management element 1200 to
enhance the capture of heat generated by power conditioning element
1100. Further, heat rejection element 1410 (for example, a heat
sink having fins) may be disposed on thermal management element
1200 to permit enhanced rejection of the heat captured by thermal
management element 1200 (generated primarily by power conditioning
element 1100) and thermal capture element 1420 (generated primarily
by device 200).
[0160] In the embodiment illustrated in FIG. 20, power conditioning
element 1100 is in close proximity to device 200. Power and ground
connections to and from power conditioning element 1100 may be
accomplished using a wire bond configuration described herein.
(See, for example, FIGS. 4 and 7).
[0161] With continued reference to FIG. 20, the pump (not shown)
may be an electro-osmotic type pump(s) located in thermal
management module 1200 and/or thermal capture element 1420.
Moreover, the pump need not be located in thermal management module
1200 or thermal capture element 1420 but rather may be a "stand
alone" device. As suggested above, the pump may include a plurality
of pumping mechanisms, including mechanisms having configurations
as described in the Kenny et al. Application.
[0162] Another example of using modules and/or elements as building
blocks is illustrated in FIG. 21. With reference to FIG. 21, in
this embodiment, power conditioning and thermal management module
1000 is disposed on device 200 and thermal capture element 1420 is
disposed on power conditioning element 1100 of power conditioning
and thermal management module 1000. Further, heat rejection element
1410 is disposed on thermal capture element 1420 to enhance the
rejection of the heat captured by thermal management element 1200
(generated primarily by device 200) and thermal capture element
1420 (generated primarily by power conditioning element 1100).
[0163] In addition, the power conditioning and thermal management
functions may be incorporated (in whole or in part) into other
modules or elements, or even the consuming device itself. In this
regard, these function(s) may be combined in consuming device to
facilitate a more compact and cost effective system. With reference
to FIG. 22, in this embodiment of the invention, power conditioning
and thermal management module 1000 is disposed in device 200 and
thermal capture element 1420 may be disposed on device 200 to
enhance the rejection of the heat captured by thermal management
element 1200 (generated by device 200 and power conditioning
element 1100). In addition, due to the close proximity of thermal
rejection element 1410 to device 200, thermal rejection element
1410 directly captures and rejects heat generated by device 200.
However, under those circumstances where additional thermal capture
and rejection capacity provided by thermal rejection element 1410
is not necessary, thermal rejection element 1410 may be
omitted.
[0164] It should be noted that power conditioning and thermal
management module 1000 may be disposed on the back side of device
200 or power conditioning element 1100 and/or thermal management
element 1200 may be disposed on the both the front and back sides
of device 200. Moreover, power conditioning element 1100 may be
disposed on the front side of device 200 and thermal management
element 1200 may be disposed on the backside.
[0165] With reference to FIG. 23, in another embodiment of the
invention, system 2000 includes power conditioning module 1 that is
disposed in device 200 and thermal capture and rejection module
1400 may be disposed on device 200 to provide thermal management of
device 200 and power conditioning element 1100. As with the
embodiment illustrated in FIG. 22, power conditioning module 100 of
FIG. 23 may be disposed on the back side of device 200 or on the
front side of device 200. Moreover, power conditioning module 100
may be disposed on the both the front and back sides of device
200.
[0166] It should be noted that in all of the embodiments
illustrated in FIGS. 20-23, the elements and modules, as well as
the consuming device that includes the power conditioning and/or
thermal management functions/elements, may include the features,
attributes, alternatives and advantages of the corresponding
elements and modules illustrated in FIGS. 2-19, and described
above. For the sake of brevity, those features, attributes, and
advantages will not be restated here.
[0167] In addition, under those circumstances where thermal capture
and rejection capacity provided by thermal rejection element 1410
is not necessary, thermal rejection element 1410 may be omitted
altogether.
[0168] Another aspect of the present invention is a system
including a plurality of consuming devices, each having a power
conditioning and thermal management module that receives power from
a primary power supply and a working fluid from a fluidic pumping
mechanism. With reference to FIG. 24, in this embodiment, primary
power supply 3100 provides initial power conditioning of an
external power source (not shown). The output of primary power
supply 3100 is provided to each of the power conditioning elements
1100a-c of power conditioning and thermal management module
1000a-c, respectively. The power conditioning elements 1100a-c
provide localized power conditioning for the consuming device
200a-c, respectively. The power conditioning elements 1100a-c may
be any one of the embodiments described above and illustrated in
FIGS. 8-19.
[0169] The primary power supply 3100 provides the initially
conditioned power to each power conditioning elements 1100a-c by
way of power bus 3110. The power bus 3110 may be routed in parallel
to each of power conditioning elements 1200a-c.
[0170] The primary power supply 3100 may include discrete
components, similar to that illustrated in FIG. 1, or may be a
power conditioning module 1100, similar to that described above
with respect to FIG. 2. Moreover, primary power supply 3100 may
also include additional power supply circuitry positioned more
locally to the devices 200a-c. The additional power supply
circuitry may provide additional initial conditioning of the power
before being supplied to power conditioning elements 1100a-c.
[0171] With continued reference to FIG. 24, fluidic pumping
mechanism 3200 provides a working fluid to each of the thermal
management elements 1100a-c of power conditioning and thermal
management module 1000a-c, respectively. The thermal management
elements 1100a-c captures and removes heat generated by devices
200a-c and/or power conditioning elements 1100a-c. The thermal
management elements 1100a-c may be any one of the embodiments
described above and illustrated in FIGS. 8-19. Moreover, system
3000 of FIG. 24 may also include local heat rejection elements (not
shown) that are disposed on or near devices 200a-c. System 3000 may
also, or alternatively include a global heat rejection element (not
shown) that rejects heat for one or more of the thermal management
elements 1100a-c. The heat rejection element(s) may include the
features of the heat rejection element and thermal rejection module
as illustrated in FIGS. 2-19 and described above.
[0172] The fluidic pump mechanism exchanges the working fluid with
each thermal management element 1200a-c by way of fluid bus 3210.
That is, pumping mechanism 3200 provides cool fluid to each thermal
management element 1200a-c using fluid bus 3210, and fluid bus 3210
provides a path for the heated fluid from thermal management
element 1200a-c to fluidic pump mechanism 3200. The fluid bus 3210
may be routed in parallel or series to each of thermal management
elements 1200a-c.
[0173] It should be noted that system 3000 of FIG. 24 may be
implemented using power conditioning module 100 illustrated in
FIGS. 2-7, and described above. Under this circumstance, the
thermal management operations or functions may be performed in any
manner, including those described above and illustrated in FIGS.
2-7, 20 and 21. Thus, depending on the type of thermal management
technique employed, a fluidic pump mechanism 3200 and fluid bus
3210 may be unnecessary.
[0174] Various embodiments of the present invention have been
described herein. It is understood, however, that changes,
modifications and permutations can be made without departing from
the true scope and spirit of the present invention as defined by
the following claims, which are to be interpreted in view of the
foregoing. For example, other permutations of the module(s) and
element(s) combinations are possible to provide a system having a
power conditioning feature and a thermal management feature. In
this regard, other combinations of the modules and elements in a
building block approach, as illustrated in FIGS. 20-23, are
suitable and are contemplated, and, as such, fall within the scope
of the present invention.
[0175] In addition, the power conditioning and thermal management
features may be combined in other modules, elements, or devices of
the system, including the consuming device as illustrated in FIGS.
22 and 23, and described above. Incorporating features in this
manner is clearly contemplated, and, thus falls within the scope of
the present invention. Moreover, many different types of
arrangement, layouts, configurations, designs, and techniques of
micro heat exchangers, micro channels, sensors, and pump mechanisms
are described and illustrated in the Kenny et al. Application,
which are all hereby incorporated by reference. Indeed, the Kenny
et al. Application is incorporated by reference herein in
total.
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