U.S. patent application number 10/768031 was filed with the patent office on 2004-11-25 for lid unit for thin plate supporting container.
This patent application is currently assigned to MIRAIAL CO., LTD.. Invention is credited to Matsutori, Chiaki, Obayashi, Tadahiro, Oyama, Takaharu.
Application Number | 20040232036 10/768031 |
Document ID | / |
Family ID | 33100430 |
Filed Date | 2004-11-25 |
United States Patent
Application |
20040232036 |
Kind Code |
A1 |
Matsutori, Chiaki ; et
al. |
November 25, 2004 |
Lid unit for thin plate supporting container
Abstract
The present invention is directed to firmly fix a lid unit to a
container body, facilitate cleaning and drying of components, and
suppress rotation of semiconductor wafers caused by shake. The
invention provides a lid unit for a manufacturing line for closing
a container body of a thin plate supporting container. A simple
attaching/detaching mechanism is provided with: a locking member
which is projected and retained by the container body side; a
feeding member which is connected to the locking member to make the
locking member project/retract; a tip-side cam for pressing a tip
side of the locking member to one side when the locking member is
projected by the feeding member; a base-end lower cam for pressing
a base-end side of the locking member to the other side; and a
base-end upper cam and a cam pressing projection for pressing the
base-end side to the other side in a manner similar to the base-end
lower cam. The simple attaching/detaching mechanism is detachably
attached and can be disassembled into components. Supporting ribs
for supporting a connecting and supporting plate and a supporting
projection bar formed so that its ends are thin and its center
portion is thick are also provided.
Inventors: |
Matsutori, Chiaki;
(Kumamoto-ken, JP) ; Obayashi, Tadahiro;
(Kumamoto-ken, JP) ; Oyama, Takaharu;
(Kumamoto-ken, JP) |
Correspondence
Address: |
LORUSSO, LOUD & KELLY
3137 Mount Vernon Avenue
Alexandria
VA
22305
US
|
Assignee: |
MIRAIAL CO., LTD.
|
Family ID: |
33100430 |
Appl. No.: |
10/768031 |
Filed: |
February 2, 2004 |
Current U.S.
Class: |
206/710 |
Current CPC
Class: |
H01L 21/67369 20130101;
H01L 21/67383 20130101; H01L 21/67373 20130101 |
Class at
Publication: |
206/710 |
International
Class: |
B65D 085/30 |
Foreign Application Data
Date |
Code |
Application Number |
May 19, 2003 |
JP |
140402 |
Oct 5, 2003 |
JP |
314640 |
Claims
What is claimed is:
1. A lid unit for a thin plate supporting container for closing a
container body of a thin plate supporting container in which a
plurality of thin plates are housed and which is carried,
comprising a simple attaching/detaching mechanism which can be
easily attached/detached to/from the container body, the simple
attaching/detaching mechanism comprising: a locking member which is
projected and retained by the container body side; a feeding member
which is connected to the locking member to make the locking member
project/retract; a tip-side cam for pressing a tip side of the
locking member to one side when the locking member is projected by
the feeding member; and a base-end-side cam for pressing a base-end
side of the locking member to the other side when the locking
member is projected.
2. The lid unit for a thin plate supporting container according to
claim 1, wherein the tip-side cam has an oblique surface for
pushing the tip side of the locking member to the one side.
3. The lid unit for a thin plate supporting container according to
claim 1, wherein the base-end-side cam has an oblique surface for
pushing the base-end side of the locking member to the other
side.
4. The lid unit for a thin plate supporting container according to
claim 1, wherein a fulcrum portion of swing of the locking member
is provided on the tip side of the locking member.
5. The lid unit for a thin plate supporting container according to
claim 1, wherein the simple attaching/detaching mechanism is
detachably attached and can be disassembled to component parts.
6. A lid unit for a thin plate supporting container for closing a
container body of a thin plate supporting container in which a
plurality of thin plates are housed and which is carried,
comprising a thin plate presser for supporting thin plates housed
in the container body, wherein the thin plate presser has
supporting pieces disposed alternately.
7. The lid unit for a thin plate supporting container according to
claim 6, wherein the thin plate presser comprises two contact
pieces having supporting pieces disposed alternately and an elastic
supporting plate for elastically supporting the contact pieces, the
elastic supporting plate is attached between and on both sides of
the contact pieces, and the elastic supporting plate between the
contact pieces supports the contact pieces in a state where the
elastic supporting plate is slightly floated.
8. A lid unit for a thin plate supporting container for closing a
container body of a thin plate supporting container in which a
plurality of thin plates are housed and which is carried,
comprising a lid unit holder for fixing the lid unit from the
outside in a state where the lid unit is attached to the container
body.
9. A lid unit for a thin plate supporting container for closing a
container body of a thin plate supporting container in which a
plurality of thin plates are housed and which is carried,
comprising a thin plate presser for supporting a plurality of thin
plates housed in the container body, wherein the thin plate presser
has a plurality of contact pieces which are disposed in parallel
and come into contact with the plurality of thin plates, and the
parallel contact pieces are disposed so that the contact piece
positioned in a center portion is projected to the thin plate side
more than the contact pieces positioned on both sides.
10. The lid unit for a thin plate supporting container according to
claim 9, wherein the thin plate presser comprises: a base-end
supporting portion fixed to the rear surface of the lid unit; and a
plurality of elastic supporting plates supported by the base-end
supporting portion and each supporting one end of each of the
contact pieces, and each of the elastic supporting plates for
supporting the contact pieces is formed so that the contact piece
positioned in the center portion is projected to the thin plate
side more than the contact pieces positioned on both sides.
11. The lid unit for a thin plate supporting container according to
claim 9, wherein the thin plate presser comprises: a base-end
supporting portion fixed to the rear surface of the lid unit; a
plurality of one-side elastic supporting plates supported by the
base-end supporting portion and supporting one end of each of the
contact pieces; and a plurality of other-side elastic supporting
plates supporting the other end of each of the contact pieces and
in contact with the rear surface of the lid unit, and any one of
the one-side elastic supporting plate and the other-side elastic
supporting plate for supporting each of the contact pieces or both
are/is formed so that the contact piece positioned in the center
portion is projected to the thin plate side more than the contact
pieces positioned on both sides.
12. The lid unit for a thin plate supporting container according to
claim 9, wherein the thin plate presser comprises: a base-end
supporting portion fixed to the rear surface of the lid unit; a
plurality of one-side elastic supporting plates supported by the
base-end supporting portion and each supporting one end of each of
the contact pieces; a plurality of other-side elastic supporting
plates each supporting the other end of each of the contact pieces
and in contact with the rear surface of the lid unit; and a
supporting projection bar provided on the rear surface side of the
lid unit and in contact with the other-side elastic supporting
plates to thereby support the other-side elastic supporting plates,
and any one of the supporting projection bar and the other-side
elastic supporting plate or both are/is formed so that the contact
piece positioned in the center portion is projected to the thin
plate side more than the contact pieces positioned on both
sides.
13. The lid unit for a thin plate supporting container according to
claim 9, wherein the contact piece has a V-shaped groove having an
inclination of 40.degree. to 44.degree..
14. A lid unit for a thin plate supporting container for closing a
container body of a thin plate supporting container in which a
plurality of thin plates are housed and which is carried,
comprising a thin plate presser for supporting thin plates housed
in the container body, the thin plate presser comprising: two
base-end supporting portions fixed to a rear surface of the lid
unit; a plurality of contact pieces which are disposed along the
periphery of the thin plate and come into direct contact with the
thin plate; two elastic supporting plates supported by the base-end
supporting portions and supporting an outer end of each of contact
pieces at both ends among the plurality of contact pieces; a
connecting and supporting plate for connecting and supporting the
contact pieces; and a supporting member for preventing a deviation
of the connecting and supporting plate along the rear surface of
the lid unit while permitting fluctuations in the direction
perpendicular to the rear surface of the lid unit.
15. The lid unit for a thin plate supporting container according to
claim 14, wherein the supporting member has supporting ribs for
supporting each of the connecting and supporting plates so as not
to be deviated along the rear surface of the lid unit.
16. The lid unit for a thin plate supporting container according to
claim 14, wherein the supporting member has a fitting projection
which is fit in a fitting hole formed in the connecting and
supporting plate, thereby preventing a deviation along the rear
surface of the lid unit of the connecting and supporting plate
while permitting fluctuations in a direction perpendicular to the
rear surface of the lid unit.
17. The lid unit for a thin plate supporting container according to
claim 14, wherein elastic force for supporting the contact piece by
the connecting and supporting plate is stronger than elastic force
for supporting the contact piece by the elastic supporting plate.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims, under 35 USC 119, priority of
Japanese Application No.2003-140402 filed May 19, 2003 and Japanese
Application No.2003-314640 filed Sep. 5, 2003.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to a lid unit for a thin plate
supporting container for housing a thin plate such as a
semiconductor wafer, a storage disk, or a liquid crystal glass
substrate so as to be used in a storing, transporting, or
manufacturing process or the like.
[0004] 2. Related Background Art
[0005] A thin plate supporting container for housing a thin plate
such as a semiconductor wafer so as to be stored or transported is
generally known.
[0006] The thin plate supporting container is constructed mainly by
a container body and a lid unit for closing the upper opening of
the container body. In the container body, a member for supporting
a thin plate such as a semiconductor wafer is provided. Such a thin
plate supporting container has to be transferred while maintaining
the inside of the container clean in order to prevent soiling of
the surface of the thin plate such as a semiconductor wafer housed
inside. Consequently, the container is sealed. To be specific, a
lid unit is fixed on the container body to airtightly seal the
container body. There are various structures for fixing the lid
unit on the container body.
[0007] The thin plate supporting container transported to a
semiconductor manufacturing factory or the like is placed on a
manufacturing line and the lid unit is automatically taken off by a
dedicated apparatus.
[0008] An example of the lid unit adapted to the dedicated
apparatus is disclosed in Japanese Patent Application Laid-Open No.
2001-512288. A lid unit 1 is constructed by, as shown in FIG. 2, a
body 2, a cam member 3, a latch arm, and a fulcrum 5.
[0009] The cam member 3 is rotatably attached to the body 2. In the
cam member 3, a cam portion 6 is provided. In the cam portion 6, a
coupling opening 7 having an arched elongated hole shape is
provided.
[0010] At the base end of the latch arm 4, an S-shaped cam follower
8 is provided. The S-shaped cam follower 8 is fit and caught in the
coupling opening 7.
[0011] The fulcrum 5 is a projection member provided for the body 2
and supports the latch arm 4.
[0012] With the structure, when the cam member 3 rotates, the
S-shaped cam follower 8 caught in the coupling opening 7 is lifted
upward while being moved to the right side in the diagram.
Consequently, the latch arm 4 swings around the fulcrum 5 as a
center while being projected from the body 2 and the tip of the
latch arm 4 is pressed downward.
[0013] At this time, the tip of the latch arm 4 is fit in a hole on
the container body side. By being pressed downward, the tip of the
latch arm 4 presses the lid unit against the container body side so
as to be fixed.
[0014] However, since the lid unit 1 has the configuration that the
base end of the latch arm 4 is lifted upward while being captured
by the cam member 3 and projected, thereby swinging the latch arm 4
around the fulcrum 5 as a center, in the sense of the action of a
lever, the base end of the latch arm 4 is the power point, the tip
is the point of application, and the fulcrum 5 is the fulcrum.
[0015] In this case, to press the lid unit 1 strongly against the
container body in order to increase air tightness in the container
body, it is necessary to strongly press the tip of the latch arm 4
against the hole portion on the container body.
[0016] To realize it, the strength of the cam member 3 and the
latch arm 4 has to be increased for the reason that the interval
between the tip of the latch arm 4 and the fulcrum 5 is long. In
this case, by moving the fulcrum 5 toward the tip of the latch arm
4, the tip of the latch arm 4 can be strongly pressed against the
hole portion on the container body side without increasing the
strength of the cam member 3 and the latch arm 4.
[0017] However, when the fulcrum 5 is moved toward the tip side,
the distance required to lift the base end of the latch arm 4
upward becomes longer. If the distance to lift is assured, a
problem occurs such that the lid unit 1 becomes thick.
[0018] On the rear face of the lid unit, a wafer presser is usually
provided. The wafer presser supports a semiconductor wafer housed
in the container body by pressing the semiconductor wafer from
above. As the diameter of a semiconductor wafer increases, the
power of supporting the semiconductor wafer has to be also
increased. Accordingly, repulsion from the semiconductor wafer,
which is received by the wafer presser increases. Also when the
number of semiconductor wafers housed increases, repulsion from the
semiconductor wafers increases. As a result, the lid unit and the
wafer presser are deflected to the outside by the repulsion and the
pressing force in the center portion of the wafer presser is
weakened. It causes a problem such that, when vibration is
transmitted from the outside, the semiconductor wafer rotates.
SUMMARY OF THE INVENTION
[0019] The present invention has been achieved in consideration of
the above problems and its object is to provide a lid unit for a
thin plate supporting container capable of firmly supporting a thin
plate with strong force without increasing the size and preventing
a thin plate from rotating even when vibration is transmitted from
the outside.
[0020] According to a first aspect of the invention, there is
provided a lid unit for a thin plate supporting container for
closing a container body of a thin plate supporting container in
which a plurality of thin plates are housed and which is carried,
including a simple attaching/detaching mechanism which can be
easily firmly attached/detached to/from the container body, the
simple attaching/detaching mechanism including: a locking member
which is projected and retained by the container body side; a
feeding member which is connected to the locking member to make the
locking member project/retract; a tip-side cam for pressing a tip
side of the locking member to one side when the locking member is
projected by the feeding member; and a base-end-side cam for
pressing a base-end side of the locking member to the other side
when the locking member is projected.
[0021] With the structure, when the locking member is projected by
the feeding member, the tip-side cam presses the tip side of the
locking member to one side and the base-end-side cam presses the
base-end side of the locking member to the other side. In such a
manner, the lid unit is fixed to the container body side.
[0022] According to a second aspect of the invention, in the lid
unit for a thin plate supporting container according to the first
aspect, the tip-side cam has an oblique surface for pushing the tip
side of the locking member to one side.
[0023] With the structure, the tip side of the locking member is
pushed to the one side by the oblique surface of the tip-side cam
and is retained by the container body side.
[0024] According to a third aspect of the invention, in the lid
unit for a thin plate supporting container according to the first
or second aspect, the base-end-side cam has an oblique surface for
pushing the base-end side of the locking member to the other
side.
[0025] With the structure, the base-end side of the locking member
is pressed to the other side by the oblique surface of the
base-end-side cam and retained by the container body side.
[0026] According to a fourth aspect of the invention, in the lid
unit for a thin plate supporting container according to any one of
the first to third aspects, a fulcrum portion of swing of the
locking member is provided on the tip side of the locking
member.
[0027] With the structure, the locking member swings around the
fulcrum portion as a center. Since the fulcrum portion is provided
at the tip side of the locking member, by the action of a lever,
the lid unit can be pressed against the container body with strong
force.
[0028] According to a fifth aspect of the invention, in the lid
unit for a thin plate supporting container according to any one of
the first to fourth aspects, the simple attaching/detaching
mechanism is detachably attached and can be disassembled to
component parts.
[0029] With the structure, in the case of cleaning, the simple
attaching/detaching mechanism is detached and disassembled to
component parts and each of the component parts is cleaned. Thus,
the component parts can be cleaned and promptly dried.
[0030] According to a sixth aspect of the invention, there is
provided a lid unit for a thin plate supporting container for
closing a container body of a thin plate supporting container in
which a plurality of thin plates are housed and which is carried,
including a thin plate presser for supporting thin plates housed in
the container body, wherein the thin plate presser has supporting
pieces disposed alternately.
[0031] With the structure, the supporting pieces which are disposed
alternately support the periphery of a thin plate. The supporting
pieces alternately come into contact with the periphery of a thin
plate and support the periphery with reliability.
[0032] According to a seventh aspect of the invention, in the lid
unit for a thin plate supporting container for closing a container
body of a thin plate supporting container in which a plurality of
thin plates are housed and which is carried, including a thin plate
presser for supporting thin plates housed in the container body,
wherein the thin plate presser includes two contact pieces having
supporting pieces disposed alternately and an elastic supporting
plate for elastically supporting the contact pieces, the elastic
supporting plate is attached between and on both sides of the
contact pieces, and the elastic supporting plate between the
contact pieces supports the contact pieces in a state where the
elastic supporting plate is slightly floated.
[0033] With the structure, the contact pieces are supported in a
state where the elastic supporting plate between the contact pieces
is slightly floated from an attachment surface. Consequently, a
thin plate is usually supported with a force which is not so
strong. When a large shock is given from the outside like case that
the thin plate supporting container is dropped by mistake, the
elastic supporting plate between the contact pieces comes into
contact with the supporting face and strongly supports the contact
pieces. In such a manner, a thin plate is protected from a strong
shock.
[0034] According to an eighth aspect of the invention, there is a
lid unit provided for a thin plate supporting container for closing
a container body of a thin plate supporting container in which a
plurality of thin plates are housed and which is carried, including
a lid unit holder for fixing the lid unit from the outside in a
state where the lid unit is attached to the container body.
[0035] With the structure, the lid unit holder is attached to the
container body to support the lid unit. In such a manner, even if a
strong shock is given by dropping or the like, the lid unit does
not come off from the container body.
[0036] According to a ninth aspect of the invention, there is
provided a lid unit for a thin plate supporting container for
closing a container body of a thin plate supporting container in
which a plurality of thin plates are housed and which is carried,
including a thin plate presser for supporting a plurality of thin
plates housed in the container body, wherein the thin plate presser
has a plurality of contact pieces which are disposed in parallel
and come into contact with the plurality of thin plates, and the
parallel contact pieces are disposed so that the contact piece
positioned in a center portion is projected to the thin plate side
more than the contact pieces positioned on both sides.
[0037] With the structure, the contact pieces disposed so that the
contact piece in the center portion is projected to the thin plate
side more than the contact pieces on both sides absorb deflection
of the lid unit and can support thin plates with uniform force.
[0038] According to a tenth aspect of the invention, in the lid
unit for a thin plate supporting container according to the ninth
aspect, the thin plate presser includes: a base-end supporting
portion fixed to the rear surface of the lid unit; and a plurality
of elastic supporting plates supported by the base-end supporting
portion and each supporting one end of each of the contact pieces,
and each of the elastic supporting plates for supporting the
contact pieces is formed so that the contact piece positioned in
the center portion is projected to the thin plate side more than
the contact pieces positioned on both sides.
[0039] With the structure, the elastic supporting plate supports
one end of each of the contact pieces so that the contact piece in
the center portion is projected to the thin plate side more than
the contact pieces on both sides among the contact pieces which are
disposed in parallel. Thus, deflection of the lid unit can be
absorbed and thin plates can be supported with uniform force.
[0040] According to an eleventh aspect of the invention, in the lid
unit for a thin plate supporting container according to the ninth
aspect, the thin plate presser includes: a base-end supporting
portion fixed to the rear surface of the lid unit; a plurality of
one-side elastic supporting plates supported by the base-end
supporting portion and each supporting one end of each of the
contact pieces; and a plurality of other-side elastic supporting
plates each supporting the other end of each of the contact pieces
and in contact with the rear surface of the lid unit, and any one
of the one-side elastic supporting plate and the other-side elastic
supporting plate for supporting each of the contact pieces or both
are/is formed so that the contact piece positioned in the center
portion is projected to the thin plate side more than the contact
pieces positioned on both sides.
[0041] With the structure, the one-side elastic supporting plate
and/or the other-side elastic supporting plate support each of the
contact pieces so that the contact piece positioned in the center
portion is projected to the thin plate side more than the contact
pieces positioned on both sides among the contact pieces disposed
in parallel. Thus, deflection of the lid unit can be absorbed and
each of thin plates can be supported with uniform force.
[0042] According to a twelfth aspect of the invention, in the lid
unit for a thin plate supporting container according to the ninth
aspect, the thin plate presser includes: a base-end supporting
portion fixed to the rear surface of the lid unit; a plurality of
one-side elastic supporting plates supported by the base-end
supporting portion and each supporting one end of each of the
contact pieces; a plurality of other-side elastic supporting plates
each supporting the other end of each of the contact pieces and in
contact with the rear surface of the lid unit; and a supporting
projection bar provided on the rear surface side of the lid unit
and in contact with the other-side elastic supporting plates to
thereby support the other-side elastic supporting plates, and any
one of the supporting projection bar and the other-side elastic
supporting plate or both are/is formed so that the contact piece
positioned in the center portion is projected to the thin plate
side more than the contact pieces positioned on both sides.
[0043] With the structure, the supporting projection bar and/or the
other-side elastic supporting plate support each of the contact
pieces so that the contact piece positioned in the center portion
is projected to the thin plate side more than the contact pieces
positioned on both sides among the contact pieces disposed in
parallel. Thus, deflection of the lid unit can be absorbed and each
of thin plates can be supported with uniform force.
[0044] According to a thirteenth aspect of the invention, in the
lid unit for a thin plate supporting container according to any of
the ninth to twelfth aspects, the contact piece has a V-shaped
groove having an inclination of 40.degree. to 44.degree..
[0045] With the structure, when the periphery of a thin plate is
fit in the V-shaped groove having the inclination of 40.degree. to
44.degree., the V-shaped groove catches the periphery of the thin
plate, and the thin plate can be supported with reliability.
[0046] According to a fourteenth aspect of the invention, there is
provided a lid unit for a thin plate supporting container for
closing a container body of a thin plate supporting container in
which a plurality of thin plates are housed and which is carried,
including a thin plate presser for supporting thin plates housed in
the container body, the thin plate presser including: two base-end
supporting portions fixed to a rear surface side of the lid unit; a
plurality of contact pieces which are disposed along the periphery
of the thin plate and come into direct contact with the thin plate;
two elastic supporting plates supported by the base-end supporting
portions and each supporting an outer end of each of contact pieces
at both ends among the plurality of contact pieces; a connecting
and supporting plate for connecting and supporting the contact
pieces; and a supporting member for preventing a deviation along
the rear surface of the lid unit of the connecting and supporting
plate while permitting fluctuations in the direction perpendicular
to the rear surface of the lid unit.
[0047] With the structure, an outer end of each of contact pieces
at both ends among the plurality of contact pieces is supported by
the elastic supporting plate, the contact pieces are supported by
the connecting and supporting plate, and the connecting and
supporting plate is supported by the supporting member, thereby
supporting the periphery of a thin plate by the contact pieces with
reliability. Particularly, the contact pieces are supported by the
connecting and supporting plate supported by the supporting member,
so that each of the contact pieces can be prevented from being
deviated along the rear surface of the lid unit, and a thin plate
can be supported with reliability.
[0048] According to a fifteenth aspect of the invention, in the lid
unit for a thin plate supporting container according to the
fourteenth aspect, the supporting member has supporting ribs each
for supporting each of the connecting and supporting plates so as
not to be deviated along the rear surface of the lid unit.
[0049] With the structure, the supporting ribs support the
connecting and supporting plates, so that the contact pieces can be
prevented from being deviated along the rear surface of the lid
unit, and a thin plate can be supported with reliability.
[0050] According to a sixteenth aspect of the invention, in the lid
unit for a thin plate supporting container according to the
fourteenth aspect, the supporting member has a fitting projection
which is fit in a fitting hole formed in the connecting and
supporting plate, thereby preventing a deviation along the rear
surface of the lid unit of the connecting and supporting plate
while permitting fluctuations in a direction perpendicular to the
rear surface of the lid unit.
[0051] With the strucure, the fitting projection is fit into the
fitting hole formed in the connecting and supporting plate to
support the connecting and supporting plate. Thus, contact pieces
can be prevented from being deviated along the rear surface of the
lid unit, and a thin plate can be supported with reliability.
[0052] According to a seventeenth aspect of the invention, in the
lid unit for a thin plate supporting container according to the
fourteenth aspect, elastic force for supporting the contact piece
by the connecting and supporting plate is stronger than elastic
force for supporting the contact piece by the elastic supporting
plate.
[0053] With the structure, by making the elastic force for
supporting the contact piece by the connecting and supporting plate
strong, the difference between the elastic force (supporting force)
in the center portion of the thin plate presser and that in the end
portion is eliminated. The force of pressing thin plates can be
wholly equalized and the thin plates can be supported with
reliability.
[0054] As described above in detail, the lid unit for a thin plate
supporting container of the invention produces the following
effects.
[0055] (1) Since the locking member is projected by using the
action of a lever, the lid unit for a manufacturing line can be
fixed to the container body with strong force.
[0056] (2) Since the simple attaching/detaching mechanism can be
easily disassembled to component parts, in the case of cleaning,
the simple attaching/detaching mechanism can be detached and
disassembled to component parts. Each of the component parts can be
cleaned and promptly dried.
[0057] (3) Since the supporting pieces are disposed alternately,
the supporting pieces alternately come into contact with the
periphery of a thin plate and can support the periphery with
reliability.
[0058] (4) The contact pieces are supported in such a manner that
the contact piece in the center portion is projected to the thin
plate side more than the contact pieces on both sides.
Consequently, deflection of the lid unit can be absorbed and thin
plates can be supported with uniform force.
[0059] (5) The elastic supporting plate supports so that the
contact piece in the center portion is projected to the thin plate
side more than the contact pieces on both sides among the contact
pieces which are disposed in parallel. Thus, deflection of the lid
unit can be absorbed and thin plates can be supported with uniform
force.
[0060] (6) Since the one-side elastic supporting plate and/or the
other-side elastic supporting plate support each of the contact
pieces so that the contact piece positioned in the center portion
is projected to the thin plate side more than the contact pieces
positioned on both sides among the contact pieces disposed in
parallel, deflection of the lid unit can be absorbed and each of
thin plates can be supported with uniform force.
[0061] (7) The supporting projection bar and/or the other-side
elastic supporting plate support each of the contact pieces so that
the contact piece positioned in the center portion is projected to
the thin plate side more than the contact pieces positioned on both
sides among the contact pieces disposed in parallel. Thus,
deflection of the lid unit can be absorbed and each of thin plates
can be supported with uniform force.
[0062] (8) Since the connecting and supporting plate between the
contact pieces is supported by the supporting member, each of the
contact pieces can be prevented from being deviated along the rear
surface of the lid unit, and the thin plate can be supported with
reliability.
[0063] (9) Since the connecting and supporting plate is supported
by the supporting ribs, the contact pieces can be prevented from
being deviated along the rear surface of the lid unit, and a thin
plate can be supported with reliability.
[0064] (10) Since the fitting projection is fit into the fitting
hole formed in the connecting and supporting plate to support the
connecting and supporting plate, contact pieces can be prevented
from being deviated along the rear surface of the lid unit, and a
thin plate can be supported with reliability.
[0065] (11) By making the elastic force for supporting the contact
piece by the connecting and supporting plate strong, the difference
between the supporting force in the center portion of the thin
plate presser and that in the end portion is eliminated. The force
of pressing thin plates can be equalized as a whole and the thin
plates can be supported with reliability.
BRIEF DESCRIPTION OF THE DRAWINGS
[0066] FIG. 1 is a partial perspective view showing a lid unit for
a manufacturing line according to a first embodiment of the
invention.
[0067] FIG. 2 is a sectional side elevation of a conventional lid
unit for a thin plate supporting container.
[0068] FIG. 3 is a perspective view showing the thin plate
supporting container according to the first embodiment of the
invention.
[0069] FIG. 4 is a perspective view of the thin plate supporting
container according to the first embodiment of the invention in a
state where the lid unit is taken off.
[0070] FIG. 5 is a partial perspective view showing a lid unit
receiving portion of the thin plate supporting container according
to the first embodiment of the invention.
[0071] FIG. 6 is a partial cross section of the lid unit receiving
portion of the thin plate supporting container according to the
first embodiment of the invention.
[0072] FIG. 7 is a perspective view showing the top face of a lid
unit for a manufacturing line according to the first embodiment of
the invention.
[0073] FIG. 8 is a perspective view showing the under face of the
lid unit for the manufacturing line according to the first
embodiment of the invention.
[0074] FIG. 9 is a perspective view showing the top face of a
locking member according to the first embodiment of the
invention.
[0075] FIG. 10 is a perspective view showing the under face of the
locking member according to the first embodiment of the
invention.
[0076] FIG. 11 is a sectional side view showing the locking member
according to the first embodiment of the invention.
[0077] FIG. 12 is a perspective view showing the top face of a
feeding member according to the first embodiment of the
invention.
[0078] FIG. 13 is a perspective view showing the back face of the
feeding member according to the first embodiment of the
invention.
[0079] FIG. 14 is a plan view showing the feeding member according
to the first embodiment of the invention.
[0080] FIG. 15 is a diagram showing the back face of the feeding
member according to the first embodiment of the invention.
[0081] FIG. 16 is a perspective view showing the top face of a
holding cover according to the first embodiment of the
invention.
[0082] FIG. 17 is a perspective view showing the back face of the
holding cover according to the first embodiment of the
invention.
[0083] FIG. 18 is a perspective view showing the top face of a
cover presser according to the first embodiment of the
invention.
[0084] FIG. 19 is a perspective view showing the top face of the
cover presser according to the first embodiment of the
invention.
[0085] FIG. 20 is a side view showing a wafer presser according to
the first embodiment of the invention.
[0086] FIG. 21 is a perspective view showing the wafer presser
according to the first embodiment of the invention.
[0087] FIG. 22 is a perspective view showing the wafer presser
according to the first embodiment of the invention.
[0088] FIG. 23 is a perspective view showing a lid unit holder
according to the first embodiment of the invention.
[0089] FIGS. 24A to 24D are schematic diagrams showing the
operation of a simple attaching/detaching mechanism according to
the first embodiment of the invention.
[0090] FIG. 25 is a sideview showing the wafer presser according to
a first modification of the first embodiment of the invention.
[0091] FIG. 26 is a perspective view showing the wafer presser
according to the first modification of the first embodiment of the
invention.
[0092] FIG. 27 is a perspective view showing the wafer presser
according to the first modification of the first embodiment of the
invention.
[0093] FIG. 28 is a perspective view showing the wafer presser
according to a second modification of the first embodiment of the
invention.
[0094] FIG. 29 is a front view showing the wafer presser according
to the second modification of the first embodiment of the
invention.
[0095] FIG. 30 is a perspective view showing the wafer presser
according to a third modification of the first embodiment of the
invention.
[0096] FIG. 31 is a cross section of a main portion showing the
wafer presser according to the third modification of the first
embodiment of the invention.
[0097] FIG. 32 is a perspective view showing a wafer presser
according to a fourth modification of the first embodiment of the
invention.
[0098] FIG. 33 is a front view showing the wafer presser according
to the fourth modification of the first embodiment of the
invention.
[0099] FIG. 34 is a perspective view of a main portion of the wafer
presser according to a second embodiment of the invention.
[0100] FIG. 35 is a perspective view showing the back face of the
lid unit including the wafer presser according to the second
embodiment of the invention.
[0101] FIG. 36 is a partial perspective view showing the back face
of the lid unit including the wafer presser according to the second
embodiment of the invention.
[0102] FIG. 37 is a perspective view of a main portion showing the
back face of the lid unit according to the second embodiment of the
invention in a state where the wafer presser is removed.
[0103] FIG. 38 is a partial perspective view showing the back face
of the lid unit according to the second embodiment of the invention
in a state where the wafer presser is removed.
[0104] FIG. 39 is a perspective view showing a section of a
supporting rib according to the second embodiment of the
invention.
[0105] FIG. 40 is an enlarged view of a main portion showing the
wafer presser according to the second embodiment of the
invention.
[0106] FIG. 41 is an enlarged view of a main portion showing a
contact piece of the wafer presser according to the second
embodiment of the invention.
[0107] FIG. 42 is an enlarged view of a main portion showing the
contact piece of the wafer presser according to the second
embodiment of the invention.
[0108] FIG. 43 is a cross section of a main portion of the contact
piece of the wafer presser according to the second embodiment of
the invention.
[0109] FIG. 44 is a perspective view of a main portion showing a
modification of the second embodiment of the invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0110] Embodiments of the invention will be described here in below
with reference to the appended drawings. A thin plate supporting
container of the invention is a container for housing thin plates
such as a semiconductor wafer, a storage disk, and a liquid crystal
glass substrate so as to be used for storage, transport,
manufacturing line, and the like. A thin plate supporting container
for housing semiconductor wafers will be described here as an
example. Lid units for closing a thin plate supporting container
are properly used as a lid unit for transport and a lid unit for
use in a manufacturing line.
First Embodiment
[0111] A thin plate supporting container 11 according to a first
embodiment has, as shown in FIGS. 3 to 8, a container body 12 for
housing therein a plurality of semiconductor wafers (not shown),
two thin plate supporting portions 13 provided on opposite side
walls in the container body 12 and supporting housed semiconductor
wafers from both sides, a lid unit 14 for transport and a lid unit
15 for a manufacturing line, each for covering the container body
12, a top flange 16 held by an arm of a transporting apparatus (not
shown) in a factory, and a handle 17 for carry which is grasped by
a worker when the worker carries the thin plate supporting
container 11.
[0112] The container body 12 is formed in an almost cube shape as
shown in FIGS. 3 and 4. The container body 12 is constructed by
four sidewalls 12A, 12B, 12C, and 12D serving as peripheral walls
and a bottom plate 12E when the container body 12 is set in the
portrait orientation, and an opening 12F is provided at the top of
the container body 12. When the container body 12 is installed so
as to face a robot (not shown) for carrying wafers in a
manufacturing line of semiconductor wafers or the like, it is set
in the landscape orientation. On the outside of the side wall 12A,
which serves as the bottom when the supporting container 11 is set
in the landscape orientation, means (not shown) for positioning the
thin plate supporting container 11 is provided. The top flange 16
is detachably attached to the outside of the side wall 12A serving
as the ceiling when the supporting container 11 is set in the
landscape orientation. To the outside of the side walls 12C and 12D
serving as side walls when the supporting container 11 is set in
the landscape orientation, the handles 17 for carry are detachably
attached.
[0113] In the upper ends of the side walls 12A, 12B, 12C, and 12D
of the container body 12, a lid unit receiving portion 21 to which
the lid unit 14 is fit is provided as shown in FIGS. 5 and 6. The
lid unit receiving portion 21 is formed by expanding the upper end
portion of the container body 12 to the dimension of the lid unit
4. Consequently, the lid unit 4 is attached to the lid unit
receiving portion 21 by being fit in a vertical plate portion 21A
of the lid unit receiving portion 21 and coming into contact with a
horizontal plate portion 21B. Further, a seal groove 21C is
provided in the whole circumference of the horizontal plate portion
21B, and a gasket 22 attached to the under face of the lid unit 14
for transport is fit in the seal groove 21C, thereby keeping air
tightness in the thin plate supporting container 11. In the inner
face of the vertical plate portion 21A at the four corners of the
lid unit receiving portion 21, first fitting portions 23 in which
lid unit locking pawls (not shown) of a simple attaching/detaching
mechanism 26 to be described later are fit, thereby fixing the lid
unit 14 for transport to the container body 12 side are provided.
The first fitting portion 23 is formed by forming a dent in a
square shape in the vertical plate portion 21A. The lid unit
locking pawls are fit in the top face on the inner side of the
first fitting portion 23.
[0114] Further, near each of the first fitting portions 23, a
second fitting portion 24 is provided. The second fitting portion
24 is used for the manufacturing line. In the second fitting
portion 24, a locking member 42 of a simple attaching/detaching
mechanism 32 of the lid unit 15 for the manufacturing line is fit,
thereby fixing the lid unit 15 for the manufacturing line to the
container body 12 side.
[0115] The lid unit 14 for transport is a known lid unit. The lid
unit 14 for transport is formed in a saucer shape and its center
portion is formed as swelling in a cylindrical shape so as not to
come into contact with the upper portion of a semiconductor wafer
housed therein.
[0116] At each of the four corners of the lid unit 14 for
transport, as shown in FIGS. 3 and 4, the simple
attaching/detaching mechanism 26 for transport for detachably
fixing the lid unit 14 for transport to the container body 12 is
provided. The simple attaching/detaching mechanism 26 for transport
is constructed mainly by including lid unit locking pawls (not
shown) provided so as to be projected from the peripheral portion
of the lid unit 14 for transport. The lid unit locking pawls are
fit in the first fitting portions 23.
[0117] The lid unit 15 for the manufacturing line is a lid unit for
enabling the container body 12 of the transported thin plate
supporting container 11 to be used as it is for the manufacturing
line in the factory. The lid unit 15 for the manufacturing line is
placed in a semiconductor manufacturing factory or the like as a
single product independent of the thin film supporting container
11. The lid unit 15 for the manufacturing line is constructed by,
as shown in FIGS. 7 and 8,a body 30, a cover plate (notshown), and
the simple attaching/detaching mechanism 32.
[0118] The body 30 is formed thinly in an almost square shape so as
not to stick out in a state where it is attached to the lid unit
receiving portion 21 of the container body 12. Around the lower
portion of the body 30, a gasket receiving portion 31 is attached.
A gasket (not shown) is provided for the gasket receiving portion
31. In a state where the body 30 is attached to the lid unit
receiving portion 21, the gasket receiving portion 31 is fit in the
seal groove 21C to seal the container body 12. The gasket is
properly formed in accordance with the shape of the seal groove 21C
in a manner similar to the gasket 22 of the lid unit 14 for
transport.
[0119] At each of end portions on both sides in the longitudinal
direction (both lower right and upper left) sides in FIG. 7) of the
body 30 of the lid unit 15 for the manufacturing line, a recess 33
to which the simple attaching/detaching mechanism 32 is attached is
formed. The recess 33 is formed by denting the end portion of the
body 30 in an almost rectangular shape. At each of both end
portions in the longitudinal direction of the recess 33 (both ends
on the upper right and lower left) sides in FIG. 7), an opening 34
from which a tip fitting portion 56 of the locking member 42 to be
described later projects is provided. The opening 34 is provided in
a position corresponding to the position of the second fitting
portion 24 in the lid unit receiving portion 21 in a state where
the body 30 is fit in the lid unit receiving portion 21. On the
bottom of the recess 33, a rotation supporting shaft 36, stoppers
37, locking pawls 38, base-end lower cams 39, and a tip-side cam 40
are provided. To the recess 33, a cover plate is detachably
attached. The cover plate is detached at the time of cleaning the
simple attaching/detaching mechanism 32 to be provided in the
recess 33.
[0120] The rotation supporting shaft 36 is a member for rotatably
supporting a feeding member 43 which will be described later. The
rotation supporting shaft 36 is provided so as to be raised from
the bottom in a cylindrical shape. The rotation supporting shaft 36
is fit in a rotation cylindrical portion 63 in the feeding member
43 and supports the feeding member 43 rotatably. The stopper 37 is
a member for supporting the feeding member 43 in a state where the
feeding member 43 is turned at a predetermined angle. The stopper
37 is constructed by plate-shaped members raised from the bottom in
two positions around the rotation supporting shaft 36. By curving
the plate-shaped members, receiving portions 37A are formed. By
fitting a projection 65A of a engaging piece 65 of the feeding
member 43 with the receiving portion 37A, the feeding member 43 is
supported at a predetermined angle.
[0121] The locking pawl 38 is a member for fixing a cover presser
46, to be described later, to the bottom of the recess 33. The
cover pressers 46 are provided on both sides in the longitudinal
direction of the recess 33, so that six pieces of locking pawls 38
are attached on each of both sides in the longitudinal direction of
the recess 33. The locking pawl 38 is a member having an L shape. A
lower supporting plate piece 88 of the cover presser 46 fits with
the locking pawl 38.
[0122] The base-end lower cam 39 and the tip-side cam 40 are
members constructing a cam mechanism 44 to be described later. The
base-end lower cam 39 and, to be described later, a base-end upper
cam 53 construct a base-end-side cam for pressing the base-end side
of the locking member 42 downward to make the locking member 42
project.
[0123] The base lower-side cam 39 is, as shown in FIGS. 1 and 7, a
member for pressing the base-end side of the locking member 42 to
the other side (downward in FIG. 1) to make the locking member 42
project. The base-end lower cams 39 are provided on both sides of
the rotation supporting shaft 36. The base-end lower cam 39 is
formed so that its side sectional shape is an almost triangle
shape, and has an oblique surface 39A along which the base-end side
of the locking member 42 is moved upward/downward. The oblique
surface 39A is mirror-finished to reduce frictional resistance with
a base-end-side sliding surface 52 of the locking member 42.
[0124] The tip-side cam 40 is a member for pressing (lifting) the
tip fitting portion 56 of the locking member 42 to one side (upward
in FIG. 1) in association with projection of the locking member 42.
The tip-side cam 40 is provided at each of both ends in the
longitudinal direction of the recess 33 so as to face the opening
34. The tip-side cam 40 is formed so that its side sectional shape
is a triangle shape and has an oblique surface 40A for lifting the
tip side of the locking member 42 upward. The oblique surface 40A
is mirror-finished so as to reduce frictional resistance with a
tip-side sliding face 55A of a fulcrum portion 55 of the locking
member 42. At an upper end of the oblique surface 40A, a fitting
recess 40B is provided. The fitting recess 40B is a portion in
which the fulcrum portion 55 of the locking member 42 is fit.
[0125] In the recess 33, the simple attaching/detaching mechanism
32 is provided. The simple attaching/detaching mechanism 32 is a
mechanism for enabling the lid unit 15 for the manufacturing line
to be easily attached/detached to/from the container body 12. The
simple attaching/detaching mechanism 32 is constructed by, as shown
in FIG. 1, the locking member 42, the feeding member 43, the cam
mechanism 44, a holding cover 45, and the cover presser 46.
[0126] The locking member 42 is a member which is projected from
the opening 34 in the body 30 and is fit into the second recess 24
in the lid unit receiving portion 21 in a state where the lid unit
15 for the manufacturing line is attached to the lid unit receiving
portion 21 of the container body 12. The locking member 42 is
constructed by, as shown in FIG. 1 and FIGS. 9 to 11, a coupling
shaft 51, the base-end-side sliding surface 52, the base-end upper
cam 53, an upper groove 54, the fulcrum portion 55, the tip fitting
portion 56, a base-end side plate 57, and a tip side plate 58.
[0127] The coupling shaft 51 is a member which is fit into an
arched elongated hole 64 in the feeding member 43 which will be
described later, thereby coupling the feeding member 43 and the
locking member 42 to each other. The coupling shaft 51 is formed in
a round bar shape and provided in the base end portion of the
locking member 42 so as to be directed upward.
[0128] The base-end-side sliding surface 52 is a portion which
comes into slidable contact with the oblique surface 39A of the
base-end lower cam 39 to vertically move the base end portion of
the locking member 42. The base-end-side sliding surface 52 is
formed by obliquely cutting a lower portion of the base end of the
locking member 42. The base-end-side sliding surface 52 is
mirror-finished to reduce frictional resistance with the oblique
surface 39A of the base-end lower cam 39. When the locking member
42 is projected in a state where the base-end-side sliding surface
52 is in the slidable contact with the oblique surface 39A of the
base-end lower cam 39, the base-end portion of the locking member
42 is pushed downward. When the locking member 42 is retracted, the
base-end portion of the locking member 42 is pushed upward.
[0129] The base-end upper cam 53 is a portion for vertically moving
the base-end portion of the locking member 42 in cooperation with
the base-end lower cam 39. The base-end upper cam 53 is a portion
serving as the power point in the action of a lever. The coupling
shaft 51 does not serve as the power point in the action of a lever
but is a portion for simply receiving the power in the longitudinal
direction when the locking member 42 is projected/retracted.
[0130] The base-end upper cam 53 is provided near the base end
portion of the locking member 42 so as to be directed upward. The
base-end upper cam 53 is formed so that its side face sectional
shape is a triangle shape and has an oblique surface 53A by which
the base side of the locking member 42 is moved vertically. The
oblique surface 53A of the base-end upper cam 53 is mirror-finished
in a manner similar to the oblique surface 39A of the base-end
lower cam 39 and is in slidable contact with a cam pressing
projection 69 on the holding cover 45 side which will be described
later. The oblique surface 53A of the base-end upper cam 53 is set
so as to be almost parallel with the oblique surface 39A of the
base-end lower cam 39. With the configuration, when the locking
member 42 is projected in a state where the cam pressing projection
69 is in slidable contact with the oblique surface 53A of the
base-end upper cam 53, the base-end upper cam 53 is pressed by the
cam pressing projection 69 and the base-end portion of the locking
member 42 is pushed downward. When the locking member 42 is
retracted, the base-end sliding surface 52 is pressed by the
oblique surface 39A of the base-end lower cam 39, and the base-end
portion of the locking member 42 is pushed upward.
[0131] The fulcrum portion 55 is a portion which supports the tip
portion of the locking member 42 and serves as the center of
rotation. The fulcrum portion 55 is a portion serving as a fulcrum
in the action of a lever. The fulcrum portion 55 is formed in a
square shape having an almost right angle on the under face of the
tip portion of the locking member 42. At the vertex portion of the
fulcrum portion 55 having the square shape, the tip sliding surface
55A is formed. The tip sliding surface 55A is a portion which comes
into slidable contact with the oblique surface 40A of the tip-side
cam 40 to vertically move the tip fitting portion 56 of the locking
member 42. The tip sliding surface 55A is formed by obliquely
cutting the vertex portion of the fulcrum portion 55. The tip
sliding surface 55A is mirror-finished so as to reduce frictional
resistance with the oblique surface 40A of the tip-side cam 40.
When the locking member 42 is projected in a state where the tip
sliding surface 55A is in slidable contact with the oblique surface
40A of the tip-side cam 40, the tip fitting portion 56 of the
locking member 42 is pushed upward. When the locking member 42 is
retracted, the tip portion of the locking member 42 is pushed
downward.
[0132] Further, the fulcrum portion 55 is fit in the fitting recess
40B of the tip-side cam 40 and swings around the fitting recess 40B
as a center.
[0133] The tip fitting portion 56 is a portion which is projected
to the outside from the opening 34 in the recess 33 and is directly
fit in the second fitting portion 24 of the lid unit receiving
portion 21. The tip fitting portion 56 serves as the point of
application in the action of a lever. The tip fitting portion 56 is
provided with a small distance from the fulcrum portion 55 so as to
display sufficient power in a state where it is fit in the second
recess 24 in the lid unit receiving portion 21.
[0134] The base-end side plates 57 and the tip side plates 58 are
members for allowing reciprocating movement while supporting the
locking member 42.
[0135] The feeding member 43 is a member which is connected to the
locking member 42 to make the locking member 42 project/retract.
The feeding member 43 is rotatably attached to the rotation
supporting shaft 36 of the recess 33. The feeding member 43 is
constructed by, as shown in FIGS. 1, 7, 12, 13, 14, and 15, a top
plate 61, a key groove 62, the rotation cylindrical portion 63, the
arched elongated hole 64, and an engagement piece 65.
[0136] The top plate 61 is formed in an almost disc shape. In two
opposite positions in the top plate 61, notches 66 each for
providing the engagement piece 65 are formed.
[0137] The key groove 62 is a groove in which a latch key of a lid
unit attaching/detaching apparatus (not shown) is fit at the time
of automatically attaching/detaching the lid unit 15 for the
manufacturing line by the apparatus. The key groove 62 is provided
in the center of the upper surface of the top plate 61.
[0138] The rotation cylindrical portion 63 is a member for
rotatably attaching the feeding member 43 to the rotation
supporting shaft 36 of the recess 33. The rotation cylindrical
portion 63 is provided in the center of the under surface of the
top plate 61. In the center of the rotation cylindrical portion 63,
the key groove 62 is positioned.
[0139] The arched elongated hole 64 is a portion for converting the
rotation of the feeding member 43 to the projecting/retracting
operation of the locking member 42. The arched elongated hole 64 is
formed in each of two opposite positions in the top plate 61. The
arched elongated hole 64 is formed by a part of a spiral so that
its one end 64A is close to the center of the top plate 61 and the
other end 64B is far from the center. When the coupling shaft 51 of
the locking member 42 is fit at the one end 64A of the arched
elongated hole 64, the locking member 42 is retracted. When the
coupling shaft 51 is fit at the other end 64B, the locking member
42 is projected.
[0140] On the under surface of the top plate 61 in the arched
elongated hole 64, a gently sloped wall surface 64C is provided.
The wall surface 64C is set so that its height is the same as that
of the under surface of the top plate 61 at one end 64A of the
arched elongated hole 64 and gradually increases toward the other
end 64B in order to connect the locking member 42 and the feeding
member 43 with reliability. That is, in a state where the coupling
shaft 51 of the locking member 42 is fit in the other end 64B of
the arched elongated hole 64, the base-end portion of the locking
member 42 is pushed downward. Even in the state where the base-end
portion is pushed down, with the structure, the coupling shaft 51
can be fit in the arched elongated hole 64 with reliability.
[0141] The engagement piece 65 is a member for supporting the
feeding member 43 in a state where the feeding member 43 swings
only by a predetermined angle. The engagement pieces 65 are
provided in two opposite positions in the periphery of the top
plate 61. The engagement piece 65 is constructed by a plate member
extended from the top plate 61 a long the periphery. At the tip of
the engagement piece 65, the projection 65A to be fit in the
receiving portion 37A of the stopper 37 is provided. The engagement
piece 65 has elasticity and elastically supports the projection
65A. By fitting of the projection 65A in the receiving portion 37A
of the stopper 37, the feeding member 43 is supported at the
predetermined swing angle (an angle at which the locking member 42
is projected to fix the lid unit 15 for the manufacturing line to
the container body 12).
[0142] The cam mechanism 44 is a member which comes into contact
with the top face of the second fitting portion 24 in a state where
the tip fitting portion 56 of the locking member 42 fed by the
feeding member 43 is fit in the second fitting portion 24 in the
lid unit receiving portion 21 to thereby press the lid unit 15 for
the manufacturing line downward and fix the lid unit 15 to the
container body 12 side. With the cam mechanism 44, the tip fitting
portion 56 of the locking member 42 fed by the feeding member 43 is
pressed down so as to come into contact with the top face of the
second fitting portion 24 and the base-end portion is pressed
downward, thereby pressing the lid unit 15 for the manufacturing
line downward and fixing the lid unit 15 to the container body 12
side by the action of a lever. The cam mechanism 44 is constructed
by the base-end lower cam 39, base-end upper cam 53, base-end-side
sliding surface 52, cam pressing projection 69, tip-side cam 40,
and tip sliding surface 55A. The base-end lower cam 39, base-end
upper cam 53, base-end-side sliding surface 52, tip-side cam 40,
and tip sliding surface 55A are as described above.
[0143] The cam pressing projection 69 is a member which comes into
contact with the oblique surface 53A of the base-end upper cam 53
and presses the base-end portion of the locking member 42 downward
in association with projection of the locking member 42. The cam
pressing projection 69 is provided on the under face of the holding
cover 45. Specifically, in a state where the base-end-side sliding
surface 52 of the locking member 42 is in slidable contact with the
oblique surface 39A of the base-end lower cam 39, the cam pressing
projection 69 is positioned so as to be in slidable contact with
the oblique surface 53A of the base-end upper cam 53 without a
gap.
[0144] The holding cover 45 is a member for holding the locking
member 42 and the feeding member 43. The holding cover 45 is
constructed by, as shown in FIGS. 16 and 17, a feeding member
holding portion 71 and a locking member holding portion 72.
[0145] The feeding member holding portion 71 is a member for
supporting the feeding member 43 in a state where rotation of the
feeding member 43 is allowed. The feeding member holding portion 71
is constructed by peripheral plates 74 and a top plate 75. The
peripheral plates 74 are formed so as to cover the periphery of the
feeding member 43. The top plate 75 is formed so as to cover the
upper side of the feeding member 43. In the center portion of the
top plate 75, a key hole 76 having the same size as that of the key
groove 62 in the feeding member 43 is provided. The key hole 76 is
aligned with the key groove 62 in the feeding member 43 in a state
where the feeding member 43 is covered with the top plate 75. With
the configuration, in a state where the locking member 42 is
retracted, the key groove 62 and the key hole 76 are aligned with
each other.
[0146] The locking member holding portion 72 is a member for
supporting the locking member 42 in a reciprocating state. The
locking member holding portions 72 are provided on both right and
left sides of the feeding member holding portion 71. Each of the
locking member holding portions 72 is constructed by side plates 78
and a top plate 79.
[0147] The side plates 78 are members for supporting the base-end
portion of the locking member 42 from the right and left sides. The
side plate 78 is constructed by a wide portion 78A and an arrow
portion 78B. The wide portion 78A is a portion into which the
base-end side plate 57 of the locking member 42 is fit. The narrow
portion 78B is a portion in which the portion between the base-end
side plate 57 and the tip-side plate 58 in the locking member 42 is
fit.
[0148] The top plate 79 is a member for supporting the locking
member 42 from above. In the base-end portion in the under face of
the top plate, the above-described cam pressing projection 69 is
provided. At the ends in the under face of the top plate 79,
projections 80 for support, which are fit into the upper grooves 54
in the locking member 42, are provided. On the tip side of the top
plate 79, slits 81 are opened and a projected portion 82 is
provided at the end of the slit 81. The projected portion 82 is
constructed by a center projected piece 82A and right and left
retaining pieces 82B and is elastically supported by the slits 81.
When the center projected piece 82A and the right and left
retaining pieces 82B of the projected portion 82 are fit in a
cross-shaped notch 86A of the cover presser 46, the holding cover
45 and the cover presser 46 are positioned.
[0149] As shown in FIGS. 1, 18, and 19, the cover presser 46 is a
member for fixing the holding cover 45 to the recess 33 in the lid
unit 15 for the manufacturing line. Specifically, the two cover
pressers 46 supports each of the locking member holding portions 72
to fix the holding cover 45 to the recess 33. The cover presser 46
is constructed by side plates 85, a top plate 86, upper supporting
plate pieces 87, and the lower supporting plate pieces 88.
[0150] The side plates 85 cover the right and left sides of the
locking member 42 while allowing reciprocating motion of the
locking member 42. The top plate 86 integrally supports the side
plates 85 and covers the top of the locking member 42 while
allowing reciprocating motion of the locking member 42. The upper
supporting plate pieces 87 are members for supporting the top plate
79 of the locking member holding portion 72 of the holding cover 45
from below. The top plate 79 of the locking member holding portion
72 is supported from top and bottom by the top plate 86 and upper
supporting plate pieces 87 of the cover presser 46. The lower
supporting plate piece 88 is a portion for fixing the cover presser
46 to the recess 33. Three lower supporting plate pieces 88 are
provided at the lower end of each of the side plates 85. The lower
supporting plate pieces 88 fit with the locking pawls 38 provided
for the recess 33, thereby fixing the cover presser 46 to the
recess 33. Each of the lower supporting plate pieces 88 has a taper
88A so as to easily fit with the locking pawl 38.
[0151] On the under face of each of the lid unit 14 for transport
and the lid unit 15 for the manufacturing line, as shown in FIGS.
20 to 22, a wafer presser 91 as a thin plate presser is provided.
The wafer presser 91 is a member for supporting a plurality of
semiconductor wafers housed in the container body 12 from above.
The wafer presser 91 is constructed by a base-end supporting
portion 92, an elastic supporting plate 93 and contact pieces
94.
[0152] The base-end supporting portion 92 is a member for
supporting the elastic supporting plate 93 and the contact pieces
94. The base-end supporting portion 92 is formed in a square bar
shape along the overall length of the wafer presser 91 and is fixed
on the under face of the lid unit.
[0153] The elastic supporting plate 93 is a member for elastically
supporting the contact piece 94. The elastic supporting plates 93
are arranged, as many as the number corresponding to the number of
semiconductor wafers housed in the container body 12. The elastic
supporting plates 93 are fixed to the base-end supporting portion
92 in a state where they are arranged in a horizontal line. The
elastic supporting plate 93 is constructed by a first supporting
plate piece 93A bent in an S shape in side view and a second
supporting plate piece 93B bent in an U shape. The base-end portion
of the first supporting plate piece 93A is fixed to the base-end
supporting portion 9 2, and a first contact piece 9 4A is fixed at
the tip of the first supporting plate piece 93A. The base-end
portion of the second supporting plate piece 93B is integrally
connected to the first supporting plate piece 93A via a first
contact piece 94A, and a second contact piece 94B is fixed to the
tip of the second supporting plate piece 93B.
[0154] The contact piece 94 is a member for directly supporting a
semiconductor wafer. The contact piece 94 is constructed by the
first contact piece 94A and the second contact piece 9 4B and each
semiconductor wafer is supported in two positions. The contact
piece 94 is constructed by two blocks 96 and supporting pawls 97
alternately arranged.
[0155] Each of the blocks 96 has an inclined surface 96A and a
contact surface 96B. The inclined surface 96A is formed so that the
two blocks 96 are open to the outside in a state where they are
attached so as to face each other. Consequently, the peripheral
portion of a semiconductor wafer is easily inserted between the two
blocks 96. The contact surfaces 96B are formed so as to construct a
groove having a predetermined width (width slightly wider than the
thickness of the semiconductor wafer) in a state where the two
neighboring blocks 96 are attached so as to face each other.
[0156] The supporting pawls 97 are members which come into direct
contact with the peripheral portion of a semiconductor wafer to
support the semiconductor wafer. The supporting pawl 97 is provided
for the contact surface 96B of each block. The supporting pawl 97
takes the form of a vertically-long projection. The supporting
pawls 97 are provided on the facing contact surfaces 96B in a
staggered configuration. Specifically, two supporting pawls 97 are
provided at both ends of the contact surface 96B as one of the
contact surfaces 96B, and one supporting pawl 97 is provided in the
center of the other contact surface 96B, thereby disposing the
facing supporting pawls 97 in a staggered configuration. Each of
the supporting pawls 97 is formed by an elastic material, and
elastically supports the peripheral portion of a semiconductor
wafer. Since the width between the two contact surfaces 96B is
slightly wider than the thickness of the semiconductor wafer, the
interval between the tips of the supporting pawls 97 disposed on
the contact surfaces 96B is narrower than the thickness of the
semiconductor wafer. Consequently, the semiconductor wafer is
inserted between the supporting pawls 97 while slightly pushing the
supporting pawls 97 made of the elastic member and disposed
alternately. Accordingly, the peripheral portion of a semiconductor
wafer is supported by the supporting pawls 97 disposed alternately
with reliability.
[0157] A lid unit holder 100 is provided on the outside of the lid
unit 15 for the manufacturing line, as shown in FIG. 23. The lid
unit holder 100 is a member for preventing the lid unit 15 for the
manufacturing line from being come off from the container body 12.
The lid unit holder 100 is constructed by a supporting plate 101,
hooks 102, and fitting projections 103.
[0158] The supporting plate 101 is a member for supporting the
hooks 102 and the fitting projections 103. The hooks 102 are
provided at both ends of the supporting plate 101. The hooks 102
are caught by the flange of the container body 12.
[0159] The fitting projections 103 are provided on one side surface
of the supporting plate 101. The fitting projection 103 is formed
in the same shape as the key groove 62 and is fit into the key
groove 62 via the key hole 76. Two fitting projections 103 are
provided in the positions aligned with the two key grooves 62.
Consequently, in a state where the hooks 102 are caught by the
flange of the container body 12, the fitting projections 103 are
fit in the key grooves 62 to fix the feeding member 43. This is to
prevent the lid unit 15 for the manufacturing line fixed to the
container body 12 from being loosened when the feeding member 43
swings due to vibration, shock, and the like during transportation
of the thin plate supporting container.
[0160] The thin plate supporting container 11 constructed as
described above is used as follows.
[0161] In the case of detaching the lid unit 15 for the
manufacturing line from the container body 12, the latch key is
inserted in the key groove 62 and turned. By the operation, from
the state of FIG. 24A, the feeding member 43 is turned and the
locking member 42 is gradually retracted. The tip sliding surface
55A of the fulcrum portion 55 of the locking member 42 slides along
the oblique surface 40A of the tip-side cam 40 and, as shown in
FIGS. 24B, 24C, and 24D, the tip fitting portion 56 is pushed
downward. Simultaneously, the base-end sliding surface 52 of the
locking member 42 slides along the oblique surface 39a of the
base-end lower cam 39, and the base-end portion of the locking
member 42 is pushed up. The tip fitting portion 56 is thereby
completely housed in the body 30. After that, the lid unit 15 for
the manufacturing line is detached from the container body 12.
[0162] In the case of attaching the lid unit 15 for the
manufacturing line to the container body 12, the lid unit 15 for
the manufacturing line is attached to the lid unit receiving
portion 21 and the latch key is fit in the key groove 62 and
turned. By the operation, in contrast to the above case, the
locking member 42 is projected from the body 30. At this time, the
fulcrum portion 55 of the locking member 42 slides along the
oblique surface 40A of the tip-side cam 40 and the tip fitting
portion 56 is pushed upward. Further, the cam pressing projection
69 comes into contact with the oblique surface 53A of the base-end
upper cam 53 and the base-end portion of the locking member 42 is
pressed down. By the operation, the base-end sliding surface 52 of
the locking member 42 is pushed downward along the oblique surface
39A of the base-end lower cam 39.
[0163] In the fulcrum portion 55 of the locking member 42, the tip
sliding surface 55A fits in the fitting recess 40B, and the locking
member 42 swings around the fitting recess 40B as a center.
[0164] In the base-end portion of the locking member 42, the
base-end-side sliding surface 52 slides along the oblique surface
39A of the base-end lower cam 39 and the cam pressing projection 69
comes into contact with the oblique surface 53A of the base-end
upper cam 53 to press the base-end portion of the locking member 42
downward.
[0165] The locking member 42 functions as a lever using the fulcrum
portion 55 fit in the fitting recess 40B as a fulcrum and, in a
state where the tip fitting portion 56 is fit in the second fitting
portion 24 of the lid unit receiving portion 21, strongly presses
the lid unit 15 for the manufacturing line against the container
body 12 so as to be fixed.
[0166] In a state where the lid unit 15 for the manufacturing line
is attached to the container body 12, the lid unit holder 100 is
attached. Specifically, the hooks 102 are caught by the flange of
the container body 12, so that the fitting projections 103 are fit
in the key groove 62 to fix the feeding member 43.
[0167] In the container body 12, the peripheral portion of a
semiconductor wafer is fit in the contact piece 94. In the contact
piece 94, the peripheral portion of the semiconductor wafer is fit
between the supporting pawls 97 disposed in a staggered
configuration and is firmly supported by the supporting pawls
97.
[0168] In the case where a strong shock is applied from the outside
of the thin plate supporting container 11, since the locking member
42 strongly presses the lid unit 15 for the manufacturing line
against the container body 12 by the action of a lever, the lid
unit 15 for the manufacturing line is not taken off from the
container body 12. Further, since the feeding member 43 is fixed by
the lid unit holder 100, the locking member 42 does not come off
from the second fitting portion 24 due to turn of the feeding
member 43.
[0169] On the other hand, the semiconductor wafer in the thin plate
supporting container 11 is fit in the contact piece 94 of the wafer
presser 91 and is supported from both sides by the supporting pawls
97 disposed in a staggered configuration, so that the semiconductor
wafer does not come off from the contact piece 94. Further, since
the contact piece 94 is supported by the elastic supporting plate
93, the first supporting plate piece 93A and the second supporting
plate piece 93B support the semiconductor wafer by their elasticity
or by being in contact with the under face of the lid unit 15 for
the manufacturing line, and the semiconductor wafer is prevented
from being damaged.
[0170] In the case of cleaning, by sliding the cover presser 46 so
as to be detached from the locking pawls 38, the simple
attaching/detaching mechanism 32 can be disassembled into the
locking member 42, feeding member 43, cam mechanism 44, holding
cover 45, and cover presser 46 which can be individually cleaned
and dried.
[0171] The thin plate supporting container 11 produces the
following effects.
[0172] (1) Since the locking member 42 is projected by using the
action of a lever, the lid unit 15 for the manufacturing line can
be securely fixed to the container body 12 with a strong power.
[0173] (2) Since the simple attaching/detaching mechanism can be
easily disassembled into component parts, in the case of cleaning
the mechanism, the mechanism can be detached and disassembled into
the component parts, and the component parts can be individually
cleaned and promptly dried.
[0174] (3) Since the supporting pawls 97 are disposed in a
staggered manner, the supporting pawls 97 come into contact with
the periphery of a semiconductor wafer and a semiconductor wafer
can be supported with reliability.
Second Embodiment
[0175] A second embodiment of the invention will now be described.
The second embodiment relates to an improvement in the wafer
presser.
[0176] The thin plate supporting container may be shaken due to
various factors during transportation. When the shake is
transmitted to a semiconductor wafer, in some cases, the
semiconductor wafer turns due to the shake and this is undesirable.
Consequently, when the thin plate supporting container is used in a
mode where it is subjected to shake, a wafer presser (thin plate
presser) of the second embodiment is used. A wafer presser 121 of
the second embodiment will now be described with reference to FIGS.
34 to 43. Since the structure is similar to the thin plate
supporting container 11 of the above first embodiment except for
the wafer presser 121, the same reference numerals are designated
to the similar members and the description of the similar members
will not be repeated.
[0177] The wafer presser 121 is constructed by, as shown in FIG.
40, base-end supporting portions 122, elastic supporting plates
123, contact pieces 124, a connecting and supporting plate 125, and
supporting ribs 126.
[0178] The base-end supporting portions 122 are members provided at
both ends of the wafer presser 121, for directly supporting the two
elastic supporting plates 123. The base-end supporting portion 122
is formed in a rectangular rod shape so as to extend along the
overall length in the longitudinal direction (vertical direction of
FIG. 35) of the wafer presser 121. On the under face of a lid unit
127, two hook-shaped supporting portions 128 are provided. The
base-end supporting portion 122 is fit in the hook-shaped
supporting portion 128 and fixed to the rear face side of the lid
unit.
[0179] The elastic supporting plate 123 is a member for elastically
supporting the outer end of the contact piece 124. The pairs of
elastic supporting plates 123 of the number corresponding to the
number of semiconductor wafers 120 housed in the container body 12
are arranged. The elastic supporting plates 123 are fixed to the
base-end supporting portions 122 in a state where they are arranged
in a line. The elastic supporting plate 123 is formed by being bent
in an S shape in side view. The base-end portions of the two
elastic supporting plates 123 are fixed to two base-end supporting
portions 122. The contact piece 124 is attached to the tip of each
of the elastic supporting plates 123. The elastic supporting plates
123 elastically support the contact pieces 124.
[0180] The contact piece 124 is a member which comes into direct
contact with the periphery of each semiconductor wafer 120 to
directly support the semiconductor wafer 120. As shown in FIGS. 42
and 43, on one side face of the contact piece 124, a V-shaped
fitting groove 124A in which the semiconductor wafer 120 fits is
provided. The fitting groove 124A is a V-shaped groove having two
stages. The groove in the first stage has a gentle inclination of
an angle of 124.degree.. The groove in the second stage has an
inclination of an angle of 44.degree.. With the structure, when the
periphery of the semiconductor wafer 120 comes into contact with
the groove in the first stage, the periphery of the semiconductor
wafer 120 is guided along the gentle slope and is dropped into the
groove in the second stage. In the groove in the second stage, the
semiconductor wafer 120 is supported. The bottom of the groove in
the second stage is formed in a flat surface having a width which
is almost the same as the thickness of the semiconductor wafer 120.
The inclination angle of the groove in the second stage and the
width of the bottom are set according to the dimensions of the
periphery of the semiconductor wafer 120. Since the periphery of
the semiconductor wafer 120 is cut at an edge angle of 44.degree.,
the inclination angle of the groove is set to 44.degree.. Further,
the width of the bottom of the groove is also set in accordance
with the width of the periphery of the semiconductor wafer 120.
Consequently, when the periphery of the semiconductor wafer 120 is
fit in the groove in the second stage, the semiconductor wafer 120
can be supported with reliability while being in contact with a
large area and can be prevented from being turned due to shake.
Although the groove in the second stage is set to have the
inclination of 44.degree. in accordance with the edge angle of the
semiconductor wafer 120, the angle may be smaller a little in
relation to the material of the contact piece 124. Specifically,
the angle of the groove in the second stage is properly set within
the range from about 40.degree. to 44.degree. in accordance with
variation in elasticity. If the angle of the groove in the second
stage is too small, the periphery of the semiconductor wafer 120
may be caught. In such a case, when the lid unit 127 is lifted, the
semiconductor wafer 120 may be lifted together. Consequently, the
angle is set so as not to catch the semiconductor wafer 120. In the
case where the edge angle of the semiconductor wafer 120 varies, in
the case of a thin plate other than the semiconductor wafer 120,
and the like, the angle is properly set within the range of about
20.degree. to 60.degree..
[0181] As shown in FIGS. 40 and 41, the bottom of the fitting
groove 124A is set at an angle according to the shape of the
periphery of the semiconductor wafer 120, that is, it is set so as
to extend in the tangent direction of the periphery of the
semiconductor wafer 120. As will be described later, elasticity
increases in proportion to the deflection amount of the wafer
presser 121, so that the force of pressing the semiconductor wafer
120 is equalized by the contact pieces 124. That is, as a change
amount of one of the two contact pieces 124 increases, the
elasticity increases according to the change amount, the contact
piece 124 slightly pushes the semiconductor wafer 120 to the other
contact piece 124 side, and the elastic forces of the two contact
pieces 124 are settled at the same strength. As a result, the
elastic forces of the right and left contact pieces are
automatically adjusted so as to become the same. Further, it is set
so that, in a state where the lid unit 127 is attached to the
container body 12, the semiconductor wafer 120 comes into contact
with the bottom in an almost center portion (contact A in FIG. 41)
of the fitting groove 124A.
[0182] The connecting and supporting plate 125 is a member for
connecting the two contact pieces 124 and supporting them. Both
ends of the connecting and supporting plate 125 are connected to
the contact pieces 124 and elastically support the contact pieces
124. The connecting and supporting plate 125 is formed by being
bent in an almost U shape in side view. Specifically, the
connecting and supporting plate 125 is constructed by vertical
plates 125A and 125B on both sides and a horizontal plate 125C. The
vertical plates 125A and 125B are disposed in a direction
perpendicular to the rear face of the lid unit 127 and support the
contact pieces 124 almost without being deflected.
[0183] The horizontal plate 125C is elastically deflected. The
function of elastically supporting the contact pieces 124 by the
connecting and supporting plate 125 is mainly carried out by the
horizontal plate 125C. The horizontal plate 125C is disposed so as
to be along the rear face of the lid unit 127 in a state where the
vertical plates 125A and 125B are connected to both ends of the
horizontal plate 125C. The center portion of the horizontal plate
125C is supported by a supporting projection bar 131 which will be
described later. Both ends of the horizontal plate 125C are
deflected around the supporting projection bar 131 as a center.
[0184] The elastic force generated by deformation of the horizontal
plate 125 (elastic force for supporting the contact piece 124, of
the connecting and supporting plate 125) is set to be stronger than
the elastic force of supporting the contact piece 124, of the
elastic supporting plate 123. Therefore, the inner ends of the two
contact pieces 124 are supported by the stronger elastic force, and
the outer ends are supported by the weaker elastic force. The
bottom of the fitting groove 124A of each of the two contact pieces
124 is disposed in the tangent direction of the periphery of the
semiconductor wafer 120 as described above. With the structure, it
is set so that the power of supporting the semiconductor wafer 120,
of the wafer presser 121 increases in proportional to the movement
amount (amount of shake) of the semiconductor wafer 120. That is,
in a normal state, as shown by a solid line in FIG. 41, the
semiconductor wafer 120 is supported by being in contact with the
bottom of the fitting groove 124A in an almost center portion
(contact point A in FIG. 41) of the bottom. When the semiconductor
wafer 120 is shaken, the inner end of the contact piece 124
supported by the stronger elastic force of the connecting and
supporting plate 125 does not change so much but the external end
supported by the weaker elastic force of the elastic supporting
plate 123 largely changes, so that, as shown by an imaginary line
in FIG. 41, the semiconductor wafer 120 is moved toward the inner
end side (contact point B side in FIG. 41) on the bottom of the
fitting groove 124A and supported. Therefore, when the amount of
shake in the semiconductor wafer 120 is small (the deflection
amount of the wafer presser 121 is small), the outer end side
(contact point A side in FIG. 41) of the semiconductor wafer 120
comes into contact with the bottom of the fitting groove 124A and
is supported with the weaker elastic force. When the amount of
shake in the semiconductor wafer 120 increases (the deflection
amount of the wafer presser 121 increases), the contact point of
the semiconductor wafer 120 moves toward the inner end (contact
point B side in FIG. 41) of the fitting groove 124A and the
semiconductor wafer 120 is supported with the stronger elastic
force. Further, as the amount of movement to the inner end of the
contact point of the semiconductor wafer 120 increases, the power
applied to the connecting and supporting plate 125 increases more
than to the elastic supporting plate 123, and the elastic force
increases, so that shake of the semiconductor wafer 120 is
efficiently suppressed.
[0185] The supporting rib 126 is a supporting member for supporting
the connecting and supporting plate 125 to prevent the connecting
and supporting plate 125 from being deviated in the direction along
the rear face of the lid unit. The supporting rib 126 is provided
in the center portion of the rear face of the lid unit 127 as shown
in FIGS. 34 to 40. The supporting rib 126 is provided so as to
cover all of a number of connecting and supporting plates 125 of
the wafer presser 121 disposed. Specifically, the supporting rib
126 is set to have a length in which all of the connecting and
supporting plates 125 arranged of the number corresponding to the
number of the semiconductor wafers 120 to be housed can be fit. The
supporting rib 126 is constructed by two supporting walls 129 and
130.
[0186] The supporting walls 129 and 130 are provided so as to face
each other and in parallel with each other. Each of the supporting
walls 129 and 130 is constructed by a supporting plate piece 133
and a partition plate piece 134.
[0187] The supporting plate piece 133 is a member for supporting
the vertical plates 125A and 125B of the connecting and supporting
plate 125 so as not to be deviated in the circumferential direction
of the semiconductor wafer 120 (the lateral direction in FIG. 40).
The supporting plate piece 133 directly supports the vertical
plates 125A and 125B of the connecting and supporting plate 125,
thereby indirectly supporting the contact pieces 124 so as not to
be deviated in the circumferential direction of the semiconductor
wafer 120.
[0188] The partition plate pieces 134 are plate pieces for
partitioning a number of connecting and supporting plates 125
disposed. The partition plate pieces 134 are positioned on the
outermost sides and between the neighboring connecting and
supporting plates 125. Accordingly, the partition plate pieces 134
support each of the connecting and supporting plates 125 from both
sides in the width direction. The partition plate pieces 134
directly support the connecting and supporting plates 125, thereby
indirectly supporting the contact pieces 124 so as not to be
deviated in the direction orthogonal to the circumferential
direction of the semiconductor wafer 120.
[0189] By sandwiching the connecting and supporting plate 125 with
the supporting plate piece 133 and the partition plate piece 134
from the periphery (in the direction orthogonal to the
circumferential direction of the semiconductor wafer 120 housed in
the container body 12), a deviation in the direction along the rear
surface of the lid unit of the connecting and supporting plate 125
is prevented and fluctuations in the direction perpendicular to the
rear surface of the lid unit are allowed.
[0190] The supporting plate piece 133 and the partition plate piece
134 and the connecting and supporting plate 125 are set so as to
have a small gap therebetween, thereby preventing coming into
contact with each other when small shake occurs. That is, when the
semiconductor wafer 120 is shaken slightly, the connecting and
supporting plate 125 is deflected without coming into contact with
the supporting plate piece 133 and the partition plate piece 134,
thereby absorbing shake. When the shake becomes harder, the
connecting and supporting plate 125 is also shaken hard via the
contact pieces 124. Consequently, the connecting and supporting
plate 125 is supported by being in contact with the supporting
plate piece 133 and the partition plate piece 134.
[0191] Between the two supporting walls 129 and 130 of the
supporting ribs 126, as shown in FIG. 34 and FIGS. 37 to 39, the
supporting projection bar 131 is provided. The supporting
projection bar 131 is a member which is in direct contact with the
connecting and supporting plates 125 to support the connecting and
supporting plates 125. Specifically, the center portion of the
horizontal plate 125C of each of the connecting and supporting
plates 125 is supported by the supporting projection bar 131 by
being in contact, and both ends of the horizontal plate 125C can be
freely deflected. The supporting projection bar 131 is provided in
the center portion between the two supporting walls 129 and 130 in
parallel with the supporting walls 129 and 130, and its length is
almost the same as the supporting walls 129 and 130. The two
supporting walls 129 and 130 are provided in parallel so as to face
each other.
[0192] The supporting projection bar 131 is as shown in FIGS. 38
and 39. That is, the supporting projection bar 131 is formed in
such a manner that both sides are thin ("b" side in FIG. 38) and
the center side ("a" side in FIG. 38) is thick so as to make the
contact piece 124 positioned in the center projected to the
semiconductor wafer 120 side more than the contact pieces 124
positioned on both sides. In the embodiment, the supporting
projection bar 131 is formed so as to be arched as a whole. By the
structure, it is set so that, as shown in FIG. 39, the interval
between the supporting projection bar 131 and the connecting and
supporting plates 125 is wide on both sides and narrow in the
center in a state where the wafer presser 121 is attached to the
lid unit 127. Specific dimensions of the supporting projection bar
131 are properly set in accordance with the deflection amount of
the lid unit 127.
[0193] The supporting projection bar 131 is formed as described
above for the following reasons. When the lid unit 127 is attached
in a state where a plurality of semiconductor wafers 120 are housed
in the container body 12, predetermined repulsion acts on the lid
unit 127. The wafer presser 121 attached to the rear face of the
lid unit supports each of the semiconductor wafers 120 with certain
force. Consequently, the larger the force of supporting the
semiconductor wafer 120 becomes in association with increase in the
diameter of the semiconductor wafer 120 or the larger the number of
the semiconductor wafers 120 becomes, the larger the repulsion to
the wafer presser 121 becomes. By the repulsion, the lid unit 127
to which the wafer presser 121 is attached is slightly deflected to
the outside. When the lid unit 127 is deflected to the outside, the
force of supporting the semiconductor wafers 120 by the wafer
presser 121 becomes weaker in the center portion. To solve non
uniform force of supporting the semiconductor wafers 120, the
supporting projection bar 131 is provided. By the supporting
projection bar 131 of which center portion is thicker, deflection
of the lid unit 127 is absorbed. The wafer presser 121 supports the
semiconductor wafers 120 with uniform force.
[0194] The thin plate supporting container having structure as
described above acts as follows.
[0195] When the lid unit 127 is attached in a state where a
plurality of semiconductor wafers 120 are housed in the container
body 12, the wafer presser 121 fits with the semiconductor wafers
120. Specifically, the fitting groove 124A in each of the contact
pieces 124 fits with the periphery of the semiconductor wafer 120,
and the periphery of the semiconductor wafer 120 is guided to the
bottom of the fitting groove 124A. In a state where the periphery
of the semiconductor wafer 120 is fit in the groove in the second
stage, the periphery of the semiconductor wafer 120 is caught in
the groove in the second stage, and a wide area of the
semiconductor wafer 120 is in contact with the groove and supported
with reliability. Each of the contact pieces 124 is supported by
the elastic supporting plate 123 and the connecting and supporting
plate 125.
[0196] The elastic supporting plate 123 elastically supports the
outer end of each of the contact pieces 124 by its tip portion in a
state where its base-end portion is supported by the base-end
supporting portion 122 fixed to the rear face of the lid unit 127.
The connecting and supporting plate 125 elastically supports the
inner end of the contact piece 124 by its both ends in a state
where the center portion is supported by the supporting ribs
126.
[0197] Further, the arched supporting projection bar 131 supports
the contact piece 124 in a state where the supporting projection
bar 131 absorbs deflection of the lid unit 127. Accordingly, the
contact pieces 124 support the semiconductor wafers 120 with
uniform force.
[0198] The inner end of each of the contact pieces 124 is
elastically supported with relatively strong force and the outer
end is elastically supported with relatively weak force. At this
time, the contact piece 124 is in contact with the semiconductor
wafer 120 in a state where the bottom portion of the fitting groove
124A is along the tangential direction of the periphery of the
semiconductor wafer 120. The elastic forces of the two contact
pieces 124 are automatically adjusted so as to be the same to
equalize the force of pressing the semiconductor wafer 120 as a
whole. In such a manner, the semiconductor wafer 120 is stably
supported.
[0199] When shake is applied to the thin plate supporting container
during transportation or the like of the thin plate supporting
container, the semiconductor wafer 120 is also shaken. Further,
according to the shake of the semiconductor wafer 120, the contact
pieces 124 is also shaken.
[0200] When the shake is small, the amplitude of each of the
contact pieces 124 is small, so that the contact point between the
semiconductor wafer 120 and the contact piece 124 is on the outer
side (for example, around the contact point A in FIG.41). The
elastic supporting plate 123 is mainly deflected, and the
semiconductor wafer 120 is supported with weak elastic force.
[0201] When the shake is large, the amplitude of the contact piece
124 is large, so that the contact point between the semiconductor
wafer 120 and the contact piece 124 is shifted to the inner side
(for example, around the contact point B in FIG. 41). According to
the shift amount, the force applied to the connecting and
supporting plate 125 becomes larger than that to the elastic
supporting plate 123, and the elastic force increases.
Consequently,when the semiconductor wafer 120 is largely shaken,
the contact piece 124 pushes back the semiconductor wafer 120 with
strong elastic force, thereby suppressing the shake of the
semiconductor wafer 120. In such a manner, according to the
strength of shake, the force of supporting the semiconductor wafer
120 is automatically changed and the semiconductor wafer 120 is
supported with reliability.
[0202] As a result, all of the semiconductor wafers 120 are
supported with uniform force, the shake of the semiconductor wafer
120 caused by shake from the outside can be minimized, and the
semiconductor wafer 120 can be prevented from rotating.
[0203] Modifications
[0204] (1) In the first embodiment, the wafer presser 91 is
constructed by the base-end supporting portion 92, elastic
supporting plate 93, and contact piece 94. In a modification, as
shown in FIGS. 25, 26, and 27, the wafer presser is constructed by
a base-end supporting portion 110, an elastic supporting plate 111,
and a contact piece 112. The elastic supporting plate 111 supports
one end of the contact piece 112 in a state where the base-end
portion of the elastic supporting plate 111 is fixed to the
base-end supporting portion 110. Further, the elastic supporting
plate 111 is extended from the other end of the contact piece 112
to the under face of the lid unit 15 for the manufacturing line. An
inclined surface 112A and a contact surface 112B of the contact
piece 112 have functions similar to those of the inclined surface
96A and the contact surface 96B, respectively, of the above
embodiment. Three supporting pawls 113 on the inclined face 112A
and three supporting pawls 113 on the contact face 112B are
disposed so as to face each other alternately. The number of the
supporting pawls 113 may be changed if necessary.
[0205] The structure can also produce actions and effects similar
to those of the above embodiment.
[0206] (2) Although the wafer presser 91 has a one-side supporting
structure in the first embodiment, as shown in FIGS. 28 and 29, it
can also have a both-side supporting structure. The elastic
supporting plate is attached between and on both sides of the
contact pieces so as to support the contact pieces in a state where
the elastic supporting plate between the contact pieces is slightly
floated from the under face of the lid unit 15 for the
manufacturing line only by a gap S.
[0207] Since the contact piece is supported by the elastic
supporting plate between the contact pieces in a state where it is
slightly floated from the attachment face, a thin plate is
supported with a force which is normally not so strong. When a
large shock is given from the outside, like a case where the thin
plate supporting container is dropped by mistake, the gap S
disappears, and the elastic supporting plate between the contact
pieces comes into contact with the supporting face and strongly
supports the contact pieces. In such a manner, a thin plate is
protected from a strong shock.
[0208] (3) Although a semiconductor wafer is supported by the
supporting pawls 97 in the above first embodiment, it may be
supported by blocks. As shown in FIGS. 30 and 31, like the above
embodiment, blocks 115 are disposed alternately in a state where
two blocks 115 face each other. That is, four sets of blocks 115
are arranged while maintaining the intervals and are deviated from
each other. Further, the contact surfaces 115A in a set of blocks
115 are set at 20.degree.and 4.degree. from the vertical line. The
contact surface 115A on the side with which the semiconductor wafer
comes in contact is set to 4.degree.. By sandwiching the periphery
of a semiconductor wafer with the blocks at the angle 4.degree.
each (8.degree. by both sides), without deviating the semiconductor
wafer, the semiconductor wafer can be supported with
reliability.
[0209] Alternately, the blocks may be provided as shown in FIGS. 32
and 33. The configuration is similar to that described with
reference to FIGS. 28 and 29 and can produce actions and effects
similar to the above.
[0210] (4) Although an example of using the lid unit for the thin
plate supporting container in the manufacturing line has been
described in the first embodiment, the lid unit for the thin plate
supporting container can be also used for storage, transport, and
the like. In this case as well, actions and effects similar to
those of the above embodiment can be produced.
[0211] (5) Although two simple attaching/detaching mechanisms 32
are provided for the lid unit 15 for the manufacturing line in the
first embodiment, the number of the simple attaching/detaching
mechanisms 32 may be one or three or more in accordance with the
standard or the like.
[0212] (6) Although the case of applying the lid unit for a thin
plate supporting container to a container for housing semiconductor
wafers has been described in the first embodiment, the lid unit can
be applied not only to the container for housing semiconductor
wafers but also to a container for housing other thin plates. In
this case as well, actions and effects similar to those in the
above embodiment can be produced.
[0213] (7) In the first embodiment and the modification, the wafer
presser as a thin plate presser for supporting a thin plate housed
in a container body is applied to the thin plate supporting
container 11 of the embodiment. The invention is not limited to the
thin plate supporting container 11 but can be also applied to thin
plate supporting containers having other structures. In this case
as well, actions and effects similar to those of the above
embodiment can be produced.
[0214] (8) Although the lid unit holder 100 is applied to the thin
plate supporting container 11 in the first embodiment, the
invention is not limited to the thin plate supporting container.
The lid unit holder 100 can be also applied to thin plate
supporting containers having the other structures. In this case as
well, actions and effects similar to those of the above embodiment
can be produced.
[0215] (9) Although two contact pieces 124 of the wafer presser 121
are provided in the second embodiment, three or more contact pieces
124 may be provided. In the case of providing three or more contact
pieces 124, the connecting and supporting plate 125 and the
supporting rib 126 are provided between the neighboring contact
pieces 124. In this case as well, actions and effects similar to
those in the above embodiment can be produced.
[0216] (10) In the second embodiment, the horizontal plate 125C is
supported by the supporting projection bar 131. Alternately, a
supporting projection may be provided in the center of the
horizontal plate 125C. In the case of providing the supporting
projection, the supporting projection bar 131 may not be provided.
In the case of providing the supporting projection bar 131, the
supporting projection supports the horizontal plate 125C by being
in contact with the supporting projection bar 131. In the case
where the supporting projection bar 131 is not provided, the
supporting projection supports the horizontal plate 125C by being
in contact with the rear face of the lid unit 127.
[0217] In the case where the supporting projection bar 131 is not
provided, the height of the supporting projection in the center of
the horizontal plate 125C is set so that the center portion is
higher than both sides as in the second embodiment. In the case of
providing the supporting projection bar 131, the height obtained by
adding the supporting projection in the center portion of the
horizontal plate 125C and the supporting projection bar 131 is set
so that the center portion is higher than the both sides. In this
case as well, actions and effects similar to those in the second
embodiment can be produced.
[0218] (11) Although the fitting groove 124A of the contact piece
124 is formed in a V shape in the second embodiment, like the
contact piece 94 in the first embodiment, supporting pieces
disposed alternately may be provided for the contact piece 124.
That is, the contact piece 124 of the second embodiment may be
constructed by, like the contact piece 94 of the first embodiment,
the two blocks 96 and the alternately disposed supporting pawls
97.(supporting pieces). With the structure, the supporting pieces
disposed alternately are in contact with the periphery of the
semiconductor wafer 120, so that the semiconductor wafer 120 is
supported with reliability. As a result, shake of the semiconductor
wafer 120 caused by the vibrations from the outside can be
minimized. In addition, the semiconductor wafer 120 can be
prevented from being rotated more reliably.
[0219] (12) The structure for supporting the contact piece 124 of
the wafer presser 121 is not limited to the structure of the second
embodiment but may be another structure. Any structure may be
employed as long as the contact piece 124 positioned to the center
side as compared with the contact pieces positioned on both sides
can be disposed so as to be projected to the semiconductor wafer
120 side.
[0220] For example, the elastic supporting plate 123 may be formed
so as to dispose the contact piece 124 positioned to the center
side as compared with the contact pieces 124 positioned on both
sides so as to be projected to the semiconductor wafer 120 side.
Any one of the elastic supporting plate 123 and the connecting and
supporting plate 125 or both may be formed so as to dispose the
contact piece 124 which is positioned to the center side as
compared with the contact pieces 124 positioned on both sides so as
to be projected to the semiconductor wafer 120 side.
[0221] (13) Although the connecting and supporting plate 125 is
supported by the supporting ribs 126 in the second embodiment, it
can be supported by projections. Specifically, as shown in FIG. 44,
the connecting and supporting plate 125 may be supported by a
fitting projection 142 which is fit in a fitting hole 141 opened in
the connecting and supporting plate 125, thereby preventing
deviation of the connecting and supporting plate 125 along the rear
surface of the lid unit while allowing fluctuations in the
direction perpendicular to the rear surface of the lid unit. In
this case as well, actions and effects similar to those of the
second embodiment can be produced.
* * * * *