U.S. patent application number 10/870415 was filed with the patent office on 2004-11-11 for optical microdevice with rotatable microactuator.
Invention is credited to Heanue, John F., Jerman, John H..
Application Number | 20040223685 10/870415 |
Document ID | / |
Family ID | 46256844 |
Filed Date | 2004-11-11 |
United States Patent
Application |
20040223685 |
Kind Code |
A1 |
Heanue, John F. ; et
al. |
November 11, 2004 |
Optical microdevice with rotatable microactuator
Abstract
An optical microswitch comprising a support body and first and
second output fibers carried by the body. A rotary electrostatic
microactuator is carried by the body and extends in a plane. A
micromirror is disposed out of the plane. The microactuator has a
mirror holder coupled to the micromirror and at least one comb
drive assembly coupled to the mirror holder for driving the
micromirror about an axis of rotation extending perpendicular to
the plane between a first position for reflecting a laser beam to
the first output fiber and a second position for reflecting the
laser beam to the second output fiber.
Inventors: |
Heanue, John F.; (San Jose,
CA) ; Jerman, John H.; (Palo Alto, CA) |
Correspondence
Address: |
DORSEY & WHITNEY LLP
INTELLECTUAL PROPERTY DEPARTMENT
4 EMBARCADERO CENTER
SUITE 3400
SAN FRANCISCO
CA
94111
US
|
Family ID: |
46256844 |
Appl. No.: |
10/870415 |
Filed: |
June 16, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10870415 |
Jun 16, 2004 |
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09972259 |
Oct 5, 2001 |
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6763161 |
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09972259 |
Oct 5, 2001 |
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09464373 |
Dec 15, 1999 |
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6301403 |
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09972259 |
Oct 5, 2001 |
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09271440 |
Mar 18, 1999 |
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6798729 |
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09271440 |
Mar 18, 1999 |
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08823422 |
Mar 24, 1997 |
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60112263 |
Dec 15, 1998 |
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60112265 |
Dec 15, 1998 |
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60123512 |
Mar 8, 1999 |
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60022775 |
Jul 30, 1996 |
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60023476 |
Aug 6, 1996 |
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60025801 |
Aug 27, 1996 |
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Current U.S.
Class: |
385/16 ;
G9B/11.024; G9B/11.025; G9B/11.028; G9B/11.029; G9B/11.046;
G9B/11.053; G9B/7.053; G9B/7.103; G9B/7.107; G9B/7.112; G9B/7.116;
G9B/7.12; G9B/7.125; G9B/7.138 |
Current CPC
Class: |
G11B 7/0901 20130101;
G11B 11/10554 20130101; G11B 7/122 20130101; G11B 11/10563
20130101; G02B 26/0841 20130101; G11B 11/10532 20130101; G11B
7/1365 20130101; G11B 7/1372 20130101; G11B 11/10543 20130101; G11B
11/10595 20130101; G02B 26/0833 20130101; G11B 7/08564 20130101;
G11B 7/14 20130101; G11B 11/10569 20130101; G11B 7/1362 20130101;
G11B 11/10541 20130101; G11B 7/08576 20130101; G02B 6/126 20130101;
G02B 6/105 20130101; G02B 26/0866 20130101; G02B 26/085 20130101;
G11B 7/1384 20130101; G02B 6/357 20130101; H02N 1/008 20130101;
G11B 11/1058 20130101; G02B 6/4246 20130101; G02B 6/3556 20130101;
G11B 7/22 20130101; G11B 7/127 20130101; G02B 6/3558 20130101; G02B
6/3512 20130101; G11B 11/10515 20130101; G11B 11/10534 20130101;
G11B 7/0037 20130101 |
Class at
Publication: |
385/016 |
International
Class: |
G02B 006/26 |
Claims
What is claimed is:
1. An optical microswitch for use with a laser beam comprising a
support body, first and second output fibers carried by the body, a
rotary electrostatic microactuator carried by the body and
extending in a plane, a micromirror disposed out of the plane, the
microactuator having a mirror holder coupled to the micromirror and
at least one comb drive assembly coupled to the mirror holder for
driving the micromirror about an axis of rotation extending
perpendicular to the plane between a first position for reflecting
the laser beam to the first output fiber and a second position for
reflecting the laser beam to the second output fiber.
2. An optical microswitch as in claim 1 wherein the microactuator
has at least one first comb drive assembly coupled to the mirror
holder for driving the micromirror in a first direction of travel
about the axis of rotation and at least one second comb drive
assembly coupled to the mirror holder for driving the micromirror
in an opposite second direction about the axis of rotation.
3. An optical microswitch as in claim 2 wherein the microactuator
has a substantially planar substrate and the mirror holder overlies
the substrate, the at least one first comb drive assembly and the
at least one second comb drive assembly each extending
substantially radially from the axis of rotation and each having
first and second comb drive members, the first comb drive member
being mounted on the substrate and the second comb drive overlying
the substrate, each of the first and second comb drive members
being provided with arcuate comb drive fingers, the second comb
drive member being movable in a direction of travel about the axis
of rotation between a first position in which the comb drive
fingers of the first and second comb drive members are not
substantially fully interdigitated and a second position in which
the comb drive fingers of the first and second comb drive members
are substantially fully interdigitated.
4. An optical microswitch as in claim 3 wherein the microactuator
has first and second spaced-apart springs extending substantially
radially from the axis of rotation, the at least one first comb
drive assembly and the at least one second comb drive assembly
being disposed between the first and second springs, each of the
first and second springs having a first end portion secured to the
substrate and a second end portion secured to the second comb drive
members for suspending the second comb drive members and the
rotatable member over the substrate.
5. An optical microswitch as in claim 4 wherein each of the first
and second springs is a folded spring.
6. An optical microswitch as in claim 3 wherein microactuator has a
plurality of first comb drive assemblies and a plurality of second
comb drive assemblies disposed about the axis of rotation and in
the aggregate subtending an angle of approximately 180.degree.
about the axis of rotation to form a semicircle having a base
extending substantially along a diameter of the semicircle, the
axis of rotation being disposed adjacent the base at the center of
the semicircle.
7. An optical microswitch as in claim 1 wherein the microactuator
has a substantially planar substrate and first and second linear
micromotors, each of the first and second micromotors having first
and second spaced-apart springs and at least one comb drive
assembly, the at least one comb drive assembly having first and
second comb drive members, he first comb drive member being mounted
on the substrate, each of the first and second springs having a
first end portion secured to the substrate and a second end portion
secured to the respective second comb drive member for suspending
the second comb drive member over the substrate, each of the first
and second comb drive members being provided with comb drive
fingers, the second comb drive member being movable in a linear
direction of travel relative to the first comb drive member between
a first position in which the comb drive fingers of the first and
second comb drive members are not substantially fully
interdigitated and a second position in which the comb drive
fingers of the first and second comb drive members are
substantially fully interdigitated, a first coupler for securing
the second comb drive member of the first micromotor to the
micromirror and a second coupler for securing the second comb drive
member of the second micromotor to the micromirror whereby movement
of the second comb drive members of the first and second
micromotors to the second position causes the micromirror to rotate
about the axis of rotation.
8. An optical switch as in claim 7 wherein the at least one comb
drive assembly of each of the first and second micromotors is
disposed between the first and second springs.
9. An optical switch as in claim 7 wherein the first and second
micromotors are symmetrically disposed about the mirror holder.
10. An optical microswitch as in claim 1 wherein first and second
of such microactuators are carried by the body, the plane of the
first microactuator being perpendicular to the plane of the second
microactuator whereby rotation of the micromirror of the first
microactuator to the first position and rotation of the micromirror
of the second microactuator to the first position reflects the
laser beam to the first output fiber and rotation of the
micromirror of the first microactuator to the second position and
rotation of the micromirror of the second microactuator to the
second position reflects the laser beam to the second output
fiber.
11. An optical microswitch as in claim 10 wherein the axis of
rotation of the first microactuator and the axis of rotation of the
second microactuator are disposed in a plane.
12. An optical microswitch as in claim 1 further comprising closed
loop servo control means for monitoring the position of the
micromirror.
13. An optical microswitch for use with a laser beam comprising a
support body, first and second output fibers carried by the body,
first and second rotary electrostatic microactuators carried by the
body, the first microactuator extending in a first plane and the
second rotary microactuator extending in a second plane disposed
perpendicular to the first plane, each of the first and second
microactuators having a micromirror disposed out of the plane of
the microactuator and having a mirror holder coupled to the
micromirror and first and second comb drive assemblies coupled to
the micromirror for driving the micromirror about an axis of
rotation extending perpendicular to the plane between first and
second positions whereby rotation of the micromirror of the first
microactuator to the first position and rotation of the micromirror
of the second microactuator to the first position reflects the
laser beam to the first output fiber and rotation of the
micromirror of the first microactuator to the second position and
rotation of the micromirror of the second microactuator to the
second position reflects the laser beam to the second output
fiber.
14. An optical microswitch as in claim 13 wherein the axis of
rotation of the first microactuator and the axis of rotation of the
second microactuator are disposed in a plane.
15. An optical microswitch as in claim 13 wherein each of the first
and second microactuators has a plurality of first comb drive
assemblies and a plurality of second comb drive assemblies disposed
about the axis of rotation of the microactuator and in the
aggregate subtending an angle of approximately 180.degree. about
the axis of rotation to form a semicircle having a base extending
substantially along a diameter of the semicircle, the axis of
rotation being disposed adjacent the base at the center of the
semicircle.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] The application claims priority to U.S. provisional patent
application Serial No. 60/112,263 filed Dec. 15, 1998 and to U.S.
provisional patent application Serial No. 60/123,512 filed Mar. 8,
1999, the entire contents of each of which are incorporated herein
by this reference.
SCOPE OF THE INVENTION
[0002] The present invention relates generally to optical
microswitches and more particularly to optical microswitches
utilizing electrostatic microactuators with comb drive
assemblies.
BACKGROUND
[0003] Optical switches have heretofore been provided. Many of such
switches use macroscopic rotators. Switches utilizing
electromagnetic motors have been disclosed to move either an input
optical fiber or a refractive or reflective element interspersed
between input and output optical fibers. Examples of such designs
that use piezoelectric elements to move refractive or reflective
elements are shown in U.S. Pat. No. 5,647,033 to Laughlin, U.S.
Pat. No. 5,748,813 to Buchin and U.S. Pat. No. 5,742,712 to Pan et
al. All of switches are relatively large and expensive.
[0004] A micromachined optical switch is disclosed in U.S. Pat. No.
5,446,811 to Field et al. and uses a bimetallic element to displace
an optical fiber into alignment with one or more optical fibers.
Such switch, however, is not easily extendable to a switch having a
relatively large number of output fibers and bimetallic actuators
are relatively slow.
[0005] Micromachined devices to tilt or rotate mirrors are known in
the prior art, but suffer from various limitations. A one
dimensional or two dimensional mirror rotator that tilts about axes
in the plane of the substrate used to fabricate the device is
disclosed in Dhuler et al., "A Novel Two Axis Actuator for High
Speed Large Angular Rotation", Transducers '97, Vol. 1, pp.
327-330. The actuator uses a variable gap parallel plate capacitor
as the drive element, which suffers from non-linear response of
force or angular displacement as a function of applied voltage. A
similar type of tilting mirror is described in Kruth et al.,
"Silicon Mirrors and Micromirror Arrays for Spatial Laser Beam
Modulation", Sensors and Actuators A 66 (1998), pp. 76-82. Such
mirrors are typically designed for use in projection displays or in
scanners for bar code reading. A scanner using surface
micromachining technology and having a mirror that is tilted out of
the plane of the fabrication is described in Kiang et al.,
"Surface-Micromachined Electrostatic-Comb Driven Scanning
Micromirrors for Barcode Scanners", Ninth Annual Int. Workshop on
Micro Electro Mechanical Systems, San Diego, 1996, pp. 192-19997.
All of such devices tend to have difficulty in maintaining flatness
and smoothness in the mirror elements and may have difficulty in
precise static positioning of the mirror due to hysteresis in the
coupling between the electrostatic comb drive actuator in the plane
of the substrate and the mirror element out of the substrate
plane.
[0006] In general, it is an object of the present invention to
provide a relatively inexpensive optical microswitch having a small
form factor.
[0007] Another object of the invention is to provide an optical
microswitch of the above character in which the reflective face of
a micromirror rotates in the focal plane of a focusing lens.
[0008] Another object of the invention is to provide an optical
microswitch of the above character in which first and second
micromirrors are closely packed and disposed in the focal plane of
a focusing lens.
[0009] Another object of the invention is to provide an optical
microswitch of the above character which is capable of coupling
visible or infrared light into an optical fiber with low
transmission losses.
[0010] Another object of the invention is to provide an optical
microswitch of the above character which has relatively fast
switching times.
[0011] Another object of the invention is to provide an optical
microswitch of the above character in which the mirror is capable
of angular rotations over a relatively large range.
SUMMARY OF THE INVENTION
[0012] The present invention provides an optical microswitch
comprising a support body and first and second output fibers. A
rotary electrostatic microactuator is carried by the body and
extends in a plane. A micromirror is disposed out of the plane. The
microactuator has a mirror holder coupled to the micromirror and at
least one comb drive assembly coupled to the mirror holder for
driving the micromirror about an axis of rotation extending
perpendicular to the plane between a first position for reflecting
a laser beam to the first output fiber and a second position for
reflecting the laser beam to the second output fiber.
BRIEF DESCRIPTION OF THE DRAWINGS
[0013] The accompanying drawings, which are somewhat schematic in
many instances and are incorporated in and form a part of this
specification, illustrate several embodiments of the invention and,
together with the description, serve to explain the principles of
the invention.
[0014] FIG. 1 is a perspective view of an optical microswitch with
rotary electrostatic microactuator of the present invention.
[0015] FIG. 2 is a plan view of a rotary electrostatic
microactuator for use in the optical microswitch of FIG. 1.
[0016] FIG. 3 is a cross-sectional view of the rotary electrostatic
microactuator of FIG. 2 taken along the line 3-3 of FIG. 2.
[0017] FIG. 4 is a plan view of another embodiment of a rotary
electrostatic microactuator for use in the optical microswitch of
FIG. 1.
[0018] FIG. 5 is a plan view of a further embodiment of a rotary
electrostatic microactuator for use in the optical microswitch of
FIG. 1.
[0019] FIG. 6 is a perspective view of another embodiment of an
optical microswitch with rotary electrostatic microactuator of the
present invention.
DESCRIPTION OF THE INVENTION
[0020] Optical microswitch 11, shown schematically in FIG. 1, is
formed from a support body 12 of any suitable size and shape and
made from any suitable material such as a ceramic material. Body 12
shown in FIG. 1 has a base 13 and a back 14 secured to the base and
extending perpendicularly from the base. Support body 12 is
optionally coupled to one and as shown a plurality of output
optical fibers 16, which can be either single mode or multi-mode
fibers. In this regard, a bundle 21 of such output fibers 16 is
secured together by a tube 22 mounted on base 13 by any suitable
means such as bracket 23. The plurality of optical fibers 16
includes first and second optical fibers 16a and 16b. Tube 22 and
output bundle 21 terminate at an end 31. A conventional focusing
lens such as a GRIN lens 32 is disposed adjacent the end 31 of the
fiber optic output bundle 21 and is mounted to base 13 by any
suitable means such as bracket 33. Lens 32 has a sufficient field
of view to accommodate all of fibers 16 in output bundle 21.
[0021] At least one and as shown a plurality of input optical
fibers 41 can optionally be coupled to support body 13 for
providing laser light to optical microswitch 11. The input optical
fibers 41 are arranged in a bundle 42 secured together by any
suitable means such as tube 43. Input fibers 41 terminate at
respective ends 44. Input bundle 42 is secured to base 13 by any
suitable means such as bracket 46. A conventional collimating lens
such as GRIN lens 47 is disposed adjacent ends 44 and secured to
base 13 by bracket 48 or any other suitable means. Lens 47 is
perpendicular to lens 32. An input laser beam 51 from a laser
source (not shown) is directed on a path by one of input optical
fibers 41 through lens 47 to optical microswitch 11. The glass
surfaces of fibers 16 and 41 and lenses 32 and 47 are coated in a
conventional manner with an anti-reflective material.
[0022] First and second rotary electrostatic microactuators 56 and
57 are carried by support body 12 for alternatively coupling input
laser beam 51 into first output fiber 16a or second output fiber
16b. First planar microactuator 56 is formed from a first planar
rotator chip 58 secured to base 13 by any suitable means such as an
adhesive (not shown). For simplicity, first microactuator 56 and
first rotator chip 58 are shown schematically in FIG. 1. The first
microactuator 56 is preferably disposed perpendicular to input
laser beam 51 and parallel to the central longitudinal axis of
output of lens 32. A first micromachined mirror 61 extends out of
the plane of first microactuator 56 and is secured to the first
microactuator by mean of a post 62 preferably formed integral with
the micromachined mirror 61. Mirror 61 and post 62 are preferably
micromachined separately from microactuator 56. Post 62 is joined
at its base to the microactuator 56 by an adhesive (not shown) or
any other suitable means. First mirror 61 has a reflective face or
surface 63 and is rotatable by first microactuator 56 about an axis
of rotation 64 extending through post 62 and disposed perpendicular
to the plane of first microactuator 56. The axis of rotation 64
preferably intersects the reflective face 63 of micromirror 61 to
ensure that face 63 is undergoing pure rotation. In addition, axis
of rotation 64 is preferably placed at the focal plane of output
lens 32.
[0023] Second planar microactuator 57 extends in a second plane and
is substantially identical to first microactuator 56. The second
microactuator 57 is formed from a second planar rotator chip 67
mounted to block 14 by any suitable means such as an adhesive (not
shown). For simplicity, second microactuator 57 and second rotator
chip 67 are shown schematically in FIG. 1. Second microactuator 57
is suspended over first microactuator 56 and is disposed
perpendicular to the plane of the first microactuator. A second
mirror 68 is carried by second microactuator 57 and is disposed out
of the plane of the microactuator 57. Second micromachined mirror
68 is preferably formed with an L-shaped post 71 having a base
portion or base 71a and a cantilever portion or extension 71b. Base
71a is secured to the microactuator 57 by an adhesive (not shown)
or any other suitable means. Mirror 68 rotates about an axis of
rotation 72 extending along base 71a and disposed perpendicular to
the plane of second microactuator 57. The axis of rotation 64 of
first mirror 61 and the axis of rotation 72 of second mirror 68 are
preferably disposed in a plane extending perpendicular to the first
and second microactuators 56 and 57. The mirrors 61 and 68 each
have a sufficient range of rotation to permit the mirror 61 to
direct laser beam 51, by means of lens 32, onto the core of each of
optical fibers 16. Extension 71b is centered on an axis 73
extending parallel to the plane of second microactuator 57. Axis of
rotation 64 of the first microactuator 56 and axis 73 are
preferably disposed in a plane extending perpendicular to the first
microactuator and parallel to the second microactuator. Second
mirror 68 has a reflective face or surface 74 which is thus
centered on the focal plane of lens 32. Reflective surfaces 63 and
74 of respective micromirrors 61 and 68 are highly reflective at
the particular wavelength of laser beam 51.
[0024] Any suitable micromachined actuator can be utilized for
first and second microactuators 56 and 57. Several preferred
microactuators are disclosed in copending U.S. patent application
Ser. No. ______ filed Dec. 15, 1999 [Our File No. A-68185], the
entire contents of which is incorporated herein by this reference.
One particularly preferred rotary electrostatic microactuator 101,
shown in FIGS. 2 and 3, is formed on a planar substrate 102 of the
respective rotator chip 58 or 67. A rotatable member or circular
mirror holder 103 overlies the substrate 102. A plurality of first
and second comb drive assemblies 106 and 107 are carried by
substrate 102 for rotating mirror holder 103 in first and second
opposite angular directions about an axis of rotation 108 extending
through the center of the circular mirror holder 103 perpendicular
to planar substrate 102 and thus FIG. 2. Axis of rotation 108
corresponds to axes of rotations 64 and 72 of the respective
microactuators 56 and 57. Each of the first and second comb drive
assemblies 106 and 107 includes a first comb drive member or comb
drive 111 mounted on substrate 102 and a second comb drive member
or comb drive 112 overlying the substrate 102. First and second
spaced-apart springs 113 and 114 are included in microactuator 101
for supporting or suspending second comb drives 112 and mirror
holder 103 above the substrate 102 and for providing radial
stiffness to the movable second comb drives 112 and thus the mirror
holder 103.
[0025] Substrate 102 is made from any suitable material such as
silicon and is preferably formed from a silicon wafer. The
substrate has a thickness ranging from 200 to 600 microns and
preferably approximately 400 microns. Mirror holder 103, first and
second comb drive assemblies 106 and 107 and first and second
springs 113 and 114 are formed atop the substrate 102 by a second
or top layer 116 made from a wafer of any suitable material such as
silicon. Top wafer 116 has a thickness ranging from 10 to 200
microns and preferably approximately 85 microns and is secured to
the substrate 102 by any suitable means. The top wafer 116 is
preferably fusion bonded to the substrate 102 by means of a silicon
dioxide layer 117 having a thickness ranging from 0.1 to two
microns and preferably approximately one micron. Top wafer 116 may
be lapped and polished to the desired thickness. The mirror holder
103, the first and second comb drive assemblies 106 and 107 and the
first and second springs 113 and 114 are formed from the top wafer
116 by any suitable means. Preferably, such structures are etched
from wafer 116 using deep reactive ion etching (DRIE) techniques.
Mirror holder 103 is spaced above substrate 102 by an air gap 118,
that ranges from three to 30 microns and preferably approximately
15 microns, so as to be electrically isolated from the
substrate.
[0026] At least one and preferably a plurality of first comb drive
assemblies 106 are included in rotary electrostatic microactuator
101 and disposed about axis of rotation 108, shown as a point in
FIG. 2, for driving mirror holder 103 in a clockwise direction
about axis 108. At least one second comb drive assembly 107 and
preferably a plurality of second comb drive assemblies 107 can be
included in microactuator 101 for driving the mirror holder in a
counterclockwise direction about the axis of rotation 108. Each of
the first and second comb drive assemblies 106 and 107 extends
substantially radially from axis of rotation 108 and, in the
aggregate, subtend an angle of approximately 180.degree. so as to
provide rotary microactuator 101 with a semicircular or fanlike
shape when viewed in plan (see FIG. 2). More specifically,
microactuator 101 has three first comb drive assemblies 106a, 106b
and 106c and three second comb drive assemblies 107a, 107b and
107c. Rotary microactuator 101 has a base 119 extending along a
diameter of the semicircle formed by the microactuator 101 and has
an outer radial extremity 121 resembling the arc of a semicircle.
Radial extremity 121 has first and second ends which adjoin the
first and second opposite ends of base 119. The radial extremity
121 is defined by the outer radial extremities of first and second
comb drive assemblies 106 and 107. Mirror holder 103 and axis of
rotation 108 are disposed at the center of the semicircle adjacent
base 119.
[0027] First and second comb drive assemblies 106 and 107 are
interspersed between each other, that is, a second comb drive
assembly 107 is disposed between each pair of adjacent first comb
drive assemblies 106. The first comb drive assemblies 106 are
symmetrically disposed relative to the second comb drive assemblies
107 about the radial centerline of rotary electrostatic
microactuator 101, that is the imaginary line extending in the
plane of substrate 102 through axis of rotation 108 and
perpendicular to base 119. Each of the first and second comb drive
assemblies 106 and 107 has a length ranging from 200 to 2,000
microns and more preferably approximately 580 microns. Rotary
microactuator 101 has a length measured along base 119 ranging from
500 to 5,000 microns and more preferably approximately 1,800
microns.
[0028] First comb drive 111 of each of first and second comb drive
assemblies 106 and 107 is mounted to substrate 102 by means of
silicon dioxide layer 117. As such, the first comb drives 111 are
immovably secured to substrate 102. Each of the first comb drives
111 has a radially-extending bar 122 provided with a first or inner
radial portion 122a and a second or outer radial portion 122b.
Outer portion 122b extends to outer radial extremity 121 of
microactuator 101. A plurality of comb drive fingers 123 are
longitudinally spaced apart along the length of bar 122 at a
separation distance ranging from eight to 50 microns and preferably
approximately 24 microns. The comb drive fingers 123 extend
substantially perpendicularly from bar 122 and are each arcuate in
shape. More specifically, each comb finger 123 has a substantially
constant radial dimension relative to axis of rotation 108 as it
extends outwardly from the bar 122. Fingers 123 have a length
ranging from approximately 22 to 102 microns and increase
substantially linearly in length from bar inner portion 122a to bar
outer portion 122b. Although the comb fingers 123 can vary in width
along their length, the comb fingers 123 are shown as having a
constant width ranging from two to 12 microns and preferably
approximately six microns. Bar inner portions 122a for first comb
drive assemblies 106a and 106b and second comb drive assemblies
107b and 107c are joined to a base member 124 which serves to
anchor such bars 122 to substrate 102 and permit such bar inner
portions 122a to thus have a smaller width and the related comb
drives 123 to have a corresponding longer length.
[0029] Second comb drives 112 are spaced above substrate 102 by air
gap 118 so as to be movable relative to substrate 102 and relative
to first comb drives 111. The second comb drives 112 have a
construction similar to the first comb drives 111 discussed above
and, more specifically, are formed with a bar 126 that extends
radially outwardly from axis of rotation 108. The bar 126 has a
first or inner radial portion 126a in close proximity to axis 108
and a second or outer radial portion 126b that extends to radial
extremity 121. A plurality of comb drive fingers 127 are
longitudinally spaced apart along the length of bar 126 and are
substantially similar to comb fingers 123. Arcuate comb fingers 127
are offset relative to comb fingers 123 so that the comb fingers
127 on second comb drive 112 can interdigitate with comb fingers
123 on first comb drive 111 when the second comb drives 112 are
rotated about axis 108 towards the stationary first comb drives
111. Each of first and second comb drive assemblies 106 and 107
resembles a sector of the semicircular microactuator 101.
[0030] Means including first and second spaced-apart springs 113
and 114 are included within rotary electrostatic microactuator 101
for movably supporting second comb drives 112 over substrate 102.
First and second suspension elements or springs 113 and 114 each
have a length which preferably approximates the length of first and
second comb drive assemblies 106 and 107, however springs having
lengths less than the length of the comb drive assemblies can be
provided. Although first and second springs 113 and 114 can each be
formed from a single spring member, the springs 113 and 114 are
each preferably U-shaped or V-shaped in conformation so as to be a
folded spring. As shown, springs 113 and 114 are substantially
U-shaped. Each of springs 113 and 114 is made from first and second
elongate spring members 131 and 132. First or linear spring member
131 has first and second end portions 131a and 131b and second or
linear spring member 132 has first and second end portions 132a and
132b.
[0031] The first end portion 131a of each folded spring 113 and 114
is secured at its end to substrate 102 adjacent axis of rotation
108 by means of silicon dioxide layer 117 (see FIG. 3). The balance
of the spring is spaced above the substrate by air gap 118. Second
end portion 131b of each spring 113 and 114 is secured to first end
portion 132a of the second spring member 132. First and second
beam-like spring members 131 and 132 each extend radially outwardly
from axis of rotation 108 and preferably have a length
approximating the length of first and second comb drive assemblies
106 and 107. The spring members 131 and 132 are preferably
approximately equal in length and each have a length of
approximately 500 microns. As such, spring first end portions 131a
are secured to substrate 102 adjacent spring second end portions
132b. Although first end portion 131 a of each spring 113 and 114
can be secured to substrate 102 adjacent mirror holder 103 or
adjacent outer radial extremity 121, the first end portion 131 a is
preferably secured to substrate 102 adjacent outer radial extremity
121. First and second spring members 131 and 132 each have a width
ranging from one to 10 microns and preferably approximately four
microns. First and second thin, elongate sacrificial bars 133 and
134, of a type described in U.S. Pat. No. 5,998,906 and in
copending U.S. patent application Ser. No. 09/135,236 filed Aug.
17, 1998, the entire contents of each of which are incorporated
herein by this reference, extend along each side of each spring
member 131 and 132 for ensuring even etching and thus the desired
rectangular cross section of the spring members. Sacrificial bars
133 and 134 are disposed along opposite sides of the spring members
and extend parallel to the respective spring member.
[0032] Second end portion 132b of each spring 113 and 114 is
secured to at least one of second comb drives 112. In this regard,
first and second movable frame members or frames 141 and 142,
spaced above substrate 102 by air gap 118, are provided in rotary
electrostatic microactuator 101. Each of the frames 141 an 142 is
substantially U-shaped in conformation and includes as side members
bars 126 of the adjoining second comb drives 112. More
specifically, first movable frame 141 includes bar 126 of second
comb drive assembly 107a, bar 126 of first comb drive assembly 106a
and an arcuate member 143 which interconnects such bar outer
portions 126b. Second movable frame 142 is similar in construction
and includes as side members bar 126 of second comb drive assembly
107c, bar 126 of first comb drive assembly 106c and an arcuate
member 144 which interconnects such bar outer portions 126b. Second
end portion 132b of first spring 113 is secured to arcuate member
143 adjacent to bar outer portion 126b of second comb drive
assembly 107a, while the second end portion 132b of second spring
114 is secured to arcuate member 144 adjacent bar outer portion
126b of first comb drive assembly 106c. In this manner, first
folded spring 113 is disposed inside first movable frame 142 and
second folded spring 114 is disposed inside second movable frame
142. Bar inner portion 126a of second comb drive assembly 107a is
joined to mirror holder 103 and serves to secure first spring 113
to the mirror holder. Similarly, bar inner portion 126a of first
comb drive assembly 106c is joined to mirror holder 103 for
interconnecting second spring 114 to the mirror holder.
[0033] First and second movable frames 141 and 142 are
symmetrically disposed about the radial centerline of rotary
electrostatic microactuator 101. At least one comb drive assembly
and preferably at least one first comb drive assembly 106 and at
least one second comb drive assembly 107 are disposed between first
and second movable frames 141 and 142 and thus first and second
springs 113 and 114. More specifically, first comb drive assemblies
106a and 106b and second comb drive assemblies 107b and 107c are
disposed between frames 141 and 142. Bar 126 of second comb drive
assembly 107b and bar 126 of first comb drive assembly 106b are
joined back to back to form a third movable frame 147 preferably
extending along the centerline of microactuator 101 between movable
frames 141 and 142. An inner arcuate member or shuttle 148 is
joined at opposite ends to first and second movable frames 141 and
142. One end of rigid shuttle 148 is secured to bar inner portion
126a of first comb drive assembly 106a while the second end of the
shuttle 148 is secured to bar inner portion 126a of second comb
drive assembly 107c. Third movable frame 147 is joined to the
middle of the shuttle 148 so as to rotate in unison with first and
second movable frames 141 and 142 about axis 108. An additional
arcuate member 151 is provided in microactuator 101 for rigidly
securing together second end portions 131b of first and second
springs 113 and 114. The arcuate member 151 overlies substrate 102
and extends at least partially around the axis of rotation 108.
Member 151 is disposed between shuttle 148 and mirror holder 103
and rotates about axis 108 free of mirror holder 103. The suspended
structures of microactuator 101, that is mirror holder 103, second
comb drives 112, first and second springs 131 and 132 and first and
second movable frames 141 and 142, each have a thickness ranging
from 10 to 200 microns and preferably approximately 85 microns.
[0034] Second comb drives 112 of first and second comb drive
assemblies 106 and 107 are movable in a direction of travel about
axis of rotation 108 by means of movable frames 141, 142 and 147
between respective first positions, as shown in FIG. 2, in which
comb drive fingers 123 and 127 of the first and second comb drives
are not substantially fully interdigitated and respective second
positions, not shown, in which the comb drive fingers 123 and 127
are substantially fully interdigitated. Although comb drive fingers
123 and 127 can be partially interdigitated when second comb drives
112 are in their first positions, the comb fingers 123 and 127 are
shown as being fully disengaged and thus are not interdigitated
when second comb drives 112 are in their first positions. When in
their second positions, comb fingers 127 of second comb drives 112
extend between respective comb drive fingers 123 of the first comb
drives 111. Comb fingers 127 approach but preferably do not engage
bar 122 of the respective first comb drives 111 and similarly comb
drive fingers 123 approach but preferably do not engage bar 126 of
the respective second comb drives 112. Rigid movable frames 141,
142 and 147 are constructed as light weight members to decrease the
mass and moment of inertia of the movable portions of microactuator
101 and thus facilitate rotation of second comb drives 112 and
mirror holder 103 about axis of rotation 108. Each of the movable
frames 141, 142 and 147 is substantially hollow and formed with a
plurality of internal beams or trusses 152 for providing rigidity
to the movable frame.
[0035] Electrical means is included within microactuator 101 for
driving second comb drives 112 between their first and second
positions. Such electrical means includes a controller and voltage
generator 161 that is electrically connected to a plurality of
electrodes provided on substrate 102 by means of a plurality of
electrical leads 162. Controller 161 is shown schematically in FIG.
2. A first ground electrode 166 and a second ground electrode 167
are formed on substrate 102 and are respectively joined to the
first end portion 131a of first and second springs 113 and 114 for
electrically grounding second comb drives 112 and mirror holder
103. Electrodes 166 and 167 serve as the attachment points for
spring first end portions 131a to the substrate 102. First comb
drives 111 of first comb drive assemblies 106 can be supplied a
voltage potential from controller 161 by means of an electrode 171
electrically coupled to bar outer portion 122b of first comb drive
assembly 106a and an additional electrode 172 electrically coupled
to the first comb drive 111 of first comb drive assembly 106b and
to first comb drive 111 of first comb drive assembly 106c by lead
173. An electrode 176 is secured to the first comb drive 111 of
second comb drive assembly 107a by means of lead 177 and to second
comb drive assembly 107b and an electrode 179 is joined to bar
outer portion 122b of second comb drive assembly 107c for providing
a voltage potential to the first comb drives of second comb drive
assemblies 107. A metal layer 181 made from aluminum or any other
suitable material is created on the top surface of top wafer 116
for creating electrodes 166, 167, 171, 172, 176 and 179 and for
creating leads 173, 174, 177 and 178 (see FIG. 2). First and second
pointers 186 extend radially outwardly from the outer end of third
movable frame 147 for indicating the angular position of mirror
holder 103 about axis 108 on a scale 187 provided on substrate
102.
[0036] Means in the form of a closed loop servo control can be
included in microactuator 101 for monitoring the position of second
comb drives 112 and thus mirror holder 103. For example, controller
161 can determine the position of the movable comb drives 112 by
means of a conventional algorithm included in the controller for
measuring the capacitance between comb drive fingers 127 of the
movable comb drives 112 and the comb drive fingers 123 of the
stationary comb drives 111. A signal separate from the drive signal
to the comb drive members can be transmitted by controller 161 to
the microactuator for measuring such capacitance. Such a method
does not require physical contact between the comb drive fingers.
Alternatively, a portion of the output optical energy coupled into
the output fiber 16 can be diverted and measured and the drive
signal from the controller 161 to the microactuator 101 adjusted
until the measured optical energy is maximized.
[0037] In operation and use of optical microswitch 11, first and
second microactuators 56 and 57 are utilized to respectively rotate
first and second mirrors 61 and 68 to direct input laser beam 51 to
either first or second output fibers 16a or 16b or any of the other
optical fibers 16 of output bundle 21. Mirror holder 103 of the
respective microactuator 101 can be rotated in opposite first and
second directions of travel about axis of rotation 108 by means of
controller 161. The amount of rotation can be controlled by the
amount of voltage supplied to the appropriate first comb drives 111
of the microactuator 101. As shown in FIG. 1, laser beam 51 is
launched by input lens 57 onto the reflective surface 74 of second
mirror 68, from which the beam 51a is reflected onto surface 63 of
first mirror 61. Input laser beam 51b is reflected by the first
mirror 61 onto the desired portion of the image plane of output
lens 32 so that the laser beam 51 is focused and coupled by lens 32
into the appropriate optical fiber 16 of output bundle 21.
[0038] Rotation of second mirror 68 in first and second opposite
directions about axis of rotation 72 by second microactuator 57
controls the vertical position relative to first microactuator 56
at which the reflected beam 51 a strikes reflective face 63 on the
axis of rotation 64 of the first mirror 61. Rotation of the first
mirror 61 about axis of rotation 64 by first microactuator 56
controls the horizontal position relative to the first
microactuator 56 at which the beam 51b reflected by the first
mirror strikes output lens 32. In this manner, input laser beam 51
can be directed by the first and second mirrors 61 and 68 into any
one of the optical fibers of output bundle 21. For example,
rotation of first micromirror 61 to a first position and rotation
of second micromirror 68 to a first position reflects the laser
beam 51 to first output fiber 16a, while rotation of first
micromirror 61 to a second position and rotation of second
micromirror 68 to a second position reflects the laser beam 51 to
second output fiber 16b. The position of the mirror holders 103 of
microactuators 56 and 57 and thus mirrors 61 and 68 can optionally
be monitored in the manner discussed above with respect to
microactuator 101. Micromirrors 61 and 68 are each capable of
rotating at speeds less than five milliseconds between fibers 16
with optical losses of less than one dB.
[0039] In its rest position, second mirror 68 is aligned on second
microactuator 57 so its reflective surface 74 is capable of
reflecting input laser beam 51 from the center of input lens 47
onto the center of the first mirror 61. Similarly, first mirror 61
is angularly disposed relative to first microactuator 56 so that
when the first mirror is in its rest position, the input beam 51 a
impinging the first mirror 61 is reflected by the first mirror onto
the center of output lens 32. Such positioning of first and second
mirrors 61 and 68 relative to first and second microactuators 56
and 57 minimizes the rotational travel of the mirrors during the
operation of optical microswitch 11. The first and second mirrors
61 and 68 are each capable of .+-. six degrees angular rotation,
that is a rotation of six degrees in both the clockwise and
counterclockwise directions for an aggregate rotation of twelve
degrees.
[0040] The fanlike shape of first and second microactuators 56 and
57 permits respective first and second mirrors 61 and 68 to be
mounted along the base 119 of the respective microactuator 101. For
example, the placement of first mirror 61 on such base 119 of first
microactuator 56 permits the microactuator 56 to be positioned
along one side of first rotator chip 58 and support base 13 so that
input laser beam 51 has a path to second mirror 68 that is
unobstructed by the microactuator 56. Second mirror 68 overhangs
such side of rotator chip 58. Similarly, the fanlike shape of
second microactuator 57 permits the microactuator 57 to overhang
first microactuator 56. Second mirror 68 advantageously rotates
about axis 72 disposed along the base 119 of second microactuator
57 and overhangs second microactuator 57 so as to be in close
proximity to first mirror 61. This close placement of first and
second mirrors 61 and 68 minimizes the length of base 71a of second
mirror post 71 and the optical path of input laser beam 51.
[0041] The separate fabrication of first and second mirrors 61 and
68 allows for larger choice of reflective coatings for the mirrors,
including multilayer dielectric mirrors, enhanced metallic mirrors
and metallic mirrors otherwise incompatible with micromachining
fabrication steps such as sacrificial release or high temperature
processing. The separate mirrors 61 and 68 can be fabricated on
relatively thick and very smooth flat substrates, which is
difficult to achieve with an integrated micromachined process. In
addition, mirrors rotating above and out of the plane of the
substrate 102 allow for novel mechanical layout and packaging of
microswitch 11, particularly the close coupling of microactuators
56 and 57.
[0042] The utilization of rotary electrostatic microactuators, and
particularly electrostatic microactuators having a fanlike shape or
other shape that permits the axis of rotation to be placed along a
side of the microactuator, allows the optical microswitch 11 to
have a relatively small form factor of less than approximately one
cubic centimeter. Microactuators 56 and 57 desirably require
relatively low power and permit rapid switching between fibers.
Microswitch 11 is particularly suited for use as an optical switch
in a fiber optic network of a telecommunications system. However,
the optical microswitch 11 can be used in other applications, such
as in computer data storage systems, and more specifically in an
optics module of a magneto-optical data storage system. Other
applications include data networks and cable television
systems.
[0043] Although optical microswitch 11 is shown for use with a
plurality of input optical fibers 41, a single input fiber 41 can
be provided. Alternative, input laser beam 51 can be supplied from
any other suitable source, such as directly from a laser in close
proximity to or mounted on support body 12. In addition, it should
be appreciated that microswitch 11 can be bidirectional, that is
optical fibers 16 can serve as input fibers and optical fibers 41
can serve as output fibers;
[0044] Another rotary electrostatic microactuator disclosed in
copending U.S. patent application Ser. No. ______ filed Dec. 15,
1999 [Our File No. A-68185] and suitable for use as first and/or
second microactuators 56 and 57 in optical microswitch 11 is shown
in FIG. 4. Microactuator 201 therein has similarities to
microactuator 101 and like reference numerals have been used to
describe like components of microactuators 101 and 201. A rotatable
member or mirror holder 202 overlies substrate 102 of the
respective rotator chip 58 or 67. A plurality of first and second
comb drive assemblies 203 and 204 are carried by the substrate 102
for rotating the mirror holder 202 in first and second opposite
direction about an axis of rotation 206 extending perpendicular to
planar substrate 102. Axis of rotation 206 corresponds to axes of
rotations 64 and 72 of the respective microactuators 56 and 57. The
axis of rotation is shown as a point in FIG. 4 and labeled by
reference line 206. Each of the first and second comb drive
assemblies 203 and 204 includes a first drive member or comb drive
211 mounted on substrate 102 and a second comb drive member or comb
drive 212 overlying the substrate. First and second spaced-apart
springs 213 and 214 are included in microactuator 201 for
supporting or suspending second comb drives 212 and mirror holder
202 above the substrate 102 and for providing radial stiffness to
the second comb drives 212 and the mirror holder 202. The mirror
holder 202, first and second comb drive assemblies 203 and 204 and
first and second springs 213 and 214 are formed from top layer 116
by any suitable means such as discussed above for microactuator
101. Mirror holder 202, second comb drives 212 and first and second
springs 213 and 214 are spaced above substrate 102 by air gap 188
and have thicknesses similar to those discussed above for the like
components of microactuator 101.
[0045] At least one and preferably a plurality of first comb drive
assemblies 203 are included in rotary electrostatic microactuator
201 and disposed about axis of rotation 206 for driving mirror
holder 202 in a clockwise direction about axis of rotation 206. At
least one and preferably a plurality of second comb drive
assemblies 204 can be included in microactuator 201 for driving the
mirror holder in a counterclockwise direction about the axis of
rotation 206. Each of the first and second comb drive assemblies
203 and 204 extends substantially radially from axis of rotation
108 and the assemblies 203 and 204, in the aggregate, subtend an
angle of approximately 1800 to provide the semicircular or fanlike
shape to microactuator 201. More particularly, microactuator 201
has four first comb drive assemblies 203a, 203b, 203c and 203d and
four second comb drive assemblies 204a, 204b, 204c and 204d. The
first comb drive assemblies 203 are interspersed between the second
comb drive assemblies 204. The rotary microactuator 201 has a base
219 substantially similar to base 119 and an outer radial extremity
221 substantially similar to outer radial extremity 121. First comb
drive assemblies 203 are symmetrically disposed relative to second
comb drive assemblies 204 about the radial centerline of rotary
electrostatic microactuator 201, that is the imaginary line
extending in the plane of substrate 102 through axis of rotation
206 perpendicular to base 219. Mirror holder 202 and axis of
rotation 206 are disposed at the center of microactuator 201
adjacent base 219. The rotary microactuator has a length measured
along base 219 ranging from 500 to 5,000 microns and preferably
approximately 2,000 microns.
[0046] First comb drive 211 of each of first and second comb drive
assemblies 203 and 204 is mounted to substrate 101 in the manner
discussed above with respect to first comb drives 111. Each of the
first comb drives 211 has a radial-extending bar 226 provided with
a first or inner radial portion 226a and a second or outer radial
portion 226b. The outer portion 226b of each first comb drive 211
extends to outer radial extremity 221. A plurality of comb drive
fingers 227 are longitudinally spaced apart along the length of bar
226 at a separation distance ranging from eight to 50 microns and
preferably approximately 35 microns. The comb drive fingers 227
extend substantially perpendicularly from bar 226 and, like comb
drive fingers 123, are each arcuate in shape. Fingers 227 have a
length ranging from 25 to 190 microns and increase substantially
linearly in length from bar inner portion 226a to bar outer portion
226b. Each of the comb drive fingers 227 has a proximal portion
227a and a distal portion 227b. The proximal portion 227a has a
width ranging from four to 20 microns and preferably approximately
10 microns, and the distal portion 227b has a width less than the
width of proximal portion 227a and, more specifically, ranging from
two to 12 microns and preferably approximately six microns.
[0047] Second comb drives 212 and mirror holder 202 are part of a
movable or rotatable frame 231 spaced above substrate 102 by air
gap 118 so as to be electrically isolated from the substrate and
movable relative to the substrate and first comb drives 211. Frame
231 includes a first arm 232, a second arm 233, a third arm 236 and
a fourth arm 237, each of which extend in a substantial radial
direction from axis of rotation 206. First and fourth arms 232 and
237 are symmetrically disposed relative to the centerline of
microactuator 101 and second and third arms 233 and 236 are also
symmetrically disposed relative to such centerline. First and
fourth arms 232 and 237 are each U-shaped in conformation and
formed from first and second bars 241 and 242. The first bar 241
has a first or inner radial portion 241a in close proximity to axis
206 and a second or outer radial portion 241b that extends to outer
radial extremity 221. Similarly, second bar 242 has a first or
inner radial portion 242a and a second or outer radial portion
242b. Outer radial portions 241b and 242b are joined by a base
member 243 at outer radial extremity 221. Inner radial portion 241a
of the first bar 241 is joined to mirror holder 202, while inner
radial portion 242a of second bar 242 extends freely adjacent the
mirror holder 202. Second and third arms 233 and 236 are joined at
their inner portions to mirror holder 202.
[0048] First bar 241 of first arm 232 forms part of second comb
drive 212 of first comb drive assembly 203a, while second bar 242
of first arm 232 serves as part of the second comb drive 212 of
second comb drive assembly 204a. A plurality of comb drive fingers
251 are longitudinally spaced apart along the length of such first
bar 241 for forming the comb drive fingers of first comb drive
assembly 203a, while a plurality of comb drive fingers 251 are
longitudinally spaced apart along the length of second bar 242 of
such first arm 232 for forming the comb drive fingers of first comb
drive assembly 204a. Comb drive fingers 251 are substantially
similar to comb drive fingers 227 and have a first or proximal
portion 251a joined to the respective bar 241 or 242 and a second
or distal portion 251b extending from such proximal portion 251a.
Distal portions 251b have a width less than the width of proximal
portions 251a. Arcuate comb drive fingers 251 are offset relative
to comb drive fingers 227 so that comb drive fingers 251 can
interdigitate with comb drive fingers 227. First bar 241 of fourth
arm 237 similarly serves as part of second comb drive 212 of second
comb drive assembly 204d, while second bar 242 of the fourth arm
237 serves as part of the second comb drive 212 for first comb
drive assembly 203d. Comb drive fingers 251 extend from first and
second bars 241 and 242 of fourth arm 237.
[0049] Second and third arms 233 and 236 are included in second
comb drives 212 of first comb drive assemblies 203b and 203c and
second comb drive assemblies 204b and 204c. The second arm 233 has
a first or inner radial portion 233a joined to mirror holder 202
and a second or outer radial portion 233b adjacent outer radial
extremity 221. Third arm 236 is similar in construction to second
arm 233 and has a first or inner radial portion 236a and a second
or outer radial portion 236b. A first plurality of comb drive
fingers 251 are longitudinally spaced apart along the length of one
side of second arm 233 for forming the second comb drive of second
comb drive assembly 204b and a second plurality of comb drive
fingers 251 are longitudinally spaced apart along the length of the
other side of second arm 233 for forming the second comb drive of
first comb drive assembly 203b. Similarly, a first plurality of
comb drive fingers 251 are longitudinally spaced apart along one
side of third arm 236 for forming second comb drive 212 of first
comb drive assembly 203c and a second plurality of comb drive
fingers 251 are longitudinally spaced apart along the opposite side
of the third arm 236 for forming second comb drive 212 of second
comb drive assembly 204c. The second and third arms 233 and 236 can
optionally be joined by a link 252 at the respective inner radial
portions 233 and 236a for enhancing the rigidity of the arms 233
and 236.
[0050] Means including first and second spaced-apart springs 213
and 214 are included within rotary electrostatic microactuator 201
for movably supporting mirror holder 202 and second comb drives 212
over substrate 102. Springs 213 and 214 are symmetrically disposed
about the centerline of microactuator 201 and preferably have a
length which approximates the length of at least some of first and
second comb drive assemblies 203 and 204. Base 219 of microactuator
201 includes an attachment or bracket member 253 which has a
portion intersecting axis of rotation 206 and serves to secure
first and second springs 213 and 214 to substrate 102. Each of the
springs 213 and 214 is formed from a single beam-like spring member
256 having a first or inner radial end portion 256a joined at its
end to bracket member 253 and a second or outer radial end portion
256b joined to base member 243 of the respective first arm 232 or
fourth arm 237. More specifically, first spring 213 extends from
bracket member 253 up the center of first arm 232 for joinder to
the center of base member 243. Second spring 214 extends from
bracket member 253 radially outwardly through the center of fourth
arm 237 for joinder to the center of base member 243. Inner end
portions 256a of spring members 256 are joined to the bracket
member 253 at axis of rotation 206. The spring members 256 have a
width ranging from one to 10 microns and preferably approximately
four microns. Respective first and fourth arms 232 and 237 serve to
secure outer end portions 256b of the first and second springs 213
and 214 to mirror holder 202.
[0051] At least one comb drive assembly and preferably at least one
first comb drive assembly 203 and at least one second comb drive
assembly 204 is disposed between first and second springs 213 and
214. More specifically, first comb drive assemblies 203b and 203c
and second comb drive assemblies 204b and 204c, each of which is
formed in part by second and third arms 233 and 236, are angularly
disposed between first and second springs 213 and 214.
Additionally, first comb drive assembly 203a and second comb drive
assembly 204d, symmetrically disposed relative to each other about
the centerline of microactuator 201, are angularly disposed between
first and second springs 213 and 214.
[0052] Comb drive fingers 227 and 251 of first and second comb
drives 211 and 212 are not substantially fully interdigitated when
in their first or rest positions shown in FIG. 4. Although the term
not substantially fully interdigitated is broad enough to cover
comb drive fingers which are not interdigitated when in their rest
positions, such as comb drive fingers 123 and 127 of microactuator
101 shown in FIGS. 2 and 3, such term also includes comb drive
fingers which are partially interdigitated when in their rest
positions. In microactuator 201, distal portions 227b and 251b of
the comb drive fingers are substantially interdigitated when the
comb drives 211 and 212 are in their at rest positions.
[0053] At least one and as shown all of first and second comb drive
assemblies 203 and 204 are not centered along a radial extending
outwardly from axis of rotation 206. In this regard, distal ends
261 of comb drive fingers 227 for each comb drive assembly 203 or
204 are aligned along an imaginary line that does not intersect
axis of rotation 206 and, as such, is spaced-apart from the axis
206. Similarly, distal ends 262 of comb fingers 251 extend along an
imaginary line which does not intersect axis of rotation 206. Each
of first and second comb drive assemblies 203 and 204 thus
resembles a sector of a semicircle that is offset relative to a
radial of such semicircle.
[0054] Second comb drives 212 of first and second comb drive
assemblies 203 and 204 are each movable in a direction of travel
about axis of rotation 206 between a first or rest position, as
shown in FIG. 4, in which comb drive fingers 227 and 251 are not
substantially fully interdigitated and a second-position (not
shown) in which comb drive fingers 227 and 251 are substantially
fully interdigitated such as discussed above with respect to comb
fingers 123 and 127 of microactuator 101. Second comb drives 212 of
first comb drive assemblies 203 are in their second positions when
second comb drives 212 of second comb drive assemblies 204 are in
their first positions and, similarly, the second comb drives 212 of
assemblies 204 are in their second positions when the second comb
drives 212 of assemblies 203 are in their first positions.
[0055] Electrical means is included within microactuator 201 for
driving second comb drives 212 between their first and second
positions. Such electrical means can include a controller and
voltage generator 161 electrically connected to a plurality of
electrodes provided on the substrate 102 by means of a plurality of
electrical leads 162. For simplicity, controller 161 and leads 162
are not shown in FIG. 4. Such electrodes, each of which is
substantially similar to the electrodes discussed above with
respective to microactuator 101, include a common electrode 266
electrically coupled by lead 267 to bracket member 253, at least
one drive electrode 271 coupled directly or by means of lead 272 to
first comb drive 211 of first comb drive assemblies 203 and one or
more drive electrodes 273 coupled directly or by means of lead 274
to first comb drives 211 of second comb drive assemblies 204.
Several leads 274 extending out of the plane of microactuator 201
are shown in phantom lines in FIG. 4. The position of mirror holder
202 and thus mirrors 61 and 68 can optionally be monitored in the
manner discussed above with respect to microactuator 101.
[0056] The rotary electrostatic microactuators of microswitch 11
can utilize other than radially-extending comb drive assemblies. An
exemplary push-pull microactuator using coupled linear
electrostatic micromotors is described in copending U.S. patent
application Ser. No. ______ filed Dec. 15, 1999 [Our File No.
A-68185] and shown in FIG. 5. Rotary electrostatic microactuator
401 therein is similar in certain respects to microactuators 101
and 201 and like reference numerals have been used to describe like
components of the microactuators 101, 201 and 401. The
microactuator 401 includes a rotatable member 402 comprising a
mirror holder, for mounting to the microactuator 401 a micromirror
403 extending out of the plane of microactuator 401, and a T-shaped
bracket 404 secured to micromirror 403. The profile of micromirror
403 is shown in FIG. 5. The rotatable member 402 rotates about an
axis of rotation 406 extending perpendicular to planar substrate
102 of the respective rotator chip 68 or 67. Axis of rotation 406
corresponds to axes of rotations 64 and 72 of the respective
microactuators 56 and 57. The axis of rotation 406 intersects
micromirror 403 at its reflective surface 403a and is identified as
a point by reference numeral 406 in FIG. 5. Microactuator 401 is
provided with at least one side 407 and rotatable member 402 is
disposed adjacent the side 407. The microactuator 401 has first and
second linear micromotors 408 and 409 and first and second couplers
411 and 412 for respectively securing first and second micromotors
408 and 409 to bracket 404.
[0057] First and second micromotors 408 and 409 are substantially
identical in construction and are formed atop the substrate 102
from upper layer 116. The micromotors each includes at least one
comb drive assembly and preferably includes at least one first comb
drive assembly 416 and at least one second comb drive assembly 417.
As shown, each of the micromotors 408 and 409 includes a plurality
of four first comb drive assemblies 416 and a plurality of four
second comb drive assemblies 471 aligned in parallel. First comb
drive assemblies 416 are disposed side-by-side in a group and
second comb drive assemblies 417 are similarly disposed
side-by-side in a group. The group of assemblies 416 are disposed
in juxtaposition to the group of assemblies 417.
[0058] Comb drive assemblies 416 and 417 can be of any suitable
type. In one preferred embodiment, the comb drive assemblies are
similar to the comb drive assemblies described in U.S. Pat. No.
5,998,906 issued Dec. 7, 1999 and in copending U.S. patent
application Ser. No. 09/135,236 filed Aug. 17, 1998. The comb drive
assemblies 416 and 417 are each provided with a first comb drive
member or comb drive 421 mounted on substrate 102 and a second comb
drive 422 overlying the substrate. First comb drives 421 are each
formed from an elongate bar 426 having first and second end
portions 426a and 426b. A plurality of linear comb drive fingers
427, shown as being linear, are secured to one side of the bar in
longitudinally spaced-apart positions along the length of the bar.
Comb drive fingers or comb fingers 427 extend perpendicularly from
bar 426 and, as shown, can be of equal length and have a constant
width along their length. Second comb drives 422 are similar in
construction to first comb drives 421 and are each formed from a
bar 431 having first and second end portions 431a and 43 lb. A
plurality of linear comb fingers 432, shown as being linear, extend
from one side of the bar 431 in longitudinally spaced-apart
positions. Comb fingers 432 are substantially identical to comb
fingers 427, but are offset relative to the comb fingers 427. When
comb drive assemblies 416 and 417 are in their home or rest
positions, comb fingers 427 and 432 are not substantially fully
interdigitated and, preferably, are partially interdigitated as
shown in FIG. 5.
[0059] An elongate member or shuttle 436 is included in each of
first and second micromotors 408 and 409. Shuttle 436 has first and
second end portions 436a and 436b. First end portion 431a of each
of bars 431 is secured to shuttle 436 so that bars 431 extend
perpendicularly from one side of the shuttle 436 between shuttle
end portions 436a and 436b.
[0060] First and second spaced-apart spring members 437 and 438 are
included in each of micromotors 408 and 409. Springs 437 and 438
can be of any suitable type and are preferably formed from at least
one elongate beam-like member. In one preferred embodiment, springs
437 and 438 each consist of a single such beam-like member similar
to first spring member 131 and to second spring member 132
discussed above. Springs 437 and 438 are substantially identical in
construction and each include first and second sacrificial bars 133
and 134 disposed along opposite sides of the springs for the
purposes discussed above. First spring 437 has first and second end
portions 437a and 437b and second spring 438 has first and second
end portions 438a and 438b. The spring second end portion 437b is
secured to shuttle first end portion 436a and the spring second end
portion 438b is secured to shuttle second end portion 436b. As a
result, at least one and as shown all of first and second comb
drive assemblies 416 and 417 are disposed between first and second
springs 437 and 438. The springs 437 and 438 preferably extend
perpendicular to shuttle 436 when comb drive assemblies 416 and 417
are in their home or rest positions. Each of the first and second
springs 437 and 438 preferably has a length approximating the
length of comb drive assemblies 416 and 417 so that first end
portions 437a and 438a are disposed adjacent the second end
portions 426b and 431b of the comb drive bars 426 and 431. An
attachment block 439 is secured to substrate 102 for each spring
437 and 438 and serves to attach the first end portions 437a and
438a of the first and second springs to the substrate 102.
[0061] Second comb drives 422, shuttle 436 and first and second
springs 437 and 438 are spaced above substrate 102 by air gap 118
so as to be electrically isolated from the substrate and movable
relative to the substrate. These structures can have any suitable
thickness and preferably each have a thickness ranging from 10 to
200 microns and more preferably approximately 85 microns. First and
second springs 437 and 438 are included within the means of
microactuator 401 for suspending and movably supporting second comb
drives 422 over substrate 102.
[0062] The second comb drives 422 are movable in a linear direction
of travel relative to first comb drives 421 between first
positions, as shown in FIG. 5, in which comb fingers 427 and 432
are not substantially fully interdigitated and second positions in
which the comb fingers 427 and 432 are substantially fully
interdigitated. When in their second positions, comb fingers 432
extend between respective comb fingers 427 and approach but
preferably do not engage first comb drive bar 426. Second comb
drive members 422 of first comb drive assemblies 416 are in their
second positions when second comb drives 422 of second comb drive
assemblies 417 are in their first positions. Conversely, the second
comb drives of first comb drive assemblies 416 are in their first
positions when the second comb drives of second comb drive
assemblies 417 are in their second positions.
[0063] The movement of second comb drives 422 to their first and
second positions causes shuttle 436 to move in opposite first and
second linear directions relative to substrate 102. Such directions
of travel are substantially perpendicular to the disposition of the
elongate first and second comb drive assemblies 416 and 417. A
plurality of first stops 441 are secured to substrate 102 for
limiting the travel of second comb drives 422 of first comb drive
assemblies 416 towards their respective first comb drives 421. A
plurality of similar second stops 442 are secured to the substrate
for limiting the travel of second comb drives 422 of second comb
drive assemblies 417 towards their respective first comb drives
421. In one preferred embodiment, first and second micromotors 408
and 409 are disposed in juxtaposition so that respective shuttles
436 are disposed side-by-side in parallel with each other. Second
end portions 436b of the shuttles 436 each generally point towards
micromirror 403 and are centered relative to axis of rotation
406.
[0064] First and second couplers 411 and 412 are suspended above
substrate 102 by air gap 118 and have a first end secured to
shuttle second end portion 436b and a second end secured to the
bracket 404. The couplers 411 and 412 are preferably symmetrically
disposed relative to each other with respect to axis of rotation
406. First coupler 411 secures shuttle 436 of the first micromotor
408 to one side of bracket 404 and second coupler 412 secures
second micromotor 409 to the other side of bracket 404. In one
preferred embodiment, each of the first and second couplers has at
least one spring member or coupling spring to provide a non-rigid
connection between the shuttle 436 and the bracket 404. In a
particular preferred embodiment, each of the first and second
couplers 411 and 412 includes a rigid strip 446 secured at one end
to shuttle 436 by means of a first coupling spring 437 and secured
at its other end to bracket 404 by a second coupling spring
448.
[0065] Electrical means is included within microactuator 401 for
driving second comb drives 422 of the first and second micromotors
408 and 409 between their first and second positions. Such
electrical means includes a suitable controller and voltage
generator such as controller and voltage generator 161 electrically
coupled to a plurality of electrodes by means of a plurality of
electrical leads 162. For simplicity, controller 161 and leads 162
are not shown in FIG. 5. Such electrodes, each of which is
substantially similar to the electrodes described above with
respect to microactuator 101, include first and second ground
electrodes 453 which are electrically coupled by means of
respective leads 454 to attachment block 439 for first springs 437
so as to electrically ground first and second springs 437 and 438,
shuttle 436 and second comb drives 422 of each of the micromotors
408 and 409. A first drive electrode 457 is electrically coupled,
either directly or by means of leads 458, to first comb drives 421
of the first comb drive assemblies 416 of each micromotor 409 and
409. A second drive electrode 461 is electrically coupled, either
directly or by means of lead 462, to the first comb drives 421 of
the second comb drive assemblies 417 of the micromotors 408 and
409. An additional stop 463 secured to substrate 102 can
additionally be provided for each micromotor 408 and 409 to limit
the forward travel of shuttle 436 towards rotatable member 402. The
position of rotatable member 402 and thus mirrors 61 and 68 can
optionally be monitored in the manner discussed above with respect
to microactuator 101.
[0066] Other optical microswitches utilizing rotary electrostatic
microactuators can be provided. Optical microswitch 501 shown in
FIG. 6 is formed from a support body 502 of any suitable size and
shape and made from any suitable material such as a ceramic
material. Support body 502 has a base 503 and is preferably coupled
to a plurality of optical fibers. As shown in FIG. 6, a plurality
of five optical fibers 506 are coupled to base 503 by any suitable
means such as block 507. The fibers 506 include an input fiber 506a
and a plurality of output fibers which can be any of the fibers
506. First and second output fibers 506b and 506c are identified in
FIG. 6. The optical fibers 506 are secured to a planar surface 508
of block 507 by any suitable means such as an adhesive (not shown).
Fibers 506 extend parallel to each other and are preferably
arranged in juxtaposition on surface 508 with respective end
surfaces 511 linearly aligned across the block 507. Input fiber
506a is preferably at the center of fibers 506. A conventional
collimating and focusing lens such as GRIN lens 512 is disposed
adjacent end surfaces 511 of optical fibers 506 and is mounted on
base 503 by any suitable means such as an adhesive (not shown).
Lens 512 has a sufficient field of view to accommodate all of
fibers 506. The glass surfaces of fibers 506 and lens 512 are
coated in a conventional manner with an anti-reflective material.
An input laser beam 516 is directed from input fiber 506a along a
path.
[0067] A rotary electrostatic microactuator 521 is carried by
support body 502 for directing input laser beam 516 to first output
fiber 506b, second output fiber 506c or any of the other fibers
506. Microactuator 521 is formed from a planar rotator chip 522
secured to base 503 by any suitable means such as an adhesive (not
shown). For simplicity, microactuator 521 and rotator chip 522 are
shown schematically in FIG. 6. The microactuator 521 is disposed on
base 503 such that the plane of the microactuator is parallel to
input laser beam 516. Microactuator 521 is fanlike in shape and is
arranged on support body 502 such that the diametric base 523 of
microactuator 521, corresponding for example to base 119 of
microactuator 101, is disposed adjacent lens 512 and perpendicular
to input laser beam 516. A micromachined mirror 526 substantially
similar to first mirror 61 discussed above is included in optical
microswitch 501. Micromachined mirror 526 extends out of the plane
of microactuator 521 and is secured to the microactuator by means
of a post 527 preferably formed integral with micromirror 526. Post
527 is joined at its base to microactuator 521 by an adhesive (not
shown) or any other suitable means. Micromirror 526 has a
reflective face or surface 528 rotatable by microactuator 521 about
an axis of rotation 529 extending through post 527 and disposed
perpendicular to the plane of microactuator 521 and to input beam
516. Axis of rotation 529 is preferably disposed at the focal plane
of lens 512 and mirror 526 has a sufficient range of rotation to
permit the mirror to direct output beam 531, by means of lens 512,
onto the core of each of optical fibers 506.
[0068] Any suitable micromachined actuator can be utilized for
microactuator 521, including any of the microactuators disclosed in
copending U.S. patent application Ser. No. ______ filed Dec. 15,
1999 [Our File No. A-68185] and any of such microactuators 101, 201
and 401 discussed above.
[0069] In operation and use, microactuator 521 is utilized to
rotate micromirror 526 to reflect input laser beam 516 and cause
the output laser beam 531 to impinge the image plane of lens 512
for coupling into first or second output optical fibers 506b or
506c. Rotation of micromirror 526 about axis of rotation 529
controls the position at which output laser beam 531 impinges lens
512 and thus the optical fiber 506 into which output beam 531 is
directed. In its rest position, micromirror 526 is preferably
aligned on microactuator 521 so that its reflective surface 528 is
parallel with base 523 of the microactuator 521. Additionally, as
disclosed above, it is preferable that input fiber 506a be one of
the centermost optical fibers 506. Such central disposition of
input fiber 506a and the disposition of micromirror 526 parallel to
base 528 minimizes the rotational travel of the micromirror when
directing the output beam 521 to the desired output fiber 506. For
example, micromirror 526 need be rotated only slightly in the
clockwise direction for directing output laser beam 531 into first
output fiber 506b. Similarly, slight counterclockwise rotation of
micromirror 526 about axis 529 results in output laser beam 531
being directed into second output fiber 506c, as shown in FIG. 6.
In addition, use of the central fiber 506 as the input fiber
facilitates the input beam 516 impinging reflective surface 528 on
the axis of rotation of micromirror 526. Micromirror 526 is capable
of .+-.six degrees angular rotation, that is a rotation of six
degrees in both the clockwise and counterclockwise directions for
an aggregate rotation of twelve degrees, although approximately
.+-.four degrees or less of angular rotation is sufficient in
microswitch 501.
[0070] The disposition of axis of rotation 529 adjacent the base
523 of microactuator 521 facilitates placement of the reflective
face 528 of micromirror 526 in the focal plane of lens 512.
Bidirectional optical microswitch 501 has a relatively small form
factor of less than approximately one cubic centimeter. The
microswitch 501 is suitable for use in a fiber optic network of a
telecommunications system, but can also be used in other
applications such as in a computer data storage system.
[0071] As can be seen from the foregoing, a relatively inexpensive
optical microswitch having a small form factor has been provided.
The microswitch has a micromirror with a reflective face that
rotates in the focal plane of a focusing lens. The microswitch can
optionally be provided with first and second micromirrors that are
closely packed and disposed in the focal plane of a focusing lens.
The microswitch is capable of coupling visible light into a single
mode or multi-mode optical fiber with low transmission losses and
has relatively fast switching times. The mirror of the microswitch
is capable of angular rotations over a relatively large range.
* * * * *