U.S. patent application number 10/796622 was filed with the patent office on 2004-09-23 for cleaning apparatus for nozzle.
This patent application is currently assigned to Tokyo Ohka Kogyo Co., Ltd.. Invention is credited to Aoki, Taiichiro, Ohishi, Seiji.
Application Number | 20040181885 10/796622 |
Document ID | / |
Family ID | 32984434 |
Filed Date | 2004-09-23 |
United States Patent
Application |
20040181885 |
Kind Code |
A1 |
Aoki, Taiichiro ; et
al. |
September 23, 2004 |
Cleaning apparatus for nozzle
Abstract
The object of the present invention is to provide a cleaning
apparatus for a nozzle comprising a brush which can be moved in the
vertical direction and the horizontal direction while being
rotated. Specifically, the cleaning apparatus for a nozzle having a
slit-like discharge opening in the lower end thereof, comprises a
cleaning tank which is filled with a cleaning liquid, and a
cylindrical long-length brush which is disposed within the cleaning
tank so that the axis of the brush is parallel to the slit-like
discharge opening, wherein the length of the long-length brush is
substantially the same as the length of the nozzle, and the brush
is rotatable around the axis thereof and can be reciprocated in the
horizontal direction perpendicular to the axis and also in the
vertical direction
Inventors: |
Aoki, Taiichiro; (Kanagawa,
JP) ; Ohishi, Seiji; (Kanagawa, JP) |
Correspondence
Address: |
CARRIER BLACKMAN AND ASSOCIATES
24101 NOVI ROAD
SUITE 100
NOVI
MI
48375
|
Assignee: |
Tokyo Ohka Kogyo Co., Ltd.
Kanagawa
JP
|
Family ID: |
32984434 |
Appl. No.: |
10/796622 |
Filed: |
March 9, 2004 |
Current U.S.
Class: |
15/21.1 |
Current CPC
Class: |
B05B 15/52 20180201;
B05C 5/0254 20130101 |
Class at
Publication: |
015/021.1 |
International
Class: |
B08B 001/04 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 10, 2003 |
JP |
2003-063560 |
Claims
What is claimed is:
1. A cleaning apparatus for a nozzle having a slit-like discharge
opening in the lower end thereof, comprising: a cleaning tank which
is filled with a cleaning liquid; and a cylindrical long-length
brush which is disposed within said cleaning tank so that the axis
of said brush is parallel to said slit-like discharge opening,
wherein the length of said long-length brush is substantially the
same as the length of said nozzle, and said brush is rotatable
around the axis of the brush and can be reciprocated in the
horizontal direction perpendicular to the axis and also in the
vertical direction.
2. The cleaning apparatus for a nozzle according to claim 1,
wherein the hair structure of the long-length brush is arranged
obliquely with respect to the axis of the brush so as to be in
contact with the lower end of the nozzle to be cleaned in an
oblique direction.
3. A cleaning apparatus for a nozzle having a slit-like discharge
opening in the lower end thereof, comprising: a cleaning tank which
is filled with a cleaning liquid; and two cylindrical long-length
brushes which are disposed within said cleaning tank so that the
axes of said brushes are parallel to the slit-like discharge
opening, wherein said two long-length brushes are located in a
position where the hair structures thereof are in contact with each
other so as to sandwich the lower end of said nozzle therebetween,
and wherein the length of each long-length brush is substantially
the same as the length of said nozzle, and each brush is rotatable
around the axis of the brush and can be reciprocated in the
horizontal direction perpendicular to the axis and also in the
vertical direction.
4. The cleaning apparatus for a nozzle according to any one of
claims 1-3, wherein a brush cleaning means for scraping a material
attached to the long-length brush is provided within the cleaning
tank.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a cleaning apparatus for a
slit nozzle which is used for applying a coating liquid in a state
of having a predetermined width onto the surface of a plate-like
material to be treated such as a semiconductor wafer, a glass
substrate, or the like.
[0003] 2. Description of the Prior Art
[0004] According to the conventional art, in order to apply a
resist liquid or the like to the surface of a plate-like material
to be treated such as a semiconductor wafer, a glass substrate, or
the like, a coating liquid is dropped from a nozzle onto the center
of the material to be treated which is mounted on a spinner, and
the coating liquid is dispersed to the outside by centrifugal force
which is generated by rotating the material to be treated with the
spinner. However, in this method, only a small amount of coating
liquid remains on the surface of the material to be treated, while
almost all the liquid is dissipated and wasted.
[0005] Therefore, instead of spinner coating, a slit nozzle has
been invented. The slit nozzle has an opening of a predetermined
width for discharging a coating liquid, and a coating liquid is
applied to the surface of the material to be treated in a state of
having a predetermined width by moving the nozzle with respect to
the material to be treated.
[0006] In a case where the slit nozzle having an opening of a
predetermined width is used, the waste of a coating liquid can be
prevented, and efficient coating can be conducted. However, since
the width of the slit nozzle is great, an excessive amount of
coating liquid tends to stay in the opening of the nozzle and the
periphery thereof, which causes generation of foreign materials
after being dried. Therefore, it is necessary to remove the coating
liquid from the opening of the nozzle and the periphery thereof by
conducting cleaning after coating.
[0007] In order to clean the tip end of the nozzle, various methods
have been used. For example, a method has been used in which the
whole tip end of the nozzle is cleaned at one time by using a
cleaning apparatus having openings for discharging a cleaning
liquid.
[0008] However, in a case of cleaning by means of the
above-mentioned apparatus having openings for discharging a
cleaning liquid, it is difficult to supply a cleaning liquid to all
the openings at uniform pressure, which will prevent uniform
cleaning.
[0009] Therefore, another method for cleaning a nozzle has been
disclosed in which a plurality of scrubbers are provided and the
nozzle is cleaned by allowing the surface of the scrubbers to come
into contact with the surface to be cleaned in the various
positions along the outer surface of the nozzle while the scrubbers
are rotated in a cleaning liquid. Each scrubber is a brush made of
bristles, and the axis is movable so as to be adapted for various
kinds of nozzles.
[0010] Document 1: Japanese Patent Application Publication
2002-500097 (p 38-p 40, FIG. 9)
[0011] However, the above-mentioned method has a drawback that the
position of the axis needs to be changed each time the area to be
cleaned is changed because the axis of the scrubber cannot be moved
during cleaning.
[0012] The present invention has been made to solve the drawback,
and the object of the present invention is to provide a cleaning
apparatus for a nozzle comprising a brush whose axis is movable
upward and downward, and also leftward and rightward while the
brush is being rotated.
SUMMARY OF THE INVENTION
[0013] According to a first aspect of the present invention, for
the purpose of overcoming the drawback mentioned above, there is
provided a cleaning apparatus for a nozzle having a slit-like
discharge opening in the lower end thereof, comprising a cleaning
tank which is filled with a cleaning liquid, and a cylindrical
long-length brush which is disposed within the cleaning tank so
that the axis of the brush is parallel to the slit-like discharge
opening, wherein the length of the long-length brush is
substantially the same as the length of the nozzle, and the brush
is rotatable around the axis thereof and can be reciprocated in the
horizontal direction perpendicular to the axis and also in the
vertical direction.
[0014] Since the long-length brush is moved in the vertical
direction and the horizontal direction while being rotated in a
state of being in contact with the lower end of the nozzle to be
cleaned, it is possible to clean both side surfaces of the
discharge opening of the slit nozzle as well as the discharge
opening itself with the long-length brush always being in contact
in the best position. Specifically, in order to clean both side
surfaces of the discharge opening, the long-length brush is moved
in the horizontal direction and then elevated.
[0015] Regarding the arrangement direction of the hair structure of
the long-length brush, the hair structure is arranged obliquely
with respect to the axis of the brush so as to be in contact with
the lower end of the nozzle to be cleaned in an oblique direction.
With this, the contact area of the hair structure with the portion
of the nozzle to be cleaned becomes large, and thereby cleaning
efficiency can be improved.
[0016] According to a second aspect of the present invention, there
is provided a cleaning apparatus for a nozzle having a slit-like
discharge opening in the lower end thereof, comprising a cleaning
tank which is filled with a cleaning liquid, and two cylindrical
long-length brushes which are disposed within the cleaning tank so
that the axes of the brushes are parallel to the slit-like
discharge opening, wherein the two long-length brushes are located
in the position where the hair structures thereof are in contact
with each other so as to sandwich the lower end of the nozzle
therebetween, and wherein the length of each long-length brush is
substantially the same as the length of the nozzle, and each brush
is rotatable around the axis thereof and can be reciprocated in the
horizontal direction perpendicular to the axis and also in the
vertical direction.
[0017] Since the two long-length brushes are rotated and moved in
the vertical direction and the horizontal direction in a state
where the lower end of the nozzle to be cleaned is sandwiched
between the two long-length brushes, it is possible to more
efficiently clean both side surfaces of the discharge opening of
the slit nozzle as well as the discharge opening itself with the
long-length brush always being in contact in the best position.
Specifically, in order to clean both side surfaces of the discharge
opening, the long-length brush is moved in the horizontal direction
and then elevated.
[0018] In addition, by providing a brush cleaning means for
scraping a material attached to the long-length brush itself within
the cleaning tank, it is possible to always keep the long-length
brush clean.
BRIEF DESCRIPTION OF THE DRAWINGS
[0019] FIG. 1 shows the movement of a cleaning apparatus for a
nozzle according to a first embodiment of the present
invention;
[0020] FIG. 2 shows a cleaned area of the nozzle depending on the
arrangement angle of the hair structure of the long-length brush,
specifically, FIG. 2(a) shows a case where the arrangement
direction is perpendicular to the portion of the nozzle to be
cleaned and FIG. 2(b) shows a case where the arrangement direction
is oblique with respect to the portion of the nozzle to be
cleaned;
[0021] FIG. 3 is a diagram showing the structure of the movement of
the long-length brush for cleaning a slit nozzle seen from the
side;
[0022] FIG. 4 is a diagram showing the structure of the movement of
the long-length brush for cleaning a slit nozzle seen from the
cross-section; and
[0023] FIG. 5 shows a cleaning apparatus for a nozzle according to
a second embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0024] Hereinafter, embodiments according to the present invention
will be explained with reference to the attached drawings.
[0025] FIGS. 1(a)-(c) show the movement of a cleaning apparatus for
a nozzle according to a first embodiment of the present invention,
FIGS. 2(a) and (b) show a cleaned area of the nozzle depending on
the arrangement angle of the hair structure of the long-length
brush, FIG. 3 is a cross-sectional view of an example of the
cleaning apparatus for a nozzle according to the first embodiment
of the present invention, FIGS. 4(a)-(c) are diagrams showing the
structure of the movement of the long-length brush for cleaning a
slit nozzle seen from the cross-section, and FIG. 5 shows a
cleaning apparatus for a nozzle according to a second embodiment of
the present invention.
[0026] As shown in FIG. 1, a cylindrical long-length brush 3 is
disposed to be rotatable within a cleaning tank 2 which is a
reservoir for a cleaning liquid 1, and a slit nozzle 4 is
positioned above the long-length brush 3 so as to be movable in the
vertical direction. Incidentally, line a-a' in FIG. 1 is an
imaginary line for showing the reference position.
[0027] The axis of the long-length brush 3 is parallel to a
slit-like discharge opening which is located in the lower end of
the slit nozzle 4. The long-length brush 3 is rotatable around the
axis, and also the long-length brush 3 can be reciprocated in the
horizontal direction perpendicular to the axis and in the vertical
direction.
[0028] The long-length brush 3 is made of stainless steel,
aluminum, titanium or the like. Regarding the size of the
long-length brush 3, the diameter is 30-100 mm, the length is set
to be slightly greater than the longitudinal length of the slit
nozzle 4, and the distance to the discharge opening of the slit
nozzle 4 becomes 25-300 .mu.m during cleaning.
[0029] The arrangement direction of the hair structure of the
long-length brush 3 is oblique as shown in FIG. 2(b). By doing so,
the cleaned area becomes greater compared to a case where the
arrangement direction is perpendicular to the lower end of the slit
nozzle to be cleaned (that is, the discharge opening and both side
surfaces thereof), and cleaning efficiency is improved. Preferably,
the flow direction of the hair structure 3a of the long-length
brush 3 is set to be the same as the rotation direction of the
long-length brush 3.
[0030] Also, three combs 5 as a brush cleaning means are provided
in the bottom of the cleaning tank 2 as shown in FIG. 1 in order to
scrape dirt attached to the hair structure of the long-length brush
3. The number of combs 5 may be changed as needed, and also the
material and the shape are not limited to particular ones.
[0031] The amount of the cleaning liquid 1 can be changed freely.
The whole brush 3 may be immersed into the cleaning liquid, or
almost half of the long-length brush 3 may be immersed into the
cleaning liquid. That is, the amount of the cleaning liquid 1 can
be set optionally depending on the degree of cleaning.
[0032] FIG. 3 shows the structure in which the long-length brush 3
is moved while being supported by a supporting member.
Specifically, a sliding plate 13 is engaged into rails 11 on a
fixing board 10 via sliders 12, and the sliding plate 13 is slid
back and forth by driving a cylinder or the like which is not shown
in the drawing. For example, when the sliding plate 13 is moved
from the forward side to the back side, the long-length brush 3 is
moved from the forward side which is oblique to the slit nozzle 4
to the back side which is oblique to the slit nozzle 4 via the tip
end of the slit nozzle 4.
[0033] A vertical cylinder 14 is disposed on the sliding plate 13,
and the vertical cylinder 14 elevates and lowers a mounting plate
15. The long-length brush 3 is moved in the vertical direction with
respect to the slit nozzle 4 by the mounting plate 15. A motor 16
and two supporting members 17 are fixed onto the mounting plate 15.
The supporting members 17 support the long-length brush 3, and the
motor 16 rotates the long-length brush 3 in an optional direction
via pulleys 18 and bearings 19.
[0034] In addition, as shown in FIG. 3, two partition plates 20 are
provided in the bottom of the cleaning tank 2, and the area
surrounded by the partition plates 20 forms a reservoir portion for
a cleaning liquid 21 to immerse the long-length brush 3 therein. In
a case where the cleaning liquid overflows the partition plates 20,
the liquid passes through drain ports 22 which are also provided in
the bottom of the cleaning tank 2, and is discharged from a drain
pipe 23. If needed, another drain port 22 may be provided in the
bottom of the reservoir portion for a cleaning liquid 21 so that
cleaning can be conducted to the reservoir portion for a cleaning
liquid 21.
[0035] In operation, as shown in FIG. 1, the long-length brush 3 is
moved downward and rightward while being rotated clockwise, and
thereby the left side 4a of the lower end of the silt nozzle 4 and
the discharge opening 4b of the slit nozzle 4 are cleaned by the
long-length brush 3 in a state where the long-length brush 3 keeps
in contact with the lower end of the slit nozzle 4. Next, the
long-length brush 3 is moved upward and rightward, and thereby the
right side 4c of the lower end of the slit nozzle 4 is cleaned by
the long-length brush 3. In the process of the above-mentioned
cleaning, the combs 5 scrapes dirt attached to the hair structure
3a of the long-length brush 3. Alternatively, cleaning may be
conducted to the right side 4c of the lower end of the slit nozzle
4, the discharge opening 4b of the slit nozzle 4, and the left side
4a of the lower end of the silt nozzle 4 in this order.
[0036] More specifically, as shown in FIG. 4(a), after the
long-length brush 3 is rotated in advance, the sliders are moved to
the right, and at the same time, the hair structure 3a (not shown
in FIG. 4) of the long-length brush 3 is lowered by the vertical
cylinder to come into contact with the left side 4a of the lower
end of the silt nozzle 4, so that the left side 4a of the lower end
of the silt nozzle 4 is cleaned. Next, as shown in FIG. 4(b), the
sliders are stopped at the discharge opening 4b of the slit nozzle
4, the vertical cylinder is also stopped in the lowest position,
and the discharge opening 4b of the slit nozzle 4 is cleaned by the
long-length brush 3. Next, as shown in FIG. 4(c), the sliders are
moved to the right again, and at the same time, the hair structure
3a (not shown in FIG. 4) of the long-length brush 3 is elevated by
the vertical cylinder to come into contact with the right side 4c
of the lower end of the silt nozzle 4, so that the right side 4c of
the lower end of the silt nozzle 4 is cleaned. The long-length
brush 3 is always rotated during the above-mentioned cleaning. It
should be noted that the starting position of cleaning is optional,
and the order of cleaning is not limited to the above. For example,
the discharge opening 4b of the slit nozzle 4 may be cleaned first,
and thereafter the long-length brush 3 may be moved to the left and
the right. Or, cleaning may be started from the right side 4c and
end at the left side 4a. Also, the reciprocating movement of the
long-length brush 3 may be one cycle or a plurality of cycles.
[0037] FIG. 5 shows a cleaning apparatus for a nozzle according to
a second embodiment of the present invention. In FIG. 5, the same
elements as in FIG. 1 have the same reference number, and the
explanations thereof are omitted. In the embodiment shown in FIG.
5, the slit nozzle 4 is cleaned by using two long-length brushes 3,
3'. The long-length brushes 3, 3' are rotated clockwise, and wrap
the whole lower end of the slit nozzle 4 in a state of keeping in
contact with the lower end of the slit nozzle 4. In this state, the
discharge opening 4b of the silt nozzle 4 is cleaned by the
long-length brushes 3, 3', and thereafter, the left side 4a and the
right side 4c are cleaned by gradually moving the long-length
brushes 3, 3' upward, leftward and rightward. It is also possible
to clean the left side 4a and the right side 4c first by moving the
long-length brushes 3, 3' downward, leftward and rightward, and
then clean the discharge opening 4b of the slit nozzle 4.
Incidentally, line b-b' in FIG. 5 is an imaginary line for showing
the reference position. Although both of the long-length brushes 3,
3' are rotated clockwise in the above-mentioned embodiment, it is
possible to rotate the long-length brush 3 clockwise and the
long-length brush 3' counterclockwise.
[0038] As is explained in the above, according to the present
invention, since the long-length brush is moved in the vertical
direction and the horizontal direction while being rotated in a
state of being in contact with the lower end of the nozzle to be
cleaned, it is possible to clean both side surfaces of the
discharge opening of the slit nozzle as well as the discharge
opening itself with the long-length brush always being in contact
in the best position. Specifically, in order to clean both side
surfaces of the discharge opening, the long-length brush is moved
in the horizontal direction and then elevated.
[0039] By adjusting the arrangement direction of the hair structure
of the long-length brush so as to be in contact with the lower end
of the nozzle to be cleaned in an oblique direction, the contact
area of the hair structure with the portion of the nozzle to be
cleaned becomes large, and thereby cleaning efficiency can be
improved.
[0040] Since the two long-length brushes are rotated and moved in
the vertical direction and the horizontal direction in a state
where the lower end of the nozzle to be cleaned is sandwiched
between the two long-length brushes, it is possible to more
efficiently clean both side surfaces of the discharge opening of
the slit nozzle as well as the discharge opening itself with the
long-length brush always being in contact in the best position.
Specifically, in order to clean both side surfaces of the discharge
opening, the long-length brush is moved in the horizontal direction
and then elevated.
[0041] In addition, by providing the brush cleaning means for
scraping a material attached to the long-length brush itself within
the cleaning tank, it is possible to always keep the long-length
brush clean.
* * * * *