U.S. patent application number 10/791169 was filed with the patent office on 2004-09-02 for electrochemical system for analyzing performance and properties of electrolytic solutions.
Invention is credited to Landau, Uziel.
Application Number | 20040168925 10/791169 |
Document ID | / |
Family ID | 33543807 |
Filed Date | 2004-09-02 |
United States Patent
Application |
20040168925 |
Kind Code |
A1 |
Landau, Uziel |
September 2, 2004 |
ELECTROCHEMICAL SYSTEM FOR ANALYZING PERFORMANCE AND PROPERTIES OF
ELECTROLYTIC SOLUTIONS
Abstract
The invention relates to the analysis of the performance and
properties of electrochemical processes, and specifically, to
electrolytic solutions and electrode processes. The invention
discloses a device and a method for obtaining qualitative and
quantitative information for the kinetics of the electrode
reactions, the transport processes, the thermodynamic properties of
the electrochemical processes taking place in the cell. When a
deposition reaction takes place, the device provides also valuable
information about the relationship between the current density and
deposit properties including but not limited to the deposit color,
luster, and other aspects of its appearance. The device disclosed
herein typically is comprised of a multiplicity of cathodic or
anodic regions where one or more electrochemical reactions take
place simultaneously, but at a different rate. From the precisely
measured segmental currents one can obtain among other process
properties: (1) An accurate relationship between the deposit
appearance and the current density. This relationship can be used
for process diagnostics, troubleshooting, control of
concentrations, pH, and additives and contaminants and for
optimizing the operating conditions, including the voltage,
current, and circulation rate. (2) Quantitative determination of
important process parameters including but not limited to, kinetics
(e.g., exchange current density, cathodic and anodic transfer
coefficients), transport (e.g. conductivity), and thermodynamics
(e.g., standard potential). A particularly attractive application
of the process is for the quantitative and qualitative processes of
alloys plating and for the determination of the relationship
between the current efficiency and the applied current density.
Inventors: |
Landau, Uziel; (Shaker
Heights, OH) |
Correspondence
Address: |
Howard M. Cohn
Suite 220
21625 Chagrin Blvd.
Cleveland
OH
44122
US
|
Family ID: |
33543807 |
Appl. No.: |
10/791169 |
Filed: |
March 2, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
10791169 |
Mar 2, 2004 |
|
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10267505 |
Oct 9, 2002 |
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Current U.S.
Class: |
205/81 ; 205/164;
205/166 |
Current CPC
Class: |
C25D 21/12 20130101 |
Class at
Publication: |
205/081 ;
205/164; 205/166 |
International
Class: |
C25D 005/00 |
Claims
I claim:
1. An electrochemical device, comprising: a cell with a plurality
of discrete cathodic or anodic regions at which one or more
electrochemical reactions occurs; and means for causing the one or
more electrochemical reactions at each of the plurality of discrete
regions whereby each of the one or more electrochemical reactions
is measurable and quantifiable.
2. The device of claim 1, wherein the means for causing the one or
more electrochemical reactions that occur at each of the plurality
of discrete regions to be different.
3. The device of claim 1, wherein the means for causing the one or
more electrochemical reactions at each of the plurality of discrete
regions causes the one or more electrochemical reactions to proceed
simultaneously and for the same amount of time.
4. The device of claim 3, wherein the means for causing the one or
more electrochemical reactions cause the one or more
electrochemical reactions to occur simultaneously at different
current densities at each of the discrete regions.
5. The device of claim 4, wherein the one or more electrochemical
reactions cause a discrete deposit at each of the discrete regions,
each discrete deposit being a function of the current density at
the discrete region of the discrete deposit.
6. The device of claim 4, wherein each of the discrete regions is
disposed on a same substrate.
7. The device of claim 5, including: means for measuring the
current density at each of the discrete regions while the one or
more electrochemical reactions occur simultaneously at different
current densities at each of the discrete regions.
8. The device of claim 7, including: means for measuring the
voltage at each of the discrete regions while the one or more
electrochemical reactions occur simultaneously at different current
densities at each of the discrete regions.
9. The device of claim 1, wherein the electrochemical reactions
occur at different reaction rates that take place sequentially at
the distinctly different anodic or cathodic regions.
10. The device of claim 1, wherein the electrochemical reactions
occur at different reaction rates that vary in a periodic fashion
at the distinctly different anodic or cathodic regions.
11. An electrochemical device for simultaneously forming a
plurality of electroplated deposits at a plurality of discrete
cathodic or anodic regions at which one or more electrochemical
reactions occurs; the electrochemical device comprising: a cell and
a plated, segmented substrate, the substrate having disposed
therebetween a plurality of discrete cathodic or anodic regions at
which one or more electrochemical reactions occurs.
12. The electrochemical device of claim 11 wherein the substrate is
constructed of a dielectric material selected from the group
comprising silicon, glass and plastic material.
13. The electrochemical device of claim 12 wherein the substrate
has a conductive seed layer formed thereon, the conductive seed
layer being constructed of a material selected from the group
comprising of copper, nickel, brass, gold, and other conductive
materials compatible with an electrochemical process.
14. The electrochemical device of claim 13 wherein the substrate
has a conductive seed layer formed as a continuous conductive
layer.
15. The electrochemical device of claim 14 wherein the substrate
has a conductive seed layer formed by a vapor phase process, an
electroless process, by lamination or gluing a conductive film onto
the dielectric substrate.
16. The electrochemical device of claim 15 wherein the substrate
has a conductive seed layer segmented into a plurality of discrete,
electrically isolated sections.
17. The electrochemical device of claim 16 wherein the substrate
has a conductive seed layer is segmented into a plurality of
discrete, electrically isolated sections by grooves cut through the
conductive seed layer between each of the discrete sections.
18. The electrochemical device of claim 11, wherein the substrate
comprises a patterned printed circuit board having a pattern
thereon that provides the plurality of discrete electrically
isolated sections.
19. The electrochemical device of claim 14 wherein each of the
plurality of discrete electrically isolated sections has a separate
electrical contact attached thereto.
20. The electrochemical device of claim 19 further including means
for directing a different current through separate current paths to
or from each of the separate electrical contacts.
21. The electrochemical device of claim 20 further including
resistors in each of the separate current paths to control the
current to each separate electrical contact.
22. The electrochemical device of claim 1 wherein one or more of
the discrete cathodic regions or anodic regions forms a reference
electrode adapted to measure the potential in the electrolyte at
the position where the reference electrode is located.
23. The electrochemical device of claim 11 wherein the cell
incorporates an enclosure with a plurality of cavities therein,
each cavity corresponding to one of the discrete cathodic or anodic
regions whereby when the cell is assembled each of the discrete
cathodic or anodic regions is exposed to an electrolyte and ionic
current.
24. The electrochemical device claim 23 wherein the depth of the
cavities ensure a uniform current density across the discrete
cathodic or anodic regions formed on the substrate.
25. The electrochemical device of claim 11 wherein a counter
electrode is not segmented and is disposed at a fixed distance from
the substrate.
26. The electrochemical device of claim 25 wherein the substrate is
a cathode, and the counter electrode is an anode formed of a
material on which oxygen can evolve.
27. The electrochemical device of claim 26 wherein the anode is
formed of a conductor selected from the group comprising platinum,
gold, titanium, titanium coated with iridium oxide, ruthenium
oxide, platinum, lead, or silver-lead alloy, and solubles such as
copper and nickel.
28. The electrochemical device of claim 11 wherein: the substrate
is selected from the group including a segmented rotating disk
electrode and a rotating segmented disk electrode surrounded by a
ring electrode.
29. The electrochemical device of claim 11 wherein: a central
circular electrode that is not segmented; and the substrate is a
surrounding electrode that is segmented to provide a plurality of
electrodes.
30. The electrochemical device of claim 11 further including means
for agitating or circulating the electrolyte, the means for
agitating or circulating selected from the group comprising inert
gas for agitation, air bubbling for agitation, a stirrer, and a
pump.
31. A process for determining the quality of electroplated deposits
comprising: simultaneously depositing a plurality of discrete
deposits, each deposit at one of a plurality of discrete cathodic
or anodic regions at which one or more electrochemical reactions
occurs; and causing the one or more electrochemical reactions at
each of the plurality of discrete regions whereby each of the one
or more electrochemical reactions is measurable and
quantifiable.
32. The process of claim 31 wherein the one or more electrochemical
reactions that occur at each of the plurality of discrete regions
is different from the other reactions.
33. The process of claim 31 wherein each of the one or more
electrochemical reactions at each of the plurality of discrete
regions proceeds simultaneously and for the same amount of
time.
34. The process of claim 31 wherein the one or more electrochemical
reactions occur simultaneously at different current densities at
each of the discrete regions.
35. The process of claim 34 wherein the one or more electrochemical
reactions cause a discrete deposit at each of the discrete regions,
each discrete deposit being a function of the current density at
the discrete region of the discrete deposit.
36. The process of claim 35 including the step of measuring the
current density at each of the discrete regions while the one or
more electrochemical reactions occur simultaneously at different
current densities at each of the discrete regions.
37. The process of claim 35 including the step of measuring the
voltage at each of the discrete regions while the one or more
electrochemical reactions occur simultaneously at different current
densities at each of the discrete regions.
38. A method for calculating electrochemical process parameters in
an electrochemical device having a plurality of distinctly
different cathodic or anodic regions including: measuring currents
and voltages while at least one electrochemical reaction takes
place at different measurable rates on a plurality of distinctly
different cathodic or anodic regions in the electrochemical
device.
39. The method of claim 38 wherein the different reaction rates
take place simultaneously on the distinctly different cathodic or
anodic regions.
40. The method of claim 38, wherein the process parameters are
selected from the group comprising the polarization curve and the
kinetics constants of the electrochemical reaction.
41. The method of claim 38, wherein the parameters are selected
from the group comprising the electrolyte conductivity and the
equilibrium potential.
42. The method of claim 38 wherein the electrochemical process
parameters are comprised of the reactant ion diffusivity.
43. The method of claim 38, wherein the plurality of reactions on
each region are comprised of two primary reactions, one a
deposition reaction and one a gas evolution reaction.
44. The method of claim 38 wherein calculating electrochemical
process parameters includes: weighing or measuring the thickness of
the deposit; and quantitative characterization of the current
efficiency as function of the overall current or voltage.
Description
RELATED APPLICATIONS
[0001] This is a Continuation-in-Part application of U.S.
application Ser. No. 10/267,505 having a filing date of Oct. 9,
2002.
REFERENCES CITED
[0002]
1 U.S. Patent Documents 2149344 March, 1939 Hull 204/153. 2760928
August, 1956 Ceresa 204/434. 2801963 August, 1957 Hull et al.
204/434. 2859166 November, 1958 Grigger 204/DIG. 3121053 February,
1964 Hull, Jr. et al. 204/434. 3215609 November, 1965 Chapdelaine
204/434. 3278410 October, 1966 Nelson 204/290. 3281338 October,
1966 Leary et al. 204/290. 3356597 December, 1967 Schmidt 204/434.
3616287 October, 1971 Draghicescu et al. 204/DIG. 4102770 July,
1978 Moriarty et al. 204/212. 4252027 February, 1981 Ogden et al.
73/826. 4605626 August, 1986 Beck 204/403. 5,228,976 July, 1993
Abys et. al. 5,413,692 May, 1995 Abys et al. 6,113,771 September,
2000 Landau et. al.
OTHER REFERENCES
[0003] 1. Cell-Design.COPYRGT., Software for computer-aided-design
of electrochemical cells, L-Chem Inc, 13909 Larchmere Blvd. Shaker
heights, OH 44120. Website: www.L-Chem.com
[0004] 2. I. Kadija, J. A. Abys, V. Chinchankar and K. Straschil,
"Hydrodynamically Controlled "Hull Cell", Plating and Surface
Finishing, July, 1991.
[0005] 3. Autolab HT RotaHull, designed by D. Landolt and C.
Madore, manufactured and distributed by Eco Chemie, BV, Utrecht,
The Netherlands.
[0006] 4. J. S. Newman, Electrochemical Systems, Prentice-Hall,
Inc., Englewood Cliffs, N.J. (1973).
[0007] 5. A. J. Bard and L. Faulkner, "Electrochemical Methods",
John Wiley and Sons, N.Y. 1980.
[0008] 6. Venjamin G. Levich, "Physicochemical Hydrodynamics",
Prentice-Hall, Englewood Cliffs, N.J., 1962.
[0009] 7. Uziel landau, "Determination of Laminar and Turbulent
Mass Transport Rates in Flow Cells by the Limiting Current
Technique", AIChE Symposium Series 204, Vol. 77, pp. 75-87,
1981
BACKGROUND OF THE INVENTION
[0010] 1. Field of the Invention
[0011] The invention relates to the field of analyzing the
properties of electrolytes and testing the performance of
electrochemical processes. The invention focuses on electroplating
processes, although it can also be directly applied to other
electrolytic processes including, but not limited to,
electrowinning, electrorefining, and anodizing.
[0012] 2. Background of the Invention
[0013] The performance of electrochemical systems depends on the
design of the cells in which the electrochemical reactions take
place and on the appropriate selection of the operating conditions,
including current, voltage, electrolyte composition, species
concentrations, flow, etc., to produce the desired results. The
selection of the operating conditions is particularly critical in
plating cells where the deposit thickness distribution and
properties (e.g., appearance, color, surface texture, adhesion, and
composition) strongly depend on the cell configuration and the
process parameters. In order to obtain adequate quality product,
practitioners often utilize two approaches: (i) experimental--a
test fixture or apparatus e.g., the "Hull cell" [described e.g., in
U.S. Pat. Nos. 2,149,344, 2,801,963, 3,121,053] is used to
generate, by specifying and controlling the total current, a sample
that is plated under a range of current densities. The sample is
visually inspected and correlated with the process conditions; (ii)
modeling--where the electrochemical process is mathematically
analyzed and the conditions to produce the desired results are
sought. In recent years, the latter approach has been enhanced by
simulations using computer-aided-design (`CAD`) software e.g.,
Cell-Design.COPYRGT. [Ref. 1]. Knowing the process parameters
(e.g., kinetics constants, standard potential, and conductivity) is
an essential prerequisite for the modeling approach. Yet, this data
is typically not available, particularly not for commercial
electrolyte formulations, and generating this data is quite
onerous.
[0014] As discussed below, both these approaches (`experimental
deposition onto a test fixture` and `modeling`) suffer at present
from a number of shortcomings that the invention disclosed herein
resolves.
[0015] Limitations of the Current Approaches:
[0016] A. Limitations of Special Fixtures and Devices that
Characterize Deposits Produced Under a Range of Current
Densities
[0017] The most commonly used device to experimentally explore a
deposit produced under a range of current densities is the `Hull
cell` [U.S. Pat. Nos. 2,149,344, 2,801,963, 3,121,053]. The Hull
cell, shown in FIG. 1A, is a prismatic cell with vertical
insulating sidewalls, an anode panel (2) and a slanted cathode
panel (3). Due to the different angles of the corners between the
slanted cathode and its neighboring insulating sidewalls (acute
angle (4) at one side of the cathode and an obtuse angle (5) at the
other side), and the varying distance between regions on the
cathode and the anode, the deposit is plated on the cathode under a
non-uniform current density: the highest current density (and
correspondingly, the thickest deposit) is near the corner with the
obtuse angle (5); the lowest current density (and thinnest deposit)
is next to the corner with the acute angle (4). The current density
and the corresponding deposit thickness vary between the two
corners in a non-linear fashion. Since, only the total current to
the entire cathode can be measured in the Hull cell, users are
given a scale (6), shown in FIG. 1B, on which the expected current
density is indicated as a function of position. By placing this
scale alongside the cathode panel (3), as shown in FIG. 1B, users
can estimate the current density that corresponds to the deposit at
the given location. The major deficiency of the Hull-cell is that
the current density indicated on the scale is only a rough
approximation. This approximation is inherent and cannot be
improved because the current distribution does not depend only on
the cell geometry, as implied in the Hull-cell description, but it
varies with the type of plating solution used. For example, lead
and zinc deposition produce a highly non-uniform distribution;
copper plating produces a moderately uniform distribution, and
nickel, iron and gold produce significantly more uniform
distribution. The curves displayed in FIG. 2 show the computed
current density distributions in typical electrolytes (copper from
acidified copper sulfate, and Watts-type nickel), as modeled by
Cell-Designo CAD software, in comparison to the corresponding value
indicated by the Hull cell scale. As noted in FIG. 2, even for
those very common electrolytes, significant differences (exceeding
25%) at the low and high current density ranges exist. An even more
serious obstacle to using the Hull cell for the selection of the
proper operating conditions is the variation of the current
distribution due to variations in the electrolyte's temperature,
ionic concentrations, conductivity, additive concentration,
contaminants and by-products, which are supposed to be analyzed by
the Hull cell test, yet their effects on the current density is not
indicated. Accordingly, there exists a significant uncertainty in
matching the deposit at any given location along the Hull-cell
cathode to the actual prevailing local current density.
Furthermore, the deposit thickness varies gradually and
continuously along the cathode. Since the user relies on visual
inspection of the deposit to determine whether the appearance of
the latter is satisfactory, it is difficult to clearly
differentiate the acceptable range.
[0018] Another device that is occasionally used to determine the
properties of the plating electrolyte is the Haring-Blum cell.
Here, two parallel cathodes are positioned at two different
distances, on both sides of a common anode. The ratio of the
deposit weights on the cathodes characterizes the throwing power of
the electrolyte, which is proportional to the ratio between the
deposition reaction resistance and the electrolyte resistance.
While the Haring Blum cell provides the throwing power (or the
resistance ratio) at only one current density in each experiment,
there is a need to provide this ratio across a broad range of
current density in a single experiment.
[0019] Two variations on the Hull cell have been subsequently
suggested. One is the Casey-Asher cell which has an elongated
rectangular cross-section, where the non-uniform deposition takes
place along one of the elongated electrodes. The second is the
pie-shaped Tena cell, consisting of two concentric cylindrical
insulating walls bound by two radially positioned planar
electrodes. Both of the variations on the Hull cells, while not
widely used, suffer from the same deficiencies as the Hull
cell.
[0020] More recently, Abys et. al. introduced the `hydro
dynamically modulated Hull cell` [Ref. 2 and U.S. Pat. Nos.
5,228,976 and 5,413,692], which was designed to provide improved
and better quantified mass transport. The cell consists of a
cylindrical rotating cathode and an anode positioned to provide a
non-uniform current distribution. Specially positioned baffles help
adjust the current distribution. This cell suffers from the same
limitations that apply to the Hull cell, i.e., it provides a
distribution that depends on the electrolyte type and composition,
and not just on the geometry. Furthermore, since only the total
current is measurable, the deposit at any given location along the
cathode cannot be precisely associated with a specific current
density. Another very similar cell that has recently been
introduced by Landolt and Madore [Ref. 3], has identical features
to Abys' et. al. cell and suffers from the same shortfalls.
[0021] None of the cells described above provides any quantitative
information concerning the physical and/or chemical parameters of
the process.
[0022] B. Difficulty in Obtaining Electrochemical Process
Parameters
[0023] A major impediment to applying quantitative modeling (both
analytical and computer-aided design) to electrochemical systems is
the paucity of available property data that such modeling requires.
Typically, thermodynamic, kinetics, and transport properties are
needed in order to characterize the processes that take place in
electrochemical cells. These processes can be generally divided
into two major categories: (a) processes associated with the
electrode reactions and (b) ionic transport in the electrolyte.
[0024] The electrode processes are quite complex and typically
involve numerous steps that are difficult to unravel. Their
characterization can, however, be accomplished without detailed
mechanistic knowledge by specifying the global thermodynamics and
kinetics parameters. However, obtaining this data is typically
quite difficult. The thermodynamics properties include the standard
reaction potential (E.sup.0) whose value can be found in standard
thermodynamic tables. However, the actual equilibrium potential (E)
depends also on the temperature, the electrolyte concentration
(ionic activities) and particularly on the composition, including
species that complex the reacting ion and that modify the
adsorption properties on the electrode. Determination of the
effects of all these parameters is quite difficult and requires at
the bare minimum the use of a special, well characterized,
reference electrode [Refs. 4, 5]. Specification of the electrode
kinetics requires a polarization curve that describes the
dependence of the electrode overpotential (=potential exceeding the
equilibrium potential due to irreversible dissipative processes,
e.g., kinetics resistance) as a function of the current density.
Commonly, the polarization curve is represented in terms of the
Butler-Volmer equation, which has some fundamental justification,
but in practice serves mostly as a correlation, i.e., the
parameters are determined empirically through polarization
experiments. Although the physical significance of the parameters
in this equation can be attributed only in very few simple
processes, the general form of this equation and its three
adjustable parameters (exchange current density [i.sub.0], anodic
[.alpha.] and cathodic [.beta.] transfer coefficients) that are
measured empirically, have enabled to model numerous
electrochemical processes. The general application of the
Butler-Volmer equation, or other polynomial correlations that have
been suggested, from data in the literature is, however, limited
because of the interdependence of the electrode kinetics on the
transport, and particularly on the reactant (and additives)
concentration at the surface. These in turn, depend not only on the
convective and diffusive transport but also on the current density,
both of which typically vary along electrodes and with operating
conditions.
[0025] Ionic transport in the electrolyte involves diffusion,
migration and convection. Its simulation requires knowing the
`integral` diffusion coefficient of the reacting species. The
latter can be measured on a rotating disk electrode assembly as
introduced by Venjamin Levich in his book "Physicochemical
Hydrodynamics" published by Prentice-Hall, Englewood Cliffs, N.J.,
1962, which is incorporated herein by reference [6]. The
experimental set-up is, however, costly. It requires a rotating
disk electrode assembly, a power supply with current/voltage ramp
capability and data recording capability. The process of generating
the data is time consuming, and requires expertise as described,
e.g., in a paper by Uziel Landau, "Determination of Laminar and
Turbulent Mass Transport Rates in Flow Cells by the Limiting
Current Technique", AICHE Symposium Series 204, Vol. 77, pp. 75-87,
1981, which is incorporated herein by reference [7]. In addition,
one needs to characterize the mass transport process in the cell.
This typically amounts to specifying the mass transport boundary
layer thickness, and its distribution in the cell, or equivalently,
the limiting diffusion current. These are quite difficult to
determine since they depend on detailed characterization of the
flow in the cell and on the cell configuration, typically requiring
computational fluid dynamics modeling. Even where forced convection
is not present or is not dominant, determining the characteristics
of the diffusion flux in complex geometries is difficult.
[0026] Ionic transport also proceeds via electric migration that is
characterized by the conductivity. The latter varies with the
electrolyte composition, concentration (i.e. it is affected by the
local current density or concentration gradients), and
temperature.
[0027] In addition to the difficulty in characterizing the details
of the electrochemical process so that proper parameters can be
assigned, there is a difficulty in obtaining the data and in
particular, the kinetics parameters (e.g., i.sub.0, .alpha. and
.beta., as described above). The literature typically offers only
rate constants for pure elements (and even those are given for only
one standard concentration or activity). Practical processes, and
in particular plating systems, employ complex chemistries,
incorporating additives and complexing agents that strongly affect
the deposition kinetics, as described e.g. by U. Landau et. al., in
U.S. Pat. No. 6,113,771. It is therefore required in almost all
practical situations to experimentally measure the parameters for
the given system. Such measurements require, however, special cells
that are specifically designed for the type of measurement.
Examples include conductivity cells coupled with high frequency
analyzer for conductivity measurement, and rotating disk electrode
for measurements of diffusivity. The rate constants, i.sub.0,
.alpha. and .beta., must be typically obtained by conducting a
sweep of a current-potential scan in cells that are difficult to
design because of the requirement for (a) a uniform current density
on the tested electrode (otherwise a meaningless average is
detected), (b) uniform and tractable transport rates to the
electrode, (c) means of detecting and subtracting the ohmic and
concentration overpotentials, and (d) a three electrode system
incorporating a reference electrode so that the potential of the
test electrode can be elucidated. Special and costly power supplies
(`potentiostats`) that are capable of three-electrode voltage
control versus a reference electrode are also required. The
kinetics constants are typically extracted from polarization
curves, hence a dynamic measurement in which the cell voltage or
current are ramped by the power supply over sufficiently wide range
must be implemented. These experimental procedures are described in
the literature, e.g., in a book by Allen Bard and Larry Faulkner,
"Electrochemical Methods" published by John Wiley & Sons, NY,
1980, which is incorporated herein by reference [5]. The special
experimental techniques require procedures that many practical
engineers are not proficient in, nor have the time to learn and
carry out.
SUMMARY OF THE INVENTION
[0028] The present invention relates specifically to testing,
characterization, and obtaining quantitative data for processes
taking place in electrochemical cells. It provides innovation in
two major aspects: (1) describing a device with multiple discrete
electrode sites at which electrochemical reactions proceed
simultaneously at different and precisely measured rates (=current
densities). In a preferred embodiment, the reaction produces under
precisely measured different current densities, multiple discrete
deposit patches, which can then be studied visually and
analytically (using analytical instrumentation, e.g., x-ray or
electron microscopy), and thus provide a correlation between the
appearance of the deposit and the current density at which it was
produced. By comparing the measured deposit thickness on the
different segments to their local current density, a measure of the
current efficiency as function of the current density is obtained.
When an alloy is deposited, measuring the segmental composition
will yield the partial current densities for each component. (2) A
method for extracting essentially the entire quantitative data
needed to model the electrochemical system from a single deposition
experiment carried in a device that provides simultaneously
different current densities on separate electrodes or electrode
segments, such as the device disclosed above. The data derived
includes the equilibrium potential, the polarization curve and the
associated kinetics constants (i.sub.0, .alpha., .beta.), and the
electrolyte conductivity. In alloy deposition, when the segmental
compositions are measured, the kinetics for the entire alloy system
can be obtained from this single experiment. Such alloy data cannot
be generated by the corresponding current/potential scanning
experiment.
[0029] The key to the invention is the provision of numerous
discrete regions on the same substrate, each carrying a different,
measurable current density. This provides precise deposit patches,
each corresponding to a different and precisely known current
density. Furthermore, since both the (different) current densities
and the voltages across each of those regions are measured, the
data generated in a single experiment provides a multi-point
correlation between the current density and the potential, i.e.,
this single steady-state experiment is the equivalent of an entire
conventional current-voltage scan. The data collected in this
single experiment can also yield the conductivity and the
equilibrium potential. Among the advantages of the invention is
that the extensive data can be generated in a single, simple,
steady-state experiment. It does not require expensive
instrumentation or electrochemical expertise, and the need for a
time-dependent current/voltage scan and its associated
complications, is eliminated. Transforming the experiment from a
time domain of sweeping the current into the spatial domain of
measuring a steady-state distributed reaction rates, offers
numerous advantages. First, issues of unsteady-state and transients
in the measurements are eliminated. When the current/voltage is
scanned in a conventional experiment, the scan rate should not be
too slow, in order to avoid deposit build-up which, particularly
when rough, may alter the electrode morphology and area; nor should
the scan be too fast, in order to avoid unsteady-state and
transient effects. Also, unlike in the device disclosed herein,
conventional scanning of the current (or voltage) produces a
deposit that had been accumulated over a range of current
densities; hence it is no longer useful for inspection.
[0030] Some aspects of the invention are also useful for
characterization of electro-dissolution, electropolishing, and
corrosion processes. For clarity, the discussion henceforth focuses
on electroplating. Primarily, the invention addresses the
difficulty in determining the properties of electrolyte solutions
and on predicting the effects of the process conditions on the
product, i.e., on the deposit. Although the main application of the
invention is for electrodeposition systems in which a deposit
builds up on the substrate, the device and method claimed herein
are also useful for analyzing electrochemical processes in which no
solid deposit forms. Electrochemical reactions that fall under this
category include electrolytic manufacture of gaseous and liquid
chemicals, redox reactions, electrolytic gas evolution, various
electrodissolution processes and corrosion. In the absence of a
deposit, the claimed device and method will still yield for those
processes the electrochemical process parameters, i.e., the
thermodynamic, kinetics and transport data that are required for
modeling these processes.
[0031] According to the present invention, there is disclosed an
electrochemical device, comprising a cell with a plurality of
discrete cathodic or anodic regions at which one or more
electrochemical reactions occurs; and means for causing the one or
more electrochemical reactions at each of the plurality of discrete
regions whereby each of the one or more electrochemical reactions
is measurable and quantifiable.
[0032] Further, according to the present invention, an
electrochemical device for simultaneously forming a plurality of
electroplated deposits at a plurality of discrete cathodic or
anodic regions at which one or more electrochemical reactions
occurs comprises a cell with base, an enclosure such as a cover or
a mask, and a plated, segmented substrate the substrate having a
plurality of discrete cathodic or anodic regions at which one or
more electrochemical reactions occurs clamped therebetween.
[0033] Still further, according to the present invention, process
for determining the quality of electroplated deposits comprises
simultaneously depositing a plurality of discrete deposits, each at
one of a plurality of discrete cathodic or anodic regions at which
one or more electrochemical reactions occurs; and causing the one
or more electrochemical reactions at each of the plurality of
discrete regions whereby each of the one or more electrochemical
reactions is measurable and quantifiable.
[0034] Further yet, according to the present invention, a method is
disclosed for determining electrochemical process parameters from
currents or voltages measured while at least one electrochemical
reaction takes place at different measurable rates on a plurality
of distinctly different cathodic or anodic regions in an
electrochemical device.
BRIEF SUMMARY OF THE FIGURES
[0035] Reference will be made in detail to preferred embodiments of
the invention, examples of which are illustrated in the
accompanying drawing figures. The figures are intended to be
illustrative, not limiting. Although the invention is generally
described in the context of these preferred embodiments, it should
be understood that it is not intended to limit the spirit and scope
of the invention to these particular embodiments.
[0036] Certain elements in selected ones of the drawings may be
illustrated not-to-scale, for illustrative clarity. The
cross-sectional views, if any, presented herein may be in the form
of "slices", or "near-sighted" cross-sectional views, omitting
certain background lines which would otherwise be visible in a true
cross-sectional view, for illustrative clarity.
[0037] The structure, operation, and advantages of the present
preferred embodiment of the invention will become further apparent
upon consideration of the following description taken in
conjunction with the accompanying drawings, wherein:
[0038] FIG. 1A is a prior art prismatic Hull-cell;
[0039] FIG. 1B is a card on which the expected current density is
indicated as a function of position for a prior art Hull cell;
[0040] FIG. 2 is a graph showing the curves of the computed current
density distributions in typical electrolytes;
[0041] FIG. 3A is an orthogonal view of an embodiment of a cell
device consisting of an electrode substrate with multiple electrode
segments, according to the present invention;
[0042] FIG. 3B is a partially transparent view of the device
showing some internal features of the cell device according to the
present invention;
[0043] FIG. 3C is an orthogonal view of a cover of the cell device
of FIG. 3A according to the present invention;
[0044] FIG. 3D is an orthogonal view of the base the cell device of
FIG. 3A according to the present invention;
[0045] FIG. 3E is a front view of the plated substrate shown in
FIG. 3D;
[0046] FIG. 3F is a cross sectional view through line A-A of FIG.
3E showing the plated substrate;
[0047] FIG. 3G is a top view of the cell device of FIG. 3A, showing
the projections of the key cell components;
[0048] FIG. 3H is a cross sectional view through line B-B of FIG.
3G;
[0049] FIG. 4 is a schematic view of the cell device of FIG. 3A
immersed in a beaker according to the present invention;
[0050] FIG. 5A is an orthogonal schematic view of a segmented
rotating disk electrode according to another embodiment of the
invention;
[0051] FIG. 5B is an orthogonal schematic view of a rotating
segmented disk electrode surrounded by a ring electrode according
to another embodiment of the invention;
[0052] FIG. 6A is an orthogonal view of the cell device configured
as a cylinder according to another embodiment of the invention;
[0053] FIG. 6B is an orthogonal view of the cell device configured
as a cylinder according to another embodiment of the invention;
[0054] FIG. 7 is a side view of a cell device configured as part of
a flow channel, according to another embodiment of the
invention;
[0055] FIG. 8 is an orthogonal view of a cell device without an
anode according to another embodiment of the invention;
[0056] FIG. 9A is a diagonal view, showing a cross-section with
some key internal features of a cell device designed to function as
a tabletop instrument according to another embodiment of the
invention;
[0057] FIG. 9B is a partially transparent side view showing some
key components of the tabletop cell device of FIG. 9A;
[0058] FIG. 9C is a cross sectional top view through line A-A of
FIG. 9B showing some of the components;
[0059] FIG. 9D is a cross sectional front view through line B-B of
FIG. 9B showing some of the components;
[0060] FIG. 9E is a front view of the plating mask shown in FIG.
9A;
[0061] FIG. 9F a front view of the plated test panel shown in FIG.
9A;
DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT
[0062] The present invention generally relates to a device
consisting of an electrode substrate with multiple electrode
segments. The device is immersed in an electrolyte and the current
turned on for a period that can range from, typically, a few
seconds to many minutes. The different currents to each of the
electrodes or electrode segments are measured, and provide, after
computations, the process parameters detailed above. The invention
also teaches a simple method for setting the different controlled
segmental currents, although other methods may be used as well, for
obtaining similar current ranges. To increase the range of
measurements, different voltages or currents can be sequentially
applied. The invention further discloses a method that enables the
utilization of said currents to yield quantitative data
characterizing the electrochemical process. In a preferred
embodiment, the invention comprises a special fixture that holds a
segmented electrode substrate (here, the cathode), exposing to the
electrolyte well-defined regions on said electrode. The device
further incorporates multiple terminal contacts, typically, one to
each segment, that are adjusted to deliver and measure a different
current density to each segment. The invention also discloses a
special computational approach to determine from said measured
segmental currents, critical electrochemical process parameters
including the polarization curve and its associated kinetics
constants, the electrolyte conductivity and the equilibrium
potential.
[0063] Typically, the device is designed, by selecting the
configuration and dimensions of the cavities through which the
electrode segments are exposed to the electrolyte, such that the
current density and therefore also the deposit properties within
each of the distinct regions is relatively uniform. Although this
uniformity is not a requirement for the disclosed device (and in
certain applications a non-uniform distribution may be
advantageous), typically this design for uniformity is an
advantage. One means of achieving uniformity is by having
relatively high-aspect ratio holes, e.g. ratio of depth to diameter
of the order of 1 or more.
[0064] An important parameter for electrochemical process analysis,
and particularly for plating, is the current efficiency, i.e. the
fraction of the passed current that contributes to the actual
deposit. This current efficiency typically varies with the
prevailing current density. The determination of the current
efficiency can be made by comparing the precisely measured
segmental currents to measurements of the corresponding deposit
thickness or weight on the different plated `patches`.
[0065] Further understanding of the present invention will be had
with reference to the following examples, which are set forth
herein for purposes of illustration but not limitation.
EXAMPLE 1
[0066] FIG. 3A is a schematic drawing of a device that incorporates
facets of the invention disclosed herein. FIG. 3A shows an overall
view, FIG. 3B is a partially transparent view of the device showing
some internal features of the cell. FIG. 3C shows the cover of the
cell in an upside-down view, revealing the separate contacts and
the cavities. FIG. 3D is a view of the bottom part of the cell with
the top removed, showing the plated segmented substrate. FIG. 3E
shows a schematic top view of the plated segmented cathode, and
FIG. 3F is a cross-section (not to scale) of same substrate. FIGS.
3G and 3H are cross-sections of the device. The specific device
described herein is about 2 inches wide, 5 inches long and about
1.5 inches high. It is understood that different sizes may be
applied. Following is a detailed description of the device.
[0067] The device consists of two major parts as shown in detail in
FIGS. 3C and 3D: a base (8) shown in detail in FIG. 3D, and a cover
(9), shown in detail in FIG. 3C. The base and cover are both made
of a rigid insulating material, e.g., a ceramic or a plastic, and
in this particular embodiment, polyvinyl chloride (PVC). Other
materials that can be used include, among others, Plexiglas, epoxy,
and Teflon. A conducting material can also be used, however, in
this case it must be coated with an insulating film. The base
incorporates a slot (25) that helps position the plated segmented
substrate (7), as shown in FIG. 3D. This slot is not an essential
part of the example and is provided for convenience in positioning
the plated substrate. Other guides, made e.g., of an elastomeric or
a rigid plastic frame can replace it. As shown in FIG. 3D, the base
also incorporates threaded posts (27) that provide positioning and
tightening of the cover, (9), using the knurled nuts (13) that are
shown in FIG. 3A. The base also incorporates, optionally, bumpers
(29) at its front to protect the protruding portion of the plated
substrate.
[0068] An insulated substrate (7) coated with a thin and segmented
conductive seed layer has is clamped between the base (8) and the
cover (9), as shown in FIGS. 3A, 3B and 3D. The plated substrate is
shown schematically in FIG. 3E (top view) and 3F (cross section).
In order to illustrate details, these drawings are not to scale. A
typical size of the substrate is about 1.5" wide and about 3.5"
long, although other sizes may be used. The substrate thickness is
not very important and may vary, however {fraction (1/16)}" may
provide a typical value. The substrate bulk (31) in FIG. 3F, may be
made of any of a variety of electrically insulating (dielectric)
materials. An example is silicon, glass or a plastic material such
as used in printed circuit boards, e.g., polyimide. The conductive
seed layer on top of the insulating substrate (35) may consist of
e.g., copper, nickel, brass, gold, or any other conductive layer
that is compatible with the electrochemical process to be tested.
The thickness of the said layer range from very thin e.g., 500
Angstrom to a mm or more. However, the minimal thickness must be
such that it provides a continuous conductive layer. Metallic
layers below about 100 Angstroms are known to agglomerate, which is
not desirable. The conductive seed may be deposited on the
substrate using, most commonly, a vapor phase process (e.g.,
evaporation, physical vapor deposition, chemical vapor deposition),
an electroless process, or by lamination or gluing of a conductive
film onto the dielectric substrate. Said seed layer in the present
example is segmented, i.e., consists of electrically isolated
sections (35). Separating grooves to isolate the segments are
indicated by (18) and shown in FIGS. 3B, 3E and 3F. It should be
noted that instead of the insulating substrate coated with isolated
electrode segments, completely separate electrode sections may be
used. Such separated electrodes may either consist of seed covered
insulating substrate or be made entirely out of conductive
material, such as copper, brass, or zinc. However, such separate
electrodes may not be as easy to handle and position as the one
piece segmented substrate, and therefore are less desirable.
Cavities within the cover (9) define the plated regions, typically
circles (20) shown in FIGS. 3D, 3E and in the cross-section 3F.
Also indicated faintly in FIGS. 3D and 3E are the points of
electrical contacts with each segment (21). As shown in FIGS. 3B,
3D, 3E and 3F, the front edge of the cathode consists of an
un-plated but electrically contacted segment (19) that serves as a
reference electrode. Its role is discussed further below.
[0069] The device cover (9), which can be made of the same or
different material as the base plate (8), incorporates cavities
(10) that define the areas through which the cathode segments are
exposed to the electrolyte and to the ionic current. An elastomeric
(e.g., rubber) gasket (11) between the base and the cover may be
beneficial in providing a good seal around the cavities and
accurately define the circumference of the plated `patches` on the
seeded substrate. The cavities shown here are of a round
cross-section, however, other configurations, including squares and
rectangles can be contemplated. The size of the plated `patches` is
not critical, however, some minimal size of e.g., a few mm in
diameter or length, is beneficial in order to facilitate visual
inspection, if so desired. In the specific example discussed here,
holes with a diameter of about 3/8" and a depth of about {fraction
(7/16)}" were selected. The depth of the cavities ensures a uniform
current density across the exposed regions on each of the segments.
Furthermore, the depth of the cavity also controls the
mass-transport. For short deposition experiments, e.g., a few
minutes, where depletion of the electrolyte within the cavity is
not significant, the depth of the cavity beyond some minimal value,
equivalent e.g., to the diameter of the hole, to assure uniform
current distribution and provide a sufficient electrolyte
reservoir, is not critical. However, for longer deposition
experiments, or for experiments where mass-transport effects are
studied, the depth of the cavity must be properly designed and
accounted for in the model. An array of thin rods, (15), placed
inside an insulating compartment (16) that is attached to the top
of the cover (9), penetrate through the bottom of the cover as
shown in FIG. 3C and make contact with the metallic seed layer to
be plated. These rod contacts provide a separate current feed to
each of the segments. Their point of contact with the plated
substrate is indicated by the faint circles (21). The contacts can
be made from a variety of metals or alloys. Examples include,
copper, stainless steel, titanium or their alloys. To ensure a low
contact resistance, the contact points may be optionally coated
with platinum or gold. The contacts may be pressed against the
cathode using a spring or a compressible pad made of e.g.,
elastomer, indicated by (17) in FIGS. 3A and 3B. The role of the
sealed compartment (17) is to support the contact rods and provide
of a region that is not exposed to the electrolyte. Within that
region, the electrical feed wires, (21), shown in FIG. 3G, are
connected to the top portion of the rod contacts. The electrical
wire bundle (37) is fed through a sealed wire feed (39) into the
compartment. The compartment (16) also supports the back portion of
the anode (12) that is attached to it by small screws (41) as shown
in FIGS. 3A, 3B, and in the cross-section 3H.
[0070] The counter electrode, which is not segmented, is in this
example the anode (12). It may be a plate, perforated plate, or an
expanded mesh, fixed at some distance away from the cathode. The
anode can be made of a number of conductors on which oxygen can
evolve including: platinum, gold, titanium, titanium coated with
iridium oxide or ruthenium oxide or platinum, lead, or silver-lead
alloy. Alternatively, soluble anodes made of e.g., copper or
nickel, as appropriate for the tested electrolyte, may be used. A
wire (42) in FIG. 3A provides the current to the anode. The anode
is supported in the configuration of this example in its front end
by stand-off insulating rods (14), to which the anode is fastened
by means of a small screw (43). As discussed below, a variant of
the present example, where an anode is not incorporated in the
device can be equivalently contemplated. In the case, externally
provided anodes may be used. Typically, in this latter situation,
deeper, narrower cavities may be desirable, to minimize the
variability in the electrolyte resistance associated with different
distances between the cathode and the external anode that can be
exercised in different experiments.
[0071] The different current through each contact (and cathode
segment) is set using special electronics circuit. The latter may
consist of a number of separate potentiostats or current limited
power supplies. A likely preferred embodiment is using a single
power supply, but incorporating an array of operational amplifiers,
voltage followers, or as incorporated in the present example, a
number of current controlling resistors. If these external
resistors are much larger than any other resistance in the current
path, i.e. much larger than the electrolyte resistance, the
resistance attributed to the electrode reactions (on both the anode
and the cathode), and any mass transport resistance, then the
current within any cathode segment will be controlled by this
external resistor. Furthermore, measuring the voltage drop across
this resistor provides a measure of the current in the given
branch. In some applications, it may be desirable to replace this
one controlling resistor, by two resistors, where one may be a
relatively small shunt, across which the segmental current can be
determined by measuring the voltage drop.
[0072] As noted in FIGS. 3A, 3B, 3D, 3E, and 3F, a section of the
substrate (19), covered by an electrically isolated seed layer
extends beyond the substrate holder. This extension serves the dual
purpose of aiding in inserting and removing the cathode, and also
serves as a reference electrode. Accordingly, this extension is
connected to the voltage-sensing device through a high impedance
resistance so that no appreciable current flows through this
segment and thus it is not plated. Obviously, other configurations
of the reference electrode are possible. Lastly, bolts (27), or
other clamping hardware is used to tightly clamp the cathode
between the fixture bottom plate and cover. Holes in the cover,
(47), provide clearance for the bolts. Knurled nuts (13) are used
to tighten the fixture together.
[0073] FIG. 3G provides a top view of a cross-section through the
device. The electrical connections (21) to the separate contacts
(15), are shown. Also shown are optional pegs (29) to protect the
protruding edge of the substrate that can serve as a reference
electrode, and a handle (23). The cross-sectional side-view in FIG.
3E shows details of the clamping bolts (27), the anode (12), the
plated cavity (10), and the contact (15), pressed by the elastomer
(17) against the cathode (7). Lastly, sink nuts (28), at the bottom
of the base provide support to the threaded rods (27).
[0074] The device as shown schematically (not to scale) in FIG. 4
is immersed in a beaker (50) containing a sample of the electrolyte
to be tested, or immersed in an industrial scale plating cell. The
volume of the electrolyte to be tested is not critical; however,
the electrolyte level (52) must be sufficiently high to cover all
the cavities through which plating is to be done. A 200 ml beaker
is typically adequate. The power supply (54) is turned on [by
pressing switch (55)] for a few seconds or minutes during which
electrochemical reaction takes place, the deposit builds-up (at
different rates) on the exposed areas of the cathode, and the data
acquisition records the segmental currents and voltages. The data
acquisition can be computer-based, as shown (56) in FIG. 4. From
the recorded data, the polarization curve (i.e., a plot of
segmental current densities vs. the overpotential) is constructed.
In addition, the electrolyte conductivity is determined, and the
equilibrium potential established. The data is stored in the
computer and can be displayed on the computer screen (57). The
computations are based on conducting voltage balances between each
of the different cathodic segments, the reference electrode, and
the anode. The segmental voltage balance equations equate the
voltage drop across the controlling resistances, when present, the
cathodic standard potential, the activation resistance associated
with the cathodic electrochemical reaction, the ohmic resistance in
the electrolyte, the standard potential at the anode and the
overpotentials at the anode to the externally applied voltage by
the power supply. All those parameters, with the exception of the
standard potentials, depend either linearly or non-linearly on the
current density, which is controlled and measured independently in
each of the segments. The set of voltage balance equations can be
solved simultaneously to yield the electrochemical process
parameters listed above. The computations hinge on Cell-Design's
computer implemented modeling of the cell, to provide the
appropriate electrolyte resistances that are used in the
computation. However, the invention herein can also work remotely
of Cell-Design software, where said constants are separately
evaluated. Alternatively, empirical calibration of the cell herein,
using well-characterized electrolyte, for which all the parameters
are known, is possible. In this case, the computer-based model is
no longer required.
[0075] A computer program computes the needed parameters (i.sub.0,
.alpha..sub.A, .alpha..sub.C, .kappa., E.sup.0) from the recorded
data. The computed parameters and the polarization curve are stored
in a computer and can be displayed graphically and numerically.
They can also be incorporated in a database linked to
electrochemical computer-aided-design software used for modeling
electrochemical systems with the same electrolyte but a different
configuration.
[0076] The beaker (50) into which the test fixture is immersed may
be optionally equipped with an immersion heater (not shown), or
placed on a hot plate (not shown) to control its temperature.
Agitation through a magnetic stirrer, bubble induced agitation
using inert gas, or air sparged from e.g., a fritted glass, or
convective flow using a pump may also be applied.
EXAMPLE 2
[0077] Another cell and electrode configuration that can be used
advantageously when incorporating elements of the invention
disclosed herein, is a segmented rotating disk electrode (RDE), as
shown schematically (60) in FIG. 5A, or a rotating segmented disk
electrode surrounded by a ring electrode (62), as shown
schematically in FIG. 5B. An insulating ring (64) separates the
two. The ring electrode may serve as the reference electrode, a
co-planar anode, or another auxiliary electrode whose potential is
scanned and is used for analyzing products or reactants of the
electrochemical reaction [Ref. 5]. The segments can be pie-shaped
at the bottom of the rotating shaft (60), as shown in FIG. 5A. This
configuration works similarly to that discussed in example 1,
however, it can provide also additional transport data. As shown by
Levich [Ref. 6], the rotating disk provides a uniform and easily
calculable boundary layer thickness (or mass transport coefficient)
that depends on the inverse square root of the rotational speed. By
measuring the parameters listed above (e.g., the kinetics
parameters, at different rotation speeds, the effect of transport
on the kinetics parameters can be determined, and the diffusivity
can be evaluated.
EXAMPLE 3
[0078] The device disclosed herein can also be configured as a
cylinder, as shown schematically in FIG. 6A and FIG. 6B. This
configuration can be used similarly to the ones discussed above
e.g., Example 1. It has, however, a number of advantages: it can be
rotated to incorporate the effects of transport, as in example 2,
it can be designed in a compact form, to be used with small
volumes, and furthermore, if configured as a very small diameter,
it can present low transport resistance, since the radial diffusion
flux is inversely proportional to the radius. Because of the
electrode curvature, it can account for and simulate the effect of
curvature on the deposit, e.g., incorporate effects of curvature on
stress, and adhesion. The latter may be particularly important,
because often deposits that show marginal adhesion to a flat
substrate may adhere satisfactorily to a curved one. The segmental
electrodes (66) can be stacked one on top of the other as shown in
FIG. 6A or the cylinder can be segmented radially (68), as shown in
FIG. 6B. Other configurations that involve bodies of revolution,
e.g., cones, spheres, etc, can also be contemplated.
EXAMPLE 4
[0079] A variant of the fixtures described as examples 2 and 3 is a
configuration whereby the central circular electrode, which can be
either a disk or a cylinder, is not segmented, however, the
surrounding electrode, which may be either the anode or the
cathode, is segmented, and provides the multiplicity of electrodes
claimed herein, that are discussed in detail in example 1. By
controlling the current density on the different surrounding
segments similar results to those described in detail in example 1
can be obtained for the surrounding segmented electrodes.
EXAMPLE 5
[0080] The device disclosed herein, can also be configured as part
of a flow channel, as shown schematically in FIG. 7. Here, a cell
with the segmented electrode (7) is incorporated with, or inserted
into a flow channel through which the electrolyte is circulated.
The measurements can then be made at one or more flow rates. The
advantage of this configuration is that convective electrolyte flow
can be adjusted to simulate conditions in the actual processing
cell, and also, the data can be evaluated at different flow rates
so that the effect of flow on the other process parameters can be
quantified. Additionally, the diffusion coefficient of the reacting
species can be evaluated. In one embodiment, the fixture described
in example 1 is inserted into a `manifold` (80) that is
incorporated within a flow loop, consisting of a circulation pump,
an electrolyte holding vessel, a flow-meter and a valve for
adjusting the flow (not shown). In the flow channel configuration
the anode (12) can be part of the measurement cell fixture, as in
example 1, or it can be part of the flow channel, embedded in its
wall. A similar flow circuit can be incorporated in other device
configurations, e.g., the base and mask of example 11 (FIG. 9) can
be similarly modified to incorporate flow.
EXAMPLE 6
[0081] A variation of the cell described in example 1 can be
contemplated, where the anode, [(12) in FIG. 3], is not
incorporated in the fixture. Instead, the fixture (without the
anode), schematically shown in FIG. 8, can be immersed in a
production-type cell, or in a test cell, that incorporate their own
anodes. In this case, the test fixture can be connected to the
existing anode through its own power supply, or use an existing
power supply that may already be connected to an existing anode.
The advantage of this embodiment of the invention is that the
testing and analysis can take place in the actual production
environment, under actual process conditions, eliminating the need
to transfer electrolyte sample to a test beaker. The electrolyte
characterized this way resembles more closely the actual process
conditions.
EXAMPLE 7
[0082] This example describes a configuration where the
multiplicity of electrode segments are not necessarily located on a
specific geometric configuration such as a plane substrate (example
1) a disk (example 2) or a cylinder (example 3). Here we bring
forth the general notion that each of the multiplicity of the
controlled electrode segments can be separately placed in any
arbitrary location within a test fixture, a test cell or even a
production cell. As long as the location of the electrode is
specified and it does not vary in an uncontrolled manner during the
experiment, its current is well controlled and measurable, and its
current density is different than that on a number of the other
electrodes, a voltage balance can be carried out for each
electrode. From this voltage balance, the polarization curve can be
constructed and the process parameters listed in the summary
section and example 1 above can be computed in the same manner as
described under example 1 above. Additionally, samples produced
under different and precisely determined current density can be
made available for visual inspection. The separate segments may
consist of differently configured separate electrodes. However, for
accuracy, it is important that each electrode be designed to
experience a relatively uniform current density over its area. This
can be achieved by e.g. embedding each electrode in an insulating
well, such as that used in the configuration discussed in example
1. Another possibility is to use electrode segments that provide
uniform current density. These may consist of spherical electrodes,
hemispherical electrodes, or cylindrical segments. In those
configurations, the counter electrode (e.g., the anode) must be
placed far away from the electrode segment on which the current
density is being measured. `Far away` here means about 3-5
diameters or more away from the measured electrode. Alternatively,
the counter electrode may be placed closer; however, it must then
be of the same geometrical configuration as the tested electrode.
This implies that when placed in close proximity, a cylindrical
counter electrode must surround a cylindrical controlled electrode,
and a spherical counter electrode must surround a spherical
controlled electrode.
EXAMPLE 8
[0083] Example 8 refers to situations where differently shaped or
sized electrodes may be applied advantageously. An example is the
situation where it is desired to apply the same overall current to
each electrode segment while it is needed for the invention
disclosed herein to have, different current densities on each
segment. Since the current density is determined by the ratio of
the total current to the electrode area, different current density
may be achieved by varying the electrode area while maintaining the
same total current. The rational for the desirability of feeding
each segment with the same total current is that it may be easier
to electrically to generate such a condition, and once such equal
total currents are maintained the segmental currents may not
require individual measurements, simplifying the data acquisition
task. In this application, segmental electrode areas are
sequentially increased to provide a decreasing sequence of current
densities. Care must be paid to assure current density uniformity
across the electrodes, requiring a deeper insulating cavity.
[0084] Another means of obtaining different and well-controlled
current density on different segment without controlling this
distribution by electrical means is through the design of a cell
that provides a non-uniform current distribution. Such design can
be based on a slanted or a curved anode, or an electrode that forms
different angles with the sidewalls, similar to the Hull cell.
However, here, unlike e.g., the Hull cell, we apply a segmented
electrode and measure precisely the current density on each
segment. This provides
EXAMPLE 9
[0085] This example discusses the application of the invention
disclosed herein to electrochemical processes involving multiple
simultaneous electrode reactions. One, particularly important
embodiment of this class of processes is that of alloy plating.
Here, multiple species, typically, but not always, metal ions, are
reacted simultaneously from a mixture in a common electrolyte to
provide a deposit that consists of multi-constituents that
typically form an alloy, a solid solution, or a solid mixture.
Specific examples of industrial interest include, but are not
limited to, brass (copper-zinc alloy), perm alloy and other
compositions of iron-nickel, tin-nickel, tin-palladium, tin-gold,
solder and other composition of tin-lead, nickel-zinc, among many
others. This example applies also to systems where one component
may be a minor constituent of the deposit, for example, when doping
compounds or trace elements are used to impart to the deposit
special properties. Examples include, gold-cobalt and gold-nickel.
Other examples of common multiple simultaneous electrode reactions
are manifested when plating additives are used to provide special
properties to the deposition process itself. Here often organic
compounds, but occasionally, inorganic or metallic trace compounds
are added to the electrolyte to affect the deposit color (e.g.,
nickel in gold, or chloride in copper), surface texture, (e.g.,
sulfur compounds (`additives`) in copper plating), or level the
deposit distribution (e.g., polyethylene glycol (`carrier`) in
copper plating or sodium lignin sulfonate in lead plating). In all
those cases, and in particular in the alloy plating applications,
it is very difficult to determine the kinetics parameters of the
different but simultaneous electrode reactions. The reason being,
that the co-deposition process incorporates interactions between
the different participating species, which no longer behave as if
they were undergoing the electrode reaction just by themselves.
These interactions are often quite significant, and in numerous
situations, modify completely the expected results. An example is
perm alloy (iron-nickel) plating, where the nickel plates much more
readily than the iron, however, based on the single metal
experiments, the iron should plate preferentially. Accordingly,
single species deposition experiments are useless in providing data
for the alloy deposition process. On the other hand, studying the
deposition rates of the components during co-deposition is
difficult, because only the total current can be measured, and the
latter is not species-specific. Hence, one needs in addition to
analyze the deposit composition and deduce from the latter, the
partial currents for the deposition of each component. By itself
this is not a very difficult procedure if the required analytical
instrumentation is available. However, since the partial currents
are needed as a function of the complete current or voltage range
which the process might experience, direct scanning is no longer an
option, and a series of separate deposition experiments is required
to produce samples that span the entire range of interest. The
invention disclosed herein, eliminates the need for a series of
experiments and provides, all at once, a number of samples
(corresponding to the different segmented controlled electrodes),
where each has been plated at a single different current density.
Once compositional analysis of the different patches is performed,
the partial kinetics parameters, evaluated under interactive
conditions, can be readily calculated, following the procedures
outlined in example 1 for a single electrode reaction.
EXAMPLE 10
[0086] In the foregoing examples, the different current densities
were generated by electrical means, i.e., electrical circuitry
controlled the current distribution. However, the cell
configuration is another means that can be used advantageously to
generate a varying current distribution. Unlike earlier
disclosures, by e.g., Hull [U.S. Pat. No. 2,149,344], we provide,
however, precise means, using the segmented electrode approach, to
measure the local current density, and use this to correlate both
the appearance of the deposit to the current distribution and to
quantitatively evaluate the process parameters. Methods that can be
used to generate a varying current density along a plurality of
isolated electrodes, which are contemplated in the present example,
include the use of a slanted or curved anode, a cell with varying
electrolyte gap, and resistive electrodes. The latter can be used
either as anodes or cathodes, to produce a non-uniform current
distribution.
EXAMPLE 11
[0087] Another manifestation of the invention, shown in a schematic
diagonal cross-sectional view in FIG. 9A, is a tabletop device. The
tabletop unit consists of four major parts: a container vessel
(90), a patterned shielding mask (94), a test panel (91), and the
electrical connector assembly (100). FIG. 9B shows a side view of
the device, with partially transparent walls to show some key
internal features. FIG. 9C is a top view of a cross-section through
the device as indicated by the dashed line A-A in FIG. 9B. FIG. 9D
is a frontal view of the device through the cross-section indicated
by the dashed line B-B in FIG. 9B. FIG. 9E is a side view of the
plating mask that is indicated by (94) in FIG. 9A. FIG. 9F is a
side view of the test panel that is indicated by (91) in FIG. 9A. A
more detailed description of the device follows.
[0088] The function of the container (90) is to provide space (110)
for containing the tested electrolyte and to hold the device
components in place. The container, which is made from an
electrically insulating rigid material, e.g. cross-linked polyvinyl
chloride (CPVC), consists of a base plate (111), and four vertical
side-walls (112) forming a rectangular box that measures in this
particular example about 1 inch in width (depth), 6 inches in
length and 3 inches in height. Typically, the container is larger
in length than the plated panel, thus providing a non-occupied
region (110) into which the tested electrolyte can be easily
poured. In this particular example, no cover is provided for the
container, although an optional cover may be incorporated as
described below.
[0089] The patterned mask (94 and FIG. 9E), consisting of an
insulating plate, in this example, 3/8" thick CPVC, with a slot
pattern (96) cut into it. The mask is placed inside the container
and is mounted against its back wall using bolts (113). The slots
expose predetermined regions of the metal pattern on the test panel
(91) to the electrolyte. The function of the mask is to restrict
the plating current to certain, precisely determined regions on the
test panel. Optional gaskets (97) can be used to separate the
compartments formed by the mask to minimize or eliminate current
leakage and `cross-talk` between the electrode segments. Modeling
and experiments indicate, however, that this `cross-talk` is
negligible, and the gaskets can be eliminated without loss of
noticeable accuracy.
[0090] An anode (99), which is a sheet metal, perforated metal, or
a metal grid or mesh, made of e.g., titanium, platinum, platinized
titanium, gold, ruthenium, or stainless steel, is facing the
exposed segments of the test panel. The anode is placed inside a
groove on the back side of the mask and clamped between the mask
and the sidewall. The anode is connected via a non-dissolving
conductor wire indicated as (121) in FIG. 9B, which is made of
e.g., platinum, titanium or tantalum, and connected to a terminal
(122) on the electrical connector (100).
[0091] The test panel (91, and FIG. 9F) is typically a customized
printed circuit board, consisting of an insulating substrate (92,
FIG. 9F) onto which a conductive metal stripe pattern (93, 96, in
FIG. 9F) is printed or etched. The lower, broader pads of the
pattern (93) get plated; the upper, narrower stripes (96) provide
means for feeding the current to the plated pads. Since the stripes
are narrow, any portion thereof that is not masked and gets plated
will not introduce a large error in terms of the measured current
and the computed current density (=current per plated area). One or
more pads, typically at the front end or the back end of the
electrode array, may not be plated and used instead for sensing
purposes, as a reference or sensing electrodes, providing a
measurement of the electrolyte conductivity and/or the standard
potential of the plated metal. In this particular example, one pad
out of seven, located at the front end of the pad assembly, is used
as a reference electrode. The metal pattern is typically made of
copper. For characterizing the plating of metals other than copper,
the copper pattern may be optionally pre-plated with other metals,
matching the type of plating solution to be tested. For example, in
testing of nickel plating solutions, a nickel coating may be
pre-applied onto the copper, or any other base metal, prior to
testing. This, however, is not essential, because the substrate
metal becomes coated with the plated metal during the test itself.
The pre-coated substrates may improve, however, the accuracy of the
test.
[0092] The test panel (91) is inserted prior to the test into the
container (90) and pressed against the insulating mask (94) by a
back-plate (95) made of a rigid insulating material, e.g., PVC,
which is pushed and held in place using a screw (120) or a toggle
clamp.
[0093] The electrical connector assembly (100) provides means for
feeding the plating current separately to each of the plated
segments, and the sensing voltage to the sensing or reference
electrodes, when used. The electrical connector assembly consists
of a multiplicity of metallic rod contacts (98) that are pressed
against the metal stripes on the test panel by means of springs
(130), such that a separate rod makes contact with each of the
metal stripes, feeding the current to the plated pads. Instead of
springs, an elastomer strip may be applied at the back of the rods
and provide the required contact force. The current from the anode
is also fed through the electrical connector assembly. In this
particular example, the anode current is fed through the mounting
bolt (140) of the connector assembly. This bolt screws into a nut
(122) in the container sidewall that is connected to the anode wire
(121). A multi-conductor cable (150) or ribbon feeds the currents
from the connector assembly through different magnitude resistors
to the power supply that is located within the main electrical box
(not shown). Once voltage is applied, a different magnitude current
is fed to each of the contacts, resulting in a different plating
rate on each of the plated electrode pads that are exposed to the
electrolyte through the mask. For easy insertion of the test panel
and for convenient handling of the container during electrolyte
filling, removal, or rinsing, the entire connector assembly can be
removed by un-tightening two bolts (one shown in FIG. 9A, indicated
as 140). To prevent upside-down re-assembly of the connector, which
will lead to improper connections, the holding bolts are designed
asymmetrically, thus enabling assembly only in the proper
position.
[0094] The electrical box can apply different currents and voltages
to the test panel, so that the current range matches the properties
of the tested properties. Also, optionally, sequentially stepping
or scanning the current and voltages can expand the range of the
measurements.
[0095] A typical test sequence consists of the following steps: (a)
filling the container vessel with about 40 cm.sup.3 of electrolyte;
(b) inserting a test panel; (c) tightening the clamping bolt thus
pressing (via the back-plate) the test panel against the mask; (d)
attaching the electrical connector assembly; (e) turning on the
power supply and the data acquisition system.
[0096] A main advantage of the tabletop device described herein is
that the electrical connections can be made above the electrolyte
level, thus keeping the electrical contacts free from corrosion and
contamination and eliminating the need for careful sealing.
Furthermore, it can be used for testing small samples of
electrolyte (less than 30 cm.sup.3) and can be easily assembled,
disassembled, and cleaned.
[0097] This configuration lends itself to conveniently enhancing
the convection by having gas (e.g., air) bubbled, or electrolyte
circulated through each of the segmental compartment, for testing
the effects of convective flow on the plating process. To provide
for the flow, narrow holes or slits can be drilled into the walls
or bottom of the segmental compartments formed by the mask. The
flow form the externally mounted pump can be entered at the bottom
plate of the container and then be split and directed into each of
the plating compartments by drilling small holes in the mask at the
bottom of each plating compartment. The holes can be identical in
size (for uniform flow rate) or of different diameter, to generate
different flows in each compartment. The flow will egress at the
top of the slots within the mask, will flow towards the back wall
through a groove provided fro this application and will collect at
the empty region of the container, from which it can be circulated
by the pump. Because of the small volume, small cross-sectional
areas, and small electrode areas, a small pump is sufficient.
[0098] Temperature control can be provided by an immersion heater,
and the electrolyte temperature monitored using a thermocouple, a
thermistor or a resistance thermometer (RTD). Also optionally, pH
monitoring, ion sensing electrodes and/or electrolyte conductivity
measurements can be carried out by inserting proper probe
electrodes that are commercially available or that can be custom
prepared, into the open region within the container where much of
the electrolyte is held. The electrical currents for operating the
heater, and the pump, and the signals from the sensors can be fed
through the electrical connector assembly and the same multi-wire
cable that carries the plating current.
[0099] The tabletop device can be provided with a cover that will
minimize electrolyte evaporation and splashing and also be helpful
in stabilizing the temperature. The cover which will fit over the
container will have an appropriate slot to accommodate the
insertion of the test panel.
[0100] While the invention has been specifically illustrated and
described, those skilled in the art will recognize that the
invention may be variously modified and practiced without departing
from the concepts of the invention.
* * * * *
References