Method for electroplating metal wire

Abstract

A method for electroplating low-resistance metal wire for resolving the problem to fabricate the metal wire on large-area substrate through the technology of photolithographing and etching in the prior art. Then the invention improves the RC-delay characteristic of circuit on large-area substrate and reduces the number of masks for processing of a structure of gate overlap lightly-doped drain (source) (GOLDD).

Description

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention generally relates to a method for electroplating metal wire, especially for electroplating low-resistance metal wire on large-area substrate.

[0003] 2. Description of the Prior Art

[0004] With the advance of processing technology, the large-area TFT (Thin Film Transistor) displays will be generalized. Then some problem are going to be revealed in producing, generally the wiring on substrate is getting complicate, then the RC-delay will impact the efficiency factors of device, like the cross talk and power consuming, especially the signal transmission speed. As the featuresize of semi-conducting technology becomes smaller, it is more difficult to prevent the RC-delay, which occurs as the width of wire and distance between wires are getting smaller, then there will increase the serial resistance and the capacitance among those connecting.

[0005] Copper (Cu) and silver (Ag) have the lowest resistance among metals, which provide the simplest and directly way to reduce the connecting resistance and capacitance, but they couldn't be fabricated on glass substrate through prior photolithographing and etching technology.

[0006] Further, for fabricating the copper wire on large-area substrate, the prior art method adopts a complicate and expensive chemical mechanical polishing/planarization (CMP) process, which is a planarization technology in semi-conducting processing. The planarization is used to planarize the roughness on doping layer of semiconductor device by the cooperation of chemical etching and mechanic polishing processes.

[0007] Therefore, there needs to provide a method for electroplating metal wire to improve the RC-delay characteristics among the wires on glass substrate and the method for electroplating low-resistance metal on it. The structure of gate overlap and lightly-doping drain (source) of present invention can reduce the number of processing masks.

SUMMARY OF THE INVENTION

[0008] It is a primary object of the present invention to provide a method for electroplating low-resistance metal wire for resolving the problem to fabricate the metal wire on large-area substrate through the technology of photolithographing and etching in the prior art. Then the invention improves the RC-delay of circuit on large-area substrate and reduces the number of masks on processing of the thin film transistor with structure of gate overlap and lightly-doping drain (source) (GOLDD).

[0009] Method for electroplating comprising steps of: depositing an isolated layer above said substrate; depositing a first metal seed. layer on said oxide layer; electroplating a first metal layer on said first metal seed layer, which has already been patterned; depositing an inter-layer; depositing a second metal seed layer; and electroplating a second metal layer on said second metal seed layer.

BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The objects, spirits and advantages of the preferred embodiments of the present invention will be readily understood by the accompanying drawings and detailed descriptions, wherein:

[0011] FIG. 1A is a schematic diagram showing wiring on TFT display in the current technology;

[0012] FIG. 1B is a portion detail schematic diagram according to FIG. 1A;

[0013] FIG. 1C is a schematic diagram showing wire-electroplating on TFT display in the current technology;

[0014] FIG. 2A to FIG. 2B are schematic diagrams showing the process for electroplating in accordance with one preferred embodiment of the present invention;

[0015] FIG. 3A to FIG. 3E are schematic diagrams showing the process for electroplating and the structure in accordance with one preferred embodiment of the present art;

[0016] FIG. 4 is a flow chart showing the steps of process of electroplating in accordance with one preferred embodiment of present invention.

DETAILED DESCRIPTION OF THE INVENTION

[0017] The present invention to provide a method for electroplating low-resistance metal wire for resolving the problem to fabricate the metal wire on large-area substrate, then the invention improves the RC-delay of circuit on that substrate and reduce the number of masks on processing by the structure of gate overlap and lightly-doping drain (source).

[0018] Please refer to FIG. 1A, which is a schematic diagram showing wiring on TFT (Thin Film Transistor) display in the current technology. FIG. 1B is a portion detail schematic diagram showing the TFT device 19 according to FIG. 1A. There is a panel 10 including a plurality of date lines 11 from source end, and a plurality of scan lines 13 from gate end of panel 10. As shown in a partially enlarged part of this diagram, the data lines 11 and scan lines 13 are vertical with each other, and the cross regions enclosed by the plurality of data lines 11 and scan lines 13 are the TFT devices 19 (shown in FIG. 1B) and pixel electrodes on the panel 10. These data lines 11 and scan lines 13 are comprised by metal material In the present invention, those lines are formed by electroplating in an electroplating solution involving the ions of that metal. The invention is used to improve the effect of RC-delay of circuit through the method for electroplating the low-resistance metal on substrate.

[0019] In FIG. 1C, which is a schematic diagram showing wire-electroplating on TFT display in the current technology. A first electrode plate 15 is used to short-circuit the plurality of data lines 11, that means the first electrode plate 15 which is a conductor, connected with the ends of these data lines 11. The first electrode plate 15 and the data lines 11 are immersed into an electroplating solution for electroplating. The electroplating solution includes the ions of low-resistance metal which is electroplated on those data lines 11. A second electrode plate 17 is used to short-circuit the plurality of scan lines 13 and immersed into the electroplating solution including the ions of low-resistance metal. Then, the scan lines 13 are electroplated by conducting the second electrode plate 17.

[0020] The FIG. 2A and FIG. 2B are schematic diagrams showing the process for electroplating on substrate 21, which can be glass, plastic, quartz or silicon substrate, and is not limited to those disclosed in the present invention. In FIG. 2A is showing the step of depositing a metal seed layer 22 above a substrate 21, the metal seed layer 22 is the seed used for attracting the ions in electroplating solution in this method. In the next step showed in FIG. 2B, there is a metal layer 23 electroplated above the metal seed layer 22. The pattern and thickness of the metal layer 23 are defined by patterning the metal seed layer 22 and the time to electroplate, longer time to electroplate will induce a thicker metal layer 23.

[0021] FIG. 3A to FIG. 3E are schematic diagrams showing the process for electroplating and the device structure in accordance with one preferred embodiment of the present art. In FIG. 3A, a substrate 31 is prepare and then an isolated layer 32 is coated thereon and used to isolate the components, which will be formed on the substrate 31. Afterward a silicon thin film layer 38 is deposited above the isolated layer 32, and the silicon thin film layer 38 can be the active layer of this device. Next, an oxide layer 33 is deposited above the silicon thin film layer 38. Then a metal seed layer 34 is deposited on the oxide layer 33, this metal seed layer 34 also has a required pattern through the processes of patterning and etching.

[0022] In FIG. 3B shows that the oxide layer 33 and metal seed layer 34 have been patterned and etched. At meantime, impurities such as B and P are ion-implanted in to the device with light dose, thus forming lightly doped p-type region and lightly doped n-type region, respectively in the device.

[0023] As in FIG. 3C, after lightly-doped drain 35a and lightly-doped source 35b are formed on both sides of the silicon thin film layer 38 by ion-implantation, a metal layer 36 is electroplated to cover the metal seed layer 34. More particularly, the device to be subjected to the electroplating process is immersed into an electro bath including the ions of the metal for the metal layer 36. In the present invention, the metal layer 36 employs low-resistance metal material such as Cu and Ag.

[0024] FIG. 3D is the step of doping highly-dose impurity ions of by ion-implantation. Then, as in FIG. 3E, a drain 37a and a source 37b are respectively formed on lateral sides of the lightly-doped drain 35a and the lightly-doped source 35b by ion implanting highly-dose ions of impurity. The structure of gate overlap lightly-doped drain (source) shown in those figures can advantageously reduce mask number for manufacture.

[0025] Please refer to FIG. 4, which is a flow chart showing the steps of process of electroplating in accordance with one preferred embodiment of present invention. The method for electroplating comprising steps below:

[0026] First, an oxide layer is deposited on a substrate for providing isolation (step 400). A silicon thin film layer is then deposited above the oxide layer (step 401). An oxide layer is then deposited on the silicon thin film layer (step 402). The oxide layer can be formed by thermal growth with oxygen or vapor, or by deposition process. The oxide layer is used to for isolation and mask during later process. Afterward, a first metal seed layer is deposited on oxide layer (step 403), wherein the metal seed layer is used to be a seed for attracting the metal ions in electroplating solution. A patterning is defined on the metal seed layer to determine the width of electroplated metal (step 404). A low-dose impurity is ion-implanted on the patterned metal seed layer (step 405). A first metal layer of low resistance is electroplated on the patterned metal seed layer (step 406). The first metal layer is used to reduce the resistance of metal wire on panel and is formed by immersing into a first electroplating solution, which includes the metal ions same as the first metal layer.

[0027] The silicon thin film layer is doped with high-dose trivalence or pentavalence metal impurity to form electrode on panel (step 407). An inter-layer is then deposited on resulting structure and functioned as isolation layer to prevent the shorting of each metal material (step 408). A second metal seed layer is then deposited on the inter-layer (step 409). The second metal seed layer is then patterned and etched to form data electrodes (step 410). A second metal layer is electroplated on the second metal seed layer (step 411). The second metal layer on the second metal seed layer is formed by immersing into a second electroplating solution, which includes the metal ions same as the second metal layer. An insulated layer is coated on the resulting structure to protect the whole device (step 412). Finally, an electrode is plated on the resulting structure (step 413). As recited above, the first metal layer and second metal layer covered on the first metal seed layer and second metal seed layer respectively are formed by low-resistance metal material to reduce the resistance of device.

[0028] According to the above discussion, the present invention discloses a method for electroplating metal wire improves the RC-delay of circuit on large-area substrate by low-resistance metal wiring and reduce the number of masks on processing by the structure of gate overlap and lightly-doped drain (source). Therefore, the present invention has been examined to be progressive, advantageous and applicable to the industry.

[0029] Although this invention has been disclosed and illustrated with reference to particular embodiments, the principles involved are susceptible for use in numerous other embodiments that will be apparent to persons skilled in the art. This invention is, therefore, to be limited only as indicated by the scope of the appended claims.

Claims

What is claimed is:

1. A method for electroplating a metal wire, said method of electroplating comprising steps of: depositing a metal seed layer above a substrate; and forming a plurality of metal wires by patterning and etching the metal layer. electroplating a metal layer on said metal seed layer;

2. The method for electroplating metal wire as recited claim 1, wherein said metal layer is low-resistance metal material.

3. The method for electroplating metal wire as recited claim 1, wherein the step of electroplating said metal layer on said metal seed layer is carried out by immersing the substrate into an electroplating solution, which includes the metal ions same as said metal layer.

4. A method for electroplating metal wire, which is used to improve a RC-delay because of a complicate wiring on a large-area substrate, and said method for electroplating comprising steps of: depositing an oxide layer above said substrate; depositing and patterning a first metal seed layer on said oxide layer; electroplating a first metal layer on said first metal seed layer; depositing an inter-layer; depositing and patterning a second metal seed layer; and electroplating a second metal layer on said second metal seed layer.

5. The method for electroplating metal wire as recited claim 4, wherein said first metal layer and said second metal layer are low-resistance metal material.

6. The method for electroplating metal wire as recited claim 4, wherein the step of electroplating said first metal layer on said first metal seed layer is carried out by immersing the substrate into a first electroplating solution, which includes the metal ions are the same as said first metal layer.

7. The method for electroplating metal wire as recited claim 4, wherein the step of electroplating said second metal layer on said second metal seed layer is used to be immersed into a second electroplating solution, which includes the metal ions are a kind of said second metal layer.

8. The method for electroplating metal wire as recited claim 4, wherein said isolated layer is an insulating material.

9. The method for electroplating metal wire as recited claim 4, wherein said isolated layer is used to isolate each electrode.

10. A method for electroplating metal wire, which is used to improve a RC-delay because of a complicate wiring on a large-area substrate, and reducing mask number for a processing of a structure of gate overlap lightly-doping drain (source), said method for electroplating comprising steps of: coating an isolated layer above a substrate; depositing an semiconductor layer above said isolated layer; and patterning the semiconductor layer, said an active layer depositing and patterning a metal seed layer on said oxide layer; doping light-dose ions of impurity; electroplating a metal layer on said metal seed layer; and doping high-dose ions of impurity.

11. The depositing an semiconductor layer as recited claim 10, wherein said semiconductor layer is Si, Ge, SiGe.

12. The method for electroplating metal wire as recited claim 10, wherein said metal layer is low-resistance metal material.

13. The method for electroplating metal wire as recited claim 10, wherein said isolated layer is used to isolate each electrode.

14. The method for electroplating metal wire as recited claim 10, wherein the step of doping light-dose ions of impurity is performed by ion-implantation or ion shower.

15. The method for electroplating metal wire as recited claim 10, wherein the step of doping high-dose ions of impurity is performed by ion-implantation or ion shower.

16. The method for electroplating metal wire as recited claim 10, wherein the step of electroplating said metal layer on said metal seed layer is carried out by immersing the substrate into an electroplating solution, which includes the metal ions the same as said metal layer.