U.S. patent application number 10/686763 was filed with the patent office on 2004-04-29 for imaging method for manufacture of microdevices.
This patent application is currently assigned to CANON KABUSHIKI KAISHA. Invention is credited to Kawashima, Miyoko, Suzuki, Akiyoshi.
Application Number | 20040080736 10/686763 |
Document ID | / |
Family ID | 26366769 |
Filed Date | 2004-04-29 |
United States Patent
Application |
20040080736 |
Kind Code |
A1 |
Suzuki, Akiyoshi ; et
al. |
April 29, 2004 |
Imaging method for manufacture of microdevices
Abstract
An imaging method for imaging a fine pattern having linear
features extending along orthogonal first and second directions, is
disclosed which method is characterized by: providing a light
source having decreased intensity portions at a center thereof and
on first and second axes defined to intersect with each other at
the center and defined along the first and second directions,
respectively; and illuminating the pattern with light from the
light source.
Inventors: |
Suzuki, Akiyoshi; (Tokyo,
JP) ; Kawashima, Miyoko; (Haga-gun, JP) |
Correspondence
Address: |
FITZPATRICK CELLA HARPER & SCINTO
30 ROCKEFELLER PLAZA
NEW YORK
NY
10112
US
|
Assignee: |
CANON KABUSHIKI KAISHA
Tokyo
JP
|
Family ID: |
26366769 |
Appl. No.: |
10/686763 |
Filed: |
October 17, 2003 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
10686763 |
Oct 17, 2003 |
|
|
|
09810488 |
Mar 19, 2001 |
|
|
|
6654101 |
|
|
|
|
09810488 |
Mar 19, 2001 |
|
|
|
08427709 |
Apr 24, 1995 |
|
|
|
6271909 |
|
|
|
|
08427709 |
Apr 24, 1995 |
|
|
|
08357786 |
Dec 16, 1994 |
|
|
|
08357786 |
Dec 16, 1994 |
|
|
|
08270414 |
Jul 5, 1994 |
|
|
|
08270414 |
Jul 5, 1994 |
|
|
|
08159954 |
Dec 1, 1993 |
|
|
|
08159954 |
Dec 1, 1993 |
|
|
|
08065498 |
May 24, 1993 |
|
|
|
08065498 |
May 24, 1993 |
|
|
|
07836509 |
Feb 18, 1992 |
|
|
|
5305054 |
|
|
|
|
Current U.S.
Class: |
355/53 |
Current CPC
Class: |
G03F 7/70558 20130101;
G03F 7/70241 20130101; G03F 7/701 20130101; G03F 7/70125 20130101;
G03F 7/70133 20130101; G03F 7/7005 20130101; G03F 7/70091 20130101;
G03F 7/70108 20130101 |
Class at
Publication: |
355/053 |
International
Class: |
G03B 027/42 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 22, 1991 |
JP |
028631/1991 (PAT. |
Apr 30, 1991 |
JP |
128446/1991 (PAT. |
Claims
What is claimed is:
1. An imaging method for imaging a fine pattern having linear
features extending along orthogonal first and second directions,
characterized by: providing a light source having decreased
intensity portions at a center thereof and on first and second axes
defined to intersect with each other at the center and defined
along the first and second directions, respectively: and
illuminating the pattern with light from the light source.
2. A method according to claim 1 wherein the intensity at each
decreased intensity portion is decreased to about zero.
3. A method according to claim 1, wherein the light source
comprises four sections having substantially the same light
intensity and being distributed in four quadrants defined by the
center and the first and second axes, and wherein the four sections
are disposed in an angularly symmetrical relationship with respect
to the center.
4. A method according to claim 3, wherein the intensity at each
decreased intensity portion is decreased to about zero.
5. A method according to any one of claims 1-4, wherein the light
source is provided by light from one of a lamp and a laser.
6. A device for forming an image of a fine pattern having linear
features extending in orthogonal first and second directions, said
device comprising: a primary light source; an illumination optical
system for illuminating the pattern, said illumination optical
system having means for forming, with light from said primary light
source, a secondary light source having decreased intensity
portions at a center thereof and on first and second axes defined
to intersect with each other at the center and defined along the
first and second directions, respectively; and a projection optical
system for projecting, on a predetermined plane, an image of the
pattern illuminated with light from said secondary light
source.
7. A device according to claim 6, wherein the intensity at each
decreased intensity portion is decreased to about zero.
8. A device according to claim 6, wherein said secondary light
source comprises four sections having substantially the same light
intensity and being distributed in four quadrants defined by the
center and the first and second axes, and wherein the four sections
are disposed in an angularly symmetrical relationship with respect
to the center.
9. A device according to claim 8, wherein the intensity at each
decreased intensity portion is decreased to about zero.
10. A device according to claim 8 or 9, wherein said secondary
light source forming means includes (i) an optical integrator
having a light receiving surface and a light emitting surface, for
receiving with said light receiving surface the light from said
primary light source and dividing the received light to provide a
plurality of light beams from said light emitting surface, and (ii)
stop means having four apertures disposed-adjacent to one of said
light receiving surface and said light emitting surface of said
optical integrator to define the four sections of said secondary
light source.
11. A device according to claim 8 or 9, wherein said secondary
light source forming means includes (i) an optical integrator
having a light receiving surface and a light emitting surface, for
receiving with said light receiving surface the light from said
primary light source and dividing the received light to provide a
plurality of light beams from said light emitting surface, and (ii)
stop means of cross-like shape disposed adjacent to one of said
light receiving surface and said light emitting surface of said
optical integrator to define the four sections of said secondary
light source.
12. In a microdevice manufacturing method including a step for
imaging on a workpiece a fine pattern having linear features
extending along orthogonal first and second directions to print the
fine pattern on the workpiece, the improvements residing in:
providing a light source having decreased intensity portions at a
center thereof and on first and second axes defined to intersect
with each other at the center and defined along the first and
second directions, respectively; and illuminating the pattern with
light from the light source.
13. A method according to claim 12, wherein the intensity at each
decreased intensity portion is decreased to about zero
14. A method according to claim 12, wherein the light source
comprises four sections having substantially the same light
intensity and being distributed in four quadrants defined by the
center and the first and second axes, and wherein the four sections
are disposed in an angularly symmetrical relationship with respect
to the center.
15. A method according to claim 14, wherein the intensity at each
decreased intensity portion is decreased to about zero.
16. A method according to any one of claims 12-15, wherein the
light source is provided by ultraviolet light from one of a mercury
lamp and an excimer laser.
17. A microdevice manufacturing projection exposure apparatus for
projecting an image of a pattern of an original on a workpiece,
said apparatus comprising: an X-Y stage for supporting thereon the
workpiece and being movable along X and Y directions in an X-Y
coordinate system defined in said apparatus; means for forming,
with light from a primary light source, a secondary light source
having decreased intensity portions at a center thereof and on
first and second axes defined to intersect with each other at the
center and defined along the X and Y directions, respectively; a
condensing optical system for illuminating the pattern of the
original with light from said secondary light source; and a
projection optical system for projecting on the workpiece an image
of the pattern illuminated with the light from said secondary light
source.
18. An apparatus according to claim 17, wherein the intensity at
each decreased intensity portion is decreased to about zero.
19. An apparatus according to claim 17, wherein said secondary
light source comprises four sections having substantially the same
light intensity and being distributed in four quadrants defined by
the center and the first and second axes, and wherein the four
sections are disposed in an angularly symmetrical relationship with
respect to the center.
20. An apparatus according to claim 19, wherein the intensity at
each decreased intensity portion is decreased to about zero.
21. An apparatus according to claim 19 or 20, wherein said
secondary light source forming means includes (i) an optical
integrator having a light receiving surface and a light emitting
surface, for receiving with said light receiving surface the light
from said primary light source and dividing the received light to
provide a plurality of light beams from said light emitting
surface, and (ii) stop means having four apertures disposed
adjacent to one of said light receiving surface and said light
emitting surface of said optical integrator to define the four
sections of said secondary light source.
22. An apparatus according to claim 19 or 20, wherein said
secondary light source forming means includes (i) an optical
integrator having a light receiving surface and a light emitting
surface, for receiving with said light receiving surface the light
from said primary light source and dividing the received light to
provide a plurality of light beams from said light emitting
surface, and (ii) stop means of cross-like shape disposed adjacent
to one of said light receiving surface and said light emitting
surface of said optical integrator to define the four sections of
said secondary light source.
23. An apparatus according to any one of claims 17-22, further
comprising means for detecting a light intensity distribution of
said secondary light source.
24. A microdevice manufacturing projection exposure apparatus for
projecting an image of a pattern of an original on a workpiece,
said apparatus comprising: an X-Y stage for supporting thereon the
workpiece and being movable along X and Y directions in an X-Y
coordinate system defined in said apparatus; means for selectively
forming, with light from a primary light source, different
secondary light sources of different light intensity distributions
including a particular secondary light source having decreased
intensity portions at a center thereof and on first and second axes
defined to intersect with each other at the center and defined
along the X and Y directions, respectively; a condensing optical
system for illuminating the pattern of the original with light from
a secondary light source selectively formed by said selectively
forming means; and a projection optical system for projecting an
image of the illuminated pattern on the workpiece.
25. An apparatus according to claim 24, wherein said selectively
forming means includes (i) an optical integrator having a light
receiving surface and a light emitting surface, for receiving with
said light receiving surface the light from said primary light
source and dividing the received light to provide a plurality of
light beams from said light emitting surface, and (ii) first and
second stop means each being disposed adjacent to one of said light
receiving surface and said light emitting surface of said optical
integrator, said first stop means having four off-axis apertures
for defining said particular secondary light source, and said
second stop means having an on-axis aperture.
26. An apparatus according to claim 25, wherein said particular
secondary light source comprises four sections having substantially
the same light intensity and being distributed in four quadrants
defined by the center and the first and second axes, and wherein
the four sections are disposed in an angularly symmetrical
relationship with respect to the center.
27. An apparatus according to claim 25 or 26, wherein the intensity
at each decreased intensity portion of said particular s condary
light source is decreased to about zero.
28. In a method of imaging a fine pattern having linear features
extending in orthogonal first and second directions, wherein the
pattern is illuminated with light obliquely with respect to the
pattern, the improvements residing in that: the strength of
illumination of the pattern in a first plane of incidence including
the first direction and the strength of illumination of the pattern
in a second plane of incidence including the second direction are
made lower than that in a third plane of incidence other than the
first and second planes.
29. A method according to claim 28, wherein, in each of the first
plane of incidence and the second plane of incidence, the
illumination of the pattern with light is substantially
blocked.
30. A method according to claim 28 or 29, wherein the predetermined
plane of incidence is defined with an angle of about 45 degrees
with respect to one of the first plane of incidence and the second
plane of incidence.
31. In a method of manufacturing microdevices wherein a fine
pattern having linear features extending in orthogonal first and
second directions is illuminated with light obliquely with respect
to the pattern and wherein the illuminated pattern is imaged and
printed on a workpiece, the improvements residing in that: the
strength of illumination in a predetermined plane of incidence is
made greater than that in a first plane of incidence including the
first direction and that in a second plane of incidence including
the second direction and intersecting with the first plane of
incidence perpendicularly.
32. A method according to claim 31, wherein, in each of the first
plane of incidence and the second plane of incidence, the
illumination of the pattern with light is substantially
blocked.
33. A method according to claim 31 or 32, wherein the predetermined
plane of incidence is defined with an angle of about 45 degrees
with respect to one of the first and second directions.
34. In a method of imaging a fine pattern having linear features
each extending in a predetermined direction, wherein the pattern is
illuminated with light obliquely with respect to the pattern, the
improvements residing in that: the illumination of the pattern with
light along a path in a plane of incidence including the
predetermined direction is substantially blocked; and the pattern
is illuminated with light along a pair of paths which are
symmetrical with each other with respect to the plane of
incidence.
35. In a method of manufacturing microdevices wherein a fine
pattern having linear features each extending in a predetermined
direction is illuminated with light obliquely with respect to the
pattern and wherein the illuminated pattern is imaged and printed
on a workpiece, the improvements residing in that: the illumination
of the pattern with light along a path in a plane of incidence
including the predetermined direction is substantially blocked; and
the pattern is illuminated with light along a pair of paths which
are symmetrical with each other with respect to the plane of
incidence.
36. A projection exposure apparatus for projecting on a workpiece
an image of an original having a pattern of linear features, said
apparatus comprising: an X-Y stage for supporting thereon the
workpiece and being movable along X and Y directions in an X-Y
coordinate system defined in said apparatus; means for illuminating
the mask with light obliquely with respect to the mask, wherein a
beam component of the light in a first plane of incidence including
the X direction and a beam component of the light in a second plane
of incidence including the Y direction and intersecting with the
first plane of incidence perpendicularly, each has a strength made
lower than that of a beam component of light in a third plane of
incidence other than the first and second planes; and a projection
optical system for projecting on the workpiece an image of the
patter of the mask illuminated by said illuminating means.
37. An apparatus according to claim 36, wherein the strength of
each of the beam components in the first plane of incidence and the
second plane of incidence is decreased to about zero.
38. An apparatus according to claim 36 or 37, wherein the
predetermined plane of incidence is defined with an angle of about
45 degrees with respect to one of the X and Y directions.
39. A projection exposure apparatus for projecting on a workpiece
an image of an original having a grating pattern, said apparatus
comprising: an X-Y stage for supporting thereon the workpiece and
being movable along X and Y directions in an X-Y coordinate system
defined in said apparatus; means for illuminating the pattern of
the mask with light obliquely width respect to the pattern and
along a pair of paths which are symmetric with each other with
respect to a predetermined plane of incidence including the X
direction, while substantially blocking the illumination of the
pattern along a path in the predetermined plane of incidence; and a
projection optical system for projecting on the workpiece an image
of the patter of the mask illuminated by said illuminating
means.
40. An apparatus according to claim 39, wherein the strength of a
beam beam component in the predetermined plane of incidence is
decreased to about zero.
41. An illumination method in image projection, for illuminating a
fine pattern of an original, characterized by: providing a light
intensity distribution having decreased intensity portions at a
center thereof and on first and second orthogonal axes with respect
to which the original is to be placed.
42. A method according to claim 41, wherein the strength at each of
the decreased intensity portions is decreased to about zero.
43. An illumination method in image projection, for obliquely
illuminating with light a fine pattern of an original placed with
reference to first and second orthogonal axes, characterized in
that: the strength of illumination of the pattern in a first plane
of incidence including the first axis and the strength of
illumination of the pattern in a second plane of incidence
including the second axis are made lower than that in a third plane
of incidence other than the first and second planes.
44. A method according to claim 43, wherein the illumination of the
pattern along each of the first and second planes is substantially
blocked.
45. A microdevice manufactured in accordance with a method as
defined in any one of claims 1-5, 12-16, 28-35 and 41-44.
46. A microdevice manufactured by using a device or an apparatus as
defined in any one of claims 6-11, 17-27 and 36-40.
Description
FIELD OF THE INVENTION AND RELATED ART
[0001] This invention relates generally to an imaging method for
manufacture of microdevices. More particularly, in one aspect the
invention is concerned with an imaging method or an illumination
method therefor, suitably usable in forming on a workpiece a fine
pattern of a linewidth of 0.5 micron or less.
[0002] The increase in the degree of integration of a semiconductor
device has been accelerated more and more and, along such trend,
the fine processing techniques have been improved considerably.
Particularly, the optical processing technique which is major one
of them has been advanced to a level of submicron region, with the
start of a 1 mega DRAM. A representative optical processing machine
is a reduction projection exposure apparatus, called a "stepper".
It is not too much to say that enhancement of resolution of this
apparatus determines the future of the semiconductor device.
[0003] Conventionally, the enhancement of resolution of the stepper
mainly relies on enlarging the N.A. (numerical aperture) of an
optical system (reduction projection lens system). Since however
the depth of focus of an optical system is in inverse proportion to
the square of the N.A., the enlargement of the N.A. causes an
inconvenience of decreased depth of focus. In consideration of
this, attempts have been made recently to change the wavelength of
light for exposure, from the g-line to the i-line or to excimer
laser light of a wavelength not longer than 300 nm. This aims at an
effect that the depth of focus and the resolution of an optical
system can be improved in inverse proportion to the wavelength.
[0004] On the other hand, in a way separate from shortening the
exposure wavelength, a method using a phase shift mask has been
proposed as a measure for improving the resolution. According to
this method, a thin film is formed in a portion of a light
transmitting area of a mask which film serves to provide a phase
shift of 180 deg. with respect to the other portion. The resolution
RP of a stepper can be represented by an equation
RP=k.sub.1.lambda./N.A., and usually the stepper has a k.sub.1
factor of a level of 0.7-0.8. With the method using such a phase
shift mask, the level of the k.sub.1 factor can be improved to
about 0.35.
[0005] However, there remain many problems to realize such phase
shift mask method. Unsolved problems currently remaining are such
as follows:
[0006] (1) Satisfactory thin film forming technique for forming a
phase shift film has not yet been established.
[0007] (2) Satisfactory CAD (computer-aided designing) for design
of a circuit pattern with a phase shift film has not yet
developed.
[0008] (3) Depending on a pattern, a phase shift film can not be
applied thereto.
[0009] (4) In respect to the inspection and correction of a phase
shift film, satisfactory technique has not yet established.
[0010] As stated, there remain many problems to realize a phase
shift mask method.
SUMMARY OF THE INVENTION
[0011] It is an object of the present invention to provide a unique
and improved imaging method suitable for manufacture of
microdevices such as semiconductor microcircuit devices.
[0012] It is another object of the present invention to provide a
microdevice manufacturing method which uses such imaging
method.
[0013] It is a further object of the present invention to provide
an exposure apparatus for manufacture of microdevices, which uses
such imaging method.
[0014] In accordance with a first aspect of the present invention,
there is provided an imaging method for imaging a fine pattern
having linear features extending along orthogonal first and second
directions, characterized by: providing a light source having
decreased intensity portions at a center thereof and on first and
second axes defined to intersect with each other at the center and
defined along the first and second directions, respectively; and
illuminating the pattern with light from the light source.
[0015] In accordance with a second aspect of the present invention,
there is provided a method of imaging a fine pattern having linear
features extending in orthogonal first and second directions,
wherein the pattern is illuminated with light obliquely with
respect to the pattern, the improvements residing in that: the
strength of illumination in a predetermined plane of incidence is
made greater than that in a first plane of incidence including the
first direction and that in a second plane of incidence including
the second direction and intersecting with the first plane of
incidence perpendicularly.
[0016] In accordance with a third aspect of the present invention,
there is provided a method of imaging a fine pattern having linear
features each extending in a predetermined direction, wherein the
pattern is illuminated with light obliquely with respect to the
pattern, the improvements residing in that: the illumination of the
pattern with light along a path in a plane of incidence including
the predetermined direction is substantially blocked; and the
pattern is illuminated with light along a pair of paths which are
symmetrical with each other with respect to the plane of
incidence.
[0017] In accordance with a fourth aspect of the present invention,
there is provided an illumination method in image projection, for
illuminating a fine pattern of an original, characterized by:
providing a light intensity distribution having decreased intensity
portions at a center thereof and on first and second orthogonal
axes with respect to which the original is to be placed.
[0018] These and other objects, features and advantages of the
present invention will become more apparent upon a consideration of
the following description of the preferred embodiments of the
present invention taken in conjunction with the accompanying
drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0019] FIG. 1 is a schematic view for explaining the principle of
projection of an image of a fine pattern.
[0020] FIGS. 2A and 2B are schematic views, respectively, wherein
FIG. 2A shows a light distribution as provided on a pupil by
diffraction light from a conventional mask and FIG. 2B shows a
light distribution as provided on a pupil by diffraction light from
a phase shift mask.
[0021] FIGS. 3A and 3B show a first embodiment of the present
invention, wherein FIG. 3A is a schematic view of an example of
effective light source as formed on a pupil by zero-th order light
in the first embodiment and FIG. 3B shows another example of
effective light source as formed on a pupil by zero-th order light
in the first embodiment.
[0022] FIG. 4 is a graph for explaining frequency characteristics
of a projection system which forms the effective light source of
the FIG. 3A example and that of a projection system of conventional
type.
[0023] FIGS. 5A-5C show a second embodiment of the present
invention, wherein FIG. 5A is a schematic view of a projection
exposure apparatus according to the second embodiment of the
present invention, FIG. 5B is a front view of a stop member used in
the second embodiment, and FIG. 5C is a schematic view of a cross
filter used in the second embodiment.
[0024] FIGS. 6A and 6B show a third embodiment of the present
invention, wherein FIG. 6A is a schematic view of a projection
exposure apparatus according to the third embodiment and FIG. 6B is
a front view of a stop member used in the third embodiment.
[0025] FIG. 7 is a fragmentary schematic view of a projection
exposure apparatus according to a fourth embodiment of the present
invention.
[0026] FIG. 8 is a fragmentary schematic view of a projection
exposure apparatus according to a fifth embodiment of the present
invention.
[0027] FIG. 9 is a fragmentary schematic view of a projection
exposure apparatus according to a sixth embodiment of the present
invention.
[0028] FIG. 10 is a fragmentary schematic view of a projection
exposure apparatus according to a seventh embodiment of the present
invention.
[0029] FIG. 11 is a fragmentary schematic view of a projection
exposure apparatus according to an eighth embodiment of the present
invention.
[0030] FIG. 12 is a fragmentary schematic view of a projection
exposure apparatus according to a ninth embodiment of the present
invention.
[0031] FIG. 13 is a schematic view of a main portion of a
projection exposure apparatus according to a tenth embodiment of
the present invention.
[0032] FIG. 14 is a schematic view for explaining the relationship
between a pupil of a projection optical system and an optical
integrator.
[0033] FIGS. 15A and 15B are schematic views, r spectively, each
showing the pupil of the projection optical system.
[0034] FIG. 16 is a schematic view of a stop member usable in the
present invention.
[0035] FIGS. 17A and 17B are schematic views, respectively, each
showing the manner of cabling a mercury lamp.
[0036] FIG. 18 is a schematic view of a main portion of a
projection exposure apparatus according to a further embodiment of
the present invention.
[0037] FIGS. 19A and 19B are schematic views, respectively, for
explaining the manner of insertion of a pyramid type prism used in
another embodiment of the present invention.
[0038] FIG. 20 is a schematic view of a main portion of a
projection exposure apparatus according to a still further
embodiment of the present invention.
[0039] FIG. 21 is a schematic view of a main portion of a
projection exposure apparatus according to a still further
embodiment of the present invention.
[0040] FIG. 22 is a schematic view of a main portion of a
projection exposure apparatus according to a yet further embodiment
of the present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0041] For better understanding of the present invention,
description will be made first on details of the imaging of a fine
pattern.
[0042] FIG. 1 shows the principle of image projection of a fine
pattern 6 having a high frequency (pitch 2d is about several
microns), through a projection lens system 7. The fine pattern 6
which is illuminated along a direction perpendicular to the surface
thereof, diffracts the light inputted thereto. Diffraction lights
caused thereby include a zero-th order diffraction light, directed
in the same direction as the direction of advancement of the input
light, and higher order diffraction lights such as positive and
negative first order diffraction lights, for example, directed in
directions different from the input light. Among these diffraction
lights, those of particular diffraction orders such as, for
example, the zero-th order diffraction light and positive and
negative first order diffraction lights, are incident on a pupil 1
of the projection lens system 7. Then, after passing through the
pupil 1, these lights are directed to an image plane of the
projection lens system, whereby an image of the fine pattern 6 is
formed on the image plane. In this type of image formation, the
light components which are contributable to the contrast of the
image are higher order diffraction lights. If the frequency of a
fine pattern increases, it raises a problem that an optical system
does not receive higher order diffraction lights. Therefore, the
contrast of the image degrades and, ultimately, the imaging itself
becomes unattainable.
[0043] FIG. 2A shows a light distribution on the pupil 1 in an
occasion where the fine pattern 6 of FIG. 1 is formed on a mask of
conventional type, while FIG. 2B shows a light distribution on the
pupil 1 in an occasion where the fine pattern 6 is formed on a
phase shift mask.
[0044] In FIG. 2A, about a zero-th order diffraction light 3a,
there are a positive first order diffraction light 3b and negative
first order diffraction light 3c. In FIG. 2B, on the other hand,
due to the effect of a phase shift film a zero-th order diffraction
light 5a is "extinguished" and there are positive and negative
first order diffraction lights 5b and 5c only. Comparing the cases
of FIGS. 2A and 2B, the following two points may be raised as
advantageous effects of a phase shift mask upon the plane of
spatial frequency, i.e., the pupil plane:
[0045] (1) In the phase shift mask, the frequency is decreased to a
half.
[0046] (2) In the phase shift mask, no zero-th order diffraction
light exists.
[0047] Another point to be noted here may be that the spacing a
between the positive and negative first order diffraction lights
upon the pupil plane in the case of the phase shift mask
corresponds to the spacing a between the zero-th order light and
the positive (negative) first order diffraction light in the case
of the conventional type mask.
[0048] On the other hand, as regards the light distribution on the
pupil 1, the conventional type mask and the phase shift type mask
show the same characteristic in respect to the position. What is
the difference therebetween is the ratio of intensity of the
amplitude distribution upon the pupil 1. In the phase shift mask
shown in FIG. 2B, the amplitude ratio among the zero-th order,
positive first order and negative first order diffraction lights is
0:1:1, whereas in the conventional type mask shown in FIG. 2A it is
1:2/.pi.:2/.pi..
[0049] In accordance with one aspect of the present invention, a
light distribution similar to that to be produced by a phase shift
type mask can be produced on the pupil 1. More specifically,
according to this aspect of the present invention, in order to
assure that, when a fine pattern 6 (more particularly, a fine
pattern as having a spatial frequency that the k.sub.1 factor is
about 0.5, as suggest d in the introductory part of the
Specification) is illuminated, a zero-th order diffraction light is
incident on the pupil 1 at a position off the center of the pupil 1
while a different diffraction light of higher order is similarly
incident on a position off the center of the pupil 1, an optical
arrangement is provided to produce such effective light source
that: it has a light quantity distribution in which, as compared
with the light intensity in each of portions on a pair of axes
passing through the center of the pupil and extending along
longitudinal and lateral pattern features of the fine pattern and
as compared with with the light intensity in a portion around the
center of the pupil, the light intensity in a portion other than
these portions is higher. Preferably, there may be produced an
effective light source in which the light intensity at each of the
portions on the pair of axes passing through the center of the
pupil and extending along the longitudinal and lateral pattern
features of the fine pattern as well as the light intensity in the
portion around the center of the pupil, are lowered to about
zero.
[0050] When such an effective light source is provided, of zero-th
order and first order diffraction lights, for example (as produced
as a result of illumination of a fine pattern of a k.sub.1 factor
of about 0.5, for example), the zero-th order diffraction light and
one of the positive and negative first order diffraction lights may
be project d on the pupil 1 whereas the other of the positive and
negative first order diffraction lights may be prevented from being
projected onto the pupil 1. This assures a light distribution
similar to that to be provided by a phase shift mask. on the pupil
1.
[0051] If in the present invention a single light beam is used for
the illumination, the amplitude ratio of a pair of diffraction
lights at the pupil 1 becomes 1:2/.pi., different from a desirable
amplitude ratio of 1:1 similar to that as attainable with a phase
shift mask. However, according to the analyses made by the
inventors of the subject application, it has been found that: for
resolving a longitudinal pattern feature of a mask, such a
difference in amplitude ratio can be substantially compensated by
using, as the light to be obliquely projected on the mask (fine
pattern), a pair of lights from a pair of light sources disposed
symmetrically with each other with respect to a longitudinal axis
of the pupil (an axis passing through the center of the pupil and
extending along the longitudinal pattern feature) so as to produce
on the pupil a pair of light patterns which are symmetrical with
each other with respect to the longitudinal azis of the pupil; and
that for resolving a lateral pattern feature of the mask, the
difference in amplitude ratio can be compensated by using, as the
light to be projected obliquely on the mask (fine pattern), a pair
of lights from a pair of light sources disposed symmetrically with
each other with respect to a lateral axis of the pupil (an axis
passing through the center of the pupil, extending along the
lateral pattern feature and being perpendicular to the longitudinal
axis of the pupil) so as to produce a pair of light patterns which
are symmetrical with each other with respect to the lateral axis of
the pupil.
[0052] For resolving a mask pattern having longitudinal and lateral
pattern features, two illumination light beams, for example, may be
used and projected obliquely to the mask so as to produce an
effective light source having, on the pupil, a light quantity
distribution with a pair of peaks of substantially the same
intensity at those positions: which are symmetrical with each other
with respect to the center of the pupil, and which are located
along a first axis passing through the center of the pupil and
extending with an angle of about 45 deg. with respect to the X and
Y axes. Also, four illumination light beams, for example, may be
used and projected obliquely to the mask so as to produce an
effective light source having, on the pupil, a light quantity
distribution with (i) a pair of portions of substantially the same
intensity at those positions: which are symmetrical with each other
with r spect to the center of the pupil, and which are located
along a first axis passing through the center of the pupil and
extending with an angle of about 45 deg. with respect to the X and
Y axes and (ii) with a pair of portions of substantially the same
intensity at those positions: which are symmetrical with each other
with respect to the center of the pupil, which are located along a
second axis passing through the center of the pupil and extending
with an angle of about 90 deg. with respect to the first axis, and
which are at substantially corresponding locations with respect to
the pair of positions on the first axis and the center of the
pupil.
[0053] A first embodiment of the present invention will be
explained with reference to FIGS. 3A and 3B, wherein FIG. 3A shows
a light distribution of zero-th order diffraction light on the
pupil 1 of FIG. 1, while FIG. 3B shows a distribution of effective
light source on a pupil plane.
[0054] In the drawings, denoted at 1 is a pupil; denoted at x is a
lateral axis of the pupil (an axis passing through the center of
the pupil and extending along a lateral pattern feature); denoted
at y is a longitudinal axis of the pupil (an axis passing through
the center of the pupil, extending along a longitudinal pattern
feature and being perpendicular to the x axis); and denoted at 2a,
2b, 2c and 2d are portions of an effective light source.
[0055] In these two examples, the effective light source has a
distribution generally consisting of four portions. Each portion
(light pattern) has a distribution of circular shape. If the radius
of the pupil 1 is 1.0, the pupil center is at the origin of
coordinate and the x and y axes are the orthogonal coordinate axes,
then in the FIG. 3A example the centers of the portions 2a, 2b, 2c
and 2d are at the positions (0.45, 0.45), (-0.45, 0.45), (-0.45,
-0.45) and (0.45, -0.45), and the radius of each portion is 0.2. In
the FIG. 3B example, the centers of the portions 2a, 2b, 2c and 2d
are at the positions (0.34, 0.34), (-0.34, 0.34), (-0.34, -0.34)
and (0.34, -0.34). and the radius of each portion is 0.25.
[0056] The effective light source according to this embodiment is
featurized in that: when the pupil plane is divided into four
quadrants by the x and y axes defined on the pupil plane, as stated
above, each portion 2a, 2b, 2c or 2d is defined in corresponding
one of the quadrants and also these portions are defined in a
symmetrical relationship and defined independently of each other,
without overlapping. Here, the x and y axes for the division of the
quadrants correspond to x and y axes, for example, used for the
design of an integrated circuit pattern and they correspond to the
directions of elongation of longitudinal and lateral pattern
features of a mask.
[0057] The shape of the effective light source according to this
embodiment is determined in specific consideration of the
directivity of longitudinal and lateral pattern features of a fine
pattern whose image is to be projected, and it is featurized in
that: the centers of the four circular portions 2a-2d are just on
.+-.45 deg. directions (the directions along a pair of axes passing
through the center of the pupil 1 and extending with angles of
.+-.45 deg. with respect to the x and y axes). In order to produce
such an effective light source, a light source (secondary light
source) having the same shape and the same relationship, with
respect to the x and y axes, as that illustrated may be provided on
a plane optically conjugate with the pupil 1 and four illumination
light beams from the provided light source may be projected
obliquely to a fine pattern at the same angle of incidence and
along two orthogonal planes of incidence (each two light beams in a
pair). This assures that: linear pattern features extending along
the x axis are illuminated obliquely by the light beams projected
along the paths which are symmetrical with each other with respect
to the plane of incidence including the x axis; while linear
pattern features extending along the y axis are illuminated obliqu
ly by the light beams projected along the paths which are
symmetrical with each other with respect to the plane of incidence
including the y axis.
[0058] It is important that the four portions 2a-2d of the
effective light source have substantially the same intensity. If
the intensity ratio changes, any defocus of a wafer during the
printing thereof, for example, causes deformation of the image of a
circuit pattern. For this reason, preferably the four illumination
light beams are so set as to provide the same intensity. As regards
the intensity distribution of each of the four portions 2a-2d, it
may be determined as desired For example, it may be a uniform
intensity distribution wherein the whole range is at a peak level,
or it may be a non-uniform intensity distribution wherein the peak
is only at the center. This means that the four illumination light
beams may take various forms in accordance with the form of an
effective light source to be provided on the pupil 1. As an
example, while in this embodiment the four portions of th effective
light source are separated from each other and thus no light
pattern is produced in a portion other than the four portions, the
four portions of the effective light source may be formed to be
continuous with the intervention of lower intensity light
patterns.
[0059] The distribution (shape) of each of the four portions 2a-2d
of the effective light source is not limited to a circular shape.
However, it is desirable that, independently of the shape, the
centers of the four portions or the gravity centers of their
intensity distributions are in a symmetrical relationship and are
on the .+-.45 deg. directions with respect to the x and y axes, as
in the examples of FIGS. 3A and 3B.
[0060] For further enhancement of resolution, i.e., in an attempt
to adopting an arrangement of an optimum effective light source
adapted to provide a system of lower k.sub.1 level, it is seen from
the comparison of FIG. 3A with FIG. 3B that the gravity center
position of each portion 2a, 2b, 2c or 2d of the effective light
source in each quadrant displaces away from the center of the pupil
1 and, as a result, the diameter of each independent portion 2a,
2b, 2c or 2d in corresponding quadrant decreases.
[0061] Illustrated in FIGS. 3A and 3B are two types of effective
light sources expected. In practical design, an effective light
source similar to these two types may be used, since, if the
gravity center position of each portion of the effective light
source is too far from the center of the pupil 1, a problem of
decrease of light quantity, for example, may result (in the respect
of convenience in design of the optical system).
[0062] According to the investigations on that point made by the
inventors, it has been found that: in the coordinate and the pupil
1 shown in FIGS. 3A and 3B, if each of a pair of portions 2a and 2c
which are in the first and third quadrants, respectively, and which
are spaced from each other has a circular shape and a radius q and
if the center positions (gravity center positions) of the first and
second portions 2a and 2c are at coordinates (p, p) and (-p, -p),
respectively, then good results are obtainable by satisfying the
following conditions:
[0063] 0.25<p<0.6
[0064] 0.15<q<0.3
[0065] It is to be noted that the size and position of each of the
remaining portions 2b and 2d in the second and fourth quadrants are
determined naturally from the symmetry of them to the portions 2a
and 2c in the first and third quadrants. Also, it has been found
that, even in a case where each portion of the effective light
source has a shape other than a circular shape, such as, for
example, triangular or rectangular, preferably the above conditions
should be satisfied. In such case, the radius of a circle
circumscribing each portion may be used as the value of q. In the
examples shown in FIGS. 3A and 3B, each quantity is near the middle
of the range defined by the corresponding condition. The quantities
of p and q may change in dependence upon a desired linewidth of a
fine pattern which is required to be projected by a used optical
system (illumination system/projection system).
[0066] In a currently used stepper, an effective light source has a
peak at a center (x, y)=(0, 0) of a pupil 1. In this type of
apparatus, it is said that the coherence factor (.sigma. level) is
0.3 or 0.5, and this means that it has an effective light source
distribution having a radius of 0.3 or 0.5 about the center of the
pupil 1. According to the analyses made by the inventors, it has
been found that: if an effective light source is positioned close
to the pupil center, for example, if the .sigma. level is in a
range not greater than 0.1, it provides an advantage that when
defocus occurs a high contrast can be retained mainly in regard to
a relatively wide linewidth (a linewidth to which the
above-described k.sub.1 factor is not less than 1). However, such
advantage as obtainable when defocus occurs diminishes quickly as
the k.sub.1 factor becomes close to 0.5. If the k.sub.1 factor goes
beyond 0.5, in a strict case the contrast of an image is lost
fully. What is most required currently is the improvement in
defocus performance at a k.sub.1 factor level not greater than 0.6
and, in cases where the k.sub.1 factor is at about this level, the
presence of an effective light source adjacent to the pupil c nter
has an adverse effect on the imaging.
[0067] As compared therewith, the effective light source having
been described with reference to the first embodiment has a small
k.sub.1 factor. For the imaging in respect to a k.sub.1 factor of
about 0.5, it provides an advantageous effect of retaining a high
contrast when defocus occurs. Since in the example of FIG. 3A each
of the portions 2a-2d of the effective light source is located
outwardly, as compared with those of the FIG. 3B example, it
provides a superior high frequency characteristic as compared with
the FIG. 3B example. It is to be noted that, in a portion of the
effective light source spaced away from the pupil center, the
defocus characteristic is such that, up to a k.sub.1 factor of
about 1, the depth of focus is maintained substantially at a
constant level.
[0068] FIG. 4 shows the relationship between the resolution and the
depth of focus in a case where the example of FIG. 3B is applied to
an i-line stepper having a N.A. of 0.5, the calculations having
been made on assumption that the defocus in a range satisfying the
contrast of an optical image of 70% is within the depth of focus
(tolerance). Curve A in the drawing depicts the relationship
between the resolution and the depth of focus in the case of the
conventional method (.sigma.=0.5) using a conventional reticle,
while curve B depicts the relationship between the resolution and
the depth of focus in the case of the FIG. 3B example. If the limit
of the depth of focus of a stepper which may be practically
admitted is set to be equal to 1.5 micron, then the limit of
resolution is 0.52 micron in the case of the conventional method.
As compared, in the case of the FIG. 3B example, the resolution is
improved to about 0.4 micron. This corresponds to an improvement of
about 30% in terms of ratio, which is considerably large in the
field to which the present invention pertains. In effect, a
resolution of about 0.45 (k.sub.1 factor) is easily attainable.
[0069] The present invention in this aspect differs from what can
be called a "ring illumination method" wherein no effective light
source is formed at the pupil center, in that: on the pupil 1, the
effective light source has a peak neither on the x axis nor on the
y axis corresponding to the direction of the longitudinal pattern
feature or the lateral pattern feature of the fine pattern. This is
for the reason that, if the effective light source has a peak on
the x axis or the y axis, the contrast of an image degrades largely
and thus a large depth of focus is not obtainable. It has been
confirmed that, in respect to the image projection of a fine
pattern mainly consisting of longitudinal and lateral pattern
features, the present inv ntion assures formation of an image of
improved image quality as compared with that obtainable by the ring
illumination method.
[0070] The light quantity (light intensity) in each principal
portion of the effective light source of the present invention may
be either uniform or non-uniform such as a Gaussian
distribution.
[0071] FIGS. 5A, 5B and 5C show a second embodiment of the present
invention and illustrate a semiconductor device manufacturing
exposure apparatus arranged to project an image of a fine pattern
in accordance with an aspect of the invention.
[0072] Denoted in the drawings at 11 is a ultra-high pressure Hg
lamp having its light emitting portion disposed at a first focal
point of an elliptical mirror 12; denoted at 14, 21, 25 and 27 are
deflecting mirrors; and 1denoted at 15 is an exposure control
shutter. Denoted at 105 is a field lens; denoted at 16 is a
wavelength selecting interference filter; denoted at 17 is a cross
ND (neutral density) filter; denoted at 18 is a stop member having
a predetermined aperture; denoted at 19 is an optical integrator
having its light receiving surface disposed at a second focal point
of the elliptical mirror 12; and denoted at 20 and 22 are lenses of
a first imaging lens system (20, 22). Denoted at 23 is a half
mirror; denoted at 24 is a masking blade device having a
rectangular aperture for defining a region of illumination on a
reticle; denoted at 26 and 28 are lenses of a second imaging lens
system (26, 28); and denoted at 30 is a reticle having formed
thereon an integrated circuit pattern mainly consisting of
longitudinal and lateral pattern features (grid-like linear
features) of a minimum linewidth of about 2 microns. Denoted at 31
is a reduction projection lens system for projecting the circuit
pattern of the reticle 30 in a reduced scale of 1:5: denoted at 32
is a wafer coated with a resist; denoted at 33 is a wafer chuck for
holding the wafer 32 by attraction; and denoted at 34 is an X-Y
stage for supporting the wafer chuck 33 and being movable in x and
y directions of an X-Y coordinate system defined in the exposure
apparatus in relation to the X-Y stage. Denoted at 35 is a glass
plate having formed thereon a light blocking film with an aperture
35a at its center; denoted at 36 is a casing having an aperture
formed in its top surface: denoted at 37 is a photoelectric
converter provided in the casing 36; and denoted at 38 is a mirror
which is a component of a laser interferometer (not shown) for
measuring the amount of movement (x axis) of the wafer stage 34.
Denoted at 40 is a light blocking plate having a predetermined
aperture, which is disposed at a position optically equivalent to
the light receiving surface of the blade 24 so that, like the blade
24, the light beams emanating from the lenses of the optical
integrator 19 are overlapped one upon another on the plate 40.
Denoted at 41 is a condensing lens for collecting light passed
through the aperture of the light blocking plate 40; and denoted at
42 is a quartered detector.
[0073] As is well known in the art, usually a circuit pattern of a
reticle (mask) is designed with reference to orthogonal axes
(coordinates) so that longitudinal pattern features and lateral
pattern features of the pattern extend along these axes,
respectively. When such a reticle is introduced into a projection
exposure apparatus, the reticle is placed on a reticle stage with
reference to x and y axes of an X-Y coordinate system defined in
the exposure apparatus, with the orthogonal design axes of the
reticle placed exactly or substantially aligned with the x and y
axes of the exposure apparatus. Also, the the X-Y stage on which a
wafer is placed has an X-Y coordinate system with x and y axes
along which the X-Y stage is movable. These x and y axes of the X-Y
stage are designed to be exactly or substantially corresponds to
the x and y axes of the exposure apparatus. Thus, when a reticle is
placed in the exposure apparatus, usually the directions of
longitudinal and lateral pattern features of the reticle are placed
in exactly or substantially alignment with the x and y axes defined
in the exposure apparatus, respectively, or with the x and y axes
along which the X-Y stage moves.
[0074] A structural feature of this apparatus resides in the filter
17 and the stop member 18 disposed in front of the integrator 19.
As shown in FIG. 5B, the stop member 18 comprises an aperture stop
with a ring-like aperture, for blocking the light near the optical
axis of the apparatus, and it serves to define the size and shape
of an effective light source on the pupil plane of the projection
lens system 31. The center of the aperture is aligned with the
optical axis of the apparatus. On the other hand, as shown in FIG.
5C, the filter 17 comprises four ND filters which are disposed, as
a whole, in a cross-like shape. These four ND filters serve to
attenuate the intensity of light, projected to four zones in the
ring-like aperture of the stop member 18, by 10-100%. These four
zones correspond respectively to the portions on the pupil plane of
the projection lens system 31 which portions include four points on
the x and y axes corresponding respectively to the directions of
the longitudinal and lateral pattern features of the reticle 30. By
means of this filter 17, the light intensity at the central portion
of a secondary light source as formed at the light emitting surface
of the integrator 19 as well as the light intensity along the x and
y axes, intersecting with each other at the center of the secondary
light source, are attenuated and, as a result, the light intensity
of the effective light source along the x and y axes on the pupil
plane of the projection lens system 31 is attenuated.
[0075] The reticle 30 is held on a reticle stage, not shown. The
projection lens system 31 may be designed with respect to light of
i-line (wavelength 365 nm) as selected by the filter 16. The first
and second imaging lens systems (20, 22; 26, 28) are so set as to
place the light emitting surface of the integrator 19 and the pupil
plane of the projection lens system 31 in an optically conjugate
relationship, while the second imaging lens system (26, 28) is so
set as to place the edge of the aperture of the blade device 24 and
the circuit pattern of the reticle 30 in an optically conjugate
relationship. The blade device 24 comprises four light blocking
plates each having a knife-edge like end and each being movable
independently of the others so as to allow adjustment of the size
of the aperture in accordance with the size of the integrated
circuit pattern on the reticle 30. The position of each light
blocking plate is controlled in response to a signal from a
computer (not shown) provided for the overall control of the
apparatus, and the size of the aperture is optimized to the reticle
30 used. While not shown in the drawings, the exposure apparatus is
equipped with a reticle alignment scope to be used for aligning the
reticle 30 with respect to the exposure apparatus as well as an
off-axis alignment scope disposed beside the projection lens system
31, for aligning the wafer 32 with respect to the reticle 30.
[0076] The half mirror 23 serves to reflect a portion of light from
the integrator 19, and the reflected light is projected through the
aperture of the light blocking plate 40 and is collected by the
condensing lens 41 upon the quartered detector 42. The detector 42
has a light receiving surface disposed to be optically equivalent
to the pupil plane of the projection lens system 31, and a
ring-like effective light source as formed by the stop member 18 is
projected on this light receiving surface. Each detector section of
the detector 42 produces a signal corresponding to the intensity of
light impinging on the surface of that section. By integrating the
output signals of the sections of the detector 42, an integration
signal for the opening/closing control of the shutter 15 is
obtainable.
[0077] The components 35-37 disposed on the X-Y stag 34 provide a
measuring unit for examination of the performance of the
illumination system above the reticle 30. For the examination of
the illumination system, the X-Y stage 34 moves to a predetermined
position to place the measuring unit at a position just below the
projection lens system 31. In this measuring unit, light emanating
from the illumination system and reaching the image plane of the
projection lens system 31 is directed through the aperture 35a of
the glass plate 35 and the aperture of the casing 36 to the
photoelectric converter 37. The light receiving plane of the
aperture 35a is placed at the image plane position of the
projection lens system 31 and, if necessary, by using an unshown
focus detecting system (a sensor of well known type, for detecting
the level of the wafer 32 surface) as well as a measuring unit
provided in the X-Y stage 34, the level of the aperture 35a in the
direction of the optical axis of the apparatus may be adjusted. The
glass plate 35 is attached to the casing 36, and the casing 36 has
formed therein an aperture as described. In this example, the
measuring unit is so arranged that the aperture of the casing 36 is
displaceable to the aperture of the glass plate by a predetermined
amount. The aperture of the casing 36 is placed at such location at
which the N.A. at the image plane side of the projection lens
system 31 is large and also which is spaced sufficiently from the
image plane. As a result, at the light receiving plane of the
aperture of the casing 36, the same light distribution as provided
on the pupil plane of the projection lens system 31 is produced. In
this embodiment, such measuring unit is not used. How the measuring
unit is to be used will be described later with reference to an
embodiment to be described hereinafter.
[0078] In this embodiment: through the function of the filter 17
and the stop member 18, an effective light source having a
generally ring-like shape but having decreased intensity portions,
including four zones on the x and y axes corresponding to the
directions of the longitudinal and lateral pattern features of the
reticle 30, as compared with the intensity of the other portions,
is defined on the pupil plane of the projection lens system 31; by
means of the illumination system (11, 12, 14, 15, 105, 16, 17, 18,
19, 20, 21, 22, 23, 24, 25, 26, 27 and 28), the circuit pattern of
the reticle 30 is illuminated with uniform illuminance; and an
image of the circuit pattern is projected by the projection lens
system 31 upon the wafer 32, whereby the image of the circuit
pattern is transferred (printed) onto the resist of the wafer 32.
The effect of such projection exposure is as has been described
hereinbefore and, with light of i-line, a fine pattern of 0.4
micron can be recorded on the resist of the wafer 32 sharply and
stably.
[0079] While in this example the filter 17 and the stop member 18
are disposed in front of the integrator 19, they may be disposed
just after the integrator, particularly at a location which is
optically conjugate with the pupil plane of the projection lens
system 31. Further, a stop member 18 which is shown in FIG. 6B and
is used in a third embodiment, to be described later, may be used
in substitution for the filter 17 and the stop member 18.
[0080] FIGS. 6A and 6B show a third embodiment of the present
invention which is another example of semiconductor device
manufacturing projection exposure apparatus wherein an image of a
fine pattern is projected in accordance with a method of the
present invention.
[0081] In the drawings, corresponding elements or those elements
having corresponding functions as those in FIGS. 5A-5C, are denoted
at the same reference numerals. Comparing the apparatus of this
embodiment with that of FIGS. 5A-5C, the former differs from the
latter in that: as shown in FIG. 6B, the aperture of the stop
member 18 comprises four separate apertures; in place of the cross
ND filter, four separate filters 17a, 17b, 17c and 17d
corresponding respectively to the separate apertures of the stop
member 18 are used; and a pyramid-like prism 13 is inserted between
the mirrors 12 and 14.
[0082] In this embodiment, the output of the quartered detector 42
is used not only for the opening/closing control of the shutter 15
but also for a different purpose or purposes. Additionally, the
measuring unit (35-37) is used.
[0083] Now, referring mainly to the differences of the present
embodiment to the preceding embodiments, advantageous features of
the present embodiment will be explained.
[0084] If the integrator 19 is illuminated with light from the Hg
lamp 11, without using the prism 13, the filters 17a-17d and the
stop member 18, then a secondary light source having a light
quantity distribution, like a Gaussian distribution, with a high
peak at its center is formed on the light exit surface of the
integrator 19. Since the light exit surface of the integrator is
optically conjugate with the pupil plane of the projection lens
system 31, an effective light source having a peak of light
quantity distribution, at the center of the pupil, is formed on
this pupil plane. As described hereinbefore, the effective light
source to be used in this aspect of the present invention is one as
having a light quantity distribution with no peak at the pupil
center and, therefore, it is necessary to block the light impinging
on a portion about the center of the integrator 19. If, however,
the stop member 18 is disposed simply in front of the integrator
19, a large portion of the light from the Hg lamp is intercepted
and thus the loss of light quantity is large. In consideration
thereof, in the present embodiment the pyramid-like prism 13 is
interposed just after the elliptical mirror 12 to control the
illuminance distribution on the optical integrator 19.
[0085] The Hg lamp 11 is so disposed that its light emitting
portion coincides with the first focal point position of the
elliptical mirror 12, and the light emanating from the Hg lamp 11
and reflected by the elliptical mirror 12 is transformed by the
prism 13 into four light beams deflected in different directions.
These four light beams are reflected by the mirror 14 and reach the
position of the shutter 15. If the shutter 15 is open, the light
beams are incident on the filter 16. By this filter 16, the i-line
component is selected out of the emitted light spectrums of the Hg
lamp 11, for ensuring the best performance of the projection lens
system 31 for the projection of an image of the reticle 31 on a
resist (photosensitive layer) of the wafer 32.
[0086] The four light beams from the filter 16 pass through the
field lens 105 and then impinge on the filters 17a-17d,
respectively, which are important components of this embodiment.
These four filters serve as a correcting means for making the light
quantities of the four light beams substantially uniform to thereby
correct the symmetry in light quantity of four portions of the
effective light source as formed on light exit surface of the
integrator 19 and thus that as formed on the pupil plane of the
projection lens system 31. If adjustment of the light quantity
attenuating function of each filter is desired, different types of
ND filters may be prepared for each filter so that they may be used
selectively. Alternatively, each filter say be provided by an
interference filter and, by utilizing the band narrowness of the
interference filter, the interference filter may be tilted to
effect the adjustment.
[0087] The stop member 18 receives the four light beams from the
filters 17a-17d. As shown in FIG. 6B, the stop member 18 has four
circular apertures which correspond to the four light beams from
the filters 17a-17d, in a one-to-one relationship. Thus, the
integrator 19 is illuminated with four light beams from the four
apertures of the stop member 18, whereby an effective light source
such as shown in FIG. 3A and corresponding to the apertures of the
stop member 18, is formed on the light exit surface of the
integrator 19 and thus on the pupil plane of the projection lens
system 31.
[0088] Usually, the apertures of the stop member 18 each may have a
shape corresponding the outer configuration of each of small lenses
constituting the integrator 19. If, therefore, each small lens of
the integrator has a hexagonal sectional shape, each aperture may
be formed with a hexagonal shape like the sectional shape of the
small lens.
[0089] The light from the optical integrator 19 goes by way of the
lens 20, the mirror 21, the lens 22 and the half mirror 23 to the
blade device 24. Here, the light beams from the lenses of the
integrator 19 are superposed one upon another on the plane of the
blade device 24, whereby the blade device 24 is illuminated with
uniform illuminance. Also, the half mirror 23 serves to reflect a
portion of each light beam from each lens of the integrator 19, and
the light blocking plate 40 is illuminated with the reflected
light. Light passing through the aperture of the light blocking
plate 40 is collected by the lens 41 on the quartered detector
42.
[0090] The light passing through the aperture of the blade device
24 is directed by the mirror 25, the lens 26, the mirror 27 and the
lens 28 to the reticle 30. Since the aperture of the blade device
24 and the circuit pattern of the reticle 30 are in an optically
conjugate relationship, the light beams from the lenses of the
integrator 19 are superposed one upon another, also on the reticle
30. Thus, the reticle 30 is illuminated with uniform illuminance,
and an image of the circuit pattern of the reticle 30 is projected
by the projection lens system 31.
[0091] The detector sections of the quartered detector 42
correspond respectively to four separate portions of the effective
light source such as shown in FIG. 3A, and each section is able to
detect the light quantity in each corresponding portion
independently of the others. By combining the outputs of all the
sections, the opening/closing control for the shutter 15 can be
effected, as described hereinbefore. On the other hand, by mutually
comparing the outputs of the sections, any unbalance in proportion
of the light quantities at the respective portions of the effective
light source can be checked. Here, calibration among the detector
sections of the quartered detector 42 is effective for enhanced
reliability of the unbalance check. Such calibration will be
described later.
[0092] The shape of the effective light source formed on the pupil
plane of the apparatus corresponds, to the shape of the integrator
19. Since the integrator 19 itself is provided by a combination of
small lenses, in a microscopic sense the light quantity
distribution of the effective light source comprises a combination
of discrete ones each corresponding to the shape of each lens.
However, in a macroscopic sense, a light quantity distribution such
as shown in FIG. 3A is provided.
[0093] In this embodiment, the light quantity monitor means (23 and
40-42) and the measuring unit (35-37) are used to check the light
quantity distribution of the effective light source. To this end,
the X-Y stage 34 is moved to place the measuring unit (35-37) to a
position just below the projection lens system 31. In this
measuring unit, light emanating from the illumination system and
reaching the image plane of the projection lens system 31 is
directed through the aperture 35a of the glass plate 35 and the
aperture of the casing 36 to the photoelectric converter 37. The
light receiving plane of the aperture 35a is placed at the image
plane position of the projection lens system 31. The glass plate 35
is attached to the casing 36 and, as described, the casing 36 has
an aperture at a center thereof. In this example, the measuring
unit is so arranged that the aperture of the casing 36 is
displaceable to the aperture of the glass plate 35 by a
predetermined amount. When illumination is provided with the
illumination system of this embodiment, on the top of the casing
36, four portions of an effective light source such as shown in
FIG. 3A are provided. The size and shape of the aperture of the
casing 36 can be changed, as the aperture of the blade device 24.
By changing the size and/or the shape of the aperture by means of a
driving system (not shown), it is possible to detect each of the
four portions of the effective light source independently of the
others or, alternatively, it is possible to detect the four
portions of the effective light source at once. On the other hand,
the photoelectric converter 37 has a light receiving portion of an
area sufficient to receive all the light passing through the
aperture 35a of the glass plate 35. If the area of the light
receiving portion of the photoelectric converter 37 is too large
and the response characteristic of the electrical system degrades,
a condensing lens may be inserted between the glass plate 35 and
the photoelectric converter 37 to collect the light from the
aperture 35a of the glass plate 35. This is effective to reduce the
area of the light receiving portion of the photoelectric converter
37 to thereby improve the response characteristic. Further, if
desired, the uniformness of the illuminance on the image plane can
be measured by moving the X-Y stage 34 along the image plane while
holding the aperture of the casing 36 in a state for concurrent
detection of all the four portions of the effective light
source.
[0094] The result of measurement of the light quantity (intensity)
in each portion of the effective light source obtained through
cooperation of the movement of the casing 36, is compared with an
output of corresponding one of the detector sections of the
quartered detector 42 at the illumination system side. Namely, the
photoelectric converter 37 at the X-Y stage 34 side is used as a
reference detector for calibration of the output of the quartered
detector 42. This allows stable monitoring any change with time of
the effective light source. Then, any unbalance in light quantity
of the portions of the effective light source can be detected by
means of the quartered detector 42 or the photoelectric converter
37, and light quantity matching of the portions of the effective
light source can be done by using the filters 17a-17d.
[0095] In this embodiment: through the function of the stop member
18 shown in FIG. 6B, an effective light source not having any peak
of light quantity distribution on the x or y axis, corresponding to
the directions of the longitudinal and lateral pattern features of
the reticle 30, or at the pupil center (optical axis), is defined
by zero-th order light on the pupil plane of the projection lens
system 31, while on the other hand, by means of the illumination
system (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25,
26, 27 and 28), the circuit pattern of the reticle 30 is
illuminated with uniform illuminance. Thus, an image of the circuit
pattern is projected by the projection lens system 31 upon the
wafer 32, whereby the image of the circuit pattern is transferred
to the resist of the wafer 32. The effect of such projection
exposure is as has been described hereinbefore with reference to
FIGS. 3 and 4 and, with the use of light of i-line, a fine pattern
of 0.4 micron can be recorded on the resist of the wafer 32 sharply
and stably.
[0096] FIG. 7 is a fragmentary schematic view of a fourth
embodiment of the present invention, which is an improved form of
the semiconductor device manufacturing projection exposure
apparatus of FIG. 6. The elements of FIG. 7 corresponding to the
FIG. 6 embodiment are denoted by the same reference numerals as of
FIG. 6.
[0097] In the drawing, denoted at 11 is a ultra-high pressure Hg
lamp, and denoted at 12 is an elliptical mirror. In this example,
light emanating from the elliptical mirror 12 is divided by a
combination of beam splitters (51-53). More specifically, in order
to provide an effective light source,having four portions such as
shown in FIG. 3A, the light emanating from the elliptical mirror 12
is divided sequentially by means of a first beam splitter 51 and a
second beam splitter 53. Denoted at 52 is a deflecting mirror for
deflecting the light path. The second beam splitter 53 is disposed
obliquely across the light paths of the two light beams as divided
by the first beam splitter 51, and it serves to divide each of the
two light beams advancing along the sheet of the drawing and to
deflect a portion of each of the two light beams in a direction
perpendicular to the sheet of the drawing. The remaining portion of
each of the two light beams, not deflected, goes along the sheet of
the drawing, as illustrated. A mirror optical system (not shown) is
disposed on the path of that portion of light as deflected by the
second beam splitter 53, and it serves to reflect and direct that
portion of light along a path parallel to the path of light not
deflected by the second beam splitter. In this manner, by means of
the beam splitters 51 and 53 and the mirror 52 as well as the
unshown mirror optical system, the light path is divided into four
light paths. These light paths are then combined so as to form a
secondary light source with a light distribution such as shown in
FIG. 3A, on the light exit surface of the integrator 19. As a
result, on the pupil plane of the projection lens system 31, an
effective light source such as shown in FIG. 3A is formed.
[0098] On the two divided light paths which are present on the
sheet of the drawing, relay leases 61a and 62a are disposed,
respectively. These relay lenses 61a and 62a serves to collect the
light beams, advancing along the respective paths, on the
integrator 19. Since the insertion of the first beam splitter
causes a difference in optical path length between these two light
paths, the relay lenses 61a and 61b are slightly different from
each other in respect to the structure and the focal length. This
is also the case with an additional pair of relay lenses (not
shown) which are disposed on the pair of light paths, not shown in
the drawing.
[0099] Denoted at 63 is a shutter which can be controlled
(opened/closed) for each of the four light beams provided by the
beam splitters 51 and 53. Denoted at 16a and 16b are wavelength
selecting filters disposed on the two divided light paths,
respectively, which are present on the sheet of the drawing. While
not shown in the drawing, similar filters are disposed on the two
light paths which are not on the sheet of the drawing. These
filters each serves to extract the i-line component out of the
light from the Hg lamp, as the filter 16 of the preceding
embodiment. Denoted at 17a and 17b are filters disposed on the two
divided paths in the sheet of the drawing, each for adjusting the
light quantity in a corresponding portion of the effective light
source. Similar filters are disposed on the two light paths not
includ d in the sheet of the drawing. These filters have a similar
function as of the filters 17a-17d of the preceding embodiment.
[0100] In this embodiment, the light path to the integrator is
divided into four and, for this reason, the integrator is provided
by a combination of four small integrators. Because of the
relationship of superposition of light paths, only two integrators
19a and 19b are illustrated in the drawing. Since the structure
after the integrators is similar to that of the preceding
embodiment, further description will be omitted for simplicity.
[0101] FIG. 8 is a fragmentary schematic view of a fifth embodiment
of the present invention, showing a semiconductor device
manufacturing projection exposure apparatus wherein an image of a
fine pattern is projected in accordance with a method of the
present invention.
[0102] In the apparatus of this embodiment, the position of an
effective light source is changed with time to thereby form an
equivalent effective light source as of that shown in FIG. 3A is
formed on the pupil plane, and the image of a circuit pattern is
projected. In FIG. 8, the elements corresponding to those of the
preceding embodiments are denoted by the same reference numerals.
Thus, denoted at 11 is a ultra-high pressure Hg lamp; denoted at 12
is an elliptical mirror; denoted at 14 is a deflecting mirror;
denoted at 15 is a shutter; denoted at 16 is a wavelength selecting
filter; and denoted at 19 is an optical integrator. The unshown
portion, after the projection lens system 31, has the same
structure as of the preceding embodiments.
[0103] An important feature of this embodiment resides in that a
flat parallel plate 71 which is movable with time is disposed after
the integrator 19. The parallel plate 71 is disposed obliquely to
the optical axis of the illumination optical system, and it is
swingable to change the angle with respect to the optical axis, as
illustrated, to shift the optical axis. This means that, if the
integrator 19 is observed through the flat parallel plate 71, from
the reticle 30 side, the integrator 19 appears moving up and down
or left and right with the swinging movement of the parallel plate
71. In this example, the parallel plate 71 is so supported that it
can be moved also rotationally about the optical axis. Therefore,
by rotationally moving the parallel plate 71 while retaining its
inclination of a predetermined angle to the optical axis, upon the
pupil plane of the projection lens system 31 it is possible to
place a single effective light source at a desired position on a
circumference of a certain radius, spaced from the optical axis
(pupil center). For actual exposure operation, the parallel plate
71 is moved and, when the single effective light source comes to a
d sired position, the attitude of the parallel plate is fixed and
the exposure is effected for a predetermined time period. Such
operation is executed four times so as to provide a single light
source at each of the four portions of the effective light source
as shown in FIG. 3A and, then, the exposure of one shot area (of
the wafer) is completed.
[0104] In this embodiment, the Hg lamp 11 is used as a light
source. If a light source of pulse emission type such as an excimer
laser is used, the parallel plate 71 may be moved uninterruptedly
and the exposure control may be such that the light source is
energized when the parallel plate 71 comes to a predetermined
position. In such case, conveniently an excimer laser is used as a
light source and the period of rotation of the parallel plate 71
about the optical axis may be selected to be matched with the
emission repetition frequency of the excimer laser. As an example,
if a used laser emits at 200 Hz, then efficient exposure is
attainable by so controlling the number of revolutions of the
parallel plate that the effective light source displaces to an
adjacent quadrant in response to each light emission.
[0105] Where the system is arranged so that a single effective
light source displaces with time, the effective light source
portions (distributions) as defined in different portions of the
pupil are provided by the light energy from one and the same light
source and, therefore, it is easy to set, at the same intensity,
the effective light source portions to be separately defined on the
pupil plane. This is the very reason why the filter 17, used in the
preceding embodiments for correction of light quantity of the
effective light source, is not provided.
[0106] Referring back to the drawing, the light passing through the
parallel plate 71 goes by way of a lens 72, a half mirror 73 and a
lens 74, and it illuminates the reticle 30 uniformly. Since the
first imaging optical system used in the preceding embodiments is
not used in this embodiment, a blade device 74 separate from the
blade device 24 of the preceding embodiments is provided in the
neighbourhood of the reticle 30. The blade device 74 has a similar
structure and a similar function as of those of the blade device
24, and the size of the aperture thereof can be changed in
accordance with the size of the circuit pattern formed on the
reticle 30.
[0107] The mirror 73 serves to reflect almost all the portion of
the light inputted thereto, but it also serves to transmit and
direct a portion of the input light to a light quantity monitor,
provided for exposure control. Denoted at 35 is a condenser lens,
and denoted at 76 is a pinhole plate which is disposed at a
position optically equivalent to that of the reticle 30. Light from
the mirror 73 is collected by the condenser lens 75 upon the
pinhole plate 76, and light passing through the pinhole plate 76 is
received by a photodetector 77. The photodetector 77 produces a
signal corresponding to the intensity of light impinging on it. On
the basis of this signal, an unshown computer of the apparatus
controls the opening/closing of the shutter 15. It is to be noted
here that, since in this embodiment it is not necessary to monitor
the light quantity ratio of the portions of the effective light
source, the photodetector 77 may be of a type other than a
quartered detector.
[0108] In this embodiment: while an effective light source such as
shown in FIG. 3A is defined on the pupil plane of the projection
lens system 31, the circuit pattern of the reticle is illuminated
with uniform illuminance. Thus, an image of the circuit pattern of
is projected by the projection lens system 31, whereby the image of
the circuit pattern is transferred to the resist of the wafer. The
effect of such projection exposure is as has been described
hereinbefore, and a fine pattern of 0.4 micron can be recorded on
the resist of the wafer 32 sharply and stably.
[0109] FIG. 9 is a fragmentary schematic view of a sixth embodiment
of the present inv ntion, showing a semiconductor device
manufacturing projection exposure apparatus wherein an image of a
fine pattern is projected in accordance with a method of the
present invention.
[0110] In this embodiment, a KrF excimer laser 81 (center
wavelength 248.4 nm and bandwidth 0.03-0.05 nm) is used as a light
source. Important features reside in that: since the excimer laser
81 is of pulse emission type, no shutter is provided and the
exposure control is done through the actuation control of the laser
itself; and, since the laser itself is equipped with a filter and
the bandwidth of laser light is narrowed, no wavelength selecting
filter is provided. The beam splitters 51 and 53, the mirror 52,
the filter 17 and the integrator 19 have a similar function as
those of the embodiment shown in FIG. 7. The portion after the
integrator 19 is of a similar structure as shown in FIG. 6A, except
for that a projection lens system (not shown) is provided by a lens
assembly designed with respect to a wavelength 248.4 nm and
consisting of silica (main component).
[0111] In the excimer laser 81, the laser light has high coherency
and, therefore, it is necessary to suppress production of a speckle
pattern. To this end, in this embodiment, an incoherency applying
unit 82 is provided at a position after the light is divided by the
beam splitter group (51-53). While many proposals have been made as
to how to remove the speckle in an illumination optical system
using an excimer laser, the provision of an effective light source
in accordance with the present invention is essentially compatible
to them, and various known methods may be used. In consideration of
this, details of the unit 82 are omitted here.
[0112] In this embodiment: while an effective light source such as
shown in FIG. 3A is defined on the pupil plane of the projection
lens system 31 through the illustrated illumination optical system
(17, 19, 51, 52, 53 and 82), the circuit pattern of the reticle is
illuminated with uniform illuminance. Thus, an image of the circuit
pattern of is projected by the projection lens system 31, whereby
the image of the circuit pattern is transferred to the resist of
the wafer. The effect of such projection exposure is as has been
described hereinbefore, and a fine pattern of 0.3-0.4 micron can be
recorded on the resist of the wafer 32 sharply and stably.
[0113] FIG. 10 is a fragmentary schematic view of a seventh
embodiment of the present invention, which is an improved form of
the apparatus of the sixth embodiment shown in FIG. 9.
[0114] In this embodiment, laser light from a laser 81 is divided
into four light beams by a reflection type pyramid-like prism.
While in the apparatus of FIG. 6 a transmission type pyramid-like
prism 13 is used for the light division, the same effect is
attainable by using reflection type one. As a matter of course, the
structure of this aspect of the present invention can be realized
by using a ultra-high pressure Hg lamp but, in this example, a KrF
excimer laser is used as a light source. The laser light emanating
from the laser 81 is transformed into an appropriate beam diameter
by means of an afocal beam converter 91 and, after this, it enters
a pyramid-like prism 92. The arrangement of the pyramid-like prism
is so set that four reflection surfaces thereof are oriented to
define, as a result, an effective light source such as shown in
FIG. 3B, at the pupil position of the projection lens system (not
shown). Denoted at 93 are mirrors for deflecting the lights as
divided and reflected by the reflection surfaces of the prism 92.
The portion after the mirrors 93 has a similar structure as of the
apparatus of FIG. 9, whereas the portion after the integrator 19
has a similar structure as of FIG. 6A, except for that the unshown
projection lens system is provided by a lens assembly designed with
respect to a wavelength 248.4 nm and consisting of silica (main
component).
[0115] Also in this embodiment: while an effective light source
such as shown in FIG. 3A is defined on the pupil plane of the
projection lens system 31 through the illustrated illumination
optical system (17, 19, 91, 92, 93 and 82), the circuit pattern of
the reticle is illuminated with uniform illuminance. Thus, an image
of the circuit pattern of is projected by the projection lens
system 31, whereby the image of the circuit pattern is transferred
to the resist of the wafer. The effect of such projection exposure
is as has been described hereinbefore, and a fine pattern of
0.3-0.4 micron can be recorded on the resist of the wafer 32
sharply and stably.
[0116] FIG. 11 is a fragmentary schematic view of an eighth
embodiment of the present invention, showing another form of
semiconductor device manufacturing projection exposure apparatus
wherein an image of a fine pattern is projected in accordance with
a method of the present invention.
[0117] In this embodiment, an illumination system using a bundle of
fibers 101 is shown. The fiber bundle 101 has a light entrance
surface disposed at a position whereat light from a ultra-high
pressure Hg lamp 11 is focused by an elliptical mirror 12. Light
beams are propagated through the fibers and are directed to the
light entrance surfaces of the integrators 19. The end portion of
the fiber bundle remote from the ultra-high pressure Hg lamp 11,
that is, the end portion at the light exit surface thereof, is
branched into four bundles corresponding respectively to the
portions of the effective light source shown in FIG. 3A. Filters 17
are disposed at the exits of the fiber bundles, respectively, for
adjustment of light quantities in the portion of the effective
light source. The optical arrangement of the remaining portion of
the apparatus is provided by the same structure as that of the FIG.
8 embodiment. However, as a photodetector for the light quantity
monitoring, a quartered detector 102 is used to detect the balance
of light quantities from the fiber bundles (i.e. four portions of
the secondary light source and thus four portions of the effective
light source). The detector sections of the quartered detector 102
correspond to the exits of the four integrators 19,
respectively.
[0118] In this embodiment: while an effective light source such as
shown in FIG. 3A is defined on the pupil plane of the projection
lens system 31, the circuit pattern of the reticle is illuminated
with uniform illuminance; and an image of the circuit pattern of is
projected by the projection lens system 31, whereby the image of
the circuit pattern is transferred to the resist of the wafer. The
effect of such projection exposure is as has been described
hereinbefore, and a fine pattern of 0.4 micron can be recorded on
the resist of the wafer 32 sharply and stably.
[0119] FIG. 12 is a fragmentary schematic view of a ninth
embodiment of the present invention, showing another example of
semiconductor device manufacturing projection exposure apparatus
wherein an image of a fine pattern is projected in accordance with
a method of the present invention.
[0120] In this embodiment, an illumination system is provided by
using a plurality of light sources. In this example, ultra-high
pressure Hg lamps 11a and 11b are used. However, it is a possible
alternative to use an excimer laser and to construct a laser
optical system, that is, an optical system for a parallel beam of
small divergence angle.
[0121] While not shown in the drawing because of superposition,
four ultra-high pressure Hg lamps are used in this embodiment.
Light beams from these four Hg lamps enter a concave lens 103. Then
the light passes through a wavelength selecting interference filter
16 and four filters, for the adjustment of light quantities in the
portions of the effective light source, and is received by the
integrators 19. The optical arrangement after the integrators 19 is
similar to that of the FIG. 11 apparatus, and an effective light
source such as shown in FIG. 3A is formed on the pupil plane of the
projection lens system 31. Thus, also in this embodiment, an image
of the circuit pattern of the reticle 31 is projected on the wafer,
whereby the image of the circuit pattern of the reticle is
transferred to a resist of the wafer. The effect of such projection
exposure is as has been described hereinbefore, an a fine pattern
of 0.4 micron can be recorded on the resist of the wafer, sharply
and stably.
[0122] In the semiconductor device manufacturing projection
exposure apparatus having been described in the foregoing, the
arrangement of the effective light source on the pupil plane is
fixed. However, as described in the introductory portion of the
Specification the parameter p representing the center position of
each portion of the effective light source and the parameter q
representing the radius of each portion or the radius of a circle
circumscribing it as well as the shape of each portion of the
effective light source are to be optimized in accordance with a
circuit pattern which is the subject of the projection exposure. In
consideration thereof, it is desirable to arrange the system so
that in each embodiment the parameters p and q, for example, are
made changeable. By way of an example, in an embodiment which uses
the stop member 18, a stop member having a variable aperture shape
may be used therefor or, alternatively, different stop members
having apertures of different shapes may be prepared.
[0123] Further, th apparatuses described hereinbefore are those for
the manufacture of semiconductor devices. However, the invention is
not limited to the projection of an image of an integrated circuit
pattern. That is, the invention is applicable to many cases wherein
an image of an article having a fine pattern mainly consisting of
longitudinal and lateral pattern features, is to be projected
through an optical system.
[0124] Further, while in the apparatuses described hereinbefore the
image projecting optical system comprises a lens system, the
invention is applicable also to a case where a mirror system is
used therefor.
[0125] Still further, while the apparatuses described hereinbefore
uses light of i-line or laser light of wavelength 248.4 nm for the
image projection, the applicability of the present invention does
not depend on the wavelength. Thus, as an example, the invention is
applicable to a semiconductor device manufacturing projection
exposure apparatus which uses light of g-line (436 nm).
[0126] As described in the foregoing, through formation of a
specific effective light source on a pupil of an image projection
optical system, an image of a fine pattern having a very high
frequency can be projected with a similar resolution as attainable
with a phase shift mask and, conveniently, with a simple process as
compared with use of the phase shift mask.
[0127] As described, the present invention has paid a particular
note to the necessary resolution for and the directionality of a
pattern of a semiconductor integrated circuit and proposes
selection of an optimum illumination method, best suited to the
spatial frequency and the directionality of that pattern.
[0128] Some embodiments to be described below have an important
feature that: in order to meet the semiconductor integrated circuit
manufacturing processes including steps of a maximum number not
less that 20 (twenty), an illumination device has a conventional
illumination system and a high-resolution illumination system which
can be easily interchanged.
[0129] FIG. 13 is a schematic view of a main portion of an
embodiment of the present invention. Denoted at 11 is a light
source such as a ultra-high pressure Hg lamp, for example, having
its light emitting point disposed adjacent to a first focal point
of an elliptical mirror 12. The light emanating from the lamp 11 is
collected by the elliptical mirror 12. Denoted at 14 is a mirror
for deflecting the light path, and denoted at 15 is a shutter for
limiting the quantity of light passing therethrough. Denoted at 150
is a relay lens system which serves to collect the light from the
Hg lamp 11 on an optical integrator 19, through a wavelength
selecting filter 16. The optical integrator 19 is provided by small
lenses arrayed two-dimensionally, to be described later.
[0130] In this embodiment, the optical integrator 19 may be
illuminated in accordance with either a "critical illumination
method" or a "Kohler illumination method". Also, it may be that the
light exit portion of the elliptical mirror is imaged on the
optical integrator 19. The wavelength selecting filter 16 serves to
select and pass light of a necessary wavelength component or
components (e.g. i-line or g-line), out of the wavelength
components of the light from the Hg lamp 11.
[0131] Denoted at 12 is a stop shape adjusting member (selecting
means for selecting intensity distribution of the secondary light
source), for adjusting the shape of a stop, and it comprises a
plurality of stops provided in a turret arrangement. The adjusting
member is disposed after the optical integrator. more particularly,
adjacent to the light exit surface 19b of the integrator 19. The
stop shape adjusting member 18 serves to select predetermined ones
of small lenses, constituting the optical integrator 19, in
accordance with the shape of the integrator 19. Namely, in this
embodiment, by using the stop shape adjusting member 18, an
illumination method suitable for the shape of a pattern of a
semiconductor integrated circuit to be exposed (to be described
later) is selected. Details of the selection of small lenses will
be described later.
[0132] Denoted at 21 is a mirror for deflecting the light path, and
denoted at 122 is a lens system for collecting the light passing
through the adjusting member 18. The lens system 122 plays an
important role for the control of uniformness of illumination.
Denoted at 23 is a half mirror for dividing the light from the lens
system 122 into a transmitted light and a reflected light. Of these
lights, the light reflected by the half mirror 23 is directed
through a lens 138 and a pinhole plate 40 to a photodetector 42.
The pinhole plate 40 is disposed at a position optically equivalent
to that of a reticle 30 having a pattern to be exposed (printed),
and the light passing the pinhole plate is detected by the
photodetector 42 for the control of the amount of exposure (based
on control of the shutter 15).
[0133] Denoted at 24 is a masking mechanical blade device, and the
position thereof is adjusted by means of a driving system (not
shown) in accordance with the size of a pattern of the reticle 30,
to be exposed. Denoted at 25 ia a mirror, denoted at 26 is a lens
system, denoted at 27 is a mirror, and denoted at 28 is a lens
system all of which serve to illuminate the reticle 30, placed on a
reticle stage 137, with the light from the Hg lamp.
[0134] Denoted at 31 is a projection optical system for projecting
and imaging the pattern of the reticle 30 upon a wafer 32. The
wafer 32 is attracted to and held by a wafer chuck 33 and, also, it
is placed on an X-Y stage 34 whose position is controlled by means
bf a laser interferometer 136 and an unshown controller. Denoted at
38 is a mirror mounted on the X-Y stage 34, for reflecting light
from the laser interferometer.
[0135] In this embodiment, through the adjusting member 18, a
secondary light source is formed at the light exit surface 19b side
of the optical integrator 19, and the light exit surface of the
integrator 19 is disposed in an optically conjugate relationship
with the pupil plane 31a of the projection optical system 31
through the elements 21, 122, 25, 26, 27 and 28. Thus, an effective
light source image corresponding to the secondary light source is
formed on the pupil plane 31a of the projection optical system
31.
[0136] Referring now to FIG. 14, the relationship between the pupil
plane 31 of the projection optical system 31 and the light exit
surface 19b of the optical integrator 19 will be explained. The
shape of the effective light source as formed on the pupil plane
31a of the projection optical system 31 corresponds to the shape of
the optical integrator 19. FIG. 14 shows this, and in the drawing
the shape of the effective light source image 19c of the light exit
surface 19b formed on the pupil plane 31a of the projection optical
system 31 is illustrated superposedly. For standardization, the
diameter of the pupil 31a of the projection optical system is taken
as 1.0 and, in this pupil 31a, the light exit surfaces of the small
lenses constituting the optical integrator 19 are imaged to provide
the effective light source image 19c. In this embodiment, each
small lens of the optical integrator 19 has a square shape.
[0137] Here, the orthogonal axes which are the major directions to
be used in designing a pattern of a semiconductor integrated
circuit, are taken on x and y axes. These directions correspond to
the major directions of the pattern formed on the reticle 30,
respectively, and also substantially correspond to the directions
(longitudinal and lateral sides) of the outer configuration of the
reticle 30 having a square shape. As described and as is well known
in the art, usually the orthogonal axes used in the pattern
designing correspond to x and y axes defined in the projection
exposure apparatus with respect to which a reticle is to be placed
on the reticle stage. Also, the x and y axes correspond to x and y
axes along which the X-Y stage 34 is moved.
[0138] The high-resolution illumination system shows its best
performance particularly when the k.sub.1 factor as described has a
level near 0.5. In consideration of this, in this embodiment,
through the restriction by the adjusting member 18, only those
light beams passing through particular ones of small lenses of the
optical integrator 19, as selected in accordance with the shape of
the pattern on the reticle 30 surface, are used for the
illumination of the reticle 30. More specifically, the selection of
small lenses is so made as to assure that the light passes those
regions of the pupil plane 31a of the projection optical system 31,
other than the central region thereof.
[0139] FIGS. 15A and 15B are schematic views of the pupil plane
31a, respectively, each showing the result of selection of those
light beams passing particular ones of the small lenses of the
optical integrator 19 made by the restriction by the adjusting
member 18. In each of these drawing, the painted area corresponds
to the light blocking region while the non-painted areas correspond
to the regions through which the light passes.
[0140] FIG. 15A shows an effective light source image on the pupil
plane 31a to be defined in an occasion where, for a pattern, the
directions with respect to which the resolution is required
correspond to the x and y axes, respectively. Assuming now that the
circle representing the pupil plane 31a is expressed by:
x.sup.2+y.sup.2=1,
[0141] the following four circles are considered:
(x-1).sup.2+y.sup.2=1
x.sup.2+(y-1).sup.21
(x+1).sup.2+y.sup.2=1
x.sup.2+(y+1).sup.2=1
[0142] By these four circles, the circle representing the pupil
plane 31a is divided into eight regions 101-108.
[0143] In this embodiment, an illumination system having high
resolution and large depth of focus in respect to the x and y
directions, can be assured by preferentially selecting a group of
small lenses present in even-numbered regions, namely, the regions
102, 104, 106 and 108, so as to pass the light through the selected
small lenses. Thus, as an example, a stop 18b or 18c illustrated in
FIG. 16 is selected and the projection exposure is effected. Those
small lenses around the origin (x=0, y=0) have a large effect in
enhancement of depth of focus chiefly with regard to a pattern of a
relatively wide linewidth and, therefore, whether such small lenses
are to be selected or not is a matter of choice which may be
determined in accordance with a pattern to be printed.
[0144] In the exampl of FIG. 15A, those small lenses around the
center are excluded and, thus, the formed effective light source is
substantially equivalent to that shown in FIG. 3A. It is to be
noted here that the outside portion of the optical integrator 19 is
blocked, against light, within the illumination system by means of
an integrator holding means (not shown). Also, in FIGS. 15A and
15B; for better understanding of the relationship between the small
lenses and the pupil plane 31a of the projection optical system 31,
the pupil plane 31a and the effective light source image 19c of the
optical integrator 19 are illustrated superposedly.
[0145] FIG. 15B shows an example of restriction in an occasion
where high resolution is required with regard to a pattern with
features extending in .+-.45 deg. directions. Like the case of FIG.
15A, the relationship between the pupil 31a and the effective light
source image 19c of the optical integrator 19 is illustrated. For a
.+-. pattern, under the same condition, the following four circles
may be drawn superposedly on the pupil 31a:
(x-1/{square root}{square root over (2)}).sup.2+(y-1/{square
root}{square root over (2)}).sup.2=1
(x+1/{square root}{square root over (2)}).sup.2+(y-1/{square
root}{square root over (2)}).sup.2=1
(x+1/{square root}{square root over (2)}).sup.2+(y+1/{square
root}{square root over (2)}).sup.2=1
(x-1/{square root}{square root over (2)}).sup.2+(y+1/{square
root}{square root over (2)}).sup.2=1,
[0146] and, like the example of FIG. 15A, the pupil 31a is divided
into eight regions 111-118. In this occasion, those which are
contributable to the enhancement of resolution of a pattern with
features of .+-.45 deg. are odd-numbered regions, that is, the
regions 111, 113, 115 and 117. By preferentially selecting those
small lenses of the optical integrator which are present in these
regions, for the pattern with features of .+-.45 deg. and a k.sub.1
factor of a level of about 0.5, the depth of focus increases
considerably. Thus, as an example, a stop 18d such as shown in FIG.
16 is selected and the projection exposure is effected.
[0147] FIG. 16 is a schematic view of interchangeable stops 18a-18d
of the adjusting member 18. As illustrated, a turret type
interchanging structure is used. The first stop 18a is used when a
pattern which is not very fine, as having a k.sub.1 factor of not
less than 1, is to be printed. The first stop 18a has the same
structure as in a conventional illumination system known in the
art, and which serves to block, against light, the outer portion of
small lens group of the optical integrator 19. The stops 18a-18d
are those added in accordance with the present invention.
[0148] Generally, in an illumination system for high resolution, an
advantageous result is obtainable to a high spatial frequency when
a region of the optical integrator which is, on the pupil plane,
outside of the size as required in the conventional type
illumination system, is also used. As an example, in the
conventional type illumination system it may be preferable to use
those small lenses which are present within a radius of 0.5;
whereas in an illumination system for high resolution, although
small lenses around the center are not used, there is a case
wherein those small lenses present within a circle of a maximum
radius of 0.75 on the pupil plane (the radius of the pupil plane is
1) should preferably be used.
[0149] For this reason, the size of the optical integrator 19 as
well as the effective diameter of the illumination system, for
example, should preferably determined while taking into account
both the conventional type and the high-resolution type. Also, it
is preferable that the light intensity distribution at the light
entrance surface 19a of the optical integrator 19 has a sufficient
size such that it functions sufficiently even if a stop 18 is
inserted. The possibility of blocking the outer small lenses with
the stop 18a is because of the reason described above. Thus, as an
example, there may be a case wherein, although at the optical
integrator 19 side a maximum radius 0.75 is prepared, the stop 18a
choices regions within a radius of 0.5.
[0150] By determining the shape of a stop in consideration of the
specificness of a pattern of a semiconductor integrated circuit to
be printed, as described, it is possible to arrange the exposure
apparatus best suited for that pattern. The selection of stops may
be made automatically in response to a signal applied from a
computer, provided for overall control of the exposure apparatus.
Illustrated in FIG. 16 is an example of stop shape adjusting member
18 formed with such stops. In this example, any one of four stops
18a-18d can be selected. As a matter of course, the number of stops
may be increased easily.
[0151] There is a case wherein the non-uniformness in illumination
changes with the selection of a stop. In consideration of this, in
this embodiment, such non-uniformness in illuminance can be finely
adjusted by adjusting the lens system 122. Such fine adjustment can
be done by adjusting the spacing between constituent lenses of the
lens system 122 in the direction of the optical axis. Denoted at
151 is a driving mechanism for displacing one or more constituent
lenses of the lens system 122. The adjustment of the lens system
122 may be effected in accordance with the selection of the stop.
If desired, the lens system 122 as a whole may be replaced by
another, in response the change of the stop shape. In that
occasion, different lens systems each corresponding to the lens
system 122 may be prepared and, in a turret fashion, they may be
interchanged in accordance with the selection of the stop
shape.
[0152] In this embodiment, as described, the shape of stop is
changed so as to select an illumination system suited to the
characteristics of the pattern of a semiconductor integrated
circuit. Also, an important feature of this embodiment resides in
that, when an illumination system for high resolution is set, in
general form of the effective light source, the light source itself
is divided into four regions. An important factor in this case is
the balance of intensity in these four regions. However, in the
arrangement shown in FIG. 13, there is a case wherein the shadow of
a cable to the Hg lamp 11 adversely affects this balance.
Therefore, in an illumination system for high resolution wherein
the stop means shown in FIG. 15A or 15B is used, it is desirable to
set the arrangement so that the linear zone corresponding to the
shadow of the cable coincides with those small lenses of the
optical integrator which are blocked against light.
[0153] More specifically, in the FIG. 15A example, preferably the
cable 11a should be extended in the x or y dir ctions, such as
shown in FIG. 17A. In the FIG. 15B example, on the other hand,
preferably the cable 11a should be extend d at an angle of .+-.45
deg. with respect to the x and y directions. In this embodiment,
preferably the direction of extension of the cable of the Hg lamp
may be changed in response to the change of the stop.
[0154] FIG. 18 is a schematic view of a main portion of another
embodiment of the present invention. The system of FIG. 18 is the
same as that of FIG. 13 in respect to the projection exposure of a
pattern which is not very fine, as having a k.sub.1 factor not less
than 1. On the other hand, for the projection exposure of a fine
pattern with a k.sub.1 factor about 0.5, a stop such as shown in
FIG. 15A or 15B is inserted in accordance with the directionality
of the pattern, as described in the foregoing. In this case,
however, since the system of FIG. 13 simply blocks the light, the
efficiency of use of the light from the Hg lamp 11 decreases. In
consideration of this, the embodiment of FIG. 18 is arranged to
assure effective use of light.
[0155] To this end, in the system of FIG. 18, as am important
feature a pyramid-like prism 61 can be inserted between the
elliptical mirror 12 and the mirror 14. The light beam produced
from a portion near an electrode of the ultra-high pressure Hg lamp
11 is reflect d by the elliptical mirror 12, and then it enters the
pyramid-like prism 61 whereby four light source images,
corresponding to the four surfaces constituting the prism, are
formed on a plane including a second focal point of the elliptical
mirror 12. Lens system 162 can be inserted in place of the lens
system 150, to direct the light so that the four light source
images correspond respectively to four separate light transmitting
portions of an inserted stop.
[0156] In this embodiment, the pyramid-like prism to be inserted
should be placed with specific orientation. For a stop of a shape
such as shown in FIG. 15A, each ridge between adjacent surfaces of
the prism 61 should be placed in alignment with the x or y
direction (FIG. 19A). For correction of a change in the imaging
relationship of the optical system due to the insertion of the
prism, in the system of FIG. 18 the lens system 150 disposed after
the shutter 15 is replaced by the lens system 162 simultaneously
with the insertion of the prism.
[0157] On the other hand, in a case where the light transmitting
regions of the stop are on the x and y axes, as in the FIG. 15B
example, each ridge of the prism is set with angles of .+-.45 deg.
with respect to the x and y axes (FIG. 19B). Also in this case, the
lens 162 is used in place of the lens system 150 for the correction
of imaging relationship.
[0158] A plurality of pyramid-like prisms may be prepared in
accordance with the number of stops prepared.
[0159] FIG. 20 is a schematic view of a main portion of a further
embodiment of the present invention. This embodiment differs from
the FIG. 13 embodiment in the structure of a lens system 65,
imaging on the optical integrator 19. In this embodiment, the lens
system 65 forms an image of the light exit surface of the
elliptical mirror 12 on the optical integrator 19. Here, a case
wherein a stop such as shown in FIG. 16 is used is considered. What
is a problem in this occasion is that there is a difference in
maximum effective diameter of light as required on the optical
integrator 19, between a case wherein the stop 18a for conventional
illumination method as described is used and a case wherein one of
the stops 18b-18d for the high-resolution illumination system is
used.
[0160] In this embodiment, in consideration of this, the lens
system 65 is provided by a zoom optical system so as to meet the
change in diameter of light. Since the diameter of light from the
ultra-high pressure Hg lamp 11 is determined definitely by the
light exit portion of the elliptical mirror 12, use of the zoom
optical system 65 of this embodiment assures control of the light
beam diameter in accordance with an illumination method used. Thus,
the light utilization efficiency is improved.
[0161] The controllability of the size or the intensity
distribution of the light on the optical integrator 19 is
important, also in a case wherein the lens system 150 of the FIG.
13 system forms, on the light entrance surface 19a of the
integrator 19, an image of the Hg lamp 11, not an image of the
light exit portion of the elliptical mirror 12.
[0162] Thus, for the control of the light intensity distribution on
the integrator 19, the Hg lamp itself may be displaced along the
optical axis so that it is defocused with respect to the light
entrance surface 19a of the optical integrator 19.
[0163] FIG. 21 is a schematic view of a main portion of a further
embodiment of the present invention. An important feature of this
embodiment resides in that, in order to assure uniform light
intensity distribution on the optical integrator as well as even
weight of the small lenses, the optical integrator is used in
duplex. In the drawing, denoted at 171 is a lens system which
corresponds to the lens system 150, denoted at 16 is a wavelength
selecting filter, and denoted at 172 is a first optical integrator.
In accordance with the function of an optical integrator, light
beams emanating from from the small lenses constituting the first
optical integrator 172 and passing a relay lens 173, are superposed
one upon another on a second optical integrator 174. As a result of
this, a uniform illuminance distribution is provided on the light
entrance surface 174a of the second optical integrator 174.
[0164] If in the preceding embodiments a uniform illuminance
distribution is not provided on the optical integrator 19 (as an
example, the distribution is like a Gaussian distribution wherein
the level at the center is high), it is necessary to finally
determine the shape of the stop for the high-resolution
illumination on the basis of experiments, for example. In the
present embodiment, on the other hand, since the weight (the light
quantity supplied therefrom) of the small lenses is even, the
contrast of image performance can be controlled easily. Further, in
this embodiment, double optical integrators are used, it is not
necessary to pay a specific attention to the cable as described
with reference to FIGS. 17A and 17B.
[0165] FIG. 22 is a schematic view of main portion of a further
embodiment of present invention. In this embodiment, a fiber bundle
181 is provided in front of the optical integrator 19. In this
example, the zone of the optical integrator to be irradiated is
controlled by means of a spacing adjusting mechanism 182 and a
driving mechanism 183 therefor, for adjusting the spacing of
adjacent end portions of the fiber bundle 181, as branched into
four. In order to provide a distribution for a conventional type
illumination system, the spacing of the tour fiber bundles
181a-181d is narrowed. In order to provide a distribution
corresponding to that shown in FIG. 15A, the spacing of the fiber
bundles 181a-181d is widened by a predetermined amount. Such
adjustment is effected in accordance with a stop 18 used. In the
latter case, rotation of the fiber bundles 181a-181d is also
necessary.
[0166] In some examples described hereinbefore, one ultra-high
pressure Hg lamp having been frequently used is used. However, as a
matter of course, the present invention is applicable also to a
case where plural light sources are used or, alternatively, an
excimer laser is used as a light source. In an occasion wherein an
illumination system uses an excimer laser, it is possible that the
position of laser on the optical integrator is scanned with time.
In that case, by changing the range of scan in accordance with the
type of a circuit pattern to be printed, an effective light source
(image) such as shown in FIG. 15 can be provided easily.
[0167] Although it has not been explained with reference to these
embodiments, in the high-resolution illumination system the balance
of the four portions generally divided by the stop is important.
Since details of monitoring the distributions of the four portions
of the effective light source or of the manner of correcting the
distribution have been described hereinbefore, description of them
is omitted here.
[0168] Further, while in these embodiments of the present invention
the stop means is inserted at a position after the optical
integrator, it may be disposed in front of the integrator. As an
alternative, if in the illumination system there is a plane which
is optically conjugate with the optical integrator, the stop may be
disposed on such plane.
[0169] In some embodiments of the present invention described
hereinbefore, in accordance with the fineness or the
directionality, for example, of a pattern on a reticle to be
projected and exposed, an illumination system suited to that
pattern is selected to thereby assure an optimum exposure method
and apparatus of high resolution. Further, these embodiments of the
present invention provide an advantage that: for exposure of a
pattern which is not very fine, a conventional illumination system
can be used at it is; whereas for exposure of a fine pattern, while
using an illumination system which assures high resolution with a
small loss of light quantity, it is possible to obtain a large
depth of focus.
[0170] While the invention has been described with reference to the
structures disclosed herein, it is not confined to the details set
forth and this application is intended to cover such modifications
or changes as may come within the purposes of the improvements or
the scope of the following claims.
* * * * *