U.S. patent application number 10/641236 was filed with the patent office on 2004-03-18 for apparatus and methods for pumping high viscosity fluids.
Invention is credited to Gibson, Gregory M..
Application Number | 20040050771 10/641236 |
Document ID | / |
Family ID | 23792465 |
Filed Date | 2004-03-18 |
United States Patent
Application |
20040050771 |
Kind Code |
A1 |
Gibson, Gregory M. |
March 18, 2004 |
Apparatus and methods for pumping high viscosity fluids
Abstract
A system for dispensing and filtering fluid is disclosed, in
which the fluid flow path is substantially vertical from the fluid
inlet through fluid dispense. Substantially all wetted surfaces are
Teflon.RTM. or some similar non-contaminating fluid, for
applications such as cleanroom processes. A valve and a filter
chamber are incorporated into a pump head to simplify the flow path
and reduce potential contamination points. Preferred methods, and
chips or other microelectronic devices fabricated from the
apparatus or methods, are also disclosed.
Inventors: |
Gibson, Gregory M.; (Dallas,
TX) |
Correspondence
Address: |
J MARK HOLLAND & ASSOCIATES
3 CIVIC PLAZA SUITE 210
NEWPORT BEACH
CA
92660
|
Family ID: |
23792465 |
Appl. No.: |
10/641236 |
Filed: |
August 14, 2003 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10641236 |
Aug 14, 2003 |
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10040235 |
Oct 26, 2001 |
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6635183 |
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10040235 |
Oct 26, 2001 |
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09451498 |
Nov 30, 1999 |
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6325932 |
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Current U.S.
Class: |
210/416.1 |
Current CPC
Class: |
B01D 35/26 20130101;
F04B 53/20 20130101; B01D 37/00 20130101; F05C 2225/04 20130101;
F04B 43/067 20130101 |
Class at
Publication: |
210/416.1 |
International
Class: |
B01D 029/00 |
Claims
I claim:
1. In a device for processing fluid in a precisely controlled
manner, the combination of: first pumping means and second pumping
means in fluid communication with each other; said first pumping
means and said second pumping means providing a fluid travel path
that is substantially consistently upward as the fluid flows
through said first pumping means and said second pumping means.
2. The device of claim 1, in which each of said first and second
pumping means includes surfaces that contact the fluid,
substantially all of said contacting surfaces being fabricated from
or coated with a relatively non-contaminating material.
3. The device of claim 1, further including filter means between
said first pumping means and said second pumping means, in which
said fluid travel path is substantially consistently upward as the
fluid flows through said first pumping means, said filter means,
and said second pumping means.
4. The device of claim 3, in which each of said first and second
pumping means and said filter means includes surfaces that contact
the fluid, substantially all of said contacting surfaces being
fabricated from or coated with a relatively non-contaminating
material.
5. The device of claim 1 or claim 2 or claim 3 or claim 4, in which
said first pumping means includes an upper head portion removable
from a lower portion, and means for temporarily attaching said
upper head portion to said lower portion to form a pumping chamber
therebetween, in which said upper head portion includes integrally
formed valve means therein.
6. The device of claim 5, in which said valve means is configured
to receive inflow of the process fluid from a source of such fluid,
and is configured to thereafter direct such fluid in a
substantially direct upward path toward a filter chamber integrally
formed in said upper head portion, said filter chamber forming a
portion of said filter means.
7. The device of claim 5, in which said valve means is configured
to provide a substantially direct upward flowpath for the subject
fluid from said pumping chamber toward a filter chamber integrally
formed in said upper head portion, said filter chamber forming a
portion of said filter means.
8. The device of claim 1 or claim 2 or claim 3 or claim 4 in which
said second pumping means includes an upper head portion removable
from a lower portion, and means for temporarily attaching said
upper head portion to said lower portion to form a pumping chamber
therebetween, in which said upper head portion includes an
integrally formed tee fluid flowpath therein, wherein said tee
provides a substantially direct upward flowpath for the subject
fluid from said pumping chamber toward a dispense from said upper
head portion.
9. The device of claim 8, in which said tee includes an input
portion thereof for receiving the subject fluid after it has been
pumped by said first pumping means and in which said dispense from
said upper head portion is positioned higher than said input
portion when said device is in its normal, upright orientation.
10. The device of claim 1 or claim 2 or claim 3 or claim 4, in
which said second pumping means is positioned generally above said
first pumping means, and said fluid travel path from an exit of
said first pumping means to an inlet into said second pumping means
does not include any downwardly directed portions when said device
is in its normal, upright orientation.
11. In a device for dispensing fluid, the combination of: a first
diaphragm-type pump having a pumping head, said head including an
integrally formed three-way valve to control flow of fluid into
said first diaphragm-type pump.
12. The device of claim 11, further including a second
diaphragm-type pump positioned generally above said first
diaphragm-type pump and configured to receive fluid pumped by said
first diaphragm-type pump, a fluid path from said first
diaphragm-type pump to said second diaphragm-type pump being
generally upward.
13. The device of claim 11 or claim 12, further including a filter
housing integrally formed in said first diaphragm-type pump pumping
head.
14. The device of claim 13, in which said pumping head and valve
provide a generally directly upward flow path for said fluid from
said first diaphragm-type pump to said filter housing.
15. The device of claim 14, further including a vent valve above
said filter housing to permit selective venting of any gas
entrained in the subject fluid.
16. The device of claim 13, in which substantially all surfaces
wetted by the subject fluid are fabricated from or coated with a
relatively non-contaminating material.
17. A method for filtering and dispensing fluid, including the
steps of: providing a valve means integrally formed in an upper
head of a first pumping member, said valve means configured to
received the subject fluid and direct it in a substantially upward
path from said first pumping member; actuating said first pumping
member to draw the subject fluid from a source; and further
actuating said first pumping member to dispense the subject fluid
upwardly from said first pumping member.
18. The method of claim 17, further including the steps of
providing a filter chamber integrally formed in said upper head of
said first pumping member and providing a substantially direct
upward flow path within said upper head from said first pumping
member through said valve means to said filter chamber, whereby
said further actuation of said first pumping member directs the
subject fluid upwardly from said first pumping member to said
filter chamber.
19. The method of claim 17 or claim 18, further including the steps
of providing a second pumping member substantially above said first
pumping member and providing fluid flow means therebetween, whereby
the subject fluid does not flow downwardly between said first
pumping member and said second pumping member; and pumping the
subject fluid along said non-downward flowpath.
20. The method of claim 17 or claim 18, further including the steps
of providing at least one vent means along the subject fluid's
flowpath to vent any undesirable entrained gas from the subject
fluid.
21. The method of claim 17 or claim 18, further including the steps
of providing a valve downstream of said second pumping member for
selectively dispensing the subject fluid or returning the subject
fluid to said source, in which said downstream valve is a
substantially zero displacement valve that does not undesirably
displace subject fluid.
22. The method of claim 17 or claim 18, in which substantially all
surfaces wetted by the subject fluid are fabricated from or coated
with a relatively non-contaminating material.
23. Apparatus for filtering and dispensing fluid, the combination
of: first diaphragm-type pumping means; second diaphragm-type
pumping means in fluid communication with said first diaphragm-type
pumping means; and filtering means between said first and second
pumping means, whereby said first pumping means pumps the fluid
substantially vertically upwardly through said filtering means; and
fluid flow means between said filtering means and a housing for
second pumping means in which said fluid flow means does not
include downward flow of the subject fluid as it travels from said
filtering means to said housing for second pumping means.
24. The apparatus of claim 23, including fittings adjacent an inlet
to said first pumping means and incorporated in said fluid flow
means, in which said fittings are flare fittings having wetted
surfaces that are non-contaminating to the subject fluid.
25. Apparatus for filtering and dispensing fluid, including: a
first pump having a pumping chamber defined in part by an upper
head portion, said upper head portion including a valve and filter
chamber integrally formed therein, said filter chamber being
disposed substantially above said valve and said filter chamber
including a removable lid member forming an upper closure of said
filter chamber, an outlet and vent disposed at a relatively upward
location on said filter chamber; and a substantially vertical fluid
pathway formed integrally in said upper head portion to permit flow
from said pumping chamber to said filter chamber.
26. The apparatus of claim 25, in which said upper head portion is
retained on a lower head portion by a threaded nut formed of
metal.
27. The apparatus of claim 25, including an 0-ring seal between
said lid member and said upper head portion, in which said 0-ring
is positioned on the interior diameter of said upper head
portion.
28. A combination of a master pump and a slave pump for dispensing
fluid in cleanroom type applications, in which said master pump
includes a pump head having a valve and a filter chamber formed
integrally therein, including a fluid flow path through said
combination which path is comprised by materials that are
non-contaminating to the subject fluid and which path flows
substantially upwardly from an inlet into said master pump through
said filter chamber and subsequently through said slave pump.
29. The combination of claim 28, in which said pump head and said
valve therein are fabricated from Teflon.RTM..
30. The combination of claim 28 or claim 29, including a vent valve
positioned at a high point within said filter chamber.
31. The combination of claim 30, in which said vent valve can both
vent entrained air from the subject fluid and provide pressure
relief if the pumping pressure on the subject fluid exceeds a
selected level.
32. A microelectronic substrate fabricated by deposition of fluid
from a diaphragm-type pump having a pumping head, said head
including an integrally formed valve to control flow of fluid into
said diaphragm-type pump.
33. The combination of claim 29, including a vent valve positioned
at a high point within said filter chamber.
34. The combination of claim 33, in which said vent valve can both
vent entrained air from the subject fluid and provide pressure
relief if the pumping pressure on the subject fluid exceeds a
selected level.
Description
BACKGROUND OF THE INVENTION
[0001] This invention relates to a pumping system useful in
dispensing fluids, especially those that are expensive, viscous,
high purity, and/or sensitive to molecular shear. The invention
also relates to microelectronic components such as silicon chips
and wafers, microelectronic substrates, and circuits fabricated by
such pumping systems and methods, including the potentially
improved quality and yield of such products achievable with the
invention as compared to prior art systems.
[0002] General aspects of the relevant background of the invention
are discussed in prior U.S. Pat. Nos. 5,167,837; 5,772,899; and
5,516,429. Among other things, the invention has numerous
applications, but is especially useful in the microelectronics
industry. The trend in that industry continues to be to squeeze
greater quantities of circuitry onto smaller substrates. Circuit
geometries continue to shrink, the use of expensive materials
continues, and the corresponding need for decontaminated
"cleanroom" environments and equipment for manufacturing,
filtering, and processing continues and even increases. Perhaps as
importantly, the need for improved yield of final product
continues, for economic and other reasons.
[0003] The equipment and methods of the aforementioned U.S. Pat.
Nos. 5,167,837; 5,772,899; and 5,516,429 addresses many situations
and applications very well. The present invention is directed to
further improvements in that technology, as well as potential
applications of such improvements in unrelated technologies.
[0004] Among other things, further simplification and upright
orientation of the flow path for the processed fluids through a
pumping and dispensing system can reduce the risk of contamination,
air entrapment, or similar concerns, while providing similar or
improved reliability and precise control for desired filtration,
dispense, and other handling of the process fluids. Further
manufacturing and design improvements in the instant invention
allow the entire process fluid flow path to be coated or machined
from Teflon.RTM. or some similar non-contaminating material,
further reducing the likelihood of any contamination problems.
[0005] As indicated above, many problems were addressed and solved
by the aforementioned U.S. Pat. Nos. 5,167,837, 5,516,429, and
5,772,899. Among other things, those devices introduced a
diaphragm-type fluid dispense system which, in certain embodiments,
included two separate computer-controlled pumps to dispense precise
amounts of fluid. However, the preferred embodiments in those
patents show the process fluid traveling in a somewhat meandering
path through the pump system. In certain applications, that path
does not afford optimal venting for any contaminating air bubbles
that may become entrapped in the fluid or the system. For example,
some small amount of air bubbles may be unavoidably introduced when
the source fluid container is periodically changed, even if no
re-priming is required. Portions of the flow path that are metal or
otherwise relatively potentially contaminating result in some risk
(however small) of corresponding undesirable contamination of the
fluid.
[0006] As indicated in those prior patents, such bubbles or
contaminants could potentially compromise the end product to some
degree in some small percentage of applications. Alternatively,
such bubbles or contaminants might require some period of
"flushing" bubbles from the system upon changing the source fluid
container, for example, or might otherwise compromise the accuracy
of the fluid dispense system (again, in a small percentage of
applications and situations). Although those prior patents and
inventions function well in that regard and are a dramatic advance
over the prior art before them, and although those prior patents
can be readily adapted to deal with the aforementioned potential
problems, the instant invention provides improvements in that
regard.
[0007] Other benefits derive from simplifying the flow path of the
fluid. By simplifying and reducing the number of components
involved in the system, assembly and maintenance can be
correspondingly simplified. Perhaps more importantly, the number of
connection points, seals, fittings, and related potential
leak-spots can be reduced, thereby directly reducing the risk of
contamination, air-entrainment, or similar problems. Additionally,
reducing and realigning the fluid flow path can reduce the size of
the "footprint" for the housing of the system and otherwise make
the system more compact as compared to prior art systems, thereby
correspondingly reducing valuable factory space for the users of
the pump system.
OBJECTS AND ADVANTAGES OF THE INVENTION
[0008] It is, therefore, an object of my invention to provide a
fluid dispensing system that provides the improved performance and
benefits discussed herein. The system is characterized by
substantially vertical fluid flow from its inlet to its outlet when
the system is in its normally upright position, and by providing
Teflon.RTM. or similar non-contaminating wetted surfaces throughout
the flowpath. In its preferred embodiment, the flow path is
simplified as compared to prior art systems, including fewer
fittings and connections (in part resulting from integrally forming
various components into single unitary structures).
[0009] A further object of the invention is the provision of a
device for processing fluid in a precisely controlled manner,
including the combination of first pumping means and second pumping
means in fluid communication with each other, in which the fluid
travel path that is substantially consistently upward as the fluid
flows through the first pumping means and the second pumping means.
As indicated above, the first and second pumping means surfaces
that contact the fluid are preferably all fabricated from or coated
with a relatively non-contaminating material, such as Teflon.RTM.
or the like. Among other things, this facilitates using the system
for high-purity fluids, in cleanroom environments, etc.
[0010] The device can further include filter means between the
first pumping means and the second pumping means, in which case the
fluid travel path preferably remains substantially consistently
upward as the fluid flows through the first pumping means, the
filter means, and the second pumping means, and all or
substantially all contacting surfaces are non-contaminating. In the
preferred embodiment, the pump head and the valve therein are
actually fabricated from Teflon.RTM., and all fittings along the
flow path are flare fittings formed from Teflon.RTM. or otherwise
having wetted surfaces that are non-contaminating to the subject
fluid. For the non-contaminating aspect of the invention, the
particular material may be any suitable non-contaminating material,
including without limitation various forms of Teflon.RTM. (TFE
& PFA), Kalrez (a fluorinated, Teflon.RTM.-like elastomer), or
other materials. Among the many suitable fittings usable in the
invention, commercially available Furon Flare Grip.RTM. PFA tube
fittings can be readily utilized.
[0011] Another object of the invention is the provision of a system
or device of the aforementioned character, in which the first
pumping means includes an upper head portion removable from a lower
portion, and means are provided for temporarily attaching the upper
head portion to a lower portion to form a pumping chamber
therebetween. Preferably, the upper head portion includes
integrally formed valve means configured to thereafter direct the
process fluid in a substantially upward path toward a filter
chamber integrally formed in the upper head portion. Among other
things, the integral valve facilitates filtering viscous and other
fluids under relatively low pressure, and decreases molecular shear
on the fluids, in part by providing relatively larger and less
obstructed flow paths through the valve (as compared to prior art
systems). The valve also reduces differential pressure, or pressure
drop, as the fluids move through the valve.
[0012] An additional object of the invention is the provision of a
system or device of the aforementioned character, in which the
second pumping means includes an upper head portion removable from
a lower portion, with means for temporarily attaching the upper
head portion to the lower portion to form a pumping chamber
therebetween. Again preferably, the upper head portion of the
second pumping means includes an integrally formed tee fluid
flowpath therein, wherein the tee provides a substantially direct
upward flowpath for the subject fluid from the pumping chamber
toward a dispense from the upper head portion. The preferred tee
includes an input portion for receiving the subject fluid after it
has been pumped by the first pumping means, and the dispense from
the second pump's upper head portion is positioned higher than the
input portion when the device is in its normal, upright
orientation.
[0013] A further object of the invention is the provision of a
system or device of the aforementioned character, in which the
second pumping means is positioned generally above the first
pumping means, and the fluid travel path from an exit of the first
pumping means to an inlet into the second pumping means does not
include any downwardly directed portions when the device is in its
normal, upright orientation.
[0014] A still further object of the invention is the provision of
a device for dispensing fluid, including the combination of a first
diaphragm-type pump having a pumping head, the head including an
integrally formed valve to control flow of fluid into the first
diaphragm-type pump. The device can further include a second
diaphragm-type pump positioned generally above the first
diaphragm-type pump and configured to receive fluid pumped by the
first diaphragm-type pump, and having a fluid path from the first
diaphragm-type pump to the second diaphragm-type pump that is
generally upward.
[0015] Yet another object of the invention is the inclusion of a
vent valve above or upstream of the filter to permit selective
venting of any gas entrained in the subject fluid. Preferably, the
vent valve can also function as a pressure relief or safety valve,
to prevent the pressure on the subject fluid and the system itself
from exceeding a selected level. Also preferably, the vent valve is
positioned at a high point within the filter chamber.
[0016] Other objects of the invention are directed to a method for
filtering and dispensing fluid, including one or more of the steps
of providing a valve means integrally formed in an upper head of a
first pumping member, the valve means configured to receive the
subject fluid and direct it in a substantially upward path from the
first pumping member; actuating the first pumping member to draw
the subject fluid from a source; and further actuating the first
pumping member to dispense the subject fluid upwardly from the
first pumping member. In the preferred embodiment, the valve
switches the fluid flow drawing and dispensing steps in the
preceding sentence. As indicated above, the steps can further
include providing a filter chamber integrally formed in the upper
head of the first pumping member and providing a substantially
direct upward flow path within the upper head from the first
pumping member through the valve means to the filter chamber,
whereby further actuation of the first pumping member directs the
subject fluid upwardly from the first pumping member to the filter
chamber.
[0017] Additional steps of the methods of the invention include
providing a second pumping member substantially above the first
pumping member and providing fluid flow means therebetween, whereby
the subject fluid does not flow downwardly between the first
pumping member and the second pumping member; and pumping the
subject fluid along the non-downward flowpath.
[0018] Another object of the invention is the provision of
apparatus and methods that include providing a valve downstream of
the second pumping member for selectively dispensing the subject
fluid or returning the subject fluid to the source, in which the
downstream valve is a substantially zero displacement valve that
does not undesirably contaminate or introduce gas into the subject
fluid. Among other things, the preferred valve reduces or
eliminates the likelihood that operating the valve will displace
fluid (such as displacing it from the dispense line), which
displacement could adversely affect the accuracy of dispense or
other aspects or performance of the system.
[0019] Although the invention is described herein in connection
with dispense of high-purity, viscous fluids, the invention may be
utilized in many other applications. Moreover, although the
preferred embodiment discussed herein includes two pumping means
with filter means interposed therebetween, advantageous aspects of
the invention may be practiced with no filter means, or with only
one pumping means with or without filter means.
[0020] As with prior art systems, my invention provides a
dispensing system permitting the use of computer or other automated
digital control for the rate and interval of dispense, as well as
for the direction of fluid flow through the system and fluid
pressure during operation of the system. Thus, still another object
of my invention is the provision of a dispensing system that
permits great flexibility of operation, making it adaptable to
numerous applications. The system may be controlled or driven by
stepper or servomotors, or similar technology, and by various
computer software, hardware, and wiring or wireless communication
systems.
[0021] Other objects of my invention include providing a relatively
shorter fluid flow path such that contaminants are less likely to
be introduced, and a relatively more compact pump design that
leaves a smaller "footprint" (as compared to prior art
devices).
[0022] An additional object of the invention is the provision of
integrated circuits, chips, or other microelectronic devices
fabricated from the aforementioned apparatus or methods.
[0023] Other objects and advantages of the invention will be
apparent from the following specification and the accompanying
drawings, which are for the purpose of illustration only.
BRIEF DESCRIPTION OF THE DRAWINGS:
[0024] FIG. 1 is an isometric view of a preferred embodiment of the
invention;
[0025] FIG. 2 is another isometric view of the same system, viewed
from an opposite upper corner to illustrate the back side(s) of the
assembly;
[0026] FIG. 3 is a cross-sectional view taken along line 3-3 of
FIG. 1;
[0027] FIG. 4 is a cross-sectional view taken along line 4-4 of
FIG. 3;
[0028] FIG. 5 is a cross-sectional view taken along line 5-5 of
FIG. 3;
[0029] FIG. 6 is a cross-sectional view taken along line 6-6 of
FIG. 1;
[0030] FIG. 7 is a cross-sectional view taken along line 7-7 of
FIG. 1;
[0031] FIG. 8 is a flow chart generally illustrating a preferred
method of operation of the invention;
[0032] FIG. 9 is an isometric view similar to FIG. 1, but
illustrates one of the many alternative embodiments of the
invention;
[0033] FIG. 10 is likewise similar to FIG. 2, but is an isometric
view of the system of FIG. 9, viewed from an opposite upper corner
as that shown in FIG. 9;
[0034] FIG. 11a is a top view of the system of FIGS. 9 and 10,
except showing the inlet and outlet ports to the system facing
opposite to the directions shown in FIGS. 9 and 10 (persons of
ordinary skill in the art will understand that the system's
fittings can be oriented in a wide range of directions and variety
of positions);
[0035] FIG. 11b is the same top view of the system of FIGS. 9 and
10 as in FIG. 11a, but includes a different section line 13-13,
except, again, showing the inlet and outlet ports to the system
facing opposite to the directions shown in FIGS. 9 and 10;
[0036] FIG. 12 is a cross-sectional view taken along line 12-12 of
FIG. 11a. For the purposes of clarity, aspects of the preferred
3-way valve discussed herein have been omitted from this
figure;
[0037] FIG. 13 is a cross-sectional view taken along line 13-13 of
FIG. 11b; and
[0038] FIG. 14 is similar to FIG. 10, but is an isometric view of
the system of FIG. 9 viewed from one of the remaining upper corners
(other than the two shown in FIGS. 9 and 10) and, again, showing
the outlet port of the system facing opposite to the direction
shown in FIG. 10. Two lower units (shown as elements 293 in FIG.
10, and corresponding to upper units 283 in both FIGS. 10 and 14),
which represent the servomotor assembly, are not shown in this
Figure to permit better viewing of the preferred pressure
transducers 285 and 295.
DESCRIPTION OF PREFERRED EMBODIMENT
[0039] Referring now to the drawings, and particularly FIGS. 1 and
2, I show a preferred embodiment of a pump and dispense system 10
constructed in accordance with the teachings of the invention.
Preferably, the system includes a first pumping means or master
pump 20, and a second pumping means or slave pump 30, operably
connected to pump fluid from an inlet 12 to an outlet 46. As
described herein, filtering means can be included between the
master and slave pumps 20 and 30, or preferably within the master
pump 20 (as described herein), to filter the process fluid.
[0040] General concepts regarding the components and operation of
the preferred system and its pump mechanisms are disclosed in U.S.
Pat. Nos. 5,167,837, 5,516,429, and 5,772,899, which are hereby
incorporated herein by reference. An overview of a preferred method
of operation of the present invention is illustrated in FIG. 8.
Fluid taken from an initial fluid source 60 (FIG. 8) is drawn into
the system 10 through the inlet 12, by operation of the master pump
20. As part of this process, an integral three-way valve 140 in the
master pump is positioned to permit the subject fluid to be pulled
into a diaphragm-style first pump 18 (by moving its diaphragm
downwardly, as explained in the aforementioned patents). The valve
140 is then actuated to permit flow from pump 18 upwardly through
valve 140 and eventually through a filter 27. One or more vent or
check valves (such as vent valve 36 and check valve 49) can be
included along the flowpath at appropriate locations, to vent
undesirable entrained gas and to prevent undesirable backflow, as
discussed further herein. The vent valve 36 can either return the
fluid to the source 60 (as shown in FIG. 8) or to a waste drain
(not shown). When exiting the filter other than via the vent valve
36, the fluid preferably travels to a second diaphragm-style pump
44, which preferably directs it to another three-way valve 99 (see
FIG. 8; that valve 99 can be any suitable valve, such as the
zero-displacement, non-contaminating valves described herein, and
can be positioned at any suitable location, although it typically
is remote from the second pump 44 so as to be adjacent the actual
dispense and improve the ability to precisely control final
dispense, dripping, suckback or the like). That second valve 99 can
be selectively actuated to direct the flow back to the source 60 or
to be dispensed on a substrate or other microelectronic chip or
device-in-process (not shown).
[0041] Persons of ordinary skill in the art will understand that
many of the general concepts disclosed in the aforementioned U.S.
Pat. Nos. 5,167,837, 5,516,429, and 5,772,899 apply with equal
cogency to this invention. Some of the important improvements over
those prior art inventions are disclosed or described herein.
[0042] By way of example and not by way of limitation, the overall
flow path for the subject fluid is preferably substantially upward
as the fluid moves through the system 10 (obviously, however, if
the fluid is directed by valve 99 back to the source, the fluid
then returns "down" to its original level). This preferred upward
flow path includes preferred positioning of the inlet 12 as low as
practicable on the first pumping member 20. Preferably, the only
"down" flow portions of the flow path occur as the fluid is drawn
into the respective pumping chambers 18 and 44. Persons of ordinary
skill in the art will understand that this "down" flow facilitates
priming of the pumps and other beneficial performance and packaging
of the system 10 (including facilitating practical packaging of the
preferred hydraulics, diaphragm pumps, and pump heads and filters
within a relatively small footprint), and that in any case the
preferred substantially vertical alignment and configuration of the
"downstream" components and elements adjacent each of those pumping
chambers 18 and 44 minimizes any gas entrainment or related
problems that might otherwise occur. For example, the preferred
embodiment provides relatively vertical passages 22, 23 and 45 (see
FIGS. 3 and 7) from uppermost respective regions of those pumping
chambers 18 and 44, to a vent valve 36 (see FIG. 6) and to the exit
of the second pump 46. Thus, in the preferred embodiment, any
"downward" flow is immediately followed by an upward flow (via the
diaphragm pump forcing the subject fluid in an upward direction),
which helps to purge any entrained air and to continue the overall
upward flow of the subject fluid.
[0043] Similarly by way of example and not by way of limitation,
and as more fully explained herein, the overall flow path
preferably includes fewer fittings than prior art systems, and
those fittings and the flow path itself are preferably fabricated
from or coated with Teflon.RTM. or similar materials, to further
reduce the risk of any contamination of the process fluid.
Preferably, and as indicated above, flare fittings such as
commercially available Flare Grip.RTM. PFA tube fittings can be
readily utilized.
[0044] In FIG. 3, the preferred embodiment is illustrated as
including the first pumping chamber 18 being formed by assembling
an upper head portion 120 with a lower portion 122, sealing and
binding a flexible diaphragm 124 therebetween. A sealing element
127 is preferably provided to ensure a fluid-tight seal. The
diaphragm 124 is preferably fabricated or coated with Teflon.RTM.
or some similar non-contaminating material.
[0045] At least somewhat similarly to the aforementioned U.S. Pat.
Nos. 5,167,837, 5,516,429, and 5,772,899 (especially with reference
to FIGS. 2 in each of those patents), the diaphragm 124 and lower
portion 122 are preferably configured to permit
precisely-controlled actuation and flexing of the diaphragm (and
consequent pumping of subject or process fluid) by stepper
assemblies, servomotors, or similar devices displacing fluid into
and from the space 125 below the diaphragm 124. In the preferred
embodiment, this can be accomplished by pumping the relatively
incompressible actuating fluid through tubing or passageway 126
(connected at its opposite end-not shown-to a stepper assembly 180
or its equivalent). Persons of ordinary skill in the art will
understand, as indicated below, that the passageway 126 can be any
suitable configuration, including (among the many alternatives) an
"internal" passageway such as passage 226, shown in FIG. 13. The
base elements such as base 161 are preferably fabricated from any
suitably strong material, although the need for non-contamination
is somewhat less because the subject fluid is not exposed to the
base or any passageways therein. Positional feedback flags 184 and
194 and limit switches 182 and 192, FIGS. 1 and 2, are preferably
provided on the pistons or stepper assemblies, to facilitate
control and operation of the system 10. Among the many alternative
embodiments of the invention (such as illustrated in FIGS. 9-14)
are those using optical limit switches 282 and 292 that sense flags
284 and 294 that preferably move with the piston and extend
therefrom.
[0046] Among the many alternative embodiments for the diaphragm
actuating means are arrangements similar to those illustrated in
the aforementioned FIGS. 2 of the aforementioned U.S. Pat. Nos.
5,167,837, 5,516,429, and 5,772,899 patents. Integral passageways
for the actuating fluid may be machined or otherwise provided in
the base 161 in different directions, such as the example shown in
alternative embodiment of FIGS. 12 (illustrating such a passageway
255 for actuating the slave pump) and 13 (illustrating such a
passageway 226 for actuating the master pump).
[0047] The upper head portion 120 and lower portion 122 can be
maintained in operative relationship with each other via a wide
range of mechanisms. Preferably, a threaded nut 128 is retained on
the upper head portion 120 by a retaining flange 129 seated in a
groove on the exterior of the upper head portion 120, and engages
corresponding threads 130 on the outside of the lower portion 122.
Although the materials for the nut 128 and the lower portion 122
can be any of a wide variety, preferably they are fabricated from
metal to provide a strong, repeatably engagable assembly of the
head portions 120 and 122. In the preferred embodiment, the threads
on elements 130 and 128 are relatively coarse, to enable
correspondingly quick assembly and disassembly of the two portions
120 and 122 from each other, for servicing or other maintenance of
the first pumping means 20. Large threads also are relatively
easier to clean than small or fine threads.
[0048] The upper head portion 120 also preferably constitutes a
monolithic element formed or fabricated from a single piece of
Teflon.RTM. or similar material. As explained herein, this
monolithic aspect permits various structures and elements to be
incorporated directly into the head itself, which contributes to
the aforementioned benefits of an improved subject fluid flow path
and reduced number of potentially contaminating connections.
[0049] Among other things, the monolithic element 120 preferably
includes therein an integrally formed or machined valve assembly
140 (see FIGS. 3 and 4). The valve 140 is preferably a three-way
valve, permitting (as described above) selective flow (1) from a
fluid source connected to inlet 12 through the valve 140 to the
pumping chamber 18, and (2) from the pumping chamber 18 up through
the valve 140 and subsequently through the filter 27. In the
preferred embodiments, the valve means 140 includes some aspects
similar to that disclosed in U.S. Pat. No. 5,261,442, but persons
of ordinary skill in the art will recognize that any of a wide
range of specific valve designs will suffice.
[0050] Although the preferred embodiment of the invention
incorporates an integrally formed three-way valve within monolithic
element 120, alternative embodiments of the invention may utilize
alternative valve structures, or may not utilize any valve device.
For example, one alternative embodiment may utilize a check valve,
similar to check valve 49 described elsewhere herein with respect
to the slave pump 30, positioned along the fluid flow path between
inlet 12 and pumping chamber 18. As persons of ordinary skill in
the art will appreciate, the check valve would act to permit the
subject fluid to flow into pumping chamber 18, however would
prevent the fluid from flowing back toward the fluid source when it
is forced from the pumping chamber 18.
[0051] In any case, the preferred fluid flow passes from the
pumping chamber 18 (on its "dispense" stroke) through substantially
vertical passages 22 and 23 in the monolithic element 120.
[0052] Persons of ordinary skill in the art will understand that
the valve 140, the passages 22 and 23, and the other elements
preferably provided in the monolithic structure 120 can be formed
there by any suitable means, including by machining, boring,
cutting, or otherwise forming the upper head portion 120. By
forming those elements integrally with the head portion 120, the
material of the head portion 120 itself replaces various
"connections" that were used in prior art devices, and preferably
simplifies the subject fluid flow path as compared to prior art
devices.
[0053] Details of the preferred valve assembly 140 are illustrated
in FIG. 4, in which the subject fluid is drawn into the system
through inlet 12. As indicated elsewhere herein, the fitting 13
(similar to other fittings mentioned herein) preferably comprises a
non-contaminating (e.g., Teflon.RTM. or Teflone.RTM.-coated) flared
fitting. Flared fittings are commonly used in the semiconductor
industry. Typically, a nut such as nut 205 (FIGS. 9 and 12) is
provided adjacent the eventual tubing connection, and the tube is
flared outward (expanded or stretched) using a special tool or
process, and is then slipped over the fitting mandrel. Tightening
the nut holds the flared tubing in place in a sealing
relationship.
[0054] One of the many embodiments of this aspect of the invention
is illustrated in FIG. 12, which shows a nipple 201 having a ring
or tongue 202 that fits in a sealing relationship into a
corresponding groove 203 on the head 220 (which head 220
corresponds to head 120 in FIG. 3). In the embodiment of FIG. 12,
the nipple 201 is illustrated as integrally formed with a retaining
shoulder or plate 204. Screws or bolts 206 (FIG. 9) or other
methods and apparatus are used to affix the fitting to the head
220. In the preferred embodiment, the preferred Teflon material of
the head 220 does not readily and reliably engage a screw's threads
directly (such as would occur if screws 206 were tapped directly
into the Teflon material of head 220). Accordingly, one or more
rods 207 (FIG. 12) are provided in holes 208 (which holes can be
"blind" or drilled through the entire head 220). Persons of
ordinary skill in the art will understand that either or both ends
of the holes 208 will be visible from the outside of head 220 to at
least some degree (to permit boring the holes 208, inserting the
rods 207, and manipulating those rods as explained below to engage
the bolts 206 therewith), but may be covered, for example, by the
plate 209 over the integral 3-way valve. Additional holes (not
shown) are bored into the head 220 in a size and location to permit
bolts 206 to be inserted into, without threadedly engaging, the
Teflon head 220. The rods 207 are preferably manufactured from
stainless steel, and contain cross-drilled and tapped holes to
accept the screws used to secure the elbow to the lid. The end of
the bolts 206 are preferably positioned to engage the cross-drilled
and tapped holes provided in the rods 207, with the threads and the
position of those holes in those rods 207 sized and located to
correspond to the bolts 206, so that the bolts 206 can be
threadedly engaged and tightened therewith. The rods 207 also
preferably have one or more slots or other structure on their ends
so that they can be rotated within the holes 208 by a screwdriver
or the like, to help align and engage the bolts 206 with the rods
207, and thereby tighten the fitting onto the head 220.
[0055] Among the many alternative methods of attachment, it is
sometimes useful to allow the nipple to be rotated or swiveled
throughout a complete 360 degree rotation, especially in
combination with elbow fittings attached to or formed with the
nipple 201. To provide such rotatability, a split ring (not shown)
or similar annular structure can be provided on the exterior of the
fitting near the head 220, and a sleeve or plate similar to plate
204 can be provided to engage the split ring or shoulder. The
sleeve or plate similar to plate 204 can then be engaged with the
head 220 as described above, and the swivel adjustment can be
performed prior to tightening the screws or bolts 206, or
preferably even after the screws or bolts are tightened.
[0056] To permit the pumping chamber 18 to fill with process fluid
(for subsequent pumping through the rest of the system 10), a
central plunger assembly 142 of the valve 140 is depressed in the
direction of arrow A in FIG. 4 (via computer-controlled air
actuation, not shown, pushing on the end 144 of plunger assembly
142 through the opening 146--see the discussion below of element
246 in the alternative embodiment of FIG. 10). In the preferred
embodiment, the air actuation of the plunger assembly 142 is
preferably controlled by a diaphragm, but alternatively can be
controlled by pistons. Indeed, an actuator (such as a separate rod
or plunger, for example, not shown) or other mechanical structure
can be provided to actuate the plunger assembly 144/142. In any
case, the actuating pressure must overcome the spring force exerted
by spring 148, and that spring 148 keeps the valve 140 in a default
position of permitting flow from the pumping chamber 18 through the
valve 140 to the filter 27. By depressing the plunger 142 and
compressing the spring 148, fluid flow is permitted through the
inlet tubing 12 through the vertical channel 22 and into the
pumping chamber 18. When the pressure is released from the end 144
of the plunger 142, the spring 148 forces the plunger back into the
position shown in FIG. 4, permitting the aforesaid fluid
communication from the pumping chamber 18 through the valve 140 to
the filter 27.
[0057] Further enabling this valve action are the preferably
kidney-shaped passages 152 (shown in FIGS. 3 and 4) and 154 (shown
only in FIG. 3, due to the cross section location of line 4-4).
Preferably, the passage 152 opens toward the viewer as one looks at
FIG. 3, while the passage 154 opens in the opposite direction (away
from the viewer, or toward the "back" side of FIG. 3). The
preferred kidney shapes 152 and 154 enlarge what might otherwise be
a constriction in the fluid flow, improving the performance of the
system 10 generally but especially with respect to processing
shear-sensitive and/or high viscosity fluids. Referring to FIGS. 3
and 4, persons of ordinary skill in the art will understand that
the "dispense" stroke of the first diaphragm 124 forces the subject
fluid up passage 22, through the central space 147 not occupied by
the plunger 142, into the annular passage 149 and thereafter into
the rearward-facing kidney-shaped opening 154 and up through
passage 23 to the filter 27.
[0058] For applications in which the subject fluid is to be
filtered, the upper head portion also preferably includes an
integrally molded or machined filter housing or chamber 160. The
chamber 160 preferably includes a removable lid member 162, to
permit maintenance or other access to the filter element 27. For
compactness and the non-contaminating and other benefits discussed
herein, the lid member 162 is also preferably manufactured or
fabricated from a monolithic block of Teflon.RTM. or similar
material. An O-ring or similar sealing means 166 is preferably
provided between the lid member 162 and the upper body portion 120,
to prevent leakage at that joint. A nut 164 (similar in concept to
nut 128 at the lower exterior of the first pumping means)
preferably threadedly attaches the lid member to the upper body
portion 120, and is readily removable via relatively coarse
threads. In order to provide an improved seal at that joint,
however, and to extend the life of the joint and its components,
the nut 164 is preferably also formed from polypropylene,
Teflon.RTM., or some similar plastic material. Among other things,
this ensures that the life of the threads at that joint is longer
than might occur if, for example, the nut were formed of metal and
thereby "ate" into the corresponding Teflon.RTM. threads formed on
the upper body portion 120.
[0059] In the alternative embodiment of FIGS. 9-14, the lid member
262 (corresponding to lid member 162 in FIGS. 1-8; many of the
"200" series numbers in FIGS. 9-14 have a similar correspondence to
the "100" numbers in FIGS. 1-8) extends downwardly into the chamber
260. The O-ring 266 can then be positioned in an outer annular
channel 256, which can help prevent leakage (as compared to the
"face-seal" configuration of the O-ring 166 in FIGS. 1-8) if, for
example, the entire lid member 262 and nut 264 "move" vertically
upwardly during pressurization of the system. The likelihood of any
such movement can be affected by, among other things, the material
from which the nuts 164 or 264 are formed (plastic nuts might
permit more such "movement").
[0060] The filter element 27 can be any suitable filter media in
any suitable configuration. Among the many suitable filters 27 are
ones manufactured by Millipore Corporation, under the brand names
and model numbers PI-250 Cartridge (catalog number DZUP CZI KI) and
Wafergard F Cartridge (catalog number WGFG 40H P1). Preferably, the
filter means is integrally positioned within the first pump 20,
thus reducing the overall length of the flow path of the fluid or
at least the number of connections required within the flow path.
To provide the desired non-contaminating performance, the filter 27
is preferably coated or fabricated from Teflon.RTM. or similar
material.
[0061] Filter 27 is preferably adapted to filter the subject fluid
as it passes from the vertical passage 23 to a flow path exit
passage 165 formed in the lid member 162. To ensure desired flow
from vertical passage 23 into the filter chamber, the preferred
embodiment includes one or more raised portions 170 (see FIGS. 3
and 5) to space the filter element 27 off the bottom of the filter
chamber. In this manner the filter means 27 does not cover and
block fluid flow from the top of the passage 23 into the filter
chamber. In the preferred embodiment, these portions 170 are formed
by "leaving" segments of the monolithic block 120 during machining
of the filter chamber therein. As illustrated, four such portions
170 are equally spaced about the central opening 23, although a
wide range of other suitable configurations or other elements (not
shown) could be used.
[0062] To further ensure desired "unrestricted" flow from vertical
passage 23 into the filter chamber, the preferred embodiment also
includes a countersunk or tapered portion 24 (FIGS. 3 and 5).
[0063] As with the passages 22 and 23 in the upper body portion
120, the exit passage 165 in the lid member 162 can be formed or
fabricated in any suitable manner, including drilling or similar
machining. The passage 165 provides a flow path through the lid
member 162 for the subject fluid, and is preferably connected to an
elbow 167 (persons of ordinary skill in the art will understand
that the exit flowpath can be any suitable path, but preferably
does not direct the flow downwardly). Although the various fittings
and other components can be assembled to each other in any suitable
manner, a preferred method and structure for many of the
attachments is best illustrated in FIGS. 12 and 13, and as
described elsewhere herein. Among other things, those Figures
illustrate preferred attachments of fittings within the system
(such as elbow 167) to various Teflon components (such as the major
"block" elements fabricated from Teflon). The elbow 167 is
preferably connected at its other end to another Teflon.RTM. flare
fitting 168 and tubing 169, and then on to the second pumping means
of the system 10, as discussed elsewhere herein. Tubing 169 is
preferably fabricated from or coated with Teflon.RTM. or a similar
material.
[0064] The lid member 162 also preferably incorporates a vent valve
assembly 36, FIG. 6, operatively connected by machined passage 174
to a relatively high point in the filter chamber (corresponding
alternative elements 236 and 274 are illustrated, for example, in
FIGS. 12 and 13). In the preferred embodiment, the vent valve is
all Teflon.RTM., and is a two-way, normally closed valve that can
be used to selectively vent gas from the process fluid. One of the
many valves suitable for this purpose is manufactured by Furon
Company (currently doing business at 3340 East La Palma Avenue,
Anaheim, Calif. 92806, U.S.A., which is the same Furon referred to
in other parts of this description), and is illustrated in U.S.
Pat. No. 5,575,311. Persons of ordinary skill in the art will
understand that connecting this vent valve to a "high" point within
the system permits the vent valve 36 to collect and vent
undesirable gases that may be entrained within the subject fluid.
Moreover, any such gas is likely to vent through passage 174 (or
passage 274 in the embodiment of FIG. 12) as opposed to the more
central passage 165 in the lid member 162 because the gas does not
have to pass through the filter element 27 in order to get to the
passage 174 (in contrast to having to do so to reach passage 165).
In the preferred embodiment of the invention, the valve is
automatically actuated by the pump controller and is user
programmable. In addition, the valve is preferably and typically
opened either during the beginning or end of the filtration cycle
for a short period of time (preferably on the order of seconds).
Vent 36 preferably includes a spring 37 and related adjustments by
which its relief pressure can be set, enabling it to also function
as a safety valve or relief valve to ensure that the pressure on
the subject fluid does not exceed a certain level, or to provide
relief if the filter element 27 becomes clogged, etc.
[0065] For applications in which a second pumping means is desired
(for example, in applications such as some discussed in the
aforementioned U.S. Pat. Nos. 5,167,837, 5,516,429, and 5,772,899),
a slave or second pump member 30 (FIG. 7) is preferably provided.
Many aspects of the preferred pump 30 are similar to those of the
first pumping member 20 discussed above, including a pumping
chamber 44 having a diaphragm therein actuated in a precisely
controlled manner by a stepper assembly (not shown in FIG. 7, but
illustrated in FIG. 2 as assembly 190, which can move actuating
fluid through port 55) or similar mechanism.
[0066] The slave pump 30 can be positioned in a wide variety of
locations with respect to the master pump 20, but is preferably
sufficiently "high" that the fluid flow path trends upwardly
through tubing 169 between the pumps 20 and 30. Among other things,
the tubing 169 preferably at least does not travel downwardly as
the fluid moves from the first pump 20 to the second pump 30,
because such a downward path might entrap gas within that section
of the system 10. Among the many alternative embodiments (not
shown), the second pump 30 could even be positioned "directly" over
the first pump 20, resulting in the tubing 169 or other passage or
connection between the pumps 20 and 30 being substantially vertical
(and thereby having virtually no risk of gas entrainment therein).
To facilitate manufacture of the system 10, however, as well as its
assembly and maintenance, the preferred embodiment positions the
first pumps 20 and 30 with respect to each other as best
illustrated in FIGS. 1 and 2.
[0067] The slave pump 30 preferably includes a monolithic upper
portion 42 formed of Teflon.RTM. or similar material, whose
monolithic nature provides similar opportunities for improved flow
and reduced contamination as discussed elsewhere herein.
Preferably, a tee path is drilled or otherwise machined or formed
in the upper portion 42, and includes a substantially vertical
passage 45 teed to another passage 47. That passage 47 preferably
receives the fluid flow from tubing 169, after it passes through a
preferred further Teflon.RTM. flare fitting 48 (or other
non-contaminating connection) and a check valve 49 integrally
mounted into the upper portion 42.
[0068] Among other things, the check valve 49 is preferably formed
of Teflon.RTM. or similar non-contaminating material, and prevents
the pumping/dispense stroke of the pumping chamber 44 from forcing
the subject fluid back out passage 47 and toward the filter 27.
Instead, the check valve 49 causes the pumping/dispense stroke of
the pumping chamber 44 to force fluid further upward through
passage 45 and thereafter to elbow 51 and Teflon.RTM. flare fitting
52 (the comments above regarding elbow 167 and fitting 168 on the
first pumping member 20 apply with equal force to elbow 51 and
fitting 52). One of the many suitable valves usable as check valve
49 is currently marketed by Furon as their part number MCV 246.
[0069] For strength and economy, the lower portion 53 of the second
pumping member 30 is preferably fabricated from stainless steel,
aluminum, or some other metal, and the retaining nut 54 is likewise
fabricated from metal. Persons of ordinary skill in the art will
understand, however, that any of a wide variety of materials can be
used for those elements without departing from the scope of the
invention.
[0070] As indicated above, the dispense of fluid out tubing 46 is
preferably directed to yet another non-contaminating three-way
valve (not shown, but graphically illustrated in FIG. 8 as element
99), by which the subject fluid can be selectively directed back to
the source 60 or to be dispensed on a substrate or other
microelectronic chip or device-in-process (not shown). In the
preferred embodiment, the three-way valve 99 is a standalone valve
(in contrast to the integrally-formed valve 140 within first
pumping member 20) and is attached to tubing 46 and a return tubing
(not shown, but illustrated in FIG. 8) via the aforementioned
non-contaminating Teflon.RTM. flare fittings. The three-way valve
means 99 preferably is a zero displacement valve, such that none of
the subject liquid is displaced when the valve is actuated. As
indicated above, and among other things, the preferred valve
reduces or eliminates the likelihood that operating the valve will
displace fluid (such as displacing it from the dispense line),
which displacement could adversely affect the accuracy of dispense
or other aspects or performance of the system.
[0071] Persons of ordinary skill in the art will also understand
that the alternative embodiment of FIGS. 9-14 includes further
benefits. Among other things, the second pump 230 is slightly
higher relatively to the first pump than in the embodiment of FIGS.
1-8, and the tubing 269 between the pumps is provided in an
uncoiled path. The various fittings on the pumps by which the
subject fluid enters and exits the pumps are redirected to
facilitate use in possible alternative locations and installations.
In FIG. 10, a fitting 246 is provided to facilitate the air
actuation of the preferred integral three-way valve.
[0072] FIG. 14 also illustrates preferred pressure transducers 285
and 295, associated with the first and second stepper assemblies
280 and 290, respectively. Two lower units (shown as elements 293
in FIG. 10, and corresponding to upper units 283 in both FIGS. 10
and 14), represent the servo-motor assembly, but as indicated
above, are not shown in FIG. 14 to permit better viewing of the
transducers 285 and 295. Persons of ordinary skill in the art will
understand that the transducers are configured to sense the
pressure within the actuating fluid on the respective first and
second stepper assemblies 280 and 290, and transmit same to a
computer control mechanism (which computer control is preferably
capable of sensing and operating other inputs and aspects of the
assembly 10). The transducers can be utilized for a wide variety of
purposes, including (without limitation): monitoring the recharge
(negative) pressure; indicating the need for servicing or replacing
the filter (such as by monitoring the filter pressure or
differential pressure across the filter); monitoring the dispense
pressure or the entire pressure cycle (which can be used for
advanced process control); and other functions.
[0073] The apparatus and methods of my invention have been
described with some particularity, but the specific designs,
constructions and steps disclosed are not to be taken as delimiting
of the invention. Obvious modifications will make themselves
apparent to those of ordinary skill in the art, all of which will
not depart from the essence of the invention and all such changes
and modifications are intended to be encompassed within the
appended claims.
* * * * *