U.S. patent application number 10/323599 was filed with the patent office on 2003-08-14 for polishing cloth.
This patent application is currently assigned to Rodel Nitta Company. Invention is credited to Hanamoto, Takashi, Hattori, Mineo, Yokomichi, Yasuji.
Application Number | 20030153253 10/323599 |
Document ID | / |
Family ID | 27592177 |
Filed Date | 2003-08-14 |
United States Patent
Application |
20030153253 |
Kind Code |
A1 |
Hanamoto, Takashi ; et
al. |
August 14, 2003 |
Polishing cloth
Abstract
A polishing cloth is adhered to a polishing belt including a
window opening for end-point detection. A transparent film,
including a liner, that transmits end-point detection light is
adhered to a portion of the polishing cloth corresponding to the
window opening of the polishing belt. Another liner is adhered via
an adhesion layer to the adhesion surface of the polishing cloth at
area other than the portion corresponding to the window opening.
The polishing cloth includes the transparent film that transmits
the end-point detection light at the portion corresponding to the
window opening of the polishing belt so that an end point of the
surface of the object to be polished can be detected through the
transparent film. This prevents slurry to leak inside the belt
compared to the conventional technology.
Inventors: |
Hanamoto, Takashi;
(Yamatokohriyama-shi, JP) ; Hattori, Mineo;
(Yamatokohriyama-shi, JP) ; Yokomichi, Yasuji;
(Yamatokohriyama-shi, JP) |
Correspondence
Address: |
DARBY & DARBY P.C.
P. O. BOX 5257
NEW YORK
NY
10150-5257
US
|
Assignee: |
Rodel Nitta Company
|
Family ID: |
27592177 |
Appl. No.: |
10/323599 |
Filed: |
December 13, 2002 |
Current U.S.
Class: |
451/296 |
Current CPC
Class: |
B24B 37/205 20130101;
B24B 37/013 20130101; B24B 21/04 20130101 |
Class at
Publication: |
451/296 |
International
Class: |
B24B 021/00 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 14, 2001 |
JP |
JP 2001-381533 |
Claims
What is claimed is:
1. A polishing cloth to be adhered to a polishing belt including a
window opening for end-point detection comprising: a transparent
film, including a liner, that transmits end-point detection light
adhered to a portion of the polishing cloth corresponding to the
window opening of the polishing belt; a liner, adhered to an
adhesion surface of the polishing cloth facing the polishing belt
at area other than the portion corresponding to the window opening;
and an adhesion layer.
2. A polishing cloth to be adhered to a polishing belt including a
window opening for end-point detection comprising: a transparent
film, including an exfoliation sheet on an outside thereof, that
transmits end-point detection light disposed at a portion of the
polishing cloth corresponding to the window opening of the
polishing belt; an exfoliation sheet, adhered to an adhesion
surface of the polishing cloth facing the polishing belt at area
other than the portion corresponding to the window opening; and an
adhesion layer.
3. A polishing cloth to be adhered to a polishing belt including a
window opening for end-point detection comprising: a base pad; and
a transparent film that transmits end-point detection light,
double-sided tape adhered to an adhesion surface of the base pad
facing the polishing belt, a portion of an exfoliation sheet,
corresponding to the window opening of the polishing belt, out of
the exfoliation sheet of the adhered double-sided tape being cut
out and the transparent film that transmits end-point detection
light being put over a cut portion of the polishing cloth and
adhered thereto.
Description
FIELD OF THE INVENTION
[0001] This invention relates to a polishing cloth (polishing pad)
that is used, for example, when semiconductors are
manufactured.
DESCRIPTION OF THE PRIOR ART
[0002] There has been a polishing cloth that is used, for example,
when semiconductors are manufactured.
[0003] As shown in FIG. 3, plural pieces of polishing cloth 1 are
adhered to a surface of a polishing belt 2 that is driven to
rotate. An object to be polished 3 that is made to spin on the belt
is polished with slurry (not shown in the drawings).
[0004] Window openings 5 for laser end-point detection are drilled
at a fixed distance so that an end-point detection device 4 detects
an end point of a surface state of the object to be polished 3.
[0005] However, there has been a problem that inferior detection
occurs when the slurry leaks inside the polishing belt 2 from the
window opening 5. There has been another problem that the slurry
leaking inside makes the end-point detection device 4 and the like
dirty.
SUMMERY OF THE INVENTION
[0006] It is hence an object of the present invention to provide a
polishing cloth that prevents slurry to leak inside a belt compared
to conventional technology.
[0007] To solve the foregoing drawbacks, this invention takes some
technical steps, which are described next.
[0008] A polishing cloth according to the present invention is
adhered to a polishing belt including a window opening for
end-point detection. A transparent film that transmits end-point
detection light is adhered to a portion of the polishing cloth
corresponding to the window opening of the polishing belt, and a
liner is adhered to the transparent film. Another liner is adhered
via an adhesion layer to an adhesion surface of the polishing cloth
facing the polishing belt at area other than the portion
corresponding to the window opening.
[0009] The polishing cloth includes the transparent film that
transmits the end-point detection light so that an end point of a
surface state of an object to be polished can be detected through
the transparent film.
[0010] The liner is adhered to the transparent film and the other
liner is adhered via the adhesion layer to the adhesion surface
facing the polishing belt at area other than the portion of the
polishing cloth corresponding to the window opening. Therefore,
when the polishing cloth is adhered to the polishing belt, both the
liner of the transparency film corresponding to the window opening
and the other liner of the area other than the portion of the
polishing cloth corresponding to the window opening are peeled off
so that the polishing cloth adhered to the polishing belt is
unlikely to come off from the belt at the time of polishing.
[0011] The above and other objects, features and advantages of the
present invention will become apparent from the following
description read in conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0012] FIG. 1 is a plane view showing a state of polishing cloths
adhered to a polishing belt according to an embodiment of the
present invention.
[0013] FIG. 2 is an enlarged perspective view, partly in sections,
of a main part of the polishing cloth according to FIG. 1.
[0014] FIG. 3 is a perspective view showing a situation how the
polishing cloths are used.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
[0015] As showing FIG. 1 through FIG. 3, plural pieces of polishing
cloth 1 are adhered to a surface of a polishing belt 2 that is
driven to rotate. An object to be polished 3 that is made to spin
on the polishing belt 2 is polished with slurry (not shown in the
drawings). Window openings 5 for laser end-point detection are
drilled at a fixed distance so that an end-point detection device 4
detects an end point of a surface state of the object to be
polished 3.
[0016] As shown FIG. 2, the polishing cloth 1 based on a base pad 6
is used after being adhered to the polishing belt 2 including the
window opening 5 for end-point detection.
[0017] A transparent film 7 that transmits end-point detection
laser light is disposed at a portion of the polishing cloth 1
corresponding to the window opening 5 of the polishing belt 2. In
this embodiment, a round PET film is used as the transparent film
7. The PET film is made of a raw material, named "Super Clean"
produced by TORAY Industries, Inc., that makes laser light
detection possible. A liner 9 (an exfoliation sheet) is adhered to
the outside of the transparent film 7 (the round PET film). A liner
9' (an exfoliation sheet) is adhered via an adhesion layer of
double-sided tape 10 to an adhesion surface of the polishing cloth
1 facing the polishing belt 2 at area other than the portion
corresponding to the window opening 5.
[0018] The polishing cloth 1, for example, is formed by the way
described next.
[0019] First of all, the double-sided tape 10 is adhered to an
adhesion surface of the base pad 6 with the polishing cloth 1
facing the polishing belt 2. A portion of the liner, corresponding
to the window opening 5 of the polishing belt 2, out of the liner
9' of the adhered double-sided tape 10 is circularly cut out. The
above mentioned round PET film 7 is put over the cut portion of the
polishing cloth 1 and is adhered thereto.
[0020] Next, the state how the polishing cloth 1 is used according
to this embodiment is described.
[0021] The transparent film 7 that transmits the end-point
detection light is adhered to the portion of the polishing cloth 1
corresponding to the window opening 5 of the polishing belt 2. The
end point of the surface state of the object to be polished 3 can
be detected through the transparent film 7.
[0022] Moreover, the liner 9 is adhered to the transparent film 7
for laser light and the liner 9' is adhered via the adhesion layer
of the double-sided tape 10 to the adhesion surface the polishing
cloth 1 facing the polishing belt 2 at area other than the portion
corresponding to the window opening 5. Therefore, when the
polishing cloth 1 is adhered to the polishing belt 2, both the
liner 9 of the portion corresponding to the window opening 5 and
the liner 9' of the area other than the portion corresponding to
the window opening 5 are peeled off so that the polishing cloth 1
adhered to the polishing belt 2 is unlikely to come off from the
belt at the time of turning a corner of the belt when
polishing.
[0023] The present invention has the above mentioned structure and
the polishing cloth is adhered to the polishing belt so that it may
not come off from the belt. Therefore, the present invention can
provide the polishing cloth that prevents slurry to leak inside the
belt.
* * * * *