U.S. patent application number 10/136908 was filed with the patent office on 2003-06-19 for remote display module.
Invention is credited to Burroughs, John, Chopy, Joseph JR., Clish, Timothy, Elsdoerfer, Norbert W., Genatossio, Louis, Machireddy, Rama, Varone, John J..
Application Number | 20030114942 10/136908 |
Document ID | / |
Family ID | 34914701 |
Filed Date | 2003-06-19 |
United States Patent
Application |
20030114942 |
Kind Code |
A1 |
Varone, John J. ; et
al. |
June 19, 2003 |
Remote display module
Abstract
A portable display unit includes a serial port to connect to a
device such as a vacuum network controller, cryopump,
turbomolecular pump, gauges or compressor. In particular, the
display unit can be plugged and unplugged to devices of different
types. The portable display unit includes a display and control
keys for programming, controlling and monitoring the functions of a
device. The device accessible to the display unit includes a
display interface having software code and files to interface with
the display unit. Accordingly, the portable display unit can be
used with any device having software code to interface with the
display unit. The software code generates, refreshes and
communicates menus to the portable display unit to provide
graphical interface of the device's functions. The portable display
unit further includes inner and outer hand grips so that the
display unit can be held by hands of different sizes. The hand
grips allow user with different hand sizes to firmly hold and
navigate the display using control keys with fingers.
Inventors: |
Varone, John J.; (Seekonk,
MA) ; Clish, Timothy; (Taunton, MA) ;
Burroughs, John; (Exeter, RI) ; Genatossio,
Louis; (Shrewsbury, MA) ; Machireddy, Rama;
(Foxboro, MA) ; Elsdoerfer, Norbert W.; (Warwick,
RI) ; Chopy, Joseph JR.; (Cumberland, RI) |
Correspondence
Address: |
HAMILTON, BROOK, SMITH & REYNOLDS, P.C.
530 VIRGINIA ROAD
P.O. BOX 9133
CONCORD
MA
01742-9133
US
|
Family ID: |
34914701 |
Appl. No.: |
10/136908 |
Filed: |
May 1, 2002 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
10136908 |
May 1, 2002 |
|
|
|
10023450 |
Dec 17, 2001 |
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Current U.S.
Class: |
700/83 ;
700/275 |
Current CPC
Class: |
G05B 19/042 20130101;
G05B 2219/23406 20130101; G05B 2219/23135 20130101 |
Class at
Publication: |
700/83 ;
700/275 |
International
Class: |
G05B 015/00 |
Claims
What is claimed is:
1. A method of communicating with plural devices comprising:
storing a display controller in each of plural devices of different
types, each display controller generating display menus specific to
the type of device; providing a portable display unit having a
display and control keys; connecting the portable display unit to a
first device of a first type, receiving menus from the first device
specific to its type, displaying the menus on the portable display
unit, and forwarding messages to the device from the portable
display unit to indicate activation of control keys; and connecting
the portable display unit to a second device of a second type,
receiving menus from the second device specific to its type,
displaying the menus on the portable display unit, and forwarding
messages to the device from the portable display unit to indicate
activation of control keys.
2. The method of claim 1 wherein the plural devices are used in a
fabrication plant.
3. The method of claim 1 wherein the first device is selected from
the group consisting of a vacuum network controller, a cryopump, a
roughing pump, a compressor, a water pump, a gauge and a
turbopump.
4. The method of claim 3 wherein the second device is selected from
the group consisting of a vacuum network controller, a cryopump, a
roughing pump, a compressor, a water pump, a gauge and a
turbopump.
5. The method of claim 1 further comprising the step of
establishing a remote session between the portable display unit and
the first device.
6. The method of claim 5 further comprising the step of receiving
menus from the first device specific to its type, displaying the
menus on the portable display unit, and forwarding messages to the
first device from the portable display unit which is connected to
the second device to indicate activation of control keys.
7. The method of claim 1 further comprising the step of
initializing the portable display unit and the first device
subsequent to connecting the portable display unit to the first
device to assure proper connection between the portable display
unit and the first device.
8. The method of claim 7 further comprising the step of checking
software on the display unit to determine whether the software
version is compatible with the one on the first device.
9. The method of claim 8 further comprising the step of forwarding
bitmaps specific to the first device.
10. The method of claim 1 wherein the display menus include menus
to monitor the first device.
11. The method of claim 1 wherein the display menus include hidden
menus to the first device.
12. The method of claim 11 wherein the hidden menus provide a
command interface.
13. A display unit comprising: a display; control keys including at
least up and down scroll keys and an enter key; a device interface
which provides a connection to a device; and electronic circuitry
which forwards messages to the device to indicate activation of
control keys and which displays a menu received in messages from
the device, the electronic circuitry displaying data entered with
the control keys and forwarding the displayed data to the
device.
14. The display unit of claim 13 wherein the electronic circuitry
stores and forwards the entered data upon request to receive
control keys from the device.
15. The display unit of claim 13 further comprises non-volatile
memory which stores code to display menus received in messages from
the device.
16. The display unit of claim 13 further comprising volatile memory
to store a non-requested key entry.
17. The display unit of claim 13 wherein the control keys include
back, home, and help keys.
18. The display unit of claim 13 wherein the control keys are used
to scroll data.
19. The display unit of claim 13 wherein the control keys are used
to change data.
20. The display unit of claim 13 further comprising a pivotable
rest stand to position the display to form an angle along a
vertical axis of a horizontal plane.
21. The display unit of claim 13 further comprising a hand grip to
support holding of the display unit with a hand.
22. The display unit of claim 21 wherein the hand grip is a double
hand grip to support hands of different sizes.
23. The display unit of claim 13 further comprising a screw
connector for mounting the display unit.
24. The display unit of claim 13 wherein the electronic circuitry
performs diagnostic test of the display unit.
25. The display unit of claim 13 wherein the device interface is a
serial port.
26. The display unit of claim 13 wherein the display is vacuum
flourescent display.
27. The display unit of claim 13 further comprising a recess along
a side of the display for setting back the display from the front
surface.
28. The display unit of claim 13 further comprising a shock mount
for protecting the display.
29. A device comprising: a processor; a display interface in
communication with the processor, the display interface providing a
connection to a display unit; a computer-readable medium in
communication with the processor, the computer-readable medium
storing computer-executable software code for: providing a display
driver for communication with the display unit; generating a first
menu specific to the device; communicating the messages to the
display unit; and receiving a key entry from the display unit,
processing the key entry and generating a second menu in response
to the key entry.
30. The device of claim 29 further comprising software code for
committing the key entry upon activation of the enter key.
31. The device of claim 29 wherein the device is selected from the
group consisting of a vacuum network controller, a cryopump, a
roughing pump, a compressor, a waterpump, a gauge and a
turbopump.
32. The device of claim 29 wherein the display interface is a
serial port.
33. The device of claim 29 further comprising software code for
retrieving monitor data from device components.
34. The device of claim 33 wherein the software code generates the
second menu by refreshing monitor data in the first menu.
35. The device of claim 29 wherein the software code generates the
second menu by changing set data in the first menu.
36. A method for displaying a menu on a portable display unit
comprising: connecting the portable display unit to a device;
initiating the display unit and the device to assure a proper
connection between the display unit and the device; at the device,
generating a first menu and communicating the first menu to the
display unit; from the display unit, forwarding a key entry; and at
the device, processing the key entry, generating a second menu in
response to the key entry, and communicating the second menu to the
display unit.
37. The method of claim 36 further comprising resetting the device
when the portable display unit is disconnected from the menu.
38. The method of claim 36 further comprising periodically
forwarding initialization messages from the device to the display
unit to assure a proper connection between the display unit and the
device.
39. The method of claim 36 further comprising at the display unit,
receiving the first menu from the device and displaying the
menu.
40. The method of claim 36 wherein second menu is the menu having
refreshed data.
41. The method of claim 36 further comprising at the display unit,
the step of receiving a key request from the device.
42. The method of claim 36 wherein the second menu is a new menu
with different regions and data.
Description
RELATED APPLICATION
[0001] This application is a continuation-in-part of U.S.
application Ser. No. 10/023,450, filed Dec. 17, 2001. The entire
teachings of the above application are incorporated herein by
reference.
BACKGROUND OF THE INVENTION
[0002] A cluster tool for semiconductor processing generally
includes a tool host controller providing top-level control over
all systems within the cluster tool. The tool includes a series of
processing chambers for performing various
semiconductor-fabrication processes such as wafer etching, chemical
or plasma vapor deposition, oxidation, sintering, and annealing.
These processes often are performed in separate chambers, each of
which may include a vacuum system. The vacuum system may include
control pads or display units fixed to the devices in the system to
provide user interface.
[0003] One type of vacuum system that is widely used in
semiconductor processing is a cryogenic vacuum system. The
cryogenic vacuum system typically includes at least one cryogenic
vacuum pump (cryopump) and at least one compressor for supplying
compressed helium to the cryopump. The system also often includes
other components such as roughing pumps, waterpumps, turbopumps,
chillers, valves and gauges. Together, these components operate to
provide vacuum to a broader system such as a cluster tool for
semiconductor processing.
[0004] In addition to the cryopumps, a conventional vacuum system
typically includes a network interface terminal which communicates
to a tool host controller and the network of cryopumps within the
system. The network interface terminal includes an electronic
module to monitor and control the devices and components within the
network. Similarly, a cryopump may include an electronic module to
monitor and control the cryopump.
[0005] The electronic modules of the cryopump and network interface
terminal may each include a control pad having a keyboard and
display. For example, an alphanumeric display displays one line of
up to sixteen characters. Longer messages are accessed by
horizontal scroll keys. Additional lines of messages and menu items
may be displayed by vertical scroll display keys. The keyboard
includes numeric keys to input numerical data into the system and
functional keys such as ENTER and CLEAR keys to enter and clear
data during programming. The keyboard also includes other
functional keys to activate device operations. For example, a
MONITOR function key allows the display of sensor data and on/off
status of the pump and relays. A REGEN function key activates a
complete cryopump regeneration cycle, allows regeneration program
changes and sets power failure recovery parameters.
SUMMARY OF THE INVENTION
[0006] A display unit of one embodiment of this invention includes
a display, control keys including UP, DOWN and ENTER keys, a device
interface for communicating with a device, such as a vacuum
controller, and electronic circuitry. The electronic circuitry
receives and displays menus received in messages from the device.
The electronic circuitry forwards messages to the device when a
control key is activated. The display unit stores, modifies and
displays data entered with the control keys and forwards the data
to the device.
[0007] The display unit further includes volatile memory such as
RAM to store data entered with control keys but not yet activated
or forwarded to the device. The display unit also includes
non-volatile memory such as Flash to store software code. The
control keys may also include BACK, HOME and HELP keys to support
navigation of menus. The display may also include a filter for a
clear view of the display.
[0008] The display unit may include a rest stand which pivots from
the unit to support the display unit in a range of positions. The
display unit can be mounted on a tripod using a camera-type screw
connector at the bottom of the display unit or to a bracket.
Furthermore, the display unit includes inner and outer hand grips
on the back panel. The hand grips allows secure holding of the
display unit for hands of different sizes. Also, the hand grips are
located at both ends of the display unit so that the display unit
can be held by either the left or right hand and navigate menus
using the control keys with the other hand. The control keys and
hand grips are positioned so that the user may hold the display
unit with both hands and navigate with a thumb. In addition, the
hand grips stabilize and balance the display unit when placed on a
flat surface. Accordingly, the display unit is portable and easy to
carry around. In addition, the ability to place and hold the
display unit in various positions and angles provide optimum
viewing angle of the display.
[0009] A device to which the display unit is coupled includes a
display interface to connect to the display unit. The device also
includes a processor and a computer readable medium storing
computer executable software code. The device interface and the
computer readable medium are in communication with the processor.
The software code stored on the device has the capability to
perform the following operations: providing a display driver to
communicate with the display unit; generating menus specific to the
device; and providing a data interface to request and receive data
from the device. The device may be a vacuum network controller,
cryopump, compressor, roughing pump or turbopump which may be used
in a fabrication plant.
[0010] A method of this invention includes the steps of connecting
the portable display unit to a device and initializing the display
unit. The device generates menus and communicates the menus to the
display unit. The display unit forwards a key entry to the device.
At the device, the key entry is received and processed to generate
a second menu. The second menu is communicated to the display unit.
Each of the devices to which the display unit may be coupled may
include a display controller, including software code, to generate
display menus specific to the device.
[0011] A method of use includes providing a portable display unit
and connecting the portable display unit to a first device of a
first type. The display unit receives menus from the first device,
displays the menus, and forwards messages to the device to indicate
activation of control keys. Similarly, the method includes
connecting the display unit to a second device of a second type.
The display unit receives menus from the second device, displays
the menus, and forwards messages to the device to indicate
activation of control keys.
[0012] A display unit may be connected to a vacuum network
controller via an interface such as a serial port. Similarly, the
display unit also may be directly connected to a device such as a
cryopump, a roughing pump, a compressor, or a turbopump. The vacuum
network controller performs an initialization routine to assure
that there is a proper connection between the vacuum network
controller and the display unit. During an initialization process,
bitmaps specific to the vacuum network controller may be downloaded
to the display unit. Also, the vacuum network controller may check
the software on the display unit and update the software if the
vacuum network controller finds it to be a different version.
[0013] Once the vacuum network controller generates menus, the
vacuum network controller communicates the menu to the display
unit. The vacuum network controller also includes a display driver
to communicate with the display units. The display unit receives
the menu and displays the menu on the display. When a control key
is pressed and activated, the display unit forwards messages to the
vacuum network controller. Similarly, a device connected to a
display unit performs the functions described above of the vacuum
network controller.
[0014] In general, the display unit has two key press modes,
polling and non-polling. In a polling mode, the key entry is not
sent until a device requests a key entry from the display unit. In
a non-pulling key press mode, the key entry is sent immediately
upon key entry. After the key entry is received at the device, the
device processes the key entry and generates a second menu.
Depending on the type of the first menu, a second menu is a new
menu or the same menu with change in data or refreshed data.
[0015] Accordingly, the display unit of the present invention
provides a stand alone display unit that is compatible with many
vacuum system components and other devices. In particular, the
display unit includes control keys and display that support menus
for all the functions of a device to which the display unit is
connected. In addition, a large display facilitates navigation of
menus and messages on the display. A high resolution of the display
provides a clear view of the display.
[0016] Further, the display unit provides control keys that are
easy to use and hand grips for holding and stabilizing on a flat
surface. The rest stand and screw connector for standing and
mounting respectively allow the display to be view in wide range of
positions and angles.
BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The foregoing and other objects, features and advantages of
the invention will be apparent from the following more particular
description of preferred embodiments of the invention, as
illustrated in the accompanying drawings in which like reference
characters refer to the same parts throughout the different views.
The drawings are not necessarily to scale, emphasis instead being
placed upon illustrating the principles of the invention.
[0018] FIG. 1 is a block diagram of a cryogenic vacuum network;
[0019] FIG. 2 is a front view of a display unit;
[0020] FIG. 3 is a block diagram of the hardware in the display
unit of FIG. 2;
[0021] FIG. 4 is a rear view of the display unit of FIG. 2;
[0022] FIGS. 5A-5C are pictorial diagrams of FIG. 2 illustrating
handgrips and use of handgrips;
[0023] FIG. 6 is a view of the display unit of FIG. 2 illustrating
a rest stand;
[0024] FIG. 7 is a view of the display unit of FIG. 2 mounted on a
tripod;
[0025] FIGS. 8A-8B are flowcharts illustrating the processing steps
performed between a device and a display unit in a method of this
invention;
[0026] FIGS. 9A-9C are examples of menus;
[0027] FIGS. 10A-10D are an example tree map diagram of vacuum
network controller menus; and
[0028] FIGS. 11A-11D are example tree map diagrams of cryopump
controller menus.
DETAILED DESCRIPTION OF THE INVENTION
[0029] A description of preferred embodiments of the invention
follows.
[0030] FIG. 1 is a block diagram of a vacuum network. The vacuum
network includes a vacuum network controller 12 which is generally
connected to a tool host controller which controls the operation of
a cluster tool for semiconductor processing. The tool host
controller controls the operation of all processes (e.g., etching,
chemical vapor deposition, physical vapor deposition, and
annealing) performed within the cluster tool as well as the
operation of the vacuum network.
[0031] The vacuum network further includes component links 13-1,
13-2 which connect network vacuum system components, such as a
cryopump 18, a roughing pump 14, a waterpump 19, a compressor 16,
gauges 17 and a turbopump 15. The status of each of these
components can be monitored and controlled by the vacuum network
controller 12. The vacuum network controller also may include a
variety of sensors, including a residual gas analyzer, an ion
gauge, and a capacitance. The vacuum network controller 12 in a
vacuum network may be that described in U.S. Pat. No. 6,272,400 B1,
issued Aug. 7, 2001, entitled "Vacuum Network Controller," by
Jankins et al., the entire contents of which are incorporated
herein by reference.
[0032] The display unit 10 is a portable hand held device that may
be connected to any of the devices and is powered by the device to
which it is connected. The remote display unit 10 provides an user
interface to program, control and monitor all functions of the
device to which the display unit 10 is connected. For example, as
will be discussed in greater detail, the remote display unit 10-1
is connected to the vacuum network controller 12 via display link
11-1 to monitor status, control setup, and program functions of
system components/devices connected to the vacuum network
controller 12. The display unit 10-5 also can be directly connected
to a cryopump through a display link 11-5 to program, control and
monitor all cryopump functions using the control keys and display.
Similarly, FIG. 1 illustrates a waterpump 19, a turbopump 15,
gauges 17, a compressor 16 and a roughing pump 14 connected to
respective remote display units 10-2, 10-3, 10-4, 10-5, 10-6, 10-7
through display links 11-2, 11-3, 11-4, 11-5, 11-6, 11-7.
[0033] The display unit 10 acts primarily as a slave taking
commands from the device. Source code and files to implement this
functionality reside on the device. The display unit has some
functionality built in to keep the interface simple. However, the
display unit 10 can send key presses to the device and the device
sends acknowledgment and other messages in response to the key
press.
[0034] FIG. 2 is a frontal view of the display unit 10 of FIG. 1.
The display unit 10 includes a display 24 and control keys 202,
204, 206, 208, 210, 212, 214, 216. The display may have a
resolution of about 128.times.64 pixels to support alphanumeric
characters and bitmaps of 21 characters wide and 8 lines high. The
control keys include up 208, down 210, left 214 and right 212 arrow
scroll keys that are used to navigate around and within the display
to change values on the display. A selector character such as a
right arrow image may be displayed to support the navigation of the
display using the arrow scroll keys 208, 210, 212, 214.
[0035] The display unit 10 further includes function keys such as
HOME 202, BACK 204, HELP 206 and ENTER 216. These function keys may
be labeled with symbols to indicate their functions.
[0036] An ENTER key 216 is in the center of the arrow keys 208,
210, 212, 214 and has multiple functions depending on the
screen/menu being displayed. Preferably, the ENTER key 216 allows a
user to choose a new menu to be displayed, change a value and
commit the changed value. For example, if the menu includes options
to different menus, then the user may change to a new menu by
selecting the new menu and pressing the ENTER key 216. In other
menus in which a selected value is displayed, such as the BAUD rate
of a communication port, the ENTER key 216 allows to modify and
commit to a different value.
[0037] A HOME key 202 allows the user to return to a main menu from
any of the menus being displayed. A BACK key 204 is used to return
to the previously displayed menu. If the BACK key 204 is hit while
the user is scrolling data to modify the value, then the data is
returned to its original value. A HELP key 206 provides additional
information about the menu being displayed. The HELP key 206
generates a help menu having additional information. The user may
return to the menu from which additional information was requested
by hitting the BACK key 204.
[0038] The display unit 10 includes a serial port to provide a
connection to a vacuum network device. In addition, the serial port
provides power to the display unit 10. For example, the serial port
may be a RS-232 port using a USB cable 26 to connect to the device.
The display unit 10 also includes front panel recesses 28-1, 28-2
on each side of the display 24 to set the display 24 back from the
front panel 27 of the display unit 10 for protecting the display
from scratching or breaking. The display may be a vacuum
fluorescent display having a filter over the display to protect the
lens and minimize glare.
[0039] In addition, as will be discussed in greater detail, a
pivotable rest stand 22 supports positioning of the display unit 10
in various angles. As illustrated in FIG. 2, the rest stand 22 also
may be set in a vertical position for securely placing the display
unit 10 on a horizontal plane or holding with a hand.
[0040] The display unit 10 also has a screen saver mode to increase
the life of the display 24. In particular, the screen saver mode
protects the display by preventing phosphorous burnout. When the
display unit is idle for a set time, preferably about 15 minutes,
the display unit goes into the screen saver mode. The set time is
user programmable, and thus can be changed by the user. In this
mode, the display 24 dims to the lowest brightness level and
scrolls horizontally from left to right across the display 24. The
display unit exits the screen saver mode upon any key press. The
display 24 then returns to its normal brightness and stops the
scrolling.
[0041] A block diagram of the hardware structure of a display unit
10 is provided in FIG. 3. A data bus 39 and address bus 37 link
each of the illustrated elements and support data
communication.
[0042] The display unit 10 further includes a processor 38 which
drives the operations of the display unit 10. In one embodiment,
the processor 38 is a Motorola microcontroller running at a maximum
speed of about 8 Mhz.
[0043] Non-volatile memory 33 includes 512 K bytes of memory and
volatile memory 36 includes about 128 K bytes of memory. The
non-volatile memory 33 stores display and communication features to
lessen the burden on the connected device. For example, a character
generator and code to handle a cursor, blinking character strings,
scrolling features, selector character, and control key modes may
be stored in the non-volatile memory. This allows the device to
simply send character strings and the display unit generates
characters. In addition, the non-volatile memory 33 also supplies
the processor 38 with modules for performing a diagnostic
process.
[0044] A serial port 31 is used to interface with the device. The
display unit 10 also receives power from the device through this
interface. The serial port 31 is programmable, which may have a
default setting of 9600 BPS. The interface to the display is a
serial interface utilizing the industry standard USB cable 26.
About five volts of power may be provided through the USB cable
26.
[0045] The display unit 10 also may include a vacuum fluorescent
display 24 having a resolution of 128.times.64 pixels and an
internal speaker 32 which emits a tone to indicate that a key has
been pressed.
[0046] In a diagnostics process, input/output interfaces such as
the speaker circuit, display and control keys are tested. In
addition, internal and external loop back tests may be performed to
determine the integrity of the RS-232 driver chip and all
connections on the serial data path and proper operations of serial
port communications. In particular, the speaker circuit is tested
by turning the speaker from its lowest to highest volume in a
fairly rapid succession. The display 24 is tested by illuminating
all the pixels on the display 24. The control keys are tested by
displaying the key that was pressed. Diagnostics are preferably
initiated by holding down the ENTER key while applying power from
the USB cable. The diagnostic title screen and the version of
software are displayed when diagnostics are first entered. During
the diagnostics, the display unit 10 also provides instructions on
how to exit diagnostics.
[0047] FIG. 4 is a rear view of the display unit 10 of FIG. 1. As
illustrated, the back panel of the display unit 10 includes inner
hand grips 44-1, 44-2 and outer hand grips 42-1, 42-2. The hand
grips 42 and 44 allow a user to firmly hold the portable display
unit 10 with either the left or right hand. Preferably, as
illustrated in FIGS. 5A-5C, the user uses both hands to hold the
display unit 10.
[0048] The inner and outer hand grips 42, 44 allow users to firmly
hold the display unit so that the user can use one finger to
navigate the keys while holding the display in the users'palms.
FIG. 5B illustrates the outer hand grips 42-1, 42-2 providing hand
grips to users with small to average hands. FIG. 5C illustrates the
inner had grips 44-1 and 44-2 being used by a user having large
hands.
[0049] In addition, the inner and outer hand grips 42, 44 are
designed to stabilize the display unit 10 on a horizontal plane.
The user can place the display unit on a horizontal plane such as a
desk or table and still be able to navigate the keys without the
need for holding the display unit down.
[0050] FIG. 6 illustrates the rest stand 22 rotated about a
horizontal axis perpendicularly extending away from the front side
of display unit. The rest stand 22 stabilizes the display unit 10
in an upright position. The rest stand 22 is a constant torque
hinged stand to support the display unit 10 in various angular
positions. The user can place the display unit 10 on a horizontal
surface and use the rest stand to tilt the display unit 10 back to
view the display 24 in a preferred angle. As illustrated in FIGS.
5A-5C, the rest stand can be rotated to extend vertically along the
side of the display unit 10 so that the user can hold the display
unit with his hand.
[0051] The display unit 10 can also be mounted on a tripod 72, as
shown in FIG. 7. A screw connector 52 (FIG. 5A) on the bottom of
the display unit 10 allows the display unit to securely mount on
the tripod 72. The tripod 72 can be a camera tripod having a
rotational mechanism to allow the rotation of the display unit 10.
The tripod provides rotational and elevated views of the display.
In addition, the tripod provides more stable placement of the
display unit on a horizontal surface. The screw connector 52 also
may be used to mount the display unit on a bracket.
[0052] Returning to FIG. 1, the display unit 10 is connected to a
vacuum network controller 12. The vacuum network controller 12
includes a display interface library having source codes and files
to communicate with the display unit 10, generate menus specific to
the vacuum network controller, and request/receive data from the
components and devices of the vacuum network controller. The
display interface library is created when the vacuum network
controller powers up. In particular, a display driver object is
created to interface to the vacuum network controller's dedicated
serial drivers. In addition, a display document object is created
to interface to data from the vacuum network controller. The
display interface also includes a definition of all menus covering
programming, controlling and monitoring functions of the vacuum
network controller.
[0053] A computer-software-based process for interfacing between a
device and the display unit 10 is illustrated in the form of a flow
chart in FIGS. 8A-8B. In this example, the device is a vacuum
network controller 12. However, as discussed above, the
computer-software-based process described below may reside in other
system devices to be accessible to the display unit.
[0054] When the display unit 10 connects at 802 to the vacuum
network controller 12, the display unit 10 also receives power
through the connection 26 (FIG. 2). The display unit initializes at
801, and at 803, sends a ready message to the vacuum network
controller 12.
[0055] Once the vacuum network controller receives a ready message
at 804, the vacuum network controller 12 initializes at 805.
[0056] If the display unit 10 is disconnected from the vacuum
network controller, the vacuum network controller 12 detects that
the display unit is no longer connected and resets. For example,
the vacuum network controller occasionally sends a test packet to
determine whether the display unit is connected. The vacuum network
controller 12 monitors the serial port for connection to another
display unit.
[0057] After initializing the vacuum network controller, an
initialization message is sent at 806 to the display unit 10. If
the display unit 10 does not receive the initialization message
from the device 807, then it sends at 803 another ready message
until the initialization message is received. This handshake
process indicates that the device and display unit are active and
working properly.
[0058] After sending the initialization message at 809, the vacuum
network controller 12 may check the revision level of the software
embedded in the display unit 10 to determine if the software needs
to be updated. If it is determined at 811 that the software needs
to be updated, then the vacuum network controller updates at 808
the software of the display unit 10 by downloading at 850. In
addition, special bitmaps that are not stored in the display unit
10 may be downloaded during this time. For example, a welcome logo
may be downloaded and displayed.
[0059] Referring to FIG. 8B, once initialization process 800 is
complete, the vacuum network controller generates at 813 a menu and
sends it at 810 to the display unit 10 (FIG. 1). The display unit
10 receives the menu at 815 and displays it on the display 24. The
vacuum network controller also sends an acknowledgment message at
818.
[0060] Once the acknowledgment message is received at the display
unit at 820, the display unit 10 receives a key press at 819. Then,
the display unit determines at 823 the key press mode. There are
two key press modes, polling key press mode and non-polling key
press mode. The display unit and the vacuum network controller are
preferably in non-polling key press mode unless the vacuum network
controller sends a command to the display unit and puts them in
polling mode. In polling key press mode, the display unit accepts a
single key press and stores it in volatile memory at 825 until the
vacuum network controller sends a command requesting the key at
830. Once the display unit receives the request at 832, the stored
key press is sent at 834. Sometimes, there may be no stored key
press.
[0061] The polling mode is preferably used for monitor menus
because the monitor menus are constantly refreshed and only require
a key press to exit the menu. In the polling mode, the vacuum
network controller may send new data to the display unit without
the chance of collisions with key press packets coming from the
display unit. In the non-polling (interrupt) key mode, a key can be
pressed at any time and is immediately sent to the vacuum network
controller at 827.
[0062] If the menu being displayed is a monitoring menu or in the
polling mode and determine at 828 that there is no key press, then,
the vacuum network controller refreshes data at 816, generates a
menu with a new set of data at 813, and sends the menu to the
display unit 10. For example, if the menu is showing the status of
compressor including various pressure levels, the vacuum network
controller refreshes by requesting for new data and sending the
data to the display unit.
[0063] Once a key press is sent at 827 from the display unit 10 to
the vacuum network controller 18, the vacuum network controller
receives at 812 the key press. The vacuum network controller 12
processes the key press at 822. For example, if the menu is a
monitor menu (FIG. 9B) illustrating data, then typically, the key
press is for a new screen. However, if the menu is a set up menu
(FIG. 9C), a key press may be requesting a new menu or changing a
value. For example, as illustrated in FIG. 9C, the user may be
changing the BAUD rate of one of the ports.
[0064] The vacuum network controller then determines if the ENTER
key was pressed at 824. If the ENTER key was pressed, then the key
press is committed to non-volatile memory at 826. Otherwise, the
key is stored in volatile memory.
[0065] After generating a menu at 813, the vacuum network
controller sends or updates the menu to the display unit at 810.
The menu is generated at 813 by changing a value on the menu or
providing a new menu. Thus, at 810, the vacuum network controller
sends messages to change a line or a character in the menu.
Further, the messages may include a new menu. This loop continues
until the display unit is disconnected or screen saver is
activated.
[0066] The vacuum network controller 12 also supports service
session menus. Preferably, these menus are restricted to service
personnel. These menus may be restricted by providing access when a
password sequence of key entries are made. The service menus
provide an interface to the vacuum network controller command
parser, so that all commands on the vacuum network controller are
directly accessible via the display unit. It requires familiarity
with the interface commands and is a tool in addition to the
screens described to allow maximum flexibility. This takes a string
provided by the user and send it to the vacuum network controller
as if it were an OR command line interface. The response is sent to
the display unit menu as a text string.
[0067] As discussed previously, the display unit may be connected
to other devices such as cryopumps and compressors to support
programming, controlling and monitoring all the functions of the
device.
[0068] Returning to FIGS. 9A-9C, each menu may be split up into
multiple horizontal regions. Each region is capable of displaying
up to 21 characters of text or more, containing a selector
character, title, data and a cursor. There can be multiple regions
per line but the total number of characters displayed by any
combination of regions on a single line typically do not exceed 21
characters. Different configuration of the menu may be used
according to the user's needs.
[0069] In general, commands sent from a device require an
acknowledgment from the remote display unit. The device can send
commands to display text, bitmaps, cursors, check-off boxes, scroll
indicators, clear and others. The only commands that the display
unit sends are the "ready" command and key press command.
[0070] The device includes a definition of all menus specific to
the device and the regions within each menu. Each region also may
contain a check-off box and an under-bar cursor. The region also
defines whether it contains data, the attributes of that data and a
pointer to the object that "owns" the region. Menus can have static
or dynamic regions. Static regions are created once when the device
is initialized and are never deleted, e.g. Main menu. A menu with
dynamic regions has regions created each time the menu is accessed,
e.g., a list of all pumps on the network.
[0071] Each screen may be defined as the view of the display that
contains up to (8) lines of text and controlled by making entries
at the keypad. The screens will have common attributes that include
identical keypad values (direction, enter, home, etc. keys).
[0072] FIGS. 10A-10D are an example tree map of menus for a vacuum
network controller connected to a display unit. The tree map and
individual menus may be built according to the user's preference
and needs. In addition, the tree map and menus may reside in other
system devices to be accessible to the display unit and built
according to the needs and features of the device.
[0073] After the initialization process is completed, a Main menu
100 is displayed from the vacuum network controller. Whenever the
HOME button is hit, this screen is displayed. The Vacuum Network
Controller Main menu 100 provides options to the following menus: a
Monitor menu 104 to monitor various network data and configuration;
a Regeneration menu 102 to start regeneration for pumps selected by
a user; an Access Device menu 106 to start a session with a pump,
or other devices on the network; and a System Setup menu 108 to
change and display the configuration of the vacuum network
controller.
[0074] The Regeneration menu 102 allows the user to start or abort
a group regeneration. It also displays the current group
regeneration state. This state is simply ON or OFF. An OFF state
indicates that a group regeneration has not started or is not in
progress. An ON state indicates that a regeneration has started or
is in progress. This menu is not a monitor screen, so the menu is
preferably refreshed when the screen is entered or navigated.
Selecting a "Start" option starts to regenerate the pumps.
Selecting an "Abort" option stops a group regeneration that is
already in progress.
[0075] Once the "Start" option is selected, the user enters a
Choose Regen Pumps menu 110 showing a list of all pumps currently
on the vacuum network. The user is allowed to select pumps to
regenerate. If the BACK or HOME key is hit before the "ENTER"
option is hit, the display returns to the Main menu and changes
made at this screen is discarded.
[0076] A List to Regen menu 112 displays all pumps that were
selected in the Choose Regen Pumps menu 110 to be regenerated. If
the user is satisfied with the list and would like to proceed, the
user selects either "start fast regen" or "start full Regen" option
and hits the ENTER key. If the ENTER key is pressed, the vacuum
network controller starts a group regeneration. If the user is not
satisfied and wishes to edit the list, the user may return to the
previous menu by pressing the BACK key.
[0077] A REGEN Verification menu 114 prompts the user to confirm
starting a regeneration. It provides a simple choice to start a
Regen or not. If the user decides not to start a Regen, then the
user is returned to the previous menu screen and no Regen is
started. Otherwise a Regen Response menu 118 displays the results
and includes an error message if the command fails.
[0078] A Regeneration Abort menu 142 provides the user a chance to
verify that they want to abort regeneration.
[0079] The Monitor menu 104 provides access to other menus which
display readable data. The data may include both configuration and
runtime pump data. This family of menus may be expanded to include
other menus according to the user's needs. The data displayed in
this branch of menus is refreshed by the vacuum network controller
at regular time intervals. In addition, since these menus are
monitor menus, they are in poll-key press mode.
[0080] A Show Devices menu 124 displays a list of the type and
quantity of devices that are on the network. The user can scroll to
the type of device they wish to view and hit the ENTER key to
proceed to the next menu which identifies each of these devices.
For example, a Network Pumps menu 126 identifies every pump on the
network and a Network Compressors menu 128 identifies every
compressor on the network.
[0081] A Show Regeneration Setup menu 132 allows the user to peruse
the roughing maps and other regeneration configuration data. To
view the roughing maps, the user hits enter and is taken to a
screen that shows a Rough Map 1 menu 134. The user can navigate
through all maps from that screen.
[0082] A Network Status menu 130 provides options to monitor device
parameters across the network. The options may include a Pump
Temperatures menu 136 which provides T1 (first stage) and T2
(second stage) temperatures for all pumps on the network. For
example, pump 1 has T1 and T2 temperatures of 35 K and 12 K
respectively. The Network Status menu may also include other device
parameters for each pump. A Compressor Pressures menu 140 displays
the Supply and Delta pressure for all compressors on the
network.
[0083] A Network Status menu 138 indicates the status of the
network. The vacuum network controller scans the network and return
a list of all devices on the network. Any problems that are
discovered are flagged, otherwise the user receives an indication
that the network is operating correctly. Preferably, the Network
Status menu 138 does the following: scan the network for all
devices; verify every device on the network is also on a helium
map; indicate all devices on the network and in the helium map with
the Serial Number and Software Revision; devices that are on the
network but are not in a helium map are flagged; and devices that
are not on the network but are in a helium map are also
flagged.
[0084] A Show Helium menu 142 provides a Helium Maps menu option a
Show Helium Maps menu 144 allows the user to view each Helium
Map.
[0085] The Access Network Device Screen 106 allows the user to
access an individual pump or other network devices such as a
cryopump. The user initially selects the type of devices to access.
The quantity of each type of device currently on the network are
displayed. An option to switch a device "on" and "off" may also be
included. The user may scroll to the device and access it by
hitting the ENTER key. An Access Network Pump 146 menu allows the
user to select a pump number from a list of pumps on the network
and open a session with the selected devices. The display unit then
accesses the pumps directly, and the vacuum network controller
transfers data between the two. Thus, the menu maintenance stays
within the device that provides the menus.
[0086] The user sees a list of pumps on the network and selects one
with the cursor. After the enter button is hit, the Pump session is
launched. If the pump is directly connected to another display
unit, then the pump locks the local display unit. The lock on the
local display unit is released when the session is terminated. The
pump's local remote display (RD) displays the Pump Main menu. The
pump session on the vacuum network controller appears as if the
display unit were directly plugged into the pump. The vacuum
network controller is able to detect if the pump is no longer able
to communicate with the vacuum network controller (from a network
error or the pump being taken offline), during a session and
terminates the session. An intermediary screen may be provided to
choose the type of device.
[0087] The Access Pump menu 148 is a monitor-like screen that
contains Temperature 1, Temperature 2, Cryo TC (Vacuum) and current
Regen Status. The Access Pump menu may also include other pump
data.
[0088] Access Network Compressor menu 147 is similar to the Access
Pump menu 146 and provides similar data of compressors on the
network.
[0089] A Compressor Data menu 149 is provided until compressor
sessions are supported.
[0090] The System Setup menu 168 includes menus that are configured
and generally not accessed by the user. The Password menu 156 sets
up a user password to enter all menus except the monitor menu. The
Regen Config menu 150 includes all regeneration related
configurations. The Data Communication menu 162 sets data
communication parameters and provides a hidden entry into virtual
command interface sessions.
[0091] The Regeneration Setup menu 150 provides the configuration
of regeneration parameters. To configure a rough map, the user
scrolls to that region, hits ENTER, and scrolls the map ID's until
getting to the one desired. The user then hits ENTER again to go to
the configuration screen. Full coordination and Power Failure
Coordination are also set on/off by scrolling on this screen.
[0092] A Rough Map menu 150 provides the user to configure the map
by selecting or deselecting the pumps to be members of the map and
hitting ENTER to create the map. All pumps on the system are
displayed. The pumps already in the map may be removed from the
list or left on it.
[0093] After selecting the pumps for the map, the user scrolls down
to "ENTER" and hits enter to create the rough map. Before entering
the change, the user may hit the BACK key or HOME key to cancel the
change. The configuration is not changed until the "COMMIT CHANGE"
option is chosen on the next screen and the ENTER key is hit. If an
error prevents the rough map from being configured, a menu informs
the user and returns to the last screen to reconfigure the map.
[0094] A Password Setting menu 156 allows the user to select
password protection by selecting "Change Password" option to set a
password and turning "Protection" on. When the user turns
Protection on, the user is prompted to set the password. To enter
any branch off the main screen except the "Monitor" menu, the
password is required. When Protection is turned off, no password is
required.
[0095] A Secret Password Reset feature may be provided to reset the
password to a default value. The user may reset the password in
case the password is forgotten, without requiring field support.
The password reset function is implemented from the main screen by
pressing a combination of keys. When a correct combination of keys
are pressed, a verification menu asks the user if he wants to reset
the password.
[0096] At a Verification menu 160, the user may hit the Back key
before committing the data if he decides not to change or set a
password. If verification fails, then an error message results. If
verification is successful, then a message indicating success is
displayed. There may be pop-up screens to guide the user if the
entered password is not within the required range.
[0097] A Data Communication menu 162 provides access to the
communication parameters. The vacuum network controller determines
which ports are available. The user may change a value by scrolling
to the parameter and setting a new value.
[0098] There may be several hidden screens that can be accessed
from the COMMUNICATION screen by hitting a combination of keys or
keys in sequence. The hidden screens provide service personnel to
access data that the user either does not need to access, because
it is easily misinterpreted and may not be significant to their
operation, or should not access, because unintended misuse could
have a negative impact on their system.
[0099] The Hidden screens may be entered via the Service Entry menu
164 which include options to view Map data or enter a Virtual
command interface session.
[0100] A Hidden Virtual Command Session menu 166 is a yes/no
verification menu to verify whether the user wishes to enter a
session.
[0101] A Virtual Command Session menu 168 may include two boxes.
The first one may be to enter commands to the vacuum network
controller and the second one may be to see the vacuum network
controller's response to the command.
[0102] A Hidden Helium Map menu 170 displays data that the user
does not need to access. A Helium Setup menu 172 allows the user to
select which Helium Map they want to configure by entering the
number. Numbers are scrolled like other screens with the UP/DOWN
arrow keys and committed by pressing the ENTER key. A Choose Helium
Map Pumps menu 174 is similar to the Rough Map menu 152 and allows
the user to select pumps. A Choose Helium Map Compressors menu 176
is similar to the Verify Rough Map menu 154 and allows to select
compressors. A Verify Helium Map Setup menu 178 displays the Helium
Map and allows the user to accept (COMMIT) or reject it.
[0103] FIG. 11A is an example tree map of menus for a cryopump
connected to a display unit.
[0104] A Pump Main menu 200 displays the name of the device, and
provides the user with options to enter the following menus: a
Monitor menu 202 which monitors temperature and pressure values,
temperature control parameters, and regeneration status; a
Regeneration menu 204 for starting, stopping, or aborting a full or
fast regeneration; a System Setup menu 208 which allows
configuration of Regeneration setup, Security, Communication,
Station ID, Power Fail Recovery parameters, and Relays; a Control
menu 208 which allows manual control of various parts of the
Cryopump; a Pump Info menu 210 which displays information about
Software revisions, serial number, part number, address and
operating time.
[0105] FIG. 11B illustrates an example Cryopump Monitor menu tree
map. The Monitor menu 202 allows access to children menus to view
information on Pump State 212, Regeneration Information 214, Valve
Status 216 and Temperature control 218.
[0106] FIG. 11C illustrates an example Cryopump Regeneration menu
tree map. The map includes the Regeneration start menu 204 to
confirm starting regeneration, a Regen Verification menu 220, a
Regeneration status menu 222, a Abort Regeneration menu 224 for
aborting regeneration in progress, and Regeneration Response menu
226.
[0107] FIG. 11D is an example tree map of Cryopump System Setup
menus. The System Setup Main menu 206 provides a Regeneration Setup
menu 230 providing a selection of regeneration setup categories,
including regeneration purge setup, regeneration roughing setup and
regeneration delay setup. The System Setup menu 206 also provides
an option to a Security Setup menu 232, a Station ID menu 236 to
identify the station, a Power Fail Setup menu 238 to configure
Power Failure parameters, a Communication Setup menu 234 and a
Relay Setup menu 260 to select a relay to configure.
[0108] The Control menu 208 (FIG. 11A) allows the user to control
various parts of the cryopump including motor, rough value, purge
value, vent valve and relays. The Pump Info menu 210 allows the
user to view pump serial number, part number, network address,
operating time and software revision.
[0109] The user may also access a Service menu by pressing a
combination of keys or keys in a sequence. The menu includes
information about Management parameters, Temperature Control
Parameters, and Software versions for the individual modules in the
pump. In addition, the menu may provide access to hidden menus for
entering a virtual command session.
[0110] Referring back to FIG. 1, the menus for the cryopump 18 also
may be accessed and displayed on the remote display unit 10-1 that
is connected to the vacuum network controller 12 through a remote
session. Similarly, the remote session may be made with other
devices to provide access and display menus of the selected device
on the remote display unit 10-1. For example, the user may create a
remote session from the vacuum network controller 12 by navigating
to a menu which allows the user to choose a device such as a
cryopump 18, waterpump 10, turbopump 15, gauges 17, compressor 16
or roughing pump 14 on the network, and start a remote session.
[0111] The devices and vacuum network controller 12 communicate
with each other over the network using the bitbus master/slave
protocol. When the vacuum network controller 12 is designated as
the master, the devices respond to requests from the vacuum network
controller 12. Thus, in a remote session, the vacuum network
controller 12 is used to drive the session. The vacuum network
controller may perform this in a loop:
[0112] Send request (bitbus) to the device for a command;
[0113] If got command, send it to the remote display unit (serial)
and get response (serial);
[0114] Send the remote display unit's response to the device
(bitbus);
[0115] Start over.
[0116] When a device receives the vacuum network controller's open
session request but already has a display unit 10-5 directly
plugged into it, the device locks out the display unit 10-5 and
displays a message to the user that there is a remote session
running. If, at the time of open session request, there is no local
display unit directly connected to the device, but a display unit
is connected after a remote session has started, then the local
display unit directly connected to the device is locked out and the
remote session message is displayed.
[0117] Since the device can send commands to the vacuum network
controller 12 at vacuum network controller's request, the vacuum
network controller 12 sends a command to the device over bitbus
asking the device if it has any commands for the remote display
unit 10-1. The vacuum network controller 12 also sends different
commands to return responses from the remote display unit 10-1 to
the device.
[0118] A display unit communicates using packets that can vary in
length. Packets having 4 to 25 bytes are used, but packets of other
sizes may also be used. The bitbus protol used in the network may
be set up to send 13 byte packets. However, the bitbus can also be
configured for different packet lengths.
[0119] To get around this restriction on the payload length of the
bitbus packets, serial packets from the display unit is fragmented
and reassembled after sending them over the bitbus network. For
example, in a remote session with the cryopump 18, the cryopump 18
breaks a serial packet, which is meant for a local display unit
10-5, up into fragments if it is greater then 13 bytes and sends it
to the vacuum network controller 12. In particular, each serial
packet, or fragment of a packet has length added to the it at the
beginning of the packet. The serial packet is then embedded into a
bitbus packet, and sent over the bitbus network to the vacuum
network controller 12. The vacuum network controller 12 gets the
packet and reconstructs the fragments into a single serial packet.
The vacuum network controller 12 then sends the serial packet to
the remote display unit 10-1.
[0120] Similarly, when the vacuum network controller 12 receives a
response from the remote display unit 10-1, the vacuum network
controller 12 embeds the response into a bitbus packet and sends it
to the cryopump appended onto a command string which indicates that
this is a response from the remote display unit 10-1. Thus, the
remote display unit attached to the vacuum network controller 12
receives serial commands and sends responses without knowing that
the origin is a device somewhere else on the network. In addition,
the packets and responses may be stored in buffers on the
device.
[0121] To close a remote session, the user may hit a BACK key from
the device's main menu. The device then sets a command to close the
session and sends the command to the vacuum network controller 12
at the next vacuum network controller's request. The vacuum network
controller 12 then gets the close command and sends the close
session command to the device so the remote session is closed.
[0122] As stated above, a remote session may be established between
the remote display unit 10-1 connected to the vacuum network
controller 12 and any device such as a waterpump 19, cryopump 18,
turbopump 15, gauges 17, compressor 16, or roughing pump 14.
[0123] While this invention has been particularly shown and
described with references to preferred embodiments thereof, it will
be understood by those skilled in the art that various changes in
form and details may be made therein without departing from the
scope of the invention encompassed by the appended claims.
* * * * *