U.S. patent application number 09/948974 was filed with the patent office on 2003-05-08 for apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfaces.
This patent application is currently assigned to KLA-Tencor Corporation. Invention is credited to Fu, Hong, Guan, Yu, Lange, Steven R..
Application Number | 20030086080 09/948974 |
Document ID | / |
Family ID | 26971583 |
Filed Date | 2003-05-08 |
United States Patent
Application |
20030086080 |
Kind Code |
A1 |
Guan, Yu ; et al. |
May 8, 2003 |
APPARATUS AND METHODS FOR REDUCING THIN FILM COLOR VARIATION IN
OPTICAL INSPECTION OF SEMICONDUCTOR DEVICES AND OTHER SURFACES
Abstract
Disclosed are methods and apparatus for designing an optical
spectrum of an illumination light beam within an optical inspection
system. A set of conditions for inspecting a film on a sample by
directing an illumination light beam at the sample is determined.
At least a portion of the illumination light beam is reflected off
the sample and used to generate an image of at least a portion of
the film on the sample. A plurality of peak wavelength values are
determined for the optical spectrum of the illumination light beam
so as to control color variation in the image of the film portion.
The determination of the peak wavelengths is based on the
determined set of conditions and a selected thickness range of the
film. In one specific embodiment, the color variation is reduced,
while in another embodiment the color variation is increased to
enhance pattern contrast. An apparatus which implements the
designed optical spectrum is also disclosed.
Inventors: |
Guan, Yu; (San Jose, CA)
; Fu, Hong; (Fremont, CA) ; Lange, Steven R.;
(Alamo, CA) |
Correspondence
Address: |
BEYER WEAVER & THOMAS LLP
P.O. BOX 778
BERKELEY
CA
94704-0778
US
|
Assignee: |
KLA-Tencor Corporation
|
Family ID: |
26971583 |
Appl. No.: |
09/948974 |
Filed: |
September 7, 2001 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
60300088 |
Jun 21, 2001 |
|
|
|
Current U.S.
Class: |
356/237.1 |
Current CPC
Class: |
G01J 3/10 20130101; G01J
3/46 20130101; G01B 11/0625 20130101 |
Class at
Publication: |
356/237.1 |
International
Class: |
G01N 021/00 |
Claims
What is claimed is:
1. A method of designing an optical spectrum of an illumination
light beam within an optical inspection system, the method
comprising: determining a set of conditions for inspecting a film
on a sample by directing an illumination light beam at the sample,
where at least a portion of the illumination light beam is
reflected off the sample and used to generate an image of at least
a portion of the film on the sample; and determining a plurality of
peak wavelength values for the optical spectrum of the illumination
light beam so as to control color variation in the image of the
film portion, the determination of the peak wavelengths being based
on the determined set of conditions and a selected thickness of the
film, the determined peak wavelengths being wavelengths within the
spectrum that have a maximum intensity value as compared to
neighboring wavelengths and the determined peak wavelengths being
between a wavelength range of a light source of the illumination
beam.
2. A method as recited in claim 1, wherein the color variation in
the image is suppressed.
3. A method as recited in claim 1, wherein the color variation in
the image is increased so that pattern contrast is enhanced.
4. A method as recited in claim 1, wherein the conditions include a
wavelength range, a material type of the sample, an objective
numerical aperture of the inspection system, and a detected
spectral signal response of the inspection system.
5. A method as recited in claim 4, wherein the peak wavelengths are
determined by the following equation (1): 6 q = 4 nd 0 fm f ( f )
cos f sin f f q 0 fm sin f f ( 1 ) wherein d.sub.0 is the selected
film thickness, n is the index of refraction for the film, q is an
integer such that
.lambda..sub.min<.lambda..sub.q<.lambda..sub.m- ax with
.lambda..sub.min and .lambda..sub.max being the minimum wavelength
and maximum wavelength, respectively, obtainable from the
inspection system's illumination source, and .theta..sub.f is the
angle of refraction inside the film, the maximum value of
.theta..sub.f, denoted by .theta..sub.fm is obtainable from the
objective numerical aperture (NA) of the inspection system using
.theta..sub.fm=sin.sup.-1(NA/n) and the function f(.theta..sub.f)
describes the angular intensity distribution of the illumination
light in the film.
6. The method as recited in claim 4, wherein when an illumination
light intensity is angularly uniform within the numerical aperture
(NA) of the objective, then the peak wavelengths are determined by
the following equation (2): 7 q = 2 d 0 ( NA ) 2 qn [ 1 - 1 - ( NA
n ) 2 ] ( 2 )
7. A method as recited in claim 1, further comprising determining a
width and a height associated with each determined peak
wavelength.
8. A method as recited in claim 7, wherein the heights associated
with the peak wavelengths are determined through apodization.
9. A method as recited in claim 8, wherein the heights associated
with the peak wavelengths are further determined through applying a
correction factor to each height to compensate for wavelength
dependence of color variation.
10. A method as recited in claim 9, wherein the widths associated
with the peak wavelengths are determined by: selecting values for
the widths; simulating color variation values as a function of film
thickness on the sample based on the values of the widths; and
changing the values of the widths until the simulated color
variation is less than a predetermined percentage value or
minimized for the selected film thickness.
11. A method as recited in claim 9, wherein the widths associated
with the peak wavelengths are determined by: selecting values for
the widths; simulating color variation values as a function of film
thickness on the sample based on the values of the widths; and
changing the values of the widths until the contrast between two
selected values of film thickness or two selected materials is
greater than a predetermined values or is maximized.
12. A method as recited in claim 10, configuring an optical
inspection system to construct an illumination spectrum having the
determined peak wavelengths and determined widths and lengths
associated with each determined peak wavelength.
13. A method as recited in claim 12, wherein configuring the
optical inspection system is accomplished by forming a filter in an
optical path of the optical illumination beam.
14. A method as recited in claim 13, wherein the filter is inserted
between a source for the optical illumination beam and the
sample.
15. A method as recited in claim 13, wherein the filter is inserted
between the sample and an imaging device of the inspection
system.
16. A method as recited in claim 13, wherein forming a filter is
accomplished by modifying a component of the optical inspection
system to serve as a filter for the optical illumination beam
before or after at least a portion of the beam reflects off the
sample.
17. A method as recited in claim 13, wherein the filter is an
interference spectrum filter or a spatial light modulator combined
with a wavelength dispersion device.
18. A method as recited in claim 12, wherein configuring the
optical inspection system is accomplished by combining outputs from
a plurality of lasers or narrow band light sources and adjusting
the output intensity levels from the plurality of light sources so
as to mimic an illumination spectrum having the determined peak
wavelengths and determined heights associated with each determined
peak wavelength.
19. A method as recited in claim 12, wherein configuring the
optical inspection system is accomplished by passing a laser
through a Raman scattering material combined with a spectral
intensity control mechanism positioned or positionable to generated
a spectrum to thereby mimic an illumination spectrum having the
determined peak wavelengths and determined heights associated with
each determined peak wavelength.
20. An inspection system for analyzing a sample, the system
comprising: a light source for generating an illumination light
beam; a first optics arrangement for directing the illumination
beam to a film on a sample; a second optics arrangement for
receiving a portion of the illumination beam that reflected off the
sample to thereby generate an image of the film; a spectrum
controller for controlling a spectrum of the illumination beam so
that color variation of the image is controlled, wherein the
controlled spectrum includes a plurality of peak wavelengths
selected to control color variation for a particular thickness
value of the film and a particular configuration of the inspection
system, the determined peak wavelengths being wavelengths within
the spectrum that have a maximum intensity value as compared to
neighboring wavelengths and the peak wavelengths being between a
wavelength range of a light source of the illumination beam.
21. An inspection system as recited in claim 20, wherein the color
variation in the image is suppressed.
22. An inspection system as recited in claim 20, wherein the
pattern contrast in the image is enhanced.
23. An inspection system as recited in claim 20, wherein the
particular inspection configuration includes a wavelength range, an
objective numerical aperture of the inspection system, and a
configuration of the first and second optics arrangements.
24. An inspection system as recited in claim 23, wherein a
plurality of heights associated with the peak wavelengths have a
generally apodized distribution.
25. An inspection system as recited in claim 24, wherein the
heights associated with the peak wavelengths compensate for a
wavelength dependence of color variation.
26. An inspection system as recited in claim 25, wherein the widths
associated with a plurality of peak wavelengths are selected to
control color variation.
27. An inspection system as recited in claim 25, wherein the
spectrum controller is a filter in an optical path of the optical
illumination beam.
28. An inspection system as recited in claim 27, wherein the filter
is positionble or positioned in an optical path of the illumination
beam between the light source and the sample.
29. An inspection system as recited in claim 27, wherein the filter
is positionable or positioned in an optical path of the reflected
illumination beam and between the sample and an imaging device of
the inspection system.
30. An inspection system as recited in claim 27, wherein the filter
is integrated within the first and/or second optics
arrangement.
31. An inspection system as recited in claim 27, wherein the filter
is an interference spectrum filter or a spatial light modulator
combined with a wavelength dispersion device.
32. An inspection system as recited in claim 25, wherein the light
source is configured to generate a plurality of laser or narrow
band beams and the spectrum controller is configured to combine the
laser or narrow band beams and adjust an intensity level of each of
the plurality of beams so as to substantially produce the
controlled spectrum of the illumination beam having the plurality
of peak wavelengths associated with heights that have a generally
apodized distribution and compensate for a wavelength dependence of
color variation to control color variation.
33. An inspection system as recited in claim 25, wherein the light
source is configured to generate a laser or narrow band beam and
the spectrum controller is a Raman scattering material combined
with an spectral intensity control mechanism positioned or
positionable to generated a spectrum to thereby substantially mimic
the controlled spectrum of the illumination beam having the
plurality of peak wavelengths associated with heights that have a
generally apodized distribution and compensate for a wavelength
dependence of color variation and to control color variation.
34. A computer system operable to design an optical spectrum of an
illumination light beam within an optical inspection system, the
computer system comprising: one or more processors; one or more
memory, wherein at least one of the processors and memory are
adapted to: determine a set of conditions for inspecting a film on
a sample by directing an illumination light beam at the sample,
where at least a portion of the illumination light beam is
reflected off the sample and used to generate an image of at least
a portion of the film on the sample; and determine a plurality of
peak wavelength values for the optical spectrum of the illumination
light beam so as to control color variation in the image of the
film portion, the determination of the peak wavelengths being based
on the determined set of conditions and a selected thickness range
of the film, the determined peak wavelengths being wavelengths
within the spectrum that have a maximum intensity value as compared
to neighboring wavelengths and the determined peak wavelengths
being between a wavelength range of a light source of the
illumination beam.
35. A computer program product for designing an optical spectrum of
an illumination light beam within an optical inspection system, the
computer program product comprising: at least one computer readable
medium; computer program instructions stored within the at least
one computer readable product configured to cause a combining
device to: determine a set of conditions for inspecting a film on a
sample by directing an illumination light beam at the sample, where
at least a portion of the illumination light beam is reflected off
the sample and used to generate an image of at least a portion of
the film on the sample; and determine a plurality of peak
wavelength values for the optical spectrum of the illumination
light beam so as to control color variation in the image of the
film portion, the determination of the peak wavelengths being based
on the determined set of conditions and a selected thickness of the
film, the determined peak wavelengths being wavelengths within the
spectrum that have a maximum intensity value as compared to
neighboring wavelengths and the determined peak wavelengths being
between a wavelength range of a light source of the illumination
beam.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application takes priority under U.S.C. 119(e) of
United States Provisional Application No. 60/300,088 filed Jun. 21,
2001 entitled, "APPARATUS AND METHODS FOR REDUCING THIN FILM COLOR
VARIATION IN OPTICAL INSPECTION OF SEMICONDUCTOR DEVICES AND OTHER
SURFACES" by Yu Guan, Hong Fu, and Steven R. Lange which is
incorporated by reference in its entirety for all purposes.
BACKGROUND OF THE INVENTION
[0002] This invention relates to a method and apparatus for
evaluating surface features of a substrate such as wafers,
reticles, photomasks, and the like (hereafter referred to generally
as substrates). More particularly, the present invention relates to
an optical inspection system that can produce images of such
substrates with minimum color variation.
[0003] Integrated circuits are made by photolithographic processes,
which use photomasks or reticles and an associated light source to
project a circuit image onto a silicon wafer. The presence of
defects on the surfaces of the wafers is highly undesirable and
adversely affects the resulting circuits. The defects can be due
to, but not limited to, a portion of the pattern being absent from
an area where it is intended to be present, a portion of the
pattern being present in an area where it is not intended to be,
chemical stains or residues from the wafer manufacturing processes,
particulate contaminates such as dust, resist flakes, skin flakes,
erosion of the photolithographic pattern due to electrostatic
discharge, artifacts in the wafer such as pits, scratches, and
striations in the substrate or pattern layer. Since it is
inevitable that defects will occur, these defects have to be found
and repaired prior to use. Blank substrates can also be inspected
for defects prior to patterning.
[0004] Defects also occur in the device itself as the result of
reticle defects and/or processing defects, for example. These
defects may take the form of particles randomly localized on the
surface, scratches, process variations such as under etching, etc.
These and similar problems often arise when processing equipment
malfunctions or degrades in performance over time. Examples of such
equipment include plasma etchers, deposition systems, chemical
mechanical planarization systems, reticle processing, and
photolithography equipment. Obviously, a manufacturer needs to know
when the process equipment ceases to function in an acceptable
manner.
[0005] Many optical and electronic inspection systems and
inspection techniques exist for identifying and classifying defects
such as those on a partially or fully fabricated integrated circuit
or a reticle. Such techniques and apparatus are well known in the
art and are embodied in various commercial products such as many of
those available from KLA-Tencor Corporation of San Jose, Calif. The
simplest of these techniques involves a casual visual inspection by
a technician of a wafer held in white light and examined to
determine whether there is any variation in the appearance of the
various dies fabricated on the wafer. Ideally, each die should have
the same appearance when moved about under a white light. If there
is any variation in the appearance of one or more of the dies on
the wafer, then it can be assumed the dies are not structurally
identical and some problem exists.
[0006] A related technique involves performing optical microscopy
(e.g., bright field or dark field imaging) on the various dice of a
wafer. Two images are formed from light reflected from two dice,
and the images are compared by the microscopy tool. Any significant
variation in the image of the dices indicates that there is a
defect in at least one of the dice. Unfortunately, the intensity of
light that is reflected from a wafer is affected by numerous
inherent factors of the material being inspected. A typically
inspected material is a dielectric (e.g., SiO.sub.2) thin film
deposited over a metal or silicon substrate that has unintended
thickness variation which occurs during fabrication. The
reflectance of the wafer changes with the SiO.sub.2 thickness as a
result of optical interference. This is seen in an image taken from
that area of the wafer as gray level variation and is referred to
as "color variation." Since bright field inspection systems use
images to find defects, such color variation is a nuisance source
because it can cause false detection of defects. Color variation
becomes more severe for SiO.sub.2 on Si or SiO.sub.2 on Cu
interfaces, as compared with SiO.sub.2 on A1 interface.
[0007] One conventional technique for reducing color variation is
broadband illumination. The illumination beams are typically
configured to have a relatively large wavelength range, i.e.
bandwidth, in order to reduce coherence length. An inspection
system will typically include a broadband illumination source
capable of producing a 70 to 80 nm wide spectrum in the near
ultraviolet (near UV) region or a about 150 nm wide spectrum in the
visible wavelength region. Such illumination spectra results in a
significant reduction in interference induced color variation for a
film thickness greater than 1 .mu.m.
[0008] Although current broadband inspection systems work well for
film thicknesses over 1 .mu.m, the wavelength range of the
broadband illumination beam would have to be significantly extended
(e.g., by a factor of two) to achieve sufficient reductions in
color variation for film thickness less than 1 .mu.m. This
bandwidth extension may not be practical on inspection machines
which are designed to operate in their original wavelength ranges.
These conventional broadband inspection systems result in color
variation that is still excessively high (e.g., about 25% for 0.4
to 1.0 .mu.m thick SiO.sub.2 film on Si or copper which is becoming
increasingly common) for thin films and results in many nuisance
defects being detected as "real" defects. That is, the illumination
source of an inspection machine may be limited to a smaller
wavelength range than is required for achieving a sufficient
reduction in color variation for thin films using conventional
broadband illumination techniques.
[0009] Accordingly, there is a need for improved mechanisms for
controlling color variation for thin films during optical
inspection of a sample, such as a semiconductor wafer without
extending the existing wavelength range of illumination sources
available in inspection systems.
SUMMARY OF THE INVENTION
[0010] Accordingly, mechanisms are provided for controlling the
spectrum of an illumination light beam of an optical inspection
system so as to control color variation on an image of a film. The
inspection system may thereafter use the controlled beam to
generate an image of a film on a sample, where color variation in
the image of the film is either suppressed or increased for a
selected thickness or range of thickness value(s) of the film, as
compared with using an uncontrolled illumination beam. By way of
example implementations, the spectrum of the illumination beam is
optimized for color variation reduction or pattern contrast
(contrast between the circuit patterns and their neighboring areas)
enhancement after the beam originates from a light source of the
inspection system and before it reaches the sample or after at
least a portion of the beam reflects off sample and before it hits
an imaging device of the system. The controlled spectrum of the
illumination beam has the same wavelength range as the uncontrolled
spectrum. That is, the existing spectrum of the illumination beam
used for the inspection system is controlled to minimize or
maximize color variation of the image for particular thickness
value(s) of the film without extending its wavelength range.
[0011] In one embodiment, a method of designing an optical spectrum
of an illumination light beam within an optical inspection system
is disclosed. A set of conditions for inspecting a film on a sample
by directing an illumination light beam at the sample is
determined. At least a portion of the illumination light beam is
reflected off the sample and used to generate an image of at least
a portion of the film on the sample. A plurality of peak wavelength
values are determined for the optical spectrum of the illumination
light beam so as to control color variation in the image of the
film portion. The determination of the peak wavelengths is based on
the determined set of conditions and a selected thickness range of
the film. The determined peak wavelengths are wavelengths within
the spectrum that have a maximum intensity value as compared to
neighboring wavelengths. The determined peak wavelengths are also
within a wavelength range of a light source of the illumination
beam. In one specific embodiment, the color variation is reduced,
while in another embodiment the color variation is increased to
enhance pattern contrast.
[0012] In a specific implementation, the conditions include a
wavelength range, a material type of the sample, an objective
numerical aperture of the inspection system, and a detected
spectral signal response of the inspection system. In a further
implementation, a width and a height associated with each
determined peak wavelength are determined. In one embodiment, the
heights associated with the peak wavelengths are determined through
apodization and a correction factor is applied to each height to
compensate for wavelength dependence of color variation.
[0013] In another aspect, the invention pertains to a computer
system operable to design an optical spectrum of an illumination
light beam within an optical inspection system. The computer system
includes one or more processors and one or more memory. At least
one of the processors and memory are adapted to perform one or more
of the above described methods. In yet another aspect, the
invention pertains to a computer program product for designing an
optical spectrum of an illumination light beam within an optical
inspection system. The computer program product includes at least
one computer readable medium and computer program instructions
stored within the at least one computer readable product configured
to cause a combining device to perform one or more of the above
described methods.
[0014] In an alternative embodiment, an inspection system for
analyzing a sample is disclosed. The system includes a light source
for generating a illumination light beam, a first optics
arrangement for directing the illumination beam to a film on a
sample, and a second optics arrangement for receiving a portion of
the illumination beam that reflected off the sample to thereby
generate an image of the film. The inspection system further
includes a spectrum controller for controlling a spectrum of the
illumination beam so that color variation of the image is
controlled (e.g., enhanced or suppressed). The controlled spectrum
includes a plurality of peak wavelengths selected to control color
variation for a particular thickness value of the film and a
particular configuration of the inspection system. The peak
wavelengths are between a wavelength range of a light source of the
illumination beam. The determined peak wavelengths are also
wavelengths within the spectrum that have a maximum intensity value
as compared to neighboring wavelengths.
[0015] In one specific implementation, the particular inspection
configuration includes a wavelength range, an objective numerical
aperture of the inspection system, and a configuration of the first
and second optics arrangements. In another embodiment, a plurality
of heights associated with the peak wavelengths have a generally
apodized distribution and compensate for a wavelength dependence of
color variation. In yet another implementation, a plurality of
widths associated with the peak wavelengths are selected to control
color variation.
[0016] In a specific implementation, the spectrum controller is a
filter in an optical path of the optical illumination beam, and the
filter is positionable or positioned in an optical path of the
illumination beam between the light source and the sample. In
another embodiment, the filter is positionable or positioned in an
optical path of the reflected illumination beam between the sample
and an imaging device of the inspection system. In yet another
embodiment, the filter is integrated within the first and/or second
optics arrangement. In an alternative embodiment, the filter is an
interference spectrum filter or a spatial light modulator combined
with a wavelength dispersion device.
[0017] In one implementation of the inspection system, the light
source is configured to generate a plurality of laser or narrow
band beams, and the spectrum controller is configured to combine
the laser or narrow band beams and adjust an intensity level of
each of the plurality of beams so as to substantially produce the
controlled spectrum of the illumination beam having the plurality
of peak wavelengths with associated heights that have a generally
apodized distribution and compensate for a wavelength dependence of
color variation.
[0018] In another specific implementation of the inspection system,
the light source is configured to generate a laser or narrow band
beam, and the spectrum controller contains a Raman scattering
material positioned or positionable to generate a plurality of peak
wavelengths, and the spectrum controller is configured to adjust an
intensity level associated with each of the plurality of peak
wavelengths so as to substantially produce the controlled spectrum
of the illumination beam having the plurality of peak wavelengths
associated with heights that have a generally apodized distribution
and compensate for a wavelength dependence of color variation.
[0019] These and other features and advantages of the present
invention will be presented in more detail in the following
specification of the invention and the accompanying figures which
illustrate by way of example the principles of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS
[0020] FIG. 1 is a simplified block diagram of an optical
inspection system that may be used to implement embodiments of the
present invention.
[0021] FIG. 2A is a graph illustrating an existing spectrum and an
optimized spectrum in accordance with one embodiment of the present
invention.
[0022] FIG. 2B is a graph illustrating reflectance variation from a
sample that results from the existing spectrum and the optimized
spectrum of FIG. 2A in accordance with one embodiment of the
present invention
[0023] FIG. 3 is a flowchart illustrating a procedure for designing
an optimized spectrum for controlling color variation in accordance
with one embodiment of the present invention.
[0024] FIG. 4 is a graph of a plurality of peak wavelength
locations as a function of film thickness as illustrated in
accordance with one embodiment of the present invention.
[0025] FIG. 5 illustrated an apodization technique used to
determine the wavelength peak heights in accordance with one
embodiment of the present invention.
[0026] FIG. 6 illustrates color variation's dependence on
wavelength for two settings of numerical apertures of an objective
of a particular inspection system.
[0027] FIG. 7 illustrates a plurality of peak wavelengths whose
associated heights have been adjusted in roughly a Gaussian shape
and to compensate for color variations dependence on wavelength so
as to minimize color variation in accordance with one embodiment of
the present invention.
[0028] FIG. 8 is a flowchart illustrating a procedure for
simulating color variation in accordance with one embodiment of the
present invention.
[0029] FIG. 9 is a detailed block diagram of an optical assembly
that implements the optimized spectrum in accordance with one
embodiment of the present invention.
DETAILED DESCRIPTION OF SPECIFIC EMBODIMENTS
[0030] Reference will now be made in detail to a specific
embodiment of the invention. An example of this embodiment is
illustrated in the accompanying drawings. While the invention will
be described in conjunction with this specific embodiment, it will
be understood that it is not intended to limit the invention to one
embodiment. On the contrary, it is intended to cover alternatives,
modifications, and equivalents as may be included within the spirit
and scope of the invention as defined by the appended claims. In
the following description, numerous specific details are set forth
in order to provide a thorough understanding of the present
invention. The present invention may be practiced without some or
all of these specific details. In other instances, well known
process operations have not been described in detail in order not
to unnecessarily obscure the present invention.
[0031] FIG. 1 is a simplified block diagram of an optical
inspection system 10 that may be used to implement embodiments of
the present invention. The optical inspection system 10 is arranged
for inspecting a surface 11 of a substrate 12. The dimensions of
various components are exaggerated to better illustrate the optical
components of this embodiment. As shown, the optical inspection
system 10 includes an optical assembly 14, a stage 16, and a
control system 17. The optical assembly 14 generally includes at
least a first optical arrangement 22 and a second optical
arrangement 24. In general terms, the first optical arrangement 22
generates a illumination beam incident on the substrate, and the
second optical arrangement 24 detects a illumination beam emanating
from the sample as a result of the incident illumination beam. The
first and second optical arrangement may be arranged in suitable
manner in relation to each other. For example, the second optical
arrangement 24 and the first optical arrangement 22 may both be
arranged over the substrate surface 11 so that reflected
illumination beam resulting from incident illumination beam
generated by the first optical arrangement 22 may be detected by
the second optical arrangement 24. Several embodiments of the
optical assembly 14 altered to implement the present invention are
described further below with reference to FIG. 9.
[0032] In the illustrated embodiment, the first optical arrangement
22 is arranged for generating an illumination spot (not shown) on
the surface 11 of the substrate 12. On the other hand, the second
optical arrangement 24 is arranged for collecting reflected light
that is produced by the illumination spot on the surface 11 of the
substrate 12.
[0033] To elaborate further, the first optical arrangement 22
includes at least a light source 26 for emitting a light beam 34
and a first set of optical elements 28. The first set of optical
elements 28 may be arranged to provide one or more optical
capabilities including, but not limited to, directing the light
beam 34 towards beam splitter 37 and through objective 38 to
intersect with the surface 11 of the substrate 12. A portion of the
incident beam 34 is reflected by beam splitter 37 and becomes
incident beam 36 which is focused by objective 38 to a illumination
spot (not shown in FIG. 1) on the surface 11 of the substrate
12.
[0034] Furthermore, the second optical arrangement 24 includes at
least a second set of optical elements 30 and an imaging device 32.
The second set of optical elements 30 are in the path of a
collected light beam 40, which is formed after the incident light
beam 36 intersect with the surface 11 of the substrate 12. The
collected light beam 40 may result from reflected light beam 41
that is reflected off the surface 11 of the substrate 12. A portion
of the reflected beam 41 passes by beam splitter 37 and becomes
collected beam 40. The second set of optical elements 30 are
adapted for collecting the collected light beam 40 and for forming
an image of a portion of surface 11 of substrate 12 on the imaging
device 32. The imaging device 32 is arranged for detecting the
light intensity distribution of the collected light beam 40, and
more particularly for detecting distribution in the intensity of
light caused by the intersection of the incident light beam with
the substrate. The imaging device 32 is arranged for detecting the
light intensity distribution of the image and for generating
signals based on the detected light.
[0035] With regards to the stage 16, the stage 16 is arranged for
moving the substrate 12 within a single plane (e.g., x & y
directions) and relative to incident beam 36, so that all or any
selected part of the substrate surface 11 may be inspected by the
illumination spot.
[0036] The control system 17 generally includes a control computer
18 and an electronic subsystem 19. Although not shown, the control
system 17 may also include a keyboard for accepting operator
inputs, a monitor for providing visual displays of the inspected
substrate (e.g., defects), a database for storing reference
information, and a recorder for recording the location of defects.
As shown, the control computer 18 is coupled to the electronic
subsystem 19. The electronic subsystem 19 is coupled to various
components of the optical inspection system 10, and more
particularly to the stage 16 and the optical assembly 14 including
the first optical arrangement 22 and the second optical arrangement
24.
[0037] The control computer 18 may be arranged to act as an
operator console and master controller of the system 10. By way of
example, commands may be issued to and status may be monitored from
all other subsystems so as to facilitate completion of operator
assigned tasks. Additionally, the electronics subsystem 19 may also
be configured to interpret and execute the commands issued by
control computer 18. The configuration may include capabilities
for, but not limited to, digitizing the input from imaging devices,
compensating these readings for variations in the incident light
intensity, constructing a virtual image of the substrate surface
based on the detected signals, detecting defects in the image and
transferring the defect data to the control computer 18,
accumulating the output of the interferometers used to track the
stage 16, providing the drive for linear motors that move the stage
16 or components of the optical assembly 14, and monitoring sensors
which indicate status. Control systems and stages are well known in
the art and for the sake of brevity will not be discussed in
greater detail. A representative stage, as well as a representative
controller, may be found in U.S. Pat. No. 5,563,702, which is
herein incorporated by reference. It should be understood, however,
that this is not a limitation and that other suitable stages and
control systems may be used.
[0038] In most of the defect detection operations a comparison is
made between two images. By way of example, the comparison may be
implemented by the electronic subsystem 19 of FIG. 1. Broadly
speaking, the imaging device 32 generates images, which are based
on the measured light intensity distribution, and sends them to the
electronic subsystem 19. The electronic subsystem 19, after
receiving the images, compares the target images with reference
images, which are either stored in a database or determined in a
current or previous measurement.
[0039] In die-to-die inspection mode, two areas of the substrate
having identical features are compared to each other and any
substantial discrepancy is flagged as a defect. In the
die-to-database inspection mode, a defect is detected by comparing
the die under test with corresponding graphics information obtained
from a computer aided database system from which the die was
derived.
[0040] In general terms, the present invention provides mechanisms
for controlling the spectrum of the illumination light beam in an
inspection system so that color variation in images taken with such
inspection system are controlled. By way of examples, the color
variation may be reduced or increased depending upon the particular
application. The spectrum may be controlled by altering the
spectrum of the illumination light beam emitted from an existing
light source within an existing inspection system or by
constructing an optimized spectrum from one or more light sources.
In either case, the optimized spectrum has the same wavelength
range as the inspection system's existing light source.
[0041] FIG. 2A is a graph illustrating an existing spectrum and an
optimized spectrum in accordance with one embodiment of the present
invention. In this illustrated example, the optimized spectrum
represents an optimization of alteration of the existing
spectrum.
[0042] Relative intensity is plotted along the Y axis, and
wavelength (in units of nanometers) is plotted along the X axis. As
shown, the optimized spectrum has a plurality of peak wavelengths
that are distributed in a roughly Gaussian shape with the peaks at
longer wavelengths having a shorter height than the peaks at
shorter wavelengths. The term "peak wavelengths" refer to regions
of the spectrum that have a maximum intensity value as compared to
that at the neighboring wavelengths. As explained further below,
this particular configuration of peak wavelengths and their
associated heights and widths are optimized to control color
variation on an image of the sample at a particular film thickness
or range of thickness values.
[0043] FIG. 2B is a graph illustrating reflectance variation from a
sample that results from the existing spectrum and the optimized
spectrum of FIG. 2A in accordance with one embodiment of the
present invention. In this illustrated embodiment, the optimized
spectrum is designed to achieve a minimized color variation level
for a particular thickness (d) range, as compared to the existing
spectrum. As shown, the optimized spectrum produces substantially
less reflection (R) variation for thickness d between 400 and 1000
nm, as opposed to the existing spectrum. Since the signal detected
by the imaging device on the inspection system (e.g., the gray
levels on the time delay integration sensor, or TDI) is
proportional to the reflectance of the sample, reflectance
variation is seen as gray level variation (also called color
variation) in the image. Therefore, minimizing color variation is
equivalent to minimizing R vs. d variation. Likewise, enhancing
pattern contrast is accomplished by increasing R difference at two
particular d's or over two different materials.
[0044] It appears that substantial color reduction may be achieved
by optimizing an existing spectrum to contain a plurality of peak
wavelengths, where the peak wavelengths and their associated
heights and widths are selected to reduce color variation for a
particular range of film thickness. The following table contains
simulation results for existing spectra that are optimized to
reduce color in a particular film thickness range for different
inspection systems available from KLA-Tencor of San Jose,
Calif.:
1 System Model 2138 or 2139 2350 2370 2370 Film Thickness 0.4-1.0
0.4-1.0 0.21-0.4 0.4-1.0 (.mu.m) Original 25% 23% 14% 7%
Reflectance variation Optimized 8% 5% 3% 1% Reflectance variation
Improvement 70% 80% 80% 85%
[0045] Any suitable mechanism may be used for designing and
implementing an optimized spectrum for controlling color variation
for one or more specified film thickness values and a particular
inspection system without extending the wavelength range of the
existing illumination light source of the particular inspection
system. FIG. 3 is a flowchart illustrating a procedure 300 for
designing an optimized spectrum for controlling color variation in
accordance with one embodiment of the present invention. Initially,
conditions are set in operation 302. The conditions generally
contribute to color variation. In the illustrated embodiment, the
conditions include the numerical aperture of the inspection system,
the particular configuration and operating parameters of the
inspections system which affect color variation (e.g., optics
configuration and wavelength range of the illumination source), and
the composition of materials used on the sample (composition of one
or more films and underlying substrate).
[0046] A plurality of peak wavelengths are then calculated in
operation 304. Heights and widths associated with the peak
wavelengths are then determined in operation 306. In general terms,
the wavelengths and heights and widths associated with the peak
wavelengths are determined so that color variation is controlled to
a desired level. After the spectrum is designed in operation 302
through 306, the spectrum may be implemented in any suitable
manner. In general terms, the optimized spectrum may be implemented
by filtering broadband sources in operation 310 or by combining
single spectrum lines in operation 308. Several implementations of
the optimized spectrum are described further below with reference
to FIG. 9.
[0047] The peak wavelengths locations may be calculated in any
suitable manner for controlling color variation. For a film with
refractive index n and from a particular inspection system having
an objective with numerical aperture NA, all available peak
wavelengths (.lambda..sub.q's) can be calculated from the following
equation (1) for any selected film thickness d, at which the color
variation is to be minimized: 1 q = 4 nd 0 fm f ( f ) cos f sin f f
q 0 fm sin f f ( 1 )
[0048] with q being an integer such that
.lambda..sub.min<.lambda..sub.- q<.lambda..sub.max, where
.lambda..sub.min and .lambda..sub.max are the minimum wavelength
and maximum wavelength, respectively, obtainable from the
particular inspection system's illumination source, and
.theta..sub.f being the angle of refraction inside the film. The
maximum value of .theta..sub.f denoted by .theta..sub.fm is
obtainable from the objective numerical aperture (NA) of the
inspection system using .theta..sub.fm=sin.sup.-1 (NA/n). The
function f(.theta..sub.f) describes the angular intensity
distribution of the illumination light in the film.
[0049] If the illumination light intensity is angularly uniform
within the numerical aperture (NA) of the objective, then
f(.theta..sub.f)=1 for 0.ltoreq..theta..sub.f.ltoreq..theta..sub.fm
and .lambda..sub.q's can be explicitly calculated using: 2 q = 2 d
( NA ) 2 qn [ 1 - 1 - ( NA n ) 2 ] ( 2 )
[0050] For example, the wavelength range of the 2370 system
available from KLA-Tencor of San Jose, Calif. is from 230 nm to 390
nm. If it is preferred that color variation be minimized for a film
thickness d near 350 nm, it follows from equation (2) that four
peak wavelengths, .lambda..sub.s=236 nm, .lambda..sub.7=266 nm,
.lambda..sub.6=307 nm, and .lambda..sub.5=365 nm, can be found
within this range for a numerical aperture of 0.9.
[0051] By way of example, equation (2) may be visually represented
by a graph, as shown in FIG. 4, for SiO.sub.2 film with NA=0.9
illumination. As shown, a plurality of peak wavelength locations
are plotted as a function of the film thickness at which the color
variation is to be minimized, in accordance with one embodiment of
the present invention. These plots may then be utilized to
determine peak wavelengths for a particular film thickness or range
of film thickness and a particular available wavelength range. By
way of example, for a film thickness of 350 nm, a vertical line 408
may be drawn at a 350 thickness value. The vertical line 408 will
intersect with two or more peak wavelengths. Some or all of these
peak wavelengths may be selected for color variation control.
However, as the number of selected peaks increases, the percentage
change of color variation (i.e., reduction or enhancement)
increases. As shown, four peak wavelengths are selected for a film
thickness of 350 nm. The number of selected peak wavelengths may be
necessarily limited by the wavelength range of the illumination
source of a particular inspection system. As shown, the available
wavelength ranges for three different inspection systems 402, 404,
and 406 are indicated on FIG. 4. Four peak wavelengths are
available for system 406 for a film thickness of 350 nm.
[0052] The intensity levels or heights associated with the peak
wavelengths are then varied so as to optimally control color
variation. In one specific implementation, apodization is used to
determine the heights as illustrated in FIG. 5. The Gaussian window
function can be written as: 3 g ( q ) = exp { - [ 2 q - q min - q
max ( q max - q min + 2 ) w ] 2 } ( 3 )
[0053] where q is the index of each spectrum peak, q.sub.min, and
q.sub.max correspond to the minimum and maximum values of the
wavelength range of the inspection system, respectively, and w is
the width of the envelope curve. The height of each spectrum peak q
is multiplied by g(q). The width w is chosen such that the height
of the two peaks just beyond the wavelength range is negligible.
These two peaks have indices q.sub.min-1 and q.sub.max+1. According
to equation (3), g(q.sub.min-1)=g(q.sub.max+1)=exp[-(1/w).sup.2].
For instance, if the height of these two peaks is desired to be
less than 2% of the central peak height, then w.apprxeq.0.55.
Smaller w makes the nodes, for example, on the R vs. d curve
cleaner and narrower and eventually disappear. On the other hand,
larger w results in noisier and broader nodes. The final value may
need to be fine adjusted for each individual set of conditions
(e.g., system configuration, film configuration and material
type).
[0054] The heights associated with the selected peak wavelengths
may then be adjusted to compensate for color variation's dependence
on wavelength. By way of example, longer wavelengths tend to cause
greater color variation for SiO.sub.2 films on Si substrate.
Accordingly, if one wishes to minimize color variation, then the
peak wavelengths at longer wavelengths have a lower associated
height than that at shorter wavelengths. FIG. 6 illustrates color
variation's dependence on wavelength for two settings of numerical
apertures of an objective of a particular inspection system. FIG. 7
illustrates a plurality of peak wavelengths whose associated
heights have been adjusted in roughly a Gaussian shape and to
compensate for color variations dependence on wavelength so as to
minimize color variation in accordance with one embodiment of the
present invention.
[0055] The widths associated with the peak wavelengths may be
adjusted in any suitable manner. For example, the widths may be
uniformly changed or individually changed so that color variation
is calculated to be less than a desired amount (e.g., percentage
amount reduction for color variation reduction) or greater than a
desired amount (e.g., percentage amount increase for pattern
contrast enhancement). In general terms, a first set of widths are
selected for the plurality of peak wavelengths. Color variation as
a result of the optimized spectrum is then simulated. It is then
determined whether the simulated color variation is within the
desired range for the selected film thickness range. The widths
continue to be adjusted and the color variation simulated until the
color variation is within the desired range. For instance, a
predetermined color variation percentage may be selected as a
maximum or minimum criterion. For color minimization, the widths
are adjusted until the R variation percentage is less than or equal
to the maximum criterion. For pattern contrast enhancement, the
widths are adjusted until the R variation percentage for two
particular film thickness (d) values or two particular film
materials is greater than or equal to the minimum criterion.
Alternatively, the color variation minimum and maximum criterion
may be limited to values that are achievable in the particular
application. In this case, the color variation may be minimized or
the contrast between features is maximized as much as possible.
[0056] FIG. 8 is a flowchart illustrating a procedure 800 for
simulating color variation in accordance with one embodiment of the
present invention. Initially, a plurality of conditions are set in
operation 802. As shown, ranges of available wavelengths, angle of
incidence (.theta.) of the illumination beam, and film thickness
(d) are set in operation 802. The refractive index (n) and
extinction co-efficient (k) spectrum for the particular films and
substrate used are then read, for example, from a table in
operation 804. An illumination spectrum I(.lambda.) is then
constructed using the spectrum peaks with the pre-calculated
heights, widths, and center wavelengths in operation 806. The
reflectance R (.lambda., .theta., d) is then calculated at each
wavelength .theta., angle .lambda. and thickness d in operation
808. The reflectance R(.lambda., d) is then obtained by integrating
over a solid angle defined by the .theta. range using: 4 R ( , d )
= 0 m f ( ) R ( , d , ) sin 0 m sin
[0057] in operation 810, where f(.theta.) describes the angular
intensity distribution of the illumination light and .theta..sub.m
is the maximum value of .theta. obtainable from
.theta..sub.m=sin.sup.-1(NA) with NA being the numerical aperture
of the objective. Color variation R (d) is then calculated using: 5
R ( d ) = R ( , d ) I ( ) I ( )
[0058] in operation 812. The integrals are carried out over the
wavelength range of the illumination light. A contrast
[(R(d).sub.max -R(d).sub.min)/R(d).sub.avg] in the predefined
thickness range is then calculated in operation 814. The results of
this procedure 800 are the illumination spectrum I(.lambda.) and
the color variation R(d) in operation 816. Of course operations 808
through 814 may then be repeated for adjusted heights, widths, and
center wavelengths of spectrum peaks to minimize (or enhance) color
variation in the predefined thickness range (e.g., in operation
818).
[0059] FIG. 9 is a detailed block diagram of an inspection system
900 that implements the optimized spectrum in accordance with one
embodiment of the present invention. For clarity, the general
functions of the inspection system are described first and the
optimizing functions are described further below. As shown, the
system 900 includes a light source 902. The light source 902 is
arranged for emitting a light beam 903 along a first path 905. The
light beam 903 emitted by the light source 902, first passes
through a filter wheel 904, which carriers several filters for
selecting the operating wavelength ranges of the incident beam.
[0060] The light beam 903 then passes through an adjustable
attenuator that is configurable to adjust the light intensity. The
light beam 903 then continues on its path until it reaches a beam
splitter 908. The beam splitter 908 is arranged to divide the beam
903 into paths 909 and 911. Path 909 is used to distribute a first
light portion of the beams to the substrate 912 and path 911 is
used to distribute a second light portion of the beams to a light
level sensor 919. In most embodiments, 50% of the light is
distributed to the substrate 912 along path 909 and 50% of the
light is distributed to the light level sensor 919 along path 911.
It should be understood, however, that the percentage ratios may
vary according to the specific design of each optical inspection
system. A reference collection lens 917 is arranged to collect and
direct the second portion of the beam 911 onto light level sensor
919. As should be appreciated, the light level sensor 919 is
arranged to measure the intensity of the light. Although not shown
in FIG. 9, the light level sensor 919 is generally coupled to an
electronic subsystem such as the electronic subsystem 19 of FIG. 1
such that the data collected by the imaging device can be
transferred to the control system for analysis. Light level sensors
919 and their associated optics are generally well known in the art
and for the sake of brevity will not be discussed in detail.
[0061] The beam 909 continuing on a path towards the surface 913
passes through objectives 910, which is arranged for focussing the
beam 909 onto the surface 913 of the substrate 912. As the beam 909
intersects the surface 913 of the substrate 912, reflected light
beam 915 is generated. The reflected light beam 915 reflects off
the surface 913 of the substrate 912.
[0062] The reflected light beam 915 after reflecting off of the
substrate 912 is collected and focused by the lenses 914, which
then directs the beam 92 towards a beam splitter mirror 916. The
mirror 916 directs the reflected beam 915 through lenses 914 to
imaging device 918. As should be appreciated, the imaging device
918 is arranged for measuring the intensity of the reflected light.
Although not shown in FIG. 9, the imaging device 918 is generally
coupled to an electronic subsystem such as the electronic subsystem
19 of FIG. 1 such that the data collected by the imaging device can
be transferred to the control system for analysis.
[0063] The system 900 also includes a stage 952 that can be moved
laterally (in x and y directions) to allow different parts of the
wafer to be viewed and inspected. The stage 952 may also be moved
vertically (in z direction) for focusing.
[0064] The above described optimized spectrum may be implemented in
any suitable optical inspection system. The system of FIG. 9 is
merely an example and is not meant to limit the scope of the
invention. In general terms, a spectrum controller 950 for
controlling a spectrum of the illumination beam so that color
variation of the image is controlled is added to or integrated
within the inspection system in any suitable position. The
resulting spectrum includes the previously determined peak
wavelengths. The peaks have associated heights with a generally
apodized distribution and are selected to compensate for a
wavelength dependence of color variation. The peaks also have
associated widths that are selected to control color variation.
[0065] In a specific implementation, the spectrum controller 950 is
a filter in an optical path of the optical illumination beam. For
example, the filter (950b) is inserted or insertably configured in
an optical path of the illumination beam between the light source
902 and the sample 912. In another embodiment, the filter (950a) is
positionable or positioned in an optical path of the reflected
illumination beam between the sample 912 and an imaging device
(918) of the inspection system. In yet another embodiment, the
filter is integrated within one of the optics elements of the
system. For example, any component of the optics may be altered to
work as a filter, such as objective lens 910 or 914, filters on the
filter wheel 904, mirror 916, other lenses (not shown), or beam
splitter 908. The filter may also be integrated into the imaging
device (918) input window.
[0066] The filter may take any suitable form for generating the
optimized spectrum from an existing spectrum. By way of examples,
the filter is an interference spectrum filter or a spatial light
modulator combined with a wavelength dispersion device. The filter
may be reflective or transmissive. In general terms, a filter is
formed by putting a coating composed of a stack of specially
designed thin films on a transparent material to reduce light
intensity as a function of wavelength precisely by the
predetermined amount over the working wavelength range.
Accordingly, such a coating may be put on any existing optical
component of the inspection system or designed as a separate
component. Customized filters are available from Barr Associates of
Westford, Mass.
[0067] In one implementation of the inspection system, the light
source 902 is configured to generate a plurality of laser or narrow
band beams, and the spectrum controller (e.g., 950b) is configured
to combine the laser or narrow band beams and adjust an intensity
level of each of the plurality of beams so as to substantially
produce the above described optimized spectrum.
[0068] In another specific implementation of the inspection system,
the light source 902 is configured to generate a laser or narrow
band beam, and the spectrum controller (950b) is a Raman scattering
material combined with an spectral intensity control mechanism
positioned or positionable to generated a spectrum to thereby
substantially mimic the above described optimized spectrum.
[0069] There are a multiplicity of inspection modes that can be
facilitated by the aforementioned inspection system 900. By way of
example, representative inspection modes including, reflected,
transmitted and simultaneous reflected and transmitted modes, may
be found in U.S. Pat. No. 5,563,702, which is herein incorporated
by reference. It should be understood, however, that these modes
are not a limitation and that other suitable modes may be used.
[0070] Although the foregoing invention has been described in some
detail for purposes of clarity of understanding, it will be
apparent that certain changes and modifications may be practiced
within the scope of the appended claims. In an alternative design
approach for the spectrum cotnroller, one can evenly pick certain
wavelengths (e.g. 5, 10, or 100 of them) in the illumination
spectrum and then randomly change the light intensity at these
wavelengths and calculate the color variation after each change.
This process can be done on a computer and repeated by a large
number of times until minimum (or maximum) color variation is
obtained. This is a computation intensive approach and may not
always converge to a optimal solution. Therefore, the described
embodiments should be taken as illustrative and not restrictive,
and the invention should not be limited to the details given herein
but should be defined by the following claims and their full scope
of equivalents.
* * * * *