U.S. patent application number 10/281176 was filed with the patent office on 2003-05-01 for non-volatile semiconductor memory device and manufacturing method thereof.
This patent application is currently assigned to Matsushita Electric Industrial Co., Ltd.. Invention is credited to Tamura, Nobuyuki.
Application Number | 20030080366 10/281176 |
Document ID | / |
Family ID | 19146428 |
Filed Date | 2003-05-01 |
United States Patent
Application |
20030080366 |
Kind Code |
A1 |
Tamura, Nobuyuki |
May 1, 2003 |
Non-volatile semiconductor memory device and manufacturing method
thereof
Abstract
The non-volatile semiconductor memory device has a booster
including a capacitor, and a storage circuit including a storage
element. The capacitor has a lower electrode, a capacitor
capacitance insulating film and an upper electrode. The lower
electrode of the capacitor is shaped to have an increased surface
area.
Inventors: |
Tamura, Nobuyuki; (Kyoto,
JP) |
Correspondence
Address: |
NIXON PEABODY, LLP
8180 GREENSBORO DRIVE
SUITE 800
MCLEAN
VA
22102
US
|
Assignee: |
Matsushita Electric Industrial Co.,
Ltd.
Osaka
JP
|
Family ID: |
19146428 |
Appl. No.: |
10/281176 |
Filed: |
October 28, 2002 |
Current U.S.
Class: |
257/298 ;
257/316; 257/E21.679; 257/E21.684; 438/241; 438/258 |
Current CPC
Class: |
H01L 27/11526 20130101;
H01L 27/11534 20130101; H01L 27/11568 20130101 |
Class at
Publication: |
257/298 ;
438/241; 438/258; 257/316 |
International
Class: |
H01L 021/8242; H01L
021/336; H01L 027/108; H01L 029/94; H01L 029/76; H01L 029/788 |
Foreign Application Data
Date |
Code |
Application Number |
Oct 29, 2001 |
JP |
2001-330748 |
Claims
What is claimed is:
1. A non-volatile semiconductor memory device, comprising: a
booster including a capacitor having a lower electrode, a capacitor
capacitance insulating film and an upper electrode; and a storage
element, wherein the lower electrode is shaped to have an increased
surface area.
2. The non-volatile semiconductor memory device according to claim
1, wherein the lower electrode has a plurality of holes.
3. The non-volatile semiconductor memory device according to claim
1, wherein the lower electrode is formed by a plurality of
island-shaped lower electrode portions.
4. The non-volatile semiconductor memory device according to claim
1, wherein the lower electrode is formed by a plurality of
stripe-shaped lower electrode portions.
5. The non-volatile semiconductor memory device according to claim
4, wherein a distance S between the lower electrode portions and a
thickness T of the lower electrode portions have a relation of
S<2T.
6. The non-volatile semiconductor memory device according to claim
1, wherein a voltage V1 which is applied to the upper electrode and
a voltage V2 which is applied to the lower electrode have a
relation of V1<V2.
7. The non-volatile semiconductor memory device according to claim
1, wherein the lower electrode has a plurality of concavities.
8. The non-volatile semiconductor memory device according to claim
1, wherein the lower electrode has a plurality of convexities.
9. The non-volatile semiconductor memory device according to claim
1, wherein the lower electrode has a plurality of stripe-shaped
convexities.
10. The non-volatile semiconductor memory device according to claim
1, wherein the storage element has a tunnel insulating film, a
floating gate electrode, a storage element capacitance insulating
film and a control gate electrode, the floating gate electrode and
the lower electrode are formed from a conductive film which is
formed in a same step, the storage element capacitance insulating
film and the capacitor capacitance insulating film are formed from
an insulating film which is formed in a same step, and the control
gate electrode and the upper electrode are formed from a conductive
film which is formed in a same step.
11. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region and a capacitor region; a second step of
forming a plate-like conductive film in the capacitor region and
etching the plate-like conductive film to form a lower electrode
having an increased surface area; a third step of forming a
capacitor capacitance insulating film and an upper electrode on the
lower electrode; and a fourth step of forming in the storage
circuit region a storage element having a tunnel insulating film, a
floating gate electrode, a storage element capacitance insulating
film and a control gate electrode.
12. The method according to claim 11, wherein the lower electrode
is formed into a plurality of holes, a plurality of island-shaped
lower electrode portions, or a plurality of stripe-shaped lower
electrode portions by etching a whole thickness of the conductive
film in the second step.
13. The method according to claim 11, wherein the lower electrode
is formed into a plurality of concavities, a plurality of
convexities, or a plurality of stripe-shaped convexities by etching
only an upper portion of the conductive film in the second
step.
14. The method according to claim 11, wherein the floating gate
electrode and the lower electrode are formed from a conductive film
which is formed in a same step, the storage element capacitance
insulating film and the capacitor capacitance insulating film are
formed from an insulating film which is formed in a same step, and
the control gate electrode and the upper electrode are formed from
a conductive film which is formed in a same step.
15. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region, a logic circuit region and a capacitor
region; a second step of sequentially forming a first insulating
film and a first conductive film on the semiconductor substrate and
removing the first conductive film in the logic circuit region; a
third step of etching the first conductive film in the capacitor
region to form a lower electrode having an increased surface area;
a fourth step of removing the first insulating film in the logic
circuit region and an exposed portion of the first insulating film
in the capacitor region and forming a second insulating film on the
first conductive film in the storage circuit region, the
semiconductor substrate in the logic circuit region, and the lower
electrode in the capacitor region; a fifth step of removing the
second insulating film in the logic circuit region and sequentially
forming a third insulating film and a second conductive film on the
second insulating film in the storage circuit region and the
capacitor region and on the semiconductor substrate in the logic
circuit region; a sixth step of forming in the storage circuit
region a tunnel insulating film from the first insulating film, a
floating gate electrode from the first conductive film, a storage
element capacitance insulating film from the second and third
insulating films, and a control gate electrode from the second
conductive film; a seventh step of forming in the logic circuit
region a gate insulating film from the third insulating film and a
gate electrode from the second conductive film; and an eighth step
of forming in the capacitor region a capacitor capacitance
insulating film from the second and third insulating films and an
upper electrode from the second conductive film.
16. The method according to claim 15, wherein the lower electrode
is formed into a plurality of holes, a plurality of island-shaped
lower electrode portions, or a plurality of stripe-shaped lower
electrode portions by etching a whole thickness of the first
conductive film in the third step.
17. The method according to claim 15, wherein the lower electrode
is formed into a plurality of concavities, a plurality of
convexities, or a plurality of stripe-shaped convexities by etching
only an upper portion of the first conductive film in the third
step.
18. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region, a logic circuit region and a capacitor
region; a second step of sequentially forming a first insulating
film and a first conductive film on the semiconductor substrate; a
third step of etching the first conductive film in the capacitor
region to form a lower electrode having an increased surface area;
a fourth step of forming a second insulating film on the first
conductive film in the storage circuit region and the logic circuit
region and on the lower electrode in the capacitor region; a fifth
step of removing the first insulating film, the first conductive
film and the second insulating film in the logic circuit region and
sequentially forming a third insulating film and a second
conductive film on the second insulating film in the storage
circuit region and the capacitor region and on the semiconductor
substrate in the logic circuit region; a sixth step of forming in
the storage circuit region a tunnel insulating film from the first
insulating film, a floating gate electrode from the first
conductive film, a storage element capacitance insulating film from
the second and third insulating films, and a control gate electrode
from the second conductive film; a seventh step of forming in the
logic circuit region a gate insulating film from the third
insulating film and a gate electrode from the second conductive
film; and an eighth step of forming in the capacitor region a
capacitor capacitance insulating film from the second and third
insulating films and an upper electrode from the second conductive
film.
19. The method according to claim 18, wherein the lower electrode
is formed into a plurality of holes, a plurality of island-shaped
lower electrode portions, or a plurality of stripe-shaped lower
electrode portions by etching a whole thickness of the conductive
film in the third step.
20. The method according to claim 18, wherein the lower electrode
is formed into a plurality of concavities, a plurality of
convexities, or a plurality of stripe-shaped convexities by etching
only an upper portion of the conductive film in the third step.
21. The non-volatile semiconductor memory device according to claim
1, wherein the storage element has a charge storage film and a gate
electrode, the charge storage film and the capacitor capacitance
insulating film are formed from an insulating film which is formed
in a same step, and the gate electrode and the upper electrode are
formed from a conductive film which is formed in a same step.
22. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region and a capacitor region; a second step of
forming a concavity in a semiconductor substrate included in the
capacitor region, and implanting impurities into the concavity to
form a lower electrode; a third step of sequentially forming an
insulating film and a conductive film on the semiconductor
substrate including the lower electrode; a fourth step of forming
in the storage circuit region a charge storage film from the
insulating film and a first gate electrode from the conductive
film; and a fifth step of forming in the capacitor region a
capacitor capacitance insulating film from the insulating film and
an upper electrode from the conductive film.
23. The method according to claim 22, wherein, in the third step,
the insulating film is formed by depositing a silicon oxide film on
the semiconductor substrate and nitriding an upper portion of the
deposited silicon oxide film.
24. The method according to claim 22, wherein, in the third step,
the insulating film is formed by sequentially depositing a silicon
oxide film and a silicon nitride film on the semiconductor
substrate.
25. The method according to claim 22, wherein, in the third step,
the insulating film is formed by sequentially forming a first
silicon oxide film, a second silicon oxide film and a silicon
nitride film on the semiconductor substrate.
26. The method according to claim 22, wherein, in the third step,
the insulating film is formed by sequentially forming a first
silicon oxide film, a silicon nitride film and a second silicon
oxide film on the semiconductor substrate.
27. The method according to claim 22, wherein, in the second step,
the lower electrode is formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities.
28. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region, a logic circuit region and a capacitor
region; a second step of forming a concavity in the semiconductor
substrate included in the capacitor region, and introducing
impurities into the semiconductor substrate from a wall surface and
a bottom surface of the concavity to form a lower electrode; a
third step of sequentially forming a first insulating film, a
second insulating film and a first conductive film on the
semiconductor substrate including the lower electrode; a fourth
step of forming in the storage circuit region a charge storage film
from the first insulating film and the second insulating film and a
first gate electrode from the first conductive film; a fifth step
of forming in the logic circuit region a gate insulating film from
the first insulating film and the second insulating film and a
second gate electrode from the first conductive film; and a sixth
step of forming in the capacitor region a capacitor capacitance
insulating film from the first insulating film and the second
insulating film and an upper electrode from the first conductive
film.
29. The method according to claim 28, wherein, in the third step,
the second insulating film is formed by nitriding an upper portion
of the first insulating film.
30. The method according to claim 28, wherein, in the third step,
the second insulating film is formed by depositing a silicon
nitride film on the first insulating film.
31. The method according to claim 28, wherein the first insulating
film is a silicon oxide film.
32. The method according to claim 28, wherein, in the second step,
the lower electrode is formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities.
33. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region, a logic circuit region and a capacitor
region; a second step of forming a concavity in the semiconductor
substrate included in the capacitor region, and introducing
impurities into the semiconductor substrate from a wall surface and
a bottom surface of the concavity to form a lower electrode; a
third step of forming a first insulating film on the semiconductor
substrate including the lower electrode; a fourth step of removing
the first insulating film included in the logic circuit region; a
fifth step of sequentially depositing a second insulating film, a
third insulating film and a first conductive film on an exposed
surface of the semiconductor substrate in the logic circuit region
and on the first insulating film in the storage circuit region and
the capacitor region; a sixth step of forming in the storage
circuit region a charge storage film from the first insulating
film, the second insulating film and the third insulating film and
a first gate electrode from the first conductive film; a seventh
step of forming in the logic circuit region a gate insulating film
from the second insulating film and the third insulating film and a
second gate electrode from the first conductive film; and an eighth
step of forming in the capacitor region a capacitor capacitance
insulating film from the first insulating film, the second
insulating film and the third insulating film and an upper
electrode from the first conductive film.
34. The method according to claim 33, wherein each of the first
insulating film and the second insulating film is a silicon oxide
film.
35. The method according to claim 22, wherein the third insulating
film is a silicon nitride film.
36. The method according to claim 33, wherein, in the second step,
the lower electrode is formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities.
37. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region, a logic circuit region and a capacitor
region; a second step of forming a concavity in the semiconductor
substrate included in the capacitor region, and introducing
impurities into the semiconductor substrate from a wall surface and
a bottom surface of the concavity to form a lower electrode; a
third step of sequentially forming a first insulating film and a
second insulating film on the semiconductor substrate including the
lower electrode; a fourth step of sequentially removing the second
insulating film and the first insulating film which are included in
the logic circuit region; a fifth step of sequentially depositing a
third insulating and a first conductive film on an exposed surface
of the semiconductor substrate in the logic circuit region and on
the second insulating film in the storage circuit region and the
capacitor region; a sixth step of forming in the storage circuit
region a charge storage film from the first insulating film, the
second insulating film and the third insulating film and a first
gate electrode from the first conductive film; a seventh step of
forming in the logic circuit region a gate insulating film from the
third insulating film and a second gate electrode from the first
conductive film; and an eighth step of forming in the capacitor
region a capacitor capacitance insulating film from the first
insulating film, the second insulating film and the third
insulating film and an upper electrode from the first conductive
film.
38. The method according to claim 37, wherein each of the first
insulating film and the third insulating film is a silicon oxide
film.
39. The method according to claim 37, wherein the second insulating
film is a silicon nitride film.
40. The method according to claim 37, wherein, in the second step,
the lower electrode is formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities.
41. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region and a capacitor region; a second step of
depositing a first conductive film on the semiconductor substrate
and etching the first conductive film in the capacitor region to
form a lower electrode having an increased surface area; a third
step of sequentially forming an insulating film and a second
conductive film on the semiconductor substrate including the lower
electrode; a fourth step of forming in the storage circuit region a
charge storage film from the insulating film and a first gate
electrode from the second conductive film; and a fifth step of
forming in the capacitor region a capacitor capacitance insulating
film from the insulating film and an upper electrode from the
second conductive film.
42. The method according to claim 41, wherein, in the third step,
the insulating film is formed by depositing a silicon oxide film on
the semiconductor substrate and then nitriding an upper portion of
the deposited silicon oxide film.
43. The method according to claim 41, wherein, in the third step,
the insulating film is formed by sequentially depositing a silicon
oxide film and a silicon nitride film on the semiconductor
substrate.
44. The method according to claim 41, wherein, in the third step,
the insulating film is formed by sequentially forming a first
silicon oxide film, a second silicon oxide film and a silicon
nitride film on the semiconductor substrate.
45. The method according to claim 41, wherein, in the third step,
the insulating film is formed by sequentially forming a first
silicon oxide film, a silicon nitride film and a second silicon
oxide film on the semiconductor substrate.
46. The method according to claim 41, wherein, in the second step,
the lower electrode is formed into a plurality of holes, a
plurality of island-shaped lower electrode portions, or a plurality
of stripe-shaped lower electrode portions.
47. The method according to claim 41, wherein, in the second step,
the lower electrode is formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities.
48. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region, a logic circuit region and a capacitor
region; a second step of sequentially forming a first insulating
film and a first conductive film on the semiconductor substrate and
etching the first conductive film in the capacitor region to form a
lower electrode having an increased surface area; a third step of
sequentially removing the first conductive film and the first
insulating film in the storage circuit region and the logic circuit
region; a fourth step of sequentially forming a second insulating
film, a third insulating film and a second conductive film on the
semiconductor substrate including the lower electrode; a fifth step
of forming in the storage circuit region a charge storage film from
the second insulating film and the third insulating film and a
first gate electrode from the second conductive film; a sixth step
of forming in the logic circuit region a gate insulating film from
the second insulating film and the third insulating film and a
second gate electrode from the second conductive film; and a
seventh step of forming in the capacitor region a capacitor
capacitance insulating film from the second insulating film and the
third insulating film and an upper electrode from the second
conductive film.
49. The method according to claim 48, wherein, in the fourth step,
the third insulating film is formed by nitriding an upper portion
of the second insulating film.
50. The method according to claim 48, wherein, in the fourth step,
the third insulating film is formed by depositing a silicon nitride
film on the second insulating film.
51. The method according to claim 48, wherein the second insulating
film is a silicon oxide film.
52. The method according to claim 48, wherein, in the second step,
the lower electrode is formed into a plurality of holes, a
plurality of island-shaped lower electrode portions, or a plurality
of stripe-shaped lower electrode portions.
53. The method according to claim 48, wherein, in the second step,
the lower electrode is formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities.
54. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region, a logic circuit region and a capacitor
region; a second step of sequentially forming a first insulating
film and a first conductive film on the semiconductor substrate and
etching the first conductive film in the capacitor region to form a
lower electrode having an increased surface area; a third step of
sequentially removing the first conductive film and the first
insulating film in the storage circuit region and the logic circuit
region; a fourth step of forming a second insulating film on the
semiconductor substrate including the lower electrode; a fifth step
of removing the second insulating film included in the logic
circuit region; a sixth step of sequentially depositing a third
insulating film, a fourth insulating film and a second conductive
film on an exposed surface of the semiconductor substrate in the
logic circuit region and on the second insulating film in the
storage circuit region and the capacitor region; a seventh step of
forming in the storage circuit region a charge storage film from
the second insulating film, the third insulating film and the
fourth insulating film and a first gate electrode from the second
conductive film; an eighth step of forming in the logic circuit
region a gate insulating film from the third insulating film and
the fourth insulating film and a second gate electrode from the
second conductive film; and a ninth step of forming in the
capacitor region a capacitor capacitance insulating film from the
second insulating film, the third insulating film and the fourth
insulating film and an upper electrode from the second conductive
film.
55. The method according to claim 54, wherein each of the second
insulating film and the third insulating film is a silicon oxide
film.
56. The method according to claim 54, wherein the fourth insulating
film is a silicon nitride film.
57. The method according to claim 54, wherein, in the second step,
the lower electrode is formed into a plurality of holes, a
plurality of island-shaped lower electrode portions, or a plurality
of stripe-shaped lower electrode portions.
58. The method according to claim 54, wherein, in the second step,
the lower electrode is formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities.
59. A method for manufacturing a non-volatile semiconductor memory
device, comprising: a first step of forming an element isolation
insulating film in a semiconductor substrate in order to define a
storage circuit region, a logic circuit region and a capacitor
region; a second step of sequentially forming a first insulating
film and a first conductive film on the semiconductor substrate and
etching the first conductive film in the capacitor region to form a
lower electrode having an increased surface area; a third step of
sequentially removing the first conductive film and the first
insulating film which are included in the storage circuit region
and the logic circuit region; a fourth step of sequentially forming
a second insulating film and a third insulating film on the
semiconductor substrate including the lower electrode; a fifth step
of sequentially removing the third insulating film and the second
insulating film which are included in the logic circuit region; a
sixth step of sequentially depositing a fourth insulating film and
a second conductive film on an exposed surface of the semiconductor
substrate in the logic circuit region and on the third insulating
film in the storage circuit region and the capacitor region; a
seventh step of forming in the storage circuit region a charge
storage film from the second insulating film, the third insulating
film and the fourth insulating film and a first gate electrode from
the second conductive film; an eighth step of forming in the logic
circuit region a gate insulating film from the fourth insulating
film and a second gate electrode from the second conductive film;
and a ninth step of forming in the capacitor region a capacitor
capacitance insulating film from the second insulating film, the
third insulating film and the fourth insulating film and an upper
electrode from the second conductive film.
60. The method according to claim 59, wherein each of the second
insulating film and the fourth insulating film is a silicon oxide
film.
61. The method according to claim 59, wherein the third insulating
film is a silicon nitride film.
62. The method according to claim 59, wherein, in the second step,
the lower electrode is formed into a plurality of holes, a
plurality of island-shaped lower electrode portions, or a plurality
of stripe-shaped lower electrode portions.
63. The method according to claim 59, wherein, in the second step,
the lower electrode is formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities.
Description
BACKGROUND OF THE INVENTION
[0001] The present invention generally relates to a non-volatile
semiconductor memory device. More particularly, the present
invention relates to a non-volatile semiconductor memory device
having a booster including a capacitor.
[0002] Electrically writable and erasable non-volatile
semiconductor memory devices such as flash memory devices and
EEPROM (Electrically Erasable and Programmable Read Only Memory)
devices use two different voltages, one for read operation and one
for write and erase operations. For example, a power supply voltage
of 5 V is used for read operation, and a voltage of 12 V, i.e., the
power supply voltage boosted by a booster, is used for write and
erase operations.
[0003] In a conventional non-volatile semiconductor memory device,
a booster is formed by booster cells connected in parallel. Each
booster cell is formed by a switching element and a capacitor. The
capacitor in the booster has a square shape of about 200
.mu.m.times.about 200 .mu.m and is formed by plate-like upper and
lower electrodes facing each other with a capacitance insulating
film interposed therebetween. The capacitor having a larger
capacitance provides a greater boosting effect.
[0004] On the other hand, with recent progress in reduction in size
and voltage of a semiconductor device, a reduced power supply
voltage is often used especially in a non-volatile semiconductor
memory device incorporating a logic circuit. Therefore, the booster
must conduct the boosting operation more frequently.
[0005] For the conventional non-volatile semiconductor memory
device, however, it is difficult to sufficiently boost such a
reduced power supply voltage. Therefore, it is necessary to
increase the capacitance of the capacitor included in the booster.
This requires either the use of a special capacitance insulating
film such as a ferroelectric film or increase in area of the
capacitance insulating film. However, using a special insulating
film in the capacitor alone would make the process of forming the
capacitor more complex than the process of forming a storage
element, a logic element and the like. Therefore, it is difficult
from the standpoint of manufacturing costs to use such a special
capacitance insulating film. Moreover, increasing the area of the
capacitor would impede reduction in size of the non-volatile
semiconductor memory device.
[0006] As described above, in the conventional non-volatile
semiconductor memory device, it is difficult to obtain a capacitor
of a booster which enables reduction in size and voltage.
SUMMARY OF THE INVENTION
[0007] The present invention is made to solve the above problems,
and it is an object of the present invention to obtain a capacitor
of a booster which enables reduction in size and voltage of a
non-volatile semiconductor memory device without increasing
manufacturing costs.
[0008] In order to achieve the above object, a non-volatile
semiconductor memory device according to a first aspect of the
present invention includes a booster and a storage element. The
booster includes a capacitor having a lower electrode, a capacitor
capacitance insulating film and an upper electrode. The lower
electrode is shaped to have an increased surface area.
[0009] The non-volatile semiconductor memory device of the first
aspect enables a capacitance of the capacitor to be increased
without increasing the area of the capacitor. As a result, a
capacitor enabling reduction in voltage of the non-volatile
semiconductor memory device without impeding reduction in size of
the non-volatile semiconductor memory device can be obtained.
[0010] In the non-volatile semiconductor memory device of the first
aspect, the lower electrode preferably has a plurality of
holes.
[0011] In the non-volatile semiconductor memory device of the first
aspect, the lower electrode is preferably formed by a plurality of
island-shaped lower electrode portions.
[0012] In the non-volatile semiconductor memory device of the first
aspect, the lower electrode is preferably formed by a plurality of
stripe-shaped lower electrode portions.
[0013] In this case, a distance S between the lower electrode
portions and a thickness T of the lower electrode portions
preferably have a relation of S.ltoreq.2T. This ensures that the
total area of the side surfaces of the stripe-shaped lower
electrode portions is greater than the area of a region of the top
surface of the lower electrode, which is removed by forming the
stripe-shaped lower electrode portions. As a result, the surface
area of the lower electrode is reliably increased.
[0014] In the non-volatile semiconductor memory device of the first
aspect, a voltage V1 which is applied to the upper electrode and a
voltage V2 which is applied to the lower electrode preferably have
a relation of V1<V2. This prevents an electric field from being
intensively applied to the corners of the lower electrode, enabling
improvement in reliability of the capacitor capacitance insulating
film.
[0015] In the non-volatile semiconductor memory device of the first
aspect, the lower electrode preferably has a plurality of
concavities.
[0016] In the non-volatile semiconductor memory device of the first
aspect, the lower electrode preferably has a plurality of
convexities.
[0017] In the non-volatile semiconductor memory device of the first
aspect, the lower electrode preferably has a plurality of
stripe-shaped convexities.
[0018] In the non-volatile semiconductor memory device of the first
aspect, the storage element preferably has a tunnel insulating
film, a floating gate electrode, a storage element capacitance
insulating film and a control gate electrode. The floating gate
electrode and the lower electrode are preferably formed from a
conductive film which is formed in a same step. The storage element
capacitance insulating film and the capacitor capacitance
insulating film are preferably formed from an insulating film which
is formed in a same step. The control gate electrode and the upper
electrode are preferably formed from a conductive film which is
formed in a same step. This enables the step of forming the storage
element and the step of forming the capacitor to be partially
conducted in the same process. Therefore, the non-volatile
semiconductor memory device including the capacitor of the present
invention can be manufactured without increasing costs.
[0019] According to a second aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region and a capacitor region; a second step of forming a
plate-like conductive film in the capacitor region and etching the
plate-like conductive film to form a lower electrode having an
increased surface area; a third step of forming a capacitor
capacitance insulating film and an upper electrode on the lower
electrode; and a fourth step of forming in the storage circuit
region a storage element having a tunnel insulating film, a
floating gate electrode, a storage element capacitance insulating
film and a control gate electrode.
[0020] The manufacturing method of the second aspect enables a
capacitance of the capacitor to be increased without increasing the
area of the capacitor. As a result, a capacitor having a
capacitance large enough to enable reduction in voltage can be
reliably obtained.
[0021] In the manufacturing method of the second aspect, the lower
electrode is preferably formed into a plurality of holes, a
plurality of island-shaped lower electrode portions, or a plurality
of stripe-shaped lower electrode portions by etching a whole
thickness of the conductive film in the second step. This enables
the surface area of the lower electrode to be increased without
controlling the etching time. As a result, the manufacturing
process can be simplified as compared to the case where only an
upper portion of the conductive film is etched.
[0022] In the manufacturing method of the second aspect, the lower
electrode is preferably formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities by etching only an upper portion of the conductive film
in the second step. This prevents loss of the surface area of the
capacitor from being caused by etching. As a result, the surface
area of the lower electrode is reliably increased.
[0023] In the manufacturing method of the second aspect, the
floating gate electrode and the lower electrode are preferably
formed from a conductive film which is formed in a same step. The
storage element capacitance insulating film and the capacitor
capacitance insulating film are preferably formed from an
insulating film which is formed in a same step. The control gate
electrode and the upper electrode are preferably formed from a
conductive film which is formed in a same step. This enables the
step of forming the storage element and the step of forming the
capacitor to be partially conducted in the same process. Therefore,
the manufacturing costs are not increased by forming the capacitor
of the present invention.
[0024] According to a third aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region, a logic circuit region and a capacitor region; a
second step of sequentially forming a first insulating film and a
first conductive film on the semiconductor substrate and removing
the first conductive film in the logic circuit region; a third step
of etching the first conductive film in the capacitor region to
form a lower electrode having an increased surface area; a fourth
step of removing the first insulating film in the logic circuit
region and an exposed portion of the first insulating film in the
capacitor region and forming a second insulating film on the first
conductive film in the storage circuit region, the semiconductor
substrate in the logic circuit region, and the lower electrode in
the capacitor region; a fifth step of removing the second
insulating film in the logic circuit region and sequentially
forming a third insulating film and a second conductive film on the
second insulating film in the storage circuit region and the
capacitor region and on the semiconductor substrate in the logic
circuit region; a sixth step of forming in the storage circuit
region a tunnel insulating film from the first insulating film, a
floating gate electrode from the first conductive film, a storage
element capacitance insulating film from the second and third
insulating films, and a control gate electrode from the second
conductive film; a seventh step of forming in the logic circuit
region a gate insulating film from the third insulating film and a
gate electrode from the second conductive film; and an eighth step
of forming in the capacitor region a capacitor capacitance
insulating film from the second and third insulating films and an
upper electrode from the second conductive film.
[0025] The manufacturing method of the third aspect provides the
same effects as those of the manufacturing method of the second
aspect. Moreover, the step of forming the capacitor and the step of
forming the storage element and the logic element are partially
conducted in the same process. This enables the capacitor to be
formed without increasing the manufacturing costs.
[0026] In the manufacturing method of the third aspect, the lower
electrode is preferably formed into a plurality of holes, a
plurality of island-shaped lower electrode portions, or a plurality
of stripe-shaped lower electrode portions by etching a whole
thickness of the first conductive film in the third step.
[0027] In the manufacturing method of the third aspect, the lower
electrode is preferably formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities by etching only an upper portion of the first
conductive film in the third step.
[0028] According to a fourth aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region, a logic circuit region and a capacitor region; a
second step of sequentially forming a first insulating film and a
first conductive film on the semiconductor substrate; a third step
of etching the first conductive film in the capacitor region to
form a lower electrode having an increased surface area; a fourth
step of forming a second insulating film on the first conductive
film in the storage circuit region and the logic circuit region and
on the lower electrode in the capacitor region; a fifth step of
removing the first insulating film, the first conductive film and
the second insulating film in the logic circuit region and
sequentially forming a third insulating film and a second
conductive film on the second insulating film in the storage
circuit region and the capacitor region and on the semiconductor
substrate in the logic circuit region; a sixth step of forming in
the storage circuit region a tunnel insulating film from the first
insulating film, a floating gate electrode from the first
conductive film, a storage element capacitance insulating film from
the second and third insulating films, and a control gate electrode
from the second conductive film; a seventh step of forming in the
logic circuit region a gate insulating film from the third
insulating film and a gate electrode from the second conductive
film; and an eighth step of forming in the capacitor region a
capacitor capacitance insulating film from the second and third
insulating films and an upper electrode from the second conductive
film.
[0029] The manufacturing method of the fourth aspect provides the
same effects as those of the manufacturing method of the second and
third aspects. Moreover, the first insulating film, the first
conductive film and the second insulating film in the logic circuit
region are removed in the same step. As a result, the manufacturing
process can further be simplified.
[0030] In the manufacturing method of the fourth aspect, the lower
electrode is preferably formed into a plurality of holes, a
plurality of island-shaped lower electrode portions, or a plurality
of stripe-shaped lower electrode portions by etching a whole
thickness of the conductive film in the third step.
[0031] In the manufacturing method of the fourth aspect, the lower
electrode is preferably formed into a plurality of concavities, a
plurality of convexities, or a plurality of stripe-shaped
convexities by etching only an upper portion of the conductive film
in the third step.
[0032] In the non-volatile semiconductor memory device of the first
aspect, the storage element preferably has a charge storage film
and a gate electrode. The charge storage film and the capacitor
capacitance insulating film are preferably formed from an
insulating film which is formed in a same step. The gate electrode
and the upper electrode are preferably formed from a conductive
film which is formed in a same step. This enables the step of
forming the storage element and the step of forming the capacitor
to be partially conducted in the same process.
[0033] According to a fifth aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region and a capacitor region; a second step of forming a
concavity in a semiconductor substrate included in the capacitor
region, and implanting impurities into the concavity to form a
lower electrode; a third step of sequentially forming an insulating
film and a conductive film on the semiconductor substrate including
the lower electrode; a fourth step of forming in the storage
circuit region a charge storage film from the insulating film and a
first gate electrode from the conductive film; and a fifth step of
forming in the capacitor region a capacitor capacitance insulating
film from the insulating film and an upper electrode from the
conductive film.
[0034] In the manufacturing method of the fifth aspect, the
semiconductor substrate having impurities implanted thereinto is
used as the lower electrode. Accordingly, by forming a concavity in
the semiconductor substrate, the capacitance of the capacitor can
be increased without increasing the area of the capacitor.
Moreover, since the step of forming the storage element and the
step of forming the capacitor are partially conducted in the same
process, the manufacturing costs are not increased.
[0035] In the third step of the manufacturing method of the fifth
aspect, the insulating film is preferably formed by depositing a
silicon oxide film on the semiconductor substrate and nitriding an
upper portion of the deposited silicon oxide film.
[0036] In the third step of the manufacturing method of the fifth
aspect, the insulating film is preferably formed by sequentially
depositing a silicon oxide film and a silicon nitride film on the
semiconductor substrate. Since the semiconductor substrate is
covered with the silicon nitride film, the shape of the lower
electrode is less likely to be varied. Accordingly, degradation of
the capacitor capacitance insulating film can be suppressed.
[0037] In the third step of the manufacturing method of the fifth
aspect, the insulating film is preferably formed by sequentially
forming a first silicon oxide film, a second silicon oxide film and
a silicon nitride film on the semiconductor substrate. This enables
improvement in reliability of the charge storage film and the
capacitor capacitance insulating film.
[0038] In the third step of the manufacturing method of the fifth
aspect, the insulating film is preferably formed by sequentially
forming a first silicon oxide film, a silicon nitride film and a
second silicon oxide film on the semiconductor substrate. This
enables improvement in reliability of the charge storage film and
the capacitor capacitance insulating film.
[0039] In the second step of the manufacturing method of the fifth
aspect, the lower electrode is preferably formed into a plurality
of concavities, a plurality of convexities, or a plurality of
stripe-shaped convexities.
[0040] According to a sixth aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region, a logic circuit region and a capacitor region; a
second step of forming a concavity in the semiconductor substrate
included in the capacitor region, and introducing impurities into
the semiconductor substrate from a wall surface and a bottom
surface of the concavity to form a lower electrode; a third step of
sequentially forming a first insulating film, a second insulating
film and a first conductive film on the semiconductor substrate
including the lower electrode; a fourth step of forming in the
storage circuit region a charge storage film from the first
insulating film and the second insulating film and a first gate
electrode from the first conductive film; a fifth step of forming
in the logic circuit region a gate insulating film from the first
insulating film and the second insulating film and a second gate
electrode from the first conductive film; and a sixth step of
forming in the capacitor region a capacitor capacitance insulating
film from the first insulating film and the second insulating film
and an upper electrode from the first conductive film.
[0041] In the manufacturing method of the sixth aspect, the
semiconductor substrate having impurities implanted thereinto is
used as the lower electrode. Accordingly, by forming a concavity in
the semiconductor substrate, the capacitance of the capacitor can
be increased without increasing the area of the capacitor.
Moreover, since the step of forming the storage element, the step
of forming the logic element, and the step of forming the capacitor
are partially conducted in the same process, the manufacturing
costs are not increased. Moreover, the gate insulating film is a
lamination of the first insulating film and the second insulating
film. This enables formation of a reliable logic element.
[0042] In the third step of the manufacturing method of the sixth
aspect, the second insulating film is preferably formed by
nitriding an upper portion of the first insulating film.
[0043] In the third step of the manufacturing method of the sixth
aspect, the second insulating film is preferably formed by
depositing a silicon nitride film on the first insulating film.
Since the semiconductor substrate is covered with the silicon
nitride film, the shape of the lower electrode is less likely to be
varied. Accordingly, degradation of the capacitor capacitance
insulating film can be suppressed.
[0044] In the manufacturing method of the sixth aspect, the first
insulating film is preferably a silicon oxide film. This enables
improvement in reliability of the charge storage film, the gate
insulating film and the capacitor capacitance insulating film.
[0045] In the second step of the manufacturing method of the sixth
aspect, the lower electrode is preferably formed into a plurality
of concavities, a plurality of convexities, or a plurality of
stripe-shaped convexities.
[0046] According to a seventh aspect, a method for manufacturing a
non-volatile semiconductor memory device includes: a first step of
forming an element isolation insulating film in a semiconductor
substrate in order to define a storage circuit region, a logic
circuit region and a capacitor region; a second step of forming a
concavity in the semiconductor substrate included in the capacitor
region, and introducing impurities into the semiconductor substrate
from a wall surface and a bottom surface of the concavity to form a
lower electrode; a third step of forming a first insulating film on
the semiconductor substrate including the lower electrode; a fourth
step of removing the first insulating film included in the logic
circuit region; a fifth step of sequentially depositing a second
insulating film, a third insulating film and a first conductive
film on an exposed surface of the semiconductor substrate in the
logic circuit region and on the first insulating film in the
storage circuit region and the capacitor region; a sixth step of
forming in the storage circuit region a charge storage film from
the first insulating film, the second insulating film and the third
insulating film and a first gate electrode from the first
conductive film; a seventh step of forming in the logic circuit
region a gate insulating film from the second insulating film and
the third insulating film and a second gate electrode from the
first conductive film; and an eighth step of forming in the
capacitor region a capacitor capacitance insulating film from the
first insulating film, the second insulating film and the third
insulating film and an upper electrode from the first conductive
film.
[0047] In the manufacturing method of the seventh aspect, the
semiconductor substrate having impurities implanted thereinto is
used as the lower electrode. Accordingly, by forming a concavity in
the semiconductor substrate, the capacitance of the capacitor can
be increased without increasing the area of the capacitor.
Moreover, since the step of forming the storage element, the step
of forming the logic element, and the step of forming the capacitor
are partially conducted in the same process, the manufacturing
costs are not increased. Moreover, the gate insulating film is a
lamination of the second insulating film and the third insulating
film. This improves reliability of the gate insulating film.
[0048] In the manufacturing method of the seventh aspect, each of
the first insulating film and the second insulating film is
preferably a silicon oxide film. This enables improvement in
reliability of the charge storage film, the gate insulating film
and the capacitor capacitance insulating film.
[0049] In the manufacturing method of the seventh aspect, the third
insulating film is preferably a silicon nitride film. This enables
improvement in reliability of the charge storage film, the gate
insulating film and the capacitor capacitance insulating film, and
also enables reduction in thickness of the gate insulating film
without degrading reliability of the logic element.
[0050] In the second step of the manufacturing method of the
seventh aspect, the lower electrode is preferably formed into a
plurality of concavities, a plurality of convexities, or a
plurality of stripe-shaped convexities.
[0051] According to an eighth aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region, a logic circuit region and a capacitor region; a
second step of forming a concavity in the semiconductor substrate
included in the capacitor region, and introducing impurities into
the semiconductor substrate from a wall surface and a bottom
surface of the concavity to form a lower electrode; a third step of
sequentially forming a first insulating film and a second
insulating film on the semiconductor substrate including the lower
electrode; a fourth step of sequentially removing the second
insulating film and the first insulating film which are included in
the logic circuit region; a fifth step of sequentially depositing a
third insulating and a second conductive film on an exposed surface
of the semiconductor substrate in the logic circuit region and on
the first insulating film in the storage circuit region and the
capacitor region; a sixth step of forming in the storage circuit
region a charge storage film from the first insulating film, the
second insulating film and the third insulating film and a first
gate electrode from the first conductive film; a seventh step of
forming in the logic circuit region a gate insulating film from the
third insulating film and a second gate electrode from the first
conductive film; and an eighth step of forming in the capacitor
region a capacitor capacitance insulating film from the first
insulating film, the second insulating film and the third
insulating film and an upper electrode from the first conductive
film.
[0052] In the manufacturing method of the eighth aspect, the
semiconductor substrate having impurities implanted thereinto is
used as the lower electrode. Accordingly, by forming a concavity in
the semiconductor substrate, the capacitance of the capacitor can
be increased without increasing the area of the capacitor.
Moreover, since the step of forming the storage element, the step
of forming the logic element, and the step of forming the capacitor
are partially conducted in the same process, the manufacturing
costs are not increased. Moreover, the gate insulating film is
formed only from the third insulating film. This facilitates
reduction in thickness of the gate insulating film.
[0053] In the manufacturing method of the eighth aspect, each of
the first insulating film and the third insulating film is
preferably a silicon oxide film. This enables improvement in
reliability of the charge storage film, the gate insulating film
and the capacitor capacitance insulating film.
[0054] In the manufacturing method of the eighth aspect, the second
insulating film is preferably a silicon nitride film. This enables
improvement in reliability of the charge storage film and the
capacitor capacitance insulating film.
[0055] In the second step of the manufacturing method of the eighth
aspect, the lower electrode is preferably formed into a plurality
of concavities, a plurality of convexities, or a plurality of
stripe-shaped convexities.
[0056] According to a ninth aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region and a capacitor region; a second step of depositing
a first conductive film on the semiconductor substrate and etching
the first conductive film in the capacitor region to form a lower
electrode having an increased surface area; a third step of
sequentially forming an insulating film and a second conductive
film on the semiconductor substrate including the lower electrode;
a fourth step of forming in the storage circuit region a charge
storage film from the insulating film and a first gate electrode
from the second conductive film; and a fifth step of forming in the
capacitor region a capacitor capacitance insulating film from the
insulating film and an upper electrode from the second conductive
film.
[0057] In the manufacturing method of the ninth aspect, the lower
electrode is formed from a conductive film. Therefore, the lower
electrode is less likely to be subjected to depletion as compared
to the case where the semiconductor substrate is used for the lower
electrode. As a result, stable capacitor characteristics can be
obtained. Moreover, since the step of forming the storage element
and the step of forming the capacitor are partially conducted in
the same process, the manufacturing costs are not increased.
[0058] In the third step of the manufacturing method of the ninth
aspect, the insulating film is preferably formed by depositing a
silicon oxide film on the semiconductor substrate and then
nitriding an upper portion of the deposited silicon oxide film.
[0059] In the third step of the manufacturing method of the ninth
aspect, the insulating film is preferably formed by sequentially
depositing a silicon oxide film and a silicon nitride film on the
semiconductor substrate. Since the conductive film is covered with
the silicon nitride film, the shape of the lower electrode is less
likely to be varied. Accordingly, degradation of the capacitor
capacitance insulating film can be suppressed.
[0060] In the third step of the manufacturing method of the ninth
aspect, the insulating film is preferably formed by sequentially
forming a first silicon oxide film, a second silicon oxide film and
a silicon nitride film on the semiconductor substrate. This enables
improvement in reliability of the charge storage film and the
capacitor capacitance insulating film.
[0061] In the third step of the manufacturing method of the ninth
aspect, the insulating film is preferably formed by sequentially
forming a first silicon oxide film, a silicon nitride film and a
second silicon oxide film on the semiconductor substrate. This
enables improvement in reliability of the charge storage film and
the capacitor capacitance insulating film.
[0062] According to a tenth aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region, a logic circuit region and a capacitor region; a
second step of sequentially forming a first insulating film and a
first conductive film on the semiconductor substrate and etching
the first conductive film in the capacitor region to form a lower
electrode having an increased surface area; a third step of
sequentially removing the first conductive film and the first
insulating film in the storage circuit region and the logic circuit
region; a fourth step of sequentially forming a second insulating
film, a third insulating film and a second conductive film on the
semiconductor substrate including the lower electrode; a fifth step
of forming in the storage circuit region a charge storage film from
the second insulating film and the third insulating film and a
first gate electrode from the second conductive film; a sixth step
of forming in the logic circuit region a gate insulating film from
the second insulating film and the third insulating film and a
second gate electrode from the second conductive film; and a
seventh step of forming in the capacitor region a capacitor
capacitance insulating film from the second insulating film and the
third insulating film and an upper electrode from the second
conductive film.
[0063] In the manufacturing method of the tenth aspect, the lower
electrode is formed from a conductive film. Therefore, the lower
electrode is less likely to be subjected to depletion as compared
to the case where the semiconductor substrate is used for the lower
electrode. As a result, stable capacitor characteristics can be
obtained. Moreover, since the step of forming the storage element,
the step of forming the logic element and the step of forming the
capacitor are partially conducted in the same process, the
manufacturing costs are not increased. Moreover, the gate
insulating film is a lamination of the second insulating film and
the third insulating film. This enables formation of a reliable
logic element.
[0064] In the fourth step of the manufacturing method of the tenth
aspect, the third insulating film is preferably formed by nitriding
an upper portion of the second insulating film.
[0065] In the fourth step of the manufacturing method of the tenth
aspect, the third insulating film is preferably formed by
depositing a silicon nitride film on the second insulating film.
Since the first conductive film is covered with the silicon nitride
film, the shape of the lower electrode is less likely to be varied.
Accordingly, degradation of the capacitor capacitance insulating
film can be suppressed.
[0066] In the manufacturing method of the tenth aspect, the second
insulating film is preferably a silicon oxide film. This enables
improvement in reliability of the charge storage film, the gate
insulating film and the capacitor capacitance insulating film.
[0067] According to an eleventh aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region, a logic circuit region and a capacitor region; a
second step of sequentially forming a first insulating film and a
first conductive film on the semiconductor substrate and etching
the first conductive film in the capacitor region to form a lower
electrode having an increased surface area; a third step of
sequentially removing the first conductive film and the first
insulating film in the storage circuit region and the logic circuit
region; a fourth step of forming a second insulating film on the
semiconductor substrate including the lower electrode; a fifth step
of removing the second insulating film included in the logic
circuit region; a sixth step of sequentially depositing a third
insulating film, a fourth insulating film and a second conductive
film on an exposed surface of the semiconductor substrate in the
logic circuit region and on the second insulating film in the
storage circuit region and the capacitor region; a seventh step of
forming in the storage circuit region a charge storage film from
the second insulating film, the third insulating film and the
fourth insulating film and a first gate electrode from the second
conductive film; an eighth step of forming in the logic circuit
region a gate insulating film from the third insulating film and
the fourth insulating film and a second gate electrode from the
second conductive film; and a ninth step of forming in the
capacitor region a capacitor capacitance insulating film from the
second insulating film, the third insulating film and the fourth
insulating film and an upper electrode from the second conductive
film.
[0068] In the manufacturing method of the eleventh aspect, the
lower electrode is formed from a conductive film. Therefore, the
lower electrode is less likely to be subjected to depletion as
compared to the case where the semiconductor substrate is used for
the lower electrode. As a result, stable capacitor characteristics
can be obtained. Moreover, since the step of forming the storage
element, the step of forming the logic element and the step of
forming the capacitor are partially conducted in the same process,
the manufacturing costs are not increased. Moreover, the gate
insulating film is a lamination of the third insulating film and
the fourth insulating film. This enables improvement in reliability
of the gate insulating film.
[0069] In the manufacturing method of the eleventh aspect, each of
the second insulating film and the third insulating film is
preferably a silicon oxide film. This enables improvement in
reliability of the charge storage film, the gate insulating film
and the capacitor capacitance insulating film.
[0070] In the manufacturing method of the eleventh aspect, the
fourth insulating film is preferably a silicon nitride film. This
enables improvement in reliability of the charge storage film, the
gate insulating film and the capacitor capacitance insulating
film.
[0071] According to a twelfth aspect of the present invention, a
method for manufacturing a non-volatile semiconductor memory device
includes: a first step of forming an element isolation insulating
film in a semiconductor substrate in order to define a storage
circuit region, a logic circuit region and a capacitor region; a
second step of sequentially forming a first insulating film and a
first conductive film on the semiconductor substrate and etching
the first conductive film in the capacitor region to form a lower
electrode having an increased surface area; a third step of
sequentially removing the first conductive film and the first
insulating film which are included in the storage circuit region
and the logic circuit region; a fourth step of sequentially forming
a second insulating film and a third insulating film on the
semiconductor substrate including the lower electrode; a fifth step
of sequentially removing the third insulating film and the second
insulating film which are included in the logic circuit region; a
sixth step of sequentially depositing a fourth insulating film and
a second conductive film on an exposed surface of the semiconductor
substrate in the logic circuit region and on the third insulating
film in the storage circuit region and the capacitor region; a
seventh step of forming in the storage circuit region a charge
storage film from the second insulating film, the third insulating
film and the fourth insulating film and a first gate electrode from
the second conductive film; an eighth step of forming in the logic
circuit region a gate insulating film from the fourth insulating
film and a second gate electrode from the second conductive film;
and a ninth step of forming in the capacitor region a capacitor
capacitance insulating film from the second insulating film, the
third insulating film and the fourth insulating film and an upper
electrode from the second conductive film.
[0072] In the manufacturing method of the twelfth aspect, the lower
electrode is formed from a conductive film. Therefore, the lower
electrode is less likely to be subjected to depletion as compared
to the case where the semiconductor substrate is used for the lower
electrode. As a result, stable capacitor characteristics can be
obtained. Moreover, since the step of forming the storage element,
the step of forming the logic element and the step of forming the
capacitor are partially conducted in the same process, the
manufacturing costs are not increased. Moreover, the gate
insulating film is formed only from the fourth insulating film.
This facilitates reduction in thickness of the gate insulating
film.
[0073] In the manufacturing method of the twelfth aspect, each of
the second insulating film and the fourth insulating film is
preferably a silicon oxide film. This enables improvement in
reliability of the charge storage film, the gate insulating film
and the capacitor capacitance insulating film.
[0074] In the manufacturing method of the twelfth aspect, the third
insulating film is preferably a silicon nitride film. This enables
improvement in reliability of the charge storage film and the
capacitor capacitance insulating film.
[0075] In the second step of the manufacturing methods of the ninth
to twelfth aspects, the lower electrode is preferably formed into a
plurality of holes, a plurality of island-shaped lower electrode
portions, or a plurality of stripe-shaped lower electrode
portions.
[0076] In the second step of the manufacturing methods of the ninth
to twelfth aspects, the lower electrode is preferably formed into a
plurality of concavities, a plurality of convexities, or a
plurality of stripe-shaped convexities.
BRIEF DESCRIPTION OF THE DRAWINGS
[0077] FIG. 1 is a cross-sectional view of a non-volatile
semiconductor memory device according to a first embodiment of the
present invention;
[0078] FIGS. 2A, 2B and 2C show a lower electrode of a capacitor
according to the first embodiment of the present invention, wherein
FIG. 2A is a perspective view showing a first shape, FIG. 2B is a
perspective view showing a second shape, and FIG. 2C is a
perspective view showing a third shape;
[0079] FIGS. 3A, 3B and 3C are perspective views of a lower
electrode of a capacitor according to a modification of the first
embodiment of the present invention, wherein FIGS. 3A, 3B and 3C
correspond to FIGS. 2A, 2B and 2C, respectively;
[0080] FIGS. 4A and 4B are cross-sectional views showing a part of
a lower electrode of a capacitor according to the first embodiment
of the present invention;
[0081] FIGS. 5A and 5B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the first embodiment of
the present invention;
[0082] FIGS. 6A and 6B are cross-sectional views sequentially
illustrating the steps of the method for manufacturing a
non-volatile semiconductor memory device according to the first
embodiment of the present invention;
[0083] FIGS. 7A and 7B are cross-sectional views sequentially
illustrating the steps of the method for manufacturing a
non-volatile semiconductor memory device according to the first
embodiment of the present invention;
[0084] FIG. 8 is a cross-sectional view sequentially illustrating
the steps of the method for manufacturing a non-volatile
semiconductor memory device according to the first embodiment of
the present invention;
[0085] FIGS. 9A and 9B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to a modification of the
first embodiment of the present invention;
[0086] FIG. 10 is a cross-sectional view sequentially illustrating
the steps of the method for manufacturing a non-volatile
semiconductor memory device according to the modification of the
first embodiment of the present invention;
[0087] FIG. 11 is a cross-sectional view of a non-volatile
semiconductor memory device according to a second embodiment of the
present invention;
[0088] FIGS. 12A and 12B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the second embodiment of
the present invention;
[0089] FIG. 13 is a cross-sectional view of a non-volatile
semiconductor memory device according to a third embodiment of the
present invention;
[0090] FIGS. 14A and 14B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the third embodiment of
the present invention;
[0091] FIG. 15 is a cross-sectional view of a non-volatile
semiconductor memory device according to a fourth embodiment of the
present invention;
[0092] FIGS. 16A and 16B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the fourth embodiment of
the present invention;
[0093] FIG. 17 is a cross-sectional view of a non-volatile
semiconductor memory device according to a fifth embodiment of the
present invention;
[0094] FIGS. 18A and 18B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the fifth embodiment of
the present invention;
[0095] FIG. 19 is a cross-sectional view of a non-volatile
semiconductor memory device according to a sixth embodiment of the
present invention;
[0096] FIGS. 20A and 20B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the sixth embodiment of
the present invention;
[0097] FIG. 21 is a cross-sectional view sequentially illustrating
the steps of the method for manufacturing a non-volatile
semiconductor memory device according to the sixth embodiment of
the present invention;
[0098] FIG. 22 is a cross-sectional view of a non-volatile
semiconductor memory device according to a seventh embodiment of
the present invention;
[0099] FIGS. 23A and 23B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the seventh embodiment of
the present invention;
[0100] FIG. 24 is a cross-sectional view of a non-volatile
semiconductor memory device according to an eighth embodiment of
the present invention;
[0101] FIGS. 25A and 25B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the eighth embodiment of
the present invention;
[0102] FIG. 26 is a cross-sectional view of a non-volatile
semiconductor memory device according to a ninth embodiment of the
present invention; and
[0103] FIGS. 27A and 27B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the ninth embodiment of
the present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
First Embodiment
[0104] Hereinafter, the first embodiment of the present invention
will be described with reference to the accompanying drawings.
[0105] FIG. 1 shows a cross-sectional structure of a non-volatile
semiconductor memory device according to the first embodiment of
the present invention. As shown in FIG. 1, an element isolation
insulating film 12 is selectively formed in the upper portion of a
semiconductor substrate 11. The semiconductor substrate 11 is
formed from silicon, and the element isolation insulating film 12
is formed from silicon oxide. Such selective formation of the
element isolation insulating film 12 defines a storage circuit
region Rmem, a logic circuit region Rlogic, and a capacitor region
Rcap. The storage circuit region Rmem is a region including a
storage element. The logic circuit region Rlogic is a region
including a peripheral circuit or a logic element such as a logic
circuit. The capacitor region Rcap is a region including a
capacitor of a booster which is formed on the element isolation
insulating film 12.
[0106] In the storage circuit region Rmem, a floating gate
electrode 14 is formed on the semiconductor substrate 11 with a
tunnel insulating film 13 interposed therebetween. The tunnel
insulating film 13 is formed from silicon oxide, and the floating
gate electrode 14 is formed from polysilicon. A control gate
electrode 19 is formed on the floating gate electrode 14 with a
storage element capacitance insulating film (a capacitance
insulating film for a storage element) 18 interposed therebetween.
The storage element capacitance insulating film 18 is an ONO
(oxide-nitride-oxide) film, and the control gate electrode 19 is
formed from polysilicon.
[0107] Note that the storage element capacitance insulating film 18
is a lamination of a first silicon oxide film 15, a silicon nitride
film 16 and a second silicon oxide film 17.
[0108] A sidewall 20 is formed on both sides of the floating gate
electrode 14 and the control gate electrode 19. The sidewall 20 is
formed from silicon oxide. A source/drain region 21 is formed in
the surface region of the semiconductor substrate 11 so as to
extend from a position inside the sidewall 20 to a position outside
the sidewall 20. The source/drain region 21 is formed by
introducing impurities into the semiconductor substrate 11.
[0109] In the logic circuit region Rlogic, a gate electrode 23 is
formed on the semiconductor substrate 11 with a gate insulating
film 22 interposed therebetween. The gate insulating film 22 is
formed from silicon oxide, and the gate electrode 23 is formed from
polysilicon. A sidewall 20 is formed on both sides of the gate
electrode 23. The sidewall 20 is formed from silicon oxide. A
source/drain region 21 is formed in the surface region of the
semiconductor substrate 11 so as to extend from a position inside
the sidewall 20 to a position outside the sidewall 20. The
source/drain region 21 is formed by introducing impurities into the
semiconductor substrate 11.
[0110] In the capacitor region Rcap, a lower electrode 24 is formed
on the element isolation insulating film 12 with an insulating film
interposed therebetween. This insulating film is the same as the
tunnel insulating film 13 in the storage circuit region Rmem. The
lower electrode 24 is formed from polysilicon. More specifically,
the lower electrode 24 is formed by shaping a plate-like conductive
film of polysilicon. An upper electrode 26 is formed on the lower
electrode 24 with a capacitor capacitance insulating film (a
capacitance insulating film for a capacitor) 25 interposed
therebetween. The capacitor capacitance insulating film 25 is an
ONO film, and the upper electrode 26 is formed from polysilicon.
The capacitor capacitance insulating film 25 is a lamination of a
first silicon oxide film 15, a silicon nitride film 16 and a second
silicon oxide film 17. Note that the capacitor capacitance
insulating film 25 may alternatively be a single-layer film.
[0111] In the non-volatile semiconductor memory device of the first
embodiment, the floating gate electrode 14 in the storage circuit
region Rmem and the lower electrode 24 in the capacitor region Rcap
are preferably formed from a conductive film which is formed in the
same step. The storage element capacitance insulating film 18 in
the storage circuit region Rmem and the capacitor capacitance
insulating film 25 in the capacitor region Rcap are preferably
formed from an insulating film which is formed in the same step.
Moreover, the control gate electrode 19 in the storage circuit
region Rmem, the gate 10 electrode 23 in the logic circuit region
Rlogic and the upper electrode 26 in the capacitor region Rcap are
preferably formed from a conductive film which is formed in the
same step. This enables the step of forming the storage element and
the step of forming the capacitor to be partially conducted in the
same process.
[0112] The lower electrode 24 of the capacitor of the first
embodiment is formed by shaping a plate-like conductive film so as
to increase the surface area. More specifically, the lower
electrode 24 is formed as follows: a plate-like conductive film
having a height of about 200 nm is formed in a square region of
about 200 .mu.m.times.about 200 .mu.m and is shaped so as to have
an increased surface area. This enables the capacitance of the
capacitor to be increased without increasing the area of the
capacitor. As a result, a capacitor which enables reduction in
voltage of a non-volatile semiconductor memory device without
impeding reduction in size of the non-volatile semiconductor memory
device can be obtained.
[0113] Hereinafter, specific shapes of the lower electrode of the
capacitor will be described.
[0114] FIGS. 2A to 2C and FIGS. 3A to 3C are perspective views of
the lower electrode of the capacitor, and show specific examples of
the shape of the lower electrode. Note that, in FIGS. 2B and 2C, a
square region defined by dashed line is a region where the
capacitor is to be formed (hereinafter, referred to as "capacitor
formation region"). The size of this square region is about 200
.mu.m.times.about 200 .mu.m.
[0115] FIG. 2A is a perspective view showing a first shape of the
lower electrode. The lower electrode 34 having the first shape is
formed as follows: a plate-like conductive film is formed on the
element isolation insulating film 32 of the semiconductor substrate
31, and a plurality of holes 33 are formed in the plate-like
conductive film. Each hole 33 has a diameter of about 0.3 .mu.m,
and extends through the lower electrode 34 down to the element
isolation insulating film 32. Note that the holes do not
necessarily have a circular shape (a square shape in design), and
may have an oval or elliptical shape (a rectangular shape in
design).
[0116] FIG. 2B is a perspective view showing a second shape of the
lower electrode. The lower electrode 34 having the second shape is
formed as follows: a plate-like conductive film is formed on the
element isolation insulating film 32 of the semiconductor substrate
31, and is patterned into a plurality of island-shaped lower
electrode portions 34a arranged in a matrix. For example, each
lower electrode portion 34a has a square size of about 20
.mu.m.times.about 20 .mu.m, and the lower electrode portions 34a
are arranged at intervals of about 0.3 .mu.m. The height of the
lower electrode portions 34a is the same as the thickness of the
plate-like conductive film.
[0117] Although not shown in the figure, a wiring for electrically
connecting the lower electrode portions 34a to each other is formed
in order to allow the island-shaped lower electrode portions 34a to
function as the lower electrode 34 of a single capacitor. For
example, this wiring can be formed as follows: after the upper
electrode is formed, holes extending to the respective lower
electrode portions 34a are formed in the upper electrode, and a
metal wiring is formed so as to connect the lower electrode
portions 34a to each other.
[0118] FIG. 2C is a perspective view showing a third shape of the
lower electrode. The lower electrode 34 having the third shape is
formed as follows: a plate-like conductive film is formed on the
element isolation insulating film 32 of the semiconductor substrate
31, and is patterned into stripe-shaped lower electrode portions
34b. For example, each stripe-shaped lower electrode portion 34b
has a width of about 0.25 .mu.m, and the lower electrode portions
34b are arranged at intervals of about 0.25 .mu.m. The height of
the lower electrode portions 34b is the same as the thickness of
the plate-like conductive film.
[0119] Although not shown in the figure, a wiring for electrically
connecting the lower electrode portions 34b to each other is formed
in order to allow the stripe-shaped lower electrode portions 34b to
function as the lower electrode 34 of a single capacitor. For
example, this wiring can be formed as follows: the lower electrode
portions 34b are formed so that the ends of the lower electrode
portions 34b are exposed from the region of the upper electrode,
and a metal wiring is formed so as to connect the exposed portions
of the lower electrode portions 34b to each other. This connection
may be implemented by the lower electrode itself instead of the
wiring. The lower electrode portions 34b may alternatively be
connected in the same manner as that of the second shape. More
specifically, after the upper electrode is formed, holes extending
to the respective lower electrode portions 34b are formed in the
upper electrode, and a metal wiring is formed so as to connect the
lower electrode portions 34b to each other.
[0120] In the lower electrode 34 of the first shape, each hole 33
reaches the element isolation insulating film 32. Moreover, in the
lower electrodes 34 of the second and third shapes, the element
isolation insulating film 32 around the lower electrode portions
34a, 34b is exposed to the outside. In order for the lower
electrode 34 to have a greater surface area than that of a
plate-like lower electrode, the total area of the side surfaces of
the holes 33 or the lower electrode portions 34a, 34b must be
greater than the area of the region of the top surface of the
plate-like conductive film, which is removed by forming the holes
33 or the lower electrode portions 34a, 34b. More specifically, for
the lower electrode having the third shape, the distance S between
the stripe-shaped lower electrode portions 34b and the thickness T
of the lower electrode 34 has the relation of S.ltoreq.2T.
[0121] Hereinafter, modifications of the first to third shapes of
the lower electrode will be described.
[0122] FIGS. 3A to 3C are perspective views showing modifications
of the first to third shapes of the lower electrode 34. In the
lower electrodes 34 of these modifications, the upper portion of
the plate-like conductive film has the same two-dimensional shape
as that of the holes 33 or the lower electrode portions 34a, 34b in
the lower electrode 34 of the first to third shapes.
[0123] FIG. 3A is a perspective view showing a modification of the
first shape of the lower electrode. In this modification, the upper
portion of the plate-like conductive film formed on the element
isolation insulating film 32 of the semiconductor substrate 31 has
the same two-dimensional shape as that in the first shape. More
specifically, a plurality of concavities 33A are formed in the
upper portion of the plate-like conductive film.
[0124] FIG. 3B is a perspective view showing a modification of the
second shape of the lower electrode. In this modification, the
upper portion of the plate-like conductive film formed on the
element isolation insulating film 32 of the semiconductor substrate
31 has the same two-dimensional shape as that in the second shape.
More specifically, a plurality of convexities 34c are formed in the
upper portion of the plate-like conductive film. The lower
electrode 34 of this modification has the convexities 34c in its
upper portion, and the lower portion of the lower electrode 34 is
not separated. Therefore, unlike the lower electrode of the second
shape, the lower electrode of this modification does not require a
wiring for connecting the convexities 34c to each other. Note that
the two-dimensional shape of each convexity 34c is not limited to
the square.
[0125] FIG. 3C is a perspective view showing a modification of the
third shape of the lower electrode. In this modification, the upper
portion of the plate-like conductive film formed on the element
isolation insulating film 32 of the semiconductor substrate 31 has
the same two-dimensional shape as that in the third embodiment.
More specifically, a plurality of stripe-shaped convexities 34d are
formed in the upper portion of the plate-like conductive film. The
lower electrode 34 of this modification has the stripe-shaped
convexities 34d in its upper portion, and the lower portion of the
lower electrode 34 is not separated. Therefore, unlike the lower
electrode of the third shape, the lower electrode of this
modification does not require a wiring for connecting the
convexities 34d to each other.
[0126] The modifications of the first to third shapes are
characterized in that the concavities 33A does not extend through
the lower electrode, and the element isolation insulating film 32
around the convexities 34c, 34d are not exposed to the outside.
Therefore, unlike the first to third shapes, the surface area of
the lower electrode 34 is not reduced but always increased by
forming the convexities 33A or the convexities 34c, 34d.
[0127] According to the first to third shapes of the lower
electrode and the modifications thereof, the capacitance can be
easily increased even in such a large capacitor that is used in a
booster. More specifically, the capacitance of the capacitor can be
easily increased while retaining the same area as that of the
conventional capacitor and without using a special insulating
film.
[0128] Hereinafter, the cross-sectional shape of the concavity in
the first to third shapes of the lower electrode and the
modifications thereof will be described.
[0129] FIGS. 4A and 4B show a part of the lower electrode having
the first shape. More specifically, FIGS. 4A and 4B show a
transverse cross section of the concavity formed in the lower
electrode. As shown in FIG. 4A, the angle .theta. between the side
surface of the concavity 33 and the top surface of the lower
electrode 34 is preferably 90 degrees or more. The angle .theta. of
less than 90 degrees as shown in FIG. 4B would degrade coverage of
the insulating film formed on the lower electrode. As a result, the
insulating film is more likely to be "lifted" or "separated" from
the lower electrode, and the insulating film has a reduced
thickness at the corners. This causes reduction in reliability of
the insulating film.
[0130] Although the lower electrode 34 having the first shape is
described above, the same applies to the other shapes. In other
words, in the lower electrode 34 of the capacitor of the first
embodiment, the angle between the side surface of the concavity
formed in the lower electrode 34 and the top surface of the lower
electrode 34 is preferably 90 degrees or more. This improves
reliability of the capacitance insulating film formed on the lower
electrode.
[0131] Regarding the lower electrodes of the first to third shapes,
a voltage V1 of the upper electrode and a voltage V2 of the lower
electrode preferably has the relation of V1<V2. The reason for
this is as follows: in the lower electrodes of the first to third
shapes, the capacitance insulating film between the upper and lower
electrodes projects toward the lower electrode. Therefore, if
V1>V2, an electric field would be intensively applied to the
convexities of the lower electrode, thereby degrading reliability
of the capacitance insulating film. Accordingly, in the lower
electrodes of the first to third shapes, the use of the voltages
V1, V2 having the relation of V1>V2 can improve reliability of
the capacitance insulating film over the relation of V1<V2. Note
that, in the modifications of the first to third shapes of the
lower electrode, the upper electrode has convexities like the lower
electrode. Therefore, the above condition does not apply to the
modifications of the first to third shapes.
Manufacturing Method of First Embodiment
[0132] Hereinafter, a method for manufacturing the above
non-volatile semiconductor memory device will be described with
reference to the figures.
[0133] FIGS. 5A to 8 are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a
semiconductor memory device according to the first embodiment of
the present invention. As shown in FIG. 5A, an element isolation
insulating film 52 is formed in a semiconductor substrate 51 by an
STI (Shallow Trench Isolation) method in order to define a storage
circuit region Rmem and a logic circuit region Rlogic which are
electrically isolated from each other, and to define a capacitor
region Rcap. In the capacitor region Rcap, a booster is to be
formed on the element isolation insulating film 52. A first
insulating film 53 is then formed on the whole surface of the
semiconductor substrate 51 including the element isolation
insulating film 52 by a thermal oxidation method. Thereafter, a
first conductive film 54 having a thickness of about 200 nm is
deposited on the first insulating film 53 by a CVD (Chemical Vapor
Deposition) method. The first insulating film 53 is formed from
silicon oxide, and the first conductive film 54 is formed from
polysilicon.
[0134] Note that the element isolation insulating film 52 may be
formed by a LOCOS (Local Oxidation of Silicon) method instead of
the STI method.
[0135] As shown in FIG. 5B, a first resist pattern 55 is then
formed by a photolithography method. The first resist pattern 55
exposes the logic circuit region Rlogic and the capacitor region
Rcap other than the capacitor formation region, and has openings of
a predetermined shape in the capacitor formation region.
Thereafter, by using the first resist pattern 55 as a mask, the
first conductive film 54 is etched by an anisotropic dry etching
method using, e.g., CF.sub.2 and HBr as etching gas. More
specifically, the first conducive film 54 in the logic circuit
region Rlogic and the exposed portion of the first conductive film
54 in the capacitor region Rcap are etched away. As a result, a
lower electrode 54 having a predetermined shape is formed in the
capacitor region Rcap.
[0136] If the first resist pattern 55 has hole-shaped openings in
the capacitor formation region of the capacitor region Rcap, the
resultant lower electrode has the first shape. If the first resist
pattern 55 has grid-like openings in the capacitor formation region
of the capacitor region Rcap, the resultant lower electrode has the
second shape. If the first resist pattern 55 has stripe-shaped
openings in the capacitor formation region of the capacitor region
Rcap, the resultant lower electrode has the third shape. Such a
resist pattern can be effectively formed by a photolithography
method using annular illumination or a phase shift mask.
[0137] Although not shown in the figure, the lower electrodes of
the capacitor according to the modifications of the first to third
shapes can be formed by, e.g., the following method: the above
anisotropic dry etching process using the first resist pattern 55
as a mask is conducted for a reduced time so that only the upper
portion of the first conductive film 54 is etched away. The first
resist pattern 55 is then removed. Thereafter, a resist pattern is
formed so as to expose the logic circuit region Rlogic and mask the
capacitor formation region of the capacitor region Rcap. The first
conductive film 54 in the logic circuit region Rlogic, i.e., the
exposed portion of the first conductive film 54, is then etched
away by a dry etching method using this resist pattern as a
mask.
[0138] As shown in FIG. 6A, the first resist pattern 55 is removed,
and the first insulating film 53 in the logic circuit region Rlogic
and the exposed portion of the first insulating film 53 in the
capacitor region Rcap are removed by a wet etching method.
Thereafter, a first silicon oxide film 56 and a silicon nitride
film 57 are sequentially deposited on the whole surface of the
semiconductor substrate 51 by a reduced pressure CVD method. An ON
(oxide-nitride) film 58 is thus formed as a second insulating
film.
[0139] As shown in FIG. 6B, a second resist pattern 59 exposing the
logic circuit region Rlogic is then formed by a photolithography
method. By using the second resist pattern 59 as a mask, the ON
film 58 in the logic circuit region Rlogic is then etched away by
an anisotropic dry etching method using, e.g., CF.sub.2 as etching
gas.
[0140] As shown in FIG. 7A, the second resist pattern 59 is
removed, and a second silicon oxide film 60 is formed as a third
insulating film on the semiconductor substrate 51 in the logic
circuit region Rlogic and on the silicon nitride film 57 in the
storage circuit region Rmem and the capacitor region Rcap by a
thermal oxidation method. An ONO film 61, a lamination of the first
silicon oxide film 56, the silicon nitride film 57 and the second
silicon oxide film 60, is thus formed on the first conductive film
54 in the storage circuit region Rmem and on the lower electrode
54A in the capacitor region Rcap. Thereafter, a second conductive
film 62 having a thickness of about 200 nm is deposited on the
second silicon oxide film 60 by a reduced pressure CVD method. The
second conductive film 62 is formed from polysilicon. A third
resist pattern 63 for patterning a region where a control gate
electrode is to be formed (hereinafter, referred to as "control
gate electrode formation region") in the storage circuit region
Rmem and masking the logic circuit region Rlogic and the capacitor
region Rcap is then formed by a photolithography method.
Thereafter, by an anisotropic dry etching method using the third
resist pattern 63 as a mask, the first insulating film 53, the
first conductive film 54, the ONO film 61 and the second conductive
film 62 are etched in the storage circuit region Rmem to form a
tunnel insulating film 53A, a floating gate electrode 54B, a
storage element capacitance insulating film 61A and a control gate
electrode 62A, respectively.
[0141] As shown in FIG. 7B, a fourth resist pattern 64 is then
formed by a photolithography method. The fourth resist pattern 64
masks the storage circuit region Rmem, a region where a gate
electrode is to be formed (hereinafter, referred to as "gate
electrode formation region") in the logic circuit region Rlogic,
and the capacitor formation region in the capacitor region Rcap. An
anisotropic dry etching method is then conducted using the fourth
resist pattern 64 as a mask. As a result, in the logic circuit
region Rlogic, the second conductive film 62 and the second silicon
oxide film 60 are etched to form a gate electrode 62B and a gate
insulating film 60A, respectively. Moreover, in the capacitor
region Rcap, the ONO film 61 and the second conductive film 62 are
etched to form a capacitor capacitance insulating film 61B and an
upper electrode 62C, respectively.
[0142] As shown in FIG. 8, the fourth resist pattern 64 is then
removed, and an insulating film for forming a sidewall is formed.
The insulating film for forming a sidewall is then subjected to an
anisotropic dry etching method in order to form a sidewall 65 on
the side surfaces of a storage element, a logic element and a
capacitor in a self-aligned manner. Impurities are then introduced
into the semiconductor substrate 51 by using the sidewalls 65 as a
mask. As a result, a source/drain region 66 extending to a position
outside the storage element and the logic element is formed in the
semiconductor substrate 51.
[0143] Although not shown in the figure, the steps of forming an
interlayer insulating film, forming a wiring, and forming bonding
pads are then conducted, whereby the non-volatile semiconductor
memory device of the first embodiment is completed.
Modification of Manufacturing Method of First Embodiment
[0144] Hereinafter, a modification of the above method for
manufacturing a non-volatile semiconductor memory device according
to the first embodiment of the present invention will be described
with reference to the figures. The modification is different from
the above manufacturing method in a process of removing the first
insulating film, the first conductive film and the ON film in the
logic circuit region.
[0145] FIGS. 9A, 9B and 10 are cross-sectional views sequentially
illustrating the steps of the method for manufacturing a
non-volatile semiconductor memory device according to the
modification. Some steps in the modification can be conducted in
the same manner as that of the above manufacturing method.
Therefore, detailed description thereof is omitted. Moreover, the
same members as those in the above manufacturing method are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0146] The element isolation insulating film 52 is formed in the
semiconductor substrate 51 in the same manner as that in the step
of FIG. 5A in order to define the storage circuit region Rmem, the
logic circuit region Rlogic and the capacitor region Rcap.
Thereafter, the first insulating film 53 and the first conductive
film 54 are formed.
[0147] As shown in FIG. 9A, a first resist pattern 67 for masking
the storage circuit region Rmem and the logic circuit region Rlogic
and patterning a lower electrode of a capacitor in the capacitor
region Rcap is formed by a photolithography method. By using the
first resist pattern 67 as a mask, the first conductive film 54 is
etched by an anisotropic dry etching method using, e.g., CF.sub.2
and HBr as etching gas. A lower electrode 54A is thus formed in the
capacitor region Rcap.
[0148] As shown in FIG. 9B, the first resist pattern 67 is then
removed, and a first silicon oxide film 56 and a silicon nitride
film 57 are sequentially deposited on the whole surface of the
semiconductor substrate 51 by a reduced pressure CVD method.
[0149] As shown in FIG. 10, a second resist pattern 59 masking the
storage circuit region Rmem and the capacitor region Rcap and
exposing the logic circuit region Rlogic is formed by a
photolithography method. By using the second resist pattern 59 as a
mask, the first silicon oxide film 56 and the silicon nitride film
57 in the logic circuit region Rlogic are etched by an anisotropic
dry etching method using, e.g., CF.sub.2 as etching gas. By using
the second resist pattern 59 as a mask, the first conductive film
54 in the logic circuit region Rlogic is etched away by an
anisotropic dry etching method using, e.g., CF.sub.2 and HBr as
etching gas, and the first insulating film 53 in the logic circuit
region Rlogic is also etched away by a wet etching method.
[0150] Thereafter, the steps shown FIG. 7A and the following
figures are conducted, whereby the non-volatile semiconductor
memory device according to the first embodiment is completed.
[0151] As has been described above, in the manufacturing method of
the non-volatile semiconductor memory device according to the first
embodiment and the modification thereof, the lower electrode 54A of
the capacitor and the floating gate electrode 54B of the storage
element are formed from a conductive film which is deposited in the
same step. Moreover, the upper electrode 62C of the capacitor and
the control gate electrode 62A of the storage element are formed
from a conductive film which is deposited in the same step, and the
capacitor capacitance insulating film 61B and the storage element
capacitance insulating film 61A are formed from an insulating film
which is formed in the same step. This enables a capacitor having a
great capacitance to be formed without increasing the manufacturing
costs.
Second Embodiment
[0152] Hereinafter, the second embodiment of the present invention
will be described with reference to the figures.
[0153] FIG. 11 shows a cross-sectional structure of a non-volatile
semiconductor memory device according to the second embodiment of
the present invention. In FIG. 11, the same members as those of the
non-volatile semiconductor memory device of FIG. 1 are denoted with
the same reference numerals and characters, and description thereof
is omitted.
[0154] As shown in FIG. 11, in the non-volatile semiconductor
memory device of the second embodiment, the storage element in the
storage circuit region Rmem is formed as a so-called MNOS (Metal
Nitride Oxide Semiconductor) type storage element for storing
charges in a laminated film of an oxide film and a nitride
film.
[0155] An element isolation insulating film 12 is selectively
formed in the upper portion of a semiconductor substrate 11 in
order to define a storage circuit region Rmem, a logic circuit
region Rlogic and a capacitor region Rcap.
[0156] In the storage circuit region Rmem, a charge storage film
73A is formed on the semiconductor substrate 11. The charge storage
film 73A is a lamination of a silicon oxide film 71 and a silicon
oxynitride film 72. The silicon oxynitride film 72 is formed by
nitriding the upper portion of the silicon oxide film 71. A first
gate electrode 74A is formed on the charge storage film 73A. The
first gate electrode 74A is formed from polysilicon.
[0157] A sidewall 20 is formed on both sides of the first gate
electrode 74A. A source/drain region 21 is formed in the surface
region of the semiconductor substrate 11 so as to extend from a
position inside the sidewall 20 to a position outside the sidewall
20.
[0158] In the logic circuit region Rlogic, a second gate electrode
74B is formed on the semiconductor substrate 11 with a gate
insulating film 73B interposed therebetween. The gate insulating
film 73B is formed from the silicon oxide film 71 and the silicon
oxynitride film 72. The second gate electrode 74B is formed from
polysilicon. A sidewall 20 is formed on both sides of the second
gate electrode 74B. A source/drain region 21 is formed in the
surface region of the semiconductor substrate 11 so as to extend
from a position inside the sidewall 20 to a position outside the
sidewall 20.
[0159] In the capacitor region Rcap, a lower electrode 75 is formed
in the semiconductor substrate 11. More specifically, in the
capacitor region Rcap, concavities 11a having a depth of about 200
nm are formed in a square region of about 200 .mu.m.times.about 200
.mu.m in the upper portion of the semiconductor substrate 11. The
lower electrode 75 is formed by implanting high concentration
impurities into the bottom and side surfaces of the concavities
11a. An upper electrode 74C is formed on the lower electrode 75
with a capacitor capacitance insulating film 73C interposed
therebetween. The capacitor capacitance insulating film 73C is
formed from the silicon oxide film 71 and the silicon oxynitride
film 72. The upper electrode 74C is formed from polysilicon.
[0160] The lower electrode 75 of the second embodiment has an
increased surface area by shaping the upper portion of the
semiconductor substrate 11.
[0161] More specifically, if circular concavities 11a are formed in
the semiconductor substrate 11 in the capacitor region Rcap, the
resultant lower electrode has the same shape as that of FIG. 3A. If
grid-like concavities 11a are formed in the semiconductor substrate
11 in the capacitor region Rcap, the resultant lower electrode has
the same shape as that of FIG. 3B. If stripe-shaped concavities 11a
are formed in the semiconductor substrate 11 in the capacitor
region Rcap, the resultant lower electrode has the same shape as
that of FIG. 3C. This enables the capacitance of the capacitor to
be increased without increasing the area of the capacitor. As a
result, a capacitor which enables reduction in voltage of a
non-volatile semiconductor memory device without impeding reduction
in size of the non-volatile semiconductor memory device can be
obtained.
[0162] In the non-volatile semiconductor memory device of the
second embodiment, the charge storage film 73A in the storage
circuit region Rmem, the gate insulating film 73B in the logic
circuit region Rlogic and the capacitor capacitance insulating film
73C in the capacitor region Rcap are preferably formed from an
insulating film which is formed in the same step. Moreover, the
first gate electrode 74A in the storage circuit region Rmem, the
second gate electrode 74B in the logic circuit region Rlogic and
the upper electrode 74C in the capacitor region Rcap are preferably
formed from a conductive film which is formed in the same step.
This enables the step of forming the storage element and the step
of forming the capacitor to be partially conducted in the same
process. It should be appreciated that the charge storage film 73A,
the gate insulating film 73B and the capacitor capacitance
insulating film 73C may alternatively be formed from insulating
films which are formed in separate steps, respectively, and the
first gate electrode 74A, the second gate electrode 74B and the
upper electrode 74C may alternatively be formed from conductive
films which are formed in separate steps, respectively.
[0163] The non-volatile semiconductor memory device of the second
embodiment uses the semiconductor substrate 11 for the lower
electrode 75. This eliminates the need for a conductive film for
forming the lower electrode, and enables a capacitor having a great
capacitance to be obtained by increasing the depth of the
concavities 11a.
[0164] Hereinafter, a method for manufacturing the above
non-volatile semiconductor memory device of the second embodiment
will be described with reference to the figures.
[0165] FIGS. 12A and 12B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the second embodiment. In
FIGS. 12A and 12B, the same members as those of FIG. 11 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0166] Like the step of FIG. 5A, an element isolation insulating
film 12 is formed in a semiconductor substrate 11 in order to
define a storage circuit region Rmem, a logic circuit region
Rlogic, and a capacitor region Rcap which are electrically isolated
from each other.
[0167] As shown in FIG. 12A, a resist pattern 76 is then formed by
a photolithography method. The resist pattern 76 masks the storage
circuit region Rmem and the logic circuit region Rlogic and has
openings having a predetermined shape in the capacitor region Rcap.
By using the resist pattern 76 as a mask, the semiconductor
substrate 11 is etched by an anisotropic dry etching method in
order to form concavities 11a in the semiconductor substrate
11.
[0168] By using the resist pattern 76 as a mask, high-concentration
impurities are implanted into the bottom and side surfaces of the
concavities 11a in order to form a lower electrode 75 in the
semiconductor substrate 11 in the capacitor region Rcap.
[0169] If the resist pattern 76 has hole-shaped openings, grid-like
openings or stripe-shaped openings in the capacitor region Rcap,
the resultant lower electrode 75 has a plurality of concavities, a
plurality of convexities or a plurality of stripe-shaped
convexities corresponding to FIG. 3A, 3B or 3C, respectively.
[0170] As shown in FIG. 12B, the resist pattern 76 is then removed,
and a silicon oxide film 71 is deposited on the whole surface of
the semiconductor substrate 11 including the lower electrode 75 by,
e.g., a reduced pressure CVD method. The upper portion of the
silicon oxide film 71 is then nitrided to form a silicon oxynitride
film 72. An ON film 73 is thus formed as a lamination of the
silicon oxide film 71 and the silicon oxynitride film 72. A first
conductive film 74 formed from polysilicon is then deposited on the
ON film 73 by a reduced pressure CVD method. A resist pattern 77 is
then formed on the first conductive film 74 by a photolithography
method. The resist pattern 77 is used to pattern a storage element,
a logic element and a capacitor in the storage circuit region Rmem,
the logic circuit region Rlogic and the capacitor region Rcap,
respectively.
[0171] The first conductive film 74, the silicon oxynitride film 72
and the silicon oxide film 71 are sequentially etched by using the
resist pattern 77 as a mask. As a result, in the storage circuit
region Rmem, the charge storage film 73A is formed from the silicon
oxide film 71 and the silicon oxynitride film 72, and the first
gate electrode 74A is formed from the first conductive film 74. At
the same time, in the logic circuit region Rlogic, the gate
insulating film 73B is formed from the silicon oxide film 71 and
the silicon oxynitride film 72, and the second gate electrode 74B
is formed from the first conductive film 74.
[0172] Moreover, in the capacitor region Rcap, the capacitor
capacitance insulating film 73C is formed from the silicon oxide
film 71 and the silicon oxynitride film 72, and the upper electrode
74C is formed from the first conductive film 74.
[0173] Like the step of FIG. 8, an insulating film for forming a
sidewall is then formed. This insulating film is then subjected to
an anisotropic dry etching method in order to form a sidewall 20 on
the side surfaces of the storage element, the logic element and the
capacitor in a self-aligned manner. Impurities are then introduced
into the semiconductor substrate 11 by using the sidewalls 20 as a
mask. As a result, source/drain regions 21 are formed in the
semiconductor substrate 11. The non-volatile semiconductor memory
device of the second embodiment in FIG. 11 is thus completed.
[0174] In the manufacturing method of the non-volatile
semiconductor memory device of the second embodiment, the first
gate electrode 74A of the storage element, the second gate
electrode 74B of the logic element, and the upper electrode 74C of
the capacitor are formed from a conductive film which is deposited
in the same step. Moreover, the charge storage film 73A of the
storage element, the gate insulating film 73B of the logic element,
and the capacitor capacitance insulating film 73C are formed from
an insulating film which is deposited in the same step. This
enables a capacitor having a great capacitance to be formed without
increasing the manufacturing costs.
Third Embodiment
[0175] Hereinafter, the third embodiment of the present invention
will be described with reference to the figures.
[0176] FIG. 13 shows a cross-sectional structure of a non-volatile
semiconductor memory device according to the third embodiment of
the present invention. In FIG. 13, the same members as those of the
non-volatile semiconductor memory device of FIG. 11 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0177] As shown in FIG. 13, in the non-volatile semiconductor
memory device of the third embodiment, the storage element in the
storage circuit region Rmem is formed as an MNOS-type storage
element. The non-volatile semiconductor memory device of the third
embodiment is different from that of the second embodiment in the
structure of the insulating film for storing charges.
[0178] In the storage circuit region Rmem, a charge storage film
73A is formed on a semiconductor substrate 11. The charge storage
film 73A is a lamination of a silicon oxide film 71 and a silicon
nitride film 78. A first gate electrode 74A is formed on the charge
storage film 73A. The first gate electrode 74A is formed from
polysilicon.
[0179] A sidewall 20 is formed on both sides of the first gate
electrode 74A. A source/drain region 21 is formed in the surface
region of the semiconductor substrate 11 so as to extend from a
position inside the sidewall 20 to a position outside the sidewall
20.
[0180] In the logic circuit region Rlogic, a second gate electrode
74B is formed on the semiconductor substrate 11 with a gate
insulating film 73B interposed therebetween. The gate insulating
film 73B is formed from the silicon oxide film 71 and the silicon
nitride film 78. The second gate electrode 74B is formed from
polysilicon. A sidewall 20 is formed on both sides of the second
gate electrode 74B. A source/drain region 21 is formed in the
surface region of the semiconductor substrate 11 so as to extend
from a position inside the sidewall 20 to a position outside the
sidewall 20.
[0181] In the capacitor region Rcap, a lower electrode 75 is formed
in the semiconductor substrate 11. More specifically, in the
capacitor region Rcap, concavities 11a having a depth of about 200
nm are formed in a square region of about 200 .mu.m.times.about 200
.mu.m in the upper portion of the semiconductor substrate 11. The
lower electrode 75 is formed by implanting high concentration
impurities into the bottom and side surfaces of the concavities
11a. An upper electrode 74C is formed on the lower electrode 75
with a capacitor capacitance insulating film 73C interposed
therebetween. The capacitor capacitance insulating film 73C is
formed from the silicon oxide film 71 and the silicon nitride film
78. The upper electrode 74C is formed from polysilicon.
[0182] Note that the lower electrode 75 of the third embodiment
also has an increased surface area by implementing the shape of
FIG. 3A, 3B or 3C.
[0183] In the non-volatile semiconductor memory device of the third
embodiment, the charge storage film 73A in the storage circuit
region Rmem, the gate insulating film 73B in the logic circuit
region Rlogic and the capacitor capacitance insulating film 73C in
the capacitor region Rcap are preferably formed from an insulating
film which is formed in the same step. Moreover, the first gate
electrode 74A in the storage circuit region Rmem, the second gate
electrode 74B in the logic circuit region Rlogic and the upper
electrode 74C in the capacitor region Rcap are preferably formed
from a conductive film which is formed in the same step. This
enables the step of forming the storage element and the step of
forming the capacitor to be partially conducted in the same
process. It should be appreciated that the charge storage film 73A,
the gate insulating film 73B and the capacitor capacitance
insulating film 73C may alternatively be formed from insulating
films which are formed in separate steps, respectively, and the
first gate electrode 74A, the second gate electrode 74B and the
upper electrode 74C may alternatively be formed from conductive
films which are formed in separate steps, respectively.
[0184] The non-volatile semiconductor memory device of the third
embodiment uses the semiconductor substrate 11 for the lower
electrode 75. This eliminates the need for a conductive film for
forming the lower electrode, and enables a capacitor having a great
capacitance to be obtained by increasing the depth of the
concavities 11a.
[0185] Moreover, in the non-volatile semiconductor memory device of
the third embodiment, the capacitor capacitance insulating film 73C
is a lamination of the silicon oxide film 71 and the silicon
nitride film 78. Therefore, the shape of the semiconductor
substrate 11 is less likely to be varied as compared to the case
where the silicon oxynitride film 72 is used. This enables
improvement in reliability of the capacitor capacitance insulating
film 73C.
[0186] Hereinafter, a method for manufacturing the above
non-volatile semiconductor memory device of the third embodiment
will be described with reference to the figures.
[0187] FIGS. 14A and 14B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the third embodiment. In
FIGS. 14A and 14B, the same members as those of FIG. 13 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0188] Like the step of FIG. 5A, an element isolation insulating
film 12 is formed in a semiconductor substrate 11 in order to
define a storage circuit region Rmem, a logic circuit region
Rlogic, and a capacitor region Rcap which are electrically isolated
from each other.
[0189] As shown in FIG. 14A, a resist pattern 76 is then formed by
a photolithography method. The resist pattern 76 masks the storage
circuit region Rmem and the logic circuit region Rlogic and has
openings having a predetermined shape in the capacitor region Rcap.
By using the resist pattern 76 as a mask, the semiconductor
substrate 11 is etched by an anisotropic dry etching method in
order to form concavities 11a in the semiconductor substrate
11.
[0190] By using the resist pattern 76 as a mask, high-concentration
impurities are implanted into the bottom and side surfaces of the
concavities 11a in order to form a lower electrode 75 in the
semiconductor substrate 11 in the capacitor region Rcap.
[0191] If the resist pattern 76 has hole-shaped openings, grid-like
openings or stripe-shaped openings in the capacitor region Rcap,
the resultant lower electrode 75 has a plurality of concavities, a
plurality of convexities or a plurality of stripe-shaped
convexities corresponding to FIG. 3A, 3B or 3C, respectively.
[0192] As shown in FIG. 14B, the resist pattern 76 is then removed,
and a silicon oxide film 71 is deposited on the whole surface of
the semiconductor substrate 11 including the lower electrode 75 by,
e.g., a reduced pressure CVD method. A silicon nitride film 78 and
a first conductive film 74 are then sequentially deposited on the
silicon oxide film 71 by, e.g., a reduced pressure CVD method. An
ON film 73 is thus formed as a lamination of the silicon oxide film
71 and the silicon nitride film 78. A resist pattern 77 is then
formed on the first conductive film 74 by a photolithography
method. The resist pattern 77 is used to pattern a storage element,
a logic element and a capacitor in the storage circuit region Rmem,
the logic circuit region Rlogic and the capacitor region Rcap,
respectively.
[0193] The first conductive film 74, the silicon nitride film 78
and the silicon oxide film 71 are sequentially etched by using the
resist pattern 77 as a mask. As a result, in the storage circuit
region Rmem, the charge storage film 73A is formed from the silicon
oxide film 71 and the silicon nitride film 78, and the first gate
electrode 74A is formed from the first conductive film 74. At the
same time, in the logic circuit region Rlogic, the gate insulating
film 73B is formed from the silicon oxide film 71 and the silicon
nitride film 78, and the second gate electrode 74B is formed from
the first conductive film 74. Moreover, in the capacitor region
Rcap, the capacitor capacitance insulating film 73C is formed from
the silicon oxide film 71 and the silicon nitride film 78, and the
upper electrode 74C is formed from the first conductive film
74.
[0194] Like the step of FIG. 8, an insulating film for forming a
sidewall is then formed. This insulating film is then subjected to
an anisotropic dry etching method in order to form a sidewall 20 on
the side surfaces of the storage element, the logic element and the
capacitor in a self-aligned manner. Impurities are then introduced
into the semiconductor substrate 11 by using the sidewalls 20 as a
mask. As a result, source/drain regions 21 are formed in the
semiconductor substrate 11. The non-volatile semiconductor memory
device of the third embodiment in FIG. 13 is thus completed.
Fourth Embodiment
[0195] Hereinafter, the fourth embodiment of the present invention
will be described with reference to the figures.
[0196] FIG. 15 shows a cross-sectional structure of a non-volatile
semiconductor memory device according to the fourth embodiment of
the present invention. In FIG. 15, the same members as those of the
non-volatile semiconductor memory device of FIG. 11 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0197] As shown in FIG. 15, in the non-volatile semiconductor
memory device of the fourth embodiment, the storage element in the
storage circuit region Rmem is formed as an MNOS-type storage
element. The non-volatile semiconductor memory device of the fourth
embodiment is different from that of the second embodiment in the
structure of the insulating film for storing charges.
[0198] In the storage circuit region Rmem, a charge storage film
73A is formed on a semiconductor substrate 11. The charge storage
film 73A is a lamination of a first silicon oxide film 79, a second
silicon oxide film 80 and a silicon nitride film 81. A first gate
electrode 74A is formed on the charge storage film 73A. The first
gate electrode 74A is formed from polysilicon.
[0199] A sidewall 20 is formed on both sides of the first gate
electrode 74A. A source/drain region 21 is formed in the surface
region of the semiconductor substrate 11 so as to extend from a
position inside the sidewall 20 to a position outside the sidewall
20.
[0200] In the logic circuit region Rlogic, a second gate electrode
74B is formed on the semiconductor substrate 11 with the second
silicon oxide film 80 and the silicon nitride film 81 interposed
therebetween. The second gate electrode 74B is formed from
polysilicon. A sidewall 20 is formed on both sides of the second
gate electrode 74B. The second silicon oxide film 80 and the
silicon nitride film 81 in the logic circuit region Rlogic serve as
a gate insulating film of a logic element. A source/drain region 21
is formed in the surface region of the semiconductor substrate 11
so as to extend from a position inside the sidewall 20 to a
position outside the sidewall 20.
[0201] In the capacitor region Rcap, a lower electrode 75 is formed
in the semiconductor substrate 11. More specifically, in the
capacitor region Rcap, concavities 11a having a depth of about 200
nm are formed in a square region of about 200 .mu.m.times.about 200
.mu.m in the upper portion of the semiconductor substrate 11. The
lower electrode 75 is formed by implanting high concentration
impurities into the bottom and side surfaces of the concavities
11a. An upper electrode 74C is formed on the lower electrode 75
with a capacitor capacitance insulating film 73C interposed
therebetween. The capacitor capacitance insulating film 73C is
formed from the first silicon oxide film 79, the second silicon
oxide film 80 and the silicon nitride film 81. The upper electrode
74C is formed from polysilicon.
[0202] Note that the lower electrode 75 of the fourth embodiment
also has an increased surface area by implementing the shape of
FIG. 3A, 3B or 3C.
[0203] In the non-volatile semiconductor memory device of the
fourth embodiment, the charge storage film 73A in the storage
circuit region Rmem and the capacitor capacitance insulating film
73C in the capacitor region Rcap are preferably formed from an
insulating film which is formed in the same step. Moreover, the
first gate electrode 74A in the storage circuit region Rmem, the
second gate electrode 74B in the logic circuit region Rlogic and
the upper electrode 74C in the capacitor region Rcap are preferably
formed from a conductive film which is formed in the same step.
This enables the step of forming the storage element and the step
of forming the capacitor to be partially conducted in the same
process. It should be appreciated that the charge storage film 73A
and the capacitor capacitance insulating film 73C may alternatively
be formed from insulating films which are formed in separate steps,
respectively, and the first gate electrode 74A, the second gate
electrode 74B and the upper electrode 74C may alternatively be
formed from conductive films which are formed in separate steps,
respectively.
[0204] The non-volatile semiconductor memory device of the fourth
embodiment uses the semiconductor substrate 11 for the lower
electrode 75. This eliminates the need for a conductive film for
forming the lower electrode, and enables a capacitor having a great
capacitance to be obtained by increasing the depth of the
concavities 11a.
[0205] Moreover, in the non-volatile semiconductor memory device of
the fourth embodiment, each of the charge storage film 73A and the
capacitor capacitance insulating film 73C is a lamination of the
first silicon oxide film 79, the second silicon oxide film 80 and
the silicon nitride film 81. This enables improvement in
reliability of the charge storage film 73A and the capacitor
capacitance insulating film 73C. Moreover, the second silicon oxide
film 80 and the silicon nitride film 81 are used as a gate
insulating film of the logic element. This enables reduction in
film thickness without reducing reliability, as compared to the
case where a single-layer silicon oxide film is used as a gate
insulating film of the logic element.
[0206] Hereinafter, a method for manufacturing the above
non-volatile semiconductor memory device of the fourth embodiment
will be described with reference to the figures.
[0207] FIGS. 16A and 16B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the fourth embodiment. In
FIGS. 16A and 16B, the same members as those of FIG. 15 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0208] Like the step of FIG. 5A, an element isolation insulating
film 12 is formed in a semiconductor substrate 11 in order to
define a storage circuit region Rmem, a logic circuit region
Rlogic, and a capacitor region Rcap which are electrically isolated
from each other.
[0209] Like the step of FIG. 14A, concavities 11a are formed in the
semiconductor substrate 11. High-concentration impurities are then
implanted into the bottom and side surfaces of the concavities 11a
in order to form a lower electrode 75 in the semiconductor
substrate 11 in the capacitor region Rcap.
[0210] As shown in FIG. 16A, a first silicon oxide film 79 is
deposited on the whole surface of the semiconductor substrate 11
including the lower electrode 75 by, e.g., a reduced pressure CVD
method. A resist pattern 82 is then formed by a photolithography
method. The resist pattern 82 masks the storage circuit region Rmem
and the capacitor region Rcap and exposes the logic circuit region
Rlogic. By using the resist pattern 82 as a mask, the exposed
portion of the first silicon oxide film 79, i.e., the first silicon
oxide film 79 in the logic circuit region Rlogic, is etched away by
a wet etching method.
[0211] As shown in FIG. 16B, the resist pattern 82 is then removed.
Thereafter, a second silicon oxide film 80, a silicon nitride film
81 and a first conductive film 74 are sequentially deposited on the
exposed surface of semiconductor substrate 11 in the logic circuit
region Rlogic and the whole surface of the first silicon oxide film
79 by a reduced pressure CVD method. An ON film 73 is thus formed
in the storage circuit region Rmem and the capacitor region Rcap as
a lamination of the first silicon oxide film 79, the second silicon
oxide film 80 and the silicon nitride film 81. A resist pattern 77
is then formed on the first conductive film 74 by a
photolithography method. The resist pattern 77 is used to pattern a
storage element, a logic element and a capacitor in the storage
circuit region Rmem, the logic circuit region Rlogic and the
capacitor region Rcap, respectively.
[0212] The first conductive film 74, the silicon nitride film 81,
the second silicon oxide film 80 and the first silicon oxide film
79 are sequentially etched by using the resist pattern 77 as a
mask. As a result, in the storage circuit region Rmem, the charge
storage film 73A is formed from the first silicon oxide film 79,
the second silicon oxide film 80 and the silicon nitride film 81,
and the first gate electrode 74A is formed from the first
conductive film 74. At the same time, in the logic circuit region
Rlogic, the gate insulating film is formed from the second silicon
oxide film 80 and the silicon nitride film 81, and the second gate
electrode 74B is formed from the first conductive film 74.
Moreover, in the capacitor region Rcap, the capacitor capacitance
insulating film 73C is formed from the first silicon oxide film 79,
the second silicon oxide film 80 and the silicon nitride film 81,
and the upper electrode 74C is formed from the first conductive
film 74.
[0213] Like the step of FIG. 8, an insulating film for forming a
sidewall is then formed. This insulating film is then subjected to
an anisotropic dry etching method in order to form a sidewall 20 on
the side surfaces of the storage element, the logic element and the
capacitor in a self-aligned manner. Impurities are then introduced
into the semiconductor substrate 11 by using the sidewalls 20 as a
mask. As a result, source/drain regions 21 are formed in the
semiconductor substrate 11. The non-volatile semiconductor memory
device of the fourth embodiment in FIG. 15 is thus completed.
Fifth Embodiment
[0214] Hereinafter, the fifth embodiment of the present invention
will be described with reference to the figures.
[0215] FIG. 17 shows a cross-sectional structure of a non-volatile
semiconductor memory device according to the fifth embodiment of
the present invention. In FIG. 17, the same members as those of the
non-volatile semiconductor memory device of FIG. 15 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0216] As shown in FIG. 17, in the non-volatile semiconductor
memory device of the fifth embodiment, the storage element in the
storage circuit region Rmem is formed as a so-called MONOS (Metal
Oxide Nitride Oxide Semiconductor) type storage element for storing
charges in a laminated film of an oxide film, a nitride film and an
oxide film.
[0217] In the storage circuit region Rmem, a charge storage film
86A is formed on a semiconductor substrate 11. The charge storage
film 86A is a lamination of a first silicon oxide film 83, a
silicon nitride film 84 and a second silicon oxide film 85. A first
gate electrode 74A is formed on the charge storage film 86A. The
first gate electrode 74A is formed from polysilicon.
[0218] A sidewall 20 is formed on both sides of the first gate
electrode 74A. A source/drain region 21 is formed in the surface
region of the semiconductor substrate 11 so as to extend from a
position inside the sidewall 20 to a position outside the sidewall
20.
[0219] In the logic circuit region Rlogic, a second gate electrode
74B is formed on the semiconductor substrate 11 with the second
silicon oxide film 85 interposed therebetween. The second gate
electrode 74B is formed from polysilicon. A sidewall 20 is formed
on both sides of the second gate electrode 74B. The second silicon
oxide film 85 in the logic circuit region Rlogic serves as a gate
insulating film of a logic element. A source/drain region 21 is
formed in the surface region of the semiconductor substrate 11 so
as to extend from a position inside the sidewall 20 to a position
outside the sidewall 20.
[0220] In the capacitor region Rcap, a lower electrode 75 is formed
in the semiconductor substrate 11. More specifically, in the
capacitor region Rcap, concavities 11a having a depth of about 200
nm are formed in a square region of about 200 .mu.m.times.about 200
.mu.m in the upper portion of the semiconductor substrate 11. The
lower electrode 75 is formed by implanting high concentration
impurities into the bottom and side surfaces of the concavities
11a. An upper electrode 74C is formed on the lower electrode 75
with a capacitor capacitance insulating film 86B interposed
therebetween. The capacitor capacitance insulating film 86B is
formed from the first silicon oxide film 83, the silicon nitride
film 84 and the second silicon oxide film 85. The upper electrode
74C is formed from polysilicon.
[0221] Note that the lower electrode 75 of the fifth embodiment
also has an increased surface area by implementing the shape of
FIG. 3A, 3B or 3C.
[0222] In the non-volatile semiconductor memory device of the fifth
embodiment, the charge storage film 86A in the storage circuit
region Rmem and the capacitor capacitance insulating film 86B in
the capacitor region Rcap are preferably formed from an insulating
film which is formed in the same step. Moreover, the first gate
electrode 74A in the storage circuit region Rmem, the second gate
electrode 74B in the logic circuit region Rlogic and the upper
electrode 74C in the capacitor region Rcap are preferably formed
from a conductive film which is formed in the same step. This
enables the step of forming the storage element and the step of
forming the capacitor to be partially conducted in the same
process.
[0223] The non-volatile semiconductor memory device of the fifth
embodiment uses the semiconductor substrate 11 for the lower
electrode 75. This eliminates the need for a conductive film for
forming the lower electrode, and enables a capacitor having a great
capacitance to be obtained by increasing the depth of the
concavities 11a.
[0224] Moreover, in the non-volatile semiconductor memory device of
the fifth embodiment, each of the charge storage film 86A and the
capacitor capacitance insulating film 86B is a lamination (ONO
film) of the first silicon oxide film 83, the silicon nitride film
84 and the second silicon oxide film 85. This enables improvement
in reliability of the charge storage film 86A and the capacitor
capacitance insulating film 86B over the structure using an ON
film.
[0225] Hereinafter, a method for manufacturing the above
non-volatile semiconductor memory device of the fifth embodiment
will be described with reference to the figures.
[0226] FIGS. 18A and 18B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the fifth embodiment. In
FIGS. 18A and 18B, the same members as those of FIG. 17 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0227] Like the step of FIG. 5A, an element isolation insulating
film 12 is formed in a semiconductor substrate 11 in order to
define a storage circuit region Rmem, a logic circuit region
Rlogic, and a capacitor region Rcap which are electrically isolated
from each other.
[0228] Like the step of FIG. 14A, concavities 11a are formed in the
semiconductor substrate 11. High-concentration impurities are then
implanted into the bottom and side surfaces of the concavities 11a
in order to form a lower electrode 75 in the semiconductor
substrate 11 in the capacitor region Rcap.
[0229] As shown in FIG. 18A, a first silicon oxide film 83 and a
silicon nitride film 84 are sequentially deposited on the whole
surface of the semiconductor substrate 11 including the lower
electrode 75 by, e.g., a reduced pressure CVD method. A resist
pattern 82 is then formed by a photolithography method. The resist
pattern 82 masks the storage circuit region Rmem and the capacitor
region Rcap and exposes the logic circuit region Rlogic. By using
the resist pattern 82 as a mask, the silicon nitride film 84 and
the first silicon oxide film 83 in the logic circuit region Rlogic
are sequentially etched away.
[0230] As shown in FIG. 18B, the resist pattern 82 is then removed.
Thereafter, a second silicon oxide film 85 and a first conductive
film 74 are sequentially deposited on the exposed surface of the
semiconductor substrate 11 in the logic circuit region Rlogic and
the whole surface of the silicon nitride film 84 by a reduced
pressure CVD method. An ONO film 86 is thus formed in the storage
circuit region Rmem and the capacitor region Rcap as a lamination
of the first silicon oxide film 83, the silicon nitride film 84 and
the second silicon oxide film 85. A resist pattern 77 is then
formed on the first conductive film 74 by a photolithography
method. The resist pattern 77 is used to pattern a storage element,
a logic element and a capacitor in the storage circuit region Rmem,
the logic circuit region Rlogic and the capacitor region Rcap,
respectively.
[0231] The first conductive film 74, the second silicon oxide film
85, the silicon nitride film 84, and the first silicon oxide film
83 are sequentially etched by using the resist pattern 77 as a
mask. As a result, in the storage circuit region Rmem, the charge
storage film 86A is formed from the ONO film 86, and the first gate
electrode 74A is formed from the first conductive film 74. At the
same time, in the logic circuit region Rlogic, the gate insulating
film is formed from the second silicon oxide film 85, and the
second gate electrode 74B is formed from the first conductive film
74. Moreover, in the capacitor region Rcap, the capacitor
capacitance insulating film 86B is formed from the ONO film 86, and
the upper electrode 74C is formed from the first conductive film
74.
[0232] Like the step of FIG. 8, an insulating film for forming a
sidewall is then formed. This insulating film is then subjected to
an anisotropic dry etching method in order to form a sidewall 20 on
the side surfaces of the storage element, the logic element and the
capacitor in a self-aligned manner. Impurities are then introduced
into the semiconductor substrate 11 by using the sidewalls 20 as a
mask. As a result, source/drain regions 21 are formed in the
semiconductor substrate 11. The non-volatile semiconductor memory
device of the fifth embodiment in FIG. 17 is thus completed.
Sixth Embodiment
[0233] Hereinafter, the sixth embodiment of the present invention
will be described with reference to the figures.
[0234] FIG. 19 shows a cross-sectional structure of a non-volatile
semiconductor memory device according to the sixth embodiment of
the present invention. In FIG. 19, the same members as those of the
non-volatile semiconductor memory device of FIG. 11 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0235] As shown in FIG. 19, in the non-volatile semiconductor
memory device of the sixth embodiment, the storage element in the
storage circuit region Rmem is formed as an MNOS-type storage
element. The non-volatile semiconductor memory device of the sixth
embodiment is different from that of the second embodiment in the
structure of the capacitor.
[0236] In the capacitor region Rcap, a lower electrode 88A is
formed on a semiconductor substrate 11 with a first silicon oxide
film 87 interposed therebetween. More specifically, the lower
electrode 88A is formed in a square region of about 200
.mu.m.times.about 200 .mu.m, and is formed from polysilicon. Like
the lower electrodes of FIGS. 2A to 2C and FIGS. 3A to 3C, the
lower electrode 88A is formed by shaping a plate-like conductive
film so as to increase the surface area. An upper electrode 92C is
formed on the lower electrode 88A with a capacitor capacitance
insulating film 91C interposed therebetween. The upper electrode
92C is formed from polysilicon. The capacitor capacitance
insulating film 91C is formed from a second silicon oxide film 89
and a silicon oxynitride film 90. The silicon oxynitride film 90 is
formed by nitriding the upper portion of the second silicon oxide
film 89.
[0237] In the storage circuit region Rmem, a charge storage film
91A is formed on the semiconductor substrate 11. The charge storage
film 91A is a lamination of the second silicon oxide film 89 and
the silicon oxynitride film 90. A first gate electrode 92A is
formed on the charge storage film 91A. The first gate electrode 92A
is formed from polysilicon.
[0238] A sidewall 20 is formed on both sides of the first gate
electrode 92A. A source/drain region 21 is formed in the surface
region of the semiconductor substrate 11 so as to extend from a
position inside the sidewall 20 to a position outside the sidewall
20.
[0239] In the logic circuit region Rlogic, a second gate electrode
92B is formed on the semiconductor substrate 11 with a gate
insulating film 91B interposed therebetween. The gate insulating
film 91B is formed from the second silicon oxide film 89 and the
silicon oxynitride film 90. The second gate electrode 92B is formed
from polysilicon. A sidewall 20 is formed on both sides of the
second gate electrode 92B. A source/drain region 21 is formed in
the surface region of the semiconductor substrate 11 so as to
extend from a position inside the sidewall 20 to a position outside
the sidewall 20.
[0240] In the non-volatile semiconductor memory device of the sixth
embodiment, the charge storage film 91A in the storage circuit
region Rmem, the gate insulating film 91B in the logic circuit
region Rlogic and the capacitor capacitance insulating film 91C in
the capacitor region Rcap are preferably formed from an insulating
film which is formed in the same step. Moreover, the first gate
electrode 92A in the storage circuit region Rmem, the second gate
electrode 92B in the logic circuit region Rlogic and the upper
electrode 92C in the capacitor region Rcap are preferably formed
from a conductive film which is formed in the same step. This
enables the step of forming the storage element and the step of
forming the capacitor to be partially conducted in the same
process. It should be appreciated that the charge storage film 91A,
the gate insulating film 91B and the capacitor capacitance
insulating film 91C may alternatively be formed from insulating
films which are formed in separate steps, respectively, and the
first gate electrode 92A, the second gate electrode 92B and the
upper electrode 92C may alternatively be formed from conductive
films which are formed in separate steps, respectively.
[0241] In the non-volatile semiconductor memory device of the sixth
embodiment, the lower electrode 88A is formed from a conductive
film. Therefore, the lower electrode is less likely to be subjected
to depletion as compared to the case where the semiconductor
substrate 11 is used for the lower electrode. As a result, stable
capacitor characteristics can be obtained.
[0242] Hereinafter, a method for manufacturing the above
non-volatile semiconductor memory device of the sixth embodiment
will be described with reference to the figures.
[0243] FIGS. 20A, 20B and 21 are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the sixth embodiment. In
FIGS. 20A, 20B and 21, the same members as those of FIG. 19 are
denoted with the same reference numerals and characters, and
description thereof is omitted.
[0244] Like the step of FIG. 5A, an element isolation insulating
film 12 is formed in a semiconductor substrate 11 in order to
define a storage circuit region Rmem, a logic circuit region
Rlogic, and a capacitor region Rcap which are electrically isolated
from each other.
[0245] As shown in FIG. 20A, a first silicon oxide film 87 and a
first conductive film 88 are sequentially deposited on the whole
surface of the semiconductor substrate 11 by a reduced pressure CVD
method. The first conductive film 88 is formed from polysilicon. A
resist pattern 93 is then formed on the first conductive film 88 by
a photolithography method. The resist pattern 93 exposes the
storage circuit region Rmem and the logic circuit region Rlogic and
has openings having a predetermined shape in the capacitor region
Rcap.
[0246] As shown in FIG. 20B, an anisotropic dry etching method is
conducted using the resist pattern 93 as a mask, whereby the first
conductive film 88 in the storage circuit region Rmem and the logic
circuit region Rlogic is removed, and the first conductive film 88
in the capacitor region Rcap is patterned into a predetermined
shape to form a lower electrode 88A. Thereafter, the first silicon
oxide film 87 in the storage circuit region Rmem and the logic
circuit region Rlogic and the exposed portion of the first silicon
oxide film 87 in the capacitor region Rcap are removed by a wet
etching method.
[0247] If the resist pattern 93 has hole-shaped openings, grid-like
openings or stripe-shaped openings in the capacitor region Rcap, a
plurality of holes, a plurality of lower electrode portions, or a
plurality of stripe-shaped lower electrodes portions corresponding
to FIG. 2A, 2B or 2C can be formed in the lower electrode 88A. By
adjusting the etching time, a plurality of concavities, a plurality
of convexities or a plurality of stripe-shaped convexities
corresponding to FIG. 3A, 3B or 3B can be formed in the lower
electrode 88A.
[0248] The resist pattern 93 is then removed, and a second silicon
oxide film 89 is deposited on the whole surface of the
semiconductor substrate 11 including the lower electrode 88A by a
reduced pressure CVD method. The upper portion of the second
silicon oxide film 89 is then nitrided to form a silicon oxynitride
film 90. An ON film 91 is thus formed as a lamination of the second
silicon oxide film 89 and the silicon oxynitride film 90.
[0249] As shown in FIG. 21, a second conductive film 92 is
deposited on the silicon oxynitride film 90 by a reduced pressure
CVD method. A resist pattern 77 is then formed on the second
conductive film 92 by a photolithography method. The resist pattern
77 is used to pattern a storage element, a logic element and a
capacitor in the storage circuit region Rmem, the logic circuit
region Rlogic and the capacitor region Rcap, respectively.
[0250] The second conductive film 92, the silicon oxynitride film
90 and the second silicon oxide film 89 are sequentially etched by
using the resist pattern 77 as a mask. As a result, in the storage
circuit region Rmem, the charge storage film 91A is formed from the
second silicon oxide film 89 and the silicon oxynitride film 90,
and the first gate electrode 92A is formed from the second
conductive film 92. At the same time, in the logic circuit region
Rlogic, the gate insulating film 91B is formed from the second
silicon oxide film 89 and the silicon oxynitride film 90, and the
second gate electrode 92B is formed from the second conductive film
92. Moreover, in the capacitor region Rcap, the capacitor
capacitance insulating film 91C is formed from the second silicon
oxide film 89 and the silicon oxynitride film 90, and the upper
electrode 92C is formed from the second conductive film 92.
[0251] Like the step of FIG. 8, an insulating film for forming a
sidewall is then formed. This insulating film is then subjected to
an anisotropic dry etching method in order to form a sidewall 20 on
the side surfaces of the storage element, the logic element and the
capacitor in a self-aligned manner. Impurities are then introduced
into the semiconductor substrate 11 by using the sidewalls 20 as a
mask. As a result, source/drain regions 21 are formed in the
semiconductor substrate 11. The non-volatile semiconductor memory
device of the sixth embodiment in FIG. 19 is thus completed.
[0252] In the manufacturing method of the non-volatile
semiconductor memory device according to the sixth embodiment, the
first gate electrode 92A of the storage element, the second gate
electrode 92B of the logic element and the upper electrode 92C of
the capacitor are formed from a conductive film which is deposited
in the same step. Moreover, the charge storage film 91A of the
storage element, the gate insulating film 91B of the logic element
and the capacitor capacitance insulating film 91C are formed from
an insulating film which is deposited in the same step. This
enables a capacitor having a great capacitance to be formed without
increasing the manufacturing costs.
Seventh Embodiment
[0253] Hereinafter, the seventh embodiment of the present invention
will be described with reference to the figures.
[0254] FIG. 22 shows a cross-sectional structure of a non-volatile
semiconductor memory device according to the seventh embodiment of
the present invention. In FIG. 22, the same members as those of the
non-volatile semiconductor memory device of FIG. 19 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0255] As shown in FIG. 22, in the non-volatile semiconductor
memory device of the seventh embodiment, the storage element in the
storage circuit region Rmem is formed as an MNOS-type storage
element. The non-volatile semiconductor memory device of the
seventh embodiment is different from that of the third embodiment
in the structure of the capacitor.
[0256] In the capacitor region Rcap, a lower electrode 88A is
formed on a semiconductor substrate 11 with a first silicon oxide
film 87 interposed therebetween. More specifically, the lower
electrode 88A is formed in a square region of about 200
.mu.m.times.about 200 .mu.m, and is formed from polysilicon. Like
the lower electrodes of FIGS. 2A to 2C and FIGS. 3A to 3C, the
lower electrode 88A is formed by shaping a plate-like conductive
film so as to increase the surface area. An upper electrode 92C is
formed on the lower electrode 88A with a capacitor capacitance
insulating film 91C interposed therebetween. The upper electrode
92C is formed from polysilicon. The capacitor capacitance
insulating film 91C is formed from a second silicon oxide film 89
and a silicon nitride film 94.
[0257] In the storage circuit region Rmem, a charge storage film
91A is formed on the semiconductor substrate 11. The charge storage
film 91A is a lamination of the second silicon oxide film 89 and
the silicon nitride film 94. A first gate electrode 92A is formed
on the charge storage film 91A. The first gate electrode 92A is
formed from polysilicon.
[0258] A sidewall 20 is formed on both sides of the first gate
electrode 92A. A source/drain region 21 is formed in the surface
region of the semiconductor substrate 11 so as to extend from a
position inside the sidewall 20 to a position outside the sidewall
20.
[0259] In the logic circuit region Rlogic, a second gate electrode
92B is formed on the semiconductor substrate 11 with a gate
insulating film 91B interposed therebetween. The gate insulating
film 91B is formed from the second silicon oxide film 89 and the
silicon nitride film 94. The second gate electrode 92B is formed
from polysilicon. A sidewall 20 is formed on both sides of the
second gate electrode 92B. A source/drain region 21 is formed in
the surface region of the semiconductor substrate 11 so as to
extend from a position inside the sidewall 20 to a position outside
the sidewall 20.
[0260] In the non-volatile semiconductor memory device of the
seventh embodiment, the charge storage film 91A in the storage
circuit region Rmem, the gate insulating film 91B in the logic
circuit region Rlogic and the capacitor capacitance insulating film
91C in the capacitor region Rcap are preferably formed from an
insulating film which is formed in the same step. Moreover, the
first gate electrode 92A in the storage circuit region Rmem, the
second gate electrode 92B in the logic circuit region Rlogic and
the upper electrode 92C in the capacitor region Rcap are preferably
formed from a conductive film which is formed in the same step.
This enables the step of forming the storage element and the step
of forming the capacitor to be partially conducted in the same
process. It should be appreciated that the charge storage film 91A,
the gate insulating film 91B and the capacitor capacitance
insulating film 91C may alternatively be formed from insulating
films which are formed in separate steps, respectively, and the
first gate electrode 92A, the second gate electrode 92B and the
upper electrode 92C may alternatively be formed from conductive
films which are formed in separate steps, respectively.
[0261] In the non-volatile semiconductor memory device of the
seventh embodiment, the lower electrode 88A is formed from a
conductive film. Therefore, the lower electrode is less likely to
be subjected to depletion as compared to the case where the
semiconductor substrate 11 is used for the lower electrode. As a
result, stable capacitor characteristics can be obtained.
[0262] Moreover, in the non-volatile semiconductor memory device of
the seventh embodiment, the capacitor capacitance insulating film
91C is a lamination of the second silicon oxide film 89 and the
silicon nitride film 94. Therefore, the shape of the lower
electrode 88A is less likely to be varied as compared to the case
where the silicon oxynitride film 90 is used. This enables
improvement in reliability of the capacitor capacitance insulating
film 91C.
[0263] Hereinafter, a method for manufacturing the above
non-volatile semiconductor memory device of the seventh embodiment
will be described with reference to the figures.
[0264] FIGS. 23A and 23B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the seventh embodiment. In
FIGS. 23A and 23B, the same members as those of FIG. 22 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0265] Like the step of FIG. 5A, an element isolation insulating
film 12 is formed in a semiconductor substrate 11 in order to
define a storage circuit region Rmem, a logic circuit region
Rlogic, and a capacitor region Rcap which are electrically isolated
from each other.
[0266] Like the step of FIG. 20A, a first silicon oxide film 87 and
a first conductive film 88 are deposited on the whole surface of
the semiconductor substrate 11.
[0267] As shown in FIG. 23A, the first conductive film 88 is
patterned into a lower electrode 88A, and a second silicon oxide
film 89 and a silicon nitride film 94 are then sequentially
deposited on the whole surface of the semiconductor substrate 11
including the lower electrode 88A by a reduced pressure CVD method.
As a result, an ON film 91 is formed as a lamination of the second
silicon oxide film 89 and the silicon nitride film 94.
[0268] As shown in FIG. 23B, a second conductive film 92 is
deposited on the silicon nitride film 94 by a reduced pressure CVD
method. A resist pattern 77 is then formed on the second conductive
film 92 by a photolithography method. The resist pattern 77 is used
to pattern a storage element, a logic element and a capacitor in
the storage circuit region Rmem, the logic circuit region Rlogic
and the capacitor region Rcap, respectively.
[0269] The second conductive film 92, the silicon nitride film 94
and the second silicon oxide film 89 are sequentially etched by
using the resist pattern 77 as a mask. As a result, in the storage
circuit region Rmem, the charge storage film 91A is formed from the
second silicon oxide film 89 and the silicon nitride film 94, and
the first gate electrode 92A is formed from the second conductive
film 92. At the same time, in the logic circuit region Rlogic, the
gate insulating film 91B is formed from the second silicon oxide
film 89 and the silicon nitride film 94, and the second gate
electrode 92B is formed from the second conductive film 92.
Moreover, in the capacitor region Rcap, the capacitor capacitance
insulating film 91C is formed from the second silicon oxide film 89
and the silicon nitride film 94, and the upper electrode 92C is
formed from the second conductive film 92.
[0270] Like the step of FIG. 8, an insulating film for forming a
sidewall is then formed. This insulating film is then subjected to
an anisotropic dry etching method in order to form a sidewall 20 on
the side surfaces of the storage element, the logic element and the
capacitor in a self-aligned manner. Impurities are then introduced
into the semiconductor substrate 11 by using the sidewalls 20 as a
mask. As a result, source/drain regions 21 are formed in the
semiconductor substrate 11. The non-volatile semiconductor memory
device of the seventh embodiment in FIG. 22 is thus completed.
Eighth Embodiment
[0271] Hereinafter, the eighth embodiment of the present invention
will be described with reference to the figures.
[0272] FIG. 24 shows a cross-sectional structure of a non-volatile
semiconductor memory device according to the eighth embodiment of
the present invention. In FIG. 24, the same members as those of the
non-volatile semiconductor memory device of FIG. 19 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0273] As shown in FIG. 24, in the non-volatile semiconductor
memory device of the eighth embodiment, the storage element in the
storage circuit region Rmem is formed as an MNOS-type storage
element. The non-volatile semiconductor memory device of the eighth
embodiment is different from that of the fourth embodiment in the
structure of the capacitor.
[0274] In the capacitor region Rcap, a lower electrode 88A is
formed on a semiconductor substrate 11 with a first silicon oxide
film 87 interposed therebetween. More specifically, the lower
electrode 88A is formed in a square region of about 200
.mu.m.times.about 200 .mu.m, and is formed from polysilicon. Like
the lower electrodes of FIGS. 2A to 2C and FIGS. 3A to 3C, the
lower electrode 88A is formed by shaping a plate-like conductive
film so as to increase the surface area. An upper electrode 92C is
formed on the lower electrode 88A with a capacitor capacitance
insulating film 91C interposed therebetween. The upper electrode
92C is formed from polysilicon. The capacitor capacitance
insulating film 91C is formed from a second silicon oxide film 89,
a third silicon oxide film 96 and a silicon nitride film 97.
[0275] In the storage circuit region Rmem, a charge storage film
91A is formed on the semiconductor substrate 11. The charge storage
film 91A is a lamination of the second silicon oxide film 89, the
third silicon oxide film 96 and the silicon nitride film 97. A
first gate electrode 92A is formed on the charge storage film 91A.
The first gate electrode 92A is formed from polysilicon.
[0276] A sidewall 20 is formed on both sides of the first gate
electrode 92A. A source/drain region 21 is formed in the surface
region of the semiconductor substrate 11 so as to extend from a
position inside the sidewall 20 to a position outside the sidewall
20.
[0277] In the logic circuit region Rlogic, a second gate electrode
92B is formed on the semiconductor substrate 11 with the third
silicon oxide film 96 and the silicon nitride film 97 interposed
therebetween. The second gate electrode 92B is formed from
polysilicon. The third silicon oxide film 96 and the silicon
nitride film 97 in the logic circuit region Rlogic serve as a gate
insulating film of a logic element. A sidewall 20 is formed on both
sides of the second gate electrode 92B. A source/drain region 21 is
formed in the surface region of the semiconductor substrate 11 so
as to extend from a position inside the sidewall 20 to a position
outside the sidewall 20.
[0278] In the non-volatile semiconductor memory device of the
eighth embodiment, the charge storage film 91A in the storage
circuit region Rmem and the capacitor capacitance insulating film
91C in the capacitor region Rcap are preferably formed from an
insulating film which is formed in the same step. Moreover, the
first gate electrode 92A in the storage circuit region Rmem, the
second gate electrode 92B in the logic circuit region Rlogic and
the upper electrode 92C in the capacitor region Rcap are preferably
formed from a conductive film which is formed in the same step.
This enables the step of forming the storage element and the step
of forming the capacitor to be partially conducted in the same
process. It should be appreciated that the charge storage film 91A
and the capacitor capacitance insulating film 91C may alternatively
be formed from insulating films which are formed in separate steps,
respectively, and the first gate electrode 92A, the second gate
electrode 92B and the upper electrode 92C may alternatively be
formed from conductive films which are formed in separate steps,
respectively.
[0279] In the non-volatile semiconductor memory device of the
eighth embodiment, the lower electrode 88A is formed from a
conductive film. Therefore, the lower electrode is less likely to
be subjected to depletion as compared to the case where the
semiconductor substrate 11 is used for the lower electrode. As a
result, stable capacitor characteristics can be obtained.
[0280] Moreover, in the non-volatile semiconductor memory device of
the eighth embodiment, each of the charge storage film 91A and the
capacitor capacitance insulating film 91C is a lamination of the
second silicon oxide film 95, the third silicon oxide film 96 and
the silicon nitride film 97. This enables improvement in
reliability of the charge storage film 91A and the capacitor
capacitance insulating film 91C. Moreover, the third silicon oxide
film 96 and the silicon nitride film 97 are used as a gate
insulating film of the logic element. This enables reduction in
film thickness without reducing reliability, as compared to the
case where a single-layer silicon oxide film is used as a gate
insulating film of the logic element.
[0281] Hereinafter, a method for manufacturing the above
non-volatile semiconductor memory device of the eighth embodiment
will be described with reference to the figures.
[0282] FIGS. 25A and 25B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the eighth embodiment. In
FIGS. 25A and 25B, the same members as those of FIG. 24 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0283] Like the step of FIG. SA, an element isolation insulating
film 12 is formed in a semiconductor substrate 11 in order to
define a storage circuit region Rmem, a logic circuit region
Rlogic, and a capacitor region Rcap which are electrically isolated
from each other.
[0284] Like the step of FIG. 20A, a first silicon oxide film 87 and
a first conductive film 88 are deposited on the whole surface of
the semiconductor substrate 11.
[0285] As shown in FIG. 25A, the first conductive film 88 is
patterned into a lower electrode 88A, and a second silicon oxide
film 95 is then deposited on the whole surface of the semiconductor
substrate 11 including the lower electrode 88A by a reduced
pressure CVD method. Thereafter, a resist pattern 82 is formed by a
photolithography method. The resist pattern 82 masks the storage
circuit region Rmem and the capacitor region Rcap and exposes the
logic circuit region Rlogic. By using the resist pattern 82 as a
mask, the exposed portion of the second silicon oxide film 95,
i.e., the second silicon oxide film 95 in the logic circuit region
Rlogic, is etched away by a wet etching method.
[0286] As shown in FIG. 25B, the resist pattern 82 is then removed.
Thereafter, a third silicon oxide film 96, a silicon nitride film
97 and a second conductive film 92 are sequentially deposited on
the exposed surface of the semiconductor substrate 11 in the logic
circuit region Rlogic and the whole surface of the second silicon
oxide film 95 by a reduced pressure CVD method. An ON film 91 is
thus formed in the storage circuit region Rmem and the capacitor
region Rcap as a lamination of the second silicon oxide film 95,
the third silicon oxide film 96 and the silicon nitride film 97. A
resist pattern 77 is then formed on the second conductive film 92
by a photolithography method. The resist pattern 77 is used to
pattern a storage element, a logic element and a capacitor in the
storage circuit region Rmem, the logic circuit region Rlogic and
the capacitor region Rcap, respectively.
[0287] The second conductive film 92, the silicon nitride film 97,
the third silicon oxide film 96 and the second silicon oxide film
95 are sequentially etched by using the resist pattern 77 as a
mask. As a result, in the storage circuit region Rmem, the charge
storage film 91A is formed from the second silicon oxide film 95,
the third silicon oxide film 96 and the silicon nitride film 97,
and the first gate electrode 92A is formed from the second
conductive film 92. At the same time, in the logic circuit region
Rlogic, the gate insulating film is formed from the third silicon
oxide film 96 and the silicon nitride film 97, and the second gate
electrode 92B is formed from the second conductive film 92.
Moreover, in the capacitor region Rcap, the capacitor capacitance
insulating film 91C is formed from the second silicon oxide film
95, the third silicon oxide film 96 and the silicon nitride film
97, and the upper electrode 92C is formed from the second
conductive film 92.
[0288] Like the step of FIG. 8, an insulating film for forming a
sidewall is then formed. This insulating film is then subjected to
an anisotropic dry etching method in order to form a sidewall 20 on
the side surfaces of the storage element, the logic element and the
capacitor in a self-aligned manner. Impurities are then introduced
into the semiconductor substrate 11 by using the sidewalls 20 as a
mask. As a result, source/drain regions 21 are formed in the
semiconductor substrate 11. The non-volatile semiconductor memory
device of the eighth embodiment in FIG. 24 is thus completed.
Ninth Embodiment
[0289] Hereinafter, the ninth embodiment of the present invention
will be described with reference to the figures.
[0290] FIG. 26 shows a cross-sectional structure of a non-volatile
semiconductor memory device according to the ninth embodiment of
the present invention. In FIG. 26, the same members as those of the
non-volatile semiconductor memory device of FIG. 19 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0291] As shown in FIG. 26, in the non-volatile semiconductor
memory device of the ninth embodiment, the storage element in the
storage circuit region Rmem is formed as an MONOS-type storage
element. The non-volatile semiconductor memory device of the ninth
embodiment is different from that of the fifth embodiment in the
structure of the capacitor.
[0292] In the capacitor region Rcap, a lower electrode 88A is
formed on a semiconductor substrate 11 with a first silicon oxide
film 87 interposed therebetween. More specifically, the lower
electrode 88A is formed in a square region of about 200
.mu.m.times.about 200 .mu.m, and is formed from polysilicon. Like
the lower electrodes of FIGS. 2A to 2C and FIGS. 3A to 3C, the
lower electrode 88A is formed by shaping a plate-like conductive
film so as to increase the surface area. An upper electrode 92C is
formed on the lower electrode 88A with a capacitor capacitance
insulating film 101B interposed therebetween. The upper electrode
92C is formed from polysilicon. The capacitor capacitance
insulating film 101B is formed from a second silicon oxide film 98,
a silicon nitride film 99 and a third silicon oxide film 100.
[0293] In the storage circuit region Rmem, a charge storage film
101A is formed on the semiconductor substrate 11. The charge
storage film 101A is a lamination of the second silicon oxide film
98, the silicon nitride film 99 and the third silicon oxide film
100. A first gate electrode 92A is formed on the charge storage
film 101A. The first gate electrode 92A is formed from
polysilicon.
[0294] A sidewall 20 is formed on both sides of the first gate
electrode 92A. A source/drain region 21 is formed in the surface
region of the semiconductor substrate 11 so as to extend from a
position inside the sidewall 20 to a position outside the sidewall
20.
[0295] In the logic circuit region Rlogic, a second gate electrode
92B is formed on the semiconductor substrate 11 with the third
silicon oxide film 100 interposed therebetween. The second gate
electrode 92B is formed from polysilicon. A sidewall 20 is formed
on both sides of the second gate electrode 92B. The third silicon
oxide film 100 in the logic circuit region Rlogic serves as a gate
insulating film of a logic element. A source/drain region 21 is
formed in the surface region of the semiconductor substrate 11 so
as to extend from a position inside the sidewall 20 to a position
outside the sidewall 20.
[0296] In the non-volatile semiconductor memory device of the ninth
embodiment, the charge storage film 101A in the storage circuit
region Rmem and the capacitor capacitance insulating film 101B in
the capacitor region Rcap are preferably formed from an insulating
film which is formed in the same step. Moreover, the first gate
electrode 92A in the storage circuit region Rmem, the second gate
electrode 92B in the logic circuit region Rlogic and the upper
electrode 92C in the capacitor region Rcap are preferably formed
from a conductive film which is formed in the same step. This
enables the step of forming the storage element and the step of
forming the capacitor to be partially conducted in the same
process. It should be appreciated that the charge storage film 101A
and the capacitor capacitance insulating film 101B may
alternatively be formed from insulating films which are formed in
separate steps, respectively, and the first gate electrode 92A, the
second gate electrode 92B and the upper electrode 92C may
alternatively be formed from conductive films which are formed in
separate steps, respectively.
[0297] In the non-volatile semiconductor memory device of the ninth
embodiment, the lower electrode 88A is formed from a conductive
film. Therefore, the lower electrode is less likely to be subjected
to depletion as compared to the case where the semiconductor
substrate 11 is used for the lower electrode. As a result, stable
capacitor characteristics can be obtained.
[0298] Moreover, in the non-volatile semiconductor memory device of
the ninth embodiment, each of the charge storage film 101A and the
capacitor capacitance insulating film 101B is a lamination (ONO
film) of the second silicon oxide film 98, the silicon nitride film
99 and the third silicon oxide film 100. This enables improvement
in reliability of the charge storage film 101A and the capacitor
capacitance insulating film 101B over the structure using an ON
film.
[0299] Hereinafter, a method for manufacturing the above
non-volatile semiconductor memory device of the ninth embodiment
will be described with reference to the figures.
[0300] FIGS. 27A and 27B are cross-sectional views sequentially
illustrating the steps of a method for manufacturing a non-volatile
semiconductor memory device according to the ninth embodiment. In
FIGS. 27A and 27B, the same members as those of FIG. 26 are denoted
with the same reference numerals and characters, and description
thereof is omitted.
[0301] Like the step of FIG. 5A, an element isolation insulating
film 12 is formed in a semiconductor substrate 11 in order to
define a storage circuit region Rmem, a logic circuit region
Rlogic, and a capacitor region Rcap which are electrically isolated
from each other.
[0302] Like the step of FIG. 20A, a first silicon oxide film 87 and
a first conductive film 88 are deposited on the whole surface of
the semiconductor substrate 11.
[0303] As shown in FIG. 27A, the first conductive film 88 is
patterned into a lower electrode 88A, and a second silicon oxide
film 98 and a silicon nitride film 99 are then sequentially
deposited on the whole surface of the semiconductor substrate 11
including the lower electrode 88A by a reduced pressure CVD method.
Thereafter, a resist pattern 82 is formed by a photolithography
method. The resist pattern 82 masks the storage circuit region Rmem
and the capacitor region Rcap and exposes the logic circuit region
Rlogic. By using the resist pattern 82 as a mask, the silicon
nitride film 99 and the second silicon oxide film 98 in the logic
circuit region Rlogic are sequentially etched away.
[0304] As shown in FIG. 27B, the resist pattern 82 is then removed.
Thereafter, a third silicon oxide film 100 and a second conductive
film 92 are sequentially deposited on the exposed surface of the
semiconductor substrate 11 in the logic circuit region Rlogic and
the whole surface of the silicon nitride film 99 by a reduced
pressure CVD method. An ONO film 101 is thus formed in the storage
circuit region Rmem and the capacitor region Rcap as a lamination
of the second silicon oxide film 98, the silicon nitride film 99
and the third silicon oxide film 100. A resist pattern 77 is then
formed on the second conductive film 92 by a photolithography
method. The resist pattern 77 is used to pattern a storage element,
a logic element and a capacitor in the storage circuit region Rmem,
the logic circuit region Rlogic and the capacitor region Rcap,
respectively.
[0305] The second conductive film 92, the third silicon oxide film
100, the silicon nitride film 99 and the second silicon oxide film
98 are sequentially etched by using the resist pattern 77 as a
mask. As a result, in the storage circuit region Rmem, the charge
storage film 101A is formed from the second silicon oxide film 98,
the silicon nitride film 99 and the third silicon oxide film 100,
and the first gate electrode 92A is formed from the second
conductive film 92. At the same time, in the logic circuit region
Rlogic, the gate insulating film is formed from the third silicon
oxide film 100, and the second gate electrode 92B is formed from
the second conductive film 92. Moreover, in the capacitor region
Rcap, the capacitor capacitance insulating film 101B is formed from
the second silicon oxide film 98, the silicon nitride film 99 and
the third silicon oxide film 100, and the upper electrode 92C is
formed from the second conductive film 92.
[0306] Like the step of FIG. 8, an insulating film for forming a
sidewall is then formed. This insulating film is then subjected to
an anisotropic dry etching method in order to form a sidewall 20 on
the side surfaces of the storage element, the logic element and the
capacitor in a self-aligned manner. Impurities are then introduced
into the semiconductor substrate 11 by using the sidewalls 20 as a
mask. As a result, source/drain regions 21 are formed in the
semiconductor substrate 11. The non-volatile semiconductor memory
device of the ninth embodiment in FIG. 26 is thus completed.
* * * * *