U.S. patent application number 10/265314 was filed with the patent office on 2003-02-13 for three-dimensional structure transfer method and apparatus.
This patent application is currently assigned to Fujitsu, Ltd.. Invention is credited to Betsui, Keiichi, Kifune, Motonari, Tokai, Akira, Toyoda, Osamu.
Application Number | 20030029553 10/265314 |
Document ID | / |
Family ID | 18195587 |
Filed Date | 2003-02-13 |
United States Patent
Application |
20030029553 |
Kind Code |
A1 |
Toyoda, Osamu ; et
al. |
February 13, 2003 |
Three-dimensional structure transfer method and apparatus
Abstract
A method for transferring a three-dimensional structure onto a
substrate, which includes filling a plurality of concaves arranged
on a sheet-form mold with a paste-like structural material,
temporarily fixing the mold to a support member, contact-bonding
the structural material in a state in which the structural material
has the adhesion property or bonding property to the substrate
together with the mold, releasing the temporary fixation of the
mold by the support member after the contact-bonding, and removing
the mold from the substrate, thereby transferring a
three-dimensional structure onto the substrate.
Inventors: |
Toyoda, Osamu; (Kawasaki,
JP) ; Tokai, Akira; (Kawasaki, JP) ; Kifune,
Motonari; (Kawasaki, JP) ; Betsui, Keiichi;
(Kawasaki, JP) |
Correspondence
Address: |
ARMSTRONG,WESTERMAN & HATTORI, LLP
1725 K STREET, NW.
SUITE 1000
WASHINGTON
DC
20006
US
|
Assignee: |
Fujitsu, Ltd.
Kawasaki
JP
|
Family ID: |
18195587 |
Appl. No.: |
10/265314 |
Filed: |
October 7, 2002 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10265314 |
Oct 7, 2002 |
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09660336 |
Sep 12, 2000 |
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6485596 |
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Current U.S.
Class: |
156/230 ;
156/242; 156/500; 156/538; 156/580 |
Current CPC
Class: |
B29C 37/0053 20130101;
H01J 9/242 20130101; H01J 2211/36 20130101; Y10T 156/17 20150115;
H01J 9/241 20130101; Y10T 156/1705 20150115; B29C 31/006 20130101;
B44C 3/025 20130101; B29C 33/424 20130101; B29C 41/02 20130101 |
Class at
Publication: |
156/230 ;
156/242; 156/538; 156/580; 156/500 |
International
Class: |
B32B 031/00 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 17, 1999 |
JP |
HEI 11-327124 |
Claims
What is claimed is:
1. A three-dimensional structure transfer method for transferring a
three-dimensional structure onto a substrate, comprising the steps
of: preparing a paste-like structural material which can exert an
adhesion property or a bonding property after curing or
semi-curing, filling a plurality of concaves arranged on a
sheet-form mold with the paste-like structural material, and curing
or semi-curing the paste-like structural material; temporarily
fixing the mold to a support member; aligning the mold and a
substrate and then contact-bonding the structural material in a
state in which the structural material has the adhesion property or
bonding property to the substrate together with the mold; releasing
the temporary fixation of the mold by the support member after the
contact-bonding; and removing the mold from the substrate, thereby
transferring a three-dimensional structure onto the substrate.
2. The three-dimensional structure transfer method according to
claim 1, wherein the mold is a roll sheet having the concaves
arranged on a continuous sheet wound like a roll.
3. The three-dimensional structure transfer method according to
claim 2, wherein the roll sheet has sprocket holes for delivery
provided on both ends and the support member has pins corresponding
to the sprocket holes, thereby temporarily fixing the mold to a
predetermined position of the support member.
4. The three-dimensional structure transfer method according to
claim 1, wherein the support member is formed of a printing device
in which a screen is provided with tension in a horizontal frame
and a plate having flexibility is supported on the screen.
5. The three-dimensional structure transfer method according to
claim 1, wherein the support member includes a grip mechanism for
temporarily fixing the mold, the grip mechanism comprises an
electromagnetic chuck, a vacuum chuck or an electrostatic chuck
which has a number of divided chuck regions, and the temporary
fixation of the mold is sequentially released by turning off a
switch of a divided chuck region to be released.
6. The three-dimensional structure transfer method according to
claim 1, wherein the support member is constituted by a clamp
mechanism for applying tension to the mold by holding and pulling
both ends of the mold, thereby supporting the mold.
7. The three-dimensional structure transfer method according to
claim 1, wherein the alignment of the mold and the substrate is
carried out by previously providing a plurality of alignment marks
on the mold and the substrate, mounting the substrate on an
alignment table which can be moved and rotated in a horizontal
direction, temporarily fixing the mold to the support member and
then moving and rotating the alignment table in the horizontal
direction such that the alignment marks of the mold and the
substrate are coincident with each other.
8. The three-dimensional structure transfer method according to
claim 1, wherein the contact-bonding of the structural material to
the substrate and the release of the temporary fixation of the mold
are carried out continuously from one end of the mold to another
end at the same time.
9. The three-dimensional structure transfer method according to
claim 1, wherein the contact-bonding of the structural material to
the substrate and the release of the temporary fixation of the mold
are carried out by sticking the whole mold to the substrate and
then releasing the temporary fixation of the mold.
10. A substrate assembly having the three-dimensional structure
formed by a method according to claim 1.
11. A plasma display panel manufactured by using a substrate
assembly according to claim 10.
12. A three-dimensional structure transfer apparatus comprising: a
delivery mechanism for delivering a sheet-form mold having a
plurality of concaves arranged thereon, the concaves being filled
with a structural material having an adhesion property or a bonding
property; a support member for temporarily fixing the mold
delivered by the delivery mechanism; a stage for mounting a
substrate and moving the position of the substrate in parallel with
the support member, thereby aligning the mold with the substrate; a
roll press mechanism for, after aligning the mold with the
substrate, pressing a back face of the mold with a roller, thereby
contact-bonding the structural material in a state in which the
structural material has an adhesion property or a bonding property
to the substrate together with the mold; a release mechanism for
releasing the temporary fixation of the mold after the pressing by
the roll press mechanism; and a removing mechanism for removing the
mold from the substrate.
13. The three-dimensional structure transfer apparatus according to
claim 12, wherein the mold is a roll sheet having intaglios
arranged on a continuous sheet wound like a roll.
14. The three-dimensional structure transfer apparatus according to
claim 13, wherein the roll sheet has sprocket holes for delivery on
both ends, the delivery mechanism has sprockets for roll sheet
delivery, and the support member has pins corresponding to the
sprocket holes for temporarily fixing the mold into a predetermined
position.
15. The three-dimensional structure transfer apparatus according to
claim 12, wherein the support member includes a grip mechanism for
temporarily fixing the mold, the grip mechanism having an
electromagnetic chuck, a vacuum chuck or an electrostatic chuck
which can sequentially release the temporary fixation of the mold
by partially turning off switches of divided chuck regions.
16. The three-dimensional structure transfer apparatus according to
claim 12, wherein the mold and the substrate have alignment marks
for aligning both of them, and the stage has an alignment table for
mounting the substrate and moving and rotating the substrate in a
horizontal direction such that alignment marks of the mold and the
substrate are coincident with each other after the mold is
temporarily fixed to the support member.
Description
CROSS-REFERENCES TO RELATED APPLICATION
[0001] This application is related to Japanese patent application
No. HEI 11-327124 filed on Nov. 17, 1999 whose priority is claimed
under 35 USC .sctn.119, the disclosure of which is incorporated
herein by reference in its entirety.
[0002] 1. Field of the Invention
[0003] The present invention relates to a three-dimensional
structure transfer method and apparatus, and more particularly to a
three-dimensional structure transfer method and apparatus for
manufacturing a substrate having a three-dimensional structure such
as a barrier rib in a display region between a glass substrate on
the front face side and a glass substrate on the back face side as
in a plasma display panel (PDP), for example.
[0004] 2. Description of the Related Art
[0005] As an example of the substrate having a three-dimensional
structure, a PDP substrate having a barrier rib will be described
below. The PDP is a display panel of a self-luminous type in which
a pair of substrates (usually, glass substrates) are opposed to
each other with a very small space and the surroundings are sealed
to form a discharge space therein.
[0006] In general, the PDP has a barrier rib (three-dimensional
structure) having a height of approximately 100 to 200 .mu.m
provided periodically to partition a discharge space. For example,
in a surface discharge type PDP suitable for color display using a
phosphor, a barrier rib which is rectilinear or grid-shaped as seen
in a plane is provided on a substrate having data electrodes
(address electrodes) arranged thereon. The barrier rib prevents the
interference of discharge and the crosstalk of colors.
[0007] A method of fabricating the PDP substrate having the
above-mentioned structure generally comprises a process for forming
data electrode pattern on a glass substrate and forming a barrier
ribs to make alignment with the electrode pattern. Various methods
of forming barrier ribs have been proposed and carried out. Typical
examples of the forming methods include a screen printing method of
repeating screen printing to print laminated barrier ribs, a sand
blasting method of spraying blast particles to carry out cutting,
an embedding method of embedding a barrier rib material in the
concave portion of a photosensitive material layer and removing the
photosensitive material layer, a photolithographic method using a
photosensitive material for barrier ribs and a transfer method of
transferring barrier ribs onto a substrate by using a mother die
for transfer (mold). In particular, attention has been paid to the
transfer method which can be implemented at the lowest cost.
[0008] In the transfer method, a mold provided with trenches or
concaves for forming barrier ribs is used. In the procedure, the
concaves of the mold is filled with a barrier rib material and is
then transferred onto a substrate so that barrier ribs are
formed.
[0009] Various techniques have been proposed for transferring a
barrier rib material in the transfer method. For example, Japanese
Laid-Open Patent Publication No. Hei 9(1997)-134676 has described a
method of filling an intaglio with a barrier rib material and then
transferring the barrier rib material onto a substrate through heat
press. However, in the case in which a heat treatment is to be
carried out, it is necessary to consider expansion of the intaglio,
barrier rib material and a substrate and the like. In particular,
when crossing three-dimensional structure patterns are to be
superposed, a very complicated calculation is required. In order to
eliminate this drawback, it is desirable that transfer should be
carried out at room temperature in principle.
[0010] As a method of removing the mold for the transfer method,
there have been known a planographic transfer and removal (the
whole pattern is transferred and then the mold is removed) method
of carrying out transfer with a planar mold and removing the planar
mold while keeping its nearly planar shape and a curved transfer
(removal is carried out immediately after transfer) method using a
roller for carrying out removal while performing transfer with a
curved mold provided along a roller face.
[0011] Examples of transfer techniques used for the transfer method
which are carried out at a room temperature include an adhesion
transfer technique using an adherent material as described in
Japanese Laid-Open Patent Publication No. Hei 10(1998)-326560. In
the adhesion transfer method, the transfer can be carried out at
room temperature. Therefore, there is an advantage that transfer
can be implemented with high dimensional precision.
[0012] However, in the case in which a barrier rib is to be
transferred by the planographic transfer and removing method using
the above-mentioned technique, it is necessary to maintain a
substrate and a mold in parallel with each other in order to align
electrodes formed on the substrate with barrier ribs to be
transferred and formed. Therefore, the mold should necessarily be
removed vertically from the substrate after the transfer. For this
reason, considerable force is required for the removal of the mold.
If the adhesion strength between a transfer material and the
substrate and the strength of the transfer material itself are not
sufficiently great, a structure to be transferred is broken during
the transfer or the transfer cannot be carried out.
[0013] In the case in which the barrier ribs are to be transferred
by the curved transfer method using the above adhesion transfer
technique, it is necessary to fixedly wind up the mold around a
roller, thereby carrying out the transfer and the removal at the
same time. Therefore, if the adherent strength between the transfer
material and the substrate is not sufficiently greater than that
between the mold and the transfer material, an object to be
transferred is wrinkled or the roller is stopped. This problem
becomes much greater obstruction as an area to be transferred is
increased.
SUMMARY OF THE INVENTION
[0014] In consideration of these circumstances, it is an object of
the present invention to provide a three-dimensional structure
transfer method and apparatus in which a sheet-form mold is
temporarily fixed to a support member and the support member is
utilized to contact-bond a structural material (transfer material)
to the substrate together with the mold and then release the
temporary fixation and peel the sheet-form mold from the substrate
so that transfer can be carried out smoothly with high precision
without a great influence by the adhesion strength and removing
property of the structural material.
[0015] The present invention provides a method for a
three-dimensional structure transfer method for transferring a
three-dimensional structure onto a substrate, comprising the steps
of: preparing a paste-like structural material which can exert an
adhesion property or a bonding property after curing or
semi-curing, filling a plurality of concaves arranged on a
sheet-form mold with the paste-like structural material, and curing
or semi-curing the paste-like structural material; temporarily
fixing the mold to a support member; aligning the mold and a
substrate and then contact-bonding the structural material in a
state in which the structural material has the adhesion property or
bonding property to the substrate together with the mold; releasing
the temporary fixation of the mold by the support member after the
contact-bonding; and removing the mold from the substrate, thereby
transferring a three-dimensional structure onto the substrate.
[0016] In the present invention, after the sheet-form mold filled
or coated with the structural material is temporarily fixed to the
support member, the alignment of the relative positions of the mold
and the substrate is carried out and the structural material is
contact-bonded to the substrate together with the mold, and the
mold is released from the support member through the release of the
temporary fixation and the sheet-form mold is then peeled off the
substrate. Thus, the three-dimensional structure is transferred and
formed on the substrate.
[0017] According to the present invention, the transfer step is
divided into two steps, that is, a contact-bonding (sticking) step
and a removing step. At the removing step, it is possible to carry
out the peeling which requires the least excessive force to be
applied to the removal. Therefore, it is possible to greatly
relieve limitations on the adhesion strength and mechanical
strength of the structural material and the degree of the removing
property of the mold. Thus, the three-dimensional structure can be
transferred and formed with high precision in a large area.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] FIG. 1 is a perspective view showing the structure of a PDP
to be manufactured using a three-dimensional structure transfer
method and apparatus according to the present invention,
[0019] FIGS. 2A to 2D are views sequentially illustrating the steps
of the three-dimensional structure transfer method according to a
first embodiment of the present invention,
[0020] FIGS. 3A to 3C are views sequentially illustrating the steps
of the three-dimensional structure transfer method according to the
first embodiment of the present invention,
[0021] FIG. 4 is a view illustrating a state in which a mold is
supported using a clamp support member according to the present
invention,
[0022] FIGS. 5A to 5C are views illustrating a three-dimensional
structure transfer method according to a second embodiment of the
present invention,
[0023] FIGS. 6A to 6D are views illustrating a three-dimensional
structure transfer method according to a third embodiment of the
present invention,
[0024] FIG. 7 is a view illustrating a general construction of an
example of an apparatus for fabricating the roll sheet of a mold
according to the present invention,
[0025] FIG. 8 is a view illustrating a general construction of
another example of the apparatus for fabricating the roll sheet of
the mold according to the present invention,
[0026] FIG. 9 is a view illustrating a three-dimensional structure
transfer apparatus for implementing the method shown in the first
embodiment of the present invention, and
[0027] FIGS. 10A to 10C are views illustrating the operation of the
three-dimensional structure transfer apparatus shown in FIG. 9.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0028] The three-dimensional structure transfer method and
apparatus according to the present invention can be suitably used
mainly for the manufacture of a PDP.
[0029] In the present invention, the three-dimensional structure
implies a three-dimensional structure having any shape which can be
formed by impression. For example, in the case in which the present
invention is applied to the manufacture of the PDP, a structure
such as barrier ribs is equivalent to the three-dimensional
structure.
[0030] In the sheet-form mold having a plurality of concaves (or
trenches) arranged threron, the mother die for forming barrier ribs
to be a three-dimensional structure is formed on a planar base
material which can be bent freely, for example. The base material
may be integral with the mother die or the mother die may be
attached to the base material. The material for the mold and a
fabricating method thereof are not particularly restricted and a
well-known material and fabricating method can be used. In the
present invention, the mold is preferably made of a silicone rubber
based material, which has a relatively better removing property
than a ceramic based material. Moreover, the base material
preferably has some flexibility.
[0031] In consideration of mass production, it is desirable that
the mold should be in the form of a roll sheet in which intaglios
are arranged on a continuous sheet wound like a roll. In this case,
it is preferable that sprocket holes for delivery should be
provided on both ends of the roll sheet.
[0032] The paste-like structural material filled in the concaves of
the sheet-form mold is generally referred to as a transfer material
and implies a barrier rib material if the three-dimensional
structure is the barrier ribs, for example. The barrier rib
material is not particularly restricted but any of the well-known
materials may be used. For example, it is possible to use a
paste-like barrier rib material comprising low-melting glass
powder, an inorganic filler, a binder resin and an organic solvent.
After the paste-like barrier rib material is applied, the barrier
rib material is cured or semi-cured such that an adhesion property
or a bonding property can be expressed. The viscosity of the
barrier rib material can properly be adjusted depending on the
addition ratios of inorganic particulates, a thickener, an organic
solvent, a plasticizer, a suspending agent and the like. In order
to increase the adhesion property of the paste surface after curing
or semi-curing, it is desirable that binder resin to be mixed
should have a low glass transition point (Tg=approximately -60 to
20.degree. C.).
[0033] The support member for temporarily fixing the mold may be
planar or roll-shaped. If the structural material is transferred
onto a planar substrate such as glass, it is desirable that the
support member should be planar during support. Also, it is
desirable that the planar support member should have flexibility.
Such a support member can be constituted by a printing device in
which a screen is provided with a tension in a horizontal frame and
a plate having flexibility is supported on the screen, for example.
In the case in which the mold is a roll sheet having a sprocket
hole, it is desirable that a pin corresponding to the sprocket hole
should be provided on the support member side. Consequently, the
mold can be prealigned in the predetermined position of the support
member.
[0034] In the present invention, the temporary fixing is preferably
such that the structural material is contact-bonded to the
substrate together with the mold and then the mold can be released
from the support member.
[0035] The temporary fixation can be carried out by providing, on
the support member, a grip mechanism such as a magnet, an
electrostatic chuck or a vacuum chuck. In the case in which the
magnet is used, a support plate having magnetism such as an iron
plate or an invar plate is previously formed on the back face of
the mold and the mold is fixed to the support member through a
sheet-form rubber magnet. Thus, the temporary fixation can be
carried out.
[0036] In the case in which the magnet is used as the grip
mechanism, a permanent magnet does not always need to be used but
an electromagnet may be used. In the case in which the
electromagnet is used, the electromagnet may be mounted on the
support member side and a support plate having magnetism may be
mounted on the mold, a coating material having magnetism may
applied to the mold, or powder having magnetism may be contained in
the material for the mold.
[0037] In the case in which the mold is of a non-magnetic substance
such as a resin, rubber or plastics, the fixing mechanism such as
the vacuum chuck or electrostatic chuck is used for the temporary
fixation.
[0038] It is desirable that the grip mechanism should be so
constructed that the electromagnetic chuck, vacuum chuck or
electrostatic chuck has a number of divided chuck regions and the
temporary fixation of the mold is sequentially released by turning
off switches of divided chuck regions.
[0039] Besides the above-mentioned grip mechanisms, the temporary
fixation may be carried out by using, on the opposed surfaces of
the mold and the support member, a magic tape or a removable
adhesive having a small adhesion property. Alternatively, the
temporary fixation may be carried out by using a structure in which
a concave is formed on one of the opposed surfaces of the mold and
the support member and a convex is formed on the other surface and
they are fitted to each other. In this case, the concave and the
convex may be directly formed on the opposed surfaces of the mold
and the support member or a resinous structure which has been
formed in advance may be attached to the opposed surfaces of the
mold and the support member.
[0040] Also, the mold may be supported by previously attaching a
base material having flexibility (for example, a support plate made
of a thin stainless invar material) to the mold and pulling the
base material at both ends to apply tension.
[0041] Examples of the substrate include a substrate formed of
glass, quartz or silicon, and a substrate provided with a desirable
structure such as an electrode, an insulating film, a dielectric
layer or a protective film.
[0042] In the case in which the support member is a plane having
flexibility, it is desirable that the alignment of the mold with
the substrate should be carried out by opposing the mold to the
substrate in parallel. This alignment can be carried out by
previously providing a plurality of positioning marks (alignment
marks) on the mold and the substrate, mounting the substrate on an
alignment table which can be moved and rotated in a horizontal
direction, temporarily fixing the mold to the support member and
then moving and rotating the alignment table in the horizontal
direction such that the alignment marks of the mold and the
substrate are coincident with each other. The alignment marks of
the mold and the substrate can accurately be coincident with each
other by enlarging the alignment marks by means of a magnifying
glass or the like.
[0043] The contact bonding of the structural material to the
substrate and the release of the temporary fixation of the mold may
be simultaneously carried out continuously from one end of the mold
to another end. Alternatively, the temporary fixation of the mold
may be released after the whole mold is stuck to the substrate.
[0044] It is desirable that the mold should be removed from the
substrate by peeling the sheet-form mold off the substrate.
[0045] The mold is removed from the substrate and the
three-dimensional structure has thus been transferred onto the
substrate. If the three-dimensional structure is barrier ribs, for
example, the barrier ribs can be finished by firing. The firing is
carried out in a baking furnace. Firing atmosphere and firing
temperature are varied depending on the types of the paste and the
substrate. The firing is usually carried out in air or in a
nitrogen atmosphere. The firing temperature is 500 to 580.degree.
C.
[0046] According to another aspect, the present invention provides
a substrate assembly having the three-dimensional structure formed
by the above method, and a plasma display panel manufactured by
using the above substrate assembly.
[0047] According to still another aspect, the present invention
provides a three-dimensional structure transfer apparatus,
comprising: a delivery mechanism for delivering a sheet-form mold
having a plurality of concaves arranged thereon, the concaves being
filled with a structural material having an adhesion property or a
bonding property; a support member for temporarily fixing the mold
delivered by the delivery mechanism; a stage for mounting the
substrate and moving the position of the substrate in parallel with
the support member, thereby aligning the mold with the substrate; a
roll press mechanism for, after aligning the mold with the
substrate, pressing a back face of the mold with a roller, thereby
contact -bonding the structural material in a state in which the
structural material has an adhesion property or a bonding property
to the substrate together with the mold; a release mechanism for
releasing the temporary fixation of the mold after the pressing by
the roll press mechanism; and a removing mechanism for removing the
mold from the substrate.
[0048] In the present apparatus, it is desirable that the mold
should be used in the form of a roll sheet in which intaglios are
arranged on a continuous sheet wound in a roll. In this case, it is
preferable that a delivery mechanism should be provided with
sprockets and sprocket holes for delivery should be mounted on both
ends of the roll sheet.
[0049] The support member for temporarily fixing the mold can be
constituted by a printing device in which a screen is provided with
tension in a horizontal frame and a plate having flexibility is
supported on the screen, for example. In the case in which the mold
is the roll sheet having the sprocket holes, it is desirable that
the support member should be provided with pins corresponding to
the sprocket holes for prealigning the mold in a predetermined
position.
[0050] It is desirable that the support member should be provided
with a grip mechanism for temporarily fixing the mold. In this
case, it is desirable that the grip mechanism should be constituted
by an electromagnetic chuck, a vacuum chuck or an electrostatic
chuck which can sequentially release the temporary fixation of the
mold by partially turning off the switches of divided chuck
regions.
[0051] It is desirable that the mold and the substrate should be
provided with alignment marks for aligning both of them. Moreover,
it is desirable that a stage should be provided with an alignment
table on which the substrate can be placed and can be moved and
rotated in a horizontal direction such that the alignment marks of
the mold and the substrate are coincident with each other after the
mold is temporarily fixed to the support member.
[0052] Embodiments of the present invention will be described below
in detail with reference to the drawings. However, the present
invention is not restricted to the embodiments.
[0053] FIG. 1 is a perspective view showing the structure of a PDP
comprising barrier ribs manufactured by using the three-dimensional
structure transfer method and apparatus according to the present
invention.
[0054] In FIG. 1, the reference numeral 10 denotes a PDP of a
three-electrode surface discharge type in an AC driving mode. The
PDP 10 is constituted by a substrate 11 on the front face side and
a substrate 21 on the back face side which are formed of glass.
[0055] Sustain electrodes X and Y for surface discharge generation
are horizontally provided in almost parallel for each display line
L on the inner face of the substrate 11 at the front face side, and
a dielectric layer 17 and a protective film 18 made of MgO are
formed thereon. Since the sustain electrodes X and Y are to be
provided on the substrate at the front face side, they are formed
of a transparent electrode 12 of ITO and a metal electrode (bus
electrode) 13 of Cr/Cu/Cr.
[0056] An under layer 22, a plurality of address (data) electrodes
A for the generation of an address discharge and a dielectric layer
24 are sequentially formed on the inner face of the substrate 21 at
the back face side, and a large number of stripe-shaped barrier
ribs 29 for physically partitioning discharges are provided in
almost parallel to a vertical direction (intersecting the sustain
electrode) such that the address electrodes A are interposed
between the barrier ribs. Phosphor layers 28R, 28G and 28B are
formed in slots (concave portions) between the barrier ribs. The
layout pattern of three colors is a stripe pattern in which cells
in one column have the same luminescent color and the adjacent
columns have different luminescent colors.
[0057] A discharge space 30 is filled with a discharge gas of a
mixture of xenon with neon as a main component (a charged pressure
of approximately 500 Torr), and the phosphor layers 28R, 28G and
28B are locally excited by ultraviolet rays emitted from the xenon
during the discharge and emit light.
[0058] Next, description will be given to methods of forming the
barrier rib 29 by using the three-dimensional structure transfer
method and apparatus according to the present invention.
FIRST EMBODIMENT
[0059] FIGS. 2A to 2D and FIGS. 3A to 3C are views sequentially
showing the steps of a three-dimensional structure transfer method
according to a first embodiment.
[0060] Barrier Rib Material Filling Step
[0061] First of all, a paste-like barrier rib material 2 is filled
by coating in concaves of a sheet-form mold 1 having a mother die
of barrier ribs formed thereon, and is then cured or semi-cured
such that an adhesion property or a bonding property can be exerted
at a subsequent contact bonding step (see FIG. 2A).
[0062] The sheet-form mold 1 has a base material 1a and a mother
die 1b of the barrier ribs integrated, and is fabricated by a known
method using a silicone rubber based material. The mold 1 is planar
and can be bent freely.
[0063] For the paste-like barrier rib material 2, is used a
low-melting glass paste containing, in a vehicle, such an adherent
resin as expresses an adhesion property after curing or a
low-melting glass paste containing, in a vehicle, such a resin as
expresses the adhesion property by irradiation of ultraviolet rays
after the curing.
[0064] In the case in which the low-melting glass paste containing
an ultraviolet curing resin in a vehicle is used, it is maintained
in such a semi-curing state that ultraviolet curing does not take
place completely at this time. It is desirable that a plasticizer
or a thickener should be mixed to hold proper softness and the
adhesion property for the barrier rib materials in the curing or
semi-curing state.
[0065] Temporary Fixing Step
[0066] Next, the mold 1 filled with the barrier rib material 2 in
the concaves corresponding to the barrier ribs is temporarily fixed
to a support member 3 having a stainless plate 3a supported on a
frame 3b with a mesh tension, for example, a printing device in
which a stainless plate having flexibility in a thickness direction
is stuck to the central portion of a printing screen (see FIG. 2B).
The barrier rib material 2 is contact-bonded to the substrate
together with the mold 1 and the mold 1 is then fixed temporarily
to the support member 3 such that the mold 1 can be released from
the support member 3.
[0067] The temporary fixation is carried out through a grip
mechanism using a permanent magnet. More specifically, a support
plate having magnetism such as an iron plate or an invar plate is
previously formed on the base material la of the mold 1 and the
mold 1 is fixed through the stainless plate 3a of the support
member 3 by a sheet-form rubber magnet 4.
[0068] At this step, as shown in FIG. 4, a base material 3c having
flexibility (for example, a support plate fabricated by a thin
stainless invar material) may previously be attached to the mold 1,
both ends of the base material 3c may be clamped by a clamp support
member 4 and the mold 1 may be pulled in a direction shown by an
arrow K to apply tension. Thus, the mold 1 can be supported.
[0069] Alignment Step
[0070] Next, the support member 3 to which the mold 1 is
temporarily fixed is opposed to the substrate 5 in parallel with a
clearance of approximately 1 to 3 mm. Thus, the alignment of the
relative positions of the mold 1 and the substrate 5 is carried out
(see FIG. 2C).
[0071] The substrate 5 has such a structure that an under layer 22,
address electrodes A and a dielectric layer 24 are formed on a
substrate 21 at the back face side as shown in FIG. 1. In this
case, the dielectric layer 24 does not need to be formed but may be
formed through transfer simultaneously with the formation of
barrier ribs by using a material other than the barrier rib
material or the barrier rib material itself.
[0072] The alignment of the mold 1 and the substrate 5 is carried
out as follows. A plurality of alignment marks are previously
provided on the mold 1 and the substrate 5, and the substrate 5 is
mounted on an alignment table 7 which can be moved and rotated in a
horizontal direction. The alignment table 7 is moved and rotated in
the horizontal direction such that the alignment marks of the mold
1 and the substrate 5 are coincident with each other.
[0073] Contact Bonding and Release Step
[0074] Next, a press roller 6 is moved in a direction shown by an
arrow S while pressing the back face of the mold 1 through the
support member 3. Thus, the barrier rib material 2 having an
adhesion property or a bonding property is contact-bonded to the
substrate 5 together with the mold 1. In the case in which the
barrier rib material 2 is made of an ultraviolet curing material
maintained in a semi-curing state, ultraviolet rays are partially
irradiated from the back face side of the substrate 5 to completely
cure the barrier rib material 2 and bond the barrier rib material 2
to the substrate 5, for example.
[0075] During the contact bonding, the release of the temporary
fixation of the mold 1 is carried out continuously from one end of
the mold 1 to another end simultaneously with the contact bonding
of the barrier rib material 2 to the substrate 5. More
specifically, the rubber magnet 4 on the back face of the mold 1 is
peeled off in a direction shown by an arrow R simultaneously with
the contact bonding so that the mold 1 is gradually released (see
FIG. 2D). The mold 1 may be temporarily fixed through the grip
mechanism such as an electromagnetic chuck, a vacuum chuck or an
electrostatic chuck. In that case, a chuck region is divided in a
number of regions in advance and a region where the temporary
fixation is to be released is switched off. Thus, the temporary
fixation by that region is released.
[0076] Thus, the temporary fixation state to the support member is
gradually released while the mold 1 is contact-bonded to the
substrate 5. Consequently, the mold 1 is released from the support
member 3 with the mold 1 stuck-to the substrate 5. Thus, the mold 1
is left on the substrate 5 (see FIG. 3A).
[0077] As shown in FIG. 4, in the case in which both ends of the
mold 1 are clamped by the clamp support member 4c and the mold 1 is
supported with tension, the clamping may be released after the
contact bonding is completed.
[0078] Removing Step
[0079] After the mold 1 is contact-bonded, it is peeled from the
substrate 5 as shown by an arrow P. Consequently, the mold 1 is
removed from the substrate 5 (see FIG. 3B). At this time, it is
preferable that a peel angle should be approximately 90.degree.. It
is desirable that the mold 1 should be peeled off while a support
roll is rolled on the upper surface of the mold 1. Thus, the mold 1
is completely peeled off the substrate 5 and the barrier rib
material is completely transferred (see FIG. 3C).
[0080] Then, the barrier ribs are finished by firing.
SECOND EMBODIMENT
[0081] FIGS. 5A to 5C are views illustrating a three-dimensional
structure transfer method according to a second embodiment.
[0082] Since a barrier rib material filling step, a temporary
fixing step, an alignment step and a removing step according to the
present embodiment are the same as those of the first embodiment,
only contact bonding and release steps will be described below.
[0083] After the alignment step according to the first embodiment,
if the clearance between the mold 1 and the substrate 5 can be
maintained to be sufficiently small and excessive force is not
applied to the mold 1, the temporary fixation of the mold I may be
released after the whole mold 1 is stuck to the substrate 5 instead
of releasing the temporary fixation to the support member during
the contact bonding of the mold 1 to the substrate 5.
[0084] More specifically, a barrier rib material 2 is
contact-bonded to the substrate 5 together with the mold 1 (see
FIG. 5A). After the mold 1 is completely stuck to the substrate 5
(see FIG. 5B), a rubber magnet 4 is peeled off the back face of the
mold 1 in a direction shown by an arrow R. Consequently, the
temporary fixation is released at a time and the mold 1 is released
as shown by an arrow S and is left on the substrate 5 (see FIG.
5C).
[0085] As shown in FIG. 4, in the case in which both ends of the
mold 1 are clamped with the clamping support member 4c and tension
is applied to support the mold 1, it is preferable that the clamp
should be released after the contact bonding is completed in the
same manner as in the first embodiment.
[0086] The subsequent removing step is the same as that in the
first embodiment.
THIRD EMBODIMENT
[0087] FIGS. 6A to 6D are views illustrating a three-dimensional
structure transfer method according to a third embodiment.
[0088] In the present embodiment, a roll-from support member is
used in place of the planar support member. In the present
embodiment, a mold filled with a barrier rib material is
temporarily fixed to a roll-form transfer jig and the temporary
fixation is released while contact-bonding the mold to a substrate
and the mold is then peeled in the same manner as in the first and
second embodiments.
[0089] First of all, after a sheet-form mold is filled and coated
with a paste-like barrier rib material, it is cured or semi-cured
and is wound like a roll. Thus, a roll sheet 31 is prepared.
[0090] Then, the mold 1 is drawn out of the roll sheet 31 and is
delivered through a pair of delivery rolls 34 to a roll-from
transfer jig (laminate roll) 33 including a grip mechanism 32 such
as an electromagnetic chuck, an electrostatic chuck or a vacuum
chuck which has divided chuck regions (see FIG. 6A).
[0091] Next, the mold 1 thus delivered is wound around the
roll-form transfer jig 33 and is delivered in a predetermined
amount through a delivery gear 35, and is thus fixed temporarily
(see FIG. 6B). During the wrapping, the mold 1 is wound around the
roll-from transfer jig 33 in alignment so as to reach a
predetermined position. After being wound, the roll sheet 31 is cut
with a cutter 36 (mold fix cut).
[0092] The roll sheet 31 may be obtained by arranging molds each
for one panel on a continuous sheet made of paper or resin at
regular intervals or by providing the molds without intervals.
[0093] Sprocket holes are opened on both ends of the roll sheet 31.
The sprocket holes are utilized for the delivery of the roll sheet
31, and furthermore, are utilized as a mechanism for prealignment
to temporarily fix the roll sheet 31 to the roll-form transfer jig
33 and for alignment with the substrate.
[0094] Subsequently, the roll-form transfer jig 33 to which the
mold 1 is fixed temporarily is aligned with the substrate 5. Then,
the roll-form transfer jig 33 is pushed against the substrate 5 to
contact-bond the barrier rib material 2 to the substrate 5 together
with the mold 1 and the switches of the chuck regions of the grip
mechanism 32 are sequentially turned off so as to release the
temporary fixation successively. In other words, the temporary
fixation is released sequentially from where the contact-bonding is
completed (see FIG. 6C).
[0095] Thus, the mold 1 is stuck to the substrate 5. Then, the mold
1 is peeled and the barrier rib material 2 is transferred (see FIG.
6D). The removing step and succeeding steps are the same as those
in the first embodiment.
[0096] FIG. 7 is a view illustrating a general construction of an
example of an apparatus for fabricating the roll sheet 31 of the
mold. In the present example, the roll sheet 31 of the mold filled
with a barrier rib material is fabricated. A material having no
solvent evaporation or very slight solvent evaporation is used as
the barrier rib material. For example, there is used a low-melting
glass paste containing, in a vehicle, a resin expressing an
adhesion property by irradiation of ultraviolet rays after curing
or a low-melting glass paste containing an ultraviolet curing resin
in a vehicle.
[0097] In the present apparatus, a mold sheet 41 wound around one
roll and a cover sheet 42 wrapped around another roll are
integrated through rollers 43 and 44, and the barrier rib material
2 is interposed and filled between both the sheets by using a die
45 during the integration. Then, proper ultraviolet rays are
irradiated by a ultraviolet ray irradiating device 46 to cure or
semi-cure the barrier rib material 2. The barrier rib material 2 is
wound. Thus, the roll sheet 31 is fabricated.
[0098] When the mold filled with the barrier rib material 2 is used
for the transfer, the cover sheet 42 is broken away in advance to
carry out the transfer in the process according to the first to
third embodiments.
[0099] FIG. 8 is a view illustrating a general construction of
another example of the apparatus for fabricating the roll sheet 31
of the mold. In the present example, a low-melting glass paste
containing, in a vehicle, such an adherent resin as expresses an
adhesion property after curing is used as the barrier rib
material.
[0100] In the present apparatus, the mold sheet 41 wound around the
roll is fed to a web 47 and the mold is filled with the barrier rib
material 2 through a lip coater 48, then dried and cured through a
heater 49 or a drying furnace covered with the cover sheet 42, if
necessary, and wound. Thus, the roll sheet 31 is fabricated. The
lip coater 48 is only an example and another coating device such as
a slit coater may be used.
[0101] FIG. 9 is a view illustrating a three-dimensional structure
transfer apparatus for implementing the method according to the
first embodiment.
[0102] In FIG. 9, the reference numeral 51 denotes a mold sheet
filled with a barrier rib material, the reference numerals 52, 53,
54, 55, 56 and 57 denote rollers, the reference numeral 58 denotes
a press roller, the reference numeral 59 denotes a sprocket
delivery mechanism, the reference numeral 60 denotes a winding
roll, the reference numeral 61 denotes a guide rail for the winding
roll, the reference numeral 62 denotes a support member for
temporary fixation, the reference numeral 63 denotes a substrate,
the reference numeral 64 denotes a stage, the reference numeral 65
denotes an alignment table arranged on a stage, the reference
numeral 66 denotes a camera for alignment, and the reference
numeral 67 denotes alignment marks provided on the mold sheet 51
and the substrate 63.
[0103] The roller 57 functions as a sheet tension buffer. The
winding roll 60 can be moved in a direction shown by an arrow U.
During removal, the winding roll 60 is moved upward in the figure
along the guide rail 61 and is rotated in a direction shown by an
arrow T to wind the mold sheet having no barrier rib material after
the transfer.
[0104] Sprocket holes are opened on both ends of the mold sheet 51
and are utilized for the delivery of the mold sheet 51. Moreover,
pins corresponding to the sprocket holes are provided on the
support member 62 so that the mold sheet 51 can be prealigned in
the predetermined position of the support member 62 through the
sprocket holes and the pins. The sprocket holes of the mold sheet
51 are also utilized as a mechanism for alignment with the
substrate 63.
[0105] The stage 64 can be moved in a direction shown by an arrow V
and is moved rightward in the figure during the removal. The
alignment table 65 is constituted by an X table 65a movable in the
X direction, a Y table 65b movable in the Y direction and a rotary
table 65c which is rotatable.
[0106] The alignment of the mold 51 with the substrate 63 is
carried out by aligning the position of the alignment marks 67
through the camera 66 for alignment.
[0107] The support member 62 includes a grip mechanism such as an
electromagnetic chuck, an electrostatic chuck or a vacuum chuck
which serves to temporarily fix the mold sheet 51, which is not
shown. The grip mechanism is provided with divided chuck regions.
When the switches of the divided chuck regions are partially turned
off, the temporary fixation of the mold sheet 51 is sequentially
released.
[0108] A printing device such as a screen printing intaglio
described in the first embodiment may be used for the support
member 62. Moreover, in the case in which dimensional precision is
permitted with the tension of the sheet itself, tension may be
applied to support the mold sheet 51 as shown in FIG. 4.
[0109] FIGS. 10A, 10B and 10C are views illustrating the operation
of the three-dimensional structure transfer apparatus of FIG. 9,
showing an example in which the formation of barrier ribs by
transfer is continuously repeated .
[0110] First of all, the mold sheet 51 is wound up and a desired
mold is moved to the position of the support member 62. Then, the
mold is temporarily fixed to the support member 62 through the grip
mechanism and the substrate 63 is moved through the alignment table
65 for the alignment of the mold with the substrate 63 (see FIG.
10A).
[0111] Next, roll press is carried out through the press roller 58
in a direction shown by an arrow L, and the barrier rib material is
contact-bonded while at the same time the temporary fixation of the
mold is sequentially released through the grip mechanism (see FIG.
10B).
[0112] Then, the press roller 58 is lifted up and is moved leftward
in the figure, and the position of the winding roll 60 is moved in
a direction shown by an arrow M to wind up the mold sheet 51. The
stage 64 is moved in a direction shown by an arrow N synchronously
with the movement of the mold sheet 51 so as to peel the mold off
the substrate 63 in a direction shown by an arrow P (see FIG.
10C).
[0113] Thus, by using the sheet-form mold, temporarily fixing and
contact-bonding the mold to the support member during the contact
bonding of the barrier rib material and peeling by utilizing the
sheet property of the mold during the removal of the mold, it is
possible to relieve restrictions on the adhesion strength and
mechanical strength of the structural material and the degree of
the removing property of the mold considerably.
[0114] According to the present invention, the transfer step is
divided into two steps, that is, the contact-bonding step and the
removing step. At the removing step, the peeling which involves the
application of the least excessive force for the removal can be
carried out. Therefore, it is possible to enhance transfer
precision through the transfer and formation of the
three-dimensional structure using the mold and also to relieve the
conditions on the adhesion strength and the removing property
required of the structural material and the material for the mold.
Consequently, the degree of freedom of material selectivity can be
increased and the field of application of the present technique can
also be widened.
* * * * *