U.S. patent application number 10/024598 was filed with the patent office on 2002-10-24 for cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof.
Invention is credited to Aono, Yasuhisa, Aota, Kinya, Doi, Masayuki, Hirano, Satoshi, Kagawa, Manabu, Okamoto, Kazutaka, Okamura, Hisanori.
Application Number | 20020153130 10/024598 |
Document ID | / |
Family ID | 26606353 |
Filed Date | 2002-10-24 |
United States Patent
Application |
20020153130 |
Kind Code |
A1 |
Okamoto, Kazutaka ; et
al. |
October 24, 2002 |
Cooling plate and manufacturing method thereof, and sputtering
target and manufacturing method thereof
Abstract
The present invention is a cooling plate including a groove,
which becomes a passage of a coolant, inside a body, wherein one or
more fins are provided inside the groove, wherein the groove is
covered with a lid having width larger than the groove, wherein the
lid is joined to the body by friction stir welding, and wherein a
weld bead formed by the joining is outside the passage, and the
weld bead formed by the joining is formed within the body and
further, is characterized by a manufacturing method of a cooling
plate that has a first groove, which becomes a passage of a
coolant, and a second groove, which has width larger than the first
groove and receives a lid on the first groove, inside a body,
receives the lid on the second groove, and is joined to the body,
the manufacturing method of a cooling plate wherein, while the lid
and the body are joined together by the friction stir welding owing
to insertion of a rotation tool having a shoulder and a pin, the
joining is performed so that a weld bead formed by the joining may
become out of the passage, and furthermore, is characterized in
that a target for sputtering is joined to the cooling plate.
Inventors: |
Okamoto, Kazutaka; (Hitachi,
JP) ; Doi, Masayuki; (Hitachinaka, JP) ;
Okamura, Hisanori; (Tokai, JP) ; Aono, Yasuhisa;
(Hitachi, JP) ; Kagawa, Manabu; (Ishioka, JP)
; Hirano, Satoshi; (Hitachi, JP) ; Aota,
Kinya; (Hitachi, JP) |
Correspondence
Address: |
CROWELL & MORING, LLP
P. O. BOX 14300
Washington
DC
20044
US
|
Family ID: |
26606353 |
Appl. No.: |
10/024598 |
Filed: |
December 21, 2001 |
Current U.S.
Class: |
165/170 ;
165/168; 29/890.03 |
Current CPC
Class: |
C23C 14/3407 20130101;
H01J 37/3497 20130101; F28F 3/12 20130101; Y10T 29/49393 20150115;
Y10T 29/4935 20150115; B23P 15/26 20130101; B23K 20/1235 20130101;
Y10T 29/49391 20150115; Y10T 29/49353 20150115; H01J 37/34
20130101; B23K 20/122 20130101 |
Class at
Publication: |
165/170 ;
165/168; 29/890.03 |
International
Class: |
B21D 053/02; F28F
003/14; F28F 003/12 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 22, 2000 |
JP |
2000-390165 |
May 23, 2001 |
JP |
2001-153962 |
Claims
What is claimed is:
1. A cooling plate comprising a groove, which becomes a passage of
a coolant, inside a body thereof, wherein the groove is covered
with a lid with width larger than the groove, and the lid is joined
to the body by friction stir welding, and a weld bead formed by the
joining are outside the passage.
2. A cooling plate comprising grooves of a closed passage, which
become a plurality of independent passages of a coolant, inside a
body, wherein the grooves are covered with lids, and the lids are
joined to the body by the friction stir welding, and a weld bead
formed by the joining are outside the passages.
3. A cooling plate comprising a groove, which becomes a passage of
a coolant, inside a body, wherein the groove is covered with a lid,
and the lid is joined to the body by the friction stir welding, and
at least an end of a weld bead formed by the joining is formed in
the body except a joining.
4. A cooling plate comprising a groove, which becomes a passage of
a coolant, inside a body, wherein the groove is covered with a lid
having width larger than the groove, and the lid is joined to the
body by friction stir welding and fusion welding, and a weld bead
formed by the joining is outside the passage.
5. A cooling plate comprising a groove, which becomes a passage of
a coolant, inside a body, wherein one or more fins are provided
inside the groove, and the groove is covered with a lid having
width larger than the groove, and the lid is joined to the body by
the friction stir welding, and a weld bead formed by the joining is
outside the passage.
6. A cooling plate comprising a groove, which becomes a passage of
a coolant, inside a body, wherein the groove is covered with a lid,
and the lid is joined to the body by friction stir welding, and the
passage is a passage closed within the body.
7. A cooling plate comprising a groove, which becomes a passage of
a coolant, inside a body, wherein the groove is covered with a lid,
and the lid is joined to the body by friction stir welding, and an
air vent is provided in a portion forming the passage.
8. A cooling plate comprising a groove, which becomes a passage of
a coolant, inside a body, wherein the groove is covered with a lid,
and the lid is joined to the body by the friction stir welding, and
the lid is joined by friction stir welding owing to insertion of a
rotation tool having a shoulder and a pin and at least an end of a
weld bead of the joining is out of the joining.
9. A cooling plate comprising two or more U grooves per one meter
wide, which become passages of a coolant, inside a body, wherein
the grooves are covered with lids, and the lids are joined to the
body by friction stir welding, and the passages are passages closed
within the body.
10. A cooling plate comprising a longwise M-shaped groove, which
becomes a passage of a coolant, inside a body that is a long plate,
wherein the groove is covered with a lid, and the lid is joined to
the body by friction stir welding, and the passage is a passage
closed within the body.
11. A sputtering target, wherein a target material for sputtering
is joined on the cooling plate according to claim 1.
12. A manufacturing method of a cooling plate that has a first
groove, which becomes a passage of a coolant, and a second groove,
which has width larger than the first groove and receives a lid on
the first groove, inside a body, places the lid on the second
groove, and is joined to the body, wherein, while the lid and the
body are joined together by friction stir welding owing to
insertion of a rotation tool having a shoulder and a pin, joining
is performed so that a weld bead formed by the joining may become
outside the passage.
13. A manufacturing method of a cooling plate which has a groove,
which becomes a passage of a coolant, inside a body, and in which a
lid is joined to the groove, wherein, while the lid and the body
are joined by friction stir welding owing to insertion of a
rotation tool which has a shoulder and a pin, the groove is made to
be a left-hand side to a traveling direction of joining when the
rotation tool rotates to the left, the groove is made to be a
right-hand side to a traveling direction of joining when the
rotation tool rotates to the right.
14. A manufacturing method of a cooling plate which has a groove,
which becomes a passage of a coolant, inside a body, and in which a
lid is joined to the groove, wherein, while the lid and the body
are joined by friction stir welding owing to insertion of a
rotation tool which has a shoulder and a pin, a center of the
rotation tool is set in a position which is apart from an edge of
the groove by a radius of the pin or more.
15. A manufacturing method of a cooling plate which has a groove,
which becomes a passage of a coolant, inside a body, and in which a
lid is joined to the groove, wherein, while the lid and the body
are joined by friction stir welding owing to insertion of a
rotation tool which has a shoulder and a pin, a joining direction
where the rotation tool rotates is a direction opposite to a
rotational direction of the rotation tool when the joining
direction by the rotation tool passes a curve.
16. A manufacturing method of a cooling plate which has a groove,
which becomes a passage of a coolant, inside a body, and in which a
lid is joined to the groove, wherein, while the lid and the body
are joined by friction stir welding, joining becoming a folding of
the joining is made to be joining by two straight lines.
17. A manufacturing method of a cooling plate which has a groove,
which becomes a passage of a coolant, inside a body, and in which a
lid is joined to the groove, wherein a joining of the body and the
lid has a projection thicker than other sections, and joining to
the projection is performed by friction stir welding owing to
insertion and movement of a rotation tool having a shoulder and a
pin.
18. A manufacturing method of a cooling plate which has a groove,
which becomes a passage of a coolant, inside a body, and in which a
lid covers the groove, wherein the lid is joined to the body by
friction stir welding, and while the lid and the body are joined by
friction stir welding, an air vent is provided in a portion forming
the passage.
19. A manufacturing method of a cooling plate which has a groove,
which becomes a passage of a coolant, inside a body, and in which a
lid covers the groove, wherein the lid is joined to the body by
friction stir welding, and while the lid and the body are joined by
friction stir welding owing to insertion of a rotation tool which
has a shoulder and a pin, at least an end portion of the joining is
formed out of the joining.
20. The manufacturing method of a cooling plate according to any
one of claims 12 to 19, wherein, after the lid and the body are
partially and temporarily joined by friction stir welding owing to
insertion of a rotation tool which has only a shoulder beforehand,
a whole joining is joined by friction stir welding.
21. The manufacturing method of a cooling plate according to claim
12, wherein, after the lid and the body are partially and
temporarily joined by fusion weld or friction stir welding
beforehand, a whole joining is joined by friction stir welding.
22. The manufacturing method of a cooling plate according to claim
12, wherein joining is performed in a coolant made of any one of
water, oil, and an inert gas, or with forcibly cooling a joining
and an inside of the rotation tool with the coolant.
23. The manufacturing method of a cooling plate according to claim
12, wherein a projection is provided in an insertion side of an
joining of the body and the lid where the pin is inserted.
24. The manufacturing method of a cooling plate according to claim
12, wherein a surface of a weld bead of the joining is concave by
pressure of the shoulder.
25. A manufacturing method of a sputtering target that joins a
target material for sputtering on a cooling plate, wherein the
cooling plate is manufactured by the manufacturing method according
to claim 12.
Description
BACKGROUND OF THE INVENTION
[0001] The present invention relates to a new cooling plate and a
manufacturing method thereof, a sputtering target and a
manufacturing method thereof, a backing plate and a manufacturing
method thereof, and a sputtering target and a manufacturing method
thereof.
PRIOR ART
[0002] Although a cooling plate is widely used industrially, an
efficient cooling function is required. For example, in a
sputtering apparatus, efficient radiation of the heat generated in
a target material affects the performance of a thin film that is
obtained. In particular, in the case of a sputtering apparatus for
a liquid crystal manufacturing apparatus, a target material with a
large area is used, which radiates plenty of heat. For this reason,
a backing plate is used as a cooling plate, the backing plate
having a channel inside a smooth plate composed of copper, a copper
alloy, aluminum, or an aluminum alloy, and having the structure
that the channel is covered with a lid and the lid and cooling
plate are metallically joined to be sealed. Up to now, the joining
of a body of a backing plate and a lid is performed by metallically
joining them by electron beam welding, diffusion bonding, a brazing
method, etc. In addition, besides the backing plate, various kinds
of water cooled jackets, water-cooled chills, etc. are used as a
heat sink, and every one has the structure of having a channel
therein similarly to the above-described backing plate.
[0003] Moreover, it is necessary for a backing plate used for a
liquid crystal manufacturing apparatus to support a target material
at a sputtering step, and to have an efficient cooling function.
For this reason, the backing plate has a channel inside a smooth
plate composed of copper, a copper alloy, aluminum, or an aluminum
alloy, and has the structure that the channel is covered with a lid
and the lid and cooling plate are metallically joined to be sealed.
Up to now, the joining of a body of a backing plate and a lid is
performed by metallically joining them by electron beam welding,
diffusion bonding, a brazing method, etc.
[0004] In regard to the manufacture of this backing plate, there is
JP-A-2000-73164 specification, where a backing plate is shown,
where a plate-like cooling section that has a coolant passage
inside is integrated with a plate-like base section by friction
stir welding.
[0005] Since a backing plate needs to enhance cooling
effectiveness, good flatness and smoothness are required of a
surface of the backing plate that contacts with a target material
etc. Up to now, the joining of a body of a backing plate and a lid
covering a channel is performed by electron beam welding, laser
welding, diffusion bonding, a brazing method, etc. However, since
it is necessary to make a surface flat by correction or machining
after joining because these welding methods have large heat
distortion after joining, they have problems in respect of quality,
and accuracy, and further productivity and cost.
[0006] Furthermore, in the above-described known example, although
the structure that a target is provided through a plate-like base
section provided on a plate-like cooling section which has a
coolant passage is shown, not only direct cooling cannot be
obtained, but also the formation of a compact cooling passage
cannot be obtained.
SUMMARY OF THE INVENTION
[0007] An object of the present invention is to provide a cooling
plate, which has high cooling effectiveness and a thin, large area,
and a manufacturing method thereof, and a sputtering target and a
manufacturing method thereof.
[0008] The present invention is a cooling plate characterized in
that a groove, which becomes a passage of a coolant, is provided
inside a body, that this groove is covered with a lid with width
larger than the groove, that the lid is joined to the body by
friction stir welding, and that a weld bead formed by the welding
is outside the passage.
[0009] Furthermore, the present invention is a cooling plate
characterized in that grooves, which become passages of several
independent coolants, are provided inside a body, that the groove
is covered with a lid, that the lid is joined to the body by
friction stir welding, and that a weld bead formed by the joining
is outside the passage.
[0010] Moreover, the present invention is a cooling plate
characterized in having any one or combination of the structure
that a groove, which becomes a passage of a coolant, is provided
inside a body, the groove is covered with a lid, the lid is joined
to the body by friction stir welding, and at least an end of a weld
bead formed by the joining is formed in the body except a joining,
the structure that a groove, which becomes a passage of a coolant,
is provided inside a body, the groove is covered with a lid with
width larger than the groove, the lid has one or more fins, the
groove is covered with a lid with width larger than the groove, the
lid is joined to the body by friction stir welding, and a weld bead
formed by the joining is outside the passage, and the structure
that the passage is a passage closed within the body, an air vent
is provided in a portion forming the passage, and at least an end
portion of the weld bead of the joining is formed except the
joining.
[0011] In particular, since the present invention performs joining
with fitting a lid, which covers a groove, into the groove to a
body where the groove with a path as a closed channel is formed,
there is no mutual expansion of matching sections. Hence, not only
good joining can be obtained, but also there is no excessive
joining because the body itself is in one piece, and hence it is
possible to obtain a cooling plate with a compact thin shape is
obtained also in a large area regardless of an area.
[0012] The channel is at least one of an I-shaped channel, a
U-shaped channel, an S-shaped channel, and an M-shaped channel, a
round channel, and a spiral channel, and it is preferable that one
or more of them are used. Since each channel has a closed path, an
entrance and an exit are located in each path. Hence, each entrance
and each exit are connected in parallel in two or more channels,
and hence, uniform cooling can be performed as the whole cooling
plate. It is preferable to join the channels so that more uniform
cooling may be performed.
[0013] Although it is preferable that the body and lid are composed
of copper, a copper alloy, aluminum, an aluminum alloy, titanium,
or stainless steel, the former having higher heat conduction is
more preferable.
[0014] The present invention is a manufacturing method of a cooling
plate that has a first groove, which becomes a passage of a
coolant, and a second groove, which has width larger than the first
groove and receives a lid on the first groove, inside a body,
places the lid on the second groove, and is joined to the body, the
manufacturing method of a cooling plate being characterized in
that, while the lid and the body are joined together by friction
stir welding owing to the insertion of a rotation tool having a
shoulder and a pin, the joining is performed so that a weld bead
formed by the joining may become outside the passage. The
above-described joining method can perform joining at a temperature
of a fusing point of copper or aluminum or lower. Furthermore, the
above-described joining performs joining in a coolant such as
water, oil, or an inert gas, or with compulsorily cooling the lid
and body by pouring the above-described coolant near the
joining.
[0015] A friction stir welding method according to the present
invention is a method of performing joining with using frictional
heat and plastic flow which are generated between the rotation tool
and joining material by rotating and inserting a rotation tool
which has a shoulder and a pin that are made of material harder
than the aluminum or a copper alloy substantially and relatively
moving the joined material. This is disclosed by National
Publication of the Translated Version of PCT Application No.
7-505090 specification, etc. That is, since a plastic flow
phenomenon by the frictional heat between the rotation tool and
joined material is used, this is different from conventional
welding such as electric arc welding and electron beam welding, but
does not perform joining (welding) with melting the joined
material. Furthermore, the friction stir welding method differs
from a method of rotating workpiece like a conventional friction
welding method performing joining with frictional heat, but is a
method of being able to continuously join a workpiece in the
longitudinal direction of a joining line below a fusing point of
the joining material.
[0016] By using the friction stir welding method, since it is
possible to perform joining at a low temperature below the fusing
point of a joining material, distortion by the joining is small in
comparison with a conventional welding method, and hence a cooling
plate with high accuracy can be manufactured. Hence, it is possible
to simplify the correction step after joining, and to reduce cost
by shortening correction work-hours.
[0017] Furthermore, this joining method can perform joining in a
coolant such as water, oil, or an inert gas, or with pouring the
above-described coolant near the joining. At this time, since it is
possible to suppress temperature rise in a position apart by
several mm from the joining, it is possible to suppress heat
distortion after joining to the minimum. Hence, it is possible to
make a face, which contacts to the silicon wafer, smooth and
accurate, and therefore, to manufacture a reliable backing
plate.
[0018] Namely, the present invention is a manufacturing method of a
backing plate that is made of copper, a copper alloy, aluminum, or
an aluminum alloy, is composed of a body and a lid, and has a
cooling channel that is covered with the lid, and in which the lid
is metallically joined to the body, the manufacturing method of a
backing plate being characterized in that the lid and body are
joined by friction stir welding.
[0019] When the rotation tool that is composed of the shoulder and
pin that are used for friction stir welding rotates
counterclockwise, it is preferable that the channel is in the
left-hand side to the traveling direction of the rotation tool.
Moreover, when the rotation tool rotates clockwise, it is
preferable that the channel is in the right-hand side. When the
rotation tool rotates counterclockwise, a minute defect may arise
in the right-hand side to the traveling direction of the rotation
tool rarely. When the channel is located in the right-hand side at
this time, a defect will arise near a wall surface of the channel.
However, when the channel is located in the left-hand side, a
defect will arise inside the body and will not arise near the
channel. Of course, what is necessary is just to consider this
conversely, when the rotation tool rotates clockwise.
[0020] Moreover, the center of the rotation tool which is composed
of the shoulder and pin which are used for friction stir welding
may be in a position apart from the channel by more than the
maximum radius of a pin section. Thus, in the friction stir
welding, a workpiece receives a downward load of about 10 kN from
the rotation tool. If the rotation tool is on the lid above the
channel, copper etc. will be deformed and collapsed due to this
load, and a part of a wall will escape into the channel so that the
joining will not be successful. In addition, in general, the
geometry of a channel is about 50 W.times.5 D mm, and the thickness
of a lid is about 5 mm.
[0021] The lid covering the channel for cooling is larger than the
channel, and is made in socket-and-spigot structure with the body.
The lid is produced by machining, where curves with about R 3 to R
10 (unit: mm) are provided in corner sections in order to make it
easy to insert the lid into the body. When the lid is joined to the
body by the friction stir welding, it is necessary to perform such
curved joining. As described above, when the rotation tool rotates
counterclockwise, a defect may arise in the right-hand side to the
traveling direction of the rotation tool rarely. Namely, when
passing the curves, it is necessary to relatively lessen a
right-hand joining region in order to eliminate a defect in the
right-hand side of the rotation tool. Hence, when the rotation tool
passes a planar curve (R section), its curving direction may be
opposite to the rotary direction of the rotation tool.
[0022] Generally, in the friction stir welding, joining is
performed with slightly leaning a rotation tool backward to the
traveling direction. Since the joining of a backing plate is the
joining of two-dimensional planar surfaces, it is necessary to
control a sweepback angle of the rotation tool so that the
sweepback angle may always become constant to a joining direction.
For this reason, it is necessary to have one control axis for it in
a joining apparatus. However, according to the present invention, a
rotation tool does not necessarily need to have a sweepback angle.
Namely, even if the rotation tool is always perpendicular to a
joining material, good-quality joining is possible, and hence, the
simplification of the apparatus can be attained. In addition, even
if a sweepback angle is given to the rotation tool, it is also
possible to join a joining, which becomes a straight line and a
curve, only in a straight line. That is, it is also possible to use
a method of joining a planar curve (R section), which becomes a
folding from a straight section, in a form composed of two straight
lines.
[0023] Moreover, in the friction stir welding, since the rotation
tool that is rotating forcibly moves against a workpiece, so to
speak, the workpiece receives a large force from the rotation tool.
For this reason, it is necessary to fix a work firmly. In the case
of a backing plate, depending on its geometry, it is comparatively
easy to fix the body. However, it is comparatively difficult to fix
the lid because the channel winds and has the complicated geometry.
Then, it is necessary to temporarily tack-weld the lid to the body
beforehand. Unlike permanent joining, temporary attachment has
narrow joining sections and heat input is not large, and hence, a
conventional welding method is also sufficient. However, it is
preferable to perform the friction stir welding. This is because
cost increase due to a plurality of processes. Thus, first, the
rotation tool composed of only a shoulder is inserted into a
joining with being rotated. It is necessary to make the amount of
insertion at this time smaller than the amount of shoulder
insertion at the time of performing permanent joining after
this.
[0024] Then, the rotation tool is drawn out and this is given to
several points. Thereby, as for the joining, only surface sections
are joined. After the temporary attachment, the rotation tool is
exchanged and permanent joining is performed.
[0025] The present invention is a manufacturing method of a cooling
plate which has a groove, which becomes a passage of a coolant,
inside a body, and in which a lid is joined to the groove, the
manufacturing method of a cooling plate characterized in that a
joining of the body and the lid has a projection thicker than other
sections, and joining to the projection is performed by friction
stir welding owing to insertion and movement of a rotation tool
having a shoulder and a pin, that, while the lid and the body are
joined by the friction stir welding, and an air vent is provided in
a portion forming the passage, that, while the lid and body are
joined by the friction stir welding owing to the insertion and
movement of the rotation tool having a shoulder and a pin, and at
least an end section of the joining is formed except the joining,
and that, after the lid and body are partially and temporarily
joined by the friction stir welding owing to insertion of the
rotation tool which has only a shoulder, and a whole joining is
joined by the friction stir welding.
[0026] A projection formed more thickly than other sections in the
joining of the body and lid is used for preventing cutting in a
plane section at the time of cutting after joining by making the
depression depth of this concavity into the thickness higher than
the plane section since the concavity is formed in a joining by the
insertion of the rotation tool which has the shoulder and pin at
the time of joining.
[0027] An air vent is provided in a section, where a passage is
formed, because normal joining can be performed by releasing air in
the groove to the outside at the time of installing the lid in the
groove at the time of joining, and at the time of performing
joining by the insertion of the rotation tool. Since a groove
according to the present invention forms a channel closed inside a
body of a cooling plate, it is preferable to use a lid having the
same planar surface geometry as the groove. Therefore, they
coincide with each other exactly. Hence, the air vent is
required.
[0028] In an end section of a joining, an insertion hole for a
rotation tool is formed. Hence normal joining can be performed by
leading the end section to the inside of a cooling plate body
except the joining, and forming the insertion hole for the rotation
tool in the section.
[0029] In conventional electron beam welding or the like, since the
deformation of a joining material after joining is large, the front
and back faces of a backing plate are ground after correcting a
warp after joining. When joining by the friction stir welding is
used, since the deformation after joining can be suppressed, the
number of steps can be reduced as described above, and cost
reduction is possible. However, since a joining to be joined by the
friction stir welding is joined with a rotation tool being inserted
in the joining, a burr arises near the joining, and hence a wall of
the joining is made to be thin in comparison with those of other
sections. Since the surface smoothness is not perfect without
processing after the joining, surface grinding is needed in any
case. If the joining of the body and lid is partially thick, it is
possible to make the thickness of the joining after the joining be
almost equivalent to that of other sections. Hence, it becomes
possible to decrease surface cutting cost after the joining, and
therefore, it leads to the reduction of manufacturing cost.
[0030] The friction stir welding performs solid state welding by
pressing a rotation tool against a joining, using frictional heat
generated in the rotation tool and the joining, pushing the
rotation tool into the joining, and stirring materials through
moving the rotation tool and generating a plastic flow. What
becomes a problem here is that a resistance forces generated when
inserting or moving the rotation tool to the joining is about 10 kN
or more. For this reason, the structure of the joining material
that bears this force, and the restraint of the joining material
itself are needed. In the case of a backing plate, depending on its
geometry, it is comparatively easy to fix the body. However, it is
comparatively difficult to fix the lid because the channel winds
and has the complicated geometry.
[0031] Then, it is necessary to temporarily attach the lid to the
body beforehand. Unlike permanent joining, temporary attachment has
narrow joining sections and heat input is not large, and hence, a
conventional welding method is also sufficient. However, it is
preferable to perform the friction stir welding. This is because
cost increase due to a plurality of processes. That is, first, the
rotation tool composed of only a shoulder is inserted into a
joining with being rotated by previously performing the friction
stir welding on the body and the lid. It is necessary to make the
amount of insertion at this time smaller than the amount of
shoulder insertion at the time of performing permanent joining
after this.
[0032] Then, the rotation tool is drawn out and this is given to
several points. Thereby, as for the joining, only surface sections
are joined. After the temporary attachment, the rotation tool is
exchanged and permanent joining is performed. In addition, by
performing joining of only a curve by conventional welding in the
joining of the body and lid of the backing plate, a section where
the friction stir welding is performed becomes only a straight
section. Owing to this, the axial structure of a friction stir
welding apparatus is simplified, and hence, the reduction of
apparatus cost is possible.
[0033] Furthermore, as for the friction stir welding, a starting
point and an ending point of joining are different from those in
other stationary states in regard to a heat input and geometry.
Since the rotation tool is forcibly inserted in the joining at the
starting point, a resistance force that the rotation tool receives
is large, and the heat input also becomes large. It is one of
measures to pierce a hole a little smaller than the pin in an
insertion section of the rotation tool in order to reduce the
resistance force at the starting point. In addition, the hole with
the volume equivalent to the pin is pierced at the ending point, as
described above. Hence, these problems are solvable by making the
starting point or the ending point of the joining in the body,
which is apart from the cooling hole, or a dummy section prepared
separately.
[0034] There are various dimensions of backing plates according as
applications. As an example, a backing plate for a sputtering
system for large-sized flat panel liquid crystal displays has an
area of 1 m.sup.2 or more. In this case, it is preferable to
provide four to five cooling holes each approximately having 50
W.times.5 H mm in a zigzag direction. Thus, in a large-sized
backing plate, since the length of a joining is long, it is
desirable to perform joining with a plurality of rotation tools
simultaneous or with providing a fixed distance between a plurality
of rotation tools in a proceeding direction of the joining, rather
than one position joining at a time with one rotation tool. In
addition, since the axial structure for controlling each rotation
tool is simplified by performing joining through the plurality of
rotation tools moving in the directions that cross mutually, cost
reduction of the joining apparatus can be attained. Either face of
a target can be placed to a cooling plate since it is possible to
correct press forming of deformation after manufacturing, and
subsequently, to finish the target smoothly by grinding and
polishing, but the target may be placed in the side opposite to a
joining face.
[0035] Up to now, products manufactured with using the friction
stir welding are, for example, railroad vehicles, vessels, rocket
fuel tanks, etc. All of these products are made of aluminum.
Although backing plates are made of aluminum or copper, copper
alloys become the main stream because of excellent heat
conductivity in view of thermal efficiency. Hence, in the case of
copper, both a melting point and a strength are higher as compared
with aluminum, when the friction stir welding is performed, it is
necessary to increase temperature of a stirring section to about
700.degree. C. Incidentally, in the case of aluminum, since a
fusing point is low and strength is also low, the temperature is
sufficient at only about 450.degree. C.
[0036] At the time of manufacturing a copper backing plate by the
friction stir welding, several troubles arise since joining
temperature becomes high as described above. These are troubles
caused by the material being copper. First, what is an issue is
that a motor and a spindle that rotate a rotation tool also become
hot due to heat transfer since the temperature of the rotation tool
itself also becomes hot because of high joining temperature.
Although there is also exhaustion of the rotation tool itself,
exhaustion of an apparatus is rather an issue. In order to perform
joining completely, it is not possible to decrease the temperature
of the joining. Therefore, it is necessary to perform joining with
spraying a coolant to the rotation tool, which is rotating, in
order not to make the frictional heat of the rotation tool and
joining transferred to the apparatus. Owing to this, the heat
transfer to the spindle is remarkably suppressed, and hence, the
long life of the apparatus can be achieved.
[0037] In addition, in the case of a large backing plate, joining
length becomes long and a heating value also becomes large. At this
time, heat is also transferred to a table supporting the backing
plate, and hence, the exhaustion of a lubricant of a section
driving a table, and in particular, a circumference moving section
becomes an issue. Then, in order to suppress the heat transfer to
the apparatus side such as a table, it is desirable to perform
joining with placing the backing plate on a heat sink different
from this. Furthermore, in consideration of the above-mentioned
rotation tool life, it is desirable to join the lid, covering one
channel, and the body with one rotation tool without performing
joining in a long distance with one rotation tool and to perform
the next joining after exchanging the rotation tool. Owing to this,
the rotation tool first used is sufficiently cooled while
performing joining with another rotation tool, and hence, the
extension of the rotation tool life is achieved.
[0038] In addition, in the friction stir welding, a burr arises
near a joining as described above. After all of joining is
completed, it is possible to exchange the rotation tool for joining
to the rotation tool for cutting and to remove the burr generated
in the joining. It is better to perform the exchange of these
rotation tools automatically by providing a rotation tool magazine
and constructing a sequence, rather than manual exchange since the
rotation tool has high temperature.
[0039] Thus, it becomes possible to manufacture a backing plate,
which has small heat distortion after joining and has good quality,
by producing the backing plate for sputtering as a cooling plate
with using friction stir welding.
[0040] The present invention is a manufacturing method of a cooling
plate where a target material for sputtering is joined on a backing
plate serving as a cooling plate, the manufacturing method of a
cooling plate characterized in that the cooling plate is
manufactured with the manufacturing method of a cooling plate that
is described above.
BRIEF DESCRIPTION OF THE DRAWINGS
[0041] FIG. 1 is a plan of a backing plate according to the present
invention;
[0042] FIG. 2 is a cross section of the backing plate according to
the present invention shown in FIG. 1;
[0043] FIG. 3 is a plan showing movement of the rotation tool
according to the present invention shown in FIG. 1;
[0044] FIG. 4 is a microphotography of a cross section after the
friction stir welding according to the present invention;
[0045] FIG. 5 is a plan showing the movement of a rotation tool
according to the present invention;
[0046] FIG. 6 is a microphotography of a cross section after
friction stir welding according to the present invention;
[0047] FIG. 7 is a microphotography of a cross section after
friction stir welding according to the present invention;
[0048] FIG. 8 is a sectional view in the case that joining is
performed with providing a projection in a joining of a body and a
lid according to the present invention;
[0049] FIG. 9 is a plan of a backing plate according to the present
invention;
[0050] FIG. 10 is a sectional view of the backing plate according
to the present invention shown in FIG. 9;
[0051] FIG. 11 is a plan of a backing plate according to the
present invention;
[0052] FIG. 12 is a plan of a backing plate according to the
present invention;
[0053] FIG. 13 is a sectional view of the backing plate according
to the present invention shown in FIG. 12;
[0054] FIG. 14 is a sectional view of a backing plate according to
the present invention; and
[0055] FIG. 15 is a plan of a backing plate according to the
present invention.
PREFERRED EMBODIMENTS OF THE INVENTION
Embodiment 1
[0056] FIG. 1 is a schematic front view of a backing plate as a
cooling plate made of oxygen free copper or a copper alloy
containing 5% or less of Zr or Cr. The backing plate consists of a
body 1 and a lid 2. A U-channel 4 is provided in the body 1, the
lid 2 covers the channel 4, and, the lid 2 and channel 4 have the
same plane and zigzag geometry although the lid 2 and channel 4
differ from each other in dimensions of U-shapes. Otherwise,
I-shaped and S-shaped channels or the like are preferable. In
addition, an R section 3 is provided in each corner section of the
lid 2 in order to make the lid 2 easily inserted in the body 1. The
lid 2 has the structure of being received with a step of the body
1, and can receive the force of the rotation tool 6 on the occasion
of the friction stir welding.
[0057] The dimensions of the body 1 are 1500 L.times.1200
W.times.15 D mm. In the case of this FIG. 1, there are five
channels 4 for cooling. If being 1300 L.times.900 W.times.15 D mm,
similarly, four U-channels 4 are provided. In this embodiment,
there are three channels 4 per one meter long. Each channel 4 has
an independent closed path, and an entrance and an exit for a
coolant are provided in both ends of each channel 4 respectively,
and are used after joining. I-shape and S-shape channels are the
same as the U-shape channel. An air vent is provided in an end
section of the lid 2 (not shown). The installation and joining of
the lid 2 become easy by providing the air vent.
[0058] In particular, in this embodiment, since joining is
performed with fitting the lid 2, which covers the groove, into the
groove to the body 1 where the groove with a path as a closed
channel 4 is formed, there is no mutual expansion of matching
sections. Hence, not only good joining can be obtained, but also
there is no excessive joining because the body 1 itself is in one
piece, and hence it is possible to obtain a cooling plate with a
compact thin shape is obtained also in a large area regardless of
an area.
[0059] FIG. 2 is a sectional view near a channel of a backing
plate. A first groove that becomes the channel 4 whose cross
section is rectangular is provided inside the body 1 by machining,
a second groove that has a cross-sectional space larger than the
channel 4 and has a step is formed on the first groove, and the lid
2 is fit in a part of the second groove. At this time, the body 1
and lid 2 have socket and spigot structure, and overlapping width 5
is about 2.5 mm. In addition, the width and height of the channel 3
are about 50 mm and 5 mm respectively, and further, the height of
the lid 2 is 5 mm. Hence, when the lid 2 is fit into the body 1,
both become the same height. Since these shapes or dimensions
change according to types of backing plates, a planar shape of the
body 1 also has a round shape besides a square shape in this way.
Therefore, a penetration bead of a joining does not go into the
channel 6, and hence, normal joining is obtained. Since a bend
arose in the joining side of this backing plate after joining, the
bend was corrected by press formation with a punch having an
I-shaped edge, and thereafter, cutting and grinding were
performed.
[0060] Next, an embodiment of the friction stir welding will be
described. In the friction stir welding, the rotation tool 6
composed of a shoulder section 7 and a pin section 8 is inserted in
joining material with being rotated. Then, the rotation tool 6 is
moved along a joining line to perform joining. In this embodiment,
the diameter of the shoulder section 7 was 15 mm, the maximum
diameter of the pin section 8 was 8 mm, and the rotary direction of
the rotation tool 6 was made to be counterclockwise. In addition,
in the case that the rotation tool 6 inclines at three degrees in
the direction opposite to the traveling direction, and the case
that the rotation tool 6 does not inclines, an experiment of the
former and the latter was performed under the conditions of a
rotation speed of 1300 rpm or 1500 rpm, a joining speed of 270
mm/min or 300 mm/min, and a shift of a centerline of the rotation
tool 6 by 3.0 mm or 1.5 mm from a joining beveling in a direction
opposite to the channel 4 (offset 3.0 mm or 1.5 mm).
[0061] That is, as shown in FIG. 3, joining was performed by
traveling the rotation tool 6 along the joining line so that the
channel might always be located in the left-hand side. In addition,
since a hole 10 is made at a joining end in the case of the
friction stir welding, dummies 9 were provided to let them be end
sections. All the dummies 9 were cut after joining of the lid and
body. What is important here is the relation among the rotary
direction of the rotation tool 6, the channel, and the traveling
direction of the rotation tool 6, and hence, it is also
satisfactory to reverse all the left for all the right, and vice
versa.
[0062] FIG. 4 shows a microphotography of a cross section of a weld
bead. Although a weld bead does not have a defect, a joining
becomes a little low in comparison with other parts since the
rotation tool 6 is inserted a little in a joined material. However,
as described above, a surface of a backing plate needs to be
smooth, and hence, anyway, such a concavity is satisfactory because
of performing the machining of the surface. In addition, although a
part that is equivalent to a concavity of the weld bead that is
released to the outside becomes a burr, this is satisfactory
because of the same reason. However, the amount of machining at
that time was an amount to be machined in the time that was 1/4 or
less in comparison with a conventional welding method. This is
because a cutting step for correcting a bent after joining and
smoothing a surface was shortened sharply since the heat distortion
of the joining by the friction stir welding method is small, that
is, {fraction (1/10)} of that in the case of electron beam welding.
In addition, it is clear that normal joining is obtained without
spilling out the weld bead at the time of joining into the channel
4 since the weld bead are formed in the outside of the lower left
channel 4 as shown in FIG. 4. The joining is performed so that a
concavity may be made by pressing the shoulder 7. Moreover, each of
the start and stop of the rotation tool was performed in a position
apart from the joining.
1 TABLE 1 Number of tests Fraction defective Junction method
(value) (%) Friction stir welding 126 0 Electron beam welding 60
5
[0063] Table 1 shows the result of helium leakage test of the
channel 4 by this method. The leakage test is performed at
1.times.10.sup.-7 Pa, and a material for a current method, that is,
an electron beam welding material was used as a comparison
material. Although, in the case of the friction stir welding
material, the fraction defectives were 0% in the case that the
rotation tool 6 inclines at 2 degrees and the case that it does not
incline and all are accepted, but the fraction defective was high,
that is, 5% in the case of the electron beam welding material. In
this case, with considering repair cost because a leaking section
must be repaired again, a cost merit of the friction stir welding
is very large.
[0064] A target for sputtering can be made by any one of brazing,
friction stir welding, and electron beam joining, and can be placed
in the joining side of the lid 2 or its opposite side, but it is
preferable to place the target in the joining side.
Embodiment 2
[0065] This embodiment relates to the joining of the backing plate
similar to that in FIG. 1, and in particular, a joining example
about the R section 3 will be described. The rotation speed of a
rotation tool, joining speed, and rotation tool geometry are the
same as those in the first embodiment. As shown in FIG. 5, after
first inserting the rotation tool 6 in a position "a", joining was
performed in the path of a.fwdarw.b.fwdarw.c.fwdarw.d under the
above-described conditions, and the end section 10 was made to be
the dummy 9. Next, after inserting the rotation tool 6 in a
position "a" again, joining was performed in the path of
a.fwdarw.e.fwdarw.f .fwdarw.d, and the end section 10 was similarly
treated. What is important at this time is that the rotation tool 6
always turns to the right in the R section 3. When the rotary
direction of the rotation tool is clockwise contrary to this, what
is necessary is just to perform joining so that the rotation tool
may always turn to the left. Although a defect did not arise in a
joining in any cases, a minute defect as shown in FIG. 6 may arise
in the R section if the rotary direction and the turning direction
of the rotation tool become contrary to the above in rare cases.
However, since a defect having this level of size does not
harmfully affect on leak-proof property, this is satisfactory. In
addition, in this embodiment, the other structure and joining
methods are the same as those of the above-described ones.
[0066] As for the joining, in this embodiment, although the R
section 3 is present, it is possible to form the section by
straight lines. Moreover, a weld bead was formed in the outside of
the lower left channel 4 as shown in FIG. 6 without the weld bead
spilling out to the channel 4, and furthermore, its penetration
bead exists in the body. Hence, it is apparent that normal joining
can be obtained.
Embodiment 3
[0067] What are examined in this embodiment are the overlapping
width 5 shown in FIG. 2, and the distance (offset) apart from a
joining beveling of the center-line of the rotation tool 6 in a
direction opposite to the channel 4. The geometry of the rotation
tool that is used is the same as that in the first and second
embodiments. In addition, joining conditions are the
2TABLE 2 Maximum Overlapping radius of State of width w (mm) Offset
x (mm) W + x (mm) pin r (mm) joining 2.5 0 2.5 4.0 Collapse 2.5 1
3.5 4.0 Collapse 2.5 1.5 4.0 4.0 Good 1 0 1.0 4.0 Collapse 2 0 2.0
4.0 Collapse 3 0 3.0 4.0 Collapse 4 0 4.0 4.0 Good
[0068] As shown in Table 2, in order to obtain normal joining, it
is preferable that w+x.gtoreq.r. That is, it is required for that
the weld bead that is formed is in the outside of the channel.
Moreover, a reason why the sample was not successful in joining is
that the lid was collapsed due to the load received from the
rotation tool.
Embodiment 4
[0069] In this embodiment, the temporary attachment of the lid was
examined. A microphotography of the cross section of the temporary
attachment section is shown in FIG. 7. The temporary attachment was
performed with using a rotation tool, which did not have a pin
section and had a shoulder with 13 mm of diameter, at a rotation
speed of the rotation tool of 1500 rpm at a rate of 12 temporary
attachments per lid. As shown in FIG. 7, the temporary attachment
section is joined at a depth of about 2 mm. Next, permanent joining
was performed under the same conditions as those in the first
embodiment. In consequence, the lid was firmly fixed by the
temporary attachment and the permanent joining was performed with
sufficient accuracy. Thus, it turns out that, in the friction stir
welding, firm fixation of a joining material is important and
temporary attachment can be surely and easily performed without
using another method.
Embodiment 5
[0070] This embodiment is the case that a projection with locally
thick structure is present near a joining of a body and a lid. FIG.
8 shows an expanded sectional view of the vicinity of the joining
according to the embodiment. It is the characteristic that the
above-described thickness of the body and lid 2 is locally thick,
and other dimensions etc. are not changed from those in the first
embodiment. Here, it is desirable that the width of the thick
convexities 11 and 12 is almost equivalent to or a little larger
than the diameter of the shoulder 7 of the above-described rotation
tool 6. In addition, it is desirable that the thick convexities 11
and 12 are higher than other parts by 0.3 to 2 mm. After joining,
the joining height does not become low like that in the first
embodiment, and hence, it is possible to simplify a subsequent
surface cutting step. In addition, in this embodiment, the other
structure and joining methods were the same as those in the
above.
Embodiment 6
[0071] FIG. 9 is a plan of a backing plate where a channel has
I-shaped structure. In addition, FIG. 10 is a sectional view of the
vicinity of the channel. The body 1 and a lid 2 are made of oxygen
free copper. The dimensions of the body 1 were 1200 L.times.900
W.times.15 D mm, and dimensions of five channels 4 are 40 W.times.5
H mm respectively. Moreover, in the R section 3, R=3 mm and
overlapping width 5 is 5 mm. In addition, joining conditions, i.e.,
rotation tool geometry, rotation speed, and joining speed are the
same as those in the first embodiment, and an offset is made to be
zero. In addition, the rotation tool 6 is inclined at 2 degrees in
the direction opposite to the traveling direction. In addition, in
this embodiment, the other structure and joining methods are the
same as those of the above-described ones.
[0072] In this embodiment, in order to make the above-described
channel 4 airtight, the joining of the lid 2 was joined with using
two rotation tools 6. First, the lid 2 is temporarily attached to
the body 1 with the rotation tools constituted only by a shoulder
respectively. Next, the lid 2 and body 1 were joined along joining
lines a-a' and b-b' with using the two rotation tools 6. Since the
distance of joining lines a-a' and b-b' is narrow, that is, about
50 mm, the two rotation tools 6 keep a gap (L) so that they may not
interfere mutually. At this time, L is about 200 mm. Next, joining
was performed along the joining lines c-c', d-d', e-e', and f-f'
one by one. Next, joining was performed along the joining lines a-j
and a'-j' simultaneously. At this time, R=3 mm in the R section 3,
and the diameter of the pin was 8 mm, and the R section 3 was
joined along two joining lines that were orthogonal to each other.
Hence, it becomes possible to perform the above-described joining
only in linear joining, and therefore, it becomes possible to
simplify the structure of the above-described joining apparatus and
to reduce the cost of the apparatus. In addition, also in this
embodiment, dummies 9 were used for all of starting points and
ending points of joining, and the dummies 9 were cut after the
completion of joining.
[0073] By the way, in this embodiment, since two rotation tools
were used for simultaneously performing joining, the frictional
heat generated in the rotation tools and joining was large. For
this reason, joining was tried with flowing cooling water in the
vicinity of a joining, the whole backing plate and the channel.
Although joining conditions were almost equivalent to the case
where no cooling water was supplied, the rotation speed of rotation
tools was set to 2000 rpm. Owing to this, the surface temperature
of a part of the body 1 which was separated from a joining by about
4 mm was 100.degree. C. or less, which was a half of heat
distortion after joining in the case of no water-cooling. Hence,
correction of distortion after joining becomes unnecessary. In
addition, since the temperature of a joining was about 700.degree.
C., water was boiled at the part, but there was no penetration of
moisture into the joining, and hence, there was neither generation
of a defect nor deterioration of mechanical characteristics.
Embodiment 7
[0074] FIG. 11 is a plan of a backing plate that has reverse
S-shaped channels 4. The body 1 and a lid 2 are made of oxygen free
copper. Although the planar shapes of the channel 4 and lid 2 are
the same, dimensions differ a little. The lid 2 is integrated. The
dimensions of the body 1 are 1200 L.times.900 W.times.15 D mm, and
dimensions of two or four channels 4 are 40 W .times.5 H mm
respectively. Moreover, in the R section 3, R =15 mm and
overlapping width 5 is 5 mm. In addition, joining conditions, i.e.,
rotation tool geometry, rotation speed, and joining speed were the
same as those in the first embodiment, and an offset was made to be
zero. In addition, the rotation tool 6 was inclined at 2 degrees in
the direction opposite to the traveling direction. In this
embodiment, TIG welding was used for temporarily joining the R
section. First, the lid 2 was fit in the body 1, and a section (TIG
section) shown by thick lines in FIG. 11 was joined by the TIG
welding. Next, the friction stir welding of a joining to be joined
was performed with using the rotation tool 6. At this time, since a
locus of the rotation tool became only in the vertical direction,
for example, on this paper, a joining apparatus became an apparatus
that was simplified by having control only in the vertical
direction on this paper. Hence, it is possible to achieve cost
reduction of a facility.
Embodiment 8
[0075] FIG. 12 is a schematic diagram of a backing plate. The body
1 and a lid 2 are made of oxygen free copper. In addition, FIG. 13
is a sectional view of the vicinity of the joining of FIG. 12.
Geometry, joining conditions, etc. of the body 1 are the same as
those in the seventh embodiment. Moreover, the lid 2 has an air
vent in an end section, and is integrated in a U-shape. In this
embodiment, life extension of the rotation tool 6 was examined. The
body 1 was fixed on the heat sink 14 that had a channel through
which a coolant circulated inside. In addition, there was a cooling
system 15, which cooled the rotation tool 6, near the rotation tool
6, and which sprayed a cooling gas 16 on the rotation tool 6. It
turns out that the surface temperature of the rotation tool 6
increases to about 400.degree. C. during joining. If the motor or
spindle rotating the rotation tool 6 is exposed to such high
temperature, it will malfunction. When a motor with 5 kW of output
was used, the temperature of the spindle rose due to heat transfer
from the rotation tool 6, and when there was no cooling system 15,
a safety device was often activated to stop the motor.
[0076] An inert gas besides air is also sufficient as the cooling
gas 16, and a flow rate was 10 L/min. Since the surface temperature
of the rotation tool 6 became about 150.degree. C. by using the
cooling system 15, it became possible to prevent the damage of the
rotation tool 6. In addition, if moisture etc. remains in the
channel 4 after manufacturing in regard to a backing plate, there
is a possibility of surface contamination arising because the
moisture adheres to a surface used as a product at the time of
subsequent conveyance etc. Hence, there is a case that underwater
friction stir welding is not suitable. In this case, another heat
sink 14 different from this was used as a method for distortion
reduction. Since the 20.degree. C. coolant always circulated in the
heat sink 14, it was possible to lessen heat distortion by the
friction stir welding similarly to that by the underwater friction
stir welding. In addition, all joining was performed by NC control
in this embodiment. Junction was performed with using one rotation
tool per channel.
[0077] The procedure of joining of a left lid in FIG. 12 is as
follows. The rotation tool was first moved in order of
d.fwdarw.f.fwdarw.e.fwdarw.- a.fwdarw.b.fwdarw.c.fwdarw.d under the
above-described joining conditions after inserting the rotation
tool 6 in a dummy 9, and the end section 10 was set on the dummy 9.
The tracing of these rotation tools 6 was performed by using an NC
controller not shown. Next, the rotation tool was exchanged to a
rotation tool 6 reserved in a tool magazine 17. Then, the following
lid was joined. Since a rotation tool is cooled within the rotation
tool magazine 17 by exchanging a rotation tool every lid and
performing joining, the load of the rotation tool is reduced. In a
phase of the completion of joining of all lids, next, the rotation
tool was exchanged to a tool 18 for cutting in the tool magazine
17, and the processed face of the backing plate was smoothed. Such
a series of processes was fully automated by programming a
sequence.
[0078] A conventional manufacturing method has complicated steps as
follows:
[0079] (1) Washing of a backing plate (because it is necessary to
remove contamination in order to perform joining in vacuum in
subsequent electron beam welding),
[0080] (2) Fixation of a backing plate to a jig for electron beam
welding,
[0081] (3) Vacuum pumping,
[0082] (4) Electron beam welding,
[0083] (5) Vacuum leakage test and removal from the jig,
[0084] (6) Heat treatment for removal of heat distortion, and
[0085] (7) Smoothing by cutting.
[0086] According to a method like the present invention, it is
possible to perform a series of processes like these only by one
apparatus by exchanging a tool, and it is also unnecessary to
perform heat treatment for removal of heat distortion. Hence, it is
possible to understand that welding is a machining process that is
a direct extension of machining, productivity is high, and sharp
reduction of manufacturing cost can be achieved.
Embodiment 9
[0087] FIG. 14 is a sectional view of a lid and a backing plate,
the lid whose geometry is the same as that of a backing plate. The
body 1 and a lid 2 are made of oxygen free copper. The thickness of
the body 1 is 10 mm, and the channel 4 is at a width of 30 mm, a
height of 5 mm, and a space of 15 mm. In addition, the lid 2 covers
all the channels that are more than one, and joining is performed
by lap joint of the lid 2 and the body 1. The geometry of the
channel is the same as that in the above-described embodiments, and
the channel having a closed path is used. Therefore, one air vent
is provided in an edge of each channel. As for the geometry of the
rotation tool, a diameter of the shoulder section 7 is 14 mm, and
the maximum diameter of the pin section 8 is 8 mm and length is 7
mm. Rotation speed and joining speed were the same as those in the
first embodiment, and a middle section of adjacent channels was
joined. In addition, the rotation tool 6 was inclined at 2 degrees
in the direction opposite to the traveling direction.
[0088] In this embodiment, although a joining form was not butt
joint but was lap joint, no defect was generated in joining parts,
and heat deformation at the time of joining was also small, and
hence this was manufacturable. Thus, a backing plate can be
manufactured according to this process regardless of joint
geometry. In this embodiment, the perimeter of the backing plate
and all the spaces between channels were joined according to the
planar surface geometry of the channels. Junction using a dummy can
be performed similarly. The press forming, grinding, and polishing
after joining as well as the above described can be performed.
Embodiment 10
[0089] FIG. 15 is a plan at the time of the channel 4 being formed
in an oblong M-shape in the long backing plate. The body 1 and a
lid 2 are made of oxygen free copper. The dimensions of the body 1
are 2000 L.times.300 W.times.15 D mm, and the channel 4 is at a
width of 30 mm, a height of 5 mm, and a space of 15 mm. In
addition, the lid 2 has the same planar surface geometry as the
channel, length and width of the lid 2 are formed a little largely
than those of the channel 4, and a cross section thereof is the
same as that of the first embodiment. The joining of the lid 2 and
the body 1 is butt joint. The geometry of the channel is the same
as that in the above-described embodiments, and the channel having
a closed path is used. Moreover, one air vent is provided in an
edge of a channel. As for the geometry of the rotation tool, a
diameter of the shoulder section 7 is 14 mm, and the maximum
diameter of the pin section 8 is 8 mm and length is 7 mm. Rotation
speed and joining speed were the same as those in the first
embodiment, and a middle section of adjacent channels was joined.
In addition, the rotation tool 6 was inclined at 2 degrees in the
direction opposite to the traveling direction.
[0090] In this embodiment, a joining form was the same as the butt
joint in the above described, no defect was generated in joining
parts, and heat deformation at the time of joining was also small,
and hence this was manufacturable. An end section of a weld bead
was provided except the joining. In addition, joining using a dummy
can be performed similarly as described above. The press forming,
grinding, and polishing after joining as well as the above
described can be performed.
[0091] According to the present invention, it is possible to obtain
a cooling plate that has normal joining by friction stir welding.
In consequence, it is possible to obtain a backing plate having
high cooling effectiveness, small heat distortion, a thin shape,
large-area geometry, and good quality.
* * * * *