U.S. patent application number 09/930778 was filed with the patent office on 2002-06-06 for optical element mount comprising an optical element holding frame.
Invention is credited to Fischer, Juergen, Hummel, Wolfgang, Rau, Johannes.
Application Number | 20020067555 09/930778 |
Document ID | / |
Family ID | 7652400 |
Filed Date | 2002-06-06 |
United States Patent
Application |
20020067555 |
Kind Code |
A1 |
Rau, Johannes ; et
al. |
June 6, 2002 |
Optical element mount comprising an optical element holding
frame
Abstract
An adjusting optical element mount (1) serves for the position
of two components (2a, 2b) in relation to one another, in
particular of two carrier elements for optical elements, such as
mirrors or lenses, in particular as an axial and/or angle
manipulator for lithography lenses. The components (2a, 2b) can be
adjusted in relation to one another via the action of force (F, T).
Each of the components (2a, 2b) has at least three hinges (4a, 4b,
4c, 4d, 5a, 5b, 5c, 5d). Each of the hinges (4a, 4b, 4c, 4d) of one
component (2a) is connected in each case to a corresponding hinge
(5a, 5b, 5c, 5d) of the respectively other component (2b) to form a
pair of hinges (7a, 7b, 7c, 7d) via a lever element (6a, 6b, 6c,
6d) in each case. Each of the pairs of hinges (7a, 7b, 7c, 7d) is
connected in each case to at least one lever (8a, 8b, 8c, 8d; 13,
13') of at least one of the adjacent pairs of hinges (7a, 7b, 7c,
7d) via the at least one lever (8a, 8b, 8c, 8d; 13, 13')and at
least one further hinge (9, 9'; 9a, 9b; 9a', 9b') in each case.
Inventors: |
Rau, Johannes; (Gerstetten,
DE) ; Hummel, Wolfgang; (Schwaebisch Gmuend, DE)
; Fischer, Juergen; (Heidenheim, DE) |
Correspondence
Address: |
WELLS ST. JOHN P.S.
601 W. FIRST
SUITE 1300
SPOKANE
WA
99201-3828
US
|
Family ID: |
7652400 |
Appl. No.: |
09/930778 |
Filed: |
August 14, 2001 |
Current U.S.
Class: |
359/812 ;
359/811; 359/813 |
Current CPC
Class: |
G02B 7/023 20130101;
G02B 7/1822 20130101; G02B 7/003 20130101 |
Class at
Publication: |
359/812 ;
359/811; 359/813 |
International
Class: |
G02B 007/02 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 14, 2000 |
DE |
100 39 712.3 |
Claims
1. An optical element mount comprising an optical element holding
frame, a mount stack frame, comprising three or more levers
connected by a hinge to said optical element holding frame, by
another hinge to said mount stack frame, by a third hinge to
another of said levers.
2. The optical element mount as claimed in claim 1, wherein each of
the hinges of said optical element holding frame being connected to
the corresponding hinge, of the said mount stack frame by a lever
to form a pair of hinges, each of the pairs of hinges being
connected to at least one lever of one of the adjacent pairs of
hinges by at least one lever and at least one of the said third
hinge.
3. The optical element mount as claimed in claim 1, wherein an
action of force is provided on at least one lever-like extension of
at least one of the levers.
4. The optical element mount as claimed in claim 1, wherein the
said third hinges are connected to one another by a spindle.
5. The optical element mount as claimed in claim 3, wherein a
torque is acting on the spindle as a torsional moment.
6. The optical element mount as claimed in claim 1, comprising
flexure joints.
7. The optical element mount as claimed in claim 3, wherein said
pairs of hinges, said levers, said optical element holding frame,
said mount stack frame, and said lever-like extensions are of at
least partially monolithic design.
8. The optical element mount as claimed in claim 1, wherein the
action of force is provided by a single actuator.
9. The optical element mount as claimed in claim 7, wherein the
said actuator is arranged at least more or less in a region of an
optical axis of the optical element mount.
10. The optical element mount as claimed in claim 2, wherein the
hinges of each of the pairs of hinges are arranged such that the
said hinges being located on said optical element holding frame,
are arranged on that side of the pair of hinges which is directed
toward the at least one third hinge, and the hinges of the
respective pair of hinges, being located on said mount stack frame,
are arranged on that side of the pair of hinges which is directed
away from the at least one third hinge.
11. The optical element mount as claimed in claim 2, wherein the
hinges of each of the pairs of hinges are arranged such that the
said hinges being located on said mount stack frame, are arranged
on that side of the pair of hinges which is directed toward the at
least one third hinge, and the hinges of the respective pair of
hinges, being located on said optical element holding frame, are
arranged on that side of the pair of hinges which is directed away
from the at least one third hinge.
12. The optical element mount as claimed in claim 2, wherein the
hinges of each of the pairs of hinges are arranged such that the
said hinges being located on said optical element holding frame,
are arranged on the same side of the pair of hinges, in respect of
the at least one third hinges, and the hinges of the respective
pair of hinges, being located on said mount stack frame, are
arranged on the other side of the pair of hinges, in respect of the
at least one third hinge.
13. The optical element mount as claimed in claim 2, wherein the
hinges of each of the pairs of hinges are arranged such that the
said hinges being located on said mount stack frame, are arranged
on the same side of the pair of hinges, in respect of the at least
one third hinges, and the hinges of the respective pair of hinges,
being located on said optical element holding frame, are arranged
on the other side of the pair of hinges, in respect of the at least
one third hinge.
14. The optical element mount as claimed in claim 1, wherein it is
designed as a Z-manipulator for the parallel adjustment of the
axial spacing between the optical element holding frame and the
mount stack frame.
15. The optical element mount as claimed in claim 1, wherein the
levers are designed to be of the same length.
16. The optical element mount as claimed in claim 1, wherein it is
designed as a tilting-type manipulator for adjusting the angle
position of the optical element holding frame and the mount stack
frame in relation to one another.
17. The optical element mount as claimed in claim 16, wherein the
levers are coordinated with one another in terms of length such
that one tilting axis of the tilting-type manipulator intersects
the Z-axis.
18. An optical arrangement comprising at least two optical elements
arranged in at least two optical element mounts according to claim
1, having an optical axis, the devices being arranged in a
positional relationship such that a second of said devices is
rotated about said optical axis relatively to a first of said
devices by an angle substantially different from 0.degree. and
180.degree..
19. The optical arrangement as claimed in claim 18, wherein the at
least one of the optical element mounts is arranged in a state in
which it has been rotated about the optical axis at an angle of
90.degree..
Description
BACKGROUND OF THE INVENTION
[0001] The invention relates to an optical element mount comprising
an optical element holding frame and a mount stack.
[0002] U.S. Pat. No. 5,822,133 discloses a optical element mount
which displaces two carrier elements for lenses axially in relation
to one another along an optical axis, for improving the imaging
quality in an optical lens. For this purpose, the above mentioned
document uses a plurality of hydraulic actuators which can be moved
predominantly via a fluid. The document describes arrangements in
which it is possible to achieve small manipulations in the axial
direction, the so called "Z-direction", via actuators arranged
symmetrically in relation to the optical axis. For this purpose,
individual configurations of the invention provide three mechanisms
which are distributed symmetrically about the optical axis of the
respective lenses, and each comprise an actuator which can be
actuated hydraulically or piezzoelectrically, and corresponding
lever arrangements which may be produced from monolithically in the
form of flexure hinges. This construction makes it possible to
realize a Z-manipulation of the lens.
[0003] The use of three actuators requires a very high level of
regulating outlay. Moreover, integrating the actuators between the
two components results in the disadvantage that the overall
structural unit is relatively large and, in particular in order to
leave free sufficiently large central openings for the
corresponding lenses, requires a very large amount of space in the
axial direction and in the radial direction. As a result, it is
also the case that the design will only have a low level of
rigidity.
[0004] It is also known, in particular from the field of
photography, to realize the axial displacement of lenses or other
optical elements in relation to one another in that at least one of
the carrier elements for one of the optical lenses or the like is
placed in a threaded element, and it is thus possible to vary the
spacings between the individual components via rotation of the
individual components in relation to one another.
[0005] On account of the friction during such an adjustment of the
spacing between two components in relation to one another, and a
possibly occurring slip/stick effect, this type of manipulation can
only be used when there is no need for any high levels of accuracy.
The use of high-performance lenses, for example in the field of
microlithography, is thus ruled out.
[0006] The object of the invention is to provide a optical element
mount for an optical element mount comprising an optical element
holding frame and a mount stack allowing with a very compact and
space-saving construction, very precise adjustment of the position
of the two components in relation to one another and being of very
rigid configuration.
SUMMARY OF THE INVENTION
[0007] This object is achieved according to the invention by the
features specified in claim 1.
[0008] Since each of the components has the at least three hinges
which are connected to respectively corresponding hinges of the
respectively other component via a lever element, it is possible to
realize a very compact construction. Moreover, in this case, only
at least six hinges and at least three lever elements are necessary
in order to connect the two components in the axial direction. With
an appropriate selection of the hinges, in this case it is possible
to utilize, for example, very rigid solid-body hinges, this
construction may be realized, on the one hand, in a very
space-saving manner in the axial direction and, on the other hand,
in very rigid form.
[0009] The lever elements of the pairs of hinges are connected to
at least one adjacent lever of at least one of the adjacent pairs
of hinges via at least one lever and at least one further hinge in
each case. By virtue of this connection, the individual pairs of
hinges correspond directly to one another.
[0010] For example with four pairs of hinges and the same lengths
for the lever elements and the levers, as is the case, for example,
with the pairs of hinges arranged in the manner of a square, in
which case the further hinges are then displaced some way inward in
each case in relation to the theoretical side edges of the square,
it is possible to realize a very uniform movement. The optical
element mount may then be activated via the at least two levers,
which may be connected to one another in turn and thus provide the
possibility of it being possible for the optical element mount, in
a very favorable configuration, to be operated by a single
actuator.
[0011] In this case, depending on the amount of space present, it
is possible for the levers to project radially to the corresponding
extent beyond the structural unit, with the result that, by virtue
of the very long levers, even if only a comparatively small amount
of force is available, very rigid configuration of the hinges,
which may be realized for example as flexure hinges, is possible
since the forces acting on the lever elements are correspondingly
reinforced by the length of the levers. The small angle of rotation
of the individual levers and lever elements thus results in very
good linearity of the desired movement in conjunction with a very
small lateral movement of the components, said movement being
caused by the lever elements of the individual pairs of hinges.
[0012] This results in the very compact and straightforward
construction which, on account of the very long levers and of the
associated possibility of the corresponding hinges being of very
rigid configuration, permits a very rigid configuration of the
optical element mount as a whole. This, in turn, results in very
advantageous properties on account of the consequently very high
eigenfrequency of the optical element mount.
BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Preferred embodiments of the invention are described below
with reference to the following accompanying drawings.
[0014] Advantageous configurations of the optical element mount can
be gathered from the subclaims and the exemplary embodiments
illustrated hereinbelow with reference to the drawings, in
which:
[0015] FIG. 1 shows a three-dimensional illustration of an optical
element mount for adjusting the position of two components in
relation to one another;
[0016] FIG. 2 shows a plan view of the optical element mount
according to figure 1;
[0017] FIG. 3 shows a side view of the optical element mount
according to figure 1;
[0018] FIG. 4 shows a side view of the optical element mount, in a
manner analogous to FIG. 3, in an alternative embodiment;
[0019] FIG. 5 shows a side view of the optical element mount, in a
manner analogous to FIG. 3, in an embodiment for introducing a
torque with an additional lever element;
[0020] FIG. 6 shows a plan view of the optical element mount
according to the arrow VI in FIG. 5;
[0021] FIG. 7 shows a three-dimensional illustration of an
embodiment of the optical element mount which functions in a manner
analogous to FIG. 1;
[0022] FIG. 8 shows a basic schematic illustration of a combination
of three optical element mounts;
[0023] FIG. 9 shows a schematic illustration of an embodiment of
the optical element mount with three pairs of hinges;
[0024] FIG. 10 shows a schematic illustration of an alternative
embodiment of the optical element mount with three pairs of hinges;
and
[0025] FIG. 11 shows a schematic illustration of a further
embodiment of the optical element mount with numerous pairs of
hinges.
BRIEF DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0026] FIG. 1 shows an optical element mount 1 with means for
adjusting the position of two components 2a, 2b in relation to one
another. The components 2a, 2b may be carrier elements for optical
arrangements, for example mirrors or lenses, or a carrier element
for optical arrangements and a fixed base element. In the
embodiment illustrated the components 2a, 2b each have a central
bore 3. They could be intended as carrier elements for lenses.
[0027] The optical element mount 1 is intended to serve as an axial
and/or angle manipulator for micro lithography lenses. It depends
on the precise embodiment and on the type of force acting for
adjustment purposes, in particular, as to whether the latter acts
as a force or a torque, or the optical element mount serves for
adjusting the axial spacing between the two components 2a, 2b, that
is to say as an axial or Z manipulator, or is used as an angle
manipulator or tilting-type manipulator for adjusting the angle
position of the two components 2a, 2b in relation to one another.
This is explained herein below in detail again.
[0028] Some embodiments have in common the fact that each of the
two components 2a, 2b have in each case four hinges 4a, 4b, 4c, 4d
and 5a, 5b, 5c, 5d, respectively. Each of the hinges 4a, 4b, 4c, 4d
of one component 2a is connected to the respectively corresponding
hinge 5a, 5b, 5c, 5d of the respectively other component 2b via a
lever or lever element 6a, 6b, 6c, 6d. This combination of the
respectively two hinges 4a and 5a, 4b and 5b, 4c and 5c, 4d and 5d
with the respective lever element 6a, 6b, 6c, 6d produces a pair of
hinges 7a, 7b, 7c, 7d in each case.
[0029] Each of these pairs of hinges 7a, 7b, 7c, 7d is connected to
a respectively adjacent pair of hinges 7a, 7b, 7c, 7d via at least
one lever 8a, 8b, 8c, 8d and at least one further hinge 9, 9' in
each case.
[0030] The exemplary embodiment illustrated in FIG. 1 concerns an
optical element mount 1 which is configured as a Z manipulator and
is actuated via the action of force on the levers 8a, 8b, 8c, 8d.
This force acts via two lever-like extensions 10, 10' of the levers
8a and 8d, which come together at a point of connection 11. A force
F then acts at the point of connection 11 of the lever-like
extensions 10, 10' and is transmitted to the levers 8a and 8d by
the lever-like extensions 10, 10'. Via the further hinges 9, 9',
the levers 8b, 8c also undergo movement caused by the force F.
Since the levers 8a, 8b, 8c, 8d are connected in each case to the
corresponding lever elements 6a, 6b, 6c, 6d, it is also the case
here that the lever elements 6a, 6b, 6c, 6d are deflected by the
force F. On account of the corresponding arrangement of the hinges
4a, 4b, 4c, 4d and 5a, 5b, 5c, 5d on the respective component 2a,
2b, the two components 2a, 2b then move in relation to one
another.
[0031] If the lever elements 6a, 6b, 6c, 6d and, if appropriate,
also the lever-like extensions 10, 10' are at least more or less of
exactly the same length as one another, this gives ideal
transmission ratios and, in the case of a Z manipulator, precise
parallel movement.
[0032] In the exemplary embodiment illustrated in FIG. 1, this
movement will cause at least more or less parallel movement of the
two components 2a, 2b in relation to one another in the axial
direction. The precise mechanism and the associated possibilities
of adjusting the position of the two components 2a, 2b in relation
to one another are explained again in more detail further on, in
particular in relation to FIGS. 3 to 5.
[0033] FIG. 2 shows a plan view, according to the arrow II in FIG.
1, of the optical element mount 1 for adjusting the axial position
of the two components 2a, 2b in relation to one another. In this
case, FIG. 2 shows a construction which is ideal for the
functioning of the optical element mount 1, and in which the hinges
4a, 5a, the further hinge 9 and the point of connection 11 as well
as the hinges 4d, 5d, the further hinge 9' and the point of
connection 11 are respectively arranged in alignment. By the action
of force at the point of connection 11, it is thus possible to
achieve ideal activation of the optical element mount 1. The
adjustment of the position of the two components 2a, 2b in relation
to one another may thus take place via a single actuator 12 (only
indicated here in basic form), which applies the force F and may be
configured, for example, as an electromagnetic element, hydraulic
element or as a piezzoelement.
[0034] The optical element mount 1 is configured with flexure
hinges as hinges 4a, 4b, 4c, 4d and 5a, 5b, 5c, 5d and 9 and 9'.
This makes it possible for the optical element mount 1 as a whole,
with the exception of the point of connection 11 in the region of
the lever-like extensions 10, 10', to be of monolithic
configuration. This means that the entire optical element mount 1
may be produced from a single part, a recommended production
process here being a combination of machining by cutting and by
erosion. The comparatively long lever-like extensions 10, 10' make
it possible to realize a comparatively large transmission ratio of
the movement of the point of connection 11 or of the actuator 12 to
the movement of the individual hinges 4a, 4b, 4c, 4d and 5a, 5b,
5c, 5d. This means, first of all, that, via the comparatively long
distance and a relatively small force F at the point of connection
11, it is possible to realize a small movement of the individual
hinges 4a, 4b, 4c, 4d and 5a, 5b, 5c, 5d of the respective
components 2a, 2b in relation to one another, which, in turn, makes
it possible to improve the accuracy of the movement of the two
components 2a, 2b in relation to one another with respect to the
resolution or accuracy which can be achieved for the movement of
the actuator 12 applying the force F at the point of the connection
11. Moreover, it is therefore possible for the hinges 4a, 4b, 4c,
4d; 5a, 5b, 5c, 5d and 9, 9', configured as flexure hinges, to be a
very rigid configuration since, on account of the comparatively
long lever length of the lever-like extensions 10, 10', it is
sufficient to have a comparatively small force F at the point of
connection 11 in order to move the very rigid flexure hinges. This,
in turn, makes it possible for the optical element mount 1 as a
whole to be of very rigid configuration, and also makes it possible
to realize a correspondingly high eigenfrequency of the optical
element mount 1. A possibly occurring minimal change in position of
the two components 2a, 2b in relation to one another, by the
external action of force and undesired oscillations, may thus be
reduced.
[0035] The very long possible configuration of the lever-like
extensions 10, 10' produces a very small angle of rotation of the
hinges over a given distance of the actuator. As a result, the
desired Z movement, which is described by the sine of this angle of
rotation, thus corresponds more or less to the angle of rotation
itself. The undesired movement in the direction transverse thereto
is described by the cosine and, under the above mentioned
conditions, it thus remains very small.
[0036] In addition to the lever-like extensions 10, 10' being
respectively arranged in alignment with the hinges 4a, 5a and 9 and
4d, 5d and 9', this arrangement being illustrated here, it is also,
of course, conceivable to have other embodiments. The lever-like
extensions 10, 10' may then be connected via a further transverse
lever or the like (not illustrated). However, this involves the
acceptance of additional bending movements or the like, which may
possibly reduce the accuracy of the optical element mount which it
is possible to achieve. It would also be conceivable, in principle,
to arrange, on each of the lever-like extensions 10, 10', a
dedicated actuator 12 for producing the necessary force F. However,
the construction with just a single actuator, which acts at a point
of connection 11 or, as appropriate, also indirectly on this point
of connection 11 via further lever elements, eliminates the
regulating outlay between a plurality of actuators. Space is saved,
and the regulation/control of the optical element mount 1 is
simplified, by the use of just a single actuator 12.
[0037] In addition to the monolithic or at least partly monolithic
construction of the optical element mount 1 which has been
mentioned here, a partially monolithic configuration of the optical
element mount 1 is also conceivable, so that said optical element
mount could be assembled, for example, from at least two
monolithically produced parts. Moreover, a variation in the
position of the individual pairs of hinges 7a, 7b, 7c, 7d in
relation to one another and the profile of the lever-like
extensions 10, 10' make it possible to achieve an arrangement in
which the central opening 3 may be of correspondingly larger design
if the optical elements used, for example lenses, render this
necessary. On account of the rigidity which has to be achieved,
with already comparatively small flexure hinges, this does not
constitute any problem. On the other hand, if use is made of
optical elements which act as reflectors, that is to say, for
example, mirror elements or the like, it is possible to dispense
with the central opening 3 altogether, which allows additional
flexibility in terms of the arrangement of the hinges 4a, 4b, 4c,
4d and 5a, 5b, 5c, 5d and of the levers 8a, 8b, 8c, 8d.
[0038] FIG. 3, then, shows the optical element mount 1 as a Z
manipulator in a side view according to the arrow III in FIG. 2.
The individual elements here are located, in part, congruently one
behind the other, so that it is only the elements which can be seen
in each case which are designated in FIG. 3, and in the following
figures, although the construction which can be seen in the
illustration is present in double form.
[0039] In FIG. 3, the optical element mount 1 serves for the Z
manipulation of the two components 2a, 2b. Acting at point of
connection 11 is the force F, which, in the exemplary embodiment
illustrated, deflects the lever-like extension 10 downward. The
force F, or at least one of the force components thereof, acts in
the direction of the desired manipulation.
[0040] By virtue of the force F, then, as has already been
mentioned, the lever-like extension 10 is thus deflected downward
according to the arrow A. This causes a likewise downwardly
directed deflection of the lever 8a according to the arrow B. The
rotation, caused by the lever 8a, of the lever element 6a and the
lever 8a about the hinge 5a results in the hinge 4a moving upward
according to the arrow C. At the same time, the lever 8b is
likewise drawn downward according to the arrow D via the further
hinge 9. This too results in the rotation of the lever 8b and of
the lever element 6b about the hinge 5b. Accordingly, the hinge 4b
is moved upward according to the arrow E. The action of the force F
on the point of connection 11 in the direction illustrated here
thus results in the two components 2a, 2b moving relative to one
another. In the exemplary embodiment illustrated here, this
relative movement takes place as the two components 2a, 2b moving
away from one another in parallel. Of course, with a conversely
acting force F, it is also possible for the two components to be
moved toward one another.
[0041] In FIG. 4, it is possible to see a basically comparable side
view of the optical element mount 1 embodied as a tilting-type or
angle manipulator. All that has been changed here is the
arrangement of the hinges 4b and 5b in relation to one another.
This also applies, of course, to the hinges 4c and 5c, which cannot
be seen here and are arranged congruently behind the hinges 4b and
5b. In this case, in respect of the further hinge 9, the hinges 4a,
4b which are to be assigned to the component 2a, are arranged in
the same direction in each case in relation to the hinges 5a, 5b,
which are assigned to the component 2b. This means that in relation
to FIG. 3, in which the hinges assigned to the component 2a are
arranged on the outside in each case in respect of the further
hinge 9, the hinges 4a, 4b in FIG. 4 are arranged to the left in
each case.
[0042] With the same functioning, that is to say the action of
force on the point of connection 11 from above, the result is thus
also, once again, a deflection of the lever-like extension 10 in
the downward direction according to the arrow A. This too, in turn,
causes a deflection of the lever 8a in the downward direction,
which, in the manner which has already been described above, causes
a deflection of the hinge 4a in the upward direction according to
the arrow C. It is also the case that the lever element 8b, in a
manner analogous to the movement explained in relation to FIG. 3,
is deflected downward according to the arrow D. The different
arrangement of the hinges 4b, 5b of the pair of hinges 7b here,
however, results in a rotation of the lever 8b and of the lever
element 6b about the hinge 5b such that, in this case, the hinge 4b
is deflected downward according to the arrow G.
[0043] The action of force on the point of connection 11 in the
case of that arrangement of the hinges 4b, 5b of the pair of hinges
7b which is illustrated in FIG. 4 thus results in a tilting
movement or angle manipulation of the two components 2a, 2b in
relation to one another.
[0044] FIG. 5 shows a further possible way of activating such a
optical element mount 1 for manipulating the two components 2a, 2b
by means of a torque T in relation to one another. In this case,
the further hinge 9 has been divided up into two individual hinge
points 9a, 9b. Of course, this applies analogously to the further
hinge 9', which has likewise been divided up into two hinge points
9a' and 9b' (which cannot be seen here). These two hinge points
between the levers 8a, 8b are respectively connected via an
intermediate lever 13 and an intermediate lever 13', which is
concealed behind the intermediate lever 13. In the region of the
further hinge 9', which is concealed here, a torque T acts on the
intermediate levers 13, 13', around the region of the hinges 9, 9',
as a torsional moment.
[0045] This torque T, which in the exemplary embodiment illustrated
here acts in the counter clockwise direction, although it can
obviously act in the opposite direction in a manner analogous to
the above described forces F in order to change the direction of
the manipulation, results in the lever 8a moving downward according
to the arrow B. This movement of the lever 8a, in the downward
direction according to the arrow B, causes, in the manner which is
already known, a movement of the hinge 4a in the upward direction
according to the arrow C. Moreover, the torque T results in a
movement of the lever 8b in the upward direction according to the
arrow H. As a result, the lever 8b, together with the lever element
6b, is moved about the hinge 4b such that a movement of the hinge
5b in the upward direction according to the arrow E is produced.
The construction according to FIG. 5, which, with the arrangement
of its hinges 4a, 4b on the component 2a in relation to the hinges
5a, 5b on the component 2b, is constructed analogously to the
exemplary embodiment in FIG. 4, thus causes during usage, by way of
the torque T, a parallel displacement of the two components 2a, 2b
in relation to one another, and, accordingly, may be utilized as a
Z manipulator.
[0046] FIG. 6, then, shows in a further plan view of the optical
element mount 1, in an illustration analogous to FIG. 2, a
possibility of allowing the torque T to act uniformly on the two
hinges 9, 9'. For this purpose, use is made, in the exemplary
embodiment illustrated here, of a spindle 14 which connects the two
further hinges 9, 9' to one another. Of course, such a construction
is only conceivable for an optically non-transparent element on the
component 2a or the components 2a, 2b since the spindle 14, for
ideal functioning, would otherwise run in the region of the central
openings 3.
[0047] FIG. 7 shows a further exemplary embodiment of the optical
element mount 1, which in this case is illustrated as a Z
manipulator operated via the action of force. This Z manipulator
allows a central opening 3 with a very large opening diameter. This
achieves a very compact construction of the optical element mount 1
for the Z manipulation of the two components 2a, 2b in relation to
one another. Since the hinges 4a, 4b, 4c, 4d, 5a, 5b, 5c, 5d and 9
and 9' are designed as comparatively wide flexure hinges, the
optical element mount 1 according to the exemplary embodiment in
FIG. 9 achieves, alongside a very high level of compactness, also a
very high level of rigidity.
[0048] FIG. 8 shows a schematic construction which makes it
possible, in this case by means of three of the optical element
mounts 1, to realize a wide range of manipulations. Three of the
optical element mounts 1 are arranged one above the other here and
are each actuated via the action of force in the lever-like
extensions 10, 10' and/or the points of connection 11. In this
case, a first optical element mount 1a is designed as a Z
manipulator. This optical element mount 1a has arranged on it a
further optical element mount 1b, which is designed as an angle
manipulator. A third optical element mount 1c, which is arranged on
the optical element mount 1b, is likewise designed as an angle
manipulator, and in this case is arranged in a state in which it
has been rotated through at least more or less 90.degree. in
relation to the optical element mount 1a. Of course, all other
angles other than 0.degree. and 180.degree. are conceivable in
principle, although with a rotation through approximately
90.degree., it is possible to adjust the angles from both
directions independently of one another.
[0049] With such a stack of three optical element mounts 1a, 1b,
1c, it is thus possible to realize, via at least three single
actuators 12 (not illustrated here), a manipulation of the two
outermost components of the stack in all angle positions and axial
spacings. Of course, other arrangements are also conceivable
here.
[0050] FIG. 9 shows an embodiment of the optical element mount 1 in
a schematic illustration with three pairs of hinges 7a, 7b, 7c,
three lever elements 6a, 6b, 6c and three levers 8a, 8b, 8c. The
three levers 8a, 8b, 8c come together at a hinge 9, which in this
case is arranged outside the two carrier elements 2a, 2b. An
actuator 12 (not illustrated here) may act directly, or via further
lever elements, in the region of the further hinge 9 in order to
move the two carrier elements 2a, 2b in relation to one another. On
account of the different lever lengths between the two levers 8a,
8b, which in this case are configured to be of the same length, and
the shorter lever 8c, it is necessary for the length of the lever
elements 6a, 6b and 6c to be adapted to correspond to these lengths
of the levers 8a, 8b and 8c, respectively, in order to continue to
ensure parallel movement of the two carrier elements 2a, 2b in
relation to one another. Of course, a tilting movement should also
be conceivable here since, here too, the hinges 4a, 4b, 4c and 5a,
5b, 5c could be arranged in each case to correspond to the
exemplary embodiments which have already been explained. In order
to realize a, for example, parallel movement, the construction
according to FIG. 9 requires a somewhat higher level of production
outlay since the transmission ratios of the individual levers 8a,
8b, 8c and lever elements 6a, 6b, 6c have to be adapted in a
correspondingly precise manner. However, the three points of
contact between the two carrier elements 2a, 2b result, on the
three pairs of hinges 7a, 7b, 7c, in a statically determined system
with the corresponding, favorable effects.
[0051] FIG. 10 also shows a corresponding construction with three
pairs of hinges 7a, 7b, 7c in a likewise very highly schematic
illustration. In this case, the three levers 8a, 8b, 8c come
together in the region of the optical axis or Z-axis. This
construction, in turn, makes it possible to use three
correspondingly similarly designed levers in order to realize the
parallel movement. It is thus possible to reduce the production
outlay in the case of an again statically determined system. On
account of the arrangement of the hinge 9 and of the actuator 12,
which is arranged in the region of the hinge 9, this construction
is recommended, in particular, for manipulating an optically
non-transparent element, for example a mirror, which is to be
manipulated axially on its carrier element 2a in relation to a base
element or a carrier element 2b.
[0052] FIG. 11 shows a construction which is comparable to that in
FIG. 10, although in this case, instead of the three pairs of
hinges 7a, 7b, 7c from FIG. 10, five pairs of hinges 7a, 7b, 7c,
7d, 7e with their corresponding levers 8a, 8b, 8c, 8d, 8e come
together at the hinge 9 in the region of the actuator 12.
[0053] In compliance with the statute, the invention has been
described in language more or less specific as to structural and
methodical features. It is to be understood, however, that the
invention is not limited to the specific features shown and
described, since the means herein disclosed comprise preferred
forms of putting the invention into effect. The invention is,
therefore, claimed in any of its forms or modifications within the
proper scope of the appended claims appropriately interpreted in
accordance with the doctrine of equivalents.
* * * * *