U.S. patent application number 10/036279 was filed with the patent office on 2002-05-16 for method for forming a gate in a semiconductor device.
Invention is credited to Jang, Se Aug, Kim, Jae Young, Kim, Tae Kyun, Yeo, In Seok.
Application Number | 20020058372 10/036279 |
Document ID | / |
Family ID | 19699266 |
Filed Date | 2002-05-16 |
United States Patent
Application |
20020058372 |
Kind Code |
A1 |
Jang, Se Aug ; et
al. |
May 16, 2002 |
Method for forming a gate in a semiconductor device
Abstract
A method of forming a semiconductor device gate including the
steps of forming a dummy gate insulating layer on a semiconductor
substrate having an isolating field oxide layer, successively
depositing a dummy gate silicon layer and a hard mask layer on the
dummy gate insulating layer, forming a hard mask layer and
patterning the dummy gate silicon layer using the mask pattern as
an etch barrier, forming a thermal oxide layer at both sidewalls of
the dummy gate silicon layer by thermal oxidation on the resultant
structure, forming spacers at both sidewalls of the dummy gate
silicon layer, depositing an insulating interlayer on the resultant
structure, polishing the insulating interlayer to expose the dummy
gate silicon layer, forming a damascene structure by removing the
dummy gate silicon and insulating layers, depositing a gate
insulating layer and a gate metal layer on an entire surface of the
semiconductor substrate having the damascene structure, and
polishing the gate metal and insulating layers, thereby preventing
the undercut at the bottom corners of a damascene groove.
Inventors: |
Jang, Se Aug; (Kyoungki-do,
KR) ; Kim, Tae Kyun; (Kyoungki-do, KR) ; Kim,
Jae Young; (Kyoungki-do, KR) ; Yeo, In Seok;
(Seoul, KR) |
Correspondence
Address: |
LADAS & PARRY
224 SOUTH MICHIGAN AVENUE, SUITE 1200
CHICAGO
IL
60604
US
|
Family ID: |
19699266 |
Appl. No.: |
10/036279 |
Filed: |
November 7, 2001 |
Current U.S.
Class: |
438/200 ;
257/E21.637 |
Current CPC
Class: |
H01L 21/823842
20130101 |
Class at
Publication: |
438/200 |
International
Class: |
H01L 021/8238 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 16, 2000 |
KR |
2000-67945 |
Claims
What is claimed is:
1. A method of forming a gate in a semiconductor device comprising
the steps of: forming a dummy gate insulating layer on a
semiconductor substrate having a field oxide layer isolating the
device; depositing successively a dummy gate silicon layer and a
hard mask layer on the dummy gate insulating layer; forming a hard
mask layer as a mask pattern and patterning the dummy gate silicon
layer using the mask pattern as an etch barrier; forming a thermal
oxide layer at both sidewalls of the dummy gate silicon layer by
carrying out thermal oxidation on the resultant structure after the
patterning step; forming spacers at both sidewalls of the dummy
gate silicon layer; depositing an insulating interlayer on the
resultant structure after the spacer forming step; polishing the
insulating interlayer so as to expose the dummy gate silicon layer;
forming a damascene structure by removing the dummy gate silicon
and the insulating layers by using the insulating interlayer as
another etch barrier; depositing a gate insulating layer and a gate
metal layer on an entire surface of the semiconductor substrate
having the damascene structure; and polishing the gate metal and
insulating layers until the insulating layer is exposed.
2. The method of claim 1, wherein the dummy gate insulating layer
is formed of a silicon oxide layer.
3. The method of claim 1, wherein the thermal oxidation is carried
out at a temperature of from 700 to 850.degree. C. so as to form
the thermal oxidation layer from about 50 to 100 .ANG. thick.
4. The method of claim 1, wherein the dummy gate silicon layer is
formed of a doped polysilicon layer.
5. The method of claim 1, wherein the dummy gate silicon and
insulating layers are removed using an isotropic etch.
6. A method of forming a gate in a semiconductor device comprising
the steps of: forming a dummy gate insulating layer on a
semiconductor substrate having a field oxide layer isolating the
device; depositing successively a dummy gate silicon layer and a
hard mask layer on the dummy gate insulating layer; forming a hard
mask layer as a mask pattern and patterning the dummy gate silicon
layer using the mask pattern as an etch barrier and inwardly
rounding bottom corners of the dummy gate silicon layer; forming a
thermal oxide layer at both sidewalls of the dummy gate silicon
layer by carrying out thermal oxidation on the resultant structure
after the rounding step; forming spacers at both sidewalls of the
dummy gate silicon layer; depositing an insulating interlayer on
the resultant structure after the spacer forming step; polishing
the insulating interlayer so as to expose the dummy gate silicon
layer; forming a damascene structure by removing the dummy gate
silicon and insulating layers using the insulating interlayer as
another etch barrier; depositing a gate insulating layer and a gate
metal layer on an entire surface of the semiconductor substrate
having the damascene structure; and polishing the gate metal and
insulating layers until the insulating layer is exposed.
7. The method of claim 6, wherein the hard mask and dummy gate
silicon layers are patterned by a dry etch.
8. The method of claim 7, wherein the dry etch is carried out by
performing a main etch and an over-etch.
9. The method of claim 7, wherein the dry etch is carried out using
Cl.sub.2/O.sub.2 gas.
10. The method of claim 6, wherein the dummy gate insulating layer
is formed of a silicon oxide layer.
11. The method of claim 6, wherein the thermal oxidation is carried
out at a temperature of from 700 to 850.degree. C. so as to form
the thermal oxidation layer from about 50 to 100 .ANG. thick.
12. The method of claim 6, wherein the dummy gate silicon layer is
formed of a doped polysilicon layer.
13. The method of claim 6, wherein the dummy gate silicon and
insulating layers are removed by using an isotropic etch.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates generally to a method for
forming a gate in a semiconductor device, and more particularly, to
a method of forming a gate in a semiconductor device using a
damascene process.
[0003] 2. Description of the Related Art
[0004] Semiconductor device variables, such as gate width, gate
insulating layer thickness, junction depth and the like are
progressively being reduced as the integration of a semiconductor
is increased. Fabrication methods of polysilicon gates fail to
further realize the low resistance required for critical
dimensions. In the mean time, developments for a gate having new
gate materials as a substitute for polysilicon and having new
structures are necessitated. In the past, research and development
efforts were focused on a polysilicide gate using transition
metal-silicide materials.
[0005] However, the polysilicide gate still contains polysilicon as
a constituent, which results in increasing the difficulty in
realizing low resistance. The polysilicon constituent in the
polysilicide gate brings about increasingly effective thicknesses
of a gate insulating layer due to a gate depletion effect, as well
as threshold voltage variance due to boron penetration/dopant
distribution fluctuation in a p+ doped polysilicon gate and the
like, thereby limiting the ability to realize low resistance
therein.
[0006] Boron penetration and gate depletion do not arise in a metal
gate using no dopant. Moreover, metal gates use a metal having a
work function value corresponding to a mid-band gap of silicon, and
when applied to a single gate, thereby enable the formation of a
symmetric threshold voltage in NMOS and PMOS areas. In this case,
W, WN, Ti, TiN, Mo, Ta, TaN and the like comprise metals of which
the work function values correspond to the mid-gap of silicon.
[0007] If a semiconductor device is fabricated using a metal gate,
difficulty arises in patterning a metal gate, i.e., difficulty of
etching, plasma damages in the etching and ion implantation
processes and thermal damage caused by a thermal process after the
gate formation are generated, thereby reducing the device
characteristics.
[0008] Accordingly, in order to overcome these perceived
disadvantages, a method of forming a metal gate is proposed that
comprises the steps of forming a sacrificing gate of polysilicon,
forming an insulating layer, removing the sacrificing gate,
depositing a metal layer, and polishing the metal layer. The
sacrificing gate is replaced by a metal gate, so that a gate is
formed without utilizing an etching process. Therefore, the
damascene process avoids the problems caused by the etching
processes, and also enables use of conventional semiconductor
fabrication processes.
[0009] FIGS. 1A to FIGS. 1G illustrate cross-sectional views of a
conventional method of fabricating a MOSFET device having a
tungsten gate using a damascene process. FIGS. 2A and 2B illustrate
cross-sectional views illustrating problems resulting from a method
of forming a gate in a semiconductor device using a conventional
damascene process.
[0010] Referring to FIG. 1A, a field oxide layer, (not shown in the
drawings) defining a device active area, is formed on a surface of
a semiconductor substrate 1 and a dummy gate silicon oxide layer 2
is formed on the semiconductor substrate 1. A dummy gate
polysilicon layer 3 and a hard mask layer 4 are then successively
formed on the dummy gate silicon oxide layer 2.
[0011] Referring to FIG. 1B, a mask pattern 4a is formed by
patterning the hard mask layer 4. A dummy gate 5 is then formed by
etching the dummy gate polysilicon layer 3 and silicon oxide layer
2 using the mask pattern 4a.
[0012] Referring to FIG. 1C, LDD (lightly doped drain) regions are
formed in portions of the silicon substrate 1 below both lateral
sides of the dummy gate 5 by ion implantation at a relatively low
dose and energy. Then, spacers 6 are formed at both sidewalls of
the dummy gate 5 by using a known process. Subsequently, source
region s and drain region d are formed at the portions of the
semiconductor substrate 1 below both lateral sides of the dummy
gate 5 by heavy ion implantation.
[0013] Referring to FIG. 1D, an insulating interlayer 7 is
deposited on the semiconductor substrate 1. The dummy gate
polysilicon layer 3 of the dummy gate 5 is exposed by planarizing a
surface of the insulating interlayer 7 by using chemical mechanical
polishing (hereinafter abbreviated CMP) on the insulating
interlayer 7.
[0014] Referring to FIG. 1E, the dummy gate, exposed by CMP, is
removed. Agate insulating layer 8 is then formed along a surface of
the resultant structure. Subsequently, a gate metal layer 9, such
as a tungsten layer, is deposited on the gate insulating layer
8.
[0015] Referring to FIG. 1F, a metal gate 9 is formed by polishing
the gate metal layer 9 and the gate insulating layer 8 until the
insulating interlayer 7 is exposed. Thus, a MOSFET device having
the metal gate is completed, as shown.
[0016] Unfortunately, the metal gate formed by using the
conventional damascene process has disadvantages as described
below.
[0017] In the process of forming a damascene gate, it is very
important to completely remove the dummy gate polysilicon layer 3
and silicon oxide layer 2. Yet, as shown in FIG. 2A, residues of
the dummy gate polysilicon layer 3 and silicon oxide layer 2
frequently remain at the corners a of the damascene groove after
wet etch, thereby preventing formation of the damascene gate.
[0018] Moreover, as shown in FIG. 2B, a portion of the silicon
oxide layer 2 beneath the spacers 6 may be etched excessively from
the bottom corners a of the damascene groove when the dummy gate
polysilicon layer 3 and silicon oxide layer 2 are wet-etched. As a
result, `undercut` is generated so as to leave voids therein after
the gate insulating layer deposition which undercut degrades the
gap-filling characteristic when the gate metal is deposited.
SUMMARY OF THE INVENTION
[0019] Accordingly, the present invention is directed to a method
of forming a gate in a semiconductor device that substantially
obviates one or more of the problems due to limitations and
disadvantages of the related art.
[0020] The object of the present invention is to provide a method
of forming a gate in a semiconductor device enabling the
elimination of the problems resulting at the bottom corners of a
damascene groove by carrying out oxidation after dummy gate
patterning in a damascene gate forming process.
[0021] Additional features and advantages of the present invention
will be set forth in the following detailed description, and in
part will become apparent from the description, or may be learned
by practice of the invention. The objectives and other advantages
of the invention will be realized and attained by the structure
described in the written description and particularly pointed out
in the claims hereof, as well as being illustrated in the appended
drawings.
[0022] To achieve these and other advantages, and in accordance
with the purpose of the present invention as embodied and broadly
described, a method of forming a gate in a semiconductor device
includes the steps of forming a dummy gate insulating layer on a
semiconductor substrate having a field oxide layer isolating the
device, depositing successively a dummy gate silicon layer and a
hard mask layer on the dummy gate insulating layer, forming a hard
mask layer as a mask pattern and patterning the dummy gate silicon
layer using the mask pattern as an etch barrier, forming a thermal
oxide layer at both sidewalls of the dummy gate silicon layer by
carrying out thermal oxidation on the resultant structure after the
patterning step, forming spacers at both sidewalls of the dummy
gate silicon layer, depositing an insulating interlayer on the
resultant structure after the spacer forming step, polishing the
insulating interlayer so as to expose the dummy gate silicon layer,
forming a damascene structure by removing the dummy gate silicon
and insulating layers using the insulating interlayer as another
etch barrier, depositing a gate insulating layer and a gate metal
layer on an entire surface of the semiconductor substrate having
the damascene structure, and polishing the gate metal and
insulating layers until the insulating layer is exposed.
[0023] Preferably, the dummy gate insulating layer is formed of a
silicon oxide layer and the thermal oxidation is carried out at a
temperature of from 700 to 850.degree. C. so as to form the thermal
oxidation layer 50 to 100 .ANG. thick, the dummy gate silicon layer
is formed of a doped polysilicon layer and the dummy gate silicon
and insulating layers are removed using an isotropic etch.
[0024] In another aspect of the present invention, a method of
forming a gate in a semiconductor device includes the steps of
forming a dummy gate insulating layer on a semiconductor substrate
having a field oxide layer isolating the device, depositing
successively a dummy gate silicon layer and a hard mask layer on
the dummy gate insulating layer, forming a hard mask layer as a
mask pattern and patterning the dummy gate silicon layer using the
mask pattern as an etch barrier and rounding bottom corners of the
dummy gate silicon layer inwardly, forming a thermal oxide layer at
both sidewalls of the dummy gate silicon layer by carrying out
thermal oxidation on the resultant structure after the rounding
step, forming spacers at both sidewalls of the dummy gate silicon
layer, depositing an insulating interlayer on the resultant
structure after the spacer forming step, polishing the insulating
interlayer so as to expose the dummy gate silicon layer, forming a
damascene structure by removing the dummy gate silicon and
insulating layers using the insulating interlayer as another etch
barrier, depositing a gate insulating layer and a gate metal layer
on the entire surface of the semiconductor substrate having the
damascene structure, and polishing the gate metal and insulating
layers until the insulating layer is exposed.
[0025] Preferably, the hard mask and dummy gate silicon layers are
patterned by dry etch and the dry etch is carried out by performing
a main etch and an over-etch by using Cl.sub.2/O.sub.2 gas.
[0026] It is to be understood that both the foregoing general
description and the following detailed description are exemplary
and explanatory and are intended to provide further explanation of
the invention as claimed.
BRIEF DESCRIPTION OF THE DRAWINGS
[0027] The accompanying drawings, which are included to provide a
further understanding of the invention and are incorporated in and
constitute a part of this specification, illustrate embodiments of
the invention and together with the description serve to explain
the principles of the invention.
[0028] In the drawings:
[0029] FIGS. 1A to 1F illustrate cross-sectional views of the
conventional process of fabricating a gate in a semiconductor
device using a damascene process;
[0030] FIG. 2A and FIG. 2B illustrate cross-sectional views
illustrating problems resulting from using conventional methods of
forming a gate in a semiconductor device such as a damascene
process;
[0031] FIGS. 3A to 3E illustrate cross-sectional views of the steps
of fabricating a gate in a semiconductor device using a damascene
process according to an embodiment of the present invention;
and
[0032] FIGS. 4A to FIGS. 4F illustrate cross-sectional views of
fabricating a gate in a semiconductor device using a damascene
process according to another embodiment of the present
invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0033] Reference will now be made in detail to the preferred
embodiments of the present invention, examples of which are
illustrated in the accompanying drawing FIGS. 3A to 3E and FIGS. 4A
to 4F. Where possible, the same reference numerals will be used to
illustrate like elements throughout the specification.
[0034] FIGS. 3A to 3E illustrate cross-sectional views of the steps
of fabricating a gate in a semiconductor device using a damascene
process according to an embodiment of the present invention, and
FIGS. 4A to 4F illustrate cross-sectional views of the steps of
fabricating a gate in a semiconductor device using a damascene
process according to another embodiment of the present
invention.
[0035] Referring to FIG. 3A, a field oxide layer (not shown)
defines a device formed on a surface of a semiconductor substrate
20. A dummy gate silicon oxide layer 21 is deposited on the
semiconductor substrate 20. A dummy gate silicon layer 22 and a
hard mask layer 23 are then successively formed on the dummy gate
silicon oxide layer 21. In this case, the dummy gate silicon layer
22 is preferably formed of a doped polysilicon layer, which
facilitates the establishment of the wet etch condition to remove
the polysilicon layer.
[0036] Referring to FIG. 3B, a mask pattern 23a is formed by
patterning the hard mask layer 23. The dummy gate silicon layer 22
is then patterned using the mask pattern 23a as an etch barrier.
Subsequently, a thermal oxide layer 24 is grown at both sidewalls
of the dummy gate silicon layer 22 by thermal oxidation on the
semiconductor substrate 20. In this process step, the dummy gate
silicon oxide layer 21 becomes thickened somewhat, but no thermal
oxide layer is grown beneath the mask pattern 23a, since the mask
pattern 23a has been deposited on the dummy gate silicon layer 22.
Such a thermal oxidation process is carried out at a temperature of
from 700 to 850.degree. C. so as to form the thermal oxide layer 50
to 100 .ANG. thick.
[0037] Referring to FIG. 3C, through a general process of forming
source/drain regions, LDD (lightly doped drain) type source region
s and drain region d are formed by carrying out ion implantation
lightly on the semiconductor substrate 20, depositing a silicon
nitride layer on the semiconductor substrate, carrying out
blanket-etch on the silicon nitride layer to form spacers 25, and
then carrying out another heavy ion implantation. An insulating
interlayer 26 is deposited on the semiconductor substrate 20.
Planarization of the insulating interlayer 26 is achieved by
carrying out a polishing process thereon until the surface of the
dummy gate silicon layer 22 is exposed.
[0038] Referring to FIG. 3D, a damascene structure is formed by
removing the exposed dummy gate silicon layer 22 and the dummy gate
silicon oxide layer 21 underneath. In this case, the dummy gate
silicon layer 22 and silicon oxide layers 24 are removed by wet
etch. Yet, the thermal oxide layers 24 prevent an undercut
occurring, as it does generally in using conventional methods when
the dummy gate silicon oxide layer beneath the spacers 25 is etched
excessively. Therefore, the present invention achieves process
stability.
[0039] Referring to FIG. 3E, a gate insulating layer 27 and a gate
metal layer 28 are deposited on the surface of the semiconductor
substrate 20 from which the dummy gate silicon and silicon oxide
layers were previously removed. A gate in a semiconductor device is
then completed by polishing the gate metal layer 28 and insulating
layers 27 until the insulating interlayer 26 is exposed.
[0040] FIGS. 4A to 4F illustrate cross-sectional views of the
sequential steps in fabricating a gate in a semiconductor device
using a damascene process according to another embodiment of the
present invention.
[0041] Referring to FIG. 4A, a field oxide layer (not shown in the
drawing) defining an inventive device is formed on a surface of a
semiconductor substrate 30. A dummy gate silicon oxide layer 31 is
deposited on the semiconductor substrate 30. A dummy gate silicon
layer 32 and a hard mask layer 33 are then successively formed on
the dummy gate silicon oxide layer 31. The dummy gate silicon layer
32 is preferably formed of a doped polysilicon layer to facilitate
the establishment of the wet etch condition and enable the removal
of the polysilicon layer.
[0042] Referring to FIG. 4B, a mask pattern 33a is formed by
patterning the hard mask layer 33. The dummy gate silicon layer 32
is then patterned using the mask pattern 33a as an etch barrier
while bottom edges of the patterned dummy gate silicon layer are
etched inwardly to form a rounded convex shape, i.e., the
`undercut` u.
[0043] Preferably, the dummy gate silicon layer 32 is patterned by
a dry etch process. Thus, the undercut u is achieved by over-etch
that is carried out after the main etch in the dry etching process.
Namely, a process condition of the over-etch is established so that
the degree of the undercut u is adjustable as desired by modifying
the process time of the over-etch with a high selection ratio
relative to that of the dummy gate silicon oxide layer 31. This is
achieved by establishing an etch selection ratio which provides
greater etching capability for the dummy gate silicon layer 32
relative to the dummy gate silicon oxide layer 31 and by using
Cl.sub.2/O.sub.2 gas.
[0044] Referring to FIG. 4C, a thermal oxide layer 34 is grown at
both sidewalls of the dummy gate silicon layer 32 by thermal
oxidation of the semiconductor substrate 30. In this case, the
dummy gate silicon oxide layer 31 becomes thickened somewhat. In
addition, a rounded thermal oxide layer 34 is formed especially at
the bottom edges d of the dummy gate silicon layer 32 after the
thermal oxidation since the under cut u has been formed at the
bottom edges d. No thermal oxide layer is grown beneath the mask
pattern 33a, since the mask pattern 33a is disposed on the dummy
gate silicon layer 32. Such a thermal oxidation process is carried
out at a temperature of from 700 to 850.degree. C. so as to form
the thermal oxidation layer about from 50 to 100 .ANG. thick.
[0045] Referring to FIG. 4D, the steps for a general process of
forming source/drain regions are performed, i.e., the LDD (lightly
doped drain) type source/drain regions s and d are formed by
carrying out ion implantation lightly on the semiconductor
substrate 30, depositing a silicon nitride layer on the
semiconductor substrate, carrying out a blanket-etch on the silicon
nitride layer to form spacers 35, and then carrying out another ion
implantation heavily. An insulating interlayer 36 is deposited on
the semiconductor substrate 30. Planarization of the insulating
interlayer 36 is achieved by carrying out a polishing process
thereon until a surface of the dummy gate silicon layer 32 is
exposed.
[0046] Referring to FIG. 4E, a damascene structure is formed by
removing the exposed dummy gate silicon layer 32 and the dummy gate
silicon oxide layer 31 underneath the spacers 35. In this case, the
dummy gate silicon and silicon oxide layers are removed by wet
etch. The thermal oxide 34 prevents a residue of the dummy silicon
layer 32 from being generated during the wet etch as well as the
undercut, such as that occurs generally in conventional processes
when the dummy gate silicon oxide layer beneath the spacers 35 is
etched excessively. Therefore, the present invention enables
process stability during fabrication and thereafter.
[0047] Referring to FIG. 4F, a gate insulating layer 37 and a gate
metal layer 38 are deposited on the surface of the semiconductor
substrate 30 from which the dummy gate silicon and silicon oxide
layers have been removed. A gate in a semiconductor device is then
completed by polishing the gate metal and insulating layers until
the insulating interlayer 36 is exposed.
[0048] As mentioned in the above description, the present invention
prevents the undercut generation at the bottom inside corner of a
damascene groove when the dummy gate silicon and silicon oxide
layers are removed by wet etch for forming a damascene structure.
This is done by carrying out thermal oxidation after patterning the
dummy gate silicon layer 32.
[0049] Moreover, another embodiment of the present invention
provides a step of forming the rounded corners of the damascene
groove on thermal oxidation by forming the undercut when etching
the dummy gate silicon layer.
[0050] Accordingly, the present invention prevents the silicon
layer residue from being produced when removing the dummy gate
silicon and the insulating layers and facilitates the metal
electrode deposition process by preventing the undercut, thereby
enabling an increase in product yield.
[0051] The foregoing embodiments are merely exemplary and are not
to be construed as limiting the present invention. The present
teachings can be readily applied to other types of apparatuses. The
description of the present invention is intended to be
illustrative, and not to limit the scope of the claims. Any
alternatives, modifications, and variations will be apparent to
those skilled in the art and the invention described and
illustrated herein is to be limited only by the following
claims.
* * * * *