U.S. patent application number 09/991336 was filed with the patent office on 2002-03-14 for optical switching device and image display device.
Invention is credited to Ito, Hirokazu, Kamijima, Shunji, Takeda, Takashi, Yonekubo, Masatoshi.
Application Number | 20020031294 09/991336 |
Document ID | / |
Family ID | 27278351 |
Filed Date | 2002-03-14 |
United States Patent
Application |
20020031294 |
Kind Code |
A1 |
Takeda, Takashi ; et
al. |
March 14, 2002 |
Optical switching device and image display device
Abstract
An optical switching device comprises: a light guide including a
total reflection plane capable of totally reflecting light thereby
transmitting the light; a switching part capable of, at a position
where its extraction plane is in close contact with the total
reflection plane, capturing evanescent light and reflecting the
captured light thereby outputting it; and a driving part for
driving the optical switching part. The light guide, the switching
part, and the driving part are laminated in this order into a
multilayer structure. The employment of the multilayer structure
makes it possible to optimize the respective layers independently
of one another. The extracted light does not pass through the
driving part. This allows the driving part to be optimized so as to
achieve an optical switching device capable of operating at a high
speed with low power consumption. Thus, it is possible to provide a
low-loss and high-contrast optical switching device using an
evanescent wave, which can respond at a high speed.
Inventors: |
Takeda, Takashi; (Suwa-shi,
JP) ; Yonekubo, Masatoshi; (Suwa-shi, JP) ;
Ito, Hirokazu; (Suwa-shi, JP) ; Kamijima, Shunji;
(Suwa-shi, JP) |
Correspondence
Address: |
EPSON RESEARCH AND DEVELOPMENT INC
INTELLECTUAL PROPERTY DEPT
150 RIVER OAKS PARKWAY, SUITE 225
SAN JOSE
CA
95134
US
|
Family ID: |
27278351 |
Appl. No.: |
09/991336 |
Filed: |
November 14, 2001 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
09991336 |
Nov 14, 2001 |
|
|
|
09381495 |
Nov 23, 1999 |
|
|
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Current U.S.
Class: |
385/16 |
Current CPC
Class: |
Y10S 385/901 20130101;
G02B 26/0816 20130101; G09G 2310/06 20130101; G09G 3/3473 20130101;
G09G 2300/06 20130101 |
Class at
Publication: |
385/16 |
International
Class: |
G02B 006/35 |
Foreign Application Data
Date |
Code |
Application Number |
Jan 20, 1998 |
JP |
10-9148 |
May 13, 1998 |
JP |
10-130776 |
Aug 28, 1998 |
JP |
10-243834 |
Claims
What is claimed is:
1. A method of controlling an optical switching device, said
optical switching device comprising: a light guide including a
total reflection plane capable of totally reflecting input light
thereby transmitting the light; at least one switching part being
in contact at a first position with the total reflection plane of
said light guide, said switching part serving to extract evanescent
light leaking through the total reflection plane, said switching
part being capable of moving to a second position apart from said
first position; a supporting member for elastically supporting said
switching part; and electrostatic driving means including at least
one pair of electrodes for driving said switching part, wherein at
least one of said electrodes is divided into a first part and a
second part which are symmetric in shape to each other about the
center of gravitation of said switching part, said method
comprising the step of supplying electric power to said first and
second parts in such a manner that the timing of supplying the
electric power is different between said first and second parts or
voltages supplied to said first and second parts are different from
each other.
Description
CONTINUING APPLICATION DATA
[0001] This application is a divisional of U.S. patent application
Ser. No. 09/381,495 filed Nov. 23, 1999, the contents of which are
incorporated herein by reference in their entirety.
BACKGROUND OF THE INVENTION
[0002] 1. Technical Field
[0003] The present invention relates to an optical switching device
(light valve) for use in optical communication, optical processing,
optical memory devices, optical printers, image display devices,
etc., and more particularly, to an optical switching device
suitable for use in an optical image display device and to an
optical image display device.
[0004] 2. Background Art
[0005] Conventionally, an optical switching device using a liquid
crystal is known in the art. FIG. 43 schematically illustrates an
optical switching device 900 according to a conventional technique.
As shown in FIG. 43, the optical switching device 900 includes
polarizers 901 and 908, glass plates 902 and 903, transparent
electrodes 904 and 905, and liquid crystals 906 and 907. In this
optical switching device, optical switching is performed by
applying a voltage between the transparent electrodes so as to
modify the orientations of liquid crystal molecules thereby
rotating the polarization plane. A conventional image display
device is produced by disposing such optical switching devices
(liquid crystal cells) in a two-dimensional fashion into the form
of a liquid crystal panel. In this image display device,
representation of gray scales is accomplished by controlling the
alignment of liquid crystal molecules by adjusting the applied
voltage.
[0006] However, liquid crystals are slow in response. The response
time of liquid crystals is several msec at best. This makes it
difficult to employ optical switching devices using a liquid
crystal in applications which need a short response time, such as
optical communication, optical processing, an optical memory such
as a hologram memory, an optical printer, etc. Another problem of
optical switching devices using a liquid crystal is a reduction in
the light utilization efficiency caused by a polarizer.
[0007] In the art of the image display device, increasingly high
image quality is required. To meet such a requirement, it is needed
to provide an optical switching device capable of representing gray
scales more precisely than optical switching devices using a liquid
crystal.
[0008] Thus, it is an object of the present invention to provide a
low-loss optical switching device capable of responding at a high
speed. It is another object of the present invention to provide an
optical switching device capable of forming a high-quality image
with a uniform contrast.
DISCLOSURE OF THE INVENTION
[0009] According to the present invention, to achieve the above
objects, there is provided an optical switching device which
extracts evanescent light from a light guide capable of
transmitting light by means of total reflection, wherein extraction
of light is performed when a light-transmissive extraction plane of
a switching part is brought into contact with the light guide.
Light can be turned on and off at a high speed by moving the
switching part by a small distance nearly equal to one wavelength
or less. The switching part is formed to be of a reflective type.
The light guide, the optical switching part, and driving means for
driving the switching part are disposed in this order in a
direction in which light is illuminated, thereby forming the
optical switching device in a multilayer structure. Thus, an
optical switching device can be realized which can output a large
amount of light with a low loss and which can respond at a high
speed. That is, the switching part according to the present
invention includes: the light guide with a total reflection plane
capable of transmitting light by means of total reflection; the
switching part including a light-transmissive extraction plane
capable for extracting evanescent light leaking through the total
reflection plane; and driving means for moving the switching part
to a first position at which the extraction plane is within an
extraction range which allows an evanescent light to be extracted
and a second position at which the extraction plane is out of said
extraction range, wherein the light guide, the switching part and
the driving means are disposed in this order in a direction in
which light is output.
[0010] In the optical switching device according to the present
invention, the light guide, the switching part, and the driving
means for driving the switching part may be disposed one on another
in this order into a multilayer structure in which the functions of
the light guide, the switching part, and the driving means are
implemented in the respective layers substantially independently of
one another. This makes it possible to easily optimize the
respective parts. In the optical switching device according to the
present invention, light is reflected by the switching part toward
the light guide, and no light passes through the driving means.
Therefore, it is possible to optimize the driving means without
having to consider optical conditions.
[0011] This allows the switching part to be supported on the
driving means, and thus it becomes unnecessary for the light guide
to have a structure on the side facing the optical switching part.
Thus, the light guide can be constructed in the form of a simple
flat panel. Because the light guide is not required to include a
part for supporting the switching part, the entire area of the
light guide on the side where the total reflection plane is formed
can be used as a plane through which light is extracted, that is,
as a plane the switching part is brought into contact with. Thus it
is possible to realize an optical switching device having a large
aperture area through which light is output, that is, having a
large aperture ratio, which allows a large amount of light to be
output. Furthermore, by employing the panel structure, it becomes
possible to use a plane opposite to the total reflection plane as
an output plane through which the extracted light is output to the
outside. The driving means may be formed on an integrated circuit
substrate for controlling the driving means. The optical switching
device may be integrated with an integrated circuit chip for
controlling an image.
[0012] A pixel may be formed by one or a combination of a plurality
of optical switching devices according to the present invention. If
a plurality of optical switching devices are disposed in a
two-dimensional fashion, and if the light guide is adapted to be
capable of transmitting white light or three primary color light,
an image display device can be obtained. This image display device
can display a high-resolution image at a high speed. Furthermore,
the image display device can be constructed into the form of a
multilayer structure, which allows the image display device to be
produced at low cost. The image display device may be integrated
with an integrated circuit chip.
[0013] To realize the switching part of the reflective type, a
light outputting member for outputting extracted light may be
formed using a microprism or a light-dispersive material such that
light extracted through the extraction plane is reflected by the
light outputting member. The direction of the output light may be
controlled so that light is output in a direction substantially
perpendicular to the total reflection plane.
[0014] The driving means may include a supporting member for
elastically supporting the switching part and electrostatic driving
means for driving the switching part by means of electrostatic
force acting between a pair of electrodes whereby the switching
part may be moved to the first and second positions. Preferably,
the supporting member urges the switching part at the first
position toward the light guide when no electrostatic force is
exerted by the electrostatic driving means. The electrostatic
driving means can be easily controlled by electric power. However,
the driving force provided by the electrostatic driving means
varies with a variation in voltage or current. In contrast, a
driving force provided by an elastic element is stable because it
is generated mechanically. In view of the above, the supporting
member formed of an elastic material is employed to stably generate
a driving force thereby urging the extraction plane of the
switching part into close contact with the total reflection plane
of the light guide so as to turn on the optical switching device,
whereas a driving force supplied by the electrostatic driving means
which can be easily controlled by electric power is employed to
move the extraction plane away from the switching part so as to
turn off the optical switching device. This makes it possible to
provide an optical switching device having high controllability and
capable of stably outputting a desired amount of light.
[0015] Preferably, the supporting member is adapted to have a
residual deformation when the switching part is at the first
position so that the extraction plane is urged, in the on-state, by
the elastic force of the supporting member against the total
reflection plane of the light guide thereby ensuring that the
extraction plane is in intimate contact with the total reflection
plane. This makes it possible to provide an optical switching
device having high brightness in the on-state and high on-off
contrast. Furthermore, the residual deformation of the supporting
member makes it possible to accommodate a variation in the distance
between the light guide and the switching part or a variation
between the switching part and the driving means due to vibrations,
a temperature variation, or aging effects.
[0016] The switching part is preferably supported by the supporting
member via a spacer. The spacer may serve to reduce the distance
between electrodes and provide a space in which the supporting
member is allowed to be elastically deformed. Such a spacer may be
formed in a T shape or inverted trapezoidal shape in cross section
with the driving means located below. The reduction in the distance
between electrodes allows a reduction in the driving voltage and an
increase in the operation speed.
[0017] By employing a spacer having such a shape, it becomes
possible to employ, as the supporting member, a spring member in
the form of a plate one end of which is supported by a post located
near the boundary of the switching part and the other end of which
is connected to the switching part. This makes it possible to
realize a spring member having a large effective length whereby the
force for urging the switching part may be properly adjusted. Thus,
it is possible to adjust the elastic force such that on/off
operations can be performed in a highly reliable fashion even if
the driving force supplied by the electrostatic force is small.
Furthermore, the employment of the T-shaped or inverted
trapezoidal-shaped spacer allows the spring member to have a
sufficiently large effective length without causing a reduction in
the area of the switching part. Therefore, it is possible to
provide an optical switching device having a large aperture area
through which light is output. A plurality of such optical
switching devices may be employed to form an image display device
in such a manner that optical switching devices are located in a
seamless fashion substantially without being spaced from each
other.
[0018] The spring member may be formed in an arbitrary shape such
as a coil shape. However, if the spring member is formed such that
its one end is supported by a post located near the boundary of the
switching part (device) and the other end is connected to the
optical switching part, then it is possible to position the optical
switching part by the spring member. In this case, if the spring
member is formed in the shape of a plate having a slit or opening
near the boundary, interference among adjacent optical switching
devices can be prevented. Furthermore, it also becomes possible to
adjust the elastic modulus of the spring member to a value optimum
for driving the switching part.
[0019] More specifically, such a plate-shaped spring may be formed
to have a small width and radially extend from the optical
switching part wherein one end of the spring member is supported by
the post disposed near the boundary. In addition to such a spring
member, the electrode may be formed in such a manner as to radially
expand from the switching part thereby expanding the area of the
electrode. This makes it possible to obtain a large driving force
using a small voltage. That is, it is possible to reduce the
driving voltage. The spring member may also be in the form of a
plate including a part extending in a spiral fashion along the
boundary. This allows the effective length of the spring to be
increased without increasing the area thereof. Thus, it is possible
to reduce the voltage required to drive the optical switching part
thereby reducing power consumption. The spring member may also
include parts extending in a double spiral fashion. The spring
member may also be formed in such a manner that the bending part of
the spring (the central part between two supporting points) has a
thickness smaller than the other parts so that the spring member
has a reduced elastic modulus which provides effects equivalent to
those obtained by increasing the effective length of the spring.
When an image display device is formed using a plurality of optical
switching devices, a plurality of plate-shaped springs serving as
supporting members may be disposed at regular intervals near
boundaries between adjacent optical switching devices such that
supporting members may be shared by adjacent optical switching
devices.
[0020] The post may be a protrusion extending along a long length
at the boundary between adjacent optical switching devices.
Alternatively, a plurality of posts may be disposed at proper
intervals along the boundary. This allows a reduction in space
occupied by the posts, and the remaining space can be used for the
electrode or another element. The posts may be disposed at random
locations or at locations determined according to a particular rule
so as to provide a high-stability optical switching device and an
image display device having a symmetric structure which can be
easily assembled.
[0021] The spring member may be formed using an electrically
conductive thin-film such as a boron-doped silicon thin-film such
that the thin-film also serves as an electrode of the electrostatic
driving means.
[0022] An auxiliary post may be disposed between the light guide
and the spring member. In this case, if the spring member is formed
in the shape of a plate having neither a slit nor an opening, as
opposed to the above-described example, then it is possible to
enclose the side where the switching part is disposed in a
substantially hermetic fashion such that the side where the
switching part is disposed has a lower pressure than the side where
the driving means is disposed, whereby the spring member is pressed
by the ambient pressure against the auxiliary post thereby ensuring
that the gap between the switching part and the light guide is
maintained uniform. Furthermore, the pressure difference allows the
switching part to be in intimate contact with the light guide when
the switching part is in the on-state. This makes it possible to
provide a high-contrast optical switching device capable of
operating in a stable fashion.
[0023] If the inside of the optical switching device with the
switching part includes a hermetically enclosed space, and if the
driving means is disposed in the hermetically enclosed space, then
it is possible to reduce the pressure in the enclosed space or
replace air in the enclosed space with gas such as an inert gas
with a low pressure. This allows a reduction in the gas flow
resistance during a switching process. As a result, friction with
gas due to a damper effect or the like is greatly reduced.
Therefore, it is possible to reduce the driving voltage and
increase the driving speed. Furthermore, it is possible to perform
on/off switching operations at a high speed. Thus, it is possible
to provide an optical switching device capable of responding at a
high speed.
Driving the Switching Part
[0024] In the optical switching device in which the switching part
is driven by a combination of elastic and electrostatic forces, it
is important that the switching part can be driven by a driving
voltage which is as small as possible.
[0025] If the distance along which the switching part moves in each
on-to-off or off-to-on switching operation is denoted by d, and the
driving voltage is denoted by Vd, then the elastic force Fg and the
electrostatic force Fs exerted on the switching part during the
switching operation can be represented as follows:
Fg=K.times.x (1)
Fs=C.times.Vd.sup.2/(d-x).sup.2 (2)
[0026] where x is the moving distance of the switching part, K is
the elastic modulus of the supporting member, and C is a constant
which is proportional to the area of the electrode and which
depends on the dielectric constant. When the switching part is at
rest after the on/off switching motion, the elastic force Fg and
the electrostatic force Fs are balanced. Therefore, to reduce the
driving voltage Vd, it is desirable to reduce the elastic force Fg.
A reduction in the moving distance d is also desirable. However, if
the elastic modulus K is reduced, the moving speed of the switching
part decreases. As a result, a reduction in the response speed
occurs. On the other hand, if the moving distance x is reduced, it
becomes difficult to obtain a sufficiently high on-off contrast.
For the above reason, it is difficult to reduce the driving voltage
Vd. If the elastic force Fg and the electrostatic force Fs are
balanced at the on- or off-position, there is possibility that the
attitude of the switching part becomes instable and degradation of
the light modulation performance occurs. In switching devices using
an evanescent wave, even a slight gap between the total reflection
plane and the extraction plane can cause a reduction in the amount
of extracted light.
[0027] In view of the above, the present invention provides a
technique of driving the switching part in a highly reliable
fashion at a high speed so as to obtain high optical contrast,
using a reduced driving voltage Vd under the same conditions
regarding the moving distance d and the elastic modulus K.
[0028] To this end, in the present invention, a fixed bias voltage
with the same polarity as that of the driving voltage is applied
between the electrodes by which the switching part is driven,
thereby reducing the voltage required to drive the switching part.
Furthermore, in order to hold the switching part at the on-position
in a stable fashion under the application of the bias voltage, the
holding force at the on-position is set to a value greater than the
force created by the bias voltage. To this end, there is provided
driving control means for applying to the electrostatic driving
means a driving voltage for driving the switching part and a fixed
bias voltage which is equal in polarity to the driving voltage and
which provides a holding force capable of stably holding the
switching part at least at the first position by means of
electrostatic force or elastic force. The invention also provides a
method of controlling a spatial optical modulation device,
comprising a control step for applying to the electrostatic driving
means a driving voltage for driving the switching part and a fixed
bias voltage which is equal in polarity to the driving voltage and
which provides a holding force capable of stably holding the
switching part at least at the first position by means of
electrostatic force or elastic force.
[0029] The application of the fixed bias voltage allows a reduction
in the driving voltage which is applied to drive the switching
part, and thus allows a reduction in the power supply voltage
applied to the driving control means. Therefore, the control
circuit serving as the driving control means is allowed to have a
lower breakdown voltage, and it is possible to construct the
control circuit in a simpler configuration. Furthermore, the power
consumption can be reduced. By providing a holding force large
enough to hold the switching part at the first position, it is
assured that the switching part is maintained in a stable state
with respect to the orientation when the bias voltage is applied.
This allows the bias voltage to be continuously applied even when
the switching part is at the first position. This means that the
control of the bias voltage is not needed or can be simplified.
[0030] Preferably, there is provided a stopper for assuring a
minimum gap between the electrodes at one of the first and second
positions at which the holding force is provided by the driving
voltage thereby preventing the electrostatic force generated by the
bias voltage from becoming infinitely large when the switching part
is at the first or second position and thus assuring that the
electrostatic force is within a predetermined range. Preferably,
the bias voltage is selected such that the electrostatic force
generated by the bias voltage when the switching part is at the
stopper position is smaller than the elastic force of the
supporting member. This allows the switching part to be moved only
by turning on and off the driving voltage. That is, it is allowed
to maintain the bias voltage at a fixed value without controlling
the bias voltage.
[0031] Alternatively, the bias voltage may be periodically applied
such that the electrostatic force generated by the bias voltage
becomes smaller than the elastic force of the supporting member
when the switching part is at the first or second position. More
specifically, the bias voltage may be changed in synchronization
with an operating clock signal so that the switching part is
allowed to be moved, at particular times corresponding to the
timing of the operating clock signal, from the first or second
position by the elastic force of the supporting member. Therefore,
only by varying the bias voltage at predetermined intervals without
having to control the bias voltage in synchronization with the
driving voltage, it is possible to move the switching part in
response to the driving voltage. This makes it easy to control the
bias voltage. Furthermore, this technique also allows the bias
voltage to have a value greater than the elastic force of the
supporting member. Thus, it is possible to further reduce the
driving voltage.
[0032] Furthermore, because the employment of the stopper for
assuring the minimum gap between the electrodes assures that the
electrostatic force created by the bias voltage falls within a
predetermined range, it is possible to move the switching part in
response to the driving voltage if the bias voltage is periodically
changed to a value so that the electrostatic force created by the
bias voltage at the stopper position becomes smaller than the
elastic force of the supporting member. This makes it possible to
limit the variation of the bias voltage within a small range. As a
result, it is possible to form the circuit for controlling the bias
voltage in a simple fashion, and a reduction in power consumption
can be achieved.
[0033] The switching part may be moved by the supporting member
from the second position to the first position and may be held at
the first position by the elastic force provided by the supporting
member. More specifically, the bias voltage at the first position
is set not such that the electrostatic force created by the bias
voltage is in equilibrium with the elastic force of the supporting
member but such that the electrostatic force created by the bias
voltage becomes smaller than the elastic force of the supporting
member thereby assuring a stable holding force at the first
position. As described above with reference to equation (2), the
electrostatic force varies in inverse proportion to the square of
the distance. Therefore, if the supporting member is set to have a
proper displacement at the first position such that an elastic
force is provided by the supporting member at the first position,
then it is possible to drive the switching part in a stable fashion
using a driving voltage smaller than a value which produces
absolutely no equilibrium with the elastic force of the supporting
member at any point. In this case, the driving voltage is allowed
to produce equilibrium with the elastic force of the supporting
member at one or more points, as long as there is no equilibrium
point in the range between the first position and the second
position. This technique allows the driving voltage to be reduced
without applying a bias voltage. If this technique is combined with
the application of bias voltage, then it is possible to further
reduce the driving voltage.
[0034] Alternatively, the supporting member may be formed to be
capable of supporting the switching part at a substantially central
position between the first and second positions when no
electrostatic force is exerted on the switching part, and the
electrostatic driving means may include a first pair of electrodes
for holding the switching part at the first position and a second
pair of electrodes for holding the switching part at the second
position. If a driving voltage is alternately applied to the first
and second pairs of electrodes, a holding force can be provided by
the electrostatic force at the respective positions. In this
technique, each pair of electrodes is responsible for moving the
switching part one-half the distance between the first and second
positions. Because the distance between each pair of electrodes for
creating the electrostatic force becomes one-half the distance in
previous examples, the driving voltage can be greatly reduced, as
can be understood from equation (2). This allows the driving
voltage to be reduced even when no bias voltage is applied. Of
course, this technique can be combined with the application of bias
voltage to further reduce the driving voltage.
[0035] As described above, the optical switching device and the
method of controlling the same according to the present invention
allow the driving voltage to be reduced without changing either the
distance between the first and second positions associated with the
switching part or the elastic modulus of the supporting member.
This makes it possible to drive the high-speed and high-contrast
optical switching device using a small driving voltage. The control
method according to the present invention is not limited to the
optical switching device described above, but it can be applied to
any spatial optical modulation device in which a switching element
is mechanically moved thereby modulating light. Thus, it is
possible to provide a spatial optical modulation apparatus capable
of operating at a high speed with small power consumption at low
cost.
Controlling the Attitude of the Switching Part
[0036] In the art of the optical switching device using evanescent
light, it is always important to improve the operating speed. In
view of the above, the present invention provides a technique of
further increasing the operating speed of the optical switching
device or the spatial optical modulation device which modules light
by moving the switching part including the flat extraction
plane.
[0037] The inventors of the present invention have investigated the
operation of optical switching devices including an element in the
form of a flat plate such as an extraction plane. The investigation
has revealed that when the switching part moves a small distance at
a high speed in the switching operation, the resistance of air or
fluid such as an inert gas between the extraction plane of the
switching part and the total reflection plane or the resistance of
air or fluid which occurs when the switching part moves acts as a
non-negligible force against the motion of the switching part, and
that the operating speed can be greatly improved by reducing such
resistance of the fluid. One technique of reducing the fluid
resistance is to operate the optical switching device in a vacuum
as described above with reference to one embodiment of the
invention. However, to obtain a vacuum ambient in which the
switching part or the driving part is disposed, an additional
member such as a pressure-resistant container is required, which
causes increases in the size of the device and cost. Furthermore,
in production, an additional processing step is required to obtain
the vacuum ambient. In the case of an optical switching device
which can be used only in a vacuum ambient, if leakage occurs
during operation, abrupt degradation in performance occurs or the
optical switching device becomes inoperative. Thus, such a type of
optical switching device has a problem associated with reliability.
Thus, the present invention provides a technique of reducing the
fluid resistance by controlling the motion (attitude) of the
switching part, as described below. More specifically, in an early,
intermediate, or final stage of the moving process, the driving
means tilts the orientation of the extraction plane of the
switching part with respect to a first direction in which the
extraction plane faces when the switching part is at the first
position. By tilting the switching part in the early stage of the
moving process, it becomes possible for a fluid to smoothly flow
into a space which is created as a result of separation of the
switching part which occurs when the switching part start to move.
That is, the fluid resistance can be reduced.
[0038] If the switching part is then moved while maintaining the
tilted state, the inclination of the flat plane element with
respect to the moving direction results in a reduction in the fluid
resistance exerting on the moving switching part. The tilt of the
switching part in the final stage of the moving process allows the
fluid to smoothly escape from the space decreasing in volume as the
switching part comes into the final resting position. Thus, the
fluid resistance is reduced also in this case. As described above,
the fluid resistance can be reduced by tilting the flat plane
element at least in one of the early stage, main stage, and the
final stage of the moving process of the switching part. If the
flat plane element is tilted in all of the early stage, main stage,
and the final stage of the moving process or in any two of those, a
further reduction in the fluid resistance can be achieved. The
reduction in the resistance during the movement of the switching
part results in an increase in the moving speed and an increase in
the modulation speed. Because this technique allows the fluid
resistance to be reduced without reducing the pressure in the
ambient in which the switching part is disposed or without needing
a vacuum ambient, the optical switching device can be operated at a
high speed in a common environment without having to placing the
optical switching device in a pressure container. Thus, it is
possible to provide a high-speed and high-reliability optical
switching device at low cost.
[0039] In the optical switching device using evanescent light
according to the present invention, when the extraction plane of
the switching part in contact at the first position with the total
reflection plane moves away from the total reflection plane or when
the extraction plane of the switching part comes into contact with
the total reflection plane, motion of the fluid is limited. This
causes an increase in resistance against the movement of the
switching part. This problem can be avoided by tilting the
switching part in the early stage or the final stage of the
movement process thereby making it possible for the fluid to flow
into or escape from a space between the extraction plane and the
total reflection plane. This allows a great improvement in the
operating speed.
[0040] Of course, this method of controlling the attitude may also
be applied to various types of spatial modulation devices other
than the optical switching device using a flat plane element
according to the invention.
[0041] The attitude of the switching part may be controlled by
applying a driving force having a distribution asymmetric about the
center of gravitation of the switching part to the switching part
thereby bringing the switching part into an asymmetric state, that
is, into a tilted state. Using this technique, it is possible to
tilt the switching part in the early stage, the main stage, or the
final stage of the moving process. One method of applying a driving
force having an asymmetric distribution is to form the switching
part such that it has a center of gravitation at a point shifted
from the geometric center thereby allowing a driving force
symmetric with respect to the geometric shape of the switching part
to behave as a force asymmetric about the center of gravitation of
the switching part thus tilting the switching part.
[0042] Another method is to form the driving means including a
supporting member for elastically supporting the switching part
such that the supporting member has an elastic modulus distribution
which is, at least partially, asymmetric about the center of
gravitation of the switching part thereby allowing a driving fore
asymmetric about the center of gravitation of the switching part to
be applied to the switching part. In the case where the driving
means includes electrostatic driving means consisting of a first
electrode disposed on the switching part and a second electrode
disposed at a location opposing the first electrode, the shape of
the first electrode or the second electrode or the distance between
the first and second electrodes may be, at least partially,
asymmetric about the center of gravitation of the switching part
thereby allowing an asymmetric driving fore to be applied to the
switching part.
[0043] Still another method is to divide the first or second
electrode into a first and second parts which are asymmetric to
each other about the center of gravitation of the switching part
and apply electric power to the first and second parts in such a
manner that the timing of applying electric power or the voltage of
the electric power is different between the first and second parts
thereby applying an asymmetric driving force to the switching
part.
[0044] When the switching part is at the second position, it is not
necessarily required that the orientation of the switching part is
parallel to the orientation at the first position. If the switching
part is adapted to rest at the second position while maintaining
the tilted orientation, it is possible to make a smooth transition
to or from a tilted state in the early stage, the main stage, and
the final stage of the moving process. As a result, the fluid
resistance is further reduced, and the operating speed is
improved.
[0045] One method of maintaining the tilted orientation of the
switching part at the second position is to form the supporting
member of the driving means such that its elastic modulus becomes
asymmetric about the center of gravitation of the switching part.
Another method is to form the first and second electrodes such that
the distance between the first and second electrodes becomes
asymmetric. Still another method is to form the supporting post the
switching part comes into contact with at the second position such
that the distance between the supporting post and the switching
part becomes asymmetric about the center of gravitation of the
switching part.
BRIEF DESCRIPTION OF THE DRAWINGS
[0046] FIG. 1 is a cross-sectional view schematically illustrating
the construction of an optical switching device according to a
first embodiment of the present invention.
[0047] FIG. 2 is a cross-sectional view illustrating, in an
enlarged fashion, the construction of the optical switching device
shown in FIG. 1.
[0048] FIG. 3 is a graph illustrating the transmittance of an
evanescent wave as a function of the distance between a total
reflection plane and an extraction plane.
[0049] FIG. 4 is a schematic diagram illustrating the construction,
seen from the side of a substrate, of a spring member of the
optical switching device shown in FIG. 1.
[0050] FIG. 5 is a schematic diagram illustrating an example of a
spring member different from that shown in FIG. 4.
[0051] FIGS. 6a and 6b are schematic diagrams illustrating another
example of a spring member different from that shown in FIG. 4.
[0052] FIG. 7 is a schematic diagram illustrating still another
example of a spring member different from that shown in FIG. 4.
[0053] FIG. 8 is a schematic diagram illustrating an example of a
projector using the image display device shown in FIG. 1.
[0054] FIG. 9 is a schematic diagram illustrating the construction
of another optical switching device.
[0055] FIG. 10 is a graph illustrating the elastic force (spring
fore) and the electrostatic force in the optical switching device
shown in FIG. 1 as a function of the moving distance (displacement)
of the switching part.
[0056] FIG. 11 is a timing chart illustrating the operation of
driving the optical switching device shown in FIG. 1 by a driving
voltage together with a varying bias voltage.
[0057] FIG. 12 is a schematic diagram illustrating an example of
the construction of an optical switching device according to a
second embodiment of the present invention.
[0058] FIG. 13 is a graph illustrating the driving power for
driving the switching device shown in FIG. 12 wherein the driving
power for the switching device shown in FIG. 1 is also shown for
comparison.
[0059] FIG. 14 is a graph illustrating the elastic force (spring
force) and the electrostatic force in the optical switching device
shown in FIG. 12 as a function of the moving distance
(displacement) of the switching part.
[0060] FIG. 15 is a timing chart illustrating the operation of
driving the optical switching device shown in FIG. 12 by a driving
voltage together with a varying bias voltage.
[0061] FIG. 16 is a schematic diagram illustrating an optical
switching device using evanescent light according to a third
embodiment of the present invention, wherein FIG. 16(a) illustrates
an on-state in which the switching part is at a first position and
FIG. 16(b) illustrates an off-state in which the switching part is
at a second position.
[0062] FIG. 17 is a schematic diagram illustrating the structure of
the switching part, seen from the side of the address electrode, of
the optical switching device shown in FIG. 16.
[0063] FIGS. 18a through 18d are cross-sectional views illustrating
a series of steps in the moving process from the on-state (first
position) to the off-state (second position) in the optical
switching device shown in FIG. 16.
[0064] FIG. 19 is a graph illustrating the distance between the
address electrode and the base electrode of the optical switching
device shown in FIG. 16 as a function of time, wherein FIG. 19(a)
illustrates an on-to-off transition and FIG. 19(b) illustrates an
off-to-on transition.
[0065] FIG. 20 is a schematic diagram illustrating another example
of the construction of the optical switching device according to
the third embodiment.
[0066] FIG. 21 is a schematic diagram illustrating still another
example of the construction of the optical switching device
according to the third embodiment.
[0067] FIG. 22 is a schematic diagram illustrating still another
example of the construction of the optical switching device
according to the third embodiment.
[0068] FIG. 23 is a schematic diagram illustrating still another
example of the construction of the optical switching device
according to the third embodiment.
[0069] FIG. 24 is a schematic diagram illustrating still another
example of the construction of the optical switching device
according to the third embodiment.
[0070] FIG. 25 is a schematic diagram illustrating still another
example of the construction of the optical switching device
according to the third embodiment.
[0071] FIG. 26 is a cross-sectional view of the optical switching
device shown in FIG. 25.
[0072] FIG. 27 is a schematic diagram illustrating the optical
switching device shown in FIG. 16, wherein the switching part is at
rest in the second position in such a manner that the switching p
art is tilted with respect to a first direction.
[0073] FIG. 28 is a schematic diagram illustrating a modification
of the optical switching device shown in FIG. 27.
[0074] FIG. 29 is a schematic diagram illustrating another
modification of the optical switching device shown in FIG. 27.
[0075] FIG. 30 is a schematic diagram illustrating an optical
switching device according to a fourth embodiment of the present
invention, in which the center of gravitation is shifted.
[0076] FIG. 31 is a schematic diagram illustrating an optical
switching device according to a fifth embodiment of the present
invention, in which an address electrode is formed to be asymmetric
in shape.
[0077] FIG. 32 is a schematic diagram illustrating a modification
of the optical switching device according to the firth embodiment
shown in FIG. 5.
[0078] FIG. 33 is a schematic diagram illustrating another
modification of the optical switching device according to the firth
embodiment shown in FIG. 5.
[0079] FIG. 34 is a schematic diagram illustrating still another
modification of the optical switching device according to the firth
embodiment shown in FIG. 5.
[0080] FIG. 35 is a schematic diagram illustrating an optical
switching device including divided electrodes, according to a sixth
embodiment of the present invention.
[0081] FIGS. 36a and 36b are schematic diagrams illustrating an
operating process in the optical switching device shown in FIG. 35,
wherein a state in which the switching part is at the first
position and a state just after the switching part started to move
from the first position are shown.
[0082] FIGS. 37a and 37b are schematic diagrams illustrating an
operating process in the optical switching device shown in FIG. 35,
wherein a state in which the switching part is in motion and a
state in which the switching part comes to rest at the second
position are shown.
[0083] FIG. 38 is a timing chart illustrating a process of
controlling the optical switching device shown in FIG. 35.
[0084] FIGS. 39a and 39b are schematic diagrams illustrating a
modification of the optical switching device according to the sixth
embodiment shown in FIG. 35, wherein a state in which the switching
part is at the first position and a state just after the switching
part started to move from the first position are shown.
[0085] FIGS. 40a and 40b are schematic diagrams following FIG. 39
and illustrating a state in which the switching part is in motion
and a state in which the switching part comes to rest at the second
position.
[0086] FIG. 41 is a timing chart illustrating a process of
controlling the optical switching device shown in FIGS. 39 and
40.
[0087] FIG. 42 is a schematic diagram illustrating an optical
switching device using a piezoelectric device.
[0088] FIG. 43 is a schematic diagram illustrating a conventional
optical switching device using a liquid crystal.
BEST MODE FOR CARRYING OUT THE INVENTION
[0089] [First Embodiment]
[0090] General Construction of Optical Switching Device
[0091] FIG. 1 illustrates in cross section the general construction
of an optical switching device 1 acting as a spatial optical
modulator according to the present invention and also the general
construction of an image display device 2 constructed by disposing
a plurality of optical switching devices 1 in a two-dimensional
array fashion. FIG. 2 is a view mainly illustrating in an enlarged
fashion a switching part of the optical switching device. In this
optical switching device 1 according to the present invention, if
the switching part 30 having a light transmissive extraction plane
32 is placed such that the extraction plane 32 is brought into
contact with the total reflection plane 22 of a light guide 20
capable of totally reflecting input light 10 by its total
reflection plane 22 thereby transmitting the input light 10, then
evanescent light is extracted. The extracted light is reflected by
the switching part 30 toward the light guide 20 and emitted to the
outside as output light 11 through the output plane 21 of the light
guide 20. In this optical switching device 1, the incident light 10
is modulated (turned on and off) at a high speed in response to a
small displacement of the switching part 30 equal to or smaller
than a wavelength. To displace the switching part 30 in such a
manner, the switching part 30 is driven by a driving part 40 by
means of electrostatic force and spring force. The driving part 40
is controlled by electric power supplied from a controller 70. The
light guide 20, the switching part 30, the driving part 40 for
driving the switching part 30, and a silicon substrate 70 on which
an integrated circuit for controlling the driving part 40 are each
constructed in the form of layers disposed one on another. That is,
the optical switching device 1 of the present embodiment has a
multilayer structure in which the respective functional parts are
disposed one on another.
[0092] The construction of the optical switching device 1 is
described in further detail below. The optical guide (light guide,
cover glass) 20 of the optical switching device 1 is made of glass
or transparent plastic which is highly transmissive to incident
light 10. The incident light 10 is incident at a proper angle with
respect to the total reflection plane 22 so that the incident light
10 is totally reflected by the total reflection plane 22. If the
extraction plane 23 of the switching part 30 is placed at a
position P1 (a first position or an on-position) which is in close
proximity to or in intimate contact with the total reflection plane
32 so that evanescent light can be extracted, as is the case with a
switching device 1a shown in FIG. 2, then the incident light 10 is
extracted from the light guide 20 into the switching part 30. The
switching part 30 includes a triangular microprism 34 serving as a
light outputting member disposed such that the flat extraction
plane 32 of the microprism 34 faces the total reflection plane 22
of the light guide. Light extracted through the basal plane or the
extraction plane 32 is reflected by a reflection plane 34a of the
microprism 34 in a direction substantially perpendicular to the
total reflection plane 22. The reflected light passes through the
light guide 20 and is output to the outside through the output
plane 21.
[0093] On the other hand, if the switching part 30 is moved away
from the first position such that the extraction plane 32 comes to
a position (a second position or an off-position) apart from the
total reflection plane 22 as is the case with a switching device 1b
shown in FIG. 2, the incident light 10 is totally reflected by the
total reflection plane 22 and thus no evanescent light is extracted
from the light guide 20. In this case, no output light 11 is
obtained.
[0094] FIG. 3 shows examples of transmittance of evanescent waves.
If a transparent element is placed in close proximity to a plane at
which light is totally reflected, leakage of an evanescent wave
toward the transparent element occurs and thus light passes through
the plane. The transmittance of the evanescent wave varies
depending on the refractive index of a medium and the incidence
angle. In FIG. 3, L1 is a transmission curve representing the
evanescent wave transmittance (in %) plotted as a function of the
distance (in .mu.m) between the total reflection plane 22 and the
extraction plane (transparent element) 32 for light with a
wavelength .lambda. of 500 nm incident at 50.degree.. Similarly,
characteristic curves L2, L3, and L4 represent transmittance for
light incident at 60.degree., 70.degree., and 80.degree.,
respectively. These characteristic curves have a similar tendency.
That is, when the extraction plane 32 comes to a position (first
position) as close as 0.1-0.05 .mu.m or less to the total
reflection plane 22, the transmittance becomes about 50%. On the
other hand, if the extraction plane 32 moves to a position (second
position) which is 0.2 .mu.m or more apart from the total
reflection plane 22, the transmittance drops to 10% or lower. If
the extraction plane 32 further moves away until the distance from
the total reflection 22 becomes greater than 0.3 .mu.m, the
transmittance becomes nearly equal to 0%. This means that
transition between the on-state represented by the optical
switching device 1a in FIG. 2 and the off-state represented by the
optical switching device 1b can be achieved by moving the
extraction plane 32 by a distance as small as 0.2 to 0.3 .mu.m.
Thus, it is possible to control pixels at a high speed using the
optical switching device 1 of the present embodiment thereby
obtaining an image with high contrast. Because the extraction plane
32 needs to be moved by only a small distance, electrodes for
driving the switching part 30 having the extraction plane are
allowed to be located close to each other. As a result, it is
possible to reduce the driving voltage applied between the
electrodes to generate electrostatic force for moving the switching
part 30. Thus, it is possible to provide an image display device 2
capable of operating at a high speed with a low power consumption
to display a high-contrast image.
Construction of Driving Part
[0095] The driving part 40 for driving the switching part 30 is
described in further detail below. A base electrode 62 is disposed
on the lower side of the switching part 30 such that the base
electrodes 62 faces the silicon substrate 70. An electrode 60 is
disposed on the upper surface of the silicon substrate 70 such that
the electrode 60 opposes the base electrode 62. Electrostatic force
is generated by the combination of these electrodes 60 and 62
thereby driving the switching part 30. The driving part 40 also
includes yokes (supporting member) 50 formed of thin elastic films
extending from posts 44 disposed in peripheral areas of the
switching part 30 to the switching part 30. Thus, in the switching
device 1 of the present embodiment, by the electrostatic force Fs
generated by electrostatic driving means composed of a pair of
electrodes 60 and 62 and the elastic force Fg of the yokes 50, the
switching part 30 can be moved to the first position P1 represented
by the switching device 1a and the second position P2 represented
by the switching device 1b.
[0096] The switching part 30 which is moved in the above-described
manner is supported by the yokes 50 via a spacer 42. The spacer 42
is generally T-shaped in cross section. More specifically, the
central portion of the spacer 42 extends toward the surface 71 of
the substrate 70 and there is a narrow gap (first space) between
the lower surface 42a of the spacer 42 and the substrate surface
71. In contrast, the portions (peripheral portions) 42b on both
sides of the spacer 42 is spaced more widely from the substrate
surface 71. That is, there is a wide gap (second space) between the
peripheral portions 42b and the substrate surface 71. The
electrodes 62 and 60 are located opposite each other via the first
space 45 which is narrow. In the second space 46 which is wide,
there are disposed the yokes 50 serving as a spring member such
that the spacer 42 is connected via the yokes 50 to posts 44
disposed at boundaries between adjacent switching devices 1 whereby
the switching part 30 is elastically supported and positioned by
the yokes 50 via the spacer 42.
[0097] As represented by the optical switching devices 1a and 1b in
FIG. 2, the second space 46 formed by the T-shaped spacer 42 allows
the spring member 50 in the form of a plate to be deformed. This
allows the spring member 50 to be properly disposed without needing
expansion of the gap (first space) between the electrodes 60 and
62. As a result, the distance between the electrodes 60 and 62
forming electrostatic driving means can be set to a small value
which allows reductions in the driving voltage and power
consumption.
[0098] Furthermore, by employing the T-shaped spacer 42, the second
space 46 is formed below the prism 34, that is, below the switching
part 30, and the spring member 50 can be disposed in this second
space 46. This makes it possible to dispose all portions
constituting the driving part 40 including the spring member 50 in
the layer under the switching part 30, and thus the optical
switching device 1 can be constructed in a multilayer fashion as
described above. In this structure, because the spring member 50 is
disposed in the layer of the driving part 40, there is no necessity
for creating a space in the layer of the optical switching part 30
between adjacent optical switching devices 1a and 1b to dispose the
spring member 50 therein. This makes it possible to increase the
area of the prism 34. As a result, it is possible to obtain a high
effective area ratio (aperture ratio) through which light is
extracted from the light guide 20 and thus it is possible to
provide a high-brightness optical switching device capable of
outputting a large amount of light.
[0099] Furthermore, in the optical switching device 1 of the
present embodiment, the posts 44 are disposed in the layer of the
driving part 40 such that the switching part 30 is supported by the
driving part 40. Therefore, it is not required that the light guide
20 have a structure formed by means of etching or the like for
supporting the prism 34. In the structure of the present
embodiment, therefore, the total reflection plane 22 of the light
guide 20 becomes a flat plane opposing a plurality of optical
switching devices 1. Thus, the light guide 20 can be constructed
into a simple shape. Furthermore, because there is no spring member
50 in the switching part 30, spaces between adjacent switching
parts 30 can be minimized. That is, the optical switching devices
1a and 1b can be disposed substantially without being spaced from
each other. Therefore, by employing the optical switching device of
the present embodiment, it is possible to provide an image display
device 2 capable of forming a seamless or nearly-seamless image
formed of pixels located close to each other substantially without
being spaced from each other such that boundaries between adjacent
pixels cannot be perceived.
[0100] Furthermore, in the optical switching device 1 of the
present embodiment, when the optical switching device is in the
on-state, the extraction plane of the microprism 34 is urged not by
electrostatic force but by force of the spring member 50 into
contact with the total reflection plane 22 of the light guide 20,
as represented by the optical switching device 1a. In the on-state,
the spring member 50 has a small displacement 51 that causes the
prism 34 to be pressed against the total reflection plane 22.
Although electrostatic force can be easily controlled by electric
power, the electrostatic force which urges the extraction plane 32
against the total reflection plane 22 varies if the supplied
voltage varies. As can be seen from FIG. 3, if the gap between the
extraction plane 32 and the total reflection plane 22 increases to
0.1 to 0.15 .mu.m owing to a reduction in the urging force due to a
reduction in the voltage, the transmittance drops to 20% or lower
and thus a reduction in the on-off contrast occurs. In contrast,
because the force obtained by the spring member 50 is a mechanical
force, it is stable regardless of variations in voltage. In the
switching device 1 of the present embodiment, in view of the above,
the on-state is obtained using stable driving force generated by
the spring member 50, and the off-state is obtained using
electrostatic driving force which can be easily controlled. This
makes it possible to provide an optical switching device which can
be controlled in a highly reliable fashion to stably output
light.
[0101] Furthermore, the spring member 50 is set to have a
displacement (bending) 51 in the on-state so that the extraction
plane 32 is urged by force with a proper magnitude into contact
with the total reflection plane 22. Thus, even if the gap between
the light guide and the switching part or the gap between the
optical switching part and the driving part varies owing to
vibrations, a temperature change, or changes in other factors with
time, the change in the gap does not result in a reduction in the
on-off contrast. Furthermore, in the switching device 1 of the
present embodiment, because the spring member 50 is disposed in the
wide space 46 provided by the T-shaped spacer 42 as described
above, the spring member 50 can be displaced within the space 46.
The displacement 51 of the spring member 50 is preferably set to a
value approximately equal to the gap in the off-state, that is, in
the range from 0.1 to 0.2 .mu.m.
[0102] In the present embodiment, the spring member 50 is made of a
thin film 49 of boron-doped silicon such that the spring member 50
has electrical conductivity. The part of this thin-film 49 located
in the wide space 46 serves as the spring member 50, whereas the
part of the thin-film 49 in the narrow space 45 is fixed to the
spacer 42 so that it serves as the electrode 62.
Construction of Supporting Member (Spring Member)
[0103] In the present embodiment, as described above, the driving
part 40 of the optical switching device 1 is constructed of the
supporting member (spring member or yoke) 50 having elastic force
and the elastic driving means including the electrodes 60 and 62
such that the driving part 40 can drive the switching part at a
high speed. Of these elements, it is important that the spring
member 50 has a proper elastic modulus. If the elastic modulus is
too great, a very large force is required to move the spring member
50 even by a small distance. Thus, a large electrostatic force is
needed and a corresponding high driving voltage is required.
Conversely, if the elastic modulus is too small, the spring member
50 cannot provide a force large enough to urge the extraction plane
32 of the prism 34 into contact with the total reflection plane 22.
The desirable size of the optical switching device 1 used to form a
pixel of the image display device 2 is several ten .mu.m to several
hundred .mu.m. In such a micromachine, it is important that the
effective length of the spring member 50 is maximized so as to
minimize its elastic modulus. To this end, in the optical switching
device 1 of the present embodiment, the spring member 50 is
disposed in the wide space 46 provided by the T-shaped spacer 42 so
as to achieve a large effective length. Furthermore, the width of
the spring member 50 is reduced and the effective length is
increased.
[0104] Furthermore, by forming the spring member 50 using the
boron-doped silicon thin-film 49 which is electrically conductive,
it becomes possible to use the spring member 50 also as the
electrode 62. Alternatively, another electrically conductive
thin-film such as an Al film, Pt film, or Ag film may also be
employed to form the spring member 50 which also serves as the
electrode.
[0105] FIG. 4 illustrates the driving part 40 of the optical
switching device 1 of the present embodiment seen from below (seen
from the side of the substrate 70). In order to form the spring
member 50 having parts (shaded with vertical lines for clear
illustration) radially extending from the posts 44 located at four
corners toward the lower surface 42a of the spacer 42, the silicon
thin-film 49 is cut so as to form large openings at boundaries with
neighboring switching devices. The generally rectangular-shaped
part of the silicon thin-film 49 remaining on the lower surface 42a
serves as the electrode 62 (diagonally shaded for clear
illustration). By forming the spring member 50 into the shape of a
plate with a small width as described above, its effective length
can be increased, and thus the driving voltage required can be
reduced. When the spring member with such a small width is employed
in the image display device, parts of the spring member at
boundaries with adjacent optical switching devices can be small
enough in width so that on-off operations of the optical switching
devices forming the respective pixels do not interfere with one
another.
[0106] FIG. 5 illustrates another example of a spring member 50
different from that described above. In this example, slits 58 are
formed in a silicon thin-film 49 such that they radially extend
from a spacer 42 toward the posts 44 thereby forming a long and
narrow spring member 50 and also forming an expanded electrode 62a
radially extending from the electrode 62 disposed on the lower
surface of the spacer 42, thus expanding the area of the electrode
62. The expansion of the area of the electrode 62 makes it possible
to drive the switching part 30 by a smaller driving voltage.
[0107] FIG. 6 illustrates still another example of a spring member
50 different from those described above. Of a plurality of optical
switching devices 1 two-dimensionally arranged to form an image
display device, four optical switching devices 1 seen from the side
of the silicon substrate 70 are shown in FIGS. 6(a) and 6(b). In
this example, slits 58 are formed in the silicon thin-film 49 such
that they extend in directions parallel to the boundaries between
adjacent optical switching 1X devices 1 thereby forming spring
members 50 each extending in a spiral fashion around the respective
spacers 42, that is, along the boundaries of the respective optical
switching devices 1. By employing the spring members 50 extending
along the boundaries, it becomes possible to further increase the
effective length of the each spring member 50, and it also becomes
possible to expand the bottom surface 42a of each spacer 42 thereby
allowing the area of each electrode 62 to be expanded.
[0108] As a result of the above effects, it becomes possible to
greatly reduce the driving voltage. In the example shown in FIG.
6(b), the length of each slit 58 is further increased so that each
spring member 50 extends in a spiral fashion along two sides of
boundaries of each switching device 1 thereby achieving a greater
effective length of the spring member 50 and thus achieving a
further reduction in the driving voltage. It is also possible to
further increase the length of the slit 58 so as to obtain a spring
member 50 with a greater effective length extending along
boundaries.
[0109] FIG. 7 illustrates still another example of a spring member
50. In this example, the elastic modulus of each spring member 50
is reduced by reducing the thickness of central part 55 between the
part directly connected with the spacer 42 and the part connected
with the post 44 thereby making it possible to reduce the driving
voltage required. Thus, the elastic modulus of the spring member 50
can be reduced by using any one of techniques described above or a
combination of any of those techniques, thereby making it possible
to reduce the driving voltage which is applied between the
electrodes 60 and 62 to generate electrostatic force for moving the
optical switching part 30. This allows the optical switching device
1 to operate with low electric power consumption, and thus the
total power of the image display device 2 can be reduced.
[0110] In this embodiment, the optical switching device 1 is
constructed in the form of a multilayer structure consisting of the
light guide 20, the optical switching part 30, and the driving part
40 which are laminated in this order, wherein the optical switching
part 30 is formed to be of a reflective type so that extracted
light is output to the outside in the same direction as that in
those parts are laminated, that is, toward the light guide 20,
without passing through the driving part 40. Therefore, the driving
part 40 can be designed without having to consider optical
characteristics. This allows the driving part 40 to be designed to
have an optimum structure in which all elements required for
supporting and driving the optical switching part 30 are
implemented. Thus, the optical switching part 30 and the light
guide 20 can be constructed in very simple forms. Furthermore, the
layers in which the light guide20, the optical switching part 30,
and the driving part 40 are respectively implemented can be
designed independently of each other. More specifically, the light
guide 20 can be constructed using an element in the form of a plate
with a flat surface serving as the total reflection plane 22. The
switching part 30 can be constructed using a light outputting
member 34 such as a prism with a wide extraction plane 32. The
driving part 40 can be constructed using a high-reliability
mechanism capable of stably performing on/off operations at a high
speed. Thus, the present invention can provide an optical switching
device capable of dealing with a large amount of light without
producing a loss, and also can provide an optical switching device
capable of providing a high-quality image with high on-off
contrast.
[0111] In the optical switching device 1 of the present embodiment,
the driving part 40 may be produced on a silicon integrated circuit
substrate on which circuits such as a driving circuit are formed.
Such a production of the driving part 40 may be accomplished using
a semiconductor processing technique such as an etching process
suitable for microfabrication or a technique for producing a
micromachine. Using such a technique, a high density of integration
of a plurality of optical switching devices 1 may be easily
realized. Thus, using optical switching devices according to the
present invention, it is possible to provide a high-resolution
image display device 2 in the form of a thin shape.
[0112] FIG. 8 illustrates a projector 6 using an image display
device 2 according to the present invention. In this specific
example, the projector 6 includes an integrated circuit chip 5 on
which optical switching parts 30 and driving parts 40 as well as a
driving circuit are formed is attached to the total reflection
plane 22 of a light guide 2. The light guide 20 of the image
display device 2 has a surface 81 through which light is input.
Light rays of three primary colors, red, green, and blue (RGB), or
cyan, magenta, and yellow are emitted from a light source toward
the surface 1. In this example, the light source 80 includes a
white metal halide lamp 80a and a three-color separation filter 80b
rotated by a motor. After being color-separated through the
three-color separation filter 80b, light rays are collimated
through a collimator lens 80c and input into the light guide 20
through the incident surface 81. When the incident light 10 reaches
the total reflection plane 22, it is reflected by the respective
optical switching devices formed on the integrated circuit chip 5
and output as an output light 11 to the outside through the light
guide 20. The output light 11 is projected through a projection
lens 85 onto a screen or the like so as to form a desired image
thereon. A part of the incident light 10 which were not converted
by any optical switching device into the output light 11 is totally
reflected toward a reflection plane 82 located opposite the
incident surface 81. The light is reflected by the reflection plane
82 and transmitted again in the light guide 20 toward the optical
switching devices.
[0113] In the present image display device 2, as described above, a
color image is projected by operating the optical switching devices
formed on the integrated circuit chip 5 in synchronization with the
incident light which is input in a time division fashion.
Alternatively, white light may be employed as the incident light
10, and a color image may be projected using optical switching
devices having a light extraction part with wavelength
selectivity.
[0114] FIG. 9 illustrates another example of an optical switching
device according to the present invention. In this example, the
optical switching device 1 also includes a light guide 20, an
optical switching part 30, and a driving part 40 which are
laminated in this order on the substrate of an integrated circuit
70. Herein, similar parts to those described above are denoted by
similar reference numerals, and they are not described in further
detail. In other embodiments which will be described later, similar
parts will also be denoted by similar reference numerals and they
will not be described in further detail.
[0115] In this example of the optical switching device 1, a thin
film 49 extending between a post 44 and a spacer 42 and serving as
both a spring member 50 and an electrode 62 is supported by an
auxiliary post 40 extending from the light guide 20 such that
distance between an extraction plane 32 and a total reflection
plane 22 is maintained substantially uniform over the entire
optical switching device 1. In this example, neither opening nor
slit is formed in the thin film 49 so that the layer of the
switching part 30 is hermetically enclosed between the thin film 49
and the light guide 20. The pressure in the switching part 30 is
adjusted to be negative with respective to the ambient atmosphere
so that the thin film 49 is brought into intimate contact with the
auxiliary post 48 thereby ensuring that when an image display
device 2 is formed by disposing a plurality of optical switching
devices 1 into the form of a two-dimensional array, the distance
between the thin film 49 and the total reflection plane 22, that
is, the distance between the extraction plane 32 of the optical
switching part 30 attached to the thin film 49 and the total
reflection plane of the light guide 20, is maintained substantially
uniform. As a result, switching is performed in a highly reliable
fashion over all pixels of the image display device 2 composed of a
plurality of optical switching devices 1, thereby ensuring that
high contrast is obtained for all pixels. The auxiliary post 48 is
not necessarily required to be disposed in all switching devices of
respective pixels. Auxiliary posts 48 may be disposed for every
proper number of switching devices or may be disposed at random
locations.
[0116] Furthermore, because the pressure in the region in which the
switching part 30 is disposed is adjusted to be negative, the
extraction plane 32 of the optical switching part 30 is urged by
the ambient pressure toward the total reflection plane 22.
Therefore, in the optical switching device 1 in the present
example, both the ambient pressure and the force provided by the
spring member 50 are used to bring the extraction plane 32 into
intimate contact with the total reflection plane 22 thereby
ensuring high contrast.
[0117] Furthermore, in the optical switching device 1 in this
specific example, the spacer 42 disposed between the spring member
50 and the prism 34 is formed into not a T-shape but an inverted
trapezoidal shape. The inverted trapezoidal-shaped spacer 42 can
also provide a wide space 46 in which the spring member 50 is
disposed and a narrow space 45 in which the electrodes 60 and 62
are disposed.
[0118] Furthermore, in addition to the switching part 30, the
driving part 40 may also be hermetically enclosed so that the
entire region surrounded by the light guide 20 and the silicon
substrate 70 is hermetically enclosed and so that the pressure in
this region is adjusted to be negative. By reducing the pressure in
this region, it becomes possible to reduce flow resistance against
motion, in switching operations, of the prism 34, the spring member
50, and other elements of the optical switching part 30 and the
driving part 40. As a result, resistance due to a damper effect or
the like is greatly reduced. Thus, it becomes possible to increase
the driving speed in the on-off operation and reduce the driving
force required. As a result, it becomes possible to provide a
switching device and an image display device capable of operating
at a high speed with low power consumption. If the gas in the
hermetically enclosed space described above is replaced with a gas
containing no moisture, and if the pressure is adjusted to be
negative with respect to the external pressure, it becomes possible
to remove moisture which can result in adsorption.
[0119] This is another advantage obtained in addition to those
described above. If an inert gas is employed, alterations due to
oxidation or the like can be avoided.
Controlling the Driving Part
[0120] The method of controlling the driving part 40 of the optical
switching device according to the present embodiment is described
in further detail below. As shown in FIG. 2, the switching device
of the present embodiment has a stopper 65 disposed between the
electrodes 60 and 62. When a driving voltage Vd is supplied to the
electrode 60 from the driving control part 70 formed on the silicon
substrate, and thus the switching part 30 is moved toward the
second position P2 by an electrostatic force Fs generated between
the electrodes 60 and 62, the switching part 30 is stopped by the
stopper 65 at the position where the stopper 65 is located. This
ensures that the electrodes 60 and 62 are spaced from each other by
a proper distance (gap) G without being brought into intimate
contact with each other. In addition to the effect of preventing
the electrodes from colliding with each other when the switching
part 30 moves, the stopper 65 also has the effect of preventing the
electrostatic force from becoming infinite at the stopping position
and thus allowing high-speed control using a low voltage, as will
be described in further detail below.
[0121] FIG. 10 illustrates the relationship between the
electrostatic force Fs and the elastic force (spring force) Fg in
the driving part 40 of the present switching device 1.
Electrostatic forces Fs obtained by driving voltages Vd of 10, 20,
30, 40, and 50 V are plotted. In the switching device 1 shown in
FIG. 10, the distance between the electrodes 60 and 62 is 0.5
.mu.m, and the stopper 65 is adjusted such that the distance
between the electrodes 60 and 62 becomes equal to the gap G of 0.1
.mu.m when the electrostatic force Fs is applied. The yoke 50 is
adapted to have a displacement of 0.5 .mu.m (initial displacement
x0) at the first position P1. If the position of the switching part
30 is represented by the displacement x of the yoke 50, when the
switching part 30 moves from the first position P1 to the second
position P2 (the stopper position), the displacement x changes from
the initial value x0 of 0.5 .mu.m to 0.9 .mu.m . That is, the
switching part 30 moves by a distance do of 0.4 .mu.m . As a result
of this movement, an elastic force Fg given by equation (1) is
generated. When the switching part 30 is in the range of do, if the
driving voltage Vd is applied, the electrostatic force Fs varies
with the distance d in the range of 0.5 .mu.m as given by equation
(2).
[0122] The driving voltage Vd required to move the switching part
30 from the first position P1 to the second position P2 is
discussed below. In order to move the switching part 30 from the
first position P1 to the second position P2 against the spring
force Fg, it is required to apply a driving voltage Vd between the
electrode 60 and 62 so as to generate an electrostatic force Fs
which is always greater than the spring force Fg. This means that
the driving voltage Vd should be so great that the electrostatic
force Fs does not have equilibrium with the spring force Fg. In the
example shown in FIG. 10, 50 V is required to generate an
electrostatic force Fs without having equilibrium. Thus, if 50 V is
applied as the driving voltage Vd, then the switching part 30 can
be moved to the second position P2. However, in the present
switching device 1, because the yoke (spring member) 50 has the
initial displacement x 0 set as a deformation 51 at the first
position P1, the switching part 30 can be moved without causing any
problem using a driving voltage Vd having an equilibrium point in
the range where the displacement x is lower than the initial m
displacement x 0. That is, because the electrostatic force Fs
varies in inverse proportion to the square of the distance (d-x),
if there is an initial displacement x 0 and if the distance between
the electrodes (d-x) is effectively smaller than the displacement x
of the yoke, then a lower voltage may be employed as the driving
voltage Vd. In the specific example shown in FIG. 10, 40 V may be
employed as the driving voltage Vd. When the driving voltage Vd is
equal to 40 V, the spring force Fg and the electrostatic force Fs
become equal to each other at equilibrium points s1 and s2 within
the range in which the displacement x is smaller than the initial
displacement x 0, and thus the switching part 30 stops at either
equilibrium point.
[0123] Therefore, 40 V cannot be employed as the driving voltage.
However, if the displacement x is limited within a range grater
than the initial displacement x 0, then the electrostatic force Fs
is always greater than the spring force Fs and thus there is no
equilibrium point in this range. In this case, 40 V can be employed
as the driving voltage Vd.
[0124] As described above, the introduction of the initial
displacement x 0 allows the switching part 40 to be stably
maintained at the first position P1. Furthermore, the initial
displacement x 0 allows the driving voltage to be reduced from 50 V
to 40 V.
[0125] Furthermore, the initial displacement x0 creates a spring
force Fg at the first position P1. Therefore, a bias voltage Vb
which creates an electrostatic force smaller than the
above-described spring force Fg can be applied between the
electrodes 60 and 62. For example, in FIG. 10, if 10 V is employed
as the bias voltage Vb, then an electrostatic force Fs with a value
denoted by B1 in FIG. 10 is created by this bias voltage Vb at the
first position P1. Therefore, when the bias voltage Vb is applied,
the difference Fk1 between the spring force Fg at the first
position P1 and the electrostatic force Fs is exerted as a holding
force on the switching part 30, and thus the switching part 30 is
stably held at the point P1. When the bias voltage Vb is applied,
if a driving voltage Vd equal to 30 V is further applied, then the
electrostatic force Fs is generated by the overall voltage of 40 V,
and thus the switching part 30 can be driven. This means that the
driving voltage Vd can be further reduced by 10 V.
[0126] The bias voltage Vb may be applied in common to switching
devices 1 forming the image display device 2 shown in FIG. 1. For
example, when the reference voltage of the driving voltage Vd is
equal to 0 V, and a high level of the driving voltage Vd is applied
to the electrode 60 of the switching devices 1, if -10 V is applied
to the base electrode 62 used in common for all switching devices
1, then this voltage applied to the base electrode 62 has the
effect equivalent to +10 V applied to the electrode 60. That is,
the bias voltage Vb equivalently equal in polarity to the driving
voltage Vd can be applied. Instead, the driving control part
(controller) 70 may be adapted to produce a bias voltage Vb which
causes the reference voltage of the driving voltage Vd to increase
by 10 V.
[0127] Furthermore, in the switching device 1 in this example, when
the switching part 30 is at the second position P2, a gap G is
produced by the stopper between the electrodes 60 and 62, whereby
the electrostatic force Fs is prevented from becoming infinitely
large. When the bias voltage Vb is set to 10 V, an electrostatic
force Fs equal to a value denoted by C1 in FIG. 10 is created by
the bias voltage at the second position P2. In this case, the
electrostatic force Fs at the second position P2 is smaller than
the spring force Fg. This means that when the driving voltage Vd is
removed, the remaining electrostatic force created by the bias
voltage Vb at the second position becomes smaller than the spring
force Fg, and thus the switching part 30 is moved by the spring
force Fg from the second position P2 to the first position P1.
Therefore, also in the case where the bias voltage Vb is applied,
it is possible to turn on and off the switching part 30 simply by
controlling the driving voltage Vd.
[0128] When the electrostatic force created by the bias voltage Vb
at the second point P2 is smaller than the spring force Fg as in
this example, it is possible to continuously apply the bias voltage
with a fixed value to all switching devices. This makes it very
simple to control the bias voltage Vb. That is, it is possible to
apply the bias voltage Vb without needing a complicated
configuration for the controller 70, thereby making it possible to
reduce the driving voltage Vd by a value equal to the bias voltage
Vb. This allows the controller 70 to have a lower breakdown voltage
and a simpler configuration. As a result, it becomes possible to
reduce the size of the controller 70 and produce the controller 70
at low cost. Furthermore, the power supply voltage for the driving
voltage can be reduced, and thus the power consumption can be
reduced. On the other hand, the holding force Fk1 is large enough
to stably hold the switching part 30 at the first position P1.
Furthermore, because there is no need to change the moving length
d0 of the switching part 30, it is possible to obtain sufficiently
high contrast. Still furthermore, there is no need to change the
elastic modulus K of the yoke 50, and thus the driving speed of the
switching part 30 is maintained at substantially the same value. As
can be seen from FIG. 10, because the electrostatic force Fs
created by the bias voltage Vb quickly decreases in inverse
proportion to the square of the distance, the application of the
bias voltage Vb does not cause a significant change in the speed at
which the switching part 30 moves from the second position P2 to
the first position P1.
[0129] Now, a bias voltage equal to 20 V is discussed. At the first
point P1, the electrostatic force Fs created by the bias voltage Vb
(equal to 20 V) has a value denoted by B2 in FIG. 10. In this case,
the holding force given by the difference between the electrostatic
force Fs and the spring force Fg becomes equal to Fk2 which allows
the switching part 30 to be stably held. On the other hand, the
electrostatic force Fs required to drive the switching part 30 can
be obtained by applying a driving voltage Vd equal to 20 V so that
the overall voltage becomes 40 V. Therefore, it is possible to
further reduce the driving voltage Vd by 10 V compared with the
previous example. However, the bias voltage equal to 20 V causes
the electrostatic force Fs at the second position P2 to become
greater than the spring force Fg. As a result, the switching part
30 does not return from the second position P2 to the first
position P1 when the driving voltage Vd is turned off. To move the
switching part 30 from the second position P2, it is required to
reduce the bias voltage to 0 V or a value, for example, 10 V, which
allows the electrostatic force to become smaller than the spring
force Fg. The change of the bias voltage Vb may be performed when
the switching part 30 is moved from the second position P2 to the
first position P1. Alternatively, the change of the bias voltage
may be performed periodically in synchronization with a clock
signal by which the switching part 30 is driven. The change in the
bias voltage Vb at the first position P1 bring about no effects
other than an increase in the holding force Fk2 which does not
cause any problem. On the other hand, when the switching part 30 is
held at the second position P2, the removal of the bias voltage Vb
does not cause the switching part 30 to move because the driving
voltage Vd is applied. In the case where the bias voltage Vb is
changed periodically in synchronization with the clock signal or
the like, changing the bias voltage Vb can be accomplished by
equally changing the voltage of the base electrode 62 of a
plurality of switching devices 1 disposed in the form of an array
as shown in FIG. 1. Therefore, it is possible to further reduce the
driving voltage Vd without needing a more complicated controlling
circuit for controlling the bias voltage.
[0130] FIG. 11 is a timing chart illustrating an operation of
controlling the switching part 30 by the driving voltage Vd and the
bias voltage Vb. At time t 1, if the bias voltage Vb is reduced
from 20 V to 10 V and the driving voltage Vd is reduced to 0 V,
then the switching part 30 is moved by the spring force Fg from the
second position P2 to the first position P1. When the bias voltage
Vb is increased from 10 V and 20 V at time t 2, the switching part
30 is still held stably at the first position P1 because the spring
force Fg at the first position P1 is still greater than the
electrostatic force created by the bias voltage Vb of 20 V. When
one clock period has elapsed from time t 1, that is, at time t 3, a
driving voltage Vd of 20 V is applied, and the bias voltage Vb is
reduced to 10 V at the same time. As a result, the electrostatic
force Fs varies, at time t3, to a value created by a voltage
difference of 30 V between the electrodes. Therefore, the switching
part 30 remains at the same position. However, when the bias
voltage Vb is increased at time t 4, the voltage difference between
the electrodes becomes equal to 40 V, and the electrostatic force
Fs increases to a corresponding value. As a result, switching part
30 moves from the first position P1 to the second position P2. At
time t 5 after one clock period has elapsed from time t 3, the
driving voltage Vd becomes 0 V, and the switching part 30 moves
from the second position P2 to the first position P1 in a similar
manner as at time t 1. By varying the bias voltage Vb at intervals
equal to clock periods so that the electrostatic force at the
second position P2 becomes smaller than the spring force Fg, the
bias voltage Vb greater than the spring force Fg may be applied and
it is possible to move the switching part 30 in response to the
driving voltage Vd. Thus, this technique allows the driving voltage
Vd to be reduced by an amount equal to the bias voltage Vb.
Therefore, the controller 70 for controlling the driving voltage Vd
can be formed in a still simpler fashion, and the controller 70 is
allowed to have a lower breakdown voltage. Furthermore, the power
supply voltage for the driving voltage can be reduced, and thus the
power consumption can be reduced.
[0131] After that, at time t 6, the driving voltage Vd goes to a
high level, and, as a result, the switching part 30 moves to the
second position. If the driving voltage Vd is maintained at the
same value at time t 7 after one clock period has further elapsed,
a reduction in the bias voltage Vb occurring at the same time does
not cause the switching part 30 to move because the 30 V is applied
between the electrodes and thus the electrostatic force Fs is
greater than the spring force Fg. If the driving voltage Vd is
switched to 0 V at time t8, then the switching part 30 moves to the
first position P1. In the case where no driving voltage Vd is
applied at time t 9 after one clock period has further elapsed, a
change in the bias voltage Vb occurring at the same time does not
cause the switching part 30 to move because the electrostatic force
Fs at the first position P1 is smaller than the spring force Fg. As
described above, in the case where the bias voltage Vb is increased
and reduced periodically, the motion of the switching part 30 can
also be controlled absolutely correctly by the driving voltage Vd.
In this example, when the driving voltage Vd is switched to the
high level, the motion of the switching part 30 is delayed by a
period in which the bias voltage Vb is changed. However, the period
of time during which the bias voltage should be at the changed
value can be set to a very small period required for the switching
part 30 to start moving, the delay does not cause a significant
effect in displaying an image.
[0132] In this specific example, the bias voltage Vb is varied
between 10 V and 20 V. Alternatively, the bias voltage Vb may be
varied between 0 V to 20 V. However, because the electrostatic
force Fs is prevented by the stopper 65 from becoming infinitely
large at the second position P2, the switching part 30 can be
moved, as described above, by reducing the bias voltage to 10 V so
as to reduce the electrostatic force Fs to a value smaller than the
spring force Fg. That is, by varying the bias voltage Vb between 10
V and 20 V, it becomes possible to simplify the circuit used to
control the bias voltage, and it also becomes possible to reduce
electric power consumed when the base voltage is varied.
[0133] The above described values for the driving voltage and the
bias voltage were employed by way of example and not by way of
limitation. Different values may be employed to achieve similar
effects as long as they satisfy the conditions described above.
Furthermore, the values employed herein for the driving voltage and
the bias voltage were determined under the conditions assumed in
FIG. 10, and thus the values which may be employed in this
invention for the driving voltage and the bias voltage are not
limited to those described above.
[0134] [Second Embodiment]
[0135] FIG. 12 illustrates another embodiment of an optical
switching device 1 according to the present invention. In this
embodiment, the optical switching device 1 also extracts an
evanescent wave and outputs the extracted light as an output light
12. The optical switching device 1 includes a light guide 20, a
reflective type optical switching part 30, a driving part 40, and a
controller 70, which are disposed in this order into a multilayer
structure. Herein, similar parts to those in the previous
embodiment are denoted by similar reference numerals and they are
not described in further detail. In this embodiment of the optical
switching device 1, the driving part 40 includes a pair of
electrodes 64 and 66 (El) for moving the switching part 30 from a
second position P2 to a first position P1 (hereinafter this pair of
electrodes will be referred to as a first pair of electrodes) as
well as a pair of electrodes 60 and 62 (E2) for moving the
switching part 30 from the first position P1 to the second position
P2 (hereinafter this pair of electrodes will be referred to as a
second pair of electrodes). A horizontally oriented U-shaped cutout
38 is formed on each side wall of a buffer member 35 for supporting
the prism on the spacer 42. An auxiliary post 47 extending from a
post 44 extends into each space 38. An electrode 66 is fixed to the
post 47 and an electrode 64 serving as a base electrode (common
electrode) is fixed to each side of the buffer member 45. In this
embodiment of optical switching device 1, electrostatic driving
means including the first and second pairs of electrodes El and E2
performs both on-to-off and off-to-on switching operations.
Therefore, it is possible to controls the operations in a stabler
fashion. Thus, it is possible to provide an optical switching
device 1 having higher reliability.
[0136] In the optical switching device 1 of the present embodiment,
the yoke 50 is adapted to be brought into equilibrium at a center
position P3 between the first position P1 and the second position
P2, that is, the displacement x of the yoke 50 becomes equal to 0
at the center position P3. The switching part 30 is moved by an
elastic force Fg provided by the yoke 50 from the first position P1
to the center position. After that, the switching part 30 is
further moved to the second position P2 by an electrostatic force
Fs provided by the second pair of electrodes E2 consisting of the
electrodes 60 and 62. In an opposite direction, the switching part
30 is moved by the elastic force Fg from the second position P2 to
the center position P3, and further to the first position P1 by an
electrostatic force Fs provided by first pair of electrodes El
consisting of the electrodes 64 and 66. At the first position P1,
the electrostatic force Fs provided by the first pair of electrodes
El serves as a holding force. When the switching part 30 is at the
first position P1, the total reflection plane 22 serves as a
stopper, and thus the distance between the electrodes 64 and 66 is
controlled to have a gap G. This ensures that the electrostatic
force Fs at the first position P1 is limited within a particular
range as at the second position P2.
[0137] In the case of the system in which the yoke serving as the
spring member 50 has an equilibrium state at the center position P3
between the first and second positions, the switching part 30 is
moved by the first and second pairs of electrodes E1 and E2 of the
driving part 40 from the center position to the first position P1
or to the second position P2, the stroke lengths of the driving
operations performed by the respective pairs of electrodes El and
E2 serving as the electrostatic driving means become one-half the
distance d0 between the first and second position. Therefore, it is
possible to reduce the length along which the electrostatic force
is exerted by half without having to change the moving distance d 0
of the switching part 30. As a result, as can be understood from
equation (2), it is possible to reduce the distance d by half.
Thus, it is also possible to reduce the driving voltage Vd for
obtaining the same electrostatic force Fs by half. Furthermore,
because the electrostatic force Fs at the first position P1 can be
used as the holding force, it is not required that the yoke 50 have
an initial displacement x 0 to provide a spring force Fg serving as
a holding force. Therefore, an electrostatic force opposing the
force corresponding to the initial displacement x 0 also becomes
unnecessary. As a result, it becomes possible to further reduce the
driving voltage Vd.
[0138] Referring now to FIG. 13, the optical switching device 1 is
described in further 15 detail below. In FIG. 13, if the yoke has a
displacement x equal to 0 at the first position P1, and a
displacement x equal to 0.5 .mu.m at the second position P2, this
driving system does not have a holding force at the first position
P1. The switching part 30 can be moved by the spring force Fg from
the second position P2 to the first position P1. On the other hand,
by applying an electrostatic force Fs having no equilibrium point
with the spring force Fg over the range from the first position P1
to the second position P2, it is possible to move the switching
part 30 from the first position to the second position P2. In the
example shown in FIG. 13, if a driving voltage Vd equal to 20 V is
applied, the switching part 30 can be moved against the spring
force Fg. This situation corresponds to the case where, in the
switching device described above with reference to FIG. 10, a
sufficiently large holding force is not provided by the spring
force Fg at the first position P1. That is, a driving voltage Vd
equal to 20 V is required to drive the switching part 30 against
the spring force which is too small as the holding force.
[0139] On the other hand, in the switching device 1 including two
pairs of electrodes E1 and E2 according to the present embodiment,
the core may have a displacement x equal to 0 at the center
position P3 as represented by in square brackets and may have a
displacement x equal to 0.25 at the first position P1 or the second
position P2. The second pair of electrodes E2 consisting of the
electrodes 60 and 62 moves the switching part 30 from the center
position P3 to the second position P2 against the spring force Fg.
Similarly, the first pair of electrodes E1 consisting of the
electrodes 64 and 66 moves the switching part 30 from the center
position P3 to the first position P12 against the spring force Fg.
The manner in which the switching part 30 is driven is similar for
the pairs of electrodes E1 and E2. Therefore, the operation is
described herein for the pair of electrodes E2 by way of example.
To move the switching part 30 from the center position P3 against
the spring force Fg, it is required to apply a driving voltage Vd
which produces an electrostatic force Fs having no equilibrium
point in the range between the center position P3 and the second
position P2. In this specific example, if 7 V is applied as the
driving voltage Vd, the switching part 30 is moved from the center
position P3 to the second position P2. Thus, in the switching
device 1 of the present embodiment, the switching part 30 is driven
by alternately applying a driving voltage Vd between the pair of
electrodes E1 and the pair of electrodes E2. This allows the
driving voltage Vd to be reduced from 20 V employed in the previous
example to 7 V which is as small as one-third the previous value.
The switching part 30 can also be moved from the center position P3
to the first position P1 by means of an electrostatic force Fs and
can be held at the first position P1 by the electrostatic force Fs.
Thus, a holding force for holding the switching part 30 at the
first position P1 is obtained.
[0140] Also in this embodiment, the driving voltage Vd may be
further reduced by applying a bias voltage in a similar manner as
in the previous embodiment. FIG. 14 illustrates, in an enlarged
fashion, the spring force Fg and the electrostatic force Fs shown
in FIG. 13, wherein electrostatic forces Fs obtained by Vd=5 V and
2 V are also shown. When 2 V is applied as the bias voltage Vb
between the electrodes 60 and 62 and also between the electrodes 64
and 66, if 5 V is applied as the driving voltage Vd at the center
position P3, then an electrostatic force Fs is created by an
overall voltage of 7 V. This means that the switching part 30 can
be driven by applying a driving voltage Vd as small as 5 V. At the
first position P1 and the second position P2, the spring force Fg
is greater than the electrostatic force Fs created by the bias
voltage Vb of 2 V. Therefore, the switching part 30 can be driven
simply by turning on and off the 5 V driving voltage Vd. Because
the two pairs of electrodes E1 and E2 are supplied with the same
bias voltage Vb, the electrostatic forces Fs created by the bias
voltage Vb are balanced at the center position P3. Therefore, in
practice, the center position P3 does not vary. If the switching
part 30 starts to move toward either position, the distance between
the other pair of electrodes increases, and the electrostatic force
Fs decreases in inverse proportion to the square of the distance.
Therefore, once the switching part 30 starts to move such that the
distance of either one of the pairs of electrodes decreases, the
effect of the bias voltage Vb applied between the other pair of
electrodes becomes negligible.
[0141] The bias voltage Vb described above may be supplied by
applying a voltage in common to both the base electrode 62 of the
second pair of electrode E2 and the base electrode 64 of the first
pair of electrodes E1 wherein the base electrodes 62 and 64 move
together with the switching part 30. Applying a bias voltage with
equivalently the same polarity as that of the driving voltage Vd
may be accomplished by applying a voltage lower than the reference
voltage of the driving voltage to both the base electrodes 62 and
64. More specifically, when the reference voltage of the driving
voltage is 0 V, a bias voltage Vb equal to, for example, -2 V is
applied in common to the base electrodes 62 and 64.
[0142] The bias voltage Vb may be increased to 4 V. In this case,
if 3 V is applied as the driving voltage Vd, then an electrostatic
force Fs is created by an overall voltage of 7 V. This means that
the switching part 30 can be driven by applying a driving voltage
Vd as small as 3 V. At the center position P3, the bias voltages Vb
applied between the two pairs of electrodes are balanced.
Therefore, only an electrostatic force Fs created by 3 V is
effective at the center position P3. However, the spring force Fg
at the center position P3 is equal to 0. Therefore, once the
switching part 30 starts to move, the effect of the other pair of
electrodes becomes negligible as described above and the switching
part 30 can reach the first or second point without encountering
equilibrium with the spring force Fg.
[0143] On the other hand, at the first position P1 and the second
position P2, the electrostatic force Fs created by the bias voltage
of 4 V is greater than the spring force Fg. Therefore, the
switching part 30 does not start to move even if the driving
voltage Vd is turned off. To make the switching part 30 start to
move, it is required to decrease the bias voltage Vb, in
synchronization with a clock signal, to 0 V or 2 V so that the
spring force Fg becomes greater than the electrostatic force Fs.
When the 4 V bias voltage Vb is decreased and increased in
synchronization with the clock signal, if a driving voltage Vd
equal to 3 V is alternately applied to the first and second pairs
of electrodes, then the switching part 30 is moved. Thus, in the
switching device 1 of the present embodiment, the driving voltage
can be reduced from a very high value such as 50 V which is widely
employed to 3 V which is low enough to be employed in a
semiconductor circuit. This allows the controller 70 to be
constructed in a very simple fashion. Furthermore, electric power
consumed by the controller 70 can be greatly reduced.
[0144] FIG. 15 is a timing chart illustrating an operation of
controlling the switching part 30 of the switching device 1 of the
present embodiment, using the driving voltage Vd and the bias
voltage Vb. At time t 11, the bias voltage Vb is reduced from 4 V
to 2 V, and the driving voltage Vd2 applied to the second pair of
electrodes E2 serving to drive the switching part 30 toward the
second position P2 is turned off (from 3 V to 0 V). As a result,
the overall voltage between the second pair of electrodes E2
decreases from 7 V to 2 V, and thus the spring force Fg becomes
greater than the electrostatic force Fs. As a result, the switching
part 30 moves from the second position P2 toward the center
position P3. At time t 12, the driving voltage Vd 1 applied to the
first pair of electrodes E1 serving to drive the switching part 30
toward the first position P1 is turned on (from 0 V to 3 V), and
the bias voltage Vb is increased to 4 V. As a result, the overall
voltage between the first pair of electrodes E1 becomes 7 V, and
thus the switching part 30 is moved to the first position P1 and
held at that position. At this time, the bias voltage Vb causes the
second pair of electrodes E2 to have an overall voltage of 4 V.
However, the electrostatic force Fs created by the second pair of
electrodes E2 is substantially negligible, because the distance
between the second pair of electrodes E2 become large.
[0145] At time t 13, after one clock period has elapsed from time t
11, the bias voltage Vb is reduced from 4 V to 2 V, and the driving
voltage Vd 1 applied to the first pair of electrodes E1 is turned
off. As a result, the switching part 30 starts to move from the
first position P1 toward the center position P3. At time t 14, the
driving voltage Vd 2 applied to the second pair of electrodes E2 is
turned off, and the bias voltage Vb is increased to 4 V. As a
result, the overall voltage between the second pair of electrodes
E2 becomes 7 V, and thus the switching part 30 is moved to the
second position P2 and held at that position.
[0146] At time t 15, after one clock period has elapsed from time t
13, the bias voltage Vb is reduced and the driving voltage Vd 2 is
turned off. Subsequently, the driving voltage Vd 1 is turned on. In
response, the switching part 30 moves from the second position P2
to the first position P1. In this situation, when the bias voltage
Vb is reduced at time t 16 after one clock period has elapsed from
time t 5, if the driving voltage Vd 1 is at the off-level, then the
switching part 30 is still held at the first position P1 because
the overall voltage between the first pair of electrodes E1 is
equal to 5 V at this time. On the other hand, if, at time t 17, the
driving voltage Vd 1 is turned off and subsequently the driving
voltage Vd 2 is turned on, the switching part 30 moves to the
second position. After that, when the bias voltage Vb is reduced
from 4 V to 2 V at times t 18 and t 19 in synchronization with the
clock signal, the switching part 30 is maintained at the second
position P2 because the driving voltage Vd2 is at the on-level. If
the driving voltage Vd 2 is turned off at time t 20 and if the
driving voltage Vd 1 is subsequently turned on, the switching part
30 moves from the second position P2 to the first position P1.
[0147] In the switching device 1 of the present embodiment, as
described above, the switching part 30 can be moved by changing the
driving voltage Vd between 0 V and 3 V. In this method, the bias
voltage is required only to be changed between 2 V and 4 V at
intervals equal to clock periods. In the switching device 1 of the
present embodiment, therefore, the voltage required to drive the
switching part 30 can be greatly reduced to a level which allows
the switching part 30 to be driven by a battery of a widely used
type. Correspondingly, it also becomes possible to drive the image
display device including a plurality of switching devices shown in
FIG. 1 by a voltage as low as can be supplied by a battery. The
reduction in the driving voltage makes it possible to reduce the
voltage levels controlled by the controlling circuit. Furthermore,
it is allowed to reduce the breakdown voltage of the controlling
circuit. Thus, it becomes possible to use a conventional
semiconductor integrated circuit to directly drive the switching
device and the image display device including switching devices.
Furthermore, the power supply voltage is allowed to be low, and
thus the power consumption can be greatly reduced. On the other
hand, the characteristics of the switching device, such as the
elastic modulus of the yoke 50, the moving length of the switching
device, the ability of holding the switching part 30 at the
on-position, etc., are maintained. Thus, it is possible to provide
a high-contrast, high-speed, and high-reliability switching device
at low cost. Furthermore, by disposing such switching devices into
the form of an array, it becomes possible to provide an image
display device capable of displaying a high-resolution and
high-brightness image at a high speed with low power consumption at
low cost.
[0148] The driving method disclosed herein may be applied not only
to optical switching devices using an evanescent wave but also to
various types of spatial light modulation devices in which incident
light is modulated or the polarization orientation or the phase of
the incident light is changed by changing the position of a
switching part, such as a spatial light modulation device in which
a flat-plane element serving as a switching part is moved in a
parallel direction, a spatial light modulation device in which the
angle of a flat-plane element is varied to turn on and off light as
is in a micro mirror device, etc.
Controlling the Attitude of the Switching Part
[0149] [Second Embodiment]
[0150] FIG. 16 illustrates another optical switching device 2
different from those described above. Also in the optical switching
device of the present embodiment, optical switching operation is
performed using an evanescent wave. Similar parts to those in the
previous embodiments are denoted by similar reference numerals and
they are not described in further detail here. Also in the optical
switching device 1 of the present embodiment, if the extraction
plane 32 of a switching part 30 comes to a position (first
position), which is parallel to a total reflection plane 22 (facing
in a first direction) and which is close to the total reflection
plane 22, or which is in intimate contact with the total reflection
plane 22, as shown in FIG. 16(a), and if, as a result, it becomes
possible for the extraction plane 32 to extract evanescent light,
then incident light 10 is extracted from a light guide 20 into the
switching part 30. The extracted light is then output as output
light 11 to the outside via a microprism 34 in a substantially
vertical direction. If the switching part 30 moves away from the
first point and the extraction plane 32 comes to a position (second
position) apart from the total reflection plane 22 as shown in FIG.
16(b), the incident light 10 is totally reflected by the total
reflection plane 22 and thus no light is extracted as evanescent
light from the light guide 20. Therefore, no output light 11 is
obtained.
[0151] Is The motion of the switching part of the optical switching
device is controlled by electrostatic driving means of a driving
part 40 wherein the electrostatic driving means includes an
electrode and a yoke realized by a spring member. In the optical
switching device of the present embodiment, the switching part is
designed to move in an asymmetrical fashion about the center of the
switching part. To this end, the yokes 50 and 52 on the left and
right sides, respectively, of the figure are formed to be different
from each other in the terms of the material, the thickness, and/or
the width.
[0152] FIG. 17 illustrates an example in which the yokes 50 and 52
are different from each other in width. In FIG. 17, the structure
of the switching part 30 seen from below (from the side of the
driving part 40) is shown. The switching part 30 having a generally
rectangular and symmetric shape is supported by posts 44 via yokes
50 and 52 radially extending in four directions symmetric about the
geometric center 14a. If a geometric center line 14 is assumed to
extend in a vertical direction in the figure through the geometric
center 14a of the optical switching device 1, two yokes 50 disposed
in the region 12a left to the geometric center line 14 and two
yokes 52 disposed in the region 12b right to the geometric center
line 14 are equal in terms of the material and thickness but
different in terms of the width. More specifically, the width W of
the yokes 50 is smaller than the width W of the yokes 52. As a
result, the yokes 50 and 52, which are parts of the driving part 40
and which serve to elastically support the switching part 30, are
different from each other in elastic force or in spring modulus.
More specifically, the elastic force in the region 12a on the left
is smaller than that in the region 12b on the right side. That is,
in the present optical switching device, the switching part 30 is
supported by the yokes (supporting members) 50 and 52 whose elastic
modulus is different between the left and right regions. On the
other hand, the switching part itself is symmetric in shape in a
left-to-right direction, and thus the geometric center 14a and the
center of gravitation 14b are coincident with each other. Thus, the
switching part 30 is supported by supporting members having an
elastic modulus asymmetric in the left-to-right direction about the
center of gravitation. As a result, when electric power is supplied
between the electrodes 62 and 60 serving as the electrostatic
driving means of the driving part 40 to drive the switching part 30
by means of electrostatic force, forces different between left and
right regions are exerted on the switching part 30. As a result,
when the switching part 30 moves in response to the forces, the
attitude of the switching part 30 is not maintained parallel to the
total reflection plane 22 but becomes tilted.
[0153] FIG. 18 illustrates various steps through which the
switching part 30 in the present example moves in a tilted fashion.
In FIG. 18(a), the switching part 30 shown in FIG. 16(a) is at the
first position. At this first position, the extraction plane 32 of
the switching part 30 is in contact with the total reflection plane
22 of the light guide 20, and the extraction plane 32 faces in a
first direction A, that is, upward direction in the figure. That
is, at the first position, the optical switching device 1 is in an
on-state in which output light is output. When the switching part
30 is at the first position, no electric power is supplied from the
power supply 61 to the electrodes 62 and 60 of the driving part 40,
and the switching part 30 is urged by elastic forces generated by
the yokes 50 and 52 against the total reflection plane 22 of the
light guide 20 so that the extraction plane 32 is maintained in
substantially intimate contact with the total reflection plane
22.
[0154] If electric power is supplied to the electrodes 62 and 60 of
the driving part 40 by turning on the power supply 61, then an
electrostatic force is generated between the electrodes 62 and 60,
and the switching part 30 is drawn toward the electrode 60 on the
substrate 60, as shown in FIG. 18(b). In this example, because the
electrode 62 of the switching part 30 and the electrode 60 on the
substrate 70 are formed to be symmetric in area, shape, and
distance about the geometric center line 14, an electrostatic force
symmetric in the left-to-right direction is exerted on the
switching part 30. However, elastic forces produced by the yokes 50
and 52 against the electrostatic force are different between the
left and right sides because there is a difference in the elastic
modulus due to the difference in the width between the yokes 50 and
52. Thus, the resultant driving force exerted on the switching part
30 becomes different between the regions left and right to the
geometric center line 14. As a result, in an early stage of the
moving process in which the switching part 30 moves from the first
position toward the second position as shown in FIG. 18(b), the
driving force in the left region 12a is greater than that in the
right region 12b. As a result, the part of the switching part 30 in
the left region 12a starts to move earlier, and the part in the
right region 12b starts to move later. Thus, the extraction plane
32 tilts with respect to the first direction A in the early stage
of the moving process.
[0155] After the extraction plane 32 started to tilt, the
extraction plane 32 gradually separates from the total reflection
plane 22 starting from the left portion, and a space 17 is created
between the extraction plane 32 and the total reflection plane 22
as shown in FIG. 18(b). A fluid present around the switching part
30, that is, air 16 in this specific example, flows into the space
17. In this way, the switching part 30 starts to move in a
direction X opposite to the first direction A toward the second
position. After the switching part 30 started to move, the space 17
gradually expands to the right and becomes great in size, and air
16 flows into the expanding space 17. In the case where the
switching part 30 starts to move with the extraction plane 32
tilting as described above, the space created between the
extraction plane 32 and the total reflection plane 22 in the early
stage is very small in volume, and thus the volume of air flowing
into the space is very small. As a result, air resistance is very
small. However, if the switching part 30 starts to move with the
extraction plane 32 facing in the first direction A and being
maintained parallel to the total reflection plane 22, a very large
space is created in the early stage of the moving process because
the entire extraction plane 32 separates at the same time from the
total reflection plane 22, and a very large volume of air flows
into the space. In this case, a very large air resistance occurs.
In the present example, to avoid such a problem, the orientation of
the extraction plane 32 is tilted with respect to the first
direction A in the early stage of the moving process thereby
reducing the air resistance. This allows a reduction in the driving
force required in the early stage of the moving process, and the
time required for the switching part 30 to start to move can be
reduced.
[0156] In the optical switching device 1 using an evanescent wave
in the present example, if a small gap is created between the
extraction plane 32 and the total reflection plane 22, and if the
orientation of the extraction plane 32 changes, then the amount of
extracted evanescent light drastically decreases to a very low
level, and the direction of the output light changes. Therefore, a
quick transition occurs from an on-state in which output light is
output in a predetermined direction to an off-state in which no
output light is output or output light is output in a different
direction. That is, the tilting of the extraction plane 32 in the
early stage of the moving process allows a great increase in the
speed of transition from the on-state to the off-state.
[0157] The switching part 30 is tilted with respect to the forward
direction X during the movement as shown in FIG. 18(b). As a
result, the switching part 30 moves forward while the lower surface
of the switching part 30, that is, the electrode 62, is tilted
against the fluid present in front of the electrode 62 in the
moving direction X. Thus, air 16 flows smoothly along the surface,
tilted with respect to the moving direction, of the electrode 62 of
the switching part 30. As a result, the air resistance is small. On
the other hand, if the switching part 30 is moved while maintaining
the orientation of the extraction plane 32 in the first direction A
and thus maintaining the electrode 62 perpendicular to the moving
direction X, air 16 is compressed between the electrodes 62 and 60
and a great air resistance occurs. As described above, air
resistance which occurs during the movement can be reduced by
tilting the extraction plane 32 of the switching part 30 thereby
increasing the moving speed.
[0158] FIG. 18(d) illustrates a second state in which the switching
part 30 shown in FIG. 16(b) has come to rest at a position closest
to the electrode 60 on the substrate. In the optical switching
device 1 in the present example, when the switching part 30 is at
this second position, the extraction plane 32 faces in the
direction A as at the first position. However, in the final stage
of the moving process just before the switching part 30 stops at
the second position, the extraction plane 32 is still tilted with
respect to the first direction A as shown in FIG. 18(c). The space
between the electrodes 62 and 60 gradually decreases in volume
starting from the region 12a left to the geometric center line 14.
As the space 17 gradually decreases in volume from left to right,
air between the electrodes 62 and 60 smoothly flows into the right
region 12b and further into an outside region from the space
between the electrodes 62 and 60. Thus, also in the final stage of
the moving process, the resistance caused by the fluid (air) 16
present between the electrodes 62 and 60 becomes very small, and
therefore the switching part 30 can quickly reach the second
position. Furthermore, the low air resistance in the final stage of
the moving process allows the switching part 30 to stop at the
final position in a stable fashion.
[0159] In the optical switching device 1 in the present example, if
the electrostatic force produced between the electrodes 62 and 60
is eliminated by turning off the power supply 61, the elastic force
provided by the yokes 50 and 52 of the driving part 40 makes the
switching part 30 move from the second position shown in FIG. 18(d)
to the first position shown in FIG. 18(a). In this process, the
yokes 52 in the right region 12b produce an elastic force greater
than the yokes 50 in the left region 12a. As a result, the right
portion of the switching part 30 receives a greater driving force,
and thus the extraction plane 32 is tilted to the left in the
figure with respect to the first direction A at the start of the
movement. Then, the switching part 30 moves from the second
position to the first position passing reversely through the steps
shown in FIGS. 18(a) to 18(d). Therefore, also in the process in
which the switching part 30 moves from the second position to the
first position, the resistance of air present around the switching
part 30 can be reduced, and thus the moving speed can be enhanced.
In the optical switching device 1 in the present example, as
described above, when the switching part 30 moves in either
direction in the on-off operation (modulating operation), the
switching part 30 first tilts with respect to the first direction A
and starts to separate. Then the switching part 30 moves while
maintaining the tilted attitude. Before resting in the final
position, the orientation of the switching part 30 changes toward
the first direction A. Thus, in any step during the moving process,
the switching part 30 receives a small resistance against air 16,
and can move at a high speed. As a result, it is possible to
provide an optical switching device or a spatial optical modulation
device capable of responding at a high speed.
[0160] FIG. 19 illustrates the moving time of the present optical
switching device 1, wherein the moving time of an optical switching
device in which the switching part 30 is not tilted during the
moving process is also shown for the purpose of comparison. FIG.
19(a) shows the distance (gap) d between the electrodes 60 and 62
as a function of switching time (elapsed time) in the process in
which the switching part 30 moves from the first position to the
second position, that is, in the process in which the on-state is
switched into the off-state. In the case where the extraction plane
32 of the switching part 30 always faces in the first direction A
during the entire moving process and the electrode 62 is maintained
parallel to the electrode 60 during the entire moving process, the
switching part 30 receives the electrostatic force Fs given by
equation (2) described earlier, the elastic force Fg of the yokes
50 and 52 given by equation (1) described earlier, and the air
resistance force Fa which is dominant in this case, and thus the
switching part 30 moves along a curve 91a denoted by an alternating
long and short dashed line.
[0161] In contrast, in the optical switching device 1 in the
present example, the air resistance force Fa is reduced as
described above and a large electrostatic force Fs is exerted on
the switching part 30. As a result, the elapsed time T decreases by
.DELTA.T 1 (=t 2-t 1) as represented by a solid line 90a, and an
increase in the moving speed or the response speed of the switching
part 30 is achieved.
[0162] FIG. 19(b) illustrates the moving process in which the
switching part 30 is moved from the second position to the first
position, that is, the off-state is switched into the on-state.
When the switching part 30 moves from the second position to the
first position, no electrostatic force Fs is exerted but the
elastic force Fg provided by the yokes 50 and 52 and the air
resistance force Fa are exerted on the switching part 30, as
described above. In the case where the switching part 30 is moved
while maintaining its orientation in the first direction A, a large
air resistance force Fa is exerted on the switching part 30, and
the switching part 30 moves along an alternating long and short
dashed line 91b. In contrast, in the optical switching device 1 in
the present example, because the air resistance force Fa is
reduced, the moving time is reduced by .DELTA.T 2 (=t 5-t 4) as
represented by a solid line 90b. Thus, the optical switching device
1 in the present example has an improved moving speed for both the
on-to-off transition and the off-to-on transition and, therefore,
has an improved overall response speed.
[0163] As described above, the response speed can be increased by
tilting the extraction plane 32 thereby reducing the air resistance
when the switching part 30 is moved from the first position to the
second position or in the opposite direction. The tilting of the
switching part 30 during the moving process can be accomplished by
exerting a driving force asymmetric about the center of gravitation
of the switching part 30 upon the switching part 30. To this end,
in the present example, the yokes 50 and 52 in the regions left and
right, respectively, to the geometric center line 14 passing
through the center of gravitation 14b are formed to be different in
width so that they have different spring moduli thereby achieving
asymmetry in the elastic force exerted by the left and right yokes
50 and 52 upon the switching part 30. However, the factors which
may be employed to vary the spring modulus of the yokes are not
limited to the width of the yokes. For example, it is possible to
adjust the spring modulus by varying the thickness U of the yokes
50 and 52 as shown in FIG. 20. In the example shown in FIG. 20, the
yoke 50 in the region 12a left to the geometric center line 14 has
a thickness U smaller than the yoke 52 in the region 12b right to
the geometric center line 14 so that the yoke 50 has a smaller
spring modulus than the yoke 52, as in the previous example. Thus,
also in the optical switching device 1 shown in FIG. 20, the
switching part 30 operates in a similar manner as the previous
example, and, therefore, the response speed is improved.
[0164] Instead of varying the spring modulus of the yokes 50 and 52
by varying the width W or the thickness U of the yokes 50 and 52
thereby varying the cross section of the yokes, the spring modulus
may also be varied by varying the material quality of the yokes 50
and 52 as shown in FIG. 21. In the optical switching device 1 shown
in FIG. 21, the yoke 50 in the left region 12a and the yoke 52 in
the right region 12b are formed of materials having different
spring moduli. More specifically, when a boron-doped silicon film
is employed as the material, the boron concentration may be varied
or another impurity may be doped so as to vary the spring modulus.
Instead of the silicon film, another thin film such as an organic
resin thin-film may also employed as a yoke material to achieve a
different spring modulus.
[0165] Another technique of varying the spring modulus of the left
and right yokes 50 and 52 is, as shown in FIG. 22, to stick an
additional thin film of the same or different material as or to the
material of the yoke to one of the yokes 50 and 52. In the optical
switching device 1 shown in FIG. 22, the yoke 52 in the right
region 12b is formed of two layers 52a and 52b whose material is
different from each other, whereas the yoke 50 in the other region
12a is formed of a single material. By this technique, it is
possible to adjust the spring modulus of the yokes 50 and 52
disposed on the left and right sides, respectively, so that the
switching part 30 can be moved in a tilted fashion.
[0166] In the examples described above, the spring modulus of the
yokes 50 and 52 is varied to obtain asymmetry in the elastic force
exerted on the switching part 30. Alternatively, the yokes 50 and
52 on the left and right sides may be disposed at different
locations so that the spring modulus becomes asymmetric about the
center of gravitation 14b of the switching part 30.
[0167] FIG. 23 corresponds to FIG. 17 and represents the optical
switching device 1 in which one yoke 50 is disposed in the region
12a left to the geometric center line 14 and two yokes 52 are
disposed in the right region 12b. In this technique, because the
yokes 50 and 52 are disposed such that a greater number of yokes
are disposed in the right region 12b than in the left region 12a,
the elastic force in the right region 12b becomes greater than in
the left region 12a. The distribution of the elastic force
asymmetric in the left-right direction allows the switching part 30
to be tilted with respect to the first orientation (direction)
during the moving process, and thus a low air resistance is
obtained, as in the previous examples.
[0168] FIG. 24 illustrates an example in which yokes 52 are
disposed only in the region 12b right to the geometric center line
14 and no yoke is disposed in the left region 12a such that the
switching part 30 is supported by the yokes 52 disposed in the
right region 12b. In this optical switching device 1, because the
switching part 30 is elastically supported only in the right region
12b, a driving force asymmetric about the geometric center line 14
is exerted on the switching part 30. Therefore, as in the previous
examples, the switching part 30 is tilted in the early and final
stages of the moving process, and thus the air resistance becomes
low during the moving process. Thus, it is possible to provide an
optical switching device 1 with a high response speed.
[0169] In FIG. 24, yokes are disposed only in one region 12b on one
side of the geometric center line. Herein, the number of yokes 50
or 52 is not limited to the value employed in this specific
example, and the shape and the material thereof are not limited to
those employed in the above example. For example, the switching
part 30 may be supported by one yoke. FIGS. 25 and 26 show an
example in which the switching part 30 is supported by one yoke. In
this example, the switching part 30 is supported by a single yoke
50 disposed in a region 12a opposite to the region employed in FIG.
24. Also in this example, the driving force becomes asymmetric
about the geometric center line 14, and thus the switching part 30
is tilted during the moving process.
[0170] In any example described above, the electrodes 62 and 60
becomes parallel to each other and the extraction plane 32 faces in
substantially the same direction as the first direction A as shown
in FIG. 16(b) or 18(d) when the switching part 30 is at the second
position which is the possible closest limit to the electrode 60.
Alternatively, the extraction plane 32 may have an angle with
respect to the first direction A when the switching part 30 is at
the second position.
[0171] FIG. 27 shows an example in which the switching part 30
becomes tilted in the final stage of the moving process, and
remains in the tilted state after the switching part 30 comes to
rest at a position where the electrostatic force Fs provided
between the electrodes 62 and 60 is balanced with the elastic force
Fg of the yoke 52. That is, the yokes 50 and 52 of the optical
switching device 1 in the present example are formed such that the
spring modulus of the yoke 50 in the left region 12a is smaller
than the spring modulus of the yoke 52 in the right region 12b so
that when the electrostatic force Fs is applied, the portion of the
switching part 30 in the left region 12a is stopped by the stopper
65 such that the electrode 62 comes into close proximity to the
electrode 60 whereas balance of force for the portion of the
switching part 30 in the right region 12b is achieved before the
electrode 62 comes in close proximity to the electrode 60. As a
result, the switching part 30 comes at rest in a tilted
position.
[0172] If the switching part 30 is at rest in such a tilted
position, the time required to move the switching part 30, in the
final stage of the moving process, from the tilted position to a
position where the electrode 62 becomes parallel to the electrode
60 becomes unnecessary. Furthermore, in the early stage of the
moving process, there is no need for the time to separate the
electrode 62 from the electrode 60 into the tilted position. At the
second position, the extraction plane 32 is not required to be
parallel to the total reflection plane 22. The tilted attitude at
the second position cause no problem associated with the
performance of the optical switching device (spatial optical
modulation device). Because the switching part 30 is in the tilted
position when it starts to move, the switching part 30 can quickly
move without encountering a large air resistance. As described
above, by placing the switching part 30 in the tilted fashion at
the second position, the air resistance during the moving process
can be reduced and the time required to move the orientation of the
switching part 30 can be deleted. As a result, the response time
can be reduced. Thus, it is possible to provide an optical
switching device capable of operating at a very high speed.
[0173] FIG. 28 illustrates another example of an optical switching
device 1 in which the switching part 30 is adapted to come to rest
in a tilted state at the second position. To this end, in this
example, the optical switching device has left and right stoppers
65a and 65b for supporting the switching part 30 at the second
position wherein the stoppers 65a and 65b are formed to be
different in height so that the stroke of the switching part 30
becomes asymmetric in a left-to-right direction about the geometric
center line 14 of the switching part 30. If such stoppers 65a and
65b different in height are disposed, the right portion of the
electrode 62 of the switching part 30 comes into contact with the
stopper 65b before the left portion comes into contact with the
stopper 65a. As a result, the switching part 30 is tilted. This
ensures that the switching part 30 is always tilted at the second
position even if the yokes 50 and 52 or the electrodes 62 and 60
are symmetric in the left-to-right direction, and thus the air
resistance becomes small when the switching part 30 starts to move
from this state or when the switching part 30 comes to rest into
this state in the final stage of the moving process. As a result,
the moving time of the switching part 30 is reduced. Thus, it is
possible to provide an optical switching device capable of
responding at a high speed. As in the previous examples, the
stopper 65a or 65b serves to prevent the electrode 62 of the
switching part from directly coming into contact with the electrode
on the substrate thereby preventing those electrodes from being
short-circuited and also preventing those electrodes from becoming
impossible to be separated from each other owing to adherence due
to an electric charge.
[0174] FIG. 29 illustrates an optical switching device 1 in which a
stopper 65c is disposed on only one side of the electrode 60 on the
substrate. In stead of forming the stoppers 65 to have a height
asymmetric between the left and right sides about the center of
gravitation (geometric center line) of the switching part 30, the
locations of the stoppers 65 may be asymmetric in the left-to-right
direction about the geometric center line 14 so that the switching
part 30 can come to rest in a tilted state at the second position.
In the case where the stoppers 65 are formed to be asymmetric,
there is a possibility that the electrode 62 and the electrode 60
come into contact with each other. Thus, in the present example,
the outer surface of the electrode 62 is coated with an insulating
layer 69 to prevent the electrode 62 and the electrode 60 from
coming into direct contact with each other.
[0175] [Fourth Embodiment]
[0176] In the above examples, in order to exert a driving force
asymmetric about the center of gravitation of the switching part 30
thereby moving the switching part 30 in a tilted fashion, the
spring modulus or the location of the yoke 50 or 52 is adjusted so
as to obtain an asymmetric distribution of electric force.
Alternatively, the center of gravitation 14b of the switching part
30 may be shifted to a location which causes the driving force to
become asymmetric about the center of gravitation 14b.
[0177] FIG. 30 illustrates an optical switching device 1 in which a
weight (balance) is added to the part of the switching part 30 left
to the geometric center line 14 such that the center of gravitation
14b is shifted to a point in the left region 12a. In the present
optical switching device 1, because the center of gravitation 14b
is at a point shifted to left from the geometric center line 14
passing through the geometric center 14a, the mass is different
between the left and right regions 12a and 12b. If the switching
part 30 is designed to move in a vertical direction, the difference
in mass between the left and right regions 12a and 12b results in a
difference in acceleration of gravity, that is, a difference in
weight. Therefore, even when there is no difference in elastic
force Fe and electrostatic force Fs between the left and right
regions 12a and 12b, a greater weight in the left region 12a causes
the switching part 30 to tilt during the moving process as in the
previous embodiment. In the case where the optical switching device
1 is placed such that the switching part 30 moves in a horizontal
direction, a difference in acceleration during the moving process
occurs owing to the difference in mass upon which the elastic force
Fe and the elastic force Fs are exerted. As a result, also in this
case, the switching part 30 moves in a tilted fashion.
[0178] Thus, also in the optical switching device 1 in this
example, the switching part 30 is tilted during the early stage,
the main stage, and the final stage of the moving process, and thus
the resistance of the fluid (air in most cases, but may be an inert
gas such as nitrogen) present around the switching part 30 becomes
small. Therefore, it is possible to provide an optical switching
device capable of responding at a high speed as in the previous
embodiments.
[0179] [Fifth Embodiment]
[0180] It is also possible to make the distribution of the driving
force exerted upon the switching part 30 asymmetric about the
center of gravitation 14b by adjusting the distribution of the
electrostatic force Fs thereby ensuring that the switching part 30
is tilted when it moves. As described earlier, the electrostatic
force Fs varies in proportion to voltage V and the area of
electrodes and in inverse proportion to the square of the distance
between the electrodes. Therefore, it is possible to obtain an
asymmetric electrostatic force by making any of these factors
asymmetric about the center of gravitation 14b.
[0181] FIG. 31 corresponds to FIG. 17 described earlier. In FIG.
31, an electrode 62 having a shape asymmetric in the left-to-right
direction about the geometric center line 14 is disposed on the
lower surface 37 of a switching part 30 so that the electrostatic
force Fs becomes asymmetric about the center of gravity 14b. More
specifically, the electrode 62 in this example has a generally
trapezoidal shape with a greater area in the left region 12a than
in the right region 12b. As a result, the electrostatic force
generated in the left region 12a becomes greater than that
generated in the right region 12b. Therefore, when the switching
part 30 is moved from the first position to the second position
using the electrostatic force, the portion of the switching part 30
receiving a greater magnitude of electrostatic force first starts
to move, and thus the switching part 30 moves in a tilted fashion
as in the previous embodiments. On the other hand, in the movement
from the second position to the first position, no electrostatic
force is exerted on the switching part 30 of the optical switching
device 1 in the present embodiment. Therefore, if the elastic
forces generated by the yokes 50 and 52 are equal for the left and
right regions, then the switching part 30 moves while maintaining
its attitude substantially parallel.
[0182] If the shape of the electrode 62 of the switching part is
different from the shape of the lower surface 37 of the switching
part 30, it becomes difficult to electrically connect the electrode
62 to the yokes 50 and 52 via which electric power is supplied to
the electrode 62. In the present embodiment, to avoid the above
problem, a connecting electrode 62t is formed along an edge of the
lower surface 37 of the switching part 30, and the electrode 62 is
electrically connected to the yoke 52 via the connecting electrode
62t.
[0183] FIG. 32 illustrates another example having an electrode 62
whose area is different between the regions 12a and 12b left and
right to the geometric center line 14. In this optical switching
device 1, the electrode 62 of the switching part is generally
T-shaped. A generally rectangular-shaped electrode 62a with a size
slightly greater than the lower surface 37 is disposed on the lower
surface 37 in the left region 12a, and a square-shaped electrode
62b continuously extending from the electrode 62a and having an
area approximately one-half that of the electrode 62a is disposed
at the center of the right area of the lower surface 37 in the
right region 12b. In the present example, and also in other example
in which the electrode 62 is formed to be asymmetric in shape and
in area about the geometric center line 14 of the switching part 30
so that the electrostatic force generated by the electrode 62
becomes different between the left area 12a and right area 12b, the
switching part 30 can be moved in a tilted fashion as described
above. This makes it possible to provide an optical switching
device having a low air resistance and capable of responding at a
high speed. Instead of the electrode 62 of the switching part, the
electrode 60 on the substrate may be asymmetric in shape, or both
electrodes 62 and 60 may be asymmetric in shape, so as to achieve
an asymmetric electrostatic force distribution.
[0184] FIG. 33 illustrates an example in which, instead of forming
the electrode 62 or 60 in an asymmetric shape, the electrodes 62
and the electrodes 60 are formed such that the distance d between
the electrode 62 and the electrode 60 becomes asymmetric about the
geometric center line 14. In this specific example of optical
switching device 1, the electrode 62b in the right region 12b has a
greater thickness than the electrode 62a in the left region 12a. As
a result, when the switching part 30 is in the on-state at the
first position, the distance d between the electrode 60 and the
electrode 62b in the right region 12b is smaller than the distance
d in the left region 12a. Therefore, when electric power is
supplied between the electrode 62 and the electrode 60, the
electrostatic force in the right region 12b becomes greater than
that in the left region 12a. Thus, in the present example of
optical switching device, when the switching part 30 moves from the
first position to the second position, separation occurs first in
the right region 12b, as opposed to the previous examples, and the
switching part 30 moves in a tilted fashion,
[0185] On the other hand, when the switching part 30 reaches the
second position in the final stage of the movement, the electrode
62b with the greater thickness in the right region first collides
with the electrode 60 and then the electrode 61a in the left region
collides with the electrode 60. Thus, the switching part 30 comes
to rest in a state in which the switching part 30 is tilted to a
direction different from that in the early stage of the movement.
When the switching part 30 moves from this second position to the
first position, the electrostatic force is turned off and thus the
switching part 30 moves to the first position by means of the
elastic force provided by the yokes 50 and 52. In this moving
process, because the switching part 30 is in the tilted state at
the second position, the tilted orientation is maintained during
the early stage and the following moving process. When the
switching part 30 reaches the first position, the extraction plane
32 of the switching part 30 collides with the total reflection
plane 22 of the light guide 20. As a result, the orientation of the
switching part 30 changes from the tilted direction to a direction
in which the switching part 30 comes in intimate contact with the
total reflection plane 22. Thus, the switching part 30 comes into
the on-state.
[0186] In this example of the optical switching device 1, as
described above, the switching part 30 is tilted in the early
stage, the main stage, and the final stage of the movement and
comes to rest in the tilted state at the second position. As a
result, a high moving speed and a short on-off switching time can
be achieved. Thus, it is possible to provide an optical switching
device capable of responding at a high speed.
[0187] In this example, as described above, the electrode 62 is
formed so as to have a thickness different between the left and
right regions, and the switching part 30 stops when the electrode
62 collides with the electrode 60. This can cause a problem of a
short circuit or the like due to a direct contact between the
electrode 62 and the electrode 60. To avoid the above problem, the
electrode 62 is coated with an insulating material 69 so as to
prevent the electrodes 62 and 60 from coming into direct
contact.
[0188] FIG. 34 illustrates an example in which, instead of the
electrode 62 of the switching part, the electrode 60 on the
substrate is formed so as to have an asymmetric thickness. More
specifically, in this example of the optical switching device 1,
the electrode 60b in the region 12b right to the geometric center
line 14 has a greater thickness than the electrode 60a in the left
region 12a. Therefore, as in the example described above with
reference to FIG. 16, when the switching part 30 is at the first
position, the distance d between the electrode 60 and the electrode
62 in the right region 12b is smaller than in the left region 12a,
and thus a greater electrostatic force is generated in the right
region 12b than in the left region 12a. As a result, switching part
30 tilts and starts to move while maintaining the tilted state, as
in the previous example.
[0189] When switching part 30 stops at the second position, the
switching part 30 collides with the electrode 60 whose height is
different between the left and right regions and tilts owing to the
height difference of the electrode 60. Thus, the switching part 30
comes to rest in the tilted state. Therefore, also in this example,
when the switching part 30 moves from the second position to the
first position, the switching part 30 moves while maintaining the
tilted state. Thus a reduced air resistance is obtained in both
directions, and, therefore, an improvement in the response speed is
achieved.
[0190] [Sixth Embodiment]
[0191] In the previous embodiment, an asymmetric electrostatic
distribution is obtained by forming the electrode 62 or 60 such
that the shape thereof or the distance therebetween becomes
asymmetric. A driving force asymmetric about the center of
gravitation of the switching part 30 may also be exerted on the
switching part 30 by controlling the timing of applying an
electrostatic force.
[0192] FIG. 35 illustrates an optical switching device 1 in which
the electrode 62 of the switching part 30 is divided into two parts
62a and 62b so that an electrostatic force may be applied at times
different between the regions 12a and 12b left and right to the
geometric center line 14. In this example, the electrode 62 is
divided along the geometric center line 14 into two electrodes 62a
and 62b which are symmetrical to each other about the geometric
center line 14. By supplying electric power to the electrodes 62a
and 42b at different times, a driving force having a distribution
asymmetric about the geometric center line 14 can be exerted on the
switching part 30.
[0193] FIGS. 36 and 37 schematically represent the operation of the
present example of optical switching device 1. FIG. 38 is a timing
chart representing the operation (control) of supplying electric
power from power supplies 61a and 61b to the respective electrodes
62a and 62b. When no electric power is supplied from the power
supplies 61a and 61b to the left and right electrodes 62a and 62b,
the switching part 30 is urged by the yokes 50 and 52 of the
driving part 40 such that the extraction plane 32 is in an on-state
(at the first position) in which the extraction plane 32 is in
intimate contact with the total reflection plane 22 as shown in
FIG. 36(a).
[0194] When the power supply 61a is turned on at time t 31 thereby
supplying electric power to the electrode 62a in the left region
12a, an electrostatic force is generated in the left region 12a.
When the electrostatic force reaches a certain magnitude at time t
12, the switching part 30 starts to move in a tilted fashion as
shown in FIG. 36(b). As a result of the tilting of the extraction
plane 32 with respect to the total reflection plane 22, a gap
(space) 17 is created and thus the switching part 30 comes into an
off-state. As the space 17 gradually increases in volume, air 16
smoothly flows into the space 17, and thus the switching part 30
quickly moves without encountering a large air resistance.
[0195] When the power supply 61b is turned on to supply electric
power to the electrode 62b in the right region 12b at time t 33
after time T 10 has elapsed since time t 31, an electrostatic force
is exerted on the switching part 30 also in the right region 12b.
As a result, the switching part 30 tilted at a certain angle
further receives a separation force in the right region and moves
toward the second position while maintaining the angle as shown in
FIG. 37(a). Because the tilted angle of the switching part 30 with
respect to the moving direction is maintained during the movement,
the air resistance becomes small and thus the switching part 30 can
move at a high speed. This allows the switching part 30 to respond
at a required speed with reduced electrostatic force. That is, the
optical switching device 1 can be driven with less electric power
consumption.
[0196] When the switching part 30 approaches the electrode 60
toward the second stopping position as shown in FIG. 37(b), the
switching part 30 comes into a substantially parallel state from
the tilted state in the final stage of the movement from FIG. 37(a)
to FIG. 37(b). Thus, during this final stage of the movement, air
between the electrode 60 and the electrode 62 is smoothly
transferred to the outside thereof. Therefore, also in this example
of optical switching device 1, as described above, the switching
part 30 is in the tilted state in the early, intermediate, and
final stages of the movement, and thus the response speed can be
further improved and the driving power of the optical switching
device can be reduced.
[0197] In the process of moving the switching part 30 from the
second position to the first position, if electric power to the
electrode 62b in the right region 12b is turned off at time t 14,
the electrostatic force in the right regions 12b is eliminated and
the switching part 30 is tilted by the elastic force provided by
the yoke 52 and the switching part 30 starts to move. When the
electric power to the electrode 62a in the left region 12a is
turned off at time t 35 after time T 11 has elapsed since t 14, the
switching part 30 moves from the second position toward the first
position while maintaining the properly tilted angle. When the
switching part 30 reaches the first position at time t 36, the
extraction plane 32 becomes parallel to the total reflection plane
22 and comes into intimate contact with the total reflection plane
22. Thus, the optical switching device 1 in the present example
comes into the on-state in which incident light is modulated and
output as output light.
[0198] In the optical switching device 1 in the present example and
also in those according to the previous embodiments, as described
above, the switching part 30 can be moved at a high speed from the
on-position to the off-position and from the off-position to the
on-position within a fluid ambient such as air or inert gas thereby
achieving a spatial optical modulation device capable of responding
at a high speed with low power consumption without needing a vacuum
ambient.
[0199] FIGS. 39 and 40 illustrate an example in which the electrode
60 on the substrate is divided into left and right portions. FIG.
41 is a timing chart representing the process of supplying voltages
to the electrodes 60a and 60b in the left and right regions wherein
the voltages are varied in magnitude with time. In the present
example of the optical switching device 1, as shown in FIG. 30(a),
the electrode 60 is divided into electrically isolated electrodes
60a and 46b in the left and right regions 12a and 12b left and
right to the geometric center line 14, so that electrostatic forces
generated in the regions 12a and 121b can be controlled by
separately controlling electric power supplied from the power
supply 61 to the respective electrodes. To this end, the power
supply 61 includes a power supply unit 61a connected to the left
electrode 60a and a power supply unit 61b connected to the right
electrode 60b. Furthermore, there is provided a control unit 61c
for controlling the voltages supplied from the respective power
supply units 61a and 61b to the electrodes 60a and 60b. Also in the
present optical switching device 1 as in the previous example, when
no electric power is supplied to the electrodes 62 and 60, the
switching part 30 is maintained in the off-state at the first
position by the elastic force provided by the yokes 50 and 52.
[0200] At time t 41, a voltage Vb 1 is supplied from the power
supply unit 61a to the left electrode 60a thereby supplying
electric power thereto, and a voltage V 2 is supplied from the
power supply unit 61b to the right electrode 60b thereby supplying
electric power thereto, wherein the voltage V 1 supplied to the
left electrode 60a is set to a value greater than the voltage V 2
supplied to the right electrode 60b so that a greater electrostatic
force is exerted on the switching part 30 in the left region 12a
than in the right region 12b. As a result, the driving force
becomes asymmetric in the left-to-right direction about the center
of gravitation 14b of the switching part 30. Thus, the switching
part 30 starts to tilt and move as shown in FIG. 39(b). That is,
the extraction plane 32 separates starting from the left region 12a
and thus it tilts. Thus, also in the present optical switching
device 1 as in the previous embodiments, the switching part 30 can
be moved smoothly without encountering a large air resistance.
[0201] Furthermore, at time t 42, substantially equal voltages V 3
are supplied to the left and right electrodes 60a and 60b from the
power supply unit 61a and 61b under the control of the control unit
61c, thereby moving the switching part 30 to the second position
while maintaining the properly tilted angle, as shown in FIG.
40(a). When the electrode 62 collides with a stopper 65e, the
switching part 30 stops at the second position as shown in FIG.
40(b). In this final stage of the movement, the switching part 30
comes into a parallel state from the tilted state in a similar
manner as in the previous embodiments, and air is quickly removed
from the space and the switching part 30 finally comes to rest. In
the present optical switching device 1, the electrodes 60a and 60b
on the substrate are formed in a non-flat shape having a protruding
part 65e serving as the stopper thereby preventing the electrode 62
of the switching part from coming into intimate contact with the
electrode 60a or 60b on the substrate.
[0202] When the switching part 30 is moved from the second position
to the first position, the electric power to the right base
electrode 60b is turned off at time t 43 and the electric power to
the left base electrode 60a may be gradually reduced as shown in
FIG. 41 so that the right part of the switching part 30 in the
region 12b immediately starts to move by means of the elastic force
provided by the yoke 52 whereas the electrostatic force generated
between the base electrode 60a and the electrode 62 and exerted on
the left part of the switching part 30 in the region 12a gradually
decreases. Therefore, also when the switching part 30 starts to
move from the second position, the switching part 30 is first
tilted to a proper angle, and then it is moved toward the first
position while maintaining the tilted state. Thus, also in the
movement from the second position to the first position, a
reduction in air resistance is achieved and the switching part 30
can be moved at a high speed.
[0203] The optical switching devices 1 described above operate as a
spatial optical modulation device capable of turning on and off
incident light. A single optical switching device 1 may be utilized
in a separate fashion, or a plurality of optical switching devices
may be disposed in an array fashion so as to obtain various devices
such as an image display device for use in various applications
such as an optical communication, optical operation, optical
recording, etc. By tilting the switching part from the orientation
in the on-state at the start of the moving process, it is possible
to greatly reduce the resistance of the fluid present around the
switching part. This allows the spatial optical modulation device
according to the present invention to be used in air or an inert
gas ambient such as a nitrogen ambient. Thus, the spatial optical
modulation device can operate at a high speed and respond at a high
speed in a highly reliable fashion. The reduction in the fluid
resistance allows a reduction in electric power required to drive
the spatial optical modulation device.
[0204] The method of controlling the attitude disclosed herein may
be applied not only to optical switching devices using an
evanescent wave but also to various types of spatial optical
modulation devices in which incident light is modulated by moving a
flat plane element corresponding to the extraction plane of the
switching part so as to vary the interference characteristics, or
by varying the polarization direction or the phase of reflected
light.
[0205] Although in the above-described embodiments, the yokes
formed of the thin film are used as the elastic member, an elastic
member in another form such as a coil spring may also be employed.
Furthermore, also in the above-described embodiments, the driving
part is realized in the form of a combination of the supporting
member (yoke or spring member) for the elastic support and the
electrostatic driving means. A piezoelectric device may also be
employed as a driving source for driving the switching part. FIG.
42 illustrates an example in which a piezoelectric element 99 is
employed. In this optical switching device 1, instead of a
microprism, a reflective type light outputting member 36 including
a plurality of reflecting elements is employed as the optical
switching part 30. In this optical switching device 1, therefore,
evanescent light captured by the extraction plane 32 in the
on-state is scattered by the light outputting member 36 at proper
angles toward the light guide 20. This makes it possible to form an
image which can be seen from a wide range of viewing angles.
[0206] In the present optical switching device 1, the driving
source for driving the switching part 30 uses electrostriction
produced by the piezoelectric element 99 instead of electrostatic
force. The piezoelectric element 99 employed in the present example
is of the bimorph type including two layers which have different
polarization directions and which are disposed in the form of a
two-layer structure. When electric power is applied to the
piezoelectric element 99, it stretches into a straight form from a
bent state, and thus the yoke or the spring member 50 is drawn by
the piezoelectric element 99. As a result, the optical switching
device 1 is turned off. If the electric power is turned off, the
piezoelectric element 99 goes into the bent state in which an
elastic force is generated by the piezoelectric element 99. In this
state, the optical switching part 30 is urged by the elastic force
provided by the piezoelectric element 99 and the yoke 50 toward the
light guide 20. Thus, an optical switching device with a high
contrast can be obtained.
[0207] Because the optical switching device 1 according to the
present invention is formed in the multilayer structure consisting
of the layer of the light guide 20, the layer of the switching part
30, and the layer of the driving part 40, it is possible to
flexibly combine an optical switching part 30 and a driving part 40
according to any of embodiment disclosed above so as to realize an
optical switching device suitable for use in a particular
application. The application of the optical switching device
according to the present invention is not limited to image display
devices but may be applied to a wide variety of applications such
as a line-shaped light valve for use in an optical printer, an
optical spatial modulator for use in a three-dimensional hologram
memory, and applications in which conventional optical switching
devices using a liquid crystal are currently employed. In
particular, the optical switching device according to the present
invention is suitable for use in devices which require an optical
switching device capable of operating at a higher speed and capable
of outputting a higher intensity of light than can be achieved by
conventional optical switches using a liquid crystal. The optical
switching device according to the present invention may be produced
by a microfabrication technique into a form smaller in size and
thickness and higher in integration density than can be achieved in
the conventional optical switching devices using a liquid
crystal.
[0208] In the optical switching device according to the present
invention, as described above, the extraction plane is brought into
contact with the light guide having the total reflection plane
capable of totally reflecting light thereby transmitting the light,
so that evanescent light leaking through the total reflection plane
is captured thereby forming an image. The light guide, the
reflective type optical switching part, and the driving part are
laminated in this order so as to realize an optical switching
device capable of reflecting the extracted light by the optical
switching part in a substantially vertical direction toward the
light guide thereby outputting high intensity light without
creating a loss in the driving part. The employment of the
multilayer structure allows the respective layers of the light
guide, the optical switching part, and the driving part to be
separately designed into optimum forms. Furthermore, layers having
various different functions and structures may be arbitrarily
combined into the multilayer structure. In particular, by
positioning the optical switching part the driving part and forming
a space in which the elastic spring member is disposed, it becomes
possible to form the light guide into a flat shape and it also
becomes possible to increase the area of the extraction plane of
the optical switching part. This makes it possible to provide a
high-brightness and high-contrast optical switching device with a
large aperture ratio. Using such an optical switching device
according to the present invention, it is possible to provide an
image display device capable of forming a high-quality image.
[0209] Furthermore, by applying a bias voltage with a value within
a proper range which allows the switching part to be held at the
on-position, the driving voltage can be reduced without causing
degradation in the characteristics of the switching part.
Furthermore, by forming a two pairs of electrodes for creating
electrostatic force, the driving voltage can be further reduced by
several-tenths or one order of magnitude. This allows the switching
part to be moved at a high speed. Thus, it is possible to provide a
spatial optical modulation device which can be driven by a low
voltage and which can respond in a short time, that is, can respond
at a high speed.
[0210] Such a great reduction in the driving voltage allows the
switching device or the image display device to be directly driven
by a semiconductor controlling device.
[0211] As a result, the cost of the switching device and the image
display device can be greatly reduced. Furthermore, the reduction
in the driving voltage allows a great reduction in the power
consumption of the switching device and the image display device.
Therefore, it becomes possible to employ a power source having a
limitation in output power such as a battery to drive the
high-speed switching device using an evanescent wave and the image
display device. Thus, the optical switching device capable of
extracting an evanescent wave by moving the switching part thereby
modulating light according to the present invention is very useful
in various applications.
[0212] Furthermore, by tilting the orientation of the extraction
plane or the flat plane element at the first position from the
first direction, it is possible to reduce the resistance of air or
fluid such as an inert gas present around the switching part.
[0213] This allows a reduction in the force required to move the
switching part against the resistance. Therefore, it becomes
possible to move the switching part at a still higher speed using
electrostatic force or the like. Thus, it is possible to provide a
spatial optical modulation device capable of responding at a high
speed. The reduction in the force required to move the switching
part against the resistance also allows a reduction in the power
consumption. As a result, it is possible to provide an optical
switching device capable of responding at a high speed under common
environmental conditions such as in air.
Industrial Applicability
[0214] The optical switching device according to the present
invention is capable of operating at a high speed and providing a
high contrast. This allows the optical switching device according
to the present invention to be used in a wide variety of
applications such as an image display device, a line-shaped light
valve for use in an optical printer, an optical spatial modulator
for use in a three-dimensional hologram memory, etc. The optical
switching device according to the present invention is not only
applicable to applications in which conventional optical switching
devices using a liquid crystal are currently employed, but also
advantageously applicable in particular to devices which require a
higher speed and a higher intensity of light than can be achieved
by conventional optical switches using a liquid crystal.
* * * * *