U.S. patent application number 09/921452 was filed with the patent office on 2002-02-07 for automatic refill system for ultra pure or contamination sensitive chemicals.
This patent application is currently assigned to Arch Specialty Chemicals, Inc.. Invention is credited to Blatt, Christopher S., Pearce, Richard H., Wentworth, Edward H. III, Williams, Graham.
Application Number | 20020014275 09/921452 |
Document ID | / |
Family ID | 22834808 |
Filed Date | 2002-02-07 |
United States Patent
Application |
20020014275 |
Kind Code |
A1 |
Blatt, Christopher S. ; et
al. |
February 7, 2002 |
Automatic refill system for ultra pure or contamination sensitive
chemicals
Abstract
A highly reliable and safe, modular automatic refill (bulk
delivery) system for ultra-high purity pyrophoric metalorganic
chemicals employing: a manifold that insures contamination-free
operation; a liquid-level detection system with fail-safe
redundancy; and an evacuation system which leaves the system's
manifold and transfer lines relatively free of chemical fire
hazards; leaves them free of oxygen contamination; and leaves the
composition of the system's carrier gas unaffected, between
refills.
Inventors: |
Blatt, Christopher S.; (San
Diego, CA) ; Pearce, Richard H.; (Cocoa, FL) ;
Williams, Graham; (Bromborough, GB) ; Wentworth,
Edward H. III; (Gold Canyon, AZ) |
Correspondence
Address: |
Paul D. Greeley, Esq.
Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
One Landmark Square, 10th Floor
Stamford
CT
06901-2682
US
|
Assignee: |
Arch Specialty Chemicals,
Inc.
Norwalk
CT
|
Family ID: |
22834808 |
Appl. No.: |
09/921452 |
Filed: |
August 2, 2001 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
60223052 |
Aug 4, 2000 |
|
|
|
Current U.S.
Class: |
141/21 ; 137/209;
141/67 |
Current CPC
Class: |
F17C 2225/0123 20130101;
F17C 2221/014 20130101; F17C 2223/0123 20130101; F17C 2223/013
20130101; F17C 2250/032 20130101; F17C 2227/044 20130101; F17C
2227/045 20130101; G01F 15/18 20130101; F17C 2250/043 20130101;
F17C 2221/05 20130101; F17C 2227/04 20130101; F17C 13/045 20130101;
F17C 2205/0146 20130101; G01F 23/2927 20130101; F17C 2250/0473
20130101; F17C 2250/0421 20130101; F17C 2205/0335 20130101; F17C
2270/0518 20130101; Y10T 137/3127 20150401; F17C 2250/0426
20130101; F17C 2250/0439 20130101; F17C 2205/0326 20130101; G01F
1/667 20130101; F17C 5/005 20130101; F17C 2227/0114 20130101; F17C
5/00 20130101; F17C 2250/0413 20130101; F17C 13/026 20130101; F17C
2205/0364 20130101; F17C 2250/072 20130101; F17C 2250/0636
20130101; F17C 13/028 20130101; G01F 23/2921 20130101; F17C 13/025
20130101 |
Class at
Publication: |
141/21 ; 141/67;
137/209 |
International
Class: |
F17C 013/00 |
Claims
What is claimed is:
1. A chemical refill system which comprises: (a) at least one first
chemical reservoir; (b) at least one second chemical reservoir; (c)
a means for supplying gas to said chemical refill system; (d) a
conduit means for connecting said means for supplying gas, said
first chemical reservoir, and said second chemical reservoir; (e)
at least one venturi comprising a gas inlet, a gas outlet and an
exhaust gas outlet, said venturi being disposed between said means
for supplying gas and said first and second reservoirs; and (f) at
least one valve disposed about said exhaust outlet, wherein said
valve prevents diffusion of oxygen or any contaminants into said
system.
2. The chemical refill system as recited in claim 1, wherein said
first chemical reservoir is a bulk chemical supply tank.
3. The chemical refill system as recited in claim 1, wherein said
second chemical reservoir is an ampule and receives chemical from
said first chemical reservoir and delivers chemical to a means for
applying said chemical.
4. The chemical refill system as recited in claim 1, wherein said
conduit means connects said chemical refill system to a means for
applying said chemical.
5. The chemical refill system as recited in claim 1, wherein said
conduit means comprises a plurality of transfer lines and a
plurality of valves.
6. The chemical refill system as recited in claim 1, wherein said
chemical refill system further comprises a volume sensor which is
capable of monitoring the volume of chemicals remaining in said
first and second chemical reservoir.
7. The chemical refill system as recited in claim 6, wherein said
volume sensor is at least one selected from the group consisting
of: optical sensor, thermal conductance sensor, capacitance sensor,
weight scale, sonic sensor, scale, and nitrogen back pressure
sensor.
8. The chemical refill system as recited in claim 7, wherein said
volume sensor is an optical sensor utilizing a glass rod encased in
said first and second chemical reservoirs.
9. The chemical refill system as recited in claim 7, wherein said
volume sensor is a thermal conductance sensor utilizing a
thermistor encased in said first and second chemical
reservoirs.
10. The chemical refill system of claim 1, wherein each of said
first and second chemical reservoirs further comprises a liquid
temperature sensor.
11. The chemical refill system as recited in claim 1, wherein said
chemical refill system further comprises a microprocessor
controller means for selectively operating said chemical refill
system.
12. The chemical refill system as recited in claim 11, wherein said
microprocessor controller means is a programmable logic
controller.
13. The chemical refill system as recited in claim 1, wherein said
chemical refill system comprises two said first chemical reservoirs
and two said second chemical reservoirs.
14. The chemical refill system as recited in claim 13, further
comprising at least two check valves, wherein said check valves
control said conduit means between each of said first chemical
reservoirs.
15. The chemical refill system as recited in claim 13, wherein said
chemical refill system further comprises a microprocessor
controller means which selectively operates said system in a
fixed/shuttle mode which mode involves the use of a fixed first
chemical reservoir and the use of a shuttle first chemical
reservoir, or in a shuttle/shuttle mode which mode involves the use
of a plurality of shuttle first chemical reservoirs.
16. The chemical refill system as recited in claim 1, wherein said
chemical is a pyrophoric chemical.
17. The chemical refill system as recited in claim 16, wherein said
chemical is a liquid pyrophoric metalorganic chemical.
18. A process for transporting a chemical: (a) using a chemical
refill system as recited in claim 1, further comprising a
microprocessor controller means which comprises a plurality of
independently operating microprocessor-controlled modules, each
module being matched electrically to each first chemical reservoir,
and programmed to control the refilling operation of said
corresponding first chemical reservoir; (b) monitoring the volume
of chemical within said corresponding first chemical reservoir;
wherein each independently operating microprocessor-controlled
module may be removed from the microprocessor controller without
interrupting the operation of the remaining
microprocessor-controlled modules and their corresponding first
chemical reservoirs and wherein each microprocessor-controlled
module; (c) sensing an alarm condition from a volume sensor; and
(d) causing through the sensing of step (c) either a refill of that
working reservoir or a shut down of that automatic refill line, and
wherein all microprocessor-controlled modules, upon sensing a low
level or low pressure alarm condition from said sensor in the first
chemical reservoir, will act synchronously to cease operation from
that first chemical reservoir.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a system for supplying
ultra pure and contamination sensitive chemicals to production
lines for forming semiconductors, fiber optics, or like components.
More particularly, this invention relates to a system carrying
pyrophoric chemicals which allows the production line to operate
continuously, and without interruption.
[0003] 2. Description of Related Art
[0004] The manufacture of semiconductors, fiber optics, and the
like components, typically requires production lines with systems
for supplying high purity processing chemicals to diffusion
furnaces, either directly or in carrier gases. Processing chemicals
are liquids which may be directly injected into the processing
stations, or which may be carried to the processing stations in a
carrier gas. Direct chemical injection may be from bulk supply
tanks, or may be from smaller supply containers which will be
periodically refilled by bulk supply tanks. When the chemicals are
applied by means of carrier gases, the liquid chemicals will be
contained in temperature-controlled ampules or work cylinders,
called "bubblers". A stream of an inert carrier gas, such as
nitrogen, helium, or the like, is injected into the bubbler
ampules. The inert carrier gas bubbles upwardly through the liquid
chemical in the bubbler ampule and creates a chemical-saturated
carrier gas atmosphere in the ampule in the space above the supply
of liquid chemical contained therein. The chemically saturated
carrier gas is continuously drawn out of the bubbler and
transferred into the component processing station, such as a
diffusion furnace, as noted above.
[0005] The processing lines depend on a continuous supply of the
chemicals being delivered from the chemical source in order to
operate properly and efficiently. If the supply of the processing
chemicals is interrupted, the production line must be shut down,
and the diffusion furnace must be placed in a "idle" mode. If the
chemical ampules are depleted of processing chemicals, they must be
removed from the production line and replaced with freshly filled
ampules.
[0006] To avoid the necessity of removing a bubbler ampule from the
production line, additional bulk chemical supply containers may be
incorporated into the production line. When a single bulk supply
container is used in the production line, it must be periodically
refilled with processing chemicals. The line must be shut down
while the bulk supply container is refilled. The line can be run
for a longer time period due to the use of the bulk supply
container, however, the line still must be periodically shut down
when the bulk supply container is depleted. When two bulk supply
containers are used, one is a fixed container and the other is a
replaceable mobile container. The ampule is replenished with
chemicals from the fixed bulk container, and the fixed bulk
container is refilled with chemicals from the replaceable, or
shuttle, bulk container. The fixed bulk container is typically
positioned on a scale or connected to a load cell so that the
volume of chemical in the fixed bulk container is continuously
monitored. Signals are transmitted to the system microprocessor
controller or "junction box" which are indicative of the volume of
chemical remaining in the fixed bulk container. The microprocessor
controller manages about 2 points of use. For each point of use,
there are four level sensors, i.e., empty, low, high or overflow.
The low or high corresponds to the "start" and "stop" sensors which
trigger the signal initiation to fill the ampule or the removal of
the request. The empty or overflow ("overfill") sensors are
emergency sensors if the start and stop sensors fail. The supply
voltage for the sensor circuit is about +24 volts. All level
sensors connect to +24 volt when dry. A pressure switch generates a
junction box alarm when there is not enough clean dry air (CDA)
pressure. The electrical connections include main power and
interface connections. Power is configured for 110 VAC or 230 VAC.
A circuit breaker located where the main power is connected can be
used to shut off all power to the unit. Twin fans act to cool the
electronics area of the unit. A dispense request connector is used
to interface with the process equipment, in addition to supplying
status and alarm signals.
[0007] Typically, when the fixed bulk container is seen to be 75%
full, the controller activates a chemical transfer valve system
which transfers chemical from the shuttle bulk container to the
fixed bulk container, and when the fixed bulk container has been
refilled, the controller deactivates the chemical transfer valve
system. Thus, the fixed bulk supply container will be refilled
several times before the shuttle supply container must be refilled.
When the shuttle bulk supply container has been substantially
emptied, the shuttle container is removed from the production line
and is refilled at an off-site chemical supply repository, which is
typically far removed from the processing plant.
[0008] The use of fixed and shuttle bulk chemical supply containers
has proven to be functionally operative, but it would be desirable
to be able to provide an alternative replenishment system for the
chemical ampules; and even more desirable to provide a chemical
replenishment system with a controller microprocessor which can
operate the system in alternative chemical replenishment modes, one
having a fixed and a replaceable bulk chemical supply containers,
and the other having two replaceable bulk chemical supply
containers.
[0009] Transportation of ultra high purity or ultra sensitive
chemicals within the production lines require additional
safeguards. For that reason, pyrophoric chemicals capable of
self-ignition when it is exposed to air, are rarely in production
lines. Automatic liquid replacement or refill systems for liquids
have been utilized in other industries where the purity
requirements of the liquid are far less stringent, and where
pyrophoric reactions and extreme air (oxygen and moisture)
sensitivity are not commonly encountered. Moreover, these
replacement systems have been based upon measuring the weight of
the liquid in the working container at comparative points in time
or by using a time filling sequence to ensure the proper volumetric
quantity is delivered. None of the systems were designed to work
with the stringent requirements needed for ultra high purity or
contamination sensitive chemicals in the compound semiconductor
industry, and where the systems must accommodate pyrophoric
metalorganic chemicals with their need to minimize fire, and
eliminate air contamination hazards.
[0010] Additionally, automatic chemical refill systems servicing a
multiple number of temperature controllers and their bubblers from
one central refill control system have suffered from the problem
that when one temperature controller has experienced problems or
malfunctions in the system, all of the refill lines have to be
shutdown until the problem is corrected. In current practice, most
chemical refill systems are capable of operating up to four
temperature controllers concurrently to supply vapors to a
corresponding number of deposition tools. Thus, a repair required
of just one temperature controller in the refill system could cause
all of the temperature controllers in the system to be
shutdown.
[0011] The bubblers are held in liquid, temperature-controlled
baths, and must be periodically replaced based on the usage of the
ultra high purity pyrophoric metalorganic (PMO) source chemical.
The amount of chemical used is a function of the degree of
saturation of the hydrogen carrier gas carrying the PMO chemical to
the metalorganic chemical vapor deposition (MOCVD) reactor and the
quantity of carrier gas used. Typical carrier gases are nitrogen,
argon, or helium, but the preferred gas for PMO CVD is ultra high
purity hydrogen. Some typical chemicals utilized in bubblers are
trimethylgallium (TMG), triethylgallium (TEG), trimethylaluminum
(TMA) and dopant chemicals, such as dimethylzinc (DMZ) and
diethylzinc (DEZ). When the chemical in the bubbler is depleted,
the bubbler has to be removed from the temperature bath and
refilled at a remote site.
[0012] In the typical compound semiconductor prior art process
which requires use of fresh liquid pyrophoric metalorganic (PMO)
chemicals, a replacement bubbler is inserted into the liquid
temperature bath. This replacement of the chemical, however,
requires physical removal of the depleted bubbler from the liquid
temperature bath and requires the MOCVD machine to be shut down for
a period of time while the change is being made. Normally the MOCVD
machine's reactor zone temperature is lowered during these periods
of non-operation. Prior to recommencing use of the replenished
chemical, both the bubbler and the machine's reactor zone must be
reheated to their standard operating temperatures. Routinely, test
samples are next run through the process to ensure that the
replenished chemical is not contaminated, and that it is otherwise
acceptable for use in the process, prior to resuming the production
operation. The total, liquid chemical replacement process can take
from two to eight hours, depending upon the chemical involved and
the end product being made by the MOCVD machine.
[0013] These problems are solved in the design of the present
refill system by providing a modular automatic refill system where
the liquid level sensors operate completely independent from each
other to automatically refill the bubbler in its liquid temperature
bath without removing the bubbler from the bath.
[0014] This invention relates generally to a system to
automatically refill a liquid from a bulk container to a smaller
receiving container without contamination. More specifically, it
relates to a modular system providing fresh liquid pyrophoric
metalorganic (PMO) chemicals through an automatic refill to a
plurality of working cylinders (in their corresponding temperature
controlled baths) that supply a vapor to a corresponding number of
metalorganic chemical vapor deposition (MOCVD) machines. Source
liquid chemical cylinders have been utilized in the compound
semiconductor industry to supply chemicals directly or indirectly
via carrier gases that are either partially or fully saturated with
the particular PMO chemical as a function of the liquid chemical
cylinder's temperature and pressure and the rate of carrier gas
flow through the cylinder. Various ultra-high purity liquid PMO
chemicals, including those commonly called dopants, are required
for this industry.
[0015] Additionally, in conventional MOCVD reactors, it is common
practice to use a vacuum pump to remove residual PMO vapors from
transfer lines, before removing a cylinder or bubbler, to replace
it, or to inspect it. The use of a vacuum pump has several
disadvantages:
[0016] A vacuum pump requires that a trap be used to condense and
thereby remove volatile chemicals before they reach the pump, in
order to avoid corrosion and decomposition of the chemicals with
formation of deposits on the working surfaces and moving parts of
the pump.
[0017] A vacuum pump generates heat, which can interfere with
temperature control of the system.
[0018] A vacuum pump, and attendant parts, supports and trap,
requires space in the working area.
[0019] A vacuum pump is an expensive piece of equipment, which
requires regular maintenance. Its trap requires regular inspection,
replacement of low-temperature coolant, and regular removal of and
disposal of the condensed, hazardous PMO chemicals. In addition,
the vacuum pump requires regular changes of its sump oil due to the
build-up of PMO's in the oil, in spite of the aforementioned trap,
which is never 100% efficient.
[0020] The use of the venturi for the present invention is not only
unique, but often overlooked. This is due to the fact that under
normal conditions, the vacuum that can be generated by the venturi
is not sufficient to evaluate all of the pyrophoric chemicals so
one could safely open the system for a container exchange. Thus,
based on theoretical calculations, this type of a system would not
work. However, the present inventors have incorporated the use of
the venturi with a dilution/purge routine that surprisingly allows
for all of the chemical to be removed from the system. Thus, a safe
container exchange is possible. This avoids the conventional use of
vacuum pumps or other such expensive equipment to achieve the
desired vacuum.
[0021] The disadvantages of using a vacuum pump are overcome in the
present invention by the forementioned use of a venturi to remove
residual PMO chemical vapors. The use of a venturi for the removal
of residual PMO vapors has several advantages:
[0022] A venturi requires no moving parts for its operation, and
therefore does not require a trap be installed to remove volatile
chemicals before they reach the venturi. The volatile chemicals
treated by the venturi in this invention are exhausted directly
through the venturi and are combined for disposal with the normal
exhaust from the MOCVD tool.
[0023] A venturi generates little or no heat, and therefore has no
effect on the temperature control system of this invention.
[0024] A venturi requires very little space within the system's
cabinet. A venturi's small size allows further efficiency by
reducing the volume of gases contained in shorter lengths of
connecting lines.
[0025] A venturi is a very simple device, is inexpensive to
install, and requires little or no maintenance.
SUMMARY OF THE INVENTION
[0026] The present invention is directed to a chemical refill
system which comprises: (a) at least one first chemical reservoir;
(b) at least one second chemical reservoir; (c) a means for
supplying gas to the chemical refill system; (d) a conduit means
for connecting the means for supplying gas, the first chemical
reservoir, and the second chemical reservoir; (e) at least one
venturi comprising a gas inlet, a gas outlet and an exhaust gas
outlet, the venturi being disposed between the means for supplying
gas and the first and second reservoirs; and (f) at least one valve
disposed about the exhaust outlet, wherein the valve prevents
diffusion of oxygen or any contaminants into the system.
Preferably, the first chemical reservoir is a bulk chemical supply
tank and the second chemical reservoir is an ampule and receives
chemical from said first chemical reservoir and delivers chemical
to a means for applying the chemical. The conduit means connects
the chemical refill system to a means for applying the chemical and
comprises a plurality of transfer lines and a plurality of
valves.
[0027] One embodiment of the chemical refill system further
comprises a volume sensor which is capable of monitoring the volume
of chemicals remaining in the first and second chemical reservoir.
The volume sensor is operable to monitor the volume of chemical in
the first and second chemical reservoirs using one selected from
the group consisting of: optical sensor, thermal conductance
sensor, capacitance sensor, weight scale, sonic sensor, weight
scale, and nitrogen back pressure sensor. Preferably, the volume
sensor is an optical sensor utilizing a glass rod encased in the
first and second chemical reservoirs or a thermal conductance
sensor utilizing a thermistor encased in the first and second
chemical reservoirs.
[0028] Another embodiment of the chemical refill system further
comprises a liquid temperature sensor in each of the first and
second chemical reservoirs. A further embodiment of the chemical
refill system comprises a microprocessor controller means for
selectively operating the chemical refill system. Preferably, the
microprocessor controller means is a programmable logic controller.
Also preferably, the microprocessor controller means further
comprises a set of solenoid valves.
[0029] One embodiment of the chemical refill system comprises two
of the first chemical reservoir and two of the second chemical
reservoir. The chemical refill system for this embodiment has a
microprocessor controller means which selectively operates the
system in a fixed/shuttle mode which mode involves the use of a
fixed first chemical reservoir and the use of a shuttle first
chemical reservoir, or in a shuttle/shuttle mode which mode
involves the use of a plurality of shuttle first chemical
reservoirs.
[0030] The present invention is also directed to a process for
transporting a chemical: (a) using a chemical refill system further
comprising a microprocessor controller means which comprises a
plurality of independently operating microprocessor-controlled
modules, each module being matched electrically to each first
chemical reservoir, and programmed to control the refilling
operation of said corresponding first chemical reservoir; (b)
monitoring the volume of chemical within said corresponding first
chemical reservoir; wherein each independently operating
microprocessor-controlled module may be removed from the
microprocessor controller without interrupting the operation of the
remaining microprocessor-controlled modules and their corresponding
first chemical reservoirs and wherein each
microprocessor-controlled module; (c) sensing an alarm condition
from a volume sensor; and (d) causing through the sensing of step
(c) either a refill of that working reservoir or a shut down of
that automatic refill line, and wherein all
microprocessor-controlled modules, upon sensing a low level or low
pressure alarm condition from said sensor in the first chemical
reservoir, will act synchronously to cease operation from that
first chemical reservoir.
[0031] Another embodiment of the invention further comprises at
least two check valves, wherein the check valves control the
conduit means between each of said first chemical reservoir.
[0032] In a further embodiment of the invention, the chemical
refill system transports pyrophoric chemicals. Preferably, the
chemical refill system transports liquid pyrophoric metalorganic
chemicals.
BRIEF DESCRIPTION OF THE DRAWINGS
[0033] FIG. 1 is a schematic view of the system of the present
invention for dispensing ultra high purity or contamination
sensitive chemicals into a processing station in the production
line having eight points of use in the bubbler section; and
[0034] FIG. 2 is a schematic view of the system of the present
invention for dispensing ultra high purity or contamination
sensitive chemicals into a processing station in the production
line having four points of use in the bubbler section.
DETAILED DESCRIPTION OF THE INVENTION
[0035] FIG. 1 is a schematic view of an ultra pure or contamination
sensitive chemical dispensing system which forms a part of a
production line for processing semiconductors, or the like. The
left side of FIG. 1 shows the bulk chemical supply tanks and the
valving and conduit scheme for the purge gas and chemical refill
manifold. The bulk chemical supply tanks are denoted by the
numerals 50 and 52. One or both of them can be shuttle tanks. When
only one tank is a shuttle tank, the other will be a fixed tank
which is not designed to be removed from the cabinet 48. In either
case, the cabinet 48 will be provided with scales 54 and 56, one
for each of the tanks 50 and 52. The cabinet assembly is thus
capable of being used in a shuttle/shuttle mode, and is also
capable of being used in a fixed/shuttle mode. The scales 54 and 56
monitor the amount of chemical which remains in each tank 50 and 52
at all times, and are operable to send appropriate signals to the
controller so that the shuttle tank can be removed and replaced
with a new shuttle tank in a manner which allows the production
line to remain in continuous operation for an indeterminate time
period.
[0036] The manifold includes a plurality of outlet passages 60, 62,
64, and 66 which are connected to individual bubblers or ampules.
The outlet passages are each provided with individual control
valves V1, V2, V3, and V4, respectively, which are actuated by the
system controller so that the chemical from the tanks 50 and 52 may
be selectively transferred to bubblers which require chemical
replenishment. Transfer passages 68 and 70 are operable to transfer
chemical from the tanks 50 and 52, respectively, to the outlet
passages 60, 62, 64, and 66. Each of the transfer passages 68 and
70 is provided with respective valves V5 and V6 which are operable
to control chemical flow from the tanks 50 and 52. Valves V5 and V6
are also actuated by the system controller. The chemical is forced
out of tanks 50 and 52 by means of a tank-pressurizing gas source
55. Pressure gauges P1 and P2 are used to monitor the gas pressure
in the tanks 50 and 52, respectively. The gas source is operable to
selectively provide a pressurized stream of an inert dry gas, such
as helium or nitrogen, to tanks 50 and 52 through passages 72 and
74. The flow of pressurizing gas to tanks 50 and 52 through
passages 72 and 74 is controlled in part by valves DV3 and DV6; and
the transfer of chemicals from tanks 50 and 52 to passages 68 and
70 is controlled in part by valves DV2 and DV7, respectively.
Valves DV2, DV3, DV6 and DV7 are manually operated, and are kept
open during normal system operation. Valves DV1, DV4, DV5 and DV8
are leak test ports.
[0037] A second source of pressurized gas is included in the system
for use in applying a vacuum to the manifold assembly. The
pressurized gas source opens into a line which is controlled by
valve V15 and when valve V15 is open, the gas stream passes through
venturi nozzle 78 so as to impose a vacuum in line 80 which opens
into venturi nozzle 78. The venturi pulls vacuum on the manifold so
that there is no need to connect the system to an external supply
of vacuum. An additional valve V16 is located at the exit of the
venturi. Valve V16 prevents back diffusion of oxygen or any
moisture or air that may be detrimental to ultra pure or
contamination sensitive chemicals.
[0038] The following is a description of the valving sequence for
transferring chemical from tank 50 to one or more of outlet
passages 60, 62, 64 or 66. It will be understood that the chemical
can be similarly transferred from tank 52 to outlet passages 60,
62, 64, or 66 in the event that the system is used in the
shuttle-shuttle mode, by manipulating the corresponding valves. As
previously noted, valves DV2 and DV3 are kept open during normal
operation of the system. One or more of valves V1, V2, V3 or V4
will be opened along with valves V5 and V9. Valves CV1 and CV2 are
check valves which prevent back flow of gas into the gas source.
All of the remaining valves except for DV6 and DV7 will be closed.
Opening valve V9 allows the pressurizing gas from the gas source to
enter tank 50, pressurizing the latter sufficiently to force the
chemicals up through tube 51 into line 68 and out through the
opened outlet passages. The chemical is transferred to bubbler
ampule 4 through a line 46 which connects with an extended tube 41
via a valve 45 which remains open at all times during normal
operation of the system. The transferred chemicals enter ampule 4
through the open end of tube 41. When the appropriate fill level is
detected in the ampule, the controller automatically closes valves
V5 and V9 along with the opened outlet valve. As previously noted,
scale 54 monitors the amount of chemicals remaining in tank 50, and
when the chemical amount reaches a predetermined minimal amount,
the controller will provide a signal to the system operator that
the tank is to be removed from the cabinet when the system is a
shuttle/shuttle system.
[0039] When the system is operating in a fixed/shuttle mode such
that tank 50 is the fixed tank and tank 52 is the shuttle tank,
scale 54 will signal the controller when the chemical level in tank
50 has reached a refill level, preferably about 75% of capacity,
and the controller will open the correct valves in the system so as
to effect a transfer of chemical from tank 52 to tank 50. Assuming
at this point that all of the valves except DV2, DV3, DV6, and DV7
are closed, the controller will open valves V10, V5, and V6. This
will cause the pressurized gas from the gas source to pressurize
the tank 52 to the extent needed to force the chemical up through
tube 71 into passage 70 and through the valves V5 and V6 to line
68. The chemical then flows down through line 68 into tube 51 and
into tank 50. When scale 54 signals that sufficient chemical has
been transferred into tank 52, the controller closes valves V10,
V5, and V6 to halt movement of the chemical from tank 52 to 50.
Obviously, if tank 52 were the fixed tank and tank 50 were the
shuttle tank in a fixed-shuttle system, the transfer would involve
manipulation of valve V9 rather than valve V10. The other operative
valves would remain the same.
[0040] The microprocessor controller when operating the system in
the shuttle/shuttle mode, periodically actuates the valves to open
one of the second and third chemical transfer lines upon receipt of
the need-to-add level of chemical signal from the level detectors
and, after receipt of a tank-empty signal from one of the volume
sensors, to periodically subsequently actuate the valves to open
the other of the second and third chemical transfer lines upon
receipt of subsequent need-to-add level of chemical signals from
the level detectors, and to keep the valves in a condition which
holds the first chemical transfer line in a closed condition.
[0041] In both the fixed/shuttle and shuttle/shuttle modes of
operation, there will be an operating protocol for exchanging an
empty tank for a full tank. The following is an explanation of the
protocol. The empty tank to be replaced will be the shuttle tank in
the fixed/shuttle mode, and alternating ones of the tanks in the
shuttle/shuttle mode. Assuming that tank 52 is the tank to be
replaced with a full tank, the controller will be signaled by scale
56 that tank 52 is empty, i.e., that the chemical level is below
the lower end of tube 71.
[0042] The general protocol for exchanging empty bulk containers is
as follows:
[0043] 1) blowing out the lines of the manifold associated with the
bulk container being replaced;
[0044] 2) purging the lines of the manifold associated with the
bulk container being replaced;
[0045] 3) flushing inert gas through the connection lines while
they are being disconnected from the empty bulk container and then
reconnected to the new bulk container;
[0046] 4) purging the lines again; and
[0047] 5) checking the connections for leaks.
[0048] "Blowing out" refers to the removal of liquid in lines of
the manifold when the latter are full of chemical. "Purging" refers
to the removal of any residual liquid remaining in the lines after
the "blowing out" operation. "Flushing" refers to the constant flow
of gas through the lines to eliminate line contamination which
connections are being made.
[0049] To start the changeover sequence, the controller will open
valve V15 so as to direct a stream of compressed gas through
venturi 78 and out through valve V16. This will draw a vacuum in
the line 80 and in line 84. The valve V13 is opened to extend the
vacuum to tank 52. Valve V8 is opened to direct a stream of
pressurized gas from the gas source 55 into lines 86, 88, and 70.
The gas stream from source 55 thus sweeps through lines 88 and 70
as well as tube 71 and tank 52, and thence through lines 84 and 80,
into venturi 78, and through valve V16. The valve V16 prevents back
diffusion of oxygen or any moisture or air which is detrimental to
ultra pure or contamination sensitive chemicals. The dry gas from
the gas source will cause any residual chemical in lines 88 and 70
to be transferred into tank 52. The aforesaid valving condition
will be maintained for a predetermined time period needed to purge
the lines of residual chemical. After the lines have been purged of
residual chemical, all automatic valves are closed and the system
operator is instructed to close manual valves DV6 and DV7 on top of
tank 52.
[0050] After the system operator signals the system controller that
the valves have been closed, the controller will open valve V15 so
as to direct a stream of compressed gas through venturi 78 and out
through valve V16. This will draw a vacuum in line 80 and in line
84. Valves V13 and V14 are opened to extend the vacuum to lines 74,
90, 70, and 88, and on tank valves DV6 and DV7. The aforesaid
valving condition will be maintained to apply vacuum to the lines
and on the tank valves for a predetermined time period. Next,
valves V15 and V13 are closed and the valve V8 is opened to direct
a stream of pressurized gas from gas source 55 into lines 86, 88,
70, 90, and 74. The gas stream from source 55 thus applies pressure
to lines 88, 70, 90, and 74 as well as on tank valves DV6 and DV7
for a predetermined time period.
[0051] The above purge cycle of alternately applying vacuum and
pressure on the lines and on the tank valves is repeated for the
desired number of cycles, typically about ten. Once the necessary
purge cycles have been completed, all automatic valves are closed
and the controller will open valves V8 and V10 to allow gas to flow
through lines 70 and 74 while the tank is being replaced. The
aforesaid prevents air from entering the flexible connection lines
while the tank is being removed and a new tank is being installed.
The system operator will be instructed to remove tank 52 from the
cabinet and to install a full replacement tank. After the system
operator has indicated that a new tank has been installed valves V8
and V10 are closed. The controller then opens valve V15 so as to
direct a stream of compressed gas through venturi 78 and out valve
V16. This will draw a vacuum in the lines 80 and 84. Valves V13 and
V14 are opened to extend the vacuum to lines 74, 90, 70, 88, and to
tank valves DV6 and DV7. After sufficient vacuum time, the
controller closes valves V13 and V15. The controller then monitors
the pressure on the lines and valves DV6 and DV7 by means of
pressure gauge P2, which is a pressure transducer, as is pressure
gauge P1. A rise in pressure would indicate a leak in the
connections to the new tank. If no leaks are detected, the system
repeats the above purge cycles and returns. The operator will
manually return the system to automatic operation, which will
operate as outlined above.
[0052] It is noted that the replacement/purge procedure will occur
when an empty tank is replaced with a full tank, irrespective of
whether the system is operating in the fixed/shuttle, or the
shuttle/shuttle mode. In order to operate the system controller in
the preprogrammed operating mode, i.e., either the fixed/shuttle,
or the shuttle/shuttle operating mode, the system operator need
only activate the controller to reassume automatic operation of the
system, which is accomplished by means of the keyboard provided in
the system.
[0053] The dispensing system includes a chemical temperature
controller which contains a chemical supply ampule 4 from which the
ultra pure or contamination sensitive chemical is fed into a
semiconductor-processing station via conduit. In the system, the
chemical is carried into the processing station in a stream of an
inert gas such as nitrogen. The nitrogen gas stream is fed into
chemical supply ampule 4 from a line which opens into a tube 41
that extends below the surface of the chemical in ampule 4. The
nitrogen gas stream forms an ascending flow of bubbles which rises
up through the liquid chemical into the free space in ampule 4, and
is operative to humidify and pressurize the free space, and create
a pressurized, chemically-humidified stream of processing gas which
flows out of ampule 4 through outlet 20 and into a line to the
processing station. A branch line may be used to temporarily
exhaust the processing gas stream from the system during start-up
of the process. Valves are selectively operable to control the
direction of flow of the processing gas stream. The composition of
the atmosphere in the processing station is controlled by gases
admitted into the processing station via lines which are regulated
by gas mass flow controllers.
[0054] The temperature controller includes a heater which maintains
the liquid chemical in ampule 4 at a proper operating temperature.
A chemical temperature connected to temperature controller via
electrical line sensor and chemical level sensor array are disposed
in ampule 4.
[0055] The level of the chemical in ampule 4 is sensed in a manner
which depends upon the material from which ampule 4 is constructed.
For example, when a quartz ampule is used, the level sensing is
done by means of a beam emitter and vertically spaced-apart
receivers which are located in the portion of the bubbler where
ampule 4 is situated. One of the receivers is a start-refill
receiver. The emitter sends a signal beam through the quartz ampule
to respective receivers located on the opposite side of the ampule.
When the liquid level is such that the emitter signal passes
through the liquid, the index of refraction of the liquid causes
the emitter beam to bend sufficiently so that the start-refill
receiver will not "see" the emitter beam. So long as this condition
persists, the ampule refill program will not be activated. When the
liquid level falls below the emitter signal beam path, the
start-refill receiver will sense the signal beam and will transmit
a start-refill program-activation signal to the system
controller.
[0056] In order to ensure that the proper amount of chemical has
been added to the ampule during the refill operation, at least one
liquid level sensor is provided in the system. The sensors are
vertically spaced apart at a predetermined distance. The lowest
sensor is the "start refill" sensor. The intermediate sensor is a
"stop refill" sensor, and the uppermost sensor is an "overfill"
sensor. The stop refill sensor is operable to send a signal to the
system controller indicating that the ampule has been properly
refilled; and the overfill sensor acts as a backup for the stop
refill sensor, and will activate an alarm in the case of an
overfill condition. It will be understood that with the quartz
ampule, the stop refill and the overfill sensors are operable to
signal the system controller when the emitter beam is deflected by
passing through the liquid chemical, while the start refill sensor
is operable to signal the system controller when the emitter beam
is not deflected by passing through the liquid chemical.
[0057] When ampule 4 is stainless steel, the chemical level is
preferably sensed by means of a series of probes which are denoted
generally by numeral 31, and which are inserted into the top of the
ampule and extend into the ampule to the area where the chemical
level is to be sensed. Each probe preferably consists of a quartz
rod with a beveled end. Signal beam emitter/receiver components 47
are mounted on the top of each rod and send a signal beam down
through each rod. The signal beams are reflected internally by the
beveled ends of the rods when the chemical liquid level is below
the ends of the rods. When the beveled end of a rod is immersed in
the liquid chemical, the signal beam will be refracted out of the
beveled end of the rod into the chemical, and will be scattered
throughout the chemical. Thus, when the beveled end of a
start-refill rod 49 is immersed in the chemical, its
emitter/receiver 47 will not detect the light beam and will not
activate the start-refill program. There are three chemical liquid
level sensor probes, one 49 for detecting the start-refill level,
one 51 for detecting the full level, and one 53 for detecting an
overfill level. Emitter/receivers 47 are connected to a sensor
circuit or control electronics which are contained in the
temperature controller. The control electronics are connected to
the system controller via line, the controller being housed in a
cabinet which also contains the purge gas and chemical supply
manifolds and valves, and the bulk chemical supply tanks.
[0058] The controller microprocessor is a preprogrammed
microprocessor that has inputted therein operating parameters for
the system, and which is operable to moderate and control the
various hardware components of the system so as to maintain proper
chemical fill level in reservoir ampule 4; proper operation of the
various valves in the system; as well as additional scheduled
proper operating parameters, as will be pointed out
hereinafter.
[0059] The cabinet includes a microprocessor controller section
which includes a keyboard and a monitor which are contained in the
electrical section of the cabinet, which cabinet section houses the
electrical components of the system. A programmable logic
controller (PLC) can also be used to operate the controller. With
use of a PLC, the subject invention does not require an ADAC Board,
and controls a touch screen flat panel display. Using a touch
screen flat panel display obviates the need for a keyboard, mouse,
disk drive, and internal hard drive. The lower portion of the
cabinet contains the two bulk chemical supply tanks 50 and 52 and
has a pair of side-by-side doors which allow access to the bulk
supply tanks. The lower portion of the cabinet contains all of the
aforesaid chemical and operating fluid flow control manifold and
valves. The valves are preferably pneumatic valves which are
operated by a source of pressurized air that is located externally
of the cabinet and is connected to the manifold system via a
transfer line. Control of compressed air flow through a line is
accomplished via electrical solenoid valves contained in the
electrical section. The sources of pressurized gas are located
externally of the cabinet.
[0060] The cabinet has electrical and chemical sections which are
used to operate the system. The upper electrical section of the
system includes the controller computer CPU components such as the
monitor, the keyboard, a mouse, a floppy disc drive, and a hard
drive; or in the alternative, the touch screen flat panel display.
The controller is connected to an analog to digital controller
board which takes the analog signals from an interface board that
controls the operation of the solenoid valves in valve manifold,
and converts the analog signals into digital signals for the
controller computer. The interface board is also connected to and
receives signals from both of the bulk tank scales or weight
sensors; from the ampule fill level sensors via a line; and from
the pressure gauges P1 and P2. The solenoid valve manifold receives
compressed air from the line and selectively delivers the
compressed air to the above-described pneumatic valves contained in
the manifold assembly via individual tubular connections. Thus, one
solenoid valve is operably paired with a respective one of the
pneumatic valves in the manifold. Depending on input received from
start/stop signals, the weight scales and the pressure gauges, as
well as operator input from the keyboard or mouse, the controller
dictates operation of the solenoid valves in manifold, and,
therefore, the pneumatic valves V1-V15 in manifold. The controller
will also signal and prompt the system operator via the monitor as
to tasks which must be manually performed.
[0061] It will be readily appreciated that the same system
manifolding containing identical electrical and chemical components
when constructed in accordance with this invention will be able to
operate in either of two different modes. The only difference will
be the operating program contained in a hard drive in the
controller computer. Thus a system constructed in accordance with
this invention will be usable in a preexisting processing plant
which uses either the fixed/shuttle or shuttle/shuttle operating
mode. Also, the presence of CV1 and CV2 allows for use of only one
bulk supply container, such that a second container is not
necessary. The modular automatic refill system is very flexible and
permits connection and control of any desired number of bubblers by
adjusting the number of modules in the modularly expandable
automatic refill system. The increased versatility of the system of
this invention will eliminate the need for custom manifolding in a
chemical delivery assembly which manifolding is dependent upon the
mode of operation of the processing plant. FIG. 2 shows a schematic
view of an ultra pure or contamination sensitive chemical
dispensing system which has only a single pressurized bulk chemical
supply tank and a single chemical supply ampule.
[0062] FIG. 3 is a block diagram of the electrical and chemical
sections in the cabinet which are used to operate the system. The
upper electrical section of the system includes a programmable
logic controller (PLC). The PLC controller contains the CPU, analog
inputs, digital inputs and outputs, and power supply. The
controller is connected to an analog input which takes the signals
directly from the volume or weight scales and pressure transducers
(P1 and P2). The analog signals are converted into digital signals
for the controller computer which controls the operation of the
solenoid valves in valve manifold 114. The PLC modules connect to
the interface board. The interface board contains the required
power supplies and interface electronics. Pressure transducer and
scales are connected to the analog card of the PLC. The vacuum
switch, spill sensor and door sensor inputs are connected to the
interface board. The interface electronics also interprets the
signals coming from the associated processing equipment. On command
from the PLC, the interface board sends signals to a bank of
solenoid valves. The solenoid valves control compressed air flow to
the pneumatic valves in the plumbing manifold. The solenoid valve
manifold 114 receives compressed air and selectively delivers the
compressed air to the above-described pneumatic valves contained in
the manifold assembly 58 via individual tubular connections 116.
Thus, one solenoid valve is operably paired with a respective one
of the pneumatic valves in the manifold 58. Depending on input
received from start/stop signals, the weight scales and the
pressure gauges, as well as operator input from the keyboard or
mouse, the controller dictates operation of the solenoid valves in
manifold 114, and, therefore, the pneumatic valves V1-V15 in
manifold 58. The controller will also signal and prompt the system
operator via the touch screen monitor as to tasks which must be
manually performed.
[0063] It will be readily appreciated that the same system
manifolding containing identical electrical and chemical components
when constructed in accordance with this invention will be able to
operate in either of two different modes. The only difference will
be the operating program in the controller computer. Thus a system
constructed in accordance with this invention will be usable in a
preexisting processing plant which uses either the fixed/shuttle or
shuttle/shuttle operating mode. The increased versatility of the
system of this invention will eliminate the need for custom
manifolding in a chemical delivery assembly which manifolding is
dependent upon the mode of operation of the processing plant.
[0064] The present invention provides a modular automatic refill
system which does not require a vacuum pump but is safe for an
ultra high purity, pyrophoric metalorganic (PMO) chemicals. This
system also does not require the removal of the working cylinder
(bubbler) from the working apparatus and controls the plurality of
chemical receiving bubblers independently of one another. The
system also has separate control modules for each bubbler which may
be removed from the automatic refill system during operation of the
remaining modules without damaging or harming the microprocessor of
the removed module. Another feature of the present invention is
that the automatic refill system can be utilized to fill more than
one bubbler with the ultra high purity chemical from a single bulk
container.
[0065] The degree of saturation of the carrier gas by the liquid
chemical replenished by the subject automatic refill system does
not change. Other inert carrier gases do not dilute the commonly
used hydrogen carrier gas.
[0066] Also, for the present system every digital input/output is
galvanically isolated from the microprocessor. All of the modules
are separate, stand-alone units with their own microprocessor and
peripheral electronics. When one module controlling one bubbler
malfunctions, the remaining modules and bubbler controllers
continue to work normally. The replacement of a malfunctioning
module or bubbler does not interfere with the operation of the
remaining modules, bubblers, and their associated metalorganic
chemical vapor deposition (MOCVD) machines. The separate modules
are quickly and easily replaced since they are designed as pull
out/plug in units. Each microprocessor control module causes its
bulk chemical transfer line to be drained of PMO chemical into its
corresponding working container, and thereby reducing the risk of
PMO fire. The chemical transfer lines are back-filled between
filling modes, with ultra-high purity hydrogen gas. Working
containers or bulk chemical supply tanks are fitted with redundant
level detectors, so arranged to signal extreme level conditions. A
gas venturi is used to eliminate PMO vapors from transfer lines
prior to a change-out of the bulk chemical supply container.
[0067] This modular automatic refill system does not upset the
temperature of the liquid chemical in the receiving bubbler and,
therefore, the saturation level of the exiting gas is not
significantly disturbed. Also, the bulk containers are outfitted to
allow the use of a helium leak detector. In this way the system can
avoid atmospheric contamination, maintaining product purity after
the change-out of a bulk cylinder. There is no need to remove the
ultra high purity PMO chemical bubblers from the liquid temperature
baths of the MOCVD machine to refill them with the chemical, nor is
there a necessity to install new bubblers in their place so that
the operation of the corresponding MOCVD machines is not affected
during the automatic refilling operation and so that the chance of
accidental fires is sharply reduced.
[0068] Additionally, the PMO transfer lines are cleared of PMO
liquid chemical during the normal operating mode of the MOCVD
machine between refilling modes of operation of the refill system;
and that hydrogen gas is back-filled into the transfer lines
between refilling modes and the MOCVD machine's operating carrier
gas is otherwise undisturbed. That back-diffusion of air into the
manifold during standby mode of the refill system is eliminated,
and metal oxide formation in and contingent to the manifold is
avoided. A venturi coupled to valve V16 is employed to remove
hazardous PMO chemical vapors from transfer lines before effecting
bulk cylinder change-outs.
[0069] These and other objects, features and advantages are
obtained by a modular automatic chemical refill system which
permits fast and easy replacement of damaged or malfunctioning
modules within the automatic refill system, without affecting the
operation of the remaining modules; so that any of a plurality of
bubblers in the system can continue to operate and supply chemical
from the bubblers to the corresponding MOCVD machines without
interruption. The modular automatic refill system senses the level
of liquid chemical in each bubbler and automatically refills the
liquid chemical in the bubblers to an operating level without
requiring removal of the bubblers from their corresponding liquid
temperature baths or without significantly affecting the
temperature, gas composition and liquid PMO chemical saturation
level of the carrier gas, nor introducing any oxygen into the
refill system or the MOCVD machine.
[0070] While we have shown and described several embodiments in
accordance with our invention, it is to be clearly understood that
the same are susceptible to numerous changes apparent to one
skilled in the art. Therefore, we do not wish to be limited to the
details shown and described but intend to show all changes and
modifications which come within the scope of the appended
claims.
* * * * *