U.S. patent application number 09/045927 was filed with the patent office on 2002-01-03 for light emitting semiconductor devices.
Invention is credited to SATO, SHUNICHI.
Application Number | 20020000546 09/045927 |
Document ID | / |
Family ID | 13382098 |
Filed Date | 2002-01-03 |
United States Patent
Application |
20020000546 |
Kind Code |
A1 |
SATO, SHUNICHI |
January 3, 2002 |
LIGHT EMITTING SEMICONDUCTOR DEVICES
Abstract
A light emitting semiconductor device, which includes a Ga.sub.0
9 In0 1 As.sub.0 97 active layer disposed between lower n-Ga.sub.0
5 In.sub.0 5P and upper p-Ga.sub.0 5 In.sub.0 5 P cladding layers,
being provided with lower and upper GaAs spacing layers each
intermediate the active layer and the cladding layer. The active
layer is approximately lattice-matched to a GaAs substrate and has
a thickness of about 0.1 .mu.m with a photoluminescence peak
wavelength of approximately 1.3 .mu.m, and the GaAs spacing layers
each have a thickness of about 2 nm.
Inventors: |
SATO, SHUNICHI; (MIYAGI-KEN,
JP) |
Correspondence
Address: |
OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT PC
FOURTH FLOOR
1755 JEFFERSON DAVIS HIGHWAY
ARLINGTON
VA
22202
US
|
Family ID: |
13382098 |
Appl. No.: |
09/045927 |
Filed: |
March 23, 1998 |
Current U.S.
Class: |
257/1 ;
257/E33.005 |
Current CPC
Class: |
H01L 33/06 20130101;
H01S 5/3235 20130101; H01S 5/32366 20130101; H01L 33/32 20130101;
H01S 5/3211 20130101; H01S 5/3201 20130101; H01L 33/02
20130101 |
Class at
Publication: |
257/1 |
International
Class: |
H01L 047/00 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 21, 1997 |
JP |
9-068726 |
Claims
What is claimed is:
1. A light emitting semiconductor device, comprising: a lower
cladding layer of Al.sub.z Ga.sub.1-z As (0<z.ltoreq.1) or
Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u (0<t<1 and
0<u.ltoreq.1) alloy semiconductor layers, having a first
conductivity type; a lower spacing layer, comprising at least one
GaAs monolayer; a Ga.sub.x In.sub.1-x N.sub.y As.sub.1-y
(0.ltoreq.x.ltoreq.1 and 0<y<1) active layer, having a
thickness less than the critical thickness so as not to give rise
to misfit dislocations; an upper spacing layer, comprising at least
one GaAs monolayer; and an Al.sub.z Ga.sub.1-z As (0<z.ltoreq.1)
or Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u (0<t<1 and
0<u.ltoreq.1) upper cladding layer, having a second conductivity
type, each grown on a semiconductor substrate in the order above
recited.
2. The light emitting semiconductor device of claim 1, said
Ga.sub.x In.sub.1-x N.sub.y As.sub.1-y active layer forming a
quantum well, further provided with a lower light guide layer
comprising Al.sub.z Ga.sub.1-z As (0<z.ltoreq.1) or Ga.sub.t
In.sub.1-t P.sub.u As (0<t<1 and 0<u.ltoreq.1) alloy
semiconductor layers, having a band gap energy wider than that of
said active layer and narrower than that of said lower cladding
layer, and being formed intermediate said lower cladding layer and
lower spacing layer; and an upper light guide layer comprising
Al.sub.z Ga.sub.1-z As (0<z.ltoreq.1) or Ga.sub.t In.sub.1-t
P.sup.u As.sup.1-u (0<t<1 and 0<u.ltoreq.1) alloy
semiconductor layers, having a band gap energy wider than that of
said active layer and narrower than that of said upper cladding
layer, and being formed intermediate said upper cladding layer and
upper spacing layer.
3. The light emitting semiconductor device of claim 1, wherein said
active layer may preferably be lattice-matched to said substrate
with a lattice strain of within 0.3% at most.
4. The light emitting semiconductor device of claim 1, said lower
cladding layer comprising n-Ga.sub.0 5 In.sub.0 5 P with a layer
thickness of approximately 1.5 .mu.m; said lower spacing layer
comprising GaAs with a thickness of approximately 2 nm; said
Ga.sub.0 9 In.sub.0 1 N.sub.0 03 As.sub.0 97 active layer being
approximately lattice-matched to said semiconductor substrate,
having a thickness of about 0.1 .mu.m and a photoluminescence peak
wavelength of approximately 1.3 .mu.m; said upper spacing layer
comprising GaAs with a thickness of approximately 2 nm; and an
upper cladding layer comprising p-Ga.sub.0 5 In.sub.0 5 P with a
layer thickness of approximately 1.5 .mu.m.
5. The light emitting semiconductor device of claim 1, wherein said
active layer is tensile strained against said substrate.
6. The light emitting semiconductor device of claim 1, wherein said
active layer is compressive strained against said substrate.
7. The light emitting semiconductor device of claim 2, said lower
cladding layer comprising n-Ga.sub.0 5 In.sub.0 5 As with a
thickness of approximately 1.5 .mu.m; said lower light guide layer
comprising Al.sub.0 2 Ga.sub.0 8 As with a thickness of
approximately 120 nm; said lower spacing layer comprising GaAs with
a thickness of approximately 2 nm; said active layer comprising a
Ga.sub.0 94 In.sub.0 06 N.sub.0 04 As.sub.0 96 quantum well which
is tensile strained, having a thickness of about 10 nm and a
photoluminescence peak wavelength of approximately 1.3 .mu.m; said
upper spacing layer comprising GaAs with a thickness of
approximately 2 nm; said upper light guide layer comprising
Al.sub.0 2 Ga.sub.0 8 As with a thickness of approximately 120 nm;
and said upper cladding layer comprising p-Ga.sub.0 5 In.sub.0 5 As
with a layer thickness of approximately 1.5 .mu.m.
8. The light emitting semiconductor device of claim 1, wherein the
thickness of said lower and upper spacing layers is at most
one-tenth of the carrier diffusion length.
9. A light emitting semiconductor device, comprising: a lower
cladding layer of Al.sub.z Ga.sub.1-z As (0<z.ltoreq.1) or
Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u (0<t<1 and
0<u.ltoreq.1) alloy semiconductor layers, having a first
conductivity type; a lower light guide layer of Al.sub.z Ga.sub.1-z
As (0<z.ltoreq.1) or Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u
(0<t<1 and 0<u.ltoreq.1) alloy semiconductor layers,
having a band gap energy wider than that of said active layer and
narrower than that of said lower cladding layer; a lower spacing
layer, comprising at least one molecular layer of GaAs; a Ga.sub.x
In.sub.1-x N.sub.y As.sub.1-y (0.ltoreq.x.ltoreq.1 and 0<y<1)
active layer, having a thickness less than the critical thickness
so as not to give rise to misfit dislocations; an upper spacing
layer, comprising at least one GaAs monolayer; and an upper light
guide layer of Al.sub.z Ga.sub.1-z As (0<z.ltoreq. or Ga.sub.t
In.sub.1-t P.sub.u As.sub.1-u (0<t<1 and 0<u<1) alloy
semiconductor layers, having a band gap energy wider than that of
said active layer and narrower than that of said lower cladding
layer; an upper cladding layer of l.sub.z Ga.sub.1-z As
(0<z<1) or Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u
(0<t<1 and 0<u.ltoreq.1) alloy semiconductor layers,
having a second conductivity type, each grown on a semiconductor
substrate in the order above recited.
10. The light emitting semiconductor device of claim 9, wherein
said active layer is lattice-matched to said substrate with a
lattice strain of within 0.3% at most.
11. The light emitting semiconductor device of claim 9, wherein
said active layer is tensile strained against said substrate.
12. The light emitting semiconductor device as claim 9, wherein
said active layer is compressive strained against said
substrate.
13. The light emitting semiconductor device of claim 9, said lower
cladding layer comprising n-Ga.sub.0 5 In.sub.0 5 As with a
thickness of approximately 1.5 .mu.m; said lower light guide layer
comprising Al.sub.0 2 Ga.sub.0 8 As with a thickness of
approximately 120 nm; said lower spacing layer comprising GaAs with
a thickness of approximately 2 nm; said active layer comprising a
Ga.sub.0 94 In.sub.0 06 N.sub.0 04 As.sub.0 96 quantum well which
is tensile strained, having a thickness of 5 about 10 nm and a
photoluminescence peak wavelength of approximately 1.3 .mu.m; said
upper spacing layer comprising GaAs with a thickness of
approximately 2 nm; said upper light guide layer comprising
Al.sub.0 2 Ga.sub.0 8 As with a thickness of approximately 120 nm;
and said upper cladding layer comprising p-Ga.sub.0 5 In.sub.0 5 As
with a layer thickness of approximately 1.5 .mu.m.
14. The light emitting semiconductor device of claim 9, wherein the
thickness of said lower and upper spacing layers is at most
one-tenth of the carrier diffusion length.
15. A light emitting semiconductor device, comprising: a lower
cladding layer comprising n-Al.sub.0 5 Ga.sub.0 5 P with a layer
thickness of approximately 1.5 .mu.m; a lower spacing layer
comprising GaAs with a thickness of approximately 2 nm; a Ga.sub.0
9 In.sub.0 1 N.sub.0 03 As.sub.0 97 active layer being
approximately lattice-matched to said semiconductor substrate,
having a thickness of about 0.1 .mu.m and a photoluminescence peak
wavelength of approximately 1.3 .mu.m; an upper spacing layer
comprising GaAs with a thickness of approximately 2 nm; and an
upper cladding layer comprising p-Ga.sub.0 5 In.sub.0 5 P with a
layer thickness of approximately 1.5 .mu.m.
16. The light emitting semiconductor device of claim 15, wherein
said active layer is lattice-matched to said substrate with a
lattice strain of within 0.3% at most.
17. The light emitting semiconductor device of claim 15, wherein
said active layer is tensile strained against said substrate.
18. The light emitting semiconductor device of claim 15, wherein
the thickness of said lower and upper spacing layers is at most
one-tenth of the carrier diffusion length.
19. A light emitting semiconductor device, comprising: a lower
cladding layer comprising n-Ga.sub.0 5 In.sub.0 5 As with a
thickness of approximately 1.5 .mu.m; a lower light guide layer
comprising Al.sub.0 2 Ga.sub.0 8 As with a thickness of
approximately 120 nm; a lower spacing layer comprising GaAs with a
thickness of approximately 2 nm; an active layer comprising a
Ga.sub.0 94 In.sub.0 06 N.sub.0 04 As.sub.0 96 quantum well which
is tensile strained, having a thickness of about 10 nm and a
photoluminescence peak wavelength of approximately 1.3.mu.m; an
upper spacing layer comprising GaAs with a thickness of
approximately 2 nm; an upper light guide layer comprising Al.sub.0
2 Ga.sub.0 8 As with a thickness of approximately 120 nm; and an
upper cladding layer comprising p-Ga.sub.0 5 In.sub.0 5 As with a
layer thickness of approximately 1.5 .mu.m.
20. The light emitting semiconductor device of claim 19, wherein
said active layer is lattice-matched to said substrate with a
lattice strain of within 0.3% at most.
21. The light emitting semiconductor device of claim 19, wherein
said active layer is tensile strained against said substrate.
22. The light emitting semiconductor device of claim 15, wherein
said active layer is compressive strained against said
substrate.
23. The light emitting semiconductor device of claim 19, wherein
the thickness of said lower and upper spacing layers is at most
about one-tenth that of the carrier diffusion length.
24. A light emitting semiconductor device, comprising: a lower
cladding layer comprising n-Ga.sub.0 5 In.sub.0 5 As with a
thickness of approximately 1.5 .mu.m; a lower light guide layer
comprising Al.sub.0 2 Ga.sub.0 8 As with a thickness of
approximately 120 nm; a lower spacing layer comprising GaAs with a
thickness of approximately 2 nm; an active layer comprising a
Ga.sub.0 94 In.sub.0 06 N.sub.0 04 As.sub.0 96 quantum well which
is tensile strained, having a thickness of about 10 nm and a
photoluminescence peak wavelength of approximately 1.3 .mu.m; an
upper spacing layer comprising GaAs with a thickness of
approximately 2 nm; an upper light guide layer comprising Al.sub.0
2 Ga.sub.0 8 As with a thickness of approximately 120 nm; and an
upper cladding layer comprising p-Ga.sub.0 5 In.sub.0 5 As with a
layer thickness of approximately 1.5 .mu.m.
25. The light emitting semiconductor device of claim 24, wherein
said active layer is lattice-matched to said substrate with a
lattice strain of within 0.3% at most.
26. The light emitting semiconductor device of claim 24, wherein
said active layer is tensile strained against said substrate.
27. The light emitting semiconductor device of claim 24, wherein
said active layer is compressive strained against said
substrate.
28. The light emitting semiconductor device of claim 27, wherein
the thickness of said lower and upper spacing layers is at most
one-tenth of the carrier diffusion length.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to semiconductor devices and,
more particularly, to light emitting semiconductor devices having
excellent carrier confinement capabilities.
[0003] 2. Description of the Related Art
[0004] As communication systems have developed, with both desired
and used information transmission rates increasing, more attention
has been paid to the development of optical communication systems.
As presently contemplated, communication systems will be used from
information terminal stations to transmission lines to individual
subscriber's circuits.
[0005] To implement and extend such systems, it is necessary to use
optical devices such as, for example, light emitting devices, such
as laser diodes and light emitting diodes, and photoreceptors, such
as PIN photodiodes and avalanche photodiodes. It is desired that
these devices be made smaller and less expensive.
[0006] For example, although light emitting devices, such as laser
diodes, are conventionally accompanied by a cooling device, such as
a Peltier element or heat sink to control device temperatures
generated by input currents, it is highly desirable for the laser
diodes be stably operable even without cooling devices to widely
implement light emitting devices in the communication system.
[0007] To materialize the stable operation of the laser diodes at
practical operation temperatures, it is desirable that these
devices have improved device capabilities, such as relatively low
threshold current density and low temperature variation of their
characteristics. However, such improved capabilities, in
particular, temperature characteristics, have not been achieved for
conventional GaInPAs/InP laser diodes which contain a GaInPAs
active layer with InP cladding layers, both fabricated on an InP
substrate, due to the difficulties in achieving a relatively large
value of the conduction band discontinuity for these materials.
[0008] Several semiconductor laser diodes have been reported to
materialize the improved temperature characteristics.
[0009] For example, a laser diode containing a GaInNAs active layer
disposed on a GaAs substrate is disclosed in Japanese Laid-Open
Patent Application No. 6-37355. Therein, it is described that
GaInAs layers, having a lattice constant larger than that of GaAs,
are added with nitrogen to form GaInNAs layers and to thereby be
lattice-matched to GaAs with a resulting reduced lattice constant.
As result, it is also disclosed that light emissions at 1.3 .mu.m
or 1.5 .mu.m become feasible in these devices.
[0010] As another example, calculated results of the energy level
line-up are described by Kondo et al in Japanese Journal of Applied
Physics, Vol. 35 (1996) , pages 1273-5, for a laser diode
containing a GaInNAs active layer disposed on a GaAs substrate. It
has been suggested in the disclosure that, since the GaInNAs system
is lattice-matched to GaAs, a large value of the valence band
discontinuity may be acquired by providing cladding layers with
AlGaAs rather than the materials which are similarly
lattice-matched to GaAs, to thereby be capable of fabricating laser
diodes having improved temperature characteristics. In addition, it
is also described that the confinement of holes are feasible for
the junction structure of a GaInNAs active layer with an AlGaAs
layer.
[0011] As another example, a laser diode is described by Kondo et
al in Japanese Journal of Applied Physics, Vol. 35 (1996), pages
5711-3. As disclosed therein, the laser diode consists of AlGaAs
cladding layers with a thickness of about 1.4 .mu.m, GaAs light
guide layers with a thickness of about 140 nm, and GaInNAs quantum
wells which have a thickness of about 7 nm and the
compressive-strained structure. Kondo et al demonstrate that the
hole confinement is feasible in the GaInNAs layer even with GaAs
light guide layers, as long as the GaInNAs layer (1) has a
lattice-constant sufficiently larger than that of GaAs and (2) is
compressive-strained.
[0012] On the other hand, for the GaInNAs active layers which have
a lattice constant smaller than that of a GaAs substrate and which
have tensile strain, the hole confinement is generally deemed to be
unfeasible with light guide layers of GaAs. To realize the hole
confinement in the above configuration, accordingly, alloy layers
having wider band gap energies such as Al.sub.z Ga.sub.1-z As
(0<z.ltoreq.1) or Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u
(0<t<1 and 0<u.ltoreq.1) alloy layers must be provided
contiguous to the GaInNAs active layer. However, both the
feasibility and attainment of semiconductor laser diodes having a
GaInNAs active layer lattice-matched to GaAs substrate remain
elusive.
[0013] In addition, there is disclosed in Japanese Laid-Open Patent
Application No. 7-154023, a laser diode containing an n-GaAs
substrate with the following contiguous layers grown thereon, in
the order recited: a GaAs buffer layer with 1 .mu.m thickness doped
with Si, a GaInP cladding layer of 2 .mu.m thickness doped n-type
with Si, a GaInAsP first light guide layer of n-type and 0.2 .mu.m
thickness, a GaAs second light guide layer of n-type and 0.1 .mu.m
thickness, a GaInAsN (Ga 0.74, N 0.01) active layer of 0.1 .mu.m
thickness with a 1.9% strain, a GaAs second light guide layer of
p-type and 0.1 .mu.m thickness, a GaInAsP first light guide layer
of p-type and .mu.m thickness, a GaInP cladding layer of 0.1 .mu.m
thickness doped p-type with Zn, a GaAs contact layer with 1 .mu.m
thickness doped with Si, a GaAs current blocking layer doped with
Si, and a GaAs contact layer doped with Zn.
[0014] Although a GaInAsN active layer of 0.1 .mu.m thickness with
a 1.9% strain is described in the disclosure mentioned just above,
the crystalline quality of this layer growth does not appear
satisfactory because the 0.1 .mu.m thickness of the strained active
layer exceeds the critical thickness, thereby resulting in misfit
dislocations.
[0015] Also, there is described in that disclosure a contact layer
doped with Si is disposed between a p-type GaInP cladding layer
doped with Zn and a GaAs contact layer doped with Si. Since
currents in the laser device flow through the above portion, this
averts the currents from the active layer, thereby causing
unfavorable results for the laser operation.
[0016] In addition, as aforementioned, a laser diode containing a
GaInNAs active layer disposed on a GaAs substrate is disclosed in
Japanese Laid-Open Patent Application No. 6-37355. However, no
detailed description is provided regarding the layer configuration
for the laser device. Rather, only the possibility of possible
devices but not their feasibility is described.
[0017] Yet another laser diode is disclosed in Japanese Journal of
Applied Physics, Vol. 35 (1996), pages 5711-3. containing quantum
well active layers which are having relatively large compressive
strains. However, no description is provided regarding active
layers tensile strained or lattice-matched to a GaAs substrate.
[0018] Thus, a need exists for an improved light emitting
semiconductor device and fabrication process therefor.
SUMMARY OF THE INVENTION
[0019] Accordingly, it is an object of the present invention to
provide an improved light emitting semiconductor devices and
fabrication processes therefor, having most, if not all, of the
advantages and features of similar employed devices and related
processes, while eliminating many of the aforementioned
disadvantages of other structures.
[0020] In one embodiment of the present invention, a light emitting
semiconductor device contains a semiconductor substrate with the
following contiguous layers grown thereon, in the order recited: an
Al.sub.zGa.sub.1-z As (0<z.ltoreq.1) or Ga.sub.t In.sub.1-t
P.sub.u As.sub.1-u (0<t<1 and 0<u.ltoreq.1) lower cladding
layer disposed on the semiconductor substrate, having a first
conductivity type; a lower spacing layer containing at least one
GaAs monolayer: a Ga.sub.x In.sub.1-xN.sub.y As.sub.1-y active
layer, having a thickness less than the critical thickness so as
not to give rise to misfit dislocations; an upper spacing layer
containing at least one GaAs monolayer; an Al.sub.zGa.sub.1-z As
(0<z.ltoreq.1) or Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u
(0<t<1 and 0<u.ltoreq.1) upper cladding layer, having a
second conductivity type, characterized in that the active layer is
(1) contiguous to both the lower and upper spacing layers to
thereby be disposed on the cladding layers with relative ease, and
(2) capable of composing the light emitting device with excellent
device characteristics.
[0021] In another embodiment, the present invention provides a
light emitting semiconductor device which contains the
above-mentioned active layer which is composed of a quantum well
layer and has a narrow band gap energy, and the lower and upper
spacing layers each containing at least one GaAs monolayer; and
further provided with lower and upper light guide layers, each of
which is composed of Al.sub.zGa.sub.1-z As (0<z.ltoreq.1) or
Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u (0<t<1 and
0<u.ltoreq.1) alloy layers, and have band gap energies wider
than that of the active layer and narrower than those of the
cladding layers. The lower light guide layer is intermediate the
lower cladding layer and lower spacing layer, while the upper light
guide layer is intermediate the upper cladding layer and upper
spacing layer.
[0022] By this layer configuration, an improved carrier confinement
can be achieved by the light guide layer with a surprisingly wider
band gap energy than that of GaAs.
[0023] In still another embodiment, a light emitting semiconductor
device is provided containing a semiconductor substrate with the
following contiguous layers grown thereon, in the order recited: an
n-Ga.sub.0 5 In.sub.0 5 P lower cladding layer with a thickness of
approximately 1.5 .mu.m, a GaAs lower spacing layer with a
thickness of approximately 2 nm, a Ga.sub.0 9 In.sub.0 1N.sub.0
03As.sub.0 97 active layer which is approximately lattice-matched
to the semiconductor substrate, has a thickness of about 0.1 .mu.m
and a photoluminescence peak wavelength of approximately 1.3 .mu.m,
a GaAs upper spacing layer with a thickness of approximately 2 nm,
and a p-Al.sub.0 5 Ga.sub.0 5 P upper cladding layer with a layer
thickness of approximately 1.5 .mu.m.
[0024] By this structure, light emissions of approximately 1.3
.mu.m can be achieved for the light emitting semiconductor device
of the present invention, having improved temperature
characteristics over conventional devices composed GaInPAs active
layers on an InP substrate.
[0025] In yet another embodiment, a light emitting semiconductor
device is provided containing a semiconductor substrate with the
following contiguous layers grown thereon, in the order recited:
Al.sub.0 5 Ga.sub.0 5 As lower cladding layer with a thickness of
approximately 1.5 .mu.m, an Al.sub.0 2 Ga.sub.0 8 As lower light
guide layer with a thickness of approximately 120 nm, a GaAs lower
spacing layer with a thickness of approximately 2 nm, an active
layer composed of a Ga.sub.0 94 In.sub.0 06 N.sub.0 04 As.sub.0 96
quantum well which is tensile strained, and has a thickness of
about 10 nm and a photoluminescence peak wavelength of
approximately 1.3 .mu.m; a GaAs upper spacing layer with a
thickness of approximately 2 nm, an Al.sub.0 2 Ga.sub.0 8 As upper
light guide layer with a thickness of approximately 120 nm, and an
p-Al.sub.0 5 Ga.sub.0 5 As upper cladding layer with a layer
thickness of approximately 1.5 .mu.m.
[0026] With this structure, the light emitting semiconductor device
of the present invention with tensile strained quantum well layers
affords light emissions of approximately 1.3 .mu.m.
BRIEF DESCRIPTION OF THE DRAWINGS
[0027] The present invention together with its various features and
advantages, can be more easily understood from the following more
detailed description taken in conjunction with the accompanying
drawings in which:
[0028] FIG. 1 is a cross-sectional view of a light emitting
semiconductor device in accordance with an embodiment of the
present invention;
[0029] FIG. 2 is a cross-sectional view of a light emitting
semiconductor device in accordance with another embodiment of the
present invention, in which an active layer is tensile strained;
and
[0030] FIG. 3 is a cross-sectional view of a light emitting
semiconductor device in accordance with another embodiment of the
present invention, in which an active layer is compressive
strained.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0031] In the description which follows, specific embodiments of
the present invention advantageously used in light emitting device
applications are described. It is understood, however, that the
present invention is not limited to these embodiments. For example,
it is appreciated that the structure and methods for fabrication of
light emitting semiconductor devices are adaptable to any form of
semiconductor devices. Other embodiments will be apparent to those
skilled in the art.
[0032] In obtaining the present invention, rigorous and extensive
experimentation has been conducted with semiconductor laser devices
having GaInNAs active layers which are lattice-matched to, or
tensile strained with, GaAs substrates provided with cladding
layers. As a result, it was found to be difficult for the GaInNAs
active layers to be provided directly onto the above-mentioned
Al.sub.z Ga.sub.1-z As (0<z.ltoreq.1) or Ga.sub.t In.sub.1-t Pu
As.sub.1-u(0<t<1 and 0<u.ltoreq.1) cladding or light guide
layers. This is considered to be due to the following reasons.
[0033] Since almost all of nitrogen-containing alloy semiconductors
are in the non-miscible region in the solid solubility diagram, the
growth of these alloy semiconductors are generally quite difficult
by conventional crystal growth methods and a minute amount of
nitrogen can be incorporated in semiconductor crystals only by
non-equilibrium growth methods such as, for example, metal organic
chemical vapor deposition (MOCVD) and molecular beam epitaxy
(MBE).
[0034] For alloy semiconductors, in general, the non-miscibility
increases with increasing the number of constituent elements, and
also toward the middle of the elemental composition. In other word,
binary alloys can be grown most easily. This is also true for the
alloy semiconductors containing nitrogen as a group V element.
Alloys having an elemental composition more close to GaNAs can
therefore be grown with more ease among the GaInNAs alloy
system.
[0035] To elucidate the above-mentioned trend, a plurality of
GaInNAs alloy layers various in the In content are grown on GaAs
substrates by MOCVD.
[0036] For the present layer growth, source materials, such as
trimethylgallium (TMG), trimethylindium (TMI), arsine (AsH.sub.3),
and dimethylhydrazine (DMHY) as the nitrogen source, were used,
while hydrogen is used as carrier gas. During the layer growth, a
substrate temperature of 630.degree. C. is used, and only the
feeding rate of trimethylindium as the In source is varied.
[0037] GaInNAs alloy layers thus obtained are analyzed by secondary
ion mass spectroscopy (SIMS) and the results on the N content are
shown in Table 1 in the alloy layers various in In contents.
1 TABLE 1 In content (%) N content (%) 7 2.5 13 1.7 23 0.5 28
0.3
[0038] The results in Table 1 indicates that the N content
decreases with increasing the In contents.
[0039] Other results from the layer growth indicates that the
growth rate of the alloy layers are also affected by the material
and surface of the substrate.
[0040] When GaInNAs alloy layers are epitaxially grown on GaAs
substrates and have a peak wavelength of photoluminescence (PL)
spectra of equal to or more than 1.1 .mu.m, the alloy layers are
found to have a mirror finished surface. By contrast, being grown
on AlGaAs substrates and having also the peak wavelength of equal
to or more than 1.1 .mu.m, no mirror finished surface is formed for
the GaInNAs alloy layers, and light emitting devices with
satisfactory light emitting device characteristics are generally
known difficult to be fabricated with the latter alloy layer
configuration.
[0041] The present invention is predicated in part by the discovery
that the formation of GaInNAs layers directly on AlGaAs layers is
more difficult than the growth of GaInNAs alloy layers onto GaAs
layers for the following reasons: At the interface between GaInNAs
and AlGaAs layers, a mixed alloy layer of AlGaNAs or AlGaInNAs is
primarily formed during the layer growth, which is more difficult
than the formation of GaInNAs layers, thereby giving rise to no
mirror finished surface.
[0042] To fabricate light emitting semiconductor devices having
excellent device characteristics, the present inventor has
investigated materials and structures for the semiconductor device
which contains (1) Al.sub.zGa.sub.1-zAs (0<z.ltoreq.1) or
Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u (0<t<1 and
0<u.ltoreq.1) alloy semiconductor layers with wide band gap
energies and (2) GaInNAs active layers, and which have a
satisfactory property for the carrier confinement in the active
layer.
[0043] During experimentation, an assumption was made, that (1)
when GaInNAs is epitaxially grown on GaInP, mixed alloy layers of
GaInNP or GaInNPAs are primarily formed at the interface, and (2)
for layers GaInNAs to be formed directly on GaInP layers,
therefore, mixed alloy layers of GaInNP or GaInNPAs must grow under
conditions such that the GaInNAs layers can grow on GaInP
layers.
[0044] The growth of alloy layers of GaInNP is then carried out.
However, GaInNP layers with a mirror finished surface can not be
formed under the conditions similar to those for the GaInNAs layer
growth, and the surface of the layers tends to be more smooth with
decreasing N contents. In addition, under the conditions favorable
for the growth of GaInNAs layers having a photoluminescence peak
wavelength of approximately 1.3 .mu.m, a maximum N content for
obtaining a mirror finished layer surface is approximately 0.5% and
higher N contents result in adversary effects on the surface.
[0045] Although the N content in GaInNAs alloy layers of
approximately 3% is preferred to implement the present invention,
this surpasses the above-mentioned result of approximately 0.5%,
indicating difficulties in either forming a mirror finished surface
for GaInNAs layers or achieving satisfactory characteristics for
light emitting devices.
[0046] Another assumption was also made, that (1) when GaInNAs
layers are epitaxially grown on AlGaAs layers, mixed alloy layers
of AlGaNAs or AlGaInNAs are primarily formed at the interface, and
(2) for layers GaInNAs to be formed directly on AlGaAs layers,
therefore, mixed alloy layers of AlGaNAs or AlGaInNAs have to grow
under the conditions that GaInNAs layers can grow on AlGaAs
layers.
[0047] The growth of AlGaNAs alloy layers is then carried out.
However, AlGaNAs layers with a mirror finished surface can not be
formed under the conditions similar to those of the GaInNAs layer
growth. Although the surface of the layers tends to be more smooth
with decreasing N contents, difficulties are foreseen in achieving
satisfactory characteristics for light emitting devices.
[0048] During the experimentation, it has also been found that
GaInNAs alloy layers are formed on GaAs layers, having a mirror
finished surface and a photoluminescence peak wavelength of
approximately 1.3 .mu.m.
[0049] In one embodiment of the present invention, the structure of
a light emitting semiconductor device contains a semiconductor
substrate with the following contiguous layers grown thereon, in
the order recited, which has a structure similar to that
illustrated in FIG. 1: a lower cladding layer of Al.sub.zGa.sub.1-z
As (0<z.ltoreq.1) or Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u
(0<t<1 and 0<u.ltoreq.1) alloy semiconductor layers,
having a first conductivity type; a Ga.sub.x In.sub.1-xN.sub.y
As.sub.1-y (0.ltoreq.x.ltoreq.1 and 0<y<1) active layer,
having a thickness less than the critical thickness so as not to
give rise to misfit dislocations; and an upper cladding layer,
having a second conductivity type.
[0050] In addition, lower and upper spacing layers, each comprising
at least one GaAs monolayer, are further provided. The lower
spacing layer is intermediate the lower cladding layer and the
active layer, while the upper spacing layer is intermediate the
upper cladding layer and the active layer.
[0051] The above-mentioned active layer may preferably
lattice-matched to the semiconductor substrate within a rate of the
lattice strain of 0.3%.
[0052] As aforementioned, the lower and upper spacing layers
preferably comprise at least one GaAs monolayer for the following
reasons: From the present experimental results, it has been found
that the deposition of Ga.sub.x In.sub.1-x N.sub.y As.sub.1-y
(0.ltoreq.x.ltoreq.1 and 0<y<1) layers onto Al.sub.z
Ga.sub.1-z As (0<z.ltoreq.1) or Ga.sub.t In.sub.1-t P.sub.u
As.sub.1-u (0<t<1 and 0<u.ltoreq.1) alloy layers is
feasible by covering the surface of the Al.sub.z Ga.sub.1-z As or
Ga.sub.t In.sub.1-t P.sub.u As.sub.1-u layers with at least one
GaAs monolayer.
[0053] The thickness of the spacing layer is preferably one tenth
at most of the carrier diffusion length, the reason being that
carriers can be satisfactorily confined within the active layer due
to the thickness of the active layer thin enough compared with the
carrier diffusion length.
[0054] By this construction of the present embodiment, a laser
diode may preferably be fabricated, comprising the active layer of
Ga.sub.x In.sub.1-x N.sub.y As.sub.1-y alloy semiconductor layers
disposed on the Al.sub.z Ga.sub.1-z As or Ga.sub.t In.sub.1-t
P.sub.u As.sub.1-u alloy layers, thereby achieving excellent device
characteristics.
[0055] In another embodiment of the invention, as illustrated in
FIG. 2, a light emitting semiconductor device comprises an active
layer which comprises a Ga.sub.x In.sub.1-x N.sub.y As.sub.1-y
(0.ltoreq.x.ltoreq.1 and 0<y<1) quantum well layer with a
tensile strain and a narrow band gap energy, the lower and upper
spacing layers comprising at least one GaAs monolayer: lower and
upper light guide layers comprising alloy semiconductor layers of
Al.sub.z Ga.sub.1-z As (0<z.ltoreq.1) or Ga.sub.t In.sub.1-t
P.sub.u As.sub.1-u (0<t<1 and 0<u.ltoreq.1) which have
band gap energies wider than that of the active layer and narrower
than those of the cladding layers. The lower light guide layer is
intermediate the lower cladding layer and lower spacing layer,
while the upper light guide layer is intermediate the upper
cladding layer and upper spacing layer.
[0056] This structure is therefore characterized in that the lower
and upper spacing layers are each provided intermediate the active
layer and the light guide layer, and the active layer is exerted by
a tensile strain. Furthermore, the active layer may preferably be
lattice-matched to the substrate with a lattice strain of within
0.3% at most.
[0057] Also in the present structure, the lower and upper spacing
layers preferably comprise at least one molecular layer of GaAs,
based on the same reasons as those described earlier in the
previous embodiment.
[0058] By this construction of the present embodiment with the
spacing layers, a laser diode may preferably be fabricated,
comprising the tensile strained active layer composed of the
Ga.sub.x In.sub.1-x Ny As.sub.1-y quantum well layer disposed on
the Al.sub.z Ga.sub.1-z As or Ga.sub.t In.sub.1-t P.sub.u
As.sub.1-u alloy layers.
[0059] In still another embodiment of the invention, as illustrated
in FIG. 3, a light emitting semiconductor device comprises an
active layer which comprises a Ga.sub.x In.sub.1-x N.sub.y
As.sub.1-y quantum well layer with a compressive strain and a
narrow band gap energy, and the lower and upper well layer with a
compressive strain and a narrow band gap energy, and the lower and
upper spacing layers comprising at least one GaAs monolayer; lower
and upper light guide layers which comprises alloy semiconductor
layers of Al.sub.z Ga.sub.1-z As (0<z.ltoreq.1) or Ga.sub.t
In.sub.1-t P.sub.u As1-u (0<t<1 and 0<u.ltoreq.1), and
have band gap energies wider than that of the active layer and
narrower than those of the cladding layers. The lower light guide
layer is intermediate the lower cladding layer and lower spacing
layer, while the upper light guide layer is intermediate the upper
cladding layer and upper spacing layer.
[0060] This structure is therefore characterized in that the active
layer is exerted by a compressive strain.
[0061] Also in the present structure, the lower and upper spacing
layers preferably comprise at least one GaAs monolayer, based on
the same reasons as described earlier in the previous
embodiment.
[0062] The layer configuration of the present embodiment
facilitates to fabricate a laser diode, comprising the compressive
strained Ga.sub.x In.sub.1-x N.sub.y As.sub.1-y quantum well layer
disposed on Al.sub.z Ga.sub.1-z As or Ga.sub.t In.sub.1-t P.sub.u
As.sub.1-u alloy layers. With this layer configuration, device
characteristics such as a low threshold current or temperature
coefficient can be improved for the laser diodes having 1.3 .mu.m
emissions over conventional laser diodes provided with GaAs light
guide layers.
[0063] Reference will now be made to certain Examples which are
provided solely for purposes of illustration and which are not
intended to be limitative.
EXAMPLE 1
[0064] A light emitting semiconductor device according to the
invention as illustrated in FIG. 1 was fabricated, wherein the
device was a double heterostructure laser with the
dielectric-stripe structure.
[0065] The structure of the light emitting semiconductor device
comprised an n-GaAs substrate 101 with the following contiguous
layers grown thereon, in the order recited: an n-GaAs buffer layer
102, an n-Ga.sub.0 5 In.sub.0 5 P lower cladding layer 103, a GaAs
lower spacing layer 104, a Ga.sub.0 9 In.sub.0 1 N.sub.0 03
As.sub.0 97 active layer 105, a GaAs upper spacing layer 106, a
p-Ga.sub.0 5 In.sub.0 5 P upper cladding layer 107, and a p-GaAs
capping (contact) layer 108. In addition, a dielectric layer 110
was disposed on the capping layer 108, a portion of which was
removed to form a current inlet.
[0066] Additionally provided for the device were a positive
electrode 109 formed an ohmic contact with the capping layer 108 in
the above-mentioned removed portion and a negative electrode 111 on
the rear side of the GaAs substrate 101.
[0067] An n-GaAs substrate, having the direction normal to the
surface misoriented by 15.degree. from the direction normal to the
(100) plane toward the [011] direction was preferably used as the
substrate.
[0068] The approximate thickness of each of the layers was
preferably 1.5 m.mu. for the lower and upper cladding layers 103
and 107, 2 nm for the lower and upper spacing layers 104 and 106,
and 0.4 m.mu. for the capping layer 108.
[0069] In addition, the active layer 105 had a thickness of about
0.1 m.mu., wherein the active layer was approximately
lattice-matched to the substrate 101, and had a photoluminescence
peak wavelength of approximately 1.3 .mu.m.
[0070] This device was fabricated by MOCVD, using source materials
such as trimethylgallium (TMG), trimethylindium (TMI), phosphine
(PH.sub.3), arsine (A.sub.sH.sub.3) and dimethylhydrazine (DMHY) as
the nitrogen source, while hydrogen was used as carrier gas. During
the layer growth, the selection of the materials to be introduced
into an MOCVD reaction vessel was appropriately made corresponding
to the composition of the layer to be grown.
[0071] Subsequently, laser emissions were observed for the thus
fabricated device, indicating that the electron confinement was
actually achieved for the device. Also found was that the
temperature characteristics of the laser device were superior to
those of conventional 1.3 .mu.m laser diodes comprising a GaInPAs
active layer disposed on InP substrates.
[0072] It has been also found that the nitrogen content in the
GaInPAs layer 105 increases with (1) increasing the feeding ratio
of DMH.sub.y to AsH.sub.3, (2) decreasing temperatures for, or (3)
increasing speed of, the layer growth. Therefore, by appropriately
adjusting the conditions for the above-mentioned feeding ratio,
temperatures or speed, it is possible to control the nitrogen
content in the active layer, thereby capable of fabricating laser
diode comprising GaInNAs layers various in nitrogen content.
[0073] The thickness of each of the lower and upper spacing layers
is not limited to 2 nm, as mentioned above, but also preferably of
a thickness of at least one GaAs monolayer. This process was
employed, based on the aforementioned present experimental results,
in that the deposition of GaInNAs layers onto a Ga.sub.o 5 In.sub.0
5 P layers was feasible with relative ease by completely covering
the surface of the Ga.sub.0 5 In.sub.0 5 P layers with at least one
GaAs monolayer.
EXAMPLE 2
[0074] A light emitting semiconductor device according to the
invention as illustrated in FIG. 2 was fabricated, wherein the
device was a dielectric-striped double heterostructure laser,
having an SCH-SQW (separate confinement hetero-structure with a
single quantum well) structure, provided with (1) an active layer
with the device yield and (2) a light guide layer without either
the device yield or absorption loss.
[0075] The structure of the light emitting semiconductor device
comprised an n-GaAs substrate 101 with the following contiguous
layers grown thereon, in the order recited: an n-GaAs buffer layer
202, an n-Al.sub.0 5 Ga.sub.0 5 P lower cladding layer 203, an
Al.sub.0 2 Ga.sub.0 8 As lower light guide layer 204, a GaAs lower
spacing layer 205, Ga.sub.0 94 In.sub.0 06 N.sub.0 04 As.sub.0 96
quantum wells (active layer) 206, a GaAs upper spacing layer 207,
an Al.sub.0 2 Ga.sub.0 8 As upper light guide layer 208, a
p-Al.sub.0 5 Ga.sub.0 5 As upper cladding layer 209, and a p-GaAs
capping layer 210. In addition, a dielectric layer 212 was disposed
on the capping layer 210, a portion of which was removed to form a
current inlet.
[0076] Additionally provided for the device were a positive
electrode 211 formed an ohmic contact with the capping layer 210 in
the above-mentioned removed portion, and a negative electrode 213
on the rear side of the GaAs substrate 201.
[0077] The approximate thickness of each of the layers was,
preferably, 1.5 .mu.m for the lower and upper cladding layers 203
and 209, 120 nm for the lower and upper light guide layers 204 and
208, 2 nm for the lower and upper spacing layers 205 and 207, and
0.4 .mu.m for the capping layer 210.
[0078] In addition, the thickness of the active layer 206 was
preferably about 10 nm, wherein the active layer had a
photoluminescence peak wavelength of approximately 1.3 .mu.m and
the lattice constant of unstrained well layer 306 (or isolated
G.sub.0 8 In.sub.0 2 N.sub.0 02 As.sub.0 98 layers) is larger than
that of the substrate 201.
[0079] This device was fabricated by MOCVD, using source materials
such as trimethylalluminum (TMA), trimethygallium (TMG),
trimethylindium (TMI), arsine (AsH.sub.3) and dimethylhydrazine
(DMHY) as the nitrogen source, while hydrogen was used as carrier
gas. During the layer growth, the selection of the materials to be
introduced into a reaction vessel was appropriately made
corresponding to the composition of the layer to be grown.
[0080] Subsequently, the thus fabricated device was subjected to
evaluation test measurements, and it has been found that the
threshold current density is lower, and the temperature
characteristics are better, than those of laser diodes containing
GaAs light guide layers, which is preferable for the practical
laser applications.
[0081] It has also been found that the nitrogen content in the
GaInNAs layer 206 increases with (1) increasing the feeding ratio
of DMHy to AsH.sub.3, (2) decreasing temperatures for, or (3)
increasing speed of the layer growth. Therefore, by appropriately
adjusting the conditions for the above-mentioned feeding ratio,
temperatures or speed, it is possible to control the nitrogen
content in the active layer, thereby capable of fabricating laser
diode comprising GaInNAs layers various in the nitrogen
content.
[0082] Although there was described in Example 2 the Ga.sub.0 94
In.sub.0 06 N.sub.0 04 As.sub.0 96 active layer 206 for the light
emitting device, the composition of the active layer is not limited
to the above-mentioned composition, but may be different GaInNAs
layers which are tensile strained.
[0083] For example, to implement the present invention and to carry
out carrier confinement. GaInNAs layers with a smaller lattice
constant are preferred due to (1) the lowering its valence band
energy level caused by the decrease in the lattice constant, and
(2) the concomitant more effective hole confinement achieved by
AlGaAs light guide or cladding layers which have wider band gap
energies than that of GaAs layers.
[0084] The thickness of each of the lower and upper spacing layers,
205 and 207, is not limited to 2 nm, as mentioned above, but also
preferably of a thickness of at least one GaAs monolayer. This
process was employed, based on the aforementioned present
experimental results by the present inventor, in that the
deposition of GaInNAs layers onto a Ga.sub.0 5 In.sub.0 5 P layers
was feasible with relative ease by completely covering the surface
of the Ga.sub.0 5 In.sub.0 5 P layers with at least one molecular
layer of GaAs.
EXAMPLE 3
[0085] A light emitting semiconductor device according to the
invention as illustrated in FIG. 3 was fabricated, wherein the
device was also a dielectric-striped double heterostructure laser,
having an SCH-SQW (separate confinement heterostructure with a
single quantum well) structure, provided with (1) an active layer
with the device yield and (2) a light guide layer without either
the device yield or absorption loss.
[0086] The structure of the light emitting semiconductor device
comprised an n-GaAs substrate 101 with the following contiguous
layers grown thereon, in the order recited: an n-GaAs buffer layer
302, an n-Al.sub.0 5 Ga.sub.0 5 P lower cladding layer 303, an
Al.sub.0 2 Ga.sub.0.8 As lower light guide layer 304, a GaAs lower
spacing layer 305, Ga.sub.0 8 In.sub.0.2 N.sub.0 02 As.sub.0 98
quantum wells (active layer) 306, a GaAs upper spacing layer 307,
an Al.sub.0 2 Ga.sub.0 8 As upper light guide layer 308, a
p-Al.sub.0 5 G.sub.0.5 As upper cladding layer 309, and a p-GaAs
capping layer 310. In addition, a dielectric layer 312 was disposed
on the capping layer 310, a portion of which was removed to form a
current inlet.
[0087] Additionally provided for the device were a positive
electrode 311 formed an ohmic contact with the capping layer 310 in
the above-mentioned removed portion, and a negative electrode 313
on the rear side of the GaAs substrate 301.
[0088] The approximate thickness of each of the layers was,
preferably, 1.5 m.mu. for the lower and upper cladding layers 303
and 309, 12 nm for the lower and upper light guide layers 304 and
308, 2 nm for the lower and upper spacing layers 305 and 307, and
0.4 m.mu. for the capping layer 310.
[0089] In addition, the thickness of the active layer 306 was
preferably about 10 nm, wherein the active layer had a
photoluminescence peak wavelength of approximately 1.3 .mu.m, and
the lattice constant of unstrained well layer 206 (or isolated
Ga.sub.0 94 In.sub.0 06 N.sub.0 04 As.sub.0 96 layers) is smaller
than that of the substrate 201, having a compressive strain of a
ratio of about 1%.
[0090] This device was fabricated by MOCVD using source materials
such as trimethylalluminum (TMA), trimethygallium (TMG),
trimethylindium (TMI), arsine (AsH.sub.3) and dimethylhydrazine
(DMHY) as the nitrogen source, while hydrogen was used as carrier
gas. During the layer growth, the selection of the materials to be
introduced into a reaction vessel was appropriately made
corresponding to the composition of the layer to be grown.
[0091] Subsequently, the thus fabricated device was subjected to
evaluation test measurements, and it has been found that the
threshold current density is lower, and the temperature
characteristics are better, than those of laser diodes comprising
GaAs light guide layers, which is preferable for the practical
laser applications.
[0092] It has also been found that the nitrogen content in the
GaInNAs layer 206 increases with (1) increasing the feeding ratio
of DMHy to AsH.sub.3, (2) decreasing temperatures for, or (3)
increasing speed of, the layer growth. Therefore, by appropriately
adjusting the conditions for the above-mentioned feeding ratio,
temperatures or speed, it is possible to control the nitrogen
content in the active layer, thereby capable of fabricating laser
diode comprising GaInNAs layers various in the nitrogen
content.
[0093] Although there was employed for the light emitting device in
Example 3 the Ga.sub.0 8 In.sub.0 2 N.sub.0 02 As.sub.0 98 active
layer which had a lattice constant lager by 1% than that of the
layers lattice-matched to GaAs, the active layer is not limited to
that above-mentioned, but may also be other GaInNAs layers which
have a different composition and compressive strain.
[0094] For example, to implement the present invention and to carry
out carrier confinement, GaInNAs layers with a smaller lattice
constant are preferred due to (1) the lowering its valence band
energy level caused by the decrease in the lattice constant, and
(2) the concomitant more effective hole confinement achieved by
AlGaAs light guide layers which have wider band gap energies than
that of GaAs layers. To form GaInNAs layers on AlGaAs layers
mentioned just above and to achieve excellent crystalline quality
of the layers, the lower and upper spacing layers were
satisfactorily employed in the present embodiment.
[0095] The thickness of each of the lower and upper spacing layers,
205 and 207, is not limited to 2 nm as mentioned above, but also
preferably of a thickness of at least one GaAs monolayer. This
process was employed, based on the aforementioned experimental
results, in that the deposition of GaInNAs layers onto Al.sub.0 2
Gan.sub.0 8 As layers was feasible with relative ease by completely
covering the surface of the Al.sub.0 2 Gan.sub.0 8 As layers with
at least one GaAs monolayer.
[0096] According to the present invention, therefore, light
emitting semiconductor devices may be provided, having improved
crystalline and interface structure of accumulated layers in the
device.
[0097] For example, as aforementioned, spacing layers which are
composed of at least one of GaAs monolayer and contiguous to the
active layer, facilitates the formation of GaInNAs active layers on
the cladding layers, to thereby achieving satisfying crystalline
quality of the stratified layer structure and to achieve excellent
device characteristics for the light emitting device.
[0098] As another example, by providing spacing layers intermediate
the active layer and the light guide layer, device characteristics
such as a low threshold current or temperature coefficient are
improved for the laser diodes over conventional laser diodes
provided with GaAs light guide layers.
[0099] This application is based on Japanese Patent Application
9-068726, filed with the Japanese Patent Office on Mar. 21, 1997,
the entire contents of which are hereby incorporated by
reference.
[0100] Specific embodiments of the invention particularly useful in
light emitting device applications have been described. However, it
is to be understood that the above-described device configurations
are merely illustrative of the many possible specific embodiments
which can be devised to represent application of the principles of
the invention. Numerous and varied other configurations can be
devised in accordance with these principles by those skilled in the
art without departing from the spirit and scope of the present
invention.
[0101] In particular, it should be noted many other structural
embodiments of laser diodes are possible than the relatively simple
dielectric-striped laser diodes described in the above examples. In
addition, the present invention may be adopted not only to other
light emitting devices such as light emitting diodes but also to
photo-diodes of the infrared wavelength region.
* * * * *