U.S. patent application number 09/910298 was filed with the patent office on 2001-12-06 for flash anneal.
Invention is credited to Yoo, Woo Sik.
Application Number | 20010047990 09/910298 |
Document ID | / |
Family ID | 25428586 |
Filed Date | 2001-12-06 |
United States Patent
Application |
20010047990 |
Kind Code |
A1 |
Yoo, Woo Sik |
December 6, 2001 |
Flash anneal
Abstract
A system for uniformly and controllably heating the active
surface of a semiconductor wafer or substrate during processing.
The present invention may include a radiation energy source
provided, which is enclosed or substantially surrounded by a
reflective/absorptive surface, which both reflects and absorbs the
radiation, emitted from the energy source. In accordance with the
present invention, the resultant energy output as seen by the wafer
is substantially free of non-uniformity.
Inventors: |
Yoo, Woo Sik; (Palo Alto,
CA) |
Correspondence
Address: |
Theodore P. Lopez
SKJERVEN MORRILL MacPHERSON LLP
Suite 700
25 Metro Drive
San Jose
CA
95110-1349
US
|
Family ID: |
25428586 |
Appl. No.: |
09/910298 |
Filed: |
July 20, 2001 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
09910298 |
Jul 20, 2001 |
|
|
|
09568450 |
May 9, 2000 |
|
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Current U.S.
Class: |
219/411 ;
219/390; 392/416; 392/418 |
Current CPC
Class: |
H05B 3/0047 20130101;
H01L 21/67115 20130101; C30B 31/12 20130101 |
Class at
Publication: |
219/411 ;
219/390; 392/416; 392/418 |
International
Class: |
F27B 005/14 |
Claims
What is claimed is:
1. A system for rapid thermal processing of a substrate, said
system comprising: a radiation energy source; and a reflector
substantially surrounding said radiation energy source causing
radiation energy to impinge on a surface of a substrate, said
radiation energy source configured to be flashed to suddenly heat
an active layer of said substrate.
2. The system of claim 1, wherein said radiation energy source
comprises a high-intensity lamp.
3. The system of claim 2, wherein said high intensity lamp
comprises a flow tube including a cooling fluid.
4. The system of claim 2, wherein said high-intensity lamp
comprises a Xe arc lamp.
5. The system of claim 1, wherein said radiation energy comprises
an average power of between about 0.5 J/cm.sup.2 and about 100
J/cm.sup.2.
6. The system of claim 1, wherein said active layer comprises a
portion of said substrate between 10 nm and about 1 mm below a
surface of said substrate.
7. The system of claim 1, wherein a temperature of said active
layer is between about 500.degree. C. and 1400.degree. C.
8. The system of claim 1, wherein said substantially instantaneous
reaction time is between about 1 nanosecond and about 10
seconds.
9. The system of claim 1, wherein said reflector comprises an inner
surface which has been coated with a material taken form the group
consisting of gold and silver.
10. The system of claim 1, wherein said reflector reflects
wavelengths of less than about 900 nm.
11. The system of claim 1, wherein said reflector has a geometric
shape taken from the group consisting of a plane, a sphere, a
parabola, and an ellipse.
12. The system of claim 1, wherein said radiation energy source
comprises a plurality of high intensity lamps.
13. The system of claim 1, wherein said reflector focuses said
radiation energy at a first focal point, said first focal point on
said surface of said substrate.
14. The system of claim 1, wherein said reflector focuses said
radiation energy at a first focal point, wherein said first focal
point emits a radiation energy beam which impinges on said surface
of said substrate.
15. The system of claim 14, wherein said substrate is housed in a
non-oxygenated environment.
16. A system for rapid thermal processing of a substrate, said
system comprising: a chamber; at least one radiation energy source
disposed in said chamber; and a reflector assembly substantially
surrounding said at least one radiation energy source, said
reflector assembly including a reflective surface for focusing
radiation energy from said radiation energy source at a first focal
point to impinge on a surface of a substrate for a substantially
instantaneous time of between about 1 nanosecond and about 10
seconds to raise the temperature of an active layer of said
substrate during said substantially instantaneous time to between
about 500.degree. C. and about 1400.degree. C.
17. The system of claim 16, wherein said first focal point is
disposed on said surface of said substrate.
18. The system of claim 16, wherein an energy flux emanating from
said first focal point impinges on said surface of said
substrate.
19. The system of claim 16, wherein said radiation energy source
comprises a Xe arc lamp.
20. The system of claim 16, wherein said active layer comprises a
portion of said substrate between 10 nm and about 1 mm below a
surface of said substrate.
21. A method for rapid thermal processing of a substrate, said
method comprising: providing a chamber including a radiation energy
source and a reflector; and flashing said radiation energy source
so as to impinge on a surface of a substrate for a substantially
instantaneous time to heat an active layer of said substrate.
22. The method of claim 21, wherein said radiation energy source
comprises a high-intensity lamp.
23. The method of claim 22, wherein said high intensity lamp
comprises a flow tube including a cooling fluid.
24. The method of claim 22, wherein said high-intensity lamp
comprises a Xe arc lamp.
25. The method of claim 21, wherein said radiation energy comprises
an average power of between about 0.5 J/cm.sup.2 and about 100
J/cm.sup.2.
26. The method of claim 21, wherein said active layer comprises a
portion of said substrate between 10 nm and about 1 mm below a
surface of said substrate.
27. The method of claim 21, wherein a temperature of said active
layer is between about 500.degree. C, and 1400.degree. C.
28. The method of claim 21, wherein said substantially
instantaneous time is between about 1 nanosecond and about 10
seconds.
29. The method of claim 21, wherein said reflector comprises an
inner surface which has been coated with a material taken form the
group consisting of gold and silver.
30. The method of claim 21, wherein said reflector reflects
wavelengths of less than about 900 nm.
31. The method of claim 21, wherein said reflector has a geometric
shape taken form the group consisting of a plane, a sphere, a
parabola, and an ellipse.
32. The method of claim 21, wherein said focusing comprises
emitting a radiation energy beam of said focused radiation energy
from said first focal point to a surface of said substrate.
33. A method for rapid thermal processing of a substrate, said
method comprising: providing a chamber including a radiation energy
source and a reflector; raising the power level of said radiation
energy source to a peak power level to expose an active layer of a
substrate to a first radiation energy for a first substantially
instantaneous time duration; and thereafter maintaining a second
power level of said radiation energy source, less than said first
power level, to expose a bulk of said substrate to a second
radiation energy for a second time duration, said first time
duration being between about 1 nanosecond and about 10 seconds and
said second time duration being between about zero seconds and
about 3600 seconds.
34. The method of claim 33, wherein said radiation energy source
comprises a high-intensity lamp.
35. The method of claim 33, wherein said radiation energy comprises
an average power of between about 0.5 J/cm.sup.2 and about 100
J/cm.sup.2.
36. The method of claim 33, wherein said active layer comprises a
portion of said substrate between 10 nm and about 1 mm below a
surface of said substrate.
Description
[0001] This application is a Continuation-in-Part of U. S. patent
application Ser. No. 09/568,450, filed May 9, 2000, which is herein
incorporated by reference for all purposes.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] This invention generally relates to semiconductor
manufacturing equipment and, more particularly, to a system and
method for rapid thermal processing of a semiconductor wafer.
[0004] 2. Related Art
[0005] To make semiconductor devices of decreased dimensions, new
processing and manufacturing techniques have had to be developed.
One important requirement for the new techniques is to be able to
reduce the amount of time that a semiconductor wafer is exposed to
high temperatures during processing. One such processing technique
designed to address this requirement is known as Rapid Thermal
Processing (RTP). The rapid thermal processing technique, typically
includes quickly raising the temperature of the wafer and holding
it at that temperature for a time long enough to successfully
perform a fabrication process, while avoiding such problems as
unwanted dopant diffusion that would otherwise occur at the high
processing temperatures.
[0006] Generally, conventional RTP systems use a light source and
reflectors to heat the bulk of the semiconductor wafer. The light
source is usually a bank of Halogen lamps that emit radiation
energy that is focused on the wafer by the reflectors.
[0007] Conventional Halogen lamp-based RTP systems have
considerable drawbacks with regard to achieving and maintaining a
uniform temperature distribution across the active layer of the
wafer surface. For example, the Halogen lamp has a filament, which
generates broadband radiation. By applying more power to the
filament, the intensity of the lamp can be increased. However,
silicon wafers are heated using a useable band of short
wavelengths, and are otherwise transparent to wavelengths outside
of this band.
[0008] The radiation from the lamp remains mostly outside of the
useable wavelength band during typical halogen lamp operation. As a
consequence, much of the applied power is wasted.
[0009] Another drawback to filament type lamps is that they
generally create a broad wavelength distribution that is
independently uncontrollable. Consequently, temperature
fluctuations occur on the surface of the wafer which may cause
crystal defects and slip dislocations in the wafer at high
temperatures (e.g. .about.1000.degree. C.) and under various lamp
configurations.
[0010] One particular solution to the drawbacks of Halogen
lamp-based systems is disclosed in U.S. Pat. No. 5,893,952. In the
'952 patent, an apparatus is described for rapid thermal processing
of a wafer using a narrow band beam of electromagnetic radiation
generated by a high wattage laser. The beam is directed at the
wafer, through a thin absorption film, which absorbs substantially
all the energy from the beam, which, in turn, radiates heat to the
wafer. Unfortunately, the apparatus described above has some
limitations and drawbacks. For example, the thickness of the thin
film must be accurately determined. If the thin film is too thin,
energy from the beam may be transmitted directly to the wafer, or
if the thin film is too thick the film may not heat up fast enough
for rapid thermal processing. A film must be used that does not
degrade over time, and must not sputter, bubble, or degas when
heated, otherwise non-uniform absorption will result.
[0011] Because of the requirements placed on the thin absorption
film, the materials for this film are limited. As a result, the
same RTP apparatus may heat wafers differently and unpredictably,
which wastes both time and materials.
SUMMARY
[0012] The present invention provides a system and method for
uniformly and controllably heating the active surface of a
semiconductor wafer or substrate during processing. The present
invention may include, as described in greater detail below, a
radiation energy source provided, which is enclosed or
substantially surrounded by a reflective/absorptive surface, which
both reflects and absorbs the radiation, emitted from the energy
source such that the resultant energy output as seen by the wafer
is substantially free of non-uniformity. Advantageously, the
resultant energy can be uniformly spread over the wafer to heat
only the active layer of the wafer surface. Because the resultant
energy is uniform over the diameter of the wafer there is no
significant heating overlap.
[0013] In accordance with the present invention the resultant
energy can be provided at a very high intensity such that only a
short exposure time is necessary to heat the active layer of the
substrate. Thus, the process can be referred to as a "flash" anneal
process, which can include crystallizing the active layer of the
substrate, doping the active layer, or otherwise heat treating the
active layer. Optionally, the present invention can provide a
continuous heat exposure to allow the bulk of the substrate to be
heated.
[0014] In one aspect of the invention, a system is provided for
rapid thermal processing of a substrate. The system includes a
radiation energy source surrounded by a reflector, which causes
radiation energy to impinge on a surface of a substrate to heat an
active layer of the substrate. The surface of the substrate is
impinged on by the radiation energy for a substantially
instantaneous reaction time.
[0015] In another aspect of the invention, a method for rapid
thermal processing of a substrate is provided including providing a
chamber including a radiation energy source and a reflector; and
focusing radiation energy from the radiation energy source at a
first focal point to impinge on a surface of a substrate for a
substantially instantaneous time to heat an active layer of the
substrate.
[0016] In yet another aspect of the present invention, a method is
provided for rapid thermal processing of a substrate. The method
includes providing a chamber including a radiation energy source
and a reflector; raising the power level of the radiation energy
source to a peak power level to expose an active layer of a
substrate to a first radiation energy for a first time duration;
and thereafter maintaining a second power level of the radiation
energy source, less than the first power level, to expose a bulk of
the substrate to a second radiation energy for a second time
duration.
[0017] The system and method of the present invention can be used
to heat only the active layer of the substrate surface, thus the
process is advantageous for implant anneal applications, such as
shallow junction, ultra shallow junction, and source drain anneal.
The RTP system and method may also be used effectively for thermal
donor annihilation, re-crystallization, and impurity doping.
Moreover, since the bulk of the semiconductor wafer need not be
heated during the heating process, unless desired, the amount of
power used by the RTP system can be reduced to less than 50 kWh,
preferably, less than about 10 kWh. Similarly, processing times may
be reduced since only the active surface of the wafer is being
heated.
[0018] These and other features and advantages of the present
invention will be more readily apparent from the detailed
description of the preferred embodiments set forth below taken in
conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE FIGURES
[0019] FIGS. 1A and 1B are schematic illustrations of a side view
and top view, respectively, of one embodiment of a semiconductor
wafer processing system that establishes a representative
environment of the present invention;
[0020] FIG. 2A is a simplified illustration of an RTP reactor
system in accordance with the principles of the present
invention;
[0021] FIG. 2B is a simplified illustration of an RTP reactor
system in accordance with an alternative embodiment of the present
invention;
[0022] FIG. 2C is a simplified illustration of an RTP reactor
system in accordance with an alternative embodiment of the present
invention;
[0023] FIG. 2D is a simplified illustration of the active layer of
a semiconductor wafer in accordance with principles of the present
invention;
[0024] FIG. 3 is a simplified illustration of an embodiment of a
radiation chamber in accordance with the present invention;
[0025] FIG. 4 is a simplified illustration of another embodiment of
the present invention;
[0026] FIGS. 5A and 5B are simplified illustrations of an
embodiment of a flash anneal system in accordance with the present
invention;
[0027] FIG. 6 is a simplified illustration of a reflector assembly
for use with the flash anneal system of FIG. 5 in accordance with
the present invention;
[0028] FIG. 7 is a simplified illustration of an alternative
embodiment of the reflector assembly of FIG. 6 in accordance with
the present invention;
[0029] FIG. 8 is a simplified illustration of an alternative
embodiment of the reflector assembly of FIG. 6 in accordance with
the present invention;
[0030] FIGS. 9A-9D are simplified circuit diagrams of a power
supply to ignite a lamp in accordance with an embodiment of the
present invention; and
[0031] FIG. 10 is an embodiment of a power supply circuit in
accordance with the principles of the present invention; and
[0032] FIG. 11 is an embodiment of a power supply circuit in
accordance with the principles of the present invention.
DETAILED DESCRIPTION
[0033] As used herein, the word "flash" includes it ordinary
meaning as generally understood by those of ordinary skill in the
art. This definition includes the definition that flash means to
give off light suddenly or substantially instantaneous (or in
transient bursts) for a duration of time between about 1 nanosecond
and about 10 seconds.
[0034] FIGS. 1A and 1B are schematic illustrations of a side view
and top view, respectively, of one embodiment of a semiconductor
wafer processing system 10 that establishes a representative
environment of the present invention. The representative system is
fully disclosed in co-pending U. S. patent application Ser. No.
09/451,677, filed Nov. 30, 1999, which is herein incorporated by
reference for all purposes. Processing system 10 includes a loading
station 12 which has multiple platforms 14 for supporting and
moving a wafer cassette 16 up and into a loadlock 18. Wafer
cassette 16 may be a removable cassette which is loaded into a
platform 14, either manually or with automated guided vehicles
(AGV). Wafer cassette 16 may also be a fixed cassette, in which
case wafers are loaded onto cassette 16 using conventional
atmospheric robots or loaders (not shown). Once wafer cassette 16
is inside loadlock 18, loadlock 18 and transfer chamber 20 are
maintained at atmospheric pressure or else are pumped down to
vacuum pressure using a pump 50. A robot 22 within transfer chamber
20 rotates toward loadlock 18 and picks up a wafer 24 from cassette
16. A reactor or thermal processing chamber 26, which may also be
at atmospheric pressure or under vacuum, accepts wafer 24 from
robot 22 through a gate valve 30. Optionally, additional reactors
may be added to the system, for example reactor 28. Robot 22 then
retracts and, subsequently, gate valve 30 closes to begin the
processing of wafer 24. After wafer 24 is processed, gate valve 30
opens to allow robot 22 to pick-up and place wafer 24 into a
cooling station 60. Cooling station 60 allows the newly processed
wafers, which may have temperatures upwards of 100.degree. C., to
cool before they are placed back into a wafer cassette in loadlock
18.
[0035] In accordance with the present invention, reactors 26 and 28
are RTP reactors, such as those used in thermal anneals, dopant
diffusion, thermal oxidation, nitridation, chemical vapor
deposition, and similar processes. Reactors 26 and 28 are generally
horizontally displaced, however in a preferred embodiment, reactors
26 and 28 are vertically displaced; (i.e. stacked one over another)
to minimize floor space occupied by system 10. Reactors 26 and 28
are bolted onto transfer chamber 20 and are further supported by a
support frame 32. Process gases, coolant, and electrical
connections may be provided through the rear face of the reactors
using interfaces 34.
[0036] FIG. 2A is a simplified illustration of an embodiment of RTP
reactor system 40 in accordance with the principles of the present
invention. In this embodiment, reactor system 40 includes a process
chamber 102 and a scanner assembly 200. Scanner assembly 200 may be
positioned proximate to process chamber 102, such that in
operation, the scanner assembly can be made to adequately scan the
wafer disposed in the chamber.
[0037] In a preferred embodiment, process chamber 102 may include a
closed-end tube 103, defining an interior cavity 104. Within tube
103 are wafer support posts 106, typically three (of which two are
shown), to support a single wafer 108. An opening or aperture (not
shown) on one end of tube 103, provides access for the loading and
unloading of wafer 108 before and after processing. The aperture
may be a relatively small opening, but large enough to accommodate
a wafer of between about 0.5 to 0.8 mm thick and up to 300 mm
(.about.12 in.) in diameter, and the arm and end effector of robot
22. Preferably, the aperture is no greater than between about 18 mm
and 22 mm, preferably 20 mm. The relatively small aperture size
helps to reduce radiation heat loss from tube 103.
[0038] Because wafer 108 is loaded and un-loaded using robot 22,
tube 103 requires no internal moving parts to position wafer 108,
such as lift pins, actuators, and the like. Thus, tube 103 may be
constructed with a minimal internal volume-surrounding wafer 108.
In a preferred embodiment, the volume of interior cavity 104 is
usually no greater than about 1.0 m.sup.3, and preferably the
volume is no greater than about 0.3 m.sup.3. Accordingly, the small
tube volume allows reactor system 40 to be made smaller, and as a
result, system 10 may be made smaller, requiring less floor space.
Preferably, tube 103 is made of a transparent quartz or similar
material.
[0039] FIG. 2A also illustrates scanner assembly 200, which may be
used in conjunction with a radiation energy source 202, to provide
rapid thermal processing of semiconductor wafer 108. Scanner
assembly 200 includes a housing 216 which supports an actuator 204,
a reflecting chamber 212, and a radiation outlet channel 214. The
external dimensions of housing 216 are determined by the
application. For example, the length of housing 216 may be at least
as great, or greater than the diameter of wafer 108.
[0040] Actuator 204 provides a conventional means for making
scanner assembly 200 operable to scan wafer 108. Actuator 204 may
be configured to provide a back and forth scanning motion, as
indicated in FIG. 2A by arrows 206 and 208, along a scanning length
of tube 103. Actuator 204 may include, but is not limited to,
conventional drivers and motion translation mechanisms, such as
linear motors, stepper motors, hydraulic drives, and the like, and
gears, pulleys, chains, and the like.
[0041] In the embodiment shown in FIG. 2A, scanner assembly 200 may
be mounted external to both process chamber 102 and tube 103.
Scanner assembly 200 is positioned above an optical window 210,
which is provided along the scanning length of chamber 102 (i.e. at
least as great as the diameter of wafer 108) to allow the radiation
energy emitted from housing 216 to enter tube 103 and impinge on
wafer 108. In an alternative embodiment shown in FIG. 2B, the
scanning motion of scanner assembly 200a may take place internal to
process chamber 102a, but external to tube 103a. Scanner assembly
200a is positioned above optical window 210a, formed on tube 103a
along the scanning length (i.e. at least as great as the diameter
of wafer 108) to allow the radiation energy emitted from housing
216a to enter tube 103a and impinge on wafer 108.
[0042] In yet another embodiment, shown in FIG. 2C, scanner
assembly 200b may be mounted external to process chamber 102b, with
no process tube. In this embodiment, scanner assembly 200b is
positioned above optical window 210b, which is provided along the
scanning length of chamber 102b (i.e. at least as great as the
diameter of wafer 108) to allow the radiation energy emitted from
housing 216b to impinge on wafer 108.
[0043] Optical window 210 (or 210a) may be made of any material
that allows for the transmission of the radiation energy,
preferably quartz. Window 210 may have a thickness of between about
1 mm and about 5 mm and a diameter that is at least as great or
greater than wafer 108.
[0044] Whether the scanner assembly is positioned inside or outside
of the tube, the distance between the surface of the wafer and the
scanner assembly, indicated in FIG. 2A as gap 213, should be no
greater than about 50 mm, preferably between about 10 mm and 25 mm.
The relatively small gap 213 ensures that adequate control of the
temperature/radiation energy distribution across wafer 108 is
maintainable. A larger gap 213 may cause some of the radiation
energy to escape before it impinges on wafer 108.
[0045] As further illustrated in FIG. 2A, reflective chamber 212
and radiation outlet channel 214 are disposed within housing 216.
Radiation source 202 is disposed within reflective chamber 212,
typically positioned such that substantially all of the broadband
radiation is allowed to impinge on an internal surface 218 of the
chamber. In one embodiment, radiation energy source 202 may be a
high-intensity lamp of the type conventionally used in lamp heating
operations. In a preferred embodiment, radiation energy source 202
is a filament-less lamp, such as a Xe arc lamp. Typical, power
requirements for the preferred lamp 202 of the present invention
are between about 500 Watts and about 50 kWatts.
[0046] The energy emitted from lamp 202 impinges inner surface 218
of chamber 212, which is highly reflective of certain wavelengths
and absorptive or non-reflective of others. In one embodiment,
surface 218 is coated with a material, which has the
reflecting/absorbing characteristic. For example, surface 218 may
be coated with gold or silver, where the silver is further coated
with a protection coating, such as SiN or any transparent coating,
which prohibits oxidation of the silver. Preferably, the coating
efficiently reflects wavelengths of less than 900 run, to produce
an average wavelength of between about 900 nm and about 200 nm.
[0047] Chamber 212, which may be formed into any suitable geometric
shape. For example, as shown in FIG. 2A, chamber 212 may be a round
chamber. In a round chamber 212 light energy can be focused at the
center of chamber 212 and directed toward radiation outlet channel
214, described below. In this example, radiation energy source 202
can be off-center in chamber 212 to ensure that the focused light
energy does not over heat energy source 202. FIG. 3 shows an
alternative example of chamber 212, which may be formed into an
elliptical chamber. Elliptical chamber 212 can have two focal
points. Energy source 202 can be positioned at a first focal point
203, such that the light energy is focused at the second focal
point 205 and directed to radiation outlet channel 214.
[0048] Referring again to FIG. 2A, the narrow-band energy escapes
from chamber 212 through radiation outlet channel 214. Radiation
outlet channel 214 can be about 5 mm to 20 mm long; preferably
about 10 mm long, to adequately direct the radiation energy along
the desired path. Radiation outlet channel 214 has an opening or
slit 222 formed on the end of the channel which allows a beam 220
of the radiation energy to escape housing 216. Slit 222 is designed
to shape beam 220 as desired, such that an optimal amount of energy
may be focused on wafer 108. In a preferred embodiment, slit 222
may be a rectangular opening, which extends the length of scanner
assembly 200, and is as great, or greater than the diameter of
wafer 108. The size of the opening should be small enough to
minimize the amount of energy, which will naturally disperse at the
slit opening. Thus, slit 222 may have a width of between about 1 mm
and 10 mm; preferably 2 mm. As beam 222 is scanned over wafer 108,
a uniform temperature distribution is created across the surface of
wafer 108, which heats an active layer 224 of the wafer.
[0049] Referring now to FIGS. 2A and 2D, active layer or device
layer 224 is a portion of wafer 108, which extends from surface 223
of wafer 108 down to a depth .alpha. below surface 223. The depth
.alpha. is typically between about 0.05 .mu.m and 1 mm, but will
vary with the process and device feature size. Active layer 224 is
well known in the semiconductor manufacturing industry as that
portion of the wafer in which semiconductor devices are formed,
such as transistors, diodes, resistors, and capacitors.
[0050] It should be understood that the temperature to which active
layer 224 is heated is a function of the relationship between the
speed at which scanner assembly 200 is moved across wafer 108 and
the power supplied to lamp 202. In an exemplary embodiment, the
temperature of active layer 224 may range from between about
500.degree. C. to about 1200.degree. C. To achieve these
temperatures, the scan rate may vary between about 1 mm/sec to
about 100 mm/sec at 500 watts to 50 kwatts. The slower the scan
rate, the less power is required. In one embodiment, wafer 108 can
be pre-heated, for example, to about 300.degree. C., such that the
processing of active layer 224 begins at the higher temperature,
which reduces processing time and saves energy.
[0051] Heating active layer 224 using reactor system 40 increases
the diffusion rate and solubility of active layer 224. Thus, a
shallow doped region may be created in active layer 224. Doping the
active layer includes scanning active layer 224 to a process
temperature, for example, from between about 500.degree. C. to
about 1200.degree. C., in an environment of a doping compound, such
as boron, phosphorus, nitrogen, arsenic, B.sub.2H.sub.6, PH.sub.3,
N.sub.2O, NO, AsH.sub.3, and NH.sub.3. The concentration of the
compound may range from about 0.1% to about 100% relative to a
carrier gas, such as H.sub.2, N.sub.2 and O.sub.2 or a nonreactive
gas, such as argon or helium. Higher concentrations of the compound
can speed up the doping process and/or increase the dopant
concentration within the active layer.
[0052] FIG. 4 is a simplified illustration of yet another
embodiment of the present invention. In this embodiment, scanner
assembly 300 includes a high intensity pulse or continuous wave
laser 302 to provide rapid thermal processing of semiconductor
wafer 304. Scanner assembly 300 also includes a laser energy
focusing assembly 306 and an actuator 308. The components of
scanning assembly 300 may be enclosed in a single housing, which is
mountable on to a process chamber 320 in a manner similar to the
embodiments described above in FIG. 2A.
[0053] Laser focusing assembly 306 includes a first focusing lens
310, a second focusing lens 312, and mirror 314. Focusing assembly
operates in a well-known, conventional manner to focus the laser
energy 301 from laser 302 onto wafer 304. The laser energy 301 from
laser 302 can have a wavelength of less than 1 .mu.m.
[0054] Actuator 308 provides a conventional means for making
scanner assembly 300 operable to scan wafer 304. Actuator 308 may
be configured to move laser 302 and focusing assembly 306 to
provide a back and forth scanning motion across wafer 304, as
indicated in FIG. 4 by arrow 316. Alternatively, only mirror 314
may be moved to cause the laser scanning of wafer 304. In yet
another alternative embodiment, wafer 304 may be made to move, such
that a stationary beam 301 can be made to scan the wafer surface.
Actuator 308 may include, but is not limited to, conventional
drivers and motion translation mechanisms, such as linear motors,
stepper motors, hydraulic drives, and the like, and gears, pulleys,
chains, and the like. In one embodiment, scanner assembly 300 is
positioned above an optical window 318, which is provided along the
scanning length of process chamber 320 to allow the laser energy to
enter process chamber 320 and impinge on wafer 304. Window 318 may
be made of any material that allows for the transmission of laser
energy 301; preferably transparent quartz. Window 318 may have a
thickness of between about 1 and about 5 mm and a diameter that is
at least as great or greater than wafer 304.
[0055] FIG. 5A is a simplified illustration of an embodiment of an
RTP reactor system 500 in accordance with the principles of the
present invention. In this embodiment, reactor system 500 includes
a process chamber 502 and a reflector assembly 504. Reflector
assembly 504 may include a reflector 506 and a radiation energy
source 508. Reflector assembly 504 may be positioned within process
chamber 502 proximate to a wafer 510, such that in operation,
reflector assembly 504 can be made to adequately process wafer 510.
In one embodiment, radiation energy source 508 can be a
high-intensity lamp of the type conventionally used in lamp heating
operations. In this embodiment, radiation energy source 508 is a
filament-less lamp, such as a Xe arc lamp (hereinafter "lamp 508").
Lamp 508 can be any suitably shaped lamp, for example, a tube
shaped lamp that has a length at least as long as the diameter of
wafer 5 10. In one embodiment, lamp 508 can be surrounded by a flow
tube 512. Flow tube 512 can contain a cooling fluid 522, for
example, deionized water. Cooling fluid 522 is used to keep lamp
508 from overheating during operation. For example, cooling fluid
can keep the temperature of lamp 508 under 100.degree. C. to keep
any quartz components of lamp 508 from melting. In another
embodiment, cooling fluid 522 can be mixed with a non-conductive
die. The non-conductive die can act as a filter to keep only
certain wavelengths from emanating from lamp 508 through flow tube
512.
[0056] FIG. 5B is a simplified illustration of an alternative
embodiment, in which a plurality of lamps 508 are disposed
proximate to reflector 506. It should be understood that any number
of lamps 508 can be used to achieve the desired heating levels
required of a specific process.
[0057] Referring again to FIG. 5A, reflector assembly 504 is in
operational arrangement with wafer 510. Reflector 506 includes an
inner surface 514, which can be highly reflective of certain
wavelengths and absorptive or non-reflective of others. In one
embodiment, inner surface 514 can be coated with a material, which
has the reflecting/absorbing characteristic. For example, inner
surface 514 may be coated with gold or silver, where the silver is
further coated with a protection coating, such as SiN or any
transparent coating, which prohibits oxidation of the silver. The
coating efficiently reflects wavelengths of less than 900 nm, to
produce an average wavelength of between about 900 nm and about 200
nm. In another embodiment, inner surface is highly reflective
across the full spectra of ultra violet (UV), infrared (IR) and
visible wavelengths.
[0058] Reflector 506 may be formed into any suitable geometric
shape. For example, reflector 506 may be flat, spherical,
elliptical or parabolic. The light energy from lamp 508 can be
focused at the center or focal point of reflector 506 to be
directed toward wafer 510. The radiation emitted from lamp 508 and
reflected from inner surface 514 of reflector 506 impinges on wafer
510, as simply and representatively illustrated by rays 516, 518
and 520, to provide a uniform temperature distribution across the
surface of wafer 510, which heats the active layer 224 of the wafer
(as described above in reference to FIG. 2D).
[0059] The temperature to which active layer 224 is heated is a
function of the relationship between the power supplied to lamp 508
and the length of time which the radiation energy is allowed to
impinge on wafer 510. In one embodiment, the temperature of active
layer 224 may be raised to a range from between about 500.degree.
C. to about 1400.degree. C. To achieve these temperatures, wafer
510 may be exposed to a flash of lamp 508, where lamp 508 gives off
light energy suddenly or substantially instantaneously, for
example, for a duration of time between about 1 nanosecond and
about 10 seconds at a power level of between about 0.5 J/cm.sup.2
and about 100 J/cm.sup.2.
[0060] In another embodiment, after wafer 510 is exposed to the
flash of lamp 508, the lamp power can be maintained at a second
power level, for example, between about 1000 watts to about 500
kwatts. Wafer 510 can be exposed to the second power level for any
time duration that may be necessary to complete the processing of
wafer 510. In one example, the continuous exposure can last from
between about 0.05 seconds and about 3600 seconds. The continues
exposure can heat the bulk of wafer 510 in addition to heating the
active layer during the flash anneal.
[0061] Wafer 510 can be pre-heated, for example, to about
300.degree. C., such that the processing of active layer 224 begins
at the higher temperature, which reduces processing time and saves
energy.
[0062] FIG. 6 is a simplified illustration of an alternative
embodiment of reflector assembly 504. In this alternative
embodiment, reflector 506 may be formed into an ellipse, which has
two focal points F.sub.1 and F.sub.2. Lamp 508 can be positioned at
focal point F.sub.1, such that the energy is reflected from inner
surface 514, exemplified by rays 524 and 525, and focused at the
second focal point F.sub.2. Wafer 510 can be positioned at focal
point F.sub.2, such that the energy can be used to process wafer
510.
[0063] In this embodiment, the entire wafer surface can be
subjected to the energy focused at F.sub.2, by moving wafer 510
relative to focal point F.sub.2. For example, actuator 526 can be
used to provide a conventional means for causing reflector assembly
504 to scan over wafer 510. Actuator 526 may be configured to move
either wafer 510 or reflector assembly 504 to provide a back and
forth scanning motion, as indicated by arrow 528, across wafer
510.
[0064] FIG. 7 is a simplified illustration of another embodiment of
reflector assembly 504 in accordance with the present invention. In
this embodiment, reflector 506 is formed into an ellipse, with two
focal points F.sub.1, and F.sub.2. Lamp 508 is positioned at focal
point F.sub.1, such that the energy is reflected from inner surface
514 and focused at focal point F.sub.2. In this embodiment, wafer
510 is set back a distance d.sub.1 from reflector assembly 504
and/or a distance d.sub.2 from focal point F.sub.2. Distances
d.sub.1 and d.sub.2 are selected such that wafer 510 is fully
engulfed within a beam 533 emanating from focal point F.sub.2 Beam
533, outlined by rays 530 and 532, covers the entire surface area
of wafer 510, such that the entire surface of wafer 510 is
subjected simultaneously to substantially all of the reflected
energy from lamp 508 to process wafer 510.
[0065] FIG. 8 is a simplified illustration of yet another
embodiment of reflector assembly 504 in accordance with the present
invention. In this embodiment, process chamber 502 including
reflector assembly 504 may be mounted external to a second process
chamber 536. Reflector assembly 504 can be positioned above an
optical window 538, which is provided between chambers 502 and 536
to allow the radiation energy emitted from lamp 508 to enter second
process chamber 536 and impinge on wafer 510. Optical window 538
may be made of any material that allows for the transmission of the
radiation energy, preferably quartz. Window 538 may have a
thickness of between about 1 and about 5 mm and a diameter that is
at least as great or greater than wafer 510.
[0066] Second process chamber 536 can be pulled to vacuum, for
example, using a pump 540. Second chamber 536 can also be filled
through inlet 542 with a non-oxygen gas, such as N.sub.2. During
the processing of wafer 510, the vacuum or non-oxygen environment
ensures that the transmission of ultra-violet (UV) wavelengths from
lamp 508 can reach wafer 510.
[0067] Although second process chamber 536 with quartz window 538
has been illustrated using the embodiment of reflector assembly 504
of FIG. 7, the second process chamber 536 and quartz window 538 can
be used with all of the embodiments of reflector assembly 504
described herein. It should also be understood that chambers 502
and 536 may be a single chamber.
[0068] FIGS. 9A-9D are simplified circuit diagrams of a power
supply 600 for a lamp 602 in accordance with an embodiment of the
present invention. As shown in FIG. 9A, power supply 600 includes a
main circuit 604 and an ignition circuit 606. In one embodiment,
main circuit 604 includes an ignition transformer 608 whose primary
winding 610 can be supplied with a voltage V.sub.1, and whose
secondary winding 612 ignites lamp 602 with the stepped-up value of
voltage V.sub.1. In this embodiment, a capacitor 614 is provided in
parallel to a series connection of primary winding 610 and a
controllable switch 618. Capacitor 614 can be of any desired
capacitance, for example, between about 10 .mu.F and 100 F. Switch
618 can be, for example, any suitable manual switch,
electromagnetic relay or solid state device.
[0069] In this embodiment, capacitor 614 can be connected in
parallel with a resistor 616 and a diode 620 provided in series
with resistor 616. When charging capacitor 614, resistor 616 acts
as a current limiter and/or a dummy load. Capacitor 614 is charged
when supply voltage V.sub.1 is activated across nodes N.sub.1 and
N.sub.2. Voltage V.sub.1 can be an AC voltage supplied via a direct
line or a transformer output. Voltage V.sub.1 can be adjustable and
may range from between about 200 VAC and 1000 VAC.
[0070] Ignition circuit 606 supplies the ignition energy with the
aid of a pulse switch 622. For this purpose, ignition circuit 606
is provided with secondary winding 612 of ignition transformer 608.
A resistor 624, in series with diode 626, is provided in series
with secondary winding 612 and pulse switch 622. A capacitor 628,
disposed in parallel to a shunt resistor 630, is in series
connection to secondary winding 612. Capacitor 628 can be of any
desired capacitance, for example, between about 0.5 .mu.F and 100
.mu.F. Capacitor 628 can be charged by a voltage V.sub.2, placed
across nodes N.sub.3 and N.sub.4. Voltage V.sub.2 can be an AC
voltage supplied via a direct line or a transformer output. Voltage
V.sub.2 can be adjustable and may range from between about 500 VAC
and 1000 VAC. Alternatively, for simplicity, nodes N.sub.1 and
N.sub.2 can be electrically coupled to nodes N.sub.3 and N.sub.4 so
as to share the same power source.
[0071] FIG. 9B shows an embodiment of primary circuit 604 and
ignition circuit 606 where switches 618 and 619 are closed to allow
supply voltage V.sub.1 to be applied between nodes N.sub.1 and
N.sub.2, to begin the charging via resistor 616 of capacitor 614.
At the same time, capacitor 628 of ignition circuit 606 is charged
via resistor 624 with voltage V.sub.2 applied between nodes N.sub.3
and N.sub.4.
[0072] FIG. 9C shows an embodiment, such that when capacitor 614 is
charged to a desired capacity, switch 618 can be opened and switch
619 can be opened, thus removing the effect of supply voltage
V.sub.1 on capacitor 614 and allowing a voltage V.sub.c to be
supplied from capacitor 614 across primary windings 610. Impulse
switch 622 can be closed to allow capacitor 628 to discharge, such
that a voltage V.sub.t is supplied across secondary windings 612.
According to the transmission ratio of ignition transformer 608, a
current flux generates a stepped-up voltage in primary windings 610
that is high enough to energize lamp 602.
[0073] As shown in FIG. 9D, once lamp 602 has been energized as
desired, switch 622 can be released (i.e. opened) and switch 619
can be closed to allow capacitor 614 to continue to discharge via
the dummy load supplied through resistor 616. In this
configuration, capacitor 628 of ignition circuit 606 begins to be
re-charged once switch 622 is opened. Primary circuit 604 can be
re-charged with the closing of switch 618.
[0074] FIG. 10 is an embodiment of a power supply circuit 700
configured using the principles described in reference to FIGS.
9A-9D. This embodiment illustrates the versatility of power supply
circuit 700. As best understood with reference to FIG. 10,
capacitors 708 from a plurality of primary circuits 706 can be
stacked together to be used in conjunction with one another to
increase the charge storing capacity of power supply 700. The
stacked capacitors 708 form a first rack 709. Each primary circuit
706 can be connected together upon the closing of switches or
relays 707. As the capacity of the voltage is increased a plurality
of capacitor racks, such as second rack 711 and third rack 713 can
be connected in parallel with first rack 709 via a set of switches
714. The racks 709, 711, and 713 can be used together to vary the
capacitance and thus the power level supplied to lamp 602.
[0075] FIG. 10 illustrates additional versatility of power supply
700. For example, AC power source 702 can be configured to provide
a variable voltage, ranging for example between about 200 VAC and
about 1000 VAC. In addition, resistor 704 of the primary circuit
can be a halogen lamp or similar device, which can be used to
dissipate heat energy and also provide a visual indication that the
capacitor in the circuit is being charged or discharged.
[0076] FIG. 11 is an embodiment of a power supply circuit 800 using
the principles described in reference to FIGS. 9A-9D with the
additional ability to allow a continuous powering of lamp 602.
Accordingly, power supply circuit 800 can provide a flash exposure
to the radiation energy of lamp 602 followed by a continuous
component of exposure to the radiation energy of lamp 602. Power
supply circuit 800 includes power circuit 802, where switches 804
and 806 when closed allow an AC supply voltage V.sub.1 to be
applied between nodes N.sub.1 and N.sub.2, to begin the charging
via resistor 808 of capacitor 810. At the same time, capacitor 812
of ignition circuit 814 is charged via resistor 816. A set of
diodes 818 are provided to convert the AC voltage supply to a DC
voltage supply. When capacitors 810 and 812 are charged to desired
capacities, switch 820 is closed allowing a voltage V.sub.2 to be
supplied from capacitor 810 across primary windings 822. Impulse
switch 824 can be closed to allow capacitor 812 to discharge, such
that a voltage V.sub.3 is supplied across secondary windings 826.
According to the transmission ratio of ignition transformer 826, a
current flux generates a stepped-up voltage in primary windings 822
that is high enough to energize lamp 602. Once ignition switch 824
is released, voltage V.sub.2 remains across the primary windings to
allow lamp 602 to remain energized and, thus producing a radiation
energy output. In this manner, discharge time can be
controlled.
[0077] The present invention overcomes many of the disadvantages of
RTP systems using Halogen lamps for heating. For example,
filament-type Halogen lamps produce broadband energy, much of which
cannot be used to heat the active layer of the wafer. To increase
the amount of useable wavelengths in the filament-type lamp, power
to the lamp is increased. Unfortunately, this increase in power
shifts the peak intensity. The arc lamp used in the present
invention does not shift peak intensity with an increase in power
and thus can be made to perform at a peak intensity that is within
the useable band of wavelengths. As a consequence, the added power
is more efficiently consumed at the active layer.
[0078] Having thus described embodiments of the present invention,
persons skilled in the art will recognize that changes may be made
in form and detail without departing from the spirit and scope of
the invention. Thus the invention is limited only by the following
claims.
* * * * *