U.S. patent application number 09/740205 was filed with the patent office on 2001-11-01 for iodonium salts as latent acid donors.
Invention is credited to Asakura, Toshikage, Birbaum, Jean-Luc, Ilg, Stephan, Schulz, Reinhard, Wolf, Jean-Pierre, Yamato, Hitoshi.
Application Number | 20010036591 09/740205 |
Document ID | / |
Family ID | 4231594 |
Filed Date | 2001-11-01 |
United States Patent
Application |
20010036591 |
Kind Code |
A1 |
Schulz, Reinhard ; et
al. |
November 1, 2001 |
Iodonium salts as latent acid donors
Abstract
Radiation-sensitive compositions comprising (a1) a cationically
or acid-catalytically polymerizable or crosslinkable compound or
(a2) a compound that increases its solubility in a developer under
the action of acid; and (b) at least one diaryliodonium salt of
formula I 1 wherein X is branched C.sub.3-C.sub.20alkyl or
C.sub.3-C.sub.8cycloalkyl; X.sub.1 is hydrogen, linear
C.sub.1-C.sub.20alkyl, branched C.sub.3-C.sub.20alkyl or
C.sub.3-C.sub.8cycloalkyl; with the proviso that the sum of the
carbon atoms in X and X.sub.1 is at least 4; Y is linear
C.sub.1-C.sub.10alkyl, branched C.sub.3-C.sub.10alkyl or
C.sub.3-C.sub.8cycloalkyl; A.sup.- is a non-nucleophilic anion,
selected from the group (BF.sub.4).sup.-, (SbF.sub.6).sup.-,
(PF.sub.6).sup.-, (B(C.sub.6F.sub.5)).sub.4.sup.-,
C.sub.1-C.sub.20alkylsulfonate, C.sub.2-C.sub.20haloalkylsulfonate,
unsubstituted C.sub.6-C.sub.10arylsul- fonate, camphorsulfonate,
and C.sub.6-C.sub.10arylsulfonate substituted by halogen, NO.sub.2,
C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.12halo-alkyl,
C.sub.1-C.sub.12alkoxy or by COOR.sub.1; and R.sub.1 is
C.sub.1-C.sub.20alkyl, phenyl, benzyl; or phenyl mono- or
poly-substituted by C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.12alkoxy
or by halogen; with the proviso that the two phenyl rings on the
iodine atom are not identically substituted, have high sensitivity,
high storage stability, good solubility and a low tendency to
crystallize.
Inventors: |
Schulz, Reinhard;
(Staufen-Wettelbrunn, DE) ; Birbaum, Jean-Luc;
(Binningen, CH) ; Wolf, Jean-Pierre; (Maisprach,
CH) ; Ilg, Stephan; (Giebenach, CH) ; Yamato,
Hitoshi; (Takarazuka-shi, JP) ; Asakura,
Toshikage; (Osaka, JP) |
Correspondence
Address: |
CIBA SPECIALTY CHEMICALS CORPORATION
PATENT DEPARTMENT
540 WHITE PLAINS RD
P O BOX 2005
TARRYTOWN
NY
10591-9005
US
|
Family ID: |
4231594 |
Appl. No.: |
09/740205 |
Filed: |
December 18, 2000 |
Current U.S.
Class: |
430/270.1 ;
430/281.1; 430/914; 430/926; 522/31 |
Current CPC
Class: |
G03F 7/0045 20130101;
G03F 7/038 20130101; B33Y 70/00 20141201; C07C 17/00 20130101; C08G
59/68 20130101; C08G 65/105 20130101; C07C 2601/14 20170501; Y10S
430/115 20130101; G03F 7/0392 20130101; G03F 7/0382 20130101; C07C
25/18 20130101; C07C 17/00 20130101; C07C 25/18 20130101 |
Class at
Publication: |
430/270.1 ;
430/281.1; 430/914; 430/926; 522/31 |
International
Class: |
G03F 007/004 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 21, 1999 |
CH |
2343/99 |
Claims
What is claimed is:
1. A radiation-sensitive composition comprising (a1) a cationically
or acid-catalytically polymerisable or crosslinkable compound or
(a2) a compound that increases its solubility in a developer under
the action of acid; and (b) at least one diaryliodonium salt of
formula I 35wherein X is branched C.sub.3-C.sub.20alkyl or
C.sub.3-C.sub.8cycloalkyl; X.sub.1 is hydrogen, linear
C.sub.1-C.sub.20alkyl, branched C.sub.3-C.sub.20alkyl or
C.sub.3-C.sub.8cycloalkyl; with the proviso that the sum of the
carbon atoms in X and X.sub.1 is at least 4; Y is linear
C.sub.1-C.sub.10alkyl, branched C.sub.3-C.sub.10alkyl or
C.sub.3-C.sub.8cycloalkyl; A.sup.- is a non-nucleophilic anion,
selected from the group (BF.sub.4).sup.-, (SbF.sub.6).sup.-,
(PF.sub.6).sup.-, (B(C.sub.6F.sub.5)).sub.4.sup.-,
C.sub.1-C.sub.20alkylsulfonate, C.sub.2-C.sub.20haloalkylsulfonate,
unsubstituted C.sub.6-C.sub.10arylsulfonate, camphorsulfonate,
C.sub.1-C.sub.20-perfluoroalkylsulfonylmethide,
C.sub.1-C.sub.20-perfluor- oalkylsulfonylimide, and
C.sub.6-C.sub.10arylsulfonate substituted by halogen, NO.sub.2,
C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.12halo-alkyl,
C.sub.1-C.sub.12alkoxy or by COOR.sub.1; and R.sub.1 is
C.sub.1-C.sub.20alkyl, phenyl, benzyl; or phenyl mono- or
poly-substituted by C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.12alkoxy
or by halogen; with the proviso that the two phenyl rings on the
iodine atom are not identically substituted.
2. A radiation-sensitive composition according to claim 1, wherein
in the compounds of formula I X is branched C.sub.4-C.sub.12alkyl
or cyclohexyl.
3. A radiation-sensitive composition according to claim 1, wherein
in the compounds of formula I Y is linear C.sub.1-C.sub.6alkyl or
cyclohexyl.
4. A radiation-sensitive composition according to claim 1, wherein
in the compounds of formula I A is a non-nucleophilic anion,
selected from the group (PF.sub.6).sup.-,
(B(C.sub.6F.sub.5)).sub.4.sup.-, C.sub.1-C.sub.12-alkylsulfonate,
C.sub.2-C.sub.12haloalkylsulfonate, unsubstituted phenylsulfonate,
camphorsulfonate, C.sub.1-C.sub.20-perfluo- roalkylsulfonylmethide,
C.sub.1-C.sub.20-perfluoroalkylsulfonylimide, and phenylsulfonate
substituted by halogen, NO.sub.2, C.sub.1-C.sub.12alkyl,
C.sub.1-C.sub.12haloalkyl, C.sub.1-C.sub.12-alkoxy or by
COOR.sub.1.
5. A radiation-sensitive composition according to claim 1, wherein
in the compounds of formula I X is branched C.sub.4-C.sub.6alkyl or
cyclohexyl; X.sub.1 is hydrogen or branched C.sub.4-C.sub.6alkyl; Y
is linear C.sub.1-C.sub.4alkyl, branched C.sub.3-C.sub.4alkyl or
cyclohexyl; A.sup.- is a non-nucleophilic anion, selected from the
group (PF.sub.6).sup.-, camphorsulfonate and
C.sub.1-C.sub.4alkyl-substituted phenylsulfonate.
6. A radiation-sensitive composition according to claim 1, wherein
component (a1) is at least one compound selected from the group of
cycloaliphatic epoxy compounds, glycidyl ethers, oxetane compounds,
vinyl ethers, acid-crosslinkable melamine resins,
acid-crosslinkable hydroxymethylene compounds and
acid-crosslinkable alkoxymethylene compounds.
7. A radiation-sensitive composition according to claim 1, wherein
component (a2) is at least one compound selected from the group of
cycloaliphatic copolymers, 4-hydroxy-phenyl-group-containing
copolymers, maleic acid anhydride-containing copolymers and acrylic
acid-, acrylic acid ester- and methacrylic acid ester-containing
copolymers, with the proviso that those copolymers carry functional
groups that increase the solubility of the polymer in an alkaline
developer after reaction with an acid.
8. A radiation-sensitive composition according to claim 1,
additionally to components (a1) or (a2) and (b) comprising at least
one sensitizer compound (d).
9. A radiation-sensitive composition according to claim 8, wherein
the sensitizer compound (d) is benzophenone, thioxanthone,
anthracene or derivatives thereof.
10. A method for the photopolymerisation or crosslinking of
cationically or acid-catalytically polymerisable or crosslinkable
compounds under the action of electromagnetic radiation or an
electron beam, in which method a compound of formula I according to
claim 1 is used as photolatent acid donor.
11. A coated substrate that is coated on at least one surface with
a composition according to claim 1.
12. A method for the production of relief images, wherein a
composition according to claim 1 is applied to a substrate and is
then exposed image-wise.
13. A photoresist comprising a compound of formula I as
radiation-sensitive acid donor.
14. A photoresist according to claim 13, wherein the photoresist is
a negative resist.
15. A photoresist according to claim 13, wherein the photoresist is
a positive resist.
16. A photoresist according to claim 13, wherein the photoresist is
a chemically enhanced resist.
17. Method according to claim 10 in the manufacture of
surface-coating compositions, powder coating compositions, printing
inks, printing plates, dental compounds, stereolithography resins,
adhesives, anti-adhesive coatings, colour filters, resist materials
or image-recording materials.
18. A compound of formula I according to claim 1.
Description
[0001] The invention relates to selected iodonium salt compounds
and to their use as photo-initiators.
[0002] It is known to use iodonium salts as photoinitiators in
cationically polymerisable compositions. Such disclosures can be
found, for example, in J. V. Crivello, "Photoinitiated Cationic
Polymerization" in: UV Curing: Science and Technology, Editor S. P.
Pappas, pages 24-77, Technology Marketing Corporation, Norwalk,
Conn. 1980, ISBN No. 0-686-23773-0; J. V. Crivello, J. H. W. Lam,
Macromolecules, 10, 1307 (1977) and J. V. Crivello, Ann. Rev.
Mater. Sci. 1983, 13, pages 173-190 and J. V. Crivello, Journal of
Polymer Science, Part A: Polymer Chemistry, Vol. 37, 4241-4254
(1999). WO 98/46647 discloses 4,4'-dialkylphenyl-iodonium compounds
containing at least one isopropyl group in photocurable
compositions. J. Chem. Soc. Perkin Trans. 1, 1997, 17, pages
2463-2465 discloses a special process for the manufacture of
asymmetrically substituted diaryliodonium triflates and
trifluoroacetates, which can be used to prepare
4-tert-butylphenyl-2'-met- hylphenyl-iodonium triflate and
trifluoroacetate, respectively.
[0003] The hitherto known iodonium-salt-containing
radiation-reactive compositions available for technical uses have a
number of disadvantages that are attributable to the iodonium salts
used. For example, diphenyliodonium salts have poor solubility in
the formulations, which limits their use in practice since only a
low concentration of the iodonium salt can be used, otherwise there
is a risk that it will crystallise out. Moreover, phenyliodonium
salts release benzene as a photoproduct, which can migrate out of
the cured compound or coating (e.g. printing ink) into the
substrate or is released into the environment and is highly
undesirable for toxicological reasons (e.g. in the printing of
foodstuffs packaging). Whilst the substitution of one of the phenyl
rings by longer-chained alkyl or alkoxy substituents can improve
the solubility, the disadvantage of the formation of benzene
remains. Large substituents generally not only reduce the
reactivity, but also make it significantly more difficult to handle
the compounds, which are then no longer obtained in crystalline
form and can be prepared only with difficulty in the high purity
that is required especially for use in the field of
microelectronics. It has also been shown that phenylaryliodonium
salts, from which benzene may be produced upon exposure, give a
positive reaction in the AMES test, which is used for initial
detection of mutagenic potential, that is to say they are suspected
of having mutagenic activity. It has now been found that
radiation-sensitive compositions comprising
[0004] (a1) a cationically or acid-catalytically polymerisable or
crosslinkable compound, or
[0005] (a2) a compound that increases its solubility in a developer
under the action of acid; and
[0006] (b) at least one diaryliodonium salt of formula I 2
[0007] wherein
[0008] X is branched C.sub.3-C.sub.20alkyl or
C.sub.3-C.sub.8cycloalkyl;
[0009] X.sub.1 is hydrogen, linear C.sub.1-C.sub.20alkyl, branched
C.sub.3-C.sub.20alkyl or C.sub.3-C.sub.8cycloalkyl; with the
proviso that the sum of the carbon atoms in X and X.sub.1 is at
least 4;
[0010] Y is linear C.sub.1-C.sub.10alkyl, branched
C.sub.3-C.sub.10alkyl or C.sub.3-C.sub.8cycloalkyl;
[0011] A.sup.- is a non-nucleophilic anion, selected from the group
(BF.sub.4).sup.-, (SbF.sub.6).sup.-, (PF6).sup.-,
(B(C.sub.6F.sub.5)).sub- .4.sup.-, C.sub.1-C.sub.20alkylsulfonate,
C.sub.2-C.sub.20haloalkylsulfona- te, unsubstituted
C.sub.6-C.sub.10arylsulfonate, camphorsulfonate,
C.sub.1-C.sub.20-perfluoroalkylsulfonylmethide,
C.sub.1-C.sub.20-perfluor- oalkylsulfonylimide, and
C.sub.6-C.sub.10arylsulfonate substituted by halogen, NO.sub.2,
C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.12halo-alkyl,
C.sub.1-C.sub.12alkoxy or by COOR.sub.1; and
[0012] R.sub.1 is C.sub.1-C.sub.20alkyl, phenyl, benzyl; or phenyl
mono- or poly-substituted by C.sub.1-C.sub.12alkyl,
C.sub.1-C.sub.12alkoxy or by halogen;
[0013] with the proviso that the two phenyl rings on the iodine
atom are not identically substituted; have an optimum balance
between high sensitivity, good storage stability, good solubility
and a low tendency to crystallise.
[0014] Linear C.sub.1-C.sub.20alkyl is, for example,
C.sub.1-C.sub.12-, C.sub.1-C.sub.8-, C.sub.1-C.sub.6- or
C.sub.1-C.sub.4-alkyl. Examples thereof include methyl, ethyl,
propyl, n-butyl, n-pentyl, n-hexyl, n-heptyl, n-octyl, n-nonyl,
n-decyl, n-undecyl, n-dodecyl, n-tetradecyl, n-pentadecyl,
n-hexadecyl, n-heptadecyl, n-octadecyl, n-nonadecyl and n-icosyl.
For example, Y is C.sub.1-C.sub.8alkyl, especially
C.sub.1-C.sub.6alkyl, preferably C.sub.1-C.sub.4alkyl, such as, for
example, methyl or n-butyl. Special preference is given to
methyl.
[0015] Branched C.sub.3-C.sub.20alkyl is, for example,
C.sub.3-C.sub.12-, C.sub.3-C.sub.8-, C.sub.3-C.sub.6- or
C.sub.3-C.sub.4-alkyl. Examples thereof include branched propyl,
such as isopropyl, branched butyl, such as sec-butyl, isobutyl or
tert-butyl, branched pentyl, such as 2-methylbutyl, 3-methylbutyl
or 1-methylbutyl, branched hexyl, such as 1-methylpentyl,
2-methylpentyl or 4-methylpentyl, branched heptyl, such as
1-methylhexyl, 1-ethylpentyl, 4-ethylpentyl, 1-methylhexyl or
5-methylhexyl, branched octyl, such as 2,4,4-trimethylpentyl,
2-ethylhexyl or 1-methylheptyl, branched nonyl, branched decyl,
branched undecyl, branched dodecyl, branched tetradecyl, branched
pentadecyl, branched hexadecyl, branched heptadecyl, branched
octadecyl, branched nonadecyl and branched icosyl. For example, Y
is branched C.sub.3-C.sub.8alkyl, especially branched
C.sub.3-C.sub.6alkyl, preferably branched C.sub.3-C.sub.4alkyl,
such as, for example, isopropyl, sec-butyl, isobutyl or
tert-butyl.
[0016] Branched C.sub.4-C.sub.20alkyl can have the above-mentioned
meanings up to the corresponding number of carbon atoms. X is, for
example, C.sub.4-C.sub.12- or C.sub.4-C.sub.8-alkyl, such as
sec-butyl, iso-butyl, tert-butyl or tert-amyl, especially isobutyl
or tert-amyl.
[0017] C.sub.1-C.sub.20Alkyl is linear or branched and is, for
example, C.sub.1-C.sub.12-, C.sub.1-C.sub.8-, C.sub.1-C.sub.6- or
C.sub.1-C.sub.4-alkyl. Examples thereof include methyl, ethyl,
propyl, isopropyl, n-butyl, sec-butyl, isobutyl, tert-butyl,
pentyl, hexyl, heptyl, 2,4,4-trimethylpentyl, 2-ethylhexyl, octyl,
nonyl, decyl, undecyl, dodecyl, tetradecyl, pentadecyl, hexadecyl,
heptadecyl, octadecyl, nonadecyl and icosyl. C.sub.1-C.sub.12Alkyl
is likewise linear or branched and has the above-mentioned meanings
up to the corresponding number of carbon atoms.
[0018] C.sub.3-C.sub.8Cycloalkyl is, for example, cyclopropyl,
cyclopentyl, cyclohexyl or cyclooctyl, especially cyclopentyl or
cyclohexyl, preferably cyclohexyl.
[0019] Halogen is fluorine, chlorine, bromine or iodine, especially
chlorine or fluorine, preferably fluorine.
[0020] C.sub.1-C.sub.20Haloalkyl is a mono- or
poly-halo-substituted C.sub.1-C.sub.20alkyl. The alkyl moiety can
be substituted by a plurality of identical halogen atoms or,
alternatively, by different halogen atoms. When
C.sub.1-C.sub.20alkyl is mono- or poly-halo-substituted, there are,
for example, from 1 to 3, or 1 or 2, halogen substituents present
on the alkyl moiety.
[0021] C.sub.1-C.sub.20Alkylsulfonate is RSO3.sup.- wherein R is
linear or branched C.sub.1-C.sub.20alkyl as described above.
Examples thereof include methylsulfonate, ethylsulfonate,
propylsulfonate, pentyl-sulfonate and hexylsulfonate.
[0022] C.sub.2-C.sub.20Haloalkylsulfonate is RSO3.sup.- wherein R
is halo-substituted C.sub.2-C.sub.20alkyl, C.sub.2-C.sub.10-,
C.sub.2-C.sub.8- or C.sub.4-C.sub.8-alkyl. Examples thereof include
C.sub.2F.sub.5SO.sub.3.sup.-, C.sub.4F.sub.9SO.sub.3.sup.- and
C.sub.8F.sub.17SO.sub.3.sup.-. Unsubstituted
C.sub.6-C.sub.10arylsulfonat- e is RSO.sub.3.sup.- wherein R is
C.sub.6-C.sub.10aryl, e.g. phenyl or naphthyl.
[0023] Alkyl-substituted arylsulfonates are, for example,
toluenesulfonate, 2,4,6-trimethylbenzene-sulfonate,
2,4,6-tris(isopropyl)benzenesulfonate, 4-tert-butylbenzenesulfonate
and 4-dodecyl-benzenesulfonate.
[0024] Halo-substituted arylsulfonates are, for example,
4-chlorobenzenesulfonate, 4-fluoro-benzenesulfonate,
2,4,6-trifluorobenzenesulfonate and
pentafluorobenzenesulfonate.
[0025] Camphorsulfonate is 3
[0026] C.sub.1-C.sub.12Alkoxy denotes linear or branched radicals
and is, for example, C.sub.1-C.sub.8-, C.sub.1-C.sub.6- or
C.sub.1-C.sub.4-alkoxy. Examples thereof include methoxy, ethoxy,
propoxy, isopropoxy, n-butyloxy, sec-butyloxy, isobutyloxy,
tert-butyloxy, pentyloxy, hexyloxy, heptyloxy,
2,4,4-trimethyl-pentyloxy, 2-ethylhexyloxy, octyloxy, nonyloxy,
decyloxy and dodecyloxy, especially methoxy, ethoxy, propoxy,
isopropoxy, n-butyloxy, sec-butyloxy, isobutyloxy and
tert-butyloxy, preferably methoxy.
[0027] Mono- or poly-substituted phenyl is mono- to
penta-substituted, for example mono-, di- or tri-substituted,
especially mono- or di-substituted.
[0028] C.sub.1-C.sub.20-Perfluoroalkylsulfonylmethide is 4
[0029] C.sub.11-C.sub.20-perfluoroalkylsulfonyl-imide is
Ra--SO.sub.2--{overscore (N)}--SO.sub.2R.sub.b, wherein R.sub.a,
R.sub.b and R.sub.c independently of one another are
C.sub.1-C.sub.20perfluoroalk- yl which is unsubstituted or is
substituted by N(R.sub.d)(R.sub.e), or R.sub.a, R.sub.b and R.sub.c
are phenyl substituted by CF.sub.3; or R.sub.a, and R.sub.b
together are C.sub.1-C.sub.6-perfluoroalkylene, which optionally is
interrupted by --O--; R.sub.d and R.sub.e independently of one
another are C.sub.1-C.sub.12alkyl or R.sub.d and R.sub.e together
are C.sub.1-C.sub.6perfluorolkylene, which optionally is
interrupted by O or N(C.sub.1-C.sub.12-Alkyl). Perfluoroalkyl is
alkyl which is fully substituted by fluoro, i.e. the hydrogen atoms
are replaced by fluoro. The same applies for the perfluoroalkylene.
Examples of su ch anions are (C.sub.2F.sub.5SO.sub.2).sub.2N.sup.-,
(C.sub.4F.sub.9SO.sub.2).sub.2N.sup.-,
(C.sub.8F.sub.17SO.sub.2).sub.3C.s- up.-,
(CF.sub.3SO.sub.2).sub.3C.sup.-, (CF.sub.3SO.sub.2).sub.2N.sup.-,
(C.sub.4F.sub.9SO.sub.2).sub.3C.sup.-,
(CF.sub.3SO.sub.2).sub.2(C.sub.4F.- sub.9SO.sub.2)C.sup.-,
(CF.sub.3SO.sub.2)(C.sub.4F.sub.9SO.sub.2)N.sup.-,
[(3,5-bis(CF.sub.3).sub.- 5
[0030] Such anions are known the person skilled in the art. The
anions as well as their preparation are described e.g. in U.S. Pat.
No. 5,554,664.
[0031] The position of the radicals X and Y on the phenyl rings of
the iodonium salt compound of formula I is, for example, in the
4,4'-position, the 4,2'-position or the 4,3'-position, especially
in the 4,4'-position or in the 4,2'-position, preferably in the
4,4'-position.
[0032] The position of the radicals X, X.sub.1 and Y on the phenyl
rings of the iodonium salt compound of formula I is, for example,
in the 2,4,4'-position, 2,4,2'-position or the 2,4,3'-position,
especially in the 2,4,4'-position or the 2,4,2'-position,
preferably in the 2,4,4'-position.
[0033] X is branched C.sub.3-C.sub.20alkyl or
C.sub.3-C.sub.8cycloalkyl, preferably branched
C.sub.3-C.sub.8alkyl, cyclohexyl or cyclopentyl, especially
branched C.sub.3-C.sub.4alkyl or cyclohexyl, for example isopropyl,
isobutyl, sec-butyl or tert-butyl.
[0034] X.sub.1 is hydrogen, linear C.sub.1-C.sub.20alkyl, branched
C.sub.3-C.sub.20alkyl or C.sub.3-C.sub.8cycloalkyl, preferably
hydrogen, linear C.sub.1-C.sub.10alkyl, branched
C.sub.3-C.sub.8alkyl, especially hydrogen or branched
C.sub.3-C.sub.4-alkyl. X.sub.1 is especially preferably
hydrogen.
[0035] The sum of the carbon atoms in the substituents X and X, in
the compounds according to the invention is always at least 4, that
is to say the sum is 4 or greater than 4, for example from 4 to 40,
from 4 to 20, from 4 to 10, from 4 to 8, from 5 to 40, from 6 to
40, etc.
[0036] Y is linear C.sub.1-C.sub.10alkyl, branched
C.sub.3-C.sub.10alkyl or C.sub.3-C.sub.8cycloalkyl, preferably
linear C.sub.1-C.sub.8- or linear C.sub.1-C.sub.6-alkyl, branched
C.sub.3-C.sub.8- or branched C.sub.3-C.sub.6-alkyl, cyclohexyl or
cyclopentyl, for example isopropyl or linear
C.sub.1-C.sub.4alkyl.
[0037] A is a non-nucleophilic anion, selected from the group
(BF.sub.4).sup.-, (SbF.sub.6).sup.-, (PF.sub.6).sup.-,
(B(C.sub.6F.sub.5)).sub.4.sup.-, C.sub.1-C.sub.20alkylsulfonate,
C.sub.2-C.sub.20haloalkylsulfonate, unsubstituted
C.sub.6-C.sub.10arylsul- fonate, camphorsulfonate,
C.sub.1-C.sub.20-perfluoroalkylsulfonylmethide,
C.sub.1-C.sub.20-perfluoroalkylsulfonylimide, and
C.sub.6-Cloarylsulfonat- e substituted by halogen, NO.sub.2,
C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.12halo-alkyl,
C.sub.1-C.sub.12alkoxy or by COOR.sub.1; e.g. selected from the
group (SbF.sub.6).sup.-, (PF.sub.6).sup.-,
(B(C.sub.6F.sub.5)).sub.4.sup.-,
C.sub.2-C.sub.20haloalkylsulfonate, camphorsulfonate,
C.sub.1-C.sub.12alkylsulfonate, phenylsulfonate and p
methylphenylsulfonate; especially selected from the group
(SbF.sub.6).sup.-, (PF.sub.6).sup.-,
(B(C.sub.6F.sub.5)).sub.4.sup.- and
C.sub.2-C.sub.20haloalkylsulfonate.
[0038] A characterising feature of the compounds of formula I
according to the invention is that the two phenyl rings on the
iodine atom are not identically substituted, that is to say they
are "asymmetric" iodonium salts. X or X.sub.1 and Y are thus
different in each case. It is also to be noted that one phenyl ring
is always substituted at least by a branched alkyl group or by
cycloalkyl, with the branched alkyl X being at least a C.sub.4alkyl
when X.sub.1 is hydrogen. When X.sub.1 is other than hydrogen, the
branched alkyl X can also be a C.sub.3alkyl. The sum of the carbon
atoms of the radicals X+X.sub.1 is thus always at least 4. A
further feature of the compounds according to the invention is that
both phenyl rings on the iodine atom must carry substituents, so
that the formation of benzene upon cleavage is avoided.
[0039] The compounds according to the invention offer an optimum
balance between the requisite reactivity for a very wide range of
applications (as described below and in the Examples) and good
solubility in the formulations, and they prevent the release of
benzene. Also, relatively low toxicological effect is to be
expected as a result of the substitution.
[0040] General processes for the preparation of aryliodonium salt
compounds are known to the person skilled in the art and are
described in the literature. The photoinitiator compounds of
formula I according to the invention can be obtained analogously to
those processes. For example, compounds of formula I can be
prepared according to the processes described in U.S. Pat. Nos.
4,399,071 and 4,329,300 and in DE 2754853. For example, it is
possible to prepare the hexafluorophosphate salts by exchanging the
anions from the simple salts of the corresponding iodonium
compounds (such as the bissulfates). Those methods have been
published, for example, by Beringer et al. in J. Am. Chem. Soc. 81,
342 (1959). Various methods for the preparation of the
above-mentioned simple salts can also be found in that literature
reference. For example, the reaction of two aromatic compounds with
iodyl sulfate in sulfuric acid, the reaction of two aromatic
compounds with iodate in acetic acid, acetic anhydride, sulfuric
acid, the reaction of two aromatic compounds with iodoacylate in
the presence of an acid, or the condensation of an iodoso compound,
an iodoso diacetate or an iodoxy compound with a different aromatic
compound in the presence of an acid. In some cases it is also
possible to oxidise an aryl iodide in situ, and then condense it
with the other aromatic compound. That variant of the condensation
is carried out, for example, in dilute sulfuric acid (EP
119068).
[0041] Preference is given to radiation-sensitive compositions
wherein in the compounds of formula I X is branched
C.sub.4-C.sub.12alkyl or cyclohexyl.
[0042] Further compositions of interest are those wherein in the
compounds of formula I Y is linear C.sub.1-C.sub.6alkyl or
cyclohexyl.
[0043] Special emphasis is given to compositions according to the
invention wherein in the compounds of formula I A.sup.- is a
non-nucleophilic anion, selected from the group (PF.sub.6).sup.-,
(B(C.sub.6F.sub.5)).sub.4.sup.-, C.sub.1-C.sub.12alkylsulfonate,
C.sub.2-C.sub.12haloalkylsulfonate, unsubstituted phenylsulfonate,
camphorsulfonate, C.sub.1-C.sub.20-perfluoroalkylsulfonylmethide,
C.sub.1-C.sub.20-perfluoroalkylsulfonylimide, and phenylsulfonate
substituted by halogen, NO.sub.2, C.sub.1-C.sub.12alkyl,
C.sub.1-C.sub.12-haloalkyl, C.sub.1-C.sub.12alkoxy or by
COOR.sub.1, in particular A.sup.- is a non-nucleophilic anion,
selected from the group (PF.sub.6).sup.-,
(B(C.sub.6F.sub.5)).sub.4.sup.-, C.sub.1-C.sub.12alkylsulfonate,
C.sub.2-C.sub.12haloalkylsulfonate, unsubstituted phenylsulfonate,
camphorsulfonate, and phenylsulfonate substituted by halogen,
NO.sub.2, C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.12-haloalkyl,
C.sub.1-C.sub.12alkoxy or by COOR.sub.1.
[0044] Special preference is given to radiation-sensitive
compositions wherein in the compounds of formula I
[0045] X is branched C.sub.4-C.sub.6alkyl or cyclohexyl;
[0046] X.sub.1 is hydrogen or branched C.sub.4-C.sub.6alkyl;
[0047] Y is linear C.sub.1-C.sub.4alkyl, branched
C.sub.3-C.sub.4alkyl or cyclohexyl;
[0048] A.sup.- is a non-nucleophilic anion, selected from the group
(PF.sub.6).sup.-, camphorsulfonate and
C.sub.1-C.sub.4alkyl-substituted phenylsulfonate.
[0049] Also of interest are compositions wherein in the compounds
of formula I
[0050] X is branched C.sub.4-C.sub.6alkyl or cyclohexyl;
[0051] Y is linear C.sub.1-C.sub.4alkyl, branched
C.sub.3-C.sub.4alkyl or cyclohexyl;
[0052] A.sup.- is a non-nucleophilic anion, selected from the group
(PF.sub.6).sup.-, (B(C.sub.6F.sub.5)).sub.4.sup.-,
C.sub.1-C.sub.20-alkylsulfonate,
C.sub.1-C.sub.20haloalkylsulfonate, unsubstituted
C.sub.6-C.sub.10arylsulfonate, camphorsulfonate, and
C.sub.6-C.sub.10arylsulfonate substituted by halogen, NO.sub.2,
C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.12halo-alkyl,
C.sub.1-C.sub.12alkoxy or by COOR.sub.1; and
[0053] R.sub.1 is C.sub.1-C.sub.12alkyl, phenyl, benzyl, or phenyl
mono- or poly-substituted by C.sub.1-C.sub.4alkyl.
[0054] Examples of compounds of formula I suitable as component (b)
in the compositions according to the invention include
4-isobutylphenyl-4'-methy- lphenyliodonium hexafluoro-phosphate;
4-isobutylphenyl-4'-methylphenyliodo- nium
pentafluoroethylsulfonate; 4-isobutylphenyl-4'-methylphenyliodonium
tresylate; 4-isobutylphenyl-4'-methylphenyliodonium nonaflate;
4-isobutylphenyl-4'-methylphenyliodonium tosylate;
4-isobutylphenyl-4'-methyl-phenyliodonium 4-methoxyphenylsulfonate;
4-isobutylphenyl-4'-methylphenyliodonium 4-chlorophenylsulfonate;
4-isobutylphenyl-4'-methylphenyliodonium 4-fluorophenylsulfonate;
4-isobutylphenyl-4'-methylphenyliodonium
2,4,6-trimethylphenylsulfonate;
4-isobutylphenyl-4'-methylphenyliodonium
2,4,6-(tri-isopropyl)-phenylsulf- onate;
4-isobutylphenyl-4'-methyl-phenyliodonium
4-dodecyl-phenylsulfonate- ;
4-isobutylphenyl-4'-methylphenyliodonium camphor-10-sulfonate;
4-isobutylphenyl-4'-methylphenyliodonium
tetrakis(pentafluorophenyl)-bora- te;
4-(2-methylbut-2-yl)-phenyl-4'-methylphenyliodonium
hexafluorophosphate;
4-(2-methylbut-2-yl)phenyl-4'-methyl-phenyliodonium
pentafluoroethylsulfonate;
4-(2-methylbut-2-yl)phenyl-4'-methylphenyliodo- nium
tetrakis(pentafluorophenyl)borate;
4-(2-methylbut-2-yl)phenyl-4'-meth- ylphenyliodonium
hexafluorophosphate; 4-(2-methylbut-2-yl)phenyl-4'-methyl-
phenyliodonium pentafluoroethylsulfonate;
4-(2-methylbut-2-yl)phenyl-4'-me- thyl-phenyliodonium nonaflate;
4-(2-methylbut-2-yl)phenyl-4'-methylphenyli- odonium
4-trifluoro-methylphenylsulfonate; 4-(2-methylbut-2-yl)-phenyl-4'--
methylphenyliodonium tosylate;
4-(2-methylbut-2-yl)phenyl-4'-methylphenyli- odonium
camphor-10-sulfonate; 4-cyclohexyl-4'-methylphenyliodonium
hexafluorophosphate; 4-cyclohexyl-4'-methylphenyliodonium
penta-fluoroethylsulfonate; 4-cyclohexyl-4'-methylphenyliodonium
camphor-10-sulfonate; 4-cyclohexyl-4'-methylphenyliodonium
tetrakis(penta-fluorophenyl)borate;
4-cyclohexyl-4'-methyl-phenyliodonium tosylate;
4-tert-butylphenyl-4'-methyiphenyliodonium hexafluorophosphate;
4-tert-butylphenyl-4'-methylphenyliodonium
pentafluoroethylsulfonate;
4-tert-butylphenyl-4'-methylphenyliodonium camphor-10-sulfonate;
4-tert-butylphenyl-4'-methylphenyliodonium
tetrakis(pentafluorophenyl)bor- ate;
4-tert-butylphenyl-4'-methylphenyliodonium
4-chloro-phenylsulfonate;
4-tert-butylphenyl-4'-methylphenyliodonium 4-fluorophenylsulfonate;
4-tert-butylphenyl-4'-methylphenyliodonium
4-methoxyphenylsulf-o-nate;
4-tert-butylphenyl-4'-methylphenyliodonium hexafluorophosphate;
4-isobutylphenyl-4'-methylphenyliodonium nonafluorobutylsulfonate;
4-cyclohexyl-4'-methylphenyliodonium hexafluoroantimonate;
4-(2-methylbut-2-yl)phenyl-4'-methylphenyliodonium
nonafluorobutylsulfonate; 4-isobutyl-phenyl-2'-methylphenyliodonium
hexafluorophosphate; 4-isobutylphenyl-4'-ethylphenyl-iodonium
hexafluorophosphate; 4-(branched dodecyl)-4-methylphenyliodonium
hexafluorophosphate.
[0055] The compounds of formula 1, as described above, are novel
and this invention accordingly relates also thereto. The preferred
meanings are also as given above.
[0056] The compositions according to the invention comprise as
component (a1), for example, resins and compounds that can be
cationically polymerised by alkyl- or aryl-containing cations or by
protons. Examples thereof include cyclic ethers, especially
epoxides and oxetanes, and also vinyl ethers and hydroxy-containing
compounds. Lactone compounds and cyclic thioethers as well as vinyl
thioethers can also be used. Further examples include aminoplastics
or phenolic resole resins. These are especially melamine, urea,
epoxy, phenolic, acrylic, polyester and alkyd resins, but
especially mixtures of acrylic, polyester or alkyd resins with a
melamine resin. These include also modified surface-coating resins,
such as, for example, acrylic-modified polyester and alkyd resins.
Examples of individual types of resins that are included under the
terms acrylic, polyester and alkyd resins are described, for
example, in Wagner, Sarx/Lackkunstharze (Munich, 1971), pages 86 to
123 and 229 to 238, or in Ullmann/Encyclopadie der techn. Chemie,
4.sup.th edition, volume 15 (1978), pages 613 to 628, or Ullmann's
Encyclopedia of Industrial Chemistry, Verlag Chemie, 1991, Vol. 18,
360 ff., Vol. A19, 371 ff. The surface-coating preferably comprises
an amino resin. Examples thereof include etherified and
non-etherified melamine, urea, guanidine and biuret resins. Of
special importance is acid catalysis for the curing of
surface-coatings comprising etherified amino resins, such as, for
example, methylated or butylated melamine resins (N-methoxymethyl-
or N-butoxymethyl-melamine) or methylated/butylated
glycolurils.
[0057] It is possible, for example, to use all customary epoxides,
such as aromatic, aliphatic or cycloaliphatic epoxy resins. These
are compounds having at least one, preferably at least two, epoxy
group(s) in the molecule. Examples thereof are the glycidyl ethers
and symbol 98 .backslash.f "Symbol" .backslash.s 11.beta.-methyl
glycidyl ethers of aliphatic or cycloaliphatic diols or polyols,
e.g. those of ethylene glycol, propane-1,2-diol, propane-1,3-diol,
butane-1,4-diol, diethylene glycol, polyethylene glycol,
polypropylene glycol, glycerol, trimethylolpropane or
1,4-dimethylolcyclohexane or of 2,2-bis(4-hydroxycyclohexyl)propane
and N,N-bis(2-hydroxyethyl)aniline; the glycidyl ethers of di- and
poly-phenols, for example of resorcinol, of
4,4'-dihydroxyphenyl-2,2-propane, of novolaks or of
1,1,2,2-tetrakis(4-hydroxyphenyl)ethane. Examples thereof include
phenyl glycidyl ether, p-tert-butyl glycidyl ether, o-icresyl
glycidyl ether, polytetrahydrofuran glycidyl ether, n-butyl
glycidyl ether, 2-ethylhexyl glycidyl ether, C.sub.12/15alkyl
glycidyl ether and cyclohexanedimethanol diglycidyl ether. Further
examples include N-glycidyl compounds, for example the glycidyl
compounds of ethyleneurea, 1,3-propyleneurea or
5-dimethyl-hydantoin or of
4,4'-methylene-5,5'-tetramethyldihydantoin, or compounds such as
triglycidyl isocyanurate.
[0058] Further examples of glycidyl ether components (a1) that are
used in the formulations according to the invention are, for
example, glycidyl ethers of polyhydric phenols obtained by the
reaction of polyhydric phenols with an excess of chlorohydrin, such
as, for example, epichlorohydrin (e.g. glycidyl ethers of
2,2-bis(2,3-epoxypropoxyphenol)p- ropane. Further examples of
glycidyl ether epoxides that can be used in connection with the
present invention are described, for example, in U.S. Pat. No.
3,018,262 and in "Handbook of Epoxy Resins" by Lee and Neville,
McGraw-Hill Book Co., New York (1967).
[0059] There is also a large number of commercially available
glycidyl ether epoxides that are suitable as component (a1), such
as, for example, glycidyl methacrylate, diglycidyl ethers of
bisphenol A, for example those obtainable under the trade names
EPON 828, EPON 825, EPON 1004 and EPON 1010 (Shell); DER-331,
DER-332 and DER-334 (Dow Chemical); 1,4-butanediol diglycidyl
ethers of phenolformaldehyde novolak, e.g. DEN-431, DEN-438 (Dow
Chemical); and resorcinol diglycidyl ethers; alkyl glycidyl ethers,
such as, for example, C.sub.8-C.sub.10glycidyl ethers, e.g. HELOXY
Modifier 7, C.sub.12-C.sub.14glycidyl ethers, e.g. HELOXY Modifier
8, butyl glycidyl ethers, e.g. HELOXY Modifier 61, cresyl glycidyl
ethers, e.g. HELOXY Modifier 62, p-tert-butylphenyl glycidyl
ethers, e.g. HELOXY Modifier 65, polyfunctional glycidyl ethers,
such as diglycidyl ethers of 1,4-butanediol, e.g. HELOXY Modifier
67, diglycidyl ethers of neopentyl glycol, e.g. HELOXY Modifier 68,
diglycidyl ethers of cyclohexanedimethanol, e.g. HELOXY Modifier
107, trimethylolethane triglycidyl ethers, e.g. HELOXY Modifier 44,
trimethylolpropane triglycidyl ethers, e.g. HELOXY Modifier 48,
polyglycidyl ethers of aliphatic polyols, e.g. HELOXY Modifier 84
(all HELOXY glycidyl ethers are obtainable from Shell).
[0060] Also suitable are glycidyl ethers that comprise copolymers
of acrylic esters, such as, for example, styrene-glycidyl
methacrylate or methyl methacrylate-glycidyl acrylate. Examples
thereof include 1:1 styrene/glycidyl methacrylate, 1:1 methyl
methacrylate/glycidyl acrylate, 62.5:24:13.5 methyl
methacrylate/ethyl acrylate/glycidyl methacrylate.
[0061] The polymers of the glycidyl ether compounds can, for
example, also comprise other functionalities provided that these do
not impair the cationic curing.
[0062] Other glycidyl ether compounds suitable as component (a1)
that are commercially available from Ciba Specialty Chemicals are
polyfunctional liquid and solid novolak glycidyl ether resins, e.g.
PY 307, EPN 1179, EPN 1180, EPN 1182 and ECN 9699.
[0063] It will be understood that mixtures of different glycidyl
ether compounds may also be used as component (a1).
[0064] The glycidyl ethers (a1) are, for example, compounds of
formula II 6
[0065] wherein
[0066] x is a number from 1 to 6; and
[0067] R.sub.5 is a mono- to hexa-valent alkyl or aryl radical.
[0068] Preference is given, for example, to glycidyl ether
compounds of formula II 7
[0069] wherein
[0070] x is the number 1, 2 or 3; and
[0071] R.sub.5 when x=1, is unsubstituted or
C.sub.1-C.sub.12alkyl-substit- uted phenyl, naphthyl, anthracyl,
biphenylyl, C.sub.1-C.sub.20alkyl, or C.sub.2-C.sub.20alkyl
interrupted by one or more oxygen atoms, or
[0072] R.sub.5 when x=2, is 1,3-phenylene, 1,4-phenylene,
C.sub.6-C.sub.10cycloalkylene, unsubstituted or halo-substituted
C.sub.1-C.sub.40alkylene, C.sub.2-C.sub.40alkylene interrupted by
one or more oxygen atoms, or a group 8
[0073] or
[0074] R.sub.5 when x=3, is a radical 9
[0075] y is a number from 1 to 10; and
[0076] R.sub.6 is C.sub.1-C.sub.20alkylene, oxygen or 10
[0077] The glycidyl ethers (a1) are, for example, compounds of
formula IIa 11
[0078] wherein
[0079] R.sub.7 is unsubstituted or
C.sub.1-C.sub.12alkyl-substituted phenyl; naphthyl; anthracyl;
biphenylyl; C.sub.1-C.sub.20alkyl, C.sub.2-C.sub.20alkyl
interrupted by one or more oxygen atoms; or a group of formula
12
[0080] R.sub.5 is phenylene, C.sub.1-C.sub.20alkylene,
C.sub.2-C.sub.20alkylene interrupted by one or more oxygen atoms,
or a group 13
[0081] and
[0082] R.sub.6 is C.sub.1-C.sub.20alkylene or oxygen.
[0083] Preference is given to the glycidyl ether compounds of
formula IIb 14
[0084] wherein
[0085] R.sub.5 is phenylene, C.sub.1-C.sub.20alkylene,
C.sub.2-C.sub.20alkylene interrupted by one or more oxygen atoms,
or a group 15
[0086] and
[0087] R.sub.6 is C.sub.1-C.sub.20alkylene or oxygen.
[0088] Further examples for component (a1) are polyglycidyl ethers
and poly(.beta.-methylglycidyl) ethers obtainable by the reaction
of a compound containing at least two free alcoholic and/or
phenolic hydroxy groups per molecule with the appropriate
epichlorohydrin under alkaline conditions, or alternatively in the
presence of an acid catalyst with subsequent alkali treatment.
Mixtures of different polyols may also be used.
[0089] Such ethers can be prepared with poly(epichlorohydrin) from
acyclic alcohols, such as ethylene glycol, diethylene glycol and
higher poly(oxyethylene) glycols, propane-1,2-diol and
poly(oxypropylene) glycols, propane-1,3-diol, butane-1,4-diol,
poly(oxytetramethylene) glycols, pentane-1,5-diol, hexane-1,6-diol,
hexane-2,4,6-triol, glycerol, 1,1,1-trimethylol-propane,
pentaerythritol and sorbitol, from cycloaliphatic alcohols, such as
resorcitol, quinitol, bis(4-hydroxycyclohexyl)methane,
2,2-bis(4-hydroxycyclohexyl)propane and
1,1-bis-(hydroxymethyl)cyclohex-3-ene, and from alcohols having
aromatic nuclei, such as N,N-bis(2-hydroxyethyl)aniline and
p,p'-bis(2-hydroxyethylamino)diphenylmethane. They can also be
prepared from mononuclear phenols, such as resorcinol and
hydroquinone, and polynuclear phenols, such as
bis(4-hydroxyphenyl)methane, 4,4-dihydroxydiphenyl,
bis(4-hydroxyphenyl)sulfone,
1,1,2,2-tetrakis(4-hydroxyphenyl)ethane,
2,2-bis(4-hydroxyphenyl)-propane (bisphenol A) and
2,2-bis(3,5-dibromo-4-hydroxyphenyl)propane. Further hydroxy
compounds suitable for the preparation of polyglycidyl ethers and
poly(.beta.-methylglycidyl) ethers are the novolaks obtainable by
the condensation of aldehydes, such as formaldehyde, acetaldehyde,
chloral and furfural, with phenols, such as, for example, phenol,
o-cresol, m-cresol, p-cresol, 3,5-dimethylphenol, 4-chlorophenol
and 4-tert-butylphenol.
[0090] Poly(N-glycidyl) compounds can be obtained, for example, by
dehydrochlorination of the reaction products of epichlorohydrin
with amines containing at least two aminohydrogen atoms, such as
aniline, n-butylamine, bis(4-aminophenyl)methane,
bis(4-aminophenyl)-propane, bis-(4-methylaminophenyl)methane and
bis(4-aminophenyl) ether, sulfone and sulfoxide. Further suitable
poly(N-glycidyl) compounds include triglycidyl isocyanurate, and
N,N'-diglycidyl derivatives of cyclic alkyleneureas, such as
ethyleneurea and 1,3-propyleneurea, and hydantoins, such as, for
example, 5,5-dimethylhydantoin.
[0091] Poly(S-glycidyl) compounds are also suitable. Examples
thereof include the di-S-glycidyl derivatives of dithiols, such as
ethane-1,2-dithiol and bis(4-mercaptomethylphenyl) ether.
[0092] There also come into consideration as component (a1) epoxy
resins in which the glycidyl groups or .beta.-methyl glycidyl
groups are bonded to hetero atoms of different types, for example
the N,N,O-triglycidyl derivative of 4-aminophenol, the glycidyl
ether/glycidyl ester of salicylic acid or p-hydroxybenzoic acid,
N-glycidyl-N'-(2-glycidyloxyprop- yl)-5,5-dimethyl-hydantoin and
2-glycidyloxy-1,3-bis(5,5-dimethyl-1-glycid-
ylhydantoin-3-yl)propane.
[0093] Preference is given to diglycidyl ethers of bisphenols.
Examples thereof include diglycidyl ethers of bisphenol A, e.g.
ARALDIT GY 250 from Ciba Specialty Chemicals, diglycidyl ethers of
bisphenol F and diglycidyl ethers of bisphenol S. Special
preference is given to diglycidyl ethers of bisphenol A.
[0094] Further glycidyl compounds of technical importance are the
glycidyl esters of carboxylic acids, especially di- and
poly-carboxylic acids. Examples thereof are the glycidyl esters of
succinic acid, adipic acid, azelaic acid, sebacic acid, phthalic
acid, terephthalic acid, tetra- and hexa-hydrophthalic acid,
isophthalic acid or trimellitic acid, or of dimerised fatty
acids.
[0095] Examples of polyepoxides that are not glycidyl compounds are
the epoxides of vinylcyclohexane and dicyclopentadiene,
3-(3',4'-epoxycyclohexyl)-8,9-epoxy-2,4-dioxaspiro-[5.5]-undecane,
the 3',4'-epoxycyclohexylmethyl esters of
3,4-epoxycyclohexanecarboxylic acid, (3,4-epoxycyclohexyl-methyl
3,4-epoxycyclohexanecarboxylate), butadiene diepoxide or isoprene
diepoxide, epoxidised linoleic acid derivatives or epoxidised
polybutadiene.
[0096] Further suitable epoxy compounds are, for example, limonene
monoxide, epoxidised soybean oil, bisphenol-A and bisphenol-F epoxy
resins, such as, for example, Araldit.RTM. GY 250 (A), Araldit.RTM.
GY 282 (F), Araldit.RTM. GY 285 (F) (Ciba Specialty Chemicals), and
photocurable siloxanes that contain epoxy groups.
[0097] Further suitable cationically polymerisable or crosslinkable
components (a1) can be found, for example, also in U.S. Pat. Nos.
3,117,099, 4,299,938 and 4,339,567.
[0098] From the group of aliphatic epoxides there are suitable
especially the monofunctional symbol .alpha.-olefin epoxides having
an unbranched chain consisting of 10, 12, 14 or 16 carbon
atoms.
[0099] Because nowadays a large number of different epoxy compounds
are commercially available, the properties of the binder can vary
widely. One possible variation, for example depending upon the
intended use of the composition, is the use of mixtures of
different epoxy compounds and the addition of flexibilisers and
reactive diluents.
[0100] The epoxy resins can be diluted with a solvent to facilitate
application, for example when application is effected by spraying,
but the epoxy compound is preferably used in the solvent-less
state. Resins that are viscous to solid at room temperature can be
applied hot.
[0101] Also suitable as component (a1) are all customary vinyl
ethers, such as aromatic, aliphatic or cycloaliphatic vinyl ethers
and also silicon-containing vinyl ethers. These are compounds
having at least one, preferably at least two, vinyl ether groups in
the molecule. Examples of vinyl ethers suitable for use in the
compositions according to the invention include triethylene glycol
divinyl ether, 1,4-cyclohexanedimethanol divinyl ether,
4-hydroxybutyl vinyl ether, the propenyl ether of propylene
carbonate, dodecyl vinyl ether, tert-butyl vinyl ether, tert-amyl
vinyl ether, cyclohexyl vinyl ether, 2-ethylhexyl vinyl ether,
ethylene glycol monovinyl ether, butanediol monovinyl ether,
hexanediol monovinyl ether, 1,4-cyclohexanedimethanol mono-vinyl
ether, diethylene glycol monovinyl ether, ethylene glycol divinyl
ether, ethylene glycol butylvinyl ether, butane-1,4-diol divinyl
ether, hexanediol divinyl ether, diethylene glycol divinyl ether,
triethylene glycol divinyl ether, triethylene glycol methylvinyl
ether, tetra-ethylene glycol divinyl ether, pluriol-E-200 divinyl
ether, polytetrahydrofuran divinyl ether-290, trimethylolpropane
trivinyl ether, dipropylene glycol divinyl ether, octadecyl vinyl
ether, (4-cyclohexyl-methyleneoxyethene)-glutaric acid methyl ester
and (4-butoxyethene)-iso-phthalic acid ester.
[0102] Examples of hydroxy-containing compounds include polyester
polyols, such as, for example, polycaprolactones or polyester
adipate polyols, glycols and polyether polyols, castor oil,
hydroxy-functional vinyl and acrylic resins, cellulose esters, such
as cellulose acetate butyrate, and phenoxy resins.
[0103] Further cationically curable formulations can be found, for
example, in EP 119425.
[0104] As component (a1), preference is given to cycloaliphatic
epoxides, or epoxides based on bisphenol A.
[0105] Accordingly, the invention relates also to a
radiation-sensitive composition wherein component (a1) is at least
one compound selected from the group of cycloaliphatic epoxy
compounds, glycidyl ethers, oxetane compounds, vinyl ethers,
acid-crosslinkable melamine resins, acid-crosslinkable
hydroxymethylene compounds and acid-crosslinkable alkoxymethylene
compounds.
[0106] If desired, the composition according to the invention can
also contain free-radically polymerisable components, such as
ethylenically unsaturated monomers, oligomers or polymers. Suitable
materials contain at least one ethylenically unsaturated double
bond and are capable of undergoing addition polymerisation.
[0107] Examples of suitable monomers that contain an ethylenic
double bond include alkyl and hydroxyalkyl acrylates and
methacrylates, such as methyl, ethyl, propyl, isopropyl, butyl,
hexyl, 2-ethylhexyl and 2-hydroxyethyl (meth)acrylate, stearyl
acrylate and isobornyl acrylates. Further suitable examples include
acrylonitrile, acrylamide, methacrylamide, N-substituted
(meth)acrylamides, vinyl esters, such as vinyl acetate, vinyl
ethers, such as isobutylvinyl ether, styrene, alkyl- and
halo-substituted styrene, N-vinylpyrrolidone, vinyl chloride and
vinylidene chloride.
[0108] Examples of suitable monomers that contain at least two
double bonds include glycerol diacrylates, glycerol triacrylates,
ethylene glycol diacrylates, diethylene glycol diacrylates,
diethylene glycol dimethacrylate, triethylene glycol
dimethacrylates, 1,3-propanediol di-acrylate, 1,3-propanediol
dimethacrylate, neopentyl glycol diacrylates, hexamethylene glycol
diacrylate, bisphenol-A diacrylates,
4,4'-bis(2-acryloyloxyethoxy)diphenylpropane, penta-erythritol
triacrylate or tetraacrylate, pentaerythritol tetramethacrylate,
trimethylolpropane triacrylate, 1,2,4-butanetriol trimethacrylate,
1,4-cyclohexanediol diacrylate, sorbitol hexa-acrylate,
bis[1-(2-acryloxy)]-p-ethoxyphenyldimethylmethane,
bis[1-(3-acryloxy-2-hydroxy)]-p-propoxyphenyldimethylmethane and
trishydroxyethyl isocyanurate trimethacrylate; the bis-acrylates
and bis-methacrylates of poly(ethylene glycol) having a molecular
weight of from 200 to 500, diallyl phthalate, divinyl succinate,
divinyl adipate and divinyl phthalate, vinyl acrylate, divinyl
benzene, triallyl phosphate, triallyl isocyanurates and
tris(2-acryloyl-ethyl) isocyanurate.
[0109] Examples of higher-molecular-weight (oligomeric)
poly-unsaturated compounds include acrylated epoxy resins,
acrylated or vinyl ether- or epoxy-group-containing polyesters,
polyurethanes and polyethers. Further examples of unsaturated
oligomers are unsaturated polyester resins, which are usually
prepared from maleic acid, phthalic acid and one or more diols and
have molecular weights of approximately from 500 to 3000. Vinyl
ether monomers and oligomers, and maleate-terminated oligomers
having polyester, poly-urethane, polyether, polyvinyl ether and
epoxy main chains can also be used. Also copolymers of vinyl ethers
and monomers which are functionalised with maleic acid, as
described in WO 90/01512, are also very suitable. Also suitable,
however, are copolymers of monomers functionalised with vinyl ether
and maleic acid. Such unsaturated oligomers can also be referred to
as pre-polymers.
[0110] Functionalised acrylates are also suitable. Examples of
suitable monomers that are normally used to form the base polymer
(the backbone) of the functionalised acrylate or methacrylate
polymer are acrylate, methacrylate, methyl methacrylate, ethyl
acrylate, ethyl methacrylate, n-butyl acrylate, n-butyl
methacrylate, isobutyl acrylate, isobutyl methacrylate,
2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, etc. In addition,
suitable amounts of functional monomers are copolymerised during
the polymerisation in order to obtain the functional polymers.
Acid-functionalised acrylate or methacrylate polymers are obtained
using acid-functional monomers, such as acrylic acid and
methacrylic acid. Hydroxy-functional acrylate or methacrylate
polymers are obtained from hydroxy-functional monomers, such as
2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate and
3,4-dihydroxybutyl meth-acrylate. Epoxy-functionalised acrylate or
methacrylate polymers are obtained using epoxy-functional monomers,
such as glycidyl methacrylate, 2,3-epoxybutyl methacrylate,
3,4-epoxybutyl methacrylate, 2,3-epoxycyclohexyl methacrylate,
10,11-epoxyundecyl meth-acrylate, etc. It is also possible to
obtain isocyanate-functional polymers from
isocyanate-functionalised monomers, such as
meta-isopropenyl-.alpha.,.alpha.-dimethylbenzyl isocyanate.
[0111] Especially suitable are, for example, esters of
ethylenically unsaturated mono- or polyfunctional carboxylic acids
and polyols or polyepoxides, and polymers having ethylenically
unsaturated groups in the chain or in side groups, such as
unsaturated polyesters, polyamides and polyurethanes and copolymers
thereof, alkyd resins, polybutadiene and butadiene copolymers,
polyisoprene and isoprene copolymers, polymers and copolymers
having (meth)acrylic groups in side chains, and mixtures of one or
more such polymers.
[0112] Examples of suitable mono- or poly-functional unsaturated
carboxylic acids are acrylic acid, methacrylic acid, crotonic acid,
itaconic acid, cinnamic acid, maleic acid and fumaric acid and
unsaturated fatty acids, such as linolenic acid or oleic acid.
Preference is given to acrylic acid and methacrylic acid.
[0113] Mixtures of saturated di- or poly-carboxylic acids with
unsaturated carboxylic acids may, however, also be used. Examples
of suitable saturated di- or poly-carboxylic acids include, for
example, tetrachlorophthalic acid, tetrabromophthalic acid,
phthalic acid anhydride, adipic acid, tetrahydrophthalic acid,
isophthalic acid, terephthalic acid, trimellitic acid,
heptanedicarboxylic acid, sebacic acid, dodecanedicarboxylic acid,
hexahydrophthalic acid, etc.
[0114] Suitable polyols are aromatic and especially aliphatic and
cycloaliphatic polyols. Examples of aromatic polyols are
hydroquinone, 4,4'-dihydroxydiphenyl,
2,2-di(4-hydroxyphenyl)-propane, and novolaks and resoles. Examples
of polyepoxides are those based on the polyols mentioned,
especially the aromatic polyols and epichlorohydrin. Also suitable
as polyols are polymers and copolymers containing hydroxyl groups
in the polymer chain or in side groups, such as polyvinyl alcohol
and copolymers thereof or polymethacrylic acid hydroxyalkyl esters
or copolymers thereof. Further suitable polyols are oligoesters
having hydroxyl terminal groups.
[0115] Examples of aliphatic and cycloaliphatic polyols are
alkylenediols having preferably from 2 to 12 carbon atoms, such as
ethylene glycol, 1,2- or 1,3-propanediol, 1,2-, 1,3- or
1,4-butanediol, pentanediol, hexanediol, octanediol, dodecanediol,
diethylene glycol, triethylene glycol, polyethylene glycols having
molecular weights of preferably from 200 to 1500,
1,3-cyclopentanediol, 1,2-, 1,3- or 1,4-cyclohexanediol,
1,4-dihydroxymethylcyclohexane, glycerol,
tris(.beta.-hydroxyethyl)amine, trimethylolethane,
trimethylolpropane, pentaerythritol, dipentaerythritol and
sorbitol.
[0116] The polyols may be partially or fully esterified by one or
by different unsaturated carboxylic acid(s), it being possible for
the free hydroxyl groups in partial esters to have been modified,
for example etherified, or esterified by other carboxylic
acids.
[0117] Examples of esters are:
[0118] trimethylolpropane triacrylate, trimethylolethane
triacrylate, trimethylolpropane trimethacrylate, trimethylolethane
trimethacrylate, tetramethylene glycol dimethacrylate, triethylene
glycol dimethacrylate, tetraethylene glycol diacrylate,
pentaerythritol diacrylate, penta-erythritol triacrylate,
pentaerythritol tetraacrylate, dipentaerythritol diacrylate,
dipenta-erythritoj triacrylate, dipentaerythritol tetraacrylate,
dipentaerythritol pentaacrylate, dipenta-erythritol hexaacrylate,
tripentaerythritol octaacrylate, pentaerythritol dimethacrylate,
penta-erythritol trimethacrylate, dipentaerythritol dimethacrylate,
dipentaerythritol tetrameth-acrylate, tripentaerythritol
octamethacrylate, pentaerythritol diitaconate, dipentaerythritol
trisitaconate, dipentaerythritol pentaitaconate, dipentaerythritol
hexaitaconate, ethylene glycol diacrylate, 1,3-butanediol
diacrylate, 1,3-butanediol dimethacrylate, 1,4-butanediol
diitaconate, sorbitol triacrylate, sorbitol tetraacrylate,
pentaerythritol-modified triacrylate, sorbitol tetramethacrylate,
sorbitol pentaacrylate, sorbitol hexaacrylate, oligoester acrylates
and methacrylates, glycerol di- and tri-acrylate, 1,4-cyclohexane
diacrylate, bisacrylates and bismethacrylates of polyethylene
glycol having a molecular weight of from 200 to 1500, and mixtures
thereof.
[0119] Suitable unsaturated, free-radically polymerisable compounds
are also the amides of the same or different unsaturated carboxylic
acids and aromatic, cycloaliphatic and aliphatic polyamines having
preferably from 2 to 6, especially from 2 to 4, amino groups.
Examples of such polyamines are ethylenediamine, 1,2- or
1,3-propylenediamine, 1,2-, 1,3- or 1,4-butylenediamine,
1,5-pentylenediamine, 1,6-hexylenediamine, octylenediamine,
dodecyl-enediamine, 1,4-diaminocyclohexane, isophoronediamine,
phenylenediamine, bisphenylenediamine, di-,-aminoethyl ether,
diethylenetriamine, triethylenetetraamine and
di(.beta.-aminoethoxy)- or di-(.beta.-aminopropoxy)-ethane. Further
suitable polyamines are polymers and copolymers which may have
additional amino groups in the side chain and oligoamides having
amino terminal groups. Examples of such unsaturated amides are:
methylene bisacrylamide, 1,6-hexamethylene bisacrylamide,
bis(methacrylamidopropoxy)ethane, .beta.-methacrylamidoethyl
methacrylate and N-[(.beta.-hydroxyethoxy)ethy- l]-acrylamide.
[0120] Suitable unsaturated polyesters and polyamides are derived,
for example, from maleic acid and diols or diamines. The maleic
acid may have been partially replaced by other dicarboxylic acids.
They can be used together with ethylenically unsaturated
comonomers, for example styrene. The polyesters and polyamides can
also be derived from dicarboxylic acids and ethylenically
unsaturated diols or diamines, especially from those having longer
chains of, for example, from 6 to 20 carbon atoms. Examples of
polyurethanes are those composed of saturated or unsaturated
diisocyanates and saturated or unsaturated diols.
[0121] Polybutadiene and polyisoprene and copolymers thereof are
known. Suitable comonomers include, for example, olefins, such as
ethylene, propene, butene, hexene, (meth)acrylates, acrylonitrile,
styrene and vinyl chloride. Polymers having (meth)acrylate groups
in the side chain are also known. They may be, for example,
reaction products of novolak-based epoxy resins with (meth)acrylic
acid; homo- or co-polymers of vinyl alcohol or hydroxyalkyl
derivatives thereof that have been esterified with (meth)acrylic
acid; or homo- and co-polymers of (meth)acrylates that have been
esterified with hydroxyalkyl (meth)acrylates.
[0122] It is also possible to use compounds that can be crosslinked
equally both free-radically and cationically. Such compounds
contain, for example, both a vinyl group and a cycloaliphatic epoxy
group. Examples thereof are described in JP-A-2-289611 and U.S.
Pat. No. 6,048,953.
[0123] Mixtures of two or more such free-radically polymerisable
materials can also be used.
[0124] Binders may also be added to the compositions according to
the invention, this being especially advantageous when the
photopolymerisable compounds are liquid or viscous substances. The
amount of binder may be, for example, from 5 to 95% by weight,
preferably from 10 to 90% by weight and especially from 40 to 90%
by weight, based on total solids. The binder will be selected
according to the field of use and the properties required therefor,
such as developability in aqueous and organic solvent systems,
adhesion to substrates and sensitivity to oxygen.
[0125] Suitable binders are, for example, polymers having a
molecular weight of approximately from 2000 to 2 000 000,
preferably from 5000 to 1 000 000. Examples thereof are: homo- and
copolymers of acrylates and methacrylates, for example copolymers
of methyl methacrylate/ethyl acrylate/methacrylic acid,
poly(methacrylic acid alkyl esters), poly(acrylic acid alkyl
esters); phenolic resins, cellulose derivatives, such as cellulose
esters and ethers, for example cellulose acetate, cellulose acetate
butyrate, methyl cellulose, ethyl cellulose; polyvinyl butyral,
polyvinylformal, polyolefins, cyclised rubber, polyethers, such as
poly-ethylene oxide, polypropylene oxide, polytetrahydrofuran;
polystyrene, polycarbonate, poly-urethane, chlorinated polyolefins,
polyvinyl chloride, copolymers of vinyl chloride/vinylidene
chloride, copolymers of vinylidene chloride with acrylonitrile,
methyl methacrylate and vinyl acetate, polyvinyl acetate,
copoly(ethylene/vinyl acetate), polymers such as polycaprolactam
and poly(hexamethyleneadipamide), polyesters such as poly(ethylene
glycol terephthalate) and poly(hexamethylene glycol succinate); and
polyamides.
[0126] The resins mentioned below under (C1) may also be used as
free-radically curable component. Of particular interest are, for
example, unsaturated acrylates having reactive functional groups.
The reactive functional group may be selected, for example, from a
hydroxyl, thiol, isocyanate, epoxy, anhydride, carboxyl, amino or
blocked amino group. Examples of OH-group-containing unsaturated
acrylates are hydroxyethyl and hydroxybutyl acrylates and also
glycidyl acrylates.
[0127] The unsaturated compounds may also be used in admixture with
non-photopolymerisable film-forming components. These may be, for
example, polymers that can be dried physically or solutions thereof
in organic solvents, such as nitrocellulose or cellulose
acetobutyrate. They may alternatively be chemically or thermally
curable resins, such as polyisocyanates, polyepoxides or melamine
resins. Drying oils, such as linseed oil, linseed-oil-modified
alkyd resins, tung oil and soybean oil, can also be present. The
concomitant use of thermally curable resins is important for use in
so-called hybrid systems which are photopolymerised in a first step
and crosslinked by thermal aftertreatment in a second step.
[0128] Thus, the radiation-curable compositions of the present
invention may also comprise:
[0129] (A1) compounds having one or more free-radically
polymerisable double bonds that additionally contain at least one
further functional group that is reactive in addition and/or
condensation reactions (examples are given above),
[0130] (A2) compounds having one or more free-radically
polymerisable double bonds that additionally contain at least one
further functional group that is reactive in addition and/or
condensation reactions, the additional functional group being
complementary to or reactive towards the additional functional
group of component (A1),
[0131] (A3) at least one monomeric, oligomeric and/or polymeric
compound having at least one functional group that is reactive in
addition and/or condensation reactions towards the functional
groups of component (A1) or (A2) that are present in addition to
the free-radically polymerisable double bonds.
[0132] Component (A2) in each case carries the groups complementary
to or reactive towards component (A1). Different types of
functional groups may also be present in a component. Component
(A3) provides a component that contains further functional groups
that are reactive in addition and/or condensation reactions and
that are able to react with the functional groups of (A1) or (A2)
that are present in addition to the free-radically polymerisable
double bonds. Component (A3) contains no free-radically
polymerisable double bonds. Examples of such combinations (A1),
(A2), (A3) can be found in WO 99755785. Examples of suitable
functional groups are hydroxyl, isocyanate, epoxy, anhydride,
carboxyl and blocked amino groups. Examples have been described
above.
[0133] Constituents of the thermally curable component (C) are, for
example, thermally curable lacquer or coating system constituents
customary in the art. Component (C) accordingly may consist of a
large number of constituents.
[0134] Examples of component (C) include oligomers and/or polymers
derived from .alpha.,.beta.-unsaturated acids and derivatives
thereof, for example polyacrylates and polymethacrylates,
polymethyl methacrylates impact-resistant-modified with butyl
acrylate, polyacrylamides and polyacrylonitriles. Further examples
of component (C) are urethanes, polyurethanes derived on the one
hand from polyethers, polyesters and polyacrylates having free
hydroxyl groups and on the other hand from aliphatic or aromatic
polyisocyanates, and educts thereof. Component (C) accordingly also
includes, for example, crosslinkable acrylic resins derived from
substituted acrylic acid esters, for example epoxy acrylates,
urethane acrylates and polyester acrylates. Alkyd resins, polyester
resins and acrylate resins and modifications thereof that are
crosslinked with melamine resins, urea resins, isocyanates,
isocyanurates, polyisocyanates, polyisocyanurates and epoxy resins,
may also be a constituent of component (C).
[0135] Component (C) is, for example, generally a film-forming
binder based on a thermoplastic or thermocurable resin, especially
on a thermocurable resin. Examples thereof are alkyd, acrylic,
polyester, phenolic, melamine, epoxy and polyurethane resins and
mixtures thereof. Examples thereof can be found, for example, in
Ullmann's Encyclopedia of Industrial Chemistry, 5th Ed., Vol. A18,
pp. 368-426, VCH, Weinheim 1991.
[0136] Component (C) may also be a cold-curable or hot-curable
binder, in which case the addition of a curing catalyst may be
advantageous. Suitable catalysts that accelerate the full cure of
the binder can be found, for example, in Ullmann's Encyclopedia of
Industrial Chemistry, Vol. A18, page 469, VCH Verlagsgesellschaft,
Weinheim 1991.
[0137] Specific examples of binders suitable as component (C)
are:
[0138] 1. surface-coatings based on cold- or hot-crosslinkable
alkyd, acrylate, polyester, epoxy or melamine resins or mixtures of
such resins, optionally with the addition of a curing catalyst;
[0139] 2. two-component polyurethane surface-coatings based on
hydroxyl-group-containing acrylate, polyester or polyether resins
and aliphatic or aromatic isocyanates, isocyanurates or
polyisocyanates;
[0140] 3. one-component polyurethane surface-coatings based on
blocked isocyanates, isocyanurates or polyisocyanates, which are
de-blocked during heating; it is also possible to add melamine
resins as appropriate;
[0141] 4. one-component polyurethane surface-coatings based on
aliphatic or aromatic urethanes or polyurethanes and
hydroxyl-group-containing acrylate, polyester or polyether
resins;
[0142] 5. one-component polyurethane surface-coatings based on
aliphatic or aromatic urethane acrylates or polyurethane acrylates
having free amine groups in the urethane structure and melamine
resins or polyether resins, optionally with the addition of a
curing catalyst;
[0143] 6. two-component surface-coatings based on (poly)ketimines
and aliphatic or aromatic isocyanates, isocyanurates or
polyisocyanates;
[0144] 7. two-component surface-coatings based on (poly)ketimines
and an unsaturated acrylate resin or a polyacetoacetate resin or a
methacrylamidoglycolate methyl ester;
[0145] 8. two-component surface-coatings based on carboxyl- or
amino-group-containing polyacrylates and polyepoxides;
[0146] 9. two-component surface-coatings based on
anhydride-group-containi- ng acrylate resins and a polyhydroxy or
polyamino component;
[0147] 10. two-component surface-coatings based on
acrylate-containing anhydrides and polyepoxides;
[0148] 11. two-component surface-coatings based on (poly)oxazolines
and anhydride-group-containing acrylate resins or unsaturated
acrylate resins or aliphatic or aromatic isocyanates, isocyanurates
or polyisocyanates;
[0149] 12. two-component surface-coatings based on unsaturated
polyacrylates and polymalonates;
[0150] 13. thermoplastic polyacrylate surface-coatings based on
thermoplastic acrylate resins or extrinsically crosslinking
acrylate resins in combination with etherified melamine resins;
[0151] 14. surface-coating systems based on urethane (meth)acrylate
having (meth)acryloyl groups and free isocyanate groups and on one
or more compounds that react with iso-cyanates, for example free or
esterified polyols. Such systems have been published, for example,
in EP 928800.
[0152] Blocked isocyanates that can also be used as component (C)
are described, for example, in Organischer Metallschutz:
Entwicklung und Anwendung von Beschichtungsstoffen, pages 159-160,
Vincentz Verlag, Hanover (1993). These are compounds in which the
highly reactive NCO group is "blocked" by reaction with specific
radicals, for example a primary alcohol, phenol, acetic acid ethyl
ester, .epsilon.-caprolactam, phthalimide, imidazole, oxime or
amine. The blocked isocyanate is stable in liquid systems and also
in the presence of hydroxy groups. Upon heating, the blocking group
(protecting group) is removed again and the NCO group is freed.
[0153] 1-Component (1 C) and 2-component (2C) systems may be used
as component (C). Examples of such systems are described in
Ullmann's Encyclopedia of Industrial Chemistry, Vol. A18, Paints
and Coatings, pages 404-407, VCH Verlagsgesellschaft mbH, Weinheim
(1991).
[0154] It is possible to optimise the composition by specific
adaptation, for example by varying the binder/crosslinking agent
ratios. Such measures will be known to the person skilled in the
art and are customary in coating technology.
[0155] In the curing process according to the invention, component
(C) is preferably a mixture based on acrylate/melamine (and
melamine derivatives), 2-component polyurethane, 1-component
polyurethane, 2-component epoxy/carboxy or 1-component
epoxy/carboxy. Mixtures of such systems are also possible, for
example the addition of melamine (or derivatives thereof) to
1-component polyurethanes.
[0156] Component (C) is preferably a binder based on a polyacrylate
with melamine or on a melamine derivative or a system based on a
polyacrylate and/or polyester polyol with an unblocked
polyisocyanate or polyisocyanurate.
[0157] Component (C) may also comprise monomeric and/or oligomeric
compounds having ethylenically unsaturated bonds (prepolymers) that
additionally contain at least one or more OH, NH.sub.2, COOH, epoxy
or NCO group(s) (=C1) that are capable of reaction with the binder
and/or the crosslinking agent constituent of component (C). After
application and thermal curing, the ethylenically unsaturated bonds
are converted to a crosslinked, high molecular weight form by
irradiation with UV light. Examples of such components (C) are
described, for example, in the above-mentioned publication,
Ullmann's Encyclopedia of Industrial Chemistry, 5th Ed., Vol. A18,
pages 451-453, or by S. Urano, K. Aoki, N. Tsuboniva and R.
Mizuguchi in Progress in Organic Coatings, 20 (1992), 471-486, or
by H. Terashima and O. Isozaki in JOCCA 1992 (6), 222.
[0158] (C1) may, for example, also be an OH-group-containing
unsaturated acrylate, for example hydroxyethyl or hydroxybutyl
acrylate or a glycidyl acrylate. Component (Cl) may be of any
desired structure (for example it may contain units of polyester,
polyacrylate, polyether, etc.), provided that it contains an
ethylenically unsaturated double bond and additionally free OH,
COOH, NH.sub.2, epoxy or NCO groups.
[0159] (C1) may, for example, also be obtained by reacting an
epoxy-functional oligomer with acrylic acid or methacrylic acid. A
typical example of an OH-functional oligomer having vinylic double
bonds is 16
[0160] obtained by reaction of CH.sub.2.dbd.CHCOOH with 17
[0161] Another possible method of obtaining component (C1) is, for
example, the reaction of an oligomer that contains only one epoxy
group and has a free OH group at another position in the
molecule.
[0162] The quantity ratio of the free-radically
radiation-curable-polymeri- sable components to the thermally
polymerisable component (C) in the UV- and thermally-crosslinkable
formulations is not critical. "Dual-cure" systems are known to the
person skilled in the art, who will therefore be familiar with the
optimum mixing ratios of the free-radically- and
thermally-crosslinkable components according to the intended use.
For example, the ratio can be in the range from 5:95 to 95:5, from
20:80 to 80:20 or from 30:70 to 70:30, for example from 40:60 to
60:40.
[0163] Examples of "dual-cure" systems, that is to say systems
comprising both radiation-curable and thermally curable components,
can be found inter alia in U.S. Pat. No. 5,922,473, columns 6 to
10.
[0164] The formulations according to the invention can further
comprise as component (a1) nonaqueous coating compositions based on
an oxidatively drying alkyd resin which contains at least one,
preferably two or more, functional group(s) capable of undergoing
polymerisation or polycondensation reactions in the presence of an
acid. Examples of such resins are vinyl-ether-functionalised alkyd
resins, acetal-functionalised alkyd resins, and/or
alkoxysilane-functionalised alkyd resins, as proposed, e.g., in WO
99/47617. Those modified alkyd resins may be used alone or in
combination with other alkyd resins. At least some of the alkyd
resin composition in the non-aqueous coating is oxidatively drying
as a result of the incorporation of a large number of unsaturated,
aliphatic compounds, at least some of which are
polyunsaturated.
[0165] Formulations containing those modified alkyd resins as
component (a1) may optionally contain, in addition to the
photoinitiator (b), an oxidative dryer. Suitable oxidative dryers
are, for example, metal siccatives. There may be mentioned as
suitable siccatives, for example, the metal salts of
(cyclo)aliphatic acids, such as octanoic acid and naphthenic acid,
the metals to be used being, for example, cobalt, manganese, lead,
zirconium, calcium, zinc and rare earth metals. Mixtures of
siccatives may be used. Preference is given to metal salts of
cobalt, zirconium and calcium, or mixtures thereof. The siccatives
(calculated as metal) are usually used in an amount of from 0.001
to 3% by weight.
[0166] Under certain conditions it may also be advantageous, when
using the modified alkyd resins as component (a1), to use one or
more mono- or bis-acylphosphine oxide photoinitiators in addition
to the diaryliodonium salt of formula (I). Suitable monoacyl- or
bisacyl-phosphine oxide photoinitiators include, for example,
monoacylphosphine oxides such as
(2,4,6-trimethylbenzoyl)-diphenylphosphine oxide (Lucirin.RTM. TPO)
or (2,4,6-trimethylbenzoyl-phenyl-ethoxy-phosphine oxide, or
bisacylphosphine oxide photoinitiators such as
bis(2,6-dimethox-ybenzoyl)- -2,4,4-trimethylpentyl-phosphine oxide,
bis(2,6-dimethoxybenzoyl)-2,2,4-tr- imethyl-pentyl-phosphine oxide,
bis(2,4,6-trimethylbenzoyl)-(2,4-dipentylo- xyphenyl)-phosphine
oxide and bis(2,4,6-trimethylbenzoyl)phenyl-phosphine oxide. Those
monoacyl- or bisacyl-phosphine oxides are advantageously used in an
amount of from 0.5 to 5%. When component (a1) contains modified
alkyd resins, in addition to the photoinitiator (b) it is also
possible to use an oxidative dryer and suitable monoacyl- or
bisacyl-phosphine oxide photoinitiators.
[0167] The alkyd resins used as component (a1) contain a large
number of unsaturated, aliphatic compounds, at least some of which
are polyunsaturated. The unsaturated aliphatic compounds preferably
used for the preparation of those alkyd resins are unsaturated
aliphatic monocarboxylic acids, especially polyunsaturated
aliphatic monocarboxylic acids. Examples of mono-unsaturated fatty
acids are myristoleic acid, palmitic acid, oleic acid, gadoleic
acid, erucic acid and ricinoleic acid. Preferably fatty acids
containing conjugated double bonds, such as dehydrogenated castor
oil fatty acid and/or tung oil fatty acid, are used. Other suitable
monocarboxylic acids include tetrahydrobenzoic acid and
hydrogenated or non-hydrogenated abietic acid or the isomers
thereof. If desired, the monocarboxylic acid in question may be
used wholly or in part in the form of a triglyceride, e.g. as
vegetable oil, in the preparation of the alkyd resin. If desired,
mixtures of two or more such mono-carboxylic acids or triglycerides
may be used, optionally in the presence of one or more saturated,
(cyclo)aliphatic or aromatic monocarboxylic acids, e.g. pivalic
acid, 2-ethyl-hexanoic acid, lauric acid, palmitic acid, stearic
acid, 4-tert-butyl-benzoic acid, cyclo-pentanecarboxylic acid,
naphthenic acid, cyclohexanecarboxylic acid, 2,4-dimethylbenzoic
acid, 2-methylbenzoic acid and benzoic acid.
[0168] If desired, polycarboxylic acids may also be incorporated
into the alkyd resin, such as phthalic acid, isophthalic acid,
terephthalic acid, 5-tert-butylisophthalic acid, trimellitic acid,
pyromellitic acid, succinic acid, adipic acid,
2,2,4-trimethyladipic acid, azelaic acid, sebacic acid, dimerised
fatty acids, cyclopentane-1,2-dicarboxylic acid,
cyclohexane-1,2-dicarboxylic acid,
4-methylcyclohexane-1,2-dicarboxylic acid, tetrahydrophthalic acid,
endomethylene-cyclohexane-1,2-dicarboxylic acid,
butane-1,2,3,4-tetracarboxylic acid,
endoisopropylidene-cyclohexane- -1,2-dicarboxylic acid,
cyclohexane-1,2,4,5-tetracarboxylic acid and
butane-1,2,3,4-tetracarboxylic acid. If desired, the carboxylic
acid in question may be used as an anhydride or in the form of an
ester, for example an ester of an alcohol having from 1 to 4 carbon
atoms.
[0169] In addition, the alkyd resin can be composed of di- or
poly-valent hydroxyl compounds. Examples of suitable divalent
hydroxyl compounds are ethylene glycol, 1,3-propanediol,
1,6-hexanediol, 1,12-dodecanediol, 3-methyl-1,5-pentanediol,
2,2,4-trimethyl-1,6-hexane-diol, 2,2-dimethyl-1,3-propanediol and
2-methyl-2-cyclohexyl-1,3-propanediol. Examples of suitable triols
are glycerol, trimethylolethane and trimethylolpropane. Suitable
polyols having more than 3 hydroxyl groups are pentaerythritol,
sorbitol and etherified products of the compounds in question, such
as ditrimethylolpropane and di-, tri- and tetra-pentaerythritol.
Preferably, compounds having from 3 to 12 carbon atoms, e.g.
glycerol, pentaerythritol and/or dipentaerythritol, are used.
[0170] The alkyd resins can be obtained by direct esterification of
the constituents, with the option that some of those components may
already have been converted into ester diols or polyester diols.
The unsaturated fatty acids can also be used in the form of a
drying oil, such as linseed oil, tuna fish oil, dehydrogenated
castor oil, coconut oil and dehydrogenated coconut oil. The final
alkyd resin is then obtained by transesterification with the other
acids and diols added. The transesterification is advantageously
carried out at a temperature in the range of from 115 to
250.degree. C., optionally in the presence of solvents such as
toluene and/or xylene. The reaction is advantageously carried out
in the presence of a catalytic amount of a transesterification
catalyst. Examples of suitable transesterification catalysts
include acids, such as p-toluenesulfonic acid, basic compounds,
such as an amine, or compounds such as calcium oxide, zinc oxide,
tetraisopropyl orthotitanate, dibutyltin oxide and
tri-phenylbenzylphosphonium chloride.
[0171] The vinyl ether, acetal and/or alkoxysilane compounds used
as part of component (a1) preferably contain at least two vinyl
ether, acetal and/or alkoxysilane groups and have a molecular
weight of 150 or more. Those vinyl ether, acetal and/or
alkoxysilane compounds can be obtained, for example, by the
reaction of a commercially available vinyl ether, acetal and/or
alkoxysilane compound containing a vinyl ether, acetal and/or
alkoxysilane group and in addition a maximum of one functional
amino, epoxy, thiol, isocyanate, acrylic, hydride or hydroxyl
group, with a compound having at least two groups capable of
reacting with an amino, epoxy, thiol, isocyanate, acrylic, hydride
or hydroxyl group. As examples thereof there may be mentioned
compounds having at least two epoxy, isocyanate, hydroxyl and/or
ester groups or compounds having at least two ethylenically or
ethynylenically unsaturated groups. As component (a1), preference
is given to a composition in which the vinyl ether, acetal and/or
alkoxysilane compounds are covalently bonded to the alkyd resin by
addition via a reactive group such as an amino, hydroxyl, thiol,
hydride, epoxy and/or isocyanate group. For that purpose, the
compounds must have at least one group capable of forming an adduct
with the reactive groups present in the alkyd resin.
[0172] To incorporate vinyl ether groups into the alkyd resin, use
is made of a vinyloxyalkyl compound, the alkyl group of which is
substituted by a reactive group, such as a hydroxyl, amino, epoxy
or isocyanate group, that is capable of forming an adduct with one
or more of the reactive groups present in the alkyd resin.
[0173] As component (a1), preference is given to compositions in
which the ratio of the number of oxidatively drying groups present
in the alkyd resin to the number of groups that are reactive in the
presence of an acid is in the range of from 1/10 to 15/1,
especially from 1/3 to 5/1. Instead of a single modified alkyd
resin, it is also possible to use a plurality of alkyd resins, with
one alkyd resin being highly modified and the others being less
modified or not modified at all.
[0174] Examples of vinyl ether compounds capable of being
covalently bonded to the alkyd resin are ethylene glycol monovinyl
ether, butanediol monovinyl ether, hexanediol monovinyl ether,
triethylene glycol monovinyl ether, cyclohexanedimethanol monovinyl
ether, 2-ethyl-hexanediol monovinyl ether, polytetrahydrofuran
monovinyl ether, tetraethylene glycol monovinyl ether,
trimethylolpropane divinyl ether and aminopropyl vinyl ether.
[0175] Adducts can be formed, for example, by reacting the vinyl
ether compounds containing a hydroxyl group or amino group with an
excess of a diisocyanate, followed by the reaction of that
free-isocyanate-group-cont- aining adduct with the free hydroxyl
groups of the alkyd resin. Preferably, a process is used in which
first the free hydroxyl groups of the alkyd resin react with an
excess of a polyisocyanate, and then the free isocyanate groups
react with an amino-group- or hydroxyl-group-containing vinyl ether
compound. Instead of a diisocyanate, it is also possible to use a
diester. Transesterification of the hydroxyl groups present in the
alkyd resin with an excess of the diester, followed by
transesterification or transamidation of the remaining ester groups
with hydroxy-functional vinyl ether compounds or amino-functional
vinyl ether compounds, respectively, yields vinyl-ether-functional
alkyd resins. It is also possible to incorporate (meth)acrylate
groups into the alkyd resin during preparation of the alkyd resin,
by carrying out the preparation in the presence of a
hydroxy-functional (meth)acrylate ester, such as hydroxyethyl
methacrylate (HEMA), and then reacting the thus functionalised
alkyd resin by means of a Michael reaction with a
vinyl-ether-group-containing compound and a
primary-amino-group-containing compound, followed by reaction with
e.g. an isocyanate compound, in order to obtain a non-basic
nitrogen atom.
[0176] An example of such a reaction is described, for example, in
WO 99/47617. Esterification of ricinine fatty acid with
dipentaerythritol, followed by transesterification of the free
hydroxyl groups with diethyl malonate and 4-hydroxybutyl vinyl
ether in a suitable ratio, yields a vinyl-ether-functional alkyd
resin suitable for use as component (a1).
[0177] For the preparation of acetal-functional alkyd resins, use
is generally made of dialkyl acetal functionalised with an amino
group. Examples of suitable acetal compounds include
4-aminobutyraldehyde dimethyl acetal and 4-aminobutyraldehyde
diethyl acetal. The alkyd resin is modified by the addition of the
aminoacetal monomer to an alkyd resin functionalised with
isocyanate groups, with ester groups of a low-boiling alcohol or
with (meth)acrylate groups. The resulting dialkyl-acetal-modified
alkyd resin can be incorporated into the coating composition having
a high solids content and low viscosity. The preparation of
acetal-functional alkyd resins can also be carried out by reacting
hydroxyacetal with the carboxyl groups of the alkyd resin or by
reacting a diisocyanate or diester compound with the hydroxyl
groups of the alkyd resin.
[0178] An example of this preparative method is described in WO
99/47617, for example the esterification of a hydroxy-functional
alkyd resin with diethyl malonate, followed by transamidation of
the free ester group with 4-aminobutyraldehyde dimethyl acetal in a
suitable ratio. The resulting acetal-modified alkyd resin is
suitable as component (a1).
[0179] For the incorporation of alkoxysilane groups into the alkyd
resin, use is made of a siloxane compound having one or more
reactive group(s) which are subsequently reacted with one or more
of the constituents making up the alkyd resin. These are, for
example, alkoxy-silanes of the formula:
X.sub.a-Si(R.sub.1).sub.b(R.sub.2).sub.c, wherein
[0180] R. is alkoxy or oxyalkylenealkoxy or, when X is hydrogen,
R.sub.1 is halogen,
[0181] R.sub.2 is an aliphatic, cycloaliphatic or aromatic group,
and X is hydrogen or an alkyl group substituted by an amino,
isocyanate, mercapto or epoxy group; a is from 1 to 3, b is from 1
to 3, c is from 0 to 2, and a+b+c=4.
[0182] R.sub.1 is preferably an alkoxy group having from 1 to 4
carbon atoms in the alkoxy group, and R.sub.2 is preferably a group
having not more than 18 carbon atoms.
[0183] Examples of suitable siloxane compounds are
3-aminopropyl-triethoxy- silane, polyglycol-ether-modified
aminosilane, 3-aminopropyl-trimethoxysil- ane,
3-aminopropyltris-methoxy-ethoxyethoxysilane,
3-aminopropyl-methyl-di- ethoxysilane,
N-2-aminoethyl-3-aminopropyl-tri-methoxy-silane,
N-2-aminoethyl-3-aminopropyl-methyldimethoxy-silane,
N-methyl-3-amino-propyl-trimethoxysilane,
3-ureidopropyl-triethoxysitane,
3,4,5-dihydroimidazol-1-yl-propyltri-ethoxysilane,
3-methacryloxypropyl-trimethoxysilane,
3-glycidyloxypropyl-trimethoxysila- ne,
3-mercaptopropyl-trimethoxysilane and
3-mercaptopropyl-methyl-dimethox- ysilane, triethoxysilane,
diethoxymethylsilane, dimethoxymethylsilane, tri-methoxysilane,
trichlorosilane, triiodosilane, tribromosilane,
dichloromethylsilane and dibromomethylsilane.
[0184] The alkyd resin can be modified, for example, by the
insertion of an amino-group-modified alkoxysilane into an alkyd
resin modified with a polyisocyanate or a polyester of a
low-boiling alcohol. Hydride-functional alkoxysilanes can be bonded
directly to the alkyd, i.e. without modification with a binding
molecule such as a diisocyanate or diester, by adding a compound
containing a silylhydride group to an ethylenically unsaturated
group in the alkyd resin. That addition is catalysed by a
transition metal. In that process, use is preferably made of a
halogenated silylhydride and, in order to terminate the addition
reaction, conversion into an alkoxysilane compound with a
low-boiling alcohol. The addition reaction is advantageously
carried out in the absence of sterically hindering groups and
proceeds in optimum manner when the ethylenically unsaturated
groups are terminal groups, as is the case, for example, with
esters of 10-undecenecarboxylic acid.
[0185] Examples of the preparation of alkoxysiloxane-modified alkyd
resins are described in WO 99/47617. Esterification of a
hydroxy-functional alkyd resin with diethyl malonate, followed by
transamidation of the free ester group with
3-aminopropyltriethoxysilane in a suitable ratio yields an
alkoxysilane-modified alkyd resin. Hydroxy-modified alkyd resin can
also be reacted with an excess of isophorone diisocyanate, followed
by reaction of the free isocyanate groups with
3-aminopropyltriethoxysilane. Both alkoxysiloxane-modified alkyd
resins obtained by the processes described are suitable for use in
component (a1).
[0186] When free-radically polymerisable components have been added
to the formulation according to the invention, it may be
advantageous to add also a suitable free-radical photoinitiator or
a mixture of such photoinitiators, e.g. benzophenone and
derivatives thereof, acetophenone and derivatives thereof, e.g.
.alpha.-hydroxycyclohexylphenyl ketone or
2-hydroxy-2-methyl-1-phenyl-propanone,
2-hydroxy-1-[3-[4-(2-hydroxy-2-met-
hyl-propionyl)-phenyl]-1,1,3-trimethyl-indan-5-yl]-2-methyl-propan-1-one,
(.alpha.-hydroxy- or (.alpha.-amino-acetophenone, such as, for
example, (4-methylthiobenzoyl)-1-methyl-1-morpholino-ethane,
(4-morpholino-benzoyl)-1-benzyl-1-dimethylamino-propane,
4-aroyl-1,3-dioxolane, benzoin alkyl ethers and benzil ketal, such
as, for example, benzil dimethyl ketal, phenyl glyoxalate and
derivatives thereof, mono- or bis-acylphosphine oxide, such as, for
example, (2,4,6-trimethyl-benzoyl)-phenyl-phosphine oxide,
bis(2,6-dimethoxybenzoy- l)-(2,4,4-trimethyl-pent-1-yl)phosphine
oxide, bis(2,4,6-trimethylbenzoyl)- -phenyl-phosphine oxide or
bis(2,4,6-trimethylbenzoyl)-(2,4-dipentyloxyphe- nyl)-phosphine
oxide.
[0187] Other additional components can be, for example,
hydroxy-functional components, such as alcohols, polyester polyols,
polyether polyols, hydroxy-group-containing polyurethanes, castor
oil, etc. Examples thereof include aliphatic and cycloaliphatic
polyols, such as alkylene diols having preferably from 2 to 12
carbon atoms, e.g. ethylene glycol, 1,2- or 1,3-propanediol, 1,2-,
1,3- or 1,4-butanediol, pentanediol, hexanediol, octanediol,
dodecanediol, diethylene glycol, triethylene glycol, polyethylene
glycols having molecular weights of preferably from 200 to 1500,
1,3-cyclopentanediol, 1,2-, 1,3- or 1,4-cyclohexanediol,
1,4-di-hydroxy-methylcyclohexane, glycerol,
tris(.beta.-hydroxy-ethyl)ami- ne, trimethylolethane,
tri-methylolpropane, pentaerythritol, dipentaerythritol and
sorbitol. The polyols can be partially or fully esterified by one
or by different unsaturated carboxylic acids, it being possible for
the free hydroxyl groups in partial esters to have been modified,
e.g. etherified, or esterified by other carboxylic acids. Examples
of esters include: trimethylolpropane triacrylate,
trimethylolethane triacrylate, trimethylolpropane trimethacrylate,
trimethylolethane trimeth-acrylate, tetramethylene glycol
dimethacrylate, triethylene glycol dimethacrylate, tetraethylene
glycol diacrylate, pentaerythritol diacrylate, pentaerythritol
triacrylate, pentaerythritol tetraacrylate, dipentaerythritol
diacrylate, dipentaerythritol triacrylate, dipentaerythritol
tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol
hexaacrylate, tripentaerythritol octaacrylate, pentaerythritol
dimethacrylate, pentaerythritol trimethacrylate, dipenta-erythritol
dimethacrylate, dipentaerythritol tetramethacrylate,
tripentaerythritol octamethacrylate, pentaerythritol diitaconate,
dipentaerythritol trisitaconate, dipentaerythritol pentaitaconate,
dipentaerythritol hexaitaconate, ethylene glycol diacrylate,
1,3-butanediol diacrylate, 1,3-butanediol dimethacrylate,
1,4-butanediol diitaconate, sorbitol triacrylate, sorbitol
tetraacrylate, pentaerythritol-modified triacrylate, sorbitol
tetramethacrylate, sorbitol pentaacrylate, sorbitol hexaacrylate,
oligoester acrylates and methacrylates, glycerol di- and
tri-acrylate, 1,4-cyclohexane diacrylate, bisacrylates and
bismethacrylates of polyethylene glycol having a molecular weight
of from 200 to 1500, or mixtures thereof.
[0188] The iodonium salt compounds of formula I can also be used,
for example, as photoactivatable hardeners for
siloxane-group-containing resins. Those resins can, for example,
either undergo self-condensation by way of acid-catalysed
hydrolysis or can be crosslinked with a second resin component,
such as, for example, a polyfunctional alcohol, a
hydroxy-group-containing acrylic or polyester resin, a partially
hydrolysed polyvinylacetal or a polyvinyl alcohol. That type of
polycondensation of polysiloxanes is described, for example, in J.
J. Lebrun, H. Pode, Comprehensive Polymer Science Vol. 5, page 593,
Pergamon Press, Oxford, 1989.
[0189] Examples of compounds whose solubility increases in a
developer under the action of acid (component (a2)) include
oligomers, polymers and copolymers that can be obtained by
copolymerisation of, for example, the following monomers:
non-cyclic or cyclic secondary and tertiary alkyl (meth)acrylates,
such as tert-butyl acrylate, tert-butyl methacrylate,
3-oxo-cyclohexyl (meth)acrylate, tetrahydropyranyl (meth)acrylate,
2-methyl-2-adamantyl (meth)acrylate, cyclohexyl (meth)acrylate,
norbornyl (meth)acrylate, isobornyl methacrylate,
5-norbornene-2-tert-butyl ester, 8-ethyl-8-tricyclodecanyl
(meth)acrylate, (2-tetrahydro-pyranyl)oxynorbor- nyl-alcohol
acrylates, (2-tetrahydropyranyl)oxymethyltricyclododecanemetha- nol
methacrylates, trimethylsilylmethyl (meth)acrylates,
(2-tetrahydropyranyl)oxy-norbornylalcohol acrylates,
(2-tetrahydropyranyl)oxymethyltricyclododecanemethanol
methacrylates, trimethylsilylmethyl (meth)acrylate,
o-/m-/p-(3-oxocyclohexyloxy)styrene,
o-/m-lp-(1-methyl-i-phenylethoxy)styrene,
o-/m-/p-tetrahydropyranyloxysty- rene, o-/m-/p-adamantyloxystyrene,
o-/m-/p-cyclohexyloxystyrene, o-/m-/p-norbornyloxystyrene,
non-cyclic or cyclic alkoxycarbonylstyrenes, such as
o-/m-/p-tert-butoxycarbonylstyrene, o-/m-/p-(3-oxocyclohexyloxyca-
rbonyl)styrene, o-/m-/p-(1-methyl-1-phenylethoxycarbonyl)styrene,
o-/m-/p-tetrahydropyranyloxycarbonylstyrene,
o-/m-/p-adamantyloxycarbonyl- styrene,
o-/m-/p-cyclohexyloxycarbonylstyrene, o-/m-/p-norbornyloxycarbony-
lstyrene, non-cyclic or cyclic alkoxycarbonyloxystyrenes, such as
o-/m-/p-tert-butoxycarbonyloxystyrene,
o-/m-/p-(3-oxocyclohexyloxycarbony- loxy)styrene,
o-/m-/p-(1-methyl-1-phenylethoxycarbonyloxy)-styrene,
o-/m-/p-tetrahydropyranyloxycarbonyloxystyrene,
o-/m-/p-adamantyloxycarbo- nyloxystyrene,
o-/m-/p-cyclohexyloxycarbonyloxystyrene,
o-/m-/p-norbornyloxycarbonyloxy-styrene, non-cyclic or cyclic
alkoxycarbonylalkoxystyrenes, such as
o-/m-/p-butoxycarbonylmethoxystyren- e,
p-tert-butoxycarbonylmethoxystyrene,
o-/m-/p-(3-oxocyclohexyloxycarbony- lmethoxy)styrene,
o-/m-/p-(1-methyl-1-phenylethoxycarbonylmethoxy)styrene,
o-/m-/p-tetrahydropyranyloxycarbonylmethoxystyrene,
o-/m-/p-adamantyloxycarbonylmethoxy-styrene,
o-/m-/p-cyclohexyloxycarbony- lmethoxystyrene, o-/m-/p-
norbornyloxycarbonyl-methoxystyrene, trimethylsiloxystyrene,
dimethyl(butyl)siloxystyrene, unsaturated alkyl acetates, such as
isopropenyl acetate and derivatives thereof,
5-norbornenyl-2-tert-butyl ester; also monomers that carry
acid-labile groups having low activation energy, such as, for
example, p- or m-(1-methoxy-1-methylethoxy)styrene, p- or
m-(1-methoxy-1-methyl-ethoxy)-- methylstyrene, p- or
m-(1-methoxy-1-methylpropoxy)styrene, p- or
m-(1-methoxy-1-methylpropoxy)methylstyrene, p- or
m-(1-methoxyethoxy)styr- ene, p- or
m-(1-methoxyethoxy)-methylstyrene, p- or
m-(1-ethoxy-1-methylethoxy)styrenes, p- or
m-(1-ethoxy-1-methyl-ethoxy)me- thylstyrene, p- or
m-(1-ethoxy-1-methylpropoxy)styrene, p- or
m-(1-ethoxy-1-methylpropoxy)methylstyrene p- or
m-(1-ethoxyethoxy)styrene- , p- or
m-(1-ethoxyethoxy)-methylstyrene, p-(1-ethoxyphenylethoxy)styrene,
p- or m-(1-n-propoxy-1-methylethoxy)-styrene, p- or
m-(1-n-propoxy-1-methylethoxy)methylstyrene, p- or
m-(1-n-propoxyethoxy)-styrene, p- or
m-(1-n-propoxyethoxy)methylstyrene, p- or
m-(1-isopropoxy-1-methylethoxy)-styrene, p- or
m-(1-isopropoxy-1-methylethoxy)methylstyrene, p- or
m-(1-isopropoxyethoxy)-styrene, p- or m-(1-isopropoxy
ethoxy)methylstyrene, p- or
m-(1-isopropoxy-1-methyl-propoxy)styrene, p- or
m-(1-isopropoxy-1-methylpropoxy)-methylstyrene, p- or
m-(1-iso-propoxypropoxy)styrene, p- or m-(1-isopropoxy
propoxy)-methylstyrene, p- or m-(1-n-butoxy-1-methylethoxy)styrene,
p- or m-(1-n-butoxyethoxy) styrene, p- or m-(1-iso
butoxy-1-methyl-ethoxy)-styr- ene, p- or
m-(1-tert-butoxy-1-methylethoxy)styrene, p- or
m-(1-n-pentyloxy-1-methylethoxy)styrene, p- or
m-(1-isoamyloxy-1-methylet- hoxy)styrene, p- or
m-(1-n-hexyloxy-1-methylethoxy)styrene, p- or
m-(1-cyclohexyloxy-1-methylethoxy)styrene, p- or
m-(1-trimethylsilyloxy-1- -methylethoxy)styrene, p- or
m-(1-trimethylsilyloxy-1-methylethoxy)-methyl- styrene, p- or
m-(1-benzyloxy-1-methylethoxy)styrene, p- or
m-(1-benzyloxy-1-methylethoxy)methylstyrene, p- or
m-(1-methoxy-1-methylethoxy)styrene, p- or
m-(1-methoxy-1-methylethoxy)-m- ethylstyrene, p- or
m-(1-trimethylsilyloxy-1-methylethoxy)-styrene, p- or
m-(1-trimethylsilyloxy-1-methylethoxy)methylstyrene. Further
examples of polymers having alkoxyalkyl ester acid-labile groups
can be found in U.S. Pat. No. 5,225,316 and EP 829766. Examples of
polymers having acetal protecting groups are described, for
example, in U.S. Pat. No. 5,670,299, EP 780 732, U.S. Pat. No.
5,627,006, U.S. Pat. No. 5,558,976, U.S. Pat. No. 5,558,971, U.S.
Pat. No. 5,468,589, EP 704762, EP 762206, EP 342498, EP 553737 and
in ACS Symp. Ser. 614, Microelectronics Technology, pp. 35-55
(1995), J. Photopolymer Sci. Technol. Vol. 10, No. 4 (1997), pp.
571-578, J. Photopolymer Sci. Technol. Vol. 12, no. 4 (1999) pp.
591-599 and in "Proceedings of SPIE", Advances in Resist Technology
and Processing XVII, Vol. 3999, Part One, pp. 579-590, Feb. 28-Mar.
1, 2000. The polymers suitable in the composition according to the
invention are not, however, limited thereto. The monomers having an
acid-labile group can, where appropriate, also be co-polymerised
with other free-radically polymerisable monomers that do not carry
acid-labile groups, such as, for example, styrene, acrylonitrile,
methyl (meth)acrylate, (meth)acrylic acid, 4-hydroxy-styrene,
4-acetoxystyrene, 4-methoxystyrene, 4-vinylcyclohexanol,
norbornene, ethyl-norbornene and maleic acid anhydride, in order to
establish specific solubility properties and adhesive properties.
Alternatively, the acid-labile groups can be introduced only
subsequently in a polymer-analogous reaction. It is also known to
the person skilled in the art that the prepolymer can be modified
in targeted manner before such a polymer-analogous reaction, for
example by partial hydrogenation, partial alkylation, partial
acetylation. That is to say, that the polymer having acid-labile
groups does not, in every case, have to be synthesised from
monomers by copolymerisation.
[0190] It is also possible to introduce acid-labile crosslinking,
as described, for example, in H. -T. Schacht, P. Falcigno, N.
Muenzel, R. Schulz and A. Medina, ACS Symp. Ser. 706 (Micro- and
Nanopatterning Polymers), pp. 78-94, 1997;H. -T. Schacht, N.
Muenzel, P. Falcigno, H. Holzwarth and J. Schneider, J.
Photopolymer Science and Technology, Vol.9, (1996), 573-586. Such
acid-crosslinked systems are preferred in resist applications from
the standpoint of heat stability. Such acid-labile crosslinking can
also be obtained by the reaction of phenol-group-containing
polymers, such as, for example, 4-hydroxystyrene co-polymers, with
di- and poly-functional vinyl ethers.
[0191] Other examples of component (a2) that increase their
solubility in an alkaline developer upon reaction with acid are
monomeric compounds, such as, for example, carboxylic acids and
phenol-group-containing compounds, in which the carboxylic acid
group or phenolic OH group, respectively, has been blocked by
acid-labile protecting groups. Such acid-labile blocking can be
effected, for example, by conversion of the carboxyl group into a
tert-butyl ester group, a 2-methyl-2-adamantyl ester group, an
8-ethyl-8-tricyclodecanyl ester group, a tetrahydropyranyl ester
group or some other acid-cleavable ester group. Phenolic OH groups
can be blocked according to known processes by conversion, e.g.
into acid-cleavable tert-butylcarbonate groups, silyl ethers,
acetal groups and ketal groups.
[0192] The invention relates also to a radiation-sensitive
composition wherein component (a2) is at least one compound
selected from the group of cycloaliphatic copolymers,
4-hydroxy-phenyl-group-containing copolymers, maleic acid
anhydride-containing copolymers and acrylic acid-, acrylic acid
ester- and methacrylic acid ester-containing copolymers, with the
proviso that those copolymers carry functional groups that increase
the solubility of the polymer in an alkaline developer after
reaction with an acid.
[0193] In the compositions according to the invention, the
photoinitiator (b) is advantageously used in an amount of from
0.05% to 15%, e.g. from 0.5% to 10%, preferably from 0.1% to 5%,
based on the composition.
[0194] The compositions according to the invention can be used in
numerous applications, for example in cationically
radiation-curable printing inks, in cationically radiation-curable
coating compounds which may or may not be pigmented, in
cationically radiation-curable adhesives, coatings and mouldings,
including glass fibre-reinforced and carbon fibre-reinforced
composites and inner and outer layers of printed circuit
boards.
[0195] The compositions according to the invention include also
adhesives, as used, for example, for adhesive bonding (DVD bonding)
in the manufacture of digital versatile disks (DVD) and as
described, for example, in: WO 99/66506, WO 99/63017, JP 11241055
A2Heisei, JP 11181391 A2Heisei, WO 98/31765, and also as
radiation-curable laminating adhesives for flexible packaging (see,
e.g., U.S. Pat. No. 5,328,940), optical adhesives (e.g. German
Patent Application DD 225985) and pressure-sensitive adhesives
(e.g. U.S. Pat. No. 4,988,741 and EP 115870).
[0196] The compositions according to the invention are
advantageously used where there is a need for hard coatings,
adhesive bonds or photopolymerised dimensionally stable
three-dimensional mouldings (e.g. for rapid prototyping) having
good adhesion to paper, glass, metal, silicon, polycarbonate,
acrylate polymers and other polymer substrates, and that exhibit
only slight shrinkage during curing.
[0197] Preference is also given to a composition as described above
that comprises in addition to components (a1) or (a2) and (b),
additional additives (c) and/or sensitiser compounds (d) and
optionally further photoinitiators (e).
[0198] The photopolymerisable mixtures can comprise various
additives (c) in addition to the photoinitiator. Examples thereof
include thermal inhibitors, light stabilisers, optical brighteners,
fillers and pigments, as well as white and coloured pigments, dyes,
antistatics, adhesion promoters, wetting agents, flow auxiliaries,
lubricants, waxes, anti-adhesive agents, dispersants, emulsifiers,
anti-oxidants, fillers, e.g. talcum, gypsum, silicic acid, rutile,
carbon black, zinc oxide, iron oxides, reaction accelerators,
thickeners, matting agents, antifoams, and other adjuvants
customary, for example, in lacquer and coating technology.
[0199] The formulations can also comprise dyes and/or white or
coloured pigments as additional additives (c). Depending upon the
intended use, it is possible to use both inorganic and organic
pigments. Such additives are known to the person skilled in the
art; some examples thereof are titanium dioxide pigments, for
example of the rutile or anatase type, carbon black, zinc oxide,
such as zinc white, iron oxides, such as iron oxide yellow, iron
oxide red, chromium yellow, chromium green, nickel titanium yellow,
ultramarine blue, cobalt blue, bismuth vanadate, cadmium yellow and
cadmium red. Examples of organic pigments are mono- or bis-azo
pigments, and metal complexes thereof, phthalocyanine pigments,
polycyclic pigments, such as, for example, perylene, anthraquinone,
thioindigo, quinacridone and triphenylmethane pigments, and
diketo-pyrrolo-pyrrole, isoindolinone, e.g.
tetrachloro-isoindolinone, isoindoline, dioxazine, benzimidazolone
and quinophthalone pigments. The pigments can be used individually
or in admixture in the formulations. Depending upon the intended
use, the pigments are added to the formulations in amounts
customary in the art, for example in an amount of from 1 to 60% by
weight, or from 10 to 30% by weight, based on the total weight.
[0200] The formulations may, for example, also comprise organic
dyes of a wide variety of classes. Examples thereof include azo
dyes, methine dyes, anthraquinone dyes and metal complex dyes.
Customary concentrations are, for example, from 0.1 to 20%,
especially from 1 to 5%, based on the total weight.
[0201] The pigments, latent pigments or dyes or differently
coloured precursors of such pigments and dyes that are added may be
so selected that they undergo a colour change in the presence of
the acid formed from the iodonium salt as a result of irradiation.
Such compositions then show, by the colour change, that they have
been irradiated and can be used, for example, as irradiation dose
indicators, e.g. for UV radiation, electron beams, X-rays, etc.
[0202] The choice of additives will depend upon the field of use in
question and upon the properties desired for that field. The
additives (c) described above are customary in the art and are
accordingly used in amounts customary in the art.
[0203] Acceleration of the photopolymerisation can also be effected
by adding as further additives (d) photosensitisers that shift or
broaden the spectral sensitivity. These are especially aromatic
carbonyl compounds, such as, for example, benzophenone,
thioxanthone, and especially also isopropylthioxanthone,
phenothiazine derivatives, anthraquinone and 3-acylcoumarin
derivatives, terphenyls, styryl ketones, and
3-(aroylmethylene)-thiazolines, camphorquinone, and also eosin,
rhodamine and erythrosin dyes, and anthracene derivatives, such as,
for example, 9-methylanthracene, 9,10-dimethylanthracene,
9,10-diethoxyanthracene, 9-methoxyanthracene, 9-anthracenemethanol,
especially 9,10-dimethoxy-2-ethyl-anthracene and
9,10-diethoxyanthracene. Further suitable photosensitisers are
mentioned, for example, in WO 9847046.
[0204] Subject of the invention also are radiation-sensitive
compositions as described above, additionally to components (a1) or
(a2) and (b) comprising at least one sensitizer compound (d), in
particular benzophenone, thioxanthone, anthracene or derivatives
thereof.
[0205] It is also possible to use electron donor compounds, such
as, for example, alkyl- and aryl-amine donor compounds, in the
composition. Such compounds are, for example,
4-di-methylaminobenzoic acid, ethyl 4-dimethylaminobenzoate,
3-dimethylaminobenzoic acid, 4-dimethylaminobenzoin,
4-dimethylaminobenzaldehyde, 4-dimethylaminobenzonitrile and
1,2,4-trimethoxybenzene. Such donor compounds are preferably used
in a concentration of from 0.01 to 5%, especially in a
concentration of from 0.05 to 0.50%, based on the formulation.
[0206] Further examples of suitable photosensitisers (d) are
[0207] 1. Thioxanthones
[0208] thioxanthone, 2-isopropylthioxanthone, 2-chlorothioxanthone,
2-dodecylthioxanthone, 2,4-diethylthioxanthone,
2,4-dimethylthioxanthone, 1-methoxycarbonylthioxanthone,
2-ethoxycarbonylthioxanthone,
3-(2-methoxyethoxycarbonyl)-thioxanthone,
4-butoxy-carbonylthioxanthone,
3-butoxycarbonyl-7-methylthioxanthone,
1-chloro-4-propoxy-thioxanthone, 1-cyano-3-chlorothioxanthone,
1-ethoxycarbonyl-3-chlorothioxanthone,
1-ethoxycarbonyl-3-ethoxythioxanthone,
1-ethoxycarbonyl-3-aminothioxantho- ne,
1-ethoxy-carbonyl-3-phenylsulfurylthioxanthone,
3,4-di[2-(2-methoxyethoxy)ethoxycarbonyl]thiox-anthone,
1-ethoxycarbonyl-3-(1-methyl-1-morpholinoethyl)-thioxanthone,
2-methyl-6-di-methoxymethylthioxanthone,
2-methyl-6-(1,1-dimethoxybenzyl)- -thioxanthone,
2-morpholinomethylthioxanthone, 2-methyl-6-morpholinomethyl-
thioxanthone, N-allylthioxanthone-3,4-dicarboximide,
N-octylthioxanthone-3,4-dicarboximide,
N-(1,1,3,3-tetramethylbutyl)-thiox- anthone-3,4-dicarboximide,
1-phenoxythioxanthone, 6-ethoxycarbonyl-2-metho- xythioxanthone,
6-ethoxycarbonyl-2-methylthioxanthone,
1,3-dimethyl-2-hydroxy-9H-thiox-anthen-9-one-2-ethylhexyl ether,
thioxanthone-2-polyethylene glycol ester,
2-hydroxy-3-(3,4-dimethyl-9-oxo-
-9H-thioxanthon-2-yloxy)-N,N,N-trimethyl-1-propanaminium
chloride;
[0209] 2. Benzophenones
[0210] benzophenone, 4-phenylbenzophenone, 4-methoxybenzophenone,
4,4'-dimethoxy-benzophenone, 4,4'-dimethylbenzophenone,
4,4'-dichlorobenzophenone, 4,4'-dimethyl-aminobenzophenone,
4,4'-diethylaminobenzophenone, 4-methylbenzophenone,
2,4,6-trimethylbenzophenone, 4-(4-methylthiophenyl)-benzophenone,
3,3'-dimethyl-4-methoxybenzophenone, methyl-2-benzoyl benzoate,
4-(2-hydroxyethylthio)-benzophenone, 4-(4-tolylthio)benzophenone,
4-benzoyl-N,N,N-trimethylbenzenemethanaminium chloride,
2-hydroxy-3-(4-benzoylphenoxy)-N,N,N-trimethyl-1-propanaminium
chloride monohydrate,
4-(13-acryloyl-1,4,7,10,-13-pentaoxatridecyl)-benzophenone,
4-benzoyl-N,
N-dimethyl-N-[2-(1-oxo-2-propenyl)oxy]-ethylbenzenemethanami- nium
chloride;
[0211] 3.3-Acylcoumarins
[0212] 3-benzoylcoumarin, 3-benzoyl-7-methoxycoumarin,
3-benzoyl-5,7-di(propoxy)coumarin, 3-benzoyl-6,8-dichlorocoumarin,
3-benzoyl-6-chlorocoumarin,
3,3'-carbonyl-bis[5,7-di-(propoxy)coumarin],
3,3'-carbonyl-bis(7-methoxycoumarin),
3,3'-carbonyl-bis(7-diethyl-aminoco- umarin),
3-isobutyroylcoumarin, 3-benzoyl-5,7-dimethoxycoumarin,
3-benzoyl-5,7-diethoxycoumarin, 3-benzoyl-5,7-dibutoxy-coumarin,
3-benzoyl-5,7-di(methoxyethoxy)-coumarin,
3-benzoyl-5,7-di(allyloxy)couma- rin,
3-benzoyl-7-dimethylaminocoumarin,
3-benzoyl-7-diethylaminocoumarin,
3-isobutyroyl-7-dimethylaminocoumarin,
5,7-dimethoxy-3-(1-naphthoyl)couma- rin,
5,7-dimethoxy-3-(1-naphthoyl)coumarin, 3-benzoylbenzo-[f]-coumarin,
7-diethylamino-3-thienoylcoumarin,
3-(4-cyanobenzoyl)-5,7-dimethoxycoumar- in;
[0213] 4.3-(Arovlmethylene)-thiazolines
[0214] 3-methyl-2-benzoylmethylene-p-naphthothiazoline,
3-methyl-2-benzoylmethylene-benzo-thiazoline,
3-ethyl-2-propionylmethylen- e-p-naphthothiazoline;
[0215] 5. Other Carbonyl Compounds
[0216] acetophenone, 3-methoxyacetophenone, 4-phenylacetophenone,
benzil, 2-acetyl-naphthalene, 2-naphthaldehyde, 9,10-anthraquinone,
9-fluorenone, dibenzosuberone, xanthone,
2,5-bis(4-diethylaminobenzylidene)cyclopentano- ne,
.alpha.-(para-dimethyl-aminobenzylidene)ketones, such as
2-(4-dimethylaminobenzylidene)-indan-1-one or
3-(4-dimethylamino-phenyl)-- 1-indan-5-yl-propenone,
2-benzoyl-3-(4-dimethylaminophenyl)-2-propene-nitr- ile,
3-phenylthiophthalimide, N-methyl-3,5-di(ethylthio)phthalimide,
N-methyl-3,5-di(ethylthio)phthalimide.
[0217] The sensitisers (d) described above are customary in the art
and are accordingly used in amounts customary in the art,
preferably in a concentration of from 0.05 to 5%, especially in a
concentration of from 0.1 to 2%, based on the composition.
[0218] The compositions according to the invention may additionally
comprise further photo-initiators (e), such as, for example,
cationic photoinitiators, photo acid-formers and free-radical
photoinitiators as co-initiators in amounts of from 0.01 to 15%,
preferably from 0.1 to 5%.
[0219] Examples of cationic photoinitiators and acid-formers are
phosphonium salts, diazonium salts, pyridinium salts, sulfonium
salts, ferrocenium salts, e.g.
(.eta..sup.6-isopropylbenzene)(.eta..sup.5-cyclop-
entadienyl)-iron-II hexafluorophosphate .sup.RTMIrgacure 261,
nitrobenzylsulfonates, alkyl- and aryl-N-sulfonyloxyimides and
further known alkylsulfonic acid esters, haloalkylsulfonic acid
esters, 1,2-disulfones, oxime sulfonates, benzoin tosylate,
tolylsulfonyloxy-2-hydroxy-2-methyl-1-phenyl-1-propanone and
further known beta-ketosulfones, beta-sulfonylsulfones,
bis(alkylsulfonyl)diazome- thane,
bis(4-tert-butyl-phenyl-sulfonyl)-diazomethane,
benzoyl-tosyl-diazomethane, iminosulfonates and imidosulfonates and
trichloromethyl-s-triazines and other haloalkyl-group-containing
compounds and further compounds mentioned under (b1).
[0220] Examples of free-radical photoinitiators as co-initiators
are carbonyl compounds, as described in U.S. Pat. No. 4,560,709,
1-benzoylcyclohexanol, 2-benzoyl-2-propanol,
oligo[2-hydroxy-2-methyl-1-[- 4-(1-methylvinyl)phenyl]propanone]
and 2-hydroxy-1-[3-[4-(2-hydroxy-2-meth-
yl-propionyl)phenyl]-1,1,3-trimethyl-indan-5-yl]-2-methyl-propan-1-one.
[0221] The compositions according to the invention may be used for
a variety of purposes, for example as printing inks, such as
screen-printing inks, flexo printing inks or offset printing inks,
as clear lacquer, as coloured surface-coating compositions, as
white surface-coating compositions, e.g. for wood or metal, as
powder coating compositions, as paint, inter alia for paper, wood,
metal or plastics, as daylight-curable paint for marking structures
and roads, for photographic reproduction processes, for holographic
recording materials, for image-recording processes or for the
production of printing plates that are to be developed with organic
solvents or using aqueous-alkaline media, in the production of
masks for screen-printing, as dental filling compounds, as
radiation-curable adhesives, as pressure-sensitive adhesives, as
anti-adhesive coatings, as laminating resins, as photoresists, e.g.
galvano-resists, etch resists or permanent resists, liquid films
and dry films, as photostructurable dielectrics, and as solder
masks for electronic circuits, as resists in the manufacture of
colour filters for any type of screen or for producing structures
in the manufacture of plasma displays and electroluminescent
displays, in the manufacture of optical switches, optical gratings
(interference gratings), in the coating or sealing of electronic
components, e.g. as electroinsulating compounds, or as coatings for
optical fibres, for coil coating, as indicator systems for UV
radiation, X-rays and electron beams, and in the manufacture of
three-dimensional articles, e.g. for stereolithography and for
composites, e.g. for composites reinforced with glass or carbon or
graphite fibres. The compositions are also suitable for the
manufacture of optical lenses, e.g. contact lenses or Fresnel
lenses, and also in the manufacture of medical apparatus, aids or
implants.
[0222] The photocurable compositions according to the invention are
suitable, for example, as coating materials for all kinds of
substrates, for example wood, textiles, paper, ceramics, glass,
marble, plastics, such as polyester, polyethylene terephthalate,
polyolefins or cellulose acetate, especially in the form of films,
and metals, such as Al, Cu, Ni, Fe, Zn, Mg or Co and GaAs, Si or
SiO.sub.2, to which a coating is to be applied or an image is to be
applied by image-wise exposure, or to which a structured resist
layer is to be applied.
[0223] The coating of the substrates can be effected by applying a
liquid composition, a solution or suspension to the substrate. The
choice of solvent and the concentration are governed chiefly by the
nature of the composition and by the coating method. The solvent
should be inert, that is to say it should not enter into any
chemical reaction with the components and it should be capable of
being removed again upon drying after the coating operation.
[0224] Examples of suitable solvents are ketones, ethers and
esters, such as methyl ethyl ketone, isobutyl methyl ketone,
cyclopentanone, cyclohexanone, 2-heptanone, methyl amyl ketone,
N-methylpyrrolidone, gamma-butyrolactone, dioxane, tetrahydrofuran,
2-methoxyethanol, 2-ethoxyethanol, 1-methoxy-2-propanol,
1,2-dimethoxyethane, acetic acid ethyl ester, acetic acid n-butyl
ester, propylene glycol monomethyl ether acetate, lactic acid ethyl
ester, propylene carbonate and 3-ethoxy-propionic acid ethyl
ester.
[0225] After coating of the substrates, the solvent is generally
removed by drying.
[0226] The formulation is applied uniformly to a substrate by known
coating methods, for example by spin-coating, immersion, knife
coating, curtain pouring, brush application or spraying, especially
by electrostatic spraying and reverse-roll coating, and by
electrophoretic deposition. It is also possible to apply the
photosensitive layer to a temporary flexible support and then coat
the final substrate, e.g. a copper-laminated printed circuit board,
by transferring the layer by lamination.
[0227] The amount applied (layer thickness) and the type of
substrate (layer support) are dependent upon the desired field of
use. The layer thickness range generally includes values from about
0.1 .mu.m to more than 100 .mu.m, preferably from 0.5 micrometre to
50 micrometres. In the manufacture of three-dimensional articles,
e.g. by stereolithography, the dimensions of the articles that can
be obtained are limited only by the size of the exposure
apparatus.
[0228] The radiation-sensitive compositions according to the
invention are used, for example, as negative resists that have very
high photosensitivity and that can be developed in an
aqueous-alkaline medium without swelling. They are suitable as
photoresists for electronics, such as galvanoresists, etch resists,
and in liquid and dry films, solder resists, as resists in the
production of colour filters for any type of screen, or to form
structures in the manufacture of plasma displays and
electroluminescent displays, in the manufacture of printing plates,
e.g. offset printing plates, in the manufacture of printing moulds
for letterpress printing, flatbed printing, intaglio printing,
flexo printing or screen-printing moulds, the production of relief
copies, e.g. for the production of texts in braille, for the
production of stamps, for use in the etching of mouldings or for
use as a microresist in the manufacture of integrated switching
circuits. The compositions can also be used as photostructurable
dielectrics, for encapsulating materials or as an insulating
coating in the manufacture of computer chips, printed circuits and
other electrical or electronic components. The possible layer
supports and processing conditions for the coated substrates vary
accordingly.
[0229] The compounds according to the invention are also used in
the manufacture of single- or multi-layer materials for image
recording or image reproduction (copies, reprography), which may be
monochromatic or polychromatic. Included therein are materials for
holographic storage of information, e.g. for holographic images or
3-dimensional holographic data storage. Such materials can also be
used in colour test systems. In that technology it is also possible
to use formulations that comprise microcapsules and, to produce the
image, a thermal step can be carried out after the exposure step.
Such systems and technologies and their use are described, e.g., in
U.S. Pat. No. 5,376,459.
[0230] For photographic recordings of information there are used,
for example, films of polyester, cellulose acetate or
plastics-coated papers; for offset printing moulds there is used
specially treated aluminium; for the production of printed circuits
there are used copper-coated laminates; and for the production of
integrated switching circuits there are used silicon wafers. The
layer thicknesses for photographic materials and offset printing
moulds are generally from about 0.5 .mu.m to 10 .mu.m, and for
printed circuits from 1.0 .mu.m to about 100 .mu.m.
[0231] The invention relates also to the use of compounds of
formula I as radiation-sensitive acid donors in the manufacture of
surface-coating compositions, printing inks, printing plates,
dental compounds, stereolithography resins, adhesives,
anti-adhesive coatings, colour filters, resist materials or
image-recording materials.
[0232] The invention relates also to a coated substrate that is
coated on at least one surface with a composition according to the
invention, and to a method for the production of relief images
wherein a composition according to the invention is applied to a
substrate and is then exposed image-wise.
[0233] The expression "image-wise exposure" includes irradiation
through a mask that contains a predetermined pattern, for example a
diapositive, a metal mask, a chrome mask on a transparent support,
exposure by means of a laser beam that is moved, for example
controlled by a computer, over the surface of the coated substrate
and in that manner produces an image, and irradiation with
computer-controlled electron beams. Images can also be produced by
interference between two beams or images, for example for
holographic uses. It is also possible to use liquid crystal masks
that can be actuated pixel by pixel to produce digital images, as
described, for example, by A. Bertsch, J. Y. Jezequel, J. C. Andre
in Journal of Photo-chemistry and Photobiology A: Chemistry 1997,
107, pp. 275-281 and by K. -P. Nicolay in Offset Printing 1997, 6,
pp. 34-37.
[0234] As already mentioned, the compounds of formula I can be used
especially also as acid donors in photoresists. Resist systems can
be obtained by image-wise exposure of formulations comprising
compounds of formula I and a subsequent development step. The term
"photoresist" is not limited to the chemically enhanced resists
described in greater detail below, but includes all resist
materials in which reactions are initiated by the
radiation-chemical production of acid and that, in a development
step, result in a difference in solubility between exposed and
non-exposed regions. For example, also included are resists that
can be processed in an aqueous medium, as described, for example,
in U.S. Pat. No. 5,998,092 and in SPIE, Vol. 3999, pp. 569-578
(2000) as well as resists based on a Pinacol rearrangement, as
described, for example, in SPIE, Vol. 3999, pp. 62-73 (2000).
[0235] Accordingly, the invention relates also to a photoresist
that comprises a compound of formula I as radiation-sensitive acid
donor.
[0236] A chemically enhanced photoresist is to be understood as
being a resist formulation in which the radiation-sensitive
component provides a catalytic amount of acid, which in turn
catalyses a chemical reaction of at least one acid-sensitive
component of the resist. This results in a difference in the
solubility of the irradiated and non-irradiated portions of the
resist. As a result of the catalytic nature of that process, an
acid molecule can initiate reactions at many sites because it
diffuses through the reactive polymer matrix from one reaction site
to the next, provided it is not captured or destroyed by secondary
reactions. Even a low acid concentration is therefore sufficient to
obtain large differences in solubility between irradiated and
non-irradiated portions of the resist. It is therefore generally
sufficient to add only a small amount of latent acid compound. It
is necessary, however, for the latent acid donors to be chemically
and thermally stable until they are being irradiated. It is also
necessary for the latent catalysts to be readily soluble in the
liquid resist formulation and in the solid resist film in order to
avoid the formation of particles which would adversely affect the
use of the resists in microelectronic processing processes.
[0237] It will be clear from the above remarks that chemical and
thermal stability of the latent acid donor is essential for its use
in chemically enhanced photoresists.
[0238] The difference in solubility between exposed and non-exposed
areas in the resist, which results from the action of the
acid-catalysed reaction, depends upon the other components in the
resist. If the compositions according to the invention comprise
components that increase the solubility of the composition in the
developer after irradiation and optionally after thermal
aftertreatment, then it is a positive photoresist.
[0239] The invention accordingly relates also to a positive
photoresist.
[0240] If, however, the components of the composition lower the
solubility in the developer after irradiation and optionally after
thermal aftertreatment, then it is a negative photoresist.
[0241] The invention accordingly relates also to a negative
photoresist.
[0242] An overview of chemically enhanced photoresists can be
found, for example, in: H. Ito, IBM Journal of Research and
Development, Vol. 41, No. 1/2, page 69 (1997); H. Ito, SPIE Vol.
3678, page 2 (1999); for negative resists in: J. M. Shaw et al. IBM
Journal of Research and Development, Vol. 41, No. 1/2, page 81
(1997).
[0243] A monomeric, oligomeric or polymeric compound that, in
non-exposed portions, lowers the rate of solubility of an
alkali-soluble binder polymer also present in the resist
formulation, and that is itself alkali-insoluble in the non-exposed
portions, with the result that the resist film is retained in the
non-exposed portions after development in an alkaline solution, but
that is cleaved in the presence of an acid or is capable of being
rearranged in such a manner that the reaction product becomes
soluble in an alkaline developer, is referred to hereinafter as a
solubility inhibitor.
[0244] The invention also includes a chemically enhanced positive
photoresist composition that can be developed in an alkaline
medium, which photoresist composition comprises
[0245] (a3) at least one polymer having acid-labile groups that
decompose in the presence of an acid and increase the solubility of
the resist film in an alkaline developer solution in the irradiated
areas, and
[0246] (b) at least one compound of formula I.
[0247] The invention relates also to a chemically enhanced positive
photoresist composition that can be developed in an alkaline
medium, which photoresist composition comprises
[0248] (a4) at least one monomeric or oligomeric solubility
inhibitor having at least one acid-labile group that decomposes in
the presence of an acid and that increases the solubility in
aqueous-alkaline developer solutions, and at least one
alkali-soluble polymer, and
[0249] (b) at least one compound of formula I.
[0250] The invention relates also to a chemically enhanced positive
photoresist composition that can be developed in an alkaline
medium, which photoresist composition comprises
[0251] (a3) at least one polymer having acid-labile groups that
decompose in the presence of an acid and increase the solubility in
an aqueous-alkaline developer solution in the exposed area;
[0252] (a4) a monomeric or oligomeric solubility inhibitor having
at least one acid-labile group that decomposes in the presence of
an acid and that increases the solubility in an aqueousalkaline
developer solution in the exposed area;
[0253] (a5) an alkali-soluble monomeric, oligomeric or polymeric
compound in a concentration that keeps the resist film in
non-exposed areas completely insoluble in an alkaline developer,
and
[0254] (b) at least one compound of formula I.
[0255] The invention relates also to a chemically enhanced
photoresist composition comprising
[0256] (a3) at least one polymer having an acid-labile group that
decomposes in the presence of an acid and increases the solubility
in an aqueous-alkaline developer solution, and/or
[0257] (a4) at least one monomeric or oligomeric solubility
inhibitor having an acid-labile group that decomposes in the
presence of an acid and increases the solubility in an
aqueous-alkaline developer solution, and/or
[0258] (a5) at least one alkali-soluble monomeric, oligomeric or
polymeric compound; and
[0259] (b) as photosensitive acid donor at least one compound of
formula I.
[0260] The compositions may comprise, in addition to component (b),
other photosensitive acid donors and/or other additives (c) and/or
photosensitisers (d). Appropriate suitable additives (c) and
photosensitisers (d) have been described hereinabove.
[0261] Such chemically enhanced positive photoresist systems are
described, for example, in E. Reichmanis, F. M. Houlihan, 0.
Nalamasu, T. X. Neenan, Chem. Mater. 1991, 3, 394; or in C. G.
Willson, "Introduction to Microlithography, 2nd. Ed.; L. S.
Thompson, C. G. Willson, M. J. Bowden, Eds., Amer. Chem. Soc.,
Washington D.C., 1994, p. 139.
[0262] Suitable examples of acid-labile groups that decompose in
the presence of an acid and form aromatic hydroxyl groups, carboxyl
groups, keto groups and aldehyde groups and increase the solubility
in aqueous-alkaline developer solutions include alkoxyalkyl ether
groups, benzyl ether groups, tetrahydrofuranyl ether groups,
tetrahydropyranyl ether groups, tert-alkyl ester groups,
2-methyl-2-adamantyl ester groups, 8-ethyl-8-tricyclo-decanyl ester
groups, trityl ether groups, silyl ether groups, alkylcarbonate
groups, such as, for example, tert-butyloxycarbonyloxy groups,
trityl ester groups, silyl ester groups, alkoxy-methyl ester
groups, cumyl ester groups, acetal groups, ketal groups,
tetrahydropyranyl ester groups, tetrafuranyl ester groups, tertiary
alkyl ether groups, tertiary alkyl ester groups, etc.
[0263] The polymers having functional groups that decompose under
the action of an acid in order to increase the solubility of the
resist film comprising that polymer in an alkaline developer
solution and that can be added to the compositions of the present
invention can carry the acid-labile groups in the polymer backbone
and/or in the side chains. The acid-labile groups are preferably
situated in the side chain of the polymer.
[0264] Suitable polymers having acid-labile groups can be obtained
by polymer-analogous reactions in which some or all of the
alkali-soluble groups are converted into the acid-labile group in
question. Also possible is the direct preparation by
(co)polymerisation of monomers that already contain the acid-labile
groups. Examples of the preparation have been published in EP
254853, EP 878738, EP 877293, JP-A-2-25850, JP-A-3-223860, and
JP-A-4-251259.
[0265] In polymers containing, for example, silyl ether, acetal,
ketal and alkoxyalkyl ester groups (socalled low-activation energy
blocking groups--protecting groups having low activation energy),
such protecting groups are cleaved in the presence of an acid even
at relatively low temperatures upon heating after exposure
(generally between room temperature and 110.degree. C.). Polymers
that carry tert-butyl ester groups, adamantyl ester groups or
tert-butyloxycarbonyl groups (TBOC groups) or other ester groups
that carry a secondary or tertiary carbon atom in addition to the
oxygen atom of the ester bond (so-called high-activation energy
blocking groups--protecting groups having high activation energy)
generally require heating to achieve complete cleavage of the
protecting groups in the presence of an acid after exposure. Hybrid
systems in which both high-activation energy protecting groups and
lowactivation energy protecting groups are present in the same
polymer can also be used. So-called "dual-mode" protecting groups
are also known, which combine within them a readily cleavable bond,
e.g. in an acetal group, and a bond that is more difficult to
cleave, e.g. in a tert-butyl ester group, as described, for
example, in "Proceedings of SPIE", Advances in Resist Technology
and Processing XVII, Vol. 3999, Part One, pages 579-590, Feb.
28-Mar. 1, 2000. Mixtures of polymers having different protecting
group chemistry can also be used in the photosensitive compositions
according to the invention.
[0266] Preferred polymers having acid-labile protecting groups are
polymers and copolymers comprising the following different monomer
types:
[0267] 1) monomers that contain acid-labile groups that decompose
in the presence of an acid and increase the solubility in an
aqueous-alkaline developer solution, and
[0268] 2) monomers that are free of acid-labile groups and free of
groups that contribute to the solubility in an alkaline solution,
and/or
[0269] 3) monomers that contribute to the aqueous-alkali solubility
of the polymer.
[0270] Examples of monomers of type 1) are those already described
above as a suitable component (a2).
[0271] Examples of comonomers of type 2) are:
[0272] aromatic vinyl monomers, such as styrene,
.alpha.-methylstyrene, acetoxystyrene, .alpha.-methylnaphthalene,
acenaphthalene, vinyl ethers, such as ethyl vinyl ether and
3,4-dihydro-2H-pyran, cyclohexylvinyl ether, cycloolefins, such as
norbornene, 2-hydroxy-5-norbornene,
2-norbornen-5-yl-(2-hydroxyethyl)carboxylate, vinyl alicyclic
compounds, such as vinyl norbornane, vinyl adamantane, vinyl
cyclohexane, alkyl (meth)acrylates, such as methyl methacrylate,
acrylonitrile, vinyl cyclohexane, vinyl cyclohexanol, and maleic
acid anhydride.
[0273] Examples of comonomers of type 3) are:
[0274] vinyl aromatic compounds, such as hydroxystyrene, acrylic
acid compounds, such as methacrylic acid, ethylcarbonyloxystyrene
and derivatives thereof and cycloolefinic acids, such as
5-norbornene-2-carboxylic acid. Such polymers are described, for
example, in U.S. Pat. No. 5,827,634, U.S. Pat. No. 5,625,020, U.S.
Pat. No. 5,492,793, U.S. Pat. No. 5,372,912, EP 660187, U.S. Pat.
No. 5,679,495, EP 813113 and EP 831369. Further examples are
crotonic acid, isocrotonic acid, 3-butenoic acid, acrylic acid,
4-pentenoic acid, propionic acid, 2-butynoic acid, maleic acid,
fumaric acid and acetylenecarboxylic acid. The polymers that are
suitable in the composition according to the invention are not,
however, limited to the examples given above.
[0275] The content of acid-labile monomer in the polymer can vary
within a wide range and is dependent upon the content of other
comonomers and the alkali-solubility of the protected polymer.
Generally the content of monomer having acid-labile groups in the
polymer is from 5 to 60mol %.
[0276] The copolymers having acid-labile groups preferably have a
M.sub.W of from about 3000 to about 200 000, especially from about
5000 to about 50 000 and a molecular weight distribution of about 3
or less, especially about 2 or less. Non-phenolic monomers, e.g. a
copolymer of alkyl acrylate, such as, for example, tert-butyl
acrylate or tert-butyl methacrylate, and an alicyclic vinyl
compound, such as a vinyl norbonanyl or vinylcyclohexanol compound,
can be obtained by free-radical polymerisation or other known
processes and advantageously have a M.sub.W value of from about
8000 to about 50 000, and a molecular weight distribution of about
3 or less.
[0277] Other comonomers can be added advantageously in a suitable
amount in order, for example, to control the glass transition
temperature or the like.
[0278] In the present invention it is also possible to use mixtures
of two or more polymers having acid-labile groups. For example, a
mixture of polymers having acid-labile groups that cleave very
readily, such as acetal groups or tetrahydropyranyloxy groups, and
a polymer having acid-labile groups that cleave less readily, such
as, for example, tertiary alkyl ester groups, can be used. It is
also possible to use acid-labile groups of different sizes by
mixing two or more polymers having different acid-labile groups,
such as, for example, a tert-butyl ester group and a
2-methyl-adamantyl group or a 1-ethoxy-ethoxy group and a
tetrahydropyranyloxy group. A mixture of non-crosslinked resin and
crosslinked resin can also be used. According to the invention, the
proportion of such polymers is preferably from about 30 to 99% by
weight, especially from 50 to 98% by weight, based on the solids
content. An alkali-soluble resin or an alkali-soluble monomeric or
oligomeric compound without acid-labile groups can also be
introduced into the composition, for example in order to control
the alkali-solubility. Examples of polymer mixtures having
different acid-labile groups can be found, for example, in EP
780732, EP 679951 and U.S. Pat. No. 5,817,444.
[0279] Monomeric and oligomeric solubility inhibitors (a4) are
preferably used in the composition according to the invention.
[0280] Suitable monomeric or oligomeric solubility inhibitors (a4)
in the composition according to the invention are compounds having
at least one acid-labile group that cleaves in the presence of acid
and increases solubility in an aqueous-alkaline developer solution.
Examples thereof include alkoxymethyl ether groups,
tetrahydrofuranyl ether groups, tetrahydro-pyranyl ether groups,
alkoxyethyl ether groups, trityl ether groups, silyl ether groups,
alkylcarbonate groups, trityl ester groups, silyl ester groups,
alkoxymethyl ester groups, vinyl carbamate groups, tertiary alkyl
carbamate groups, tritylamino groups, cumyl ester groups, acetal
groups, ketal groups, tetrahydropyranyl ester groups, tetrafuranyl
ester groups, tertiary alkyl ether groups, tertiary alkyl ester
groups, etc. The molecular weight of the acid-cleavable solubility
inhibitors suitable in the present invention is about 3000 or less,
especially from about 100 to 3000, preferably from about 200 to
2500.
[0281] Examples of monomeric and oligomeric solubility inhibitors
having acid-labile groups are described, for example, as compounds
of formulae (I) to (XVI) in EP 831369. Other suitable examples of
such compounds are given in U.S. Pat. No. 5,356,752, U.S. Pat. No.
5,037,721, U.S. Pat. No. 5,015,554, JP-A-1-289946, JP-A-1-289947,
JP-A-2-2560, JP-A-3-128959, JP-A-3-158855, JP-A-3-179353,
JP-A-3-191351, JP-A-3-200251, JP-A-3-200252, JP-A-3-200253,
JP-A-3-200254, JP-A-3-200255, JP-A-3-259149, JA-3-279958,
JP-A-3-279959, JP-A-4-1650, JP-A-4-1651, JP-A-11260, JP-A-4-12356,
JP-A-4-123567, JP-A-1-289946, JP-A-3-128959, JP-A-3-158855,
JP-A-3-179353, JP-A-3-191351, JP-A-3-200251, JP-A-3-200252,
JP-A-3-200253, JP-A-3-200254, JP-A-3-200255, JP-A-3-259149,
JA-3-279958, JP-A-3-279959, JP-A-4-1650, JP-A-4-1651, JP-A-1 1260,
JP-A-4-12356, JP-A-4-12357 and Japanese Patent Application Nos.
3-33229, 3-230790, 3-320438, 4-254157, 4-52732, 4-103215, 4-104542,
4-107885, 4-107889, 4-152195, 4-254157, 4-103215, 4-104542,
4-107885, 4-107889 and 4-152195. Suitable for resists in the
shortwave UV range are, for example, especially compounds such as
tert-butyl cholate, tert-butyl deoxycholate and tert-butylcholate
glutarate dimers (see, e.g., SPIE Vol. 3999, p. 127 (2000).
[0282] The composition according to the invention may also comprise
polymeric solubility inhibitors, for example polyacetals, as
described in U.S. Pat. No. 5,354,643, or poly-N,O-acetals, as
described in U.S. Pat. No. 5,498,506, in combination with an
alkali-soluble polymer, and also in combination with a polymer
having acid-labile groups that increase the solubility of the
resist film in the developer after exposure, or in a combination of
the two types of polymer described.
[0283] In the compositions according to the invention the content
of solubility inhibitor is from about 3 to 55% by weight,
especially from about 5 to 45% by weight, preferably from 10 to 35%
by weight, based on the solids content, when solubility inhibitors
having acid-labile groups are used in combination with
alkali-soluble polymers and/or polymers having acid-labile
groups.
[0284] Preferably soluble polymers (a5) are used in the
compositions according to the invention in an aqueous-alkaline
solution. Examples thereof include novolak resins, hydrogenated
novolak resins, acetonepyrogallol resins, poly(o-hydroxystyrene),
poly(m-hydroxystyrene), poly(p-hydroxystyrene), hydrogenated
poly(hydroxystyrenes), halo- or alkyl-substituted
poly(hydroxystyrenes), hydroxystyrene/N-substituted maleimide
copolymers, o-/p- and m/p-hydroxystyrene copolymers, partially
o-alkylated poly(hydroxystyrenes), [e.g. o-methylated,
o-(1-methoxy)ethylated, o-(1-ethoxy)ethylated,
o-2-tetrahydropyranylated and o-(tert-butoxycarbonyl)methylated
poly(hydroxystyrenes) having a substitution proportion of about
from 5 to 30 mol % of hydroxyl groups], o-acylated
poly(hydroxystyrenes) [e.g. o-acetylated and
o-(tert-butoxy)carbonylated poly(hydroxystyrenes) having a
substitution proportion of about from 5 to 30 mol % of hydroxyl
groups], styrene/maleic acid anhydride copolymers,
styrene/hydroxy-styrene copolymers,
.alpha.-methylstyrene/hydroxystyrene copolymers, carboxylated
methacrylic resins, and derivatives thereof. Also suitable are
poly(meth)acrylic acid [e.g. poly(acrylic acid)], (meth)acrylic
acid/(meth)acrylate copolymers [e.g. acrylic acid/-methyl acrylate
copolymers, methacrylic acid/methyl methacrylate copolymers or
methacrylic acid/methyl methacrylate/tert-butyl methacrylate
copolymers], (meth)acrylic acid/alkene copolymers [e.g. acrylic
acid/ethylene copolymers], (meth)acrylic acid/(meth)-acrylamide
copolymers [e.g. acrylic acid/acrylamide copolymers], (meth)acrylic
acid/vinyl chloride copolymers [e.g. acrylic acid/vinyl chloride
copolymers], (meth)acrylic acid/vinyl acetate copolymers [e.g.
acrylic acid/vinyl acetate copolymers], maleic acid/vinyl ether
copolymers [e.g. maleic acid/methyl vinyl ether copolymers], maleic
acid monoester/methyl vinyl ester copolymers [e.g. maleic acid
monomethyl ester/methyl vinyl ether copolymers], maleic
acid/(meth)acrylic acid copolymers [e.g. maleic acid/acrylic acid
copolymers or maleic acid/methacrylic acid copolymers], maleic
acid/(meth)acrylate copolymers [e.g. maleic acid/methyl acrylate
copolymers], maleic acid/vinyl chloride copolymers, maleic
acid/vinyl acetate copolymers and maleic acid/alkene copolymers
[e.g. maleic acid/ethylene copolymers and maleic
acid/1-chloropropene copolymers]. The polymers suitable for the
compositions according to the invention are in no way limited,
however, to the examples given above.
[0285] Especially preferred as alkali-soluble polymers (a5) are
novolak resins, poly(m-hydroxystyrene), poly(p-hydroxystyrene),
copolymers of the corresponding hydroxystyrene monomers, for
example with p-vinylcyclohexanol, alkyl-substituted
poly(hydroxystyrenes), partially o- or m-alkylated and o- or
m-acylated poly(hydroxystyrenes), styrene/hydroxystyrene copolymer
and .alpha.-methylstyrene/hydroxystyrene copolymers. The novolak
compounds are obtainable, for example, by addition condensation
reactions of one or more monomers as main constituent(s) with one
or more aldehydes in the presence of an acid catalyst.
[0286] Examples of monomers that are suitable for the preparation
of alkali-soluble resins are hydroxylated aromatic compounds, such
as phenol, cresols, that is to say m-cresol, p-cresol and o-cresol,
dimethylphenols (xylenols), e.g. 2,5-dimethylphenol,
3,5-dimethylphenol, 3,4-di-methylphenol and 2,3-dimethylphenol,
alkoxyphenols, e.g. p-methoxyphenol, m-methoxy-phenol,
3,5-dimethoxyphenol, 2-methoxy-4-methylphenol, m-ethoxyphenol,
p-ethoxyphenol, m-propoxyphenol, p-propoxyphenol, m-butoxyphenol
and p-butoxyphenol, dialkylphenols, e.g.
2-methyl-4-isopropylphenol, and other hydroxylated aromatic
compounds including m-chlorophenol, p-chlorophenol, o-chlorophenol,
dihydroxybiphenyl, bisphenol-A, phenyl-phenol, resorcinol and
naphthene. Such compounds can be used alone or in mixtures of two
or more. The monomers for novolak resins are not limited to the
examples mentioned above.
[0287] Suitable examples of aldehydes for polycondensation with
phenolic compounds in the preparation of novolaks are formaldehyde,
p-formaldehyde, acetaldehyde, propionaldehyde, benzaldehyde,
phenylacetaldehyde, .alpha.-phenylpropionaldehyde,
.beta.-phenylpropion-aldehyde, o-hydroxybenzaldehyde,
m-hydroxybenzaldehyde, p-hydroxybenzaldehyde, o-chlorobenzaldehyde,
m-chlorobenzaldehyde, p-chlorobenzaldehyde, o-nitrobenz-aldehyde,
m-nitrobenzaldehyde, o-methylbenzaldehyde, m-methylbenzaldehyde,
p-methylbenzaldehyde, p-ethylbenzaldehyde, p-, n-butylbenzaldehyde,
furfural, chloroacetaldehyde and acetals derived therefrom, such as
chloroacetaldehyde diethyl acetal. Preference is given to
formaldehyde.
[0288] Those aldehydes can be used alone or in a combination of two
or more. Examples of suitable acid catalysts include hydrochloric
acid, sulfuric acid, formic acid, acetic acid and oxalic acid.
[0289] The average molecular weight of the resulting novolaks is
advantageously in the range of about from 1000 to 30 000,
preferably about from 2000 to 20 000.
[0290] The poly(hydroxystyrenes), and derivatives and copolymers
thereof, as described above as alkali-soluble polymers (other than
novolak resins), advantageously have average molecular weights of
from about 2000 or higher, especially from 4000 to 200 000,
preferably from 5000 to 50 000. When a polymer film having improved
heat-resistance is to be produced, the average molecular weight is
advantageously at least 5000 or more.
[0291] In the context of the present invention, the term "average
molecular weight" is to be understood as the molar mass determined
by gel permeation chromatography (calibrated with polystyrene
standard).
[0292] In the compositions according to the invention, the
alkali-soluble polymers can be used in mixtures of two or more.
[0293] Advantageously, the proportion of alkali-soluble polymer is
up to 80% by weight, especially up to 60% by weight, preferably up
to 40% by weight, based on the solids content of the formulation
(i.e. excluding solvent) when there is used a mixture of
alkali-soluble polymer and a polymer that contains groups that
decompose under the action of an acid in order to increase the
solubility in an alkaline developer solution.
[0294] When an alkali-soluble polymer is used together with a
solubility inhibitor, without a polymer that has groups that
decompose under the action of an acid, the proportion of
alkali-soluble polymer is advantageously from 40 to 90% by weight,
especially from 50 to 85% by weight, preferably from 60 to 80% by
weight.
[0295] The proportion of compounds of formula I (component(b)) in
the positive resist formulation is advantageously from about 0.01
to 20% by weight, based on the solids content in the
photoresist.
[0296] The use of the iodonium salts of formula I in chemically
enhanced systems based on the principle of the removal of
protecting groups from a polymer normally results in a positive
resist. Positive resists are preferred to negative resists in many
applications, especially because of their better resolution. There
is, however, also interest in producing negative images using the
positive resist mechanism, in order to combine the advantages of
the good resolution of the positive resist with the properties of a
negative resist. This is effected, for example, by the introduction
of a so-called image-reversal step, as described, for example, in
EP 361906. For that purpose, the resist material, after image-wise
exposure, is treated, for example, with a gaseous base, before
development, the acid that is formed being neutralised image-wise.
The entire resist is then exposed and subjected to thermal
treatment, and the negative image is developed in the customary
manner.
[0297] Acid-sensitive components that form negative resists are
generally compounds that are capable of undergoing a crosslinking
reaction with themselves and/or with one or more further components
in the composition when they are catalysed by an acid (e.g. the
acid formed by exposure of the compounds of formula I according to
the invention). Compounds of that kind are, for example, the known
acid-curable resins, such as acrylate, polyester, alkyd, melamine,
urea, epoxy and phenolic resins or mixtures thereof. Amino resins,
phenolic resins and epoxy resins are especially suitable.
Acid-curable resins of that kind are generally known and are
described, for example, in "Ullmann's Encyclopdie der technischen
Chemie", Edition 4, Vol. 15 (1978), pp. 613-628. The crosslinking
components should advantageously be present in a concentration of
about from 2 to 40% by weight, preferably from 5 to 30% by weight,
based on the solids content of the negative resist formulation.
[0298] The invention accordingly also includes a chemically
enhanced negative photoresist that can be developed in an alkaline
medium, which negative photoresist comprises
[0299] (a6) an alkali-soluble resin as crosslinking component,
[0300] (a7) a component that undergoes a crosslinking reaction with
itself and/or with the crosslinking component under the action of
acid, and
[0301] (b) as photosensitive acid donor a compound of formula
1.
[0302] The composition may comprise, in addition to component (b),
further photosensitive acid donors and/or further additives (c),
and photosensitisers (d). Suitable components (c) and (d) have been
described above.
[0303] There come into consideration as component (a7) the
compounds given above in the description of component (a1).
[0304] Especially preferred acid-curable resins (a7) are amino
resins, such as non-etherified or etherified melamine, urea,
guanidine or biuret resins, especially methylated melamine resins
or butylated melamine resins, suitable glycolurils
(tetrahydroimidazo[4,5-d]imidazole-2,5-(1H,3- H"-diones) and
urones. In this context, the term "resin" means both customary
technical mixtures that generally also include oligomers, and pure
and high-purity compounds. N-Hexa(methoxymethyl) melamine and
tetramethoxymethylglucoril, and N, N'-dimethoxy-methylurone are the
preferred acid-curable resins.
[0305] The concentration of the compound of formula I in the
negative resist is advantageously from about 0.1 to 30% by weight,
especially up to 20% by weight, preferably from 1 to 15% by weight,
based on the total solids content of the compositions.
[0306] The negative resist compositions may optionally comprise a
film-forming polymeric crosslinking agent (binder) (a6). This will
preferably be an alkali-soluble phenolic resin. Also highly
suitable for that purpose are, for example, novolaks derived from
an aldehyde, e.g. acetaldehyde or furfuraldehyde, especially from
formaldehyde, and from a phenol, e.g. unsubstituted phenol, mono-
or di-chlorosubstituted phenol, such as p-chloro-phenol, phenol
mono- or di-substituted by C.sub.1-C.sub.9alkyl, such as o-, m- or
p-cresol, the various xylenols, p-tert-butylphenol, p-nonylphenol,
p-phenylphenol, resorcinol, bis(4-hydroxy-phenyl)methane or
2,2-bis(4-hydroxyphenyl)propane. Also suitable are homo- and
co-polymers based on ethylenically unsaturated phenols, e.g.
homopolymers of vinyl- and 1-propenyl-substituted phenols, such as
p-vinylphenol or p-(1-propenyl)phenol or copolymers of those
phenols with one or more ethylenically unsaturated compounds, e.g.
styrenes. The proportion of crosslinking agent is generally within
a range of about from 30 to 95% by weight, especially from 40 to 80
% by weight.
[0307] An especially preferred negative resist formulation
comprises from 0.5 to 15% by weight of a compound of formula I
(component (b)), from 40 to 99% by weight of a phenolic resin as
crosslinking agent (component (a6)), and from 0.5 to 30% by weight
of a melamine resin (component (a7)), the percentages relating to
the total solids content of the formulation.
[0308] Compounds of formula I can also be used as acid donors that
can be activated photochemically for the crosslinking of, for
example, poly(glycidyl) methacrylates in negative resist systems.
Such crosslinking reactions are disclosed, for example, by Chae et
al. in Pollimo 1993, 17(3), 292.
[0309] The positive and negative photoresist formulations may
comprise, in addition to component (b), further photosensitive acid
donors (b1), further additives (c), sensitisers (d) and/or other
photoinitiators (e).
[0310] The invention accordingly also relates to chemically
enhanced resist compositions, as described above, that comprise, in
addition to components (a1) or (a2) and (b), or components (a3),
(a4), (a5) and (b), or components (a6), (a7) and (b), further
additives (c), further photo-sensitive acid donors (b1), other
photoinitiators (e), and/or sensitisers (d).
[0311] The compounds of formula I can be used in the compositions
according to the invention in combination with further known
photolatent acid donors (b1), such as, for example, further onium
salts, 6-nitrobenzylsulfonates, bis-sulfonyidiazomethane compounds,
oxime sulfonates, etc. Examples of known photolatent acids for
chemically enhanced photoresists are to be found, for example, in
U.S. Pat. No. 5,731,364, U.S. Pat. No. 5,800,964, EP 704762, U.S.
Pat. No. 5,468,589, U.S. Pat. No. 5,558,971, U.S. Pat. No.
5,558,976 and especially EP 794457 and EP 795786.
[0312] When mixtures of compounds of formula I (b) with other
photolatent acids (b1) are used, the ratio of (b) to (b1) is, for
example, from 1:99 to 99:1.
[0313] Examples of suitable photolatent acids (b1) include
[0314] (1) onium salt compounds, e.g. further iodonium salts,
sulfonium salts, phosphonium salts, diazonium salts, pyridinium
salts. Preference is given to diphenyliodonium triflate,
diphenyliodonium pyrenesulfonate, diphenyliodonium
dodecylphenylsulfonate, triphenylsulfonium triflate,
triphenylsulfonium hexafluoroantimonate, diphenyliodonium
hexafluoroantimonate, triphenylsulfonium naphthalenesulfonate,
(hydroxyphenyl)benzylmethylsulfonium toluylsulfonate, etc.
[0315] (2) halogen-containing compounds haloalkyl-group-containing
heterocyclic compounds, haloalkyl-group-containing hydrocarbon
compounds, etc. Preference is given to (trichloromethyl)-s-triazine
derivatives, such as phenyl-bis(trichloromethyl)-s-triazine,
methoxyphenyl-bis(trichlo- romethyl)-s-triazine,
naphthyl-bis-(trichloromethyl)-s-triazine, etc.;
1,1-bis(4-chlorophenyl)-2,2,2-trichloroethane, etc.;
[0316] (3) sulfone compounds, e.g. .beta.-ketosulfones,
.beta.-sulfonylsulfones and oc-diazo derivatives thereof, etc.
Preference is given to phenacylphenylsulfone,
mesitylphenacylsulfone, bis(phenylsulfonyl)methane,
bis(phenyl-sulfonyl)diazomethane.
[0317] (4) sulfonate compounds, e.g. alkylsulfonic acid esters,
haloalkylsulfonic acid esters, arylsulfonic acid esters,
iminosulfonates, imidosulfonates, etc. Preference is given to
imidosulfonates, e.g. N-(trifluoro-methylsulfonyloxy)succinimide,
N-(trifluoromethylsulfonyloxy- )phthalimide,
N-(trifluoro-methylsulfonyloxy)naphthylimide,
N-(trifluoromethylsulfonyloxy)diphenylmaleimide,
N-(tri-fluoromethylsulfo- nyloxy)-bicyclo-[2.2.1
]-hept-5-ene-2,3-dicarboximide,
N-(trifluoromethylsulfonyloxy)-7-oxabicyclo-[2.2.1
]-hept-5-ene-2,3-dicarboximide,
N-(trifluoromethyl-sulfonyloxy)7-oxabicyc- lo-[2.2.1
]-hept-5-ene-2,3-dicarboximide, N-(trifluoromethylsulfonyl-oxy)--
bicyclo-[2.2.1 ]-heptan-5,6-oxy-2,3-dicarboximide,
N-(camphanylsulfonyloxy- )suc-cinimide,
N-(camphanylsulfonyloxy)phthalimide,
N-(camphanylsulfonyloxy)naphthylimide,
N-(camphanylsulfonyloxy)diphenyl-m- aleimide,
N-(camphanylsulfonyloxy)bicyclo-[2.2.1 ]-hept-5-ene-2,3-dicarbox-
imide,
N-(camphanylsulfonyloxy)-7-oxabicyclo-[2.2.1]-hept-5-ene-2,3-dicarb-
oximide, N-(camphanylsulfonyloxy)-7-oxabicyclo-[2.2.1
]hept-5-ene-2,3-dicarbox-imide,
N-(camphanylsulfonyloxy)-bicyclo-[2.2.1
]-heptan-5,6-oxy-2,3-dicarboximide,
N-(4-methylphenylsulfonyloxy)succinim- ide,
N-(4-methylphenylsulfonyloxy)phthalimide,
N-(4-methylphenylsulfonylox- y)naphthylimide,
N-(4-methylphenylsulfonyloxy)naphthylimide,
N-(4-methylphenylsulfonyloxy)diphenylmaleimide,
N-(4-methylphenylsulfonyl-
oxy)-bicyclo-[2.2.1]-hept-5-ene-2,3-dicarboximide,
N-(4-methylphenyi sulfonyloxy)-7-oxa bicyclo-[2.2.1]-
hept-5-ene-2,3-dicarboximide, N-(4-
methylphenyisulfonyloxy)-bicyclo-[2.2.1
]-heptan-5,6-oxy-2,3-dicarboximid- e, N-(2-trifl
uoromethylphenylsulfonyloxy)succinimide,
N-(2-trifluoromethyl-phenylsulfonyloxy)naphthylimide,
N-(2-trifluoromethylphenylsulfonyloxy)diphenylmaleimide,
N-(2-trifluoromethylphenylsulfonyloxy)-bicyclo-[2.2.1]-hept-5-ene-2,3-dic-
arboximide,
N-(2-trifluoromethylphenylsulfonyloxy)-7-oxabicyclo-[2.2.1]-he-
pt-5-ene-2,3-dicarboximide,
N-(2-trifluoromethylphenylsulfonyloxy)-bicyclo-
-[2.2.1]-heptan-5,6-oxy-2,3-dicarboximide, etc.
[0318] Further suitable sulfonate compounds are, for example,
benzoin tosylate, pyrogallol tristriflate,
pyrogallolmethanesulfonic acid triester,
nitrobenzyl-9,10-diethyloxyanthracyl-2-sulfonate,
.alpha.-(4-toluenesulfonyloxyimino)-benzyl cyanide,
.alpha.-(4-toluenesulfonyloxyimino)-4-methoxybenzyl cyanide,
.alpha.-(4-toluene-sulfonyloxyimino)-2-thienylmethyl cyanide,
.alpha.-(methylsulfonyloxyimino)-1-cyclohexenylacetonitrile,
.alpha.-(butylsulfonyloxyimino)-1-cyclopentenyl-acetonitrile,
(4-methylsulfonyloxyimino-cyclohexa-2,5-dienylidene)-phenyl-acetonitrile,
(5-methylsulfonyloxyimino-5H-thiophen-2-ylidene)-phenyl-acetonitrile,
(5-methylsulfonyl-oxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl)-aceton-
itrile,
(5-methylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-chlorophenyl)--
acetonitrile, etc.
[0319] In the compositions according to the invention, special
preference is given to sulfonate compounds, such as
pyrogallolmethanesulfonic acid triester,
N-(trifluoromethyl-sulfonyloxy)bicyclo-[2.2.1]-hept-5-ene-2,3-d-
icarboximide, N-(camphanylsulfonyloxy)-naphthylimide,
N-(2-trifluoromethylphenylsulfonyloxy)phthalimide,
N-(trifluoromethyl-sulfonyloxy)-bicyclo-[2.2.1
]-hept-5-ene-2,3-dicarboxi- mide,
N-(camphanylsulfonyloxy)-naphthylimide,
N-(2-trifluoromethylphenylsu- lfonyloxy)phthalimide, etc.
[0320] (5) quinonediazide compounds, e.g.
1,2-quinonediazidesulfonic acid ester compounds of polyhydroxy
compounds. Preference is given to compounds having a
1,2-quinonediazidesulfonyl group, e.g. a
1,2-benzoquinonediazide-4-sulfonyl group, a
1,2-naphthoquinonediazide-4-s- ulfonyl group, a
1,2-naphthoquinonediazide-5-sulfonyl group, a
1,2-naphthoquinonediazide-6-sulfonyl group, etc. Special preference
is given to compounds having a 1,2-naphthoquinonediazide-4-sulfonyl
group or a 1,2-naphthoquinonediazide-5-sulfonyl group. Especially
suitable are 1,2-quinonediazidesulfonic acid esters of
(poly)hydroxyphenylarylketones, such as
2,3,4-trihydroxybenzophenone, 2,4,6-trihydroxybenzophenone,
2,3,4,4'-tetrahydroxybenzo-phenone,
2,2',3,4-tetrahydroxybenzophenone,
2,3,4,4'-tetrahydroxybenzophenone,
2,2',4,4'-tetrahydroxybenzophenone,
2,2',3,4,4'-pentahydroxybenzophenone,
2,2',3,2,6'-pentahydroxybenzophenon- e,
2,3,3',4,4',5'-hexahydroxybenzophenone,
2,3',4,4',5',6-hexahydroxybenzo- phenone, etc.;
1,2-quinonediazidesulfonic acid esters of
bis[(poly)-hydroxyphenyl]alkanes, such as
bis(4-hydroxyphenyl)ethane, bis(2,4-dihydroxyphenyl)-ethane,
2,2-bis(4-hydroxyphenyl)propane,
2,2-bis(2,4-dihydroxyphenyl)propane,
2,2-bis(2,3,4-trihydroxyphenyl)propa- ne, etc.;
1,2-quinonediazidesulfonic acid esters of
(poly)hydroxyphenylalkanes, such as 4,4'-dihydroxytriphenylmethane,
4,4',4"-trihydroxy-triphenylmethane,
4,4',5,5'-tetramethyl-2,2',2"-trihyd- roxytriphenylmethane,
2,2,5,5'-tetramethyl-4,4',4"-trihydroxytriphenylmeth- ane,
1,1,1-tris(4-hydroxyphenyl)ethane,
1,1-bis(4-hydroxyphenyl)-1-phenyle- thane,
1,1-bis(4-hydroxyphenyl)-1-(4-[1-(hydroxyphenyl)-1-methylethyl]phen-
yl)ethane, etc; 1,2-quinonediazidesulfonic acid esters of
(poly)hydroxy-phenylflavanes, such as
2,4,4-trimethyl-2',4',7-trihydroxy-- 2-phenylflavane,
2,4,4-trimethyl-2',4',5',6,7-pentahydroxy-2-phenylflavane- ,
etc.
[0321] Further suitable additives (c) are as described above.
[0322] Further examples of basic organic compounds that can be used
in the resist compositions according to the present invention are
compounds that are stronger bases than phenol, especially
nitrogen-containing bases. Such compounds may be ionic, such as
tetraalkyl-ammonium salts, or non-ionic. Preference is given to
nitrogen-containing bases that, per molecule, have two or more
nitrogen atoms in different chemical environments. Special
preference is given to compounds comprising at least one
substituted or unsubstituted amino group and at least one
nitrogen-containing ring structure, as well as to compounds having
at least one alkylamino group. Examples thereof include guanidine,
aminopyridine, aminoalkylpyridines, aminopyrrolidine, indazole,
imidazole, pyrazole, pyrazine, pyrimidine, purine, imidazoline,
pyrazoline, piperazine, aminomorpholine and aminoalkylmorpholines.
Both the unsubstituted and the substituted derivatives thereof are
suitable. Preferred substituents are amino groups, aminoalkyl
groups, alkylamino groups, aminoaryl groups, aryl-amino groups,
alkyl groups, alkoxy groups, acyl groups, acyloxy groups, aryl
groups, aryloxy groups, nitro, hydroxy and cyano. Specific examples
of especially preferred basic compounds are guanidine,
1,1-dimethylguanidine, 1,1,3,3-tetramethylguanidine,
2-amino-pyridine, 3-aminopyridine, 4-aminopyridine,
2-dimethylaminopyridine, 4-dimethylamino-pyridine,
2-diethylaminopyridine 2-(aminomethyl)pyridine,
2-amino-3-methylpyridine, 2-amino-4-methylpyridine,
2-aminod5imethylpyridine, 2-amino-6-methylpyridine,
3-amino-ethylpyridine, 4-aminoethylpyridine, 3-aminopyrrolidine,
piperazine, N-(2-aminoethyl)-piperazine,
N-(2-aminoethyl)piperidine, 4-amino-2,2,6,6-tetramethylpiperidine,
4-piperidinopiperidine, 2-iminopiperidine,
1-(2-aminoethyl)pyrrolidine, pyrazole, 3-amino-5-methylpyrazole,
5-amino-3-methyl-1-p-tolyipyrazole, pyrazine,
2-(aminomethyl)-5-methyl-pyrazine, pyrimidine,
2,4-diaminopyrimidine, 4,6-dihydroxypyrimidine, 2-pyrazoline,
3-pyrazoline, N-aminomorpholine and N-(2-aminoethyl)morpholine.
[0323] Other examples can be found in DE 4408318, U.S. Pat. No.
5,609,989, U.S. Pat. No. 5,556,734, EP 762207, DE 4306069, EP
611998, EP 813113, EP 611998 and U.S. Pat. No. 5,498,506. The basic
compounds suitable for the compositions according to the invention
are not limited, however, to those described above.
[0324] The nitrogen-containing basic compounds may be used alone or
in a combination of two or more. The proportion of those compounds
is generally about from 0.001 to 10 parts by weight, especially
from 0.01 to 5 parts by weight, per 100 parts by weight of the
photo-sensitive composition according to the invention (without the
solvent).
[0325] The composition may also comprise an organic basic compound
that decomposes under the action of actinic radiation ("suicide
base"), as described, for example, in EP 710885, U.S. Pat. No.
5,663,035, U.S. Pat. No. 5,595,855, U.S. Pat. No. 5,525,453 and EP
611998.
[0326] Suitable examples of dyes (c) are those mentioned above as
well as oil-soluble dyes and basic dyes, e.g. Oil Yellow #101, Oil
Yellow #103, Oil Pink #312, Oil Green BG, Oil Blue BOS, Oil Blue
#603, Oil Black BY, Oil Black BS, Oil Black T-505 (all from Orient
Chemical Industries Ltd., Japan), crystal violet (CI42555), methyl
violet (CI 42535), rhodamine B (CI 45170B), malachite green (CI
42000) and methylene blue (CI52015). Examples of sensitisers (d)
are as described above and are, for example,
p,p'-tetramethyldiaminobenzophenone,
p,p'-tetraethylethylaminobenzophenon- e, anthrone, pyrene,
perylene, phenothiazine, benzil, acridine orange, benzoflavin,
cetoflavin T, 9,10-diphenylanthracene, 9-fluorenone, phenanthrene,
acetophenone, 2-nitrofluorene, 5-nitroacenaphthene, benzoquinone,
2-chloro-4-nitroaniline, N-acetyl-p-nitroaniline, p-nitroaniline,
N-acetyl-4-nitro-1-naphthylamine, picramide, anthraquinone,
2-ethylanthraquinone, 2-tert-butyl-anthraquinone,
1,2-benzanthraquinone, 3-methyl-1,3-diaza-1,9-benzanthrone,
dibenzalacetone, 1,2-naphthoquinone, 3-acylcoumarin derivatives,
3,3'-carbonyl-bis(5,7-dimethoxycarbonyl-coumarin),
3-(aroylmethylene)thiazolines, eosin, rhodamine, erythrosin and
coronene.
[0327] Suitable sensitisers are not, however, limited to those
examples.
[0328] Such sensitisers can also be used as photoabsorbers for the
absorption of specific UV rays emitted by light sources. In that
case, the photoabsorber reduces the reflection of light from the
substrate and lessens the effect of multiple reflection inside the
resist film. This reduces the effect of standing waves.
[0329] Further suitable additives (c) are acid-amplifiers,
compounds that accelerate the formation of acid or increase the
acid concentration. Such compounds can be used in the resist
compositions according to the invention, but can also be
advantageous in other applications for the compositions according
to the invention, such as in coatings. Examples of such compounds
are described by Arimitsu, K. et al. in J. Photopolym. Sci.
Technol. 1995, 8, p. 43ff.; by Kudo, K. et al. in J. Photopolym.
Sci. Technol. 1995, 8, p. 45ff.; by W. Huang et al. in SPIE Vol.
3999, pp. 591-597 (2000) and by Ichimura, K. etal. in Chem: Letters
1995, p. 551ff.
[0330] Normally the compositions according to the invention are
dissolved in a suitable solvent before application to the
substrate. Examples of such solvents include ethylene dichloride,
cyclohexanone, cyclopentanone, 2-heptanone, .gamma.-butyrolactone,
methyl ethyl ketone, ethylene glycol monomethyl ether, ethylene
glycol monoethyl ether, 2-methoxyethyl acetate, 2-ethoxyethyl
acetate, 2-ethoxyethanol, diethyl glycol dimethyl ether, ethylene
glycol monoethyl ether acetate, propylene glycol monomethyl ether,
propylene glycol monomethyl ether acetate, toluene, ethyl acetate,
methyl lactate, ethyl lactate, methylmethoxy propionate,
ethylethoxy propionate, methyl pyruvate, ethyl pyruvate, propyl
pyruvate, N,N-dimethylformamide, dimethyl sulfoxide,
N-methylpyrrolidone and tetrahydrofuran. Such solvents can be used
individually or in combinations. Preferred examples thereof are
esters, such as 2-methoxyethyl acetate, ethylene glycol monoethyl
ether acetate, propylene glycol monomethyl ether acetate,
methylmethoxy propionate, ethylethoxy propionate and ethyl
lactate.
[0331] A surfactant may be added to the solvent. Examples of
suitable surfactants are non-ionic surfactants, such as
polyoxyethylene alkyl ethers, e.g. polyoxyethylene lauryl ether,
polyoxyethylene stearyl ether, polyoxyethylene acetyl ether and
polyoxyethylene oleyl ether; polyoxyethylene alkyl aryl ethers,
e.g. polyoxyethylene octyl phenol ether and polyoxyethylene nonyl
phenol ether; polyoxyethylene/polyoxyprop- ylene block copolymers,
sorbitol/fatty acid esters, e.g. sorbitol monolaurate, sorbitol
monopalmitate, sorbitol monostearate, sorbitol monooleate, sorbitol
trioleate; fluorochemical surfactants, such as F-top EF301, EF303
and EF352 (New Akita Chemical Company, Japan), Megafac F171 and
F17.3 (Dainippon Ink & Chemicals, Inc,. Japan), Fluorad FC 430
and FC431 (Sumitomo #M Ltd., Japan), Asahi Guard AG710 and Surflon
S-382, SC101, SC102, SC103, SC104, SC105 and SC106 (Asahi Grass
Col, Ltd., Japan); organosiloxane polymer KP341 (Shin-Etsu Chemical
Co., Ltd., Japan); and acrylic or methacrylic (co)polymers
Poly-flow Now.75 and NO.95 (Kyoeisha Chemical Co., Ltd., Japan).
Generally the proportion of surfactant in the composition is about
2 parts by weight or less, e.g. 0.1 part by weight or less, per 100
parts by weight of solids content in the composition. The
surfactants may be used individually or in combinations.
[0332] The solution of the composition according to the invention
is applied uniformly to a substrate by means of generally known
methods already described above. Suitable layer thicknesses have
also already been indicated above.
[0333] After coating, the solvent is usually removed by heating and
a layer of the photoresist remains on the substrate. The drying
temperatures must, of course, be lower than the temperatures at
which constituents of the resist formulation can decompose or
react. Normally the drying temperatures vary within a range of
about from 60 to 160.degree. C.
[0334] The exposure of the coated substrates has already been
described above.
[0335] After exposure and, if necessary after the thermal
treatment, the exposed sites of the composition (in the case of the
positive resist) or the non-exposed sites of the composition (in
the case of the negative resist) are removed using a developer in a
manner generally known to a person skilled in the art.
[0336] In order to accelerate the catalytic reaction and thus to
ensure the development of a sufficient difference in solubility
between exposed and non-exposed areas of the resist coating, the
coating is preferably heated before development. It is also
possible to carry out heating during the exposure. Generally
temperatures of from 60 to 160.degree. C. are used. The optimum
duration of heating depends upon the heating method used and can be
determined by the person skilled in the art by simple experiments.
It normally ranges from a few seconds to several minutes, e.g. from
10 to 300 seconds when a heating plate is used, and, e.g., from 1
to 30 minutes when a circulated-air oven is used.
[0337] Development is then carried out, wherein the portions of the
coating that are soluble in the developer are removed. If
necessary, the development step can be accelerated by gentle
movement of the sample, careful brushing of the coating in the
developer bath or by development in a spray developing apparatus.
Aqueous-alkali developer fluids customary in the art can be used
for that purpose. Examples thereof include sodium and potassium
hydroxide, the corresponding carbonates, hydrogen carbonates,
silicates and metasilicates, metalfree bases, such as ammonium
compounds, or amines, such as ethylamine, n-propylamine,
diethylamine, di-n-propylamine, triethylamine, methyidiethylamine,
alkanolamines, e.g. dimethylethanolamine, triethanolamine,
quaternary ammonium hydroxides, e.g. tetramethylammonium hydroxide
or tetraethylammonium hydroxide. The developer solutions are
normally up to 0.5N, but are generally diluted before use in a
suitable manner. For example, solvents having a normality of about
from 0.1 to 0.3 are very suitable. The choice of developer will
depend upon the nature of the photocurable coating, especially upon
the nature of the crosslinking agent or the resulting photolysis
products. The aqueous developer solutions may, if necessary, also
comprise small amounts of wetting agents and/or organic solvents.
Examples of typical organic solvents that may be added to the
developer solutions include cyclohexanone, 2-ethoxyethanol,
toluene, acetone, isopropanol and mixtures of two or more such
solvents. A typical aqueous/organic developer system is a system
based on Butylcellosolve.sup.RTM/water.
[0338] The invention relates also to a method of manufacturing a
photoresist by
[0339] (1) applying a composition as described above to a
substrate;
[0340] (2) heating the composition to a temperature of from
60.degree. C. to 160.degree. C.;
[0341] (3) carrying out image-wise exposure with light of a
wavelength of from 150 nm to 1500 nm;
[0342] (4) optionally heating the composition to temperatures of
from 60.degree. C. to 160.degree. C.; and
[0343] (5) subsequently developing with a solvent or an aqueous
alkaline developer.
[0344] The photoresist compositions can be used on all types of
substrate and with all irradiation techniques known to the person
skilled in the art. For example, semiconductor substrates can be
used, such as silicon, gallium arsenide, germanium, indium
antimonide; also substrates covered by oxide or nitride layers,
such as silicon dioxide, silicon nitride, titanium nitride,
siloxanes, and metal substrates and metal-coated substrates coated
with metals such as aluminium, copper, tungsten, etc. The substrate
can also be coated with polymeric materials, for example with
organic antireflective coatings, insulation layers and dielectric
coatings made of polymeric materials.
[0345] The photoresist layer can be irradiated by all customary
techniques, such as direct writing, i.e. with a laser beam or
projection lithography in step-and repeat mode or scanning mode, or
by contact printing through a mask.
[0346] In the case of projection lithography, a large number of
optical conditions can be selected, such as coherent, partially
coherent or incoherent radiation. This includes non-axial
irradiation techniques, for example annular illumination and
quadrupolar irradiation where the radiation is allowed to pass
through only certain regions of the lens, excluding the centre of
the lens.
[0347] The mask used to produce the pattern can be a hard mask or a
flexible mask. The mask can include transparent, semi-transparent
and opaque patterns. The pattern size can include also patterns
that are at or below the resolution limit of the projection optics
and are arranged on the mask in a certain manner in order to modify
the aerial image, intensity and phase modulation of the radiation
after having it has passed through the mask. This includes
phase-shift masks and half-tone phase-shift masks.
[0348] The process for forming an image on the photoresist
composition can be used to generate patterns of any desired
geometry and shape, for example dense and isolated lines, contact
holes, channels, incisions, dots, etc.
[0349] Preference is given to a method wherein the image-wise
exposure is effected by monochromatic or polychromatic radiation in
the wavelength range of from 190 to 450 nm, especially from 190 to
260 nm.
[0350] The invention relates also to the use of compounds of
formula I as described above as photolatent acid donors in the
polymerisation or crosslinking of cationically or
acid-catalytically polymerisable or crosslinkable compounds or to
increase the solubility of compounds that increase their solubility
in a developer under the action of acid, and also to a method for
the photopolymerisation or crosslinking of cationically or
acid-catalytically polymerisable or crosslinkable compounds under
the action of electromagnetic radiation, in which method a compound
of formula I is used as photolatent acid donor.
[0351] The UV irradiation to release the acid is generally effected
with light of a wavelength of from 157 to 600 nm. Suitable
radiation is present, for example, in sunlight or light from
artificial light sources. A large number of widely varying types of
light source may be used. Point sources and also planiform
radiators (lamp carpets) are suitable. Examples thereof include:
carbon arc lamps, xenon arc lamps, medium-, high- and low-pressure
mercury lamps, doped where appropriate with metal halides (metal
halide lamps), microwave-excited metal vapour lamps, excimer lamps,
superactinic fluorescent tubes, fluorescent lamps, argon
incandescent lamps, flashlamps, photographic flood lights, electron
beams and X-rays.
[0352] The distance between the lamp and the substrate to be
exposed can vary according to the intended use and the type and
strength of the lamp and may be, for example, from 2 cm to 150 cm.
Laser light sources, for example excimer lasers, are also suitable.
Lasers in the visible range can also be used.
[0353] The following Examples illustrate the invention further. As
in the remainder of the description and in the patent claims,
amounts given in parts or percentages relate to weight, unless
otherwise mentioned. When alkyl or alkoxy radicals having more than
three carbon atoms are indicated in the Examples without reference
to their isomeric form, the data relate to the respective
n-isomers.
EXAMPLE 1
[0354] Preparation of (4-isobutylphenyl)-ptolyl-iodonium
hexafluorophosphate
[0355] 45.22 g (0.21 mol) of 4-iodotoluene in 326 g of 75% sulfuric
acid are introduced into a 750 ml flask having a reflux condenser,
a thermometer, a stirrer and a nitrogen supply. 29.2 g (0.22 mol)
of isobutylbenzene are then added, and the heterogeneous mixture is
cooled to 10.degree. C. 94.7 g (0.41 mol) of ammonium
peroxodisulfate are added in portions so that the temperature does
not exceed 15.degree. C. The reaction mixture is stirred at room
temperature for 5 hours. The reaction mixture is then added over
the course of 40 minutes at 5-10.degree. C. to a well stirred
suspension of 38.18 g (0.21 mol) of potassium hexafluorophosphate
in 600 ml of water and 500 ml of acetic acid ethyl ester. The
mixture is maintained at room temperature for 1.5 hours, and the
phases are separated. The organic phase is washed with water and 5%
sodium hydrogen carbonate, and the solvent is removed in vacuo. 89
g (0.18 mol; 86%) of pisobutylphenyl-p-tolyl-iodonium
hexafluorophosphate are obtained in the form of a brownish resin.
The product is purified further by chromatography
(dichloromethane:ethanol 95:5 on SiO.sub.2) or by recrystallisation
from chloroform/hexane.
[0356] An analytically pure sample has the following physical
properties: white powder, melting point (m.p.) 90-92.degree. C. The
.sup.1H-NMR spectrum (CDCl.sub.3) exhibits shift signals at the
following values 6 [ppm]: 7.9 (4H, m, ArH), 7.23 (4H, m, ArH), 2.45
(2H, d, J=6.2 Hz, CH.sub.2), 1.81 (1H, m, CH(CH.sub.3).sub.2), 0.85
(6H, d, J=6.2 Hz, 2 CH.sub.3).
[0357] Elemental analysis: calculated for C.sub.17H.sub.20F.sub.6 I
P (496.21)
1 C [%] H [%] F [%] P [%] calc.: 41.15 4.06 22.97 6.24 found: 41.15
4.19 22.82 5.95
EXAMPLES 2-13
[0358] The compounds of Examples 2-13 are prepared in a manner
analogous to that described in Example 1, from the appropriate
substituted aromatic compounds. The structures and the physical
data are given in Table 1
2TABLE 1 18 elemental analysis calc. [%] physical found [%] Ex.
X/X.sub.1 Y A properties C H F 2 4-C(CH.sub.3).sub.3 4-CH.sub.3
PF.sub.6 white powder, 41.15 4.06 22.97 /H m.p. 105-108.degree. C.
41.27 4.23 22.81 3 4-C(CH.sub.3).sub.2C.sub.2H.- sub.5 4-CH.sub.3
PF.sub.6 whitish powder, 42.37 4.35 22.34 /H m.p. 94-98.degree. C.
42.73 4.59 20.44 4 4-cyclohexyl 4-CH.sub.3 PF.sub.6 glassy, brown
43.70 4.25 21.83 /H resin 46.41 4.66 19.84 5
4-CH.sub.2--CH(CH.sub.3).sub.2 2-CH.sub.3 PF.sub.6 whitish powder,
41.15 4.06 22.97 /H m.p. 120.degree. C. 40.99 4.00 22.80 6
4-CH.sub.2--CH(CH.sub.3).sub.2 3-CH.sub.3 PF.sub.6 glassy, brown
41.15 4.06 22.97 /H resin 41.66 3.87 22.64 7 4-C(CH.sub.3).sub.3
3-CH.sub.3 PF.sub.6 yellow crystals 41.15 4.06 22.97 /H m.p.
104-106.degree. C. 41.53 4.27 22.07 8
4-CH.sub.2--CH(CH.sub.3).sub.2 4-C.sub.2H.sub.5 PF.sub.6 glassy,
brown 42.37 4.35 22.34 /H resin 43.02 4.32 21.70 9
4-CH.sub.2--CH(CH.sub.3).sub.2 4-CH.sub.3 SbF.sub.6 viscous oil
34.79 3.43 19.42 /H 34.75 3.47 19.29 10
4-CH.sub.2--CH(CH.sub.3).sub.2 4-CH-- PF.sub.6 yellow resin 43.53
4.61 21.74 /H (CH.sub.3).sub.2 43.55 4.77 20.63 11
4-CH.sub.2--CH(CH.sub.3).sub.2 4-CH.sub.3 4-CH.sub.3--Ph-- glassy,
brown 55.18 5.21 -- /H SO.sub.3 resin 54.75 5.43 -- 12
4-CH.sub.2--CH(CH.sub.3).sub.2 4-CH.sub.3 (.+-.) camphor glassy,
brown 55.67 6.06 -- /H sulfonate resin 55.71 6.21 -- 13
4-CH(CH.sub.3).sub.2 4-CH.sub.3 PF.sub.6 beige powder, 43.53 4.61
21.74 /2-CH(CH.sub.3).sub.2 m.p. 137-141.degree. C. 43.68 4.71
21.24
EXAMPLE 14
[0359] (4-Methylphenyl)(4'-isobutylphenyl)iodonium Nonaflate
[0360] 4.5 g of potassium nonaflate is suspended in 15 ml of water.
To the solution is added 4.93 g of the crude
(4-methylphenyl)(4'-isobutylphenyl)- iodonium hydrogensulfate
dissolved in 10 ml of methanol. The mixture is stirred for 1 hour
at room temperature. 15 ml of methylene chloride is added to the
solution and stirred overnight at room temperature. The product is
extracted with methylene chloride and the organic layer is washed
with water, dried over MgSO.sub.4, and concentrated. The residue is
purified by flash chromatography on silica gel with methylene
chloride and ethanol (95:5) as eluent, yielding 2.46 g (3.8 mmol;
34%) of (4-methylphenyl)(4'-isobutylphenyl)iodonium nonaflate as a
brown resin. The structure is confirmed by the .sup.1H-NMR spectrum
(CDCl.sub.3). .delta. [ppm]: 0.88 (d, 6H), 1.84 (m, 1H), 2.41 (s,
3H), 2.50 (d, 2H), 7.21-7.26 (m, 4H), 7.84 (d, 4H).
[0361] Elemental analysis: calculation for
C.sub.21H.sub.20O.sub.3F.sub.9S- I
3 C [%] H [%] F [%] calc.: 38.78 3.10 26.29 found: 38.80 3.09
26.17
EXAMPLE 15
[0362] Photocuring of a White-pigmented Epoxy Resin Composition
[0363] A photocurable formulation is prepared by mixing the
following components
[0364] 36.0 parts of bisphenol-A epoxy resin (.sup.RTMAraldit GY
250, from Vantico),
[0365] 14.4 parts of trimethylolpropane triglycidyl ether
(.sup.RTMGrinolit V51-31, from Emschemie),
[0366] 9.6 parts of C.sub.12/14alkyl glycidyl ether
(.sup.RTMGrinolit Epoxid 8, from Emschemie), and
[0367] 40.0 parts of rutile titanium dioxide (.sup.RTMR-TC2, from
Tioxide).
[0368] The formulation is heated to 50.degree. C. and is mixed
uniformly by stirring for 20 minutes in the presence of glass beads
as an aid. 1.5% of the compound of Example 1 and 0.5% of a mixture
of 2-isopropylthioxanthone and 4-isopropylthioxanthone
(.sup.RTMQuantacure ITX) are added and dissolved in the formulation
by stirring. The formulation is applied, in a layer thickness of 12
micrometres, to a brushed aluminium sheet and is irradiated in an
exposure apparatus (from Fordertechnik) with a fusion M-lamp
(120W/cm). For that purpose, the sample is passed under the lamp on
a conveyor belt moving at a speed of 10 m/min. A fully cured,
non-sticky surface is obtained. The gloss of the surface is
measured at an angle of incidence of 60.degree. and is 97.
EXAMPLE 16
[0369] The procedure is analogous to that of Example 15, but the
compound of Example 7 is used instead of the compound of Example 1.
A fully cured, non-sticky surface is obtained. The gloss of the
surface is measured at an angle of incidence of 600 and is 96.
EXAMPLE 17
[0370] Determination of the Photocrosslinking Reactivity in a
Cationically Curable Epoxy Composition
[0371] A composition is prepared by dissolving
[0372] 30.0 parts of epoxycresol novolak (.sup.RTMAraldit ECN 9699,
Vantico),
[0373] 10.0 parts of 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexane
carboxylate (.sup.RTMAraldit CY 179, Vantico)
[0374] in 60 parts of propylene glycol methyl ether acetate
(PGMEA).
[0375] To that solution there are added 1.6 parts of an iodonium
salt and 0.4 part of a mixture of 2-isopropylthioxanthone and
4-isopropylthioxanthone (.sup.RTMQuantacure ITX), which are
dissolved in the formulation by stirring.
[0376] The composition is applied by spin-coating, using a Convac
Spincoater at 500 revolutions per minute for 30 seconds, to a 0.5
mm thick, anodically oxidised aluminium sheet and is then dried at
110.degree. C. on a heating plate for 60 seconds to form a solid, 5
micrometre thick film. The film is then exposed on the aluminium
substrate for 100 seconds in a Suss contact exposure apparatus MJB
55 with a high-pressure mercury lamp through a 15-step quartz
grey-scale transmission mask ("Photoresist Multi Density Step
Tablet") using the contact process, and is then heated on a heating
plate for 120 seconds at 140.degree. C. and subsequently developed
for 30 seconds in propylene glycol methyl ether acetate (PGMEA),
then rinsed for 10 seconds with 2-propanol and finally blown dry
with compressed air. The lowest transmission value at which the
film under the corresponding transmission field of the mask is not
dissolved away is then determined. That value characterises the
crosslinking reactivity and thus the photosensitivity of the
photoinitiator used, with the composition otherwise being the same
and the process conditions being the same. Since the exposure
energy is calculated by the following formula 1 exposure energy [
mJ / cm 2 ] = transmission .times. exposure time [ s ] .times.
intensity of radiation [ mW / cm 2 ]
[0377] then, with the same exposure time and the intensity of
radiation being constant, the minimum exposure dose required for
full crosslinking (photosensitivity) is directly proportional to
the minimum transmission value at which the film is still
sufficiently crosslinked not to be dissolved away in the developer.
The radiation intensity in all the tests is constant at 7.1
mW/cm.sup.2, determined using an OAI 400 probe and an OAI
Powermeter.
[0378] Since the exposure in the Suss contact exposure apparatus
used is distinguished by the fact that, during the irradiation,
virtually no heat acts upon the substrate, the thermal activation
of the epoxy crosslinking by the photochemically generated cations
can take place, separately from the irradiation, in a highly
reproducible manner in a subsequent heating step on a
temperature-controlled heating plate. With the heating temperature
and time being the same, differences in the measured transmission
step at which the film is not yet dissolved away from the substrate
during development can therefore be directly attributed to the
different photosensitivity or photoreactivity of the iodonium salts
or sensitisers used.
[0379] The transmission value can thus be used directly as a
relative measure of the exposure energy required. A low value
corresponds to high photoreactivity (high photosensitivity) and a
high value corresponds to low photoreactivity (low
photosensitivity) of the photoinitiator (iodonium salt) or
sensitiser system used.
[0380] The so-determined minimum transmission values necessary for
crosslinking are given for examples of the iodonium salts according
to the invention in Table 2 and for comparative examples in Table
2a, in the column "Example 17".
EXAMPLE 18
[0381] Determination of the Photocrosslinking Reactivity in an
Acid-catalytically Curable Melamine Resin-phenolic Resin
Composition
[0382] A composition is prepared by dissolving
[0383] 18.0 parts of poly(4-hydroxystyrene) (VP 8000, Nisso)
[0384] 8.3 parts of hexamethoxymethylmelamine resin (.sup.RTMCymel
301, Dyno Cyanamid)
[0385] 1.2 parts of an iodonium salt photoinitiator according to
the invention, and
[0386] 0.3 part of a mixture of 2-isopropylthioxanthone and
4-isopropylthioxanthone (.sup.RTMQuantacure ITX)
[0387] in 72.2 parts of propylene glycol methyl ether acetate
(PGMEA) and is applied analogously to Example 17. The layer
thickness of that composition after spin-coating and drying of the
layer is 5 micrometres. Before development, a post-exposure bake is
carried out at 140.degree. C. on a heating plate for a duration of
120 seconds. The layer is developed for 60 seconds in aqueous 2.38%
tetramethylammonium hydroxide solution, rinsed in water for 10
seconds and blown dry with compressed air. Determination of the
minimum transmission values necessary for crosslinking is effected
as described in Example 17. The results are again given in Table 2
for the compounds according to the invention and in Table 2a for
comparative examples, in each case in the column "Example 18".
[0388] The compositions according to the invention combine high
photosensitivity (low minimum transmission values) for effective
full crosslinking, both in epoxy curing and in acid-catalytic
melamine resin curing, and do not produce any health-endangering
benzene upon exposure.
4TABLE 2 In each case 4% of the photoinitiator according to the
invention and 1% of .sup.RTMQuantacure ITX were used. minimum
relative exposure dose Photoinitiator [% transmission] from Example
Example 17 Example 18 1 19 12 10 6 20 14 5 5 21 12 5 8 22 22 5 2 23
14 20 7 24 12 5 3 25 20 5 4 26 22 14 10 27 25 14
[0389]
5TABLE 2a Comparative Examples using iodonium salts not according
to the invention In each case 4% of the iodonium photoinitiator and
1% Quantacure ITX were used. minimum relative exposure dose
Comparative [% transmission] compound Formula Example 17 Example 18
A 28 40 40 B 29 25 40 C 30 30 50
EXAMPLE 19
[0390] In accordance with Example 17, a formulation is prepared
with (4-isobutylphenyl)-mtolyliodonium hexafluoroantimonate from
Example 9, instead of the iodonium salt of Example 1. Application
and evaluation are carried out as described in Example 17. The
minimum transmission required for crosslinking is only 1%.
EXAMPLE 20
[0391] In accordance with Example 17, a formulation is prepared
with the iodonium salt of Example 1, but the sensitiser mixture of
2-isopropylthioxanthone and 4-isopropyl-thioxanthone
(.sup.RTMQuantacure ITX) is completely replaced by the same amount
(1 part) of 1-chloro-4-propoxythioxanthen-9-one (.sup.RTMQuantacure
CPTX). Application and evaluation are carried out as described in
Example 17. The measured minimum transmission required for
crosslinking is 12%.
EXAMPLE 21
[0392] In accordance with Example 17, a formulation is prepared
with the iodonium salt of Example 1, but the sensitiser mixture of
2-isopropylthioxanthone and 4-isopropyl-thioxanthone
(.sup.RTMQuantacure ITX) is completely replaced by the same amount
(1 part) of 3,3'-carbonyl-bis(7-dimethylaminocoumarin). Application
and evaluation are carried out as described in Example 17. The
measured minimum transmission required for crosslinking is 10%.
EXAMPLE 22
[0393] In accordance with Example 17, a formulation is prepared
with the iodonium salt of Example 1, the sensitiser mixture of
2-isopropylthioxanthone and 4-isopropylthioxanthone
(.sup.RTMQuantacure ITX) being completely replaced by the same
amount (1 part) of 9,10-dimethoxy-2-ethylanthracene (Aldrich).
Application and evaluation are carried out as described in Example
17. The measured transmission required for crosslinking is 5%.
EXAMPLE 23
[0394] Cationic Clear Lacquer Based on an Epoxidised Soybean
Oil
[0395] 2% of iodonium salt photoinitiator are added to every 100
parts of epoxidised soybean oil (Edenol D 81, Cognis).
[0396] The mixtures are applied to white melamine-coated chipboard
panels using a 100 .mu.m knife and are irradiated under 2.times.120
W/cm medium-pressure mercury lamps at a belt speed of 3.times.5
m/min. The initiators used and the curing results are given in the
following Tables 3 (initiator according to the invention) and 3a
(iodonium salts not according to the invention).
6TABLE 3 Observations after Photoinitiator from Example irradiation
1 31 well cured film
[0397]
7TABLE 3a Comparative Examples using lodonium salts not ac- cording
to the invention Observations after Photoinitiator irradiation D 32
no curing E 33 no curing F 34 no curing
EXAMPLE 24
[0398] A blue flexo printing ink formulation is prepared by
intimately triturating:
[0399] 73.2 parts of .sup.RTMCyracure UVR-6105
(3,4-epoxycyclohexylmethyl carboxylate, Union Carbide)
[0400] 10.5 parts of .sup.RTMCyracure UVR-6000
(3-ethyl-3-hydroxymethyl-ox- etane, Union Carbide)
[0401] 5.3 parts of .sup.RTMTONE 0301
(.epsilon.-caprolactone-triol, Union Carbide)
[0402] 0.5 part of .sup.RTMBYK 307 (polyether-modified
dimethyl-polysiloxane copolymer, Byk)
[0403] 10.5 parts of .sup.RTMIrgalit Blue GLO (copper
phthalocyanine, Ciba Specialty Chemicals) and additionally 6% of
(4-isobutylphenyl)-~tolyl-iod- onium hexafluorophosphate (compound
of Example 1) and 0.5% of a mixture of 2-isopropylthioxanthone and
4-isopropylthioxanthone (.sup.RTMQuantacure ITX).
[0404] The cationic printing ink is applied, in a layer thickness
of 4 micrometres, to aluminium foil using a K-bar coater and is
cured in an IST exposure apparatus equipped with a 120 W/cm
medium-pressure mercury lamp. The printed substrate is then heated
in an oven at 100.degree. C. for 5 minutes and the fastness of the
surface to wiping and resistance of the cured printing ink layer is
determined by the number of double-rub tests using methyl ethyl
ketone (MEK)-impregnated cellulose in which the printing ink is not
removed.
[0405] In the present case, at a curing rate of 100 m/min the
printing ink is fast to wiping and resistant to 12 double-rub tests
with MEK.
EXAMPLE 25
[0406] A flexo printing ink is prepared and tested analogously to
Example 24, but the photoinitiator of Example 1 is replaced by
(4-isobutylphenyl)-p-ethylphenyliodonium hexafluorophosphate
(compound of Example 8).
[0407] At a curing rate of 20 m/min, the printing ink is fast to
wiping and resistant to >50 MEK double-rub tests.
EXAMPLE 26
[0408] A flexo printing ink is prepared and tested analogously to
Example 24, but the photoinitiator of Example 1 is replaced by
4-tert-butylphenyl-ptolyliodonium hexafluorophosphate (compound of
Example 2).
[0409] At a curing rate of 70 m/min, the printing ink is fast to
wiping and resistant to 43 MEK double-rub tests.
EXAMPLE 27
[0410] A flexo printing ink is prepared and tested analogously to
Example 24, but the photoinitiator of Example 1 is replaced by
4-[2-(2-methyl)-butyl)-phenyl]-p-tolyliodonium hexafluoro-phosphate
(compound of Example 3).
[0411] At a curing rate of 20 m/min, the printing ink is fast to
wiping and resistant to 48 MEK double-rub tests.
[0412] Comparison with Compound B
[0413] A flexo printing ink is prepared and tested analogously to
Example 24, but the photoinitiator of Example 1 according to the
invention is replaced by di(4-tert-butylphenyl)iodonium
hexafluorophosphate (B).
[0414] Even at a reduced curing rate of 5 m/min, the printing ink
is still not fast to wiping and does not withstand a single MEK
double-rub test.
[0415] Comparison with Compound C
[0416] A flexo printing ink is prepared and tested analogously to
Example 24, but the photoinitiator of Example 1 according to the
invention is replaced by di(4-isobutylphenyl)iodonium
hexafluorophosphate (C).
[0417] The printing ink is not fast to wiping until a curing rate
of 20 m/min and it is resistant to 9 MEK double-rub test.
[0418] Comparison with Compound E
[0419] A flexo printing ink is prepared and tested analogously to
Example 24, but the photoinitiator of Example 1 according to the
invention is replaced by n-decylphenyl-phenyliodonium
hexafluorophosphate (E).
[0420] The printing ink is not fast to wiping until a curing rate
of 30 m/min and it is resistant to 2 MEK double-rub tests.
EXAMPLE 28
[0421] Positive Photoresist
[0422] A composition is prepared by dissolving
[0423] 37.5 parts of
poly[(4-tetrahydropyranyloxystyrene)-co-(4-hydroxysty- rene)] with
a 31 mol % proportion of 4-tetrahydropyranyloxystyrene and a 69 mol
% proportion of 4-hydroxystyrene in 120 parts of propylene glycol
methyl ether acetate (PGMEA) and subsequently dissolving one of the
iodonium salts mentioned below, in each case in a concentration of
2.0%, based on the amount of polymer present, and is applied,
analogously to Example 17, in a layer thickness of 1 micrometre, to
an aluminium sheet by spin-coating at 2000 revolutions per minute.
After 60 seconds' drying on a heating plate at 110.degree. C.,
analogously to Example 17 exposure is effected through a
multidensity chrome mask using the contact process with a
high-pressure mercury lamp and a penetrative UV exposure apparatus
Oriel Type 7800 for 120 seconds. The intensity of radiation,
measured using an OAI 220 measuring probe, is 1.4 mW/cm.sup.2 and
using an OAI 400 measuring probe is 2.3 mW/cm.sup.2. Before
development, a post-exposure bake is effected at 100.degree. C. on
a heating plate for a duration of 60 seconds. The layer is
developed for 60 seconds in aqueous 2.38% tetramethylammonium
hydroxide solution, rinsed in water for 10 seconds and blown dry
with compressed air. Determination of the minimum relative exposure
dose is carried out as described in Example 17, but in this case
the first transmission field at which the positive resist was
completely removed in the developer was determined.
[0424] The following results were obtained:
[0425] a) (4-isobutylphenyl)-ptolyl-iodonium hexafluorophosphate,
compound of Example 1, as iodonium salt:
[0426] The minimum transmission value at which the resist is fully
developed is 16%, corresponding to an exposure energy of 26.9
mJ/cm.sup.2 using an OAI 220 probe.
[0427] b) (4-isobutylphenyl)-m-tolyl-iodonium hexafluorophosphate,
compound of Example 6, as iodonium salt:
[0428] The minimum transmission value at which the resist is fully
developed is also 16%, corresponding to an exposure energy of 26.9
mJ/cm.sup.2 using an OAI 220 probe.
[0429] c) (4-isobutylphenyl)-ptolyl-iodonium p-tosylate, compound
of Example 11, as iodonium salt:
[0430] The minimum transmission value at which the resist is fully
developed is also 16%, corresponding to an exposure energy of 26.9
mJ/cm.sup.2 using an OAI 220 probe.
EXAMPLE 29
[0431] Chemically Amplified Positive Photoresist
[0432] A chemically amplified positive resist formulation is
prepared by mixing the following components:
[0433] 100.00 parts of a resin binder (a copolymer of 22 mol-% of
styrene, 69 mol-% of p-hydroxystyrene and 9 mol-% of t-butyl
acrylate, having a Mw of 9850; .sup.RTMMaruzen MARUKA LYNCUR
PHS/STY/TBA, provided by Maruzen Oil Company, Japan)
[0434] 0.48 parts of a levelling agent (FC-430, provided by 3M)
[0435] 475.00 parts of propylene glycol methyl ether acetate
(PGMEA) (provided by Tokyo Kasei, Japan)
[0436] 4.0 parts of the photoacid generator of example 14.
[0437] The resist formulation is spin coated onto a hexamethyl
dimethylsilane-treated silicone wafer at 3000 rpm for 45 seconds
and softbaked for 90 seconds at 140.degree. C. on a hotplate to
obtain a film thickness of 800 nm. The resist film is then exposed
to deep UV radiation of 254 nm wavelength through a narrow band
interference filter and a multidensity quartz mask using an Ushio's
high pressure mercury lamp, UXM-501 MD, and a mask aligner Canon
PLA-521. The samples then are post exposure baked for 90 seconds at
140.degree. C. on a hotplate and developed. The exposure intensity
is measured with a Unimeter UIT-150 from Ushio. The Dose to Clear
(E.sub.0), which is the dose just sufficient to completely remove
the resist film with 60 seconds immersion development in 1.79%
aqueous tetramethyl ammonium hydroxide developer is determined from
the measured contrast curve. The Dose to Clear (E.sub.0) is 0.68
mJ/cm.sup.2.
* * * * *