U.S. patent application number 09/842798 was filed with the patent office on 2001-09-27 for microscope with a dynamic damper.
Invention is credited to Okada, Naobumi.
Application Number | 20010024320 09/842798 |
Document ID | / |
Family ID | 27319856 |
Filed Date | 2001-09-27 |
United States Patent
Application |
20010024320 |
Kind Code |
A1 |
Okada, Naobumi |
September 27, 2001 |
Microscope with a dynamic damper
Abstract
A microscope with a dynamic damper, and an optical system
including a plurality of optical elements and having an optical
axis. The dynamic damper attenuates vibration of the microscope in
the direction of the optical axis by using part of the plurality of
optical elements as a mass displaceable in the direction of the
optical axis in accordance with said vibration.
Inventors: |
Okada, Naobumi; (Asaka-shi,
JP) |
Correspondence
Address: |
KENYON & KENYON
1500 K STREET, N.W., SUITE 700
WASHINGTON
DC
20005
US
|
Family ID: |
27319856 |
Appl. No.: |
09/842798 |
Filed: |
April 27, 2001 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
09842798 |
Apr 27, 2001 |
|
|
|
09375434 |
Aug 17, 1999 |
|
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Current U.S.
Class: |
359/368 ;
359/896 |
Current CPC
Class: |
G02B 21/24 20130101 |
Class at
Publication: |
359/368 ;
359/896 |
International
Class: |
G02B 021/00; G02B
001/00; G02F 001/00 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 28, 1998 |
JP |
10-243157 |
May 28, 1999 |
JP |
11-149999 |
Claims
What is claimed:
1. A microscope having an optical axis comprising: a frame
including a base arm, a column extending vertically from said base
arm and an upper arm; a dynamic damper including: a fixed part
coupled to the upper side of said upper arm, and a movable part
supported for linear movement in the direction of said optical axis
with respect to said fixed part; an optical system coupled to said
movable part, said optical system comprising a displaceable mass of
said dynamic damper; and parallel light rays extending along part
of said optical axis, said dynamic damper surrounding said optical
axis at the position of said parallel light rays.
2. The microscope according to claim 1, further comprising: a
sensor for detecting vibration of said fixed part, and outputting a
vibration signal; an actuator for moving said movable part in a
direction of said optical axis; and a controller for outputting a
driving signal to move said actuator, said driving signal generated
on the basis of said vibration signal so as to attenuate said
vibration.
3. The microscope according to claim 1, further comprising: a
damping member for attenuating said vibration of said movable part
with respect to said fixed part, said damping member disposed
between said movable part and said fixed part.
4. The microscope according to claim 1, wherein the microscope is a
laser scanning microscope.
5. The microscope according to claim 1, wherein the microscope is a
confocal microscope.
6. The microscope according to claim 1, wherein said optical system
comprises an ocular tube.
7. The microscope according to claim 1, wherein said optical system
comprises an ocular tube, and an intermediate attachment.
Description
[0001] This application is a continuation of application Ser. No.
09/375,434 filed Aug. 17, 1999.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] This invention relates to a microscope with a dynamic
vibration absorber.
[0004] 2. Description of Related Art
[0005] In a microscope of high resolving power, slight vibration
will cause a great disturbance. Accordingly, measures against the
vibration have been taken. For example, an air table and a rubber
foot are used therefor.
[0006] The air table attenuates vibration from the floor by
utilizing an air spring or the like and serves as a table for
mounting a microscope. Further, there is proposed an air table in
which a sensor detects vibration of the table to drive and control
actuators provided between the floor and the table so that the
vibration can be cancelled.
[0007] The rubber foot is arranged on the bottom surface of a
microscope to prevent the microscope from becoming unsteady and to
attenuate vibration transmitted from a surface on which the
microscope is located. In addition, the rubber foot can reduce
rolling or pitching of the whole microscope.
[0008] Furthermore we know a dynamic vibration absorber (a dynamic
damper) which is a kind of means for attenuating vibration.
[0009] The dynamic vibration absorber reduces vibration by means of
a force due to vibration of a mass and is divided into a passive
dynamic vibration absorber and an active dynamic vibration
absorber. The passive dynamic vibration absorber comprises a mass,
a spring element, and a damping element. A plurality of masses,
springs and/or damping elements may be used in some kinds of
apparatus. The active dynamic vibration absorber uses a vibration
sensor to detect vibration and drives a mass by means of an
actuator to reduce the vibration. The dynamic vibration absorber is
applied to various technologies such as construction and automobile
industries and is disclosed in, for example, Japanese Laid-Open
Patent Publication Nos. Hei 3-250165 and Hei 8-21483.
[0010] In the passive dynamic vibration absorber, the mass is
secured via the spring element and the damping element to a
structure whose vibration should be reduced. When the structure
vibrates so that the relative displacement between the mass and the
structure varies, vibration energy is consumed by the damping
element between the mass and the structure, thereby attenuating the
vibration.
[0011] In the active dynamic vibration absorber, the mass is
secured via the actuator to a structure whose vibration should be
reduced. After the vibration sensor detects vibration of the
structure, the actuator drives the mass according to the detected
vibration so that the vibration of the structure can be cancelled
by a force of the mass.
[0012] As described above, in a microscope of high resolving power,
vibration is reduced by means of an air table, a rubber foot, a
dynamic vibration absorber, or the like. However, in recent years,
these measures against the vibration have become insufficient.
[0013] For example, microscopes having a resolving power of 1 nm or
less, such as a tunneling microscope (see U.S. Pat. No. 4,823,044)
and an atomic force microscope (see U.S. Pat. No. 5,260,824 and
U.S. Pat. No. 5,672,816), have been put to practical use. Further,
a scanning laser microscope provides an observation image which is
very clear in comparison with that of a conventional microscope.
These microscopes require very strict setting environments. For
example, air vibration caused by voice, noise, an air conditioner
or the like will cause a deterioration of the observation
image.
[0014] Further, a motor driving mechanism is incorporated in a
microscope for electrical driving and is also a source of
vibration. That is, when the driving mechanism operates to move a
sample stage, perform focusing, or change over filters, prisms or
the like, mechanical vibration is generated from the driving
mechanism.
[0015] Under the circumstances, the air table is used for the
measures against the vibration. The air table is to insulate a
structure on the table from floor vibration and is not effective in
insulating the structure from a disturbance, such as air vibration
caused by voice, noise, an air conditioner or the like, and
mechanical vibration generated by an electrically driven microscope
itself.
[0016] The rubber foot is to prevent a microscope from being
unsteady when it is installed, and to reduce rolling or pitching of
the entire microscope. It does not directly contribute to reducing
the vibration that varies the relative positions of a sample and an
observation optical system.
[0017] The dynamic vibration absorber is used for reducing air
vibration caused by voice, noise, an air conditioner or the like,
and mechanical vibration generated by an electrically driven
microscope itself that are applied to a structure affecting an
observation image of a sample, such as an objective lens and a
sample stage. That is, the dynamic vibration absorber is suitable
for reducing local vibration, but has the problems that its setting
place is restricted and that the microscope becomes heavy because
the mass is used.
[0018] It is explained why the setting place is restricted. In the
microscope, the structures whose vibration should be reduced are
the sample stage and the observation optical system. In many cases,
the observation optical system is supported by a cantilever-type
frame. Since the cantilever-type frame has a shape that is
susceptible to vibration, it is desired to reduce the vibration.
However, as the observation optical system exists, the setting
place of the dynamic vibration absorber is restricted. Accordingly,
in the conventional microscope system, the space for incorporation
the dynamic vibration absorber has not been studied.
[0019] The reason why the microscope becomes heavy due to the use
of the mass is as follows: Since the passive dynamic vibration
absorber has no vibration sensor, it cannot cope with a change of
the structure whose vibration should be reduced, especially when
the equivalent mass (mass of a physical model of a structure) of
the mass is smaller than that of the structure whose vibration
should be reduced. Since the frame of a microscope is highly rigid
and its equivalent mass is large, a heavy mass is required.
Accordingly, the microscope becomes heavy (and a large setting
space is also necessary). When the microscope becomes substantially
heavy, it is necessary to redesign the frame or the like.
BRIEF SUMMARY OF THE INVENTION
[0020] In an embodiment of the present invention, a microscope
having an optical axis has a frame including a base arm, a column
extending vertically from the base arm and an upper arm. Dynamic
damper includes a fixed part coupled to the upper side of the upper
arm, and a movable part supported for linear movement in the
direction of the optical axis with respect to the fixed part. An
optical system is coupled to the movable part, the optical system
comprising a displaceable mass of the dynamic damper. Parallel
light rays extend along part of the optical axis, with the dynamic
damper surrounding the optical axis at the position of the parallel
light rays.
[0021] The microscope may also include a sensor for detecting
vibration of the fixed part, and outputting a vibration signal, an
actuator for moving the movable part in a direction of the optical
axis; and a controller for outputting a driving signal to move the
actuator, the driving signal generated on the basis of the
vibration signal so as to attenuate the vibration.
[0022] A damping member for attenuating the vibration of the
movable part with respect to the fixed part may be disposed between
the movable part and the fixed part. The microscope may be, for
example, a laser scanning microscope or a confocal microscope. The
optical system may be an ocular tube or an ocular tube, and an
intermediate attachment.
BRIEF DESCRIPTION OF THE DRAWINGS
[0023] The accompanying drawings, which are incorporated in and
constitute a part of the specification, illustrate presently
preferred embodiments of the invention, and together with the
general description given above and the detailed description of the
preferred embodiments given below, serve to explain the principles
of the invention.
[0024] FIG. 1 is a side view of a microscope with an active dynamic
vibration absorber according to a first embodiment of the present
invention.
[0025] FIG. 2 is a side view of a frame of the microscope in FIG.
1.
[0026] FIG. 3 is a sectional view of the active dynamic vibration
absorber of the microscope in FIG. 1.
[0027] FIG. 4 is a schematic view of a physical model of the active
dynamic vibration absorber in FIG. 3.
[0028] FIG. 5 is a graph of frequency response showing a vibration
reducing effect of the active dynamic vibration absorber in FIG.
3.
[0029] FIG. 6 is a side view of a microscope with a passive dynamic
vibration absorber according to a second embodiment of the present
invention.
[0030] FIG. 7 a sectional view of the passive dynamic vibration
absorber of the microscope in FIG. 6.
[0031] FIG. 8 is a schematic view of a physical model of the
passive dynamic vibration absorber in FIG. 7.
[0032] FIG. 9 is a side view of a microscope with dynamic vibration
absorbers according to a third embodiment of the present
invention.
[0033] FIG. 10 is a side view of a measuring microscope with an
active dynamic vibration absorber according to a fourth embodiment
of the present invention.
[0034] FIG. 11 is a side view of a confocal microscope with an
active dynamic vibration absorber according to a fifth embodiment
of the present invention.
DETAILED DESCRIPTION OF THE INVENTION
First Embodiment
[0035] Referring to the drawings, a first embodiment of the present
invention is described.
[0036] FIG. 1 shows the structure of a microscope with an active
dynamic vibration absorber.
[0037] A frame 1 of the microscope is provided with a sample stage
2, on which a sample M is mounted. The frame 1 has an arm 3
projecting above the sample stage 2. Above the arm 3, there are an
ocular tube 4, an intermediate attachment 5 and a CCD camera 6
which constitute an observation optical system. Mounted on a lower
surface of the arm 3 is a revolving nosepiece 7 with a plurality of
infinity-corrected objectives 8. The ocular tube 4 is provided with
an imaging lens 9 which focuses parallel observation rays L from
the objective 8 upon an image plane 6a of the CCD camera 6. The
microscope is also provided with an illumination optical system for
illuminating the sample M.
[0038] The microscope comprises a dynamic vibration absorber unit
10 for reducing vibration of the arm 3 that is a structure whose
vibration should be reduced. When the frame 1 vibrates as shown in
FIG. 2, the relative positions of the observation optical system
and the sample M vary because of the vibration so that an
observation image will be blurred. Accordingly, it is necessary to
reduce the vibration of the frame 1 by means of the dynamic
vibration absorber.
[0039] The dynamic vibration absorber unit 10 is arranged between
the arm 3 and microscope components: the ocular tube 4, the
intermediate attachment 5 and the CCD camera 6, which constitute
the observation optical system functioning as a mass 20 of the
active dynamic vibration absorber.
[0040] FIG. 3 shows a structure of the dynamic vibration absorber
unit 10.
[0041] The dynamic vibration absorber unit 10 comprises a
cylindrical structure-side member 11 on the side of the structure
whose vibration should be reduced; a mass-side member 12 slidably
fitted into the structure-side member 11; and a piezoelectric
actuator 13 and a spring 14 interposed between the structure-side
member 11 and the mass-side member 12. The piezoelectric actuator
13 and the spring 14 support the ocular tube 4, the intermediate
attachment 5 and the CCD camera 6. The piezoelectric actuator 13
expands and contracts in the Z-direction to drive the ocular tube
4,the intermediate attachment 5 and the CCD camera 6 that
constitute the mass 20. The piezoelectric actuator 13 may be
replaced with a voice coil.
[0042] On the upper surface of the mass-side member 12, there
should be mounted, via a dovetail, the mass 20 comprising the
ocular tube 4, the intermediate attachment 5 and the CCD camera 6.
The lower surface of the structure-side member 11 is to be
attached, via a dovetail, to the arm 3 that is the structure whose
vibration should be reduced. Via these dovetails, the dynamic
vibration absorber unit 10 can be attached to a conventional
microscope system.
[0043] Further, the structure-side member 11 is provided with a
vibration sensor 15 for detecting vibration of the arm 3 that is
the structure whose vibration should be reduced. As the vibration
sensor 15, for example, a piezoelectric acceleration sensor is used
in view of its frequency band, sensitivity and size.
[0044] A vibration sensor signal p outputted from the vibration
sensor 15 is inputted to a controller 16 (FIG. 1) which has the
following function: in accordance with the vibration of the arm 3
represented by the vibration sensor signal p, the controller 16
operates to derive an actuator drive signal s for reducing the
vibration of the arm 3 and transmits the actuator drive signal s to
the piezoelectric actuator 13.
[0045] Referring to FIG. 4, a physical model of the active dynamic
vibration absorber constituted as described above is explained. M
represents the equivalent mass of the arm 3 that is the structure
whose vibration should be reduced. K1 and C respectively denote the
equivalent stiffness and equivalent damping of the arm 3. These
constitute a physical model Q1 of the arm 3.
[0046] Further, m denotes the mass 20 (the ocular tube 4, the
intermediate attachment 5 and the CCD camera 6), K2 a spring
element of the spring 14, and f the piezoelectric actuator 13.
These and the vibration sensor 15 and the controller 16 constitute
a physical model Q2 of the dynamic vibration absorber.
[0047] Next, the vibration reducing operation in the microscope
constituted as described above is explained.
[0048] In the arm 3 of the frame 1, vibration of the natural
frequency of the arm 3 is produced by air vibration (such as wind
or sound), vibration from the floor, internal mechanical vibration
due to the operation of the-microscope, or the like. when the arm 3
vibrates, the relative distance between the sample stage 2 and the
objective 8 varies so that the observation image will be
blurred.
[0049] The vibration sensor 15 detects the vibration of the arm 3
and outputs the vibration sensor signal p, which is inputted to the
controller 16. As described above, in accordance with the vibration
of the arm 3 represented by the vibration sensor signal p, the
controller 16 operates to derive the actuator drive signal s for
reducing the vibration of the arm 3 and transmits the actuator
drive signal s to the piezoelectric actuator 13.
[0050] The piezoelectric actuator 13 vibrates in the Z-direction
the mass 20 comprising the ocular tube 4, the intermediate
attachment 5 and the CCD camera 6 so that the force of the mass 20
can reduce the vibration of the arm 3.
[0051] FIG. 5 is a graph of frequency response showing a vibration
reducing effect of the dynamic vibration absorber. f1 denotes the
amplitude of vibration of the arm 3 without the dynamic vibration
absorber, f2 the amplitude of vibration of the arm 3 with the
dynamic vibration absorber, and f3 the natural frequency of the arm
3. This figure shows that resonance peak at the natural frequency
can be reduced by the dynamic vibration absorber.
[0052] As described above, in the first embodiment, the dynamic
vibration absorber unit 10 is arranged between the arm 3 and the
mass 20 comprising the ocular tube 4, the intermediate attachment 5
and the CCD camera 6, so as to reduce the vibration of the arm 3.
Accordingly, the microscope of this embodiment can be provided with
the dynamic vibration absorber unit 10 without changing the
structure of the microscope. Thus, the dynamic vibration absorber
unit 10 can be introduced into the microscope system without
restriction of its setting place and without increasing the weight
of the microscope. It is also possible to arrange the dynamic
vibration absorber unit 10, for example, between the arm 3 and the
revolving nosepiece 7 or between the revolving nosepiece 7 and the
objective 8 so as to reduce the vibration of the revolving
nosepiece 7 or the objective 8.
[0053] This embodiment is also advantageous in that the dynamic
vibration absorber unit 10 does not affect the observation image
since the observation rays L passing through the dynamic vibration
absorber unit 10 between the arm 3 and the ocular tube 4 are
parallel rays.
Second Embodiment
[0054] Referring to the drawings, a second embodiment of the
present invention is described. The same elements as those shown in
FIG. 1 are assigned the same reference numerals and characters and
their descriptions are omitted.
[0055] FIG. 6 shows the structure of a microscope with a passive
dynamic vibration absorber.
[0056] The microscope is provided with a dynamic vibration absorber
unit 30 for reducing vibration of an arm 3 which is a structure
whose vibration should be reduced. The dynamic vibration
absorber-unit 30 is arranged between the arm 3 and a mass 20 of the
dynamic vibration absorber, the mass 20 comprising an ocular tube
4, an intermediate attachment 5 and a CCD camera 6 that constitute
an observation optical system.
[0057] FIG. 7 shows a structure of the dynamic vibration absorber
unit 30.
[0058] The dynamic vibration absorber unit 30 comprises a
cylindrical structure-side member 11 on the side of the structure
whose vibration should be reduced; a mass-side member 12 slidably
fitted into the structure-side member 11; and a damping member 31
and a spring 14 interposed between the structure-side member 11 and
the mass-side member 12. The damping member 31 and the spring 14
support the ocular tube 4, the intermediate attachment 5 and the
CCD camera 6.
[0059] The damping member 31 has a function of expanding and
contracting in the Z-direction in accordance with vibration of the
ocular tube 4, the intermediate attachment 5 and the CCD camera 6
so as to reduce their vibration. The damping member 31 is made of,
for example, silicone rubber or urethane rubber and has both
mechanical properties and spring properties. If the damping member
31 and the spring 14 are exchangeable with those having different
characteristics, the characteristics of the dynamic vibration
absorber unit 30 can be varied in order to cope with the exchange
of the ocular tube 4, the intermediate attachment 5 and the CCD
camera 6.
[0060] The natural frequency of the dynamic vibration absorber is
determined by the damping member 31, the spring 14 and the mass 20.
When this natural frequency is identical with the natural frequency
of the arm 3 which is the structure whose vibration should be
reduced, the effect of reducing the vibration is large.
Accordingly, the damping member 31, the spring 14 and the mass 20
are selected so that the natural frequency of the dynamic vibration
absorber is identical with that of the arm 3.
[0061] The spring 14 is exchangeable or adjustable so that the
dynamic vibration absorber can be adjusted when the ocular tube 4,
the intermediate attachment 5 and the CCD camera 6, which function
as the mass 20, are exchanged.
[0062] FIG. 8 shows a physical model of the active dynamic
vibration model. M represents the equivalent mass of the arm 3 that
is the structure whose vibration should be reduced. K1 and C
respectively denote the equivalent stiffness and equivalent damping
of the arm 3. These constitute a physical model Q1 of the aria
3.
[0063] Further, m denotes the mass 20 (the ocular tube 4, the
intermediate attachment 5 and the CCD camera 6), K2 a -spring
element of the spring 14, and Ca the damping member 31. These
constitute a physical model Q3 of the dynamic vibration
absorber.
[0064] Next, the vibration reducing operation in the microscope
constituted as, described above is explained.
[0065] In the arm 3 of the frame 1, vibration of the natural
frequency of the arm 3 is produced by air vibration (such as wind
or sound), vibration from the floor, internal mechanical vibration
due to the operation of the microscope, or the like. When the arm 3
vibrates, the relative distance between a sample stage 2 and an
objective 8 varies so that the observation image will be
blurred.
[0066] When the arm 3 vibrates, then the mass 20 (the ocular tube
4, the intermediate attachment 5 and the CCD camera 6) above the
arm 3 also vibrates and the damping member,31 and the spring 14
arranged between the arm 3 and the mass 20 expand and contract. At
this time, vibration energy is converted into thermal energy. Thus,
the vibration energy is consumed by the expansion and contraction
of the damping member 31 so that the vibration of the arts 3 is
reduced.
[0067] As described above, in the second embodiment, the dynamic
vibration absorber unit 30 is arranged between the arm 3 and the
mass 20 comprising the ocular tube 4, the intermediate attachment 5
and the CCD camera 6, so as to reduce the vibration of the arm 3.
Accordingly, just like in the first embodiment, the microscope of
this embodiment can be provided with the dynamic vibration absorber
unit 30 without changing the structure of the microscope. Thus, the
dynamic vibration absorber unit 30 can be introduced into the
microscope system without restriction of its setting place and
without increasing the weight of the microscope. It is also
possible to arrange the dynamic vibration absorber unit 30, for
example, between the arm 3 and a revolving nosepiece 7 or between
the revolving nosepiece 7 and the objective 8 so as to reduce the
vibration of the revolving nosepiece 7 or the objective 8.
[0068] Since this embodiment does not require the controller 16 of
the first embodiment, the setting space of the dynamic vibration
absorber unit 30 is less restricted than in the first
embodiment.
[0069] Further, the dynamic vibration absorber unit 30 does not
affect the observation image since the observation rays L passing
through the dynamic vibration absorber unit 30 between the arm 3
and the ocular tube,4 are parallel rays.
Third Embodiment
[0070] Next, a third embodiment of the present invention is
explained.
[0071] FIG. 9 shows the structure of a laser scanning microscope
(LSM) with dynamic vibration absorbers.
[0072] The LSM is a microscope for visualizing optical information
of a sample, for example, a three-dimensional image of the sample
by irradiating a laser beam to a desired position of the sample and
detecting the beam reflected from the sample. Such an LSM is
described in, for example, U.S. Pat. No. 5,153,428, the contents of
which is hereby incorporated by reference.
[0073] A sample stage 41 and a frame 42 are provided on a base 40.
A laser light source 43 is fixed to the frame 42. Arranged on the
optical path of the laser beam emitted from the laser light source
43 are a half mirror 44, galvanomirrors 45 and 46 for scanning the
laser beam in the directions of the X- and Y-axes which are
perpendicular to each other, a half mirror 47 and a mirror 48.
Further, a revolving nosepiece 49 and an objective 50 attached to
the revolving nosepiece 49 are arranged on the optical path of the
laser beam. The revolving nosepiece 49 is coupled to a focusing
mechanism 52 via a supporting member 51 and the position of the
revolving nosepiece 49 can be adjusted in the Z-direction by the
focusing mechanism 52. An imaging lens (not shown) is arranged
between the objective 50 and the mirror 48 to form an image of a
sample M at a detecting system 53. The imaging lens and a CCD
camera arranged in the detecting system 53 constitute an
observation optical system.
[0074] A half mirror 54 is arranged on a branch optical path of the
half mirror 47. An illumination optical system 55 of an optical
microscope is located on a branch optical path of the half mirror
47, and an imaging optical system 56 of the optical microscope is
positioned on another branch optical path. The illumination optical
system 55 of the optical microscope comprises a light source, a
filter and the like.
[0075] Of the above components, the laser light source 43, the
focusing mechanism 52, the detecting system 53, and the
illumination optical system 55 and imaging optical system 56 of the
optical microscope are fixed to the frame 42 via dynamic vibration
absorber units A1 to A5, respectively. Further, the revolving
nosepiece 49 is fixed to the supporting member 51 via a dynamic
vibration absorber unit A6.
[0076] The laser light source 43, the revolving nosepiece 49, the
focusing mechanism 52, the detecting system 53, and the
illumination optical system 55 and imaging optical system 56 of the
optical microscope must be arranged such that they vibrate in
directions that will not affect the optical microscope. That is,
they are supported by the respective dynamic vibration absorber
units A1 to A6 such that they can vibrate in the directions of the
optical paths. The laser light source 43 and the illumination
optical system 55 of the optical microscope are supported in the
Y-direction, and the revolving nosepiece 49, the focusing mechanism
52, the detecting system 53, and the imaging optical system 56 of
the optical microscope are supported in the Z-direction. Although
the detecting system 53 is oriented in the Z-direction in the
figure, it can be rotated together with the half mirror 44 around
the Y-axis, thereby securing its freedom in designing the
microscope.
[0077] The dynamic vibration absorber units A1 to A5 are passive
dynamic vibration absorber units and constructed in the same way as
the second embodiment. The damping member 31 converts vibration
energy into thermal energy to reduce the vibration of the structure
whose vibration should be reduced.
[0078] The dynamic vibration absorber unit A6 is an active dynamic
vibration absorber unit and coupled to a controller 16. It is
designed in the same way as the first embodiment. The vibration
sensor 15 detects the vibration of the structure whose vibration
should be reduced, and the controller 16 drives the piezoelectric
actuator 13 in accordance with the vibration of the structure to
vibrate the mass 20 of the dynamic vibration absorber, so that the
force of the mass 20 can reduce the vibration of the structure.
[0079] The dynamic vibration absorber units A1 to A5 may be active
and the dynamic vibration absorber unit A6 may be passive.
[0080] Now, the vibration reducing operation in the microscope
constituted as described above is explained.
[0081] Air vibration, such as wind or sound, causes the microscope
to vibrate. Vibration from the floor is transmitted by the frame 42
to produce vibration of the microscope. Further, an inner vibration
source, such as the galvanomirrors 45 and 46 or the focusing
mechanism 52, causes vibrations of the frame 42, the focusing
mechanism 52 and the revolving nosepiece 49. Because of these
vibrations, the relative displacement between the objective 50 and
the sample M varies to cause noise in an observation image.
[0082] In such a case, the dynamic vibration absorber comprising
the revolving nosepiece 49, the dynamic vibration absorber unit A6
and the controller 16 operates as follows: When the supporting
member 51 vibrates, the vibration sensor signal p outputted from
the vibration sensor 15 incorporated in the dynamic vibration
absorber unit A6 varies. In accordance with the variation of the
signal p, the controller 16 operates to derive the actuator drive
signal s for reducing the vibration of the supporting member 5 and
transmits the actuator drive signal s to the piezoelectric actuator
13. The piezoelectric actuator 13 drives the revolving nosepiece 49
functioning as the mass, and its force is transmitted to the
supporting member 51 to reduce the vibration of the supporting
member 51.
[0083] Driving the revolving nosepiece 49 supporting the objective
50 results in the change of the focusing position. However, the
dynamic vibration absorber unit A6 drives the revolving nosepiece
49 in such a manner that the vibration of the supporting member 51
is cancelled by the force due to the vibration of the revolving
nosepiece 49. Specifically, when the supporting member 51 moves to
displace the revolving nosepiece 49 away from the focusing
position, the dynamic vibration absorber unit A6 drives the
revolving nosepiece 49 so that the revolving nosepiece 49
approaches the focusing position. Thus, by setting the gain in the
controller such that the amplitude of vibration of the
piezoelectric actuator 13 does not exceed the amplitude of
vibration of the supporting member 51, the revolving nosepiece 49
is driven so as to restrict the change of the focusing position due
to the vibration of the supporting member 51. As a result, the
vibration of the supporting member 51 is reduced.
[0084] Further, the laser light source 43, the focusing mechanism
52, the detecting system 53, and the illumination optical system 55
and imaging optical system 56 of the optical microscope serve to
reduce the vibration of the frame 42 by means of the vibration
reducing function of the respective dynamic vibration absorber
units A1 to A5. In the case of the laser light source 43 and the
illumination optical system 55 of the optical microscope, the
vibration in the Y-direction is reduced. With respect to the
revolving nosepiece 49, the focusing mechanism 52, the detecting
system 53, and the imaging optical system 56 of the optical
microscope, the vibration in the Z-direction is reduced. The
detecting system 53 is rotatable about the Y-axis and in accordance
with its fixed position, its vibration can be reduced.
[0085] As explained above, in the third embodiment, the laser light
source 43, the focusing mechanism 52, the detecting system 53, and
the illumination optical system 55 and imaging optical system 56 of
the optical microscope are supported by the frame 42 via the
respective dynamic vibration absorber units A1 to A5. Further, the
revolving nosepiece 49 is supported by the supporting member 51 via
the dynamic vibration absorber unit Al. Accordingly, the vibration
of the laser light source 43 and the illumination optical system 55
of the optical microscope in the Y-direction can be reduced, and
the vibration of the revolving nosepiece 49,the focusing mechanism
52, the detecting system 53, and the imaging optical system 56 of
the optical microscope in the Z-direction can be reduced. In other
words, this embodiment can reduce plural modes of vibration.
Fourth Embodiment
[0086] With reference to FIG. 10, a fourth embodiment of the
present invention is described.
[0087] FIG. 10 shows the structure of a measuring microscope with
an active dynamic vibration absorber.
[0088] The measuring microscope measures the shape of a sample M
which has a rough surface. An XY-stage 61 is provided on a base of
an L-shaped frame 60, and the sample M is mounted on the XY stage
61.
[0089] A Z-stage 62 extending over the XY-stage.61 is slidably
mounted on a vertical portion of the frame 60: The Z-stage 62 is
provided on its upper surface with a displacement measuring optical
system 63, above which there is an observation optical system
comprising an ocular tube 64, an intermediate attachment 65 and a
CCD camera 66. The Z-stage 62 is also provided on its lower surface
with a revolving nosepiece 67, to which an objective 68 is
mounted.
[0090] The displacement measuring optical system 63 has a function
of measuring a minute displacement of the surface of the sample M
in the direction of the Z-axis. The ocular tube 64 is provided with
an imaging lens 69 for converging, on the image plane of the CCD
camera 66, parallel rays of an observation light beam L from the
objective 68.
[0091] The-displacement measuring optical system 63, the ocular
tube 64, the intermediate attachment 65 and the CCD camera 66 are
moved in the direction of the optical axis (Z-direction) by driving
the Z-stage 62.
[0092] The displacement measuring optical system has a light source
for illuminating the sample M, and a detector for detecting light
reflected from the sample M.
[0093] The detector outputs a signal on the basis of quantity of
the reflected light. The signal is used for forming the shape of
the sample.
[0094] The XY-stage 61 and the Z-stage 62 incorporate respective
displacement scales such as an optical scale or a magnetic scale.
When the XY-stage 61 and the Z-stage 62 move, the displacement
scales detect respective amounts of movement, which are displayed
in a displacement display. Thus, by moving the XY-stage 61 and the
Z-stage 62 to change the observation position of the sample M, the
observer can read the distance between the observation positions
from the displacement display.
[0095] In the measuring microscope, when the frame 60 or the
Z-stage 62 vibrates, the relative displacement between the
objective 68 and the sample M also vibrates so that a vibration
component is added to the result of measurement of the sample M.
Accordingly, it is necessary to reduce the vibration of the frame
60 or the Z-stage 62 by means of an active dynamic vibration
absorber unit 70.
[0096] The active dynamic vibration absorber unit 70 is arranged
between the displacement measuring optical system 63 on the Z-stage
62 and microscope components: the ocular tube 64, the intermediate
attachment 65 and the CCD camera 66, which constitute an
observation optical system functioning as a mass 71 of the active
dynamic-vibration absorber.
[0097] The dynamic vibration absorber unit 70 has the same
structure as that of the dynamic vibration absorber unit 10 shown
in FIG. 3 and its detailed description is omitted. A controller 72
is coupled to the dynamic vibration absorber unit 70. The vibration
sensor signal p outputted from the vibration sensor 15 and
representing the vibration of the Z-stage 62 is inputted to the
controller 72. The controller 72 has the following function: in
accordance with the vibration of the Z-stage 62, the controller 72
operates to derive an actuator drive signal s for reducing the
vibration of the Z-stage 62 and transmits the actuator drive signal
s to the piezoelectric actuator 13 of the dynamic vibration
absorber unit 70.
[0098] Next, the vibration reducing operation in the microscope
constituted as described above is explained.
[0099] The Z-stage 62 is vibrated by air vibration (such as wind or
sound), vibration from the floor, internal mechanical vibration die
to the operation of the microscope, or the like. When the Z-stage
62 vibrates, the relative distance between the XY-stage 61 and the
objective 68 varies so that there will be an error in the result of
displacement measuring.
[0100] The vibration sensor 15 detects the vibration of the Z-stage
62 and outputs the vibration sensor signal p, which is inputted to
the controller 72. As described above, in accordance with the
vibration of the Z-stage 62 represented by the vibration sensor
signal p, the controller 72 operates to derive the actuator drive
signal s for reducing the vibration of the Z-stage 62 and transmits
the actuator drive signal s to the piezoelectric actuator-13.
[0101] The piezoelectric actuator 13 vibrates in the Z-direction
the mass 71 comprising the ocular tube 64, the intermediate
attachment 65 and the CCD camera 66 so that the force of the mass
71 can reduce the vibration of the Z-stage 62.
[0102] As described above, in the fourth embodiment, the dynamic
vibration absorber unit 70 is arranged between the displacement
measuring optical system 63 on the Z-stage 62 and the mass 71
comprising the ocular tube 64, the intermediate attachment 65 and
the CCD camera 66. In accordance with the vibration of the Z-stage
62, the mass 71 is vibrated to reduce the vibration of the Z-stage
62. As a result, displacement due to the vibration can be prevented
from being added to the measurement of the sample M.
[0103] Further, just like in the first embodiment, the measuring
microscope of this embodiment can be provided with the dynamic
vibration absorber unit 70 without changing the structure of the
microscope. Thus, the dynamic vibration absorber unit 70 can be
introduced into the microscope system without restriction of its
setting place and without increasing the weight of the microscope.
It is also possible to arrange the dynamic vibration absorber unit
70, for example, between the ocular tube 64 and the intermediate
attachment 65or between the intermediate attachment 65 and the CCD
camera 66 so as to reduce the vibration of the intermediate
attachment 65 or the CCD camera 66.
[0104] Moreover, the dynamic vibration absorber unit 70 does not
affect the observation image since the observation light beam L
passing through the dynamic vibration absorber unit 10 between the
Z-stage 62 and the ocular tube 64 comprises parallel rays.
Fifth Embodiment
[0105] Referring to FIG. 11, a fifth embodiment of the present
invention is described.
[0106] This embodiment relates to a confocal microscope. Such a
confocal microscope is described in, for example, U.S. Pat. No.
4,927,254 and U.S. Pat. No. 5,067,805, these contents of which are
hereby incorporated by reference.
[0107] FIG. 11 shows the structure of a confocal microscope with an
active dynamic vibration absorber.
[0108] A frame 80 of the confocal microscope is provided with a
sample stage 81, on which a sample M is mounted.
[0109] Over the sample stage 81, an arm 82 protrudes from the frame
80. Above the arm 82, there are an ocular tube 83, a confocal unit
84, an intermediate attachment 85 and a CCD camera 86 that
constitute an observation optical system. Mounted on a lower
surface of the arm 82 is a revolving nosepiece 87 with an objective
88.
[0110] The intermediate attachment 85 is provided with an imaging
lens 89 for converging, on an image plane 86a of the CCD camera 86,
parallel rays of an observation light beam L from the objective
88.
[0111] The confocal unit 84 comprises a disc 90 having randomly
arranged pinholes, and a motor 91 for rotating the disc 90.
[0112] An illumination optical system 92 is attached to the
confocal unit 84. Illumination light emitted from the illumination
optical system 92 is reflected by a mirror 93 in the confocal unit
84 to illuminate the sample M.
[0113] In the confocal microscope, when the rotating disc 90
vibrates the arm 82 of the frame 80, the relative displacement
between the objective 88 and the sample M varies so that an
observation image of the sample M will be blurred. Further, the
confocal microscope is also used for three-dimensional measuring
since it has a high resolving power. However, such vibration will
substantially deteriorate its performance. Accordingly, it is
necessary to use an active dynamic vibration absorber unit 94 for
reducing the vibration of the frame 80. The dynamic vibration
absorber unit 94 is arranged between the arm 82 of the frame 80 and
microscope components: the ocular tube 83, the confocal unit 84,
the intermediate attachment 85 and the CCD camera 86 that
constitute the observation optical system functioning a mass 95 of
the active-dynamic vibration absorber.
[0114] The dynamic vibration absorber unit 94 has the same
structure as that of the dynamic vibration absorber unit 10 shown
in FIG. 3 and its detailed description is omitted. A controller 96
is coupled to the dynamic vibration absorber unit 94. The vibration
sensor signal p outputted from the vibration sensor 15 and
representing the vibration of the frame 80 is inputted to the
controller 96. The controller 96 has the following function: in
accordance with the vibration of the frame 80, the controller 96
operates to derive an actuator drive signal s for reducing the
vibration of the frame 80 and transmits the actuator drive signal s
to the piezoelectric actuator 13 of the dynamic vibration absorber
unit 94.
[0115] Next, the vibration reducing operation in the microscope
constituted as described above is explained.
[0116] The frame 80 is vibrated by air vibration (such as wind or
sound), vibration from the floor, internal mechanical vibration due
to the operation of the confocal microscope, vibration due to the
rotating disc 90 and the motor 91, or the like. When the frame 80
vibrates, the relative distance between the XY-stage 61 and the
objective 68 varies so that the observation image will be
blurred.
[0117] The vibration sensor 15 detects the vibration of the frame
80 and outputs the vibration sensor signal p, which is inputted to
the controller 96. As described above, in accordance with the
vibration of the frame 80 represented by the vibration sensor
signal p, the controller 96 operates to derive the actuator drive
signal s for reducing the vibration of the frame 80 and transmits
the actuator drive signal s to the piezoelectric actuator 13.
[0118] The piezoelectric actuator 13 vibrates in the Z-direction
the mass 95 comprising the ocular tube 83, the confocal unit 84,
the intermediate attachment 85 and the CCD camera 86 so that the
force of the mass 95 can reduce the vibration of the, frame 80.
[0119] As described above, in the fifth embodiment, the dynamic
vibration absorber unit 94 is arranged between the frame 80 and the
mass 95 comprising the ocular tube 83, the confocal unit 84, the
intermediate attachment 85 and the CCD camera 86. In accordance
with the vibration of the frame 80, the mass 95 is vibrated to
reduce the vibration of the frame 80. As a result, it is possible
to reduce a blur and axial displacement of an observation image of
the sample M so that a good confocal image can be observed or
three-dimensional measuring can be made.
* * * * *