U.S. patent application number 09/740123 was filed with the patent office on 2001-08-30 for method of depositing particles with an electrostatic chuck.
Invention is credited to Pletcher, Timothy Allen, Sun, Hoi Cheong Steve.
Application Number | 20010018098 09/740123 |
Document ID | / |
Family ID | 27091072 |
Filed Date | 2001-08-30 |
United States Patent
Application |
20010018098 |
Kind Code |
A1 |
Sun, Hoi Cheong Steve ; et
al. |
August 30, 2001 |
Method of depositing particles with an electrostatic chuck
Abstract
The present invention is directed to electrostatic chucks,
methods for their use, the electrostatic deposition of objects,
such as particles in a dry powder, onto recipient substrates, and
the recipient substrates themselves that have been subjected to
electrostatic deposition. In one aspect, the present invention
provides an electrostatic chuck for electrostatically attracting an
object or objects wherein the object is used in chemical or
pharmaceutical assaying or manufacturing. The objects can be
pharmaceutical substrates, for example, such as a pharmaceutical
tablet. Additional embodiments of the invention provide chucks and
their use to electrostatically attract particles, such as a
pharmaceutically active ingredient, to a substrate, such as a
tablet. In one aspect, the electrostatic chuck comprises a floating
electrode, and is used to selectively attract particles to a
substrate above the floating electrode, thereby providing for
charge imaging for the deposition of particles in a selected image.
Additionally, the invention provides comprising a sensing
electrode, optionally for use with an electrostatic chuck, for
sensing the number of particles attracted to the objects on the
chuck or other substrate, thereby providing for deposition of an
accurate amount of particles. Furthermore, the present invention
provides objects having selected areas in which particles are
applied to the object via electrostatic means.
Inventors: |
Sun, Hoi Cheong Steve;
(Plainsboro, NJ) ; Pletcher, Timothy Allen; (East
Hampton, NJ) |
Correspondence
Address: |
DECHERT
P.O. Box 5218
Princeton
NJ
08543
US
|
Family ID: |
27091072 |
Appl. No.: |
09/740123 |
Filed: |
December 19, 2000 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
09740123 |
Dec 19, 2000 |
|
|
|
09175287 |
Oct 20, 1998 |
|
|
|
09175287 |
Oct 20, 1998 |
|
|
|
08661210 |
Jun 10, 1996 |
|
|
|
5858099 |
|
|
|
|
08661210 |
Jun 10, 1996 |
|
|
|
08630050 |
Apr 9, 1996 |
|
|
|
5846595 |
|
|
|
|
Current U.S.
Class: |
427/485 ;
118/500; 118/621 |
Current CPC
Class: |
A61K 9/2086 20130101;
B05B 5/082 20130101; B05B 5/087 20130101; Y10T 428/2991 20150115;
B05B 5/08 20130101; H02N 13/00 20130101; B01J 2219/00468 20130101;
A61K 9/2893 20130101 |
Class at
Publication: |
427/485 ;
118/500; 118/621 |
International
Class: |
B05D 001/06; B05B
005/025 |
Claims
We claim:
1. An electrostatic chuck comprising a conductive layer having at
least one electrode for electrostatically attracting an object or
multiple objects, wherein the object is used in chemical or
pharmaceutical assaying or manufacturing.
2. The electrostatic chuck of claim 1, wherein the conductive layer
comprises two electrodes.
3. The electrostatic chuck of claim 2, wherein the two electrodes
are interdigitated.
4. The electrostatic chuck of claim 1, wherein the conductive layer
comprises a single electrode.
5. The electrostatic chuck of claim 1 wherein the object is a
pharmaceutical substrate.
6. The electrostatic chuck of claim 1 wherein the pharmaceutical
substrate is not dielectric.
7. The electrostatic chuck of claim 1 wherein the object is
selected from the group consisting of an inhaler substrate, a
tablet, capsule, caplet, suppository, dressing, bandage and a
patch.
8. A method of manufacturing a pharmaceutical composition
comprising: (a) providing a pharmaceutical substrate; and (b)
electrostatically depositing particles on the substrate using an
electrostatic chuck.
9. The method according to claim 8, wherein the electrostatic chuck
comprises a floating electrode and the particles are substantially
deposited on an area of the substrate corresponding to the floating
electrode.
10. The method according to claim 8 wherein the electrostatic chuck
comprises a sensing electrode for determining the amount of
particles deposited on the substrate.
11. The method according to claim 10 wherein the pharmaceutical
substrate is selected from the group consisting of an inhaler
substrate, a tablet, capsule, caplet, suppository, dressing,
bandage and a patch.
12. A method for producing a dosage form comprising: (a) providing
an electrostatic chuck having an area that is x- or y-addressable;
(b) contacting the chuck with objects comprising a pharmaceutically
active ingredient, wherein the objects substantially adhere to the
chuck in the areas that are x- or y-addressable; and (c) releasing
the objects onto a pharmaceutical carrier aligned with the areas of
the chuck on which the objects are adhered.
13. The method of claim 12 wherein the chuck has multiple areas
that are x- or y-addressable, each area corresponding to a separate
pharmaceutical carrier.
14. The method of claim 12 wherein the objects are substantially
simultaneously deposited onto multiple pharmaceutical carriers.
15. The method of claim 14 wherein at least two of the
pharmaceutical carriers receive a different number of objects,
thereby forming different dosage units.
16. An electrostatic chuck comprising an inhaler substrate, said
substrate comprising a conductive layer having at least one
electrode for electrostatically attracting particles for
inhalation.
17. The electrostatic chuck of claim 16 wherein the particles
comprise particles of a dry powder comprising a pharmaceutically
active ingredient.
Description
RELATED CO-PENDING U.S. PATENT APPLICATIONS
[0001] This application is a continuation-in-part of U.S. Ser. No.
08/630,050 ("Electrostatic Chucks"), filed Apr. 9, 1996. Related
co-pending U.S. patent applications, "Inhaler Apparatus with
Modified Surfaces for Enhanced Release of Dry Powders," filed
simultaneously herewith, "Inhaler Apparatus with an Electronic
Means for Enhanced Release of Dry Powders," filed simultaneously
herewith, Ser. Nos. 08/630,049 ("Acoustic Dispenser," filed Apr. 9,
1996), and its continuation-in-part filed simultaneously herewith,
08/630,012 ("Chucks and Methods for Positioning Multiple Objects on
a Substrate," filed Apr. 9, 1996), 08/471,889 ("Methods and
Apparatus for Electronically Depositing a Medicament Powder Upon
Predefined Regions of a Substrate," filed Jun. 6, 1995, and
continuation-in-part thereof filed Jun. 6, 1996), 08/467,647
("Apparatus for Electrostatically Depositing and Retaining
Materials Upon a Substrate," filed Jun. 6, 1995) and 08/506,703
("Inhaler Apparatus Using a Tribo-Electric Charging Technique,"
filed Jul. 25, 1995) describe, inter alia, the electrostatic
deposition of objects, such as particles of powder, on a substrate.
The foregoing patent applications are hereby incorporated herein by
reference, in their entirety.
[0002] The present invention is directed to electrostatic chucks,
methods for their use including the electrostatic deposition of
particles on an objects, and the objects themselves that have been
subjected to electrostatic deposition. In one aspect, the present
invention provides an electrostatic chuck for electrostatically
attracting an object or objects wherein the object is used in
chemical or pharmaceutical assaying or manufacturing. The objects
can be pharmaceutical substrates, for example, such as a
pharmaceutical tablet or an inhaler substrate.
[0003] Additional embodiments of the invention provide chucks and
their use to electrostatically attract particles, such as a
pharmaceutically active ingredient, to a substrate, such as a
tablet. In one aspect, the electrostatic chuck comprises a floating
electrode, and is used to selectively attract particles to a
substrate above the floating electrode, thereby providing for
charge imaging for the deposition of particles in a selected image.
Additionally, the invention provides an electrostatic chuck
comprising a sensing electrode for sensing the number of particles
attracted to the chuck, thereby providing for deposition of an
accurate amount of particles. Furthermore, the present invention
provides objects having selected areas in which particles are
applied to the object via electrostatic means.
[0004] In the pharmaceutical industry, pharmaceutical compositions
with an active ingredient are prepared by mechanically mixing the
active ingredient with pharmaceutically acceptable carriers. A
major drawback to this method is the inaccuracy of distribution of
the active ingredient in the individual tablets of a batch. This
problem is particularly evident when the active ingredient is
present in a low dosage, and the inaccuracy of mechanical mixing
can result in individual tablets in a single batch having different
dosages.
[0005] Additionally, for example, some pharmaceutical compositions
contain a mixture of various carriers together with the active
ingredient in which the carrier is not fully compatible with the
active ingredient. For example, the active ingredient may be poorly
soluble in the carrier or the carrier may negatively affect the
bioavailability of the active ingredient.
[0006] These drawbacks of the prior art are addressed by the
present invention, in which electrostatic chucks are provided
together with their use in the pharmaceutical or chemical
industries, providing for accurate deposition of an active
ingredient on a tablet, among other advantages.
SUMMARY OF THE INVENTION
[0007] The disadvantages heretofore associated with the prior art
are overcome by inventive technique and apparatus for holding an
object or multiple objects, such as tablets, without the use of
mechanical force, for deposition of a pharmaceutically active
ingredient, for example. The present invention provides advantages
including cost-effectiveness, efficiency, and, for example, greater
accuracy in the application of a specified pharmaceutical dosage to
a pharmaceutical substrate such as a tablet. Further, the
deposition of a pharmaceutically active ingredient using static
electricity is particularly useful, for example, when the active
ingredient is immiscible or otherwise incompatible with the
remainder of the tablet or other substrate.
[0008] In one aspect, the present invention provides an
electrostatic chuck comprising a conductive layer having at least
one electrode for electrostatically attracting an object wherein
the object is used in chemical or pharmaceutical assaying or
manufacturing. For example, the object can be coated with a
pharmaceutically active compound. The objects can be numerous types
of substrates, including, for example, objects that are suitable
for human consumption. The objects can be pharmaceutical
substrates, such as an inhaler substrate, a pharmaceutical tablet,
capsule, caplet, suppository, dressing, bandage and a patch. In
certain embodiments, the pharmaceutical substrate is not
dielectric.
[0009] Certain embodiments provide the use of an electrostatic
chuck to electrostatically attract objects, such as particles, to a
recipient substrate. "Particles" are defined herein as objects
having a size less than about one millimeter in width or diameter.
Thus, the electrostatic chucks of the invention can be used, for
example, to attract particles of a powder having a pharmaceutically
active ingredient to a recipient pharmaceutical substrate, which
substrate may be pharmaceutially inert.
[0010] Another aspect of the present invention provides the use of
an electrostatic chuck to attract an object wherein the thickness
of the object is preferably less than about 5 mm, and more
preferably, less than about 3 mm.
[0011] In one embodiment of the invention, the electrostatic chuck
has two electrodes in the upper conductive layer exposed to the
objects, and the two electrodes are preferably interdigitated. In
other embodiments, the chuck has a single electrode in the upper
conductive layer. The chuck can be used, for example, to hold an
object against gravitational forces, or, for example, to position
multiple objects on a substrate. See, for example, co-pending U.S.
patent application Ser. No. 08/630,012, filed Apr. 9, 1996)
[0012] Certain aspects of the invention provide an electrostatic
chuck comprising a floating electrode, wherein the chuck is used to
selectively attract objects, such as particles, to a substrate
above the floating electrode, thereby providing for charge imaging
for the deposition of particles in a selected image. Additionally,
the invention provides a sensing electrode for sensing the number
of objects, such as particles, that have been deposited onto a
recipient substrate. In certain preferred embodiments, a sensing
electrode is located on an electrostatic chuck. The sensing
electrode provides for deposition of an accurate amount of objects,
such as particles. The particles deposited on the recipient
substrate can include, for example, a pharmaceutically active
ingredient.
[0013] Furthermore, the present invention provides objects having
selected areas in which particles are applied to the object via
electrostatic means.
[0014] Additionally, in one aspect, the present invention provides
an electrostatic chuck comprising an inhaler substrate, the
substrate comprising a conductive layer having at least one
electrode for electrostatically attracting particles for
inhalation. Preferably, the particles comprise particles of a dry
powder comprising a pharmaceutically active ingredient.
[0015] The present invention additionally provides methods using an
electrostatic chuck. For example, the invention provides a method
of chemical or pharmaceutical manufacturing comprising:
[0016] (a) providing an electrostatic chuck; and
[0017] (b) electrostatically attracting an object to the chuck,
wherein the object is used in chemical or pharmaceutical
manufacturing. In addition to a method of manufacturing, the
present invention provides the use of an electrostatic chuck to
electrostatically attract an object to a substrate wherein the
object is a support for a chemical reaction used in a chemical
assay or to manufacture chemicals or pharmaceuticals.
[0018] The invention also provides the use of an electrostatic
chuck to electrostatically attract one object or multiple objects
to a substrate wherein the thickness of the object is less than
about 3 mm. Additionally, the invention provides for the use of an
electrostatic chuck having a bias potential for attracting an
object to a substrate, the bias potential being less than the
breakdown potential of the materials forming the chuck.
[0019] The methods of the present invention can be used with
numerous objects including an edible substrate, a pharmaceutical
substrate, such as an inhaler substrate, a tablet, capsule, caplet,
suppository, dressing, bandage and a patch, and optionally when the
substrate is not dielectric. Additionally, the methods of the
invention can be used with particles that include a
pharmaceutically active ingredient, and the methods of the
invention include their use to coat an object, such as a tablet,
with a pharmaceutically active compound.
[0020] Further, the invention provides a method of attracting a
selected number of particles to a substrate, comprising:
[0021] (a) providing an electrostatic chuck with a sensing
electrode;
[0022] (b) applying multiple electrostatically charged particles to
the chuck; and
[0023] (c) sensing the number of particles attracted to the chuck.
This method can be used, for example, with particles of a dry
powder wherein the method is used to determine the amount of powder
deposited on a substrate attracted to the chuck.
[0024] Another aspect of the invention provides a method of
depositing particles onto selected areas of a substrate, the method
comprising the use of an electrostatic chuck with floating
electrodes in areas of the chuck that correspond to the selected
areas of the substrate. Additionally, the invention provides a
method of manufacturing a pharmaceutical composition comprising (a)
providing a pharmaceutical substrate; and (b) electrostatically
depositing particles on the substrate, the deposition preferably
comprising the use of an electrostatic chuck. Preferably, the
electrostatic chuck comprises a floating electrode and the
particles are substantially deposited on an area of the substrate
corresponding to the floating electrode, and the electrostatic
chuck preferably further comprises a sensing electrode for
determining the amount of particles deposited on the substrate.
[0025] In another aspect, the present invention provides a method
for producing a dosage form comprising: (a) providing an
electrostatic chuck having an area that is x- or y-addressable; (b)
contacting the chuck with objects comprising a pharmaceutically
active ingredient, wherein the objects substantially adhere to the
chuck in the areas that are x- or y-addressable; and (c) releasing
the objects onto a pharmaceutical carrier aligned with the areas of
the chuck on which the objects are adhered. Preferably, the chuck
has multiple areas that are x- or y-addressable, each area
corresponding to a separate pharmaceutical carrier. Further, the
objects are preferably substantially simultaneously deposited onto
multiple pharmaceutical carriers. This method can be used, for
example, to form different dosage units, when at least two of the
pharmaceutical carriers receive a different number of objects. This
method is particularly convenient for pharmaceutically active
ingredients such as hormones that are administered in varying
dosages, and it is desirable to form a pharmaceutical package
containing more than one type of dosage unit.
BRIEF DESCRIPTION OF THE DRAWINGS
[0026] FIG. 1 is a cross-sectional view of a schematic
representation of an electrostatic chuck with interdigitated
electrodes according to the present invention.
[0027] FIG. 2 is a top view of a schematic representation of the
interdigitated electrodes of FIG. 6.
[0028] FIGS. 3A and 3B are circuit diagrams of an electrostatic
chuck having two electrodes, FIG. 3A depicting the chuck without a
lower conductive layer, and FIG. 3B depicting the chuck with a
lower conductive layer.
[0029] FIG. 4A is a top view of a schematic representation of the
single electrode of FIG. 9B.
[0030] FIG. 4B is a cross-sectional view of a schematic
representation of an electrostatic chuck with a single electrode on
the upper conductive layer, which protrudes from the dielectric
layer, according to the present invention.
[0031] FIG. 4C is a cross-sectional view of a schematic
representation of an electrostatic chuck according to the present
invention with a single electrode on the upper conductive layer,
which is embossed in the dielectric layer.
[0032] FIG. 5 is a cross-sectional schematic view of an
electrostatic chuck with floating electrodes on the upper
conductive layer for charge imaging.
[0033] FIG. 6 is a top view of a floating electrode of FIG. 5.
[0034] FIG. 7 is a circuit diagram of an electrostatic chuck with a
floating electrode on the upper conductive layer.
[0035] FIG. 8 is a schematic cross-sectional view of a sensing
electrode.
[0036] FIG. 9 is a top schematic view of a sensing electrode, with
the location of the sensing electrode being outside the area of
deposition.
[0037] FIG. 10A is a top schematic view of a sensing electrode,
with the location of the sensing electrode being inside the area of
deposition.
[0038] FIG. 10B is a top view of a schematic representation of a
sensing electrode, with the location of the sensing electrode in
the shape of a tablet, within the area of deposition.
[0039] FIG. 11 is a circuit diagram of an electrostatic chuck with
a sensing electrode.
[0040] FIG. 12A is a photograph of a top view of a floating
electrode after powder deposition, in a chuck without the lower
conductive layer, with the printed circuit board attached. The
photograph was taken at about 50.times. magnification; therefore,
the line adjacent to the photograph represents a length of about
0.5 mm therein.
[0041] FIG. 12B is a photograph of a top view of a floating
electrode after powder deposition, in a chuck with the lower
conductive layer, with the printed circuit board attached. The
photograph was taken at about 50.times. magnification; therefore,
the line adjacent to the photograph represents a length of about
0.5 mm therein.
[0042] FIG. 13A is a photograph of a top view of a floating
electrode after powder deposition, in a chuck without the lower
conductive layer, with the printed circuit board removed. The
photograph was taken at about 50.times. magnification; therefore,
the line adjacent to the photograph represents a length of about
0.5 mm therein.
[0043] FIG. 13B is a photograph of a top view of a floating
electrode after powder deposition, in a chuck with the lower
conductive layer, with the printed circuit board removed. The
photograph was taken at about 50.times. magnification; therefore,
the line adjacent to the photograph represents a length of about
0.5 mm therein.
[0044] FIGS. 14A-C are graphical representations of the detection
of powder deposited using a sensing electrode with an electrostatic
chuck of the present invention. The x axis represents the time in
minutes and the y axis represents the charge in microcoulombs.
dq/dt represents the deposition rate.
[0045] FIG. 15 is a schematic diagram of an electrostatic chuck of
the present invention for creating multi-dosage units.
[0046] FIGS. 16A-C provide three photographs of an electrostatic
chuck according to the present invention. FIG. 16A shows the
electrostatic chuck circuit; FIG. 16B shows a window mask for the
chuck and FIG. 16C shows the chuck assembly with an array of
tablets.
[0047] FIG. 17A is a diagrammatic cross-section of a modified
quartz crystal monitor, and FIG. 17B is a circuit diagram of the
monitor shown in FIG. 17A.
DETAILED DESCRIPTION OF THE INVENTION
[0048] For purposes of this application, the following terms have
the indicated meanings.
[0049] Acoustic dispenser: an apparatus for dispensing particles
that employs vibration having a frequency in the acoustic (audible)
range.
[0050] Chuck: a clamp for holding an object or objects.
[0051] Chuck for positioning objects: a chuck having a
configuration that can be used for substantially arranging objects
on the chuck in a selected pattern.
[0052] Electrostatic chuck: a clamp for holding an object or
objects using electrostatic force.
[0053] Electrostatic chuck with conductive vias: an electrostatic
chuck for positioning objects, in which the chuck has a layer that
determines the positioning of the objects, and this layer has vias
containing a conductive material.
[0054] Mechanical Chuck: a chuck that uses compression to hold an
object.
[0055] Non-Mechanical Chuck: a chuck that does not use compression
to hold an object, including but not limited to a chuck that uses
electrostatic or vacuum (i.e., negative pressure) means for such
holding.
[0056] Object: a material thing.
[0057] Particle: an object equal to or less than about one
millimeter in width or diameter.
[0058] Pitch: the repeat distance between the edge of one well to
the corresponding edge of the adjacent well in, for example, a
microtiter plate.
[0059] Recipient substrate: an object having a surface or layer
that is coated with or will receive a coating of objects, such as
particles.
[0060] Upper conductive layer: the conductive layer of an
electrostatic chuck that attracts or adheres objects to the
chuck.
[0061] 1. Uses of the Electrostatic Chucks of the Invention
[0062] "Chucks" are defined above as clamps for holding an object
or objects. Instead of using conventional clamps that employ
mechanical or compressive force, the present invention is directed
to the use of static electricity in an electrostatic chuck as the
means used by the context of the chuck to hold objects. The objects
can optionally be positioned, transported and deposited.
Preferably, the chucks use a force other than positive pressure for
holding objects. The chucks of the present invention can be used,
in one aspect, for positioning objects, which is described in U.S.
Ser. No. 08/630,012 ("Chucks and Methods for Positioning Multiple
Objects on a Substrate," filed Apr. 9, 1996).
[0063] In one aspect, the present invention provides electrostatic
chucks for electrostatically attracting an object or multiple
objects. Without being limited to any particular theory, it is
believed that when an electric potential is applied to the
electrostatic chucks of the invention, capacitors are formed
between the electrodes of the chuck and objects are held by the
electrostatic force. One of the advantages of using an
electrostatic chuck in the chemical or pharmaceutical industry is
that, unlike plasma charging, electrostatic charging (also known as
tribocharging) generally does not negatively affect chemicals.
Further, the use of an electrostatic chuck provides the ability to
hold a pharmaceutical substrate, for example, without requiring
mechanical force that could disrupt the substrate.
[0064] The chucks of the present invention can be used to hold an
object or multiple objects against gravitational forces during
chemical or pharmaceutical processing. Additionally, the present
invention provides methods of chemical manufacturing using a chuck
to attract an object or multiple objects to a substrate, the
objects being used in chemical manufacturing. In another aspect,
the present invention provides methods of manufacturing a
pharmaceutical composition by using a chuck to attract an object or
multiple objects to a substrate, the objects being used to
manufacture the pharmaceutical composition. The chuck can be
manufactured to have an increased size in order to attract an
object having an increased surface area.
[0065] In one aspect, the present invention provides for the use of
an electrostatic chuck having a bias potential for attracting an
object or objects to a substrate. Preferably, the bias potential is
greater than about 1000 volts. The use of the chuck according to
the present invention provides for the possibility of a bias
potential since a bias potential does not necessarily cause damage
to, for example, a pharmaceutical substrate, unlike a wafer in the
semiconductor industry, which is voltage sensitive.
[0066] When using an electrostatic chuck, preferably the
temperature is between about -50.degree. C. to about 200.degree.
C., and preferably from about 22.degree. C. to about 60.degree. C.
The humidity is preferably between 0-100% wherein the humidity does
not cause condensation; more preferably, the humidity is about
30%.
[0067] The use of the electrostatic chucks of the invention can be
scaled up for large scale continuous manufacturing, such as using a
sheet of an edible substrate for use with tablets, for example, or
a sheet of an inhaler substrate, which can be perforated, for
example, into individual tapes for individual inhalers.
[0068] The present invention also provides methods for depositing a
selected number of objects comprising: (a) providing an
electrostatic chuck having an area that is x- or y-addressable; (b)
contacting the chuck with objects, wherein the objects
substantially adhere to the chuck in the areas that are x- or
y-addressable; and (c) releasing the objects onto a recipient
substrate aligned with the areas of the chuck on which the objects
are adhered. The present invention also provides methods for
producing a dosage form comprising: (a) providing an electrostatic
chuck having an area that is x- or y-addressable; (b) contacting
the chuck with particles comprising a pharmaceutically active
ingredient, wherein the particles substantially adhere to the chuck
in the areas that are x- or y-addressable; and (c) releasing the
particles onto a pharmaceutical carrier aligned with the areas of
the chuck on which the particles are adhered.
[0069] Advantages of the present invention include the ability to
hold a pharmaceutical substrate without the use of a mechanical
means. Thus, for example, the present invention provides an
electrostatic mechanism for holding a tablet that is loosely
compressed and that would crumble if held by mechanical means or by
a vacuum chuck. Additionally, for example, without being held to a
particular theory, it is believed that the pharmaceutically
acceptable carriers, for example, in tablets are frequently
conductive and dissipate their charge within less than about a
millisecond. An electrostatic chuck provides an advantage by
maintaining its charge whereas a pharmaceutical substrate, for
example, would otherwise lose its charge.
[0070] The present invention also provides electrostatic chucks
that are used to hold an object or multiple objects during
processing in the chemical or pharmaceutical industry. Such
processing includes the deposition of particles on the objects,
such as the deposition of a pharmaceutically active powder on
tablets. This is particularly useful, for example, when the active
ingredient is incompatible with the remainder of the tablet.
Furthermore, more than one type of ingredient, such as two active
ingredients, can be coated on an object, such as a tablet. The
tablet can be further processed after the particles are deposited
on it; for example, the tablet can be coated after deposition.
Preferably, the particles are dispensed using an acoustic
dispenser, described in U.S. Ser. No. 08/630,049.
[0071] Without being limited to a particular theory, the electric
potential generated by the electrostatic chucks of the present
invention is believed to serve both for holding a conductive object
in place, such as a tablet, and for attracting a charged object,
such as particles within a powder, onto a recipient substrate.
Additionally, the electrostatic chucks of the invention can be used
for inhaler substrates. See, for example, co-pending application
entitled "Inhaler Apparatus with an Electronic Means for Enhanced
Release of Dry Powders," filed simultaneously herewith. See also
the section on charge imaging chucks below.
[0072] 2. Objects Held by Electrostatic Chucks of the Invention
[0073] A. Sizes and Types of Objects
[0074] Preferably, the thickness of an object held by an
electrostatic chuck of the present invention is less than about 300
mm, and more preferably, less than about 100 mm, even more
preferably, less than about 50 mm, even more preferably, less than
about 25 mm, even more preferably, less than about 10 mm, even more
preferably, less than about 5 mm, and most preferably, less than
about 3 mm. Thus, in certain preferred embodiments, the object is a
small object, such as a particle equal to or less than about one
millimeter in average width or diameter. In certain preferred
embodiments, the chucks of the invention are used with multiple
small objects, preferably having a size from about 5 microns to
about 500 microns, and preferably for use in the chemical or
pharmaceutical industry. The use of an electrostatic chuck in the
chemical and pharmaceutical industries is one of the novelties of
the present invention.
[0075] In certain preferred embodiments, the objects held by a
chuck are pharmaceutical substrates, and the objects are round,
such as tablets. Alternatively, for example, the objects are
oblong, and can be, for example, capsules or caplets. When the
object is a tablet, preferably it has a thickness no greater than
about 3 mm. The present invention additionally provides for the use
of a chuck to hold an object or objects which, in some embodiments,
are coated with particles while being held. In preferred
embodiments, the particles are within a powder comprising a
pharmaceutically active compound.
[0076] Preferably, the powder is in dry micronized form, using for
example, an air jet milling process, and the particles are at least
about 1 micron in diameter, and preferably from about 1 to about 10
microns, and more preferably about 4 to about 8 microns in
diameter. Preferably, the powder is electrostatically charged
before application to the chuck, for example, through admixture
with beads such as by mechanical shaking.
[0077] Additional pharmaceutical substrates include, for example, a
suppository, or an edible substrate such as a pharmaceutical
tablet, capsule or caplet or a water soluble film such as a
hydroxypropyl methyl cellulose resin. Other substrates include
dressings, bandages and patches, as well as, for example, a
substrate for an inhaler. For example, the inhaler can be a flat,
ceramic disk upon which a plurality of medicament dosages are
positioned. See, for example, U.S. Ser. No.08/471,889, filed Jun.
6, 1995.
[0078] The chucks of the present invention can be used for numerous
other types of objects, including but not limited to a thin
conductive substrate such as an edible polymeric substrate, which
can be used as a substrate for deposition of a pharmaceutically
active powder, and the substrate can subsequently be used, for
example, to create or coat a tablet. Preferably, excess objects
that are not electrostatically adhered to the chuck are removed
before transferring the objects to a substrate. To release the
objects, the application of voltage can be stopped, or for greater
force of removal, the voltage can be reversed.
[0079] In addition to pharmaceutical objects or particles, the
electrostatic chucks of the present invention can be used to
attract any other particle that can be adhered to an electrostatic
chuck. Additionally, for example, the chucks can be used to attract
and deposit liposomes into capsules for cosmetics.
[0080] B. Composition of the Objects Held by the Chucks
[0081] Preferably, the tablets to be held by the electrostatic
chucks of the invention include a substantial amount of cellulose,
preferably greater than about 50% cellulose, more preferably
greater than about 60% cellulose, even more preferably greater than
about 75% cellulose, even more preferably greater than about 90%
cellulose, and most preferably about 95% cellulose. In other
embodiments, the tablets include about 65% lactose and about 34%
cellulose. In certain embodiments, the tablets include about 80%
lactose. Preferably, the tablets do not have an ingredient which
would cause them to deviate from being either a good conductor or a
good dielectric. For example, with a conductive tablet such as one
that is substantially made of cellulose, preferably the tablet does
not include dielectric metal oxides such as ferrous or ferric oxide
or titanium oxide. Preferably the amount of iron oxide, if present,
is less than about 1%. Additionally, the tablet preferably does not
include moisture and preferably does not include a substantial
amount of a salt such as sodium bicarbonate that becomes conductive
with high humidity, thereby making the most efficient operation of
the electrostatic chuck affected by humidity.
[0082] The tablets may optionally have additional components,
including but not limited to sodium starch glycolate and magnesium
stearate.
[0083] When an edible substrate, having for example, a
pharmaceutically active powder deposited onto it, is fused with a
tablet, preferably the edible substrate is made of substantially
the same component as the tablet, such as cellulose. For example,
hydroxypropyl methyl cellulose can be used, such as Edisol M Film
M-900 or EM 1100 available from Polymer Films Inc. (Rockville,
Conn.).
[0084] Preferably, the density of the tablet is such that if it has
a diameter of about 5.6 mm, the tablet weighs no more than about
100 mg. If the diameter of the tablet is twice as large, the weight
can be proportional to the square of the diameter.
[0085] The conductivity of a tablet can be determined by measuring
the DC impedance, by placing the tablet in an electrical circuit
between a voltage source and a picoammeter. The capacitance of the
tablet can be measured by placing the tablet sample in parallel
with a Hewlett Packard 4192A Low Frequency Impedance Analyzer set
for 1 kHz. The tablets are preferably painted on both sides with a
thin layer of conductive silver paint to ensure good electrical
contact. Several formulations were tested, and conductivities
between 2.4.times.10.sup.9.OMEGA. and 6.3.times.10.sup.9.OMEGA.
were found. The range of impedance was about
2.times.10.sup.9.OMEGA. to 23.times.10.sup.10.OMEGA.. The
capacitance was determined to be 0.3 pF to 0.5 pF, which correspond
to a charge retention time of 100 .mu.sec. to 1 msec.
[0086] 3. Charging of Objects
[0087] In certain preferred embodiments, the objects to be applied
to the chuck are charged prior to their application. The charge can
be, for example, either a plasma charge or an electrostatic charge,
depending upon the nature of the object to be applied to the chuck.
For instance, when using beads, either a plasma or electrostatic
charge can be used since neither causes damage to the bead. For
other objects that may be damaged by plasma charging, electrostatic
charging is preferably used. In preferred embodiments, the methods
include electrostatically charging the object before applying it to
the chuck. For details regarding the use of carrier beads for
charging, see the continuation-in-part, filed simultaneously
herewith, of U.S. Ser. No. 08/630,049, filed Apr. 4, 1996.
[0088] 4. Configuration of the Chucks
[0089] The size of the chuck depends upon the number and size of
objects to be attracted using the chuck. For example, a 2 inch by 2
inch chuck can hold about 100 tablets in which each tablet has a
diameter of about 5.6 mm. Preferably, the chuck is reusable and can
be washed between uses.
[0090] When using a chuck of the present invention to hold a
recipient substrate, such as a tablet, during deposition of
particles, such as a powder containing a pharmaceutically active
ingredient, the tablets are preferably closely packed on the chuck
so that only the tablets receive the powder, and the chuck itself
is not coated with powder. For example, the electrostatic chucks of
the invention can be used to hold about eighty-one tablets in a row
of nine tablets by a column of nine tablets.
[0091] In one aspect, the present invention provides an
electrostatic chuck comprising a conductive layer forming at least
one electrode for electrostatically attracting multiple objects. In
other preferred embodiments, the chuck comprises a conductive layer
forming two electrodes, which, in certain embodiments, are
serpentine or interdigitated and provide for a higher probability
that the area of the two electrodes covered by the same object are
the same, therefore objects at different locations of the chuck are
held at the same potential. Additionally, the surface area is
beneficially inversely proportional to the object to be held by the
chuck. For example, in preferred embodiments, the electrode has a
larger surface area to electrostatically hold a smaller object. The
conductive layer that attracts or adheres objects to the chuck is
termed an "upper conductive layer", and this layer is not
necessarily the outermost layer of the chuck. For example, the
upper conductive layer can have a thin dielectric layer on top of
it, between the conductive layer and the objects. Further, the
chuck may have more than one conductive layer forming an electrode,
although only the conductive layer that attracts or adheres objects
to the chuck is termed an "upper conductive layer".
[0092] In certain preferred embodiments, the electrostatic chucks
are made of solid state materials such as glass or silicon dioxide
or other ceramics which impart good dielectric strength and
therefore better attraction of objects. The better dielectric
strength also provides for a thinner layer, and a lower voltage
which increases safety. Further, the materials are
well-characterized, durable, mechanically strong and readily
available.
[0093] A. Electrostatic Chuck with Two Electrodes in the Upper
Conductive Layer
[0094] Referring to FIG. 1, the lower conductive layer 610 of the
chuck 620 is coated with a dielectric layer 630. On top of the
dielectric layer is an upper conductive layer 640 forming an
interdigitated electrode, with a first electrode 650 and a second
electrode 660. A second dielectric layer 670 is placed on top of
the upper conductive layer 640. FIG. 2 shows a top view of the two
interdigitated electrodes 650 and 660. This chuck 620 can be used
to attract an object 680, as shown.
[0095] During use of an electrostatic chuck having an upper
conductive layer with two interdigitated electrodes, a voltage is
applied across the two electrodes of the chuck, preferably about
200 to about 2000 volts. See, for example, Example 4 below. The
voltage applied to an electrostatic chuck can be direct current
voltage (DC) or alternative current voltage (AC) provided that the
same amount of voltage is applied.
[0096] B. Mathematical Calculation of the Holding Force of the
Chuck
[0097] Without being limited to a particular theory, assuming a 1
mm contact area for the tablet, 1 Capacitance = 0 r A d = 8.89
.times. 10 - 10 .times. 1 .times. 1 .times. 10 - 6 50 .times. 10 -
6 17 pf E = 1 2 CV 2 F = X = 0 r AV 2 2 X 2 17 .times. 10 - 12
.times. ( 500 ) 2 2 .times. 5 - 0 .times. 10 - 6 = 42.5 N
[0098] For the capacitor, assuming that X=the thickness of
dielectric layer, for a 60 mg tablet, the gravitational
force=60.times.10.sup.-6 kg.times.9.8 N/kg.congruent.600 .mu.N and
the electrostatic force is therefore about 60 times stronger than
the force of gravity.
[0099] Without being limited to any particular theory, it is
believed that the object need not necessarily have direct physical
contact with an electrode in the upper conductive layer in order to
be electrostatically held by the chuck. When using the chuck having
an upper conductive layer with interdigitated electrodes to deposit
a charged powder onto a tablet, for example, the electrostatic
force holding the tablet increases as the charged powder is
deposited on the tablet, thereby providing an additional advantage
in a stronger holding force. There is a limited amount of charged
powder that can be deposited using the interdigitated chuck, which
is based on bias potential. Therefore, this chuck provides the
advantage of the ability to determine the amount of powder
deposited upon a substrate by measuring the amount of charge
remaining. The charge can be measured using, for example, an
electrometer or a picoammeter. The value of the charge can be used
to determine the mass of the powder deposited. The design of this
chuck provides for its ability to electrostatically hold virtually
any object that is conductive relative to the strong dielectric
layer on top of the chuck.
[0100] Without being limited to a particular theory, the following
mathematical formulas can be used to evaluate the holding force of
the electrostatic chuck illustrated in the circuit diagram shown in
FIG. 3. FIG. 3A represents a circuit diagram of an electrostatic
chuck with an upper conductive layer having two electrodes, each
electrode having an object attracted to it, and in which the lower
conductive layer is absent. FIG. 3B represents a circuit diagram of
a chuck with an upper conductive layer having two electrodes, each
electrode having the same object attracted to it, and in which the
lower conductive layer is present. Cp.sub.1 is the capacitance of
the capacitor formed between an object, such as a tablet, and the
first electrode; Cp.sub.2 is the capacitance of the capacitor
formed between an object, such as a tablet, and the second
electrode; Rp is the resistance due to the object; and V represents
the holding potential which is related to the force holding the
object onto the chuck. Referring to FIG. 3B, Ce.sub.1 is the
capacitance of the capacitor formed between the lower conductive
layer and the first electrode; Ce.sub.2 is the capacitance of the
capacitor formed between the lower conductive layer and the first
electrode; and V.sub.f represents the bias potential.
[0101] A conductive object and the electrode in the upper
conductive layer form a capacitor with a capacitance approximately
equal to 2 C = 0 r A d ( 1 )
[0102] where .epsilon..sub.0 is the dielectric constant of a
vacuum, and .epsilon..sub.r is the relative dielectric constant of
the dielectric layer on top of the electrodes in the upper
conductive layer; A is the contact area and d is the thickness of
the dielectric layer. The force holding of the conductive object
and the electrode in the upper conductive layer is given by: 3 F =
0 r AV 2 2 d 2 ( 2 )
[0103] where V is the voltage across the dielectric layer. Assuming
.epsilon..sub.r=3 for a polymer, V=350 V, d=10 .mu.m and A=15
mm.sup.2, the electrostatic force is 0.24 N. If the material has a
mass of 60 mg, the gravitational force is 0.59 mN. The
electrostatic force is over 400 times stronger than the
gravitational force.
[0104] In the circuit diagram shown in FIG. 3, V.sub.ad=V. Provided
enough charging time elapsed after the voltage V is applied,
V.sub.bc=0. When charged powders land on R.sub.p, the voltage
across the two capacitors is rearranged. However, the power supply
maintains the overall voltage drop V.sub.ad as a constant. In a
practical design, C.sup.p1 is approximately the same as C.sub.p2
and V.sub.ab.about.V.sub.cd.about.V/2. The overall attractive force
is proportional to (V.sub.ab.sup.2+V.sub.cd.sup.2).about-
.V.sup.2/2. If the voltage on point b (or c) is altered due to the
landing of the charge powders by V', the new attractive force is
proportional to V.sup.2/2+2V'.sup.2=V.sup.2/4+V'.sup.2. As a result
of the addition of the charged powder, the attractive force
increases. Also, normal leakage current through the two capacitors
of limited resistance is supplied by the power supply as well.
[0105] The applied potential V can be maintained at a separated
voltage difference V.sub.f with respect to ground. The potential at
the conductive material (in this application, the conductive
material is a tablet) is V.sub.f+V/.sup.2. If the tablet is exposed
to a cloud of charged powders, the powders will experience the
field due to the potential V.sub.f+V/2 and be attracted or repelled
according to the sign of the charge on powder. If the resultant
force is attractive, the powder will be deposited onto the tablet.
Since both V.sub.f and V can be controlled in magnitude as well as
the sign, the resultant force can be controlled so that it is
attractive for deposition.
[0106] Without being limited to any particular theory, it is
believed that before any conductive material is attached to the
chuck shown in FIG. 1 and in the circuit diagram in FIG. 3, the
charges will be concentrated on the edges of the electrodes. There
is a relatively weak fringing electric field on the top of the
electrostatic chuck. This field may not be strong enough to cause
charge redistribution in the tablet for attaching the tablet to the
chuck. This limitation is removed by the addition of a lower
conductive layer beneath the chuck, also known as a backplane. This
conductive layer causes the charges on the electrodes to
redistribute more evenly across the electrodes. As a result, a
higher fringing electric field on the top of the chuck and a better
initial attraction between the tablet and the chuck are formed. The
new equivalent circuit is shown in FIG. 3B.
[0107] C. Electrostatic Chuck with a Single Electrode in the Upper
Conductive Layer
[0108] In other preferred embodiments, the chuck comprises an upper
conductive layer having a single electrode. Preferably, the chuck
includes three layers. The bottom layer is preferably a lower
conductive layer made of metal, for example, such as aluminum.
Alternatively, for example, the bottom layer can be semiconductive,
such as a silicon wafer. The middle layer is a dielectric layer
preferably having a high dielectric strength, such as thermally
grown silicon dioxide. The top layer is an upper conductive layer
forming the electrode, which can extend from the top of the
dielectric layer externally, or can be embossed whereby it extends
internally into the dielectric layer. The upper conductive layer is
made of a conductive material, such as a metal, for example, copper
wires, or a semiconductor, for example, polycrystalline silicon.
Preferably, the upper conductive layer has no significantly
negative effect on a pharmaceutically active compound. In preferred
embodiments, the thickness of the upper conductive layer is from
about 100 nm to about 500 nm. Preferably, the upper conductive
layer comprises conductive stripes, and when used to attract
multiple objects, the width of the area between the stripes
preferably is approximately equal to the average diameter of the
objects, thereby providing for complete coverage of the electrode
when the maximum number of objects are held by the chuck. Thus,
when the chuck is used to hold objects while particles are being
deposited on the objects, this configuration provides for
substantially eliminating the deposition onto the chuck itself.
See, for example, FIG. 16.
[0109] Referring to FIG. 4B, for example, the electrostatic chuck
910 has a lower conductive layer 920, with a dielectric layer 930
on top of it. The upper conductive layer 940 either protrudes
outward from the dielectric layer 930, as shown in FIG. 4B, or is
embossed into the dielectric layer 930, as shown in FIG. 4C. A top
view of the striations in the upper conductive layer 940 is shown
in FIG. 4A. During use of the electrostatic chuck 910, a bias
potential is applied between the upper conductive layer 940 and the
lower conductive layer 920.
[0110] Without being limited to a particular theory, it is believed
that when the above-described chuck with a single electrode in the
upper conductive layer is used, for example, to electrostatically
hold tablets while a charged powder is applied to the tablets,
there is no charge redistribution in the tablet, but rather, the
tablet is directly charged by contact with the electrode.
Therefore, an unlimited amount of charged powder can be deposited
on the tablets.
[0111] 5. X-Y-Addressability of the Chucks and Their Uses
[0112] One of the conductive layers, such as the lower conductive
layer of the electrostatic chuck, can be made x-addressable or
x-y-addressable such that the location of the objects attracted to
the chuck can be selected. For example, in an x-addressable chuck,
the lower conductive layer has rows in which a single row can be
activated at one time. Thus, one can select the placement of
objects only on a specific row of the electrostatic chuck, rather
than on every row or of the chuck. In an x-y-addressable chuck, the
area of the lower conductive layer corresponding each row and
column, and therefore, preferably to each object, can be made
independent of the remainder of the lower conductive layer
corresponding to any of the other rows and columns. Thus, for
example, one can select the placement of objects only on specific
areas of the electrostatic chuck, rather than throughout the
chuck.
[0113] Further, the present invention provides an electrostatic
chuck comprising a configuration for depositing a selected number
of objects onto a recipient substrate. Preferably, the objects are
less than about 3 mm in thickness, and the configuration of the
chuck preferably comprises a conductive layer having an x or
y-addressable area for depositing a selected number of objects onto
the recipient substrate. Preferably, the chuck has multiple areas
that are x- or y-addressable, each area preferably corresponding to
a separate substrate such as a pharmaceutical carrier. In preferred
embodiments, the objects are deposited substantially simultaneously
onto multiple substrates, and in certain embodiments, the
substrates are connected. For example, the substrates can be a
pharmaceutical carrier and the objects can be, for example,
particles in a powder, microspheres or liposomes which contain a
pharmaceutically active ingredient, and together they create a
pharmaceutical dosage form. When the substrates are connected, a
multidosage pack can be formed in which the dosage decreases, for
example, from one unit to the next, such as with a multidosage pack
for birth control. The dosage can be determined by the number of
objects placed into each pharmaceutical carrier using an
electrostatic chuck. Thus, the present invention provides a
multidosage form having units in which each unit has a dosage, at
least two units having different dosages, the dosages being
determined by the number of microspheres in the unit. In certain
preferred embodiments, the average diameter of the microspheres is
from about 1 to about 500 microns, in some instances, preferably
about 100 to 500 microns, and in other instances, preferably about
50 microns.
[0114] Preferably, the microspheres comprise a pharmaceutically
acceptable polyalkylene, such as polyethylene glycol, which is
preferably at a concentration of at least about 90%, and more
preferably, about 95% polyethylene glycol. The chucks described
herein such as for attracting tablets, for example, and for
creating charge images, with another dielectric layer, can be used
for creating the above described multidosage forms. See, for
example, FIG. 15.
[0115] 6. Charge Imaging Electrostatic Chucks with Floating
Electrodes
[0116] In further preferred embodiments, electrostatic chucks of
the invention are provided for use in charge imaging. Specifically,
such an electrostatic chuck comprises a floating electrode for
charge imaging. An electrostatic chuck for charge imaging comprises
three layers, preferably with an optional fourth layer. The bottom
layer is the lower conductive layer, which is also known as the
backing electrode. The second layer, on top of the lower conductive
layer, is a dielectric layer. The third layer is an upper
conductive layer on top of the dielectric layer, and this upper
conductive layer has two types of electrodes, floating electrodes
and shielding electrodes. In preferred embodiments, the floating
electrodes are electrically isolated from the other conductors, and
there is a gap between the floating and shielding electrodes. The
fourth (optional) layer, on top of the upper conductive layer, is a
dielectric layer, which is preferably the layer having contact with
the medicament powder. Without being limited to a particular
theory, it is believed that when a potential is applied across the
shielding and backing electrodes, a charge redistribution occurs on
the floating electrodes. This charge redistribution causes
electrostatically charged objects to be attracted to the areas of
the chuck corresponding to the floating electrodes, thus resulting
in deposition in these areas. Preferably, there is a high fringing
field in the gap between the floating and shielding electrodes, but
this field is preferably not large enough to cause electrical
discharge.
[0117] The lower conductive layer can be made, for example, of
metal, such as silver, copper or aluminized polypropylene, and is
preferably about 500 nm in thickness. The dielectric layer can be
made of, for example, polyimide, polypropylene, or a semiconductive
layer, such as a ceramic, for example, SiO.sub.2, such as a
thermally grown silicon dioxide, and is preferably about 0.5 to
about 2 mils thick. The upper conductive layer is preferably made
of a metal, such as silver. Preferably, the upper conductive layer
is made of a material that does not negatively affect
pharmaceutically active materials.
[0118] The upper conductive layer can be made of, for example, a
thin gold film coating, and preferably, the floating and shielding
electrodes have the same thickness, which is preferably about 500
nm. In preferred embodiments, the gap between the floating
electrode and the shielding electrode is from about 25 microns to
about 500 microns. The shape of the floating electrode can be
varied, and can be irregular, so long as the gap between the
floating electrode and the shielding electrode remains
substantially constant. In certain preferred embodiments, the
floating electrode is round, and forms a dot that can be used to
create a selected pattern. In certain preferred embodiments, the
shielding electrode is grounded. The shielding electrode is biased
with respect to the lower conductive layer. The polarity of the
bias is preferably opposite of the powder to be deposited on the
substrate.
[0119] The fourth layer, on top of the upper conductive layer, is
an optional thin dielectric layer, which is preferably made of
polyimide or another material of high dielectric strength, and
preferably has a thickness of about 10 microns to about 50
microns.
[0120] The floating electrodes of the charge imaging chuck
determine the pattern of deposition of the medicament powder on the
substrate, and hold the powder thereon. During the deposition of
powder, the charge imaging chuck is electrically connected to a
power source, which is subsequently disconnected after deposition.
The floating electrodes can be configured, for example, to
spatially determine individual dosages on a substrate. Such
substrates include, for example, a tablet and an inhaler
substrate.
[0121] In preferred embodiments for charge imaging, the floating
electrodes are used to selectively attract particles to a substrate
in contact with the floating electrodes. Preferably, the substrate
has physical contact with the floating electrodes. Without being
limited to a particular theory, it is believed that the use of
floating electrodes on the electrostatic chuck generates an image
of charges by capacitive coupling. Each floating electrode has a
charge which is shifted as charged particles contact the electrode.
The process of deposition of charged particles on the floating
electrode continues until the floating electrode can no longer
shift potential, at the point in which it has the same potential as
the shielding electrode.
[0122] Referring to FIG. 5, for example, the chuck 1110 has a lower
conductive layer 1120, with a dielectric layer 1130 on top of it.
The dielectric layer has an upper conductive layer 1140 on top of
it. The upper conductive layer 1140 is electrically connected, but
with a gap 1150 between a shielding electrode 1160 and a floating
electrode 1170. A top view of the upper conductive layer 1140 is
shown in FIG. 6, with the floating electrode 1170 in the center,
and a gap 1150 between the floating electrode and the surrounding
shielding electrode 1160. The area of the lower conductive layer
1120 corresponding to each floating electrode can be made
addressable in rows, like the x-addressable chucking system
described above, or individually addressable, like the
x-y-addressable chucking system described above.
[0123] During use, a bias potential is applied between the
shielding electrode and the lower conductive layer. If the
particles to be deposited are positively charged, the bias
potential will be negative, and if the particles to be deposited
are negatively charged, the bias potential will be positive.
Preferably, the shielding electrode is connected to ground. During
deposition of particles, the length of time of the deposition will
preferably be continued until each and every floating electrode has
reached its limit in which the potential of the floating electrode
matches the potential of the shielding electrode.
[0124] Using an electrostatic chuck with floating electrodes to
deposit powder onto a substrate, the amount of powder deposited on
the substrate is determined by the charge or bias potential of the
chuck, and only a finite amount of powder can be deposited. Without
being limited to a particular theory, it is believed that the
deposition of powder ends when the charges on the floating
electrode can no longer be redistributed, which occurs when the
shielding electrode and the floating electrode have substantially
the same potential. Preferably, both the floating and shielding
electrodes will be at ground potential when the deposition is
complete. The amount of powder to be deposited can therefore be
controlled by controlling the bias potential, and it is unrelated
to the duration of deposition, once the limit has been reached.
Furthermore, the pattern of deposition is determined by the pattern
of the floating electrodes, which creates a charge image.
[0125] For example, a chuck can be used for charge imaging on a
substrate to determine the deposition of particles in a particular
pattern on the substrate. In preferred embodiments, particles of a
powder having a pharmaceutically active ingredient are deposited in
a selected pattern onto a recipient pharmaceutical substrate. In
certain preferred embodiments, the recipient substrate is a thin
dielectric material, such as polypropylene or another thin edible
substrate such as hydroxypropyl methyl cellulose, preferably having
a thickness of about 25 microns.
[0126] Alternatively, for example, an electrostatic charge imaging
chuck with a floating electrode can be used to form an inhaler
substrate, and to determine the electrostatic deposition of dry
powder, for example, onto the substrate. The charge imaging chuck
can be used, for example, to determine the spatial location of
individual dosages on a substrate. Additionally, the conductive
layer of the electrostatic chuck in the inhaler substrate can be
used for electronically assisted release of the powder, as
described in co-pending application entitled "Inhaler Apparatus
with an Electronic Means for Enhanced Release of Dry Powders,"
filed simultaneously herewith.
[0127] Further, the charge imaging chuck can be used outside the
pharmaceutical industry, such as for the determination of the
deposition pattern of a candy coating on a food item. The
electrostatic charge imaging chucks of the invention can be used to
hold objects, for example, for the application of a design, such as
a candy coating on an edible substrate. Alternatively, for example,
the electrostatic charge imaging chucks can be used to hold objects
for the application of a dry powder paint.
[0128] Without being limited to a particular theory, the following
mathematical formulas can be used to evaluate the amount of powder
that can be held by the electrostatic chuck having a floating
electrode, which is illustrated in the circuit diagram provided in
FIG. 7. Referring to FIG. 7, C is the capacitance of the capacitor
formed between the lower conductive layer e.sub.l and the floating
electrode e.sub.f. Cs is the stray capacitance of the capacitor
formed between the floating electrode e.sub.f and the lower
conductive layer e.sub.l. C' is the capacitance of the capacitor
formed between the floating electrode e.sub.f and the virtual
electrode e.sub.v, which is formed by the deposited charged
powders. The potential of the floating electrode e.sub.f can only
be some value between those of the shielding electrode e.sub.s and
the lower conductive layer e.sub.l, the shielding electrode e.sub.s
being grounded in the circuit diagram shown in FIG. 7.
[0129] The maximum charge that the floating electrode can hold
depends on the bias potential and the capacitor C according to the
equation Q.sub.max=CV. If the fringing field is ignored in order to
calculate the maximum charge, the following equation applies: 4 Q
max = CV = 0 r A d V
[0130] where A is the surface area of the floating electrode and d
is the thickness of the dielectric layer between the floating
electrode and the shielding electrode.
[0131] Because C.sub.s is very small compared to C, the deposited
charge Q' is approximately equal to Q. The mass M of the deposited
powder will be as follows: 5 M = Q max - 0 r A d m q V
[0132] where .mu. is the charge over mass ratio of the charged
powder. By way of example, if .epsilon..sub.r=2, d=50 .mu.m, the
diameter of floating electrode=4 mm, .mu.=50 .mu.C/g, and V=8 kV, M
will be 1.2 mg. Thus, the maximum mass of powder expected to be
deposited under these conditions will be 1.2 mg.
[0133] Since C.sub.s<<C, Q'=C'V'.apprxeq.Q.
[0134] Therefore, the maximum amount of changed powder is provided
by the following equation: 6 Q ' 0 r A d m q V
[0135] In addition to providing electrostatic chucks, the present
invention also provides methods of charge imaging or depositing
particles onto selected areas of a substrate, the method including
the use of an electrostatic chuck with floating electrodes in areas
of the chuck that correspond to the selected areas of the
substrate. Further, the present invention also provides for an
object having selected areas in which particles are applied to the
object via electrostatic means. In preferred embodiments, the
particles comprise a pharmaceutically active ingredient.
Preferably, the object is suitable for human consumption. In
certain embodiments, the object comprises a pharmaceutical
substrate such as an inhaler substrate, a tablet, suppository,
dressing, bandage or a patch. Preferably, the amount of particles
applied to the object are predetermined using a sensing electrode
in the electrostatic chuck.
[0136] Advantages of the use of an electrostatic chuck for
deposition of particles and for charge imaging include the ability
to coat a substrate in a more accurate and more uniform manner,
which is particularly important when the dosage of active
ingredient is low, such as from about 1 .mu.g to about 1 mg. Other
low dosage ranges include for example, from about 1 .mu.g to about
500 .mu.g, and from about 10 .mu.g to about 250 .mu.g, and from
about 20 .mu.g to about 100 .mu.g, such as about 25 .mu.g. Further,
the use of an electrostatic chuck for deposition of particles and
for charge imaging provides the advantage, for example, of a
mechanism for applying an active ingredient to a pharmaceutical
carrier that may be immiscible or otherwise incompatible with the
active ingredient.
[0137] 7. Sensing Electrode for Determining the Amount of Objects
Deposited on a Recipient Substrate
[0138] In addition to providing electrostatic chucks with floating
electrodes for charge imaging, the present invention provides
chucks with sensing electrodes to sense the amount of charge
deposited on a substrate. Furthermore, a single chuck can have both
floating and sensing electrodes. In certain aspects of the present
invention, the amount of charge that can be deposited on the chuck
is limited to a finite number, and this limitation provides a
mechanism for accurately determining the amount of powder deposited
on the substrate held by the chuck.
[0139] In another aspect, the present invention provides an
electrostatic chuck having a sensing electrode for sensing the
number of particles attracted to the chuck, particularly when the
chuck is not self-limiting with respect to the amount of charged
particles that can be deposited onto a substrate held by the chuck.
The electrostatic chucks, or other surfaces upon which a recipient
substrate is located, optionally include sensing electrodes to
sense the amount of charge deposited on the recipient substrate. In
certain aspects of the present invention, the amount of charge that
can be deposited, for example, on an electrostatic chuck is limited
to a finite number, and this limitation provides a mechanism for
accurately determining the amount of powder deposited on the
substrate held by the chuck. Alternatively, the amount of
deposition may not be self-limiting. A sensing electrode can be
used with an acoustic dispenser, for example, to determine the
amount of powder deposited onto a tablet, wherein the powder
includes a pharmaceutically active ingredient. Thus, the sensing
electrode provides a more accurate and uniform way of dispensing a
selected amount of objects. For example, the invention provides for
the accurate deposition of a selected amount of a pharmaceutically
active ingredient deposited on a substrate, especially when the
active ingredient is present in small doses.
[0140] The sensing electrode preferably has two layers. The bottom
layer is a lower conductive layer forming an electrode made of a
metal, for example, such as aluminum. The top layer, which is
exposed to the particles being deposited, is a dielectric layer,
and is made of a material having a high dielectric strength, such
as aluminum oxide. Additionally, for example, the sensing electrode
can be made of a thin aluminized polypropylene sheet or a thin
polyimide sheet with a copper backing. Without being limited to a
particular theory, it is believed that the charged particles land
on the dielectric layer and induce an equal and opposite charge on
the conductive layer. Due to the presence of the dielectric layer,
the possibility of charge neutralization is significantly
lowered.
[0141] Referring to FIG. 8, for example, the sensing electrode 1310
is constructed of a lower conductive layer 1320 and an upper
dielectric layer 1330. As shown in FIG. 9, the sensing electrode
1310 can be placed, for example, in an area outside the substrate
1410 receiving the deposition of particles. In this figure, the
sensing electrode 1310 is in the shape of a ring, and other shapes
can also be used. The sensing electrode 1310 can also be placed,
for example, within the area of the substrate 1410 receiving the
deposition of particles as shown in FIG. 10A, when there is a
single substrate 1410 receiving deposition. Alternatively, for
example, when there are multiple substrates 1410, the sensing
electrode 1310 can be placed within the area of deposition,
preferably in the shape of one of the substrates 1410 receiving
deposition, such as a tablet. Referring to FIG. 10B, for example,
the shape of the sensing electrode 1310 mimics the shape of one of
the substrates 1410.
[0142] The sensing electrode is preferably located in an area that
provides for an amount of particles to be deposited on the sensing
electrode in direct relation to the amount of deposition on the
substrate. More than one sensing electrode can be used with a
single substrate. For example, the presence of two sensing
electrodes with deposition on a single substrate can be used to
determine the relationship between the amount of deposition
occurring on the substrate and in areas outside the substrate. The
mass of the particles deposited onto the substrate(s) is determined
once the charge of the sensing electrode is measured.
[0143] To measure the amount of charge deposited, the sensing
electrode is connected in series with a capacitor of known value.
For example, a 1 nF capacitor will induce 1 volt when 1 nC of
charge is collected. The other pole of the known capacitor is
attached to ground, and the potential across the capacitor is
measured. A circuit diagram to illustrate the set-up is shown in
FIG. 11. Referring to FIG. 11, V.sub.m is a high impedance
voltmeter or an electrometer, C is the capacitance of a capacitor
of known value, such as 1 .mu.F, C' is the capacitance of the
capacitor formed between the sensing electrode e.sub.s and the
deposited charge e.sub.p resulting from the deposition of charged
particles.
[0144] Without being limited to a particular theory, the following
mathematical formulas can be used to evaluate the measurement of
deposited charges by the sensing electrode according to the above
circuit diagram.
[0145] C' is the capacitor formed by the sensing electrode and the
charged particles. C is a capacitor of known value. C has a zero
initial charge. When charged particles land on the sensing
electrode, they cause an equal amount of opposite charge to be
induced on the electrode which will subsequently induce an equal
amount of opposite charge on C. The overall effect results in an
equal amount and equal sign of charge induced on C, which can be
measured by an electrometer. Furthermore, the dominating electrical
noise associated with an active power source is removed. The
collected charge Q' is equal to C times V.
[0146] With this monitoring method using the sensing electrode, two
parameters need to be predetermined to monitor the amount of actual
deposition. These two parameters are the q/m (charge to mass) ratio
of the charged powder and the relation factor k between the
monitored charge Q' and the deposited charge Q on the deposition
area of interest (i.e. k=Q/Q'). Hence, the deposited mass M is
determined by the equation: 7 M = Q ' k q m
[0147] The reliability of the sensing electrode requires that the
variable k is substantially constant throughout the deposition.
[0148] The use of a sensing electrode is preferred over the use of
an ammeter or voltmeter within the circuit since the sensing
electrode provides the advantages, for example, of correcting for
collection of charges from the ambient atmosphere and other leakage
paths induced by the chuck.
[0149] Preferably, the charge:mass ratio of the objects to be
dispensed is measured during the deposition process to provide
feedback control for termination of deposition when the desired
number of objects have been deposited. For example, feedback
control can be used to monitor deposition of a pharmaceutical
powder until the appropriate dosage has been achieved.
[0150] The average charge:mass ratio can be measured, for example,
using a velocimeter and a modified quartz crystal monitor.
Referring to FIG. 17A, the quartz crystal monitor 1305 has a top
sensing layer 1307 and a bottom layer 1309 for connection to a
meter. The quartz crystal monitor is modified by adding a charge
sensing layer 1308, which is a second conductive layer, and a
dielectric layer 1312, as illustrated in FIG. 17A. This
modification causes the monitor to sense both charge and mass at
the same time. See, for example, the circuit diagram of the monitor
shown in FIG. 17B, in which Cs is the capacitor due to the
dielectric layer, which measures the collected charge.
[0151] Preferably, at least two charge:mass monitors are used, one
with the acoustic dispenser, and the other with the chuck or other
means holding the recipient substrate or substrates.
[0152] Thus, in another aspect, the present invention provides a
method of attracting a selected number of multiple particles to a
substrate, comprising (a) providing an electrostatic chuck with a
sensing electrode; (b) applying multiple electrostatically charged
particles to the chuck; and (c) sensing the number of particles
attracted to the chuck. Preferably, the particles are particles of
a dry powder and the method is used to determine the amount of
powder deposited on a substrate attracted to the chuck. The
invention therefore provides a method of accurately determining the
dosage in a pharmaceutical tablet.
[0153] Additionally, the invention provides a method of
manufacturing a pharmaceutical composition comprising (a) providing
a pharmaceutical substrate; and (b) electrostatically depositing
particles on the substrate, the deposition preferably comprising
the use of an electrostatic chuck. Preferably, the electrostatic
chuck comprises a floating electrode and the particles are
substantially deposited on an area of the substrate corresponding
to the floating electrode, and the electrostatic chuck preferably
further comprises a sensing electrode for determining the amount of
particles deposited on the substrate.
[0154] 8. Objects Created Using The Electrostatic Chucks of the
Invention
[0155] The invention additionally provides objects having selected
areas in which particles are applied to the object via
electrostatic means, such as charge imaging. The use of
electrostatic means creates a more accurate deposition of particles
in a selected image, thus providing for a manner of identification
of such an object. The deposition also shows greater uniformity,
and provides for less waste of particles.
[0156] In preferred embodiments, the particles comprise a
pharmaceutically active ingredient, and the object is suitable for
human consumption, and preferably comprises a pharmaceutical
substrate such as a tablet, capsule or caplet. In other preferred
embodiments, the object is a suppository or it is selected from the
group consisting of an inhaler substrate, a dressing, bandage and a
patch. Preferably, the amount of particles applied to the object
are predetermined using a sensing electrode in the electrostatic
means. Additionally, in preferred embodiments, the particles are
applied to the object using an acoustic dispenser described
below.
[0157] The invention is further illustrated by the following
non-limiting examples.
EXAMPLE 1
Electrostatic Chuck with an Upper Conductive Layer Having Two
Interdigitated Electrodes
[0158] An electrostatic chuck with an upper conductive layer having
two interdigitated electrodes was fabricated as follows. A glass
substrate was used, the substrate having an ITO (indium tin oxide)
interdigitated electrode, forming an upper conductive layer less
than about 25 microns thick. On top of the upper conductive layer
was a thin polystyrene layer using Scotch brand tape, having about
1 mil thickness.
[0159] In one test, 1000 volts was applied across the electrodes
and a tablet weighing about 65 mg and having a diameter of about
5.6 mm was held to the chuck. When 1400 volts were applied, the
tablet was repelled from the chuck, possibly due to a surge
resulting in a discharge due to a repulsive force.
[0160] In a second test, a tablet was placed on top of the tape and
500 V D.C. was applied to the electrodes. The chuck was turned
upside down and the tablet was held in place by the chuck.
[0161] In a third test, three tablets were applied to the chuck
using 500 V and the voltage was decreased until all three fell off
the chuck. The first tablet fell off at 300 V, the second tablet
fell off at 200 V, and the third tablet fell off at 100 V. The test
results showed that the holding force is proportional to
V.sup.2.
[0162] In another test, six hundred volts was applied to one of the
two interdigitated electrodes of the chuck, and the other electrode
was grounded. One tablet was placed on the polystyrene side of the
chuck, and the tablet remained on the chuck after turning the chuck
upside down and subjecting the tablet to the force of gravity.
[0163] The chuck was also tested for depositing powder on a tablet
while held by the chuck. Using air propulsion to deposit a
positively charged steroid in a 3% suspension of beads, it was
determined that at least about 47 .mu.g was deposited.
EXAMPLE 2
Electrostatic Chuck with a Single Electrode in the Upper Conductive
Layer
[0164] An electrostatic chuck having a single electrode in the
upper conductive layer was configured as follows. The bottom of the
chuck was a lower conductive layer made of aluminum layered onto a
dielectric layer made of polyimide laminated onto copper (Good
Fellows, Berwyn, Pa.). The thickness of the polyimide layer was
about 2 mils. Three copper wires on top of the polyimide formed the
upper conductive layer, and functioned as an electrode. The
thickness of the copper layer was about 4 mils. The distance
between the copper wires was about 5.6 mm. Eighty-six tablets were
used, each having a diameter of about 5.6 mm and each weighing
about 65 mg, and being made of about 95% cellulose and about 3%
lactose, each with a thickness of about 2 mm. The tablets were
adhered to the chuck for approximately five minutes, using 1500
volts applied between the upper and lower conductive layers.
[0165] A steroid drug powder was applied to the tablets held by the
chuck described above as follows. A mixture of 3% drug with Kynar
coated steel beads (Vertex Image Products, Yukom, Pa.) having a
diameter of about 100 microns was stored in a Teflon bottle. 585.0
mg of drug powder, in a combination of drug and beads weighing
20.6354 g, was deposited on the tablets for about 6 minutes, using
the acoustic dispenser described in Example 8 below at a frequency
of 87 Hz, which was determined to be the optimum frequency for the
dispenser. The mesh of the acoustic dispenser for separating drug
powder from beads was placed at a distance of 0.5 to 1.0 inches
from the tablets receiving the powder.
EXAMPLE 3
Electrostatic Chuck with Floating Electrodes
[0166] An electrostatic chuck with floating electrodes having the
following configuration was tested. The lower conductive layer was
made of copper tape and was about 4 mils in thickness. The next
layer was a dielectric layer made of Scotch brand polystyrene tape
and about 1 mil in thickness. On top of the dielectric layer was an
upper conductive layer made of a standard multipurpose through hole
wire wrapped board (Radioshack) and about 0.0625 inch thick,
forming an electrode, with a gap between a shielding electrode and
a floating electrode, which are electrically connected. The
floating electrode was round, and about 2.1 mm in diameter. The
shielding electrode was round, and about 2.5 mm in diameter. The
gap between the shielding and the floating electrode was about 200
microns. A substrate was placed on the upper conductive layer, the
substrate being a dielectric layer made of Scotch brand polystyrene
tape and about 1 mil in thickness.
[0167] To use the chuck, about -1800 volts were applied to the
upper conductive layer. Next, steroid drug particles were applied
to the chuck using the dispenser described in Example 8.
[0168] FIGS. 12-13 show the deposition of the powder on a floating
electrode using a bias potential of -1800 volts with the chuck
described above. The lower conductive layer, which is a printed
circuit board, shows the control of the alignment of the powder
during deposition. In FIGS. 12A and 13A, the lower conductive layer
was omitted whereas in FIGS. 12B and 14B, it was present. FIG. 12A
shows that, in the absence of the lower conductive layer, the
charged particles accumulate at the edges of the floating
electrode. FIGS. 12B and 13B, in contrast, show that in the
presence of the lower conductive layer, the charged particles are
uniformly spread throughout the floating electrode. The greatest
quantity of powder deposited was found in the conditions present in
FIG. 13B, in the presence of the lower conductive layer.
EXAMPLE 4
Electrostatic Chuck with Sensing Electrode
[0169] An electrostatic chuck with a sensing electrode is
constructed as follows. The sensing electrode consists of a lower
conductive layer made of aluminum and having on top of it a
dielectric layer made of aluminum oxide. A sensing electrode is
placed on the electrostatic chuck so that it is outside the
recipient substrate that is subject to deposition. The sensing
electrode is used to indirectly determine the amount of deposition
of charged particles by measuring the change in charge before and
after deposition.
[0170] Another electrostatic chuck is constructed with a sensing
electrode placed on the chuck in an area within the recipient
substrate, thereby causing both the sensing electrode and the
recipient substrate to be subject to deposition. In this case, the
sensing electrode is used to directly determine the amount of
deposition of charged particles by measuring the change in charge
before and after deposition.
[0171] A third electrostatic chuck is constructed with two sensing
electrodes, one placed within the recipient substrate, and the
other placed outside the recipient substrate. In this case, the
sensing electrode within the recipient substrate is used to
directly determine the amount of deposition of charged particles by
measuring the change in charge before and after deposition, and is
also used to calibrate the measurement of deposition by the sensing
electrode outside the area of deposition.
[0172] A sensing electrode in a ring configuration was fabricated
using anodized aluminum oxide (aluminum as the conductive layer
forming the electrode and the oxide layer as the dielectric). 15 g
of beads were used and were shaken together with a micronized
steroid drug powder (cortisone, Aldrich Chemical Co., Milwaukee,
Wis.) for about 30 minutes. Two concentrations of powder were used,
one having 450 mg of powder per 15 g beads (3% mixture) and one
having 900 mg of powder for 15 g beads (6% mixture). 1800 volts
were applied to the electrostatic chuck. Acoustic energy was used
to propel the powder according to Example 8, using either 1400
(corresponding to about 12 Watts), 1600 or 1800. The change in
charge during deposition was measured by recording the voltage on
the electrometer every 30 seconds for the first two minutes and
every minute thereafter until 30 minutes total had passed. The
amount of powder deposited on a pre-weighed amount of aluminum foil
was also measured.
[0173] Multiple tests were undertaken by performing deposition on
aluminum foil, the time for complete deposition taking about five
minutes. Tests showed that with steady state deposition, k varies
up to 4% in either direction. k is the ratio between the monitored
charge Q' and the deposited charge Q and is actually a function of
all operational parameters of the chuck and acoustic dispenser;
therefore, k is determined experimentally. A k inconsistency in
excess of 10% is accompanied by a change of dispenser
characteristic. The data obtained in tests of the sensing electrode
is provided in Tables VI and VII below, and FIGS. 14A-C, which
provide a graphical representation of the experimental data using a
sensing electrode in the guard ring configuration.
1TABLE VI Time 0 0 Bydio Time q q' Time dq/dt dq'/dt Time q/q'
dq/dq' q/q' analyst 0 0.00021 0.00115 900 0 0 0 5 0.00372 0.001102
5 0.337568 average after 0.58499 18 minutes 5 0.00207 0.00666 1600
5 0.00186 0.00551 5.5 0.01516 0.02488 5.5 0.337568 0.633441 Std
deviation 0.020353 5.5 0.00995 0.0191 1600 5.5 0.00974 0.01795 6
0.0138 0.01886 6 0.542618 0.731707 Relative 0.034792 deviation 6
0.01685 0.02853 1600 6 0.01664 0.02738 6.5 0.01546 0.02458 6.5
0.607443 0.628967 average after 7 0.569577 minutes 6.5 0.02458
0.04082 1600 6.5 0.02437 0.03967 7 0.0156 0.02956 7 0.614318
0.52774 Std deviation 0.026827 7 0.03238 0.0556 1600 7 0.03217
0.05445 8 0.01429 0.02603 8 0.590817 0.548982 Relative 0.0471
deviation 8 0.04667 0.08163 1600 8 0.04646 0.08048 9 0.01218
0.02307 9 0.577286 0.527958 average after 5 0.561399 minutes 9
0.05885 0.1047 1600 9 0.05864 0.10335 10 0.00951 0.0173 10 0.566296
0.549711 Std deviation 0.052168 10 0.06836 0.122 1600 10 0.06815
0.12085 11 0.00804 0.01675 11 0.563922 0.48 Relative 0.092925
deviation 11 0.0764 0.13875 1600 11 0.07619 0.1376 12 0.00768
0.0165 12 0.553706 0.465455 12 0.08408 0.15525 1600 12 0.08387
0.1541 13 0.0076 0.01725 13 0.544257 0.44058 13 0.09168 0.1725 1600
13 0.09147 0.17135 14 0.00804 0.0157 14 0.53382 0.512102 Average
over 25 25 minutes 14 0.09972 0.1882 1600 14 0.09951 0.18705 15
0.00841 0.0146 15 0.531997 0.576027 Deposition rate 1.0056 (mg/min)
15 0.10813 0.2028 1600 15 0.10792 0.20165 16 0.00845 0.0144 16
0.535185 0.586806 Dep rate (.mu.g/ 0.580515 min/mm2) 16 0.11658
0.2172 1600 16 0.11637 0.21605 17 0.00946 0.0178 17 0.538625
0.531461 Dep. rate (.mu.g/ 14.40048 min/tablet) 17 0.12604 0.235
1600 17 0.12583 0.23385 18 0.01075 0.016 18 0.53808 0.671875 Time
for 35 2.430474 .mu.g (low dose) 18 0.13679 0.251 1600 18 0.13658
0.24985 19 0.01048 0.017 19 0.546648 0.616471 Time for 250 17.36053
.mu.g (high dose) 19 0.14727 0.268 1600 19 0.14706 0.26685 20
0.01216 0.0191 20 0.551096 0.636649 q/m (.mu.C/g) 11.79282 20
0.15943 0.2871 1600 20 0.15922 0.28595 21 0.01305 0.0189 21
0.556811 0.690476 21 0.17248 0.306 1600 21 0.17227 0.30485 22
0.0127 0.016 22 0.565098 0.79375 Average last 5 5 minutes 22
0.18518 0.322 1600 22 0.18497 0.32085 23 0.01293 0.0218 23 0.5765
0.593119 Deposition rate 1.054461 (mg/min) 23 0.19811 0.3438 1600
23 0.1979 0.34265 24 0.01179 0.0095 24 0.577557 1.241053 Dep rate
(.mu.g/ 0.608722 min/mm2) 24 0.2099 0.3533 1600 24 0.20969 0.35215
25 0.0113 0.0177 25 0.595456 0.638418 Dep rate (.mu.g/ 15.10019
min/tablet) 25 0.2212 0.371 1600 25 0.22099 0.36985 26 0.0118
0.0153 26 0.597513 0.771242 Time for 35 2.317852 .mu.g (low dose)
26 0.233 0.3863 1600 26 0.23279 0.38515 27 0.0107 0.019 27 0.604414
0.563158 Time for 250 16.55609 .mu.g (high dose) 27 0.2437 0.4053
1600 27 0.24349 0.40415 28 0.0118 0.0197 28 0.602474 0.598985 28
0.2555 0.425 1600 28 0.25529 0.42385 29 0.0125 0.0183 29 0.602312
0.68306 29 0.268 0.4433 1600 29 0.26779 0.44215 30 0.0119 0.0138 30
0.605654 0.862319 30 0.2799 0.4571 1600 30 0.27969 0.45595
[0174]
2 TABLE VII dq/dq' analysis average after 18 minutes 0.733839 Std
deviation 0.192065 Relative deviation 0.261727 average after 7
minuts 0.629475 Std deviation 0.16644 Relative deviation 0.264411
average after 5 minutes 0.633389 Std deviation 0.157774 Relative
deviation 0.249094 Foil mass before deposition 160.86 Foil mass
after deposition 186 Mass gain 25.14 Length (in) 1.79 Width (in)
1.5 Area (in2) 2.685 Area (mm2) 1732.255 Tablet diameter (mm) 5.62
Tablet diameter (mm2) 24.80639 Capacitor value (.mu.F) 1.06
* * * * *