U.S. patent application number 09/735631 was filed with the patent office on 2001-06-21 for driving system with elastically supporting units.
This patent application is currently assigned to MINOLTA CO., LTD.. Invention is credited to Kuwana, Minoru, Maekawa, Yukio, Tanii, Junichi.
Application Number | 20010004420 09/735631 |
Document ID | / |
Family ID | 18462725 |
Filed Date | 2001-06-21 |
United States Patent
Application |
20010004420 |
Kind Code |
A1 |
Kuwana, Minoru ; et
al. |
June 21, 2001 |
Driving system with elastically supporting units
Abstract
A driving mechanism for holding and shifting a part to be
driven. The mechanism has at least three carrying elements for
carrying the part elastically by exerting force upon the part in
directions generally perpendicular to an axis of the part, at least
one of the carrying elements being of a actuating type including a
frictional actuator, the frictional actuator having a contact face
for contacting the part under the pressure, the contact face
oscillating at high frequency so as to make the part move in a
direction almost rectangular to that of exerting the force upon the
part.
Inventors: |
Kuwana, Minoru; (Osaka,
JP) ; Tanii, Junichi; (Osaka, JP) ; Maekawa,
Yukio; (Osaka, JP) |
Correspondence
Address: |
MCDERMOTT, WILL & EMERY
600 13th Street, N.W.
Washington
DC
20005-3096
US
|
Assignee: |
MINOLTA CO., LTD.
|
Family ID: |
18462725 |
Appl. No.: |
09/735631 |
Filed: |
December 14, 2000 |
Current U.S.
Class: |
396/55 ;
359/557 |
Current CPC
Class: |
G02B 27/646
20130101 |
Class at
Publication: |
396/55 ;
359/557 |
International
Class: |
G02B 027/64; G03B
017/00 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 17, 1999 |
JP |
11-359095 PAT. |
Claims
What is claimed is:
1. A driving system comprising: a driven member; and at least three
supporting units for supporting the driven member and for
elastically urging the driven member in directions generally
perpendicular to an axis thereof, at least one of the supporting
units being of a driving type including a frictionally driving
unit, the frictionally driving unit being restrained from moving a
direction perpendicular to a direction in which the driven member
is urged and having a contact portion for contacting the driven
member under pressure, the contact portion vibrating at high
frequency so as to move the driven member in a direction generally
perpendicular to the direction in which the driven member is
urged.
2. The driving system as claimed in claim 1, wherein all of the
supporting units are of the driving type.
3. The driving system as claimed in claim 1, wherein at least two
of the supporting units are of the driving type.
4. The driving system as claimed in claim 1, wherein the at least
one of the supporting units being of the driving type urges the
driven member toward the axis of the driven member elastically so
as to support the driven member.
5. The driving system as claimed in claim 1, wherein there are
provided two pairs of the supporting units beside the driven member
at right angles in a plane perpendicular to the axis of the driven
member, and at least one of each of the two pairs thereof is of the
driving type.
6. The driving system as claimed in claim 1, wherein there are
provided three of the supporting units beside the driven member at
generally trisected positions in a plane perpendicular to the axis
of the driven member so as to urge the driven member toward the
axis of the driven member, and at least two of the supporting units
are of the driving type.
7. The driving system as claimed in claim 1, further comprising a
holding unit for holding the driven member, the holding unit
including: an urging member for urging the driven member in a
direction parallel to the axis of the driven member; and a
contacting member for contacting the driven member so as to prevent
the driven member from moving in a direction of urging the driven
member.
8. The driving system as claimed in claim 7, wherein the urging
member includes a contact face for contacting the driven member
under the pressure, the contact face tilting to both the axis of
the driven member and a plane perpendicular to the axis of the
driven member so as to generate a component of urging force in a
direction parallel to the axis of the driven member.
9. A blur compensating mechanism including the driving system as
claimed in claim 1, wherein the driving system drives a blur
compensation lens in a direction perpendicular to an optical axis
thereof.
10. A driving system comprising: a driven member; a guide for
guiding the driven member movably in a plane; a first elastic
member for contacting the driven member from a first direction in
the plane; a second elastic member for contacting the driven member
from a second direction in the plane; and a third elastic member
for contacting the driven member from a third direction in the
plane, the third elastic member including a contact portion for
contacting the driven member, the contact portion being restrained
from moving in a direction perpendicular to the third direction in
the plane and vibrating in the direction perpendicular to the third
direction in the plane.
11. The driving system as claimed in claim 10, wherein the second
elastic member includes a second contact portion for contacting the
driven member, the second contact portion being restrained from
moving in a direction perpendicular to the second direction in the
plane and vibrating in the direction perpendicular to the second
direction in the plane.
12. The driving system as claimed in claim 11, wherein the second
direction is perpendicular to the third direction.
13. The driving system as claimed in claim 12, further comprising a
forth elastic member for contacting the driven member from a forth
direction in the plane, the first direction opposing the second
direction, and the third direction opposing the forth
direction.
14. The driving system as claimed in claim 11, wherein the driven
member has a circular contact face for contacting the first elastic
member, the second elastic member, and the third elastic member, at
generally trisected positions.
Description
[0001] This application is based upon application No. 11-359095
filed in Japan, the contents of which are hereby incorporated by
reference.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to a driving system with
elastically supporting units. More specifically, the present
invention relates to the driving system for driving a driven member
in a plane.
[0004] 2. Description of the Related Arts
[0005] When a camera body is moved or shaken at time of
photographing, an image-forming position or a position of object
image, onto a photosensitive surface, is deviated or shifted out of
position. In order to prevent such a deviation or shift of the
image-forming position, there have been proposed various types of
blur compensation mechanisms, in which a blur compensation lens
provided in a lens barrel is moved suitably, on a basis of the
detected direction and distance of the deviation caused by such a
shaking of the camera body, so as to keep the deviation of the
image-forming position onto the photosensitive surface within a
certain range.
[0006] However, the conventional blur compensation mechanisms are
constructed so that two blur compensation lenses are driven
independently in two directions perpendicular to each other,
because they are needed to be driven precisely at high speed.
Thereby, the construction thereof becomes large, and it is
difficult to make the mechanism compact, especially in a direction
of an optical axis, i.e. in a direction perpendicular to the
driving directions in which the blur compensation lenses are
driven.
SUMMARY OF THE INVENTION
[0007] Accordingly, it is an object of the present invention to
provide a driving system that is compact in a direction
perpendicular to the driving directions in which the blur
compensation lens is driven to move.
[0008] In order to achieve the above object, there is provided a
driving system comprising: a driven member; and at least three
supporting units for supporting the driven member and for
elastically urging the driven member in directions generally
perpendicular to an axis thereof, at least one of the supporting
units being of a driving type including a frictionally driving
unit, the frictionally driving unit being restrained from moving a
direction perpendicular to a direction in which the driven member
is urged and having a contact portion for contacting the driven
member under pressure, the contact portion vibrating at high
frequency so as to move the driven member in a direction generally
perpendicular to the direction in which the driven member is
urged.
[0009] In the construction, the driven member is supported on at
least three supporting points, as the result of the balance of
urging forces of the supporting units. The contact portion of the
frictionally driving unit, which is included by at least one of the
supporting units, can move or drive at least one of the supporting
points by the vibration thereof so that the driven member is moved
to and supported at new balanced position. That is, it is possible
to move the driven member.
[0010] In the construction, the frictionally driving unit may
include, for example, a piezoelectric actuator, which is of the
successively driving type, more specifically, a vibration motor or
so-called ultrasonic motor in which high frequent vibration makes
the driven member moved. In the case, the vibration motor may be of
a stationary wave type, of which the contact portion for contacting
the driven member vibrates in elliptic shape in a stationary
manner. Also, it may be of a progressive wave type, which drives
the driven member by means of the surface vibration in elliptic
shape caused by the progressive wave. Depending on the contact of
the frictionally driving unit with the driven member under
pressure, it is possible to move the driven member by the small
distance so as to control the movement of the driven member
precisely with high resolution. Thus, after driving the driven
member, it is possible to support the driven member without
play.
[0011] In the construction, since the supporting units support the
driven member from directions perpendicular to the axis of the
driven member the supporting units can be disposed only in the
space which extends in driving directions, except for in the space
which extends in a direction perpendicular to driving
direction.
[0012] Accordingly, the driving system can be made compact in the
direction perpendicular to the axis of the driven member.
[0013] As an embodiment, all of the supporting units may be of the
driving type.
[0014] In this embodiment, even if the force perpendicular to
urging direction of respective supporting units is applied, sliding
is caused between the driven member and the supporting units. Thus,
the supporting unit cannot be forced excessively and can drive the
driven member with small force at the stabile condition.
[0015] As another embodiment, at least two of the supporting units
may be of the driving type.
[0016] In this embodiment, in the case that the driving type of
supporting units are disposed not parallel to each other, it is
possible to move the driven member in two directions. Meanwhile, in
the case that the driving type of the supporting units are disposed
parallel to each other, it is possible to rotate the driven
member.
[0017] As still another embodiment, the at least one of the
supporting units being of the driving type may urge the driven
member toward the axis of the driven member elastically so as to
support the driven member.
[0018] In this embodiment, urging toward the axis of the driven
unit cannot cause redundant moment in the driven member. Thereby,
the contact portion of the driving type of supporting units contact
the driven member equally so as to drive the driven member at the
stable condition.
[0019] As still another embodiment, there may be provided two pairs
of the supporting units beside the driven member at right angles in
a plane perpendicular to the axis of the driven unit, and at least
one of each of the two pairs thereof may be of the driving
type.
[0020] In this embodiment, each pair of the supporting units is
disposed perpendicular to each other and at least one of the pairs
is of the driving type. Thus, it is possible to drive the driven
member in two directions without rotating it.
[0021] As still another embodiment, there may be provided three of
the supporting units beside the driven member at generally
trisected positions in a plane perpendicular to the axis of the
driven member so as to urge the driven member toward the axis of
the driven member, and at least two of the supporting units being
of the driving type.
[0022] In this embodiment, at least two of the driving type of the
supporting units, disposed about 120 degree apart, can drives the
driven member in two directions by the resultant force thereof.
Moreover, it is possible to rotate the driven member.
[0023] As still another embodiment, the driving system may further
comprise a holding unit for holding the driven member, the holding
unit including: an urging member for urging the driven member in a
direction parallel to the axis of the driven member; and a
contacting member for contacting the driven member so as to prevent
the driven member from moving in a direction of urging the driven
member. In this embodiment, the holding unit can keep the position
of the driven member constant in a direction parallel to the axis
of the driven member.
[0024] In this embodiment, the urging member may include a contact
face, contacting the driven member under the pressure and urged by
the supporting, the contact face tilting to (or being inclined
against) both the axis of the driven member and a plane
perpendicular to the axis of the driven member so as to generate a
component of urging force in a direction parallel to the axis of
the driven member. By means of the component of urging forces in
the direction parallel the axis of the driven member, it is
possible to support the driven member elastically and to make the
construction of the driving system compact.
[0025] Above mentioned constructions of the driving system is
suitable to a blur compensating apparatus to drive an image blur
compensation lens in a direction perpendicular to an optical axis
thereof.
[0026] Further, in order to achieve the above object, there is
provided a driving system comprising: a driven member; a guide for
guiding the driven member movably in a plane; a first elastic
member for contacting the driven member from a first direction in
the plane; a second elastic member for contacting the driven member
from a second direction in the plane; and a third elastic member
for contacting the driven member from a third direction in the
plane, the third elastic member including a contact portion for
contacting the driven member, the contact portion being restrained
from moving in a direction perpendicular to the third direction in
the plane and vibrating in the direction perpendicular to the third
direction in the plane.
[0027] As an embodiment, the second elastic member may include a
second contact portion for contacting the driven member, the second
contact portion being restrained from moving in a direction
perpendicular to the second direction in the plane and vibrating in
the direction perpendicular to the second direction in the
plane.
[0028] In this embodiment, the second direction may be
perpendicular to the third direction.
[0029] Moreover, the driving system may further comprise a forth
elastic member for contacting the driven member from a forth
direction in the plane, the first direction opposing the second
direction, and the third direction opposing the forth
direction.
[0030] As another embodiment, the driven member may have a circular
contact face for contacting the first elastic member, the second
elastic member, and the third elastic member at generally trisected
positions.
BRIEF DESCRIPTION OF THE DRAWINGS
[0031] This and other objects and features of the present invention
will become clear from the following description taken in
connection with the preferred embodiments thereof with the
reference to the accompanying drawings, in which:
[0032] FIG. 1 is a schematic cross sectional view showing a main
part of a driving system according to a first embodiment of the
present invention;
[0033] FIGS. 2A and 2B are schematic cross sectional views showing
main parts of a driving system according to a second embodiment of
the present invention;
[0034] FIG. 3A is a schematic view showing a main part of an
actuator employed in the driving system of FIG. 1;
[0035] FIG. 3B is a schematic view showing a main part of an
actuator according to a modification of the actuator of FIG.
3A;
[0036] FIG. 4 is a vertical sectional view of the driving system of
FIG. 1;
[0037] FIG. 5 is a schematic diagram of a camera, which uses the
driving system of FIG. 1;
[0038] FIG. 6 is a cross sectional view showing a main part of a
driving system according to a modification of the driving system of
FIG. 1; and
[0039] FIG. 7 is a vertical sectional view of FIG. 2.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0040] Before the description of the preferred embodiments of the
present invention proceeds, it is to be noted that like or
corresponding parts are designated by like reference numerals
throughout the accompanying drawings.
[0041] First, referring to FIG. 1 and FIGS. 3 though 5, a
description is made below in detail on a driving system, which is
provided in a camera, for driving an image shake preventing lens
(or blur compensation lens) 1, according to a first embodiment of
the present invention.
[0042] FIG. 1 shows the driving system. A lens frame 2 for
supporting the image shake preventing lens 1 has a generally square
section (i.e. four outer sides forming a square) along a plane, in
which the image shake preventing lens 1 moves so as to compensate
the deviation of the image-forming position onto the photosensitive
surface. The four outer sides of the lens frame 2, which form the
square section, are supported by two pairs of elastically
supporting units 100a, 6a; 100b, 6b. Each pair thereof 100a, 6a;
100b, 6b is disposed in a direction perpendicular to each other
relative to the lens frame 2. One 100a, 100b of the each pair is of
a driving type and includes an ultrasonic actuator 3a, 3b, which
contacts the corresponding outer side of the lens frame 2 radially
and drives the lens frame 2. Such a construction is suitable, for
example, in case that there is not enough space to arrange the
driving system in a direction of an optical axis inside a lens
barrel.
[0043] More specifically, the actuators 3a and 3b drive the lens
frame 2 linearly in the directions x and y, respectively. The lens
frame 2, which supports the image shake preventing lens 1, is urged
by springs 5a, 5b, via the actuator 3a, 3b and actuator bases 4a,
4b, respectively. The lens frame 2 is urged by each of the springs
6a, 6b in an opposed direction relative to that of each of the
springs 5a, 5b. Thereby, the lens frame 2 is positioned in two
directions x and y. The actuators 3a, 3b are adhesively bonded to
the actuator bases 4a, 4b, respectively. As an alternative to the
bonding method just above described, the actuator bases 4a, 4b may
have mounting grooves, with which the actuators 3a, 3b may
engage.
[0044] The actuator bases 4a and 4b are restrained from moving in
the directions x and y by guiding grooves 8a and 8b, which are
formed in a fixing cylinder 8, respectively. The actuator bases 4a
and 4b are restrained from moving in a direction of the optical
axis, as not shown. Thus, the actuator base 4a is able to move in
only one direction y, and the actuator bases 4b is able to move in
only one direction x.
[0045] As schematically shown in FIG. 4, the lens frame 2 is guided
by a spring 16 and a ball 17 so as to be able to move only in a
plane perpendicular to the optical axis. That is, the lens frame 2
is urged in a direction of the optical axis by the spring 16
against a ball 17, which is held by the fixing cylinder 8 and
reduces the friction between the lens frame 2 and the fixing
cylinder 8, so as to be prevented from faltering. Thus, the lens
frame 2 is restrained from moving in a direction of the optical
axis.
[0046] As for each of the actuators 3a, 3b, an ultrasonic motor 50,
which is shown in FIG. 3A, is used. The reason why the ultrasonic
motor is used for driving the image shake preventing lens is that
the ultrasonic motor has many advantages as compared to the other
types of actuators. For example, the ultrasonic motor can drive it
from initial speed to final speed in a short time and therefore has
high following property. The ultrasonic motor can drive it quickly
in a reverse direction. The construction of the ultrasonic motor is
simpler than that of the other types of actuators.
[0047] The ultrasonic actuator 50 has a pair of projecting
portions, tip surfaces 52a, 52b of which can oscillate or vibrate
in elliptic shape in the range of ultrasonic frequency. The lens
frame 2, which contacts the tip surfaces 52a, 52b under pressure,
is driven frictionally in a direction of tangent line with respect
to the elliptic shape of the tip surfaces 52a, 52b oscillating.
[0048] More specifically, the ultrasonic motor 50 has an elastic
metal plate 52, formed at right angles in a general shape of a "U."
That is, the elastic metal plate 52 has a main body and two
projecting portions. At central parts on both main surfaces of the
main body, piezoelectric elements 54a, 54b are bonded or fixed.
Alternating current voltage is applied to the piezoelectric
elements 54a, 54b. Thereby, for example, as indicated by arrows in
FIG. 3A, one 54a of the piezoelectric elements is expanded and
contracted in a direction of thickness of the main body of the
elastic metal plate 52, and the other 54b thereof is expanded and
contracted in a direction in which the main body thereof expands.
Thus, the elastic metal plate 52 is vibrated in various resonant
modes including, for example, bending vibration, and/or axial
vibration. As a result of composition of such various vibrations,
the tip surfaces 52a, 52b of the projecting portions are vibrated
in the elliptic or oblong shape, as shown in FIG. 3A. The phases of
such an elliptic vibration of the tip surfaces 52a, 52b are to be
sifted generally in a half period (or cicle).
[0049] Alternatively, an ultrasonic motor 60 as shown in FIG. 3B
may be used in stead of the ultrasonic motor 50. The ultrasonic
motor 60 have a base portion 68 and piezoelectric elements 62 and
64, which are connected to each other in a general shape of a
triangle. The piezoelectric elements 62, 64 are expanded and
contracted in shifting phases, so that a surface of a cylinder
connected to the elements 62, 64 is vibrated in a elliptic shape.
It is better to use a pair of two ultrasonic motors 60 as shown in
FIG. 6 in order to prevent the lens frame 2 from rotating.
[0050] Referring to FIG. 1, when a voltage is applied to the
piezoelectric elements of the actuator 3a so as to vibrate the
contact portion thereof contacting the lens frame 2 in the elliptic
shape, the lens frame 2 is moved in a direction tangent to the
ellipse, i.e. in the direction x. Meanwhile, the lens frame 2
slides over the spring 6a. Through movement of the lens frame 2 in
the direction x, urging force (or biasing force) exerted by the
spring 5b and that exerted by the spring 6b are unbalanced to each
other. However, the lens frame 2 is held in a stationary position
(or stopping position) when the lens frame 2 stops moving, by
static friction exerting between the actuator 3a and the lens frame
2 and by that exerting between the spring 6a and the lens frame 2.
Meanwhile, the lens frame 2 keeps a neutral position in the
direction y by means of the spring 5a, 6a. Namely, the lens frame 2
is driven in the direction x only.
[0051] Similarly, the lens frame 2 is driven in the direction y by
the actuator 3b.
[0052] Accordingly, the actuators 3a, 3b can control the position
of the lens frame 2 in the directions x and y independently.
[0053] FIG. 5 shows a block diagram of the camera, provided with
the driving system. The camera uses an imaging lens (photographing
lens) 40 equipped with the shake preventing lens 1.
[0054] The imaging lens 40 is provided with actuators 3a, 3b for
driving the shake preventing lens 1 in directions x and y
respectively, shake detectors (bluer detectors) 7a, 7b, for
example, which are acceleration sensors, for detecting shakes or
blurs in directions x and y respectively, and a lens microcomputer
42 connected thereto. A camera body 30 includes a camera CPU 34 for
controlling the operation of the camera totally. The camera CPU 34
and the lens microcomputer 42 are connected to each other so as to
communicate therewith mutually. The camera body 30 has a CCD photo
acceptance unit 32, disposed on a focus plane of the imaging lens
40. The CCD photo acceptance unit 32 transforms the light energy
into electric energy photoelectrically and outputs image
signal.
[0055] The lens microcomputer 42 performs the operation of
compensating the shake of the camera body on a basis of an
instruction from the camera CPU 34. That is, the lens microcomputer
42 receives shake information from the shake detectors 7a, 7b and
then evaluates adjusting distance and direction of the shake
preventing lens 1, based on the shake information. Then, the lens
microcomputer 42 controls the actuators 3a, 3b so as to drive the
shake preventing lens 1 in a plane perpendicular to the optical
axis, i.e. in a x-y plane. Thus, if the shake or vibration may
occur, it is possible to reduce the deviation of the imaging
position relative to the photosensitive surface, i.e. the plane of
the CCD photo acceptance unit 32, below a certain range.
[0056] Next, referring to FIGS. 2A, 2B, 3 and 7, a description is
made below in detail on a driving system of an image shake
preventing lens 9, according to a second embodiment of the present
invention.
[0057] As shown in FIG. 2A, a lens frame 10 holding the image shake
preventing lens (or blur compensation lens) 9 has a circular
section along a plane, in which the image shake prevent lens 9
moves so as to compensate the deviation of the image-forming
position onto the photosensitive surface. The outer side of the
lens frame 10, which forms the circular section, is supported by
three elastically supporting members 200, one end of each of which
is rotatably supported by the fixed cylinder (or stationary
cylinder).
[0058] Each elastically supporting member 200 is constructed as
shown in FIG. 2B. That is, an arm 12 has a hole 12w in an end
portion thereof, through which an axis 20k, fixed on the fixing
cylinder, passes so as to support the arm 12 rotatably. The arm 12
is urged toward the lens frame 10 by means of a torsion spring 13.
The torsion spring 13 has a coil portion inside which the axis 20k
is fitted with some play, and end portions which are hooked on a
projection 12t of the arm 12 and a projection 20s of the fixing
cylinder, respectively.
[0059] The actuator 11 is an ultrasonic motor 50 as well as that
shown in FIG. 3A according to the first embodiment of the present
invention, and bonded or fixed to an actuator base 11s, as well as
the first embodiment. A projection 12s, which is provided on the
other end of the arm 12, projects into a hole lit of the actuator
base 11s. Thereby, the actuator 11 is supported by the arm 12, so
as to be able to swing rotatably.
[0060] Referring to FIG. 2A again, the actuators 11a, 11b and 11c,
which contact under the pressure with the lens frame 10 by the
biasing force of the torsion coil springs 13a, 13b and 13c
respectively, can drive the lens frame 10. With this arrangement,
the arms 12a, 12b, 12c rotate accordingly. Namely, it is possible
to move the shake preventing lens 9 in any direction in the plane
perpendicular to the optical axis by controlling driving amount of
the actuators 11a, 11b, 11c. The operation, such as shake
preventing operation and so on, is similar to the first embodiment,
except for a holding mechanism of the lens frame 10.
[0061] By the way, if the lens frame is driven by the actuators
from a direction radial to the lens frame, it is necessary to
prevent the lens frame from moving in a direction parallel to the
optical axis. For example, it is necessary for the lens frame to be
urged toward a stationary member by means of the spring 16, as
shown in FIG. 4, and so on. Such additional parts, which are not
needed in case that the lens is driven from a direction parallel to
the optical axis, may make a mechanism bigger and may increase its
production cost.
[0062] Therefore, as shown in FIG. 7, the lens frame 10 has a
contact surface, for contacting the actuator 11, which is tilted
with respect to the optical axis. The contact surface causes axial
component of the force exerted by the spring, i.e. a component
thereof in a direction parallel to the optical axis. Namely, the
spring 13, which urges the actuator 11 toward the lens frame 10, is
used in order to restrain the lens frame 10 in a direction parallel
to the optical axis, as well as to drive the lens frame 10.
[0063] Though FIG. 7 shows the example on a basis of the driving
system as shown in FIG. 2, it is possible to similarly construct
the driving system as shown in FIG. 1. In that case of FIG. 1, not
only surfaces to contact the actuator 3a, 3b, but those to contact
the spring 6a, 6b, are needed to be tilted with respect to the
optical axis.
[0064] As above described, by arranging the actuators in the space
provided radially with respect to the shake preventing lens, the
size of the driving system for driving the shake preventing lens
can be reduced in the direction of the optical axis.
[0065] Although the present invention has been fully described in
connection with the preferred embodiments thereof with reference to
the accompanying drawings, it is to be noted that various other
changes and modifications are also apparent to those skilled in the
art.
[0066] The driving system according to the preferred embodiment can
drive a part by minute distance at high speed. Thus, it is possible
to apply the driving system to various apparatus.
[0067] For example, it is possible to support and drive the CCD
photo acceptance unit, instead of the image shake preventing lens,
similarly to the first embodiment as described above, so as to
compensate the deviation of the image-forming position onto the
photosensitive surface.
[0068] Such a driving system can be applied to so-called pixel
shifting. That is, in order to increase superficial numbers of the
pixels in the CCD photo acceptance unit, the driving system drives
the CCD photo acceptance unit minutely so as to fill in the blanks
between pixels.
[0069] The driving system, such as the above mentioned second
embodiment, can not only translate but rotate a part. Therefore,
the driving system can be applied to the high accuracy moving
stage, for example, which is used to process a cell under the
microscope or which is used in the process of manufacturing the
electronic parts.
* * * * *