U.S. patent application number 09/750038 was filed with the patent office on 2001-05-10 for semiconductor memory device.
Invention is credited to Nagashima, Osamu, Sakamoto, Tatsuya, Takemura, Riichiro.
Application Number | 20010000991 09/750038 |
Document ID | / |
Family ID | 18485370 |
Filed Date | 2001-05-10 |
United States Patent
Application |
20010000991 |
Kind Code |
A1 |
Sakamoto, Tatsuya ; et
al. |
May 10, 2001 |
Semiconductor memory device
Abstract
Switch MOSFETs are interposed between a sense amplifier disposed
in a dynamic RAM and complementary bit lines: after signal voltages
were read out by the selecting operations of the word lines from a
plurality of dynamic memory cells selected, to the plurality of
pairs of complementary bit lines in accordance with their
individual storage informations, the switch control signal of the
switch MOSFETs is changed from a select level to a predetermined
intermediate level. The switch MOSFETs, as fed with the
intermediate potential at their gates, are turned ON as a result
that sense nodes are set to one level in accordance with the
amplifying operations of the sense amplifier. An amplification
signal generated by the amplifying operation is transmitted through
the column select circuit to input/output lines in response to the
column select signal, and the switch control signal is returned
from the intermediate potential level to the select level in
response to the selecting operation of the column select
circuit.
Inventors: |
Sakamoto, Tatsuya;
(Higashimurayama, JP) ; Nagashima, Osamu; (Hamura,
JP) ; Takemura, Riichiro; (Kokubunji, JP) |
Correspondence
Address: |
ANTONELLI TERRY STOUT AND KRAUS
SUITE 1800
1300 NORTH SEVENTEENTH STREET
ARLINGTON
VA
22209
|
Family ID: |
18485370 |
Appl. No.: |
09/750038 |
Filed: |
December 29, 2000 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
09750038 |
Dec 29, 2000 |
|
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|
09471504 |
Dec 23, 1999 |
|
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Current U.S.
Class: |
365/190 |
Current CPC
Class: |
G11C 11/4091 20130101;
G11C 7/06 20130101; G11C 7/18 20130101; G11C 11/4097 20130101 |
Class at
Publication: |
365/190 |
International
Class: |
G11C 007/00 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 24, 1998 |
JP |
10-365887 |
Claims
We claim:
1. A semiconductor memory comprising: a plurality of word lines; a
pair of complementary bit lines; a plurality of memory cells
connected to said plurality of word lines, respectively; a sense
amplifier which amplifies a pair of signals appearing on said pair
of complementary bit lines; and a pair of N-channel MOSFETs
interposed between a pair of sense nodes of said sense amplifier
and said pair of complementary bit lines, which MOSFETs receive a
control signal at their gates, wherein said control signal is
selectively set to one of a high level, a low level and an
intermediate level between said high level and said low level,
wherein, after said pair of signals have appeared on said pair of
complementary bit lines by selecting one of said plurality of word
lines, said control signal is changed from said high level to said
intermediate level, and wherein, after the start of the operation
of said sense amplifier, said control signal is returned from said
intermediate level to said high level.
2. A semiconductor memory comprising: a plurality of word lines; a
pair of complementary bit lines; a plurality of dynamic memory
cells connected to said plurality of word lines, respectively; a
sense amplifier which amplifies a pair of signals appearing on said
pair of complementary bit lines; and a pair of MOSFETs interposed
between a pair of sense nodes of said sense amplifier and said pair
of complementary bit lines, which MOSFETs receive a control signal
at their gates, wherein said control signal is selectively set to
one of a select level, an unselect level and an intermediate level
between said select level and said unselect level, wherein, after
said pair of signals have appeared on said pair of complementary
bit lines by selecting one of said plurality of word lines, said
control signal is changed from said select level to said
intermediate level, and wherein, after the start of the operation
of said sense amplifier, said control signal is returned from said
intermediate level to said select level.
3. A semiconductor memory comprising: a pair of complementary bit
lines; a plurality of word lines crossing said pair of
complementary bit lines; a plurality of dynamic memory cells each
of which is connected to a corresponding one of said plurality of
word lines and a corresponding one of said pair of data lines; a
sense amplifier which amplifies a pair of signals appearing on said
pair of complementary bit lines; and a pair of MOSFETs interposed
between a pair of sense nodes of said sense amplifier and said pair
of complementary bit lines, which MOSFETs receive a control signal
at their gates, wherein said control signal is selectively set to
one of a select level, an unselect level and an intermediate level
between said select level and said unselect level, wherein, after
said pair of signals have appeared on said pair of complementary
bit lines by selecting one of said plurality of word lines, said
control signal is changed from said select level to said
intermediate level, wherein, after the start of the operation of
said sense amplifier, said control signal is returned from said
intermediate level to said select level, and wherein said control
signal is set to said unselect level when each of said plurality of
word lines is supposed to be unselected.
4. A semiconductor memory comprising: a pair of complementary bit
lines; a plurality of word lines crossing said pair of
complementary bit lines; a plurality of dynamic memory cells each
of which is connected to a corresponding one of said plurality of
word lines and a corresponding one of said pair of data lines; a
sense amplifier which amplifies a pair of signals appearing on said
pair of complementary bit lines; and a pair of N-channel MOSFETs
interposed between a pair of sense nodes of said sense amplifier
and said pair of complementary bit lines, which MOSFETs receive a
control signal at their gates, wherein said control signal is
selectively set to one of a high level, a low level and an
intermediate level between said high level and said low level,
wherein, after said pair of signals have appeared on said pair of
complementary bit lines by selecting one of said plurality of word
lines, said control signal is changed from said high level to said
intermediate level, wherein, after the start of the operation of
said sense amplifier, said control signal is returned from said
intermediate level to said high level, and wherein said control
signal is set to said low level when each of said plurality of word
lines is supposed to be unselected.
5. A semiconductor memory according to claim 4, wherein said sense
amplifier provides said pair of sense nodes with a high side
voltage corresponding to said intermediate level and a low side
voltage corresponding to said low level.
Description
BACKGROUND OF THE INVENTION
1. The present invention relates to a semiconductor memory device
and, mainly, to a technique which is effective when utilized in a
dynamic RAM (Random Access Memory) including switch MOSFETs between
a sense amplifier and bit lines.
2. The dynamic RAM, which is intended to raise the speed of the
sense amplifier by turning OFF the selected side of a shared select
MOSFET temporarily to lighten the load on the sense amplifier, has
been exemplified by Japanese Patent Laid-Opens Nos. 64-73596,
5-62463 and 8-106781. In Japanese Patent Laid-Open No. 4-167293, on
the other hand, there is disclosed the dynamic RAM. In this dynamic
RAM, switch MOSFETs are interposed between the input/output nodes
of the sense amplifier and complementary bit lines and are once set
to the unselect level at the time of starting the amplification of
the sense amplifier so that the sense amplifier and the
complementary bit lines are isolated to start the amplifying
operations. After a column selection, the gate voltage of the
switch MOSFETs are set to an intermediate potential to perform the
operations in parallel to output one of the sense amplifier
amplification signals to the IO lines and to restore the other
amplification signal in the bit lines, After this, the gate voltage
of the switch MOSFETs is returned to the select level so that the
one amplification signal is re-stored through the bit lines in the
memory cells.
3. Here, the terminology "MOS(Metal Oxide Semiconductor)FET"
includes the "MIS(Metal Insulated Semiconducor)FET" according to
the general recognition, and widely means the field effect
transistor.
SUMMARY OF THE INVENTION
4. As in the dynamic RAM disclosed in Japanese Patent Laid-Opens
Nos. 64-73596, 5-62463 and 8-106781, before the amplification start
of the sense amplifier, the shared select MOSFETs are turned OFF to
isolate the complementary bit lines and the sense nodes of the
sense amplifier. The sense nodes, even if at a full amplification
level state, are lowered at their level, when the shared select
MOSFETs are returned again to the ON state. By the charge share
between the read charge from the memory cells held in a relatively
high parasitic capacity of the bit lines and the charge in the
sense nodes, the potential of the sense nodes drops so that the
signal amplitude is temporarily reduced, as clarified by our
investigations. Alternatively, even when the sense nodes are
connected with the data output lines by the column selecting
operation, the signal amplitude of the sense nodes is also
temporarily reduced, as clarified by our investigations, by the
charge share between the precharge charge held in the parasitic
capacity of the data output lines and the charge in the sense
nodes. As a result, in the column selecting operation, the column
selecting operation has to take a relatively long time for
transmitting the signal of the sense nodes to the data input/output
lines, and this long time causes an obstruction to the high speed,
as also clarified by our investigations.
5. In the Japanese Patent Laid-Open No. 4-167293, the gates of the
switch MOSFETs are set to the intermediate potential to effect the
outputting operation at the low level by the sense amplifier to the
I/O lines. In parallel with this, the re-storage (or reloading) of
the data is effected in the bit lines on the high level side. As
well known in the art, however, the memory cells store the binary
information. Even if the re-storage of the data on the high level
side is exclusively accelerated, as described above, the effect in
view of the entire memory access is questionable, as clarified by
our investigations, considering that the data re-storage on the low
level side is not performed before the switch MOSFETs are returned
to the ON state. On the other hand, that effect involves a problem
that the timing control at the level is complicated, as clarified
by our investigations, considering that the gate voltage to be fed
to the gate of one switch MOSFET is changed at the levels of the
unselect level--the select level--the intermediate level--the
unselect level within a short time period from just before the
start of the sense operation to the restoring operation of the bit
lines, that the provision of the switch MOSFETs makes no sense if
the transfer from the select level to the intermediate level is not
made before the sense output grows sufficient, and that the
elements have a process dispersion. It is further clarified by our
investigations that the change from the intermediate level to the
unselect level raises an obstruction to the high speed of the
re-storage operations.
6. An object of the invention is to provide a semiconductor memory
device which has realized a stable amplifying operation and a high
speed of a sense amplifier with a simple construction. The
foregoing and other objects and novel features of the invention
will become apparent from the description to be made with reference
to the accompanying drawings.
7. Representatives of the invention to be disclosed herein will be
briefly summarized in the following. Specifically, switch MOSFETs
are interposed between a sense amplifier disposed in a dynamic RAM
and complementary bit lines: after signal voltages were read out by
the selecting operations of said word lines from a plurality of
dynamic memory cells selected, to the plurality of pairs of
complementary bit lines in accordance with their individual storage
informations, the switch control signal of said switch MOSFETs is
changed from a select level to the intermediate potential having:
an OFF state or a relatively high ON resistance for the signal
voltage read out to said complementary bit lines; an ON state with
a relatively low ON resistance for a potential at which the sense
nodes are set to one level by the amplifying operation of the sense
amplifier; and an OFF state at a potential of the other level; said
sense amplifier is fed with an operating voltage to start the
amplifying operation in response to the change in said switch
control signal; an amplification signal generated by said
amplifying operation is transmitted through the column select
circuit to said input/output lines in response to the column select
signal; and said switch control signal is returned to the select
level in response to the selecting operation of said column select
circuit.
8. With the construction thus far described, in the amplifying
operation of the sense amplifier, one of the sense nodes is
connected with the bit line so that a high signal charge can be
established by the parasitic capacity on the bit lines. In the
column selecting operation, therefore, a high read signal can be
outputted to the data input/output lines thereby to effect the high
speed of the sense output operation.
BRIEF DESCRIPTION OF THE DRAWINGS
9. FIG. 1 is a schematic layout diagram showing one embodiment of
the dynamic RAM to which the invention is applied;
10. FIG. 2 is a schematic layout diagram showing one embodiment of
the sub array and its peripheral circuit in the dynamic RAM
according to the invention;
11. FIG. 3 is a circuit diagram of one simplified embodiment of the
dynamic RAM according to the invention around the sense amplifier
portion thereof from the address input to the data output;
12. FIG. 4 is a circuit diagram showing one embodiment of the sense
amplifier portion of the, dynamic RAM according to the
invention;
13. FIG. 5 is a circuit diagram showing one embodiment of the main
amplifier shown in the embodiment of FIG. 3;
14. FIG. 6 is a circuit diagram showing one embodiment of the
output buffer of the dynamic RAM according to the invention;
15. FIG. 7 is a timing chart for explaining one example of the
reading operation of the dynamic RAM according to the
invention;
16. FIG. 8 is a timing chart for explaining the reading operation
of the dynamic RAM according to the invention;
17. FIG. 9 is a timing chart for explaining another example of the
reading operation of the dynamic RAM according to the
invention;
18. FIG. 10 is a circuit diagram showing one embodiment of the
timing generation circuit for generating the shared select
signal;
19. FIG. 11 is a timing chart for explaining another example of the
reading operation of the dynamic RAM according to the
invention;
20. FIG. 12 is a circuit diagram showing one embodiment of the
sense amplifier having the overdrive function;
21. FIG. 13 is a schematic element layout diagram showing one
embodiment of the sense amplifier portion to be used in the dynamic
RAM according to the invention;
22. FIG. 14 is a timing chart for explaining another example of the
reading operation of the dynamic RAM according to the
invention;
23. FIG. 15 is a circuit diagram showing the sense amplifier
portion of another embodiment of the dynamic RAM according to the
invention; and
24. FIG. 16 is a waveform diagram for explaining the operations
when the invention is applied to a synchronous DRAM.
DETAILED DESCRIPTION OF THE INVENTION
25. FIG. 1 is a schematic layout diagram showing one embodiment of
a dynamic RAM to which the invention is applied. IN FIG. 1, of the
individual circuit blocks constructing the dynamic RAM to which the
invention is applied, a main portion is clearly shown and formed
over one semiconductor substrate of single crystalline silicon by
the well-known technique for manufacturing the semiconductor
integrated circuit.
26. In this embodiment, the memory array is entirely divided into
four, although not especially limitative thereto. At a central
portion 14 in the longitudinal direction of the semiconductor chip,
there are provided an input/output interface circuit including an
address input circuit, a data input/output circuit and a bonding
pad array, a power supply circuit including a voltage step-down
circuit, and so on. On the two sides, as contacting with the memory
arrays, of the central portion 14, there are arranged column
decoder regions 13.
27. Each of the four memory arrays, as divided into left and right
two and into upper and lower two with respect to the longitudinal
direction of the semiconductor chip, as described above, is made to
construct one memory bank. In each of the memory arrays, a main row
decoder region 11 is provided at an up-and-down center portion with
respect to the longitudinal direction. Above and below this main
row decoder,- there are formed main word driver regions 12 which
individually drive the main word lines of the memory array divided
into the upper and lower ones.
28. The memory cell array (or sub array) 15 is formed, as shown in
an enlarged view, such that it is surrounded by sense amplifier
regions 16 and sub word driver regions 17. The sense amplifier
region and the sub word driver region provides an intersection
region (or cross area) 18 at their intersecting portion. A sense
amplifier, as provided in the sense amplifier region 16, is
constructed by the shared sense method. On the left and right sides
around the sense amplifier other than those arranged on the two
ends of the memory cell array, there are provided complementary bit
lines, which are selectively connected with the complementary bit
lines of the left or right memory cell array.
29. The memory arrays, as divided into left and right four with
respect to the longitudinal direction of the semiconductor chip, as
described above, are arranged in two pairs. At the central portions
of the two memory arrays thus arranged in the pairs, there are
arranged the main row decoder region 11 and main word drivers 12.
These main word drivers 12 generate a select signal for selecting
main word lines, which are extended through one of the memory
arrays. On the other hand, the main word drivers 12 are provided
with sub word selecting drivers, which are extended in parallel
with the main word lines to generate a sub word selecting line
signal, as will be described hereinafter.
30. One memory cell array (or sub array)15 as shown in the enlarged
view, is provided with 256 sub word lines, although not shown, and
256 pairs of complementary bit lines (or data lines) perpendicular
to the former, although not especially limitative thereto.
Alternatively, there are provided 512 sub word lines and 512 pairs
of complementary bit lines perpendicular to the former. If the one
memory array is provided, as shown, with sixteen memory cell arrays
(or sub arrays) 15 in the bit line direction, the sub word lines
are provided as a whole about 4 K for the 256 construction and
about 8 K for the 512 construction. Since eight memory cell arrays
are provided in the word line direction, the complementary bit
lines are provided as a whole about 4 K for the 256 construction
and 8 K for the 512 construction. Since these eight memory arrays
are provided as a whole, the entirety is given a storage capacity
of 8.times.2 K.times.4 K=64 M bits or 8.times.4 K.times.8 K=256
Mbits.
31. The one memory array is divided into eight with respect to the
main word line direction. For each memory cell array 15 thus
divided, there is provided a sub word driver (or sub word line
driver) 17. This sub word driver 17 is divided to have one eighth
of the length of the main word lines to generate a select signal
for selecting the sub word lines extended in parallel with the
former. In this embodiment, in order to reduce the number of main
word lines, i.e., in order to widen the wiring pitch of the main
word lines, four sub word lines are arranged with respect to one
main word line in the complementary bit line direction, although
not especially limitative thereto. A sub word selecting driver is
arranged to select one of the sub word lines which are thus divided
into eight in the main word line direction and assigned every four
in the complementary bit line direction. The sub word selecting
driver generates a select signal for selecting one of the four sub
word selecting lines extended in the array direction of the sub
word drivers.
32. As described above, one memory array has the storage capacity
of 4 Kbits or 8 Kbits with respect to the complementary bit line
direction. If the memory cells as high as 4 K or 8 K are connected
with one complementary bit line, however, the parasitic capacity of
the complementary bit lines increases so that a signal level to be
read cannot be obtained due to the small capacity ratio to an
information storing capacitor. Therefore, the division is also made
into sixteen with respect to the complementary bit line direction.
Specifically, the complementary bit lines are divided into sixteen
by the sense amplifiers 16, as indicated by thick black lines.
Although not especially limitative, the sense amplifier 16 is
constructed by the shared sense method, and the complementary bit
lines are provided on the left and right of the sense amplifier 16
excepting those which are arranged at the two ends of the memory
array, so that the sense amplifier 16 is selectively connected with
either the left or right complementary bit lines.
33. In order to retain the signal amount to be read out to the bit
lines, the sub array may be constructed such that the number of
memory cells to be connected therewith is set to 256 (excepting the
redundancy cells) to make the number of divisions of bit lines more
than that of word lines (or sub word lines). In the dynamic RAM of
this case having a storage capacity of about 256 Mbits, each of
quartered memory arrays has a storage capacity of 8 K.times.8 K=64
Mbits. As a result, the bit lines are divided into thirty two
whereas the word lines are divided into sixteen, and the sub arrays
are correspondingly provided.
34. FIG. 2 is a schematic layout diagram showing one embodiment of
the sub array and its peripheral circuit in the dynamic RAM
according to the invention. In FIG. 3, the regions to have sub
arrays SBARY are discriminated by hatching them from the sub word
driver regions, the sense amplifier regions and the cross areas, as
provided in the peripheries of the former.
35. The sub array SBARY is divided into the following four kinds in
the example of the construction of 256.times.256. If the extending
direction of the word lines is horizontal, more specifically, the
first sub array SBARY, as located at the righthand lower position,
is arranged with 256 sub word lines SWL, and the complementary bit
lines are made up of 256 pairs. Therefore, 256 sub word drivers SWD
corresponding to the 256 sub word lines SWL are divided into halves
of 128 and arranged on the left and right sides of that sub array.
In addition to the shared sense amplifier construction, 256 sense
amplifiers SA, as provided to correspond to the 256 pairs of
complementary bit lines BL, are alternately arranged by 128 above
and below that sub array.
36. The second sub array SBARY, as located at the righthand upper
position, is provided with eight preparatory (or redundancy) word
lines in addition to the 256 normal sub word lines SWL, although
not especially limitative thereto, and the complementary bit lines
are composed of 256 pairs. Therefore, the 264 sub word drivers SWD
corresponding to the (256+8) sub word lines SWL are separately
arranged by 132 on the left and right of that sub array. Like
above, the 128 sense amplifiers are arranged above and below.
Specifically, the 128 pairs of complementary bit lines of the 256
pairs, as formed in the sub arrays SBARY arranged above and below
on the right side, are commonly connected through a shared switch
MOSFET with the sense amplifier SA interposed inbetween.
37. The third sub array SBARY, as located at the lefthand lower
position, is constructed to have 256 sub word lines SWL as in the
adjoining righthand sub array SBARY. Like above, the 128 sub word
drivers are separately arranged. The 128 of the 256 sub word lines
SWL of the sub arrays SBARY, as located at the lefthand and
righthand lower positions, are commonly connected with the 128 sub
word drivers SWD which are formed in the regions interposed
inbetween. As described above, the sub array SBARY, as located at
the lefthand lower position, is provided with four pairs of
preparatory (or redundancy) bit lines 4RED in addition to the 256
pairs of normal complementary bit lines BL. Therefore, the 260
sense amplifiers SA corresponding to the 260 pairs of complementary
bit lines BL are separately arranged by 130 above and below that
sub array.
38. The fourth sub array SBARY, as located at the lefthand upper
position, is provided, as in the adjoining righthand sub array
SBARY, with 256 normal sub word lines SWL and eight preparatory sub
word lines and, as in the adjoining lower sub array, with four
pairs of preparatory bit lines in addition to 256 pairs of normal
complementary bit lines. Therefore, the sub word drivers are
separately arranged by 132 on the left and right sides, and the
sense amplifiers SA are separately arranged by 130 above and
below.
39. The main word lines MWL are so extended in the horizontal
direction that one of them is exemplified. On the other hand,
column selecting lines YS are so extended in the vertical direction
that one of them is exemplified. The sub word lines SWL are
arranged in parallel with the main word lines MWL, and the
(not-shown) complementary bit lines BL are arranged in parallel
with the column selecting lines YS.
40. For the four sub arrays, eight sub word selecting lines FX0B to
FX7B are extended like the main word lines MWL through the four
sets of (or eight) sub arrays. Moreover, the four sub word
selecting lines FX0B to FX3B and the four sub word selecting lines
FX4B to FX7B are extended separately over the upper and lower sub
arrays. The reasony why one set of sub word selecting lines FX0B to
FX7B are thus assigned to the two sub arrays and extended over the
sub arrays is to reduce the memory chip size.
41. Specifically, when the eight sub word selecting lines FX0B to
FX7B are assigned to each sub array and are formed in the wiring
channels over the sense amplifier area, the wiring channels
necessary are as many as 8.times.32=256 for the 32 sense amplifiers
in the shorter side direction, as in the memory array of FIG. 1. In
the foregoing embodiment, on the contrary, the wiring lines can be
formed without any special dedicated regions by assigning the eight
sub word selecting lines FX0B to FX7B commonly to the two upper and
lower sub arrays and by arranging them over the sub arrays in
parallel with the main word lines and in the mixed manner.
42. Intrinsically, one main word line is provided over the sub
array for eight sub word lines, and the sub word selecting lines
are demanded for selecting one of the eight sub word lines. Since
one main word line MWL is formed for the eight sub word lines SWL
which are formed according to the pitch of the memory cells, the
main word lines MWL have a wide wiring pitch. It is, therefore,
relatively easily effected by sacrificing the width of the wiring
pitch slightly to form the sub word selecting lines between the
main word lines MWL by making use of the same wiring layer as that
of the main word lines MWL.
43. The sub word driver SWD of this embodiment adopts a
construction to select one sub word line SWL by using a select
signal, as fed through the sub word selecting lines FX0B and so on,
and a select signal inverted from the former. Moreover, the sub
word driver SWD adopts a construction to select the sub word lines
SWL of the sub arrays arranged on its left and right sides. For the
two sub arrays sharing the FX0B, therefore, the four sub word
selecting lines are shared and fed to the sub word drivers as many
as 128.times.2=256. In other words, noting the sub word selecting
line FX0B, for the two sub arrays, the select signal has to be fed
to the sub word drivers SWD as many as 256.div.4=64.
44. If the first sub word selecting line FX0B is extended in
parallel with the main word line MWL, there is provided a second
sub word selecting line FX0 which is provided in the lefthand upper
cross area, to feed the select signal to the sixty four sub word
drivers arrayed on the upper and lower sides through the sub word
selecting line driver FXD for receiving the select signal from the
first sub word selecting line FX0B. This first sub word selecting
line FX0B is extended in parallel with the main word lines MWL and
the sub word lines SWL, whereas the second sub word selecting line
is extended over the sub word driver region in parallel with the
column selecting lines YS and the complementary bit lines BL
perpendicular to the first sub word selecting line FX0B. Like the
eight first sub word selecting lines FX0B to FX7B, the second sub
word selecting lines FX0 to FX7 are divided into even ones FX0, 2,
4 and 6 and odd ones FX1, 3, 5 and 7 and are separately arranged in
the sub word drivers SWD disposed on the left and right sides of
the sub array SBARY.
45. The sub word selecting line drivers FXD are separately arranged
by two above and below one cross area, as indicated by solid
squares in FIG. 2. In the lefthand upper cross area, more
specifically: the sub word selecting line driver arranged on the
lower side corresponds to the first sub word selecting line FX0B;
the two sub word selecting line drivers FXD disposed in the
lefthand intermediate cross area correspond to the first sub word
selecting line FX2B and FX4B; and the sub word selecting line
driver arranged on the upper side of the lefthand lower cross area
corresponds to the first sub word selecting line FX6B.
46. In the center upper cross area: the sub word selecting line
driver arranged on the lower side corresponds to the first sub word
selecting line FX1B; the two sub word selecting line drivers FXD
disposed in the center intermediate cross area correspond to the
first sub word selecting line FX3B and FX5B; and the sub word
selecting line driver arranged on the upper side of the center
lower cross area corresponds to the first sub word selecting line
FX7B. In the righthand upper cross area, moreover, the sub word
selecting line driver arranged on the lower side corresponds to the
first sub word selecting line FX0B; the two sub word selecting line
drivers FXD disposed in the righthand intermediate cross area
correspond to the first sub word selecting line FX2B and FX4B; and
the sub word selecting line driver arranged on the upper side of
the righthand lower cross area corresponds to the first sub word
selecting line FX6B. In the sub word drivers thus disposed at the
end portions of the memory array, no sub array is present on their
right side so that the sub word lines SWL on the left side are
exclusively driven.
47. With the construction of this embodiment in which the sub word
selecting lines FXB are arranged between the gaps of the pitches of
the main word lines MWL over the sub arrays, no special wiring
channel can be demanded so that the memory chip is not enlarged
even if the eight sub word selecting lines are arranged for each
sub array. With the sub word selecting line driver FXD being
formed, however, the cross areas are enlarged to obstruct the
higher integration. In these cross areas, more specifically, there
is no areal margin for forming peripheral circuits such as a switch
circuit IOSW provided to correspond to main input/output lines MIO
or local input/output lines LIO, as indicated by dotted lines in
FIG. 2, power MOSFETs for driving the sense amplifiers, drivers for
driving the shared switch MOSFETs, or drivers for driving the
precharge MOSFETs. In an embodiment of FIG. 3, therefore, the two
upper/lower sub arrays share the sub word selecting line driver FXD
to prevent the areal increase.
48. Of the cross areas, the one arranged in an extending direction
A of the second even sub word selecting lines FX0 to FX6 is
provided with: an N channel power MOSFET Q15 for feeding an
internal constant voltage VDL to the sense amplifiers (and an
N-channel power MOSFET Q16 for feeding a power voltage VDD for an
overdrive), as will be described hereinafter; and an N-channel
power MOSFET Q14 for feeding an earth potential VSS of the circuit
to the sense amplifiers.
49. Of the cross areas, the one arranged in the extending direction
B of the second odd sub word selecting lines FX1 to FX7 is provided
with: an inverter circuit for turning OFF a MOSFET for precharging
and equalizing the bit lines; and an N-channel power MOSFET for
feeding the earth potential VSS of the circuit to the sense
amplifiers, although not especially limitative thereto. This
N-channel power MOSFET feeds the earth potential to a common source
line (CSN) of MOSFETs for amplifying the N-channel MOSFET, as
constructing the sense amplifiers from the two sides of the sense
amplifier array. To the 128 or 130 sense amplifiers belonging to
the sense amplifier area, more specifically, there is fed the earth
potential from both the N-channel power MOSFETs disposed in the
A-side cross area and the N-Channel power MOSFETs disposed in the
B-side cross area.
50. As described above, the sub word line driver SWD selects the
sub word lines of the sub arrays on its two left and right sides.
On the other hand, the two left and right sense amplifiers are
activated to correspond to the sub word lines of the two sub arrays
selected. When the sub word lines are brought into the selected
state, more specifically, the address selecting MOSFETs are turned
ON so that the charge of the storage capacitor is synthesized with
the bit line charge. It is, therefore, necessary to perform the
reloading operation to activate the sense amplifiers to restore the
initial charge state. Excepting those corresponding to the sub
arrays at the end portions, therefore, the power MOSFETs are used
to activate the sense amplifiers on their two sides. In the sub
word line driver SWD disposed on the right or left side of the sub
arrays at the ends of their group, on the contrary, only the sub
word lines of the sub arrays are selected so that the power MOSFETs
activate only the sense amplifier group on one side corresponding
to the sub arrays.
51. The sense amplifiers are made to have the shared sense
construction. In the sub arrays arranged on the two sides across
the sense amplifiers, these sense amplifiers perform the reloading
operation to amplify the read signals of the complementary bit
lines corresponding to the selected sub word lines by turning OFF
to isolate the shared switch MOSFETs corresponding to the
complementary bit lines on the side of the non-selected sub word
lines, and to return the storage capacitors of the memory cells to
the initial charge state. In this case of the embodiment, the
shared switch MOSFETs of the complementary bit lines corresponding
to the selected sub word lines are lowered to an intermediate
potential in response to the amplifying operations of the sense
amplifiers and are returned again to the select level after the
read signals from the memory cells were amplified and transmitted
to the input/output lines through column select circuits.
52. FIG. 3 shows a circuit diagram of one simplified embodiment of
the dynamic RAM according to the invention around the sense
amplifier portion thereof from the address input to the data
output. In FIG. 3, the sense amplifier 16, as vertically sandwiched
between the two sub arrays 15, and the circuit of the cross area 18
are exemplified, but the others are shown in block forms. On the
other hand, the circuit blocks indicated by dotted lines are
individually designated by the reference characters.
53. One of the dynamic memory cells, as interposed between the sub
word line SWL for said one sub array 15 and one BLT of
complementary bit lines BLT and BLB, is exemplified as a
representative. The dynamic memory cell is constructed to include
an address selecting MOSFET Qm and a storage capacitor Cs. Here,
the letter T of the bit line BLT indicates the true side on which
the high level corresponds to the logic 1, and the letter B of the
bit line BLB indicates the bar side on which the low level
corresponds to the logic 1.
54. The address selecting MOSFET Qm has a gate connected with the
sub word line SWL, a drain connected with the bit line BL, and a
source connected with the storage capacitor Cs. The other
electrodes of the storage capacitors Cs are commonly fed with a
plate voltage VPLT. A negative back bias voltage VBB is applied to
the substrate (or channel) of the MOSFET Qm. The select level of
the sub word line SWL is set to a high voltage VPP which is raised
by a threshold voltage of the address selecting MOSFET Qm from the
high level of the bit lines.
55. When the sense amplifier is operated with the internal dropped
voltage VDL, the high level to be amplified by the sense amplifier
and fed to the bit line is set to the level of the internal voltage
VDL. Therefore, the high voltage VPP corresponding to the select
level of the word lines is VDL+Vth+.alpha.. The paired
complementary bit lines BLT and BLB of the sub array disposed on
the left side of the sense amplifier are arranged in parallel, as
shown in FIG. 3, and are suitably intersected, if necessary, so as
to balance the capacities of the bit lines. These complementary bit
lines BLT and BLB are connected with the input/output nodes of the
unit circuit of the sense amplifier through shared switch MOSFETs
Q1 and Q2.
56. The unit circuit of the sense amplifier is constructed to
include: N-channel amplify MOSFETs Q5 and Q6 and P-channel amplify
MOSFETs Q7 and Q8 having gates and drains cross-connected into a
latch shape. The sources of the N-channel MOSFETs Q5 and Q6 are
connected with the common source CSN. The sources of the P-channel
MOSFETs Q7 and Q8 are connected with a common source line CSP. The
power switch MOSFETS are individually connected with the common
source lines CSN and CSP. Although not especially limitative, the
common source line CSN, with which the sources of the N-channel
amplify MOSFETs Q5 and Q6 are connected, is fed with an operating
voltage corresponding to the earth potential by the N-channel power
switch MOSFET Q14 disposed in the cross area 18. The common source
line CSP connected with the sources of the P-channel amplify
MOSFETs Q7 and Q8 is provided with the Nchannel power MOSFET Q15
disposed in the cross area 18 for feeding the internal voltage
VDL.
57. Sense amplifier activation signals SAN and SAP1 to be fed to
the gates of the N-channel power MOSFETS Q14 and Q15 are signals in
phase, and the select level of the signal SAN is set to a
relatively low potential such as the VDL whereas the signal SAP1
uses the power voltage VDD (or the boosted voltage VPP
corresponding to the select level of the word lines, if necessary)
for outputting the operating voltage, e.g., VDL from the MOSFET
Q15.
58. A sense node or the input/output node of the unit circuit of
the sense amplifier is provided with a precharge circuit, which is
constructed to include an equalize MOSFET Q11 for shorting the
complementary bit lines, and switch MOSFETs Q9 and Q10 for feeding
a half precharge voltage VBLR to the complementary bit lines. The
gates of these MOSFETs Q9 to Q11 are commonly fed with a precharge
signal PCB. The driver circuit for generating the precharge signal
PCB is provided in the cross area with an inverter circuit,
although not shown, for raising the falling speed thereof. At the
starting time of the memory access, more specifically, prior to the
word line selecting timing, the MOSFETs Q9 to Q11 constructing the
precharge circuit are quickly switched through the inverter
circuits which are dispersedly disposed in the individual cross
areas.
59. In addition to the circuits shown in FIG. 3, there are
provided, if necessary, in the cross area 18 a half precharge
circuit for setting the common source lines CSP and CSN of the
sense amplifier at an inactive time to a half precharge voltage
(VDL/2), a half precharge circuit for local input/output lines LIOT
and LIOB, a disperse driver circuit for shared select signal lines
SHR and SHL, and so on.
60. The unit circuit of the sense amplifier is connected through
shared switch MOSFETS Q3 and Q4 with the similar complementary bit
lines BLT and BLB of the sub array 15 on the lower side of the
drawing. Switch MOSFETs Q12 and Q13 construct a column switch
circuit, which is turned ON when the select signal YS is set to the
select level (or high level), to the sense nodes or the
input/output nodes of the unit circuit of the sense amplifier with
local input/output lines LIO1T, LIO1B, LIO2T and LIO2B. When the
sub word line SWL of the sub array on the upper side is selected,
for example, the shared switch MOSFETs Q1 and Q2 on the upper side
of the sense amplifier are left ON whereas the shared switch
MOSFETs Q3 and Q4 on the lower side are turned OFF.
61. As a result, the input/output nodes of the sense amplifier are
connected with the upper side complementary bit lines BLT and BLB,
to amplify the minute signal of the memory cell connected with the
selected sub word line SWL thereby to transmit the amplified signal
through the column switch circuit (Q12 and Q13) to the local
input/output lines LIO1T and LIO1B. These local input/output lines
LIO1T and LIO1B are connected through the switch circuit IOSW,
which is disposed in the cross area 18 and composed of N-channel
MOSFETs Q19 and Q20, with main input/output lines MIOT and MIOB
connected with the input terminal of a main amplifier 61. Although
not shown, the speed can be raised higher by using the so-called
"analog gate", in which a P-channel MOSFET is provided in parallel
with the MOSFETs Q19 and Q20. By using the power voltage VDD in
place of a dropped voltage VPERI as the gate voltage of the MOSFETs
Q19 and Q20, on the other hand, the ON resistance can be lowered to
raise the speed. With the main input/output lines MIOT and MIOB, on
the other hand, there are connected the output terminals of a write
amplifier, although not shown.
62. Although not especially limitative, in response to one select
signal YS, the column switch circuit connects the two pairs of
complementary bit lines BL and BLB with the two pairs of local
input/outputs lines LIO1T and LIO1B, and LIO2T and LIO2B. In the
sub array selected by the selecting operation of one main word
line, therefore, totally four pairs of complementary bit lines are
selected by the two pairs of column switch circuit, which are
provided to correspond to one pair of sense amplifiers on the two
sides, so that 4 bits can be simultaneously read/written by
selecting one signal YS.
63. An address signal Ai is fed to an address buffer 51. This
address buffer operates in a timing sharing manner to fetch an X
address signal and a Y address signal. The X address signal is fed
to a predecoder 52 so that the select signal of the main word line
MWL is generated through the main row decoder 11 and the main word
driver 12. The address buffer 51 receives the address signal Ai fed
from the external terminal, so that it is operated with the power
voltage VDD fed from the external terminal, and the predecoder is
operated with the dropped voltage VPERI whereas the main word
driver 12 is operated with the boosted voltage VPP. A column
decoder (or driver) 53 generates the column select signal YS in
response to the Y address signal which is fed by the time sharing
operation of the address buffer 51.
64. The main amplifier 61 is operated with the dropped voltage
VPERI so that its signal is outputted from an external terminal
Dout (or DQ) through an output buffer 62, which is operated with
the power voltage VDD fed from the external terminal. A write
signal, as inputted from an external terminal Din (or DQ), is
fetched through an input buffer 63 and is fed to the main
input/output lines MIOT and MIOB through a later-described write
amplifier, which contained in the main amplifier 61, as shown. The
output buffer is provided at its input portion with a level shift
circuit, as will be described in the following, and a logic unit
for outputting the signal having a shifted level, in synchronism
with the timing signal.
65. Although not especially limitative, the power voltage VDD fed
from the external terminal is set to 2.5 V, and both the dropped
voltage VPERI fed to the internal circuit and the operating voltage
VDL of the sense amplifier are set to 1.8 V. In this case, these
voltages are generated, although at the same level, by power
circuits (or voltage step-down circuits) independent of each other,
so that the power noise due to the operations of the peripheral
circuits may not affect the amplifying operation of the sense
amplifier. The boosted voltage VPP to be used for the select signal
and the unselect signal of the word lines (or sub word lines or
main word lines) are set to 3.5 V. The precharge voltage VBLR of
the bit lines is set to 0.9 V equal to VDL/2, and the plate voltage
VPLT is also set to 0.9 V. Moreover, the substrate voltage VBB is
set to -1.0 V.
66. FIG. 4 is a circuit diagram showing one embodiment of the sense
amplifier portion of the dynamic RAM according to the invention.
The circuit of FIG. 4 is basically identical to that shown in FIG.
3. A CMOS latch circuit constructing a unit circuit of the sense
amplifier is constructed to include the N-channel MOSFETs Q5 and Q6
and the P-channel MOSFETS Q7 and Q8, as formed in a latch shape.
The sources of these N-channel MOSFETs Q5 and Q6 and the P-channel
MOSFETs Q7 and Q8 in the latch shape are connected with the common
source lines CSN and CSP which are commonly connected with the
sources of N-channel MOSFETs and P-channel MOSFETs constructing
another not-shown similar sense amplifier, as disposed to
correspond to the same sub array.
67. An operating voltage VSSA is fed to the common source line CSN
through the N-channel MOSFET Q14 for receiving the timing signal
SAN, and the operating voltage VDL is fed to the common source line
CSP through the N-channel MOSFET Q15 for receiving the timing
signal SAP1. In this embodiment, the earth potential VSSA used as
one operating voltage of the sense amplifier is fed with the earth
potential fed from the external terminal by the earth line
separated from that earth potential VSS, so as to receive no
influence of noises from the peripheral circuits or the like. In
short, the earth potential VSSA fed to the sense amplifier is fed
with the earth potential of the circuit directly from the external
terminal through the wiring line which is provided separately from
the peripheral circuits or the input/output circuits.
68. At a pair of input/output nodes (or sense nodes) SAT and SAB of
the latch circuit, there is provided the precharge circuit which is
constructed to include the equalize MOSFET Q12 for shorting those
input/output nodes, and the precharge MOSFETs Q10 and Q11 for
transmitting the half precharge voltage VBLR to the sense nodes SAT
and SAB. On the other hand, the sense nodes SAT and SAB are
connected with the local input/output lines LIOT and LIOB through
the column switch MOSFETs Q12 and Q13 having gates fed with the
column select signal YS. Moreover, the shared switch MOSFETs Q1 and
Q2 are provided between complementary bit lines BLLT and BLLB
disposed on the left side across the sense amplifier portion, and
the shared switch MOSFETs Q3 and Q4 are provided between the
complementary bit lines BLRT and BLRB disposed on the right
side.
69. The control signal SHL is fed to the gates of the shared switch
MOSFETs Q1 and Q2, and the control signal SHR is fed to the gates
of the shared switches Q3 and Q4. At each of the intersections
between the complementary bit lines BLLT and BLLB on the left side
of the sense amplifier portion and the sub word lines SWL1, SWL2
and so on arranged to intersect the former at a right angle, there
is disposed the dynamic memory cell which is constructed to include
the address selecting MOSFET Qm and the storage capacitor Cs, as
described hereinbefore. Likewise, at each of the intersections
between the complementary bit lines BLRT and BLRB on the right side
of the sense amplifier portion and the sub word lines SWL3, SWL4
and so on arranged to intersect the former at a right angle, there
is disposed the dynamic memory cell which is constructed to include
the address selecting MOSFET Qm and the storage capacitor Cs, as
described hereinbefore.
70. FIG. 5 is a circuit diagram showing one embodiment of the main
amplifier shown in the embodiment of FIG. 3. The main amplifier is
constructed to include: a CMOS latch circuit having N-channel
MOSFETs Q21 and Q22 and P-channel MOSFETs Q24 and Q25 in the latch
shape as in the sense amplifier; and an N-channel MOSFET Q23
connected between the commonly connected sources of the N-channel
MOSFETs Q21 and Q22 and the earth potential of the circuit. The
input/output nodes of the CMOS latch circuit are connected with the
main input/output lines MIOT and MIOB, as described hereinbefore.
The commonly connected sources of the P-channel MOSFETs Q24 and Q25
in the latch shape are fed with the operating voltage VPERI. This
voltage VPERI is set at the same voltage as the operating voltage
VDL of the sense amplifier.
71. Although not especially limitative, the main input/output lines
MIOT and MIOB are precharged together with the local input/output
lines LIOT and LIOB to VPERI (VDL) by the not-shown precharge
circuit disposed on those local input/output LIOT and LIOB. On the
output signals read out to the local input/output lines LIOT and
LIOB and the main input/output lines MIOT and MIOB by the
amplifying operations of the sense amplifier, therefore, one of the
main input/output lines MIOT and MIOB changes from the precharge
potential (VPERI=VDL) to a voltage dropped to the low level side,
and the MOSFET Q23 is turned ON with the timing signal MAE so that
the potential difference is amplified by the N-channel MOSFETs Q21
and Q22 in the latch shape.
72. FIG. 6 is a circuit diagram showing one embodiment of the
output buffer of the dynamic RAM according to the invention. In
FIG. 6, there is also shown a circuit block which shows the entire
operations of the dynamic RAM. Specifically, the decoder is
operated with the dropped voltage VPERI to generate a decoded
signal having a corresponding signal amplitude. The main word
driver is operated with the boosted voltage VPP. The memory array
outputs the read signal having a signal amplitude corresponding to
the operating voltage VDL of the sense amplifier, as described
hereinbefore. The main amplifier is operated with the dropped
voltage VPERI to generate a corresponding read signal MOB. Here,
the letter B of the MOB indicates that the logic "1" is at the low
level whereas the logic "0" is at the light level, and the inverted
signal is designated by the MOT.
73. In the output buffer, the output signal MOB of the main
amplifier converts (or amplifies) the signal level corresponding to
the dropped voltage VPERI to a voltage level corresponding to the
external power voltage VDD by a level shift circuit LS. This
amplified signal MOTH is fed to one input of a NAND gate circuit
G1. On the other hand, the signal MOTH is inverted by an inverter
circuit N1 and fed to one input of a NAND gate circuit G2. The
other inputs of these NAND gate circuits G1 and G2 are fed with a
data output timing signal DOC at a signal level corresponding to
the power voltage VDD. Output MOSFETs QP and QN have large gate
capacities because they are formed to have relatively large sizes
for achieving high load driving abilities. In order to drive those
output MOSFETS QP and QN at a high speed, the output signals of the
gate circuits G1 and G2 are sequentially transmitted through
inverter circuits N2 to N4.
74. The power voltage VDD to be fed to the source of the P-channel
output MOSFET QP of the output buffer is fed through an independent
power terminal VDDQ and the power line with the operation voltage
so that the P channel output MOSFET QP may flow a relatively high
operating current. Likewise, the earth potential to be fed to the
source of the P-channel output MOSFET QN is fed through an
independent earth terminal VSSQ and the power line. The P-channel
output MOSFET QP can be replaced by an N-channel output MOSFET. In
order to achieve the output level up to the power voltage VDD,
however, a boosted voltage may be fed to the gate. This boosted
voltage may utilize the boosted voltage VPP of the word line or the
like but is generally generated by a bootstrap circuit.
75. FIG. 7 is a timing chart for explaining one example of the
reading operation of the dynamic RAM according to the invention.
The shared select signals SHR and SHL are set for the precharge
period to the select level such as the boosted voltage VPP. By the
precharge circuit disposed at the sense node of the sense
amplifier, therefore, the complementary bit lines BLLT and BLLB and
so on, as disposed on the left and right sides of the precharge
circuit, are set to a half precharge voltage VBLR (=VDL/2).
76. Before the sub word line SWL1 is selected, the shared select
signal SHR corresponding to the sub array on the unselected side is
set to an unselect level such as the earth potential VSS of the
circuit. Therefore, the sense amplifier is isolated from the
complementary bit line on the right side so that a minute voltage
difference corresponding to the stored charge of the selected
memory cell is generated on the complementary bit lines BLLT and
BLLB on the left side by the selecting operations of the sub word
line SWL1.
77. Before the minute voltage is generated so that the sense
amplifier starts its amplifying operation, the shared select signal
SHL is dropped to an intermediate voltage such as the dropped
voltage VDL. Then, the sense amplifier activation signals SAN and
SAP1 are raised to the high level to start the amplifying operation
of the sense amplifier. Specifically, the power switch MOSFET Q14
is turned ON with the sense amplifier activation signal SAN to drop
the common source line CSN of the sense amplifier from the half
precharge voltage to a potential such as the earth potential VSSA
of the circuit, and the power switch MOSFET Q15 is turned ON with
the sense amplifier activation signal SAP1 to raise the common
source line CSP of the sense amplifier from the half precharge
voltage to the operating voltage VDL.
78. In this amplifying operation, as shown in the enlarged diagram,
the potential of the shared select signal SHL on the selected side
drops to a low potential such as VDL, and the switch MOSFETs Q1 and
Q2 connect the bit lines BLLT and BLLB with a relatively large ON
resistance because the potential between the sense nodes SAT and
SAB is as small as a about 0.9 V. Therefore, a high parasitic
capacity of the bit lines BLLT and BLLB is not directly connected
with the sense nodes SAT and SAB so that the sense nodes SAT and
SAB are quickly extended in a manner to correspond to the minute
potential difference by the amplification start of the sense
amplifier.
79. Specifically, the sense node SAT corresponding to the read
signal at the high level quickly rises to the VDL because the
switch MOSFET Q1 is OFF. In the sense node SAB corresponding to the
read signal at the low level, on the other hand, the potential
between the gate and the source of the switch MOSFET Q2 is extended
in response to the drop of the potential to strengthen the coupling
to the bit line BLLB thereby to drop the potential of the bit line
BLLB.
80. At the time of starting the amplification of the sense
amplifier, more specifically, the switch MOSFET Q1 is turned OFF,
and the switch MOSFET Q2 is turned ON with a large resistance, to
make coarse the coupling between the sense node and the bit lines
BLLT and BLLB. As a result, the minute potential difference is
quickly enlarged by the amplifying operation of the sense
amplifier, and the switch MOSFET Q2 on the low level side densifies
the coupling to the bit line BLLB in a manner to correspond to the
extension of the amplification voltage thereby to promote the drop
of the potential of the bit line BLLB. In other words, the switch
MOSFET Q2 at this time functions as the so-called "linear
amplification MOSFET Q2" having a grounded gate and a source input
thereby to drop the potential of the bit line BLB.
81. The sense amplifier performs high-speed operations utilizing
the positive feedback loop with the minute voltage to be
transmitted to the sense nodes SAT and SAB. If noises rise at the
amplification starting time to invert the potential difference with
respect to the read level, therefore, an erroneous reading
operation is caused, that is, the amplified output is reloaded in
the memory cells to cause an erroneous storing operation. At the
amplification starting time of the sense amplifier, therefore, the
coupling to the bit lines is coarse because the gate-source voltage
is in the vicinity of a threshold voltage, even if the shared
switch MOSFETs Q1 and Q2 are ON. Therefore, the minute potential
difference is quickly enlarged while preventing the influences of
noises from the bit line side. In response to this enlargement, the
switch MOSFET Q1 on the high level side is turned OFF, and the ON
resistance of the switch MOSFET Q2 is gradually reduced in response
to the enlargement of the amplification signal to the low level
side, so that the potential is lowered by densifying the coupling
to the bit lines when the amplifying operation is performed quickly
and stably.
82. Thus, the sense node SAB is given a substantially high signal
charge by the connection with the bit line BLLB having a relatively
high parasitic capacity through the switch MOSFET Q2. When the
sense node SAB is connected with the local bit line in response to
the column select signal YS, therefore, the signal amount to be
read out by the charge share with the local bit line can be
increased to effect a fast reading.
83. FIG. 8 is a timing chart for explaining the reading operation
of the dynamic RAM according to the invention. This timing chart is
intended to explain the superiority of the reading operation at the
intermediate potential in the invention, by comparing the reading
operation of the prior art, in which the shared switch MOSFET on
the selected side is completely turned OFF.
84. When the sense amplifier is activated by setting the shared
select signal SHL to the low level such as the earth potential VSSA
of the circuit, as shown in FIG. 8, the potentials of the sense
nodes SAT and SAB abruptly enlarge their minute reading potential
difference. When the shared select signal SHL is returned to the
select level, however, the sense nodes SAT and SAB are shifted to
the bit line potential side by the charge share between the bit
lines BLT and BLB having the relatively high parasitic capacity so
that their potential difference becomes as small as V2. When the
column select signal YS is set to the high level at this timing and
connected with the local input/output lines for the reading
operation, the signal amount to be transmitted through the local
input/output lines to the main input/output lines MIOT and MIOB is
delayed to reach a voltage V3 necessary for the amplifying
operation of the main amplifier connected therewith. Therefore, the
column select signal YS is set at the select level till the voltage
V3 is achieved, so that it has to keep the connection between the
sense nodes and the local input/output lines.
85. On the contrary, when the shared select signal SHL on the
selected side is dropped to the intermediate potential VDL, as
indicated by dotted lines, as in the invention, the potential of
the bit line BLB has been dropped even if the shared select signal
SHL is returned to the select level, because the amplified output
on the low level side is transmitted to the bit line BLB for the
amplification period of the sense amplifier. As a result, the
potential difference between the sense nodes SAT and SAB is so
enlarged as is indicated by V1. When the column select signal YS is
raised to the high level to effect the reading operation with the
connection being made with the local input/output lines, therefore,
the signal amount to be transmitted through the local input/output
lines to the main input/output lines MIOT and MIOB can be
increased, as indicated by dotted lines in FIG. 8, so that the time
period to reach the voltage V3 necessary for the amplifying
operation of the main amplifier connected therewith can be
shortened. In accordance with this, an activation signal MAE of the
main amplifier can be timed earlier, and the select period of the
column select signal YS can be shortened.
86. The intermediate voltage should not be limited to the operating
voltage VDL of the sense amplifier. This intermediate potential may
be ideally within VT2<Intermediate Potential<VT1, if the
threshold voltages of the MOSFETs Q1 and Q2 are designated by VT1
and VT2. Even with another range of VT1, VT2<Intermediate
Potential, however, there arises no problem so long as the ON
resistance is so high as to exert no substantial influence upon the
start of amplification of the sense amplifier.
87. The threshold voltages VT1 and VT2 are expressed by the
following formulas (1) and (2):
VT1=VT10+K{square root}.vertline.VBB-VSAT.vertline.+2.PHI.F-{square
root}2.PHI.F (1);
88. and
VT2=VT20+K{square root}.vertline.VBB-VSAB.vertline.+2.PHI.F-{square
root}2F (2).
89. Here: VT10 a threshold voltage for VBB-VSAT=0; VT20 a threshold
voltage for VBB-VSAB=0; K a substrate effect constant; VSAT a
voltage value of the sense node SAT; VSAB a voltage value of the
sense node SAB; VBB a substrate voltage; and .PHI.F a
Felmi-level.
90. FIG. 9 is a timing chart for explaining another example of the
reading operation of the dynamic RAM according to the invention. In
this embodiment, when the shared select signal SHL on the selected
side is set to the intermediate potential VDL and then returned to
the select level such as the voltage VPP, the rising time tr is
delayed to tr1. As a result, the coupling between the bit line BTL
and the sense node SAT on the high level side is made gentle to
reduce the drop of the bit line BLT. As a result, the potential
difference between the sense nodes SAT and SAB can be enlarged from
V1 to V5. This makes it possible to read out the sense output at a
high speed to the data input/output lines.
91. FIG. 10 is a circuit diagram showing one embodiment of the
timing generation circuit for generating the shared select signal.
Three timing signals .O slashed.A, .O slashed.B and .O slashed.C
are generated by an SH select logic block. For example, the timing
signals .O slashed.B and .O slashed.C are generated on the selected
side, whereas the timing signals .O slashed.A and .O slashed.C are
generated on the unselected side. On the selected side, more
specifically, the timing signals .O slashed.C, .O slashed.B and .O
slashed.C are generated to turn ON output MOSFETs Q27, Q26 and Q27
correspondingly, so that the SHL (SHR) potential is set to a binary
voltage of VPP-VDL-VPP. On the unselected side, the timing signals
.O slashed.C, .O slashed.A and .O slashed.C are generated to turn
ON output MOSFETs Q27, Q28 and Q27 correspondingly, so that the SHL
(SHR) potential is set to a binary voltage of VPP-VSS-VPP.
92. When the select level is set at the VPP level, as described
above, the select level of the timing signal .O slashed.C is set to
the boosted voltage of VPP+VT27 for the MOSFET Q27 made of an
N-channel MOSFET. For the MOSFET Q27 made of a P-channel MOSFET,
the timing signal .O slashed.C has the unselect level of the VPP
and the select level of the VSS.
93. When the rise from the intermediate voltage VDL to the select
level VPP is to be delayed, as shown in FIG. 9, the MOSFET Q27 may
be made of two MOSFETs connected in parallel to turn ON the two
MOSFETs simultaneously for the rise from the VSS to the VPP and one
of them for the rise from the VDL to the VPP. Alternatively, the
rise of the timing signal .O slashed.C may be delayed. By thus
changing the size of the MOSFETs and the gate input voltage, it is
possible to make the selective signal level changes.
94. FIG. 11 is a timing chart for explaining another example of the
reading operation of the dynamic RAM according to the invention. In
this embodiment, the sense amplifier is overdriven. Specifically,
the voltage VDD higher than the operating voltage VDL is fed to the
common source line CSP of the P-channel MOSFETs of the sense
amplifier to steepen its rise thereby to quicken the rise of the
sense output on the high level side. For this, a timing signal SAP2
is added as the timing signal for driving the common source line
CSP. This timing signal SAP2 is temporarily raised to a high
voltage such as the VPP level simultaneously with the timing signal
SAN thereby to make the common source line CSP temporarily higher
than the VDL. In response to the change of this timing signal SAP2
to the unselect level, the timing signal SAP1 is generated with a
delay to feed the common source line CSP with the operating voltage
VDL.
95. By this overdrive of the sense amplifier, the voltage
difference between the sense nodes SAT and SAB can be increased as
large as V4. As a result, the drop of the sense node SAT when the
shared select signal SHL is returned from the intermediate voltage
VDL to the select voltage VPP can be compensated by the overdrive
voltage, thereby to quicken the reading operation to the data
input/output lines by the column select signal YS.
96. FIG. 12 is a circuit diagram showing one embodiment of the
sense amplifier having the overdrive function. To the common source
line CSP which is connected with the sources of the P-channel
MOSFETs Q7 and Q8 of the sense amplifier, there is added not only
the power switch MOSFET Q15 but also the N-channel MOSFET Q16
constructing the overdrive portion. This MOSFET Q16 operates to
feed the power voltage VDD to the common source line CSP in
response to the timing signal SAP2. In order to output the power
voltage VDD from the source of the MOSFET Q16, the select level of
the timing signal SAP2 to be fed to the gate is set to a voltage as
high as the boosted voltage VPP.
97. In order to lighten the dependency of the sense amplifier
operating speed upon the power voltage VDD, the boosted voltage VPP
may be applied, as the overdrive voltage, in place of the power
voltage VDD, as fed from the external terminal, to the gate, and
the drain may be connected with the power voltage VDD so that the
voltage slightly dropped from the power voltage VDD may be used
from the source. By adding such overdrive portion, in response to
the timing signal SAP2, the potential of the common source line CSP
or the operating voltage of the sense amplifier can be temporarily
raised to a voltage as high as the VDD.
98. FIG. 13 is a schematic element layout diagram showing one
embodiment of the sense amplifier portion to be used in the dynamic
RAM according to the invention. In this embodiment, the power
switch MOSFETs Q14 and Q15 for driving the sense amplifier are
dispersed and arranged along the sense amplifier array. In other
words, the power switch MOSFETs Q14 and Q15 are not arranged
together to have a large size in the cross area, as described
hereinbefore, but are dispersed in the sense amplifier array to
have a small element size.
99. In this embodiment, although not especially limitative thereto,
the two MOSFETs Q14 and Q15 are arranged to correspond to the
sixteen unit circuits. A specific description will be made by
taking up the unit circuit on the left hand as an example. There
are arranged consecutively from the upper side: the shared switch
MOSFETs Q1 and Q2; the MOSFETs Q10 to Q12 constructing the
precharge circuit; the switch MOSFETs Q12 and Q13 constructing the
column select circuit; the P-channel amplify MOSFETs Q7 and Q8
constructing the CMOS latch circuit; the N-channel amplify MOSFETs
Q5 and Q6 constructing the CMOS latch circuit across the region
forming the power switch MOSFETs Q14 and Q15; and the shared switch
MOSFETs Q3 and Q4.
100. In order to elongate the gate along the sense amplifier array,
the power switch MOSFETs Q14 and Q15 are provided to have a larger
channel width than that of the shared switch MOSFETs, that is, to
have a larger element size thereby to allow a larger current to
flow therethrough. In this case the MOSFET Q14 for driving the
common source line CSN of the N-channel MOSFETs is fed at its gate
with a relatively low potential such as the VDL so that it is made
to have a larger size than that of the MOSFET Q15 having a gate fed
with the power voltage VDD or the boosted voltage VPP. When the
power switch MOSFETs for driving the sense amplifier are thus
dispersed and arranged, the distance between the sense nodes and
the power switch MOSFETs can be shortened to equalize the operation
timings of the plurality of sense amplifiers provided in the sub
array and to utilize the cross area effectively for another
circuit.
101. FIG. 14 is a timing chart for explaining another example of
the reading operation of the dynamic RAM according to the
invention. In this embodiment, the timing chart is shown to
correspond to the example in which the shared switch MOSFETs are
made of P-channel MOSFETs. When the shared switch MOSFETs are made
of the P-channel MOSFETs, the select level is set to the earth
potential, e.g., VSSA of the circuit, and the unselect level is set
to a voltage such as the dropped voltage VDL corresponding to the
high level of the bit lines.
102. Therefore, the shared select signal SHL to be fed to the
shared switch MOSFETs on the selected side is set to the potential
which corresponds to the half precharge voltage VBLR such as VDL/2
after the sub word line SWL was selected so that the read voltage
difference appeared at the sense nodes SAT and SAB of the sense
amplifier. When the potential difference between the sense nodes
SAT and SAB is enlarged by the amplifying operation of the sense
amplifier, the potential on the bit line BLLT on the high level
side is raised by the switch MOSFET Q1 which is made to have a
relatively low gate potential and which is connected with the bit
line BLT on the high level side, thereby to enlarge the potential
difference between the sense nodes SAT and SAB.
103. When these P-channel MOSFETs are used as the shared select
MOSFETs to increase the signal amount on their high level side, it
is desirable to set the precharge potential of the date
input/output lines to the earth potential side and to cause the
CMOS latch circuit constructing the main amplifier to perform the
amplifying operation by the P-channel MOSFETs. When the main
amplifier of FIG. 5 is used, more specifically, the operating
voltage such as the VDL is fed to the source sides of the P-channel
MOSFETs Q24 and Q25 by the P-channel MOSFETS, and the earth
potential of the circuit is fed to the sources of the N-channel
MOSFETs Q21 and Q22. As a result, the main amplifier can be
operated in an excellent sensible region in response to the output
signal from the sense amplifier.
104. FIG. 15 is a circuit diagram showing the sense amplifier
portion of another embodiment of the dynamic RAM according to the
invention. This embodiment is exemplified by providing a pair of
complementary bit lines in a manner to correspond to the sense
amplifier. When the paired complementary bit lines BLT and BLB are
thus assigned to the sense amplifier, too, a bit line cutting
MOSFETs Q1' and Q2' are interposed between the bit lines and the
sense nodes SAT and SAB of the sense amplifier. Moreover, a control
signal BC to be fed to the gates of those MOSFETs Q1' and Q2' is
changed, unlike the control of the ternary levels in the foregoing
Japanese Patent Laid-Open No. 4-167293, with the binary voltage
between a select level such as the VPP and an intermediate
potential such as the VDL.
105. Even when these bit line cutting MOSFETs are provided, the
sense output can be quickly read out to data input/output lines IOT
and IOB by controlling the control signal BC not at the ternary
level, as in the foregoing Laid-Open, but at the binary level, as
has been described above. These data input/output lines IOT and IOB
correspond, when the memory array is divided into the sub arrays,
as described above, to the local input/output lines and are
connected by the selector circuit to the main input/output lines
provided with the main amplifier.
106. FIG. 16 is a waveform diagram for explaining the operations
when the invention is applied to a synchronous DRAM. FIG. 16
exemplifies the case of the burst length BL=2 and a CAS latency
CL=2. These BL=2 and CL=2 are set in the mode register. For BL=2,
two column switches are read/written for two consecutive cycles,
and for CL=2, the output data are outputted from the output
terminal DQ two cycles after the read command.
107. In response to a bank active command, an address signal of the
row system is fetched from the address input terminal and decoded
to set the sub word line SWL to the select level such as the VPP.
As a result, minute read signals appear on the complementary bit
lines BLT and BLB. Since the sense amplifier is activated with the
operation timing signal, the minute read signals of the
complementary bit lines BLT and BLB are amplified to the high level
such as the VDL and to the low level such as the VSS so that the
sub word line SWL is reloaded (or refreshed) in the selected memory
cell. Then, at the start of the operation of the sense amplifier,
the gate voltage of the shared switch MOSFETs on the not-shown
selected side is temporarily set to the intermediate voltage, as
described hereinbefore, and then returned to the select level so
that the refresh is executed.
108. After two cycles of the bank active command, a read command is
inputted so that an address signal of the column system not-shown
is fetched to raise a column select signal YS1. As a result, the
main input/output lines MIOT and MIOB are precharged to the VDL
level just before the column selection, and the necessary read
voltage difference is obtained from the bit line information of the
YS selection and is amplified by the main amplifier, as activated
with the signal MAE, to generate an output signal MO. This output
signal MO of the main amplifier is a low amplitude signal
corresponding to the dropped voltage VPER1, as described
hereinbefore, and is shifted in its level to the VDD level at the
input portion of the output buffer so that it is outputted in
synchronism with the output timing signal DOC. For the BL=2, the
address of the Y system is switched in synchronism with the next
clock CLK of the read command so that the output signal MO of the
main amplifier is generated correspondingly.
109. The access time from the bank active command to the decision
of the first output signal DQ is tRACeq; the access time from the
read command to the decision of the output signal DQ is tAAeq; and
the access time from the clock signal CLK to the decision of the
output signal DQ is tAC. According to the invention, a necessary
amount of read signal to the main amplifier is quickly achieved at
the time of the Y selecting operation so that the access time tAC
can be shortened. By the control with the high amplitude signal,
moreover, the current to flow to the MOSFETs to be driven thereby
can be increased to reduce the signal delay thereby to make a
contribution to the higher speed. As a result, the period of the
clock signal CLK can be accordingly shortened to raise the speed of
the-synchronous DRAM.
110. The following effects can be obtained from the foregoing
embodiments. That is:
111. (1) Switch MOSFETs are interposed between a sense amplifier
disposed in a dynamic RAM and complementary bit lines: after signal
voltages were read out by the selecting operations of said word
lines from a plurality of dynamic memory cells selected, to the
plurality of pairs of complementary bit lines in, accordance with
their individual storage informations, the switch control signal of
said switch MOSFETs is changed from a select level to the
intermediate potential having: an OFF state or a relatively high ON
resistance for the signal voltage read out to said complementary
bit lines; an ON state with a relatively low resistance for a
potential at which the sense nodes are set to one level by the
amplifying operation of the sense amplifier; and an OFF state at a
potential of the other level; said sense amplifier is fed with an
operating voltage to start the amplifying operation in response to
the change in said switch control signal; an amplification signal
generated by said amplifying operation is transmitted through the
column select circuit to said input/output lines in response to the
column select signal; and said switch control signal is returned to
the select level in response to the selecting operation of said
column select circuit. As a result, there is provided an effect
that the sense amplifying operation of a minute signal can be
performed stably and quickly, to output the amplified signal at a
high speed to the data input/output lines.
112. (2) A precharge circuit for precharging said complementary bit
lines is further provided at said sense nodes; and when said word
lines are in an unselected state, said switch control signal is set
to a select level so that the complementary bit lines are
precharged through said switch MOSFETs by the precharge circuit
disposed at the sense nodes. As a result, the sense amplifying
operations of the minute signal can be performed stably and
quickly, and the amplified signal can be outputted quickly to the
data input/output lines. At the same time, the precharge circuit
can be shared between the sense nodes and the complementary bit
lines thereby to provide an effect that the circuit can be
simplified.
113. (3) The complementary bit lines are arranged on the left and
right of said sense nodes; said switch MOSFETs are used with select
switch MOSFETs of said complementary bit lines arranged on the left
and right; and the switch control signal of the switch MOSFETS, as
corresponding to the unselected complementary bit line, is set to
an unselect level before said word lines are selected. By using
this shared sense construction, the sense amplifying operations of
the minute signal can be performed stably and quickly, and the
amplified signal can be outputted quickly to the data input/output
lines thereby to provide an effect that the circuit can be
simplified.
114. (4) Said switch control signal is returned in a gentle change
from said intermediate potential to the select level in response to
the selecting operation of said column select circuit. As a result,
the signal voltage on the other level side can be enlarged to
provide an effect that the sense amplifying operations of the
minute signal can be performed stably and quickly to output the
amplified signal more quickly to the data input/output lines.
115. (5) The main amplifier including the CMOS latch circuit having
connected input/output terminals is connected with said data
input/output lines; said data input/output lines are precharged to
the other level of a polarity reversed from that of one level of
said sense nodes; and said main amplifier feeds, when it is brought
into the operating state, said CMOS latch circuit with an operating
voltage corresponding to the other potential. As a result, there is
provided an effect that the main amplifier made of the CMOS latch
circuit can be operated in a high sensitivity.
116. (6) Said word lines include a main word line and a plurality
of sub word lines assigned commonly to said main word line; the
gates of the address select MOSFETs of said dynamic memory cells
are connected with said sub word lines; one of said sub word lines
is selected by a sub word driver which receives the signal of said
main word line and the signals of said sub word selecting lines;
said sub word driver generates a select signal of the sub word
lines which are disposed on the left and right sides excepting the
end portions of the memory cell array; and said sense amplifier
senses the amplified signals from the complementary bit lines which
are disposed on the left and right sides excepting the end portions
of the memory cell array. As a result, there is provided an effect
that the dynamic RAM of a large storage capacity can be realized to
stabilize the sense amplifying operation of the minute signal and
to output the amplified signal at a high speed to the data
input/output lines.
117. (7) The operating voltage to be fed to said sense amplifier is
a dropped voltage which is dropped from the power voltage fed from
an external terminal; the select level of said word lines and the
select level of said switch MOSFETs are a boosted voltage which is
boosted from said power voltage; and said intermediate potential
uses the dropped voltage corresponding to the operating voltage of
said sense amplifier. As a result, there is provided an effect that
the sense amplifying operation of the minute signal can be
stabilized and quickened without any addition of a special internal
power circuit, thereby to output the amplified signal to the data
input/output lines at a high speed.
118. Although our invention has been specifically described in
connection with its embodiments, it should not be limited to those
embodiments but can naturally be modified in various manners
without departing from the gist thereof. In the dynamic RAM shown
in FIG. 1 or 2, for example, the construction of the memory array,
the sub array and the sub word driver can take a variety of
modifications, as exemplified by a word shunt construction using no
sub word driver. The power switch MOSFET Q15 for applying the
operating voltage VDL to the sense amplifier may be exemplified by
a P-channel MOSFET.
119. The operating voltage of the sense amplifier may use the power
voltage fed from the external terminal, as it is. The intermediate
voltage of this case may use a half precharge voltage or may
utilize a voltage generated especially therefor. The main amplifier
may utilize a differential amplifier in addition to the one using
the CMOS latch circuit. The invention can be widely utilized in a
semiconductor memory device using the dynamic memory cells, such as
the semiconductor memory device to be packaged over a digital
integrated circuit such as a microcomputer.
120. The effects to be obtained by the representatives of the
invention disclosed herein will be briefly described in the
following. Specifically, switch MOSFETs are interposed between a
sense amplifier disposed in a dynamic RAM and complementary bit
lines: after signal voltages were read out by the selecting
operations of said word lines from a plurality of dynamic memory
cells selected, to the plurality of pairs of complementary bit
lines in accordance with their individual storage informations, the
switch control signal of said switch MOSFETs is changed from a
select level to the intermediate potential having: an OFF state or
a relatively high ON resistance for the signal voltage read out to
said complementary bit lines; an ON state with a relatively low ON
resistance for a potential at which the sense nodes are set to one
level by the amplifying operation of the sense amplifier; and an
OFF state at a potential of the other level; said sense amplifier
is fed with an operating voltage to start the amplifying operation
in response to the change in said switch control signal; an
amplification signal generated by said amplifying operation is
transmitted through the column select circuit to said input/output
lines in response to the column select signal; and said switch
control signal is returned to the select level in response to the
selecting operation of said column select circuit. As a result, the
sense amplifying operation of a minute signal can be performed
stably and quickly, and the amplified signal can be outputted at a
high speed to the data input/output lines.
* * * * *