U.S. patent application number 09/729273 was filed with the patent office on 2001-04-05 for semiconductor integrated circuit device and method of activating the same.
Invention is credited to Aoki, Masakazu, Horiguchi, Masashi, Idei, Youji, Itoh, Kiyoo, Kajigaya, Kazuhiko, Nagashima, Osamu, Noda, Hiromasa, Sakata, Takeshi.
Application Number | 20010000133 09/729273 |
Document ID | / |
Family ID | 18405636 |
Filed Date | 2001-04-05 |
United States Patent
Application |
20010000133 |
Kind Code |
A1 |
Noda, Hiromasa ; et
al. |
April 5, 2001 |
Semiconductor integrated circuit device and method of activating
the same
Abstract
A dynamic RAM is divided into an input circuit block responsive
to an input signal supplied from an external terminal, inclusive of
an operation start signal, an internal circuit block activated in
response to the signal inputted from the input circuit block, and
an output circuit block for outputting a signal outputted from the
internal circuit block to an external terminal. A plurality of
switch MOSFETs are provided in parallel form between a power line
for applying an operating voltage supplied from an external
terminal and an internal power line for a first circuit portion in
the internal circuit block, which does not need a storage operation
upon its non-operating state. Further, the switch MOSFETs are
stepwise turned on in response to controls signals produced by
delaying a start signal supplied through the input circuit block in
turn, so as to perform the supply of each operating voltage.
Inventors: |
Noda, Hiromasa; (Tokyo,
JP) ; Aoki, Masakazu; (Tokorozawa-shi, JP) ;
Idei, Youji; (Asaka-shi, JP) ; Kajigaya,
Kazuhiko; (Iruma-shi, JP) ; Nagashima, Osamu;
(Tokyo, JP) ; Itoh, Kiyoo; (Tokyo, JP) ;
Horiguchi, Masashi; (Kawasaki-shi, JP) ; Sakata,
Takeshi; (Tokyo, JP) |
Correspondence
Address: |
ANTONELLI TERRY STOUT AND KRAUS
SUITE 1800
1300 NORTH SEVENTEENTH STREET
ARLINGTON
VA
22209
|
Family ID: |
18405636 |
Appl. No.: |
09/729273 |
Filed: |
December 5, 2000 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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09729273 |
Dec 5, 2000 |
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09302437 |
Apr 30, 1999 |
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09302437 |
Apr 30, 1999 |
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08985425 |
Dec 5, 1997 |
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5926430 |
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08985425 |
Dec 5, 1997 |
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08762883 |
Dec 12, 1996 |
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5724297 |
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Current U.S.
Class: |
365/226 ;
327/534; 327/538; 365/189.09; 365/191 |
Current CPC
Class: |
G11C 11/4074 20130101;
H03K 19/0016 20130101; G11C 5/14 20130101; G11C 5/147 20130101 |
Class at
Publication: |
365/226 ;
327/534; 327/538; 365/189.09; 365/191 |
International
Class: |
G11C 007/00 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 21, 1995 |
JP |
7-349718 |
Claims
We claim:
1. A semiconductor integrated circuit device comprising: a
plurality of circuit blocks divided every functions and
respectively set so as to perform circuit operations in response to
operation control signals; and a power switch circuit composed of a
plurality of switch MOSFETS, said power switch MOSFETs being
provided in parallel form between a power line for delivering an
operating voltage supplied from an external terminal and internal
power lines provided for said respective circuit blocks and being
stepwise turned on in response to control signals produced by
successively delaying the operation control signals.
2. A semiconductor integrated circuit device comprising: an input
circuit block responsive to an input signal supplied from a first
external terminal, said input signal including an operation start
signal; an internal circuit block activated in response to the
input signal inputted through said input circuit block; an output
circuit block for transmitting a signal outputted from said
internal circuit block to an external terminal; and internal power
switch circuits each composed of a plurality switch MOSFETs
provided in parallel form between a power line for applying an
operating voltage supplied from a second external terminal and a
first internal power line for a first circuit portion in said
internal circuit block, which is free of need for a storage
operation upon non-operating state, said switch MOSFETs being
stepwise turned on in response to controls signals produced by
successively delaying a start signal supplied through said input
circuit block.
3. A semiconductor integrated circuit device according to claim 2,
wherein said input circuit block, a second circuit portion of said
internal circuit block, which needs a storage operation, and said
output circuit block are respectively regularly supplied with the
operating voltage from the power line.
4. A semiconductor integrated circuit device according to claim 3,
wherein said internal circuit block is composed of CMOS circuits,
said each CMOS circuit having a first circuit portion which
includes a circuit whose output signal is low in level when said
first circuit portion is placed in a non-operating state, said
circuit being electrically connected to the first internal power
line corresponding to a source voltage, and a circuit whose output
signal is high in level, which is electrically connected to the
second internal power line associated with a ground potential, and
said internal power switch circuits each composed of a plurality of
switch MOSFETs stepwise turned on in response to the control
signals formed by delaying the start signal in turn, are
respectively provided between the first internal power line and the
power line and between the second internal power line and a ground
line.
5. A semiconductor integrated circuit device according to claim 4,
wherein each of P channel MOSFETs and N channel MOSFETs, which
constitute said each CMOS circuit, has a low threshold voltage.
6. A semiconductor integrated circuit device according to claim 5,
said input circuit block and said output circuit block are
respectively composed of CMOS circuits, and threshold voltages of
the P channel MOSFETs and N channel MOSFETs constituting said each
CMOS circuit and threshold voltages of MOSFETs constituting said
each internal power switch circuit are set so as to be higher than
those of the P channel MOSFETs and N channel MOSFETs of said each
CMOS circuit of said internal circuit block.
7. A semiconductor integrated circuit device according to claim 6,
wherein said threshold voltages are respectively set using a MOSPET
dependence on a channel length and counter-doped layers, each of
which is of the conductive type similar to the source and drain of
each MOSFET and contains a low concentration of impurities, are
respectively formed on the surfaces of channel regions.
8. A semiconductor integrated circuit device according to claim 3
or 4, wherein said internal circuit block is divided into a
plurality of blocks according to its operation sequence and said
start signal is delayed in synchronism with the operation sequence
so as to be supplied to said internal power switch circuit.
9. A semiconductor integrated circuit device according to claim 2,
wherein said input circuit block is supplied with an address signal
and a control signal in an address multiplex system, said internal
circuit block comprises a memory array using dynamic memory cells,
an X-system address select circuit thereof, and a Y-system address
select circuit, and said output circuit block is used as a data
input/output circuit.
10. A semiconductor integrated circuit device according to claim 9,
wherein said each internal power switch circuit provided in the
Y-system address select circuit is composed of one or a plurality
of MOSFETs set so as to provide the flow of an operating current
necessary for the operation of said internal power switch circuit,
and a controls signal supplied to the gate of said each MOSFET is
set so that its change becomes gentle.
11. A semiconductor integrated circuit device according to claim 4,
wherein a short-circuit switch MOSFET temporarily turned on when
said internal power switch MOSFETs associated with said each first
internal power line and said each second internal power line are
turned off, is provided between said first internal power line and
said second internal power line.
12. A semiconductor integrated circuit device comprising: a first
voltage line supplied with a first voltage; a second voltage line
supplied with a second voltage higher than the first voltage; a
third voltage line; at least one internal circuit connected to said
first voltage line and said third voltage line and activated in
response to a voltage on said first voltage line and a voltage on
said third voltage line; first MOSFETs having source-to-drain paths
respectively connected between said second voltage line and said
third voltage line; second MOSFETs having source-to-drain paths
respectively connected between said second voltage line and said
third voltage line; and a control circuit for controlling said
first and second MOSFETs so that said first and second MOSFETs are
respectively changed from an off state to an on state with
different timings.
13. A semiconductor integrated circuit device according to claim
12, wherein said first and second MOSFETs are of P channel type
MOSFETs.
14. A semiconductor integrated circuit device according to claim
12, wherein said control circuit further includes a delay
circuit.
15. A semiconductor integrated circuit device according to claim
12, further comprising a memory array having a plurality of memory
cells and wherein said internal circuit includes an address decoder
provided so as to correspond to said memory array.
16. A semiconductor integrated circuit device according to claim
12, wherein said first voltage is a ground voltage, said second
voltage is a source voltage, said first voltage line is a ground
voltage line, said second voltage line is a source voltage line,
and said third voltage line is an line corresponding to the source
voltage.
17. A semiconductor integrated circuit device comprising: a first
main voltage line supplied with a first voltage; a second main
voltage line supplied with a second voltage higher than the first
voltage; a first sub voltage line supplied with a voltage
corresponding to the first voltage; at least one internal circuit
connected to said first sub voltage line and said second main
voltage line and activated based on the first voltage and the
second voltage; first MOSFETs having source-to-drain paths
respectively connected between said first main voltage line and
said first sub voltage line; second MOSFETs having source-to-drain
paths respectively connected between said first main voltage line
and said first sub voltage line; and a first control circuit for
controlling said first and second MOSFETs so that said first and
second MOSFETs are respectively changed from an off state to an on
state with different timings.
18. A semiconductor integrated circuit device according to claim
17, further comprising: a second sub voltage line supplied with a
voltage corresponding to the second voltage; third MOSFETs having
source-to-drain paths respectively connected between said second
main voltage line and said second sub voltage line; fourth MOSFETs
having source-to-drain paths respectively connected between said
main voltage line and said second sub voltage line; and a second
control circuit for controlling said third and fourth MOSFETs so
that said third and fourth MOSFETs are respectively changed from an
off state to an on state with different timings.
19. A semiconductor integrated circuit device according to claim
18, wherein said first voltage is a ground voltage, said second
voltage is a source voltage, said first main voltage line is a
ground voltage line, said second main voltage line is a source
voltage line, said first sub voltage line is an line corresponding
to the ground voltage and said second sub voltage line is an line
corresponding to the source voltage.
20. A semiconductor integrated circuit device comprising; a first
main voltage line supplied with a first voltage; a second main
voltage line supplied with a second voltage higher than the first
voltage; a first sub voltage line supplied with a voltage
corresponding to the second voltage; a first internal circuit
connected to said first sub voltage line and said first main
voltage line and activated based on the first voltage and the
second voltage; a second internal circuit directly connected to
said first main voltage line and said second main voltage line and
activated based on the first voltage and the second voltage; first
MOSFETs having source-to-drain paths respectively connected between
said second main voltage line and said first sub voltage line;
second MOSFETs having source-to-drain paths respectively connected
between said second main voltage line and said first sub voltage
line; and a first control circuit for controlling said first and
second MOSFETs so that said first and second MOSFETs are
respectively changed from an off state to an on state with
different timings.
21. A semiconductor integrated circuit device according to claim
20, further comprising: a memory array having a plurality of memory
cells, and wherein said first internal circuit includes an address
decoder provided so as to correspond to said memory array and said
second internal circuit includes an address input buffer.
22. A semiconductor integrated circuit device according to claim
20, wherein said first voltage is a ground voltage, said second
voltage is a source voltage, said first main voltage line is a
ground voltage line, said second main voltage line is a source
voltage line and said first sub voltage line is an line
corresponding to the source voltage.
23. A semiconductor integrated circuit device comprising; a first
main voltage line supplied with a first voltage; a second main
voltage line supplied with a second voltage different from the
first voltage; a first sub voltage line supplied with a voltage
corresponding to the first voltage; a second sub voltage line
supplied with a voltage corresponding to the first voltage; a first
circuit connected to said first sub voltage line and activated
based on the first and second voltages; a second circuit connected
to said second sub voltage line and activated based on the first
and second voltages; first MOSFETs having source-to-drain paths
respectively connected between said first main voltage line and
said first sub voltage line; second MOSFETs having source-to-drain
paths respectively connected between said first main voltage line
and said first sub voltage line; third MOSFETs having
source-to-drain paths respectively connected between said first
main voltage line and said second sub voltage line; fourth MOSFETs
having source-to-drain paths respectively connected between said
first main voltage line and said second sub voltage line; a first
control circuit for controlling said first and second MOSFETs so
that said each second MOSFET is changed from an off state to an on
state after said each first MOSFET has been changed from an off
state to an on state; and a second control circuit for controlling
said third and fourth MOSFETs so that said each third MOSFET is
changed from an off state to an on state after said each first
MOSFET has been changed from the off state to the on state, and
said each fourth MOSFET is changed from an off state to an off
state after said each third MOSFET has been changed from the off
state to the on state.
24. A semiconductor integrated circuit device according to claim
23, further comprising: a third sub voltage line supplied with a
voltage corresponding to the second voltage and connected to said
first circuit; a fourth sub voltage line supplied with a voltage
corresponding to the second voltage and connected to said second
circuit; fifth MOSFETs having source-to-drain paths respectively
connected between said second main voltage line and said third sub
voltage line; sixth MOSFETs having source-to-drain paths
respectively connected between said second main voltage line and
said third sub voltage line; seventh MOSFETs having source-to-drain
paths respectively connected between said main voltage line and
said fourth sub voltage line; eighth MOSFETs having source-to-drain
paths respectively connected between said second main voltage line
and said fourth sub voltage line; a third control circuit for
controlling said fifth and sixth MOSFETs so that said each sixth
MOSFET is changed from an off state to an on state after said each
fifth MOSFET has been changed from an off state to an on state; and
a fourth control circuit for controlling said seventh and eighth
MOSFETs so that said each seventh MOSFET is changed from an off
state to an on state after said each fifth MOSFET has been changed
from the off state to the on state, and said each eighth MOSFET is
changed from an off state to an off state after said each seventh
MOSFET has been changed from the off state to the on state.
25. A semiconductor integrated circuit device according to claim
24, wherein said first voltage is a ground voltage, said second
voltage is a source voltage, said first main voltage line is a
ground voltage line, said second main voltage line is a source
voltage line, said first sub voltage line is a voltage line
corresponding to the first voltage, said second sub voltage line is
a voltage line corresponding to the first voltage, said third sub
voltage line is a voltage line corresponding to the second voltage,
and said fourth sub voltage line is a voltage line corresponding to
the second voltage.
26. A method of activating a semiconductor integrated circuit
device having a first voltage line supplied with a first voltage, a
second voltage line supplied with a second voltage higher than the
first voltage, a circuit activated in response to the first and
second voltages, a first switch MOSFET disposed between said first
voltage line and said circuit, and a second switch MOSFET disposed
between said second voltage line and said circuit, said method
comprising the steps: a first step for transferring the first
voltage on said first voltage line to said circuit through said
first switch MOSFET; and a second step for transferring the first
voltage on said first voltage line to said circuit through said
second switch MOSFET after execution of said first step. 27. A
method of activating the semiconductor integrated circuit device,
according to claim 26, further comprising a third switch MOSFET
disposed between said second voltage line and said circuit and a
fourth switch MOSFET disposed between said second voltage line and
said circuit, said method comprising the steps: a third step for
transferring the second voltage on said second voltage line to said
circuit through said third switch MOSFET; and a fourth step for
transferring the second voltage on said second voltage line to said
circuit through said fourth switch MOSFET after execution of said
third step.
28. A semiconductor integrated circuit device comprising: a first
voltage line supplied with a first voltage; a second voltage line
supplied with a second voltage higher than the first voltage; a
third voltage line; at least one internal circuit connected to said
first voltage line and said third voltage line and activated in
response to the voltage on said first voltage line and a voltage on
said third voltage line; a first MOSFET having a source-to-drain
path connected between said second voltage line and said third
voltage line; a second MOSFET having a source-to-drain path
connected between said second voltage line and said third voltage
line; and a control circuit for controlling said first MOSFET and
said second MOSFET, and wherein a timing provided to change said
second MOSFET from an off state to an on state falls behind a
timing provided to change said first MOSFET from an off state to an
on state and said control circuit controls said first MOSFET so as
to be kept in an on state when said second MOSFET changes from the
off state to the on state.
29. A semiconductor integrated circuit device according to claim
28, wherein the voltage on said third voltage line is a voltage
higher than the first voltage and lower than the second voltage
when said internal circuit is in a non-operating state.
30. A semiconductor integrated circuit device according to claim
29, wherein said first MOSFET and said second MOSFET are of P
channel MOSFETs.
31. A semiconductor integrated circuit device according to claim
30, wherein said first voltage is a ground voltage and said second
voltage is a source voltage.
32. A semiconductor integrated circuit device according to claim
31, wherein said internal circuit is composed of CMOSs.
33. A semiconductor integrated circuit device comprising: a first
main voltage line supplied with a first voltage; a second main
voltage line supplied with a second voltage different from the
first voltage; a first sub voltage line supplied with a voltage
corresponding to the first voltage; a second sub voltage line
supplied with a voltage corresponding to the first voltage; a first
circuit connected to said first sub voltage line and activated
based on the first voltage and the second voltage; a second circuit
connected to said second sub voltage line and activated based on
the first voltage and the second voltage; first MOSFETs having
source-to-drain paths respectively connected between said first
main voltage line and said first sub voltage line; second MOSFETs
having source-to-drain paths respectively connected between said
first main voltage line and said first sub voltage line; third
MOSFETs having source-to-drain paths respectively connected between
said first main voltage line and said second sub voltage line;
fourth MOSFETs having source-to-drain paths respectively connected
between said first main voltage line and said second sub voltage
line; a first control circuit for controlling said first MOSFET and
said second MOSFET; and a second control circuit for controlling
said third MOSFET and said fourth MOSFET, and wherein a timing
provided to change said second MOSFET from an off state to an on
state falls behind a timing provided to change said first MOSFET
from an off state to an on state and said first control circuit
controls said first MOSFET so as to be kept in an on state when
said second MOSFET changes from the off state to the on state, a
timing provided to change said third MOSFET from an off state to an
on state falls behind the timing provided to change said first
MOSFET from the off state to the on state, said first MOSFET is
kept in the on state when said third MOSFET changes from the off
state to the on state, a timing provided to change said fourth
MOSFET from an off state to an on state falls behind the timing
provided to change said third MOSFET from the off state to the on
state, and said second control circuit controls said third MOSFET
so as to be kept in the on state when said fourth MOSFET changes
from the off state to the on state.
34. A semiconductor integrated circuit device according to claim
33, further comprising: a third sub voltage line connected to said
first circuit; a fourth sub voltage line connected to said second
circuit; fifth MOSFETs having source-to-drain paths respectively
connected between said second main voltage line and said third sub
voltage line; sixth MOSFETs having source-to-drain paths
respectively connected between said second main voltage line and
said third sub voltage line; seventh MOSFETs having source-to-drain
paths respectively connected between said second main voltage line
and said fourth sub voltage line; eighth MOSFETs having
source-to-drain paths respectively connected between said second
main voltage line and said fourth sub voltage line; a third control
circuit for controlling said fifth and sixth MOSFETs; and a fourth
control circuit for controlling said seventh and eighth MOSFETs,
and wherein a timing provided to change said sixth MOSFET from an
off state to an on state falls behind a timing provided to change
said fifth MOSFET from an off state to an on state and said third
control circuit controls said fifth MOSFET so as to be kept in an
on state when said sixth MOSFET changes from the off state to the
on state, a timing provided to change said seventh MOSFET from an
off state to an on state falls behind the timing provided to change
said fifth MOSFET from the off state to the on state, said fifth
MOSFET is kept in the on state when said seventh MOSFET changes
from the off state to the on state, a timing provided to change
said eighth MOSFET from an off state to an on state falls behind
the timing provided to change said seventh MOSFET from the off
state to the on state, and said fourth control circuit controls
said seventh MOSFET so as to be kept in the on state when said
eighth MOSFET changes from the off state to the on state.
35. A semiconductor integrated circuit device according to claim
34, wherein the voltage on said third sub voltage line is a voltage
higher than the first voltage and lower than the second voltage
when said first circuit is in a non-operating state.
36. A semiconductor integrated circuit device according to claim
34, wherein the voltage on said fourth sub voltage line is a
voltage higher than the first voltage and lower than the second
voltage when said second circuit is in a non-operating state.
37. A semiconductor integrated circuit device according to claim
36, wherein said first, second, third and fourth MOSFETs are of N
channel MOSFETs.
38. A semiconductor integrated circuit device according to claim
37, wherein said fifth, sixth, seventh and eighth MOSFETs are of P
channel MOSFETs.
39. A semiconductor integrated circuit device according to claim
38, wherein said first voltage is a ground voltage and said second
voltage is a source voltage.
40. A semiconductor integrated circuit device according to claim
39, wherein said first, second, third and fourth circuits are
respectively composed of CMOSs.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
1. This application is a continuation of application Ser. No.
08/985,425 filed Oct. 5, 1997; which is a continuation of
application Ser. No. 08/762,883 filed Dec. 12, 1996, the entire
disclosures of which are hereby incorporated by reference.
BACKGROUND OF THE INVENTION
2. The present invention relates to a semiconductor integrated
circuit device and a method of operating it, and principally to a
technique effective for use in a digital integrated circuit device
such as a dynamic RAM (Random Access Memory) comprising CMOS
circuits each composed of low threshold-voltage type MOSFETs and in
a method of operating the digital integrated circuit device.
3. MOSFETs are reduced in withstand voltage with their
micronization. It is therefore necessary to reduce an operating
voltage of a circuit composed of the MOSFETs shaped in micro form.
Since a gate voltage supplied to the gate of each MOSFET is also
lowered in this case, it is necessary to reduce the threshold
voltage of the MOSFET so that even the lowered gate voltage
provides the flow of a desired current. However, when the threshold
voltage is reduced, a leakage current (hereinafter called
"subthreshold leakage current"), which flows when each MOSFET is
brought into an off state in which the gate and source thereof are
equal in voltage to each other, increases exponentially. Thus, even
in the case of a CMOS circuit, current consumption at its
deactivation increases.
4. A circuit for reducing the subthreshold leakage current referred
to above has been disclosed in Japanese Patent Application
Laid-Open Nos. 6(1994)-237164 and 8(1996)-83487 and U.S. Pat Nos.
5,274,601 and 5,408,144 by way of illustrative example. As a method
of reducing the leakage current by the present circuit, a CMOS
inverter circuit at the time that an input thereof at its
non-operation and an output thereof have been determined as a high
level and a low level respectively, will be described by way of
example. In this case, a P channel MOSFET of the CMOS inverter
circuit is in an off state and an N channel MOSFET thereof is in an
on state. A leakage current produced in the CMOS inverter circuit
is determined depending on the subthreshold leakage current of the
turned-off P channel MOSFET.
5. A P channel power switch MOSFET is provided between an operating
voltage node connected to the source of the P channel MOSFET of the
CMOS inverter circuit and a power line and is turned off upon the
non-operation. In doing so, the potential at each internal power
line placed in a floating state is reduced by the subthreshold
leakage current. When the potential is reduced to a some extent, a
reverse bias voltage is applied between the gate and source of the
P channel MOSFET of the CMOS circuit so that the subthreshold
leakage current can be substantially eliminated.
SUMMARY OF THE INVENTION
6. The inventors of the present application have discussed the
application of a method of reducing a subthreshold leakage current
to a dynamic RAM. In this case, the present inventors have found
out various problems to be solved without sacrificing the operating
speed of the dynamic RAM and to effectively reduce the subthreshold
leakage current. Namely, an internal power switch MOSFET is turned
off upon standby to reduce the subthreshold leakage current and is
turned on upon memory access. In doing so, a pulse-shaped large
current will flow when a control signal for changing such a MOSFET
from the off state to the on state rises and the power node of the
internal circuit is charged up according to the turning on of the
MOSFET. This pulsating current will increase the value of the peak
current of a semiconductor integrated circuit device. Upon mounting
of a system, the current capacity of a power device must be
increased so as to correspond to the peak value.
7. The increase in the circuit function and circuit scale of the
semiconductor integrated circuit device and the reduction in its
source voltage with the device micronization as described above
tends toward a size reduction of a system such as a portable
electronic device or the like. A battery is also expected to be
inevitably used as a power supply. However, the increase in peak
current offers a large problem as viewed from the power device of
the system, which needs its size reduction. Even in the case of the
semiconductor integrated circuit device, large noise is produced in
the power line with the occurrence of the peak current referred to
above and hence an operating margin thereof is made worse.
8. An object of the present invention is to provide a semiconductor
integrated circuit device capable of realizing less power
consumption while ensuring its operating margin. Another object of
the present invention is to provide a semiconductor integrated
circuit device capable of realizing high integration, a voltage
reduction and less power consumption without sacrificing its
operating speed.
9. The above and other objects, novel features and advantages of
the present invention will become apparent from the following
description and the appended claims of the present specification,
taken in conjunction with the accompanying drawings in which
preferred embodiments of the present invention are shown by way of
illustrative example.
10. A summary of a typical one of the inventions disclosed in the
present application will be described in brief as follows: A
plurality of switch MOSFETs are provided in parallel form between
internal power lines for a plurality of circuit blocks divided for
every functions and respectively set so as to perform circuit
operations in response to operation control signals and a power
line for delivering an operating voltage supplied from an external
terminal. These switch MOSFETs are turned on in domino or stepwise
form in response to control signals produced by successively
delaying the operation control signals, so as to provide the supply
of operating voltages.
11. A summary of another typical one of the inventions disclosed in
the present application will be described in brief as follows: A
dynamic RAM is divided into an input circuit block responsive to an
input signal supplied from an external terminal, inclusive of an
operation start signal, an internal circuit block activated in
response to the signal inputted from the input circuit block, and
an output circuit block for outputting a signal outputted from the
internal circuit block to an external terminal. A plurality of
switch MOSFETs are provided in parallel form between a power line
for applying an operating voltage supplied from an external
terminal and an internal power line for a first circuit portion in
the internal circuit block, which does not need a storage operation
upon its non-operating state. Further, the switch MOSFETs are
turned on in domino or stepwise form in response to control signals
produced by delaying a start signal supplied through the input
circuit block in turn, so as to perform the supply of each
operating voltage.
BRIEF DESCRIPTION OF THE DRAWINGS
12. The invention will now be described with reference to the
accompanying drawings wherein:
13. FIG. 1 is a block diagram principally showing examples of an
input unit, an X-system circuit and an array block employed in a
dynamic RAM to which the present invention is applied;
14. FIG. 2 is a block diagram principally illustrating examples of
a Y-system and write circuit and an output buffer employed in the
dynamic RAM to which the present invention is applied;
15. FIG. 3 is a circuit diagram showing one example of an X-system
address input unit employed in the dynamic RAM to which the present
invention is applied;
16. FIG. 4 is a circuit diagram depicting one example of a
predecoder supplied with an internal address signal, which is
employed in the dynamic RAM to which the present invention is
applied;
17. FIG. 5 is a circuit diagram specifically showing examples of an
X decoder, and a latch circuit and a word driver connected thereto,
which are employed in the dynamic RAM to which the present
invention is applied;
18. FIG. 6 is a circuit diagram illustrating one example of a mat
control circuit employed in the dynamic RAM to which the present
invention is applied;
19. FIG. 7 is a timing chart for describing one example of the
operation of the dynamic RAM to which the present invention is
applied;
20. FIG. 8 is a block diagram showing examples of a memory array
and its peripheral circuits employed in the dynamic RAM to which
the present invention is applied;
21. FIG. 9 is a block diagram depicting examples of an input/output
interface and a timing control circuit employed in the dynamic RAM
to which the present invention is applied;
22. FIG. 10 is a fragmentary circuit diagram showing one example of
a memory array employed in the dynamic RAM according to the present
invention;
23. FIG. 11 is a cross-sectional view showing, as one example, a
device structure for describing the dynamic RAM according to the
present invention;
24. FIG. 12 is a block diagram for describing one embodiment of a
semiconductor integrated circuit device according to the present
invention;
25. FIG. 13 is a block diagram for explaining another embodiment of
the semiconductor integrated circuit device according to the
present invention;
26. FIG. 14 is a circuit diagram showing one example of an X-system
input unit employed in the dynamic RAM according to the present
invention;
27. FIG. 15 is a timing chart for describing one example of the
operation of the X-system input unit shown in FIG. 14;
28. FIGS. 16A and 16B are respectively schematic structural
sectional views showing examples of MOSFETs employed in the
semiconductor integrated circuit device according to the present
invention;
29. FIG. 17 is a characteristic diagram illustrating the
relationship between a gate length of an N channel MOSFET and its
threshold voltage to describe the present invention;
30. FIG. 18 is a characteristic diagram showing the relationship
between a peak current, a delay time of a switch MOSFET start
signal and the like;
31. FIG. 19 is a circuit diagram illustrating another embodiment of
the present invention;
32. FIG. 20 is a timing chart for describing the operation of the
embodiment shown in FIG. 19;
33. FIG. 21 is a system configurational view showing one example of
a one-chip microcomputer to which the present invention is applied;
and
34. FIG. 22 is a circuit diagram illustrating a portion of the
circuit shown in FIG. 14 by MOSFETs.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
35. Preferred embodiments of the present invention will hereinafter
be described with reference to the accompanying drawings.
36. FIGS. 1 and 2 are block diagrams showing one embodiment of a
dynamic RAM to which the present invention is applied. FIG. 1
principally illustrates an input unit, an X-system circuit and an
array block. FIG. 2 shows a Y-system and write circuit and an
output buffer. In the same drawings, signal transfer paths employed
in the present dynamic RAM do not faithfully correspond to signal
transfer paths as described in the normal circuit blocks to provide
easy understanding of the present invention. Further, the same
drawings are mainly plotted from the viewpoint of the supply of an
operating voltage to each circuit block.
37. The dynamic RAM according to the present embodiment is roughly
divided into circuits each placed in a state of being supplied with
a power source at all times from the relationship with the outside,
for example, as in an input unit and an output (circuit) unit such
as the output buffer or the like, and internal circuits other than
the circuits referred to above. Therefore, the respective circuits,
which constitute the above-described input unit, and an output
circuit typified by the output buffer and a circuit having the need
for a memory operation, of the internal circuits, are respectively
electrically connected to a source voltage VCC supplied from an
external terminal and a circuit ground potential VSS.
38. On the other hand, each internal circuit for forming a
low-level output signal when a memory in a CMOS circuit is in a
non-operating state, in other words, in a standby state to reduce a
subthreshold leakage current, has a source voltage side
electrically connected to sub power lines or sub voltage
interconnections or wires (first internal power line). Further,
each internal circuit for forming a high-level output signal has a
ground side electrically connected to subground lines (second
internal power line).
39. In the present embodiment, the internal circuits are roughly
classified into a X-system circuit and a Y-system circuit to reduce
a peak current at the time of the supply of the voltage to the
above-described each internal power line without sacrificing a
substantial operating speed. This is because they are different in
operating timing from each other. Further, the X-system circuit is
further separated into two portions: an X-system circuit for
forming a word line select signal and a portion (circuit portion)
provided within the array block, for forming a word-line select
signal.
40. The sub power lines are classified into VCTX, VCTA and VCTY
according to the division of the internal blocks as described
above, and the subground lines are separated into VSTX, VSTA and
VSTY. Although not restricted in particular, a plurality of P
channel switches MOSFETS QP1 and QP2, and QP3 and QP4 are
respectively provided in parallel form between the sub power line
VCTX and the power line VCC and between the sub power line VCTA and
the power line VCC. Although not limited in particular, a plurality
of N channel switches MOSFETs QN1 and QN2, and QN3 and QN4 are
respectively provided in parallel form between the subground line
VSTX and the ground line (first main voltage interconnection or
wire) VSS and between the subground line VSTA and the ground line
VSS.
41. These P channel and N channel switches MOSFETs divided into the
two are respectively supplied with control signals .o slashed.XB
and .o slashed.X, and .o slashed.AB and .o slashed.A. These control
signals .o slashed.XB and .o slashed.X, and .o slashed.AB and .o
slashed.A are shifted in timing provided to generate them. The
control signals .o slashed.XB and .o slashed.X are generated in
relatively quick timing in association with their operation
sequences. The control signals .o slashed.AB and .o slashed.A are
generated in relatively slow timing.
42. The control signal .o slashed.XB is not supplied commonly to
the gates of the P channel switches MOSFETs QP1 and QP2, which are
provided between the sub power line VCTX and the power line (second
main voltage interconnection or wire) VCC associated with the
above-described X-system circuit and which are connected to one
another in parallel form. Namely, the control signal .o slashed.XB
is supplied to the MOSFET QP1 corresponding to the input side and a
signal obtained by delaying the same control signal through a delay
circuit (control circuit) 17a is supplied to the MOSFET QP2
corresponding to the output side. In the same drawing, the two
switches MOSFETs QP1 and QP2 are typically illustrated by way of
example. However, the X-system circuit is composed of multistage
logic circuits which constitute an X predecoder 6, a mat select
circuit 7, an X address comparator 8 for making a comparison
between redundant addresses, a mat control circuit 9, etc.
43. The sub power line VCTX for supplying an operating voltage to
these logic circuits extends along a circuit area where it is
formed. Therefore, a number of switch MOSFETs as in the switches
MOSFETs QP1 and QP2 are provided in parallel form between the sub
power line VCTX and the power line VCC so as to provide a desired
current supply ability by their composite conductance. In other
words, one switch MOSFET is formed into a relatively small size in
such a manner that the current supply ability required to activate
the X-system circuit can be shared between the plurality of MOSFETs
and realized by them.
44. In the same manner as described above, the control signal .o
slashed.X is not supplied commonly to the gates of the N channel
switches MOSFETs QN1 and QN2, which are provided between the
subground line VSTX and the ground line VSS associated with the
above-described X-system circuit and which are connected to one
another in parallel form. Namely, the control signal OX is supplied
to the MOSFET QN1 corresponding to the input side and a signal
obtained by delaying the same control signal through a delay
circuit 17c is supplied to the MOSFET QN2 corresponding to the
output side. Even in the case of the switches MOSFETs QN1 and QN2
in a manner similar to the MOSFETs QP1 and QP2, a number of MOSFETs
are provided in parallel form between the subground line VSTX and
the ground line VSS so as to provide a desired current supply
ability by their composite conductance.
45. Such a switch MOSFET division can bring about the following
advantages. One of them is that since the switches MOSFETs are
respectively dispersed and formed between the power line VCC and
the sub power line VCTX and between the subground line VSTX and the
ground line VSS, the degree of freedom of the layout of these
MOSFETs can be increased. Namely, the degree of freedom thereof can
be realized by suitably providing relatively small MOSFETs within
spaces defined between the former two lines and between the latter
two lines. By successively activating these MOSFETs in a domino
mode, they can be directly driven by relatively small inverter
circuits or inverters respectively constituting the delay circuits
17a and 17c, so that a drive current supplied to the gate of each
switch MOSFET is dispersed so as to control or suppress the peak
current.
46. Similarly, since the switches MOSFETs are reduced in size, the
value of current that flows when each switch MOSFET is turned on,
is rendered relatively small, and the switches MOSFETs are
successively turned on in the domino mode, the current, which flows
in each internal circuit in the X-system circuit, can be also
dispersed on a time basis so as to suppress the peak current. By
determining the order of activating the MOSFETs in the domino mode
in line with a signal transfer mode, the signal can be transferred
with satisfactory efficiency by less current as will be described
later.
47. The P channel switches MOSFETs QP3 and QP4 provided between the
sub power line VCTA and the power line VCC provided so as to
correspond to the array block, and the N channel switches MOSFETs
QN3 and QN4 provided between the subground line VSTA and the ground
line VSS are also configured in the same manner as described above.
Further, the switches MOSFETs QP3 and QP4 and QN3 and QN4 are
switch-controlled on a stepwise basis by the control signals .o
slashed.AB and .o slashed.A generated with the delay and delay
signals produced by delay circuits 17b and 17d.
48. The array block comprises an X decoder 12, a memory array 15, a
word driver 13 and a sense amplifier 14. One memory mat is composed
of a combination of the memory array 15, the X decoder 12 and the
sense amplifier 14 and hence a plurality of memory mats are
provided as a whole. Therefore, the X decoder 12 associated with a
memory mat selected by the mat control circuit is activated to
thereby select a pair of word lines in its corresponding memory
array 15. Thereafter, the stored information read into a pair of
bit lines by the selection of the pair of word lines is amplified
by the corresponding sense amplifier 14.
49. In the present embodiment, in order to ensure a relatively
large current required to perform the operation of amplification of
each sense amplifier, a common source switch 16 for forming a
signal for activating the sense amplifier is not electrically
connected to the sub power line VCTA and the subground line VSTA
described above but is electrically connected directly to the power
line VCC and the ground line VSS. This is similar even to the
output buffer which needs the flow of a large output current.
50. The sub power line VCTY and the subground line VSTY are
provided so as to correspond to the Y-system and write circuit.
Although not limited in particular, a single P channel switch
MOSFET QP5 is provided between the sub power line VCTY and the
power line VCC. Although not restricted in particular, a single N
channel switch MOSFET QN5 is provided between the subground line
VSTY and the ground line VSS. Each of the switch MOSFETs QP5 and
QN5 is formed in a relatively large size so as to provide the flow
of current required to activate the Y-system and write circuit.
51. However, control signals .o slashed.YB and .o slashed.Y are set
so that their rising edges are unsharpened to suppress a peak
current for driving each switch MOSFET and a peak current at the
time that each switch MOSFET is turned on. As the simplest method,
may be mentioned a method of forming the control signals .o
slashed.YB and .o slashed.Y by a drive circuit such as an inverter
or the like having only such small conductance as to increase the
time constant of a gate capacitor of each of the switches MOSFETs
QP5 and QN5 formed into the relatively large sizes.
52. Since the current required to vary a gate voltage supplied to
each of the gates of the MOSFETs QP5 and QN5 is less provided and
the MOSFETs QP5 and QN5 are gently brought into an on state owing
to the adoption of such a construction, the peak value of the
current supplied to each of the sub power line VCTY and the
subground line VSTY can be suppressed. Thus, when the above
construction is applied to the Y-system circuit, a relatively long
time exists until the Y-system circuit is activated since a low
address strobe signal RASB is rendered low in level and thereby a
memory access is started. Therefore, the switches MOSFETs can be
set so as to have a current supply ability necessary for the above
operation after the elapse of a desired time in such a simple
configuration that each power switch MOSFET is driven by an
inverter circuit having a low current supply ability.
53. In the Y-system and write circuit, an address signal variation
detector ATD detects a change in Y address signal and starts an
equalizing signal generator 26 and a main amplifier control circuit
so as to equalize an input node of a main amplifier and control the
operation of amplification of the main amplifier. Each circuit
block YB1 is electrically connected directly to the power line VCC
and the ground line VSS without being electrically connected to the
sub power line VCTY and the subground line VSTY to stabilize its
operation.
54. Other circuit blocks in the Y-system and write circuit are
electrically connected to the sub power line VCTY and the subground
line VSTY. Of these circuits, reference numerals 28, 33, 29, 30,
31, 32, 34 and 36 respectively indicate a Y predecoder, a Y
decoder, a Y address comparator for making a comparison between
redundant addresses, a main amplifier, a write buffer control
circuit, a write buffer, a vender test circuit, and a Dout buffer
control circuit.
55. The input (circuit) unit for receiving therein a signal
inputted from an external terminal is regularly supplied with
operating voltages through the power line VCC and the ground line
VSS to ensure a response to the input signal supplied from the
external terminal. Further, the output buffer for forming an output
signal is regularly supplied with the operating voltages through
the power line VCC and the ground line VSS to stably provide the
output signal.
56. The input unit is provided, as an X system, with a RAS input
buffer 1, a clock generator 2 for producing a RAS clock signal in
response to a signal outputted from the RAS input buffer 1, an
address input buffer 3 supplied with an address signal, an X
address latch 4 for taking in the address signal in response to the
RAS clock signal RiB, and a CBR counter 5 for producing an address
signal used for a refresh operation.
57. The input unit includes, as a Y system, a CAS input buffer 18,
a clock generator 19 for producing a CAS clock signal in response
to a signal outputted from the CAS input buffer 18, and a Y address
latch 20 for capturing a Y address signal inputted from the address
input buffer 3 in response to the CAS clock signal. In addition to
the components, the input unit has an output enable input buffer
22, a write enable input buffer 23 and a data input buffer 24.
58. FIG. 3 is a circuit diagram showing one example of the X-system
address input unit. An address signal IAYa is of a refresh address
signal formed by the CBR counter 5 shown in FIG. 1. An address
signal RAaB is of an X-system address signal supplied from the
external terminal. These two address signals are supplied to their
corresponding inputs of clocked inverter circuits CN1 and CN2. A
refresh control signal IRF is brought to a high level upon refresh
operation to thereby activate the clocked inverter circuit CN1 and
bring the clocked inverter circuit CN2 into an output high
impedance, whereby the refresh address signal IAYa is captured.
When the refresh signal IRF is low in level, the clocked inverter
circuit CN1 is brought to an output high impedance and the clocked
inverter circuit CN2 is brought into an operation state, whereby
the row-system address signal RAaB supplied from the external
terminal is captured.
59. Outputs produced from the two clocked inverter circuits CN1 and
CN2 are commonly used and transmitted to a through latch via an
inverter circuit. The through latch comprises an input clocked
inverter circuit CN3, an inverter circuit IV3 and a feedback
clocked inverter circuit CN4. A timing signal XAE0 is of a
row-system timing signal and is used to allow the through latch to
perform a latch operation. Namely, when the timing signal XAE0 is
low in level, the input clocked inverter circuit CN3 is activated
so that the feedback clocked inverter circuit CN4 is brought to an
output high impedance. Therefore, the address signal RAaB inputted
from the external terminal or the refresh address signal IAYa is
captured through the input clocked inverter circuit CN3.
60. When the level of the timing signal XAE0 is changed from the
low level to the high level, the input clocked inverter circuit CN3
is brought to an output high impedance and alternatively, the
feedback clocked inverter circuit CN4 is brought into an operating
state. Therefore, a signal outputted from the inverter circuit IV3
is fed back to the input side so that the captured address referred
to above is latched in the through latch. Signals produced from the
through latch are outputted as complementary internal address
signals BXaB and BXaT through NOR gate circuits and inverter
circuits. The NOR gate circuits respectively open their gates
during a period in which the timing signal XAE0 is high in level to
thereby output the complementary internal address signals BXaB and
BXaT corresponding to the latched address signal. When the timing
signal XAE0 is in a standby state of being brought to a low level
in contrast with this, the internal address signals BXaB and BXaT
are both fixed to a high level and respective signals at the
subsequent logic stages are respectively fixed to a predetermined
signal level without reference to the previous memory access.
61. FIG. 4 is a circuit diagram showing one example of the
predecoder which receives the internal address signals therein.
Although not restricted in particular, complementary internal
address signals BX2Bi, BX2Ti through BX4Bi and BX4Ti captured by
the address input unit referred to above are captured through NAND
gate circuits whose gates are controlled based on a testing control
signal TASWTD. Eight predecode outputs AX20Bi through AX27Bi are
produced from NAND gate circuits by utilizing the complementary
internal address signals BX2Bi, BX2Ti through BX4Bi and BX4Ti
composed of three bits in combination.
62. The predecode outputs are respectively outputted through two
cascade-connected inverter circuits used as output buffers. T in
each signal referred to above indicates non-inversion (true) and B
in each signal indicates-inversion (bar). An explanation of the
testing control signal TASWTD will be omitted because it has no
immediate connection with the present inventions However, when the
testing control signal TASWTD is rendered high in level, the gates
of the NAND gate circuits are closed so that the signals inputted
to the respective NAND gate circuits that constitute the
predecoder, are all brought to a high level without reference to
the address signals BX2Bi, BX2Ti through BX4Bi and BX4Ti.
63. Since all the internal address signals BXaB and BXaT are fixed
to the high level when the dynamic RAM is in the standby state, the
signal outputted from each NAND gate circuit in the input unit is
rendered low in level.
64. Since the input signal is rendered low in level, each NAND gate
circuit, which constitute the decoder, fixes its output signal to a
high level. Further, since a high level is supplied to the input of
the preceding stage of each of two CMOS inverter circuits used for
output, a signal outputted from the preceding stage is rendered low
in level and a signal outputted from the subsequent stage thereof
is rendered high in level.
65. Thus, the signal levels of the respective internal logic stages
are fixed as described above in a non-operating state. Therefore,
in order to reduce the subthreshold leakage current described
above, the first-stage NAND gate circuits are electrically
connected to the ground line VSS in turn according to a signal
transfer direction to produce the low-level output signals, whereas
the power sides thereof are electrically connected to the sub power
line VCTX. Since the P channel MOSFETs QP1 and QP2 and the like
shown in FIG. 1, which are connected to the power line VCC when
being in the non-operating state, are turned off, the sub power
line VCTX serves so as to reduce the subthreshold leakage current
that flows through the turned-off P channel MOSFETs constituting
each NAND gate circuits referred to above.
66. Since the P channel MOSFETs and N channel MOSFETs of each CMOS
circuit, which constitute each logic stage referred to above, are
operated at high speed as will be described later, the threshold
voltages thereof are lowered. On the other hand, the switch MOSFETs
QP1, QP2, etc., which constitute the power switch referred to
above, are set so that their threshold voltages are relatively
increased, to thereby substantially prevent the flow of the
subthreshold leakage current at the time that they are off.
67. Second-stage NAND gate circuits are respectively electrically
connected to the power line VCC to produce high-level output
signals in response to the low-level input signals supplied from
the outputs of the first-stage NAND gate circuits. However, the
ground sides thereof are respectively electrically connected to the
subground line VSTX. Since the N channel MOSFETs QN1, QN2 and the
like shown in FIG. 1, which are electrically connected to the
ground line VSS when they are in the non-operating state, are
turned off, the subground line VSTX serves so as to reduce the
subthreshold leakage current flowing through the turned-off N
channel MOSFETs that constitute the NAND gate circuits. In a manner
similar to the above, the switch MOSFETs QN1, QN2, etc., which
constitute the power switch, are set so that their threshold
voltages become great relatively. As a result, the subthreshold
leakage current at the time that they are off, is substantially
prevented from flowing.
68. Subsequently, each three-stage CMOS inverter circuit is
activated by the VCTX and VSS in a manner similar to the
first-stage NAND gate circuits. Each fourth-stage CMOS inverter
circuit is activated by the VCC and VSTX in a manner similar to the
second-stage NAND gate circuits. It is thus possible to reduce the
subthreshold leakage current that flows when they are in a
non-operating state.
69. FIG. 5 is a specific circuit diagram showing examples of the X
decoder, a latch connected to the X decoder and a word driver.
Although not restricted in particular, symbols AX20 through AX27
respectively indicate signals produced by predecoding address
signals A2 through A4 composed of three bits with the
above-described predecoder. Further, symbols AX50 through AX57
respectively indicate signals produced by predecoding address
signals A5 through A7 composed of three bits with a predecoder
similar to the above predecoder. Each MOSFET Q3 whose gate is
supplied with one of the predecoded signals AX20 through AX27 and
each MOSFET Q4 whose gate is supplied with one of the predecoded
signals AX50 through AX57, are electrically directly connected to
one another so as to constitute the X decoder, which is supplied
with a select timing signal XDGB.
70. The X decoder is composed of a dynamic logic circuit. The X
decoder is constructed so that a P channel precharge MOSFET Q1
switch-controlled by a precharge signal XDP and the MOSFETs Q3 and
Q4 constituting each logic block are connected in series. Namely, a
select/non-select decode signal is formed depending on whether or
not a node precharged to a high level by the precharge MOSFET Q1 is
discharged through the MOSFETs Q2, Q3 and Q4 in response to a low
level of the timing signal XDGB.
71. The latch comprises an inverter IV1 and the P channel MOSFET Q2
provided between the input of the inverter IV1 and a power terminal
VCC and controlled by a signal XDGE outputted from the inverter
IV1. The MOSFET Q2 forms a positive feedback circuit in response to
the non-select level corresponding to the low level. The MOSFET Q2
prevents a non-select word line from being selected by the
inversion of the level at the above node due to the leakage current
upon turning off of the MOSFETs Q3 and Q4.
72. Although not restricted in particular, the output signal XDGE
of the inverter IV1 is of a select signal associated with four word
lines WL0 through WL3. Of these four word lines WL0 through WL3,
one word line is selected which is specified or designated by four
word line select timing signals X0MB through X3MB produced by
decoding address signals A0 and A1 of low-order bits and adding the
select timing signal to them.
73. Namely, when the output signal XDGE of the latch is of a select
level corresponding to a high level, a MOSFET Q5 is turned on. When
the word line select timing signal X3MB is changed from a high to a
low levels, a low-level input signal is supplied to a word driver
composed of a P channel MOSFET Q6 and an N channel MOSFET Q7
activated by a booster or step-up voltage VCH and hence a word line
WL3 connected to their output terminals is raised from the low
level to a high level corresponding to the step-up voltage VCH.
74. When the output signal XDGE of the latch is of the select level
corresponding to the high level, other MOSFETs are also turned on
together with the MOSFET Q5. However, since the word line select
timing signals X0MB through X2MB remain at the high level, the N
channel MOSFET of the word driver is turned on so as to cause each
of the word lines WL0 through WL2 to remain in a non-selected state
indicative of a low level. A P channel MOSFET Q8 is used as a latch
MOSFET placed in the non-select level. When the word line WL3 is in
the non-select low level, the P channel MOSFET Q8 is turned on to
thereby bring an input terminal of the word driver to the step-up
voltage VCH so as to turn off the P channel MOSFET Q6. A P channel
MOSFET Q9 is used as a precharge MOSFET. The P channel MOSFET Q9 is
turned on in response to a low level of a precharge signal WPH so
that the input terminal of the word driver is precharged to
VCH.
75. When the output signal XDGE of the latch is of a non-select
level corresponding to a low level, MOSFETs typified by the MOSFET
Q5 are held off. Thus, even if either one of the word line select
timing signals X0MB through X3MB is changed from the high to low
levels, the P channel MOSFET Q8 is turned on in response to the low
levels of the word lines WL0 through WL3 each associated with the
precharge level without being responsive to its change. As a
result, the latch that the high level corresponding to the VCH is
fed back, is exerted on the input terminal of the word driver so
that each of the word lines WL0 through WL3 or the like is
maintained at the non-selected state.
76. Since the amplitude of the signal inputted to the word driver
composed of, for example, the MOSFETs Q6 through Q9 operated by the
step-up voltage VCH corresponding to the select level of each word
line is increased as in the circuits employed in the present
embodiment, the threshold voltage is relatively raised as in the
power switches MOSFETs QP1, QN1, etc. Therefore, since the
subthreshold leakage current at the turning off of the word driver
can be substantially brought to naught, the MOSFETs are directly
connected to the ground line VSS even in the sense of stabilization
of the select/non-select level of each word line. However, since
the inverter IV1 is reduced in signal amplitude in a manner similar
to the predecoder and the input signal thereof may simply be fixed
to a high level as compared with the precharge signal XDP upon
non-selection of the word line so as to form or produce a low-level
output, the inverter IV1 may be connected to the ground line VSS
and the sub power line VCTA.
77. A word driver, a latch MOSFET and a precharge MOSFET similar to
those referred to above are connected even to a redundant word line
RWL0. The redundant word line RWL0 is selected in synchronism with
the timing signal XDGB and a redundant word line select signal XR0B
produced by a redundant circuit composed of an unillustrated fuse
circuit for storage of defective addresses and an address
comparator for comparing each defective address and an input X
address. Since, at this time, the AX20 through A27 and AX50 through
AX57 produced from the predecoder corresponding to a normal circuit
or the word line select timing signals X0MB through X3MB are
brought to the non-select level, based on a defective-address
comparison coincidence signal, no defective word line is
selected.
78. Although not restricted in particular, the memory array
employed in the present embodiment is divided into a plurality of
memory mats as will be described later. Sense amplifiers SA,
precharge circuits PC and input/output lines are provided on both
sides of each memory mat MAT. Although not restricted in
particular, the sense amplifiers associated with odd-numbered
complementary bit lines and even-numbered complementary bit lines
are distributed to both sides to match the pitches of complementary
bit lines disposed so as to intersect at right angles to the word
lines WL0 through WL3 or the like with the pitches of the sense
amplifier and the precharge circuit. Owing to the placement of such
sense amplifiers SA, one sense amplifier can be placed at a pitch
corresponding to twice the pitch of each of the complementary bit
lines.
79. Although not restricted in particular in the present
embodiment, each sense amplifier is set to a shared sense amplifier
system. Signals SHL and SHR are of shared select signals. Although
the left and right sides are reversed at one view in the same
drawing, the memory mat in the same drawing is disposed on the left
side as viewed from the right-side sense amplifier SA if the sense
amplifier SA is considered as the center. Therefore, the select
signal like SHL is supplied to the memory mat. Since the memory mat
shown in the same drawing is disposed on the right side as viewed
from the left-side sense amplifier SA, the select signal like SHR
is supplied to the memory mat.
80. FIG. 6 is a circuit diagram of one example of the mat control
circuit. High-order address signals are decoded to produce or form
mat select signals MS000, MS001 and MS002, for example. The memory
mat MAT shown in FIG. 5 is selected by the mat select signal MS001.
The mat select signal MS001 is supplied to four NAND gate circuits
through two inverters connected in tandem. The four NAND gate
circuits are respectively supplied with timing signals x0 through
x3 obtained by combining the decode signals formed by decoding the
address signals A0 and A1 with the word line select timing signals.
Thus, the word line select timing signals X0MB through X3MB are
produced from the outputs of the NAND gate circuits. This means
that the predecode signals AX20 through AX27, AX50 through AX57 and
the timing signals x0 through x3 are commonly used to the plurality
of memory mats.
81. The precharge signals XDP and WPH and the operation timing
signal XDGB of the row decoder are formed by combining the mat
select signal MS001 with X-system timing signals R1 and R2. Since
the precharge signal WPH is used as a signal supplied to the gate
of each P channel MOSFET operated based on the step-up voltage VCH,
the precharge signal WPH is converted into a level by a level
converter circuit and the converted level signal is outputted
through an inverter activated by the step-up voltage VCH. The mat
select signals MS000 and MS002 each having the amplitude of such a
signal as the source voltage VCC are by-level converted into signal
amplitude corresponding to the step-up voltage VCH by the level
converter circuit, whereby the shared select signals SHR and SHL
are formed.
82. Even in the case of the mat control circuit, since the input
signals R1 and R2 and MS001 through MS002 and the like are
respectively fixed to a low level upon its non-operation as
described above and are used to form high-level output signals, the
mat control circuit is activated by the power line VCC and the
subground line VCTX in the same manner as described above. Since
second-stage CMOS inverter circuits are reversely supplied with
high-level input signals to form low-level output signals, the
second-stage CMOS inverter circuits are electrically connected to
the sub power line VCTX and the ground line VSS. Subsequently,
third-stage NAND gate circuits are activated by the power line VCC
and the subground line VCTX in the same manner as described above.
Since the signals x0 through x3 are fixed to a high level upon
deactivation of the mat control circuit, the third-stage NAND gate
circuits are activated correspondingly by the VCTX and VSS in
accordance with the above-described method. Further, the NAND gate
circuits supplied with the output signals thereof are activated by
the VCC and VSTX.
83. FIG. 7 is a timing chart for explaining one example of the
operation of the dynamic RAM shown in FIGS. 1 and 2. The row
address strobe signal RASB is changed from the high to low levels
to start the memory access. When the output signal R0B of the RAS
input buffer 1 is changed from a high to a low levels, the RAS
clock generator 2 changes the typical row-system timing signal R1B
from a high to a low levels in response to its change. With the
change of the timing signal R1B to the low level, the address
signal Ai inputted from the address buffer 3 is captured or loaded
into the X address latch 4 as an X address signal.
84. With the change of the timing signal R0B to the low level, the
control signal .o slashed.x of the power switch is changed from the
low to high levels and the control signal .o slashed.XB is changed
from the high to low levels. Thus, the supply of the source voltage
VCC to the sub power line VCTX is started by the turning on of the
switch MOSFET QP1 and the supply of the ground potential VSS to the
subground line VSTX is started by the turning on of the switch
MOSFET QN1. Namely, the supply of the voltages to the sub power
line VCTX and the subground line VSTX is carried out simultaneously
and concurrently with the operations of the RAS clock generator 2
and the X address latch 4.
85. Thus, when an internal address signal X0 is generated in
association with the latch operation of the X address latch 4, at
least the input-stage logic circuits of the respective circuits of
the X predecoder 6, mat select circuit 7 and X address comparator 8
are substantially supplied with the source voltage VCC owing to the
turning on of the switch MOSFET QP1. Further, the subground line
VSTX is substantially supplied with the ground potential VSS owing
to the turning on of the switch MOSFET QN1. Thus, signals
responsive to the supplied voltages are formed without interfering
with a substantial operation. In association with the transfer of
the signals from the logic stages in the X predecoder 6 and the mat
select circuit 7, potentials necessary for operation are
successively supplied to the sub power line VCTX and the subground
line VSTX by the switch MOSFETs stepwise-activated successively in
their signal transfer directions, so that predecode signals X1 and
X2 and a mat select signal X3 are formed.
86. The control signals .o slashed.A and .o slashed.AB are
respectively changed to a high level and a low level with lags
behind the control signals .o slashed.X and .o slashed.XB to
thereby start the supply of the source voltage VCC to the sub power
line VCTA for the array block and the supply of the ground
potential VSS to the subground line VSTA for the array block. Since
the timing provided to output the predecode signal X1 formed in the
above-described X-system circuit and an output signal X4 of the mat
control circuit 9 makes lead time, the sub power line VCTA and the
subground line VSTA used for the array block are respectively set
to desired potentials.
87. Thus, in the array block, one word line WORD is raised to the
high level from the low level in response to a select signal X5
produced from the X decoder 12. Thereafter, the common source
switch 16 is turned on in response to the change of a sense
amplifier activation signal S0 to a low level to thereby
respectively vary common sources SP and SN of each sense amplifier
to a high level and a low level. As a result, a microsignal is read
into its corresponding complementary bit lines of the memory array
and thereafter the operation for amplification of the microsignal
is started.
88. A column address strobe signal CASB is changed from a high to a
low levels to capture a Y-system address signal. Namely, when the
output signal of the CAS input buffer 18 is changed from a high to
a low levels, the CAS clock generator 19 generates an address
take-in or capturing timing signal in response to its change to
thereby allow the Y address latch 20 to capture the address signal
Ai inputted from the address input buffer 3 therein as a Y address
signal.
89. The address signal Y1 taken in the Y address latch 20 is
supplied to the Y predecoder 28 and the Y address comparator 29. An
address signal Y0 is supplied to the address variation detector 25
from which an address variation detection signal C0 is generated.
In response to the signal C0, the equalizing pulse generator 26
generates an equalize pulse C1 to equalize the input signal
supplied to the input terminal of the main amplifier 30. In
response to the signal C0 and the timing signal outputted from the
CAS clock generator 19, the main amplifier control circuit 27
generates a main amplifier control signal C2.
90. Since the Y decoder 33 generates a Y select signal in response
to a predecode signal Y2, a read signal D0 is transferred to the
input terminal of the main amplifier 30 and a signal D1 obtained by
amplifying the read signal D0 with the main amplifier 30 is
transferred to the output buffer 37 through a data selector 35 as
an input signal D2 therefor. The output buffer 37 is activated by a
timing signal C3 outputted from the Dout buffer control circuit 36
to transmit output data DATA therefrom.
91. In a write mode, a write clock generator 21 judges or
determines that a signal outputted from the write enable input
buffer 23 is low in level. As a result, the write buffer 32 is
activated so that data inputted from the data input buffer 24 is
transferred to the complementary bit lines of the memory array,
which are selected by the Y select signal.
92. The control signals .o slashed.Y and .o slashed.YB associated
with the Y-system and write circuit are respectively slowly varied
to a high level and a low level in suitable timing in the course of
the select operation of the X-system referred to above. Therefore,
the switch MOSFETs QP5 and QN5 respectively connected to the sub
power line VCTY and the subground line VSTY associated with the
Y-system and write circuit are set so as to have desired current
supply abilities with timing provided to start the operations of
the respective circuits of the Y-system while currents outputted
from the switch MOSFETs QP5 and QN5 are being increased slowly
according to gentle changes in their gate voltages.
93. The sub power lines VCTX, VCTA and VCTY and subground lines
VSTX, VSTA and VSTY, which are respectively divided into the three
as described above, are respectively substantially brought into a
floating state upon their non-operating states. In this condition,
the control signals .o slashed.X and .o slashed.XB, .o slashed.A
and .o slashed.AB, and .o slashed.Y and .o slashed.YB are
respectively successively generated with delays upon the memory
access while the subthreshold leakage current produced in each
logic circuit is being suppressed. Since the drive current required
to vary the voltage applied to the gate of each of the switches
MOSFETs respectively controlled based on the control signals .o
slashed.X and .o slashed.XB, .o slashed.A and .o slashed.AB, and .o
slashed.Y and .o slashed.YB, and the supply current required to
vary the voltages at the sub power lines VCTX, VCTA and VCTY and
the subground lines VSTX, VSTA and VSTY to a desired voltage slowly
increase in terms of the time, the occurrence of the peak current
is suppressed and the influence of the currents on the operating
speeds of the respective circuit blocks can be substantially
avoided.
94. FIGS. 8 and 9 are respectively block diagrams showing one
embodiment of the dynamic RAM to which the present invention is
applied. FIG. 8 shows a memory array and its peripheral selection
circuits. FIG. 9 illustrates an input/output interface such as an
address buffer, an input/output buffer or the like, and a timing
control circuit.
95. Referring to FIG. 8, a sense amplifier SA01 is provided so as
to be interposed between two memory mats MMAT0 and MMAT1. Namely,
the sense amplifier SA01 serves as a shared sense amplifier used
selectively for the two memory mats MMAT0 and MMAT1. An
input/output portion of the sense amplifier SA01 is provided with
an unillustrated select switch and electrically connected to
complementary bit lines (or also called "complementary data lines
or complementary digit lines") of the memory mat MMAT0 or
MMAT1.
96. Other memory mats MMAT2 and MMAT3, MMAT4 and MMAT5 and MMAT6
and MMAT7 are respectively provided in pairs and provided with
sense amplifiers SA23, SA45 and SA67 in common. A single memory
array MARY0 is composed of a total of eight memory mats MMAT0
through MMAT7 and the four sense amplifiers SA01 through SA67
referred to above. A Y decoder YDEC is provided for the memory
array MARY0. A memory array MARY1 is provided symmetrically with
respect to the memory array MARY0 with the Y decoder YDEC
interposed therebetween. Although an internal configuration of the
memory array MARY1 is omitted, the memory array MARY1 is similar in
configuration to the memory array MARY0.
97. Decoders XD0 through XD7 are provided with respect to the
memory mats MMAT0 through MMAT7 respectively. These decoders XD0
through XD7 respectively decode a signal AXi outputted from a
predecoder XPD to produce or form four word line select signals.
Word drivers WD0 through WD7 for producing or forming word line
select signals, based on signals outputted from the decoders XD0
through XD7 and signals outputted from mat control circuits
MATCTRL01 through MATCTRL67 to be next described are provided. Word
drivers corresponding to spare or reserve word lines for defective
relief are also included in the word drivers.
98. The mat control circuit MATCTRL01 is provided with respect to
the pair of memory mats MMAT0 and MMAT1. Similarly, the mat control
circuits MATCTRL23, MATCTRL45 and MATCTRL67 are respectively
provided even with respect to other pairs of memory mats MMAT2 and
MMAT3, MMAT4 and MMAT5, and MMAT6 and MMAT7. The mat control
circuits MATCTRL01 through MATCTRL67 are activated in response to a
mat select signal MSi, a signal XE, a sense operation timing signal
.o slashed.SA and signals obtained by decoding address signals of
the two rightmost bits. Of these, one mat control circuit relative
to the selected memory mat outputs a signal XiB or the like for
selecting one of the four word lines.
99. Otherwise, each of the mat control circuits MATCTRL01 through
MATCTRL67 outputs a select signal for holding ON a bit line select
switch corresponding to either of the left and right memory mats in
association with the selected memory mat referred to above and
turning OFF bit line select switches associated with the
non-selected memory mats, and a timing signal for starting the
amplifying operation of each sense amplifier. Further, each of the
mat control circuits has the function of controlling either one or
both of each sense amplifier and each bit line select switch upon
standby at a refresh operation to be described later to thereby
bring each bit line into the floating state.
100. Since the output of the select signal XiB or the like is
prohibited based on a low level of the signal XE when an access to
a defective word line is performed, the operation for selecting the
defective word line is stopped. On the other hand, since a select
signal XRiB on the redundant circuit side is formed, the reserve
word line is placed in a selected state.
101. Referring to FIG. 9, a timing control circuit TG determines an
operation mode in response to a row address strobe signal /RAS, a
column address strobe signal /CAS, a write enable signal /WE and an
output enable signal /OE supplied from an external terminal, and
correspondingly forms or produces various timing signals necessary
for the operation of each internal circuit. In the same drawing,
symbol / means that a low level is an active level.
102. Signals R1 and R3 are of row-system internal timing signals
and are used for a row-system select operation to be described
later. The timing signal .o slashed.XL is used as a signal for
capturing a row-system address and holding it and is supplied to a
row address buffer RAB. Namely, the row address buffer RAB captures
addresses inputted from address terminals A0 through Ai in response
to the timing signal .o slashed.XL and causes a latch to store the
same therein.
103. The timing signal .o slashed.YL is used as a signal for
capturing column-system addresses and causing a latch to hold the
same therein and is supplied to a column address buffer CAB.
Namely, the column address buffer RAB takes in the addresses
inputted from the address terminals A0 through Ai in response to
the timing signal .o slashed.YL and causes the latch to store them
therein.
104. The signal .o slashed.REF is of a signal generated upon a
refresh mode and is supplied to a multiplexer AMX connected to an
input portion of the row address buffer. The multiplexer AMX is
controlled based on the signal .o slashed.REF so as to select a
refresh address signal formed by a refresh address counter RFC. The
refresh address counter RFC counts a refresh stepping pulse .o
slashed.RC produced by the timing control circuit TG to thereby
generate the refresh address signal. The present embodiment is
constructed so as to have auto-refresh and self-refresh to be
described later.
105. The timing signal .o slashed.X is of a row or word line select
timing signal and is supplied to a decoder XIB from which four word
line select timing signals XiB are formed or produced based on the
signals obtained by decoding the address signals of the two
rightmost bits. The timing signal .o slashed.Y is of a column
select timing signal and is supplied to a column-system predecoder
YPD from which column select signals AYix, AYjx and AYkx are
outputted.
106. The timing signal .o slashed.W is of a control signal for
providing instructions for a write operation and the timing signal
.o slashed.R is of a control signal for providing instructions for
a read operation. The timing signals .o slashed.W and .o slashed.R
are supplied to an input/output circuit I/O. Upon the write
operation, an input buffer included in the input/output circuit I/O
is activated so that the output buffer is brought to an output high
impedance. Upon the read operation on the other hand, the output
buffer is activated to bring the input buffer to an output high
impedance.
107. The timing signal .o slashed.MS is of a signal for providing
instructions for a mat select operation and is supplied to the row
address buffer RAB. A mat select signal MSi is outputted in
synchronism with this timing. The timing signal .o slashed.SA is
used as a signal for providing instructions for the operation of
each sense amplifier. Based on the timing signal .o slashed.SA, the
timing signal .o slashed.MS is also used to form control signals
for a precharge end operation of complementary bit lines and a
separate operation of bit lines on the non-selected memory mat side
as well as to form an activation pulse for each sense
amplifier.
108. In the present embodiment, a row-system redundant circuit
X-RED is typically shown by way of illustrative example. Namely,
the above circuit X-RED includes a memory circuit for storing each
defective address therein and an address comparator. The stored
defective address is compared with an internal address signal BXi
outputted from the row address buffer RAB. If they do not coincide
with each other, then the signal XE is brought to a high level and
a signal XEB is brought to a low level to thereby make the
operation of the normal circuit valid or effective. When the input
internal address signal BXi coincides with the stored defective
address, the signal XE is rendered low in level to prohibit the
select operation of each defective word line in the normal circuit.
Further, the signal XEB is rendered high in level to output the
select signal XRiB for selecting one reserve word line.
109. Although omitted in FIG. 9, a circuit similar to the
row-system circuit is provided even within a column system. When a
memory access to a defective bit line is detected by the circuit,
the operation for the selection of the defective bit line by a
column decoder YD is stopped and instead a signal for selecting
each of bit lines provided as spares is formed.
110. FIG. 10 is a fragmentary circuit diagram showing one example
of the memory array employed in the dynamic RAM according to the
present invention. In the same drawing, four word lines and two
pairs of complementary bit lines in the memory mat MMAT0, a sense
amplifier related to these, a precharge circuit, etc. are typically
illustrated by way of example. The memory mat MMAT1 is shown as a
black box. Circuit symbols are typically added to MOSFETs that
constitute individual circuits associated with a pair of
complementary bit lines BLL and /BLL.
111. A dynamic memory cell comprises address selection MOSFETs Qm
and information storage capacitors Cs. The gate of one address
selection MOSFET Qm is electrically connected to a word line WLi.
The drain of the MOSFET Qm is electrically connected to the bit
line /BLL and the information storage capacitor Cs is electrically
connected to the source thereof. Other electrodes of the
information storage capacitors Cs are commonly used and are
supplied with a plate voltage VPL.
112. The pair of bit lines BLL and /BLL is disposed in parallel as
shown in the same drawing and suitably intersect as needed to
strike a capacity balance between the bit lines, for example. The
complementary bit lines BLL and /BLL are electrically connected to
an input/output node of each sense amplifier by switches MOSFETs Q1
and Q2. The sense amplifier is composed of N channel MOSFETS Q5 and
Q6 whose gates and drains are cross-connected and provided in latch
form and P channel MOSFETs Q7 and Q8 whose gates and drains are
cross-connected and provided in latch form. The sources of the N
channel MOSFETs Q5 and Q6 are electrically connected to a common
source line CSN. The sources of the P channel MOSFETs Q7 and Q8 are
electrically connected to a common source line CSP. A power switch
MOSFET Q14 for the P channel MOSFETs is connected to the common
source line CSP as shown by way of illustrative example. When a
timing signal .o slashed.SAP is rendered low in level, the MOSFET
Q14 is turned on so as to supply a voltage required to activate
each sense amplifier. An unillustrated N channel MOSFET is
connected to the common source line CSN associated with the N
channel MOSFETs Q5 and Q6 so as to supply a circuit ground
potential for providing line operation timing.
113. A precharge circuit composed of a MOSFET Q11 for
short-circuiting the complementary bit lines and switches MOSFETs
Q9 and Q10 for supplying a half precharge voltage HVC to the
corresponding complementary bit lines is connected to the
input/output node of each sense amplifier. The gates of the MOSFETs
Q9 through Q11 are commonly supplied with a precharge signal PCB.
MOSFETs Q12 and Q13 form a column switch switch-controlled in
response to a column select signal YS. In the present embodiment,
four pairs of bit lines can be selected by one column select signal
YS. Therefore, the column select signal YS is supplied commonly to
the gates of switch MOSFETs constituting column switches connected
to input/output nodes of four sense amplifiers associated with the
two pairs of bit lines illustratively shown in the same drawing and
the remaining unillustrated two pairs of bit lines. The four pairs
of bit lines and the four pairs of input/output lines I/O are
respectively connected to one another through the switch
MOSFETs.
114. FIG. 11 is a cross-sectional view showing, as one embodiment,
a device structure for describing the dynamic RAM according to the
present invention. In the present embodiment, a device structure
for the memory array and-the peripheral portion referred to above
is shown as a typical one by way of illustrative example. In regard
to the storage capacitor of each memory cell, a polysilicon layer
SG corresponding to a second layer is used as a storage node and is
electrically connected to the source and drain of one of address
selection MOSFETs. The polysilicon layer is shaped as a fin
structure and is formed by a plate electrode composed of a
polysilicon layer TG corresponding to a third layer with a thin
gate insulating film interposed between the two layers. The gate of
each address selection MOSFET is composed of a polysilicon layer FG
corresponding to a first layer. Other source and drain of each
address selection MOSFET are electrically connected to a metal
interconnection or wiring layer M1 corresponding to a first layer,
such as aluminum or the like with the FG, SG and TG interposed
therebetween. Each bit line is formed of the interconnection layer
M1.
115. The peripheral portion is formed with two N channel MOSFETs.
The metal wiring layer M1 is electrically connected to the source
and drain of each MOSFET by a contact LCNT. Alternatively, the
metal wiring layer M1 is electrically connected to the polysilicon
layer FG by a contact FCNT. The above-described metal wiring layer
M1 and wiring layer M2 are electrically connected to each other
through a first through-hole TH1, and the wiring layer M2 and a
wiring layer M3 corresponding to a third layer are electrically
connected to each other through a second through-hole TH2. When an
input signal is supplied to the gate electrode of the MOSFET
through the wiring layer M2, the input signal is taken in the
wiring layer M1 used as a dummy through the first through-hole TH1
as described above and hence the input signal is introduced into
the polysilicon layer FG used as the gate electrode through the
wiring layer M1 and the contact LCNT.
116. The wiring layer M3 for supplying the input signal is
electrically connected to the wiring layer M2 through the second
through-hole TH2. When an output signal is supplied to the
next-stage circuit, for example, the wiring layer M1 is
electrically connected to the wiring layer M2 used as a dummy
through the first through-hole TH1. Thus, the output signal is
introduced into the wiring layer M3 through the second through-hole
TH2 with the wiring layer M2 interposed between the wiring layers
M1 and M3.
117. Since the complementary bit lines are half-precharged in the
non-operating state, a half precharge voltage is applied between
the gate and source of each MOSFET as a reverse bias. Therefore, no
subthreshold leakage current occurs in each address selection
MOSFET. It is however considered that when each word line becomes a
non-selection low level and the complementary bit lines are brought
to VSS by the amplifying operation of each sense amplifier, the
information charge stored at the high level loses or disappears due
to the subthreshold leakage current.
118. If the subthreshold leakage current at such an address
selection MOSFET turns into a problem, then a channel length is
made long and a threshold voltage is increased. Alternatively, well
regions in which memory cells each composed of the address
selection MOSFETs are formed, are separated from each other and a
negative substrate back bias voltage is supplied to each well
region to increase an effective threshold voltage. In order to
separate only the well regions for forming the memory cells from
each other and supply the substrate back bias voltage thereto, a
semiconductor substrate is shaped in the known triple well
structure. Namely, each of the N channel MOSFETs, which constitute
the peripheral circuits such as the decoder, etc., needs to have
the low threshold voltage as described above in order to increase
the operating speed thereof. Each well region in which the N
channel MOSFET is formed, is biased to the circuit ground potential
VSS.
119. When a large circuit block is provided with a set of a sub
power line and a subground line alone, it is necessary to provide
switch MOSFETs whose gate widths are large and reduce an on
resistance of each switch MOSFET so as to provide the supply of
current to the circuit block. This is because when a voltage drop
occurs in the sub power line, the threshold voltage of each of P
channel MOSFETs constituting the same circuit block increases
equivalently and the lowering of speedup by the use of each MOSFET
whose threshold voltage is low, is canceled due to its increase.
Similarly, this will happen even in the case of the relationship
between the threshold voltage of each N channel MOSFET and the on
resistance of each MOSFET connected to the subground line.
120. It is thus necessary to reduce a voltage drop of the order of
several tens of mV at maximum with respect to the average operating
current of the same circuit block with a view toward keeping the
effect of speeding up its operation. In the dynamic RAM according
to the previous embodiment, for example, switch MOSFETs each having
gate widths ranging from 5000 .mu.m to 20000 .mu.m are needed. It
is thus necessary to charge or discharge the capacitor of the gate
large in width when each switch MOSFET is turned on.
121. It is desirable that the sub power line and the subground line
are used in a number of circuit blocks wherever practicable to
reduce current consumption at the time of the non-operation as the
entire circuit. To cope with it, it is however necessary to turn on
the above-described power switch MOSFET in timing provided as
quickly as possible after the inputting of RASB. For example, the
sum of the gate widths of the MOSFETs connected to the power line
VCC and the ground line VSS at the input unit becomes about 10000
.mu.m, whereas the sum of the gate widths of the MOSFETs connected
to the sub power line and the subground line at the X predecoder
and the mat select circuit reaches about 15000 .mu.m. Thus, whether
or not the sub power line and the subground line should be
connected to the X predecoder and the mat select circuit, depends
on the change of the leakage current at the non-operation
(deactivation) to the half the leakage current. It is thus
important that each switch MOSFET is turned on before the X
predecoder and the mat select circuit are started (before and after
5 n seconds after the inputting of RASB, for example).
122. Since it is necessary to charge or discharge the gate
capacitor referred to above in a short time, the sub power line and
the subground line are provided in pair as the entire circuit and
the P channel switch MOSFET and the N channel switch MOSFET are
respectively provided by one. In doing so however, a large peak
current, which falls within a range of 0.5 A to 1.0 A, will flow
when such switches MOSFETs are turned on. When such a large peak
current is superimposed on the operating current flowing in each
internal circuit, a large problem arises in terms of long-term
reliability due to disconnection or the like caused by noise or a
concentrated current.
123. As described above in the present embodiment, the
concentration of current on each switch MOSFET at the time of its
switch control is dispersed on a time basis by dividing the sub
power lines and the subground lines into the three portions as a
whole as described above and by making a difference between the
timing provided to start each MOSFET and the timing provided to
operate each of the switches MOSFETs divided in plural form, so as
to stepwise activate each switch MOSFET. However, the peak current
can be also controlled by simply collectively utilizing the sub
power lines and the subground lines in common in the form of
several blocks, providing the switch MOSFETs in plural form and
setting the difference between the start timings. In this case, the
layout of the sub power lines and the subground lines becomes easy
as compared with the case in which the sub power lines and the
subground liens are divided into pieces between the blocks.
Further, since the sub power lines and the subground lines also
increase in parasitic capacity, an advantage is obtained that
variations in the voltages respectively applied to the sub power
lines and the subground lines are reduced due to the occurrence of
an instantaneous large current.
124. FIG. 12 is a block diagram for describing one embodiment of
the present invention. A power line VCC and a sub power line VCT,
switch MOSFETs associated therewith, inverters, which constitute
delay circuits for forming signals for controlling the MOSFETS, and
circuit blocks supplied-with operating voltages from the inverters,
are shown in the same drawing. Subground lines and a ground line
for the respective circuit blocks employed in the present
embodiment and switch MOSFETs associated therewith are omitted
because they are similar to those on the source voltage VCC
side.
125. In the present embodiment, the switch MOSFETs such as MOSFETs
QP1 through QP4 for connecting the sub power line VCT and the power
line VCC to one another are respectively provided so as to
correspond to circuit blocks 1 through 4. The sum of gate widths of
the individual switch MOSFETs QP1 through QP4 is set to such a
value as to fall within a range in which the allowable voltage of
the sub power line VCT varies due to the on resistance of each
switch MOSFET referred to above. A control signal .o slashed.
supplied to the gates of the switch MOSFETs QP1 through QP4 is
transferred to each of inverters IV1 through IV7 as a signal
delayed in turn by each of inverters IV1 through IV7 in order of
transferring it to each of the circuit blocks 1 through 4 in
turn.
126. Thus, when the sub power line VCT is shared between the
plurality of circuit blocks 1 through 4, the X-system circuit, the
array block and the Y-system and write circuit are respectively
associated with the circuit blocks in the above-described dynamic
RAM, for example. In the present embodiment, the circuit block 1 is
supplied with an operating voltage from the switch MOSFET QP1 so as
to perform a logic operation in response to an input signal IN. At
this time, the voltage VCC supplied from the MOSFET QP1 is not
sufficiently delivered or transferred to the circuit blocks far
away from the input signal side as in the case of other circuit
blocks 2 through 4 due to the distributed resistance of the sub
power line VCT. However, since these circuit blocks perform
significant circuit operations in response to signals outputted
from the preceding-stage circuit blocks, a substantial problem does
not occur. Namely, when the significant output signal corresponding
to the input signal IN is transferred to the next-stage circuit
block 2, the switch MOSFET QP2 is turned on so that the voltage VCC
for performing a logic operation associated with it is supplied to
the circuit block 2. Thus, since the delay in signal at each logic
stage and the supply of the voltage to the sub power line VCT are
carried out substantially in synchronism with each other, a
substantial delay in operating speed does not occur.
127. The signal delay time developed in each logic circuit does not
necessarily coincide with the operation of each switch MOSFET
referred to above. This is because since a delay in supplying the
power delays the operation for outputting a high level in response
to its delay, a substantial logic output is actually formed
dependent on the voltage of the sub power line VCT, which is
supplied from each switch MOSFET. Thus, since the operating speed
of each logic circuit becomes slow when the control on each switch
MOSFET is extremely delayed, the difference in time between the
respective switch MOSFETs is set so that the peak current referred
to above falls below the allowance value and the voltage is
stepwise supplied to the power line.
128. FIG. 13 is a block diagram for explaining another embodiment
of the present invention. The same drawing shows an example in
which a sub power line and a subground line are respectively
divided into plural forms every circuit blocks. In the present
example, the gate width of each switch MOSFET, which is determined
by each of the values of allowable voltages of each sub power line
and each subground line, which varies due to an on resistance of
each switch MOSFET, can be reduced as compared with the case in
which the sub power line is shared between the circuit blocks.
129. As a result, charge and discharge currents, which flow through
the gates of the respective switch MOSFETs QP10 through QP40 or the
like, are reduced. Further, a peak current can be reduced by
starting the switch MOSFETs in turn with the passage of time, using
the pair of sub power line and subground line for each circuit
block activated substantially in the same timing. At the same time,
the startup of each switch MOSFET can be speeded up because the
gate width of each switch MOSFET is small as compared with the case
in which the sub power line is not divided into the plural forms.
When the circuit blocks free of execution of their circuit
operations exist as in the Y-system and the write circuit at the
refresh operation in the dynamic RAM, their corresponding switch
MOSFETs can remain held in an off state and hence circuit's current
consumption can be reduced.
130. FIG. 14 is a circuit diagram showing one example of an
X-system input portion or unit employed in the dynamic RAM
according to the present invention. A switch MOS control unit or
circuit which has been omitted in the above-described embodiment
and an X-system input portion associated with it are shown in the
same drawing in combination.
131. The switch MOS control unit forms or produces a signal SWC for
starting a switch MOSFET in response to a clock signal generated at
the earliest timing in response to an input signal of RASB. Thus, a
first stage of a RAS clock generator, an X address buffer and the
switch MOS control unit activated before each switch MOSFET is
turned on, are not connected to the sub power line and the
subground line. An X predecoder and the subsequent stage of the RAS
clock generator are electrically connected to the sub power line
VCT and the subground line VST. Gates and inverters at which output
signals at the time of deactivation are low (L) in level, are
electrically connected to the sub power line VCT. Gates and
inverters at which output signals are high (H) in level, are
electrically connected to the subground line VST as described
above. Thus, each switch MOSFET is turned off upon deactivation to
reduce a subthreshold leakage current developed in such gates and
inverters, whereby a current consumed during standby is
reduced.
132. Since the switch MOSFETs are parallel-connected in plural form
and their gates are supplied with delayed signals, the switch
MOSFETs are successively turned in domino or stepwise form. While
suppressing their driving and a peak current produced due to their
turning-on, the sub power line VCT and the subground line VST are
supplied with their corresponding VCC and VSS voltages. A signal
SET inputted to the switch MOS control circuit is an initialization
signal, which is used to generate the switch MOS start signal SWC
upon turning on of the power in the circuit and turn on each switch
MOSFET so as to increase the voltage on the sub power line VCT. A
signal TEST is of a test signal, which is used to generate a start
signal from the outside for thereby forcibly turning on each switch
MOSFET. The signal TEST is pulled down to ground through the
resistance of its input node and is normally fixed to a low
level.
133. Even if the RASB is brought to the high level, each switch
MOSFET is turned off by a signal .o slashed..tau. produced by
delaying a RAS reset signal by a time .tau. (.apprxeq.5 n seconds)
so as to avoid the immediate turning off of the switch MOSFET. This
is because since the circuit is precharged after the RASB has been
brought to the high level, each switch MOSFET is held on during
that time.
134. When the dynamic RAM enters into a self-refresh mode (CBR
refresh), a self-refresh signal SELF is generated with timing A in
response to the input of CBR (CAS before RAS) as shown in a timing
chart in FIG. 15. In order to turn off the switch MOSFET except for
the case where the dynamic RAM is actually performing a refresh
operation in the self-refresh mode, to thereby reduce the
subthreshold leakage current, the switch MOSFET can be controlled
even by an internal signal IRASB.
135. If the refresh operation is set to concentrated refresh for
concentratedly performing refresh on all the memory cells and
thereafter bringing them into a deactivated state until the next
refresh, which is rather than set to distributed refresh for
uniformly dispersing and performing one cyclic operation required
to refresh all the memory cells once, within its holding time, then
the number of times that the switch MOSFET is controlled, can be
reduced. A multiplexer MPX provided within the X address buffer
selects an address signal ADi or a refresh address signal RADi
inputted from the external terminal in association with the refresh
control signal SELF and takes it therein.
136. The SET signal is used to generate the start signal SWC for
each switch MOSFET upon turning on the power in the circuit and
turn on the switch MOSFET so as to raise the voltage applied to the
sub power line VCT. As an alternative to the signal SET, this
processing may be performed by a MOSFET diode-connected between the
power line VCC and the sub power line VCT. In this case, it is
unnecessary to turn on the switch MOSFET upon power-up. If each of
nodes in internal circuits at power-up is set to a potential at
deactivation by the SET signal, then the supply of current to each
of the internal circuits at power-up is all made by the power line
VCC but not performed by the sub power line VCT. Therefore, the
voltage of the sub power line VCT can be raised even by a diode
having a low current supply ability.
137. Since the internal circuit is placed in an activated state
when each switch MOSFET is in an on state upon power-up, the
subthreshold leakage current flows. Since the potential on the sub
power line VCT does not increase to VCC when the above-described
diode is used, it is possible to prevent the subthreshold leakage
current from occurring. A further effect can be obtained when
MOSFETs supplied with a substrate bias by using a substrate back
bias voltage generator, are used. In the MOSFETs to which the
substrate bias is applied, the threshold voltage of each MOSFET
becomes low and hence a large subthreshold leakage current flows
since the substrate back bias voltage generator does not generate a
sufficient substrate bias voltage upon power-up.
138. Circuits such as the above-described address buffer, etc.,
which are disconnected from the sub power line and the subground
line, and the above-described switch MOSFETs utilize high
threshold-voltage type MOSFETS to reduce the subthreshold leakage
current at the time that the switch MOSFETs are brought into the
off state. In the present invention, a method of forming MOSFETs
whose each channel length is made long using the dependence of the
threshold voltage of each MOSFET on its gate length, is used as a
method of forming the MOSFETs whose each threshold voltage is high.
Counter-doping to be described later is used to realize the
dependence of a desired threshold voltage on the gate length.
139. By realizing two or more types of threshold voltages using the
gate-length-dependence of the threshold voltage of each MOSFET, at
least two masks (for P and N channels) can be reduced and the
number of manufacturing process steps can be reduced as compared
with a method of realizing two or more kinds of threshold voltages
by making an ion-implantation division using conventional
photomasks.
140. FIGS. 16A and 16B are respectively schematic structural
sectional views showing examples of MOSFETs employed in a
semiconductor integrated circuit device according to the present
invention. FIG. 16A shows a normally-used MOSFET and FIG. 16B
illustrates a counter-doped MOSFET. The term counter-dope is a
means for realizing a MOSFET, which is different from the normal
MOSFET shown in FIG. 16A, excellent in short channel characteristic
and has a low threshold voltage, by introducing the same conductive
impurities as those contained in the source and drain of a
substrate surface into the MOSFET in small concentrations.
141. FIG. 17 is a characteristic diagram illustrating the
relationship between a gate length of an N channel MOSFET and its
threshold voltage. In the same drawing, symbol .largecircle.
indicates typical values of the MOSFET shown in FIG. 16A having the
conventional structure. Symbol .circle-solid. indicates typical
values of a counter-doped transistor. These values become
variations lying between upper and lower broken lines and between
upper and lower solid lines, for example, due to process
variations.
142. The allowable minimum value of each of the threshold voltages
of the MOSFETs whose gate lengths are short, which constitute each
internal circuit connected to the sub power line and the subground
line as described above, is determined according to the
subthreshold leakage current of each internal circuit at the time
that each switch MOSFET is held on. In the example of the dynamic
RAM shown in FIGS. 1 and 2, the allowable minimum value is about 0V
at room temperature because the sum of the gate widths of the
MOSFETs is about 700,000 .mu.m. When the worst value of the
threshold voltage, which is attributed to the process variations,
is set to 0V, the gate length of the MOSFET becomes 0.45 .mu.m and
the threshold voltage thereof becomes 0.29V (both are typical
values), for example, when the MOSFET having the conventional
structure is used. On the other hand, when the counter-doped MOSFET
is used, the gate length thereof becomes 0.45 .mu.m and the
threshold voltage thereof becomes 0.2V (both are typical
values).
143. At this time, the threshold voltage causes variations within B
indicated by a thick-line frame in FIG. 17 due to the process
variations in the case of the MOSFET having the conventional
structure. When the counter-doped MOSFET is used, the threshold
voltage thereof causes variations within A indicates by a
thick-line frame in FIG. 17 due to the process variations. Since
the variations in threshold voltage due to the variations in gate
length are reduced as a result of the suppression or control of a
short channel effect by the counter-dope, the typical threshold
voltages can be reduced, so that a logic circuit or the like can be
designed using higher-speed MOSFETs.
144. The minimum value of each of the threshold voltages of the
MOSFETs constituting the circuits disconnected from the sub power
line VCT and the subground line VST are also determined depending
on their subthreshold leakage currents. In the dynamic RAM shown in
FIGS. 1 and 2, the minimum value becomes about 0.2V at room
temperature. Thus, when the MOSFET having the conventional
structure is used in the same manner as described above, the gate
length thereof becomes 0.53 .mu.m and the threshold voltage becomes
0.42V (both are typical values), whereas when the counter-doped
MOSFET is used, the gate length thereof becomes 0.55 .mu.m and the
threshold voltage becomes 0.30V (both are typical values). The
above-described threshold voltages respectively cause variations
within D and C indicated by thick-line frames in FIG. 17 due to the
process variations. Even in the case of the MOSFETs referred to
above, high-speed MOSFETs, which are low in threshold voltage due
to the counter dope, can be utilized.
145. When the threshold voltages of the MOSFETs for providing
connections between the sub power line and the power line and
between the subground line and the ground line vary, subthreshold
leakage currents at their turning off greatly vary. Thus, MOSFETs
in which variations in their threshold voltages due to the process
variations are as small as possible and their gate lengths are
long, are used as these switch MOSFETs. To cope with this, the gate
length at which a curve indicative of the dependence of the
threshold voltage on the gate length is substantially flat, may be
set to a range from 0.7 .mu.m to 0.8 .mu.m or more in FIG. 17.
146. When the gate length of the switch MOSFET is made long, its on
resistance is reduced. It is therefore necessary to increase the
gate width thereof. Thus, it must be noted that the peak current at
turning on of the switch MOSFET also increases. Namely, if the
gate-length dependence of the threshold voltage is low, then the
gate length of the switch MOSFET may be set so as to become as
short as possible. Thus, in the present embodiment, when the MOSFET
having the conventional structure is used, the gate length thereof
becomes 0.8 .mu.m and the threshold voltage thereof becomes 0.5V
(both are typical values). Further, when the counter-doped MOSFET
is used, the gate length thereof becomes 0.7 .mu.m and the
threshold voltage thereof becomes 0.35 V (both are typical values).
The threshold voltages respectively vary within F and E ranges
indicated by thick-line frames in FIG. 17.
147. Although the MOSFET of the conventional structure rather than
the counter-doped MOSFET bring about an advantageous effect because
of its high threshold voltage from the viewpoint of the reduction
in leakage current, the leakage current of the switch MOSFET is
very small as compared with that of each circuit disconnected from
the sub power line and the subground line referred to above.
Therefore, this effect can be neglected. Since a MOSFET having a
short channel, a low threshold voltage and high drive ability can
be used for the switch MOSFET as a result of the control on the
short channel effect by the counter dope, the gate width of the
present switch MOSFET can be made smaller than that of the MOSFET
having the conventional structure and the peak current can be
reduced.
148. FIG. 18 is a characteristic diagram for describing the present
invention. In the same drawing, the vertical axis indicates a peak
current and an increase in RAS access time tARAS and the horizontal
axis indicates a time difference per step of a control signal for
each switch MOSFET. The result of a computer simulation using an
actual dynamic RAM is illustrated in the drawing. A position or
point where the time difference per step of the control signal for
each switch MOSFET is 0, indicates that all the switch MOSFETs are
simultaneously turned on.
149. The switch MOSFETs are divided into five. The gate width of
each P channel MOSFET is 3000 .mu.m and the gate width of each N
channel MOSFET is 900 .mu.m as shown in the drawing. It is
understood from the same drawing that in order to reduce the peak
current to 300 mA or less, for example, the switch MOSFETs are
divided into plural form and a time difference of 250 psec may be
provided between their control signals. It is understood that a
delay (i.e., an increase in tRAS) in circuit operation at this time
is controlled to 200 psec. Since the tRAS falls within a range from
40 ns to 50 ns, the delay in circuit operation due to the division
of the switch MOSFETs in the plural form and the rise in the time
difference is nothing but 0.5% thereof. It is thus understood from
the invention of the present application that the peak current can
be controlled while maintaining the speeding up of the circuit
operation.
150. FIG. 19 is a circuit diagram showing another embodiment of the
present invention. A circuit formed by connecting inverters in
cascade form is shown in the same drawing as an internal circuit by
way of illustrative example. The first-stage inverter is supplied
with a low-level input signal upon deactivation. The output of the
inverter is brought to a high level (H) and the outputs of the
inverters subsequent to this inverter are successively brought to a
low level (L), a high level and a low level. Therefore, the
inverters associated with the high levels of the outputs are
electrically connected to a subground line VST and the inverters
associated with the low levels of the outputs are electrically
connected to the sub power line VCT.
151. A P channel switch MOSFET MC is provided between the sub power
line VCT and a power line VCC and is switch-controlled by a control
signal .o slashed.B. An N channel switch MOSFET MS is provided
between the subground line VST and a ground line VSS and is
switch-controlled by a control signal .o slashed.T. In the present
embodiment, a short-circuit N channel MOSFET MT is provided between
the sub power line VCT and the subground line VST. The MOSFET MT is
switch-controlled by a control signal PT.
152. FIG. 20 is a timing chart for describing the operation of the
embodiment described above. When the internal circuit changes from
an active state to an inactive state, the control signal .o
slashed.B changes from a low to a high levels and the control
signal .o slashed.T changes from a high to a low levels. As a
result, the switch MOSFETs MC and MS are shifted from an on state
to an off state. In synchronism with this, the control signal PT is
temporarily rendered high in level so that the switch MOSFET MT is
turned on. Consequently, the sub power line VCT and the sub ground
line VST are short-circuited so as to reach an intermediate
potential, whereby power consumption can be reduced.
153. When the short-circuit MOSFET MT is not provided, the charge
stored in the parasitic capacitance of the sub power line VCT is
discharged through the turned-on N channel MOSFET of the inverter
whose on de-activation output is low in level, when the sub power
line VCT and the subground VST are shifted from an on-activation
voltage to an on-deactivation voltage. Conversely, the parasitic
capacitance of the subground line VST is charged through the
turned-on P channel MOSFET of the inverter whose on-deactivation
output is high in level. The discharge and charge currents are used
as currents to be used up. On the other hand, when the
short-circuit MOSFET MT is provided, the sub power line VCT and the
subground line VST can be varied to a predetermined potential
required to reduce the subthreshold leakage current, with a charged
share between their parasitic capacitances, in other words, without
making special current consumption.
154. A pulse width of the control signal PT for switch-controlling
the short-circuit MOSFET MT is set so that the voltage on each of
the sub power line VCT and the subground line VST reaches just the
on-deactivation voltage. Described specifically, when the parasitic
capacitance is 200 pF, the pulse width of the control signal and
the gate width of the switch MOSFET may be 100 ns and 10 .mu.m
respectively.
155. When the short-circuit MOSFET is not provided, voltage
transitions of the sub power line VCT and the subground line VST
need 100 .mu.s because of the occurrence of charge and discharge
due to the subthreshold leakage current. On the other hand, when
the short-circuit MOSFET MT is used, the voltage transition can be
completed in 100 ns.
156. In the above-described embodiment, in order to reduce the
subthreshold leakage current by the threshold-voltage reduction,
the logic gates and the inverters whose on-deactivation outputs are
high in level, are electrically connected to the power line VCC and
the ground sides are electrically connected to the subground line
VST. In this condition, the switch MOSFETs connected to such a
subground line VST are turned off. Further, the logic gates and the
inverters whose on-deactivation outputs are low in level, are
electrically connected to the ground line VSS and the power sides
are electrically connected to the sub power line VCT. In this
condition, the switch MOSFETs connected to such a sub power line
VCT are turned off.
157. The above-described embodiment is greatly characterized in
that when the above-described switches are changed from the on
state to the off state, they are divided in plural form and
supplied with the delayed signals so as to operate in the domino or
stepwise system in order to reduce the drive currents of the switch
MOSFETs each having the relatively large gate capacitance to obtain
the desired on resistance and reduce the peak of the source current
with the turning on of each switch MOSFET. This means that each
switch MOSFET provides the reduction in subthreshold leakage
current by the sub power line and the subground line and has the
potential for being used as a general power switch. Namely, a large
number of function blocks can be designed so as to be mounted on
one semiconductor substrate with developments in semiconductor
technology. One digital information processing system can be
realized by itself. This tendency will be expected to greatly
increase in the near future.
158. In this case, the large number of function blocks do not need
to be placed in an operating state at all times. When, at this
time, function blocks free of the need to operate exist during a
period in which a predetermined data process is being carried out,
it is sufficient significant that all the currents to be used up
are cut off inclusive of the leakage current such as the
subthreshold leakage current. In such a case, large noise is not
allowed to be produced in a power line when a power switch is in an
on or off state if viewed from a function block placed in an
operating state. As seen from such a viewpoint, a large problem
arises when a power supply for other non-operated function blocks
is turned off or turned on during a period in which specific
function blocks placed on one semiconductor integrated circuit
device are in operation.
159. However, the switch MOSFETs employed in the previous
embodiment can be set to the on or off state not so as to cause the
peak current referred to above. Namely, the switch MOSFETs
according to the present invention can be used as switch MOSFETs
for selectively supplying power to each circuit block formed in the
semiconductor integrated circuit device.
160. FIG. 21 is a system configurational view showing one
embodiment of a one-chip microcomputer to which the present
invention is applied. In a microcomputer MCU employed in the
present embodiment, a central processing unit CPU of a stored
program system, which includes an arithmetic and logic unit ALU, is
used as a central component of the microcomputer MCU. A multiplexer
MULT, a memory management unit MMU and a cache memory CACHE are
electrically connected to the central processing unit CPU through a
system bus S-BUS. An address conversion table TLB is connected to
the memory management unit MMU. Further, on the other hand, the
memory management unit MMU and the cache memory CACHE are coupled
to a cache bus C-BUS. A bus controller BSC is electrically coupled
to the cache bus C-BUS.
161. On the other hand, the bus controller BSC is connected to a
peripheral bus P-BUS and an external bus E-BUS. Of these, connected
to the peripheral bus P-BUS are peripheral device controllers such
as a refresh controller REFC, a direct memory access controller
DMAC, a timer circuit TIM, a serial communication interface SCI, a
digital/analog converter D/A, an analog/digital converter A/D,
etc., and a clock controller CKC. An external interface EXIF is
coupled to the external bus E-BUS.
162. On the other hand, the refresh controller REFC, the direct
memory access controller DMAC, the timer circuit TIM, the serial
communication interface SCI, the digital/analog converter D/A and
the analog/digital converter A/D are electrically connected to an
interrupt controller INTC. The interrupt controller INTC is
electrically coupled to the central processing unit CPU through an
interrupt request signal IRQ. A clock pulse generator CPG and a
plurality of clock switches to be described later are electrically
coupled to the clock controller CKC. A portable information
terminal PDA, an external memory, etc. are electrically connected
to the external interface EXIF.
163. Also connected to the interrupt controller INTC is a real time
clock circuit RTC. The real time clock circuit RTC is supplied with
a clock signal having a stable frequency, which does not vary its
frequency. Thus, the real time clock circuit RTC performs accurate
time control.
164. The real time clock circuit RTC outputs an interrupt signal
RTCI to the interrupt controller INTC at predetermined time
intervals so as to generate an interrupt request to the central
processing unit CPU at predetermined time intervals. The interrupt
controller INTC is also supplied with an external interrupt signal
OINT through a predetermined external terminal. Thus, an external
device is logically coupled to the central processing unit CPU
through the interrupt controller INTC.
165. In the present embodiment, the clock controller CKC includes a
plurality of control registers. The central processing unit CPU
writes predetermined control data into these control registers
through the peripheral bus P-BUS or reads it therefrom through the
peripheral bus P-BUS. The clock controller CKC selectively forms a
control signal PLLON, PLLSB, C0SEL1, C0SEL2 or CKEN or the like in
accordance with the control data set to the respective control
registers and selectively forms a plurality of module enable
signals ADEN or the like. Incidentally, these control signals and
the module enable signals are indicated by one interconnection or
wire to avoid drawings from being cumbersome. It is needless to say
that the clock controller CKC may be electrically connected to the
system bus S-BUS in place of the peripheral bus P-BUS.
166. Now, the central processing unit CPU is activated in
synchronism with a system clock signal CK1 supplied from the clock
pulse generator CPG to thereby execute a predetermined arithmetic
process in accordance with a control program read from the cache
memory CACHE, for example and controls and supervises respective
portions of a microprocessor MPU. At this time, the arithmetic and
logic unit ALU executes arithmetic and logical operations as needed
and the multiplier MULT executes a multiplication process. Further,
the memory management unit MMU converts a logical address outputted
from the central processing unit CPU into a physical address using
an address conversion table TLB upon memory access.
167. The cache memory CACHE is composed of a quick accessible
memory. The cache memory CACHE reads and holds programs or data or
the like stored in an external memory provided outside the
microprocessor MPU in predetermined block units and contributes to
a high-speed operation of the central processing unit CPU. The
central processing unit CPU, the multiplier MULT, the memory
management unit MMU and the cache memory CACHE are activated in
accordance with a system clock signal CK1 having a relatively high
frequency.
168. The bus controller BSC manages access of the respective
peripheral device controllers connected to the peripheral bus P-BUS
to the bus and controls the operation of each of these peripheral
device controllers. On the other hand, the refresh controller RFC
corresponding to one of the peripheral device controllers controls
the refresh operation of the dynamic RAM (random access memory)
provided as an external memory, and the direct memory access
controller DMAC supports the high-speed transfer of data between
the external memory and the cache memory CACHE or the like, for
example.
169. The timer circuit TIM supports the management of time
necessary for the central processing unit CPU and the serial
communication interface SCI supports the transfer of serial data
between the serial communication interface SCI and an external
communication control device or the like. Further, the
analog/digital converter A/D converts an analog signal inputted
from an external sensor or the like into a digital signal
represented in predetermined bits. Reversely, the digital/analog
converter D/A converts a digital signal outputted from the central
processing unit CPU into a predetermined analog signal and outputs
it to the outside.
170. The interrupt controller INTC alternatively receives interrupt
requests sent from the respective peripheral device controllers in
a predetermined priority order and transfers the selected one to
the central processing unit CPU as an interrupt request signal IRQ.
The external interface EXIF controls and manages the transfer of
data between the respective portions of the microcomputer MCU and
the portable information terminal PDA and the external memory or
the like provided at its outside and interfaces between these
external devices and the microcomputer MCU. The bus controller BSC
and the various peripheral device controllers are activated in
synchronism with a system clock signal cks having a relatively low
frequency.
171. In the present embodiment, the respective portions that
constitute the microcomputer MCU, are formed into a single
semiconductor integrated circuit device LSI under predetermined
layout conditions. However, these portions thereof are designed in
modules as they say and are selectively formed based on customer or
user specifications. The microcomputer MCU employed in the present
embodiment are provided in association with each of the plurality
of modules referred to above and has a plurality of power switch
MOSFETs selectively turned on in response to effective levels of
their corresponding module enable signals. Such switch MOSFETS are
turned off upon deactivation thereof so that current consumption
thereat is substantially brought to zero.
172. The digital/analog converter D/A and the analog/digital
converter A/D have linear circuit portions respectively. Even if
they are in a non-operating state, relatively large current
consumption is done. There may be often cases where they do not
need to operate at all times. Thus, the current consumption at the
time of the deactivation of the power switch MOSFETs can be brought
to zero by interrupting the operating current with the power switch
MOSFETs referred to above. Even in the case of other digital
circuits which cause leakage current such as subthreshold leakage
current or the like, its power cutoff is made great meaningful.
173. In a system which has been brought into high integration and
speedup and rendered low in voltage using MOSFETs each brought to a
low threshold voltage, the subthreshold leakage current presents a
problem as in the dynamic RAM. It is therefore needless to say that
the portions in the respective function blocks, whose
on-deactivation levels are fixed, are electrically connected to the
sub power line and the subground line and the switch MOSFETs
connected thereto may be turned off so as to prevent the occurrence
of such leakage current.
174. Operations and effects obtained from the above-described
embodiments are as follows:
175. (1) A plurality of switch MOSFETs are provided in parallel
form between internal power lines for a plurality of circuit blocks
divided for every functions and respectively set so as to perform
circuit operations in response to operation control signals and a
power line for delivering an operating voltage supplied from an
external terminal. These switch MOSFETs are stepwise turned on in
response to control signals produced by successively delaying the
operation control signals, so as to provide the supply of operating
voltages. As a result, an advantageous effect can be brought about
in that current consumption at the time of deactivation
(non-operation) of such function blocks or modules can be brought
to zero while preventing the occurrence of a peak current at the
time of the on/off state of each of the switch MOSFETs.
176. (2) A dynamic RAM is divided into an input circuit block
responsive to an input signal supplied from an external terminal,
inclusive of an operation start signal, an internal circuit block
activated in response to the signal inputted from the input circuit
block, and an output circuit block for outputting a signal
outputted from the internal circuit block to an external terminal.
A plurality of switch MOSFETs are provided in parallel form between
a power line for applying an operating voltage supplied from an
external terminal and each internal power line for a first circuit
portion in the internal circuit block, which does not need a
storage operation upon its non-operating state. Further, the switch
MOSFETs are stepwise turned on in response to controls signals
produced by delaying a start signal supplied through the input
circuit block in turn, so as to perform the supply of each
operating voltage. As a result, an advantageous effect can be
brought about in that the occurrence of the peak current at the
time of the on/off state is avoided without sacrificing an
operating speed and current consumption at the time of the
deactivation (non-operation) of such each function block can be
brought to zero.
177. (3) An advantageous effect can be brought about in that
desired circuit functions can be maintained without sacrificing an
operating speed by regularly supplying an operating voltage to each
of the input circuit block, a second circuit portion of the
internal circuit block and the output circuit block from the power
line.
178. (4) The internal circuit block is composed of CMOS circuits. A
first circuit portion of the CMOS circuits includes a circuit whose
output signal is high in level when placed in a non-operating
state, which is electrically connected to a first internal power
line corresponding to a ground voltage, and a circuit whose output
signal is low in level, which is electrically connected to a second
internal power line associated with a source potential. Internal
power switch circuits each composed of a plurality of switch
MOSFETs stepwise turned on in response to control signals formed by
delaying the start signal in turn, are respectively provided
between the first internal power line and a power line and between
the second internal power line and a ground line. As a result, an
advantageous effect can be brought about in that the subthreshold
leakage current can be reduced while maintaining an operating speed
and controlling a peak current.
179. (5) An advantageous effect can be obtained in that threshold
voltages of P channel MOSFETs and N channel MOSFETs that constitute
each CMOS circuit, can be lowered so as to reduce the subthreshold
leakage current while maintaining a voltage reduction and an
operation speedup.
180. (6) The input circuit block and the output circuit block are
respectively composed of CMOS circuits. P channel MOSFETs and N
channel MOSFETs constituting each CMOS circuit, and MOSFETs
constituting each internal power switch circuit referred to above,
are set so as to be relatively large in threshold voltage as
compared with the P channel MOSFETs and N channel MOSFETs of each
CMOS circuit constituting the internal circuit block. As a result,
an advantageous effect can be obtained in that a high-speed
operation can be maintained while suppressing the subthreshold
leakage current.
181. (7) The above-described threshold voltages are respectively
set according to a MOSFET channel-length dependence. Further, each
of counter-doped layers, which is of the conductive type similar to
the source and drain of each MOSFET and contains a low
concentration of impurities, is formed on the surface of each
channel region. Thus, an advantageous effect can be brought about
in that a high-speed operation and a reduction in peak current can
be achieved.
182. (8) The internal circuit block is divided into a plurality of
blocks according to its operation sequence. Further, the start
signal is delayed in synchronism with the operation sequence so as
to be supplied to each internal power switch circuit. Thus, an
advantageous effect can be brought about in that the current at the
time of on/off-changeover of each power switch is further dispersed
so that the peak current can be reduced.
183. (9) The input circuit block corresponds to an input circuit
supplied with an address signal and a control signal in an address
multiplex system. The internal circuit block comprises a memory
array using dynamic memory cells, an X-system address select
circuit thereof, and a Y-system address select circuit. The output
circuit block is divided into those such as a data input/output
circuit according to the operation sequence of the dynamic RAM and
the power switch MOSFETs are successively controlled. As a result,
an advantageous effect can be obtained in that the peak current can
be reasonably reduced while maintaining the operating speed.
184. (10) The internal power switch circuit provided in the
Y-system address select circuit is composed of one or a plurality
of MOSFETs set so as to provide the flow of an operating current
necessary for the operation of such a circuit. A change in control
signal supplied to the gate of each MOSFET is made slow using the
fact that the time required to reach the start of its operation is
long. As a result, an advantageous effect can be obtained that the
peak current can be reduced in a simple structure.
185. (11) A short-circuit switch MOSFET temporarily turned on when
internal power switch MOSFETs associated with the first internal
power line and the second internal power line are turned off, is
provided between the first internal power line and the second
internal power line. Thus, since a charge share between the first
and second internal power lines allows high-speed determination of
voltages at their deactivation, an advantageous effect can be
brought about in that a further reduction in subthreshold leakage
current can be achieved.
186. FIG. 22 is a circuit diagram illustrating a portion of the
circuit shown in FIG. 14 by MOSFETs. CMOS inverters INV1, INV2,
INV3, INV4, INV5, a P channel MOSFET QP60, a N channel MOSFET QN60,
a SWC and an INT1 shown in FIG. 22 respectively correspond to the
CMOS inverters INV1, INV2, INV3, INV4, INV5, the P channel MOSFET
Q60, the N channel MOSFET QN60, the SWC and the INT1 shown in FIG.
14.
187. A subthreshold leakage current can be reduced by setting the
threshold value of a MOSFET QP60 constituting an internal power
switch circuit provided between a sub power line VCT and a power
line VCC so as to be relatively larger than the threshold values of
a P channel MOSFET QP62 and an N channel MOSFET QN62 constituting
the INV4 and making a channel length long using the dependence of a
threshold value on a gate length.
188. The CMOS inverter INV2 shown in FIG. 22 is a circuit for
controlling the internal power switch circuit QP60 and cannot be
connected to the sub power line VCT and a subground line VST.
189. Therefore, a channel length is made long using a gate-length
dependence and the threshold value of the CMOS inverter INV2 is set
so as to relatively larger than the threshold values of the P
channel MOSFET QP62 and the N channel MOSFET QN62 constituting the
INV4. As a result, a subthreshold leakage current can be
reduced.
190. The counter dope described with reference to FIG. 16B is used
for the MOSFETs that constitute the CMOS inverters INV1, INV2,
INV3, INV4 and INV5, for example. For example, a channel length of
an N channel MOSFET QN61, which constitutes the CMOS inverter INV2,
is made long using the dependence of its threshold voltage on the
gate length thereof so as to reduce the subthreshold leakage
current. However, the threshold voltage of the N channel MOSFET
QN61 will cause process variations.
191. Therefore, the counter dope described with reference to FIG.
16B is used to reduce variations in the threshold voltage due to
the process variations of the N channel MOSFET QN61. Thus, the
threshold voltage of the N channel MOSFET QN61 can be reduced and
the N channel MOSFET QN61 that forms the N channel MOSFET QN61, can
be activated at high speed.
192. The inventions made by the present inventors, have been
specifically described based on the embodiments. However, the
inventions of the present application are not necessarily limited
to the above-described embodiments. It is needless to say that
various changes can be made thereto without departing the gist of
the present invention. A method of forming MOSFETs each having such
a threshold voltage as to substantially avoid a problem offered by
the subthreshold leakage current as in the case of, for example,
the input portion, the output circuit and the power switch MOSFETs,
can take various forms such as the utilization of the
channel-length dependence, an increase in the density of impurities
at a channel portion, control on gate insulating films or the
supply of a deep back bias to a substrate with the MOSFETs formed
therein, etc.
193. In the internal circuit employed in the dynamic RAM, the
operation mode is set by the control signal supplied from the
external terminal. However, the operation mode may be determined by
a command as in a synchronous dynamic RAM. In this case, the switch
MOSFETs may be controlled by a control timing circuit supplied with
a command data output. In a static RAM, each switch MOSFET may be
controlled by a chip enable signal. However, since a circuit
operating mode exists in a static RAM for a cache memory even if an
external input signal is not varied, a switch MOS control circuit
may also perform switch control based on a mode decision signal or
the like correspondingly. The present invention is applicable to
various semiconductor integrated circuit devices each composed of
MOSFETs as well as to the memory circuit and the one chip
microcomputer referred to above.
194. Advantageous effects obtained by a typical one of the
inventions disclosed in the present application will be described
in brief as follows: A plurality of switch MOSFETs are provided in
parallel form between internal power lines for a plurality of
circuit blocks divided for every functions and respectively set so
as to perform circuit operations in response to operation control
signals and a power line for delivering an operating voltage
supplied from an external terminal. These switch MOSFETs are
stepwise turned on in response to control signals produced by
successively delaying the operation control signals, so as to
provide the supply of operating voltages. As a result, current
consumption at the time of deactivation (non-operation) of such
function blocks or modules can be brought to zero while preventing
the occurrence of a peak current at the time of the on/off state of
each switch MOSFET.
195. A dynamic RAM is divided into an input circuit block
responsive to an input signal supplied from an external terminal,
inclusive of an operation start signal, an internal circuit block
activated in response to the signal inputted from the input circuit
block, and an output circuit block for outputting a signal
outputted from the internal circuit block to an external terminal.
A plurality of switch MOSFETs are provided in parallel form between
a power line for applying an operating voltage supplied from an
external terminal and an internal power line for a first circuit
portion in the internal circuit block, which does not need a
storage operation upon its non-operating state. Further, the switch
MOSFETs are turned on in a domino mode in response to controls
signals produced by delaying a start signal in turn, so as to
perform the supply of each operating voltage. As a result, the
occurrence of the peak current at the time of the on/off state of
each MOSFET can be avoided without sacrificing an operating speed
and current consumption at the time of the deactivation
(non-operation) of such each function block can be brought to
zero.
196. Having now fully described the invention, it will be apparent
to those skilled in the art that many changes and modifications can
be made without departing from the spirit or scope of the invention
as set forth herein.
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