Patent | Date |
---|
Diode Structure And Method Of Fabricating The Same App 20210376186 - LO; Kuo-Feng ;   et al. | 2021-12-02 |
Etch stop liner for contact punch through mitigation in SOI substrate Grant 9,899,257 - Wallner , et al. February 20, 2 | 2018-02-20 |
Methods for providing variable feature widths in a self-aligned spacer-mask patterning process Grant 9,887,135 - Wallner , et al. February 6, 2 | 2018-02-06 |
Semiconductor device and method of making same Grant 9,070,759 - Han , et al. June 30, 2 | 2015-06-30 |
Semiconductor device manufacturing methods Grant 8,697,339 - Zhuang , et al. April 15, 2 | 2014-04-15 |
Metrology systems and methods for lithography processes Grant 8,394,574 - Sarma , et al. March 12, 2 | 2013-03-12 |
Semiconductor devices and methods of manufacturing thereof Grant 8,349,528 - Lipinski , et al. January 8, 2 | 2013-01-08 |
Semiconductor inter-field dose correction Grant 8,219,938 - Lee , et al. July 10, 2 | 2012-07-10 |
Metrology Systems and Methods for Lithography Processes App 20120013884 - Sarma; Chandrasekhar ;   et al. | 2012-01-19 |
Lithography masks and methods of manufacture thereof Grant 8,071,261 - Gutmann , et al. December 6, 2 | 2011-12-06 |
Metrology systems and methods for lithography processes Grant 8,067,135 - Sarma , et al. November 29, 2 | 2011-11-29 |
Semiconductor device having a polysilicon layer with a non-constant doping profile Grant 8,063,406 - Zhuang , et al. November 22, 2 | 2011-11-22 |
Integrated circuits and methods of design and manufacture thereof Grant 8,039,203 - Wang , et al. October 18, 2 | 2011-10-18 |
Semiconductor Devices and Methods of Manufacturing Thereof App 20110250530 - Lipinski; Matthias ;   et al. | 2011-10-13 |
Semiconductor devices and methods of manufacturing thereof Grant 8,007,985 - Lipinski , et al. August 30, 2 | 2011-08-30 |
Semiconductor Device Manufacturing Methods App 20110183266 - Zhuang; Haoren ;   et al. | 2011-07-28 |
Semiconductor Inter-field Dose Correction App 20110093823 - Lee; Hyung-Rae ;   et al. | 2011-04-21 |
Method for Manufacturing a Semiconductor Device Having Doped and Undoped Polysilicon Layers App 20110031563 - Zhuang; Haoren ;   et al. | 2011-02-10 |
Method for manufacturing a semiconductor device having doped and undoped polysilicon layers Grant 7,842,579 - Zhuang , et al. November 30, 2 | 2010-11-30 |
Metrology Systems and Methods for Lithography Processes App 20100283052 - Sarma; Chandrasekhar ;   et al. | 2010-11-11 |
Metrology systems and methods for lithography processes Grant 7,794,903 - Sarma , et al. September 14, 2 | 2010-09-14 |
Semiconductor device manufacturing methods Grant 7,759,235 - Zhuang , et al. July 20, 2 | 2010-07-20 |
Feature Dimension Control in a Manufacturing Process App 20100120177 - Zhuang; Haoren ;   et al. | 2010-05-13 |
Feature dimension control in a manufacturing process Grant 7,674,350 - Zhuang , et al. March 9, 2 | 2010-03-09 |
Method of producing non volatile memory device Grant 7,645,663 - Shum , et al. January 12, 2 | 2010-01-12 |
Feature patterning methods Grant 7,598,174 - Zhuang October 6, 2 | 2009-10-06 |
Methods of fabricating integrated circuit transistors by simultaneously removing a photoresist layer and a carbon-containing layer on different active areas Grant 7,541,234 - Chang , et al. June 2, 2 | 2009-06-02 |
Methods of forming mask patterns on semiconductor wafers that compensate for nonuniform center-to-edge etch rates during photolithographic processing Grant 7,541,290 - Chang , et al. June 2, 2 | 2009-06-02 |
Integrated Circuits and Methods of Design and Manufacture Thereof App 20090081563 - Wang; Helen ;   et al. | 2009-03-26 |
Lithography Masks and Methods of Manufacture Thereof App 20090023078 - Gutmann; Alois ;   et al. | 2009-01-22 |
Method of Producing Non Volatile Memory Device App 20090023259 - Shum; Danny Pak-Chum ;   et al. | 2009-01-22 |
Semiconductor device manufacturing methods App 20080305623 - Zhuang; Haoren ;   et al. | 2008-12-11 |
Semiconductor device manufacturing methods App 20080286698 - Zhuang; Haoren ;   et al. | 2008-11-20 |
Methods of Forming Mask Patterns on Semiconductor Wafers that Compensate for Nonuniform Center-to-Edge Etch Rates During Photolithographic Processing App 20080220609 - Chang; Chong Kwang ;   et al. | 2008-09-11 |
Feature Dimension Control in a Manufacturing Process App 20080176344 - Zhuang; Haoren ;   et al. | 2008-07-24 |
Semiconductor Device with Pre-Anneal Sandwich Gate Structure, and Method of Manufacturing App 20080173958 - Zhuang; Haoren ;   et al. | 2008-07-24 |
Semiconductor device and method of making same App 20080076214 - Han; Jin-Ping ;   et al. | 2008-03-27 |
Metrology systems and methods for lithography processes App 20080044741 - Sarma; Chandrasekhar ;   et al. | 2008-02-21 |
Method for forming ferrocapacitors and FeRAM devices Grant 7,316,980 - Zhuang , et al. January 8, 2 | 2008-01-08 |
Process control systems and methods App 20070239305 - Zhuang; Haoren ;   et al. | 2007-10-11 |
Method for fabricating a semiconductor device with a high-K dielectric App 20070190795 - Zhuang; Haoren ;   et al. | 2007-08-16 |
Semiconductor devices and methods of manufacturing thereof App 20070178388 - Lipinski; Matthias ;   et al. | 2007-08-02 |
Methods of fabricating integrated circuit transistors by simultaneously removing a photoresist layer and a carbon-containing layer on different active areas App 20070099126 - Chang; Chong Kwang ;   et al. | 2007-05-03 |
Method for manufacturing semiconductor device Grant 7,115,522 - Tomioka , et al. October 3, 2 | 2006-10-03 |
Method of etching ferroelectric devices Grant 7,098,142 - Egger , et al. August 29, 2 | 2006-08-29 |
Device for inhibiting hydrogen damage in ferroelectric capacitor devices Grant 7,071,506 - Moon , et al. July 4, 2 | 2006-07-04 |
Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing Grant 7,045,837 - Egger , et al. May 16, 2 | 2006-05-16 |
Device and a method for forming a capacitor device Grant 7,041,551 - Zhuang , et al. May 9, 2 | 2006-05-09 |
Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing Grant 7,042,705 - Zhuang , et al. May 9, 2 | 2006-05-09 |
Semiconductor device App 20060071258 - Tomioka; Kazuhiro ;   et al. | 2006-04-06 |
Fence-free etching of iridium barrier having a steep taper angle Grant 7,015,049 - Egger , et al. March 21, 2 | 2006-03-21 |
Method for producing a ferroelectric capacitor that includes etching with hardmasks Grant 7,001,781 - Lian , et al. February 21, 2 | 2006-02-21 |
Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the method Grant 7,001,780 - Zhuang , et al. February 21, 2 | 2006-02-21 |
Method for manufacturing semiconductor device App 20060009040 - Tomioka; Kazuhiro ;   et al. | 2006-01-12 |
Method for forming a ferroelectric capacitor device Grant 6,924,156 - Zhuang , et al. August 2, 2 | 2005-08-02 |
Method for producing a hard mask in a capacitor device and a hard mask for use in a capacitor device App 20050130076 - Zhuang, Haoren | 2005-06-16 |
Avoiding shorting in capacitors Grant 6,897,501 - Zhuang , et al. May 24, 2 | 2005-05-24 |
Method for forming ferrocapacitors and FeRAM devices App 20050084984 - Zhuang, Haoren ;   et al. | 2005-04-21 |
Method for forming ferrocapacitors and FeRAM devices App 20050074979 - Zhuang, Haoren ;   et al. | 2005-04-07 |
Device and method for forming a contact to a top electrode in ferroelectric capacitor devices App 20050070030 - Gernhardt, Stefan ;   et al. | 2005-03-31 |
Device and a method for forming a ferroelectric capacitor device App 20050067643 - Zhuang, Haoren ;   et al. | 2005-03-31 |
Device and a method for forming a capacitor device App 20050067644 - Zhuang, Haoren ;   et al. | 2005-03-31 |
Method for producing a ferroelectric capacitor and a ferroelectric capacitor device App 20050067649 - Lian, Jenny ;   et al. | 2005-03-31 |
Fabrication of a FeRAM capacitor using a noble metal hardmask Grant 6,867,053 - Egger , et al. March 15, 2 | 2005-03-15 |
Device and method for inhibiting hydrogen damage in ferroelectric capacitor devices App 20050051819 - Moon, Bum-Ki ;   et al. | 2005-03-10 |
Fence-free Etching Of Iridium Barrier Having A Steep Taper Angle App 20050045937 - Egger, Ulrich ;   et al. | 2005-03-03 |
Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the method App 20050029563 - Zhuang, Haoren ;   et al. | 2005-02-10 |
Fabrication Of A Feram Capacitor Using A Noble Metal Hardmask App 20050023582 - Egger, Ulrich ;   et al. | 2005-02-03 |
Process for fabrication of ferroelectric devices with reduced hydrogen ion damage App 20040206993 - Hornik, Karl ;   et al. | 2004-10-21 |
Reduced Contamination Of Tools In Semiconductor Processing App 20040171252 - Zhuang, Haoren ;   et al. | 2004-09-02 |
Avoiding Shorting In Capacitors App 20040169211 - Zhuang, Haoren ;   et al. | 2004-09-02 |
Method for formation of hardmask elements during a semiconductor device fabrication process App 20040171274 - Zhuang, Haoren ;   et al. | 2004-09-02 |
Ferroelectric capacitor and process for its manufacture Grant 6,785,119 - Egger , et al. August 31, 2 | 2004-08-31 |
Method of etching ferroelectric devices App 20040164050 - Egger, Ulrich ;   et al. | 2004-08-26 |
Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing App 20040149477 - Zhuang, Haoren ;   et al. | 2004-08-05 |
Hardmask with high selectivity for Ir barriers for ferroelectic capacitor manufacturing App 20040150923 - Egger, Ulrich ;   et al. | 2004-08-05 |
Process for fabrication of a ferrocapacitor Grant 6,762,064 - Zhuang , et al. July 13, 2 | 2004-07-13 |
Ferroelectric capacitor and process for its manufacture App 20040105213 - Egger, Ulrich ;   et al. | 2004-06-03 |
Method of patterning capacitors and capacitors made thereby Grant 6,734,057 - Lian , et al. May 11, 2 | 2004-05-11 |
Method Of Patterning Capacitors And Capacitors Made Thereby App 20040063278 - Lian, Jenny ;   et al. | 2004-04-01 |