Patent | Date |
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Adaptive Baking Method App 20220074668 - WU; Tzung-Chen ;   et al. | 2022-03-10 |
Adaptive baking method Grant 11,204,200 - Wu , et al. December 21, 2 | 2021-12-21 |
System And Method For Supplying And Dispensing Bubble-free Photolithography Chemical Solutions App 20200124967 - Zhou; Wen-Zhan ;   et al. | 2020-04-23 |
System and method for supplying and dispensing bubble-free photolithography chemical solutions Grant 10,558,120 - Zhou , et al. Feb | 2020-02-11 |
Two-dimensional marks Grant 10,274,839 - Zhou , et al. | 2019-04-30 |
Adaptive Baking Method App 20180306514 - WU; Tzung-Chen ;   et al. | 2018-10-25 |
Adaptive baking system and method of using the same Grant 10,006,717 - Wu , et al. June 26, 2 | 2018-06-26 |
System And Method For Supplying And Dispensing Bubble-free Photolithography Chemical Solutions App 20180067395 - Zhou; Wen-Zhan ;   et al. | 2018-03-08 |
System and method for supplying and dispensing bubble-free photolithography chemical solutions Grant 9,817,315 - Zhou , et al. November 14, 2 | 2017-11-14 |
Method and apparatus for estimating focus and dose of an exposure process Grant 9,766,554 - Chen , et al. September 19, 2 | 2017-09-19 |
Hybrid focus-exposure matrix Grant 9,690,212 - Zhou , et al. June 27, 2 | 2017-06-27 |
Method And Apparatus For Estimating Focus And Dose Of An Exposure Process App 20160274456 - Chen; Yen-Liang ;   et al. | 2016-09-22 |
System And Method For Supplying And Dispensing Bubble-free Photolithography Chemical Solutions App 20150261089 - Zhou; Wen-Zhan ;   et al. | 2015-09-17 |
Adaptive Baking System And Method Of Using The Same App 20150253083 - WU; Tzung-Chen ;   et al. | 2015-09-10 |
Litho scanner alignment signal improvement Grant 9,034,720 - Liu , et al. May 19, 2 | 2015-05-19 |
Reliable interconnect for semiconductor device Grant 8,987,134 - Wang , et al. March 24, 2 | 2015-03-24 |
Two-Dimensional Marks App 20140253901 - Zhou; Wen-Zhan ;   et al. | 2014-09-11 |
Hybrid Focus-Exposure Matrix App 20140257761 - Zhou; Wen-Zhan ;   et al. | 2014-09-11 |
Spacer profile engineering using films with continuously increased etch rate from inner to outer surface Grant 8,828,858 - Rao , et al. September 9, 2 | 2014-09-09 |
Litho Scanner Alignment Signal Improvement App 20140050439 - LIU; Hui ;   et al. | 2014-02-20 |
Reliable Interconnect For Semiconductor Device App 20130328201 - WANG; Zhehui ;   et al. | 2013-12-12 |
Spacer Profile Engineering Using Films With Continuously Increased Etch Rate From Inner To Outer Surface App 20130187202 - Rao; Xuesong ;   et al. | 2013-07-25 |
Step-like spacer profile Grant 8,492,236 - Rao , et al. July 23, 2 | 2013-07-23 |
Step-like Spacer Profile App 20130181259 - Rao; Xuesong ;   et al. | 2013-07-18 |
Multi-variable regression for metrology Grant 7,966,142 - Zhou , et al. June 21, 2 | 2011-06-21 |
Multi-variable Regression For Metrology App 20090258445 - ZHOU; Wen Zhan ;   et al. | 2009-10-15 |
Method for detecting semiconductor manufacturing conditions Grant 7,553,678 - Zhou , et al. June 30, 2 | 2009-06-30 |
Reticle and optical proximity correction method Grant 7,527,900 - Zhou , et al. May 5, 2 | 2009-05-05 |
Method For Detecting Semiconductor Manufacturing Conditions App 20070220458 - Zhou; Wen-Zhan ;   et al. | 2007-09-20 |
Multi-zone Carrier Head For Chemical Mechanical Polishing And Cmp Method Thereof App 20070167110 - Tseng; Yu-Hsiang ;   et al. | 2007-07-19 |
Method for eliminating bridging defect in via first dual damascene process Grant 7,238,619 - Zhou , et al. July 3, 2 | 2007-07-03 |
Reticle And Optical Proximity Correction Method App 20070105023 - Zhou; Wen-Zhan ;   et al. | 2007-05-10 |
Method For Eliminating Bridging Defect In Via First Dual Damascene Process App 20070010092 - Zhou; Wen-Zhan ;   et al. | 2007-01-11 |
In-line focus monitor structure and method using top-down SEM Grant 6,777,145 - Zhou , et al. August 17, 2 | 2004-08-17 |
In-line focus monitor structure and method using top-down SEM App 20030224252 - Zhou, Wen-Zhan ;   et al. | 2003-12-04 |