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ZHOU; Wen-Zhan Patent Filings

ZHOU; Wen-Zhan

Patent Applications and Registrations

Patent applications and USPTO patent grants for ZHOU; Wen-Zhan.The latest application filed is for "adaptive baking method".

Company Profile
3.19.22
  • ZHOU; Wen-Zhan - Hsinchu TW
  • Zhou; Wen-Zhan - Zhubei TW
  • Zhou; Wen-Zhan - Zhubei City TW
  • Zhou; Wen Zhan - Singapore SG
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Adaptive Baking Method
App 20220074668 - WU; Tzung-Chen ;   et al.
2022-03-10
Adaptive baking method
Grant 11,204,200 - Wu , et al. December 21, 2
2021-12-21
System And Method For Supplying And Dispensing Bubble-free Photolithography Chemical Solutions
App 20200124967 - Zhou; Wen-Zhan ;   et al.
2020-04-23
System and method for supplying and dispensing bubble-free photolithography chemical solutions
Grant 10,558,120 - Zhou , et al. Feb
2020-02-11
Two-dimensional marks
Grant 10,274,839 - Zhou , et al.
2019-04-30
Adaptive Baking Method
App 20180306514 - WU; Tzung-Chen ;   et al.
2018-10-25
Adaptive baking system and method of using the same
Grant 10,006,717 - Wu , et al. June 26, 2
2018-06-26
System And Method For Supplying And Dispensing Bubble-free Photolithography Chemical Solutions
App 20180067395 - Zhou; Wen-Zhan ;   et al.
2018-03-08
System and method for supplying and dispensing bubble-free photolithography chemical solutions
Grant 9,817,315 - Zhou , et al. November 14, 2
2017-11-14
Method and apparatus for estimating focus and dose of an exposure process
Grant 9,766,554 - Chen , et al. September 19, 2
2017-09-19
Hybrid focus-exposure matrix
Grant 9,690,212 - Zhou , et al. June 27, 2
2017-06-27
Method And Apparatus For Estimating Focus And Dose Of An Exposure Process
App 20160274456 - Chen; Yen-Liang ;   et al.
2016-09-22
System And Method For Supplying And Dispensing Bubble-free Photolithography Chemical Solutions
App 20150261089 - Zhou; Wen-Zhan ;   et al.
2015-09-17
Adaptive Baking System And Method Of Using The Same
App 20150253083 - WU; Tzung-Chen ;   et al.
2015-09-10
Litho scanner alignment signal improvement
Grant 9,034,720 - Liu , et al. May 19, 2
2015-05-19
Reliable interconnect for semiconductor device
Grant 8,987,134 - Wang , et al. March 24, 2
2015-03-24
Two-Dimensional Marks
App 20140253901 - Zhou; Wen-Zhan ;   et al.
2014-09-11
Hybrid Focus-Exposure Matrix
App 20140257761 - Zhou; Wen-Zhan ;   et al.
2014-09-11
Spacer profile engineering using films with continuously increased etch rate from inner to outer surface
Grant 8,828,858 - Rao , et al. September 9, 2
2014-09-09
Litho Scanner Alignment Signal Improvement
App 20140050439 - LIU; Hui ;   et al.
2014-02-20
Reliable Interconnect For Semiconductor Device
App 20130328201 - WANG; Zhehui ;   et al.
2013-12-12
Spacer Profile Engineering Using Films With Continuously Increased Etch Rate From Inner To Outer Surface
App 20130187202 - Rao; Xuesong ;   et al.
2013-07-25
Step-like spacer profile
Grant 8,492,236 - Rao , et al. July 23, 2
2013-07-23
Step-like Spacer Profile
App 20130181259 - Rao; Xuesong ;   et al.
2013-07-18
Multi-variable regression for metrology
Grant 7,966,142 - Zhou , et al. June 21, 2
2011-06-21
Multi-variable Regression For Metrology
App 20090258445 - ZHOU; Wen Zhan ;   et al.
2009-10-15
Method for detecting semiconductor manufacturing conditions
Grant 7,553,678 - Zhou , et al. June 30, 2
2009-06-30
Reticle and optical proximity correction method
Grant 7,527,900 - Zhou , et al. May 5, 2
2009-05-05
Method For Detecting Semiconductor Manufacturing Conditions
App 20070220458 - Zhou; Wen-Zhan ;   et al.
2007-09-20
Multi-zone Carrier Head For Chemical Mechanical Polishing And Cmp Method Thereof
App 20070167110 - Tseng; Yu-Hsiang ;   et al.
2007-07-19
Method for eliminating bridging defect in via first dual damascene process
Grant 7,238,619 - Zhou , et al. July 3, 2
2007-07-03
Reticle And Optical Proximity Correction Method
App 20070105023 - Zhou; Wen-Zhan ;   et al.
2007-05-10
Method For Eliminating Bridging Defect In Via First Dual Damascene Process
App 20070010092 - Zhou; Wen-Zhan ;   et al.
2007-01-11
In-line focus monitor structure and method using top-down SEM
Grant 6,777,145 - Zhou , et al. August 17, 2
2004-08-17
In-line focus monitor structure and method using top-down SEM
App 20030224252 - Zhou, Wen-Zhan ;   et al.
2003-12-04

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