Patent | Date |
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Systems And Methods For Remotely Verifying Identity Of Non-resident Aliens App 20220156348 - Zhou; Catherine ;   et al. | 2022-05-19 |
Systems and methods for remotely verifying identity of non-resident aliens Grant 11,244,033 - Zhou , et al. February 8, 2 | 2022-02-08 |
Systems And Methods For Remotely Verifying Identity Of Non-resident Aliens App 20210390162 - Zhou; Catherine ;   et al. | 2021-12-16 |
Systems and methods for remotely verifying identity of non-resident aliens Grant 11,144,619 - Zhou , et al. October 12, 2 | 2021-10-12 |
Systems And Methods For Remotely Verifying Identity Of Non-resident Aliens App 20210110007 - Zhou; Catherine ;   et al. | 2021-04-15 |
Platen and adapter assemblies for facilitating silicon electrode polishing Grant 9,120,201 - Avoyan , et al. September 1, 2 | 2015-09-01 |
Adapter Plate For Polishing And Cleaning Electrodes App 20150179416 - Zhou; Catherine ;   et al. | 2015-06-25 |
System and method for cleaning gas injectors Grant 8,945,317 - Avoyan , et al. February 3, 2 | 2015-02-03 |
Platen And Adapter Assemblies For Facilitating Silicon Electrode Polishing App 20140030966 - Avoyan; Armen ;   et al. | 2014-01-30 |
Electrode carrier assemblies Grant 8,580,079 - La Croix , et al. November 12, 2 | 2013-11-12 |
Platen and adapter assemblies for facilitating silicon electrode polishing Grant 8,550,880 - Avoyan , et al. October 8, 2 | 2013-10-08 |
System And Method For Cleaning Gas Injectors App 20130146095 - Avoyan; Armen ;   et al. | 2013-06-13 |
Electrode securing platens and electrode polishing assemblies incorporating the same Grant 8,444,456 - La Croix , et al. May 21, 2 | 2013-05-21 |
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses Grant 8,215,321 - Shih , et al. July 10, 2 | 2012-07-10 |
Electrode Securing Platens And Electrode Polishing Assemblies Incorporating The Same App 20120108152 - La Croix; Cliff ;   et al. | 2012-05-03 |
Electrode Carrier Assemblies App 20110308732 - La Croix; Cliff ;   et al. | 2011-12-22 |
Immersive oxidation and etching process for cleaning silicon electrodes Grant 8,075,703 - Avoyan , et al. December 13, 2 | 2011-12-13 |
Methods And Apparatus For Wet Cleaning Electrode Assemblies For Plasma Processing Apparatuses App 20110180117 - Shih; Hong ;   et al. | 2011-07-28 |
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses Grant 7,942,973 - Shih , et al. May 17, 2 | 2011-05-17 |
Immersive Oxidation And Etching Process For Cleaning Silicon Electrodes App 20100139692 - Avoyan; Armen ;   et al. | 2010-06-10 |
Platen And Adapter Assemblies For Facilitating Silicon Electrode Polishing App 20100144246 - Avoyan; Armen ;   et al. | 2010-06-10 |
Methods for silicon electrode assembly etch rate and etch uniformity recovery Grant 7,442,114 - Huang , et al. October 28, 2 | 2008-10-28 |
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses App 20080092920 - Shih; Hong ;   et al. | 2008-04-24 |
Methods for silicon electrode assembly etch rate and etch uniformity recovery App 20060138081 - Huang; Tuochuan ;   et al. | 2006-06-29 |
Wet Cleaning Of Electrostatic Chucks App 20060112969 - Shih; Hong ;   et al. | 2006-06-01 |
Wet cleaning of electrostatic chucks Grant 7,052,553 - Shih , et al. May 30, 2 | 2006-05-30 |