Zhao; Guoheng
Patent Applications and Registrations
Patent applications and USPTO patent grants for Zhao; Guoheng.The latest application filed is for "methods and systems to measure properties of products on a moving blade in electronic device manufacturing machines".
Company Profile
15.95.83
- Zhao; Guoheng - Palo Alto CA
- Zhao; Guoheng - Milpitas CA
- Zhao; Guoheng - Milipitas CA
- Zhao; Guoheng - Sunnyvale CA
- Zhao, Guoheng - Milpitos CA
Patent Activity
| Patent | Date |
|---|---|
| Method and apparatus for detection of particle size in a fluid Grant 11,441,992 - Vaez-Iravani , et al. September 13, 2 | 2022-09-13 |
| In-situ, real-time detection of particulate defects in a fluid Grant 11,442,000 - Vaez-Iravani , et al. September 13, 2 | 2022-09-13 |
| Simultaneous multi-directional laser wafer inspection Grant 11,366,069 - Zhao , et al. June 21, 2 | 2022-06-21 |
| Method and system for optical three dimensional topography measurement Grant 11,287,248 - Zhao , et al. March 29, 2 | 2022-03-29 |
| Methods And Systems To Measure Properties Of Products On A Moving Blade In Electronic Device Manufacturing Machines App 20220057323 - Egan; Todd J. ; et al. | 2022-02-24 |
| Spectrum shaping devices and techniques for optical characterization applications Grant 11,226,234 - Zhao , et al. January 18, 2 | 2022-01-18 |
| Method And Apparatus For Detection Of Particle Size In A Fluid App 20210372911 - VAEZ-IRAVANI; Mehdi ; et al. | 2021-12-02 |
| Imaging reflectometer Grant 11,187,654 - Zhao , et al. November 30, 2 | 2021-11-30 |
| Image Based Metrology Of Surface Deformations App 20210366143 - Vaez-Iravani; Mehdi ; et al. | 2021-11-25 |
| High sensitivity image-based reflectometry Grant 11,156,566 - Zhao , et al. October 26, 2 | 2021-10-26 |
| High sensitivity image-based reflectometry Grant 11,150,078 - Zhao , et al. October 19, 2 | 2021-10-19 |
| High Sensitivity Image-based Reflectometry App 20210302149 - Zhao; Guoheng ; et al. | 2021-09-30 |
| High Sensitivity Image-based Reflectometry App 20210302330 - Zhao; Guoheng ; et al. | 2021-09-30 |
| Integrated reflectometer or ellipsometer Grant 11,112,231 - Zhao September 7, 2 | 2021-09-07 |
| In-line Monitoring Of Oled Layer Thickness And Dopant Concentration App 20210226182 - Tung; Yeishin ; et al. | 2021-07-22 |
| Spectrum Shaping Devices And Techniques For Optical Characterization Applications App 20210223102 - Zhao; Guoheng ; et al. | 2021-07-22 |
| In-situ, Real-time Detection Of Particulate Defects In A Fluid App 20210181084 - VAEZ-IRAVANI; Mehdi ; et al. | 2021-06-17 |
| Integrated Reflectometer Or Ellipsometer App 20210131786 - Zhao; Guoheng | 2021-05-06 |
| Radial polarizer for particle detection Grant 10,942,135 - Leong , et al. March 9, 2 | 2021-03-09 |
| Imaging Reflectometer App 20200355609 - Zhao; Guoheng ; et al. | 2020-11-12 |
| Imaging reflectometer Grant 10,816,464 - Zhao , et al. October 27, 2 | 2020-10-27 |
| Simultaneous Multi-directional Laser Wafer Inspection App 20200333262 - Zhao; Guoheng ; et al. | 2020-10-22 |
| Simultaneous multi-directional laser wafer inspection Grant 10,739,275 - Zhao , et al. A | 2020-08-11 |
| Imaging Reflectometer App 20200232916 - Zhao; Guoheng ; et al. | 2020-07-23 |
| Method and System for Optical Three Dimensional Topography Measurement App 20200217651 - Zhao; Guoheng ; et al. | 2020-07-09 |
| Systems and methods for defect material classification Grant 10,670,537 - Zhao , et al. | 2020-06-02 |
| Radial Polarizer for Particle Detection App 20200150054 - Leong; Jenn-Kuen ; et al. | 2020-05-14 |
| Method and system for optical three dimensional topography measurement Grant 10,634,487 - Zhao , et al. | 2020-04-28 |
| Digital lithography with extended field size Grant 10,599,044 - Zhao , et al. | 2020-03-24 |
| Methods and apparatus for measuring height on a semiconductor wafer Grant 10,495,446 - Li , et al. De | 2019-12-03 |
| Wafer inspection Grant 10,488,348 - Romanovsky , et al. Nov | 2019-11-26 |
| Digital lithography with extended depth of focus Grant 10,474,041 - Zhao , et al. Nov | 2019-11-12 |
| Dark-field inspection using a low-noise sensor Grant 10,462,391 - Chuang , et al. Oc | 2019-10-29 |
| Systems and Methods for Defect Material Classification App 20190212277 - Zhao; Guoheng ; et al. | 2019-07-11 |
| Systems and methods for defect material classification Grant 10,234,402 - Zhao , et al. | 2019-03-19 |
| Methods and apparatus for polarized wafer inspection Grant 10,228,331 - Liu , et al. | 2019-03-12 |
| Methods And Apparatus For Polarized Wafer Inspection App 20180364177 - Liu; Sheng ; et al. | 2018-12-20 |
| Method and System for Optical Three Dimensional Topography Measurement App 20180209784 - Zhao; Guoheng ; et al. | 2018-07-26 |
| Systems and Methods for Defect Material Classification App 20180188188 - Zhao; Guoheng ; et al. | 2018-07-05 |
| Wafer Inspection App 20180164228 - Romanovsky; Anatoly ; et al. | 2018-06-14 |
| Generating an array of spots on inclined surfaces Grant 9,945,792 - Zhao April 17, 2 | 2018-04-17 |
| Simultaneous Multi-directional Laser Wafer Inspection App 20180073993 - Zhao; Guoheng ; et al. | 2018-03-15 |
| Wafer inspection Grant 9,915,622 - Romanovsky , et al. March 13, 2 | 2018-03-13 |
| TDI sensor in a darkfield system Grant 9,891,177 - Vazhaeparambil , et al. February 13, 2 | 2018-02-13 |
| Image acquisition system, image acquisition method, and inspection system Grant 9,886,764 - Zhao , et al. February 6, 2 | 2018-02-06 |
| Methods and apparatus for polarized wafer inspection Grant 9,874,526 - Liu , et al. January 23, 2 | 2018-01-23 |
| Methods And Apparatus For Polarized Wafer Inspection App 20170276613 - Liu; Sheng ; et al. | 2017-09-28 |
| Laser with integrated multi line or scanning beam capability Grant 9,678,350 - Wolters , et al. June 13, 2 | 2017-06-13 |
| In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning Grant 9,645,097 - Nicolaides , et al. May 9, 2 | 2017-05-09 |
| Dark-Field Inspection Using A Low-Noise Sensor App 20170048467 - Chuang; Yung-Ho Alex ; et al. | 2017-02-16 |
| Combined semiconductor metrology system Grant 9,553,034 - Young , et al. January 24, 2 | 2017-01-24 |
| Methods And Apparatus For Measuring Height On A Semiconductor Wafer App 20160377412 - Li; Shifang ; et al. | 2016-12-29 |
| TDI Sensor in a Darkfield System App 20160097727 - Vazhaeparambil; Jijen ; et al. | 2016-04-07 |
| Wafer inspection Grant 9,291,575 - Zhao , et al. March 22, 2 | 2016-03-22 |
| Wafer inspection Grant 9,279,774 - Romanovsky , et al. March 8, 2 | 2016-03-08 |
| Image Acquisition System, Image Acquisition Method, And Inspection System App 20160048969 - ZHAO; Guoheng ; et al. | 2016-02-18 |
| Defect Detection Using Surface Enhanced Electric Field App 20150377795 - Zhao; Guoheng ; et al. | 2015-12-31 |
| Wafer Inspection App 20150369753 - Romanovsky; Anatoly ; et al. | 2015-12-24 |
| In-line Wafer Edge Inspection, Wafer Pre-alignment, And Wafer Cleaning App 20150370175 - Nicolaides; Lena ; et al. | 2015-12-24 |
| Apparatus and methods for improving defect detection sensitivity Grant 9,194,811 - Zhao , et al. November 24, 2 | 2015-11-24 |
| Multi-spot defect inspection system Grant 9,182,358 - Xu , et al. November 10, 2 | 2015-11-10 |
| Dark field inspection system with ring illumination Grant 9,176,072 - Zhao , et al. November 3, 2 | 2015-11-03 |
| Sample inspection system detector Grant 9,086,389 - Kavaldjiev , et al. July 21, 2 | 2015-07-21 |
| Wafer Inspection App 20150103348 - Zhao; Guoheng ; et al. | 2015-04-16 |
| Composite polarizer with adjustable polarization angles Grant 9,001,327 - Zhao April 7, 2 | 2015-04-07 |
| Wafer inspection Grant 8,891,079 - Zhao , et al. November 18, 2 | 2014-11-18 |
| Multi-spot illumination for wafer inspection Grant 8,879,056 - Zhao , et al. November 4, 2 | 2014-11-04 |
| Multi-Spot Defect Inspection System App 20140268118 - Xu; Zhiwei ; et al. | 2014-09-18 |
| Air bearing for substrate inspection device Grant 8,817,250 - Doyle , et al. August 26, 2 | 2014-08-26 |
| Generating an Array of Spots on Inclined Surfaces App 20140168774 - Zhao; Guoheng | 2014-06-19 |
| Sample Inspection System Detector App 20140118730 - Kavaldjiev; Daniel Ivanov ; et al. | 2014-05-01 |
| Wafer Inspection App 20140009759 - Zhao; Guoheng ; et al. | 2014-01-09 |
| Solar metrology methods and apparatus Grant 8,604,447 - Young , et al. December 10, 2 | 2013-12-10 |
| Composite Polarizer With Adjustable Polarization Angles App 20130293888 - Zhao; Guoheng | 2013-11-07 |
| Multi-Spot Illumination for Wafer Inspection App 20130250582 - Zhao; Guoheng ; et al. | 2013-09-26 |
| Laser with Integrated Multi Line or Scanning Beam Capability App 20130250385 - Wolters; Christian ; et al. | 2013-09-26 |
| Multi-spot illumination for wafer inspection Grant 8,462,329 - Zhao , et al. June 11, 2 | 2013-06-11 |
| LED solar illuminator Grant 8,436,554 - Zhao , et al. May 7, 2 | 2013-05-07 |
| Measuring sheet resistance and other properties of a semiconductor Grant 8,415,961 - Zhao , et al. April 9, 2 | 2013-04-09 |
| Solar Metrology Methods And Apparatus App 20130048873 - Young; Scott ; et al. | 2013-02-28 |
| LED Solar Illuminator App 20120256559 - Zhao; Guoheng ; et al. | 2012-10-11 |
| In-situ differential spectroscopy Grant 8,283,631 - Vaez-Iravani , et al. October 9, 2 | 2012-10-09 |
| Enhanced focusing capability on a sample using a spot matrix Grant 8,194,240 - Vaez-Iravani , et al. June 5, 2 | 2012-06-05 |
| Multi-spot scanning system and method Grant 8,194,301 - Zhao , et al. June 5, 2 | 2012-06-05 |
| Referenced Inspection Device App 20120062877 - Doyle; Paul ; et al. | 2012-03-15 |
| Multi-Spot Illumination for Wafer Inspection App 20120026489 - Zhao; Guoheng ; et al. | 2012-02-02 |
| Detecting and repairing defects of photovoltaic devices Grant 7,989,729 - Zhao , et al. August 2, 2 | 2011-08-02 |
| Dark Field Inspection System With Ring Illumination App 20110169944 - Zhao; Guoheng ; et al. | 2011-07-14 |
| Referenced Inspection Device App 20110069306 - Doyle; Paul ; et al. | 2011-03-24 |
| System for detecting anomalies and/or features of a surface Grant 7,869,023 - Zhao , et al. January 11, 2 | 2011-01-11 |
| System for scatterometric measurements and applications Grant 7,821,654 - Fabrikant , et al. October 26, 2 | 2010-10-26 |
| Segmented optical and electrical testing for photovoltaic devices Grant 7,733,111 - Zhao , et al. June 8, 2 | 2010-06-08 |
| Defect detection using time delay lock-in thermography (LIT) and dark field LIT Grant 7,709,794 - Zhao , et al. May 4, 2 | 2010-05-04 |
| Defect Detection and Response App 20100074515 - Zhao; Guoheng ; et al. | 2010-03-25 |
| Defect Detection Using Time Delay Lock-in Thermography (lit) And Dark Field Lit App 20100073665 - Zhao; Guoheng ; et al. | 2010-03-25 |
| In-Situ Differential Spectroscopy App 20090278044 - Vaez-Iravani; Mehdi ; et al. | 2009-11-12 |
| Stabilizing a substrate using a vacuum preload air bearing chuck Grant 7,607,647 - Zhao , et al. October 27, 2 | 2009-10-27 |
| Multi-spot scanning system and method App 20090225399 - Zhao; Guoheng ; et al. | 2009-09-10 |
| System For Scatterometric Measurements And Applications App 20090195779 - Fabrikant; Anatoly ; et al. | 2009-08-06 |
| System For Measuring A Sample With A Layer Containing A Periodic Diffracting Structure App 20090190141 - Bareket; Noah ; et al. | 2009-07-30 |
| Method and system for inspecting surfaces with improved light efficiency Grant 7,564,544 - Zhao , et al. July 21, 2 | 2009-07-21 |
| Surface inspection system using laser line illumination with two dimensional imaging Grant 7,525,649 - Leong , et al. April 28, 2 | 2009-04-28 |
| System for measuring a sample with a layer containing a periodic diffracting structure Grant 7,515,253 - Bareket , et al. April 7, 2 | 2009-04-07 |
| System for scatterometric measurements and applications Grant 7,511,830 - Fabrikant , et al. March 31, 2 | 2009-03-31 |
| System for measuring periodic structures Grant 7,433,037 - Zhao , et al. October 7, 2 | 2008-10-07 |
| Stabilizing A Substrate Using A Vacuum Preload Air Bearing Chuck App 20080229811 - Zhao; Guoheng ; et al. | 2008-09-25 |
| System For Detecting Anomalies And/Or Features of a Surface App 20080218762 - Zhao; Guoheng ; et al. | 2008-09-11 |
| Overlay error detection Grant 7,375,810 - Nikoonahad , et al. May 20, 2 | 2008-05-20 |
| Optical system for measuring samples using short wavelength radiation Grant 7,369,233 - Nikoonahad , et al. May 6, 2 | 2008-05-06 |
| System for Scatterometric Measurements and Applications App 20080084567 - Fabrikant; Anatoly ; et al. | 2008-04-10 |
| Fourier filters and wafer inspection systems Grant 7,345,754 - Zhao , et al. March 18, 2 | 2008-03-18 |
| System for measuring a sample with a layer containing a periodic diffracting structure App 20080037005 - Bareket; Noah ; et al. | 2008-02-14 |
| Illumination apparatus and methods Grant 7,319,229 - Vaez-Iravani , et al. January 15, 2 | 2008-01-15 |
| System For Detecting Anomalies And/or Features Of A Surface App 20080002193 - Zhao; Guoheng ; et al. | 2008-01-03 |
| System for scatterometric measurements and applications Grant 7,301,649 - Fabrikant , et al. November 27, 2 | 2007-11-27 |
| Methods and apparatus for inspecting a sample Grant 7,295,303 - Vaez-Iravani , et al. November 13, 2 | 2007-11-13 |
| System for detecting anomalies and/or features of a surface Grant 7,280,199 - Zhao , et al. October 9, 2 | 2007-10-09 |
| Method and system for inspecting surfaces with improved light efficiency App 20070222974 - Zhao; Guoheng ; et al. | 2007-09-27 |
| Method and system for improved defect sensitivity for inspecting surfaces Grant 7,221,444 - Zhao May 22, 2 | 2007-05-22 |
| System for Detecting Anomalies and/or Features of a Surface App 20060256327 - Vaez-Iravani; Mehdi ; et al. | 2006-11-16 |
| Sample inspection system Grant 7,119,897 - Vaez-Iravani , et al. October 10, 2 | 2006-10-10 |
| System for scatterometric measurements and applications Grant 7,099,005 - Fabrikant , et al. August 29, 2 | 2006-08-29 |
| System for detecting anomalies and/or features of a surface Grant 7,088,443 - Vaez-Iravani , et al. August 8, 2 | 2006-08-08 |
| Sample inspection system Grant 7,079,238 - Vaez-Iravani , et al. July 18, 2 | 2006-07-18 |
| Sample inspection system Grant 7,064,821 - Vaez-Iravani , et al. June 20, 2 | 2006-06-20 |
| Overlay error detection App 20060098199 - Nikoonahad; Mehrdad ; et al. | 2006-05-11 |
| Overlay error detection Grant 7,009,704 - Nikoonahad , et al. March 7, 2 | 2006-03-07 |
| System for detecting anomalies and/or features of a surface App 20060038984 - Vaez-Iravani; Mehdi ; et al. | 2006-02-23 |
| System for scatterometric measurements and applications App 20050274901 - Fabrikant, Anatoly ; et al. | 2005-12-15 |
| Sample inspection system App 20050206886 - Vaez-Iravani, Mehdi ; et al. | 2005-09-22 |
| Sample inspection system App 20050174568 - Vaez-Iravani, Mehdi ; et al. | 2005-08-11 |
| Illumination apparatus and methods App 20050141810 - Vaez-Iravani, Mehdi ; et al. | 2005-06-30 |
| Sample inspection system App 20050134841 - Vacz-Iravani, Mehdi ; et al. | 2005-06-23 |
| System for measuring periodic structures App 20050099627 - Zhao, Guoheng ; et al. | 2005-05-12 |
| Sample inspection system App 20050099621 - Vaez-Iravani, Mehdi ; et al. | 2005-05-12 |
| Sample inspection system Grant 6,891,611 - Vaez-Iravani , et al. May 10, 2 | 2005-05-10 |
| Metrology system using optical phase App 20050094153 - Nikoonahad, Mehrdad ; et al. | 2005-05-05 |
| System for detecting anomalies and / or features of a surface App 20050036138 - Zhao, Guoheng ; et al. | 2005-02-17 |
| Metrology system using optical phase App 20040207849 - Nikoonahad, Mehrdad ; et al. | 2004-10-21 |
| System for detecting anomalies and/or features of a surface App 20040156042 - Vaez-Iravani, Mehdi ; et al. | 2004-08-12 |
| Optical system for measuring samples using short wavelength radiation App 20040150820 - Nikoonahad, Mehrdad ; et al. | 2004-08-05 |
| System for measuring periodic structures App 20040141177 - Zhao, Guoheng ; et al. | 2004-07-22 |
| System for MEMS inspection and characterization Grant 6,753,528 - Nikoonahad , et al. June 22, 2 | 2004-06-22 |
| Method and system using exposure control to inspect a surface Grant 6,724,473 - Leong , et al. April 20, 2 | 2004-04-20 |
| Systems for measuring periodic structures Grant 6,721,052 - Zhao , et al. April 13, 2 | 2004-04-13 |
| Sample inspection system App 20040057045 - Vaez-Iravani, Mehdi ; et al. | 2004-03-25 |
| Metrology system using optical phase Grant 6,710,876 - Nikoonahad , et al. March 23, 2 | 2004-03-23 |
| In-situ metalization monitoring using eddy current and optical measurements Grant 6,707,540 - Lehman , et al. March 16, 2 | 2004-03-16 |
| System for detecting anomalies and/or features of a surface App 20040036864 - Zhao, Guoheng ; et al. | 2004-02-26 |
| Systems and methods for inspection of specimen surfaces App 20040032581 - Nikoonahad, Mehrdad ; et al. | 2004-02-19 |
| Apparatus and methods for detecting killer particles during chemical mechanical polishing Grant 6,671,051 - Nikoonahad , et al. December 30, 2 | 2003-12-30 |
| Method and system using exposure control to inspect a surface App 20030223058 - Leong, Jenn-Kuen ; et al. | 2003-12-04 |
| Sample inspection system Grant 6,657,715 - Vaez-Iravani , et al. December 2, 2 | 2003-12-02 |
| Sample inspection system App 20030206295 - Vaez-Iravani, Mehdi ; et al. | 2003-11-06 |
| Sample inspection system Grant 6,639,662 - Vaez-Iravani , et al. October 28, 2 | 2003-10-28 |
| Apparatus and methods for performing self-clearing optical measurements Grant 6,628,397 - Nikoonahad , et al. September 30, 2 | 2003-09-30 |
| Sample inspection system Grant 6,618,134 - Vaez-Iravani , et al. September 9, 2 | 2003-09-09 |
| System for detecting anomalies and/or features of a surface Grant 6,608,676 - Zhao , et al. August 19, 2 | 2003-08-19 |
| Systems for measuring periodic structures App 20020105646 - Zhao, Guoheng ; et al. | 2002-08-08 |
| Sample inspection system App 20020080346 - Vaez-Iravani, Mehdi ; et al. | 2002-06-27 |
| Sample inspection system Grant 6,384,910 - Vaez-Iravani , et al. May 7, 2 | 2002-05-07 |
| Sample inspection system App 20010002149 - Vaez-Iravani, Mehdi ; et al. | 2001-05-31 |
| Sample inspection system App 20010000977 - Vaez-Iravani, Mehdi ; et al. | 2001-05-10 |
| Sample inspection system App 20010000679 - Vaez-Iravani, Mehdi ; et al. | 2001-05-03 |
| Sample inspection system Grant 6,201,601 - Vaez-Iravani , et al. March 13, 2 | 2001-03-13 |
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