| Patent | Date |
|---|
Methods Of Manufacturing Semiconductor Devices
App 20210242215 - PARK; Hye Sung ; et al. | 2021-08-05 |
Methods of manufacturing semiconductor devices
Grant 11,011,526 - Park , et al. May 18, 2 | 2021-05-18 |
Semiconductor device having plural dummy memory cells
Grant 10,964,751 - Cui , et al. March 30, 2 | 2021-03-30 |
Method of forming semiconductor device
Grant 10,943,908 - Bae , et al. March 9, 2 | 2021-03-09 |
Slurry composition for chemical mechanical polishing, method of preparing the same, and method of fabricating semiconductor device by using the same
Grant 10,829,690 - Kim , et al. November 10, 2 | 2020-11-10 |
Substrate Cleaning Equipment, Substrate Treatment System Including The Same, And Method Of Fabricating Semiconductor Device Using The Substrate Cleaning Equipment
App 20200303218 - CHOI; SEUNG HOON ; et al. | 2020-09-24 |
Method of manufacturing a semiconductor device
Grant 10,741,409 - Kim , et al. A | 2020-08-11 |
Semiconductor device and method for fabricating the same
Grant 10,734,380 - Jeong , et al. | 2020-08-04 |
Semiconductor Device
App 20200235165 - CUI; Hao ; et al. | 2020-07-23 |
Methods Of Manufacturing Semiconductor Devices
App 20200227315 - PARK; Hye Sung ; et al. | 2020-07-16 |
Method Of Forming Semiconductor Device
App 20200098763 - BAE; JIN WOO ; et al. | 2020-03-26 |
Slurry Composition For Chemical Mechanical Polishing, Method Of Preparing The Same, And Method Of Fabricating Semiconductor Devi
App 20200071613 - KIM; Bo-yun ; et al. | 2020-03-05 |
Method Of Forming Semiconductor Device Using Polishing Resistance Pattern
App 20190341358 - LEE; YANG HEE ; et al. | 2019-11-07 |
Semiconductor devices including a dummy gate structure on a fin
Grant 10,446,561 - Park , et al. Oc | 2019-10-15 |
Slurry composition for chemical mechanical polishing
Grant 10,428,242 - Moon , et al. October 1, 2 | 2019-10-01 |
Methods of fabricating semiconductor devices including fin-shaped active regions
Grant 10,424,503 - Youn , et al. Sept | 2019-09-24 |
Semiconductor devices including insulating capping structures
Grant 10,403,640 - Hwang , et al. Sep | 2019-09-03 |
Chemical supplier, processing apparatus including the chemical supplier
Grant 10,297,474 - Park , et al. | 2019-05-21 |
Semiconductor Devices Including Insulating Capping Structures
App 20190074289 - Hwang; Chang Sun ; et al. | 2019-03-07 |
Semiconductor Device And Method For Fabricating The Same
App 20190043860 - Jeong; Ji-Min ; et al. | 2019-02-07 |
Methods of forming semiconductor devices including trench walls having multiple slopes
Grant 10,192,973 - Park , et al. Ja | 2019-01-29 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin
App 20180374859 - Park; Sang-Jine ; et al. | 2018-12-27 |
Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin
Grant 10,128,246 - Park , et al. November 13, 2 | 2018-11-13 |
Semiconductor device and method for fabricating the same
Grant 10,128,236 - Jeong , et al. November 13, 2 | 2018-11-13 |
Semiconductor device and method of manufacturing the same
Grant 10,109,529 - Koh , et al. October 23, 2 | 2018-10-23 |
Semiconductor devices including a dummy gate structure on a fin
Grant 10,096,605 - Park , et al. October 9, 2 | 2018-10-09 |
Slurry Composition For Chemical Mechanical Polishing
App 20180282581 - MOON; Doo-sik ; et al. | 2018-10-04 |
Methods of fabricating semiconductor devices including fin-shaped active regions
Grant 10,090,190 - Youn , et al. October 2, 2 | 2018-10-02 |
Semiconductor device and method for fabricating the same
Grant 10,062,786 - Kim , et al. August 28, 2 | 2018-08-28 |
Methods for fabricating semiconductor device
Grant 10,056,466 - Lee , et al. August 21, 2 | 2018-08-21 |
Method of manufacturing semiconductor devices
Grant 10,032,890 - Yim , et al. July 24, 2 | 2018-07-24 |
Semiconductor Devices Including Varied Depth Recesses For Contacts
App 20180197861 - Park; Sang Jine ; et al. | 2018-07-12 |
Methods Of Fabricating Semiconductor Devices Including Fin-shaped Active Regions
App 20180174889 - Youn; Young-Sang ; et al. | 2018-06-21 |
Method Of Manufacturing A Semiconductor Device
App 20180130672 - Kim; Hyo Jung ; et al. | 2018-05-10 |
Semiconductor devices including a dummy gate structure on a fin
Grant 9,947,672 - Park , et al. April 17, 2 | 2018-04-17 |
Method of manufacturing semiconductor device
Grant 9,870,950 - Hwang , et al. January 16, 2 | 2018-01-16 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin
App 20170345825 - Park; Sang-Jine ; et al. | 2017-11-30 |
Methods of manufacturing semiconductor devices using alignment marks to align layers
Grant 9,831,186 - Park , et al. November 28, 2 | 2017-11-28 |
Methods Of Fabricating Semiconductor Devices Including Fin-shaped Active Regions
App 20170301581 - Youn; Young-Sang ; et al. | 2017-10-19 |
Semiconductor Devices Including An Isolation Layer On A Fin And Methods Of Forming Semiconductor Devices Including An Isolation Layer On A Fin
App 20170271336 - Park; Sang-Jine ; et al. | 2017-09-21 |
Semiconductor devices including a contact structure and methods of manufacturing the same
Grant 9,754,880 - Baek , et al. September 5, 2 | 2017-09-05 |
Semiconductor devices including insulating gates and methods for fabricating the same
Grant 9,755,079 - Park , et al. September 5, 2 | 2017-09-05 |
Methods of fabricating semiconductor devices including fin-shaped active regions
Grant 9,728,535 - Youn , et al. August 8, 2 | 2017-08-08 |
Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin
Grant 9,704,864 - Park , et al. July 11, 2 | 2017-07-11 |
Method Of Manufacturing Semiconductor Device
App 20170170072 - HWANG; CHANG-SUN ; et al. | 2017-06-15 |
Method Of Manufacturing Semiconductor Devices
App 20170162675 - YIM; Jun-Hwan ; et al. | 2017-06-08 |
Semiconductor device and method of manufacturing the same
Grant 9,659,940 - Park , et al. May 23, 2 | 2017-05-23 |
Semiconductor device and method for fabricating the same
Grant 9,627,542 - Kwon , et al. April 18, 2 | 2017-04-18 |
Methods Of Manufacturing Semiconductor Devices
App 20170098653 - Koh; Young-Ho ; et al. | 2017-04-06 |
Methods of manufacturing semiconductor devices
Grant 9,613,811 - Baek , et al. April 4, 2 | 2017-04-04 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin
App 20170084617 - Park; Sang-Jine ; et al. | 2017-03-23 |
Semiconductor Device And Method Of Manufacturing The Same
App 20170084710 - Koh; Young-ho ; et al. | 2017-03-23 |
Semiconductor Device And Method Of Manufacturing The Same
App 20170077103 - Park; Hye-sung ; et al. | 2017-03-16 |
Methods of fabricating semiconductor devices
Grant 9,590,073 - Ryu , et al. March 7, 2 | 2017-03-07 |
Method Of Forming A Plug, Method Of Manufacturing A Semiconductor Device Using The Same, Polishing Chamber Used For Manufacturing The Semiconductor Device, And Semiconductor Device
App 20170040208 - CHOI; Seung-Hoon ; et al. | 2017-02-09 |
Methods For Fabricating Semiconductor Device
App 20170040436 - LEE; Seung-Jae ; et al. | 2017-02-09 |
Semiconductor devices including a dummy gate structure on a fin
Grant 9,548,309 - Park , et al. January 17, 2 | 2017-01-17 |
Semiconductor Device And Method For Fabricating The Same
App 20160365453 - Kim; Ju-Hyun ; et al. | 2016-12-15 |
Methods Of Forming Semiconductor Devices Including Trench Walls Having Multiple Slopes
App 20160359017 - PARK; Sang-Jine ; et al. | 2016-12-08 |
Semiconductor Devices Including Varied Depth Recesses For Contacts
App 20160351570 - Park; Sang Jine ; et al. | 2016-12-01 |
Semiconductor Devices Including A Contact Structure And Methods Of Manufacturing The Same
App 20160315045 - BAEK; Jae-Jik ; et al. | 2016-10-27 |
Semiconductor devices and methods of manufacturing the same
Grant 9,466,697 - Park , et al. October 11, 2 | 2016-10-11 |
Semiconductor device and method of fabricating the same
Grant 9,461,148 - Park , et al. October 4, 2 | 2016-10-04 |
Semiconductor Device And Methods For Fabricating The Same
App 20160284699 - Jeong; Ji-Min ; et al. | 2016-09-29 |
Semiconductor Devices Including Insulating Gates and Methods for Fabricating the Same
App 20160268414 - PARK; Sang-Jine ; et al. | 2016-09-15 |
Semiconductor devices including trench walls having multiple slopes
Grant 9,443,979 - Park , et al. September 13, 2 | 2016-09-13 |
Semiconductor Device And Method For Fabricating The Same
App 20160247925 - KWON; Byoung-Ho ; et al. | 2016-08-25 |
Methods Of Fabricating Semiconductor Devices Including Fin-shaped Active Regions
App 20160181243 - Youn; Young-sang ; et al. | 2016-06-23 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin
App 20160163718 - Park; Sang-Jine ; et al. | 2016-06-09 |
Methods of Fabricating Semiconductor Devices
App 20160104788 - RYU; Yeon-Tack ; et al. | 2016-04-14 |
Methods of fabricating semiconductor devices including fin-shaped active regions
Grant 9,305,825 - Youn , et al. April 5, 2 | 2016-04-05 |
Semiconductor devices including a dummy gate structure on a fin
Grant 9,299,700 - Park , et al. March 29, 2 | 2016-03-29 |
Semiconductor Device And Method For Fabricating The Same
App 20160064380 - KWON; Byoung-Ho ; et al. | 2016-03-03 |
Semiconductor Devices Including An Isolation Layer On A Fin And Methods Of Forming Semiconductor Devices Including An Isolation Layer On A Fin
App 20160043170 - Park; Sang-Jine ; et al. | 2016-02-11 |
Methods Of Manufacturing Semiconductor Devices Using Alignment Marks To Align Layers
App 20160027739 - Park; Ki-hyun ; et al. | 2016-01-28 |
Semiconductor device and method for fabricating the same
Grant 9,190,407 - Kwon , et al. November 17, 2 | 2015-11-17 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin
App 20150325575 - Park; Sang-Jine ; et al. | 2015-11-12 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20150279991 - PARK; Sang-Jine ; et al. | 2015-10-01 |
Method of fabricating semiconductor device
Grant 9,136,135 - Baek , et al. September 15, 2 | 2015-09-15 |
Semiconductor Devices Including Trench Walls Having Multiple Slopes
App 20150187946 - PARK; Sang-Jine ; et al. | 2015-07-02 |
Methods Of Manufacturing Semiconductor Devices
App 20150162197 - BAEK; Jae-Jik ; et al. | 2015-06-11 |
Method of fabricating semiconductor device
Grant 9,054,210 - Park , et al. June 9, 2 | 2015-06-09 |
Semiconductor device and method of fabricating the same
Grant 9,040,415 - Park , et al. May 26, 2 | 2015-05-26 |
Semiconductor device including dummy gate part and method of fabricating the same
Grant 9,035,396 - Kwon , et al. May 19, 2 | 2015-05-19 |
Method for fabricating a semiconductor device
Grant 9,023,704 - Yoon , et al. May 5, 2 | 2015-05-05 |
Semiconductor Device And Method For Fabricating The Same
App 20150097251 - KWON; Byoung-Ho ; et al. | 2015-04-09 |
Method Of Manufacturing Semiconductor Device
App 20150056795 - Kang; Bo-kyeong ; et al. | 2015-02-26 |
Methods of forming gates of semiconductor devices
Grant 8,962,415 - Lee , et al. February 24, 2 | 2015-02-24 |
Semiconductor Device And Method Of Fabricating The Same
App 20150050793 - PARK; Sang-Jine ; et al. | 2015-02-19 |
Semiconductor device and method for fabricating the same
Grant 8,916,460 - Kwon , et al. December 23, 2 | 2014-12-23 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20140322881 - Park; Sang-Jine ; et al. | 2014-10-30 |
Chemical Supplier, Processing Apparatus Including The Chemical Supplier
App 20140231010 - PARK; Sang-Jine ; et al. | 2014-08-21 |
Methods Of Forming Gates Of Semiconductor Devices
App 20140235047 - LEE; JONG-WON ; et al. | 2014-08-21 |
Method For Fabricating A Semiconductor Device
App 20140227847 - YOON; IL-YOUNG ; et al. | 2014-08-14 |
Methods of Fabricating Semiconductor Devices Including Fin-Shaped Active Regions
App 20140227857 - YOUN; YOUNG-SANG ; et al. | 2014-08-14 |
Semiconductor devices and methods of manufacturing the same
Grant 8,803,248 - Park , et al. August 12, 2 | 2014-08-12 |
Semiconductor Device And Method Of Fabricating The Same
App 20140220752 - PARK; Jae-Young ; et al. | 2014-08-07 |
Methods for fabricating semiconductor devices
Grant 8,796,107 - Ahn , et al. August 5, 2 | 2014-08-05 |
Methods of Fabricating Semiconductor Device Using Nitridation of Isolation Layers
App 20140206169 - Cha; Ji Hoon ; et al. | 2014-07-24 |
Integrated circuit capacitors having sidewall supports
Grant 8,766,343 - Kang , et al. July 1, 2 | 2014-07-01 |
Low-resistance conductive pattern structures and methods of fabricating the same
Grant 8,736,058 - Kwon , et al. May 27, 2 | 2014-05-27 |
Methods of forming gates of semiconductor devices
Grant 8,735,250 - Lee , et al. May 27, 2 | 2014-05-27 |
Methods for fabricating semiconductor devices
Grant 8,709,942 - Park , et al. April 29, 2 | 2014-04-29 |
Method Of Fabricating Semiconductor Device
App 20140080296 - BAEK; Jae-Jik ; et al. | 2014-03-20 |
Methods of fabricating semiconductor devices
Grant 8,673,724 - Park , et al. March 18, 2 | 2014-03-18 |
Method for fabricating semiconductor device and device using same
Grant 8,652,910 - Kang , et al. February 18, 2 | 2014-02-18 |
Methods of fabricating semiconductor devices using preliminary trenches with epitaxial growth
Grant 8,652,915 - Ahn , et al. February 18, 2 | 2014-02-18 |
Method of manufacturing semiconductor device
Grant 8,617,991 - Lee , et al. December 31, 2 | 2013-12-31 |
Method of manufacturing a semiconductor device using an etchant
Grant 8,557,651 - Lee , et al. October 15, 2 | 2013-10-15 |
Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer
Grant 8,524,569 - Kang , et al. September 3, 2 | 2013-09-03 |
Polishing pads including sidewalls and related polishing apparatuses
Grant 8,475,238 - Choi , et al. July 2, 2 | 2013-07-02 |
Methods For Fabricating Semiconductor Devices
App 20130137240 - Ahn; Kevin ; et al. | 2013-05-30 |
Methods of Fabricating Semiconductor Devices
App 20130115759 - Park; Sang-Jine ; et al. | 2013-05-09 |
Methods for fabricating semiconductor devices
Grant 8,404,580 - Park , et al. March 26, 2 | 2013-03-26 |
Methods of manufacturing semiconductors using dummy patterns
Grant 8,398,874 - Kwon , et al. March 19, 2 | 2013-03-19 |
Methods of manufacturing a semiconductor device
Grant 8,399,327 - Lee , et al. March 19, 2 | 2013-03-19 |
Method Of Fabricating Semiconductor Device
App 20130023100 - PARK; Sang-Jine ; et al. | 2013-01-24 |
Methods For Fabricating Semiconductor Devices
App 20130023119 - Park; Sang-Jine ; et al. | 2013-01-24 |
Method Of Manufacturing Semiconductor Device
App 20130012021 - LEE; Jung-Chan ; et al. | 2013-01-10 |
Vertical-type semiconductor device
Grant 8,344,385 - Kim , et al. January 1, 2 | 2013-01-01 |
Method For Fabricating Semiconductor Device And Device Using Same
App 20120315732 - Kang; Bo-Kyeong ; et al. | 2012-12-13 |
Methods For Fabricating Semiconductor Devices
App 20120309189 - Park; Sang-Jine ; et al. | 2012-12-06 |
Photo key and method of fabricating semiconductor device using the photo key
Grant 8,241,988 - Kwon , et al. August 14, 2 | 2012-08-14 |
Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole
Grant 8,211,804 - Lee , et al. July 3, 2 | 2012-07-03 |
Test Mask Set And Mask Set
App 20120152460 - KIM; Ho-Young ; et al. | 2012-06-21 |
Methods Of Manufacturing A Semiconductor Device
App 20120122283 - LEE; Jong-Won ; et al. | 2012-05-17 |
Integrated Circuit Capacitors Having Sidewall Supports
App 20120112317 - Kang; Dae-Hyuk ; et al. | 2012-05-10 |
Semiconductor Devices and Methods of Manufacturing the Same
App 20120104514 - Park; Sang-Jine ; et al. | 2012-05-03 |
Methods of Forming Gates of Semiconductor Devices
App 20120088358 - Lee; Jong-Won ; et al. | 2012-04-12 |
Methods Of Forming A Capacitor Structure And Methods Of Manufacturing Semiconductor Devices Using The Same
App 20120064680 - Oh; Jung-Min ; et al. | 2012-03-15 |
Methods Of Fabricating Semiconductor Devices Using Preliminary Trenches With Epitaxial Growth
App 20120058616 - Ahn; Kevin ; et al. | 2012-03-08 |
Polishing Slurry And Method Of Manufacturing Semiconductor Device Using The Same
App 20120052682 - Kim; Sang-Kyun ; et al. | 2012-03-01 |
Semiconductor Integrated Circuit Device Including an Epitaxial Layer
App 20120049250 - Park; Sang-Jine ; et al. | 2012-03-01 |
Methods of forming a thin ferroelectric layer and methods of manufacturing a semiconductor device including the same
Grant 8,124,526 - Choi , et al. February 28, 2 | 2012-02-28 |
Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby
Grant 8,119,476 - Kang , et al. February 21, 2 | 2012-02-21 |
Semiconductor Device Including Dummy Gate Part And Method Of Fabricating The Same
App 20120028435 - Kwon; Byoung-ho ; et al. | 2012-02-02 |
Methods of fabricating a semiconductor device
Grant 8,084,344 - Lee , et al. December 27, 2 | 2011-12-27 |
Method for Fabricating Semiconductor Device
App 20110306208 - Lee; Jung-Won ; et al. | 2011-12-15 |
Methods of Manufacturing Semiconductor Devices
App 20110306197 - Kim; Young-Hoo ; et al. | 2011-12-15 |
Photo Key And Method Of Fabricating Semiconductor Device Using The Photo Key
App 20110294285 - Kwon; Byoung-ho ; et al. | 2011-12-01 |
Methods Of Forming A Pattern, Methods Of Forming A Gate Structure And Methods Of Manufacturing A Semiconductor Device Using The Same
App 20110287625 - Kang; Dae-Hyuk ; et al. | 2011-11-24 |
Methods Of Forming An Isolation Layer And Methods Of Manufacturing Semiconductor Devices Having An Isolation Layer
App 20110281415 - KANG; Dae-Hyuk ; et al. | 2011-11-17 |
Semiconductor device including dummy gate part and method of fabricating the same
Grant 8,053,845 - Kwon , et al. November 8, 2 | 2011-11-08 |
Slurry compositions for polishing metal, methods of polishing a metal object and methods of forming a metal wiring using the same
Grant 8,048,808 - Lee , et al. November 1, 2 | 2011-11-01 |
Apparatus for polishing a wafer and method for detecting a polishing end point by the same
Grant 8,038,508 - Lim , et al. October 18, 2 | 2011-10-18 |
Method of fabricating non-volatile memory integrated circuit device and non-volatile memory integrated circuit device fabricated using the same
Grant 8,030,150 - Kwon , et al. October 4, 2 | 2011-10-04 |
Photo key and method of fabricating semiconductor device using the photo key
Grant 8,018,078 - Kwon , et al. September 13, 2 | 2011-09-13 |
Method Of Manufacturing A Semiconductor Device Using An Etchant
App 20110217833 - Lee; Hyo-San ; et al. | 2011-09-08 |
Methods of forming semiconductor devices including multistage planarization and crystalization of a semiconductor layer
Grant 8,008,172 - Lim , et al. August 30, 2 | 2011-08-30 |
Methods Of Forming A Hole Having A Vertical Profile And Semiconductor Devices Having A Vertical Hole
App 20110201203 - Lee; Hyo-San ; et al. | 2011-08-18 |
Methods of Forming Integrated Circuit Capacitors Having Sidewall Supports and Capacitors Formed Thereby
App 20110159660 - Kang; Dae-Hyuk ; et al. | 2011-06-30 |
Methods Of Manufacturing Semiconductors Using Dummy Patterns
App 20110124194 - KWON; Byoung-Ho ; et al. | 2011-05-26 |
Low-resistance Conductive Pattern Structures And Methods Of Fabricating The Same
App 20110100693 - Kwon; Byoung-Ho ; et al. | 2011-05-05 |
Methods of forming stacked semiconductor devices with single-crystal semiconductor regions
Grant 7,932,163 - Lim , et al. April 26, 2 | 2011-04-26 |
Vertical-type Semiconductor Device
App 20110073866 - Kim; Young-Hoo ; et al. | 2011-03-31 |
Polishing Pads Including Sidewalls and Related Polishing Apparatuses
App 20110039480 - Choi; Jae-Kwang ; et al. | 2011-02-17 |
Method of fabricating semiconductor device
Grant 7,846,801 - Kim , et al. December 7, 2 | 2010-12-07 |
Method of manufacturing semiconductor device
App 20100267225 - Lee; Hyo-san ; et al. | 2010-10-21 |
Method of fabricating self-aligned contact pad using chemical mechanical polishing process
Grant 7,781,281 - Kim , et al. August 24, 2 | 2010-08-24 |
Method of fabricating a semiconductor device comprising high and low density patterned contacts
Grant 7,781,330 - Kim , et al. August 24, 2 | 2010-08-24 |
Method Of Fabricating Self-aligned Contact Pad Using Chemical Mechanical Polishing Process
App 20100124817 - KIM; Ho-Young ; et al. | 2010-05-20 |
Methods of fabricating semiconductor devices including channel layers having improved defect density and surface roughness characteristics
Grant 7,678,625 - Lim , et al. March 16, 2 | 2010-03-16 |
Photo Key And Method Of Fabricating Semiconductor Device Using The Photo Key
App 20100062548 - Kwon; Byoung-ho ; et al. | 2010-03-11 |
Semiconductor device having isolated pockets of insulation in conductive seal ring
Grant 7,675,175 - Tokitoh , et al. March 9, 2 | 2010-03-09 |
Method of fabricating self-aligned contact pad using chemical mechanical polishing process
Grant 7,670,942 - Kim , et al. March 2, 2 | 2010-03-02 |
Methods Of Forming A Thin Ferroelectric Layer And Methods Of Manufacturing A Semiconductor Device Including The Same
App 20100015729 - Choi; Suk-Hun ; et al. | 2010-01-21 |
Method Of Fabricating Non-volatile Memory Integrated Circuit Device And Non-volatile Memory Integrated Circuit Device Fabricated Using The Same
App 20090159952 - KWON; Byoung-ho ; et al. | 2009-06-25 |
Methods of fabricating a semiconductor device
App 20090155991 - Lee; Jong-Won ; et al. | 2009-06-18 |
Method of fabricating non-volatile memory integrated circuit device and non-volatile memory integrated circuit device fabricated using the same
Grant 7,535,052 - Kwon , et al. May 19, 2 | 2009-05-19 |
Semiconductor device including dummy gate part and method of fabricating the same
App 20090121296 - Kwon; Byoung-ho ; et al. | 2009-05-14 |
Method of forming self-aligned double pattern
Grant 7,531,456 - Kwon , et al. May 12, 2 | 2009-05-12 |
Method for manufacturing multi-level transistor comprising forming selective epitaxial growth layer
Grant 7,524,757 - Kim , et al. April 28, 2 | 2009-04-28 |
Apparatus for polishing a wafer and method for detecting a polishing end point by the same
App 20090098804 - Lim; Jong-Heun ; et al. | 2009-04-16 |
Slurry compositions for polishing metal, methods of polishing a metal object and methods of forming a metal wiring using the same
App 20090001051 - Lee; Jong-Won ; et al. | 2009-01-01 |
Resistive Random Access Memory Devices Including Sidewall Resistive Layers and Related Methods
App 20080247219 - Choi; Suk-Hun ; et al. | 2008-10-09 |
Method of fabricating a semiconductor device
App 20080206985 - Kim; Chae-Iyoung ; et al. | 2008-08-28 |
Methods of Forming Stacked Semiconductor Devices with Single-Crystal Semiconductor Regions
App 20080200009 - Lim; Jong-Heun ; et al. | 2008-08-21 |
Methods of forming semiconductor devices
App 20080200007 - Lim; Jong-Heun ; et al. | 2008-08-21 |
Method of polishing a layer and method of manufacturing a semiconductor device using the same
App 20080176403 - Kim; Jun-Yong ; et al. | 2008-07-24 |
Methods Of Fabricating Semiconductor Devices Including Channel Layers Having Improved Defect Density And Surface Roughness Characteristics
App 20080160726 - Lim; Jong Heun ; et al. | 2008-07-03 |
Method Of Manufacturing A Stack-type Semiconductor Device
App 20080138960 - Han; Sang-Yeob ; et al. | 2008-06-12 |
Methods Of Recycling A Substrate Including Using A Chemical Mechanical Polishing Process
App 20080124930 - Lim; Jong Heun ; et al. | 2008-05-29 |
Method of Fabricating Semiconductor Device
App 20080045019 - Kim; Sung-jun ; et al. | 2008-02-21 |
Method of Fabricating Non-Volatile Memory Integrated Circuit Device and Non-Volatile Memory Integrated Circuit Device Fabricated Using the Same
App 20080017915 - KWON; Byoung-ho ; et al. | 2008-01-24 |
Polishing slurry
App 20070293048 - Lee; Jon-won ; et al. | 2007-12-20 |
Test patterns and methods of controlling CMP process using the same
Grant 7,294,516 - Park , et al. November 13, 2 | 2007-11-13 |
Method of planarizing a semiconductor device
App 20070184663 - Kim; Jun-Yong ; et al. | 2007-08-09 |
Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same
App 20070155178 - Park; Young-rae ; et al. | 2007-07-05 |
Slurry and method for chemical-mechanical polishing
App 20070145012 - Park; Joon-Sang ; et al. | 2007-06-28 |
Method of forming self-aligned double pattern
App 20070148968 - Kwon; Byoung-Ho ; et al. | 2007-06-28 |
Method of fabricating self-aligned contact pad using chemical mechanical polishing process
App 20070072407 - Kim; Ho-Young ; et al. | 2007-03-29 |
Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same
Grant 7,196,010 - Park , et al. March 27, 2 | 2007-03-27 |
Multi-level transistor and related method
App 20070045671 - Kim; Sung-jun ; et al. | 2007-03-01 |
Chemical mechanical polishing slurry
Grant 7,144,815 - Lee , et al. December 5, 2 | 2006-12-05 |
Chemical mechanical polishing (CMP) slurries and CMP methods using and making the same
App 20060124594 - Lim; Jong-heun ; et al. | 2006-06-15 |
Semiconductor device
App 20060001165 - Tokitoh; Shunichi ; et al. | 2006-01-05 |
Slurry composition for use in chemical mechanical polishing of metal wiring
Grant 6,930,054 - Lee , et al. August 16, 2 | 2005-08-16 |
Test patterns and methods of controlling CMP process using the same
App 20050145602 - Park, Jeong-Heon ; et al. | 2005-07-07 |
Chemical/mechanical polishing slurry, and chemical mechanical polishing process and shallow trench isolation process employing the same
Grant 6,914,001 - Lee , et al. July 5, 2 | 2005-07-05 |
Chemical mechanical polishing slurry and chemical mechanical polishing method using the same
Grant 6,887,137 - Lee , et al. May 3, 2 | 2005-05-03 |
Test patterns and methods of controlling CMP process using the same
Grant 6,875,997 - Park , et al. April 5, 2 | 2005-04-05 |
Chemical mechanical polishing slurry
Grant 6,855,267 - Lee , et al. February 15, 2 | 2005-02-15 |
Sluury composition for use in chemical mechanical polishing of metal wiring
App 20040244911 - Lee, Jae Seok ; et al. | 2004-12-09 |
Chemical mechanical polishing slurry
App 20040154231 - Lee, Jae-dong ; et al. | 2004-08-12 |
Method for fabricating a contact pad of semiconductor device
Grant 6,716,732 - Park , et al. April 6, 2 | 2004-04-06 |
Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same
App 20040033693 - Park, Young-Rae ; et al. | 2004-02-19 |
Method for forming a filling film and method for forming shallow trench isolation of a semiconductor device using the same
App 20040009674 - Lee, Jong-Won ; et al. | 2004-01-15 |
Method of forming metal interconnection using plating and semiconductor device manufactured by the method
App 20030201538 - Lee, Jong-won ; et al. | 2003-10-30 |
Test patterns and methods of controlling CMP process using the same
App 20030193050 - Park, Jeong-Heon ; et al. | 2003-10-16 |
Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same
Grant 6,626,968 - Park , et al. September 30, 2 | 2003-09-30 |
Chemical mechanical polishing slurry and chemical mechanical polishing method using the same
App 20030166381 - Lee, Jae-Dong ; et al. | 2003-09-04 |
Method of forming metal interconnection using plating and semiconductor device manufactured by the method
Grant 6,610,596 - Lee , et al. August 26, 2 | 2003-08-26 |
Chemical/mechanical polishing slurry, and chemical mechanical polishing process and shallow trench isolation process employing the same
App 20030148616 - Lee, Jong-Won ; et al. | 2003-08-07 |
Wafer polishing slurry and chemical mechanical polishing (CMP) method using the same
Grant 6,514,862 - Lee , et al. February 4, 2 | 2003-02-04 |
Chemical/mechanical polishing slurry, and chemical mechanical polishing process and shallow trench isolation process employing the same
App 20030022499 - Lee, Jong-Won ; et al. | 2003-01-30 |
Chemical mechanical polishing slurry
App 20020123224 - Lee, Jae-dong ; et al. | 2002-09-05 |
Method for fabricating a contact pad of semiconductor device
App 20020086509 - Park, Young-Rae ; et al. | 2002-07-04 |
Wafer polishing slurry and chemical mechanical polishing (CMP) method using the same
App 20020064955 - Lee, Jae-dong ; et al. | 2002-05-30 |
Solution for chemical mechanical polishing and method of manufacturing copper metal interconnection layer using the same
App 20020061635 - Lee, Jong-won ; et al. | 2002-05-23 |
Method of controlling wafer polishing time using sample-skip algorithm and wafer polishing using the same
App 20020058460 - Lee, Jae-dong ; et al. | 2002-05-16 |
Semiconductor device including gate electrode having damascene structure and method of fabricating the same
App 20020052085 - Hwang, Hong-Kyu ; et al. | 2002-05-02 |
Methods of planarizing insulating layers on regions having different etching rates
App 20020045337 - Nam, Gee-won ; et al. | 2002-04-18 |
Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same
App 20020034875 - Park, Young-rae ; et al. | 2002-03-21 |
Slurry for chemical mechanical polishing of metal layer, method of preparing the slurry, and metallization method using the slurry
App 20020019128 - Lee, Jong-Won ; et al. | 2002-02-14 |
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