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Method Of Depositing Silicon Oxide Films
App 20220145452 - Yoon; Tae Ho ; et al. | 2022-05-12 |
Method of depositing silicon oxide films
Grant 11,261,523 - Yoon , et al. March 1, 2 | 2022-03-01 |
Substrate processing method and device manufactured by the same
Grant 11,195,845 - Yoo , et al. December 7, 2 | 2021-12-07 |
Substrate Supporting Plate, Thin Film Deposition Apparatus Including The Same, And Thin Film Deposition Method
App 20210054519 - Yoo; Yong Min ; et al. | 2021-02-25 |
Substrate Processing Method And Device Manufactured By The Same
App 20210035988 - Yoo; Tae Hee ; et al. | 2021-02-04 |
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
Grant 10,876,218 - Yoo , et al. December 29, 2 | 2020-12-29 |
Method Of Depositing Silicon Oxide Films
App 20200385859 - Yoon; Tae Ho ; et al. | 2020-12-10 |
Substrate processing method and device manufactured by the same
Grant 10,847,529 - Yoo , et al. November 24, 2 | 2020-11-24 |
Method of processing a substrate and a device manufactured by using the method
Grant 10,644,025 - Chun , et al. | 2020-05-05 |
Method of processing a substrate and a device manufactured by using the method
Grant 10,622,375 - Chun , et al. | 2020-04-14 |
Substrate processing method and device manufactured using the same
Grant 10,504,901 - Yoo , et al. Dec | 2019-12-10 |
Semiconductor device and manufacturing method thereof
Grant 10,438,965 - Kim , et al. O | 2019-10-08 |
Method of forming thin film
Grant 10,395,921 - Kim , et al. A | 2019-08-27 |
Method of processing substrate
Grant 10,381,226 - Yoo , et al. A | 2019-08-13 |
Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method
Grant 10,249,577 - Lee , et al. | 2019-04-02 |
Method Of Processing A Substrate And A Device Manufactured By Using The Method
App 20190081072 - Chun; Seung Ju ; et al. | 2019-03-14 |
Method Of Processing A Substrate And A Device Manufactured By Using The Method
App 20190035810 - Chun; Seung Ju ; et al. | 2019-01-31 |
Method of processing a substrate and a device manufactured by using the method
Grant 10,134,757 - Chun , et al. November 20, 2 | 2018-11-20 |
Substrate Processing Method And Device Manufactured Using The Same
App 20180315758 - Yoo; Tae Hee ; et al. | 2018-11-01 |
Substrate Processing Method And Device Manufactured By The Same
App 20180301460 - Yoo; Tae Hee ; et al. | 2018-10-18 |
Semiconductor device and manufacturing method thereof
Grant 10,032,792 - Kim , et al. July 24, 2 | 2018-07-24 |
Method Of Processing A Substrate And A Device Manufactured By Using The Method
App 20180130701 - Chun; Seung Ju ; et al. | 2018-05-10 |
Semiconductor Device And Manufacturing Method Thereof
App 20180069019 - Kim; Young Jae ; et al. | 2018-03-08 |
Semiconductor device and manufacturing method thereof
Grant 9,899,405 - Kim , et al. February 20, 2 | 2018-02-20 |
Semiconductor Device And Manufacturing Method Thereof
App 20180047749 - Kim; Young Jae ; et al. | 2018-02-15 |
Method Of Processing Substrate
App 20180033625 - Yoo; Yong Min ; et al. | 2018-02-01 |
Method Of Forming Metal Interconnection And Method Of Fabricating Semiconductor Apparatus Using The Method
App 20170338192 - Lee; Choong Man ; et al. | 2017-11-23 |
Substrate Supporting Plate, Thin Film Deposition Apparatus Including The Same, And Thin Film Deposition Method
App 20170271191 - Yoo; Yong Min ; et al. | 2017-09-21 |
Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
Grant 9,702,041 - Won , et al. July 11, 2 | 2017-07-11 |
Method Of Forming Thin Film
App 20160284534 - Kim; Young Hoon ; et al. | 2016-09-29 |
Apparatus Including 4-way Valve For Fabricating Semiconductor Device, Method Of Controlling Valve, And Method Of Fabricating Semiconductor Device Using The Apparatus
App 20160281234 - WON; Seok-jun ; et al. | 2016-09-29 |
Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
Grant 9,406,502 - Won , et al. August 2, 2 | 2016-08-02 |
Semiconductor Device And Manufacturing Method Thereof
App 20160181273 - Kim; Young Jae ; et al. | 2016-06-23 |
Method of depositing thin film
Grant 9,330,899 - Jung , et al. May 3, 2 | 2016-05-03 |
Lateral flow atomic layer deposition device
Grant 9,145,609 - Choi , et al. September 29, 2 | 2015-09-29 |
Apparatus Including 4-way Valve For Fabricating Semiconductor Device, Method Of Controlling Valve, And Method Of Fabricating Semiconductor Device Using The Apparatus
App 20150221497 - WON; Seok-jun ; et al. | 2015-08-06 |
Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
Grant 9,029,244 - Won , et al. May 12, 2 | 2015-05-12 |
Lateral-flow deposition apparatus and method of depositing film by using the apparatus
Grant 8,778,083 - Kim , et al. July 15, 2 | 2014-07-15 |
Method Of Depositing Thin Film
App 20140120738 - JUNG; In Soo ; et al. | 2014-05-01 |
Apparatus Including 4-way Valve For Fabricating Semiconductor Device, Method Of Controlling Valve, And Method Of Fabricating Semiconductor Device Using The Apparatus
App 20130029477 - WON; Seok-jun ; et al. | 2013-01-31 |
Lateral Flow Atomic Layer Deposition Device
App 20120272900 - CHOI; Young-Seok ; et al. | 2012-11-01 |
Methods of forming an amorphous silicon thin film
Grant 8,076,242 - Kim , et al. December 13, 2 | 2011-12-13 |
Apparatus Including 4-way Valve For Fabricating Semiconductor Device, Method Of Controlling Valve, And Method Of Fabricating Semiconductor Device Using The Apparatus
App 20110097905 - Won; Seok-jun ; et al. | 2011-04-28 |
Lateral-flow Deposition Apparatus And Method Of Depositing Film By Using The Apparatus
App 20110020545 - Kim; Ki Jong ; et al. | 2011-01-27 |
Method of Forming Metal Oxide and Apparatus for Performing the Same
App 20100170441 - Won; Seok-Jun ; et al. | 2010-07-08 |
Method of forming metal oxide
Grant 7,708,969 - Won , et al. May 4, 2 | 2010-05-04 |
Methods Of Forming An Amorphous Silicon Thin Film
App 20090278224 - Kim; Jong Su ; et al. | 2009-11-12 |
Method Of Depositing Silicon Oxide Films
App 20090041952 - Yoon; Tae Ho ; et al. | 2009-02-12 |
Method of Forming Metal Oxide and Apparatus for Performing the Same
App 20080056975 - Won; Seok-Jun ; et al. | 2008-03-06 |
Multiple inlet atomic layer deposition reactor
App 20060249077 - Kim; DaeYoun ; et al. | 2006-11-09 |
Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
App 20060156980 - Won; Seok-jun ; et al. | 2006-07-20 |
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