Yonekawa; Masami

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yonekawa; Masami.The latest application filed is for "container, processing apparatus, particle removing method, and method of manufacturing article".

Company Profile

3.14.16

Yonekawa; Masami - Utsunomiya JP
Yonekawa; Masami - Utsunomiya-shi JP
Yonekawa; Masami - Tsukuba N/A JP
YONEKAWA; Masami - Tsukuba-shi JP
Yonekawa; Masami - Atsugi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Imprint apparatus, method of operating the same, and method of manufacturing article Grant 11,036,149 - Matsuoka , et al. June 15, 2	2021-06-15
Imprint apparatus, method for manufacturing article, and exposure apparatus Grant 10,889,052 - Yonekawa , et al. January 12, 2	2021-01-12
Container, Processing Apparatus, Particle Removing Method, And Method Of Manufacturing Article App 20200176275 - Yonekawa; Masami	2020-06-04
Lithography apparatus and method of manufacturing article Grant 10,444,646 - Yonekawa Oc	2019-10-15
Lithography apparatus and article manufacturing method Grant 10,228,624 - Yonekawa	2019-03-12
Lithography Apparatus And Method Of Manufacturing Article App 20190064682 - Yonekawa; Masami	2019-02-28
Imprint Apparatus, Method Of Operating The Same, And Method Of Manufacturing Article App 20180356741 - Matsuoka; Yoichi ; et al.	2018-12-13
Imprint Apparatus, Method For Manufacturing Article, And Exposure Apparatus App 20170246792 - Yonekawa; Masami ; et al.	2017-08-31
Lithography Apparatus And Article Manufacturing Method App 20170235234 - Yonekawa; Masami	2017-08-17
Reflective original, exposure method, and device manufacturing method Grant 9,213,231 - Yonekawa , et al. December 15, 2	2015-12-15
Reflective Original, Exposure Method, And Device Manufacturing Method App 20150017573 - Yonekawa; Masami ; et al.	2015-01-15
Trapping device that traps particles in vacuum atmosphere Grant 8,814,970 - Yonekawa August 26, 2	2014-08-26
Trapping Device That Traps Particles In Vacuum Atmosphere App 20110186082 - YONEKAWA; Masami	2011-08-04
Exposure apparatus and original Grant 7,911,588 - Yonekawa , et al. March 22, 2	2011-03-22
Exposure Apparatus App 20100183987 - Yonekawa; Masami	2010-07-22
Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers Grant 7,670,754 - Edo , et al. March 2, 2	2010-03-02
Exposure Apparatus And Original App 20080246939 - Yonekawa; Masami ; et al.	2008-10-09
Apparatus and method for removing contaminant on original, method of manufacturing device, and original Grant 7,319,507 - Yonekawa , et al. January 15, 2	2008-01-15
Exposure Apparatus, Removal Method, And Device Manufacturing Method App 20070285635 - YONEKAWA; Masami	2007-12-13
Exposure Apparatus And Device Manufacturing Method App 20070127004 - Yonekawa; Masami	2007-06-07
Exposure apparatus and device manufacturing method Grant 7,193,682 - Yonekawa March 20, 2	2007-03-20
Apparatus and method for removing contaminant on original, method of manufacturing device, and original App 20060082743 - Yonekawa; Masami ; et al.	2006-04-20
Exposure apparatus and device manufacturing method App 20050183823 - Yonekawa, Masami	2005-08-25
Processing system and exposure apparatus using the same App 20050121144 - Edo, Ryo ; et al.	2005-06-09
Exposure apparatus and its control method, stage apparatus, and device manufacturing method Grant 6,741,328 - Yonekawa , et al. May 25, 2	2004-05-25
Exposure apparatus and control method for correcting an exposure optical system on the basis of an estimated magnification variation Grant 6,433,351 - Yonekawa August 13, 2	2002-08-13
Exposure Apparatus And Control Method For Correcting An Exposure Optical System On The Basis Of An Estimated Magnification Variation App 20020053644 - YONEKAWA, MASAMI	2002-05-09
Exposure apparatus and its control method, stage apparatus, and device manufacturing method App 20020044269 - Yonekawa, Masami ; et al.	2002-04-18
Projection exposure apparatus with an aberration compensation device of a projection lens Grant 5,184,176 - Unno , et al. February 2, 1	1993-02-02

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