Patent | Date |
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Motor Stator And Method For Manufacturing Motor Stator App 20220209621 - YODA; Yasushi ;   et al. | 2022-06-30 |
Stator of rotating armature and assembly method thereof Grant 10,951,082 - Shioiri , et al. March 16, 2 | 2021-03-16 |
Stator Of Rotating Armature And Assembly Method Thereof App 20190157931 - SHIOIRI; Mitsuaki ;   et al. | 2019-05-23 |
Stepper motor Grant 10,170,970 - Yoda , et al. J | 2019-01-01 |
Coil insulating structure/bobbin with grooves for inserting insulating slot closer Grant 10,044,241 - Nakatake , et al. August 7, 2 | 2018-08-07 |
Exposure Apparatus And Exposure Method, And Device Manufacturing Method App 20170371249 - YODA; Yasushi | 2017-12-28 |
Exposure apparatus and exposure method, and device manufacturing method Grant 9,772,564 - Yoda September 26, 2 | 2017-09-26 |
Stepper Motor App 20160079838 - YODA; Yasushi ;   et al. | 2016-03-17 |
Coil Insulating Structure Of Electromagnetic Motor Stator App 20150061452 - NAKATAKE; Kouji ;   et al. | 2015-03-05 |
Exposure Apparatus And Exposure Method, And Device Manufacturing Method App 20140132940 - YODA; Yasushi | 2014-05-15 |
Exposure Apparatus, Device Production Method, Cleaning Apparatus, Cleaning Method, And Exposure Method App 20120204913 - NAGASAKA; Hiroyuki ;   et al. | 2012-08-16 |
Exposure apparatus, device production method, cleaning apparatus, cleaning method, and exposure method Grant 8,189,168 - Nagasaka , et al. May 29, 2 | 2012-05-29 |
Stator for rotary electric machine Grant 8,063,523 - Oohashi , et al. November 22, 2 | 2011-11-22 |
Stator For Rotary Electric Machine App 20100225185 - Oohashi; Masaaki ;   et al. | 2010-09-09 |
Stator for rotary electric machines Grant 7,763,999 - Oohashi , et al. July 27, 2 | 2010-07-27 |
Electric motor Grant D610,988 - Oohashi , et al. March 2, 2 | 2010-03-02 |
Electric motor Grant D610,987 - Oohashi , et al. March 2, 2 | 2010-03-02 |
Exposure apparatus, device production method, cleaning apparatus, cleaning method, and exposure method App 20090251672 - Nagasaka; Hiroyuki ;   et al. | 2009-10-08 |
Maintenance method, exposure method and apparatus and device manufacturing method App 20090103064 - Yoda; Yasushi | 2009-04-23 |
Movable Body System, Exposure Apparatus, And Device Manufacturing Method App 20080123067 - Yoda; Yasushi ;   et al. | 2008-05-29 |
Exposure apparatus, device manufacturing method, cleaning method, and cleaning member App 20080055575 - Nagasaka; Hiroyuki ;   et al. | 2008-03-06 |
Stator For Rotary Electric Machines App 20080018185 - Oohashi; Masaaki ;   et al. | 2008-01-24 |
Shock-absorber units for use in a vacuum chamber for braking runaway moving objects App 20040075201 - Yoda, Yasushi ;   et al. | 2004-04-22 |
Stage device and exposure apparatus, and method of manufacturing a device Grant 6,654,100 - Yoda November 25, 2 | 2003-11-25 |
Stage devices exhibiting reduced deformation, and microlithography systems comprising same App 20030178579 - Tanaka, Keiichi ;   et al. | 2003-09-25 |
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same Grant 6,583,597 - Tanaka , et al. June 24, 2 | 2003-06-24 |
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same App 20020070699 - Tanaka, Keiichi ;   et al. | 2002-06-13 |
Stage device and exposure apparatus, and method of manufacturing a device App 20020015140 - Yoda, Yasushi | 2002-02-07 |