YILMAZ; Alpay
Patent Applications and Registrations
Patent applications and USPTO patent grants for YILMAZ; Alpay.The latest application filed is for "modular mainframe layout for supporting multiple semiconductor process modules or chambers".
- YILMAZ; Alpay - San Jose CA
| Patent | Date |
|---|---|
| Modular Mainframe Layout For Supporting Multiple Semiconductor Process Modules Or Chambers App 20220262652 - HARRIS; Randy A. ; et al. | 2022-08-18 |
| Modular Mainframe Layout For Supporting Multiple Semiconductor Process Modules Or Chambers App 20220262653 - HARRIS; Randy A. ; et al. | 2022-08-18 |
| Universal component lift apparatus, assemblies, and methods for electronic device manufacturing Grant 10,071,887 - Hudgens , et al. September 11, 2 | 2018-09-11 |
| Universal Component Lift Apparatus, Assemblies, And Methods For Electronic Device Manufacturing App 20150110586 - Hudgens; Jeffrey C. ; et al. | 2015-04-23 |
| Carrier Head Sweep Motor Current for In-Situ Monitoring App 20140020830 - Rangarajan; Jagan ; et al. | 2014-01-23 |
| Circular Track Actuator System App 20130199405 - Rangarajan; Jagan ; et al. | 2013-08-08 |
| Chemical Mechanical Polishing Platform Architecture App 20130115862 - RANGARAJAN; JAGAN ; et al. | 2013-05-09 |
| Chemical mechanical polisher having movable slurry dispensers and method Grant 8,414,357 - Wang , et al. April 9, 2 | 2013-04-09 |
| Modular base-plate semiconductor polisher architecture Grant 8,398,458 - Yilmaz March 19, 2 | 2013-03-19 |
| Apparatus For Chemical Mechanical Polishing App 20120322345 - Rangarajan; Jagan ; et al. | 2012-12-20 |
| High throughput chemical mechanical polishing system Grant 8,308,529 - D'Ambra , et al. November 13, 2 | 2012-11-13 |
| Polishing System Having A Track App 20120208438 - YILMAZ; ALPAY ; et al. | 2012-08-16 |
| Polishing system having a track Grant 8,172,643 - Yilmaz , et al. May 8, 2 | 2012-05-08 |
| Smart conditioner rinse station Grant 7,914,363 - Yilmaz , et al. March 29, 2 | 2011-03-29 |
| Method And Apparatus For Linear Pad Conditioning App 20100130107 - Yilmaz; Alpay ; et al. | 2010-05-27 |
| Chemical Mechanical Polisher Having Movable Slurry Dispensers And Method App 20100048106 - WANG; YULIN ; et al. | 2010-02-25 |
| Method For An Improved Chemical Mechanical Polishing System App 20100041316 - Wang; Yulin ; et al. | 2010-02-18 |
| Smart Conditioner Rinse Station App 20100029178 - Yilmaz; Alpay ; et al. | 2010-02-04 |
| Modular Base-plate Semiconductor Polisher Architecture App 20100003902 - Yilmaz; Alpay | 2010-01-07 |
| Multiple Window Pad Assembly App 20090305610 - Yilmaz; Alpay ; et al. | 2009-12-10 |
| Smart conditioner rinse station Grant 7,611,400 - Yilmaz , et al. November 3, 2 | 2009-11-03 |
| High Throughput Chemical Mechanical Polishing System App 20090270015 - D'Ambra; Allen L. ; et al. | 2009-10-29 |
| Polishing System Having A Track App 20090258574 - Yilmaz; Alpay ; et al. | 2009-10-15 |
| Electrochemical method for Ecmp polishing pad conditioning Grant 7,504,018 - Wang , et al. March 17, 2 | 2009-03-17 |
| Methods And Apparatus For Finding A Substrate Notch Center App 20080291448 - Chen; Hui ; et al. | 2008-11-27 |
| Platen Assembly For Electrochemical Mechanical Processing App 20080146121 - Ozgun; Omer ; et al. | 2008-06-19 |
| Method For Sequencing Substrates App 20080093022 - YILMAZ; ALPAY ; et al. | 2008-04-24 |
| Conditioning Disk Having Uniform Structures App 20080014845 - Yilmaz; Alpay ; et al. | 2008-01-17 |
| Method for sequencing substrates Grant 7,314,808 - Yilmaz , et al. January 1, 2 | 2008-01-01 |
| Process for high copper removal rate with good planarization and surface finish App 20070235344 - Jia; Renhe ; et al. | 2007-10-11 |
| Method and apparatus for transferring wafers App 20070231108 - Yilmaz; Alpay | 2007-10-04 |
| Smart Conditioner Rinse Station App 20070207704 - YILMAZ; ALPAY ; et al. | 2007-09-06 |
| Electrochemical Method For Ecmp Polishing Pad Conditioning App 20070095677 - Wang; You ; et al. | 2007-05-03 |
| Smart conditioner rinse station Grant 7,210,981 - Yilmaz , et al. May 1, 2 | 2007-05-01 |
| Conditioning element for electrochemical mechanical processing App 20060276111 - Tian; Yuan A. ; et al. | 2006-12-07 |
| Smart conditioner rinse station App 20060270322 - Yilmaz; Alpay ; et al. | 2006-11-30 |
| Method for sequencing substrates App 20060183408 - Yilmaz; Alpay ; et al. | 2006-08-17 |
| Load cup for chemical mechanical polishing Grant 7,044,832 - Yilmaz , et al. May 16, 2 | 2006-05-16 |
| Load cup for chemical mechanical polishing App 20050176349 - Yilmaz, Alpay ; et al. | 2005-08-11 |
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