| Patent | Date |
|---|
Measurement Of Properties Of Patterned Photoresist
App 20220236181 - Volkovich; Roie ; et al. | 2022-07-28 |
Device-like Metrology Targets
App 20220197152 - Levinski; Vladimir ; et al. | 2022-06-23 |
Method For Measuring And Correcting Misregistration Between Layers In A Semiconductor Device, And Misregistration Targets Useful Therein
App 20220199437 - Volkovich; Roie ; et al. | 2022-06-23 |
Device-like overlay metrology targets displaying Moire effects
Grant 11,355,375 - Volkovich , et al. June 7, 2 | 2022-06-07 |
System and method for error reduction for metrology measurements
Grant 11,353,799 - Volkovich , et al. June 7, 2 | 2022-06-07 |
System and Method for Error Reduction for Metrology Measurements
App 20220155693 - Volkovich; Roie ; et al. | 2022-05-19 |
Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein
Grant 11,302,544 - Volkovich , et al. April 12, 2 | 2022-04-12 |
Inter-step Feedforward Process Control In The Manufacture Of Semiconductor Devices
App 20220026798 - VOLKOVICH; ROIE ; et al. | 2022-01-27 |
Device-like Overlay Metrology Targets Displaying Moire Effects
App 20220020625 - Volkovich; Roie ; et al. | 2022-01-20 |
Misregistration Target Having Device-Scaled Features Useful in Measuring Misregistration of Semiconductor Devices
App 20220013468 - Volkovich; Roie ; et al. | 2022-01-13 |
Systems And Methods For Feedforward Process Control In The Manufacture Of Semiconductor Devices
App 20220004096 - VOLKOVICH; Roie ; et al. | 2022-01-06 |
Misregistration measurements using combined optical and electron beam technology
Grant 11,075,126 - Volkovich , et al. July 27, 2 | 2021-07-27 |
Device metrology targets and methods
Grant 11,054,752 - Amit , et al. July 6, 2 | 2021-07-06 |
Measurement of Overlay Error Using Device Inspection System
App 20210159128 - Hoo; Choon Hoong ; et al. | 2021-05-27 |
Measurement of overlay error using device inspection system
Grant 10,943,838 - Hoo , et al. March 9, 2 | 2021-03-09 |
Method For Measuring And Correcting Misregistration Between Layers In A Semiconductor Device, And Misregistration Targets Useful Therein
App 20200312687 - Volkovich; Roie ; et al. | 2020-10-01 |
Recipe optimization based zonal analysis
Grant 10,763,146 - Volkovich , et al. Sep | 2020-09-01 |
Misregistration Measurements Using Combined Optical and Electron Beam Technology
App 20200266112 - Volkovich; Roie ; et al. | 2020-08-20 |
Optimizing the utilization of metrology tools
Grant 10,725,385 - Holovinger , et al. | 2020-07-28 |
Device-like Metrology Targets
App 20200124981 - Levinski; Vladimir ; et al. | 2020-04-23 |
Device metrology targets and methods
Grant 10,571,811 - Amit , et al. Feb | 2020-02-25 |
Metrology targets with supplementary structures in an intermediate layer
Grant 10,551,749 - Levinski , et al. Fe | 2020-02-04 |
Reducing Device Overlay Errors
App 20200033737 - Yerushalmi; Liran ; et al. | 2020-01-30 |
Overlay control with non-zero offset prediction
Grant 10,409,171 - Adel , et al. Sept | 2019-09-10 |
Measurement of Overlay Error Using Device Inspection System
App 20190252270 - Hoo; Choon Hoong ; et al. | 2019-08-15 |
Lithography systems with integrated metrology tools having enhanced functionalities
Grant 10,331,050 - Amit , et al. | 2019-06-25 |
Recipe Optimization Based Zonal Analysis
App 20190088514 - VOLKOVICH; Roie ; et al. | 2019-03-21 |
Device Metrology Targets And Methods
App 20190004438 - Amit; Eran ; et al. | 2019-01-03 |
Optimizing The Utilization Of Metrology Tools
App 20180348649 - Holovinger; Tsachy ; et al. | 2018-12-06 |
Lithography Systems with Integrated Metrology Tools Having Enhanced Funcionalities
App 20180299791 - Amit; Eran ; et al. | 2018-10-18 |
Optimizing the utilization of metrology tools
Grant 10,095,121 - Holovinger , et al. October 9, 2 | 2018-10-09 |
Overlay Control with Non-Zero Offset Prediction
App 20180253017 - Adel; Michael E. ; et al. | 2018-09-06 |
Device-Like Metrology Targets
App 20180188663 - Levinski; Vladimir ; et al. | 2018-07-05 |
Device Metrology Targets And Methods
App 20160266505 - Amit; Eran ; et al. | 2016-09-15 |
Optimizing The Utilization Of Metrology Tools
App 20160131983 - Holovinger; Tsachy ; et al. | 2016-05-12 |
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