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Germanium Tetraflouride And Hydrogen Mixtures For An Ion Implantation System
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Fluorine ion implantation method and system
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Germanium tetraflouride and hydrogen mixtures for an ion implantation system
Grant 11,299,802 - Byl , et al. April 12, 2 | 2022-04-12 |
Fluorinated Compositions For Ion Source Performance Improvements In Nitrogen Ion Implantation
App 20220044908 - CHAMBERS; Barry Lewis ; et al. | 2022-02-10 |
Ion Implantation System with Mixture of Arc Chamber Materials
App 20210398773 - TANG; Ying ; et al. | 2021-12-23 |
Ion implantation system with mixture of arc chamber materials
Grant 11,139,145 - Tang , et al. October 5, 2 | 2021-10-05 |
Silicon implantation in substrates and provision of silicon precursor compositions therefor
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Germanium Tetraflouride And Hydrogen Mixtures For An Ion Implantation System
App 20210189550 - BYL; Oleg ; et al. | 2021-06-24 |
Plasma Immersion Methods For Ion Implantation
App 20210090860 - TANG; Ying ; et al. | 2021-03-25 |
Hydrogenated isotopically enriched boront trifluoride dopant source gas composition
Grant 10,920,087 - Bishop , et al. February 16, 2 | 2021-02-16 |
Ion Implantation System With Mixture Of Arc Chamber Materials
App 20210020402 - TANG; Ying ; et al. | 2021-01-21 |
Ion implantation processes and apparatus using gallium
Grant 10,892,137 - Sweeney , et al. January 12, 2 | 2021-01-12 |
Fluorine Ion Implantation System With Non-tungsten Materials And Methods Of Using
App 20200194265 - TANG; Ying ; et al. | 2020-06-18 |
Fluorine Ion Implantation Method And System
App 20200194264 - TANG; Ying ; et al. | 2020-06-18 |
Methods and assemblies using fluorine containing and inert gases for plasma flood gun operation
Grant 10,622,192 - Yedave , et al. | 2020-04-14 |
Ion Implantation Processes And Apparatus Using Gallium
App 20200083015 - SWEENEY; Joseph D. ; et al. | 2020-03-12 |
Carbon dopant gas and co-flow for implant beam and source life performance improvement
Grant 10,354,877 - Byl , et al. July 16, 2 | 2019-07-16 |
Methods And Assemblies Using Flourine Containing And Inert Gasses For Plasma Flood Gun (pfg) Operation
App 20190189402 - YEDAVE; Sharad N. ; et al. | 2019-06-20 |
Hydrogenated Isotopically Enriched Boront Trifluoride Dopant Source Gas Composition
App 20190136069 - Bishop; Steven ; et al. | 2019-05-09 |
Phosphorus Or Arsenic Ion Implantation Utilizing Enhanced Source Techniques
App 20190103275 - Byl; Oleg ; et al. | 2019-04-04 |
Fluid Supply Package
App 20190078696 - Tom; Glenn M. ; et al. | 2019-03-14 |
Phosphorus or arsenic ion implantation utilizing enhanced source techniques
Grant 10,109,488 - Byl , et al. October 23, 2 | 2018-10-23 |
Carbon Dopant Gas And Co-flow For Implant Beam And Source Life Performance Improvement
App 20180211839 - Byl; Oleg ; et al. | 2018-07-26 |
Ion source cleaning in semiconductor processing systems
Grant 9,991,095 - Sweeney , et al. June 5, 2 | 2018-06-05 |
Carbon dopant gas and co-flow for implant beam and source life performance improvement
Grant 9,960,042 - Byl , et al. May 1, 2 | 2018-05-01 |
Fluorinated compositions for ion source performance improvements in nitrogen ion implantation
App 20170330726 - Chambers; Barry Lewis ; et al. | 2017-11-16 |
Phosphorus Or Arsenic Ion Implantation Utilizing Enhanced Source Techniques
App 20170250084 - Byl; Oleg ; et al. | 2017-08-31 |
Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 9,685,304 - Kaim , et al. June 20, 2 | 2017-06-20 |
Silicon Implantation In Substrates And Provision Of Silicon Precursor Compositions Therefor
App 20160211137 - Tang; Ying ; et al. | 2016-07-21 |
Carbon Dopant Gas And Co-flow For Implant Beam And Source Life Performance Improvement
App 20160020102 - Byl; Oleg ; et al. | 2016-01-21 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20160013018 - Kaim; Robert ; et al. | 2016-01-14 |
Ion Implantation System And Method
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Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 9,142,387 - Kaim , et al. September 22, 2 | 2015-09-22 |
Ion implantation system and method
Grant 9,111,860 - Jones , et al. August 18, 2 | 2015-08-18 |
Ion Implantation System And Method
App 20140342538 - Jones; Edward E. ; et al. | 2014-11-20 |
Ion implantation system and method
Grant 8,796,131 - Jones , et al. August 5, 2 | 2014-08-05 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20140090598 - Kaim; Robert ; et al. | 2014-04-03 |
Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 8,598,022 - Kaim , et al. December 3, 2 | 2013-12-03 |
Ion Implantation System And Method
App 20120252195 - Jones; Edward E. ; et al. | 2012-10-04 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20120108044 - Kaim; Robert ; et al. | 2012-05-03 |
Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 8,138,071 - Kaim , et al. March 20, 2 | 2012-03-20 |
Ion Source Cleaning In Semiconductor Processing Systems
App 20120058252 - Sweeney; Joseph D. ; et al. | 2012-03-08 |
Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 8,062,965 - Kaim , et al. November 22, 2 | 2011-11-22 |
Ion Source Cleaning In Semiconductor Processing Systems
App 20110259366 - Sweeney; Joseph D. ; et al. | 2011-10-27 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20110159671 - KAIM; Robert ; et al. | 2011-06-30 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20110097882 - Kaim; Robert ; et al. | 2011-04-28 |
Methods of making and using cubic boron nitride composition, coating and articles made therefrom
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Cubic boron nitride composition, coating and articles made therefrom, methods of making and using said composition, coating and articles
App 20030087749 - Malshe, Ajay P. ; et al. | 2003-05-08 |
Cubic boron nitride composition, coating and articles made therefrom, methods of making and using said composition, coating and articles
App 20030022026 - Malshe, Ajay P. ; et al. | 2003-01-30 |
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