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Method Of Reducing Defects In A Multi-layer Pecvd Teos Oxide Film
App 20220119952 - Howlader; Rana ; et al. | 2022-04-21 |
Power Supply Signal Conditioning For An Electrostatic Chuck
App 20220102179 - Ye; Zheng John ; et al. | 2022-03-31 |
Plasma processing using multiple radio frequency power feeds for improved uniformity
Grant 11,276,562 - Ye , et al. March 15, 2 | 2022-03-15 |
An Advanced Ceramic Lid With Embedded Heater Elements And Embedded Rf Coil For Hdp Cvd And Inductively Coupled Plasma Treatment Chambers
App 20210375586 - KANGUDE; Abhijit ; et al. | 2021-12-02 |
RF electrostatic chuck filter circuit
Grant 11,189,517 - Ye , et al. November 30, 2 | 2021-11-30 |
Symmetric Vhf Source For A Plasma Reactor
App 20210313147 - Ramaswamy; Kartik ; et al. | 2021-10-07 |
Showerhead having a detachable gas distribution plate
Grant 11,130,142 - Lubomirsky , et al. September 28, 2 | 2021-09-28 |
Substrate Support Pedestal Having Plasma Confinement Features
App 20210296144 - LIN; Xing ; et al. | 2021-09-23 |
Symmetric VHF source for a plasma reactor
Grant 11,043,361 - Ramaswamy , et al. June 22, 2 | 2021-06-22 |
Dual Rf For Controllable Film Deposition
App 20210159048 - Parimi; Venkata Sharat Chandra ; et al. | 2021-05-27 |
Method And Apparatus Of Achieving High Input Impedance Without Using Ferrite Materials For Rf Filter Applications In Plasma
App 20210111000 - Ye; Zheng John ; et al. | 2021-04-15 |
Ceramic heater and esc with enhanced wafer edge performance
Grant 10,950,477 - Lin , et al. March 16, 2 | 2021-03-16 |
Methods and Apparatus for Controlling RF Parameters at Multiple Frequencies
App 20210059037 - Ye; Zheng John ; et al. | 2021-02-25 |
Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films
Grant 10,930,475 - Kulshreshtha , et al. February 23, 2 | 2021-02-23 |
Selective deposition of hardmask
Grant 10,923,334 - Thokachichu , et al. February 16, 2 | 2021-02-16 |
Electrostatic Chuck For Damage-free Substrate Processing
App 20210025056 - KULSHRESHTHA; Prashant Kumar ; et al. | 2021-01-28 |
Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers
Grant 10,879,041 - Ye , et al. December 29, 2 | 2020-12-29 |
Rf Electrostatic Chuck Filter Circuit
App 20200343123 - YE; Zheng John ; et al. | 2020-10-29 |
Showerhead Having A Detachable Gas Distribution Plate
App 20200238303 - LUBOMIRSKY; Dmitry ; et al. | 2020-07-30 |
Recursive Coils For Inductively Coupled Plasmas
App 20200219698 - YE; Zheng John ; et al. | 2020-07-09 |
Plasma Processing Using Multiple Radio Frequency Power Feeds For Improved Uniformity
App 20200203132 - YE; Zheng John ; et al. | 2020-06-25 |
Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same
Grant 10,663,491 - Ye , et al. | 2020-05-26 |
Showerhead having a detachable gas distribution plate
Grant 10,625,277 - Lubomirsky , et al. | 2020-04-21 |
Plasma processing using multiple radio frequency power feeds for improved uniformity
Grant 10,580,623 - Ye , et al. | 2020-03-03 |
High Impedance Rf Filter For Heater With Impedance Tuning Device
App 20200010957 - CHEN; Jian J. ; et al. | 2020-01-09 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials
App 20190355609 - KULSHRESHTHA; Prashant ; et al. | 2019-11-21 |
Rf Grounding Configuration For Pedestals
App 20190341232 - THOKACHICHU; Satya ; et al. | 2019-11-07 |
Selective Deposition Of Hardmask
App 20190341227 - THOKACHICHU; Satya ; et al. | 2019-11-07 |
High impedance RF filter for heater with impedance tuning device
Grant 10,450,653 - Chen , et al. Oc | 2019-10-22 |
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
Grant 10,403,535 - Ye , et al. Sep | 2019-09-03 |
Graded In-situ Charge Trapping Layers To Enable Electrostatic Chucking And Excellent Particle Performance For Boron-doped Carbon
App 20190252158 - KULSHRESHTHA; Prashant Kumar ; et al. | 2019-08-15 |
High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials
Grant 10,325,800 - Kulshreshtha , et al. | 2019-06-18 |
High Impedance Rf Filter For Heater With Impedance Tuning Device
App 20190177848 - CHEN; Jian J. ; et al. | 2019-06-13 |
Electrical Feeds With Low Loss Coating Materials For High Temperature Electrostatic Chucks
App 20180337081 - YE; Zheng John | 2018-11-22 |
High impedance RF filter for heater with impedance tuning device
Grant 10,125,422 - Chen , et al. November 13, 2 | 2018-11-13 |
Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films
Grant 10,128,088 - Kulshreshtha , et al. November 13, 2 | 2018-11-13 |
Edge hump reduction faceplate by plasma modulation
Grant 10,100,408 - Ha , et al. October 16, 2 | 2018-10-16 |
Voltage-current Probe For Measuring Radio-frequency Electrical Power In A High-temperature Environment And Method Of Calibrating The Same
App 20180231587 - YE; Zheng John ; et al. | 2018-08-16 |
Symmetric VHF Source for a Plasma Reactor
App 20180053630 - Ramaswamy; Kartik ; et al. | 2018-02-22 |
Electrostatic Chuck Impedance Evaluation
App 20170345698 - HAMMOND, IV; Edward P. ; et al. | 2017-11-30 |
Symmetric VHF source for a plasma reactor
Grant 9,824,862 - Ramaswamy , et al. November 21, 2 | 2017-11-21 |
Substrate Support Pedestal Having Plasma Confinement Features
App 20170306494 - LIN; Xing ; et al. | 2017-10-26 |
Showerhead Having A Detachable Gas Distribution Plate
App 20170178863 - LUBOMIRSKY; DMITRY ; et al. | 2017-06-22 |
Method And Apparatus For Clamping And Declamping Substrates Using Electrostatic Chucks
App 20170162417 - YE; Zheng John ; et al. | 2017-06-08 |
Showerhead having a detachable gas distribution plate
Grant 9,610,591 - Lubomirsky , et al. April 4, 2 | 2017-04-04 |
Method And Apparatus Of Achieving High Input Impedance Without Using Ferrite Materials For Rf Filter Applications In Plasma Chambers
App 20170069464 - YE; Zheng John ; et al. | 2017-03-09 |
Ceramic Heater And Esc With Enhanced Wafer Edge Performance
App 20170040198 - LIN; Xing ; et al. | 2017-02-09 |
Graded In-situ Charge Trapping Layers To Enable Electrostatic Chucking And Excellent Particle Performance For Boron-doped Carbon Films
App 20160358804 - KULSHRESHTHA; Prashant Kumar ; et al. | 2016-12-08 |
Methods of directing magnetic fields in a plasma source, and associated systems
Grant 9,305,749 - Ye , et al. April 5, 2 | 2016-04-05 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials
App 20160064264 - KULSHRESHTHA; Prashant ; et al. | 2016-03-03 |
Method And Apparatus Of Processing Wafers With Compressive Or Tensile Stress At Elevated Temperatures In A Plasma Enhanced Chemical Vapor Deposition System
App 20160049323 - YE; Zheng John ; et al. | 2016-02-18 |
Edge Hump Reduction Faceplate By Plasma Modulation
App 20150247237 - HA; Sungwon ; et al. | 2015-09-03 |
Methods Of Directing Magnetic Fields In A Plasma Source, And Associated Systems
App 20150228456 - YE; ZHENG JOHN ; et al. | 2015-08-13 |
Plasma Processing Using Multiple Radio Frequency Power Feeds For Improved Uniformity
App 20150136325 - YE; Zheng John ; et al. | 2015-05-21 |
Symmetric Vhf Source For A Plasma Reactor
App 20150075719 - Ramaswamy; Kartik ; et al. | 2015-03-19 |
Symmetric VHF source for a plasma reactor
Grant 8,920,597 - Ramaswamy , et al. December 30, 2 | 2014-12-30 |
Apparatus and method for analyzing thermal properties of composite structures
Grant 8,878,926 - Ye , et al. November 4, 2 | 2014-11-04 |
High Impedance Rf Filter For Heater With Impedance Tuning Device
App 20140302256 - CHEN; Jian J. ; et al. | 2014-10-09 |
Showerhead Having A Detachable Gas Distribution Plate
App 20140209027 - LUBOMIRSKY; DMITRY ; et al. | 2014-07-31 |
Apparatus And Method For Analyzing Thermal Properties Of Composite Structures
App 20120069174 - Ye; Zheng John ; et al. | 2012-03-22 |
Symmetric Vhf Source For A Plasma Reactor
App 20120043023 - Ramaswamy; Kartik ; et al. | 2012-02-23 |
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