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Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturin Grant 10,529,531 - Oshima , et al. J | 2020-01-07 |
Ion Source And Electron Source Having Single-atom Termination Structure, Tip Having Single-atom Termination Structure, Gas Field App 20190164719 - OSHIMA; Chuhei ;   et al. | 2019-05-30 |
Method for acquiring image and ion beam apparatus Grant 10,276,343 - Kozakai , et al. | 2019-04-30 |
Method For Acquiring Image And Ion Beam Apparatus App 20180269029 - KOZAKAI; Tomokazu ;   et al. | 2018-09-20 |
Method for acquiring image and ion beam apparatus Grant 10,014,157 - Kozakai , et al. July 3, 2 | 2018-07-03 |
Focused ion beam apparatus Grant 9,793,085 - Yasaka , et al. October 17, 2 | 2017-10-17 |
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus Grant 9,773,634 - Kozakai , et al. September 26, 2 | 2017-09-26 |
Iridium Tip, Gas Field Ion Source, Focused Ion Beam Apparatus, Electron Source, Electron Microscope, Electron Beam Applied Analysis Apparatus, Ion-Electron Multi-Beam Apparatus, Scanning Probe Microscope, and Mask Repair Apparatus App 20170148603 - Kozakai; Tomokazu ;   et al. | 2017-05-25 |
Emitter structure, gas ion source and focused ion beam system Grant 9,640,361 - Yasaka , et al. May 2, 2 | 2017-05-02 |
Method For Acquiring Image And Ion Beam Apparatus App 20170092461 - KOZAKAI; Tomokazu ;   et al. | 2017-03-30 |
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus Grant 9,583,299 - Kozakai , et al. February 28, 2 | 2017-02-28 |
Repair Apparatus App 20160322123 - Aramaki; Fumio ;   et al. | 2016-11-03 |
Focused Ion Beam Apparatus App 20160225574 - YASAKA; Anto ;   et al. | 2016-08-04 |
Repair apparatus Grant 9,378,858 - Aramaki , et al. June 28, 2 | 2016-06-28 |
Focused ion beam apparatus with precious metal emitter surface Grant 9,336,979 - Yasaka , et al. May 10, 2 | 2016-05-10 |
Charged particle beam apparatus, thin film forming method, defect correction method and device forming method Grant 9,257,273 - Koyama , et al. February 9, 2 | 2016-02-09 |
Emitter Structure, Gas Ion Source And Focused Ion Beam System App 20150357147 - YASAKA; Anto ;   et al. | 2015-12-10 |
Emitter structure, gas ion source and focused ion beam system Grant 9,129,771 - Yasaka , et al. September 8, 2 | 2015-09-08 |
Focused Ion Beam Apparatus App 20150162160 - YASAKA; Anto ;   et al. | 2015-06-11 |
Method for fabricating emitter Grant 8,999,178 - Sugiyama , et al. April 7, 2 | 2015-04-07 |
Repair Apparatus App 20150053866 - Aramaki; Fumio ;   et al. | 2015-02-26 |
Nitrogen ions from a gas field ion source held at a pressure of 1.0 x 10^(-6) pa to 1.0 x 10^(-2) pa Grant 8,963,100 - Yasaka , et al. February 24, 2 | 2015-02-24 |
Iridium Tip, Gas Field Ion Source, Focused Ion Beam Apparatus, Electron Source, Electron Microscope, Electron Beam Applied Analysis Apparatus, Ion-Electron Multi-Beam Apparatus, Scanning Probe Microscope, and Mask Repair Apparatus App 20150047079 - Kozakai; Tomokazu ;   et al. | 2015-02-12 |
Emitter Structure, Gas Ion Source And Focused Ion Beam System App 20140291542 - YASAKA; Anto ;   et al. | 2014-10-02 |
Method For Fabricating Emitter App 20140246397 - SUGIYAMA; Yasuhiko ;   et al. | 2014-09-04 |
Method for fabricating emitter Grant 8,764,994 - Sugiyama , et al. July 1, 2 | 2014-07-01 |
Method For Fabricating Emitter App 20130248483 - SUGIYAMA; Yasuhiko ;   et al. | 2013-09-26 |
Charged Particle Beam Apparatus, Thin Film Forming Method, Defect Correction Method And Device Forming Method App 20130224889 - Koyama; Yoshihiro ;   et al. | 2013-08-29 |
Defect repair apparatus and method for EUV mask using a hydrogen ion beam Grant 8,460,842 - Ogawa , et al. June 11, 2 | 2013-06-11 |
Focused Ion Beam Apparatus App 20130099133 - YASAKA; Anto ;   et al. | 2013-04-25 |
Defect repair apparatus and method for EUV mask App 20110189593 - Ogawa; Takashi ;   et al. | 2011-08-04 |
Photomask correction method using composite charged particle beam, and device used in the correction method App 20070267579 - Sugiyama; Yasuhiko ;   et al. | 2007-11-22 |
Photomask correction method using composite charged particle beam, and device used in the correction method Grant 7,172,839 - Sugiyama , et al. February 6, 2 | 2007-02-06 |
Photomask correction method using composite charged particle beam, and device used in the correction method App 20040131953 - Sugiyama, Yasuhiko ;   et al. | 2004-07-08 |
Method of correcting a pattern film Grant 4,902,530 - Yasaka , et al. February 20, 1 | 1990-02-20 |