YANAGITA; Kazutaka

Patent Applications and Registrations

Patent applications and USPTO patent grants for YANAGITA; Kazutaka.The latest application filed is for "solid material container and solid material product in which said solid material container is filled with a solid material".

Company Profile

2.52.66

YANAGITA; Kazutaka - Tsukuba JP
YANAGITA; Kazutaka - Tsukuba-shi JP
Yanagita; Kazutaka - Yokohama JP
Yanagita; Kazutaka - Yokohama-shi JP
Yanagita; Kazutaka - Ibaraki JP
Yanagita; Kazutaka - Ibaraki-ken JP
Yanagita; Kazutaka - Kanagawa JP
Yanagita, Kazutaka - Kanagawa-ken JP
Yanagita; Kazutaka - Ohta-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Solid Material Container And Solid Material Product In Which Said Solid Material Container Is Filled With A Solid Material App 20210371977 - NAKAGAWA; Toshiyuki ; et al.	2021-12-02
Solid Material Container And Solid Material Product In Which Said Solid Material Container Is Filled With A Solid Material App 20200362456 - NAKAGAWA; Toshiyuki ; et al.	2020-11-19
Precursor Supply System And Precursors Supply Method App 20190134586 - NAKAGAWA; Toshiyuki ; et al.	2019-05-09
Vapor Disposition Of Silicon-containing Films Using Penta-substituted Disilanes App 20190027357 - Girard; Jean-Marc ; et al.	2019-01-24
Vapor Deposition Of Silicon-containing Films Using Penta-substituted Disilanes App 20170186597 - GIRARD; Jean-Marc ; et al.	2017-06-29
Vapor deposition of silicon-containing films using penta-substituted disilanes Grant 9,633,838 - Girard , et al. April 25, 2	2017-04-25
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,548,198 - Hirose , et al. January 17, 2	2017-01-17
Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium Grant 9,396,929 - Hirose , et al. July 19, 2	2016-07-19
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,343,290 - Hirose , et al. May 17, 2	2016-05-17
Vapor Deposition Of Silicon-containing Films Using Penta-substituted Disilanes App 20160111272 - GIRARD; Jean-Marc ; et al.	2016-04-21
Metal heterocyclic compounds for deposition of thin films Grant 9,109,281 - Gatineau , et al. August 18, 2	2015-08-18
Adsorbent for removing metal compounds and method for same Grant 9,000,201 - Sakata , et al. April 7, 2	2015-04-07
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20140287596 - HIROSE; Yoshiro ; et al.	2014-09-25
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20140287598 - HIROSE; Yoshiro ; et al.	2014-09-25
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium Grant 8,815,751 - Hirose , et al. August 26, 2	2014-08-26
Metal Heterocyclic Compounds For Deposition Of Thin Films App 20140119977 - GATINEAU; Julien ; et al.	2014-05-01
Method Of Manufacturing A Semiconductor Device, Substrate Processing Apparatus And Recording Medium App 20140080318 - HIROSE; Yoshiro ; et al.	2014-03-20
Metal heterocyclic compounds for deposition of thin films Grant 8,636,845 - Gatineau , et al. January 28, 2	2014-01-28
Method of forming silicon oxide containing films Grant 8,613,976 - Dussarrat , et al. December 24, 2	2013-12-24
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium App 20130149872 - HIROSE; Yoshiro ; et al.	2013-06-13
Bubbling Supply System For Stable Precursor Supply App 20130092241 - SAKATA; Yoichi ; et al.	2013-04-18
Metal Nitride Containing Film Deposition Using Combination Of Amino-metal And Halogenated Metal Precursors App 20130078376 - Higashino; Katsuko ; et al.	2013-03-28
Adsorbent For Removing Metal Compounds And Method For Same App 20130066094 - Sakata; Yoichi ; et al.	2013-03-14
Bubbling supply system for stable precursor supply Grant 8,348,248 - Sakata , et al. January 8, 2	2013-01-08
Method Of Forming Silicon Oxide Containing Films App 20120276292 - DUSSARRAT; Christian ; et al.	2012-11-01
Method of forming silicon oxide containing films Grant 8,227,032 - Dussarrat , et al. July 24, 2	2012-07-24
Method of manufacturing image displaying apparatus Grant 8,152,582 - Nagasaka , et al. April 10, 2	2012-04-10
Tellurium precursors for film deposition Grant 8,101,237 - Okubo , et al. January 24, 2	2012-01-24
Bubbling Supply System For Stable Precursor Supply App 20100230834 - SAKATA; Yoichi ; et al.	2010-09-16
Manufacturing Method For Image Display Apparatus App 20100146767 - Yanagita; Kazutaka ; et al.	2010-06-17
Deposition Method Of Ternary Films App 20100104755 - Dussarrat; Christian ; et al.	2010-04-29
Metal Heterocyclic Compounds For Deposition Of Thin Films App 20090321733 - GATINEAU; Julien ; et al.	2009-12-31
Tellurium Precursors For Film Deposition App 20090299084 - OKUBO; Shingo ; et al.	2009-12-03
Method Of Manufacturing Image Displaying Apparatus App 20090270006 - Nagasaka; Kazuhiro ; et al.	2009-10-29
Method Of Forming Silicon Oxide Containing Films App 20090232985 - Dussarrat; Christian ; et al.	2009-09-17
Sample separating apparatus and method, and substrate manufacturing method Grant 7,579,257 - Yanagita , et al. August 25, 2	2009-08-25
Germanium Precursors For Gst Film Deposition App 20090162973 - GATINEAU; Julien ; et al.	2009-06-25
Precursor for film formation and method for forming ruthenium-containing film Grant 7,544,389 - Dussarrat , et al. June 9, 2	2009-06-09
Deposition Of Transition Metal Carbide Containing Films App 20080268642 - Yanagita; Kazutaka ; et al.	2008-10-30
Method for Cleaning Film-Forming Apparatuses App 20080121249 - Gatineau; Julien ; et al.	2008-05-29
Method for producing silicon nitride films and process for fabricating semiconductor devices using said method Grant 7,351,670 - Hoshi , et al. April 1, 2	2008-04-01
Precursor For Film Formation And Method For Forming Ruthenium-Containing Film App 20080038465 - Dussarrat; Christian ; et al.	2008-02-14
Method and apparatus for separating sample Grant 7,017,830 - Yanagita , et al. March 28, 2	2006-03-28
Method and apparatus for processing composite member Grant 6,979,629 - Yanagita , et al. December 27, 2	2005-12-27
Sample processing system Grant 6,971,432 - Yanagita , et al. December 6, 2	2005-12-06
Sample processing system App 20050236114 - Yanagita, Kazutaka ; et al.	2005-10-27
Separating apparatus and processing method for plate member Grant 6,946,052 - Yanagita , et al. September 20, 2	2005-09-20
Method and apparatus for separating member Grant 6,946,046 - Yanagita , et al. September 20, 2	2005-09-20
Method for producing silicon nitride films and process for fabricating semiconductor devices using said method App 20050158983 - Hoshi, Takeshi ; et al.	2005-07-21
Separating apparatus, separating method, and method of manufacturing semiconductor substrate Grant 6,900,114 - Ohmi , et al. May 31, 2	2005-05-31
Separating apparatus and processing method for plate member Grant 6,867,110 - Yanagita , et al. March 15, 2	2005-03-15
Sample separating apparatus and method, and substrate manufacturing method App 20050045274 - Yanagita, Kazutaka ; et al.	2005-03-03
Sample separating apparatus and method, and substrate manufacturing method Grant 6,860,963 - Yanagita , et al. March 1, 2	2005-03-01
Method And Apparatus For Separating Member App 20050034821 - Yanagita, Kazutaka ; et al.	2005-02-17
Method and apparatus for separating member Grant 6,852,187 - Yanagita , et al. February 8, 2	2005-02-08
Plate member separating apparatus and method Grant 6,833,312 - Yanagita , et al. December 21, 2	2004-12-21
Method and apparatus for separating member Grant 6,825,099 - Yanagita , et al. November 30, 2	2004-11-30
Separating apparatus and processing method for plate member App 20040221963 - Yanagita, Kazutaka ; et al.	2004-11-11
Bonding system and semiconductor substrate manufacturing method App 20040171231 - Yanagita, Kazutaka ; et al.	2004-09-02
Method and apparatus for separating composite member using fluid App 20040171233 - Ohmi, Kazuaki ; et al.	2004-09-02
Etching method App 20040169011 - Takanashi, Kazuhito ; et al.	2004-09-02
Sample processing apparatus and method Grant 6,773,534 - Yanagita , et al. August 10, 2	2004-08-10
Processing apparatus for processing substrate by process solution App 20040152319 - Yamagata, Kenji ; et al.	2004-08-05
Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method Grant 6,767,840 - Uehara , et al. July 27, 2	2004-07-27
Processing apparatus App 20040124088 - Tsuboi, Takashi ; et al.	2004-07-01
Method and apparatus for separating composite member using fluid Grant 6,746,559 - Ohmi , et al. June 8, 2	2004-06-08
Separating apparatus, separating method, and method of manufacturing semiconductor substrate App 20040082146 - Ohmi, Kazuaki ; et al.	2004-04-29
Method and apparatus for processing composite member App 20040067621 - Yanagita, Kazutaka ; et al.	2004-04-08
Method and apparatus for separating sample Grant 6,712,288 - Yanagita , et al. March 30, 2	2004-03-30
Method and apparatus for separating sample App 20040058537 - Yanagita, Kazutaka ; et al.	2004-03-25
Sample processing system App 20040045679 - Yanagita, Kazutaka ; et al.	2004-03-11
Sample processing system Grant 6,672,358 - Yanagita , et al. January 6, 2	2004-01-06
Composite member separating method, thin film manufacturing method, and composite member separating apparatus Grant 6,653,205 - Yanagita , et al. November 25, 2	2003-11-25
Method and apparatus for processing composite member Grant 6,653,206 - Yanagita , et al. November 25, 2	2003-11-25
Sample processing system Grant 6,629,539 - Yanagita , et al. October 7, 2	2003-10-07
Substrate and method of manufacturing the same Grant 6,624,047 - Sakaguchi , et al. September 23, 2	2003-09-23
Separating apparatus, separating method, and method of manufacturing semiconductor substrate Grant 6,609,446 - Ohmi , et al. August 26, 2	2003-08-26
Sample processing apparatus and method Grant 6,609,553 - Yanagita , et al. August 26, 2	2003-08-26
Method of separating composite member and process for producing thin film Grant 6,605,518 - Ohmi , et al. August 12, 2	2003-08-12
Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof Grant 6,597,039 - Ohmi , et al. July 22, 2	2003-07-22
Sample separating apparatus and method, and substrate manufacturing method App 20030116275 - Yanagita, Kazutaka ; et al.	2003-06-26
Sample separating apparatus and method, and substrate manufacturing method App 20030102082 - Yanagita, Kazutaka ; et al.	2003-06-05
Member separating apparatus and processing apparatus App 20030089455 - Sakaguchi, Kiyofumi ; et al.	2003-05-15
Method and apparatus for separating member App 20030010445 - Yanagita, Kazutaka ; et al.	2003-01-16
Method and apparatus for separating member App 20030003687 - Yanagita, Kazutaka ; et al.	2003-01-02
Method and apparatus for separating composite member using fluid App 20020179243 - Ohmi, Kazuaki ; et al.	2002-12-05
Separating apparatus and processing method for plate memeber App 20020174958 - Yanagita, Kazutaka ; et al.	2002-11-28
Plate member separating apparatus and method App 20020174959 - Yanagita, Kazutaka ; et al.	2002-11-28
Method and apparatus for separating composite member using fluid Grant 6,475,323 - Ohmi , et al. November 5, 2	2002-11-05
Sample processing apparatus and method App 20020157791 - Yanagita, Kazutaka ; et al.	2002-10-31
Sample processing apparatus and method App 20020157794 - Yanagita, Kazutaka ; et al.	2002-10-31
Sample processing system App 20020148570 - Yanagita, Kazutaka ; et al.	2002-10-17
Sample separating apparatus and method, and substrate manufacturing method App 20020134504 - Yanagita, Kazutaka ; et al.	2002-09-26
Object separating apparatus and method, and method of manufacturing semiconductor substrate Grant 6,436,226 - Omi , et al. August 20, 2	2002-08-20
Sample processing apparatus and method Grant 6,427,748 - Yanagita , et al. August 6, 2	2002-08-06
Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof App 20020093047 - Ohmi, Kazuaki ; et al.	2002-07-18
Sample separating apparatus and method, and substrate manufacturing method Grant 6,418,999 - Yanagita , et al. July 16, 2	2002-07-16
Method and apparatus for separating composite member using fluid App 20020088558 - Ohmi, Kazuaki ; et al.	2002-07-11
Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method App 20020081822 - Yanagita, Kazutaka ; et al.	2002-06-27
Method and apparatus for separating sample App 20020070291 - Yanagita, Kazutaka ; et al.	2002-06-13
Method and apparatus for producing photoelectric conversion device Grant 6,391,743 - Iwane , et al. May 21, 2	2002-05-21
Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus Grant 6,391,067 - Yanagita , et al. May 21, 2	2002-05-21
Method and apparatus for separating composite member using fluid Grant 6,382,292 - Ohmi , et al. May 7, 2	2002-05-07
Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method Grant 6,376,332 - Yanagita , et al. April 23, 2	2002-04-23
Method and apparatus for separating sample App 20020045327 - Yanagita, Kazutaka ; et al.	2002-04-18
Method And Apparatus For Separating Composite Member Using Fluid App 20020029849 - OHMI, KAZUAKI ; et al.	2002-03-14
Method and apparatus for processing composite member App 20020025652 - Yanagita, Kazutaka ; et al.	2002-02-28
Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus App 20020013065 - Yanagita, Kazutaka ; et al.	2002-01-31
Wafer Processing Apparatus And Method, Wafer Convey Robot, Semiconductor Substrate Fabrication Method, And Semiconductor Fabrication Apparatus App 20020002767 - YANAGITA, KAZUTAKA ; et al.	2002-01-10
Porous Region Removing Method And Semiconductor Substrate Manufacturing Method App 20010044216 - SAKAGUCHI, KIYOFUMI ; et al.	2001-11-22
Composite member separating method, thin film manufacturing method, and composite member separating apparatus App 20010003668 - Yanagita, Kazutaka ; et al.	2001-06-14
Member Separating Apparatus And Processing Apparatus App 20010001975 - SAKAGUCHI, KIYOFUMI ; et al.	2001-05-31
Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method Grant 6,199,563 - Uehara , et al. March 13, 2	2001-03-13

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