| Patent | Date |
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Injection Mold Cooling Techniques
App 20220193969 - Smith; Zakary Tyler ; et al. | 2022-06-23 |
Annealing Apparatus Using Two Wavelengths Of Radiation
App 20210053147 - JENNINGS; Dean ; et al. | 2021-02-25 |
Annealing apparatus using two wavelengths of radiation
Grant 10,857,623 - Jennings , et al. December 8, 2 | 2020-12-08 |
Method of thermal processing structures formed on a substrate
Grant 10,840,100 - Carey , et al. November 17, 2 | 2020-11-17 |
Method Of Thermal Processing Structures Formed On A Substrate
App 20190139773 - CAREY; Paul ; et al. | 2019-05-09 |
Method of thermal processing structures formed on a substrate
Grant 10,141,191 - Carey , et al. Nov | 2018-11-27 |
Annealing Apparatus Using Two Wavelengths Of Radiation
App 20180099353 - JENNINGS; Dean ; et al. | 2018-04-12 |
Annealing apparatus using two wavelengths of radiation
Grant 9,839,976 - Jennings , et al. December 12, 2 | 2017-12-12 |
Thermal processing by scanning a laser line beam
Grant 9,737,959 - Jennings , et al. August 22, 2 | 2017-08-22 |
Annealing Apparatus Using Two Wavelengths Of Radiation
App 20150069028 - JENNINGS; Dean ; et al. | 2015-03-12 |
Thermal processing by scanning a laser line beam
App 20150053659 - Jennings; Dean C. ; et al. | 2015-02-26 |
Single-chamber sequential curing of semiconductor wafers
Grant 8,951,348 - Shrinivasan , et al. February 10, 2 | 2015-02-10 |
Annealing apparatus using two wavelengths of laser radiation
Grant 8,907,247 - Jennings , et al. December 9, 2 | 2014-12-09 |
Annealing apparatus using two wavelengths of continuous wave laser radiation
Grant 8,890,024 - Jennings , et al. November 18, 2 | 2014-11-18 |
Scanned laser light source
Grant 8,829,393 - Jennings , et al. September 9, 2 | 2014-09-09 |
Annealing apparatus using two wavelengths of continuous wave laser radiation
Grant 8,765,618 - Jennings , et al. July 1, 2 | 2014-07-01 |
Annealing apparatus using two wavelengths of continuous wave laser radiation
Grant 8,653,408 - Jennings , et al. February 18, 2 | 2014-02-18 |
Method of thermal processing structures formed on a substrate
Grant 8,518,838 - Carey , et al. August 27, 2 | 2013-08-27 |
Annealing Apparatus Using Two Wavelengths Of Continuous Wave Laser Radiation
App 20120261395 - Jennings; Dean ; et al. | 2012-10-18 |
Thermal flux processing by scanning a focused line beam
Grant 8,288,685 - Jennings , et al. October 16, 2 | 2012-10-16 |
Annealing Apparatus Using Two Wavelengths Of Continuous Wave Laser Radiation
App 20120234801 - JENNINGS; Dean ; et al. | 2012-09-20 |
Annealing Apparatus Using Two Wavelengths Of Continuous Wave Laser Radiation
App 20120238111 - Jennings; Dean ; et al. | 2012-09-20 |
Annealing Apparatus Using Two Wavelengths Of Continuous Wave Laser Radiation
App 20120234800 - JENNINGS; Dean ; et al. | 2012-09-20 |
Scanned laser light source
App 20120205347 - Jennings; Dean C. ; et al. | 2012-08-16 |
Annealing apparatus using two wavelengths of continuous wave laser radiation
Grant 8,242,407 - Jennings , et al. August 14, 2 | 2012-08-14 |
Method Of Thermal Processing Structures Formed On A Substrate
App 20120145684 - Carey; Paul ; et al. | 2012-06-14 |
Thermal flux processing by scanning a focused line beam
Grant 8,178,819 - Jennings , et al. May 15, 2 | 2012-05-15 |
Single-chamber sequential curing of semiconductor wafers
Grant 8,137,465 - Shrinivasan , et al. March 20, 2 | 2012-03-20 |
Thermal Flux Processing By Scanning A Focused Line Beam
App 20110095007 - Jennings; Dean C. ; et al. | 2011-04-28 |
Thermal flux processing by scanning a focused line beam
Grant 7,875,829 - Jennings , et al. January 25, 2 | 2011-01-25 |
Thermal flux processing by scanning a focused line beam
Grant 7,872,209 - Jennings , et al. January 18, 2 | 2011-01-18 |
Method Of Thermal Processing Structures Formed On A Substrate
App 20100323532 - Carey; Paul ; et al. | 2010-12-23 |
Annealing apparatus using two wavelengths of continuous wave laser radiation
App 20100264123 - Jennings; Dean ; et al. | 2010-10-21 |
Method of annealing using two wavelengths of continuous wave laser radiation
Grant 7,772,134 - Jennings , et al. August 10, 2 | 2010-08-10 |
Method of Annealing Using Two Wavelengths of Continuous Wave Laser Radiation
App 20090311880 - JENNINGS; Dean ; et al. | 2009-12-17 |
Gate electrode dopant activation method for semiconductor manufacturing
Grant 7,611,976 - Ma , et al. November 3, 2 | 2009-11-03 |
Method of laser annealing using two wavelengths of radiation
Grant 7,595,208 - Jennings , et al. September 29, 2 | 2009-09-29 |
Method of thermal processing structures formed on a substrate
Grant 7,569,463 - Balakrishna , et al. August 4, 2 | 2009-08-04 |
Absorber Layer For Dsa Processing
App 20080230154 - Autryve; Luc Van ; et al. | 2008-09-25 |
Thermal Flux Processing By Scanning A Focused Line Beam
App 20080041831 - Jennings; Dean C. ; et al. | 2008-02-21 |
Method of Laser Annealing Using Two Wavelengths of Radiation
App 20070293058 - JENNINGS; Dean ; et al. | 2007-12-20 |
Absorber Layer For Dsa Processing
App 20070243721 - AUTRYVE; LUC VAN ; et al. | 2007-10-18 |
Dual wavelength thermal flux laser anneal
Grant 7,279,721 - Jennings , et al. October 9, 2 | 2007-10-09 |
Method Of Thermal Processing Structures Formed On A Substrate
App 20070218644 - Balakrishna; Ajit ; et al. | 2007-09-20 |
Method Of Thermal Processing Structures Formed On A Substrate
App 20070212859 - CAREY; Paul ; et al. | 2007-09-13 |
Absorber layer for DSA processing
Grant 7,262,106 - Autryve , et al. August 28, 2 | 2007-08-28 |
Scanning laser light source
App 20070114214 - Jennings; Dean C. ; et al. | 2007-05-24 |
Thermal Flux Processing By Scanning A Focused Line Beam
App 20070108166 - Jennings; Dean C. ; et al. | 2007-05-17 |
Absorber Layer For Dsa Processing
App 20060292808 - Autryve; Luc Van ; et al. | 2006-12-28 |
Gate Electrode Dopant Activation Method For Semiconductor Manufacturing
App 20060286763 - Ma; Yi ; et al. | 2006-12-21 |
Dual wavelength thermal flux laser anneal
App 20060234458 - Jennings; Dean ; et al. | 2006-10-19 |
Absorber layer for DSA processing
Grant 7,109,087 - Autryve , et al. September 19, 2 | 2006-09-19 |
Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal
Grant 7,078,302 - Ma , et al. July 18, 2 | 2006-07-18 |
Stepped reflector plate
Grant 7,041,931 - Jennings , et al. May 9, 2 | 2006-05-09 |
Thermal flux processing by scanning
Grant 6,987,240 - Jennings , et al. January 17, 2 | 2006-01-17 |
Thermal flux processing by scanning a focused line beam
App 20050218124 - Jennings, Dean C. ; et al. | 2005-10-06 |
Gate electrode dopant activation method for semiconductor manufacturing
App 20050186765 - Ma, Yi ; et al. | 2005-08-25 |
Absorber layer for DSA processing
App 20050074956 - Autryve, Luc Van ; et al. | 2005-04-07 |
Absorber layer for DSA processing
App 20050074986 - Autryve, Luc Van ; et al. | 2005-04-07 |
Stepped reflector plate
App 20040079746 - Jennings, Dean ; et al. | 2004-04-29 |
Multi-computer chamber control system, method and medium
Grant 6,721,605 - Goder , et al. April 13, 2 | 2004-04-13 |
Thermal flux processing by scanning
App 20030196996 - Jennings, Dean C. ; et al. | 2003-10-23 |
Method for selection of parameters for implant anneal of patterned semiconductor substrates and specification of a laser system
App 20030040130 - Mayur, Abhilash J. ; et al. | 2003-02-27 |
Heater temperature uniformity qualification tool
Grant 6,500,266 - Ho , et al. December 31, 2 | 2002-12-31 |
Multi-computer chamber control system, method and medium
App 20020183885 - Goder, Alexey G. ; et al. | 2002-12-05 |
Sensor for measuring a substrate temperature
App 20020139790 - Adams, Bruce ; et al. | 2002-10-03 |
Sensor for measuring a substrate temperature
App 20010006530 - Adams, Bruce ; et al. | 2001-07-05 |
Temperature probe with fiber optic core
Grant 6,226,453 - Yam , et al. May 1, 2 | 2001-05-01 |
Apparatus for substrate temperature measurement using a reflecting cavity and detector
Grant 6,183,130 - Adams , et al. February 6, 2 | 2001-02-06 |
Method and apparatus for infrared pyrometer calibration in a thermal processing system using multiple light sources
Grant 6,179,465 - Yam January 30, 2 | 2001-01-30 |
Method and apparatus for measuring substrate temperatures
Grant 6,179,466 - Peuse , et al. January 30, 2 | 2001-01-30 |
Apparatus and method for thermally processing substrates including a processor using multiple detection signals
Grant 6,151,446 - Hunter , et al. November 21, 2 | 2000-11-21 |
Method of calibrating a temperature measurement system
Grant 5,848,842 - Peuse , et al. December 15, 1 | 1998-12-15 |
Method and apparatus for infrared pyrometer calibration in a rapid thermal processing system
Grant 5,820,261 - Yam October 13, 1 | 1998-10-13 |
Method and apparatus for infrared pyrometer calibration in a thermal processing system
Grant 5,762,419 - Yam June 9, 1 | 1998-06-09 |
Method and apparatus for measuring substrate temperatures
Grant 5,755,511 - Peuse , et al. May 26, 1 | 1998-05-26 |
Method and apparatus for measuring substrate temperatures
Grant 5,660,472 - Peuse , et al. August 26, 1 | 1997-08-26 |
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