XU; Yongan

Patent Applications and Registrations

Patent applications and USPTO patent grants for XU; Yongan.The latest application filed is for "method to fabricate large scale flat optics lenses".

Company Profile

55.63.78

XU; Yongan - Santa Clara CA
Xu; Yongan - Albany NY
Xu; Yongan - San Jose CA
Xu; Yongan - Niskayuna NY
Xu; Yongan - Syracuse NY
Xu; Yongan - Schenectady NY
Xu; Yongan - Philadelphia PA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method To Fabricate Large Scale Flat Optics Lenses App 20220308460 - XU; Yongan ; et al.	2022-09-29
Selective Gas Etching For Self-aligned Pattern Transfer App 20220262636 - Arnold; John Christopher ; et al.	2022-08-18
Method of forming a BEOL interconnect structure using a subtractive metal via first process Grant 11,398,409 - Mignot , et al. July 26, 2	2022-07-26
Lithography Method To Form Structures With Slanted Angle App 20220171283 - XU; Yongan ; et al.	2022-06-02
Mask Orientation App 20220128745 - XU; Yongan ; et al.	2022-04-28
Selective gas etching for self-aligned pattern transfer Grant 11,302,533 - Arnold , et al. April 12, 2	2022-04-12
Method Of Forming A Beol Interconnect Structure Using A Subtractive Metal Via First Process App 20220093459 - Mignot; Yann ; et al.	2022-03-24
System, software application, and method for lithography stitching Grant 11,237,485 - Xu , et al. February 1, 2	2022-02-01
Mask orientation Grant 11,226,440 - Xu , et al. January 18, 2	2022-01-18
Metal Via Structure App 20220005762 - Mignot; Yann ; et al.	2022-01-06
Methods And Apparatus Of Processing Transparent Substrates App 20210395139 - XU; Yongan ; et al.	2021-12-23
Multiple patterning scheme integration with planarized cut patterning Grant 11,171,001 - Chen , et al. November 9, 2	2021-11-09
Two-color Self-aligned Double Patterning (sadp) To Yield Static Random Access Memory (sram) And Dense Logic App 20210343536 - Lie; Fee Li ; et al.	2021-11-04
Chemically Modified Curcumins For Use In The Production Of Lipoxins App 20210322346 - Gu; Ying ; et al.	2021-10-21
Metal via structure Grant 11,152,298 - Mignot , et al. October 19, 2	2021-10-19
Extreme ultraviolet (EUV) mask stack processing Grant 11,131,919 - Xu , et al. September 28, 2	2021-09-28
Methods and apparatus of processing transparent substrates Grant 11,111,176 - Xu , et al. September 7, 2	2021-09-07
Methods And Apparatus Of Processing Transparent Substrates App 20210269355 - XU; Yongan ; et al.	2021-09-02
Maskless Lithography Method To Fabricate Topographic Substrate App 20210263410 - XU; Yongan ; et al.	2021-08-26
System, Software Application, And Method For Lithography Stitching App 20210223704 - XU; Yongan ; et al.	2021-07-22
Double metal patterning Grant 11,069,564 - Chen , et al. July 20, 2	2021-07-20
Two-color self-aligned double patterning (SADP) to yield static random access memory (SRAM) and dense logic Grant 11,062,911 - Lie , et al. July 13, 2	2021-07-13
Mask Orientation App 20210208317 - XU; Yongan ; et al.	2021-07-08
Bake Devices For Handling And Uniform Baking Of Substrates App 20210195695 - CERVERA; Hiram ; et al.	2021-06-24
Selective Gas Etching For Self-aligned Pattern Transfer App 20210183653 - Arnold; John Christopher ; et al.	2021-06-17
Svia using a single damascene interconnect Grant 11,037,822 - Mignot , et al. June 15, 2	2021-06-15
EUV pattern transfer with ion implantation and reduced impact of resist residue Grant 11,031,246 - Mignot , et al. June 8, 2	2021-06-08
Tunable adhesion of EUV photoresist on oxide surface Grant 11,022,887 - Xu , et al. June 1, 2	2021-06-01
Cut Integration For Subtractive First Metal Line With Bottom Up Second Metal Line App 20210111066 - Ghosh; Somnath ; et al.	2021-04-15
Hard mask films with graded vertical concentration formed using reactive sputtering in a radio frequency deposition chamber Grant 10,975,464 - De Silva , et al. April 13, 2	2021-04-13
Extreme ultraviolet lithography patterning with directional deposition Grant 10,957,552 - Xu , et al. March 23, 2	2021-03-23
Multiple patterning scheme integration with planarized cut patterning Grant 10,937,653 - Chen , et al. March 2, 2	2021-03-02
Selective gas etching for self-aligned pattern transfer Grant 10,930,504 - Arnold , et al. February 23, 2	2021-02-23
Measurement system and grating pattern array Grant 10,921,721 - Fu , et al. February 16, 2	2021-02-16
Via design optimization to improve via resistance Grant 10,915,690 - Shao , et al. February 9, 2	2021-02-09
Developer critical dimension control with pulse development Grant 10,915,085 - Johnson , et al. February 9, 2	2021-02-09
Controlling via critical dimension with a titanium nitride hard mask Grant 10,886,197 - Mignot , et al. January 5, 2	2021-01-05
Extreme ultraviolet lithography for high volume manufacture of a semiconductor device Grant 10,879,068 - Xu , et al. December 29, 2	2020-12-29
Metal Via Structure App 20200388567 - Mignot; Yann ; et al.	2020-12-10
Imaging System And Method Of Creating Composite Images App 20200388642 - FU; Jinxin ; et al.	2020-12-10
Reducing Line Edge Roughness And Mitigating Defects By Wafer Freezing App 20200357666 - Petrillo; Karen E. ; et al.	2020-11-12
Svia Using A Single Damascene Interconnect App 20200357692 - Mignot; Yann ; et al.	2020-11-12
Single trench damascene interconnect using TiN HMO Grant 10,825,720 - Mignot , et al. November 3, 2	2020-11-03
Method and structure for cost effective enhanced self-aligned contacts Grant 10,818,548 - Lai , et al. October 27, 2	2020-10-27
Mehtod Of Thin Film Deposition In Trenches App 20200332414 - GUO; Jinrui ; et al.	2020-10-22
Double Metal Patterning App 20200328111 - CHEN; HSUEH-CHUNG ; et al.	2020-10-15
Via Design Optimization To Improve Via Resistance App 20200327208 - Shao; Dongbing ; et al.	2020-10-15
Photolithography methods and structures that reduce stochastic defects Grant 10,782,606 - Liang , et al. Sept	2020-09-22
Electronic devices having spiral conductive structures Grant 10,784,333 - Xu , et al. Sept	2020-09-22
Two-color Self-aligned Double Patterning (sadp) To Yield Static Random Access Memory (sram) And Dense Logic App 20200266072 - Lie; Fee Li ; et al.	2020-08-20
Area selective cyclic deposition for VFET top spacer Grant 10,749,011 - Bi , et al. A	2020-08-18
Euv Pattern Transfer With Ion Implantation And Reduced Impact Of Resist Residue App 20200251338 - Kind Code	2020-08-06
Direct Extreme Ultraviolet Lithography On Hard Mask With Reverse Tone App 20200234957 - MIGNOT; Yann ; et al.	2020-07-23
Controlling Via Critical Dimension With A Titanium Nitride Hard Mask App 20200194343 - Mignot; Yann ; et al.	2020-06-18
Self-aligned Litho-etch Double Patterning App 20200185269 - Chen; Hsueh-Chung ; et al.	2020-06-11
Method of forming a straight via profile with precise critical dimension control Grant 10,672,705 - Xu , et al.	2020-06-02
EUV pattern transfer with ion implantation and reduced impact of resist residue Grant 10,658,180 - Mignot , et al.	2020-05-19
Extreme ultraviolet lithography patterning with directional deposition Grant 10,658,190 - Xu , et al.	2020-05-19
Euv Pattern Transfer With Ion Implantation And Reduced Impact Of Resist Residue App 20200144061 - Mignot; Yann ; et al.	2020-05-07
Area Selective Cyclic Deposition For Vfet Top Spacer App 20200135893 - BI; ZHENXING ; et al.	2020-04-30
Spacer image transfer with double mandrel Grant 10,629,436 - Mignot , et al.	2020-04-21
Method of forming a straight via profile with precise critical dimension control Grant 10,622,301 - Xu , et al.	2020-04-14
Controlling via critical dimension during fabrication of a semiconductor wafer Grant 10,607,922 - Mignot , et al.	2020-03-31
Extreme Ultraviolet Lithography Patterning With Directional Deposition App 20200098581 - Xu; Yongan ; et al.	2020-03-26
Extreme Ultraviolet Lithography Patterning With Directional Deposition App 20200098578 - Xu; Yongan ; et al.	2020-03-26
Developer Critical Dimension Control With Pulse Development App 20200089188 - Johnson; Richard C. ; et al.	2020-03-19
Selective Gas Etching For Self-aligned Pattern Transfer App 20200083045 - ARNOLD; John Christopher ; et al.	2020-03-12
Tunable Adhesion Of Euv Photoresist On Oxide Surface App 20200073246 - Xu; Yongan ; et al.	2020-03-05
Multiple Patterning Scheme Integration With Planarized Cut Patterning App 20200066525 - Chen; Hsueh-Chung ; et al.	2020-02-27
Multiple Patterning Scheme Integration With Planarized Cut Patterning App 20200066526 - Chen; Hsueh-Chung ; et al.	2020-02-27
Method Of Forming A Straight Via Profile With Precise Critical Dimension Control App 20200066632 - Xu; Yongan ; et al.	2020-02-27
Single Trench Damascene Interconnect Using TiN HMO App 20200066575 - Mignot; Yann ; et al.	2020-02-27
Two-color self-aligned double patterning (SADP) to yield static random access memory (SRAM) and dense logic Grant 10,573,528 - Lie , et al. Feb	2020-02-25
Multiple patterning scheme integration with planarized cut patterning Grant 10,573,520 - Chen , et al. Feb	2020-02-25
Method Of Forming A Straight Via Profile With Precise Critical Dimension Control App 20200058585 - Xu; Yongan ; et al.	2020-02-20
Selective gas etching for self-aligned pattern transfer Grant 10,559,467 - Arnold , et al. Feb	2020-02-11
Tunable adhesion of EUV photoresist on oxide surface Grant 10,551,742 - Xu , et al. Fe	2020-02-04
Photolithography Methods And Structures That Reduce Stochastic Defects App 20200004155 - Liang; Yong ; et al.	2020-01-02
Extreme Ultraviolet (euv) Mask Stack Processing App 20190391481 - Xu; Yongan ; et al.	2019-12-26
Multiple Patterning Scheme Integration With Planarized Cut Patterning App 20190378718 - Chen; Hsueh-Chung ; et al.	2019-12-12
Transferring Euv Resist Pattern To Eliminate Pattern Transfer Defectivity App 20190348292 - Dutta; Ashim ; et al.	2019-11-14
Extreme Ultraviolet Lithography For High Volume Manufacture Of A Semiconductor Device App 20190348281 - Xu; Yongan ; et al.	2019-11-14
Electronic Devices Having Spiral Conductive Structures App 20190341444 - Xu; Peng ; et al.	2019-11-07
Spacer Image Transfer With Double Mandrel App 20190318928 - Mignot; Yann ; et al.	2019-10-17
Hard Mask Films With Graded Vertical Concentration Formed Using Reactive Sputtering In A Radio Frequency Deposition Chamber App 20190309410 - De Silva; Ekmini Anuja ; et al.	2019-10-10
Electronic devices having spiral conductive structures Grant 10,431,646 - Xu , et al. O	2019-10-01
Electronic Devices Having Spiral Conductive Structures App 20190273127 - Xu; Peng ; et al.	2019-09-05
Forming vertical transport field effect transistors with uniform bottom spacer thickness Grant 10,396,179 - Cheng , et al. A	2019-08-27
Forming vertical transport field effect transistors with uniform bottom spacer thickness Grant 10,361,285 - Cheng , et al.	2019-07-23
Hard masks for block patterning Grant 10,354,885 - De Silva , et al. July 16, 2	2019-07-16
Via formation using directed self-assembly of a block copolymer Grant 10,340,179 - Chi , et al.	2019-07-02
Two-color Self-aligned Double Patterning (sadp) To Yield Static Random Access Memory (sram) And Dense Logic App 20190189457 - Lie; Fee Li ; et al.	2019-06-20
Tunable Adhesion Of Euv Photoresist On Oxide Surface App 20190187565 - Xu; Yongan ; et al.	2019-06-20
Developer Critical Dimension Control With Pulse Development App 20190121316 - Johnson; Richard C. ; et al.	2019-04-25
Via Formation Using Directed Self-assembly Of A Block Copolymer App 20190080958 - Chi; Cheng ; et al.	2019-03-14
Work function metal fill for replacement gate fin field effect transistor process Grant 10,164,060 - He , et al. Dec	2018-12-25
Via formation using sidewall image transfer process to define lateral dimension Grant 10,157,789 - Chen , et al. Dec	2018-12-18
Work function metal fill for replacement gate fin field effect transistor process Grant 10,147,803 - He , et al. De	2018-12-04
Forming Vertical Transport Field Effect Transistors With Uniform Bottom Spacer Thickness App 20180315834 - Cheng; Kangguo ; et al.	2018-11-01
Forming Vertical Transport Field Effect Transistors With Uniform Bottom Spacer Thickness App 20180315835 - Cheng; Kangguo ; et al.	2018-11-01
Selective Gas Etching For Self-aligned Pattern Transfer App 20180286682 - ARNOLD; John Christopher ; et al.	2018-10-04
Hard masks for block patterning Grant 10,090,164 - De Silva , et al. October 2, 2	2018-10-02
Avoiding gate metal via shorting to source or drain contacts Grant 10,043,744 - Chan , et al. August 7, 2	2018-08-07
Image transfer using EUV lithographic structure and double patterning process Grant 10,032,633 - Chen , et al. July 24, 2	2018-07-24
Selective gas etching for self-aligned pattern transfer Grant 10,032,632 - Arnold , et al. July 24, 2	2018-07-24
Image Transfer Using Euv Lithographic Structure And Double Patterning Process App 20180204723 - CHEN; HSUEH-CHUNG ; et al.	2018-07-19
Image Transfer Using Euv Lithographic Structure And Double Patterning Process App 20180204724 - CHEN; HSUEH-CHUNG ; et al.	2018-07-19
Hard Masks For Block Patterning App 20180197745 - De Silva; Ekmini A. ; et al.	2018-07-12
Hard Masks For Block Patterning App 20180197744 - De Silva; Ekmini A. ; et al.	2018-07-12
Integration of super via structure in BEOL Grant 10,020,255 - Bao , et al. July 10, 2	2018-07-10
Integration of super via structure in BEOL Grant 10,020,254 - Bao , et al. July 10, 2	2018-07-10
Forming vertical transport field effect transistors with uniform bottom spacer thickness Grant 9,991,365 - Cheng , et al. June 5, 2	2018-06-05
Inverted damascene interconnect structures Grant 9,984,919 - Zhang , et al. May 29, 2	2018-05-29
Selective Gas Etching For Self-aligned Pattern Transfer App 20180096846 - ARNOLD; John Christopher ; et al.	2018-04-05
Avoiding Gate Metal Via Shorting To Source Or Drain Contacts App 20180061754 - Chan; Victor W.C. ; et al.	2018-03-01
Chemically Modified Curcumins For Use In The Production Of Lipoxins App 20180036262 - Gu; Ying ; et al.	2018-02-08
Avoiding Gate Metal Via Shorting To Source Or Drain Contacts App 20170352621 - Chan; Victor W. C. ; et al.	2017-12-07
Avoiding gate metal via shorting to source or drain contacts Grant 9,837,351 - Chan , et al. December 5, 2	2017-12-05
Via Formation Using Sidewall Image Tranfer Process To Define Lateral Dimension App 20160358820 - Chen; Shyng-Tsong ; et al.	2016-12-08
Via Formation Using Sidewall Image Transfer Process To Define Lateral Dimension App 20160336225 - Chen; Shyng-Tsong ; et al.	2016-11-17
Work Function Metal Fill For Replacement Gate Fin Field Effect Transistor Process App 20160329415 - He; Hong ; et al.	2016-11-10
Via formation using sidewall image transfer process to define lateral dimension Grant 9,490,168 - Chen , et al. November 8, 2	2016-11-08
Work Function Metal Fill For Replacement Gate Fin Field Effect Transistor Process App 20160300721 - He; Hong ; et al.	2016-10-13
Work function metal fill for replacement gate fin field effect transistor process Grant 9,406,746 - He , et al. August 2, 2	2016-08-02
Double self aligned via patterning Grant 9,330,965 - Chen , et al. May 3, 2	2016-05-03
Double self-aligned via patterning Grant 9,257,334 - Chen , et al. February 9, 2	2016-02-09
Double Self Aligned Via Patterning App 20150371896 - Chen; Hsueh-Chung ; et al.	2015-12-24
Double self aligned via patterning Grant 9,219,007 - Chen , et al. December 22, 2	2015-12-22
Double Self-aligned Via Patterning App 20150364372 - Chen; Hsueh-Chung ; et al.	2015-12-17
Work Function Metal Fill For Replacement Gate Fin Field Effect Transistor Process App 20150236159 - He; Hong ; et al.	2015-08-20
Trench patterning with block first sidewall image transfer Grant 9,064,813 - Kanakasabapathy , et al. June 23, 2	2015-06-23
Trench Patterning With Block First Sidewall Image Transfer App 20150031201 - Kanakasabapathy; Sivananda K. ; et al.	2015-01-29
Method to print contact holes at high resolution Grant 8,927,198 - Burkhardt , et al. January 6, 2	2015-01-06
Double Self Aligned Via Patterning App 20140363969 - Chen; Hsueh-Chung ; et al.	2014-12-11
Trench Patterning With Block First Sidewall Image Transfer App 20140315380 - Kanakasabapathy; Sivananda K. ; et al.	2014-10-23
Method To Print Contact Holes At High Resolution App 20140199615 - Burkhardt; Martin ; et al.	2014-07-17
Method of low temperature imprinting process with high pattern transfer yield Grant 8,298,467 - Xu , et al. October 30, 2	2012-10-30
Method Of Low Temperature Imprinting Process With High Pattern Transfer Yield App 20110140305 - Xu; Yongan ; et al.	2011-06-16
Method of low temperature imprinting process with high pattern transfer yield Grant 7,901,607 - Xu , et al. March 8, 2	2011-03-08
Method of low temperature imprinting process with high pattern transfer yield App 20060183395 - Xu; Yongan ; et al.	2006-08-17

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