Patent | Date |
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Anhydride copolymer top coats for orientation control of thin film block copolymers Grant 10,139,724 - Willson , et al. Nov | 2018-11-27 |
Ordering block copolymers Grant 9,823,568 - Willson , et al. November 21, 2 | 2017-11-21 |
Branched siloxanes and methods for synthesis Grant 9,802,968 - Willson , et al. October 31, 2 | 2017-10-31 |
Ordering Block Copolymers App 20170139326 - Willson; C. Grant ;   et al. | 2017-05-18 |
Branched Siloxanes And Methods For Synthesis App 20170037065 - Willson; C. Grant ;   et al. | 2017-02-09 |
Ordering block copolymers Grant 9,557,640 - Willson , et al. January 31, 2 | 2017-01-31 |
Branched siloxanes and methods for synthesis Grant 9,434,750 - Willson , et al. September 6, 2 | 2016-09-06 |
Image and part recognition technology Grant 9,317,922 - Meiring , et al. April 19, 2 | 2016-04-19 |
Branched siloxanes and methods for synthesis Grant 9,156,863 - Willson , et al. October 13, 2 | 2015-10-13 |
Branched Siloxanes And Methods For Synthesis App 20150274757 - Willson; C. Grant ;   et al. | 2015-10-01 |
Ordering Block Copolymers App 20150261090 - Willson; C. Grant ;   et al. | 2015-09-17 |
Surface treatments for alignment of block copolymers Grant 9,120,947 - Willson , et al. September 1, 2 | 2015-09-01 |
Using chemical vapor deposited films to control domain orientation in block copolymer thin films Grant 9,040,121 - Willson , et al. May 26, 2 | 2015-05-26 |
Novel Dual-Tone Resist Formulations And Methods App 20140342291 - Willson; C. Grant ;   et al. | 2014-11-20 |
Silicon-containing Block Co-polymers, Methods For Synthesis And Use App 20130196019 - Willson; C. Grant ;   et al. | 2013-08-01 |
Surface Treatments For Alignment Of Block Copolymers App 20130045361 - Willson; C. Grant ;   et al. | 2013-02-21 |
Oligosaccharide/silicon-containing Block Copolymers For Lithography Applications App 20130022785 - Ellison; Christopher John ;   et al. | 2013-01-24 |
Image And Part Recognition Technology App 20120194671 - Meiring; Jason E. ;   et al. | 2012-08-02 |
Novel Dual-tone Resist Formulations And Methods App 20110262860 - Willson; C. Grant ;   et al. | 2011-10-27 |
Densely packed sensor arrays Grant 8,017,174 - Meiring , et al. September 13, 2 | 2011-09-13 |
Image and part recognition technology Grant 7,901,945 - Meiring , et al. March 8, 2 | 2011-03-08 |
Device for Holding a Template for Use in Imprint Lithography App 20100173033 - Bailey; Todd ;   et al. | 2010-07-08 |
Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing Grant 7,691,275 - Willson , et al. April 6, 2 | 2010-04-06 |
Image and part recognition technology Grant 7,651,850 - Meiring , et al. January 26, 2 | 2010-01-26 |
Densely packed sensor arrays App 20090017271 - Meiring; Jason E. ;   et al. | 2009-01-15 |
Image And Part Recognition Technology App 20080273748 - Meiring; Jason E. ;   et al. | 2008-11-06 |
Compositions for Dark-Field Polymerization and Method of Using the Same for Imprint Lithography Processes App 20080230959 - Willson; C. Grant ;   et al. | 2008-09-25 |
Method of Automatic Fluid Dispensing for Imprint Lithography Processes App 20080199816 - Choi; Byung J. ;   et al. | 2008-08-21 |
System and method for the detection of analytes App 20080194420 - Schmid; Matthew J. ;   et al. | 2008-08-14 |
Use of mesoscale self-assembly and recognition to effect delivery of sensing reagent for arrayed sensors App 20080160632 - Willson; C. Grant ;   et al. | 2008-07-03 |
Compositions for dark-field polymerization and method of using the same for imprint lithography processes Grant 7,365,103 - Willson , et al. April 29, 2 | 2008-04-29 |
Imprint Lithography Template Having a Feature Size Under 250 nm App 20080095878 - Bailey; Todd ;   et al. | 2008-04-24 |
Planarization Method of Patterning a Substratte App 20070034600 - Willson; C. Grant ;   et al. | 2007-02-15 |
Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing App 20060261518 - Willson; C. Grant ;   et al. | 2006-11-23 |
Method of creating a dispersion of a liquid on a substrate Grant 7,060,324 - Bailey , et al. June 13, 2 | 2006-06-13 |
Method for modulating shapes of substrates Grant 6,980,282 - Choi , et al. December 27, 2 | 2005-12-27 |
Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography Grant 6,954,275 - Choi , et al. October 11, 2 | 2005-10-11 |
Planarization method of patterning a substrate App 20050156357 - Willson, C. Grant ;   et al. | 2005-07-21 |
System and method for the detection of analytes App 20050064452 - Schmid, Matthew J. ;   et al. | 2005-03-24 |
Image and part recognition technology App 20050019796 - Meiring, Jason E. ;   et al. | 2005-01-27 |
Imprint lithography template having a feature size under 250 nm App 20040168586 - Bailey, Todd ;   et al. | 2004-09-02 |
Method of creating a dispersion of a liquid on a substrate App 20040170771 - Bailey, Todd ;   et al. | 2004-09-02 |
Device for holding a template for use in imprint lithography App 20040141163 - Bailey, Todd ;   et al. | 2004-07-22 |
Planarization composition and method of patterning a substrate using the same App 20040112862 - Willson, C. Grant ;   et al. | 2004-06-17 |
Compositions for dark-field polymerization and method of using the same for imprint lithography processes App 20040116548 - Willson, C. Grant ;   et al. | 2004-06-17 |
Method for modulating shapes of substrates App 20040112861 - Choi, Byung J. ;   et al. | 2004-06-17 |
Template for room temperature, low pressure micro-and nano-imprint lithography Grant 6,696,220 - Bailey , et al. February 24, 2 | 2004-02-24 |
Use of mesoscale self-assembly and recognition to effect delivery of sensing reagent for arrayed sensors App 20030003436 - Willson, C. Grant ;   et al. | 2003-01-02 |
Template for room temperature, low pressure micro-and nano-imprint lithography App 20020115002 - Bailey, Todd ;   et al. | 2002-08-22 |
Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography App 20020093122 - Choi, Byung J. ;   et al. | 2002-07-18 |
Method and system of automatic fluid dispensing for imprint lithography processes App 20020094496 - Choi, Byung J. ;   et al. | 2002-07-18 |
Water-processable photoresist compositions Grant 6,399,273 - Yamada , et al. June 4, 2 | 2002-06-04 |
Photoresist compositions comprising norbornene derivative polymers with acid labile groups Grant 6,103,445 - Willson , et al. August 15, 2 | 2000-08-15 |