Patent | Date |
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Process For Electroless Copper Deposition On A Ruthenium Seed App 20120315756 - Weidman; Timothy W. ;   et al. | 2012-12-13 |
Surface cleaning and texturing process for crystalline solar cells Grant 8,129,212 - Wijekoon , et al. March 6, 2 | 2012-03-06 |
Surface cleaning and texturing process for crystalline solar cells App 20110272625 - Wijekoon; Kapila ;   et al. | 2011-11-10 |
Process for electroless copper deposition Grant 7,651,934 - Lubomirsky , et al. January 26, 2 | 2010-01-26 |
Surface cleaning and texturing process for crystalline solar cells App 20090280597 - Wijekoon; Kapila ;   et al. | 2009-11-12 |
Process for electroless copper deposition App 20070099422 - Wijekoon; Kapila ;   et al. | 2007-05-03 |
Process for electroless copper deposition App 20070004201 - Lubomirsky; Dmitry ;   et al. | 2007-01-04 |
Temperature control in a chemical mechanical polishing system Grant 7,153,188 - Zuniga , et al. December 26, 2 | 2006-12-26 |
Process for electroless copper deposition on a ruthenium seed App 20060246699 - Weidman; Timothy W. ;   et al. | 2006-11-02 |
Method and apparatus for polishing substrates Grant 7,070,480 - Moon , et al. July 4, 2 | 2006-07-04 |
Method and apparatus for polishing metal and dielectric substrates Grant 6,960,521 - Moon , et al. November 1, 2 | 2005-11-01 |
Method and apparatus for polishing metal and dielectric substrates App 20050032381 - Moon, Yongsik ;   et al. | 2005-02-10 |
Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects Grant 6,790,768 - Moon , et al. September 14, 2 | 2004-09-14 |
Ion exchange materials for chemical mechanical polishing Grant 6,638,143 - Wang , et al. October 28, 2 | 2003-10-28 |
Method and apparatus for hard pad polishing Grant 6,620,027 - Zutshi , et al. September 16, 2 | 2003-09-16 |
Method and apparatus for polishing substrates App 20030114084 - Moon, Yongsik ;   et al. | 2003-06-19 |
Multi-fluid polishing process Grant 6,572,453 - Wijekoon , et al. June 3, 2 | 2003-06-03 |
Method and apparatus for enhanced CMP using metals having reductive properties Grant 6,561,873 - Tsai , et al. May 13, 2 | 2003-05-13 |
Method and apparatus for enhanced CMP using metals having reductive properties Grant 6,537,144 - Tsai , et al. March 25, 2 | 2003-03-25 |
Method and apparatus for polishing metal and dielectric substrates App 20030029841 - Moon, Yongsik ;   et al. | 2003-02-13 |
Method and apparatus for enhanced CMP using metals having reductive properties App 20020098779 - Tsai, Stan D. ;   et al. | 2002-07-25 |
Method and apparatus for hard pad polishing App 20020090886 - Zutshi, Ajoy ;   et al. | 2002-07-11 |
Ion exchange materials for chemical mechanical polishing App 20020077035 - Wang, Yuchun ;   et al. | 2002-06-20 |
Carrier head with local pressure control for a chemical mechanical polishing apparatus App 20020072313 - Zuniga, Steven M. ;   et al. | 2002-06-13 |
Endpoint monitoring with polishing rate change Grant 6,309,276 - Tsai , et al. October 30, 2 | 2001-10-30 |
Carrier head with local pressure control for a chemical mechanical polishing apparatus Grant 6,146,259 - Zuniga , et al. November 14, 2 | 2000-11-14 |