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Metallization of solar cells with differentiated p-type and n-type region architectures Grant 11,437,530 - Smith , et al. September 6, 2 | 2022-09-06 |
Solar Cell Emitter Region Fabrication Using Self-aligned Implant And Cap App 20220199842 - Weidman; Timothy | 2022-06-23 |
Solar cell emitter region fabrication using self-aligned implant and cap Grant 11,316,056 - Weidman April 26, 2 | 2022-04-26 |
Solar Cell Emitter Region Fabrication Using Substrate-level Ion Implantation App 20220020894 - Westerberg; Staffan ;   et al. | 2022-01-20 |
Solar Cell Emitter Region Fabrication Using Substrate-level Ion Implantation App 20200411711 - Westerberg; Staffan ;   et al. | 2020-12-31 |
Metallization Of Solar Cells With Differentiated P-type And N-type Region Architectures App 20190267499 - Smith; David D. ;   et al. | 2019-08-29 |
Metallization of solar cells with differentiated P-type and N-type region architectures Grant 10,224,442 - Smith , et al. | 2019-03-05 |
Metallization Of Solar Cells With Differentiated P-type And N-type Region Architectures App 20170288074 - Smith; David D. ;   et al. | 2017-10-05 |
Solar cell emitter region fabrication using ion implantation Grant 9,716,205 - Weidman , et al. July 25, 2 | 2017-07-25 |
Solar Cell Emitter Region Fabrication Using Self-Aligned Implant and Cap App 20170162729 - Weidman; Timothy | 2017-06-08 |
Solar cell emitter region fabrication using ion implantation Grant 9,577,126 - Smith , et al. February 21, 2 | 2017-02-21 |
Solar cell emitter region fabrication using self-aligned implant and cap Grant 9,577,134 - Weidman February 21, 2 | 2017-02-21 |
Metallization of solar cells with differentiated P-type and N-type region architectures Grant 9,502,601 - Smith , et al. November 22, 2 | 2016-11-22 |
Solar Cell Emitter Region Fabrication Using Ion Implantation App 20160315214 - Weidman; Timothy ;   et al. | 2016-10-27 |
Solar Cell Emitter Region Fabrication Using Substrate-level Ion Implantation App 20160284913 - Westerberg; Staffan ;   et al. | 2016-09-29 |
Solar cell emitter region fabrication using ion implantation Grant 9,401,450 - Weidman , et al. July 26, 2 | 2016-07-26 |
Solar Cell Emitter Region Fabrication Using Ion Implantation App 20160133767 - Smith; David D. ;   et al. | 2016-05-12 |
Solar cell emitter region fabrication using ion implantation Grant 9,263,625 - Smith , et al. February 16, 2 | 2016-02-16 |
Solar Cell Emitter Region Fabrication Using Ion Implantation App 20150380599 - Smith; David D. ;   et al. | 2015-12-31 |
Solar Cell Emitter Region Fabrication Using Ion Implantation App 20150162483 - Weidman; Timothy ;   et al. | 2015-06-11 |
Solar Cell Emitter Region Fabrication Using Self-Aligned Implant and Cap App 20150162484 - Weidman; Timothy | 2015-06-11 |
Methods and compositions for electrophoretic metallization deposition Grant 8,152,981 - Wijekoon , et al. April 10, 2 | 2012-04-10 |
Surface cleaning and texturing process for crystalline solar cells Grant 8,129,212 - Wijekoon , et al. March 6, 2 | 2012-03-06 |
Surface cleaning and texturing process for crystalline solar cells App 20110272625 - Wijekoon; Kapila ;   et al. | 2011-11-10 |
Method Of Forming A Negatively Charged Passivation Layer Over A Diffused P-type Region App 20110240114 - Stewart; Michael P. ;   et al. | 2011-10-06 |
Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop Grant 7,910,476 - Fang , et al. March 22, 2 | 2011-03-22 |
Surface cleaning and texturing process for crystalline solar cells App 20090280597 - Wijekoon; Kapila ;   et al. | 2009-11-12 |
Method for treatment of plating solutions Grant 7,601,264 - Golden , et al. October 13, 2 | 2009-10-13 |
Methods And Compositions For Electrophoretic Metallization Deposition App 20090178927 - WIJEKOON; KAPILA P. ;   et al. | 2009-07-16 |
Method for patterning Mo layer in a photovoltaic device comprising CIGS material using an etch process Grant 7,547,569 - Weidman , et al. June 16, 2 | 2009-06-16 |
Method For Patterning Mo Layer In A Photovoltaic Device Comprising Cigs Material Using An Etch Process App 20090111209 - WEIDMAN; Timothy ;   et al. | 2009-04-30 |
Adhesion And Minimizing Oxidation On Electroless Co Alloy Films For Integration With Low K Inter-metal Dielectric And Etch Stop App 20090029544 - Fang; Hongbin ;   et al. | 2009-01-29 |
Apparatus and method for heating substrates Grant 7,431,585 - Zhao , et al. October 7, 2 | 2008-10-07 |
Apparatus and method for heating substrates Grant 7,381,052 - Zhao , et al. June 3, 2 | 2008-06-03 |
Method For Patterning Mo Layer In A Photovoltaic Device Comprising Cigs Material Using An Etch Process App 20080119005 - Weidman; Timothy ;   et al. | 2008-05-22 |
Method And Apparatus For Treatment Of Plating Solutions App 20080083623 - Golden; Josh H. ;   et al. | 2008-04-10 |
Method And Apparatus For Treatment Of Plating Solutions App 20080083673 - Golden; Josh H. ;   et al. | 2008-04-10 |
Method of depositing an amorphous carbon layer Grant 7,335,462 - Fairbairn , et al. February 26, 2 | 2008-02-26 |
Methods And Apparatus For E-beam Treatment Used To Fabricate Integrated Circuit Devices App 20070275569 - MOGHADAM; FARHAD ;   et al. | 2007-11-29 |
Wafer cleaning solution for cobalt electroless application Grant 7,273,813 - Emami , et al. September 25, 2 | 2007-09-25 |
Ionic additives for extreme low dielectric constant chemical formulations Grant 7,265,062 - Mandal , et al. September 4, 2 | 2007-09-04 |
Methods and apparatus for e-beam treatment used to fabricate integrated circuit devices Grant 7,256,139 - Moghadam , et al. August 14, 2 | 2007-08-14 |
Method Of Depositing An Amorphous Carbon Layer App 20070128538 - FAIRBAIRN; KEVIN ;   et al. | 2007-06-07 |
Method of forming a dual damascene structure utilizing a three layer hard mask structure Grant 7,226,853 - Bekiaris , et al. June 5, 2 | 2007-06-05 |
Method of depositing an amorphous carbon layer Grant 7,223,526 - Fairbairn , et al. May 29, 2 | 2007-05-29 |
Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop App 20070099417 - Fang; Hongbin ;   et al. | 2007-05-03 |
Method And Apparatus For Forming Device Features In An Integrated Electroless Deposition System App 20070071888 - Shanmugasundram; Arulkumar ;   et al. | 2007-03-29 |
Apparatus and method for heating substrates App 20060223233 - Zhao; Jun ;   et al. | 2006-10-05 |
Wafer cleaning solution for cobalt electroless application App 20060174912 - Emami; Ramin ;   et al. | 2006-08-10 |
E-beam curable resist and process for e-beam curing the resist Grant 6,989,227 - Weidman , et al. January 24, 2 | 2006-01-24 |
Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices Grant 6,936,551 - Moghadam , et al. August 30, 2 | 2005-08-30 |
Electroless palladium nitrate activation prior to cobalt-alloy deposition App 20050170650 - Fang, Hongbin ;   et al. | 2005-08-04 |
Electroless cobalt alloy deposition process App 20050161338 - Fang, Hongbin ;   et al. | 2005-07-28 |
Selective self-initiating electroless capping of copper with cobalt-containing alloys App 20050136193 - Weidman, Timothy ;   et al. | 2005-06-23 |
Methods and apparatus for e-beam treatment used to fabricate integrated circuit devices App 20050130404 - Moghadam, Farhad ;   et al. | 2005-06-16 |
Method of depositing an amrphous carbon layer App 20050112509 - Fairbairn, Kevin ;   et al. | 2005-05-26 |
Ionic additives for extreme low dielectric constant chemical formulations Grant 6,896,955 - Mandal , et al. May 24, 2 | 2005-05-24 |
Selective self-initiating electroless capping of copper with cobalt-containing alloys App 20050095830 - Weidman, Timothy ;   et al. | 2005-05-05 |
Heterogeneous activation layers formed by ionic and electroless reactions used for IC interconnect capping layers App 20050085031 - Lopatin, Sergey D. ;   et al. | 2005-04-21 |
Capping layer for extreme low dielectric constant films Grant 6,875,687 - Weidman , et al. April 5, 2 | 2005-04-05 |
Method of depositing an amorphous carbon layer Grant 6,841,341 - Fairbairn , et al. January 11, 2 | 2005-01-11 |
Method of forming a dual damascene structure using an amorphous silicon hard mask Grant 6,806,203 - Weidman , et al. October 19, 2 | 2004-10-19 |
Airgap for semiconductor devices Grant 6,780,753 - Latchford , et al. August 24, 2 | 2004-08-24 |
Ionic additives for extreme low dielectric constant chemical formulations App 20040087184 - Mandal, Robert P. ;   et al. | 2004-05-06 |
Cluster tool for E-beam treated films App 20040069410 - Moghadam, Farhad ;   et al. | 2004-04-15 |
Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices App 20030232495 - Moghadam, Farhad ;   et al. | 2003-12-18 |
E-beam curable resist and process for e-beam curing the resist App 20030228538 - Weidman, Timothy ;   et al. | 2003-12-11 |
Airgap For Semiconductor Devices App 20030224591 - Latchford, Ian S. ;   et al. | 2003-12-04 |
Method of forming a dual damascene structure using an amorphous silicon hard mask App 20030176058 - Weidman, Timothy ;   et al. | 2003-09-18 |
Apparatus and method for heating substrates App 20030138560 - Zhao, Jun ;   et al. | 2003-07-24 |
Process for depositing and developing a plasma polymerized organosilicon photoresist film Grant 6,589,715 - Joubert , et al. July 8, 2 | 2003-07-08 |
Method of forming a dual damascene structure App 20030119307 - Bekiaris, Nikolaos ;   et al. | 2003-06-26 |
Ultrasonic spray coating of liquid precursor for low K dielectric coatings Grant 6,583,071 - Weidman , et al. June 24, 2 | 2003-06-24 |
Method for depositing an amorphous carbon layer Grant 6,573,030 - Fairbairn , et al. June 3, 2 | 2003-06-03 |
Method of depositing an amorphous carbon layer App 20030091938 - Fairbairn, Kevin ;   et al. | 2003-05-15 |
Ionic additives for extreme low dielectric constant chemical formulations App 20030008525 - Mandal, Robert P. ;   et al. | 2003-01-09 |
Point of use mixing and aging system for chemicals used in a film forming apparatus App 20020127875 - Weidman, Timothy ;   et al. | 2002-09-12 |
Ionic additives for extreme low dielectric constant chemical formulations App 20020042210 - Mandal, Robert P. ;   et al. | 2002-04-11 |
Process for depositing and developing a plasma polymerized organosilicon photoresist film App 20010012592 - Joubert, Olivier ;   et al. | 2001-08-09 |
Process for depositing a plasma polymerized organosilicon photoresist film Grant 6,238,844 - Joubert , et al. May 29, 2 | 2001-05-29 |
Method and apparatus for depositing deep UV photoresist films Grant 6,090,530 - Weidman , et al. July 18, 2 | 2000-07-18 |
Method and apparatus for depositing deep UV photoresist films Grant 5,885,751 - Weidman , et al. March 23, 1 | 1999-03-23 |