loadpatents
Patent applications and USPTO patent grants for Wei; Junqi.The latest application filed is for "shutter disk".
Patent | Date |
---|---|
Methods, apparatuses and systems for substrate processing for lowering contact resistance Grant 11,328,929 - Ow , et al. May 10, 2 | 2022-05-10 |
Shutter Disk App 20220028702 - Kang; Zhang ;   et al. | 2022-01-27 |
Shutter disk Grant 11,171,017 - Kang , et al. November 9, 2 | 2021-11-09 |
Methods And Apparatus For Reducing Defects In Preclean Chambers App 20210335582 - OW; Yueh Sheng ;   et al. | 2021-10-28 |
Preclean Chamber Upper Shield With Showerhead App 20210335581 - BABU; Sarath ;   et al. | 2021-10-28 |
Lower shield for a substrate processing chamber Grant D931,241 - Babu , et al. September 21, 2 | 2021-09-21 |
Physical vapor deposition apparatus Grant 11,114,288 - Savandaiah , et al. September 7, 2 | 2021-09-07 |
Apparatus And Systems For Substrate Processing For Lowering Contact Resistance App 20210233773 - OW; YUEH SHENG ;   et al. | 2021-07-29 |
Methods And Apparatus For Processing A Substrate App 20210140029 - OW; YUEH SHENG ;   et al. | 2021-05-13 |
Inner shield for a substrate processing chamber Grant D913,979 - Babu , et al. March 23, 2 | 2021-03-23 |
Shutter Disk App 20210074552 - Kang; Zhang ;   et al. | 2021-03-11 |
High Conductance Lower Shield For Process Chamber App 20210066051 - Babu; Sarath ;   et al. | 2021-03-04 |
High Conductance Inner Shield For Process Chamber App 20210066050 - Babu; Sarath ;   et al. | 2021-03-04 |
Physcial Vapor Deposition Apparatus App 20200258723 - A1 | 2020-08-13 |
Methods, Apparatuses And Systems For Substrate Processing For Lowering Contact Resistance App 20190341264 - OW; YUEH SHENG ;   et al. | 2019-11-07 |
Apparatus for high compressive stress film deposition to improve kit life Grant 10,115,573 - Wei , et al. October 30, 2 | 2018-10-30 |
Methods and apparatus for nodule control in a titanium-tungsten target Grant 9,960,023 - Wei , et al. May 1, 2 | 2018-05-01 |
Methods And Apparatus For Nodule Control In A Titanium-tungsten Target App 20160189941 - Wei; Junqi ;   et al. | 2016-06-30 |
Apparatus For High Compressive Stress Film Deposition To Improve Kit Life App 20160104603 - WEI; JUNQI ;   et al. | 2016-04-14 |
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