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Method of making a three-dimensional memory array with etch stop
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Semiconductor device and method for manufacturing semiconductor device
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Method of forming an active area with floating gate negative offset profile in FG NAND memory
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Spacer passivation for high aspect ratio etching of multilayer stacks for three dimensional NAND device
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Method Of Making A Three-Dimensional Memory Array With Etch Stop
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Method Of Forming An Active Area With Floating Gate Negative Offset Profile In Fg Nand Memory
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Spacer Passivation For High Aspect Ratio Etching Of Multilayer Stacks For Three Dimensional Nand Device
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Semiconductor Device And Method For Manufacturing Semiconductor Device
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Semiconductor device and method for manufacturing semiconductor device
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Silicon Oxycarbide, Growth Method Of Silicon Oxycarbide Layer, Semiconductor Device And Manufacture Method For Semiconductor Device
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Semiconductor device and method for fabricating semiconductor device
Grant 8,604,552 - Owada , et al. December 10, 2 | 2013-12-10 |
Method of manufacturing a semiconductor device and semiconductor device
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Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device
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Method Of Manufacturing A Semiconductor Device And Semiconductor Device
App 20120326315 - Akiyama; Shinichi ; et al. | 2012-12-27 |
Method of manufacturing a semiconductor device and semiconductor device
Grant 8,338,953 - Akiyama , et al. December 25, 2 | 2012-12-25 |
Semiconductor Device And Method For Fabricating Semiconductor Device
App 20120322272 - Owada; Tamotsu ; et al. | 2012-12-20 |
Silicon Oxycarbide, Growth Method Of Silicon Oxycarbide Layer, Semiconductor Device And Manufacture Method For Semiconductor Device
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Method of manufacturing a semiconductor device
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Method Of Manufacturing A Semiconductor Device And Semiconductor Device
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Method of manufacturing a semiconductor device and semiconductor device
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Method of manufacturing semiconductor device having device characteristics improved by straining surface of active region
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Method of manufacturing semiconductor device
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Semiconductor device having device characteristics improved by straining surface of active region and its manufacture method
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Semiconductor device having device characteristics improved by straining surface of active region and its manufacture method
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Semiconductor Device And Method For Fabricating Semiconductor Device
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Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device
Grant 7,642,185 - Owada , et al. January 5, 2 | 2010-01-05 |
Semiconductor Device And Method For Manufacturing Semiconductor Device
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Method of making a semiconductor device with residual amine group free multilayer interconnection
App 20090149031 - Kakamu; Katsumi ; et al. | 2009-06-11 |
Method for forming insulating film, method for forming multilayer structure and method for manufacturing semiconductor device
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Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device
App 20090093130 - Owada; Tamotsu ; et al. | 2009-04-09 |
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device
Grant 7,485,570 - Owada , et al. February 3, 2 | 2009-02-03 |
Method of manufacturing semiconductor device
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Method Of Manufacturing A Semiconductor Device And Semiconductor Device
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Method Of Manufacturing A Semiconductor Device
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Semiconductor Device Manufacturing Method
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Semiconductor device having device characteristics improved by straining surface of active region and its manufacture method
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Fabrication process of semiconductor device and semiconductor device
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Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device
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Method of manufacturing semiconductor device
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Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device
Grant 7,208,405 - Owada , et al. April 24, 2 | 2007-04-24 |
Method for forming SiC-based film and method for fabricating semiconductor device
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Method for forming insulating film, method for forming multilayer structure and method for manufacturing semiconductor device
App 20060178017 - Owada; Tamotsu ; et al. | 2006-08-10 |
Micro pattern forming method and semiconductor device manufacturing method
Grant 7,001,847 - Watatani February 21, 2 | 2006-02-21 |
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device
App 20050287790 - Owada, Tamotsu ; et al. | 2005-12-29 |
Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device
App 20050242440 - Owada, Tamotsu ; et al. | 2005-11-03 |
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device
Grant 6,949,830 - Owada , et al. September 27, 2 | 2005-09-27 |
Method for fabricating a semiconductor device
Grant 6,852,587 - Watatani February 8, 2 | 2005-02-08 |
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device
App 20040155340 - Owada, Tamotsu ; et al. | 2004-08-12 |
Micro pattern forming method and semiconductor device manufacturing method
App 20040082173 - Watatani, Hirofumi | 2004-04-29 |
Semiconductor device with multilevel wiring layers
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Semiconductor device and method of manufacturing the same
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Semiconductor Device With Multilevel Wiring Layers
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Method for fabricating a semiconductor device
Grant 6,632,739 - Watatani October 14, 2 | 2003-10-14 |
Semiconductor device with both memories and logic circuits and its manufacture
Grant 6,605,510 - Watatani August 12, 2 | 2003-08-12 |
Method for fabricating a semiconductor device
Grant 6,602,748 - Watatani August 5, 2 | 2003-08-05 |
Semiconductor device with both memories and logic circuits and its manufacture
App 20020185662 - Watatani, Hirofumi | 2002-12-12 |
Method for fabricating a semiconductor device
App 20020110981 - Watatani, Hirofumi | 2002-08-15 |
Method for fabricating a semiconductor device
App 20020110982 - Watatani, Hirofumi | 2002-08-15 |
Semiconductor device having a multilayered interconnection structure
App 20020039840 - Watatani, Hirofumi | 2002-04-04 |
Method for fabricating a semiconductor device
App 20020019086 - Watatani, Hirofumi | 2002-02-14 |
Semiconductor device having a multilayered interconnection structure
Grant 6,153,511 - Watatani November 28, 2 | 2000-11-28 |
Semiconductor device having an insulation film of low permittivity and a fabrication process thereof
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In-situ cleaning of plasma treatment chamber
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