Verhagen; Martinus Cornelis Maria

Patent Applications and Registrations

Patent applications and USPTO patent grants for Verhagen; Martinus Cornelis Maria.The latest application filed is for "lithographic apparatus and device manufacturing method involving a heater".

Company Profile

9.60.47

Verhagen; Martinus Cornelis Maria - Valkenswaard NL
Verhagen; Martinus Cornelis Maria - HT Valkenswaard NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic apparatus and device manufacturing method involving a heater Grant 11,378,893 - Cadee , et al. July 5, 2	2022-07-05
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20210063898 - CADEE; Theodorus Petrus Maria ; et al.	2021-03-04
Lithographic apparatus and device manufacturing method involving a heater Grant 10,838,310 - Cadee , et al. November 17, 2	2020-11-17
Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al.	2020-07-07
Lithographic apparatus and device manufacturing method Grant 10,599,054 - Kemper , et al.	2020-03-24
Lithographic Apparatus And Device Manufacturing Method App 20190294058 - Kemper; Nicolaas Rudolf ; et al.	2019-09-26
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20190235397 - CADEE; Theodorus Petrus Maria ; et al.	2019-08-01
Lithographic apparatus and device manufacturing method Grant 10,331,047 - Kemper , et al.	2019-06-25
Lithographic apparatus and device manufacturing method involving a heater Grant 10,254,663 - Cadee , et al.	2019-04-09
Lithographic apparatus and device manufacturing method Grant 10,248,033 - Mertens , et al.	2019-04-02
Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ; et al.	2018-07-05
Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2	2018-02-27
Lithographic Apparatus And Device Manufacturing Method App 20180039188 - MERTENS; Jeroen Johannes Sophia Maria ; et al.	2018-02-08
Lithographic Apparatus And Device Manufacturing Method App 20170357165 - KEMPER; Nicolaas Rudolf ; et al.	2017-12-14
Lithographic apparatus and device manufacturing method Grant 9,753,380 - Mertens , et al. September 5, 2	2017-09-05
Lithographic apparatus and device manufacturing method Grant 9,746,788 - Kemper , et al. August 29, 2	2017-08-29
Lithographic Apparatus And Device Manufacturing Method App 20170139333 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2017-05-18
Lithographic apparatus and device manufacturing method Grant 9,581,914 - Dierichs , et al. February 28, 2	2017-02-28
Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-16
Lithographic Apparatus And Device Manufacturing Method App 20170031250 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-02
Lithographic Apparatus And Device Manufacturing Method App 20160370714 - MERTENS; Jeroen Johannes Sophia Maria ; et al.	2016-12-22
Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2	2016-11-29
Lithographic apparatus and device manufacturing method Grant 9,488,923 - Kemper , et al. November 8, 2	2016-11-08
Lithographic apparatus and device manufacturing method Grant 9,436,097 - Mertens , et al. September 6, 2	2016-09-06
Source-collector device, lithographic apparatus, and device manufacturing method Grant 9,411,238 - Yakunin , et al. August 9, 2	2016-08-09
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder Grant 9,268,236 - Jacobs , et al. February 23, 2	2016-02-23
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor Grant 9,268,242 - Cadee , et al. February 23, 2	2016-02-23
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20160048085 - CADEE; Theodorus Petrus Maria ; et al.	2016-02-18
Lithographic apparatus and device manufacturing method involving a heater Grant 9,188,880 - Cadee , et al. November 17, 2	2015-11-17
Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ; et al.	2015-11-12
Lithographic Apparatus And Device Manufacturing Method App 20150205214 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2015-07-23
Lithographic apparatus and device manufacturing method Grant 9,025,127 - Dierichs , et al. May 5, 2	2015-05-05
Lithographic Apparatus And Device Manufacturing Method App 20150109593 - MERTENS; Jeroen Johannes Sophia Maria ; et al.	2015-04-23
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid Grant 8,958,051 - Verhagen , et al. February 17, 2	2015-02-17
Lithographic apparatus and device manufacturing method Grant 8,953,144 - Dierichs , et al. February 10, 2	2015-02-10
Lithographic apparatus and device manufacturing method Grant 8,934,082 - Mertens , et al. January 13, 2	2015-01-13
Source-collector Device, Lithographic Apparatus, And Device Manufacturing Method App 20140375974 - Yakunin; Andrei Mikhailovich ; et al.	2014-12-25
Lithographic apparatus and device manufacturing method Grant 8,902,404 - Stavenga , et al. December 2, 2	2014-12-02
Lithographic Apparatus And Device Manufacturing Method App 20140300883 - Kemper; Nicolaas Rudolf ; et al.	2014-10-09
Lithographic apparatus and device manufacturing method Grant 8,755,028 - Kemper , et al. June 17, 2	2014-06-17
Lithographic apparatus and device manufacturing method Grant 8,629,971 - Dierichs , et al. January 14, 2	2014-01-14
Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method Grant 8,610,089 - Donders , et al. December 17, 2	2013-12-17
Lithographic apparatus and device manufacturing method Grant 8,508,711 - Martens , et al. August 13, 2	2013-08-13
Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2	2013-05-21
Thermal Conditioning System For Thermal Conditioning A Part Of A Lithographic Apparatus And A Thermal Conditioning Method App 20120267550 - DONDERS; Sjoerd Nicolaas Lambertus ; et al.	2012-10-25
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method Grant 8,246,838 - Verhagen , et al. August 21, 2	2012-08-21
Lithographic Apparatus, Device Manufacturing Method And Apparatus For De-gassing A Liquid App 20120097034 - VERHAGEN; Martinus Cornelis Maria ; et al.	2012-04-26
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid Grant 8,107,053 - Verhagen , et al. January 31, 2	2012-01-31
Lithographic Apparatus And Device Manufacturing Method App 20120013874 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2012-01-19
Lithographic Apparatus And Device Manufacturing Method App 20120013870 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2012-01-19
Lithographic Apparatus And Device Manufacturing Method App 20120008115 - Verhagen; Martinus Cornelis Maria ; et al.	2012-01-12
Lithographic Apparatus And Device Manufacturing Method App 20110310367 - KEMPER; Nicolaas Rudolf ; et al.	2011-12-22
Lithographic Apparatus And Device Manufacturing Method App 20110292358 - STAVENGA; Marco Koert ; et al.	2011-12-01
Lithographic apparatus and device manufacturing method Grant 8,045,137 - Verhagen , et al. October 25, 2	2011-10-25
Lithographic Apparatus And Device Manufacturing Method App 20110249246 - MERTENS; Jeroen Johannes Sophia Maria ; et al.	2011-10-13
Lithographic apparatus and device manufacturing method Grant 8,031,325 - Kemper , et al. October 4, 2	2011-10-04
Lithographic apparatus and device manufacturing method Grant 8,018,573 - Stavenga , et al. September 13, 2	2011-09-13
Lithographic apparatus and device manufacturing method Grant 8,004,652 - Mertens , et al. August 23, 2	2011-08-23
Fluid Filtration Method, Fluid Filtered Thereby, Lithographic Apparatus And Device Manufacutring Method App 20110136064 - Verhagen; Martinus Cornelis Maria ; et al.	2011-06-09
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method Grant 7,914,687 - Verhagen , et al. March 29, 2	2011-03-29
Lithographic Apparatus And Device Manufacturing Method App 20100265476 - Dierichs; Marcel Mathijs Theodore Marie ; et al.	2010-10-21
Lithographic Apparatus And Device Manufacturing Method App 20100245791 - JACOBS; Johannes Henricus Wilhelmus ; et al.	2010-09-30
Lithographic apparatus and device manufacturing method having liquid evaporation control Grant 7,804,575 - Cadee , et al. September 28, 2	2010-09-28
Lithographic apparatus and device manufacturing method Grant 7,751,027 - Jacobs , et al. July 6, 2	2010-07-06
Lithographic Apparatus And Device Manufacturing Method App 20100149514 - KEMPER; Nicolaas Rudolf ; et al.	2010-06-17
Lithographic apparatus and device manufacturing method Grant 7,733,459 - Dierichs , et al. June 8, 2	2010-06-08
Lithographic apparatus and device manufacturing method Grant 7,701,550 - Kemper , et al. April 20, 2	2010-04-20
Lithographic Apparatus And Device Manufacturing Method App 20100045951 - MARTENS; Arjan Hubrecht Josef Anna ; et al.	2010-02-25
Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2	2009-10-13
Lithographic Apparatus, Device Manufacturing Method And Apparatus For De-gassing A Liquid App 20080314249 - VERHAGEN; Martinus Cornelis Maria ; et al.	2008-12-25
Lithographic apparatus and device manufacturing method App 20080291407 - Verhagen; Martinus Cornelis Maria ; et al.	2008-11-27
Lithographic apparatus and device manufacturing method App 20080259292 - Mertens; Jeroen Johannes Sophia Maria ; et al.	2008-10-23
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid Grant 7,428,038 - Verhagen , et al. September 23, 2	2008-09-23
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method App 20080187874 - Verhagen; Martinus Cornelis Maria ; et al.	2008-08-07
Lithographic apparatus and device manufacturing method Grant 7,397,533 - Verhagen , et al. July 8, 2	2008-07-08
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method Grant 7,378,025 - Verhagen , et al. May 27, 2	2008-05-27
Lithographic apparatus and device manufacturing method Grant 7,379,155 - Mertens , et al. May 27, 2	2008-05-27
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,378,669 - Verhagen May 27, 2	2008-05-27
Lithographic apparatus and device manufacturing method Grant 7,271,873 - Lallemant , et al. September 18, 2	2007-09-18
Lithographic apparatus and device manufacturing method App 20070070315 - Jacobs; Johannes Henricus Wilhelmus ; et al.	2007-03-29
Lithographic apparatus and device manufacturing method App 20060232754 - Lallemant; Nicolas Alban ; et al.	2006-10-19
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid App 20060192929 - Verhagen; Martinus Cornelis Maria ; et al.	2006-08-31
Lithographic apparatus and device manufacturing method App 20060187427 - Stavenga; Marco Koert ; et al.	2006-08-24
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method App 20060186057 - Verhagen; Martinus Cornelis Maria ; et al.	2006-08-24
Lithographic apparatus and device manufacturing method Grant 7,072,021 - Lallemant , et al. July 4, 2	2006-07-04
Lithographic apparatus and device manufacturing method App 20060119809 - Verhagen; Martinus Cornelis Maria ; et al.	2006-06-08
Lithographic apparatus and device manufacturing method App 20060087630 - Kemper; Nicolaas Rudolf ; et al.	2006-04-27
Lithographic apparatus and device manufacturing method App 20060082746 - Mertens; Jeroen Johannes Sophia Maria ; et al.	2006-04-20
Lithographic apparatus and device manufacturing method App 20060038968 - Kemper; Nicolaas Rudolf ; et al.	2006-02-23
Lithographic apparatus and device manufacturing method App 20060033898 - Cadee; Theodorus Petrus Maria ; et al.	2006-02-16
Lithographic apparatus and device manufacturing method App 20050254025 - Lallemant, Nicolas Alban ; et al.	2005-11-17
Lithographic apparatus, measurement system, and device manufacturing method App 20050168714 - Renkens, Michael Jozef Mathijs ; et al.	2005-08-04
Lithographic apparatus and device manufacturing method App 20050078286 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2005-04-14
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050035307 - Verhagen, Martinus Cornelis Maria	2005-02-17