loadpatents
Patent applications and USPTO patent grants for Verghese; Mohith.The latest application filed is for "low temperature deposition of pure molybenum films".
Patent | Date |
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Low Temperature Deposition Of Pure Molybenum Films App 20220270883 - Bhatnagar; Kunal ;   et al. | 2022-08-25 |
Reactant vaporizer and related systems and methods Grant 11,377,732 - Verghese , et al. July 5, 2 | 2022-07-05 |
Quartz crystal microbalance concentration monitor Grant 11,359,286 - Winkler , et al. June 14, 2 | 2022-06-14 |
Ampoule For A Semiconductor Manufacturing Precursor App 20220178020 - White; Carl ;   et al. | 2022-06-09 |
Quartz Crystal Microbalance Concentration Monitor App 20210340674 - Winkler; Jereld ;   et al. | 2021-11-04 |
Reactant vaporizer and related systems and methods Grant 10,876,205 - Verghese , et al. December 29, 2 | 2020-12-29 |
Reactant Vaporizer And Related Systems And Methods App 20200340109 - Verghese; Mohith ;   et al. | 2020-10-29 |
Cross-flow reactor and method Grant 10,529,542 - White , et al. J | 2020-01-07 |
Reaction system for growing a thin film Grant 10,468,291 - Verghese , et al. No | 2019-11-05 |
Semiconductor Processing Apparatus And Methods For Monitoring And Controlling A Semiconductor Processing Apparatus App 20190276934 - Verghese; Mohith ;   et al. | 2019-09-12 |
Selective etching of reactor surfaces Grant 10,358,599 - Raghavan , et al. | 2019-07-23 |
Multi-zone Reactor, System Including The Reactor, And Method Of Using The Same App 20190157054 - White; Carl Louis ;   et al. | 2019-05-23 |
Multi-zone reactor, system including the reactor, and method of using the same Grant 10,276,355 - White , et al. | 2019-04-30 |
Reactant Vaporizer And Related Systems And Methods App 20180094350 - Verghese; Mohith ;   et al. | 2018-04-05 |
Reactant Vaporizer And Related Systems And Methods App 20180094351 - Verghese; Mohith ;   et al. | 2018-04-05 |
Methods of vapor deposition with multiple vapor sources Grant 9,873,942 - Pomarede , et al. January 23, 2 | 2018-01-23 |
Selective Etching Of Reactor Surfaces App 20170009136 - Raghavan; Srini ;   et al. | 2017-01-12 |
Selective etching of reactor surfaces Grant 9,481,937 - Raghavan , et al. November 1, 2 | 2016-11-01 |
Cross-flow Reactor And Method App 20160268102 - White; Carl Louis ;   et al. | 2016-09-15 |
Multi-zone Reactor, System Including The Reactor, And Method Of Using The Same App 20160268107 - White; Carl Louis ;   et al. | 2016-09-15 |
Reaction System For Growing A Thin Film App 20160233124 - Verghese; Mohith ;   et al. | 2016-08-11 |
Reaction system for growing a thin film Grant 9,359,672 - Verghese , et al. June 7, 2 | 2016-06-07 |
Multiple Vapor Sources For Vapor Deposition App 20160097121 - Pomarede; Christophe ;   et al. | 2016-04-07 |
Multiple vapor sources for vapor deposition Grant 9,238,865 - Pomarede , et al. January 19, 2 | 2016-01-19 |
Semiconductor device dielectric interface layer Grant 9,177,784 - Raisanen , et al. November 3, 2 | 2015-11-03 |
High concentration water pulses for atomic layer deposition Grant 9,117,773 - Shero , et al. August 25, 2 | 2015-08-25 |
Gas mixer and manifold assembly for ALD reactor Grant 8,784,563 - Schmidt , et al. July 22, 2 | 2014-07-22 |
Semiconductor Device Dielectric Interface Layer App 20140159170 - Raisanen; Petri ;   et al. | 2014-06-12 |
Semiconductor device dielectric interface layer Grant 8,728,832 - Raisanen , et al. May 20, 2 | 2014-05-20 |
Semiconductor Device Dielectric Interface Layer App 20130292807 - Raisanen; Petri ;   et al. | 2013-11-07 |
Multiple Vapor Sources For Vapor Deposition App 20130203267 - Pomarede; Christophe ;   et al. | 2013-08-08 |
Gas mixer and manifold assembly for ALD reactor Grant 8,465,801 - Schmidt , et al. June 18, 2 | 2013-06-18 |
System for controlling the sublimation of reactants Grant 8,309,173 - Tuominen , et al. November 13, 2 | 2012-11-13 |
Reaction System For Growing A Thin Film App 20120266821 - Verghese; Mohith ;   et al. | 2012-10-25 |
Reactive site deactivation against vapor deposition Grant 8,293,658 - Shero , et al. October 23, 2 | 2012-10-23 |
Reaction system for growing a thin film Grant 8,211,230 - Verghese , et al. July 3, 2 | 2012-07-03 |
Gas mixer and manifold assembly for ALD reactor Grant 8,152,922 - Schmidt , et al. April 10, 2 | 2012-04-10 |
Gas Mixer And Manifold Assembly For Ald Reactor App 20120079984 - Schmidt; Ryan M. ;   et al. | 2012-04-05 |
Reactive Site Deactivation Against Vapor Deposition App 20110198736 - SHERO; ERIC ;   et al. | 2011-08-18 |
System For Controlling The Sublimation Of Reactants App 20110076402 - Tuominen; Marko ;   et al. | 2011-03-31 |
Reactor surface passivation through chemical deactivation Grant 7,914,847 - Verghese , et al. March 29, 2 | 2011-03-29 |
High Concentration Water Pulses For Atomic Layer Deposition App 20110053383 - Shero; Eric J. ;   et al. | 2011-03-03 |
Method for controlling the sublimation of reactants Grant 7,851,019 - Tuominen , et al. December 14, 2 | 2010-12-14 |
Selective Etching Of Reactor Surfaces App 20100275952 - Raghavan; Srini ;   et al. | 2010-11-04 |
Reactor surface passivation through chemical deactivation Grant 7,799,135 - Verghese , et al. September 21, 2 | 2010-09-21 |
Reactant source vessel Grant D614,153 - Fondurulia , et al. April 20, 2 | 2010-04-20 |
System for controlling the sublimation of reactants Grant 7,601,225 - Tuominen , et al. October 13, 2 | 2009-10-13 |
Gas Mixer And Manifold Assembly For Ald Reactor App 20090196992 - Schmidt; Ryan M. ;   et al. | 2009-08-06 |
System For Controlling The Sublimation Of Reactants App 20080274276 - Tuominen; Marko ;   et al. | 2008-11-06 |
Reactor Surface Passivation Through Chemical Deactivation App 20070098894 - Verghese; Mohith ;   et al. | 2007-05-03 |
Reactor Surface Passivation Through Chemical Deactivation App 20070084404 - Verghese; Mohith ;   et al. | 2007-04-19 |
Reaction system for growing a thin film App 20060266289 - Verghese; Mohith ;   et al. | 2006-11-30 |
Reactor surface passivation through chemical deactivation Grant 7,118,779 - Verghese , et al. October 10, 2 | 2006-10-10 |
System For Controlling The Sublimation Of Reactants App 20060024439 - TUOMINEN; MARKO ;   et al. | 2006-02-02 |
Gas mixer and manifold assembly for ALD reactor App 20050092247 - Schmidt, Ryan M. ;   et al. | 2005-05-05 |
Reactor surface passivation through chemical deactivation App 20040221807 - Verghese, Mohith ;   et al. | 2004-11-11 |
System for controlling the sublimation of reactants App 20030232138 - Tuominen, Marko ;   et al. | 2003-12-18 |
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